201105517 六、發明說明： 【發明所屬之技術領域】 本發明涉及一種網印網板，其具有網印模版載體和網印 模版，料網印模版設置在所述網印模版載體的底面上。 【先前技術】 〇 在網印時或者在漏印方法中將印刷介質施加至網印網 板’隨後利用沿網印網板頂面導向移動或者緊靠該頂面導 向移動的刮板將印刷介質送入該網印網板的缺口。一些網 印網板具有帶第-缺口的網印模版載體，這些第一缺口如 此構以，gp，它們從該網印模版载體的頂面貫通至底面。 然後可以在網印模版載體的底面上設置網印模版，該網印 模版”有第一缺口 ’其中，第二缺口至少在局部與網印模 版載體的第-缺口重合。通過刮板一次或多次在網印模版 〇載體上的運動就可以將印刷介質輸送經過第一缺口和第二 缺口到達設置於其下的基板。印刷介質不能到達網印模版 覆蓋的區域’從而在基板上形成印刷圖案（加伽⑷， 該印刷圖案基本對應於該網印模版的缺口。 網p和網印網板的採用是早已已知的並且是經過了實 踐檢驗的。然而，隨著待印幅面（zudruckendenBahnen) 越來越小（例如用於太陽能電池時），在通過網印網板將 印刷介質輪送經過狭小的缺口方面存在困難。印刷介質有 時…、法到達基板，而是保持枯附在缺口内，結果造成在基 201105517 板上完全沒有實現印刷。 如果需要在狹窄幅面上印刷，那麼可以利用刮板將印刷 介質施加在設有狹小缺口的網印模版載體上，所述刮板在 承受很大的朝向網印模版載體頂面的壓力的情況下導向移 動。這樣，印刷介質透過細長狹小缺口的寸能性就更高， 從而抵達承印基板。但是此處缺點在於，網印模版載體的 頂面在短時間内磨損’並且網印網板的使用壽命也較短。 【發明内容】 因此本發明的任務在於實現一種網印網板，利用該網印 網板能夠可靠地形成狹長的印刷幅面（Druckbahn )，其中， 該網印網板具有高使用壽命。本發明的任務還在於提供一 種製造這種網印網板的方法。 通過獨立請求項的標的來解決這些任務。本發明的有利 改進方式是附屬請求項的標的。 根據本發明的網印網板具有： 網印模版載體，其被構造為具有第一缺口的薄膜， 所述第一缺口被如此構造，即，所述第一缺口從所述薄膜 的頂面貫通至底面； -網印模版，其被構造為與所述網印模版載體的底面 牢固連接的掩模層，其中，所述掩模層設有第二缺口，所 述第二缺口至少在局部與所述網印模版載體的所述第一缺 口如此重疊，以使印刷介質能夠通過所述網印模版載體的 201105517 1·^禾一缺口’從所述網印模版載體的頂面，穿過所述掩 模層的所述第二缺口被送往所述底面和能夠佈置在它們之 . 下的基板上， 其中’所述網印模版载體和/或所述掩模層被如此構 造’即’凸起伸向至少一個所述第—或者第二缺口的區域 内並且減小所述第一或第二缺口的用於印刷介質的通過面 積’其中’在所述第一缺口區域内的凸起的厚度小於所述 Ο網印模版載體的厚度，和/或所述第二缺口的凸起的厚度小 於所述網印模版的厚度。 在缺口内的凸起使得該缺口的橫截面不是沿其整個長 度，而是僅在一個小範圍内被縮小。在該區域之外，該缺 口可以寬闊地構成，當然通過該凸起縮小了缺口的橫截 面’其中，可以使得印刷介質被輸送通過所述缺口。這使 得雖然直到凸起之上的缺口可以具有寬敞的橫截面，但仍 然允許形成精細的印刷幅面。因此無需很高成本，就可以 〇使得網印模版載體相對網印模版精確定位，以便橫截面較 小的第一缺口至少在局部與橫截面也很小的第二缺口重 合。相反的是，能夠以常見的加工精度來加工。另外，用 於向凸起伸入其内的較寬缺口施加印刷介質的力小於向橫 截面總體很小的缺口施加印刷介質的力。另外，在網印模 版或者網印模版載體中的凸起增大了它們的抗彎剛度和抗 拉強度。因此’在刮板沿網印模版載體頂面運動時，網印 網板將被較低幅度地拉伸’從而其幾何形狀保持了更高可 靠性。因此這種網印網板具有更高的使用壽命。 201105517 掩模層可以具有金屬，並且優選具有鎳。掩模層也可以 由光敏材料製成。例如在聚乙稀酵、毛細膜或者固體殘留 -物（Festresist)基底上的乳劑適於製造這種掩模層。 優選的是，所述凸起順著缺口壁延伸，從而可以實現通 過面積的均勻縮小，並且可以在擠壓印刷介質通過時，均 勻地向凸起施加負荷。這樣，該凸起如光圈（則⑶心）一 樣地發揮作用。 〇 優選的是，所述凸起具有包括一曲率半徑的表面。該曲 率半徑在該缺口中降低了在印刷介質經過缺口内部時的摩 擦阻力’從而能夠以較小的力消耗來實現擠壓通過。 如果網印模版具有小於30微米的厚度並且凸起具有i 微米至25微米的厚度，那麼就很好地實現了上述優點。優 選的疋’通過該凸起使得所述通過面積至少減小了 5%。 網印模版載體和網印模版可以由金屬材料製成。在此網 印模版可以被構造為掩模層’所述掩模層具有鎳。這種材 ◎料可以簡單地通過電鑛沉積來施加。 用於製造所述網印網板的方法具有如下步驟： - 製備基板 - 在所述基板上形成第一網版 -將第一金屬層結構化地電鍍至所述基板 - 在所述第一金屬層上形成第二網版 -將第二金屬層結構化地電鍍至所述第一金屬層，其 中，所述第一金屬層形成網印模版載體，而所述第二金屬 層形成網印模版； 201105517 - 從所述基板上脫開所述第一金屬層； -去除所述第一網版和所述第二網版，從而在所述第 一金屬層中形成第一缺口，而在所述第二金屬層中形成第 二缺口； -其中’所述第一金屬層至少在局部被電鏡在所述第一 網版上’和/或所述第一金屬層至少在局部被電鐘在所述第 二網版上，以形成至少一個凸起。 〇 通過電鑛沉積能夠在一個步驟中無需其他結構化措施 就實現凸起的生長和橫截面的縮小。不必採用钱刻。電鑛 沉積還可以形成一凸起’其造成缺口的幾乎任意小的通過 面積。在極端情況下，凸起甚至可以完全封閉缺口。 凸起的形成對網印網板的機械穩定性起到了積極作 用，這是因為形成了「τ形元件」。與以電鍍方式製造的、 開口寬度和層厚一致的網印網板相比，其在抗拉強度方面 遠比具有這種「T形元件」的本發明模版的抗拉強度小得 【實施方式】 圖1示出了根據本發明的網印網板1的第一實施方式。 該網印網板具有網印模版載體2和網印模版3，該網印模 版3與該網印模版載體2牢固地連接。網印模版載體2具 有多個第一缺口 4’這些第一缺口 4均在一端具有凸起卜 201105517 思些凸起6均在該缺口 4内並且順著壁延伸以實現第— 缺口 4的橫截面的均勾縮小。第_缺口 4匯合至設置於第 一缺口 4之下且設置於網印模版3之内的第二缺口 5。在 該實施方式中，第二缺口 5沒有凸起。網印模版3可以且 有金屬或者由光敏材料製成，例如由乳劑層、毛細膜或者 固體殘留物製成。 在本發明的圖2所示的實施方式中，連同網印模版3 一 〇起示出了網印模版載體2,它們彼此牢固地連接，其中， 網印模版載體2在第一缺口 4中具有凸起6。在該實施方 式中，網印模版3比網印模版載體2更厚，該網印模版3 在-端設有凸起7,該凸起7以僅提供通過寬度8的方式 縮小第二缺口 5的寬度9。如果將印刷介質3G施加在網印 寺、版載體2的頂面上並且利用順頂面朝向侧向運動的刮板 將該印刷介質30送入第一缺口 4，那麼第一缺口 4得以填 〇滿並且湧入第二缺口 5。第二缺口 5中可用的空腔也被填 滿印刷介質30，並且這些印刷介# 3〇以通過寬度8朝向 網印模版3底面的方向被擠壓經過凸起7。在網印網板i 的圖2所示的實施方式中，凸起7設置在第二缺口 5的一 端，凸起7的厚度U小於網印模版3的厚度12。另外， 凸起7具有曲率半徑1〇，該曲率半徑1〇使得網印網板易 於從印刷後的基板20上脫模，而不會損壞印跡 (Druckauftrag ) 3 1。 凸起6和凸起7還使得從基板上去除網印網板時，一部 刀印刷介質30在第一和第二缺口中保留在後凹部 201105517 (Hinterschnitt )内’僅將明顯更窄的中心區域作為印跡 31保留在下方的基板2〇上。在該實施方式中，凸起7起 到的作用類似於「刮板棱邊」，從而能夠在顯著的厚度13 的情況下實現非常細長的印跡。因此，印跡3 1的通過寬度 8與該厚度13之比可以是從大於1:2、1: 1 一直到2: 1 ; 因此明顯大於在根據現有技術的電鍍製成的網印網板情況 下能夠達到的比例。 〇 圖3不出了在製造網印網板時的中間產品的橫截面。在 基板21上形成第一菲林版（Lackf〇rm ) 14，隨後在接下來 的方法步驟中結構化地將第一金屬層15電鑛至其上。 鍵過程-直持續到第一金屬層15的厚度超過第一菲林版 14的厚度為止。在此這樣控制電鍍工藝，以使第一金屬層 15能夠在側向生長到第-菲林版Η上（參見附圖標記 18) ’從而使得個別區域在橫截面中呈τ形結構。最後在 第-金屬層15上施加第二菲林版16，並在其上結構化地 Μ電鍍第二金屬層17。該雷供蔹 茲電鍍工藝以與在第一金屬層15的 情況下相同的方式控制，從而使得第二金屬層^也生長至 第二菲林版16之上。圖Ί -山一 圖3不出延些方法步驟的狀態。 如果隨後從基板21 八触·^ Λ „ 极U上为離第一金屬層15和第一 U並且去除第一菲林版菲林版 r w ^ ^ ^ 非林版16,那麼就形成 了八有凸起6的第一缺口 4和且右 所口 4和具有凸起7的第二缺口 $， 例如圖2所示般。第—令邏 的你田而笛 J層可以起到網印模版載體2 的作用’而第二金屬層丨 滑17可以起到網印模版3的作用。 201105517 [圖式簡單說明】 結合附圖說明本發明的里仙 旳具他優點和特徵，圖中： 圖1是根據本發明的網印網板的第一實施方式的橫截 面圖； 圖2是根據本發明的網印網板的第二實施方式的橫截 面圖，以及一個對應的印刷後的基板； 0 圖3是一個裝置的在製造網印網板的方法步驟期間的 橫截面圖。 【主要元件符號說明】201105517 VI. Description of the Invention: [Technical Field] The present invention relates to a screen printing stencil having a screen printing stencil carrier and a screen printing stencil, which is disposed on the bottom surface of the screen printing stencil carrier. [Prior Art] The printing medium is applied to the screen printing screen during screen printing or in the printing method. Then, the printing medium is moved by the squeegee moving along the top surface of the screen printing board or moving against the top surface. The gap that is fed into the screen printing stencil. Some screen stencils have screen printing stencils with first-notch, such first nips, such as gp, which extend from the top surface to the bottom surface of the screen stencil carrier. A screen printing stencil can then be provided on the underside of the screen printing stencil, the screen stencil "having a first gap" wherein the second gap coincides at least partially with the first gap of the screen stencil carrier. The movement on the screen printing stencil carrier can transport the printing medium through the first notch and the second notch to the substrate disposed underneath. The printing medium cannot reach the area covered by the screen stencil 'to form a printed pattern on the substrate (Gaga (4), the printed pattern substantially corresponds to the gap of the screen printing plate. The use of the net p and the screen printing screen has long been known and has been tested. However, with the to-be-printed surface (zudruckenden Bahnen) Smaller and smaller (for example, when used in solar cells), it is difficult to transfer the printing medium through a narrow gap through the screen printing screen. The printing medium sometimes reaches the substrate, but remains attached to the gap. As a result, no printing is achieved at all on the base 201105517. If printing on a narrow web is required, the printing medium can be applied by means of a squeegee. Adding to a screen printing stencil provided with a narrow gap, the squeegee is guided to move under a large pressure toward the top surface of the screen stencil carrier. Thus, the inability of the printing medium to pass through the elongated narrow gap is Higher, so as to reach the printing substrate. However, the disadvantage here is that the top surface of the screen printing stencil wears in a short time 'and the service life of the screen printing stencil is also short. [The present invention] Therefore, the task of the present invention is to achieve A screen printing screen with which a long and narrow printing web (Druckbahn) can be reliably formed, wherein the screen printing screen has a high service life. The object of the invention is also to provide a screen printing net. The method of the board solves these tasks by the subject matter of the independent request item. An advantageous development of the invention is the subject matter of the subsidiary claim item. The screen printing screen according to the invention has: a screen printing template carrier configured to have the first a notched film, the first notch being configured such that the first notch penetrates from a top surface to a bottom surface of the film; a screen printing stencil a mask layer configured to be securely coupled to a bottom surface of the screen stencil carrier, wherein the mask layer is provided with a second notch, the second notch being at least partially associated with the screen stencil carrier The first gaps are overlapped such that the print medium can pass through the top surface of the screen stencil carrier through the top surface of the screen stencil carrier, through the second nip of the screen stencil carrier The notches are fed to the bottom surface and to a substrate that can be disposed under them, wherein 'the screen printing stencil carrier and/or the mask layer are so configured 'i' that the protrusions extend toward at least one of the a region of the first or second notch and reducing the passage area of the first or second notch for the printing medium, wherein the thickness of the protrusion in the first notch region is smaller than the stencil printing The thickness of the stencil carrier, and/or the thickness of the protrusion of the second notch is less than the thickness of the screen stencil. The projections in the notches are such that the cross-section of the notch is not reduced along its entire length, but only within a small range. Outside this region, the recess can be formed broadly, of course by narrowing the cross-section of the recesses, wherein the printing medium can be transported through the gap. This makes it possible to form a fine printing web although the notches above the projections can have a wide cross section. Therefore, it is possible to accurately position the screen printing stencil relative to the screen printing stencil without requiring a high cost, so that the first notch having a smaller cross section coincides at least partially with the second notch having a small cross section. Conversely, it can be processed with common machining accuracy. Additionally, the force applied to apply the print medium to the wider notches into which the projections extend is less than the force applied to the print media at the generally small gap of the cross-section. In addition, the projections in the screen printing or screen printing stencils increase their bending stiffness and tensile strength. Thus, as the squeegee moves along the top surface of the screen stencil carrier, the screen stencil will be stretched at a lower extent so that its geometry maintains a higher reliability. Therefore, such screen printing stencils have a higher service life. 201105517 The mask layer may have a metal and preferably has nickel. The mask layer can also be made of a photosensitive material. For example, emulsions on polyvinylidene, capillary or solid residue substrates are suitable for making such mask layers. Preferably, the projections extend along the notch wall so that a uniform reduction in the passage area can be achieved, and a load can be uniformly applied to the projections as the extruded printing medium passes. Thus, the projection functions as the aperture (the (3) core). Preferably, the projection has a surface comprising a radius of curvature. The curvature radius reduces the frictional resistance of the printing medium as it passes through the inside of the notch, thereby enabling the extrusion to be achieved with less force consumption. The above advantages are well achieved if the screen printing stencil has a thickness of less than 30 microns and the projections have a thickness of from i microns to 25 microns. The preferred 疋' by the projections reduces the passage area by at least 5%. The screen printing stencil and the screen printing stencil may be made of a metal material. The screen stencil can be constructed as a mask layer. The mask layer has nickel. This material can be applied simply by electrodeposition. The method for manufacturing the screen printing screen has the following steps: - preparing a substrate - forming a first screen on the substrate - structurally plating a first metal layer to the substrate - at the first metal Forming a second screen on the layer - structurally plating a second metal layer to the first metal layer, wherein the first metal layer forms a screen stencil carrier and the second metal layer forms a screen stencil 201105517 - detaching the first metal layer from the substrate; removing the first screen and the second screen to form a first gap in the first metal layer Forming a second indentation in the second metal layer; - wherein the first metal layer is at least partially electroscoped on the first screen] and/or the first metal layer is at least partially electrically clocked The second screen is formed to form at least one protrusion. 〇 The deposition of the bumps and the reduction of the cross section can be achieved in one step without the need for other structuring measures by electrodeposition. No need to use money to engrave. Electrodeposition can also form a bulge that causes almost any small passage area of the gap. In extreme cases, the bulge can even completely close the gap. The formation of the projections has an active effect on the mechanical stability of the screen printing stencil because of the formation of "τ-shaped elements". Compared with the screen printing stencil which is made by electroplating and has the same opening width and layer thickness, the tensile strength is much smaller than the tensile strength of the stencil of the invention having such a "T-shaped element". Figure 1 shows a first embodiment of a screen printing screen 1 according to the invention. The screen printing screen has a screen printing stencil 2 and a screen stencil 3, which is firmly connected to the screen stencil carrier 2. The screen printing plate carrier 2 has a plurality of first notches 4' each having a protrusion at one end. 201105517. The cross-section of each section is reduced. The first notch 4 merges to a second notch 5 disposed under the first notch 4 and disposed within the screen printing die 3. In this embodiment, the second notch 5 has no projections. The screen printing stencil 3 may be made of or made of a photosensitive material, such as an emulsion layer, a capillary film or a solid residue. In the embodiment of the invention shown in Fig. 2, the screen printing stencils 2 are shown together with the screen stencil 3, which are firmly connected to each other, wherein the screen stencil carrier 2 has in the first notch 4 Raised 6. In this embodiment, the screen printing stencil 3 is thicker than the screen printing stencil 2, and the screen printing stencil 3 is provided at the end with a projection 7 which narrows the second notch 5 by providing only the width 8 The width of 9. If the printing medium 3G is applied to the top surface of the screen printing temple, the plate carrier 2 and the printing medium 30 is fed into the first notch 4 by the squeegee facing the lateral movement, the first notch 4 is filled. Full and poured into the second gap 5. The cavities available in the second notch 5 are also filled with the print medium 30, and these print media are extruded through the projections 7 in a direction across the bottom surface of the screen printing stencil 3 through the width 8. In the embodiment shown in Fig. 2 of the screen printing screen i, the projection 7 is provided at one end of the second notch 5, and the thickness U of the projection 7 is smaller than the thickness 12 of the screen printing stencil 3. Further, the projection 7 has a radius of curvature 1 〇 which makes the screen printing stencil easy to be released from the printed substrate 20 without damaging the embossing. The projections 6 and projections 7 also cause a knife print medium 30 to remain in the first and second indentations in the back recesses 201105517 (Hinterschnitt) when the screen printing screen is removed from the substrate, which will only be a significantly narrower center. The area remains as a print 31 on the underlying substrate 2〇. In this embodiment, the projections 7 act like "scraper edges" so that a very elongated print can be achieved with a significant thickness of 13. Therefore, the ratio of the pass width 8 of the print 31 to the thickness 13 can be from more than 1:2, 1:1 to 2:1; thus is significantly larger than in the case of screen printing stencils made by electroplating according to the prior art. The ratio that can be achieved. 〇 Figure 3 shows a cross section of the intermediate product in the manufacture of screen printing stencils. A first film version (Lackf〇rm) 14 is formed on the substrate 21, and then the first metal layer 15 is structurally ionized onto it in a subsequent method step. The bonding process continues until the thickness of the first metal layer 15 exceeds the thickness of the first film version 14. The electroplating process is controlled here such that the first metal layer 15 can be grown laterally onto the first film (see reference numeral 18) so that the individual regions have a zigzag structure in cross section. Finally, a second film version 16 is applied over the first metal layer 15, and the second metal layer 17 is structurally plated thereon. The laser plating process is controlled in the same manner as in the case of the first metal layer 15, so that the second metal layer is also grown over the second film plate 16. Figure Ί - Shan Yi Figure 3 does not extend the state of the method steps. If the second layer 15 and the first U are removed from the substrate 21, and the first film version of the film is rw ^ ^ ^ non-forest version 16, then the eight-shaped bump is formed. The first notch 4 of the 6 and the right port 4 and the second notch $ having the protrusion 7 are, for example, as shown in Fig. 2. The first layer of the squad can be used as the screen printing carrier 2 The function of 'the second metal layer slipping 17 can function as the screen printing template 3. 201105517 [Simplified description of the drawings] The advantages and characteristics of the Lixian cooker of the present invention will be described with reference to the accompanying drawings, in which: Figure 1 is based on Figure 2 is a cross-sectional view of a second embodiment of a screen printing screen according to the present invention, and a corresponding printed substrate; 0 Figure 3 Is a cross-sectional view of a device during the method steps of manufacturing a screen printing screen. [Main component symbol description]
1 網印網板 2 網印模版載體 3 網印模版 4 第一缺口 5 第二缺口 6 凸起 7 凸起 8 寬度 9 寬度 10 曲率半徑 10 201105517 11 厚度 12 厚度 13 厚度 14 第一菲林版 15 第一金屬層 16 第二菲林版 17 第二金屬層 20 基板 21 基板 30 印刷介質 3卜 印跡 Ο 111 Screen printing screen 2 Screen printing template carrier 3 Screen printing template 4 First notch 5 Second notch 6 Raised 7 Raised 8 Width 9 Width 10 Radius of curvature 10 201105517 11 Thickness 12 Thickness 13 Thickness 14 First film version 15 A metal layer 16 a second film version 17 a second metal layer 20 a substrate 21 a substrate 30 a printing medium 3