TW201016565A - Storage container for substrate and substrate transport facility therefor - Google Patents

Abstract

The subject of the present invention is to provide a storage container for substrate which has a simplified structure of a cover member and can facilitating substrate transfer. The present invention has a container body for receiving a plurality of substrates therein and having an end part forming an opening for the withdrawal and placement of the substrates, and a cover member that is so constructed to allow easy placement and release of container body from the top and with the opening totally enclosed when installed in the container body. The cover member has a locked part that is used to lock and support a locking part situated at upper portion of the end part of the container body. When the container body is in a state of installation, it is shaken freely at the periphery of the lateral axle, with the locked part as the center, along the opening lateral width direction at the crossover of arrangement directions of the container body and the cover member. The cover member is so installed in the container body that it has potential to move toward the container body.

Description

[Technical Field] The present invention relates to a storage container for a substrate in which a plurality of sheets are accommodated in a horizontal posture with a substrate interposed therebetween in an up-and-down direction. [Previously good; j Background of the invention 0 Such a substrate storage tray is used to store a plurality of substrates in a container body.] A user who collects and transports a plurality of substrates. A conventional example of such a substrate storage container has a cylindrical shape in which a lateral posture is formed, a substrate transfer opening is formed at one end portion thereof, and a container body that houses a plurality of substrates and a cover member that closes the entire opening are provided therein. The portion of the cover member that is opposite to the opening of the container body is arranged in the up-and-down direction. The plurality of rocking plates that are rocking around the horizontal axis of the transverse width direction of the opening that intersects the substrate transfer direction ( For example, refer to Patent Document 1). Φ When the substrate is not transferred to the storage container, the rocking plate is placed in the vertical direction to close the substrate transfer gap between the shaking plates, thereby preventing dust from entering the container body from the opening of the container body. It is possible to suppress the substrate in the container body from being contaminated by dust. Further, when the substrate is transferred to the storage container, the substrate can be transferred to the storage container by opening the substrate transfer gap between the rocking plates in a posture in which the rocking plate is moved in the direction in which the substrate is transferred. [Patent Document] [Patent Document 1] Japanese Patent Laid-Open Publication No. 2008-94494 No. 201016565 t. SUMMARY OF THE INVENTION PROBLEMS TO BE SOLVED BY THE INVENTION However, in the conventional storage container for a substrate, The portion of the cover member opposite to the opening is provided with a plurality of plate-shaped rocking plates that are rocked around the horizontal axis in parallel in the up-and-down direction, so that the structure of the cover member is complicated. Moreover, when the substrate is transferred by the substrate transfer device, since the cover member exists between the container body and the substrate transfer device, the presence of the cover member prevents the container from being displaced from the substrate, and the substrate transfer device is used. The stroke required for accommodating the volume of the plate is long, so that the substrate transfer by the substrate transfer device is performed. X, since the substrate is transferred to the storage container in which the cover member is mounted, it is necessary to transfer the substrate by the cover member drying member (4) through the substrate transfer gap ' formed in the cover member. From this point, the substrate transfer is also difficult. Transfer of the substrate by the device. The present invention has been made in view of the above circumstances, and an object of the invention is to provide a storage container for a substrate which can simplify the structure of the cover member and facilitate the transfer of the substrate. Means for Solving the Problem The storage container for a substrate of the present invention has a container and a lid member in a horizontal posture with the substrate interposed therebetween in a vertical direction. The substrate is taken out and opened in the horizontal direction to form a σ in the horizontal direction. The fourth member is formed at the end portion thereof, and the plurality of substrates are accommodated therein. The cover member is configured to detachably attach the container body from the upper side. The upper side is freely detachable, and in the state of being mounted on the container body 201016565, the opening is completely supported by the (4) portion of the body n, and the Wei cover member has the engaging portion of the engaging branch, and is mounted on the upper end. The engaging portion of the engaging portion is centered, and is swayed around the horizontal axis in the lateral width direction of the opening of the main body and the opening of the cover member along the front shape and the lower portion. Meaning (4) The container body describes the container body. The 胄(4) shape H is installed in the front ginseng, and when the cover member is configured to be sent to the storage container, the cover member is used:; part == this = move::=:: the device is mounted on the container body, the second = When the substrate is transferred to the container body, the substrate of the cover member can be transferred to the container body via the opening by the card holder 2 of the cover member. Since the cover member attached to the container body is swayed in the lateral direction along the opening == around the axis, and is attached to the container body in a state of being able Structure, and two 'female to valley 15 body, and can cover the opening to properly block the opening. Further, since the pure transfer material can be disposed without the cover member, the structure of the cover member can be simplified. Further, by disengaging the cover member from the container, the container body can be brought into close proximity to the substrate transfer device of the transfer substrate via the mouth of the container body. Therefore, when the substrate is transferred to the storage container by the substrate transfer device, there is no cover member between the substrate and the substrate, so that the container body and the substrate can be moved closer to the substrate transfer direction. The stroke of the transfer substrate by the substrate transfer device is shortened, and the substrate transfer by the substrate transfer device is facilitated. Further, when the substrate is transferred by the substrate transfer device, since the cover member is not present between the container and the container body, it is not necessary to form a gap for transferring the switch substrate such as the cover member, and the substrate is transferred by the gap. When the substrate is transferred, the substrate that is not transferred interferes with the cover member, and from this point, the substrate transfer by the substrate transfer device is also facilitated. Therefore, it is possible to provide a storage container for a substrate which can be easily transferred to the substrate and can be easily transferred to the substrate. In an embodiment of the present invention, the cover member is preferably configured to have the engaged portion at a position closer to the container body than a center of gravity of the cover member in a direction of the container body and the cover member. In the state in which the container body is not described, the cover member is attached to the potential energy moving toward the container body side by its own weight. In other words, the cover member has an engaged portion at a position closer to the container body than the cover member H in the direction in which the container body and the cover member are arranged, and is attached to the body of the container to be attached to the body. Since the potential energy is moved to the side of the container body, the cover member is mounted on the container body on the horizontal axis and the rocking member is centered on the engaging portion of the container body, and the horizontal body generated by the weight of the container can be utilized. The operating force is shaken around the axis, and the cover member is pressed to the container body side. That is, since the shaking operation force generated by its own weight does not have another operation mechanism for pressing the cover member to the container body side, the cover member can perfectly close the container body 201016565, and thus the structure can be suppressed. In addition, it is possible to provide a storage container for a substrate in which the opening is completely closed by a cover member that can be detached from the upper side and that is freely detachable from the upper side. In the embodiment of the present invention, the storage container is configured to ventilate the other end portion side of the container body toward the one end portion side, and the fan filter unit is preferably provided at the other end portion of the container body, and the cover member is provided. The end portion of the container body is installed in a state in which an exhaust gap is formed between the container body and the container body. # Since the cover member is in the state of forming an exhaust gap with the container body, the end portion of the container body is attached, so that the fan can be installed at the other end of the container body even if the opening is closed by the cover member. The filter unit discharges the clean air flowing from the other end side of the container body toward the one end side, and the airflow from the other end side to the end side can be generated in the container body, so the air flow can be performed. Preventing the dust present in the storage container from being scattered on the substrate, and suppressing the contamination of the substrate of the container. Therefore, it is possible to provide a storage container for a substrate which can suppress the dyeing of the substrate in the container body by dust. In the embodiment of the present invention, the exhaust gas gap is preferably formed over the entire circumference of the opening. That is, since the exhaust gas is formed in the entire circumference of the gap opening, the clean air flowing in the container body is dispersed in the vertical direction and the lateral width direction, so that the clean air is easily flowed in the container body evenly in the container body. It is not easy to generate a place where the clean air does not easily flow, and it is possible to suppress the adhesion of the dust which is caused by the bowing of the clean air to the substrate, and it is less likely to contaminate the substrate. 7 201016565 Therefore, it is possible to provide a storage container for a substrate in which the substrate in the container body is less likely to be contaminated with dust. In the embodiment of the present invention, in order to form the gap for the exhaust gas, a spacer is preferably formed between the container body and the cover member. In other words, since the gap for the exhaust gas is formed by providing the spacer, it is not necessary to form the gap between the cover member itself or the container body itself such as the gap for forming the exhaust gas, so that the gap for exhaust can be easily formed. Therefore, it is possible to provide a storage container for a substrate which can easily form a gap for exhaust gas. Further, it is desirable to provide a substrate transfer apparatus for a substrate receiving container which is easy to transfer the substrate transfer device. Therefore, in the embodiment of the present invention, the substrate transporting apparatus for the substrate storage container is preferably provided with a container transporting mechanism, a substrate transfer device, and a lid release mechanism for transporting the storage container to the substrate. a substrate transfer device that removes a substrate from a storage tray that is located at the substrate transfer position - or stores the substrate in the storage container to transfer the substrate; the cover removal mechanism is in the storage The container is located in the state of the cover (10) _, and the cover member is detached from the container body; and the sump transfer mechanism is configured to move the storage container downward from the cover detachment position vertically downward to the substrate transfer position. The substrate transfer device is configured to transfer the substrate to the container body from which the cover member has been detached via the opening. In other words, when the substrate is not transferred to the storage container by the substrate transfer device, the cover member is attached to the storage container to close the opening of the storage container, and 8 201016565 can prevent dust from entering the container body from the opening, thereby suppressing The substrate in the container body is contaminated by dust, and when the substrate transfer device transfers the substrate to the storage container, the cover member is detached from the container body by the cover release mechanism, and the opening of the storage container through which the cover member is not attached The substrate transfer device can directly transfer the substrate to the container body of the storage container. In other words, since the lid member is transported to the substrate transfer position by the container transport mechanism via the lid transport mechanism, the container transport mechanism is transferred to the substrate transfer position when the substrate transfer device transfers the substrate to the storage container. Since there is no cover member between the devices, the container body can be moved closer to the substrate transfer direction with respect to the substrate transfer device, and the stroke of the substrate on which the substrate is displaced can be shortened, and the substrate transfer by the substrate transfer device can be easily performed. Further, when the substrate is transferred by the substrate transfer device, the substrate transfer gap is not required to be formed in the cover member, and the substrate is transferred through the gap. Therefore, the substrate transfer by the substrate transfer device can be easily performed from this point. . Further, since the container n transport mechanism is configured such that the storage container is moved downward from the cover to the lower position and moved to the substrate transfer position, the cover member is disengaged from the container body at the cover release position, and only the test delivery mechanism is in the wrong state. Moving downwardly downwards, the container can be moved to the substrate transfer position of the container body relative to the substrate in the transfer direction of the substrate as described above, so that the container body is not required to be detached from the bar body Close to the substrate transfer device, and the transfer sand substrate is moved in the direction of transfer, so that the device can be moved closer to the substrate without the device that moves the storage container along the substrate transfer direction. Transfer of the substrate by the substrate transfer device is performed. 201016565 In this way, it is possible to provide a substrate transfer apparatus for a substrate storage container which is easy to transfer substrates by the substrate transfer device. In the embodiment of the present invention, it is preferable that the substrate transfer device is disposed at the end portion side of the container body with respect to the storage container located at the substrate transfer position, and the cover release position is installed at the position The cover member and the substrate transfer device of the container body in the position where the cover is separated from the position are viewed in a position where the vertical direction is repeated. In other words, since the lid member attached to the container body at the position where the lid is detached is in a position overlapping with the substrate transfer device in the vertical direction, the storage container is lowered from the lid by the parasitic transport mechanism. By moving, the storage container from which the cover member has been detached can be transported to the substrate transfer position 'and the container body of the storage container located at the substrate transfer position is brought closer to the substrate transfer device, so that the substrate transfer device is moved on the substrate The interval between the load directions is an interval smaller than the thickness of the cover member in the direction in which the substrate is transferred. Therefore, the stroke of the substrate transfer device for transferring the substrate is shortened, and the transfer of the substrate by the substrate transfer device is more easily performed. Therefore, it is possible to provide a substrate transfer apparatus for a substrate storage tray which can be used for the substrate which can be easily taken out by the take-out mechanism. In the embodiment of the present invention, the lid member is detachably attached to the container body from the upper side, and is detachably attached to the upper side. The container transporting mechanism has a stacking platform and a transfer device. The mounting lowering stage mounts and supports the storage container, and the storage container is moved upward from a position lower than the substrate transfer position and lower than a position below the cover removal position to the substrate transfer Bit 10 201016565, the transfer device is configured such that the storage container is placed on the placement lowering table, and the storage container is vertically lowered and moved to the intermediate position from above and below the position away from the cover. The placement platform is configured such that the transfer target substrate of the storage container is positioned at a transfer height corresponding to the substrate transfer device, and the storage container is supported to be lifted and lowered at the substrate transfer position, and the cover is The detachment mechanism has a support body, and the support system is under the aforementioned transfer device Moving state of the container is located at the disengaged position of the lid, following the support provided by the support portion is in the lid member, the lid member so that the disengaged from said container body. In other words, since the storage container is moved up and down by placing the lowering stage, the transfer target substrate in the plurality of substrates can be transferred to the transfer target substrate in accordance with the transfer height of the substrate transfer device, so that a plurality of the transfer target substrates can be arbitrarily The substrate is moved to a predetermined height of the storage container. Further, by placing the lowering table to raise and lower the storage container, the substrate transfer device having a structure that is more complicated than the storage container can be moved up and down, so that the height of the transfer target substrate and the substrate transfer device can be easily entered. Bit. Further, when the storage container is lowered to the cover disengagement position on the way from the upper _Mi* to the intermediate position by the transfer device, the support is supported. The P receives and cuts the cover member from the cover member to disengage the cover member from the container body. In other words, since the cover member is detached from the storage container by the downward movement of the storage container by the transfer mechanism for placing the storage container on the drop table, the cover release mechanism is provided only for the downward movement. When the storage container is located at the position where the cover is detached, the π 201016565 of the support cover member can be simply configured to receive the domain of the support portion, and the structure of the cover release mechanism can be simplified. Therefore, it is possible to provide a predetermined height at which the transfer target substrate can be arbitrarily transferred to the storage container, and the transfer target substrate and the substrate transfer device can be easily aligned in the height direction, and the substrate can be moved. In the substrate transfer apparatus for a substrate storage container, which is a simple structure of the cover release mechanism, the substrate can be transferred. In the state of the present invention, it is preferable that the lid member is detachably attached to the container body from the upper side and is detachable from the upper side. The container conveying mechanism has a support lowering stage and a preliminary conveying mechanism. Composition, The Haizhulou descending platform mounts the storage container in the branch, and moves the storage container downward from a position above the cover removal position to the substrate transfer position, wherein the preliminary transfer mechanism is configured to load the storage container When the storage container is transported to the upper position, the support lowering stage structure is such that the transfer target substrate of the storage container is positioned at a transfer height corresponding to the substrate transfer device. In the above-described substrate transfer position, the storage container is supported to be lifted and lowered, and the cover release mechanism has a support body. The storage support system is positioned to move downwardly by the support lowering table. In a state of being separated from the position, the support member is provided on the portion of the cover member of the cover member to disengage the cover member from the container body. In other words, the transfer container can be moved up and down, and the transfer target substrate in the plurality of substrates can be transferred to the transfer substrate height corresponding to the substrate transfer device, so that the transfer target substrate can be transferred, so that the transfer target substrate can be arbitrarily The substrates 12 201016565 are transferred to a predetermined height of the storage container. Further, by supporting the lowering table to raise and lower the storage container, the substrate transfer device having a complicated structure and storage container is not required to be moved up and down, so that the alignment between the transfer target substrate and the substrate transfer device in the height direction can be easily performed. And when the storage container is lowered to the cover disengagement position in the middle of moving down the storage container from the intermediate position to the substrate transfer position by the branch lowering platform, the support member is supported by the receiving support body and provided on the supported portion of the cover member. member

Detach from the body of the bar. In other words, since the cover member is detached from the storage container by the downward movement of the storage container by the lower support table for transporting the storage container to the substrate transfer position, the cover release mechanism is provided only for the downward movement. When the storage container is located at the position where the cover is detached, it is sufficient to support the support member (four) of the support portion, and the structure of the cover release mechanism can be simplified. & vtq main unit can freely transfer the transfer target substrate to a predetermined height of the storage container, and can easily perform the alignment of the transfer target raft and the substrate transfer device in the twist direction, and can be realized A substrate transfer apparatus for a storage container for a substrate having a simple structure of a cover release mechanism. In the embodiment of the present invention, it is preferable that the cover member is disposed on the side of the lid member from the obliquely upper side (four) of the container body from the direction in which the container body and the lid member are arranged in the direction of the cover member. The slanting upper side is detachably mounted, and the detachable _ has a pair of slabs, and the singularity of the pair of slats is separated from each other by the separation of the cover members from the support members of the cover member. The substrate transfer direction intersects and the lateral width direction is far from each other. 13 201016565 Moved from (4), in the state where the storage container is located at the position where the cover is detached, the support body moves to the close position, and the support body The abutting portion of the abutting cover member is formed such that the cover member is moved obliquely upward from the side of the discharge direction by the abutting of the aforesaid contact member, and the cover member side is inclined toward the arrangement direction. Above, the more the guiding surface of the radial phase in the lateral width direction. That is, in a state where the storage container is located at the cover disengagement position, the support body moves to be lined from the separation position to the vicinity, and the support member cover member can be attached to the support body as described above. When the member is abutted, the abutment abuts against the abutted portion of the cover member, and the cover member is? I guide surface guide:: movement: the side of the cover member in the direction of the column is obliquely upward, and is detached from the container body, so in the state in which the support member is supported by the support body, the cover member is separated from each other. When the container conveyance mechanism moves the storage container from the cover release position to the obliquely upward direction on the side of the cover member in the arrangement direction, the container body and the cover member are less likely to rub and the dust is likely to be generated. = 'The cover detachment mechanism is a simple structure of the cover member which is freely moved to the near side, and the support member is used to move the storage container to the position where the substrate is moved downward to the substrate transfer position. The cover is configured to be in a position to be rubbed with the body, so that the base can be provided and the substrate is less likely to generate dust. In the embodiment of the present invention, the substrate shifting device is preferably set to 14 201016565. In the state, the container transport mechanism is configured such that the transfer target substrate of the storage container is positioned two degrees corresponding to the transfer of the substrate, and the storage container is supported to be lifted and lowered at the substrate transfer position. The cover detaching mechanism is configured to select the cover member that has been detached from above the transfer target substrate, and to move closer to the opening of the storage container at the substrate transfer position in the substrate transfer direction, Closing the opening of the storage container located at the substrate transfer position by the cover member that has been detached is further than the transfer target substrate In the side portion, the fixing cover is disposed at a position lower than the transfer target substrate in a positionally fixed state, and is located close to the opening of the storage container located at the substrate transfer position in the substrate transfer direction, and is closed at the position The opening of the storage container in the substrate transfer position is lower than the portion of the transfer target substrate. That is, the container transfer mechanism elevates and lowers the storage container, so that the transfer target substrate in the plurality of substrates is positioned The transfer substrate is transferred at the substrate transfer position, and the transfer target substrate can be transferred. Therefore, a plurality of substrates can be arbitrarily transferred to a predetermined height of the storage container. Further, the container is transported by the container transfer mechanism. The lifting and lowering does not require the substrate to be moved up and down in a structure that is more complicated than the storage container, so that the transfer target substrate and the substrate transfer device can be easily aligned in the height direction. The ratio of the opening is higher than the portion of the transfer object, and the opening of the storage container is closed by the fixed cover than the substrate to be transferred Therefore, when the substrate transfer device is used to transfer the substrate to the storage container, the cover member and the fixing cover close the opening of the opening of the container body 15 201016565 The upper portion of the target substrate can be transplanted on the substrate When the transfer and the inner bar are transferred to the substrate, the dust is prevented from intruding into the body of the body from the opening, and the substrate in the container body is prevented from being contaminated by dust. Moreover, the cover is detached from the container body by the cover release mechanism. The member is configured to block the opening of the storage container than the portion above the transfer target substrate, and the cover is not required to block the upper portion of the opening, so that the storage container can be blocked by a simple structure. The portion above and below the opening, thereby providing a predetermined height at which the transfer target substrate can be arbitrarily transferred to the storage container, and the transfer target substrate and the substrate transfer device can be easily performed. The substrate transfer device for the substrate storage container which can suppress the contamination of the substrate when the substrate is transferred to the container body in a simple configuration. In the embodiment of the present invention, the container body preferably has a plurality of supporting floor plates on which the rectangular substrate is supported in a state of being spaced apart from each other in the vertical direction, and the substrate transfer device has a floating air ejection body and a take-out mechanism. The auxiliary air ejection body is disposed adjacent to the downstream end portion of the support plate of the container body in the substrate take-out direction in a state where the storage container is located at the substrate transfer position. Adjacent to the container, air is ejected to the lower surface of the substrate to be taken out and the upper surface of the support plate on which the substrate is supported. The take-up mechanism is configured to eject air by the floating air ejecting body. The object to be taken out from the above-mentioned floor panel is taken out from the storage container while being passed over the floating air ejection body; the auxiliary air ejection body 16 201016565 is directed to the upper surface of the floating air ejection body The air is ejected between the lower surface of the substrate to be taken out and taken out by the take-up mechanism. In other words, the air layer flowing from the downstream side toward the upstream side in the substrate taking-out direction is formed between the take-out target substrate and the support plate, and the object to be taken out can be supported by the air layer, and the substrate can be passed through the floating air by the substrate transfer device. Take out above the sprayed body. Further, the air ejected from the auxiliary air ejecting body is provided by the auxiliary air ejecting agent "discharged to the upper surface of the floating air ejecting body and the lower surface of the ejecting target substrate taken out by the substrate transfer device" The air layer is formed above the floating air ejecting body. Therefore, the air layer supports the take-out target substrate above the floating air ejecting body. Therefore, the substrate transfer apparatus for the substrate storage container that does not contact the floating air ejection body is taken out when the extraction target substrate is provided above the floating air ejection body. In an embodiment of the present invention, the substrate transfer apparatus is preferably provided with a container (4) mechanism and a substrate displacement, wherein the container transport mechanism lowers the storage container and transports the container to a substrate transfer position; The carrier device is configured to take out the substrate from the storage container located at the substrate transfer position or to store the substrate in the storage container to transfer the substrate; and to provide a receiving support body, the receiving support system is made by the container transfer mechanism The substrate storage device is configured to support the cover member from being detached from the container body during the downward movement of the storage container to the substrate transfer position. The substrate is transferred to the substrate via the opening. 17 201016565 That is, when the substrate is transferred to the storage container without the substrate transfer device, the cover member is attached to the storage container to close the opening of the storage container, thereby preventing dust from entering the container body from the opening, and the container body The substrate is not contaminated by dust. When the substrate transfer device transfers the substrate to the storage container, the cover member is detached from the container body by the cover release mechanism, and the substrate is moved through the opening of the storage container without the cover member. The carrier device directly transfers the substrate to the container body of the storage container.

In other words, since the lid member is transported to the substrate transfer position by the container transport mechanism through the lid release mechanism, the container is transferred to the substrate transfer position when the substrate transfer device transfers the substrate to the storage container. There is no cover member between the carriers, and the container body can be moved closer to the substrate than the substrate transfer device, and the stroke of the transfer substrate of the substrate transfer device is shortened, so that the substrate transfer by the substrate transfer device is easy. Loaded. Further, when the substrate transfer device is used to transfer the substrate, the substrate is not required to be formed by the cover member to form the substrate transfer gap, and the substrate is transferred. Therefore, the substrate of the substrate transfer device can be easily performed from this point. Transfer. Further, the supported portion of the cover member is supported by the support member at the time of the lowering movement of the container 〇 at the substrate transfer position by the container transport mechanism, and the cover member is detached from the container body. In other words, since the cover member is detached from the storage container by the downward movement of the storage container by the container transport mechanism for transporting the storage container to the substrate transfer position, the cover member is provided with the selected portion' and is moved downward. When the storage container is located at the position where the cover is detached, the simple structure of the support member that receives the supported portion of the support cover member is provided, so that the cover member can be detached from the container body, and the substrate 18 201016565 can be easily transferred. Transfer of the substrate. Therefore, the substrate transfer apparatus for a storage container for a substrate which can be easily transferred by a substrate having a simple structure can be provided. In the embodiment of the present invention, the front part of the branch should be arranged in a plurality of rotating bodies which are rotatable around the horizontal axis of the lateral direction of the body and the cover member. In the configuration, the receiving branch _ has a concave portion for the plurality of tilting body card holders.

When α is used to support the cover member, the plurality of rotating bodies of the cover member are in a state of being engaged with the engaging recess of the receiving member to receive the branch, so that the cover member can be received by the support member. Supported in a state where it is difficult to shake and is not easily deviated to the horizontal direction. In addition, when the cover member deviates from the receiving member body to the substrate transfer direction in the horizontal direction, the rotating body is not easily slidably contacted with the locking recess 2 due to the rotation of the rotating body, so that it can be suppressed to be received. Support body cutting member

Therefore, ', e is a substrate transfer device for a substrate storage container which is formed in a state in which the dust cover is not easily swayed and is not easily deviated to the horizontal direction, and the dust is generated by the reader. In the embodiment of the present invention, the portion to be supported is preferably formed in a plate-like shape. The receiving member (four) has a locking recess for the missing body to be engaged. That is, when the cover member is supported by the support member, since the cover member is the card holder to accept the card holder recessed portion, the support member 19 201016565 is supported in a large area, so that the plate body is used to support the dragon. A large area undertakes the earning, and it is not easy to deviate to the horizontal direction, and the member is cut in a stable state. Therefore, it is possible to provide a substrate transfer apparatus for a substrate storage container which can support the support of the 敎 state support cover. In the actual state of the present invention, the front (four) cuts the money and the two rotations 3 are located at The upper end of the cover lining, and the direction in which the container body is described as the cover member is arranged, the === listed on both sides of the center of gravity of the cover member is arranged in the arrangement direction, and is provided to be limited by the receiving branch frequency The cover member is caused by the weight of the cover member to move away from the set angle of the side of the π side of the oscillating portion. That is, because the supported portion is located in the second row of the cover member, The arrangement direction 'is the state in which the two sides of the center of gravity of the cover member are I. Therefore, the pure container is moved downward to support the supported portion of the support member, and two of the two sides of the cover member are located. When the card is recessed to receive the support, the rocking of the cover member that is separated from the container body by the support member and the lower portion of the cover member, such as the lower portion of the cover member, can suppress the shaking of the cover member of the lower portion of the container body. The two pieces along The shaking of the column direction prevents the cover member from being buckled by the container amount, and is provided by the restriction portion to limit the swinging of the cover member by the set angle of the cover member 2 away from the side of the storage container: the two undercover members are along When the arrangement direction is shaken, the shaking of the cover member is also easy, and the contact of the cover member with the container body can be prevented. The prevention of the 2' can be provided to the substrate of the container body when the cover member is detached from the body of the container. 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 The perspective view of the cover member side of the storage container of the first embodiment is shown. Fig. 4(a) to Fig. 4(b) are side views showing the state in which the cover member of the first embodiment is supported. Fig. 5(c) is a side view showing the lifting position of the storage container according to the first embodiment. Figs. 6(d) to 6(e) are views showing the lifting position of the storage container according to the first embodiment. Side view - Fig. 7(a) to Fig. 7(b) are perspective views showing the state in which the cover member of the first embodiment is detached. Figs. 8(a) to 8(b) show the cover of the second embodiment. A perspective view showing a state in which the member is detached. Fig. 9(a) to Fig. 9(b) are side views showing a state in which the cover member of the fourth embodiment is supported. Fig. 10 (a) to Fig. 10 (b) A perspective view showing a state in which the lid member of the fourth embodiment is detached. Fig. 11(a) to Fig. 11(b) are side views showing the elevating position of the storage container of the fourth embodiment. Fig. 12(a) - Figure 12(c) is a side view showing the lifting position of the storage container of another embodiment. 21 201016565 Sections 13(a) to 13(b) show the supported portions of the other embodiment (12) side view. Figs. 14(a) to 14(b) are side views showing a plurality of rotating bodies of the other embodiment (13). Figs. 15(a) to 15(b) are views showing a plate-like body of another embodiment (13). Figure 16 is a front elevational view of the substrate processing apparatus. Figure 17 is a side view of a substrate processing apparatus. Figure 18 is a plan view of a substrate processing apparatus. Fig. 19 is a side view of the substrate transfer device. Figure 20 is a perspective view of the storage container. Figure 21 is a perspective view of the storage container. Figures 22(a) to 22(b) show the support plate. Figure 23 is a plan view of the substrate relay unit. Figure 24 is a side view showing the grip portion of the gripping position. Figure 25 is a plan view showing the grip portion of the gripping position. Fig. 26 is a side view showing the nip portion of the grip release position. Fig. 27 is a plan view showing the nip portion of the grip release position. Fig. 28 is a side view showing the nip portion at the end position of pressing. Figure 29 is a side view showing the grip portion of the retracted position. Figure 30 is a plan view showing the grip portion of the retracted position. Figs. 31(a) to 31(b) are side views showing the floating air ejection body and the supply air ejection body. Fig. 32 is a perspective view showing the floating air ejection body and the supply air ejection body 201016565. Figure 33 is a schematic diagram showing the detection sensor. Figure 34 is a control block diagram. C. EMBODIMENT OF THE PREFERRED EMBODIMENT OF THE PREFERRED EMBODIMENT OF THE INVENTION The first embodiment of the substrate transport apparatus to which the substrate storage container of the present invention is applied will be described below with reference to the drawings. As shown in Fig. 1, the substrate transport apparatus is provided with a container transport mechanism ill for transporting the storage tank 2 as a substrate storage tray, and a substrate transfer for transferring the substrate 1 to the storage container 2 transported by the container transport mechanism 111. Carrier device 112. Further, the substrate transfer device H2 is configured to take out the substrate 1 from the storage tray 2 that is transported by the container transport mechanism ill, and to store the substrate 1 in the storage container 2'. Both the removal of φ of the substrate 1 and the storage of the substrate 1 of the storage container 2 are performed. Incidentally, the substrate of the present embodiment is used for a rectangular substrate such as a liquid crystal display or a glass substrate of an electric display or display. [Storage container] As shown in Fig. 1 and Fig. 2, the storage container 2 has a tubular body 41 that is formed in a tubular shape in a horizontally inverted posture and houses a plurality of substrates therein, and a cover that is attached to one end of the container body 41. The member 42 is configured by a fan filter unit 43 attached to the other end of the container body 41. As shown in Fig. 20, the container body 41 is configured to have a plurality of support plates 45 on which the support substrate 载 is placed in the vertical direction at intervals of 23, 2010, 565, and the support substrate 45 is mounted on the plurality of support plates 45 individually. The shape of 1 will be a rectangular substrate! The plurality of sheets are held in a horizontal posture at intervals in the vertical direction and stored. The lid member 42 is integrally closed and blocked by a substrate take-out port 44 formed at one end of the cylindrical container body 41, and the opening which is opened in the horizontal direction as a substrate, and is attached to one end of the container body 41. Further, the fan transition 11 unit 43 is closed by completely closing the substrate take-out port 44 formed at the other end of the cylindrical container body 41, and is ventilated from the other end side of the container body 41 toward the one end side. The other end 4 of the container body 41 is mounted, and the cover member 42 and the fan filter unit 43 are configured to be detachable from the container body 41. Incidentally, the cover member is formed to have a larger width in the upper and lower directions than the substrate take-out opening 44 of the container body, and has a larger width in the lateral width direction. Further, for convenience of explanation, the direction in which the container body 41 and the lid member 42 are arranged is referred to as an arrangement direction, and the direction in which the squares are arranged in the horizontal direction is referred to as the width direction. Then, as shown in Fig. 4, the lid member 42 is provided with an engaging portion 114 that is engaged with the upper end portion of the one portion of the container body 41 from the upper side, and the engaging portion is budded to the bayonet. The engaged portion 115 of the crucible 114. That is, the cover member is configured such that the cover member 42 can be engaged with the "engagement", and the engaged portion 115 can be engaged with the engaging portion 114, and the cover member 42 can be attached to the container body 41. The cover member 42 is moved relative to the container body to disengage the engaged card, and the cover member 42 is detached from the container body 4. Thus, the cover member 42 is configured to the container body 1 The front side is attached to the front side of the cover member 117. The front end side of the cover member 42 is detached from the upper side. The front end portion of the cover member 117 has a front end portion of the cover member 117 which protrudes from the upper end portion of the cover main body 116 to the container body side. The state support and the state support protruding downward are provided in the lateral width of the container body 41 and the cover member 42 in a state where the cover member 42 is attached to the container body 41, and is provided in the cover member 42. The end portion of the creeping portion under the engaging portion 115 is formed in a spherical shape.

The engaging portion 114 of the container body 41 is formed into a circular shape in plan view and recessed to the lower shape. In a state in which the cover member 42 is attached to the container body 41, one of the cover members 42 is formed corresponding to each of the cover members 42. The position of the engaged portion 115. The shape of the engaging portion 114 will be described. The bottom side portion of the engaging portion 114 has a cylindrical shape in the up-and-down direction, and is formed to have a slightly larger sound than the diameter of the front end portion, and the fitting portion is fitted. 115. Further, the entrance side side of the engaging portion 114 is formed to have the same diameter as the bottom side portion, and the shape of the larger diameter toward the upper side is guided to the bottom side portion by the engaging portion 115. *In addition, as shown in Fig. 2 and Fig. 3, the tongue piece 117 is provided on one side portion and the other side portion of the cover body ι16 in the X direction, and is engaged and cut respectively to the tongue. Sheet 117. X, the engaging portion of the container body 41 is formed above the substrate take-out port 44 so as to be formed above the substrate 44, and the engaged portion 115 is engaged. As shown in Fig. 4, when the storage container 2 is formed as described above, the engaging portion-engaging portion 115 is formed, and the lid member 42 is attached to the container body 41. The σ|Μ15 is easily engaged with the engaging portion 114, and the cover member 42 is easily attached to the housing body 41. Further, in a state in which the lid member 42 is attached to the container body 41, the bottom portion of the engaging portion 114 is fitted by the engaging portion 115, and the lid member 42 is attached to the container body 41. The cover member 42 is restricted from moving in the horizontal direction with respect to the container body 41. Further, in a state in which the cover member 42 is attached to the container body 41, the front end portion of the engaged portion 115 is formed in a spherical shape, and the portion above the front end portion is located at the engaging portion 114 having a large width. The cover member 42 is configured such that, in a state of being attached to the container body 41, the engaging portion 114 is centered on the center of the horizontal axis in the lateral width direction. As described above, by providing the engaged portion 115 to the lid member 42, the engaged portion 115 is disposed in the arrangement direction at a center of gravity of the lid member 42 and closer to the container body side. Therefore, the cover member 42 is attached to the container body side by its own weight in the state of being attached to the container body 41 as shown in Fig. 4(a). With the potential energy attached, the cover member 42 is held by the container body 41. The cover member 42 is not easily shaken. In a state in which the lid member 42 is attached to one end of the container body 41, an exhaust gap E is formed between the container body 41 and the lid member 42. In addition, the spacer 118 for forming the gap E for exhausting is located between the container body 41 and the cover member 42 in a state where the cover member 42 is attached to the container body 41, and the container body of the cover member 42 is provided. The side has it. As described above, the cover member 42 has the spacer 118, and the cover member 42 is formed in the state of being attached to the container body 41, and forms a space for exhausting E between the container body 41, and is introduced to the fan filter unit 43 by the fan filter unit 43. The air in the container body 41 26 201016565 is discharged to the outside via the exhaust gap e ' formed between the container body 41 and the lid member 42 as indicated by an arrow in FIG. Further, the cover member 42 is in contact with the container body 41 only by the engaged portion 115 and the spacer 118, and the exhaust gap e is partially closed around the substrate take-out port 44 due to the presence of the spacer 118. , Yokohama formed throughout the week. As shown in Fig. 3 and Fig. 4, the supported portion 119 is provided on the cover member 42 in a state in which both sides of the upper end portion of the cover main body 116 protrude from the cover main body 116 to the outer side in the lateral width direction. The supported portion 119 is configured by arranging two rotating bodies 120 that are rotatable around the horizontal axis in the lateral width direction in the arrangement direction. The two rotating bodies 12 are disposed at the same height as the cover member 42, and the diameters are formed to be the same size. - the rotating body 120 on the side of the cover member in the arrangement direction of the two rotating bodies 120 is placed above the center of gravity of the cover member 42 and placed on the side of the cover member closer to the center of gravity than the center of gravity The main body 116 is disposed on the lid body 116 in a state in which the rotating body 120 on the container body side in the direction of the arrangement is positioned above the center of gravity of the lid member 42 and located closer to the direction of the container body than the center of gravity. Thereby, the center of gravity of the cover member 42 is located between the centers of the two rotating bodies 120 and is below, and the engaging recessed portion 124 is supported to support the cover member in the direction in which the cover member 42 is detached from the container body 41, as will be described later. The shaking of 42 prevents contact of the cover member 42 with the container body 41. [Substrate Transfer Device] As shown in Fig. 31 (a), the substrate transfer device 112 is configured to have air ejected to the lower surface of the transfer target substrate 1 and to support the support plate 27 201016565 45 supporting the substrate The floating air ejecting body 71 is configured such that the air to be ejected by the floating air ejecting body 71 is ejected from the support plate 45 and is placed above the floating air ejecting body 71. The substrate take-out mechanism 73 that transports the storage container 2 is removed, and the container body 41 that has been detached from the lid member 42 is taken out through the substrate and the inlet port 44 is removed, and the substrate 1 is transferred. Further, the floating air ejecting body 71 is configured to also serve as an auxiliary air ejecting body that causes the ejected air to flow on the upper surface of the floating air ejecting body 71, toward the upper surface of the floating air ejecting body 71 and The person who ejects air between the substrates transferred by the substrate take-out mechanism 73 is used. Further, as shown in FIG. 6, the substrate transfer device 112 is disposed in a positionally fixed state on the floor surface, and is disposed at the substrate of the container body 41 with respect to the storage container 2 located at the substrate transfer position. One end of the material. [Container transport mechanism] As shown in Fig. 1, Fig. 5, and Fig. 6, the container transport mechanism lu has an elevating mechanism 61 that is disposed adjacent to the upstream side in the substrate take-up direction of the substrate transfer device f112. The stacker 7 is provided in a state adjacent to the upstream side of the lifting mechanism 61 in the substrate take-out direction.搬 When the container transporting mechanism 1U transports the storage container 2 to the substrate transfer position P4 (see FIG. 6), first, the storage container 2 is horizontally moved to the upper side in the substrate take-out direction by the stacker 7 Ρι (refer to Fig. 5(a)). {吏 The storage container 2 is lowered from the upper position to the lower position and moved to the lower position P3 (see Fig. 5(c)), and the storage container 2 is removed and loaded. The support mechanism 61 is placed. Thereafter, the storage container 2 is moved downward from the intermediate position P3 to the substrate transfer position P4 by the elevating mechanism 6] (refer to Fig. 28 201016565, see Fig. 6). When the container transporting mechanism 111 transports the storage container 2 from the substrate transfer position P4, the storage container 2 is moved upward from the substrate transfer position P4 from the substrate transfer position P4 to the intermediate position p3 by the elevating mechanism 61. Thereafter, the storage container 2 on the elevating mechanism 61 is taken up by the stacker crane 7, and the storage container 2 is moved upward from the intermediate position 3 to the upper position. After that, the storage container 2 is horizontally moved from the upper position P1 toward the upstream side in the substrate take-out direction.

In the period in which the storage container 2 is moved up and down between the upper position P1 and the intermediate position P3 in the vertical direction by the stacker crane 7, the storage container 2 passes the cover release position P2 (see the fifth (b). )))). In other words, the elevating mechanism 61 corresponds to the placement of the support storage container 2, and the storage container 2 is moved upward from the intermediate position P3 below the substrate transfer position P4 and below the cover release position p2 to the substrate transfer. The stacking stage of the position material 'the stacking crane 7 is equivalent to the storage container 2 being placed on the elevating mechanism 61, and the storage container 2 is moved downward from the upper position P1 above the cover disengagement position P2 to the lower side. In the transplanting device at the intermediate position P3, the container transport mechanism lu including the stacker crane 7 and the elevating mechanism 61 is configured to move the storage container 2 downward from the lid release position P2 to the substrate transfer position P4. As shown in Fig. 1, the elevating mechanism 61 has a pair of left and right support bases 63 on which the container main body 41 supporting the storage container 2 is placed and moved up and down, and the pair of left and right support bases are individually guided and supported to be lifted and lowered. Build & 64 and constitute. As shown in Fig. 6, the elevating mechanism 61 is configured such that the supporting plate 45 of the transfer target substrate 1 of the mounting member 29 201016565 container 2 is located at the transfer height ' corresponding to the substrate transfer device 112. The substrate transfer position P4 controls the storage container 2 to be lifted and lowered. In other words, the elevating mechanism 61 is configured such that the storage container 2 is horizontally moved so that the substrate 1 stored at the lowest position of the container main body 41 is placed on the rising side substrate as the substrate transfer position P4 at a height that can be transferred by the substrate transfer device 112. The position P5 (see FIG. 6(d)) and the substrate 1 stored at the uppermost position of the container body 41 are located at the lower substrate transfer position as the substrate transfer position P4 at the height that can be transferred by the substrate transfer device 112. P6 (refer to FIG. 6 (description) to move the lifting and lowering] The transfer target substrate 1 of the storage container 2 and the support plate 45 on which the storage substrate 2 is placed are positioned at a transfer height corresponding to the substrate transfer device 112. [Fixed cover] In the substrate transfer apparatus, the fixed cover 121 is disposed in a positionally fixed state below the transfer substrate 1 and is located closer to the substrate take-out port 44 of the storage container 2 of the substrate transfer device P4 in the substrate transfer direction.俾 — — — — — — — — — — — ® ® ® ® ® ® ® ® ® ® ® ® ® ® ® ® ® ® ® ® ® ® ® ® ® ® ® ® ® ® ® ® ® ® ® ® ® ® The lower-side substrate transfer position "the portion of the substrate take-out port 44 of the storage tray 2 that is moved up and down is lower than the transfer target substrate 1. Further, the fixed cover 121 is disposed to float with the substrate transfer device 112. The starting air ejection body 71 is repeatedly viewed in the up-and-down direction, and is disposed under the substrate transfer device in a state close to the substrate relay unit 70, so as not to hinder the transfer or floating air of the substrate 1 by the substrate take-out mechanism 73. The substrate 1 is floated by the ejecting body 71 30 201016565. [Cover Attachment Mechanism] As shown in Fig. 5, the cover member 42 is placed in the substrate transport apparatus in a state where the storage container 2 is located at the cover disengagement position P2. The container body 41 is detached from the lid attaching and detaching mechanism 122 as a lid detaching mechanism, and the lid attaching and detaching mechanism 122 is configured to install the lid member 42 in a state where the storage container 2 is located at the lid detachment position P2 except for the detachment of the lid member 42. The container body 41 is disposed. The lid loading and unloading mechanism 122 is configured to receive the support body 123. The receiving support system is moved downward from the container 2 to the substrate transfer position P4 by the container transport mechanism 1U. The cover in the middle of the movement is separated from the position P2, and the supported portion 119 of the support cover member 42 is received to disengage the cover member 42 from the container body 41. That is, as shown in Figs. 5 and 7, the cover member 42 is attached. The storage container 2 is moved downward in the vertical direction by the stacker crane 7, and is supported by the support portion 119 of the cover member 42 at the cover release position P2 when the cover position is removed from the upper position P1 through the cover release position > The cover member 42 is detached from the container body 41 by the support member 123. The storage container 2 from which the cover member 42 has been detached is moved upward by the stacker crane 7 and is detached from the intermediate position p3 through the cover. ? When the upper position P1 is reached, the engagement portion 115 of the cover member 42 is engaged with the engagement portion 114 of the container body 41 at the cover release position P2, and the cover member 42 is attached to the container body 41. The support body 123 will be described. As shown in the figure, the support body 123 is disposed on the substrate for shifting. The lateral width of the container 2 of the container 2 is flanked by the sides of the cover member 42 on both sides of the lateral width direction 31 201016565. H19' is supported by the elevating mechanism 61 in the form of a pair of guide struts 64 in the form of a pair of guide struts 64. * The fourth guide member of the fourth embodiment is provided with a cutout guide portion 64 for the dog to be pulled out to the downstream side of the substrate take-out direction, and has a snap-in recess 124 for being engaged by the support portion 119 (two rotating bodies 120) at the front end portion thereof. . As shown in Fig. 4, the bottom surface of the supported portion II9 of the receiving recessed portion I24 is formed so as to be inclined to the upper side in the direction in which the substrate is taken out.

Therefore, since the bottom surface of the hooking recess 124 is formed as described above, the two rotating bodies 120 of the same size are disposed at the same height as the cover member 42. The center of gravity of the cover member 42 is located between the centers of the two rotating bodies. Lower = and the cover member 42 is supported by the aligner body 4 in a state where the horizontal axis is freely swayable, so that the container 2 is lowered and moved, and when the support body 123 is supported to support the two rotators (10), the cover is first placed. The rotating body (4) on the member side (the downstream side in the substrate take-out direction) first contacts the bottom surface of the card holder recess, and the cover member 42 is moved upward relative to the container body 41, and the cover member 42 is pivoted by the engaged portion 115. Shake to leave the lower container body 41.

Thereafter, the rotating body m on the container body side (the upstream side in the substrate take-out direction) of the array direction contacts the bottom surface of the card holder recess 124, and (4) the rocking of the cover member 42 such as the lower portion away from the container body 41. And as the cover member 42 is further raised above the fourth body with respect to the body 41, the engaged portion is separated from the engaging portion 14 of the body 41, and the cover member 42 is from the container body 41_. When the member 42 is separated from the container body 4m, the two sides (four) are engaged with the recessed portion to receive the support from the bottom surface, except for the limitation of the shaking of the cover member 42 such as the cover member C to open the container body 41. Also, the shaking of the cover member such as the cover 32 201016565 member 42 close to the container body 41 is restricted, so that the shaking of the cover member 42 along the arrangement direction is suppressed, and the contact of the cover member Μ with the container body 41 can be prevented. Further, the cover member 42 that receives the supporting body 123 is configured to receive the cut portion ι 9 by the inclined surface of the engaging recess 124, and is inclined to the lower side, and the wire is opened for cutting, so that the cutting is performed When the body 123 receives the branch cover member 42 and moves the storage container 2 up and down between the cover_position p2 and the board transfer position P4, or when the storage container 2 moves up and down at the substrate transfer position p4, the container The body 41 and the cover member 42 are less likely to rub, and dust is less likely to be generated. Incidentally, the snap-in recess 124 corresponds to a restricting portion that restricts the setting angle of the cover member 42 to the side away from the container body 41 due to its own weight when the member 42 is caught by the support member 123. The side surfaces of the card-in recessed portion 124 on the both sides of the substrate transfer direction are formed on the lower side of the substrate, and the inclined surface is located inside the concave portion in the substrate transfer direction, and is configured to be inserted into the card recess by the beat portion m. In addition, the pedestal portion ι ΐ 9 is easily snapped into the accommodating recess 124, and the support member 123 is easily received by the receiving support member 123. Further, the inclination of the bottom surface of the accommodating recess portion 124 is inclined obliquely to the side surface. As shown in FIG. 6, the cover attaching and detaching mechanism 122 (the receiving support body 123) is configured such that the detached cover member 42 is further above the transfer target substrate 1 and is located closer to the substrate transfer device P4 in the substrate transfer direction. The position of the substrate inlet and outlet 44 of the container 2 is closed, and the portion of the substrate 2 that is placed in the container 2 at the substrate transfer position P4 is removed by the removed cover member 42. ,and The cover member 42 that has been separated by the cover release member 122 closes the substrate take-out port 44 of the storage container 2 that moves up and down between the ascending-side substrate transfer position P5 and the descending-side substrate transfer position P6, and is more than the transfer target substrate 1 The upper portion, that is, the cover release position P2 is attached to the cover member 42 of the storage tray 2 located at the cover release position P2, and the floating air ejection body 71 of the substrate transfer device 112 is viewed in the vertical direction. Further, the cover member 42 installed in the cover disengagement position m is disposed at a position above the substrate transfer device 112 near the substrate transfer device 112 so as not to hinder the substrate take-out mechanism 73. The floating of the substrate 1 by the air ejection body 71 for transferring or floating the substrate, and the floating member air attached to the substrate relay unit 7 by the cover member 42 installed in the storage container 2 at the cover release position Since the discharge body is viewed at a position where it is repeated in the vertical direction, only the container conveyance mechanism lu is moved downward from the cover release position P2 in the vertical direction, and the storage container 2 is placed at the substrate transfer position P4, so that the cover member can be made. 42 is detached from the container body 41, and the position of the container 2 at the substrate transfer position P4 is such that the interval between the container body 4 and the substrate transfer device 112 in the substrate transfer direction is larger than the cover member 42 in the substrate transfer direction ( Since the thickness of the arrangement direction is small, the substrate transfer device 112 and the barr main body 41 of the storage container 2 can be moved closer to the substrate transfer direction. Thereby, the container body of the storage container 2 by the substrate transfer device 112 can be easily performed. 41. Transfer of the substrate to the substrate. When the container transport mechanism 111 transports the storage container 2 to the substrate transfer position P4 (the position above the rising side substrate transfer position P5 and the lower side substrate transfer position or more), The high-loading crane 7 horizontally moves the storage container 2 to the downstream position P1 on the downstream side in the take-out direction of the substrate 34 201016565 (refer to FIG. 5( a )), and then moves the storage container 2 downward from the upper position P1 to the middle position from the upper position P1. P3 (refer to Fig. 5(c)), the cover release position P2 during the downward movement (see Fig. 5(b)), the cover member 42 is detached from the container body 41 by the cover attaching and detaching mechanism 122, and the cover is closed. Member 42 is detached from Removing the container 2 is satisfied, and it is placed on the lifting mechanism 61 is supported. Thereafter, the storage container 2 from which the lid member 42 has been detached by the elevating mechanism 61 is moved downward from the intermediate position P3 to the substrate transfer position P4. When the container transport mechanism 111 transports the storage container 2 from the substrate transfer position P4 (the position above the rising substrate transfer position P5 or the lower substrate transfer position P6), first, the cover member 42 is lifted by the elevating mechanism 61. The detached storage container 2 is moved upward from the substrate transfer position P4 to the intermediate position P3. Thereafter, the storage container 2 on the elevating mechanism 61 is taken up by the stacking crane 7, and the storage container 2 is moved upward from the intermediate position P3 to the upper position P1, and the cover is removed from the position P2 during the upward movement. After the loading and unloading mechanism 122 attaches the lid member 42 to the container body 41, the storage container 2 to which the lid member 42 is attached is horizontally moved from the upper position P1 toward the upstream side in the substrate taking-out direction. <<Second Embodiment>> Plate-shaped body supporting type A second embodiment of a substrate conveying apparatus to which the substrate storage container of the present invention is applied will be described below with reference to the drawings. In addition, the second embodiment is configured in the same manner as the first embodiment except for the configuration of the support portion 119. Therefore, the same components as those of the first embodiment are denoted by the same reference numerals, and the description will be omitted. 1 35 201016565 Structures with different implementations. As shown in Fig. 8, in the cover member 42, the supported portion 119 is provided in a state of protruding from the cover main body 116 to the lateral width outer side and the container body side on both sides of the lateral width of the upper end portion of the cover main body 116. The supported portion 119 is formed of a plate-like plate-like body 126, and a lower flat surface along the arrangement direction is formed on the lower surface thereof. Further, the engaged portion 115 is supported by the front end portion of the supported portion 119 on the container body side in a state of being protruded downward. Further, the plate-like body 126 is disposed above the center of gravity of the cover member 42 and in the orientation of the center of gravity from the container body side of the arrangement direction across the cover member side in the arrangement direction. Further, the shape of the engaging concave portion 124 of the support body 123 is different from that of the first embodiment, and the point at which the bottom surface or the side surface forms an inclined surface is configured in the same manner as in the first embodiment. Therefore, since the bottom surface of the recessed portion 124 is formed as described above, the lower surface of the plate-shaped body 126 forms a horizontal flat surface along the arrangement direction, and the cover member 42 is supported by the rocking member around the horizontal axis. Container body -

When the support member 123 receives the support plate-like body 126, first, the G portion of the cover member side (the downstream side in the substrate take-out direction) in the direction in which the plate-like members 126 are arranged first contacts the bottom surface of the recessed portion 124. As the cover member 42 relatively moves to the upper side of the container body 41, the cover member 42 is pivoted to the lower portion away from the container body 41 with the engaging portion 115 as a fulcrum, and then the container body side in the direction in which the plate-like members 126 are arranged (substrate A portion of the upstream side of the take-out direction contacts the bottom surface of the recessed portion 124, and the above-described shaking of the cover member 42 is restricted. Then, the cover member 42 is detached from the container body 36 201016565 41 as the cover member 42 is further moved relative to the container body 41 to move upwardly relative to the engaging portion 115 from the engaging portion 114 of the body 11 . [Third Embodiment] Frame Supporting Type The third embodiment of the substrate conveying apparatus to which the substrate storage container of the present invention is applied will be described below with reference to the drawings.

In addition, in the third embodiment, the configuration of the first embodiment is the same as that of the first embodiment except that the structure of the engagement portion 114, the engaged portion 115, the supported portion 119, and the receiving support 123 is different. The same components are denoted by the same reference numerals, and the description thereof will be omitted, and the configuration different from the first embodiment will be mainly described. As shown in Fig. 20, the engaged portion of the cover member 42 is constituted by the engagement frame 46 so that the upper end portion of the cover body 116 protrudes to the container body side with the cover member 42. The engaged frame 46 is configured to be viewed in the lateral width direction, and is formed in a π-shape of the lower opening. The lower end portion of the cover member side in the arrangement direction is connected and supported by the joint frame portion 46a of the cover body 116 in the lateral width direction. A pair of engaging rod-shaped portions 46b, which are connected to the side of the container body in the direction in which the connecting frame portions 46a are arranged, are erected across the pair of connecting frame portions 46a. The rod-shaped portion 4 is from above. The engaging portion 114 of the container body q is engaged. Further, the engaged frame 46 has a support rod portion 46c that is supported by the engaging member 65 as the receiving support 123, and the support rod portion 46c is connected. The lower end portion of the container body side supported in the direction in which the joint frame portion 4 is arranged is erected across the pair of joint frame portions 46a. In other words, the engaged frame 46 is configured to receive the branch-shaped nip 119 in combination with the IX engaging member 65, and the engaged frame 46 is provided in a state of protruding from the upper end portion of the cover main body 116 to the upper side. 37 201016565 As shown in Fig. 19, the support body 123 is provided in a state of being supported on the top, and is placed on the upper surface of the cover body 116 and the support frame 46 in a state where the storage container 2 is at the upper position P1. Between the rod-shaped portions, the support portion of the support member for the substrate of the present invention is applied to the support portion of the support member for the substrate of the present invention. The first embodiment of the substrate transfer apparatus. In addition, the fourth embodiment is configured in the same manner as the third embodiment except for the configuration of the engaging portion 114, the supported portion ip, and the lid attaching and detaching mechanism 122. Therefore, the configuration similar to that of the first embodiment is attached. The same reference numerals will be omitted, and the description will be omitted. The configuration different from the third embodiment will be mainly described. As shown in Fig. 9, the cover member 42 is provided with a card-engagement portion 114 that is engaged with an upper end portion of one end portion of the container body 41 from the obliquely upper side of the cover member side in the arrangement direction, and the engagement push is pushed. The engaged portion 115 of the engaging portion m. That is, the cover member 42 is configured to move the cover member 42 obliquely downward with respect to the container body 41 in the direction in which the container body is arranged, so that the engaged portion 115 is engaged with the engaging portion 114' and the cover member 42 can be attached. The cover member is attached to the container body 4, and the cover member is moved obliquely upward on the side of the cover member in the arrangement direction of the container body 41 so that the engaged portion 115 is clear from the engaging portion 114, and the cover member can be made into the container body. 41 detached. In this manner, the lid member 42 is configured such that the container body 41 is detachably provided from the obliquely upper side of the lid member side in the arrangement direction and is detachable from the upper side of the lid member side in the arrangement direction. The engaging portion 114 of the container body 41 is formed into a circular shape in plan view, and has a shape recessed to the lower side of 38 201016565, and is formed at a position corresponding to the engaged portion 115 of the cover member 42 to be formed on the upper side. The larger the diameter of the basin. Therefore, as shown in FIG. 9(a), in a state in which the lid member 42 is attached to the container body 41, the engaging portion 115 is engaged with the engaging portion 114, and the lid member 42 is attached to the lid member 42. In the state of the container body 41, the cover member 42 is restricted from moving in the horizontal direction with respect to the container body 41. Further, in a state in which the lid member 42 is attached to the container body 41, since the front end portion of the engaging portion 115 is formed in a spherical shape, the lid member 42 is attached to the container body 41, and the engaging portion 以4 is used. For the center, it is free to move around the horizontal axis along the lateral width direction. As shown in Fig. 9 and Fig. 1 , the cover member 42 is provided with a support portion 128 which is recessed in the lateral direction of each lateral direction of the cover main body 116 to the inner side in the lateral width direction. The shape of the support portion 128 is described. The bottom portion of the support portion 128 is cylindrical in the same direction as the lateral width direction, and is formed to have a slightly larger diameter than the front end portion of the spherical shape φ. The crucible is hereinafter referred to as a cylinder 129. Further, the inlet side portion of the support portion 128 is formed in a shape in which the inner side and the bottom side portion in the lateral width direction have the same diameter as the outer side, and the front end portion 129a of the inserted cylinder 129 is guided to Bottom side part. Incidentally, the supported portions 128 are provided in the lateral direction of the cover main body 116 in the lateral direction, and are arranged in two in the vertical direction. As shown in Fig. 10, the lid attaching and detaching mechanism 122 corresponds to the supported portion 128 of the lid member 42 of the container 2 located at the lid release position P2, and a pair of cylinders 129 (the pattern of one of the cylinders 129 is omitted) Two groups are arranged in the up and down direction and the structure is 39 201016565. The pair of cylinders 129 are disposed in a state in which they are moved away from each other by the front end portions i29a of the respective rod portions. As shown in Fig. 10(b), the lid attaching and detaching mechanism 122 is configured to cause the pair of cylinders 129 to be actuated while the storage container 2 is in the lid release position P2, so that the end portions 129a are close to each other, Thereby, the cover member 42 is sandwiched by the pair of cylinders 129, and as shown in the first figure (4), the pair of cylinders 129 are retracted, and the front end portions 129a are separated from each other, whereby the pair of cylinders 129 are released. The clamping of the cover member 42 is made. That is, the front end portions 129a of the pair of cylinders 129 are equivalent to being movable away from each other in the lateral width direction at a position where the supporting cover members 42 are close to each other and the separated positions for releasing the support of the cover member 42 are separated from each other. One pair of supports. Further, one of the two sets of the pair of cylinders 129 is arranged in the vertical direction and supported by the door support frame 130. The door type frame frame 130 is provided so as to surround the horizontally superior position P1 and the substrate transfer position P4, and is moved up and down. Both sides of the container 2 in the lateral width direction and the upper side. The arrangement position of the pair of cylinders 129 will be described. The pair of cylinders 129 are provided in a state in which the storage container 2 is located at the lid release position P2, and the entrance side portion of the supported portion 128 is detailed as a bottom portion. The side portion abuts the position of the abutted portion located obliquely above the side of the cover portion in the arrangement direction. The inlet side portion of the support portion 128 is formed as described above. As shown in Fig. 9, in the state where the storage container 2 is at the cover release position P2, the front end portion 129a of the pair of cylinders 129 is moved closer to the state. The abutting portion of the cover member 42 abutting the front end portion 129a of the pair of cylinders 129 causes the cover member 42 to move to the alignment direction due to the abutment of the front end portion 129a of the cylinder 40 201016565 129 The cover member side is inclined upward, and the guide surface on the outer side of the container in the lateral width direction is formed at an obliquely upward side of the cover member side in the direction of the arrangement. Therefore, as shown in Fig. 9, by the state in which the storage container 2 is located at the lid release position P2 (refer to Fig. 11(a)), the cylinder 129 is caused to move, and the front end portion 129a is moved to a position close to the position ' The front end portion 129a of the cylinder 129 is engaged with the supported portion 128, and the cover member 42 can be supported by the cylinder 129. Further, the cover member 42 is supported by the cylinder 129, and the front end portion 129a of the cylinder 129 and the abutted portion of the abutment portion 128 are engaged, and the cover member 42 is aligned with respect to the container body 41. The lid member side is moved obliquely upward, and the lid member 42 is detached from the container body 41. Further, in a state where the storage container 2 is located at the lid release position P2, the cylinder - I 29 is moved away, and the front end portion 129a is moved to the separated position, whereby the front end portion 129a of the cylinder 129 is supported from the supported portion The detachment 128 disengages the support of the cover member 42 of the cylinder 129. Further, by the cylinder 129 releasing the support of the cover member 42, the engaged portion 115 of the cover member 42 is guided along the inclination of the engaging portion 114 of the container body 41, and the cover member 42 is aligned with respect to the container body 41. The lid member 42 is attached to the container body 41 by moving obliquely downward from the container body side. Further, since the cover member 42 supported by the cylinder 129 is inclined upward from the side of the cover member in the arrangement direction with respect to the container body 41, it is retracted to a position away from the container body 41, so that the cover member 42 is supported by the cylinder 129. When the storage container 2 is moved up and down between the lid release position P2 and the substrate transfer position P4 or when the storage container 2 is moved up and down at the substrate transfer position P4, the container body 41 41 201016565 and the cover member 42 are less likely to rub, and dust is less likely to be generated. . When the storage container 2 is transported to the substrate transfer position P4 by the container transport mechanism 111, the storage container 2 is horizontally moved to the cover release position P2 toward the downstream side in the substrate take-out direction by the stacker crane 7 (refer to the 11th (a). After the drawing, the front end portion 129a of the pair of cylinders 129 is moved to the close position, and the lid member 42 is detached from the container body 41 stopped at the lid release position. Thereafter, the storage container 2 from which the lid member 42 has been detached is moved downward from the lid release position P2 to the intermediate position P3 (see FIG. 11(b)). The storage container 2 is detached and placed on the support container 2 Lifting mechanism 61. Thereafter, the accommodating container 2 is moved from the intermediate position P3 to the substrate transfer position p4 by the elevating mechanism 61. When the container transporting mechanism 111 transports the storage container 2 from the substrate transfer position P4, first, the storage container 2 is moved upward from the substrate transfer position P4 to the intermediate position P3 by the elevating mechanism 61. Thereafter, the storage container on the elevating mechanism 61 is taken up by the stacker crane 7, and the storage container 2 is moved upward from the intermediate position P3 to the lid release position p2, and then the front end portions of the pair of cylinders 129 are moved to After the position is separated, the lid member is "mounted" in the container body 4b. Thereafter, the container container 2 to which the lid member core is attached is horizontally moved from the lid exit position P2 toward the upstream side in the substrate take-out direction. [Other Embodiments" (1) In the above-described mth embodiment, the cap removal position p2 is set, and the storage container 2 is moved up and down in the direction of the misalignment between the upper position ?1 and the intermediate position P3 by the stacking crane 7. As shown in FIG. 12, the cover disengagement position p2 can be set, and the storage container 2 can be moved up and down in the misalignment direction between the intermediate position and the substrate transfer position 42 201016565 P4 by the elevating mechanism 61. In the meantime, the storage container 2 is separated from the position P2 by the cover. At this time, the elevating mechanism 61 is placed on the support storage container 2, and the storage tray 2 is lowered from the upper position ρ above the cover removal position P2. The stacking stage 7 is moved to the support lowering stage of the substrate transfer position P4, and the stacker 7 is a preparatory transfer mechanism for transporting the storage container 2 to the upper position P1 so that the storage tank 2 is placed on the support lowering stage. The stacking crane 7 moves the storage bowl 2 in the horizontal direction to the downstream side in the substrate take-out direction, and horizontally moves the storage basket 2 to the upper end position p〇 above the upper position (refer to Fig. 12(a) After that, the storage basket 2 is moved downward from the upper end position p〇 to the upper position P1 (see FIG. 1), and the storage container 2 is removed, and the storage unit 2 is placed on the lifting mechanism 61. - (2) In the fourth embodiment described above, the transfer device 7 is placed in the horizontal direction.  In the same manner as in the first to third embodiments, the storage container 2 can be horizontally moved to the upper position by the stacking crane 7 in the direction in which the substrate is taken out, and then moved to the upper position. The storage container 2 is moved downward from the upper end position ρ vertically downward to the intermediate position P3, and the cover release position p2 is set, so that the storage container 2 is placed at the upper position by the stacker crane 7. While the intermediate position P3 is moving up and down in the wrong direction, the storage container 2 is separated from the position P2 by the cover. Incidentally, in the above embodiments, the stacking hoist 7 may move the storage container 2 to the downstream side in the substrate take-out direction, and the surface may be lowered to the upper position P1. (3) In each of the above embodiments, the stacker 7 that moves the storage container 2 downward from the upper position ρ 43 201016565 or the lid detachment position P2 to the intermediate position p3 and the storage container 2 from the intermediate position P3 The elevating mechanism 61 that has moved downward to the substrate transfer position P4 in the vertical direction constitutes the container transport mechanism 111, and the storage container 2 can be moved downward from the upper position Pi or the cover disengagement position 5 to the substrate transfer position P4. The stacker 7 constitutes a container transport mechanism 111. (4) In each of the above embodiments, the cover detaching mechanism 122 is configured to be supported above the transfer target substrate 1 that has passed through the detached dam member 42, and is located closer to the substrate transfer position P4 in the substrate transfer direction. The position of the substrate take-out port 44 of the storage container 2 is closed to the upper portion of the substrate take-out port 44 of the container 2 located at the substrate transfer position P4, which is higher than the transfer target substrate 1 by the cover member 42 that has been detached. The cover release mechanism 122 may be configured to be supported by the substrate take-out port 44 above the storage container 2 located at the substrate transfer position P4 or in the substrate transfer direction and the storage container 2 at the substrate transfer position P4. In the separated position, the substrate take-out port 44 of the container 2 located at the substrate transfer position P4 is not closed by the cover member 42 that has been detached. Further, the fixing cover 121' for closing the portion of the substrate take-out port 44 of the storage container 2 located at the substrate transfer position P4 and lower than the transfer target substrate 1 may be provided without the fixing cover 12 (5). In the above-described embodiments, the container body 2 is configured to have the support plate 45 on which the support substrate 1 is placed in a state of being spaced apart from each other in the vertical direction, and the substrate transfer device 112 is configured to have the floating air ejection body 71 and the take-out mechanism. 73. The substrate which is floated by the take-up mechanism 73 and floated by the floating air ejecting body 71 may have a support for mounting the support base 44 in a state in which the support base 44 is placed in the vertical direction. The container body 2 is configured to have the substrate transfer device 112 configured to have a device for placing the intermediate portion in the lateral width direction of the support substrate, and the device is placed on the support substrate to be transferred. (6) In each of the above embodiments, the one end portion of the container body is configured to have an engaged portion recessed to the lower side, and the cover member is engaged with the upper end portion of the container body, and may be configured as a container The lateral side portion of the body has an engaged portion that protrudes to the outer side of the crucible, and the cover member is engaged with the lateral side portion of the container body. (7) In each of the above embodiments, the engaging portion is disposed closer to the container body than the center of gravity of the cover member, and is attached to the container body in a state where the cover member is attached to the container body. The potential energy moving toward the container body side may also be configured to provide an attached potential energy mechanism attached to the potential of the cover member toward the container body side, so that the cover member is attached to the side of the container body with the potential energy of the potential energy mechanism Potential energy. (8) In the above embodiments, the "venting gap" may be formed on the entire circumference of the opening, and the container body and the lid member may be brought into close contact with each other on the upper side or the lower side of the opening to form a row on both sides in the lateral width direction of the opening. A gas gap or the like forms a gap for exhaust gas around one portion of the opening. Further, a vent hole may be formed in the cover member, and the air in the accommodating container may be discharged from the vent hole. (9) In the above embodiments, a spacer is formed between the container body and the cover member to form an exhaust gap, and the cover member itself may be formed into a shape for forming an exhaust gap. Further, the spacer may be provided in the container body ‘, or the container body itself may be formed into a shape forming a gap for exhaust. In the above-described respective embodiments, the storage container 2 of the substrate transfer position P4 in the storage container 2 of the substrate transfer device P4 and the substrate transfer position P4 is moved up and down to move the support storage container 2 The support plate 45 of the substrate 1 is located at a height corresponding to the substrate transfer device 112, and the substrate transfer device 112 and the substrate transfer device 112 in the storage container 2 at the substrate transfer position P4 can be moved up and down to support The support plate 45 of the transfer target substrate 收纳 of the storage container 2 is located at a height corresponding to the substrate transfer device. (11) In the above-described embodiments, the shape of the substrate is a rectangular substrate such as a glass substrate for a liquid crystal display or a plasma display, and may be a circular substrate such as a semiconductor wafer for a germanium wafer, etc., and is suitably used. The purpose or shape of the substrate. (12) In the above-described first embodiment, the two rotating bodies 120 constituting the supported portion 119 are formed to have the same size, and the rotation axes of the respective rotating bodies 12 are at the same height, and are arranged in the arrangement direction. When the heights of the lower ends of the two rotating bodies 120 are the same height, the height of the lower end of the rotating body 120 on the side of the cover member can be made lower than the height of the lower end of the rotating body 12〇 on the side of the container body. In other words, the two rotating bodies 120 constituting the supported portion 119 can be formed to have the same size as shown in the l3(a), and the rotating body 120 on the side of the cover member in the arrangement direction can be compared. The state in which the heights of the rotating bodies 120 on the container body side in the arrangement direction are low is arranged in the arrangement direction, and the rotating body on the side of the cover member in the arrangement direction may be arranged as shown in Fig. 13(b). 120 is formed in a row direction of the row 46 201016565 in a state in which the rotating bodies on the container body side in the arrangement direction are invaded and the rotation axes of the respective rotating bodies 120 are at the same height. In the same manner as in the above-described third embodiment, when the storage container 2 is moved downward and the supporting body 123 is supported to support the two rotating bodies 12, the rotating body 12 on the side of the cover member in the first direction is contacted first. After the bottom surface of the concave portion 124 is moved, the weir member 42 is swung, and then the rotating body 120 on the container body side in the direction of the arrangement contacts the bottom surface of the engaging recess portion 124, thereby restricting the shaking of the cover member 42. Incidentally, the shape of the bottom surface of the engaging recessed portion 124 may be such that the rotating body 120 on the cover member side in the array direction φ is in contact with the rotating body 120 on the container body side in the shape of the bottom surface of the recessed portion 124, and a horizontal surface or the like can be formed. The shape of the bottom surface of the recessed portion 124 is appropriately changed. (13) In the first and second embodiments, the plurality of rotating bodies 120 are arranged in the arrangement direction in the arrangement direction, or the plate-like body 126 is arranged in the arrangement direction. In the cover member 42, the supported portion 'U 9 is disposed on the cover member 42 in a state along the arrangement direction. As shown in FIG. 14(a), the plurality of rotary bodies 120 may be used in the up and down direction. The arrangement state is set to be placed on the cover member 42, or as shown in Fig. 15(a), the plate-like body 126 is not placed in the cover member 42 in the up-and-down direction, and the branch portion 119 is to be The cover member 42 is provided in the up and down direction. When the support member 119 is placed on the cover member 42 in the up-and-down direction, as shown in FIGS. 14(b) and 15(b), the entrance side portion of the recess 124 is engaged. The side surface on both sides of the substrate transfer direction is formed on the lower side, and the inclined surface on the inner side in the substrate transfer direction is formed, and the side surfaces of the bottom side portion of the substrate 124 in the substrate moving direction are formed from the inlet side. . The lower end of the ship is stretched straight below the straight line. When the cover member 42 is detached from the body 47 of the container 47 201016565, the supported portion 119 is fitted to the bottom portion that is recessed to the vertically lower side of the engaging recess 124, thereby restricting the inclination of the supported portion ι 9 , whereby The shaking of the cover member 42 in the arrangement direction can be suppressed. Incidentally, although not shown in the drawings, the side faces of the bottom side portions of the substrate portion in the transfer direction of the bottom portion of the concave portion 124 are formed to form an inclined surface extending obliquely downward from the lower end portion of the inlet side portion, and the cover member 42 is removed from the container. When the main body 41 is detached, the supported portion 119 is fitted to the bottom side portion which is recessed to the lower side of the engaging recessed portion 124, and the cover member 42 which receives the support by the support body 123 is further away from the container body toward the lower side. 41 tilt posture. In the first and second embodiments, the reference (14) is configured to restrict the rocking of the cover member 42 along the arrangement direction, and to receive the support member 119 by the engagement recess 124. The one rotating body 120 constitutes the supported portion 119 or the like so as not to restrict the state of the rocking of the cover member 42 along the arrangement direction, and the supporting portion 119 is received by the engaging recess 124. Incidentally, in the above configuration, in the state in which the cover member 42 is attached to the container body 41, the rocking axis of the cover member 42 when the hooking recess 124 receives the supported portion 119 is set to be larger than The center of gravity of the cover member 42 is also on the side of the cover member in the proximal direction. In this case, when the support portion 119 is received by the snap-in recess 124, the cover member 42 can be inclined to the lower side and away from the container body. 41. [Reference Embodiment] The substrate transfer device that houses the automatic storage container to which the substrate storage container of the present invention is applied and the substrate that carries the substrate that is taken out from the storage container and the substrate that is stored in the storage container is referred to the reference embodiment. Expression 48 201016565 Ming. Further, in the following description, the third embodiment of the present invention is applied, but the first, second, and fourth embodiments of the present invention can be applied. As shown in Fig. 16, the substrate processing apparatus includes an article storage rack 5 for accommodating a plurality of storage units 4 for holding the plurality of storage containers 2 in a state in which the rectangular substrates 1 are arranged at intervals in the vertical direction. The stacker 7 as the storage container transporting device that transports the storage container 2 between the portion 4 and the substrate inlet and outlet portion 6 and the substrate 1 are taken out one by one from the storage container 2 located in the substrate inlet and outlet portion 6 and transported to the processing substrate 1 one by one. The substrate processing apparatus (not shown) is configured such that the substrate 1 transported from the substrate processing apparatus is stored one by one in the substrate transfer apparatus 8 of the storage container 2 . In the substrate processing apparatus, the storage container 2 is stored in the article storage rack 5, and the stored storage container 2 is transported to the substrate entrance/exit portion 6, and the substrate 1 is transported from the storage container 2 that has been transported to the substrate entry and exit portion 6. The substrate is taken out in one unit, and is transported to the substrate processing apparatus, and predetermined processing is performed. The substrate 丨 which has been subjected to the predetermined processing is stored in the storage container 2 located in the substrate inlet and outlet unit 6 in units of one sheet. As shown in Fig. 16 and Fig. 17, the article processing apparatus is provided with a downflow type purified air circulation mechanism 23 for circulating purified air from the top to the floor portion in the dust-free space 13', in which the dust-free space is lowered. The storage rack 5, the stacker crane 7, and the substrate transfer device 8 are equipped in the inside. The purge air circulation mechanism 23 will be described. As shown in Fig. 17, the clean air circulation mechanism 23 is configured such that the floor portion of the dust-free space 13 forms the top of the dust-free space 13 with the porous lattice floor 14 to be HEpA filter or the like. The air formed by the air is formed on the lower side of the lattice floor 14 and the air chamber 16 is connected to the chamber 17 formed on the upper side of the air filter 15 to communicate with the circulation path 19 having the ventilation fan 18 and the prefilter 21. The air in the clean space 13 is cleaned and circulated by the prefilter 21 and the air filter 15, and the purified air is circulated from the top to the floor. Then, in the circulation path 19, the external air intake flow path 20 is connected to the upstream of the ventilation fan 18, and the exhaust flow path 22 is connected downstream of the ventilation fan 18, and will be circulated by the purified air circulation mechanism 23. One part of the air in the dust-free space 13 is replaced with the outside air. Further, as shown in Fig. 16, the substrate transfer area 24 in which the substrate transport unit 8 transports the substrate between the storage container 2 of the substrate entrance/exit unit 6 and the substrate processing apparatus is provided with the end portion on the article storage rack 5 side. The end portion of the substrate processing side is in contact with the substrate processing apparatus, and covers the partition wall 25 of the substrate transfer space. A plurality of area fan filter units 26 are provided at the top of the partition wall 25. Moreover, the purified air which is further purified by the clean air of the clean space*U by the fan filter unit 26 is distributed from the top side to the floor and the side of the floor, and the substrate transport space covered by the partition wall 25 is used as the substrate transport space. The space for the downflow. As shown in Fig. 16 and Fig. 17, the article storage rack 5 is arranged in the lateral width direction of the pillar group 28 which is arranged in the front and rear direction of the rack, and is erected in the lateral width direction of the rack, and a plurality of article supporting portions are provided. A plurality of the storage units 4 that are placed in the state in which the storage container 2 is placed and supported by the article support portion 29 are arranged in the vertical and horizontal directions. Incidentally, the article storage rack 5 is provided with a pair on the lattice floor 14 in a state of being opposed to each other. One of the plurality of storage portions 4 provided in the article storage rack 5 serves as a base 50 201016565 plate access portion 6. As described in FIG. 18, the partial storage portion 4 provided in the plurality of storage portions 4 of the lowermost layer of the article storage rack 5 is configured to be able to pass through the storage container 2 accommodated in the storage portion 4 On the back side of the storage rack $, the substrate 1 is taken out one by one or stored one by one by the substrate transfer device 8, and serves as the substrate entrance and exit portion 6. As shown in FIGS. 16 and 17, the stacker crane 7 is configured to have a moving frame 31 that moves in a long direction toward the moving space of the storage rack 5 in a state of being disposed opposite to each other. The elevating support 33 is erected and supported on the moving frame 31, and the lifting platform 33 of the lifting mast 32 is arranged in the traveling direction of the frame, supported by the lifting platform 33, and is detachably accommodated between the accommodating portion 4 and itself. The fork-type article transfer device 34 of the barn 2 moves in the horizontal direction of the moving frame 3j, the lifting movement of the lifting table 33, and the movement of the article transfer device, and the storage portion 4 as the substrate access portion 6 The other storage units are transferred between the four rooms.  Nano container 2. As shown in Fig. 18, the article transfer device 34 is supported by a winding mechanism that is rotatable around the upper and lower axes and supports the mounting portion provided on the winding table 35 to move forward and backward. . And the article transfer device 34 is configured to be switchable to a state in which the article transfer device 34 is retracted to the lift table 33 by the expansion and contraction of the link mechanism 37, and the article transfer device 34 is protruded to the storage portion bucket side. Moreover, the direction of advancement and retreat of the article transplanting device 34 can be changed by 18 degrees by the winding of the winding table 35. As shown in FIG. 18 and the like, the substrate transfer device 8 is configured such that the substrate 丨 is transferred one by one between the storage container 2 located at the substrate entrance and exit portion 6 and the substrate transfer conveyor 51, and the substrate transfer device 8 has a plurality of mounting support substrates 1 thereon. Support plate 45 51 201016565 The storage container 2 arranged side by side in the vertical direction with the interval therebetween, the substrate transfer conveyor 5 on which the transfer substrate 1 is placed, and the substrate is taken out one by one from the (four) capacity 2 to be transferred to the substrate transfer conveyance In the machine M, the substrate 1 received from the substrate conveyance conveyor 51 is accommodated in the substrate relay unit % of the storage container 3, and the storage container 2 located in the substrate entrance and exit portion 6 is supported by the lifting mechanism 6 The board moves money to set the shape of 8 to control the difficulty h (refer to the figure ^). Next, the substrate transfer device 8 will be described in detail so that the downstream side (the upstream side in the substrate storage direction) of the substrate take-out direction is the front side, and the upstream side (the downstream side in the substrate storage direction) of the substrate take-out direction is the rear side. The direction along the direction in which the substrate is taken out (the substrate storage direction) is referred to as the front-rear direction, and the direction in which the direction is intersected is the lateral width direction. [Storage container] As shown in Fig. 20 and Fig. 21, the container 2 has a rectangular tubular container body 41 which is formed in a laterally inverted position, and is placed on the front side of the barrage body 41 in a state in which the front opening is blocked. The end cover member 42 and the fan receiver unit 43 provided at the rear end portion of the container main body 4 in a state in which the rear cover is closed are placed in the storage container 2 in a state of being spaced apart from each other in the vertical direction. The support plates 45 are formed. The container body 41 is formed into a rectangular parallelepiped shape by a frame material structure, and the left and right surfaces and the upper and lower surfaces are blocked by a plate to form a rectangular tubular shape in which the front and rear sides are horizontally opened. Further, the opening of the substrate body (4) is taken out as a substrate, and the inlet and outlet 44' can be configured to take out the inlet and outlet 44 from the substrate, and take out the substrate 1. As shown in Fig. 20, the cover member 42 is formed in the same shape as the substrate take-out opening 44, which is formed in a frame shape for the cover forming frame. Further, the cover member 42 is provided with a card &amp; busy 46 that is engaged with the container body 41 from above, that is, the cover member 42 is configured such that the cover member 42 is moved downward with respect to the container body 41 to make the engaged frame 46 is engaged with the container body 4, and the winter cover member 42 is attached to the bar body 41, and the cover member 42 is detached from the container body 4ι by moving the cover member 42 upward with respect to the container body 41. φ and 'the cover member 42 is formed in a shape in which a gap is formed between the container body 41 and the bar body 41, and the air introduced into the storage container 2 by the fan filter unit 43 is formed in the container body 41 via the container body 41. The gap Between the cover member 42 and the cover member 42 is discharged to the outside. As shown in Fig. 21, the fan filter unit 43 is detachably attached to the rear end portion of the container main body 41, and the sputum flows out from the opening at the rear of the container main body 41 toward the substrate take-out port 44. In addition, the fan filter 43 has a power receiving unit and a battery that stores electric power supplied to the power receiving unit, and the fan filter unit 43 is configured to be stored in the storage unit 4 in a state where the storage container 2 is housed in the storage unit 4. Each of the power supply units of the power supply unit has power supply to the power receiving unit, and the power receiving unit such as when the storage container 2 is transported by the stacker 7 is separated from the power supply unit without supplying power to the power receiving unit, and is stored in the battery. The power is activated. As shown in Fig. 22, each of the plurality of support plates 45 has a support substrate 47 which is formed by press processing to form a plurality of protrusions 48 projecting upward, and the substrate 1 which supports the support is moved in the lateral width direction and the rear direction. The restricting member 49° and the upper surface of the protrusion 48 form a horizontal plane, and serve as a mounting surface 48a on which the support 53 201016565 substrate 1 is placed. Further, as shown in Fig. 24, etc., the upper surface of the front end portion of the plurality of supporting plates 45 is formed with an inclined plane which is located below the offside of the front side, and the front end portion and the portion other than the protruding portion 48 form a level. In the plane, the support predetermined area E on which the slap substrate 1 is placed is set to traverse the other portion from the front end portion 45a. The attaching-lifting projection 48 is a circular shape having a diameter of 10 mm and is formed to be thinner than the thickness of the glass substrate 1. 2mm. Further, in the plurality of support plates 45, the projections 48 are arranged side by side in the direction of the money and the width direction of the slitting plate, and the concave portions 5 are formed. It is to be noted that the portion of the support plate 45 where the projections are not formed is recessed to the lower side than the carrier. As described above, the flank cutting substrate is provided with a dog. The recessed portion 5G which is recessed to the lower side than the mounting surface 48a is formed in a lattice shape. The recessed portion 5G thus formed forms a shape extending from the central portion of the read region ^ to the outer portion of the predetermined portion of the branch. And a shape extending linearly from the rear end portion of the support end portion E. By supplying air to the upper surface of the support plate 45 and the lower surface of the substrate, the substrate 1 is lifted from the support plate to the upper surface of the support floor 45 and the substrate! When the air is supplied between the lower side, as indicated by the broken line arrow in Fig. 22, the air existing between the support plate 45 and the substrate 1 flows along the concave portion 50 to the outside of the support predetermined region e. As a result, the air existing between the support plate 45 and the substrate 1 is quickly discharged, and the support portion 1 can be stably placed on the projection portion 48. The restriction members 49 are arranged side by side at intervals in the front-rear direction at the left and right end portions of the support substrate 47, and are located on the left and right sides of the support predetermined area, 54 201016565 and at the rear end of the support substrate 47 in the lateral direction. The width direction is arranged side by side with the interval '俾' located behind the support predetermined area E. [Elevation Mechanism] As shown in Figs. 18 and 19, the elevating mechanism 61 is provided in the substrate entrance/exit portion 6, and is moved up and down by the elevating motor 62 (see Fig. 34), and a pair of left and right supporting the storage container 2 is placed. The support base 63 and the pair of left and right support bases are individually guided and supported by a pair of right and left guide pillars 64. φ and as shown in Fig. 4, the substrate insertion/receiving portion 卡 is engaged with the storage container 2 The engaging member 65 of the engaged frame 46 of the cover member 42 is provided in a state of being supported on the top of the partition wall, and the storage container 2 is placed and supported by the stacker 7 as it is carried into the substrate entrance and exit portion 6. The elevating mechanism 61 is engaged with the engaging member 65 by the engaging frame 46, and is detached from the container main body 41, and the cover member 42 is removed from the container main body 41, and the stacking and lowering portion 6 is taken from the substrate by the stacking crane 7.  When the storage container 2 is carried out, the engagement frame 46 is engaged with the container body 41, and is detached from the engagement member 65, and the cover member 42 is attached to the container body 41. In the meantime, the lifting mechanism 61 is configured to raise and lower the support floor 63 of the container main body 41 on which the support container 2 is placed, and the cover member 42 is supported by the engaging member 65 so that the cover member of the storage container 2 is not used. The portion is moved up and down, and the amount of opening of the substrate 44 is removed. [Substrate Relay Unit] Next, the board relay unit 7A will be described. As shown in FIG. 11 and FIG. 9 , the substrate relay unit % is configured to move in the lateral width direction by the traveling frame 74 that travels in the lateral width direction, and in the storage container 2 located in the substrate access portion 6 . When the substrate 丄 is taken out one by one 55 201016565 or at the time of storage, the substrate relay unit 7 is placed adjacent to the storage container 2 located at the substrate entrance and exit portion 6 by the travel of the traveling frame 74. As shown in Fig. 23, the substrate relay unit 7A has a floating air ejection body 71 that ejects air to the lower surface of the object to be taken out or the substrate to be stored, and the upper surface of the support plate 45 on which the substrate is supported. The supply air is supplied to the supply air ejection body 72 at a position further downstream than the floating air ejection body 71 in the substrate take-out direction, and the ejection of the air by the floating air ejection body 71 is floated from the support plate 45. The extraction target substrate is taken out from the storage container 2 in a state above the floating air ejection body 71 and the supply air ejection body 72, and the air by the floating air ejection body 71 is ejected and floated. The target substrate 1 is placed above the floating air ejecting body 71 and the supply air ejecting body 72, and placed on the reading plate 45 on which the mounting plate is placed, and the substrate stored in the storage container 2 is taken out and placed. Agency 73. Incidentally, the substrate take-out mechanism 73 is also used as a take-out mechanism for taking out the substrate 丨 from the container 2 and a storage mechanism for accommodating the substrate 1 in the container 2. [Traveling Frame] As shown in Figs. 18 and 19, the traveling frame 74 is configured to have a pair of traveling rails % corresponding to the lateral width direction, and is provided to be rotated by the motor 77. The traveling wheel 78 supports the floating nozzle outlet 71, the supply air ejection body 72, and the substrate take-out mechanism 731. The traveling motor 77 is configured to drive the traveling wheel to drive the substrate wheel. The unit 7 is moved in the lateral width direction, and the position adjacent to the H ill 2 and the position of the 201016565 adjacent to the substrate transport conveyor 51 are moved. [Substrate take-out mechanism] The substrate take-out mechanism 73 has a configuration in which the pinch transport mechanism 81 that holds the transport substrate i and the mount support transport mechanism that transports the transport substrate 丨. The gripper transport mechanism 81 is configured to grip the downstream end portion of the substrate to be taken out of the substrate to be taken out when the base is taken out from the storage container 2. Μ 2 /σ The movement path in the direction in which the substrate is taken out is taken out from the substrate. • The t-side moves to the downstream side, and the target substrate is taken out! The transfer position of the object to be taken out from the storage container 2 (refer to the lake and the figure) is transferred to the take-out target substrate, and the portion is located at the relay position outside the storage container 2, FIG. 26 and 27)) 'When the substrate 1 is mounted on the storage container 2, the nip portion 82 is moved along the moving path from the substrate to the upstream side of the substrate. The charm 1_ will be placed on the tissue 魏 魏 象 丨 丨 丨When the front end portion of the nip portion 82 is pressed, it is transported from the relay position to the accommodating position. The nip transport mechanism 81 is provided with a pair of missing portions 82 in the lateral width direction. When the storage container 2 is taken out, the object to be taken out is taken out, and both end portions in the lateral width direction of the plate 1 are pressed at both ends in the lateral width direction of the storage target substrate i when the substrate is stored in the storage container 2. The rotation of the substrate 1 around the longitudinal axis is prevented, and the substrate 搬 is conveyed in a stable posture, and the position in contact with the substrate 1 can be made a minimum of one of the downstream end portions in the substrate take-out direction. Having a clamping base that operates in the up and down direction One of the pair is formed by the missing portion 83 and the supporting portion 84 for supporting the pair of clamping portions 83. A pair of clamping portions 83 project to the side of the lateral portion of the supporting portion 84. The state 'separates from each other and moves away from the ground. And the pair of clamping action β bruises 83 is configured to be switchable so that the pair of clamping action portions are close to each other, and the holding state of the substrate 1 is clamped (refer to the % map). a state in which the pair of nip portions 83 are separated from each other (see Fig. 24) and a state in which the pair of nip portions 83 are brought closer to each other than the nip state (see the 28)) The nip portion 82 is supported by a moving body 87 that is linearly movable along a moving path along the substrate taking-out direction, and the holding portion 82 is configured to move the body 87 along the moving path. The movement is movable in the direction in which the substrate is taken out. The upper portion of the moving body 87 is provided with a rocking connecting member 85 that connects the moving body 87 around the longitudinal axis, and the rocking connecting member 85 is taken out in the direction of the substrate. The end of the extension The upper portion is fixedly supported by the disengagement portion 82. Thereby, the nip portion 82 is supported by the movable body 87 in a state of being oscillated around the longitudinal axis. [ Incidentally, the longitudinal axis of the swaying portion 82 is located in a plane view Far away from where the support portion 84 is located, and where the gripping action portion is located. _ Further, the pinch transport mechanism 81 has a rocking guide member 89 as a retracting operation mechanism, which is configured to be shaken. In the state in which the extraction target substrate has been transported to the relay position, the member is released from the missing portion 82 that is nipped by the removal target substrate 至 to the take-out target substrate 1 that is transported by the placement support transport mechanism 88. The transport path (the space occupied by the substrate 时 when the substrate 1 is transported) is retracted from the retracted position. The rocking guiding member 89 is configured such that the moving body 87 moves along the moving path 58 201016565, abuts against the clamping portion 82, and swings around the longitudinal axis, so that the clamping portion 82 is guided to the lateral direction intersecting with the substrate taking-out direction. The side portion 'beyond the width direction' is used to retract the grip portion 82 to the retracted position. The rocking guide member 89 will be described. The rocking guide member 89 has a rocking coupling member 85 and a guide groove 89a for guiding the guide roller 86. In other words, the rocking connecting member 85 is provided so as to abut against the inner wall of the guiding groove 89a in a state in which the plate body of the guiding groove 89a is formed, and the pair of guiding rollers 86 are provided, and the connecting member 85 is removed from the substrate at the 0 floor. The end portion of the portion extending in the direction abuts against the inner wall of the guide groove 89 on the lower side thereof. And the portion on the upstream side of the substrate taking-out direction of the guiding groove is formed in a straight line along the moving path of the moving body 87, and the portion on the downstream side of the portion on the upstream side is curved to the lateral width direction. Curved on the outer side. That is, as shown in Figs. 24 to 28, in order to take out the target substrate 1 from .  The storage position is transported to the relay position or the storage target substrate 1 is transported from the relay position to the storage position, and the guide roller 86 is formed as a linear portion of the guide groove 89a during the movement of the movable body 87 along the movement path. Guided in a straight line, the posture of the grip portion 82 is maintained in a posture in which the gripping action portion 83 and the support portion 84 are arranged in the direction of the movement path. As shown in Fig. 29 and Fig. 30, after the removal target substrate 1 is removed from the storage position, the movable body 87 is moved to the downstream side in the substrate take-out direction, and the guide roller 86 is formed as a guide groove 89a. The portion of the shape is guided by a curved bow, and the crucible is moved to the side outside the lateral width direction, so that the posture of the grip portion 82 is changed to a posture inclined with respect to the movement path, so that the support portion is opposed to the gripping portion. The portion 83 is located on the outer side in the lateral width direction, and is displaced from 59 to 201016565. In this state, the moving body 87 is moved to the upstream side in the substrate take-out direction, and the guiding pro-86 is guided in a curved shape as a curved portion of the guiding groove 89a. Since the crucible is moved to the inner side in the lateral width direction, the posture of the grip portion 82 is changed to a posture in which the gripping action portion 83 and the support portion 84 are arranged in the direction along the movement path. Further, as shown in Figs. 25 and 27, the holding portion 82 is viewed in plan in a posture aligned in the direction of the moving path L, and the pair of holding portions 83 and the supporting portion 84 are located on the substrate. In the lateral width of the transport path, the downstream side (four) or the pressing direction of the substrate 1 can be taken out. As shown in the third figure, the tilting posture with respect to the moving path is viewed in a plane, and the pair of clips participate in the action. One of the portions 83 and the support portion 84 are located away from the substrate 搬, and are located on the laterally outer side. Therefore, the substrate 1 can be transported by the support transfer mechanism 88 without being blocked by the nip 82. Incidentally, the grip portion 82 is located at the retracted position in a posture inclined with respect to the movement path (see FIGS. 29 and 30). At this time, the pair of disengagement portions 83 are viewed in a plane, and are present on the transport path of the substrate 而, so that the nip portion 83 can be allowed to pass through. [mounting support transport mechanism] The lubricator support transport mechanism 88 is configured such that when the substrate 1 is taken out from the storage container 2, the mounting substrate 1 that is transported to the relay position by the misalignment transport mechanism 81 is placed. The target substrate 搬 is transported from the relay position to the take-out position (see FIG. 29) in which the entire substrate 1 is placed outside the storage container 2, and when the substrate 1 is stored in the storage container 2, the object to be received from the substrate transport conveyor 51 is received. The substrate 1 is transported from the take-out position to the relay position. Incidentally, the mounting support transport mechanism 88 is configured such that when the substrate relay 60 201016565 unit 70 moves in the lateral width direction, the substrate 1 is placed and supported on the entire take-out position on the mounting support transport mechanism 88, and The take-out target substrate 1 located at the take-out position is transferred to the substrate transfer conveyor 51, and the storage target substrate 1 received from the substrate conveyance conveyor 51 is transported to the take-out position. The placement support transport mechanism 88 will be described. The placement support transport mechanism 88 is provided with an air supply type support mechanism 52 that supplies air to the lower surface of the substrate 1 and supports the substrate in a non-contact state in a horizontal posture, and a pair of air supply type support mechanisms 52. The substrate 1 supported by the substrate 1 is provided with a driving force imparting mechanism 53 for the driving force in the conveying direction. The air supply type support mechanism 52 has a hair dryer 54 that is disposed above the transport path of the substrate 1 to transport air upward, a porous air plate 55 provided between the hair dryer 54 and the transport path of the substrate 1, and supplies air to the air blower. The conveyor 54 air supply device 56 (see Fig. 34) is configured. Further, the push-and-power imparting mechanism 53 has a plurality of support transport rollers 57 that are placed in parallel with the lower surface of the substrate j, and a top surface of the substrate 〇1 that is in contact with the relay position, and the push-and-push mechanism 57. In the same manner, the transfer roller 58 for the substrate is lost, and the transfer roller 57 for the support and the transfer roller 58 for the support are disposed in the lateral width direction, and the substrate 1 is placed and read. Both ends of the lateral width direction. A flanged transfer roller 57 having a flange that restricts the movement of the substrate 丨 in the lateral width direction and a flangeless support conveyance roller 57 having no flange are provided as a plurality of support transport pro 57, The support member 57 for supporting the flange is disposed on the upstream end portion of the substrate transport direction of the tangential transport lion (substrate take-out and release mechanism 73), and is in contact with the substrate 1 61 201016565 located at the relay position, and The holding substrate 丨 is held in cooperation with the holding roller 58 for gripping, and the supporting transfer roller 57 with the flange is arranged in parallel with the support transfer mechanism 88 (substrate take-out mechanism 73). The roller is also placed downstream of the substrate 1 in the direction in which the substrate is taken out, and does not contact the lower surface of the substrate 1 at the relay position. Incidentally, the holding transfer roller 58 is similar to the flangeless supporting transfer roller 57. The mounting support transport mechanism 88 is disposed at the upstream end portion of the substrate support take-up mechanism 88 (substrate take-out and insertion mechanism 73). That is, the placement support transport mechanism 88 is configured such that the relay position is downstream of the substrate detachment direction of the substrate 丨Side end The flangeless support of the support conveyance roller is supported by the conveyance roller 57, and the conveyance system of the take-up substrate 1 by the pinch conveyance mechanism 81 is conveyed at a position where it is clamped together with the pinch conveyance roller 58. The downstream end portion of the substrate 1 in the substrate take-out direction is located at the upstream end portion of the substrate take-up mechanism 88 in the substrate take-out direction, and is sandwiched by the branch conveyance roller 57 and the nip conveyance roller 58. The downstream end portion of the relay position substrate 1 in the substrate take-up direction is disposed on the upstream side end portion of the substrate support take-up mechanism 88 in the substrate take-up direction, and the flangeless support transfer roller 57 and the clamp are disposed. Since the position where the conveyance roller 58 is co-operated and held is a position close to the storage position, the conveyance distance of the substrate 1 of the lost conveyance device 81 can be shortened, and the moving distance of the clamp portion 82 can be shortened. The conveyance roller 57 and the nip conveyance roller 58 are disposed so that the support conveyance roller 57 and the nip conveyance roller 58 are placed on the support and the nip portion are sandwiched by the nip conveyance mechanism 81 in the lateral width direction. Still more outside. By 62 20101656 5, the transport range of the substrate 1 configured to sandwich the transport mechanism 81 and the transport range of the substrate 1 on which the support transport mechanism 88 is placed are repeated in the substrate take-out direction. Therefore, the transport mechanism 81 can be transported to the substrate 1 The relay position that the support transport mechanism 88 transports is placed, and the support transport mechanism 88 can be placed on the substrate to transport the substrate 1 to the relay position that can be transported by the transport mechanism 81. As a result, the pinch transport mechanism 81 can be accurately performed. When the substrate 1 is transferred from the pinch transport mechanism 81 to the placement support transport mechanism 88, the state in which the substrate 1 is nipped in the nip portion 82 is changed to the state in which the support is placed. In addition, since the transport roller 57 and the pinch transport roller 58 can be operated together and transported while sandwiching the substrate, the transfer between the pinch transport mechanism 81 and the mount support transport mechanism 88 can be accurately performed. , and the substrate 1 can be properly transferred. The mounting support transport mechanism 88 is configured to support the central portion of the substrate 1 in the lateral width direction in a non-contact state by the air supply type support mechanism 52, and to contact the supporting and clamping substrate 丨 in the lateral width direction by the urging force imparting mechanism 53. The both end portions 'rotate and drive the support conveyance roller 57 and the conveyance conveyance roller 58 by the conveyance motor 59, and convey the board|substrate 1 in the conveyance direction. In addition, the substrate transfer conveyor 51 and the placement support transport mechanism 88 have a blower type branch mechanism having a blower, a wind deflector, and an air supply device, and a push force imparting mechanism having a plurality of support transfer rollers. Composition. Further, the substrate transport conveyor 51 is not provided with a transport roller for gripping. As shown in Fig. 31, the floating air ejection body 71 is configured to have an air nozzle outlet 91 that discharges air upward, and a shape in which the upstream end portion of the air ejection port 91 in the substrate taking-out direction extends to the upper side. The air ejected upward from the air jet outlet 91 of the air 63 201016565 is guided to a guide curved surface 92 that flows in the horizontal direction along the upper surface of the floating air ejecting body 71 toward the storage container 2 side, and uses the auxiliary air. In the auxiliary air ejecting system, the auxiliary object ejecting system A is taken out between the lower surface of the object to be removed 1 taken out by the substrate take-out mechanism 73 and the lower surface of the storage target substrate 1 and the upper surface of the floating air ejecting body 71. Squirting air. That is, in the 31st (a) diagram, as indicated by the arrow, the air ejected upward from the air ejection port 91 of the floating air ejection body 71 flows along the guide curved surface 92 by the Coanda effect. The upper surface of the floating air ejection body 71 connected to the guide curved surface 92 flows in the horizontal direction, and flows from the storage container 2 on the upstream side in the substrate take-out direction in the horizontal direction, so that it is sprayed from the air ejection port 91. The air is guided by the guide curved surface 92 so that air is ejected toward the lower surface of the object to be taken out 1 and the upper surface of the floating air ejecting body 71, and then flows toward the storage container 2 in the horizontal direction, and the object to be taken out is taken out. Air is ejected between the lower surface and the upper surface of the support plate 45 on which the substrate 1 is supported. The supply air ejecting body 72 is provided such that the direction of the air flowing in the horizontal direction in the same manner as the floating air ejecting body 71 is opposite to the direction in which the air is ejected upward. The discharge port 93 is located above the air ejection port 93 in the opposite direction and on the downstream side in the substrate take-out direction, and the air ejected upward from the opposite side by the air ejection port 93 is guided along the supply air. The upper surface of the discharge body 72 is configured by a guide curved surface 94 in a direction opposite to the horizontal direction of the side opposite to the storage container 2 side. In other words, the air ejected from the air ejection port 93 in the opposite direction flows in the horizontal direction toward the downstream side in the substrate take-out direction on the side opposite to the side of the container 2, and the air is supplied to the adjacent portion of the container. In the middle, the air ejection port 91 of the gas ejecting body 71 for floating is further downstream of the substrate taking-out direction. As shown in Fig. 23 and Fig. 32, a plurality of floating air ejection members 71 are arranged in parallel in a state in which the horizontal width direction is spaced apart, and the final dielectric gas ejecting body 72 is disposed in the lateral width direction for floating. Between the air ejecting bodies 71, a plurality of floating air ejecting bodies 71 and a plurality of supply air ejecting bodies 72

In a state where the floating air ejection body 71 is located at both ends in the lateral width direction, the air ejection body 71 is alternately arranged in a line in the lateral width direction. By the arrow in Fig. 32, when the substrate 1 is transported, the air ejected by the supply air ejecting body π can be supplied to the air ejection port 91 of the floating air ejecting body 71 to the substrate take-out direction. Downstream side. Thereby, even if the air of the air ejection port 91 of the floating air ejection body is ejected, the downstream side of the substrate taking-out direction is formed with a negative pressure, and the air of the gas ejecting body 72 can be supplied. Dissipate, and properly support the substrate 1. The connection plate 96 is supported on the upstream side of the substrate take-out direction of the substrate take-out and release mechanism 73 in a state in which the upper surface is the same as the upper surface of the wind plate % and extends to the upstream side of the substrate take-out direction. The supply hollow ejector 72 has the same height as the upper surface of the connection plate %: and is connected to the connection plate 96 in the state in which the substrate is connected to each other. The air ejection body is added to the upper surface. The height is lower than a few millimeters (for example, about 2 to 3 points) lower than the upper portion of the connection plate %, and a wire for passing the air ejected from the air ejection port 91 is formed on the downstream side in the substrate take-out direction. Set the board % in the wheel. 65 201016565 That is, the air ejection body 71 is disposed such that its upper surface is located below the upper surface of the supply ejection body 72 by a few millimeters. The air supply device 9s (see FIG. 34) as the air supply device supplies air to the floating air nozzle discharge body 71 and the supply air (four) discharge body 72'. The discharge body air supply device % is configured as The supply of Ζ air is adjusted freely. In addition, the air is supplied from the discharge air supply device 95 to the floating air discharge body 71, and the supply air discharge body 72 and the supply air discharge body 71 are switched to the discharge state of the discharge air. By stopping the supply of air to the floating air nozzle body 71 and the supply air discharge body 72 from the discharge air supply, the air supply body 71 and the supply air discharge body 72 are switched. The nozzle that stops the ejection of air stops. Next, the control device will be described. As shown in FIGS. 33 and 34, the substrate relay unit % is provided with a substrate 失 which is lost by the nip 82 and a substrate 按压 which is pressed by the nip 82. The presence or absence of the substrate exists. Whether the sensor 1 or 1 detects whether the storage container 2 is located at the height of the container 1 for detecting and accommodating the substrate 1 and detecting whether the substrate 1 is located at the substrate take-out position The detector 103 detects the relay position detecting sensor 104 at the relay position, and the deceleration position detecting sensor 105 that decelerates the transport speed of the substrate 1 on which the support transport mechanism 88 is placed, in the substrate access portion 6 A substrate exposure detecting sensor 106 that detects whether one of the portions of the substrate 1 is exposed from the storage container 2 to the outside is provided, and is configured to input detection information of the detecting sensors to the control device. 66 201016565 The control device is configured to control the traveling frame 74 of the substrate relay unit 7 , the substrate taking mechanism 73 , and the air supply for the ejection body according to the instructions of the detection sensor or the upper controller. The action of the skirt 95 and the movement of the lifting mechanism 61 and the substrate transport conveyor 51 are performed. The control device 具有 also functions as an air supply control unit and a lifting/lowering control unit that controls the operation of the two-gas supply device 95 for the discharge body to discharge the air from the floating air. ! And the amount of the air to be ejected by the industrial gas ejecting body 72 is gradually increased toward the target supply amount, and the elevating control means is for placing the object to be taken out or the substrate 1 to be stored. The support plate 45 is located at an altitude corresponding to the height of the floating air ejection body 71 and the substrate take-out mechanism (the height for taking out and the height for storage), and controls the actuator of the elevating mechanism 61. In other words, the control device is configured to control the air supply device 95 for the discharge body, and when the floating air discharge body 71 and the supply air discharge body 72 are switched from the discharge stop state to the discharge state, The amount of air supplied from the discharge air supply device 95 to the floating air discharge body 71 and the supply air fluorine discharge body 72 is gradually increased, and the floating air ejection body 71 is increased from the floating air. The discharge amount of the air ejected from the supply air ejecting body 72 is gradually increased toward the target supply amount. Further, the control device Η is configured to control the operation of the elevating mechanism 61 to cause the support plate 45 on which the substrate 1 for supporting the removal or storage is placed to correspond to the floating air spray when the substrate 1 is taken out or stored from the storage container 2 The discharge body 71 and the height of the substrate take-out mechanism 73 are ejected, and the air ejected from the floating air ejecting container 71 is ejected to the lower surface of the substrate 1 that is taken out or stored, and the support plate 45 on which the substrate 1 is supported is placed. In the upper portion, the holding portion 82 can be clamped or pressed to eject the floating air of the empty nozzle body 71, and the substrate is provided with a pair of sensors 101. The holding portion 82 detects the presence or absence of the substrate 1 before the missing holding portion 83, respectively, and the control mechanism Η is configured such that when both the substrate presence/absence sensor 1〇1 are in the detection state of the presence of the detecting substrate 1 It is determined that the substrate 1 is clamped or pressed, and when one of the pair of substrates is present or not, or both of them are in a non-detected state in which the substrate 1 is not detected, it is determined that the substrate 1 is not clamped and pressed. When it is held or pressed by the grip portion 82 , Is determined and the pressing nip 1 is not a substrate, the substrate transfer apparatus stops 8 of the actuator. The container height detecting sensor 102 is configured to detect the presence or absence of a plurality of detecting plates 107 arranged side by side in the up and down direction corresponding to the plurality of supporting plates 45 respectively, and the control mechanism η is configured to be in the plural when the storage container 2 is located Any one of the support plates 45 corresponds to the height of the floating air ejection body 71 and the substrate take-out mechanism 73, and is determined when the container height detecting sensor 1〇2 detects the detection state of any of the plurality of detecting plates. When the storage container 2 is at a proper height, when the storage container 2 is displaced from the corresponding height in the up-and-down direction, and the container height detecting sensor 102 is in a non-detecting state in which none of the plurality of detecting plates is detected, it is determined as a storage container. (2) When the substrate 1 is taken out of the storage container 2 at a proper height, it is determined that the storage container 2 is not at the proper height, and the operation of the substrate transfer device 8 is stopped. The take-out position detecting sensor 103 is provided at a position corresponding to the upstream side end portion of the substrate 1 in the take-out position and a position corresponding to the downstream side end portion, and the control mechanism is configured to be positioned when the substrate is located When the position of the 201016565 is taken out, the pair of take-out position detecting sensors 103 determines that the substrate 1 is in the take-out position, and when the substrate 偏离 is displaced from the take-out position, one of the pair of take-out position detecting sensors 103 is removed. Or when both are in the non-detection state, it is determined that the substrate 1 is not located at the take-out position. The relay position detecting sensor 104 is disposed at a position on the downstream side end of the substrate taking-out direction of the substrate 1 at the relay position and a position further downstream than the position, and is provided in a state adjacent to the substrate taking-out direction. When the control mechanism Η is configured such that the relay position detecting sensor 104 located on the upstream side of the substrate taking-out direction is the detecting state of the detecting substrate 1, the relay position detecting sensor 104 located on the downstream side is the non-detecting substrate 1 In the detection state, it is determined that the substrate 1 is located at the relay position, and when the substrate 1 is deviated from the relay position, and the pair of relay position detecting sensors 104 are both in the detection state or the non-detection state, it is determined that the substrate 1 is not located in the middle. Following the position. The deceleration position detecting sensor 105 is disposed such that the pair of receiving and storing pairs are located in the width before and after the substrate 1 positioned at the take-out position, and the control mechanism is configured to control the driving force imparting mechanism 53 to be supported. When the transport unit 88 transports the substrate 1 from the relay position to the take-out position, the transport speed is accelerated to the transport high speed immediately after the start of the transport, and when the take-off deceleration position detecting sensor 105 detects the detection state of the substrate 1, The conveyance speed is reduced to a lower speed than the conveyance high speed and low speed, and the substrate 1 conveyed by the carrier conveyance mechanism 88 is transported from the substrate conveyance conveyor 51 to the take-out position, and is maintained from the substrate conveyance conveyor 51. When the storage deceleration position detecting sensor 1〇5 is in the detection state of the detection substrate 1, the conveyance speed is decelerated to be lower than the conveyance speed of the received substrate by 69 201016565. The substrate exposure detection sense is 106 is set to detect the presence or absence of the substrate 1 before the storage container 2. The control mechanism is configured to determine that the substrate 1 is received from the substrate 1 when the substrate exposure detection sensor 106 is in the detection state of the detection substrate 1. When the container 2 is exposed, when the substrate exposure detecting sensor 106 is in a non-detected state in which the substrate is not detected, it is determined that the substrate 1 is not exposed from the storage container 2. In the case where the control unit § operates the substrate transfer device, the substrate 1 is taken out from the storage container 2 located in the substrate entry/exit portion 6 and transported to the substrate processing device outside the drawing. Φ First, the traveling frame 74 is moved, and the substrate relay unit 7A is placed adjacent to the storage container 2 located at the substrate entrance/exit portion 6. Then, the storage container 2 is moved up and down by the elevating mechanism 61, and the support plate 45 on which the support-receiving target substrate 1 is placed is placed in a state corresponding to the south of the floating air ejection mechanism 71 and the substrate take-out mechanism 73. 'The ejection air is supplied to the air supply device %', and the floating air ejection body 71 and the supply air ejection body are in a discharge state, and the conveyor air supply device 56 is actuated to cause the air supply A support mechanism 52 to be The air is discharged from the wind deflector 55 toward the upper mouth. At this time, the squirting air ejecting body 71 and the supply air ejecting body 72 are disposed adjacent to the container adjacent to the downstream end portion of the slab 45 of the take-off target substrate 1 adjacent to the downstream side in the substrate taking-out direction. By this means, the air ejected from the floating air ejecting body 71 can be properly supplied between the lower surface of the substrate to be removed and the struts 45, and the substrate to be taken out can be accurately floated from the support plate. When the nozzle of the air of the floating air I discharge body 71 is ejected, the object to be taken out (f) is lifted from the support plate 45, and the moving body 87 is moved from the downstream side 70 201016565 side of the substrate take-out direction to the upstream side, The gripping portion 82 in the grip release state is moved to the gripping position of the take-out substrate 丨 at which the storage position can be held (see FIGS. 24 and 25). In addition, the nip portion 82 is switched to the nip state, and the detaching target substrate 1 is nipped by the nip portion 82 to rotate the support transport roller 57 and the nip transport roller 58, and the substrate 1 is taken out from the substrate upstream side. When the carrier is transported to the downstream side, the moving body 87 is moved from the upstream side in the board taking-out direction to the downstream side, and the gripping portion 82 in the gripping state is moved to the grip releasing position corresponding to the relay position (refer to Fig. 26 and Fig. 27), and the substrate cassette is transported to the relay position. At this time, since the air is also supplied to the upper portion of the floating air ejection body 71 and the supply air ejection body 72, the air layer formed by the air can accurately support the floating air ejection body 71 and the supply air. The substrate 1 of the upper portion of the ejection body. After that, the substrate 1 is transported to the relay position, and the rotation of the support transport roller 57 and the misalignment transport roller 58 is stopped, and the operation of the discharge air supply device 95 is stopped to float. The air ejector 71 is in a discharge stop state. After the grip portion 82 is switched to the grip release state, the grip portion 82 in the grip release state is moved to the retracted position (see FIGS. 29 and 3), and the movable body 87 is taken out from the substrate. The upstream side of the direction moves to the downstream side, and the support transport roller 57 and the nip transport report 58 are rotated, and the substrate 1 is transported to the downstream side from the upstream side in the substrate take-out direction, and the substrate 丨 is transported to the take-out position. The rotation of the support conveyance roller 57 and the conveyance conveyance roller 58 is stopped. After that, the traveling frame 74 is moved, and the substrate transfer unit 7 is placed adjacent to the substrate conveyance conveyor 51 to be in position, and the support conveyance roller 71 201016565 57 and the cooling conveyance roller 58 are rotated. The substrate 搬 is transported to the downstream side from the upstream side in the substrate take-out direction, and the substrate 丨 is transferred to the substrate transfer conveyor 51, and the substrate transfer conveyor 51 transports the substrate 1 to the substrate processing apparatus. Next, the case where the substrate cassette that has been carried out from the substrate processing apparatus is stored in the storage container 2 located in the substrate entrance/exit portion 6 will be described. First, the traveling carriage 74 is moved so that the substrate relay unit 70 is positioned adjacent to the substrate conveyance conveyance 51, and the conveyor air supply device 56 is actuated to cause the air supply type support mechanism 52 to face upward from the air conditioning plate 55. Air is ejected. In this state, the support conveyance roller 57 and the conveyance conveyance roller 58 are rotated, and the substrate 1 is conveyed from the upstream side in the substrate storage direction to the downstream side, and the substrate is conveyed from the substrate processing apparatus to transport the substrate. 51 Transfer the substrate 1 'Transfer to the removal position. Thereafter, the rotation of the support conveyance roller 57 and the conveyance conveyance roller 58 is stopped, the traveling frame 74 is moved, and the substrate relay unit 70 is placed adjacent to the storage container 2 located in the substrate entrance/exit portion 6. In the state in which the storage container 2 is moved up and down by the elevating mechanism 61, the support plate 45 on which the support substrate 1 is placed is placed in a state corresponding to the south of the floating air ejecting mechanism 71 and the substrate take-out mechanism 73. The spouting body is actuated by the air supply device 95, and the floating air ejecting body 71 and the supply air ejecting body 72 are in a discharged state. In this state, the moving body 87 is moved from the upstream side to the downstream side in the substrate housing direction, and the pressing portion 8 2 is moved to the pressing end position on the upstream side in the substrate housing direction (see FIG. 28). The amount of the substrate 1 is moved more than the nip position, and the substrate 丨 is transported to the storage position. After that, the rotation of the support conveyance roller 57 and the conveyance conveyance roller 58 is stopped, and the discharge air supply device 95 and the conveyor empty space 72 201016565 gas supply device 56 are stopped, and the movable body 87 is housed from the substrate. When the downstream side of the direction moves to the upstream side, when the substrate 接着 is accommodated, the nip portion 82 is moved to the retracted position, and when the substrate 丨 is subsequently taken out, the nip portion 82 is moved to the clip. Hold the release position. When the discharge air supply device 95 is stopped and the floating air discharge device is in the discharge stop state, the supply of air to the upper surface of the storage target substrate and the upper surface of the support plate on which the substrate is supported is stopped. φ describes the discharge of air existing between the substrate and the support plate. [Other Embodiments of the Reference Embodiment] (1) In the above-described reference embodiment, the floating air ejection body 71 is configured to have the air ejection port 91 and the guide curved surface 92, and the auxiliary air ejection body ' may be configured as The air is ejected toward the upstream side in the direction in which the substrate is taken out, and the air is ejected upstream of the lower surface of the substrate 1 to be taken out and the upper surface of the support plate 45' on which the substrate 1 is placed, and the air is ejected upward. The upper side of the floating air ejecting body 71 and the upper side of the lower surface of the object to be taken out 1 are ejected from the air ejecting port, and the auxiliary air ejecting body is used in combination. Further, the floating air ejection body 71 may be configured to have only the above-described upstream air ejection port, and not the auxiliary air ejection body, and may have air blown upward to the floating air ejection body 71. The auxiliary air ejection body that is the auxiliary air ejection port that ejects air between the upper surface of the substrate to be removed 1 and the floating air ejection body 71 are provided separately from each other. (2) In the above-described reference embodiment, the supply air ejection body 72 has a reverse air inlet port 93 and a reverse direction guide curved surface 94, and is provided to be located in the air than the floating air ejection body 71. The discharge port 91 is still 73 201016565. In the upstream direction of the substrate take-out direction, the supply air ejection body 72 may not have the opposite direction guide curved surface 94, but only has the opposite direction air ejection port 93 to constitute A a . It is placed at a position downstream of the air nozzle outlet 91 of the floating air ejection body η in the direction in which the substrate is taken out. () In the above-described reference embodiment, the floating air ejection body is disposed such that the floating air ejection body 71 is disposed above and below the supply air ejection body 72 (four). The same height as the upper surface of the air ejecting body 72 may be provided so that the upper surface thereof is located above the upper surface of the supply air ejecting body 72. (4) In the above-described reference embodiment, the air supply control unit (control device) H controls the operation of the air supply unit 95, and the discharge amount of the air ejected from the floating air ejecting body 71 is directed toward the target. The supply amount is increased stepwise, and the operation of the air supply unit 95 can be controlled to quickly achieve the target supply amount by the amount of air discharged from the floating air ejection body 71. (5) In the above-described reference embodiment, the placement support transport mechanism (10) is configured to be transported by the urging force imparting mechanism 53 while the substrate 1 is supported in a non-contact state by the air supply type support mechanism 52. It is configured such that the air supply type support mechanism 52 is not provided, and is conveyed in a state where the urging force imparting mechanism 53 is in contact with the support substrate 1. (6) In the above-described reference embodiment, the elevating mechanism 61 that supports the storage container 2 to be lifted and lowered is provided, and the floating air ejecting body 71, the supply air ejecting body 72, and the substrate take-out loading mechanism 73 may be provided to be supported. Lifting device for lifting and lowering. At this time, the lifting control device (control device) Η controls the operation of the lifting device, and the floating air ejection body 71, the supply air 74 201016565, the ejection body 72, and the substrate take-out mechanism 73 are located corresponding to the mounting support. The height of the object or the support plate 45 of the object substrate 1 is taken out. (7) In the above-described reference embodiment, the take-out mechanism 73 is configured such that the take-up substrate can be taken out from the storage container 2, and the storage target substrate i can be stored in the storage container 2. In addition to the take-out mechanism, the storage container 2 is provided with a storage mechanism for storing the storage target substrate 1 in the storage container 2.

(8) In the above-described reference embodiment, the container body 41 of the storage container 2 is configured such that the left and right sides and the upper and lower surfaces are sealed by the four-corner cylindrical shape forming the lateral posture of the front and rear gates, and the left and right sides and the upper and lower sides cannot be closed. The side discharge space can also make the structure of the container body 41 of the storage container 2 into a frame shape forming the front and rear faces, the upper and lower faces, and the left and right face opening ports, and the right and left faces and the upper and lower faces can be opened from the left and right faces and the upper and lower faces. Exhaust air. In the reference embodiment, the storage container 2 has the cover member and the fan filter unit θ, and either or both of the cover member 42 and the fan filter unit 43 are not provided. In the reference embodiment of the present invention, the projections are formed by press working: the paint such as water is sprayed onto the upper surface of the support plate 45, and the projections are formed to be able to print the upper surface of the individual flaps 45 to form the projections 48. The protrusion member of the shape portion is attached to the cutting base, and in the body 71 and the plurality of reference implementations (4), a plurality of floating air are ejected == the supply air nozzle is located at both ends in the lateral width direction. In the state of the horizontal width direction, the rows 75, 2010, 16565 are arranged in a row, and the arrangement of the plurality of floating air ejecting bodies 71 and the plurality of supply air ejecting bodies 72 can be appropriately changed. In other words, one or both of the floating air ejection body 71 and the supply air ejection body 72 may be arranged in a state in which two or more horizontal width directions are continuous, and also The supply air ejection body 72 is arranged in a state of one end or both ends in the lateral width direction. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a side view showing the substrate transfer apparatus of the first embodiment. Fig. 2 is a perspective view showing the storage container of the first embodiment. Fig. 3 is a perspective view showing the cover member side of the storage container of the first embodiment. 4(a) to 4(b) are side views showing a state in which the cover member of the first embodiment is supported. Figs. 5(a) to 5(c) are side views showing the elevating position of the storage container of the first embodiment. 6(d) to 6(e) are side views showing the elevating position of the storage container of the first embodiment. 7(a) to 7(b) are perspective views showing a state in which the cover member of the first embodiment is detached. Figs. 8(a) to 8(b) are perspective views showing a state in which the cover member of the second embodiment is detached. Figs. 9(a) to 9(b) are side views showing a state in which the cover member of the fourth embodiment is supported. Fig. 10(a) to Fig. 10(b) are perspective views showing the case where the cover member of the fourth embodiment is off 76 201016565. Figs. 11(a) to 11(b) are side views showing the elevating position of the storage container of the fourth embodiment. Figs. 12(a) to 12(c) are side views showing the elevating position of the storage container of the other embodiment. Figs. 13(a) to 13(b) are side views showing the supported portions of the other embodiment (12). Fig. 14(a) to Fig. 14(b) are side views showing the plural @__rotating body of the other embodiment (13). Figs. 15(a) to 15(b) are views showing a plate-like body of another embodiment (13). Figure 16 is a front elevational view of the substrate processing apparatus. Figure 17 is a side view of the substrate processing apparatus. Figure 18 is a plan view of a substrate processing apparatus. Fig. 19 is a side view of the substrate transfer device. The second drawing is a perspective view of the storage container. Figure 21 is a perspective view of the storage container. Figures 22(a) to 22(b) show the support plate. Figure 23 is a plan view of the substrate relay unit. Figure 24 is a side view showing the missing portion of the gripping position. Figure 25 is a plan view showing the missing portion of the gripping position. Fig. 26 is a side view showing the saddle portion of the lost position. Fig. 27 is a plan view showing the nip portion of the grip release position. Fig. 28 is a side view showing the nip portion at the end position of pressing. 77 201016565 Figure 29 is a side view showing the gripping portion of the retracted position. Figure 30 is a plan view showing the grip portion of the retracted position. Figs. 31(a) to 31(b) are side views showing the floating air ejection body and the supply air ejection body. Fig. 32 is a perspective view showing the floating air ejection body and the supply air ejection body. Figure 33 is a schematic diagram showing the detection sensor. Figure 34 is a control block diagram. [Description of main component symbols] 1. 21... prefilter 2... storage container 22... exhaust flow path 4: storage unit 23... purified air circulation mechanism 5... article storage rack 24... substrate transfer Zone 6...substrate access section 25...zone partition 7...stack crane 26...air fan filter unit 8...substrate transfer device 28...pillar 13...dust free space 29...items Branch section 14...lattice 31...mobile frame 15...air filter 32...lifting mast 16...intake chamber 33...lifting platform 17...chamber 34...object transfer device 18...iUSL fan 35...winding table 19...circulation path 36&quot;.mounting portion 20...external air intake flow path 37...linkage mechanism

201016565 41.. container body 42...cap cake 43.. fan filter unit 44.. substrate removal inlet 45... support plate 45a... front end portion 46... snap-fit frame 46a&quot;. Part 46b... Engagement rod portion 46c... Support rod portion 47&quot; Support substrate 48.. Projection portion 48a... Mounting surface 49... Restricting member 50. &quot; recessed portion 51...Transport conveyor 52&quot;.Pro-column mechanism 53. ·Promoting force imparting mechanism 54. &quot;Blowing device 55...Flating plate 56...Conveyor air supply device 57···Supporting conveying roller 58. · Carrying the transporting stick 59.. The transporting motor 61&quot;. Lifting mechanism 62.. Lifting motor 63.. Supporting stand 64... Guide post 65... Engagement member 70.. Substrate relay unit 71 .. Floating air ejection body 72.. Supply air ejection body 73.. Substrate removal loading mechanism 74.. Walking frame 76.. Walking rail 77.. Walking motor 78 ...the traveling wheel 81...the conveying mechanism 82...the holding portion 83...the absorbing portion 84..the branch portion 85..the rocking connecting member 86&quot;. guiding the pro-87.. moving body 88... Supporting conveying mechanism 89.. shaking guide member 79 201016565 89a... guiding groove 91... air ejection port 92.. guiding curved surface 93.. using air ejection port in the opposite direction 94.. 95.. . Ejector air supply device 96.. Connection setting plate 101.. Substrate presence or absence detection sensor 102.. Container height detection sensor 103.. Take out position detection sensor 104 .. . Relay position detection sensor 105.. Deceleration position detection sensor 106.. Substrate exposure detection sensor 107... Detection board 111.. Container transport mechanism 112... Substrate transfer device 114. · Engagement portion 115... is locked 116... cover body 117.. tongue piece 118.. spacer 119... supported portion 120.. rotating body 121.. fixed cover 122.. cover handling mechanism 123 ...to support the support 124.. to the recess 126...the plate body 128...the support portion 129..the cylinder 129a...the front end portion 130...the support frame A...the container adjacent to the E... Supporting predetermined area, gap H... control device P0... upper end position P1... upper position P2... cover release position P3... intermediate position P4... substrate transfer position P5... rising side substrate shift Load ... P6 fall opposing side of the substrate transfer position

80

Claims (1)

201016565 VII. Patent Application No. 1. A storage container for a substrate, in which a plurality of sheets are placed in a horizontal position with a space therebetween, and the container body is formed into a cylindrical shape, and the substrate is taken out and placed in an opening. a state in which the opening is formed in the horizontal direction at one end portion thereof, and a plurality of substrates are accommodated therein; and The cover member is configured to be detachable from the upper side of the container body and freely detachable from the upper side, and to close the opening in a state of being mounted on the container body; the cover member has a snap support at the foregoing An engaged portion of the engaging portion of the upper end portion of the one end portion of the container body, and in a state of being mounted on the container body, centered on the engaged portion, along the container body and the aforementioned The opening direction of the cover member is swayed around the horizontal axis in the lateral width direction, and is attached to the container body in a state of being attached to the potential energy moving toward the container body side. 2. The substrate storage container according to the first aspect of the invention, wherein the cover member is configured to have the aforementioned direction in which the container body and the cover member are arranged closer to the container body than the center of gravity of the cover member. In the state in which the engaged portion is attached to the container body, the cover member is attached to the potential of the container body by its own weight. 3. The substrate storage container according to the first or second aspect of the invention, wherein the storage container is configured to ventilate from the other end side of the container body toward the side of the 81 201016565 side, and the other end of the container body The wind-shaped t-filter is provided in a single portion, and the cover member is attached to the one end portion of the container body in a state of being spaced apart from the container body. The substrate storage container according to the third aspect of the invention, wherein the exhaust gas gap is formed across the entire circumference of the opening. 5. The substrate storage container according to the third aspect of the invention, wherein a gap is formed between the container body and the cover member. 6. A substrate transfer device for a substrate storage container according to the first aspect of the invention, wherein the substrate transfer device is provided with a grain transfer mechanism for transporting the storage container to a substrate transfer device a substrate transfer device that removes a substrate from the storage container located at the substrate transfer position or stores the substrate in the storage container to transfer the substrate; and a cover release mechanism in which the storage container is located at the cover a state in which the cover member is detached from the container body; and the container transport mechanism is configured to transport the storage container to move downward from the cover detachment position to the substrate transfer position, and the substrate transfer device The container body configured to detach the cover member is configured to transfer the substrate via the opening. 7. The substrate for a substrate storage container according to claim 6, wherein the substrate transfer device is disposed at the one end of the container body with respect to the storage container located at the substrate transfer position. The side cover and the cover release position are installed at positions where the cover member and the substrate transfer device of the container body which are located at the cover release position are viewed in the vertical direction. 8. The substrate transfer device for a substrate storage container according to the sixth aspect of the invention, wherein the cover member is detachably attached to the container body from the upper side, and is detachably attached to the upper side. The container transport mechanism has a loading platform and a transfer device, and constitutes a '6-reading down-stage system to mount the storage container, and the receiving device is placed above the transfer substrate f from the other substrate, and The intermediate position below and below the cover release position is moved downward to the substrate transfer position 4, and the transfer device is configured to mount the storage container on the placement lowering table. When the cover disengagement position is further vertically lowered and moved downward to the intermediate position, the placement down platform structure is such that the transfer target substrate position 9 of the storage container corresponds to the transfer height of the substrate transfer device. And the storage container is supported to be lifted and lowered at the substrate transfer position, and the cover release mechanism has a support body. In the state in which the storage container which is moved downward by the transfer device is placed at the cover detachment position, the support member is supported by the slab portion of the cover member to disengage the cover member from the container body. The substrate transfer device for a substrate storage container according to the sixth or seventh aspect of the invention, wherein the cover member is detachable from the upper side and free from the upper side. The container transporting mechanism includes a support lowering platform and a preliminary transporting mechanism. The support lowering platform is configured to support the storage container, and the storage container is lowered from an upper position above the cover removal position to In the substrate transfer position, the preliminary transfer mechanism is configured such that the storage container is placed on the support lowering table, and the storage container is transported to the upper position. The transfer target substrate of the storage container is located at a transfer height corresponding to the substrate transfer device, and the storage container is supported to be lifted and lowered at the substrate transfer position, and the cover release mechanism has a support body. Carrying out the above-mentioned storage (four) of the supporting system which is descending and moving by the aforementioned supporting descending table, The position of the cover state Lin, following a cut in the cover is provided by the supporting portion of the member, so that the lid member is disengaged from the container body. The substrate transfer device for a substrate storage container according to the sixth or seventh aspect of the invention, wherein the cover member is inclined to the cover member side of the container body from the arrangement direction of the container body and the cover member The above-mentioned flipping device is freely slidable and is detachably attached to the obliquely upper side of the cover member side, and the cover detaching mechanism has a pair of branches (four) which are mutually complementary to the cover member Close to the position and solution 84 201016565 In addition to the separation of the above-mentioned cover members, the separation positions are separated along the transfer direction of the substrate, and then moved away from each other in the width direction. - (1) In the state in which the storage unit is located at the position where the cover is detached, the abutting portion of the cover member is abutted against the body by the movement of the body to the close position. Connect The month in which the cover member is moved to the side of the cover member in the arrangement direction is formed obliquely upward to form the guide surface on the outer side of the container in the lateral width direction toward the upper side of the cover member side in the direction of the arrangement. In the substrate transfer device for a substrate storage container according to the sixth or seventh aspect of the invention, wherein the substrate transfer device is placed in a positionally fixed state, (1) the bark transfer mechanism structure is a transfer target of the storage container. The substrate is located in the transfer corresponding to the substrate transfer shock Further, the storage container is supported to be lifted and lowered at the substrate transfer position, and the cover release mechanism is configured to support the removed cover member above the transfer target substrate and to move in the substrate transfer direction. a position closer to the opening of the storage container located at the substrate transfer position, and closing the opening of the storage container located at the substrate transfer position by the cover member that is separated from the transfer target substrate The fixing cover is disposed at a position lower than the transfer target substrate in a positionally fixed state, and is located at a position close to the opening of the storage container at a position of the substrate transfer 85 201016565 in the substrate transfer direction, and is closed on the substrate a portion of the opening of the storage container at the transfer position that is lower than the substrate to be transferred. 12. The substrate transporting substrate for the substrate storage container according to the sixth or seventh aspect of the invention is further provided, wherein the container main body has a plurality of support plates on which the rectangular substrate is placed in a state of being spaced apart from each other in the vertical direction. In the above-described substrate transfer device, the floating air ejection body is disposed in a state in which the storage container is placed at the substrate transfer position, and is disposed downstream of the substrate extraction direction of the support plate provided by the device Adjacent to the container adjacent to the side end, air is ejected to the lower surface of the substrate to be taken out and the upper surface of the support plate on which the substrate is supported; the take-out mechanism is the air made by the floating air ejection body a state in which the object to be taken out, which is ejected from the support plate, is taken out from the storage container while being passed over the floating air ejecting body, and the auxiliary air ejecting body is directed to the floating air ejecting body The air is ejected between the upper surface and the lower surface of the substrate to be taken out which is taken out by the take-up mechanism. A substrate transfer device for a substrate storage container according to the first aspect of the invention, wherein the substrate transfer device is provided with a container transfer mechanism that lowers the storage container And transferring the substrate to the substrate transfer position; and transferring the substrate from the storage unit before the substrate transfer position 201016565 or storing the substrate in the storage capacity to transfer the substrate; The conveying device is provided with: a support body that receives the supported portion of the cover member while the storage container by the container transport mechanism moves downward toward the substrate transfer position, and causes the cover member to be from the container body The disengager 14. The substrate transfer device is configured to transfer the substrate via the opening to the container body from which the cover member has been detached. The substrate transfer apparatus for a substrate storage container according to claim 13, wherein the supported portion is arranged in a plurality of lateral widths crossing the arrangement direction of the container body and the cover member. The horizontal axis of the direction is configured to rotate around a horizontally rotatable body, and the receiving support has a locking recessed portion into which the plurality of rotating bodies are engaged. The substrate transfer apparatus for a substrate storage container according to claim 13, wherein the supported portion is formed in a plate-like plate-like body, and the receiving support has a locking recessed portion into which the plate-shaped body is engaged. Composition. The substrate transfer apparatus for a substrate storage container according to the fourteenth aspect, wherein the supported portion has two rotating bodies positioned at an upper end portion of the cover member and arranged in the container body and the cover member. The direction is formed by arranging the two sides of the center of gravity of the cover member in the arrangement direction, and is provided to restrict the setting of the cover member to the side away from the storage container due to its own weight when supported by the receiving support. 87 201016565 The limit of the shaking above the angle. 88