TW201808535A - Blade dressing mechanism, cutting apparatus provided with the same, and blade dressing method using blade dressing mechanism - Google Patents

Abstract

To provide a dressing mechanism that can achieve dressing of a workpiece cutting blade while saving space, a cutting device comprising such a dressing mechanism, and a blade dressing method using the dressing mechanism. A dresser 10 to perform dressing of a blade 3 for workpiece cutting is provided to be able to rotate about a second axis L2 that is parallel to a first axis L1 of the blade 3. In addition, the outer circumferential face 11 of the dresser is provided with, in the circumferential direction, a dress area 12 that is in sliding contact with a cutting portion 3a of the blade and a relief area 13 that is not in contact with the cutting portion when same are facing the outer circumferential surface of the blade. Selectively switching between a dressing state by way of the dress area and a non-dressing state by way of the relief area is possible by rotating the dresser about the axis L2.

Description

Tool trimming mechanism, cutting device provided with the same, and method for trimming tool using the same

The present invention relates to a dressing mechanism for dressing a blade for cutting a workpiece, a cutting device having such a dressing mechanism, and a dressing method for a blade using the dressing mechanism.

Conventionally, in order to perform cutting processing such as dicing or grooving on a workpiece such as a semiconductor wafer or an electronic component material, a cutting device having a blade for cutting a workpiece is used. Next, as such a cutting device, the blade has a cutting edge portion formed by fixing abrasive grains to the outer peripheral edge of the outer peripheral surface including the base material, and the blade is wound around the workpiece while being placed on the workpiece transfer table. It is known that the rotating shaft rotates at a high speed while making contact with each other, so that the abrasive grains exposed from the surface of the blade, that is, the surface of the abrasive grain layer, become cutting edges, and a predetermined cutting process is performed on the workpiece.

By the way, in the aforementioned cutting device, the workpiece is repeatedly performed In the cutting process, the cutting chips generated from the workpiece accumulate between the abrasive particles on the surface of the abrasive particle layer of the blade, causing hole plugging, and the abrasive particles that become the cutting edge are also worn and the ends become smooth. The cutting quality will gradually become dull, but unfortunately the cutting performance will decrease. Here, for example, in the cutting device described in Patent Document 1, a plate-shaped dresser is provided on the dressing table, and the dresser is cut into the blade portion of the blade to perform the dressing (shaping) of the blade portion, and then the solution is eliminated. The holes between the abrasive grains on the surface of the abrasive grain layer plug, or the abrasive grains at the end are dislodged, creating new abrasive grains.

However, in the description of Patent Document 1, when the dresser is mounted on a dressing table, the dressing table is shifted to a dressing position where the dresser is used to dress the blade, and the dresser is moved away from the blade. It is necessary between locations. For this reason, it is necessary to ensure that the space for moving the dressing table is in the cutting device, which leads to an increase in the size of the device.

[Prior technical literature] [Patent Literature]

[Patent Document 1] Japanese Patent Laid-Open No. 2006-159334

Here, the technical problem of the present invention is to provide a dressing mechanism capable of realizing dressing of a cutting blade for a workpiece in a space-saving manner, a cutting device having such a dressing mechanism, and a dressing method of the blade using the dressing mechanism.

In order to solve the above-mentioned problems, the dressing mechanism in the cutting device of the present invention is a dressing mechanism for dressing a cutting edge on the outer peripheral edge of the outer peripheral surface around a shaft formed in a disc-shaped blade including a grinding device. The trimming mechanism has a trimmer for trimming the blade portion through sliding contact with the blade portion of the blade, a trimmer driving portion for driving the trimmer, and mounting the trimmer and the trimmer drive. The support frame of the trimmer; the trimmer has an outer peripheral surface about its axis, and is supported to rotate freely about the axis by using the support frame; the outer peripheral surface of the trimmer is used to face the outer periphery of the blade The trimming range slidingly in contact with the blade portion and the concave clearance range for non-contact with the outer peripheral surface of the blade across the gap are provided along the circumferential direction; driven by the trimmer; The part rotates the dresser around an axis, and thus, a trimming state caused by the trimming range and a non-dressing state caused by the clearance range can be selectively switched.

At this time, it is preferable that one circumference of the outer peripheral surface of the dresser is constituted by using one of the dressing range formed by the arc surface and one of the clearance range; the clearance portion is formed It extends the groove shape covering the entire length of the dresser in the axial direction; the angle range of the dressing range centered on the shaft of the dresser is greater than the angle range of the clearance range.

Further, it is preferable that the dresser driving section is constituted by: a rotation driving section that rotates the dresser around its axis; and In the horizontal direction, the straightener is respectively displaced in a linear driving portion in a direction orthogonal to the axis and a direction parallel to the axis.

Next, a cutting device provided with the above-mentioned dressing mechanism is configured to include a disc-shaped blade having a blade portion formed on an outer peripheral edge of an outer peripheral surface including a periphery of a shaft and rotationally driven around the shaft, and a shaft facing the shaft of the blade. For a bed in a right-angle direction, the workpiece of the bed is cut by the cutting edge of the blade; the shaft of the dresser and the shaft of the blade are such that the dressing range of the dresser faces the outer periphery of the blade The blade portion maintains sliding contact at a specified distance in the dressing range and is arranged to be parallel to each other; the dresser driving portion is used to rotate the dresser, and thus, the outer peripheral surface of the blade can be selectively opposed When the trimming range of the aforementioned trimmer and the clearance range are made; when the trimming range of the aforementioned trimmer faces the outer periphery of the blade, the trimming of the blade portion is performed so that the clearance range of the trimmer and the outer diameter of the blade When the peripheral faces are facing, the trimming of the aforementioned blade portion is stopped.

On the other hand, a blade dressing method uses the above-mentioned dressing mechanism; wherein, when the blade is rotated about its axis, when cutting a workpiece, the dressing range of the dresser is made to face the outer periphery of the blade, while When the dresser rotates around the axis, the blade portion of the blade is sequentially slidably contacted in the circumferential direction with respect to the dressing range, and the blade portion of the blade is then trimmed; when the blade leaves the workpiece and the workpiece is not processed, The clearance range of the dresser is caused to face the outer periphery of the blade in a non-contact state to stop the rotation of the dresser.

As described above, in the present invention, on the outer peripheral surface of the dresser, The trimming range for slidingly contacting the outer edge of the blade to the blade portion of the blade and the concave clearance range in a non-contact state with the outer peripheral surface of the blade through the gap are along its circumference. It is set in the direction, and the dresser is rotated around the shaft by the dresser driving part, and thus the dressing state caused by the dressing range and the non-dressing state caused by the clearance range can be selectively switched. Therefore, according to the present invention, it is possible to trim a cutting insert for a workpiece in a space-saving manner, and to suppress an increase in size of the cutting device.

1‧‧‧ cutting device

2‧‧‧ Workpiece Handling Bed

3‧‧‧ Blade

3a‧‧‧Blade of the blade

10‧‧‧ Dresser

11‧‧‧ Outer peripheral surface of the dresser

12‧‧‧ trimming range

13‧‧‧ clearance range

20‧‧‧ Trimming mechanism

L1‧‧‧ blade rotation axis (1st axis)

L2‧‧‧Rotary axis of dresser (2nd axis)

W‧‧‧ Workpiece

[Fig. 1] An enlarged side view showing an embodiment of a cutting device provided with a dressing mechanism according to the present invention, schematically showing a state before cutting a workpiece.

[Fig. 2] An enlarged side view schematically showing a state after the workpiece cutting is started in the aforementioned cutting device.

3 is an enlarged side view schematically showing a state in the middle of cutting a workpiece in the cutting device.

Fig. 4 is an enlarged side view schematically showing a state at the end of cutting of a workpiece in the cutting device.

5 is a perspective view schematically showing a dressing mechanism in the cutting device.

In the following, detailed descriptions are provided with reference to FIGS. 1 to 5. An embodiment of the cutting device 1 of the dressing mechanism of the present invention. The cutting device 1 according to the present embodiment is configured by a workpiece transfer table 2 for mounting a workpiece W such as a semiconductor wafer, and a disk having a blade portion 3a as an outer peripheral edge around the first axis L1.状 的 lade 3. Then, by rotating the blade 3 about its axis L1, the workpiece W on the bed 2 can be cut by the blade portion 3a.

The cutting device 1 further includes a dressing mechanism 20 including a dresser 10 for dressing (shaping) the blade portion 3 a of the blade 3. Next, by slidingly bringing the dresser 10 of the dressing mechanism 20 into contact with the blade portion 3a of the blade 3, the hole plug of the blade portion 3a or the blade portion 3a that spontaneously breaks can be eliminated. In addition, as the cutting device 1, for example, a cutting device that cuts a workpiece W such as a semiconductor wafer or the like and divides it into individual pieces.

The workpiece conveyance bed 2 is a plate-like body that can be linearly reciprocated in the X-axis direction (left-right direction in the figure) in the horizontal direction by a driving unit (not shown) as shown in FIGS. 1 to 4. When the workpiece W is mounted on the table 2, the workpiece W is mounted on a workpiece mounting surface 2 a provided on the upper surface of the table 2 and fixed by a suitable method. The method for fixing the workpiece W to the workpiece mounting surface 2a may be, for example, vacuum suction, or a fixture using a fixing jig, or a fixture using an adhesive or the like. .

The blade 3 includes, for example, a thin disc-shaped substrate 3b made of a metal such as stainless steel or aluminum, and includes a peripheral edge outside the peripheral surface to form the blade portion 3a. More specifically, the blade portion 3a, It is formed by using abrasive bonding (for example, diamond or cBN (cubic boron nitride)) made of a suitable bonding material such as resin bonding or metal bonding such as metal plating, etc. (preferably fine The superabrasive particles are fixed on the substrate 3b by the outer peripheral surface around the axis L1, and the outer peripheral portion of the outer peripheral surface surrounding the outer peripheral surface and orthogonal to the axis L1.

As shown in FIG. 5, a mounting hole 3c is formed in the central portion of the substrate 3b and penetrates in the thickness direction of the substrate. The end of a mandrel (not shown) is detachably mounted in the mounting hole 3c. Next, the blade 3 is configured to rotate at a predetermined rotation speed in a predetermined rotation direction around its axis L1 (around the mandrel) so that the mandrel rotates through a drive unit such as a motor (not shown).

Next, the trimming mechanism 20 in the present embodiment will be specifically described. As shown in FIG. 5, the dressing mechanism 20 includes the dresser 10 for dressing the blade part 3 by sliding contact with the blade part 3 a of the blade 3, and a dresser driving part 30 for driving the dresser 10. 40, 50, and support frames 21, 22, 23, 24 for these dressers 10 and dresser drive sections 30, 40, and 50.

The dresser drive unit is configured by a rotary drive unit 50 that rotates the dresser 10 around a second axis L2 that is parallel to the first axis L1 of the blade 2 and makes the dresser 10 horizontally respectively. The first linear driving section 30 and the second linear driving section 40 are reciprocated in the X-axis direction (direction orthogonal to the axis L2) and the Y-axis direction (direction parallel to the axis L2) perpendicular thereto.

In addition, the support frame includes a first frame 21 on which the first linear driving unit 30 is mounted, and is disposed above the work transfer bed 2 to extend in a horizontal direction; and an X-axis sliding bed 22 is mounted The second linear drive section 40 is provided, and is connected to the first linear drive section 30, and is displaced in the X-axis direction relative to the first frame 21; the Y-axis sliding bed 23 is connected to the second linear drive section. 40, which is displaced in the Y-axis direction with respect to the X-axis sliding table 22; and a pair of second frames 24, 24 to which the base end (upper end) is fixed to the Y-axis sliding table 23, along the Z-axis Extend to the bottom.

Next, at the end portions (lower end portions) of the pair of second frames 24 and 24, both side ends in the axis L2 direction of the dresser 10 are supported to be rotatable and attachable and detachable. The rotation driving unit 50 that rotates the dresser 10 is provided across the Y-axis sliding table 23 and the second frame 24 as described later. Furthermore, the first frame 21 is integrally formed by using a pair of opposed plates 21a, 21a extending in the X-axis direction and parallel to each other, and a pair of opposed plates extending in the Y-axis direction. The connecting plate 21b between 21a and 21a. Next, the first linear driving unit 30 is mounted on one of the facing plates 21a and 21a.

As shown in FIG. 5, the first linear drive unit 30 includes an X-axis guide base 31 provided on one of the facing plates 21 a of the first frame 21 so as to extend in the X-axis direction, and disposed on the X-axis. A motor 32 for X-axis feed at one end in the longitudinal direction of the shaft guide base 31. Next, on the X-axis guide base 31, one end side in the longitudinal direction (Y-axis direction) of the X-axis sliding bed 22 is supported so as to be reciprocable. Made in the X-axis direction.

In the present embodiment, the first linear drive unit 30 can be configured by, for example, a ball screw mechanism or the like formed by the motor 32 and a ball screw (not shown) provided inside the X-axis guide base 31. In this case, a moving member (not shown) connected to the X-axis slide bed 22 is screwed to the inside of a ball screw through a long groove 31a provided in the X-axis guide base 31, and the process is thereby completed. The rotational driving force of the motor 32 causes the X-axis slide bed 22 to reciprocate in the X-axis direction. Moreover, on the other frame 21a of the pair of facing plates 21a and 21a, the guide rail 33 is provided to extend in the X-axis direction, and the other end side in the longitudinal direction of the X-axis sliding bed 22 is borrowed. This guide 22 is guided so as to be freely slidable.

Further, on the X-axis sliding bed 22, the second linear driving unit 40 includes a Y-axis guide base 41 provided to extend in the Y-axis direction, and a Y-axis guide base 41 provided on the Y-axis guide base 41. A motor 42 for Y-axis feeding at one end in the longitudinal direction. Next, on the Y-axis guide base 41, the Y-axis sliding bed 23 is supported so as to be reciprocable in the Y-axis direction.

The second linear driving unit 40 may be configured by a ball screw mechanism similarly to the first linear driving unit 30 described above. In this case, similar to the X-axis guide base 31, a moving member (not shown) connected to the Y-axis slide bed 23 is screwed by a long groove 41a provided in the Y-axis guide base 41. The ball screw that is closed to the inside causes the Y-axis slide table 23 to reciprocate with the rotational driving force of the motor 42. The displacement is in the Y-axis direction.

On the other hand, the rotation driving unit 50 includes a motor 51 disposed on the Y-axis sliding bed 23 and a rotation driving force for transmitting the motor 51 to the Y-axis sliding bed 23. The aforementioned second frames 24 and 24 hang down and are supported as a power transmission mechanism of the dresser 10 which can freely rotate. In this embodiment, the power transmission mechanism is configured by a pulley 52 mounted above the motor shaft of the motor 51, a pulley 53 mounted below the support shaft of the dresser 10, and a pair of these Pulley-shaped endless belt 54. Next, the rotation control force of the motor 51 is transmitted from the upper pulley 52 through the belt 54 to the lower pulley 53 via the rotation control, so that the dresser 10 can be rotated at an arbitrary speed in an arbitrary rotation direction around the axis L2. Or stop at any angular position.

In this way, the dresser driving section causes the dresser 10 to move linearly in the X-axis direction (direction perpendicular to the axis L2) in the horizontal direction through the first linear driving section 30 and the second linear driving section 40 and The two-axis direction of the Y-axis direction (the direction parallel to the axis L2) can be displaced to an arbitrary position, and the position can be rotated and controlled around the axis L2 via the rotation driving unit 50.

As shown in FIG. 1 to FIG. 5, the aforementioned dresser 10 is a rotary dresser having an outer peripheral surface 11 around the axis L2, the axis L2 extending in the Y-axis direction of the dresser 10 and the axis L1 of the aforementioned blade 3 Are aligned parallel to each other and arranged in a slightly horizontal direction. For this reason, these dressers 10 and the blades 3 are arranged in a horizontal row in the X-axis direction. The aforementioned dresser 10 is A dressing material formed by combining a plurality of abrasive grains with a bonding material to form an integrated body. The outer peripheral surface 11 is made to face the outer periphery of the blade 3 and the blade portion 3a is brought into sliding contact with each other. The edge portion 3a is trimmed.

As the abrasive grains, for example, white alundum or green carborundum can be used. As the binder, a suitable binder such as resin bond, vitrified bond, or metal bond can be used. It should be noted that the dresser 10 does not necessarily mean the necessity of integrally forming the dressing material as in this embodiment, but may be a dressing material layer having a certain depth in a dressing range 12 described later.

Further, when the outer peripheral surface 11 of the trimmer 10 faces the outer periphery of the blade 3, the trimming range 12 for slidingly contacting the blade portion 3a of the blade 3 to trim the blade portion 3a, and A recessed clearance range 13 for forming a non-contact state with the outer peripheral surface of the blade 3 through a gap is formed along its circumferential direction. The trimming range 12 and the clearance range 13 are connected in the circumferential direction of the outer peripheral surface 11, and one circle around the axis L2 of the outer peripheral surface is constituted by: one trimming formed by an arc surface A range 12 and a clearance range formed by a groove extending over the entire length of the axis L2 direction.

At this time, the angle range of the trimming range 12 centered on the axis L2 is formed to be larger than the angle range of the clearance range 13. That is, the angle range of the trimming range 12 is an obtuse angle, and the angle range of the clearance range 13 is an acute angle. Moreover, in the clearance range 13, the groove bottom 13 a is centered on the rotation axis L2 and forms an arc with the trimming portion 12. The surfaces are concentric circular arc surfaces, and the pair of side walls 13 b are formed radially in the radial direction of the dresser 10.

Next, when the axis L2 of the dresser 10 and the axis L1 of the blade 3 cause the dressing range 12 of the dresser 10 to face the outer periphery of the blade 3, the blade portion 3a slides into contact with the dressing range 12, similarly. When the clearance range 13 is faced, the blade portion 3a is in a non-contact state with the outer peripheral surface of the blade 3 via the clearance, and is maintained at a predetermined distance and arranged parallel to each other. Furthermore, the rotational speed of the dresser 10 during dressing takes into account the feed speed of the bed 2 and so on. In order to keep the blade portion 3a of the insert 3 slidingly in contact with the dressing range during cutting, it is set to be more than The rotation speed of the blade 3 should be sufficiently small.

For this reason, when the dressing range 12 of the dresser 10 faces the outer periphery of the blade 3, the cutting edge 3a of the blade 3 is cut into the dressing material of the dressing range 12, and the dressing of the cutting edge 3a is performed (FIGS. 2 and 2). image 3). However, when the clearance range 13 faces the outer periphery of the blade, the cutting edge portion 3a of the blade faces the outer peripheral surface of the trimmer 10 in the clearance range 13 (that is, the groove bottom 13a and The opposite side wall 13b) is in a non-contact state, and the dressing of the blade portion 3a is stopped (avoided) (FIGS. 1 and 4).

Here, the angular range of the clearance range 13 in the aforementioned trimmer 10, that is, the circumferential length of the groove bottom 13a, or the groove depth, that is, the radial length of the side wall 13b, cooperates with the trimmer 10 and the axis L1 of the blade 3, The distance between L2 and the diameter of the dresser 10 and the blade 3 can be appropriately set. Moreover, in this embodiment, the diameter of the dressing range 12 in the dresser 10 is smaller than the diameter of the blade 3, so the dresser Even if the axis L2 of 10 and the axis L1 of the insert 3 are horizontally arranged, during the cutting process of the workpiece W, the insert 3 is on the workpiece W, and the dresser 10 does not contact the workpiece W passing directly below it.

In this way, in the present embodiment, the dresser 10 is rotated around the axis L2 by the rotation driving unit 50, and the dressing state of the blade 3 and the clearance range 13 can be selectively switched through the dressing range 12 The resulting non-trimmed state of the blade 3. Therefore, dressing of the insert 3 can be realized in a space-saving manner, and the size of the cutting device 1 can be suppressed.

Next, the cutting operation of the workpiece W caused by the blade 3 in the cutting device 1 and the dressing operation of the insert 3 by the dresser 10 will be specifically described with reference to FIGS. 1 to 4.

First, the plate-shaped workpiece W is mounted on the workpiece mounting surface 2 a of the workpiece transfer table 2, and the rotation speed of the blade 3 and its rotation direction, and the feed speed or the feed amount to the X-axis direction of the workpiece transfer table 2 are appropriately set. Wait. At this time, in order to adjust the cutting amount of the blade 3 of the dresser 10 or the cutting position in the direction of the rotation axis L2 of the dresser 10, the first and second linear driving units 30 and 40 are used to perform The position of the dresser 10 in the X-axis and Y-axis directions is adjusted.

After setting such various cutting conditions, the mandrel is rotated by driving a motor (not shown) for rotating the blade, and the blade 3 attached to the end of the mandrel is rotated at a high speed about its axis L1. The stage 2 moves in the X-axis direction toward the blade 3 at a specified feed speed. First, as shown in FIG. 1, the workpiece conveying table 2 is located on the front side in the bed feeding direction than the blade 3, and is at the edge of the blade 3. In the non-machined state where 3a is separated from the workpiece W, the dresser 10 is stopped in a state where the clearance range 13 of the dresser is directed to the blade 3 side in the horizontal direction. At this time, the outer peripheral surface 11 (the groove bottom 13a and the pair of side walls 13b) of the dresser 10 in the clearance range 13 and the outer peripheral surface of the blade are in a non-contact state through the gap. Prior to the cutting process, in principle, no dressing of the cutting edge portion 3a by the dresser 10 is performed.

Next, the workpiece is further fed to the workpiece transfer table 2, and as shown in FIG. 2, the cutting process of the workpiece W caused by the blade portion 3 a is started, and the motor 51 of the rotation driving unit 50 is driven in response to this. At this time, the dresser 10 is rotated to be opposite to the blade 3 so that the dressing range 12 is oriented horizontally and faces the outer periphery of the blade. In addition, the rotation speed of the dresser 10 is based on the cutting process of the workpiece W, and the cutting edge portion 3a is always in sliding contact with the dressing range 12 to perform the dressing. Furthermore, in order to ensure the necessary cutting edge portion 3a of the dressing range 12, Trimming is performed by sliding contact speed, and various parameters are set in consideration of the rotation speed of the blade 3, the material of the workpiece W, the circumferential length of the trimming range 12, the cutting processing time, and the like.

In this way, as shown in FIG. 3, the dresser 10 is rotated around the axis L2, and the dressing range 12 of the rotating blade 3 is brought into sliding contact with the circumference in the circumferential direction. As a result, the cutting part 3a is subjected to cutting processing. The workpiece W is trimmed on one side. At this time, a trimming groove of a predetermined depth is formed in the trimming range 12 of the trimmer 10 along the circumferential direction, and the entire blade portion 3a formed on the outer peripheral edge of the blade 3 is trimmed.

Thereby, the workpiece conveyance bed 2 is further moved in the bed feed direction, as shown in FIG. 4. At the trailing end (the right end in the figure), the cutting edge portion 3a of the insert 3 is separated, and the machining of the cutting line in the first row of the workpiece W is finished. In this case, the dresser 10 is rotated by turning the clearance range 13 toward the blade 3 side in the horizontal direction again, and stopping with the clearance range 13 facing the outer peripheral surface of the blade 3. The turning of the blade 3 also stops the trimming.

In this way, in the cutting device 1 described above, the cutting of the workpiece W while cutting the workpiece W through the cutting portion 3a of the dresser 3 enables more efficient and excellent cutting. Further, the dressing range 12 of the dresser 10 is formed on the outer peripheral surface 11 formed by an arc surface, and the dresser 10 can be selected relative to the blade portion 3a of the blade 3 by rotating the dresser 10 only about the axis L2. Due to the nature of the changeover, the trimming range 12 faces the trimming state, or the aforementioned clearance range 13 faces the non-trimming state. The trimming mechanism can be miniaturized, and the trimming of the blade 3 can be achieved in a space-saving manner. As a result, It is possible to suppress an increase in size of the cutting device 1.

The trimming mechanism and cutting device of the present invention have been described above, but the present invention is not limited to the foregoing embodiments, and various design changes can be made without departing from the scope of the patent application.

For example, the trimming of the insert 3 using the aforementioned trimmer 10 is not limited to the cutting process of the workpiece W. When the insert 3 is replaced with a new one, etc., it is also possible to perform cutting if trimming is necessary before cutting. The timing is shown in FIG. 1 before processing. Moreover, in the present embodiment, the trimmer 10 is mainly used to shape the blade portion 3a of the blade 3. However, for example, the trimmer 10 may have a shaper that corrects the shape of the blade portion 3a of the blade 3.

Moreover, regarding the arrangement position of the aforementioned dresser 10, in this embodiment, the axis L2 of the dresser 10 and the axis L1 of the blade 3 are arranged in a slightly horizontal direction, but it is not limited thereto. For example, these axes L1 and L2 are also It can be arrange | positioned up and down in a vertical direction (Z-axis direction). Moreover, the dresser 10 is disposed further behind the blade 3 in the bed feed direction, but may be disposed more forward than the blade 3.

Moreover, in the cutting process of the workpiece W, in the present embodiment, while the dresser 10 is rotated, the cutting direction of the blade 3 is reversed, and the cutting of the cutting edge portion 3a of the blade 3 is performed; Trimming is performed by rotating the blade 3 in the same direction as the rotation direction of the blade 3.

1‧‧‧ cutting device

3‧‧‧ Blade

3a‧‧‧Blade

3b‧‧‧ substrate

3c‧‧‧Mounting hole

10‧‧‧ Dresser

11‧‧‧ Outer peripheral surface of the dresser

12‧‧‧ trimming range

13‧‧‧ clearance range

13a‧‧‧Ditch bottom

13b‧‧‧ sidewall

20‧‧‧ Trimming mechanism

21, 22, 23, 24‧‧‧ support frame

21a‧‧‧ facing plate

21b‧‧‧Link board

30‧‧‧The first linear drive unit

31‧‧‧X-axis guide base

31a‧‧‧Changou

32‧‧‧ Motor

33‧‧‧Guide

40‧‧‧Second linear drive unit

41‧‧‧Y-axis guide base

41a‧‧‧Changou

42‧‧‧ Motor

50‧‧‧Rotary drive unit

51‧‧‧Motor

52‧‧‧ upper pulley

53‧‧‧Bottom wheel

54‧‧‧Endless belt

L1‧‧‧ blade rotation axis (1st axis)

L2‧‧‧Rotary axis of dresser (2nd axis)

Claims (6)

A dressing mechanism is used for dressing a cutting edge formed on an outer peripheral edge of an outer peripheral surface around a shaft in a disc-shaped blade including a grinding device; the dressing mechanism includes: The cutting edge of the blade trims the dresser of the blade, the dresser driving part driving the dresser, and a support frame for mounting the dresser and the dresser driving part; the dresser has an outer peripheral surface around its axis. , The support frame is supported to rotate freely about the axis; the outer peripheral surface of the dresser is used to slide in contact with the outer edge of the blade to the trimming range of the blade portion, and is used to separate The recessed clearance range in which the gap is in a non-contact state with the outer peripheral surface of the blade is set along its circumferential direction; the dresser driving part is used to rotate the dresser around the shaft, and the structure can be selectively selected by this. Switch between the trimming state caused by the trimming range and the non-trimming state caused by the clearance range. For example, the dressing mechanism of the first item of claim, wherein one week of the outer peripheral surface of the dresser is formed by using one of the aforementioned dressing ranges formed by a circular arc surface and one of the aforementioned clearance ranges; The gap is formed in a groove shape that extends over the entire length of the dresser in the axial direction; the angle range of the dressing range centered on the shaft of the dresser is The angle range is larger than the clearance range. According to the dressing mechanism of claim 1, wherein the dresser driving unit is constituted by: a rotation driving unit that rotates the dresser around its axis; and the dresser is horizontally changed respectively. A linear drive unit located in a direction perpendicular to the axis and parallel to the axis. The dressing mechanism according to the second item of claim, wherein the dresser driving unit is constituted by: a rotation driving unit that rotates the dresser around its axis; and the dresser is horizontally changed respectively. A linear drive unit located in a direction perpendicular to the axis and parallel to the axis. A grinding device having a dressing mechanism according to any one of claims 1 to 4; wherein the grinding device is configured to include a blade portion formed around a peripheral edge of an outer peripheral surface including a periphery of a shaft and wound around the edge A disk-shaped blade driven by a shaft and a bed that is fed at right angles relative to the shaft of the blade, and the workpiece of the bed is cut by the blade of the rotating blade; the shaft of the dresser and the shaft of the blade When the dressing range of the dresser and the outer periphery of the blade face each other, the blade portion keeps sliding contact at a specified distance of the dressing range and is arranged parallel to each other; the dresser driving part rotates the dresser Move, after this, constitute the front The outer peripheral surface of the blade may be selectively opposed to the trimming range and clearance range of the trimmer; when the trimming range of the trimmer is facing the outer periphery of the blade, the trimming of the blade portion is performed so that the trimming When the clearance range of the dresser faces the outer periphery of the blade, the dressing of the blade is stopped. A blade dressing method using the dressing mechanism according to any one of claims 1 to 4; wherein, when the blade is rotated about its axis, when the workpiece is cut and processed, the dressing range of the aforementioned dresser and the outside of the blade are adjusted. Face to side, while rotating the dresser around the axis, the blade portion of the blade is sequentially slidably contacted in the circumferential direction with respect to the dressing range, after which, the blade portion of the blade is trimmed; after the blade leaves the workpiece When the workpiece is not being processed, the clearance range of the dresser faces the outer periphery of the blade in a non-contact state to stop the rotation of the dresser.