TW201301303A - Conductive paste, base having conductive film obtained using same, and method for producing base having conductive film - Google Patents
Conductive paste, base having conductive film obtained using same, and method for producing base having conductive film Download PDFInfo
- Publication number
- TW201301303A TW201301303A TW101118398A TW101118398A TW201301303A TW 201301303 A TW201301303 A TW 201301303A TW 101118398 A TW101118398 A TW 101118398A TW 101118398 A TW101118398 A TW 101118398A TW 201301303 A TW201301303 A TW 201301303A
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- Prior art keywords
- copper
- conductive paste
- particles
- conductive film
- conductive
- Prior art date
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- 238000004519 manufacturing process Methods 0.000 title claims description 11
- 239000002245 particle Substances 0.000 claims abstract description 239
- 239000010949 copper Substances 0.000 claims abstract description 233
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- JPVYNHNXODAKFH-UHFFFAOYSA-N Cu2+ Chemical compound [Cu+2] JPVYNHNXODAKFH-UHFFFAOYSA-N 0.000 claims abstract description 22
- 229910001431 copper ion Inorganic materials 0.000 claims abstract description 22
- 150000001875 compounds Chemical class 0.000 claims abstract description 10
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- 239000001301 oxygen Substances 0.000 claims description 32
- -1 organic acid ester Chemical class 0.000 claims description 20
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- 125000004429 atom Chemical group 0.000 claims description 14
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- 239000011975 tartaric acid Substances 0.000 description 1
- 235000002906 tartaric acid Nutrition 0.000 description 1
- ISIJQEHRDSCQIU-UHFFFAOYSA-N tert-butyl 2,7-diazaspiro[4.5]decane-7-carboxylate Chemical compound C1N(C(=O)OC(C)(C)C)CCCC11CNCC1 ISIJQEHRDSCQIU-UHFFFAOYSA-N 0.000 description 1
- 239000004034 viscosity adjusting agent Substances 0.000 description 1
Classifications
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- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C9/00—Alloys based on copper
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
- H01B1/00—Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors
- H01B1/20—Conductive material dispersed in non-conductive organic material
- H01B1/22—Conductive material dispersed in non-conductive organic material the conductive material comprising metals or alloys
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F1/00—Metallic powder; Treatment of metallic powder, e.g. to facilitate working or to improve properties
- B22F1/10—Metallic powder containing lubricating or binding agents; Metallic powder containing organic material
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B27/00—Layered products comprising a layer of synthetic resin
- B32B27/18—Layered products comprising a layer of synthetic resin characterised by the use of special additives
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
- H01B13/00—Apparatus or processes specially adapted for manufacturing conductors or cables
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
- H01B5/00—Non-insulated conductors or conductive bodies characterised by their form
- H01B5/14—Non-insulated conductors or conductive bodies characterised by their form comprising conductive layers or films on insulating-supports
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- Chemical & Material Sciences (AREA)
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- Organic Chemistry (AREA)
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- Dispersion Chemistry (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Manufacturing & Machinery (AREA)
- Conductive Materials (AREA)
- Parts Printed On Printed Circuit Boards (AREA)
- Manufacturing Of Electric Cables (AREA)
Abstract
Description
本發明係關於一種導電糊及使用其之附導電膜之基材、及附導電膜之基材之製造方法。 The present invention relates to a conductive paste, a substrate to which the conductive film is attached, and a method of manufacturing a substrate with a conductive film.
先前,已知有於電子零件或印刷電路板(印刷基板)等配線導體之形成中使用導電糊之方法。其中,例如印刷基板之製造係藉由如下方式進行:於包含玻璃、陶瓷等之絕緣性基材上將導電糊塗佈成所需的圖案形狀後,加熱至150℃以上並加以煅燒而形成配線圖案。 Conventionally, a method of using a conductive paste for forming a wiring conductor such as an electronic component or a printed circuit board (printed substrate) has been known. For example, the printing substrate is produced by applying a conductive paste to a desired pattern shape on an insulating substrate including glass or ceramics, heating it to 150° C. or higher, and firing it to form a wiring pattern. .
作為導電糊,就確保較高之導電性之觀點而言,主要使用以銀(Ag)為主成分之銀糊。然而,就銀糊而言,若於高溫高濕之環境下通電,則容易產生銀原子離子化並受電場吸引而移動之離子遷移(銀之電沈積)。若於配線圖案中產生離子遷移,則會引起於配線間產生短路等不良情況,有妨礙配線基板之可靠性之虞。 As the conductive paste, a silver paste containing silver (Ag) as a main component is mainly used from the viewpoint of ensuring high conductivity. However, in the case of silver paste, if it is energized in an environment of high temperature and high humidity, ion migration (electrodeposition of silver) in which silver atoms are ionized and moved by an electric field is likely to occur. When ion migration occurs in the wiring pattern, defects such as short-circuiting between wirings may occur, and the reliability of the wiring substrate may be hindered.
就提高電子機器或配線基板之可靠性之觀點而言,提出有使用銅糊代替銀糊作為導電糊之技術。銅糊不易產生遷移現象,故而可提高電子電路之連接可靠性。 From the viewpoint of improving the reliability of an electronic device or a wiring board, a technique of using a copper paste instead of a silver paste as a conductive paste has been proposed. The copper paste is less prone to migration, so the connection reliability of the electronic circuit can be improved.
然而,由於通常銅易於氧化,故若於高濕度之環境下放置於大氣中,則因與大氣中之水分或氧等之反應而易於產生氧化銅。因此,煅燒銅糊而形成之導電膜存在體積電阻率受氧化覆膜之影響而容易變高之問題。 However, since copper is usually oxidized, if it is placed in the atmosphere in a high humidity environment, copper oxide is easily generated by reaction with moisture or oxygen in the atmosphere. Therefore, the conductive film formed by calcining the copper paste has a problem that the volume resistivity is easily increased by the influence of the oxide film.
為解決上述問題,提出有藉由濕式還原法製造調配於銅 糊中之銅粉末之技術(例如參照專利文獻1、專利文獻2)。然而,實際情況是根據上述先前之技術,亦未充分地改善由配線導體用導電糊中之氧化覆膜之形成所導致的體積電阻率之上升。 In order to solve the above problems, it is proposed to manufacture and mix copper in the form of wet reduction. The technique of the copper powder in the paste (for example, refer to Patent Document 1 and Patent Document 2). However, the actual situation is that the increase in volume resistivity caused by the formation of the oxide film in the conductive paste for wiring conductors is not sufficiently improved according to the above-described prior art.
另一方面,近年來,由於使用如聚對苯二甲酸乙二酯(PET,Polyethylene Terephthalate)或聚萘二甲酸乙二酯(PEN,Polyethylene Naphtahalate)、聚碳酸酯之樹脂基材作為印刷基板之絕緣性基材,故而需要可形成藉由在與此種基材之耐熱溫度相比足夠低的未達150℃之溫度、具體而言120~140℃下進行加熱而成為配線圖案之導電膜之導電糊。 On the other hand, in recent years, a resin substrate such as polyethylene terephthalate (PET) or polyethylene naphthalate (PEN), polycarbonate has been used as a printed substrate. Since the insulating base material is required to be formed, a conductive film which becomes a wiring pattern by heating at a temperature of not more than 150 ° C, specifically 120 to 140 ° C, which is sufficiently lower than the heat resistant temperature of the substrate, is required. Conductive paste.
然而,於在120~140℃之較低之溫度下對上述先前之銅糊進行加熱之情形時,銅糊中的樹脂之硬化變得不充分,熱硬化性樹脂中之羥甲基之OH基的殘存率增高,且由銅糊所形成之膜之親水性增大。其結果存在如下問題:於高濕度之環境下,水蒸氣在由銅糊所形成之膜中變得易於擴散,故而容易藉由與所擴散之水分或氧等之反應而產生氧化銅,從而體積電阻率大幅度上升。 However, when the above copper paste is heated at a lower temperature of 120 to 140 ° C, the hardening of the resin in the copper paste becomes insufficient, and the OH group of the methylol group in the thermosetting resin The residual rate is increased, and the hydrophilicity of the film formed by the copper paste is increased. As a result, there is a problem in that in a high-humidity environment, water vapor is easily diffused in a film formed of a copper paste, so that it is easy to generate copper oxide by reaction with water or oxygen which is diffused, and thus volume The resistivity has increased significantly.
專利文獻1:日本專利特開2007-184143號公報 Patent Document 1: Japanese Patent Laid-Open Publication No. 2007-184143
專利文獻2:日本專利特開平1-158081號公報 Patent Document 2: Japanese Patent Laid-Open No. 1-158081
本發明係為解決上述課題而成者,其目的在於提供一種導電糊,該導電糊可於低於先前之溫度下硬化而抑制氧化覆膜之形成,並可形成能夠長期維持較低之體積電阻率之導電膜。又,本發明之目的在於提供一種具有使用上述導電糊之導電膜的附導電膜之基材。 The present invention has been made to solve the above problems, and an object thereof is to provide a conductive paste which can be cured at a temperature lower than a previous temperature to suppress formation of an oxide film and can form a low volume resistance for a long period of time. The rate of the conductive film. Moreover, an object of the present invention is to provide a substrate having a conductive film using a conductive film of the above conductive paste.
本發明提供如下之導電糊、附導電膜之基材、及附導電膜之基材之製造方法。 The present invention provides a conductive paste, a substrate with a conductive film, and a method of producing a substrate with a conductive film.
(1)一種導電糊,其特徵在於含有銅粒子(A)、包含與25℃且離子強度0.1 mol/L之條件下之銅離子的穩定度常數logKCu為5~15之化合物之螯合劑(B)、熱硬化性樹脂(C)、及pKa為1~4之有機酸之酯或醯胺(D)。 (1) A conductive paste characterized by comprising a copper particle (A), a chelating agent comprising a compound having a stability constant logK Cu of 5 to 15 with respect to copper ions at 25 ° C and an ionic strength of 0.1 mol/L ( B), a thermosetting resin (C), and an ester of an organic acid having a pKa of 1 to 4 or a decylamine (D).
(2)如上述(1)之導電糊,其中上述銅粒子(A)之藉由X射線光電子光譜法所求出之表面氧濃度比O/Cu為0.5以下。 (2) The conductive paste according to (1) above, wherein the surface oxygen concentration ratio O/Cu of the copper particles (A) obtained by X-ray photoelectron spectroscopy is 0.5 or less.
(3)如上述(1)或(2)之導電糊,其中上述銅粒子(A)係於pH值為3以下之分散介質中經還原處理之表面改質銅粒子。 (3) The conductive paste according to (1) or (2) above, wherein the copper particles (A) are surface-modified copper particles which are subjected to reduction treatment in a dispersion medium having a pH of 3 or less.
(4)如上述(1)至(3)中任一項之導電糊,其中上述銅粒子(A)係平均一次粒徑為1~20 nm之金屬銅微粒子凝聚並附著於平均一次粒徑為0.3~20 μm之金屬銅粒子表面而成的複合金屬銅粒子。 (4) The conductive paste according to any one of (1) to (3) above, wherein the copper particles (A) are metal copper fine particles having an average primary particle diameter of 1 to 20 nm, and are adhered to the average primary particle diameter. Composite metal copper particles formed on the surface of metallic copper particles of 0.3 to 20 μm.
(5)如上述(1)至(4)中任一項之導電糊,其中上述螯合劑(B)係將包含氮原子之官能基(a)、及包含除氮原子以外之具有孤電子對之原子的官能基(b)配置於芳香環之鄰位上而 成之芳香族化合物。 (5) The conductive paste according to any one of (1) to (4) above, wherein the chelating agent (B) is a functional group (a) containing a nitrogen atom, and a lone pair having a nitrogen-containing atom The functional group (b) of the atom is disposed in the ortho position of the aromatic ring An aromatic compound.
(6)如上述(5)之導電糊,其中上述包含除氮原子以外之具有孤電子對之原子的官能基(b)為羥基或羧基。 (6) The conductive paste according to (5) above, wherein the functional group (b) containing an atom having a lone electron pair other than the nitrogen atom is a hydroxyl group or a carboxyl group.
(7)如上述(5)或(6)之導電糊,其中上述氮原子與上述除氮原子以外之具有孤立電子對之原子係經由2個或3個原子而鍵結。 (7) The conductive paste according to (5) or (6) above, wherein the nitrogen atom and the atomic system having an isolated electron pair other than the nitrogen-removing atom are bonded via two or three atoms.
(8)如上述(1)至(7)中任一項之導電糊,其中上述螯合劑(B)係選自由水楊羥肟酸、水楊醛肟及鄰胺基苯酚所組成之群中之至少一種。 (8) The conductive paste according to any one of (1) to (7) above, wherein the chelating agent (B) is at least one selected from the group consisting of salicylic acid, salicylaldoxime and ortho-aminophenol.
(9)如上述(1)至(8)中任一項之導電糊,其中上述熱硬化性樹脂(C)係選自由酚系樹脂、三聚氰胺樹脂及脲樹脂所組成之群中之至少一種。 (9) The conductive paste according to any one of (1) to (8) above, wherein the thermosetting resin (C) is at least one selected from the group consisting of a phenol resin, a melamine resin, and a urea resin.
(10)如上述(1)至(9)中任一項之導電糊,其中上述有機酸之酯或醯胺(D)係選自由甲醯胺、水楊酸甲酯、乙二酸二甲酯、丙二酸二甲酯及順丁烯二酸二甲酯所組成之群之至少一種。 (10) The conductive paste according to any one of (1) to (9) above, wherein the ester of the above organic acid or the decylamine (D) is selected from the group consisting of formamide, methyl salicylate, and dimethyl ethanedicarboxylate. At least one of a group consisting of an ester, dimethyl malonate, and dimethyl maleate.
(11)如上述(1)至(10)中任一項之導電糊,其中上述螯合劑(B)之含量相對於上述銅粒子(A)100質量份為0.01~1質量份。 The conductive paste according to any one of the above (1) to (10), wherein the content of the chelating agent (B) is 0.01 to 1 part by mass based on 100 parts by mass of the copper particles (A).
(12)如上述(1)至(11)中任一項之導電糊,其中上述熱硬化性樹脂(C)之含量相對於上述銅粒子(A)100質量份為5~50質量份。 (12) The conductive paste according to any one of the above (1) to (11), wherein the content of the thermosetting resin (C) is 5 to 50 parts by mass based on 100 parts by mass of the copper particles (A).
(13)如上述(1)至(12)中任一項之導電糊,其中上述有機酸之酯或醯胺(D)之含量相對於上述熱硬化性樹脂(C)100 質量份為0.5~15質量份。 (13) The conductive paste according to any one of (1) to (12) above, wherein the content of the organic acid ester or the decylamine (D) is relative to the thermosetting resin (C) 100 The mass fraction is 0.5 to 15 parts by mass.
(14)一種附導電膜之基材,其具有基材、及使如上述(1)至(13)中任一項之導電糊於該基材上硬化而形成之導電膜。 (14) A substrate with a conductive film, comprising: a substrate; and a conductive film formed by hardening the conductive paste according to any one of (1) to (13) above.
(15)如上述(14)之附導電膜之基材,其中上述基材係選自由聚對苯二甲酸乙二酯(PET)、聚萘二甲酸乙二酯(PEN)及聚碳酸酯所組成之群中之至少一種。 (15) The substrate with a conductive film according to the above (14), wherein the substrate is selected from the group consisting of polyethylene terephthalate (PET), polyethylene naphthalate (PEN), and polycarbonate. At least one of the group consisting of.
(16)如上述(14)或(15)之附導電膜之基材,其中上述導電膜之體積電阻率為1.0×10-4 Ωcm以下。 (16) The substrate with a conductive film according to the above (14) or (15), wherein the conductive film has a volume resistivity of 1.0 × 10 -4 Ωcm or less.
(17)一種附導電膜之基材之製造方法,其包括如下步驟:將如上述(1)至(13)中任一項之導電糊塗佈於基材上之步驟;及於未達150℃之溫度下對上述導電糊進行加熱並使其硬化而形成導電膜之步驟。 (17) A method of producing a substrate with a conductive film, comprising the steps of: applying a conductive paste according to any one of (1) to (13) above to a substrate; and less than 150 ° C The conductive paste is heated and hardened at a temperature to form a conductive film.
根據本發明之導電糊,可於未達150℃之低於先前之溫度下使其硬化,並於高濕度之環境下抑制氧化銅之形成,可形成能夠長期維持較低之體積電阻率之導電膜。又,藉由使用此種導電糊,可獲得使用樹脂等作為絕緣基材,作為配線基板等之可靠性較高,且抑制由氧化覆膜之形成所導致之體積電阻率之上升的附導電膜之基材。 The conductive paste according to the present invention can be hardened at a temperature lower than 150 ° C lower than the previous temperature, and inhibits the formation of copper oxide in a high humidity environment, and can form a conductive material capable of maintaining a low volume resistivity for a long period of time. membrane. In addition, by using such a conductive paste, it is possible to obtain a conductive film which uses a resin or the like as an insulating base material, has high reliability as a wiring board, and suppresses an increase in volume resistivity due to formation of an oxide film. The substrate.
以下,對本發明之實施形態進行詳細地說明。 Hereinafter, embodiments of the present invention will be described in detail.
本發明之實施形態之導電糊分別含有銅粒子(A)、包含與25℃且離子強度0.1 mol/L之條件下之銅離子的穩定度常 數logKCu為5~15之化合物之螯合劑(B)、熱硬化性樹脂(C)、及pKa為1~4之有機酸之酯或醯胺(D)。 The conductive paste according to the embodiment of the present invention contains copper particles (A) and a chelating agent (B) containing a compound having a stability constant logK Cu of 5 to 15 at 25 ° C and an ionic strength of 0.1 mol/L. ), a thermosetting resin (C), and an ester of an organic acid having a pKa of 1 to 4 or a decylamine (D).
根據本發明之實施形態之導電糊,由於調配有銅粒子(A)、及作為螯合劑(B)之與25℃且離子強度0.1 mol/L之條件下的銅離子之穩定度常數logKCu於特定範圍內之化合物,故而可製成減少與大氣中所含之氧等反應之銅離子的量而抑制氧化銅之形成之導電糊。 The conductive paste according to the embodiment of the present invention has a stability constant logK Cu of copper ions in the condition of copper particles (A) and chelating agent (B) at 25 ° C and an ionic strength of 0.1 mol/L. Since the compound is in a specific range, it is possible to form a conductive paste which reduces the amount of copper ions which react with oxygen or the like contained in the atmosphere and suppresses the formation of copper oxide.
又,由於調配有pKa為1~4之有機酸之酯或醯胺(D)作為熱硬化性樹脂(C)的硬化劑(硬化促進劑),故而藉由於未達150℃、更具體而言120~140℃之較低之溫度下進行加熱,可使導電糊充分地硬化,可減少與大氣中所含之氧反應之銅離子的量,可製成使氧化銅之形成得到抑制之導電糊。 Further, since an ester of an organic acid having a pKa of 1 to 4 or a guanamine (D) is blended as a curing agent (hardening accelerator) of the thermosetting resin (C), it is not more than 150 ° C, more specifically Heating at a lower temperature of 120 to 140 ° C can sufficiently harden the conductive paste, thereby reducing the amount of copper ions which react with oxygen contained in the atmosphere, and can be made into a conductive paste which suppresses the formation of copper oxide. .
進而,於利用此種導電糊形成之導電膜中,不易形成以氧化銅為主成分之氧化覆膜,因此即便於高濕度之環境下,亦可製成使體積電阻率之上升得到抑制的附導電膜之基材。 Further, in the conductive film formed using such a conductive paste, it is difficult to form an oxide film containing copper oxide as a main component. Therefore, even in a high-humidity environment, an increase in volume resistivity can be suppressed. A substrate of a conductive film.
實施形態之導電糊含有銅粒子(A)、螯合劑(B)、熱硬化性樹脂(C)、及pKa為1~4之有機酸之酯或醯胺(D)。以下,對構成導電糊之各成分進行說明。 The conductive paste of the embodiment contains copper particles (A), a chelating agent (B), a thermosetting resin (C), and an organic acid ester or decylamine (D) having a pKa of 1 to 4. Hereinafter, each component constituting the conductive paste will be described.
銅粒子(A)係成為導電糊之導電成分者,且藉由X射線光電子光譜法求出之表面氧濃度比O/Cu為0.5以下。以下,將藉由X射線光電子光譜法求出之表面氧濃度比O/Cu僅表 示為「表面氧濃度比O/Cu」。 The copper particles (A) are conductive components of the conductive paste, and the surface oxygen concentration ratio O/Cu determined by X-ray photoelectron spectroscopy is 0.5 or less. Hereinafter, the surface oxygen concentration ratio O/Cu obtained by X-ray photoelectron spectroscopy is only It is shown as "surface oxygen concentration ratio O/Cu".
表面氧濃度比O/Cu係以藉由X射線光電子分光分析所測得之表面氧濃度(原子%)相對於銅粒子之表面銅濃度(原子%)之比表示。於本說明書中,「表面銅濃度(原子%)」及「表面氧濃度(原子%)」分別為對自銅粒子表面朝向中心約3 nm之深度為止之範圍內的粒子表層區域進行X射線光電子分光分析而獲得之測定值。自銅粒子表面朝向中心約3 nm之深度為止之範圍係藉由對該範圍之粒子區域進行各成分的濃度測定而充分地把握銅粒子之表面狀態之範圍。 The surface oxygen concentration ratio O/Cu is expressed by the ratio of the surface oxygen concentration (atomic %) measured by X-ray photoelectron spectroscopy to the surface copper concentration (atomic %) of the copper particles. In the present specification, "surface copper concentration (atomic %)" and "surface oxygen concentration (atomic %)" are X-ray photoelectrons in the surface region of the particle in the range from the surface of the copper particle toward the center of about 3 nm. The measured value obtained by spectroscopic analysis. The range from the surface of the copper particle toward the center at a depth of about 3 nm is sufficient to grasp the range of the surface state of the copper particles by measuring the concentration of each component in the particle region of the range.
若銅粒子(A)之表面氧濃度比O/Cu超過0.5,則銅粒子(A)表面之氧化銅之存在量過多,於製成導電膜時,粒子間之接觸電阻較大,有體積電阻率變高之虞。藉由使用表面氧濃度比O/Cu為0.5以下之銅粒子(A),可降低銅粒子間之接觸電阻,並可提昇製成導電膜時之導電性。銅粒子(A)之表面氧濃度比O/Cu較佳為0.3以下。 When the surface oxygen concentration ratio O/Cu of the copper particles (A) exceeds 0.5, the amount of copper oxide present on the surface of the copper particles (A) is excessive, and when the conductive film is formed, the contact resistance between the particles is large, and the volume resistance is large. The rate becomes higher. By using the copper particles (A) having a surface oxygen concentration ratio of O/Cu of 0.5 or less, the contact resistance between the copper particles can be lowered, and the conductivity at the time of forming the conductive film can be improved. The surface oxygen concentration ratio O/Cu of the copper particles (A) is preferably 0.3 or less.
又,於銅粒子(A)之全部粒子中所含之氧濃度較佳為700 ppm以下。於銅粒子中所含之氧濃度例如可使用氧濃度計進行測定。 Further, the oxygen concentration contained in all the particles of the copper particles (A) is preferably 700 ppm or less. The oxygen concentration contained in the copper particles can be measured, for example, using an oxygen concentration meter.
作為銅粒子(A),只要為表面氧濃度比O/Cu為0.5以下者,則可使用各種銅粒子。銅粒子(A)可為金屬銅粒子,亦可為氫化銅微粒子、或對氫化銅微粒子進行加熱而成之金屬銅微粒子(以下,亦稱為銅微粒子)。又,作為銅粒子(A),亦可為使該等金屬銅粒子與銅微粒子複合之形態之複合粒子。作為複合粒子,例如可列舉銅微粒子附著或鍵 結於金屬銅粒子之表面上之形態者。關於複合粒子,詳細情況如下所述。 As the copper particles (A), various copper particles can be used as long as the surface oxygen concentration ratio O/Cu is 0.5 or less. The copper particles (A) may be metal copper particles, or may be copper hydride fine particles or metal copper fine particles (hereinafter also referred to as copper fine particles) obtained by heating hydrogenated copper fine particles. Further, the copper particles (A) may be composite particles in a form in which the metal copper particles are combined with the copper fine particles. Examples of the composite particles include copper microparticle attachment or bonding. Formed on the surface of metallic copper particles. Regarding the composite particles, the details are as follows.
銅粒子(A)之平均粒徑較佳為0.01~20 μm。銅粒子(A)之平均粒徑可根據銅粒子(A)之形狀而於0.01~20 μm之範圍內適當地調整。若銅粒子(A)之平均粒徑為0.01 μm以上,則包含該銅粒子之導電糊之流動特性變得良好。又,若銅粒子(A)之平均粒徑為20 μm以下,則容易利用包含該銅粒子之導電糊製作微細配線。 The average particle diameter of the copper particles (A) is preferably from 0.01 to 20 μm. The average particle diameter of the copper particles (A) can be appropriately adjusted in the range of 0.01 to 20 μm in accordance with the shape of the copper particles (A). When the average particle diameter of the copper particles (A) is 0.01 μm or more, the flow characteristics of the conductive paste containing the copper particles are good. In addition, when the average particle diameter of the copper particles (A) is 20 μm or less, it is easy to produce fine wiring by using the conductive paste containing the copper particles.
於銅粒子(A)包含金屬銅粒子之情形時,其平均粒徑(平均一次粒徑)較佳為0.3~20 μm。又,於銅粒子(A)僅包含銅微粒子之情形時,其凝聚粒子之平均粒徑較佳為0.01~1 μm,更佳為0.02~0.4 μm。 When the copper particles (A) contain metallic copper particles, the average particle diameter (average primary particle diameter) is preferably from 0.3 to 20 μm. Further, when the copper particles (A) contain only copper fine particles, the average particle diameter of the aggregated particles is preferably 0.01 to 1 μm, more preferably 0.02 to 0.4 μm.
於銅粒子(A)包含金屬銅粒子之情形時,於其平均粒徑(平均一次粒徑)為0.3 μm以上之情形時,包含該銅粒子之導電糊之流動特性變得良好。又,於銅粒子(A)僅包含銅微粒子之情形時,於其凝聚粒子之平均粒徑為0.01 μm以上之情形時,包含該銅粒子之導電糊之流動特性變得良好。 When the copper particles (A) contain metallic copper particles, when the average particle diameter (average primary particle diameter) is 0.3 μm or more, the flow characteristics of the conductive paste containing the copper particles are good. In the case where the copper particles (A) contain only copper fine particles, when the average particle diameter of the aggregated particles is 0.01 μm or more, the flow characteristics of the conductive paste containing the copper particles are good.
又,於銅粒子(A)包含金屬銅粒子之情形時,於其平均粒徑(平均一次粒徑)為20 μm以下之情形時,容易利用包含該銅粒子之導電糊製作微細配線。又,於銅粒子(A)僅包含銅微粒子之情形時,於其凝聚粒子之平均粒徑為1 μm以下之情形時,容易利用包含該銅粒子之導電糊製作微細配線。 In the case where the copper particles (A) contain metallic copper particles, when the average particle diameter (average primary particle diameter) is 20 μm or less, it is easy to produce fine wiring by using the conductive paste containing the copper particles. In the case where the copper particles (A) contain only copper fine particles, when the average particle diameter of the aggregated particles is 1 μm or less, it is easy to form fine wiring by using the conductive paste containing the copper particles.
作為表面氧濃度比O/Cu為0.5以下之銅粒子(A),例如可較佳地使用下述銅粒子(A1)~(A5)。 As the copper particles (A) having a surface oxygen concentration ratio of O/Cu of 0.5 or less, for example, the following copper particles (A1) to (A5) can be preferably used.
(A1)一種金屬銅粒子,其平均一次粒徑為0.3~20 μm。 (A1) A metallic copper particle having an average primary particle diameter of 0.3 to 20 μm.
(A2)一種銅複合粒子,其含有:金屬銅粒子,其平均一次粒徑為0.3~20 μm;及氫化銅微粒子,其附著於上述金屬銅粒子表面上,且其凝聚粒子之平均粒徑為20~400 nm。 (A2) A copper composite particle comprising: metallic copper particles having an average primary particle diameter of 0.3 to 20 μm; and copper hydride fine particles attached to the surface of the metallic copper particles, wherein an average particle diameter of the aggregated particles is 20~400 nm.
(A3)一種氫化銅微粒子,其凝聚粒子之平均粒徑為10 nm~1 μm。 (A3) A copper hydride fine particle having an aggregated particle having an average particle diameter of 10 nm to 1 μm.
(A4)一種複合金屬銅粒子,其含有:金屬銅粒子,其平均一次粒徑為0.3~20 μm;及金屬銅微粒子,其係對附著於上述金屬銅粒子表面上之氫化銅微粒子進行加熱而成,且其凝聚粒子之平均粒徑為20~400 nm。 (A4) A composite metal copper particle comprising: metallic copper particles having an average primary particle diameter of 0.3 to 20 μm; and metallic copper microparticles for heating copper hydride fine particles attached to the surface of the metallic copper particles The average particle size of the agglomerated particles is 20 to 400 nm.
(A5)一種金屬銅微粒子,其凝聚粒子之平均粒徑為10 nm~1 μm。 (A5) A metal copper microparticle having an average particle diameter of aggregated particles of 10 nm to 1 μm.
再者,複合金屬銅粒子(A4)係藉由加熱處理將銅複合粒子(A2)之氫化銅微粒子轉換為金屬銅微粒子而成者。又,金屬銅微粒子(A5)係藉由加熱處理使氫化銅微粒子(A3)進行轉換而成者。 Further, the composite metal copper particles (A4) are obtained by converting the copper hydride fine particles of the copper composite particles (A2) into metal copper fine particles by heat treatment. Further, the metal copper fine particles (A5) are obtained by converting the copper hydride fine particles (A3) by heat treatment.
於本說明書中,平均粒徑係以如下方式求出者。 In the present specification, the average particle diameter is determined as follows.
即,金屬銅粒子之平均一次粒徑係測定自掃描型電子顯微鏡(以下,記作「SEM(Scanning Electron Microscope)」)影像中隨機選取之100個粒子的Feret(費雷特)直徑,並計算該等粒徑之平均值而算出者。 In other words, the average primary particle diameter of the metallic copper particles is measured by a Feret diameter of 100 particles randomly selected from a scanning electron microscope (hereinafter referred to as "SEM (Scanning Electron Microscope)" image, and is calculated. The average of these particle diameters is calculated.
又,包含銅微粒子之凝聚粒子之平均粒徑係測定自穿透式電子顯微鏡(以下,記作「TEM(Transmission Electron Microscope)」)影像中隨機選取的100個粒子之Feret直徑,並計算該等粒徑之平均值而算出者。 In addition, the average particle diameter of the aggregated particles containing the copper microparticles is measured by the Feret diameter of 100 randomly selected particles in a transmission electron microscope (hereinafter referred to as "TEM (Transmission Electron Microscope)" image, and these are calculated. Calculated by the average of the particle diameters.
又,例如於為如銅複合粒子(A2)般包含作為金屬銅粒子之銅粒子、及附著於該銅粒子表面上之氫化銅微粒子的複合粒子之情形時,係利用SEM觀察該複合粒子整體,測定包含銅微粒子之粒子整體之Feret直徑,並計算所獲得之粒徑之平均值而算出者。 Further, for example, when copper particles as metallic copper particles and composite particles of copper hydride fine particles adhering to the surface of the copper particles are contained as in the case of the copper composite particles (A2), the composite particles are observed by SEM. The Feret diameter of the entire particle including the copper fine particles was measured, and the average value of the obtained particle diameter was calculated and calculated.
如上所述般,本發明中之複合金屬銅粒子(A4)係於金屬銅粒子表面之至少一部分上附著有金屬銅微粒子者。「複合金屬銅粒子」係對使氫化銅微粒子附著於金屬銅粒子表面上而成之「銅複合粒子」進行加熱,將氫化銅微粒子轉換為金屬銅微粒子而獲得者。再者,可觀察SEM影像而確認金屬銅粒子表面是否附著有微粒子。又,附著於金屬銅粒子之表面上之氫化銅微粒子的鑑定可使用X射線繞射裝置(Rigaku公司製造,TTR-III)而進行。 As described above, the composite metal copper particles (A4) in the present invention are those in which metallic copper fine particles are adhered to at least a part of the surface of the metallic copper particles. The "composite metal copper particles" are obtained by heating "copper composite particles" obtained by adhering hydrogenated copper fine particles to the surface of metallic copper particles, and converting the copper hydride fine particles into metal copper fine particles. Further, the SEM image was observed to confirm whether or not fine particles were adhered to the surface of the metallic copper particles. Further, the identification of the copper hydride fine particles adhering to the surface of the metal copper particles can be carried out using an X-ray diffraction apparatus (manufactured by Rigaku Corporation, TTR-III).
銅複合粒子之金屬銅粒子可使用通常用於導電糊中之公知之銅粒子。金屬銅粒子之粒子形狀可為球狀,亦可為板狀。 As the metal copper particles of the copper composite particles, known copper particles which are generally used in a conductive paste can be used. The metal copper particles may have a spherical shape or a plate shape.
銅複合粒子之金屬銅粒子之平均粒徑較佳為0.3~20 μm,更佳為1~10 μm。 The average particle diameter of the metal copper particles of the copper composite particles is preferably from 0.3 to 20 μm, more preferably from 1 to 10 μm.
若金屬銅粒子之平均粒徑未達0.3 μm,則於製成導電糊時,無法獲得充分之流動特性。另一方面,若金屬銅粒子 之平均粒徑超過20 μm,則有難以利用所獲得之導電糊製作微細配線之虞。金屬銅粒子之平均粒徑更佳為1~10 μm。再者,金屬銅粒子之平均粒徑係測定自SEM影像中隨機選出之100個金屬銅粒子的Feret直徑,並計算該測定值之平均值而算出者。 If the average particle diameter of the metallic copper particles is less than 0.3 μm, sufficient flow characteristics cannot be obtained when the conductive paste is formed. On the other hand, if the metal copper particles When the average particle diameter exceeds 20 μm, it is difficult to produce fine wiring by using the obtained conductive paste. The average particle diameter of the metallic copper particles is preferably from 1 to 10 μm. Further, the average particle diameter of the metallic copper particles was calculated by measuring the Feret diameter of 100 metal copper particles randomly selected from the SEM image, and calculating the average value of the measured values.
銅複合粒子之氫化銅微粒子主要係於1~20 nm左右之氫化銅微粒子凝聚的狀態下存在。氫化銅微粒子之粒子形狀可為球狀,亦可為板狀。氫化銅微粒子之凝聚粒子之平均粒徑較佳為20~400 nm,更佳為30~300 nm,更佳為50~200 nm。尤佳為80~150 nm。若氫化銅微粒子之凝聚粒子之平均粒徑未達20 nm,則有容易產生氫化銅微粒子之融合、成長,於製成導電膜時,產生伴隨體積收縮之龜裂等不良情況之虞。另一方面,若氫化銅微粒子之凝聚粒子之平均粒徑超過400 nm,則有粒子表面積不充分,不易產生表面熔解現象,難以形成緻密之導電膜之虞。氫化銅微粒子之平均粒徑係測定自TEM影像中隨機選出之100個氫化銅微粒子的Feret直徑,並計算該測定值之平均值而算出者。 The copper hydride fine particles of the copper composite particles are mainly present in a state in which hydrogenated copper fine particles of about 1 to 20 nm are aggregated. The shape of the particles of the copper hydride microparticles may be spherical or plate-shaped. The average particle diameter of the agglomerated particles of the copper hydride fine particles is preferably from 20 to 400 nm, more preferably from 30 to 300 nm, still more preferably from 50 to 200 nm. Especially good is 80~150 nm. When the average particle diameter of the agglomerated particles of the copper hydride fine particles is less than 20 nm, fusion or growth of the copper hydride fine particles is likely to occur, and when the conductive film is formed, defects such as cracks due to volume shrinkage may occur. On the other hand, when the average particle diameter of the agglomerated particles of the copper hydride fine particles exceeds 400 nm, the surface area of the particles is insufficient, and surface melting is less likely to occur, and it is difficult to form a dense conductive film. The average particle diameter of the copper hydride fine particles was calculated by measuring the Feret diameter of 100 hydrogenated copper fine particles randomly selected from the TEM image, and calculating the average value of the measured values.
附著於金屬銅粒子表面上之氫化銅微粒子之量較佳為金屬銅粒子的量之5~50質量%,更佳為10~35質量%。 The amount of the copper hydride fine particles adhering to the surface of the metal copper particles is preferably from 5 to 50% by mass, more preferably from 10 to 35% by mass, based on the amount of the metal copper particles.
若氫化銅微粒子之量相對於金屬銅粒子之量未達5質量%,則有於金屬銅粒子間未充分地形成導電通道,無法充分地獲得降低導電膜之體積電阻率的效果之虞。另一方面,若氫化銅微粒子之量相對於金屬銅粒子之量超過50質量%,則難以確保作為導電糊之充分之流動性。 When the amount of the copper hydride fine particles is less than 5% by mass based on the amount of the metal copper particles, the conductive passages are not sufficiently formed between the metal copper particles, and the effect of lowering the volume resistivity of the conductive film cannot be sufficiently obtained. On the other hand, when the amount of the copper hydride fine particles exceeds 50% by mass based on the amount of the metal copper particles, it is difficult to ensure sufficient fluidity as the conductive paste.
再者,附著於金屬銅粒子之表面上之氫化銅微粒子的量例如可根據添加還原劑前之水溶性銅化合物溶液中之銅離子濃度與殘存於氫化銅微粒子生成結束後的反應液中之銅離子濃度之差而算出。 Further, the amount of the copper hydride fine particles attached to the surface of the metal copper particles may be, for example, the copper ion concentration in the water-soluble copper compound solution before the addition of the reducing agent and the copper remaining in the reaction liquid after completion of the formation of the copper hydride fine particles. Calculated by the difference in ion concentration.
關於複合金屬銅粒子,可利用存在於金屬銅粒子間之金屬銅微粒子而確實地形成導電通道,並可降低製成導電膜時之體積電阻率。又,如上所述般,藉由將氫化銅微粒子轉換為金屬銅微粒子,可製成不易產生金屬銅微粒子自金屬銅粒子上之剝離者。因此,可製成使因金屬銅微粒子游離於導電糊中而導致的導電糊之黏度上升得到抑制之導電糊。 Regarding the composite metal copper particles, the metal copper fine particles existing between the metal copper particles can be used to form the conductive path reliably, and the volume resistivity at the time of forming the conductive film can be reduced. Further, as described above, by converting the copper hydride fine particles into metal copper fine particles, it is possible to produce a peeling of the metallic copper fine particles from the metallic copper particles. Therefore, a conductive paste which suppresses an increase in the viscosity of the conductive paste due to the release of the metallic copper fine particles in the conductive paste can be obtained.
銅複合粒子之加熱處理較佳為於60~120℃之溫度下進行,更佳為於60~100℃下進行,進而較佳為於60~90℃下進行。若加熱溫度超過120℃,則有容易產生金屬銅微粒子彼此之融合,製成導電膜時之體積電阻率增高之虞。另一方面,若加熱溫度未達60℃,則加熱處理所需之時間變長,就製造成本之方面而言欠佳。再者,於加熱處理後獲得之複合金屬銅粒子之殘存水分量較佳為3質量%以下,更佳為1.5質量%以下。 The heat treatment of the copper composite particles is preferably carried out at a temperature of from 60 to 120 ° C, more preferably from 60 to 100 ° C, and still more preferably from 60 to 90 ° C. When the heating temperature exceeds 120 ° C, the metal copper particles are easily fused to each other, and the volume resistivity at the time of forming the conductive film is increased. On the other hand, if the heating temperature is less than 60 ° C, the time required for the heat treatment becomes long, which is not preferable in terms of manufacturing cost. In addition, the residual moisture content of the composite metal copper particles obtained after the heat treatment is preferably 3% by mass or less, and more preferably 1.5% by mass or less.
銅複合粒子之加熱處理較佳為以相對壓力計於-101~-50 kPa之減壓下進行。若於大於-50 kPa之壓力下進行加熱處理,則乾燥所需之時間變長,就製造成本之方面而言欠佳。另一方面,若將加熱處理時之壓力設為未達-101 kPa,則於例如水等多餘之溶劑之去除、乾燥中必需使用 大型裝置,反而會使製造成本升高。 The heat treatment of the copper composite particles is preferably carried out under a reduced pressure of -101 to -50 kPa under a relative pressure. If the heat treatment is carried out at a pressure of more than -50 kPa, the time required for drying becomes long, which is not preferable in terms of production cost. On the other hand, if the pressure during the heat treatment is set to less than -101 kPa, it is necessary to remove and dry excess solvent such as water. Large installations will increase manufacturing costs.
若「複合金屬銅粒子」之金屬銅粒子之平均粒徑未達0.3 μm,則有於製成導電糊時,無法獲得充分之流動特性之虞。另一方面,若金屬銅粒子之平均粒徑超過20 μm,則有難以利用所獲得之導電糊製作微細配線之虞。「複合金屬銅粒子」中之金屬銅粒子之平均粒徑更佳為1~10 μm。 When the average particle diameter of the metallic copper particles of the "composite metal copper particles" is less than 0.3 μm, sufficient flow characteristics cannot be obtained when the conductive paste is formed. On the other hand, when the average particle diameter of the metallic copper particles exceeds 20 μm, it is difficult to produce fine wiring by using the obtained conductive paste. The average particle diameter of the metallic copper particles in the "composite metal copper particles" is preferably from 1 to 10 μm.
「複合金屬銅粒子」之銅微粒子與銅複合粒子中之氫化銅微粒子相同,主要係於1~20 nm左右之銅微粒子凝聚之狀態下存在。銅微粒子之粒子形狀可為球狀,亦可為板狀。若銅微粒子之凝聚粒子之平均粒徑未達20 nm,則有容易產生銅微粒子之融合、成長,於製成導電膜時,產生伴隨體積收縮之龜裂等不良情況之虞。另一方面,若銅微粒子之凝聚粒子之平均粒徑超過400 nm,則粒子表面積不充分,不易產生表面熔解現象,難以形成緻密之導電膜。銅微粒子之凝聚粒子之平均粒徑更佳為30~300 nm,更佳為50~200 nm。尤佳為80~150 nm。 The copper microparticles of the "composite metal copper particles" are the same as the copper hydride microparticles in the copper composite particles, and are mainly present in a state in which copper microparticles of about 1 to 20 nm are aggregated. The particle shape of the copper microparticles may be spherical or plate-shaped. When the average particle diameter of the agglomerated particles of the copper microparticles is less than 20 nm, the copper microparticles are likely to be fused and grown, and when the conductive film is formed, defects such as cracks accompanying volume shrinkage may occur. On the other hand, when the average particle diameter of the aggregated particles of the copper fine particles exceeds 400 nm, the surface area of the particles is insufficient, and surface melting is less likely to occur, and it is difficult to form a dense conductive film. The average particle diameter of the agglomerated particles of the copper microparticles is preferably from 30 to 300 nm, more preferably from 50 to 200 nm. Especially good is 80~150 nm.
再者,金屬銅粒子之平均粒徑係測定自SEM影像中隨機選出之100個金屬銅粒子的Feret直徑,並將該測定值平均而算出者。又,銅微粒子之平均粒徑係測定自TEM影像中隨機選出之100個氫化銅微粒子的Feret直徑,並計算該測定值之平均值而算出者。 Further, the average particle diameter of the metal copper particles was calculated by measuring the Feret diameter of 100 metal copper particles randomly selected from the SEM image, and averaging the measured values. Further, the average particle diameter of the copper microparticles was calculated by measuring the Feret diameter of 100 hydrogenated copper microparticles randomly selected from the TEM image, and calculating the average value of the measured values.
又,作為銅粒子(A),例如可較佳地使用對銅粒子表面進行還原處理而成之「表面改質銅粒子」。 Further, as the copper particles (A), for example, "surface-modified copper particles" obtained by subjecting the surface of copper particles to reduction treatment can be preferably used.
本發明中之「表面改質銅粒子」係於pH值為3以下之分散介質中對銅粒子表面進行還原處理而獲得。「表面改質銅粒子」例如可藉由包括下述(1)~(3)之步驟之濕式還原法而製造:(1)使銅粒子分散於分散介質中而製成「銅分散液」之步驟、(2)將銅分散液之pH值調整為特定值以下之步驟、(3)於銅分散液中添加還原劑之步驟。 The "surface-modified copper particles" in the present invention are obtained by subjecting the surface of copper particles to a reduction treatment in a dispersion medium having a pH of 3 or less. The "surface-modified copper particles" can be produced, for example, by a wet reduction method including the following steps (1) to (3): (1) dispersing copper particles in a dispersion medium to form a "copper dispersion" The step of (2) adjusting the pH of the copper dispersion to a specific value or less, and (3) the step of adding a reducing agent to the copper dispersion.
藉由上述(1)~(3)之步驟而獲得之表面改質銅粒子係主要由金屬銅粒子所構成者。表面改質銅粒子之平均一次粒徑較佳為0.3~20 μm(金屬銅粒子(A1))。關於表面改質銅粒子,若其平均一次粒徑為0.3 μm以上,則包含該銅粒子之導電糊之流動特性變得良好。又,若表面改質銅粒子之平均一次粒徑為20 μm以下,則容易利用包含該銅粒子之導電糊製作微細配線。 The surface-modified copper particles obtained by the above steps (1) to (3) are mainly composed of metallic copper particles. The average primary particle diameter of the surface-modified copper particles is preferably from 0.3 to 20 μm (metal copper particles (A1)). When the average primary particle diameter of the surface-modified copper particles is 0.3 μm or more, the flow characteristics of the conductive paste containing the copper particles are good. In addition, when the average primary particle diameter of the surface-modified copper particles is 20 μm or less, it is easy to produce fine wiring by using the conductive paste containing the copper particles.
以下,對製造表面改質銅粒子之步驟(1)~(3)進行說明。 Hereinafter, steps (1) to (3) for producing surface-modified copper particles will be described.
分散於銅分散液中之銅粒子可使用通常用作導電糊之銅粒子。分散於銅分散液中之銅粒子之粒子形狀可為球狀,亦可為板狀。 As the copper particles dispersed in the copper dispersion, copper particles which are generally used as a conductive paste can be used. The shape of the particles of the copper particles dispersed in the copper dispersion may be spherical or plate-shaped.
分散於銅分散液中之銅粒子之平均粒徑較佳為0.3~20 μm,更佳為1~10 μm。若銅粒子之平均粒徑未達0.3 μm,則有使導電糊之流動性降低之虞。另一方面,若銅粒子之平均粒徑超過20 μm,則難以利用所獲得之導電糊製作微細配線。藉由使銅粒子之平均粒徑成為0.3~20 μm,可製成流動性良好且適合於微細配線之製作之導電糊。 The average particle diameter of the copper particles dispersed in the copper dispersion is preferably from 0.3 to 20 μm, more preferably from 1 to 10 μm. When the average particle diameter of the copper particles is less than 0.3 μm, the fluidity of the conductive paste is lowered. On the other hand, when the average particle diameter of the copper particles exceeds 20 μm, it is difficult to produce fine wiring by using the obtained conductive paste. By making the average particle diameter of the copper particles 0.3 to 20 μm, it is possible to obtain a conductive paste which is excellent in fluidity and suitable for the production of fine wiring.
再者,銅粒子之平均粒徑係測定自SEM影像中隨機選出之100個金屬銅粒子的Feret直徑,並算出其平均值而獲得者。 Further, the average particle diameter of the copper particles was obtained by measuring the Feret diameter of 100 metal copper particles randomly selected from the SEM image, and calculating the average value.
銅分散液可於分散介質中投入將上述銅粒子製成粉末狀者而獲得。銅分散液之銅粒子之濃度較佳為0.1~50質量%。若銅粒子之濃度未達0.1質量%,則有銅分散液中所含之分散介質量變得過多而無法將生產效率維持於充分之水準之虞。另一方面,若銅粒子之溫度超過50質量%,則有粒子彼此之凝聚之影響變得過大,表面改質銅粒子之產率下降之虞。藉由將銅分散液之銅粒子之濃度設為0.1~50質量%之範圍,可以高產率獲得表面改質銅粒子。 The copper dispersion can be obtained by putting the copper particles into a powder form in a dispersion medium. The concentration of the copper particles in the copper dispersion is preferably from 0.1 to 50% by mass. When the concentration of the copper particles is less than 0.1% by mass, the amount of the dispersion medium contained in the copper dispersion liquid is too large, and the production efficiency cannot be maintained at a sufficient level. On the other hand, when the temperature of the copper particles exceeds 50% by mass, the influence of aggregation of the particles becomes excessive, and the yield of the surface-modified copper particles decreases. By setting the concentration of the copper particles in the copper dispersion to be in the range of 0.1 to 50% by mass, the surface-modified copper particles can be obtained in a high yield.
作為銅分散液之分散介質,只要為可使銅粒子分散者,則並無特別限定,可較佳地使用具有高極性者。作為高極性之分散介質,例如可使用水,甲醇、乙醇、2-丙醇等醇類,乙二醇等二醇類,及將該等混合之混合介質等。作為高極性之分散介質,尤其可較佳地使用水。 The dispersion medium of the copper dispersion liquid is not particularly limited as long as it can disperse the copper particles, and those having high polarity can be preferably used. As the highly polar dispersion medium, for example, water, an alcohol such as methanol, ethanol or 2-propanol, a glycol such as ethylene glycol, or a mixed medium in which these are mixed may be used. As the highly polar dispersion medium, water is particularly preferably used.
對上述(1)中所獲得之銅分散液之pH值進行調整。pH值之調整可於銅分散液中添加pH值調整劑而進行。 The pH of the copper dispersion obtained in the above (1) was adjusted. The adjustment of the pH can be carried out by adding a pH adjuster to the copper dispersion.
作為銅分散液之pH值調整劑,可使用酸。作為銅分散液之pH值調整劑,例如可較佳地使用甲酸、檸檬酸、順丁烯二酸、丙二酸、乙酸、丙酸等羧酸,或硫酸、硝酸、鹽酸等無機酸。 As the pH adjuster of the copper dispersion, an acid can be used. As the pH adjuster for the copper dispersion, for example, a carboxylic acid such as formic acid, citric acid, maleic acid, malonic acid, acetic acid or propionic acid, or a mineral acid such as sulfuric acid, nitric acid or hydrochloric acid can be preferably used.
銅分散液之pH值較佳為設為3以下。藉由將銅分散液之 pH值設為3以下,可於其後之還原處理步驟中順利地進行粒子表面之氧化膜的去除,並可降低所獲得之表面改質銅粒子之表面氧濃度。若分散液之pH值超過3,則有無法充分地獲得去除形成於銅粒子表面之氧化膜之效果,無法充分地降低銅粒子表面之氧濃度之虞。另一方面,分散液之pH值較佳為設為0.5以上。若分散液之pH值未達0.5,則有銅離子過度地溶出,難以順利地進行銅粒子之表面改質之虞。分散液之pH值更佳為設為0.5以上2以下。再者,於分散液之pH值為3以下之情形時,亦可直接對該分散液進行還原處理。 The pH of the copper dispersion is preferably set to 3 or less. By using copper dispersion When the pH is set to 3 or less, the oxide film on the surface of the particles can be smoothly removed in the subsequent reduction treatment step, and the surface oxygen concentration of the surface-modified copper particles obtained can be lowered. When the pH of the dispersion exceeds 3, the effect of removing the oxide film formed on the surface of the copper particles cannot be sufficiently obtained, and the oxygen concentration on the surface of the copper particles cannot be sufficiently reduced. On the other hand, the pH of the dispersion is preferably set to 0.5 or more. When the pH of the dispersion is less than 0.5, copper ions are excessively eluted, and it is difficult to smoothly reform the surface of the copper particles. The pH of the dispersion is more preferably 0.5 or more and 2 or less. Further, when the pH of the dispersion is 3 or less, the dispersion may be directly subjected to reduction treatment.
於調整pH值之銅分散液中添加還原劑而進行還原處理。 A reducing agent is added to the copper dispersion having a pH adjusted to carry out a reduction treatment.
作為添加於銅分散液中之還原劑,可使用選自金屬氫化物、氫化物還原劑、次亞磷酸、次亞磷酸鈉等次亞磷酸鹽、二甲胺硼烷等胺硼烷、及甲酸中之至少一種。作為金屬氫化物,可列舉:氫化鋰、氫化鉀、及氫化鈣。作為氫化物還原劑,可列舉:氫化鋁鋰、硼氫化鋰、及硼氫化鈉。該等之中,可較佳地使用次亞磷酸、次亞磷酸鈉。 As the reducing agent to be added to the copper dispersion, a hypophosphite such as a metal hydride, a hydride reducing agent, a hypophosphite or a sodium hypophosphite, an amine borane such as dimethylamine borane, and formic acid can be used. At least one of them. Examples of the metal hydride include lithium hydride, potassium hydride, and calcium hydride. Examples of the hydride reducing agent include lithium aluminum hydride, lithium borohydride, and sodium borohydride. Among these, hypophosphorous acid and sodium hypophosphite can be preferably used.
藉由進行上述步驟(1)~(3)之表面處理,可將作為起始原料之存在於銅粒子表面上之氧化銅(Cu2O、CuO)還原為銅原子,並可減少成為抑制導電性之主要因素之氧化銅的存在量。 By performing the surface treatment of the above steps (1) to (3), copper oxide (Cu 2 O, CuO) present on the surface of the copper particles as a starting material can be reduced to copper atoms, and can be reduced to inhibit conduction. The main factor of sex is the amount of copper oxide present.
於本發明之實施形態之導電糊中所含的螯合劑(B)係與 銅離子配位,並包含可藉由下述式(1)所示之反應而與銅離子形成錯合物之化合物者。 The chelating agent (B) contained in the conductive paste of the embodiment of the present invention is The copper ion is coordinated and contains a compound which can form a complex with copper ions by a reaction represented by the following formula (1).
M:銅離子 M: copper ion
Z:螯合劑(B) Z: chelating agent (B)
MZ:錯鹽 MZ: wrong salt
x:與1個銅鍵結之螯合劑(B)之數。 x: the number of chelating agents (B) bonded to one copper.
螯合劑(B)係包含與25℃、離子強度0.1 mol/L之條件下之上述式(1)之x=1時的銅離子之穩定度常數logKCu為5~15之化合物者。穩定度常數logKCu為表示螯合劑與金屬之鍵結力之強度的指標,並可作為上述式(1)所示之反應式之平衡常數KCu的對數值而求出。具體而言,KCu可藉由下述式(2)求出。 The chelating agent (B) is a compound containing a copper ion having a stability constant log K Cu of 5 to 15 when x=1 of the above formula (1) at 25 ° C and an ionic strength of 0.1 mol/L. The stability constant logK Cu is an index indicating the strength of the bonding force between the chelating agent and the metal, and can be obtained as a logarithmic value of the equilibrium constant K Cu of the reaction formula represented by the above formula (1). Specifically, K Cu can be obtained by the following formula (2).
關於本發明中之「穩定度常數logKCu」,作為各種化合物之具體數值,例如記載於化學便覽(丸善)、Stability Constants of Metal-Ion Complexes(PERGAMON PRESS)、Journal of Chemical Engineering Data(ACS Publications)等文獻中。 The "stability constant log K Cu " in the present invention is described, for example, in the chemical handbook (Maruzen), Stability Constants of Metal-Ion Complexes (PERGAMON PRESS), and Journal of Chemical Engineering Data (ACS Publications). Etc. in the literature.
可認為,調配與銅離子之上述穩定度常數logKCu為5以上之化合物作為螯合劑(B),藉此於糊內產生之銅離子之至少一部分與螯合劑(B)形成錯合物。因此,可減少與大氣中之水分或氧等(例如O2、H2O等)反應之銅離子之量,可抑制糊內之氧化銅之形成。又,螯合劑(B)由於不易與銅離子解離,故而即便放置於高濕度之環境下,亦可長期維持錯合物之狀態。因此,可製成不易形成氧化覆膜,並且能夠形成使體積電阻率之上升得到抑制之導電膜的導電糊。 It is considered that a compound having a stability constant constant log K Cu of copper ions of 5 or more is used as the chelating agent (B), whereby at least a part of the copper ions generated in the paste form a complex with the chelating agent (B). Therefore, the amount of copper ions which react with moisture or oxygen in the atmosphere (for example, O 2 , H 2 O, etc.) can be reduced, and formation of copper oxide in the paste can be suppressed. Further, since the chelating agent (B) is not easily dissociated from the copper ions, the state of the complex compound can be maintained for a long period of time even when placed in an environment of high humidity. Therefore, it is possible to form a conductive paste which is less likely to form an oxide film and which can form a conductive film which suppresses an increase in volume resistivity.
若螯合劑(B)之上述穩定度常數logKCu未達5,則對於銅離子之鍵結力不充分,因此無法充分地減少與大氣中之水分或氧等反應之銅離子的量,難以抑制氧化銅之形成。又,若螯合劑(B)之上述穩定度數logKCu超過15,則有螯合劑(B)對於銅離子之鍵結力過強,阻礙銅粒子彼此之接觸,降低導電性之虞。推斷其原因在於:螯合劑(B)不僅對存在於銅粒子表面上之銅離子,亦對銅(金屬銅)發揮作用。穩定度常數logKCu更佳為7~14。 When the stability constant logK Cu of the chelating agent (B) is less than 5, the bonding force with respect to copper ions is insufficient, so that the amount of copper ions which react with moisture or oxygen in the atmosphere cannot be sufficiently reduced, and it is difficult to suppress. The formation of copper oxide. Further, when the stability degree logK Cu of the chelating agent (B) exceeds 15, the bonding force of the chelating agent (B) to the copper ions is too strong, and the contact of the copper particles is inhibited, and the conductivity is lowered. It is presumed that the reason is that the chelating agent (B) acts not only on the copper ions present on the surface of the copper particles but also on the copper (metal copper). The stability constant logK Cu is preferably from 7 to 14.
作為螯合劑(B),可較佳地使用將包含氮原子之官能基(a)與包含除氮原子以外之具有孤電子對的原子之官能基(b)配置於芳香環之鄰位上,且使官能基(a)之「氮原子」與官能基(b)之「具有孤電子對之原子」經由2個或3個原子鍵結而成的芳香族化合物。 As the chelating agent (B), a functional group (a) containing a nitrogen atom and a functional group (b) having an atom having a lone electron pair other than the nitrogen atom may be preferably disposed at the ortho position of the aromatic ring. Further, an aromatic compound in which a "nitrogen atom" of the functional group (a) and a "group of atoms having a lone pair of electrons" of the functional group (b) are bonded via two or three atoms.
藉由調配具有上述分子結構之化合物作為螯合劑(B),可與銅離子形成穩定之錯合物。 By formulating a compound having the above molecular structure as the chelating agent (B), a stable complex with copper ions can be formed.
作為介於官能基(a)之「氮原子」與官能基(b)之「具有孤電子對之原子」間的原子,可列舉碳原子。即,作為螯合劑(B),於上述芳香族化合物中,可較佳地使用官能基(a)之氮原子與官能基(b)之具有孤電子對之原子經由2個或3個碳原子而鍵結者。 Examples of the atom between the "nitrogen atom" of the functional group (a) and the "atom having a lone electron pair" of the functional group (b) include a carbon atom. That is, as the chelating agent (B), among the above aromatic compounds, it is preferred to use a nitrogen atom of the functional group (a) and an atom having a lone pair of electrons of the functional group (b) via two or three carbon atoms. And the key is the person.
作為適合作為具有孤電子對之包含除氮原子以外之原子的官能基(b)者,例如可列舉羥基、羧基等。 Examples of the functional group (b) which is suitable as an atom having a group other than a nitrogen atom having a lone pair of electrons include a hydroxyl group and a carboxyl group.
作為螯合劑(B),具體而言可使用選自水楊羥肟酸、水楊醛肟、鄰胺基苯酚中之至少一種。 As the chelating agent (B), specifically, at least one selected from the group consisting of salicyl hydroxamic acid, salicylaldoxime, and o-aminophenol can be used.
於使用水楊醛肟作為螯合劑(B)之情形時,藉由下述式(1)所示之反應而形成與銅離子之錯合物。 In the case where salicylaldoxime is used as the chelating agent (B), a complex with copper ions is formed by a reaction represented by the following formula (1).
導電糊中之螯合劑(B)之含量相對於上述銅粒子(A)100質量份,較佳為0.01~1質量份,更佳為0.05~0.5質量份。 The content of the chelating agent (B) in the conductive paste is preferably 0.01 to 1 part by mass, more preferably 0.05 to 0.5 part by mass, per 100 parts by mass of the copper particles (A).
若螯合劑(B)之含量未達0.01質量份,則有於製成導電膜時,無法充分地獲得抑制體積電阻率之上升的效果之虞。另一方面,若螯合劑(B)之含量超過1質量份,則有阻礙銅粒子彼此之接觸,降低導電性之虞。 When the content of the chelating agent (B) is less than 0.01 parts by mass, when the conductive film is formed, the effect of suppressing an increase in volume resistivity cannot be sufficiently obtained. On the other hand, when the content of the chelating agent (B) exceeds 1 part by mass, the copper particles are prevented from coming into contact with each other, and the conductivity is lowered.
作為於本發明之實施形態之導電糊中所含的熱硬化性樹 脂(C),可使用用作通常之導電糊之樹脂黏合劑的公知之熱硬化性樹脂。 a thermosetting tree contained in the conductive paste as an embodiment of the present invention As the fat (C), a known thermosetting resin which is used as a resin binder of a usual conductive paste can be used.
作為熱硬化性樹脂(C),例如可較佳地使用酚系樹脂、三聚氰胺樹脂、脲樹脂等。該等之中,可尤其較佳地使用酚系樹脂。作為酚系樹脂,可使用酚醛清漆型酚系樹脂、可溶酚醛型酚系樹脂,該等之中,可尤其較佳地使用可溶酚醛型酚系樹脂。 As the thermosetting resin (C), for example, a phenol resin, a melamine resin, a urea resin or the like can be preferably used. Among these, a phenol resin can be particularly preferably used. As the phenol resin, a novolac type phenol resin or a resol type phenol resin can be used, and among these, a resol type phenol resin can be preferably used.
再者,為調節樹脂之玻璃轉移點(Tg),亦可於上述熱硬化性樹脂中適當含有選自鄰苯二甲酸二烯丙酯樹脂、不飽和醇酸樹脂、環氧樹脂、異氰酸酯樹脂、雙馬來醯亞胺三樹脂、矽酮樹脂及丙烯酸系樹脂中之至少一種。 Further, in order to adjust the glass transition point (Tg) of the resin, a diene phthalate resin, an unsaturated alkyd resin, an epoxy resin, an isocyanate resin, or the like may be appropriately contained in the thermosetting resin. Bismaleimide III At least one of a resin, an anthrone resin, and an acrylic resin.
於熱硬化性樹脂(C)中,可於不抑制導電性之範圍內添加硬化後之樹脂成分。 In the thermosetting resin (C), the cured resin component can be added in a range that does not inhibit conductivity.
導電糊中之熱硬化性樹脂(C)之含量可根據銅粒子之體積與存在於銅粒子間之空隙之體積的比率而適當地選擇。相對於銅粒子(A)100質量份,較佳為5~50質量份,更佳為5~20質量份。若熱硬化性樹脂(C)之含量未達5質量份,則難以獲得作為導電糊之充分之流動特性。另一方面,若熱硬化性樹脂(C)之含量超過50質量份,則有硬化後之樹脂成分妨礙銅粒子間之接觸而使導電體之體積電阻率升高之虞。 The content of the thermosetting resin (C) in the conductive paste can be appropriately selected depending on the ratio of the volume of the copper particles to the volume of the voids existing between the copper particles. It is preferably 5 to 50 parts by mass, more preferably 5 to 20 parts by mass, per 100 parts by mass of the copper particles (A). When the content of the thermosetting resin (C) is less than 5 parts by mass, it is difficult to obtain sufficient flow characteristics as the conductive paste. On the other hand, when the content of the thermosetting resin (C) exceeds 50 parts by mass, the resin component after curing hinders the contact between the copper particles and increases the volume resistivity of the conductor.
本發明之實施形態之導電糊中所含的有機酸之酯或醯胺(D)促進上述熱硬化性樹脂(C)之硬化,藉此以使上述熱硬 化性樹脂(C)於未達150℃之溫度下硬化為目的而加以調配。構成酯或醯胺之有機酸係設為pKa為1~4者。若有機酸之pKa未達1,則有對導電糊之保存性造成不良影響之虞。又,若有機酸之pKa超過4,則促進上述熱硬化性樹脂(C)之硬化的中間物之形成變慢,結果有無法獲得樹脂之硬化促進效果之虞。有機酸之pKa更佳為1~3。 The ester of the organic acid or the decylamine (D) contained in the conductive paste according to the embodiment of the present invention promotes the hardening of the thermosetting resin (C), thereby making the above-mentioned hot hard The resin (C) is formulated for the purpose of hardening at a temperature of less than 150 °C. The organic acid constituting the ester or guanamine is set to have a pKa of 1 to 4. If the pKa of the organic acid is less than 1, there is a problem that the storage stability of the conductive paste is adversely affected. In addition, when the pKa of the organic acid exceeds 4, the formation of the intermediate which promotes the hardening of the thermosetting resin (C) is slowed, and as a result, the curing effect of the resin cannot be obtained. The pKa of the organic acid is preferably from 1 to 3.
作為pKa為1~4之有機酸,可列舉:乙二酸(1.27)、順丁烯二酸(1.92)、丙二酸(2.86)、水楊酸(2.97)、反丁烯二酸(3.02)、酒石酸(3.06)、檸檬酸(3.16)、甲酸(3.76)等。 Examples of the organic acid having a pKa of 1 to 4 include oxalic acid (1.27), maleic acid (1.92), malonic acid (2.86), salicylic acid (2.97), and fumaric acid (3.02). ), tartaric acid (3.06), citric acid (3.16), formic acid (3.76), and the like.
作為於該等pKa為1~4之有機酸中可較佳地使用酯或醯胺之理由,可列舉如下。 The reason why the ester or the decylamine is preferably used in the organic acid having a pKa of 1 to 4 is as follows.
(1)若使用pKa為1~4之有機酸之酯或醯胺,則使熱硬化性樹脂(例如為酚系樹脂或三聚氰胺樹脂、脲樹脂)之中間物穩定地存在之效果較大。其原因在於:上述酯或醯胺係配位於作為上述熱硬化性樹脂之中間物之二亞甲基醚型中間物上。藉由該配位,反應部位之一個羥甲基的氧上之電子密度增大,且相對之羥甲基之碳上的電子密度減少。因此,由於穩定地存在二亞甲基醚型中間物,故而中間物之反應機率上升而促進硬化。其結果可提昇硬化後之導電膜於高溫高濕時之耐久性。 (1) When an ester of an organic acid having a pKa of 1 to 4 or a guanamine is used, the effect of stably forming an intermediate of a thermosetting resin (for example, a phenol resin or a melamine resin or a urea resin) is large. The reason for this is that the above ester or guanamine is bonded to a dimethylene ether type intermediate which is an intermediate of the above thermosetting resin. By this coordination, the electron density on the oxygen of one methylol group at the reaction site increases, and the electron density on the carbon of the methylol group decreases. Therefore, since the dimethylene ether type intermediate is stably present, the reaction probability of the intermediate increases and the hardening is promoted. As a result, the durability of the cured conductive film at high temperature and high humidity can be improved.
(2)藉由pKa為1~4之有機酸之酯或醯胺的配位,可較大地提昇上述中間物之亞甲基碳陽離子之反應性。因此,對於硬化促進之幫助較大,可提昇硬化後之導電膜於高溫高濕時之耐久性。 (2) The reactivity of the methylene carbocation of the above intermediate can be greatly enhanced by the coordination of the ester of the organic acid having a pKa of 1 to 4 or the decylamine. Therefore, it is more helpful for the promotion of hardening, and the durability of the conductive film after hardening at high temperature and high humidity can be improved.
(3)有機酸之酯或醯胺由於與有機酸相比,與金屬之反應性較小,故而腐蝕金屬之效果較小,可抑制硬化後之導電膜的體積電阻率之上升。於使用pKa為1~4之有機酸單體之情形時,有腐蝕導電糊中之金屬而使硬化後之導電膜的體積電阻率升高之虞。 (3) Since the organic acid ester or the decylamine has a smaller reactivity with the metal than the organic acid, the effect of corroding the metal is small, and the increase in the volume resistivity of the conductive film after hardening can be suppressed. In the case of using an organic acid monomer having a pKa of 1 to 4, the metal in the conductive paste is corroded to increase the volume resistivity of the cured conductive film.
(4)有機酸之酯或醯胺於糊保存時促進糊中之熱硬化性樹脂的硬化之效果較小,因此對導電糊之保存性(適用期)造成之不良影響較小。 (4) The ester of an organic acid or decylamine has a small effect of promoting hardening of the thermosetting resin in the paste during storage of the paste, and thus has less adverse effect on the preservability (applicability period) of the conductive paste.
(5)有機酸之酯或醯胺不會阻礙有助於硬化後之導電膜的耐久性提昇之螯合劑之功能,因此可充分地維持耐久性。 (5) The ester of the organic acid or the guanamine does not inhibit the function of the chelating agent which contributes to the improvement of the durability of the conductive film after hardening, and therefore the durability can be sufficiently maintained.
作為上述pKa為1~4之有機酸之酯或醯胺,例如可列舉:甲醯胺、水楊酸甲酯、甲酸甲酯、甲酸乙酯、乙二酸二甲酯、順丁烯二酸二甲酯、丙二酸二甲酯等。雖並不限定於該等,但較佳為選自該等中之至少一種。 Examples of the ester or guanamine of the organic acid having a pKa of 1 to 4 include formazan, methyl salicylate, methyl formate, ethyl formate, dimethyl oxalate, and maleic acid. Dimethyl ester, dimethyl malonate, and the like. Although not limited to these, it is preferably selected from at least one of these.
於該等pKa為1~4之有機酸之酯或醯胺中,可較佳地使用不含硫(S)之有機酸之酯或醯胺。其原因在於:有S與銅反應而形成硫化物之虞,因此即便為有機酸之酯或醯胺,亦有對糊保存性造成不良影響之虞。具體而言,可較佳地使用甲醯胺、水楊酸甲酯、乙二酸二甲酯、丙二酸二甲酯、順丁烯二酸二甲酯。 Among the esters of the organic acid or the guanamine having a pKa of 1 to 4, an ester of an organic acid containing no sulfur (S) or a guanamine can be preferably used. The reason for this is that there is a reaction between S and copper to form a sulfide, and therefore, even an ester of an organic acid or a guanamine has an adverse effect on the preservability of the paste. Specifically, formamide, methyl salicylate, dimethyl oxalate, dimethyl malonate, and dimethyl maleate can be preferably used.
導電糊中之上述有機酸酯或醯胺(D)之含量相對於上述熱硬化性樹脂(C)100質量份,較佳為0.5~15質量份,更佳為1~10質量份。若上述有機酸酯或醯胺(D)之含量未達0.5 質量份,則有無法充分地獲得促進樹脂之硬化的效果之虞。另一方面,若上述有機酸酯或醯胺(D)之含量超過15質量份,則有阻礙銅粒子彼此之接觸,降低導電性之虞。 The content of the above-mentioned organic acid ester or decylamine (D) in the conductive paste is preferably 0.5 to 15 parts by mass, more preferably 1 to 10 parts by mass, per 100 parts by mass of the thermosetting resin (C). If the content of the above organic acid ester or decylamine (D) is less than 0.5 In the case of the mass portion, the effect of promoting the hardening of the resin may not be sufficiently obtained. On the other hand, when the content of the organic acid ester or the decylamine (D) exceeds 15 parts by mass, the copper particles are prevented from coming into contact with each other, and the conductivity is lowered.
本發明之導電糊除上述(A)~(D)之各成分以外,亦可視需要於不損害本發明之效果之範圍內含有溶劑或各種添加劑(調平劑、偶合劑、黏度調整劑、抗氧化劑、黏著劑等)等其他成分。尤其是為了獲得具有適度之流動性之糊體,較佳為含有可溶解熱硬化性樹脂之溶劑。 In addition to the components of the above (A) to (D), the conductive paste of the present invention may contain a solvent or various additives (a leveling agent, a coupling agent, a viscosity modifier, and an anti-resistant agent) as needed within a range not impairing the effects of the present invention. Other ingredients such as oxidants, adhesives, etc.). In particular, in order to obtain a paste having moderate fluidity, it is preferred to contain a solvent which can dissolve the thermosetting resin.
作為導電糊中所含之溶劑,例如可較佳地使用環己酮、環己醇、松脂醇、乙二醇、乙二醇單乙醚、乙二醇單丁醚、乙二醇單乙醚乙酸酯、乙二醇單丁醚乙酸酯、二乙二醇、二乙二醇單乙醚、二乙二醇單丁醚、二乙二醇單乙醚乙酸酯、二乙二醇單丁醚乙酸酯等。 As the solvent contained in the conductive paste, for example, cyclohexanone, cyclohexanol, rosinol, ethylene glycol, ethylene glycol monoethyl ether, ethylene glycol monobutyl ether, ethylene glycol monoethyl ether acetate can be preferably used. Ester, ethylene glycol monobutyl ether acetate, diethylene glycol, diethylene glycol monoethyl ether, diethylene glycol monobutyl ether, diethylene glycol monoethyl ether acetate, diethylene glycol monobutyl ether Acid esters, etc.
就作為印刷用糊體而設為適度之黏度範圍之觀點而言,導電糊中所含之溶劑之量相對於銅粒子(A)較佳為1~10質量%。 The amount of the solvent contained in the conductive paste is preferably from 1 to 10% by mass based on the copper particles (A) from the viewpoint of a suitable viscosity range as the paste for printing.
本發明之實施形態之導電糊可將上述(A)~(D)之各成分與溶劑等其他成分混合而獲得。 The conductive paste according to the embodiment of the present invention can be obtained by mixing the components of the above (A) to (D) with other components such as a solvent.
於混合上述(A)~(D)之各成分時,可於不產生熱硬化性樹脂之硬化或溶劑之揮發的程度之溫度下,一面加熱一面進行。混合、攪拌時之溫度較佳為設為10~40℃,更佳為設為20~30℃。於形成導電糊時,藉由設為10℃以上之溫度,可充分地降低糊之黏度,可順利且充分地進行攪拌。 又,可使於銅粒子表面生成之氫化銅成為銅原子。另一方面,若形成導電糊時之溫度超過40℃,則有於糊中產生熱硬化性樹脂(C)之硬化,或產生粒子彼此之融合之虞。 When the components (A) to (D) are mixed, the heating can be carried out while the thermosetting resin is hardened or the solvent is volatilized. The temperature during mixing and stirring is preferably set to 10 to 40 ° C, more preferably 20 to 30 ° C. When the conductive paste is formed, by setting the temperature to 10 ° C or higher, the viscosity of the paste can be sufficiently lowered, and the stirring can be smoothly and sufficiently performed. Further, the copper hydride formed on the surface of the copper particles can be made into a copper atom. On the other hand, when the temperature at which the conductive paste is formed exceeds 40 ° C, the thermosetting resin (C) is hardened in the paste or the particles are fused to each other.
再者,為了於混合時防止銅粒子氧化,較佳為於經惰性氣體置換之容器內混合。 Further, in order to prevent oxidation of the copper particles during mixing, it is preferred to mix in a vessel substituted with an inert gas.
根據以上說明之本發明之導電糊,可形成於空氣中亦不易氧化,且與先前之導電糊相比,使因氧化銅之形成所導致之體積電阻率的上升得到抑制之導電膜。 According to the conductive paste of the present invention described above, it is possible to form a conductive film which is less likely to be oxidized in the air and which suppresses an increase in volume resistivity due to formation of copper oxide as compared with the conventional conductive paste.
例如如圖1所示,本發明之附導電膜之基材10具有使上述導電糊於基材11上硬化而形成之導電膜12。該附導電膜之基材10可藉由如下方法製造:將上述導電糊塗佈於基材11之表面上而形成導電糊膜,於去除溶劑等揮發性成分後,使導電糊中之熱硬化性樹脂(C)硬化而形成導電膜12。 For example, as shown in FIG. 1, the substrate 10 with a conductive film of the present invention has a conductive film 12 formed by hardening the conductive paste on the substrate 11. The substrate 10 with a conductive film can be produced by applying the conductive paste to the surface of the substrate 11 to form a conductive paste, and after removing volatile components such as a solvent, the thermosetting property in the conductive paste is obtained. The resin (C) is hardened to form the conductive film 12.
作為基材11,可使用玻璃基板、塑膠基材(例如包含聚醯亞胺膜、聚酯膜等之膜狀基材)、纖維強化複合材料(玻璃纖維強化樹脂基板等)、陶瓷基板等。於使用本發明之導電糊之情形時,如下所述般,藉由在未達150℃(例如,120~140℃)之溫度下之加熱,可使熱硬化性樹脂(C)硬化而形成導電膜12,因此可尤其較佳地使用如聚對苯二甲酸乙二酯(PET)或聚萘二甲酸二乙酯(PEN)之聚酯、聚碳酸酯等塑膠基材。 As the substrate 11, a glass substrate, a plastic substrate (for example, a film-form substrate including a polyimide film or a polyester film), a fiber-reinforced composite material (such as a glass fiber-reinforced resin substrate), a ceramic substrate, or the like can be used. In the case of using the conductive paste of the present invention, the thermosetting resin (C) can be hardened to form a conductive by heating at a temperature of less than 150 ° C (for example, 120 to 140 ° C) as follows. For the film 12, a plastic substrate such as polyethylene terephthalate (PET) or polyethylene naphthalate (PEN), polycarbonate or the like can be particularly preferably used.
作為導電糊之塗佈方法,可列舉:絲網印刷法、輥式塗 佈法、氣刀式塗佈法、刮塗法、棒式塗佈法、凹板印刷式塗佈法、模塗法、斜板式塗佈法等公知之方法。 As a coating method of a conductive paste, a screen printing method and a roll coating are mentioned. A known method such as a cloth method, an air knife coating method, a knife coating method, a bar coating method, a gravure coating method, a die coating method, or a swash plate coating method.
該等之中,可於基材11上有效地形成使表面及側面之凹凸的產生得到抑制之流暢之配線形狀,因此可較佳地使用絲網印刷法。 Among these, a smooth wiring shape in which the occurrence of irregularities on the surface and the side surface can be effectively formed on the substrate 11, and therefore, a screen printing method can be preferably used.
熱硬化性樹脂(C)之硬化可藉由在未達150℃(例如為120~140℃)之溫度下保持形成有導電糊膜之基材而進行。藉由將硬化溫度設為120℃以上,可使熱硬化性樹脂充分地硬化。另一方面,藉由將硬化溫度設為140℃以下,即便於使用塑膠膜等基材之情形時,亦可不使基材變形而進行硬化。作為加熱方法,可列舉熱風加熱、熱輻射、IR(Infrared Radiation,紅外輻射)加熱等方法。再者,導電膜之形成可於空氣中進行,且亦可於氧量較少之氮氣環境下等進行。 The hardening of the thermosetting resin (C) can be carried out by maintaining the substrate on which the conductive paste film is formed at a temperature of less than 150 ° C (for example, 120 to 140 ° C). The thermosetting resin can be sufficiently cured by setting the curing temperature to 120 ° C or higher. On the other hand, when the curing temperature is 140 ° C or lower, even when a substrate such as a plastic film is used, the substrate can be cured without being deformed. Examples of the heating method include hot air heating, heat radiation, and IR (Infrared Radiation) heating. Further, the formation of the conductive film can be carried out in the air, or in a nitrogen atmosphere in which the amount of oxygen is small.
就確保穩定之導電性且易於維持配線形狀之觀點而言,基材11上之導電膜12之厚度較佳為1~200 μm,更佳為5~100 μm。又,導電膜12之體積電阻率較佳為1.0×10-4 Ωcm以下。若導電膜12之體積電阻率超過1.0×10-4 Ωcm,則有無法獲得作為電子機器用導電體之充分的導電性之虞。 The thickness of the conductive film 12 on the substrate 11 is preferably from 1 to 200 μm, more preferably from 5 to 100 μm, from the viewpoint of ensuring stable conductivity and easily maintaining the wiring shape. Further, the volume resistivity of the conductive film 12 is preferably 1.0 × 10 -4 Ωcm or less. When the volume resistivity of the conductive film 12 exceeds 1.0 × 10 -4 Ωcm, sufficient conductivity as a conductor for an electronic device cannot be obtained.
於本發明之附導電膜之基材10中,係使用上述本發明之導電糊而形成導電膜12,因此不易形成因氧化銅所導致之氧化覆膜,與先前之附導電膜之基材相比,可製成體積電阻率較低,且即便於高濕度之環境下長期使用,亦可使體 積電阻率之上升得到抑制之附導電膜的基材。 In the substrate 10 with a conductive film of the present invention, the conductive film 12 is formed by using the above-described conductive paste of the present invention, so that an oxide film due to copper oxide is not easily formed, and the substrate of the prior conductive film is formed. Ratio can be made to have a low volume resistivity and can be used for a long period of time even in a high humidity environment. A substrate to which a conductive film is suppressed from which an increase in the resistivity is suppressed.
以上,列舉一例對本發明之附導電膜之基材進行說明,但可於不違反本發明之主旨之範圍內且視需要適當地變更構成。又,於本發明之附導電膜之基材的製造方法中,對各部之形成順序等,亦可於能夠製造附導電膜之基材之範圍內適當地變更。 In the above, an example of the substrate to which the conductive film of the present invention is applied is described, but the configuration may be appropriately changed as needed within the scope of the gist of the invention. Further, in the method for producing a substrate with a conductive film of the present invention, the order of formation of the respective portions may be appropriately changed within a range in which the substrate with the conductive film can be produced.
以下,藉由實施例更詳細地說明本發明。例1~4為本發明之實施例,例5~10為比較例。 Hereinafter, the present invention will be described in more detail by way of examples. Examples 1 to 4 are examples of the present invention, and examples 5 to 10 are comparative examples.
對銅粒子實施還原處理而獲得銅粒子(A)(表面改質銅粒子)。 The copper particles are subjected to a reduction treatment to obtain copper particles (A) (surface-modified copper particles).
即,首先,向玻璃製燒杯中投入甲酸3.0 g與50質量%之次亞磷酸水溶液9.0 g,將該燒杯放入水浴中並保持於40℃下。 Specifically, first, 3.0 g of formic acid and 9.0 g of a 50% by mass aqueous solution of phosphorous acid were placed in a glass beaker, and the beaker was placed in a water bath and kept at 40 °C.
繼而,向該燒杯內緩慢地添加銅粒子(三井金屬礦業公司製造,商品名:「1400YP」,平均一次粒徑為7 μm)5.0 g,攪拌30分鐘而獲得「銅分散液」。使用離心分離器以轉速3000 rpm對所獲得之「銅分散液」進行10分鐘之離心分離,回收沈澱物。使該沈澱物分散於蒸餾水30 g中,利用離心分離再次使凝聚物沈澱,並將沈澱物分離。於-35 kPa之減壓下,於80℃下將所獲得之沈澱物加熱60分鐘,使殘留水分揮發而緩慢地去除,從而獲得使粒子表面改質之銅粒子(A-1)。 Then, 5.0 g of copper particles (trade name: "1400YP", average primary particle diameter: 7 μm) was added to the beaker slowly, and the mixture was stirred for 30 minutes to obtain a "copper dispersion". The obtained "copper dispersion" was centrifuged at a rotation speed of 3000 rpm for 10 minutes using a centrifugal separator to recover a precipitate. The precipitate was dispersed in 30 g of distilled water, and the aggregate was again precipitated by centrifugation, and the precipitate was separated. The obtained precipitate was heated at 80 ° C for 60 minutes under reduced pressure of -35 kPa to volatilize residual moisture and slowly removed, thereby obtaining copper particles (A-1) which modify the surface of the particles.
對所獲得之銅粒子(A-1),利用X射線光電子分光分析裝 置(ULVAC-PHI公司製造,商品名:「ESCA5500」)於如下條件下進行表面氧濃度[原子%]及表面銅濃度[原子%]之測定。 X-ray photoelectron spectroscopy analysis of the obtained copper particles (A-1) The surface oxygen concentration [atomic %] and the surface copper concentration [atomic %] were measured under the following conditions (manufactured by ULVAC-PHI Co., Ltd., trade name: "ESCA 5500").
.分析面積:800 mm2Φ . Analysis area: 800 mm 2 Φ
.通能(Pass Energy):93.9 eV . Pass Energy: 93.9 eV
.能階(Energy Step):0.8 eV/階段(step) . Energy Step: 0.8 eV/stage
將所獲得之表面氧濃度除以表面銅濃度而算出表面氧濃度比O/Cu,結果銅粒子(A-1)之表面氧濃度比O/Cu為0.16。 The surface oxygen concentration ratio O/Cu was calculated by dividing the obtained surface oxygen concentration by the surface copper concentration. As a result, the surface oxygen concentration ratio O/Cu of the copper particles (A-1) was 0.16.
再者,使用氧量計(LECO公司製造,商品名:「ROH-600」)測定銅粒子(A-1)中之氧量,結果為460 ppm。 In addition, the amount of oxygen in the copper particles (A-1) was measured using an oxygen meter (manufactured by LECO Corporation, trade name: "ROH-600"), and it was 460 ppm.
於混合有酚系樹脂(群榮化學公司製造,商品名:「ResitopPL6220」,樹脂固形物成分為58質量%)0.74 g與乙二醇單丁醚乙酸酯0.43 g之樹脂溶液中,添加水楊羥肟酸0.005 g並使其溶解,其後添加甲醯胺0.0215 g並使其溶解。繼而,於所獲得之樹脂溶液中調配上述銅粒子(A-1)5.0 g,並於研缽中加以混合而獲得導電糊1。 Water was added to a resin solution in which a phenol resin (manufactured by Kyoei Chemical Co., Ltd., trade name: "Resitop PL6220", resin solid content: 58% by mass) of 0.74 g and ethylene glycol monobutyl ether acetate 0.43 g was mixed. The hydroxyhydroxamic acid was 0.005 g and dissolved, and then 0.015 g of formamide was added and dissolved. Then, 5.0 g of the above copper particles (A-1) was blended in the obtained resin solution, and mixed in a mortar to obtain a conductive paste 1.
於PET基板上藉由絲網印刷法將該導電糊1塗佈成寬度1 mm、厚度20 μm之配線形狀(帶狀),於130℃下加熱15分鐘而使酚系樹脂硬化。如此,形成具有導電膜1之附導電膜之基材1。 The conductive paste 1 was applied onto a PET substrate by a screen printing method to have a wiring shape (band shape) having a width of 1 mm and a thickness of 20 μm, and was heated at 130 ° C for 15 minutes to cure the phenol resin. Thus, the substrate 1 having the conductive film attached to the conductive film 1 is formed.
將甲醯胺0.0215 g變更為水楊酸甲酯0.0215 g,除此以 外,以與實施例1同樣之方式獲得導電糊2。繼而,代替導電糊1,於PET基板上塗佈導電糊2而形成導電膜2,除此以外,以與例1同樣之方式獲得附導電膜之基材2。 Change 0.015 g of methotrexate to 0.0215 g of methyl salicylate, except Further, the conductive paste 2 was obtained in the same manner as in Example 1. Then, a substrate 2 with a conductive film was obtained in the same manner as in Example 1 except that the conductive paste 2 was applied onto the PET substrate to form the conductive film 2 instead of the conductive paste 1.
將水楊羥肟酸0.005 g變更為水楊醛肟0.005 g,將甲醯胺0.0215 g變更為乙二酸二甲酯0.0215 g。除此以外,以與例1同樣之方式獲得導電糊3。繼而,代替導電糊1,於PET基板上塗佈導電糊3而形成導電膜3,除此以外,以與例1同樣之方式獲得附導電膜之基材3。 0.005 g of salicyl hydroxamic acid was changed to 0.005 g of salicylaldehyde oxime, and 0.0215 g of methotrexate was changed to 0.0215 g of dimethyl oxalate. A conductive paste 3 was obtained in the same manner as in Example 1 except the above. Then, a substrate 3 with a conductive film was obtained in the same manner as in Example 1 except that the conductive paste 3 was applied to the PET substrate to form the conductive film 3 instead of the conductive paste 1.
將乙二酸二甲酯0.0215 g變更為順丁烯二酸二甲酯0.0215 g,除此以外,以與例3同樣之方式獲得導電糊4。繼而,代替導電糊3,於PET基板上塗佈導電糊4而形成導電膜4,除此以外,以與例3同樣之方式獲得附導電膜之基材4。 A conductive paste 4 was obtained in the same manner as in Example 3 except that 0.0215 g of dimethyl oxalate was changed to 0.0215 g of dimethyl maleate. Then, a substrate 4 with a conductive film was obtained in the same manner as in Example 3 except that the conductive paste 4 was applied to the PET substrate to form the conductive film 4 instead of the conductive paste 3.
於樹脂溶液中不添加甲醯胺0.0215 g。除此以外,以與例1同樣之方式獲得導電糊5。 No 0.0015 g of formamide was added to the resin solution. Otherwise, the conductive paste 5 was obtained in the same manner as in Example 1.
代替甲醯胺0.0215 g,將碳酸伸丙酯0.0215 g添加至樹脂溶液中,除此以外,以與例1同樣之方式獲得導電糊6。 A conductive paste 6 was obtained in the same manner as in Example 1 except that 0.015 g of the formamide was added and 0.0215 g of propyl carbonate was added to the resin solution.
代替甲醯胺0.0215 g,將乙酸苯酯0.0215 g添加至樹脂溶液中,除此以外,以與例1同樣之方式獲得導電糊7。 A conductive paste 7 was obtained in the same manner as in Example 1 except that 0.015 g of the carbamide was added to the resin solution.
代替甲醯胺0.0215 g,將水楊酸0.0215 g添加至樹脂溶液中,除此以外,以與例1同樣之方式獲得導電糊8。 A conductive paste 8 was obtained in the same manner as in Example 1 except that 0.015 g of methamine was added and 0.0215 g of salicylic acid was added to the resin solution.
代替甲醯胺0.0215 g,將乙二酸0.0215 g添加至樹脂溶液中,除此以外,以與例1同樣之方式獲得導電糊9。 A conductive paste 9 was obtained in the same manner as in Example 1 except that 0.015 g of the carbamide was added to the resin solution.
代替甲醯胺0.0215 g,將順丁烯二酸0.0215 g添加至樹脂溶液中,除此以外,以與例1同樣之方式獲得導電糊10。 A conductive paste 10 was obtained in the same manner as in Example 1 except that 0.015 g of methamine was added and 0.0215 g of maleic acid was added to the resin solution.
繼而,代替導電糊1,於PET基板上分別塗佈導電糊5~10,於130℃下加熱15分鐘而形成導電膜5~10。除此以外,以與例1同樣之方式獲得附導電膜之基材5~10(例5~10)。 Then, instead of the conductive paste 1, conductive pastes 5 to 10 were applied to the PET substrate, and heated at 130 ° C for 15 minutes to form conductive films 5 to 10. Otherwise, the substrates 5 to 10 (Examples 5 to 10) with the conductive film were obtained in the same manner as in Example 1.
使用電阻計(吉時利公司製造,商品名:「M-ohm HiTESTER」)測定所獲得之導電膜1~10之電阻值,求出初始之體積電阻率。 The resistance values of the obtained conductive films 1 to 10 were measured using a resistance meter (manufactured by Keithley, trade name: "M-ohm HiTESTER"), and the initial volume resistivity was obtained.
對附導電膜之基材1~10進行於高溫高濕之環境下的耐久性試驗。即,將附導電膜之基材1~10於設為60℃、90%RH之高溫高濕之槽內保持240小時後,測定導電膜1~10之電阻值。並且,求出耐久性試驗後之體積電阻率。 The substrate 1 to 10 with a conductive film was subjected to a durability test in an environment of high temperature and high humidity. In other words, the substrates 1 to 10 with the conductive film were held in a bath of high temperature and high humidity of 60 ° C and 90% RH for 240 hours, and then the resistance values of the conductive films 1 to 10 were measured. Further, the volume resistivity after the durability test was determined.
將如此獲得之初始之體積電阻率、及耐久性試驗後之體積電阻率之變動率(上升率)示於表1中。 The initial volume resistivity thus obtained and the rate of change (increased rate) of the volume resistivity after the durability test are shown in Table 1.
再者,於表1中,硬化劑之添加量係以相對於酚系樹脂之固形物成分100質量份的添加量(質量份)表示者。 In addition, in Table 1, the addition amount of the hardening agent is shown by the addition amount (mass part) with respect to 100 mass parts of solid content components of a phenol-type resin.
由表1表明:於利用調配有pKa為1~4之有機酸之酯或醯胺的導電糊1~4形成導電膜1~4之附導電膜之基材1~4(例1~4)中,體積電阻率較低,且於高溫高濕環境下之耐久性試驗後之體積電阻率的變動率(上升率)亦被抑制於較低。 Table 1 shows that the conductive substrates 1 to 4 of the conductive films 1 to 4 are formed by using the conductive pastes 1 to 4 in which an ester of an organic acid having a pKa of 1 to 4 or a guanamine is blended (Examples 1 to 4). Among them, the volume resistivity is low, and the rate of change (increased rate) of the volume resistivity after the durability test in a high-temperature and high-humidity environment is also suppressed to be low.
另一方面,藉由未調配有機酸之酯或醯胺而形成之導電糊5而形成導電膜5之附導電膜之基材5(例5),係於高溫高濕環境下之耐久性試驗後之體積電阻率的變動率較高而為20%且耐久性較差者。 On the other hand, the substrate 5 (Example 5) with the conductive film of the conductive film 5 is formed by the conductive paste 5 formed without dissolving the ester of the organic acid or the guanamine, and is subjected to a durability test in a high-temperature and high-humidity environment. The subsequent rate of change in volume resistivity is high and is 20% and the durability is poor.
又,利用調配pKa超過4之有機酸之酯或醯胺的導電糊6、7而形成導電膜6~7之附導電膜之基材6~7(例6及7),係於高溫高濕環境下之耐久性試驗後之體積電阻率的變動率變得更高而為20~27%且耐久性較差者。 Further, the conductive pastes 6 and 7 of the conductive films 6 to 7 are formed by blending the conductive pastes 6 and 7 of the organic acid ester or the guanamine having a pKa of more than 4, and the substrates 6 to 7 (Examples 6 and 7) are attached to the high temperature and high humidity. The rate of change of the volume resistivity after the durability test in the environment is higher and is 20 to 27% and the durability is poor.
進而,藉由未調配酯或醯胺而調配有pKa為1~4之有機酸本身之導電糊8~10而形成導電膜8~10之導電膜附之基材 8~10(例8~10),係於高溫高濕環境下之耐久性試驗後之體積電阻率的變動率亦變得較高而為23~26%且耐久性較差者。 Further, a conductive paste 8 to 10 having an organic acid having a pKa of 1 to 4 is prepared by dissolving an ester or a guanamine, and a conductive film of the conductive film 8 to 10 is formed. 8 to 10 (Examples 8 to 10), the rate of change in volume resistivity after the durability test in a high-temperature and high-humidity environment is also high, and is 23 to 26%, and the durability is poor.
雖然參照特定之實施態樣對本發明進行了詳細地說明,但業者明白可於不偏離本發明之精神與範圍之情況下進行各種變更或修正。 Although the present invention has been described in detail with reference to the specific embodiments thereof, it is understood that various changes and modifications may be made without departing from the spirit and scope of the invention.
本申請案係基於2011年5月23日提出申請之日本專利申請案2011-114604者,將其內容作為參照併入至此。 The present application is based on Japanese Patent Application No. 2011-114604, filed on May 23, 2011, the content of
根據本發明之導電糊,可於未達150℃之低於先前之溫度下硬化,於高濕度之環境下抑制氧化銅之形成,可形成能夠長期維持較低之體積電阻率之導電膜。又,藉由使用此種導電糊,可獲得使用樹脂等作為絕緣基材,作為配線基板等之可靠性較高,且使因氧化覆膜之形成所導致的體積電阻率之上升得到抑制之附導電膜之基材。 The conductive paste according to the present invention can be cured at a temperature lower than the previous temperature of less than 150 ° C to suppress the formation of copper oxide in a high humidity environment, and can form a conductive film capable of maintaining a low volume resistivity for a long period of time. In addition, by using such a conductive paste, it is possible to obtain a resin or the like as an insulating base material, and it is highly reliable as a wiring board or the like, and the increase in volume resistivity due to formation of an oxide film is suppressed. A substrate of a conductive film.
10‧‧‧附導電膜之基材 10‧‧‧Substrate with conductive film
11‧‧‧基材 11‧‧‧Substrate
12‧‧‧導電膜 12‧‧‧Electrical film
圖1係表示本發明之附導電膜之基材的一例之剖面模式圖。 Fig. 1 is a schematic cross-sectional view showing an example of a substrate with a conductive film of the present invention.
10‧‧‧附導電膜之基材 10‧‧‧Substrate with conductive film
11‧‧‧基材 11‧‧‧Substrate
12‧‧‧導電膜 12‧‧‧Electrical film
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| JPH09282940A (en) * | 1996-04-11 | 1997-10-31 | Sumitomo Bakelite Co Ltd | Conductive copper paste composition |
| JP2000021235A (en) * | 1998-07-02 | 2000-01-21 | Mitsui Mining & Smelting Co Ltd | Copper-based conductive paste |
| JP4460731B2 (en) * | 2000-07-18 | 2010-05-12 | ハリマ化成株式会社 | Conductive paste and method for preparing the same |
| JP2002038053A (en) * | 2000-07-25 | 2002-02-06 | Sumitomo Metal Mining Co Ltd | Coating liquid for forming transparent conductive layer |
| JP4078990B2 (en) * | 2003-01-23 | 2008-04-23 | 松下電器産業株式会社 | Conductive paste, circuit forming substrate using the conductive paste, and manufacturing method thereof |
| JP2006128005A (en) * | 2004-10-29 | 2006-05-18 | Murata Mfg Co Ltd | Conductive paste and printed circuit board |
| JP2006260951A (en) * | 2005-03-17 | 2006-09-28 | Osaka Univ | Conductive copper paste |
| JP4848674B2 (en) * | 2005-06-03 | 2011-12-28 | 日本電気株式会社 | Resin metal composite conductive material and method for producing the same |
| WO2009116349A1 (en) * | 2008-03-21 | 2009-09-24 | 旭硝子株式会社 | Copper nanoparticle-coated copper filler, method for producing the same, copper paste, and article having metal film |
| CN103262173A (en) * | 2010-12-10 | 2013-08-21 | 旭硝子株式会社 | Conductive paste, conductive film-attached base material using the conductive paste, and method for manufacturing conductive film-attached base material |
-
2012
- 2012-05-22 WO PCT/JP2012/063100 patent/WO2012161201A1/en not_active Ceased
- 2012-05-22 CN CN201280025384.1A patent/CN103582918A/en active Pending
- 2012-05-22 JP JP2013516387A patent/JPWO2012161201A1/en not_active Withdrawn
- 2012-05-22 KR KR1020137030588A patent/KR20140038413A/en not_active Withdrawn
- 2012-05-23 TW TW101118398A patent/TW201301303A/en unknown
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI658156B (en) * | 2014-08-28 | 2019-05-01 | 日商石原產業股份有限公司 | Metallic copper particles and method for production of same |
Also Published As
| Publication number | Publication date |
|---|---|
| WO2012161201A1 (en) | 2012-11-29 |
| JPWO2012161201A1 (en) | 2014-07-31 |
| CN103582918A (en) | 2014-02-12 |
| KR20140038413A (en) | 2014-03-28 |
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