TWI441769B - Substrate transporting facility - Google Patents

Description

Substrate transfer equipment Field of invention

The present invention relates to a substrate transfer apparatus which is provided with a storage container, a floating air ejection body, and a take-out mechanism for placing a plurality of support plates supporting a rectangular substrate so as to be spaced apart from each other in the vertical direction. a side-by-side installation; the floating air ejection system is disposed adjacent to a container adjacent to a downstream side end of the support plate of the plurality of support plates for supporting the take-out target substrate taken out from the storage container And ejecting air to the lower surface of the substrate to be taken out and the upper surface of the support plate on which the substrate is supported; the take-up mechanism ejects the air from the floating air ejecting body and floats from the support plate The object to be taken out is taken out from the storage container in a state where it passes over the floating air ejection body.

Background of the invention

The substrate transfer apparatus is used in a rectangular substrate such as a glass substrate of a liquid crystal display or a plasma display, and is placed on a support plate that is placed in parallel with each other at intervals in the vertical direction, and a plurality of sheets are accommodated in the storage container. The air ejection by the floating air ejecting body elevates the take-out target substrate stored in the plurality of substrates of the storage container from the support plate, and the take-out mechanism takes out the floating substrate from the storage container, which is difficult The substrate stored in the storage container is taken out in a state of being damaged by friction or the like.

In such a substrate transfer apparatus, it is conventionally configured to take out the substrate. The floating air ejection body disposed adjacent to the container is ejected in the horizontal direction from the ejection port formed at the upstream end portion of the substrate taking-out direction toward the lower surface of the substrate to be removed and the support plate on which the substrate to be taken out is supported. Air is formed between the take-out target substrate and the support plate to form an air layer flowing from the downstream side toward the upstream side in the substrate take-out direction, whereby the take-out target substrate is supported by the air layer, and the take-out mechanism passes over the floating air ejection body. The substrate is taken out (see Patent Document 1).

[First technical literature] [Patent Literature]

[Patent Document 1] Japanese Patent Laid-Open Publication No. 2006-315850

Summary of invention

However, in the conventional substrate transfer apparatus, since the floating air ejection system ejects air in the horizontal direction from the ejection port formed at the upstream end portion in the substrate taking-out direction, the ejection outlet of the floating air ejection body is not used. An air layer formed by the ejection of air is also formed downstream of the substrate take-out direction. Further, since the air is ejected from the discharge port in the horizontal direction, an air guiding portion such as a nozzle having a certain length is formed along the substrate taking-out direction, so that the length of the floating air ejecting body in the region where the air layer is not formed is taken out. The system is long to a certain extent. Therefore, when the take-out target substrate is taken out by the take-out mechanism, the portion above the floating air ejecting body is not supported by the air layer, and when the take-up target substrate passes over the floating air ejecting body, there is a contact floating air ejecting body. After that.

The present invention has been made in view of the above circumstances, and an object of the invention is to provide a substrate transfer apparatus in which a substrate to be taken out does not contact the floating air ejection body.

The substrate transfer apparatus of the present invention is provided with a storage container, a floating air ejection body, and a take-out mechanism for placing a plurality of support plates supporting the rectangular substrate in parallel in a state of being vertically spaced apart; The floating air ejecting system is disposed adjacent to the container adjacent to the downstream end portion of the support plate of the above-mentioned plurality of support plates for supporting the take-out target substrate taken out from the storage container, and ejects air. a state in which the lower surface of the substrate to be removed and the upper surface of the support plate on which the substrate is supported is placed; and the take-out mechanism passes through the substrate to be taken out from the support plate by ejecting air by the floating air ejection body The auxiliary air ejecting body is provided in the upper side of the floating air ejecting body, and is provided in the storage container, and the auxiliary air ejecting system is directed to the upper surface of the floating air ejecting body and the object to be taken out by the take-out mechanism. The air is ejected between the lower surfaces of the substrate.

In other words, the auxiliary air ejection body that ejects air from the upper surface of the floating air ejection body and the lower surface of the extraction target substrate taken out by the take-out mechanism is provided, so that the air ejected from the auxiliary air ejecting body is above the floating air ejecting body. The air layer is formed, and the air layer supports the object to be taken out above the floating air ejection body.

Therefore, it is possible to provide the substrate transfer apparatus that does not contact the floating air ejection body when the object to be taken out is lifted by the floating air.

In the embodiment of the present invention, the floating air ejection body is preferably configured to have an air ejection port that discharges air upward and a shape in which an upstream end portion in a substrate taking-out direction from the air ejection port extends to an upper side. The air ejected upward from the air ejection port is guided to the upper surface of the floating air ejecting body, and the auxiliary air ejecting body is used in combination with a guide curved surface that flows in the horizontal direction toward the storage container side.

In other words, since the air ejected upward from the air ejection port of the floating air ejecting body flows along the guide curved surface by the Coanda effect, the upper surface of the floating air ejecting body flows in the horizontal direction, and the path is taken out toward the substrate. The storage container on the upstream side of the direction flows in the horizontal direction, so that the air ejected from the air ejection port is guided by the guide curved surface to eject air between the lower surface of the substrate to be taken out and the upper surface of the floating air ejecting body, and then, toward the storage container. The side flows in the horizontal direction, and air is ejected between the lower surface of the substrate to be taken out and the upper surface of the support plate on which the substrate is supported.

Therefore, since the air ejection body can be used as the auxiliary air ejection body, the auxiliary air ejection body and the floating air ejection body need not be separately provided, and the structure can be realized as compared with the case where the auxiliary air ejection body is separately provided. simplify.

Therefore, it is possible to provide a substrate transfer apparatus which can simplify the structure.

In the embodiment of the present invention, it is preferable to provide a supply air discharge body that supplies air to a position adjacent to the container and downstream of the air ejection port in the substrate take-out direction.

That is, it is possible to supply the air ejection body and supply the air to the container phase. The adjacent portion is located downstream of the substrate discharge direction than the air ejection port.

That is, since the air around the air ejection port is drawn to the air ejected from the air ejection port of the floating air ejection body, and flows together with the air, the periphery of the air ejection port, particularly the substrate at the air ejection port, is taken out. A negative pressure is formed on the downstream side of the direction, and the substrate to be taken out by the take-out mechanism is suctioned by the negative pressure, and is easily immersed to the lower side, whereby the air supply body for supplying the air is supplied to the adjacent portion of the container, which is more than the air discharge port. In the downstream of the substrate take-out direction, the downstream side of the substrate in the direction in which the air ejection port is taken out can be positively pressurized, and the detachment of the substrate to be taken out on the downstream side in the substrate take-out direction of the air ejection port can be suppressed.

Therefore, it is possible to provide a substrate transfer apparatus that can stably take out the substrate without entanglement of the substrate to be taken out on the downstream side in the substrate take-out direction of the air ejection port.

In the embodiment of the present invention, the floating air ejecting body is preferably provided in plurality in a state in which a lateral width direction intersecting the substrate taking-out direction is spaced apart, and the supply air ejecting body is disposed in the lateral width direction. The air ejection port in the opposite direction between the floating air ejection bodies and the air ejection port in the opposite direction to the upper side is located above the air ejection port in the opposite direction, and is downstream of the substrate taking-out direction, from the foregoing The air ejected upward by the air ejection port in the opposite direction is guided by a guide curved surface for the reverse direction which flows in the horizontal direction along the upper surface of the supply air ejecting body toward the side opposite to the storage container side.

In other words, in the same manner as the floating air ejecting body, the air ejected upward from the air ejecting port in the opposite direction from the supply air ejecting body is Coanda After flowing through the guide curved surface in the opposite direction, the upper surface of the floating air ejecting body flows in the horizontal direction, and the downstream side flows in the horizontal direction from the downstream side in the direction in which the substrate is taken out, so that the air ejected from the air ejection port is guided. After the guide surface is guided, the downstream side in the direction in which the substrate is taken out flows in the horizontal direction, and the air is supplied to a position downstream of the air ejection port of the floating air ejection body in the direction in which the substrate is taken out.

In addition, since the supply air ejecting body is disposed between the floating air ejecting bodies arranged in parallel in the lateral width direction, the supply air ejecting body can be disposed in a state of not colliding with the air ejected from the floating air ejecting body. Further, since the air-borne layer formed by the air flowing in the horizontal direction on the downstream side in the substrate take-out direction supports the take-out target substrate, the take-out of the substrate by the take-up mechanism can be performed more stably.

Therefore, it is possible to provide a substrate transfer apparatus which can suppress the detachment of the substrate extraction target substrate on the downstream side in the substrate take-out direction of the air ejection port, and can more stably take out the substrate by the take-out mechanism.

In the embodiment of the present invention, it is preferable that the floating air ejection body is located above and below the upper surface of the supply air ejection body.

In other words, the air is ejected from the floating air ejecting body, and the height of the air layer flowing in the horizontal direction toward the upstream side in the substrate taking-out direction is lower than the air flowing from the supply air ejecting body toward the downstream side in the substrate taking-out direction and flowing in the horizontal direction. The height of the layer is low.

In other words, the air layer is formed at an appropriate height for the extraction target substrate that is floated by the supply air ejection body, and the floating air ejection body is formed. The mounting support is supported on the support plate, and the unreceived extraction target substrate floats at an appropriate height to form an air layer, so that the substrate taken out by the take-up mechanism can be taken out more stably, and the support can be properly supported and supported on the support plate. The object to be taken out is floated.

Therefore, it is possible to provide a substrate transfer apparatus which can take out the substrate by the take-out mechanism more stably, and can appropriately float the take-out target substrate supported by the support plate.

In the embodiment of the present invention, it is preferable to provide an air supply device that adjusts the supply amount of air supplied to the floating air ejection body, and an air supply control device that controls the air supply control mechanism The operation of the air supply device is controlled such that the discharge amount of the air ejected from the floating air ejecting body is gradually increased toward the target supply amount.

In other words, when the ejection of the air from the floating air ejection body is started, the amount of the air ejected from the floating air ejecting body is gradually increased toward the target supply amount, so that the substrate is supported and supported on the lower surface of the substrate to be removed. The amount of air flowing between the upper surfaces of the support plates is also increased stepwise, so that the substrate can be gradually floated, and the swing of the substrate during floating can be suppressed.

Therefore, it is possible to provide a substrate transfer apparatus capable of suppressing the swing of the substrate when floating.

In an embodiment of the present invention, it is preferable to provide a support transport mechanism that receives the substrate taken out by the take-up mechanism and supplies air to the underside of the received substrate to make the substrate non-contact The carrier is in the state of state support.

In other words, the support mechanism can receive the substrate taken out by the take-out mechanism, and the support transport mechanism supplies air to the lower surface of the substrate, and the substrate can be transported in a state of being non-contacted, and can be transported in a state in which it is not easily damaged. The removed substrate.

Therefore, it is possible to provide a substrate transfer apparatus that can transport the substrate taken out by the take-out mechanism in a state in which it is not easily damaged.

In the embodiment of the present invention, the take-up mechanism is preferably configured such that the storage target substrate stored in the storage container is ejected by the floating air ejecting body while being passed over the floating air ejecting body. The storage container is housed in a state in which the support plate is floated.

In other words, the detachable mechanism accommodates the storage target substrate stored in the storage container in the state above the floating air ejection body, and ejects the air from the floating air ejection body to be stored in the storage container in a state where it is floated from the support plate. In addition, it is possible to take out the substrate to be taken out of the storage container and store the substrate to be stored in the storage container, which is convenient for use.

Therefore, it is possible to provide a substrate transfer apparatus which is easy to use.

In the embodiment of the present invention, the storage container preferably has a cylindrical shape, and the substrate take-out opening is formed at one end portion thereof in a horizontal direction, and the container body that houses the plurality of substrates therein is attached to and detached from the container body. The cover member is configured to close the opening, and is provided with a cover detaching mechanism for detaching the cover member from the storage container.

That is, since the storage container has a detachable and detachable container body, In the state of the container body, the cover member is closed by the cover member, and the cover release mechanism for detaching the cover member from the storage container is provided. Therefore, when the substrate is not taken out by the take-out mechanism, the cover member is attached to the cover member. The container body has a closed opening to prevent dust from entering the container body from the opening, thereby suppressing contamination of the stored substrate by dust, and when the substrate is taken out by the take-out mechanism, the cover member is removed from the storage container by the cover removing mechanism. When it is detached, the substrate can be directly taken out from the container body of the storage container by the take-out mechanism through the opening of the storage container from which the cover member has been detached.

That is, since the lid member can be detached from the container body by the lid detaching mechanism, when the substrate is taken out from the container by the take-out mechanism, the lid member is not present between the container body and the take-up mechanism, so that the container body can be separated from the take-up mechanism and The floating air ejection body is close to the substrate transfer direction, and the floating air ejection body can easily float the substrate from the support plate with a small amount of air, and the take-up mechanism can take out the stroke of the substrate and is easy to take out. The removal of the substrate made by the organization. Further, when the substrate is taken out by the take-out mechanism, the substrate is not required to be formed in the cover member, and the substrate is taken out through the gap. Therefore, the substrate taken out by the take-up mechanism can be easily taken out from this point.

Therefore, it is possible to provide a substrate transfer apparatus which can suppress the contamination of the substrate stored in the storage container by dust and facilitate the removal of the substrate by the take-out mechanism.

In the embodiment of the present invention, the floating air ejecting body, the take-out mechanism, and the auxiliary air ejecting body are preferably provided in a positionally fixed state, and the substrate transporting apparatus is provided with a lifting mechanism for supporting the storage container to be lifted and lowered. In order to mount the aforementioned support supporting the substrate to be taken out The slab is located in a lifting and lowering control mechanism that controls the movement of the lifting mechanism corresponding to the lifting air ejection body and the take-up mechanism, and the cover detaching mechanism is configured to support the detached cover member at a ratio Further, the substrate to be taken out is further above, and at a position where the substrate taking-out direction is close to the opening of the storage container, the cover member closes a portion of the opening of the storage container that is higher than the object to be taken out, and the cover is fixed The position fixing state is provided below the extraction target substrate, and the portion in which the opening of the storage container is closed below the substrate extraction target substrate is closed at a position where the substrate take-out direction is close to the opening of the storage container.

In other words, the storage container is moved up and down by the elevating mechanism, and the support plate for mounting the substrate for supporting the object to be taken out in the plurality of support plates is positioned at a height corresponding to the extraction air ejection body and the removal mechanism, whereby the loading can be taken out. Since the substrate is supported by the support plate, the substrate can be arbitrarily taken out from the plurality of support plates.

Further, since the storage container is moved up and down by the lifting mechanism, the floating air ejection body and the take-out mechanism are not required to be moved up and down compared with the storage container, so that the support plate and the floating air ejection body and the removal mechanism can be easily moved at the height. The alignment of the direction.

Then, since the opening of the container is closed by the cover member, the portion above the target substrate is taken out, and the opening of the container is closed by the fixing cover than the portion below the substrate to be taken out. When the substrate is taken out, the upper portion and the lower portion of the substrate to be taken out of the opening are closed by the lid member and the fixing cover, and when the substrate is taken out from the container by the take-out mechanism, dust can be prevented from intruding into the container body from the opening. Further, it is possible to suppress the substrate in the storage container from being contaminated by dust.

Moreover, since the cover member that is detached from the container body by the cover release mechanism is used to block the opening of the storage container, the portion above the target substrate is taken out, and the cover is not separately prepared to block the upper side of the opening. In part, it is possible to block the portion above and below the opening of the container by a simple structure.

Therefore, it is possible to provide the substrate which can be arbitrarily taken out from the plurality of support plates, and the support plate and the floating air ejection body and the take-out mechanism can be easily aligned in the height direction, and the opening of the storage container can be easily blocked. The substrate transfer device in the upper part and the lower part.

In the substrate transfer apparatus, the conventional substrate take-out mechanism includes a holding transport mechanism that holds the holding portion at the downstream end portion of the substrate take-out direction of the take-out target substrate along the substrate. When the movement path of the direction is moved, the extraction target substrate is transported from the storage position in which the entire extraction target substrate is located in the storage container to the removal position of the entire extraction target substrate outside the storage container.

However, in the above-described conventional substrate transfer apparatus, the transfer unit holds the substrate from the storage position in the storage container to the take-out position in the state in which the substrate is taken out from the storage container while the holding portion holds the downstream end portion of the substrate in the insertion direction. Since the entire target substrate is located at the take-out position outside the storage container, the holding portion moves only the transport distance of the substrate from the storage position to the take-out position along the movement path. Therefore, the moving distance of the holding portion in the board taking-out direction is increased, and the holding type conveying mechanism, in particular, the member guiding the holding portion of the holding type conveying mechanism is large in the substrate taking-out direction.

In addition, when the substrate to be taken out is transported from the storage position to the take-out position, it is in a state in which only the downstream end portion of the substrate in the substrate take-out direction is supported. Therefore, it is difficult to stably transport the take-out target substrate by the substrate take-out mechanism.

In order to solve such a problem, in the embodiment of the present invention, the take-out mechanism is preferably provided with a pinch transport mechanism that mounts the substrate for holding the substrate to be taken out, and a mounting support transport mechanism. The nip portion of the downstream end portion of the direction is moved along the movement path in the direction in which the substrate is taken out, and the substrate to be taken out is transported from the storage position in which the entire extraction target substrate is located in the storage container to one of the removal target substrates. The placement support transport mechanism mounts the take-up substrate that has been transported to the relay position, and transports the take-out target substrate from the relay position to the take-out target. When the entire substrate is located at a take-out position outside the storage container, the nip transfer mechanism includes an detaching operation mechanism that releases the pair of the substrate to be taken out to the relay position. The nip portion that is nipped by the extraction target substrate is moved to be transported from the mounting support The configuration of the transport of the substrate to remove the transport position moved away by retreating the feed path.

In other words, the nip portion that moves the downstream end portion in the substrate take-out direction of the substrate to be taken out is moved along the movement path in the substrate take-out direction, and the splicing and transporting mechanism can be positioned from the entire substrate to be taken out. The storage position in the storage container is transported to a relay position outside the storage container by a portion of the substrate to be taken out. Further, the support transport mechanism can be placed on the take-out target substrate that has been transported to the relay position, and the object to be taken out can be taken out. The substrate is transported from the relay position to the entire take-out position outside the storage container.

Therefore, the gripping conveyance mechanism transports the storage unit from the storage position in the storage container to the relay position outside the storage container from the storage position in the storage container, so the moving distance of the holding portion in the substrate take-up direction It is short, and the member which clamps a conveyance mechanism, especially the holding part which guides this conveyance mechanism can be small in the board|substrate extraction direction.

In addition, when the mounting support transport mechanism transports the take-out target substrate from the relay position to the take-out position, the substrate is placed on the support support mechanism, so that the mounting support mechanism is in the lateral width direction of the substrate. The end portion is equal to the support function of the lower surface of the substrate, and the substrate to be taken out can be stably transported to the take-out position by the substrate take-out mechanism.

Then, since the detaching target substrate is transported to the relay position and the nip portion that has been detached from the take-out target substrate is detached from the transport path of the take-out target substrate transported by the mounting support transport mechanism, the detachment is performed. When the support transporting mechanism transports the take-out target substrate from the relay position to the take-out position, it is possible to prevent the take-out target substrate from coming into contact with the nip portion of the nip transport mechanism.

Incidentally, since the nip conveying mechanism holds the object to be taken out and transported, the carrier can be made thinner in the vertical direction than the carrier, so that it can be narrowed in the vertical direction. In the storage container having high storage efficiency of the state storage substrate, the substrate is taken out.

Therefore, it is possible to provide a small size of the nip transport mechanism that can take the substrate take-out mechanism in the substrate take-out direction, and to easily transport the take-out target substrate by the substrate take-up mechanism.

In an embodiment of the present invention, the clamping portion is preferably applied to the longitudinal axis The swaying state is supported by a movable body that is movable along the movement path, and the detachment operation mechanism is configured by a oscillating guide member that abuts the movement of the moving body along the movement path to abut The nip portion is configured such that the nip portion is rocked around the longitudinal axis and guided to the side in the lateral width direction that intersects with the substrate take-out direction, thereby being retracted to the retracted position.

That is, since the rocking guiding member abuts against the nip portion as the moving body moves along the moving path, the nip portion is rocked around the longitudinal axis, and the 俾 is guided to the lateral width direction intersecting the substrate taking-out direction. Since the outer side is retracted to the retracted position, the moving portion can be linearly moved along the movement path, so that the grip portion can be guided to the retracted position. Thereby, in order to move the gripping portion to the retracted position, it is configured such that the moving body moves in a direction intersecting the moving path or a driving mechanism that moves the moving body to the retracted position is provided. The structure of the transport mechanism is simplified.

Therefore, it is possible to provide a substrate transfer apparatus that can simplify the structure of the transport mechanism.

In the embodiment of the present invention, the placement support transport mechanism is preferably provided in parallel with the substrate take-out direction, and contacts a plurality of support transport rollers on the lower surface of the substrate to be taken out, and contacts the take-up substrate located at the relay position. In the above, the carrier transfer roller that sandwiches the substrate to be taken out is held in cooperation with the support roller.

In other words, the carrier is transported in a state in which the plurality of supporting transport rollers and the nip transporting roller are nipped, so that the support transporting mechanism can be appropriately transported from the relay position to the take-out position.

In other words, in a state where the take-out target substrate is in the relay position, only one of the parts to be taken out of the target substrate is located outside the storage container, so that the take-out target substrate is transported from the relay position to the take-out only by a plurality of support transfer rollers. In the position, the downstream side portion of the substrate to be taken out in the substrate take-out direction is supported by only a small number of supporting transport rollers. Therefore, the contact pressure of the take-up target substrate to the support transport roller is small, and the support transport roller is idling, which is not easy to carry. The support transporting mechanism is configured to properly transport the take-out substrate, and the transfer target roller is transported together with the support transport roller, and the target substrate is transported. Since the contact pressure of the conveyance roller is increased and the support conveyance roller is not easily idling, the substrate to be taken out can be easily conveyed by the placement support conveyance mechanism.

Therefore, it is possible to provide a substrate transport apparatus that can easily transport the take-out target substrate by placing the support transport mechanism.

In the embodiment of the present invention, it is preferable that the nip conveying mechanism is provided with a pair of the nip portions in the lateral width direction, and nip the both ends of the extraction target substrate in the lateral width direction intersecting with the substrate taking-out direction. The placement support transport mechanism is configured to mount both end portions in the lateral width direction of the substrate to be taken out.

In other words, the extraction target substrate is transported from the storage position to the relay in a state where the both ends of the horizontal direction is sandwiched by the nip portion in the downstream end portion in the take-out direction of the removal target substrate. In the state where the both ends of the substrate to be taken out are supported, the placement support transport mechanism is transported from the relay position to the take-out position.

Therefore, the substrate to be taken out is transported from the storage position to the take-out position. In this case, since the pinch conveyance mechanism and the placement conveyance mechanism act on both end portions in the lateral width direction of the take-up substrate, they do not act on the center portion in the lateral width direction, so that damage of the center portion in the lateral width direction of the substrate can be prevented.

Therefore, it is possible to provide a substrate transfer apparatus capable of preventing damage of the central portion in the lateral width direction of the substrate to be taken out.

In the embodiment of the present invention, it is preferable to provide a lifting mechanism that supports the storage container to be lifted and lowered, and a lifting and lowering control mechanism for supporting the substrate to be taken out. The support plate is located at an actuator for controlling the lifting mechanism corresponding to the height of the floating air ejection body and the take-out mechanism.

In other words, the support plate for supporting the substrate to be taken out in the plurality of support plates is placed at a height corresponding to the take-up air ejection body and the take-out mechanism by the elevating mechanism, and the mounting support can be taken out. Since the substrate of the support plate is used, the substrate can be arbitrarily taken out from the plurality of support plates.

Further, since the storage container is moved up and down by the lifting mechanism, the floating air ejection body and the take-out mechanism are not required to be moved up and down compared with the storage container, so that the support plate and the floating air ejection body and the removal mechanism can be easily moved at the height. The alignment of the direction.

Therefore, it is possible to provide a substrate transfer apparatus in which the substrate can be arbitrarily taken out from the plurality of support plates, and the support plate and the floating air ejection body and the take-up mechanism are aligned in the height direction.

In the embodiment of the present invention, the placement support transport mechanism is preferably configured to be capable of transporting the storage target substrate accommodated in the storage container from the take-out position to the relay position, and the nip transport mechanism is configured to front The nip portion moves from the upstream side to the downstream side in the substrate loading direction along the movement path, and the storage target substrate that has been transported to the relay position by the placement support transport mechanism is at the front end of the nip portion The partial transfer is carried out from the relay position to the storage position.

In other words, the support substrate can be transported from the take-out position to the relay position by the support transport mechanism, and the transport substrate can be transported from the relay position to the storage position by the transport substrate. In addition to the removal of the substrate to be taken out from the storage container, the storage target substrate can be stored in the storage container, which is convenient for use.

In addition, when the storage target substrate is transported from the relay position to the storage position by the nip conveying mechanism, the storage target substrate is conveyed while the front end portion of the nip portion is pressed, so that it is not required to be clamped at the time of clamping. The action of holding or clamping can be quickly transferred.

Therefore, it is possible to provide a substrate transfer apparatus that is easy to use and that can quickly store the storage target substrate in the storage container.

In the substrate transfer apparatus, the conventional support plate is configured such that the upper surface thereof is formed flat, and the storage target substrate is directly placed on the flat upper surface of the support plate, and the storage target substrate is housed in the storage mechanism, and the storage target substrate is placed on the support plate. The floating air ejection body is switched to the discharge stop state, and the discharge of the air is stopped, and the storage target substrate is supported by the support plate (see Patent Document 1).

However, in the above-described conventional substrate transfer apparatus, since the upper surface of the support plate is formed flat, even if the floating air ejection body is switched to the discharge stop state, The air stays between the storage target substrate and the support plate on which the support is placed, and it takes time to support the substrate on which the substrate for supporting the storage object can be supported. Therefore, the conventional substrate transfer apparatus cannot quickly store the storage target substrate in the storage container.

In order to solve such a problem, in the embodiment of the present invention, the floating air ejection body is preferably switchable between a discharge state of the discharge air and a discharge stop state in which the discharge of the air is stopped, and is provided to eject the floating air. a storage mechanism that is stored in the storage container in a state in which the storage target substrate is placed on a support plate that supports the substrate, and the support plate has a mounting surface that supports the substrate It is also recessed to the lower side, and is recessed to extend inside and outside the support predetermined region of the support substrate.

In other words, since the support plate has a recessed portion that is recessed below the mounting surface on which the support substrate is placed and that extends inside and outside the support predetermined region on which the support substrate is placed, the storage target substrate and the support can be supported. The air between the support plates is actively discharged to the outside through the recessed portion. Therefore, when the floating air ejection body is switched to the discharge stop state, the air between the storage target substrate and the support plate on which the support plate is placed can be quickly discharged to the outside, and the storage surface can be mounted on the mounting surface. .

Therefore, it is possible to provide a substrate transfer apparatus that can quickly store the storage target substrate in the storage container.

In the embodiment of the present invention, the recessed portion preferably has a shape extending from a central portion of the support predetermined region to an outer portion of the support predetermined region.

In other words, since the concave portion is formed in a shape extending from the central portion of the support predetermined region to the outside of the support predetermined region, the air below the central portion of the storage target substrate can be discharged to the outside via the concave portion. With this configuration, the air below the central portion of the storage target substrate, which is likely to be trapped in the air, can be actively discharged to the outside. Therefore, the air between the storage target substrate and the support plate on which the support plate is placed can be efficiently discharged to the outside. Therefore, the storage container can be quickly stored in the storage container.

Therefore, it is possible to provide a substrate transfer apparatus that can store the storage target substrate at a speed that can accommodate the container.

In the embodiment of the present invention, it is preferable that the recessed portion has a shape that linearly extends from the upstream end portion to the downstream end portion of the substrate accommodation direction of the support predetermined region.

In other words, since the concave portion has a shape that linearly extends from the upstream end portion to the downstream end portion in the substrate accommodation direction of the support predetermined region, the upstream end portion of the substrate storage direction can be aligned with the downstream end portion. The air between the storage target substrate and the support plate on which the support plate is placed is discharged to the outside. Thereby, the air between the storage target substrate and the support plate on which the support plate is placed can be discharged to the outside with good efficiency and speed. Further, when air is ejected to the lower surface of the substrate to be mounted and the upper surface of the support plate on which the substrate is supported, the recessed portion can be used to flow from the upstream end portion of the substrate storage direction to the downstream end portion, and the flow can be accommodated in the horizontal direction. The entire space between the lower surface of the target substrate and the upper surface of the support plate on which the substrate is supported is accurately supplied with air, and the substrate storage by the storage mechanism is easily performed.

Therefore, it is possible to provide a storage container that can be stored more quickly and accommodated. The substrate transporting device is a substrate that is easily accommodated by the storage mechanism.

In the embodiment of the present invention, it is preferable that the floating air ejection body is arranged side by side in a lateral width direction intersecting with the substrate housing direction, and the support plate has the concave portion and is located in the lateral direction. The floating air is disposed between the bodies in parallel in the width direction.

In other words, since the support plate has a concave portion and is disposed between the floating air ejection bodies arranged in the lateral width direction, the floating air ejection body is ejected to the lower surface of the storage target substrate and the support plate for supporting the substrate is placed. The flow of air between the upper surfaces is not easily blocked by the portion where the support portion of the support plate is formed, and the air is properly flowed from the upstream end portion to the downstream side portion in the substrate accommodation direction. Therefore, the storage of the substrate by the storage mechanism can be performed more easily and stably.

Therefore, it is possible to provide an article transporting apparatus that can more easily and stably perform storage of the substrate by the storage mechanism.

In the embodiment of the present invention, the support plate preferably has a flat support substrate and a plurality of protrusions having the mounting surface and projecting from the upper surface of the support substrate to the upper portion, and the protrusion portion is formed by the protrusion portion. The support substrate is formed in parallel in the substrate housing direction and the lateral width direction intersecting the direction, thereby forming the recessed portion.

In other words, since the support plate has a support substrate having a flat upper surface and a plurality of protrusions having the above-described placement surface and projecting from the upper surface of the support substrate, the support substrate is stored in the substrate storage direction and the horizontal direction. Since the projections are arranged side by side in the width direction to form the recesses, the recesses can be formed such that the recessed portions along the substrate housing direction and the recessed portions along the lateral width direction intersect each other. Therefore, in order to have a simple structure in which only a plurality of protrusions are provided for the support substrate, a concave portion that can discharge air to the outside can be formed in both the substrate storage direction and the lateral width direction, and the underside of the storage target substrate can be quickly and The air placed between the upper surfaces of the support plates supporting the substrate is discharged to the outside.

Therefore, it is possible to provide a concave portion that can easily form the support plate, and to accommodate the substrate transfer device that quickly stores the storage target substrate.

In the embodiment of the present invention, it is preferable to provide a lifting mechanism that supports the storage container to be lifted and lowered, and a lifting and lowering control mechanism that supports the storage of the storage target substrate. The support plate is located at an operator corresponding to the storage height of the floating air ejection body and the storage mechanism, and controls the actuator of the lifting mechanism.

In other words, the storage container is moved up and down, and any one of the plurality of support plates is placed in a storage height corresponding to the floating air ejection body and the storage mechanism, and the support plate can be placed and supported. Since the substrate is provided, the substrate to be stored can be arbitrarily placed on a plurality of support plates.

Further, since the storage container is moved up and down by the elevating mechanism, the floating air ejection body and the storage mechanism are not required to be moved up and down compared with the storage container, so that the support plate and the floating air ejection body and the removal mechanism can be easily heightened. The alignment of the direction.

Therefore, it is possible to provide support for arbitrarily supporting a plurality of support plates. The substrate transfer device that accommodates the target substrate and that can align the support plate and the floating air ejection body and the take-up mechanism in the height direction can be easily performed.

Simple illustration

Figure 1 is a front view of a substrate processing apparatus.

Figure 2 is a side view of a substrate processing apparatus.

Figure 3 is a plan view of a substrate processing apparatus.

Fig. 4 is a side view of the substrate transfer device.

Fig. 5 is a perspective view of the storage container.

Figure 6 is a perspective view of the storage container.

Figures 7(a) to 7(b) show the support plate.

Figure 8 is a plan view of the substrate relay unit.

Fig. 9 is a side view showing the grip portion of the gripping position.

Figure 10 is a plan view showing the grip portion of the gripping position.

Fig. 11 is a side view showing the nip portion of the grip release position.

Fig. 12 is a plan view showing the nip portion of the grip release position.

Fig. 13 is a side view showing the nip portion at the end position of pressing.

Figure 14 is a side view showing the grip portion of the retracted position.

Figure 15 is a plan view showing the nip portion of the retracted position.

16(a) to 16(b) are side views showing the floating air ejection body and the supply air ejection body.

Fig. 17 is a perspective view showing the floating air ejection body and the supply air ejection body.

Figure 18 is a schematic diagram showing the detection sensor.

Figure 19 is a control block diagram.

Fig. 20 is a side view showing the substrate transfer apparatus of the first embodiment.

Fig. 21 is a perspective view showing the storage container of the first other embodiment.

Fig. 22 is a perspective view showing the cover member side of the storage container of the first embodiment.

23(a) to 23(b) are side views showing a state in which the cover member of the first other embodiment is supported.

Figs. 24(a) to 24(c) are side views showing the lifting position of the storage container according to the first embodiment.

25(d) to 25(e) are side views showing the lifting position of the storage container according to the first embodiment.

Figs. 26(a) to 26(b) are perspective views showing a state in which the cover member of the first other embodiment is detached.

Figs. 27(a) to 27(b) are perspective views showing the state in which the cover member of the second embodiment is detached.

Figs. 28(a) to 28(b) are side views showing a state in which the cover member of the third embodiment is supported.

Figs. 29(a) to 29(b) are perspective views showing the state in which the cover member of the third embodiment is detached.

30(a) to 30(b) are side views showing the lifting position of the storage container according to the third embodiment.

31(a) to 31(c) are side views showing the lifting position of the storage container of the other embodiment (11).

Figures 32(a) to 32(b) show the support of other embodiments (17) Side view of the struts.

Figures 33(a) to 33(b) are side views showing a plurality of rotating bodies of the other embodiment (18).

Figs. 34(a) to 34(b) are views showing a plate-like body of another embodiment (18).

Fig. 35 is a side view showing the nip portion of the grip release position of the other embodiment (28).

The best form for implementing the invention

Hereinafter, embodiments of the present invention will be described with reference to the drawings.

Combinations of features of one embodiment and features of another embodiment are also included within the scope of the invention.

As shown in Fig. 1, the substrate processing apparatus includes an article storage rack 5 for accommodating a plurality of storage units 4 for holding the plurality of storage containers 2 in a state in which the rectangular substrates 1 are arranged at intervals in the vertical direction. The stacker 7 as the storage container transporting device that transports the storage container 2 between the portion 4 and the substrate inlet and outlet portion 6 and the substrate 1 are taken out one by one from the storage container 2 located in the substrate inlet and outlet portion 6 and transported to the processing substrate 1 one by one. The substrate processing apparatus (not shown) is configured such that the substrate 1 transported from the substrate processing apparatus is accommodated one by one in the substrate transfer apparatus 8 of the storage container 2. Here, the substrate transfer device 8 corresponds to the substrate transfer device of the present invention.

In the substrate processing apparatus, the storage container 2 is stored in the article storage rack 5, and the stored storage container 2 is transported to the substrate entrance/exit portion 6, and the substrate 1 is transported from the storage container 2 that has been transported to the substrate entrance/exit portion 6. Take 1 piece as a unit The substrate 1 is transported to the substrate processing apparatus, and predetermined processing is performed, and the substrate 1 that has been subjected to the predetermined processing is stored in one unit for the storage container 2 located in the substrate inlet and outlet unit 6.

As shown in FIG. 1 and FIG. 2, the article processing apparatus is provided with a downflow-type purified air circulation mechanism 23 that is disposed in the dust-free space 13 to allow purified air to flow from the top to the floor portion, and the dust-free space in the downflow is provided. The storage rack 5, the stacker crane 7, and the substrate transfer device 8 are equipped in the inside of 13.

The purge air circulation mechanism 23 will be described. As shown in Fig. 2, the clean air circulation mechanism 23 is constructed such that the floor portion of the dust-free space 13 is formed by the porous lattice floor 14, and the top of the dust-free space 13 is made of a HEPA filter or the like. The air filter 15 is formed, and is formed in the suction chamber 16 on the lower side of the lattice floor 14 and the chamber 17 formed on the upper side of the air passage filter 15 to have a circulation path 19 of the ventilation fan 18 and the prefilter 21. The air is connected so that the air in the clean space 13 is cleaned and circulated by the prefilter 21 and the air filter 15, and the purified air is circulated from the top to the floor. Then, in the circulation path 19, the external air intake flow path 20 is connected to the upstream of the ventilation fan 18, and the exhaust flow path 22 is connected downstream of the ventilation fan 18, and the exhaust air circulation mechanism 23 is circulated. One part of the air in the dust space 13 is replaced with the outside air.

In the substrate transfer area 24 in which the substrate transport apparatus 8 transports the substrate 1 between the storage container 2 of the substrate entrance and exit portion 6 and the substrate processing apparatus, the end portion on the article storage rack 5 side is opened. And the end portion of the substrate processing side is in communication with the substrate processing apparatus, covering the partition wall 25 of the substrate transport space, and a plurality of fan filter units for the area are provided at the top of the partition wall 25 at the partition wall 25 26. Further, the purified air which further purifies the clean air of the dust-free space 13 by the fan filter unit 26 is circulated from the top side to the floor side by the fan filter unit 26, and the substrate transport space covered by the partition wall 25 is used as the downflow. Space.

As shown in Fig. 1 and Fig. 2, the article storage racks 5 are arranged in the lateral width direction of the pillars 28 arranged in the front-rear direction of the rack, and are arranged upright in the lateral direction of the rack, and the plurality of article supporting portions 29 are horizontally arranged. In a state in which the storage unit 2 is placed in a state in which the storage unit 2 is placed in a state in which the storage unit 2 is placed in a state in which the storage unit 2 is placed in a state in which the storage unit 2 is placed in the vertical direction and the horizontal direction. Incidentally, the article storage rack 5 is provided in a pair on the lattice floor 14 in a state of being opposed to each other.

One of the plurality of housing portions 4 provided in the article storage rack 5 serves as the substrate access portion 6. As shown in FIG. 3, a part of the accommodating portion 4 provided in the plurality of accommodating portions 4 provided at the lowermost layer of the article storage rack 5 is configured to be storable to the storage container 2 accommodated in the accommodating portion 4, and the article On the back side of the storage rack 5, the substrate 1 is taken out one by one or stored one by one by the substrate transfer device 8, and serves as the substrate entrance and exit portion 6.

As shown in FIGS. 1 and 2, the stacker crane 7 is configured to have a moving frame 31 that moves in a long direction toward the moving space of the storage rack 5, which is formed in an opposite state, and moves up and down. The support table is supported by the lifting frame 33 which is disposed upright on the moving frame 31 and arranged in the direction in which the frame travels, and is supported by the lifting platform 33, and the storage container is transportable between the storage portion 4 and itself. The forked article transfer device 34 of 2 moves the horizontal movement of the moving frame 31, the lifting movement of the lifting platform 33, and the article transferring device 34 The storage container 2 is transported between the accommodating portion 4 serving as the substrate entrance portion 6 and the other accommodating portion 4.

As shown in Fig. 3, the article transfer device 34 is supported by a revolving table 35 that is freely rotatable around the vertical axis and a mounting portion 36 that is provided on the winding table 35 so as to be movable forward and backward. And the article transfer device 34 is configured to be switchable to a state in which the article transfer device 34 is retracted to the lift table 33 by the expansion and contraction of the link mechanism 37, and the article transfer device 34 is protruded to the storage portion 4 side, and The rewinding direction of the article transfer device 34 can be changed by 180 degrees by the winding of the winding table 35.

As shown in FIG. 3 and the like, the substrate transfer device 8 of the substrate transfer apparatus of the present invention is configured to transfer the substrate 1 one by one between the storage container 2 located in the substrate entrance and exit portion 6 and the substrate transfer conveyor 51. The substrate transfer device 8 includes a plurality of support plates 45 on which the support substrate 1 is placed, a storage container 2 that is arranged in parallel with each other in the vertical direction, a substrate transfer conveyor 51 on which the transfer substrate 1 is placed, and a substrate from the storage container 2 1 is taken out one by one, and delivered to the substrate transfer conveyor 51, and the substrate 1 received from the substrate conveyance conveyor 51 is accommodated one by one in the substrate relay unit 70 of the storage container 3, and the storage container 2 located in the substrate entrance/exit portion 6 is supported. The lifting and lowering mechanism 61 is a lifting and lowering mechanism 61, and the control device H for controlling the operation of the substrate conveying device 8 (see Fig. 19).

Next, the substrate transfer device 8 will be described in detail so that the downstream side (the upstream side in the substrate storage direction) of the substrate take-out direction is the front side, and the upstream side (the downstream side in the substrate storage direction) of the substrate take-out direction is the rear side. The direction along the substrate take-out direction (substrate storage direction) is referred to as the front-rear direction, and the direction intersecting the direction is the lateral width direction.

[storage container]

As shown in Fig. 5 and Fig. 6, the storage container 2 has a rectangular tubular container body 41 which is formed in a laterally open rearward opening posture, and a cover member which is provided at the front end portion of the container body 41 in a state of blocking the front opening. 42. The fan filter unit 43 provided at the rear end portion of the container body 41 in a state in which the rear opening is closed is formed in the storage container 2 in a plurality of support plates 45 which are arranged side by side in the vertical direction.

The container body 41 is formed into a rectangular parallelepiped shape by a frame material structure, and the left and right surfaces and the upper and lower surfaces are blocked by a plate to form a rectangular tubular shape in which the front and rear sides are horizontally opened in a horizontally inclined posture. Further, the opening of the front surface of the container body 41 is taken as a substrate take-out port 44, and the container body 41 can be configured to take out the inlet port 44 through the substrate, and the substrate 1 can be taken out and placed.

As shown in Fig. 5, the cover member 42 is formed by a frame structure for cap formation, and an opening is formed in the same shape as the substrate take-out port 44, which is blocked by a transparent plate.

Further, the lid member 42 is provided with an engaged frame 46 that is engaged with the container body 41 from above. That is, the cover member 42 is configured such that the cover member 42 is moved to the lower side with respect to the container body 41, and the engaged frame 46 is engaged with the container body 41, and the cover member 42 can be attached to the container body 41, whereby The cover member 42 is moved upward relative to the container body 41, and the cover member 42 can be detached from the container body 41.

Further, the cover member 42 is formed in a shape in which a gap is formed between the container body 41 and the container body 41, and the air introduced into the storage container 2 by the fan filter unit 43 is formed in the container body 41 and the cover. The gap between the members 42 is discharged to the outside.

As shown in Fig. 6, the fan filter unit 43 is detachably attached to the rear end portion of the container body 41, and the vent is circulated from the opening at the rear of the container body 41 toward the substrate take-out port 44.

In addition, the fan filter 43 has a power receiving unit and a battery that stores electric power supplied to the power receiving unit, and the fan filter unit 43 is configured to be stored in the storage unit 4 from the storage unit 4 in a state where the storage container 2 is housed in the storage unit 4 . The electric power supplied from the power supply unit to the power receiving unit is operated, and the power receiving unit such as when the storage container 2 is transported by the stacker 7 is separated from the power supply unit without supplying electric power to the power receiving unit, and the electric power stored in the battery is stored. Actuate.

As shown in Fig. 7, each of the plurality of support plates 45 has a support substrate 47 for forming a plurality of protrusions 48 projecting upward by press working, and restricting the movement of the substrate 1 for supporting the support in the lateral width direction and the rear direction. Member 49. Further, a flat surface is formed on the upper surface of the protruding portion 48 as a mounting surface 48a on which the support substrate 1 is placed.

Further, as shown in Fig. 9, etc., the upper surface of the front end portion 45a of the plurality of support plates 45 is formed with an inclined plane which is located further downward than the front side, and the front portion 45a and the portion other than the projection portion 48 form a horizontal surface. In the plane, the support predetermined area E on which the support substrate 1 is placed is set to traverse the other portion from the front end portion 45a. The projections 48 are the support substrates 47, and it is preferable that at least two of the support plates 45 are provided in the lateral width direction, and it is preferable to provide at least five in the front-rear direction.

Incidentally, the projection 48 is a circular shape having a diameter of 10 mm and is formed to have a thickness 0.2 mm thinner than the thickness of the glass substrate 1.

In the plurality of support plates 45, the projections 48 are arranged side by side in the front-rear direction and the lateral width direction on the support substrate 47, respectively, to form the concave portions 50.

It is to be noted that the portion of the support plate 45 where the projection 48 is not formed is recessed below the mounting surface 48a. As described above, the projection portion 48 is provided in parallel by the support substrate 47, and the concave portion 50 recessed to the lower side than the placement surface 48a is formed in a lattice shape, and the concave portion 50 thus formed is formed to extend from the central portion of the support predetermined region E to The shape of the outer portion of the predetermined region E is supported, and the shape is linearly extended from the end portion of the end portion before the predetermined portion E is supported. By supplying air to the upper surface of the support plate 45 and the lower surface of the substrate 1, the substrate 1 floats from the support plate 45, and when the supply of air between the upper surface of the support plate 45 and the lower surface of the substrate 1 is stopped, as shown by the dotted line in FIG. As indicated by the arrow, the air existing between the support plate 45 and the substrate 1 flows along the concave portion 50 to the outside of the support predetermined region E. As a result, the air existing between the support plate 45 and the substrate 1 can be quickly discharged, and the support portion 1 can be stably placed on the protruding portion 48.

The restricting members 49 are arranged side by side at intervals in the front-rear direction at the left and right end portions of the support substrate 47, and are disposed on the left and right sides of the support predetermined region E, and are disposed at the end portions of the supporting substrate 47 in the lateral width direction. The intervals are arranged side by side, and the crucible is located on the side after the predetermined area E is supported.

[lifting mechanism]

As shown in FIG. 3 and FIG. 4, the elevating mechanism 61 is provided in the substrate entrance/exit portion 6, and is moved up and down by a lifting motor 62 (see FIG. 19), and a pair of right and left support tables 63 supporting the storage container 2 are placed. The pair of left and right support bases 63 are individually guided and supported to form a pair of left and right guide pillars 64 that are freely movable.

Further, as shown in FIG. 4, the engagement member 65 of the engaged frame 46 of the cover member 42 of the storage container 2 is attached to the top of the partition wall 25 in the substrate entrance and exit portion 6, and is provided in the state of being supported by the top of the partition wall 25. Moved into the substrate access portion 6 and stacked The crane 7 mounts the storage container 2 on the elevating mechanism 61, and is engaged with the engaging member 65 by the engagement frame 46, and is detached from the container main body 41, and the cover member 42 is removed from the container main body 41. The high-rise crane 7 carries out the storage container 2 from the substrate entrance/exit portion 6, and is engaged with the container body 41 by the engagement frame 46, and is detached from the engagement member 65, and the cover member 42 is attached to the container body 41.

Therefore, the elevating mechanism 61 is configured to elevate and lower the support base 63 of the container main body 41 on which the support storage container 2 is placed, and the cover member 42 is supported by the engagement member 65, and the cover member 42 of the storage container 2 is replaced. Part of the lifting movement moves, and the amount of opening of the substrate 44 is removed.

In the loading container 2 of the substrate entrance and exit portion 6, the storage container 2 is horizontally moved to the upper position in the substrate take-up direction on the downstream side in the substrate taking-out direction, and then the storage container 2 is lowered vertically downward to the middle. At the position of the lid release position during the downward movement, the lid attachment/detachment mechanism 122 disengages (dismounts) the lid member 42 from the container body 41, and removes the storage container 2 from which the lid member 42 is detached (detached). The support is placed on the lifting mechanism 61. Thereafter, the storage container 2 from which the lid member 42 has been detached by the elevating mechanism 61 is moved downward from the intermediate position to the substrate transfer position P4.

In addition, the storage container 2 of the substrate entrance and exit portion 6 is removed, and the storage container 2 from which the lid member 42 has been detached by the elevating mechanism 61 is moved upward from the substrate transfer position P4 to the intermediate position. Thereafter, the storage container 2 on the elevating mechanism 61 is taken up by the stacker crane 7, and the storage container 2 is moved upward from the intermediate position to the upper position, and the lid is removed from the position during the upward movement to cover the loading and unloading mechanism 122. After the cover member 42 is attached to the container body 41, the storage container 2 to which the cover member 42 is attached is taken out toward the substrate. Move horizontally from the upper position to the upstream side.

As shown in FIG. 4, the substrate transfer position P4 is a position at which the substrate relay unit 70 can transfer (take out) the substrate 1 to the storage container 2. Further, the elevating mechanism 61 is configured such that the storage container 2 is horizontally placed so that the substrate 1 accommodated at the lowest position of the container main body 41 is located at the rising side substrate transfer position as the substrate transfer position P4 at a height that can be transferred by the substrate relay unit 70. The substrate 1 stored at the uppermost position of the container main body 41 is placed at a lower-side substrate transfer position as the substrate transfer position P4 at a height that can be transferred by the substrate relay unit 70, and is moved up and down, so that the support storage container 2 is placed. The support plate 45 of the transfer target substrate 1 is located at a transfer height corresponding to the substrate relay unit 70.

Further, the intermediate position is the position of the storage container 2 when the stacker 2 is received between the stacker crane 7 and the elevating mechanism 61, and the lid release position is stored by the lid attachment/detachment mechanism 122 when the lid member 42 is attached to and detached from the container body 41. The location of the container 2.

The engaged frame 46 of the cover member 42 will be described. As shown in Fig. 5, the engaged portion 66 of the cover member 42 has a state in which the upper end portion of the cover body 116 protrudes from the cover member 42 to the container body side. It is constituted by the engagement frame 46.

The engaged frame 46 is configured to be viewed in the lateral width direction to form a lower opening. The container body 41 and the cover member which are connected to the joint frame portion 46a and which are connected and supported by the joint frame portion 46a of the cover body 116 in the direction of the lateral width direction are provided in a pair. The engaging rod-shaped portion 46b of the lower end portion of the container body side in the direction in which the array is arranged is arranged to extend across the pair of connecting frame portions 46a, and the rod-shaped portion 46b is engaged with the engaging portion of the container body 41 from above (in the figure) Not shown).

Further, the engaged frame 46 is engaged and supported by the engaging portion of the container body 41 at the end portion on the one end side of the substrate taking-out port, and corresponds to the engaged portion 115.

Further, the engaged frame 46 has a support rod portion 46c that is supported by the engaging member 65 as the receiving support 123, and the supporting rod portion 46c is coupled and supported by the connecting frame portion 46a. The lower end portion of the container body side is erected across the pair of joint frame portions 46a. In other words, as shown in Fig. 4, the engaged frame 46 is configured such that the supported portion 119 that is used to support the engaging member 65 and the engaged portion 115 that is engaged with the engaging portion of the container body 41 are The engagement frame 46 is provided in a state of protruding from the upper end portion of the cover body 116 to the upper side.

As shown in Fig. 4, the support body 123 is provided in a state of being supported at the top, and is located between the upper surface of the cover body 116 and the support rod portion 46c of the engaged frame 46 in the state of being located at the above upper position. The support portion 119 which is supported on both sides in the lateral width direction of the cover member 42 is supported.

And the support member 123 is configured to support the detached cover member 42 above the transfer target substrate 1 and to approach the substrate take-out port 44 of the storage container 2 located at the substrate transfer position P4 in the substrate transfer direction. Then, the cover member 42 that has been detached closes the portion of the substrate take-out port 44 of the storage container 2 located at the substrate transfer position P4 above the transfer target substrate 1.

In other words, the cover disengagement position is provided at a position where the cover member 42 of the storage container 2 located at the cover release position and the floating air ejection body 71 of the substrate relay unit 70 are viewed in the vertical direction, and are installed at the position The cover member 42 of the storage container 2 with the cover off position is set above the substrate relay unit 70 The position close to the substrate relay unit 70 does not prevent the substrate 1 from being lifted by the transfer/loading air ejection body 71 of the substrate 1 by the substrate take-out mechanism 73.

Further, since the lid member 42 attached to the storage container 2 at the lid release position overlaps with the floating air ejection body 71 of the substrate relay unit 70 in the vertical direction, only the container conveying mechanism 111 is disengaged from the lid. The container body 42 is detached from the container body 1 so that the container container 42 is detached from the container body 1 and the container body 2 at the substrate transfer position P4 can be positioned to make the container body 41 and The interval of the substrate relay unit 70 in the substrate transfer direction is smaller than the thickness of the cover member 42 in the substrate transfer direction (arrangement direction), and the substrate transfer unit 70 and the container body 41 of the storage container 2 can be transferred in the substrate transfer direction. near. Thereby, the transfer of the container body 41 of the storage container 2 by the substrate relay unit 70 to the substrate can be easily performed.

In the substrate transfer apparatus, the fixed cover 121 is disposed below the transfer target substrate 1 in a positionally fixed state, and is located closer to the substrate take-out port 44 of the storage container 2 located at the substrate transfer position P4 in the substrate transfer direction. The portion of the substrate take-out port 44 of the container 2 located at the substrate transfer position P4 that is lower than the transfer target substrate 1 is closed.

Further, the fixed cover 121 is provided so as to be overlapped with the floating air ejection body 71 of the substrate relay unit 70 in the vertical direction, and is disposed under the substrate relay unit 70 in a state close to the substrate relay unit 70, so as not to hinder The substrate 1 of the substrate relay unit 70 takes out the floating of the substrate 1 by the transfer/floating air ejection body 71 of the substrate 1 by the substrate loading and unloading mechanism 73.

[Substrate Relay Unit]

Next, the substrate relay unit 70 will be described.

As shown in FIGS. 3 and 4, the substrate relay unit 70 is configured to be movable in the lateral width direction by the traveling frame 74 that travels in the lateral width direction, and is disposed between the storage container 2 located in the substrate access portion 6. When the substrate 1 is taken out or stored one by one, the substrate relay unit 70 is placed adjacent to the storage container 2 located at the substrate entrance and exit portion 6 by the travel of the traveling frame 74.

As shown in FIG. 8 of the plan view of the substrate relay unit 70, the substrate relay unit 70 has a function of ejecting air to the lower surface of the object to be taken out or the substrate 1 to be stored and the upper surface of the support plate 45 on which the substrate 1 is supported. The air ejecting body 71 is supplied, and the supply air is supplied to the supply air ejecting body 72 at a position further downstream than the floating air ejecting body 71, and the air ejected by the floating air ejecting body 71 is supported from the support. The extraction target substrate 1 is taken out from the storage container 2 in a state above the floating air ejection body 71 and the supply air ejection body 72, and the air by the floating air ejection body 71 is ejected and floated. The storage target substrate 1 is placed above the floating air ejecting body 71 and the supply air ejecting body 72, and placed on the support plate 45 supporting the substrate 1, and the substrate stored in the storage container 2 is taken out and placed. Agency 73.

Incidentally, the substrate take-out mechanism 73 is also used as a take-out mechanism for taking out the substrate 1 from the storage container 2 and a storage mechanism for storing the substrate 1 in the storage container 2.

[walking frame]

As shown in FIGS. 3 and 4, the traveling frame 74 is configured to have one pair of traveling rails 76 provided corresponding to each other along the lateral width direction. The traveling wheel 78 that is rotationally driven by the traveling motor 77 is supported, and the floating air ejection body 71, the supply air ejection body 72, and the substrate take-out insertion mechanism 73 are supported, and the traveling motor 77 is configured to make the traveling wheel When the substrate relay unit 70 is moved by the rotation in the lateral width direction, the substrate relay unit 70 is rotatably driven, and is movable at a position adjacent to the storage container 2 and at a position adjacent to the substrate conveyance conveyor 51.

[Substrate take-out mechanism]

The substrate take-out mechanism 73 has a sandwich transport mechanism 81 that sandwiches the transport substrate 1 and a mount support transport mechanism 88 that mounts the transport substrate 1 .

When the substrate 1 is taken out from the storage container 2, the nip portion 82 of the downstream side end portion of the substrate taking-out direction of the nip sheet 1 is taken out from the substrate along the movement path in the substrate taking-out direction. The upstream side of the direction is moved to the downstream side, and the take-out target substrate 1 is transported from the storage position (see FIGS. 9 and 10) in the storage container 2 to one of the take-out target substrates 1 In the relay position outside the container 2 (see FIGS. 11 and 12), when the substrate 1 is housed in the storage container 2, the nip portion 82 is moved from the upstream side to the downstream side in the substrate loading direction along the movement path. On the side, the storage target substrate 1 located at the relay position is conveyed from the relay position to the storage position in a state where the front end portion of the nip portion 82 is pressed.

In addition, when the substrate 1 is taken out from the storage container 2, the pinch conveyance mechanism 81 is configured to cover the both ends of the substrate 1 in the lateral width direction. When the storage container 2 is housed, the both ends of the storage target substrate 1 in the lateral width direction are pressed. Thereby, the rotation of the substrate 1 around the longitudinal axis can be prevented, and the substrate 1 can be stabilized. The position is conveyed, and the position in contact with the substrate 1 can be made a minimum of one of the downstream end portions in the substrate take-out direction.

The nip portion 82 has a support portion 84 that sandwiches one of the substrate 1 in the vertical direction and supports the pair of nip portions 83. The pair of clamping action portions 83 are separated from each other to be moved to the ground support in a state of protruding to the lateral sides of the support portion 84. And the pair of clamping action portions 83 are configured to be switchable such that the pair of clamping action portions 83 are close to each other, sandwiching the sandwiching state of the substrate 1 (refer to FIG. 1), and causing a pair of clamping action portions 83 The grip release state (see FIG. 9) which is separated from each other and the pressed state in which the pair of gripping action portions 83 are brought closer to each other than the gripping state (see FIG. 13).

The nip portion 82 is supported by a movable body 87 that is linearly movable along a movement path along the substrate taking-out direction, and the nip portion 82 is configured to move along the movement path by the moving body 87, and is movable in the substrate take-out direction. . A rocking connecting member 85 that connects the moving body 87 around the longitudinal axis is provided on the upper portion of the moving body 87, and the end portion of the portion of the rocking connecting member 85 that extends in the substrate taking-out direction is at the upper portion thereof. The holding portion 82 is fixedly supported. Thereby, the nip portion 82 is supported by the moving body 87 in a state of being freely oscillating around the longitudinal axis.

Incidentally, the longitudinal axis of the rocking of the grip portion 82 is located at a position away from the support portion 84 in a plan view, and is located where the gripping action portion 83 is located.

Further, the pinch conveyance mechanism 81 has a rocking guide member 89 as an unwinding operation mechanism, and the rocking guide member is to be taken out of the target substrate 1 In the state of being conveyed to the relay position, the nip portion 82 that has been gripped on the take-out target substrate 1 is removed from the transport path from the take-up target substrate 1 that is transported by the support transfer mechanism 88 (the substrate is transported when the substrate 1 is transported) 1 occupied space) retreat to the position of the retreat.

The rocking guiding member 89 is configured such that the moving body 87 moves along the moving path, abuts against the clamping portion 82, and is rocked around the longitudinal axis, so that the clamping portion 82 is guided to the lateral width direction crossing the substrate taking-out direction. On the outer side, the grip portion 82 is retracted to the retracted position.

The rocking guide member 89 will be described. The rocking guide member 89 has a rocking coupling member 85 and a guide groove 89a for guiding the guide roller 86. In other words, the rocking coupling member 85 is provided so as to abut against the inner wall of the guide groove 89a in a state in which the plate body of the guide groove 89a is formed, and the pair of guide rollers 86 are provided in a direction in which the base member is pulled out of the rocking joint member 85. The end portion of the extended portion abuts against the inner wall of the guide groove 89a on the lower side thereof.

Further, the portion on the upstream side in the substrate take-out direction of the guide groove 89a is formed in a straight line along the moving path of the moving body 87, and the portion on the downstream side of the portion on the upstream side is curved to the outside in the lateral width direction. Curved on the side.

In other words, as shown in FIGS. 9 to 13 , the moving object 87 is moved along the transport target 87 by transporting the take-out target substrate 1 from the storage position to the relay position or transporting the storage target substrate 1 from the relay position to the storage position. During the movement of the path, since the guide roller 86 is linearly guided by the guide groove 89a, the posture of the grip portion 82 is maintained in the direction of the gripping portion 83 and the support portion 84 along the moving path. Arrange the posture.

As shown in Fig. 14 and Fig. 15, after the removal target substrate 1 is removed from the storage position, the moving body 87 is moved to the downstream side in the substrate taking-out direction, and the guide roller 86 is formed as a guide groove 89a. The portion of the shape is guided in a curved shape, and the crucible is moved to the side outside the lateral width direction, so that the posture of the grip portion 82 is changed to a posture inclined with respect to the movement path, so that the support portion 84 is opposed to the gripping action portion 83. Located on the outer side in the lateral width direction. In this state, the moving body 87 is moved to the upstream side in the substrate taking-out direction, and the guide roller 86 is curved in a curved shape as a part of the guide groove 89a, and is moved to the inner side in the lateral width direction. The posture of the grip portion 82 is changed to a posture in which the grip action portion 83 and the support portion 84 are arranged in the direction along the movement path.

Further, as shown in FIGS. 10 and 12, the holding portions 82 are viewed in plan in a posture aligned in the direction of the moving path, and the pair of clamping portions 83 and the supporting portions 84 are located on the substrate 1. The lateral width of the path is such that the substrate 1 can be clamped or pressed from the downstream side in the substrate take-out direction. As shown in Fig. 15, the pair of gripping portions 83 are viewed in plan due to the tilted posture with respect to the moving path. Since one of the portions and the support portion 84 are away from the substrate 1 and are located on the lateral outer side, the substrate 1 can be transported by the support transfer mechanism 88 without being blocked by the sandwiching portion 82.

Incidentally, the grip portion 82 is located at the retracted position in a posture inclined with respect to the movement path (see FIGS. 14 and 15). At this time, the pair of nip portions 83 are viewed in a plane and exist on the transport path of the substrate 1, and the pair of nip portions 83 are in the unclamped state, allowing the substrate 1 to pass.

[Loading support transport mechanism]

The mounting support transport mechanism 88 is configured to mount the take-out target substrate 1 that is transported to the relay position by the pinch transport mechanism 81 when the substrate 1 is taken out from the storage container 2, and transport the take-out target substrate 1 from the relay position to the take-out position. When the entire substrate 1 is placed outside the storage container 2 (see FIG. 14), when the substrate 1 is stored in the storage container 2, the storage target substrate 1 received from the substrate conveyance conveyor 51 is transported from the take-out position to the relay. position.

Incidentally, the placement support transport mechanism 88 is configured such that when the substrate relay unit 70 is moved in the lateral width direction, the substrate 1 is placed and supported on the entire take-out position on the placement support transport mechanism 88, and will be located The take-out target substrate 1 at the take-out position is transferred to the substrate transfer conveyor 51, and the storage target substrate 1 received from the substrate conveyance conveyor 51 is transported to the take-out position.

The placement support transport mechanism 88 will be described. The placement support transport mechanism 88 is provided with an air supply type support mechanism 52 that supplies air to the lower surface of the substrate 1 and supports the substrate in a non-contact state in a horizontal posture, and a pair of air supply type support mechanisms 52. The supported substrate 1 is configured by a driving force imparting mechanism 53 that imparts a pushing force in the conveying direction.

The blower type support mechanism 52 has a blower 54 that is disposed below the transport path of the substrate 1, and that conveys air upward, a porous air deflector 55 that is disposed between the blower 54 and the transport path of the substrate 1, and supplies air to the blower. The conveyor 54 of the device 54 is configured by an air supply device 56 (see Fig. 19). Further, the urging force imparting mechanism 53 is provided in parallel with the substrate taking-out direction, and contacts the plurality of supporting transport rollers 57 on the lower surface of the substrate 1 and the upper surface of the substrate 1 at the relay position to operate together with the support transport roller 57. The holding transport roller 58 for sandwiching the substrate 1 is configured to support the transport roller 57 and the transport roller for holding 58 is formed by providing a pair in the lateral width direction, and the both sides of the lateral direction of the support substrate 1 are supported and clamped.

A flange-supporting conveying roller 57 having a flange for restricting movement of the substrate 1 in the lateral width direction and a flangeless supporting conveying roller 57 having no flange as a plurality of supporting conveying rollers 57 are provided, and are not convex. The edge-supporting transfer roller 57 is disposed on the upstream end portion of the substrate support take-up mechanism 88 (substrate take-out mechanism 73) in the substrate take-up direction, and is in contact with the lower surface of the substrate 1 at the relay position. The holding transfer roller 58 is operated by the holding substrate 1 and the flange-supporting transfer roller 57 is arranged in parallel with the support transfer mechanism 88 (substrate take-out mechanism 73). Also below the substrate take-up direction, the 俾 does not contact the underside of the substrate 1 at the relay position.

Incidentally, the holding transfer roller 58 is disposed on the upstream end portion of the substrate supporting take-up mechanism 88 (substrate take-out/input mechanism 73) in the substrate taking-out direction, similarly to the flangeless supporting transfer roller 57.

In other words, the placement support transport mechanism 88 is configured such that the relay end position is the downstream end portion of the substrate 1 in the substrate take-out direction, and is supported by the flangeless support transport roller 57 of the plurality of support transport rollers, and is held and held. The position at which the transfer roller 58 is operated by the co-operation of the transport roller 58 is transported by the transport mechanism of the take-out substrate 1 and the downstream end portion of the substrate 1 in the substrate take-out direction is placed on the substrate on which the support transfer mechanism 88 is placed. The upstream end portion of the direction is sandwiched by the support conveyance roller 57 and the clamp conveyance roller 58.

In short, the downstream end portion of the relay position substrate 1 in the substrate take-out direction is disposed upstream of the substrate take-out direction in which the support transfer mechanism 88 is placed. The position at which the flangeless support transfer roller 57 and the sandwiching transfer roller 58 are operated together and held at the side end portion is at a position close to the storage position, so that the transfer distance of the substrate 1 of the pinch conveyance device 81 can be shortened. The moving distance of the clamping portion 82 can be shortened.

In addition, the support conveyance roller 57 and the nip conveyance roller 58 are disposed so that the support conveyance roller 57 and the nip conveyance roller 58 are placed on the support and the nip is held by the nip conveyance mechanism 81. The lateral width direction is further outside. Thereby, the conveyance range of the board|substrate 1 by which the conveyance mechanism 81 is hold|maintained, and the conveyance range of the board|substrate 1 which mounts the support conveyance mechanism 88 are repeated in the board|substrate extraction direction. Therefore, the substrate 1 can be transported to the relay position where the support transport mechanism 88 can be transported by the pinch transport mechanism 81, and the support transport mechanism 88 can be placed to transport the substrate 1 to the transport mechanism capable of the pinch transport mechanism 81. Following the position. As a result, the transfer between the pinch transport mechanism 81 and the placement support transport mechanism 88 can be accurately performed. When the substrate 1 is transferred to the placement support transport mechanism 88 from the pinch transport mechanism 81, the substrate 1 is placed in the nip portion 82 to be placed in a state where the support is placed, and the transport roller 57 can be supported and supported. Since the holding conveyance rollers 58 are operated in the same manner and are conveyed while sandwiching the substrate 1, the transfer between the pinch conveyance mechanism 81 and the placement support conveyance mechanism 88 can be accurately performed, and the substrate 1 can be properly conveyed.

The placement support transport mechanism 88 is configured to support the central portion of the substrate 1 in the lateral width direction in a non-contact state by the air supply type support mechanism 52, and to contact and support the lateral width direction of the substrate 1 by the urging force imparting mechanism 53. At both ends, the conveyance motor 59 drives the support conveyance roller 57 and the conveyance conveyance roller 58 to rotate, and conveys the board|substrate 1 in the conveyance direction.

Incidentally, the substrate transport conveyor 51 has a blower type support mechanism including a blower, a wind deflector, and an air supply device, and a push force imparting mechanism having a plurality of support transport rollers, similarly to the placement support transport mechanism 88. . Further, the substrate transfer conveyor 51 is not provided with a conveyance roller for clamping.

As shown in Fig. 16, the floating air ejection body 71 is configured to have an air ejection port 91 that discharges air upward, and a shape in which the upstream end portion of the air ejection port 91 in the substrate taking-out direction extends to the upper side. The air ejected upward from the air ejection port 91 is guided to a guide curved surface 92 that flows in the horizontal direction along the upper surface of the floating air ejecting body 71 toward the storage container 2, and also serves as an auxiliary air ejecting body. The system is in the vicinity of the container A, and the air is ejected between the lower surface of the object to be removed 1 taken out by the substrate take-out mechanism 73 and the lower surface of the storage target substrate 1 and the upper surface of the floating air ejection body 71.

In other words, in the figure (a), as shown by the arrow, the air ejected upward from the air ejection port 91 of the floating air ejecting body 71 is Coanda effect (Coand After flowing along the guide curved surface 92, the upper surface of the floating air ejection body 71 connected to the guide curved surface 92 flows in the horizontal direction, and the diameter is from the storage container 2 on the upstream side in the substrate take-out direction. Since the air ejected from the air ejection port 91 is guided by the guide curved surface 92, air is ejected toward the lower surface of the object to be taken out 1 and the upper surface of the floating air ejecting body 71, and then the horizontal direction is toward the storage container 2 side. The flow is performed to eject air between the lower surface of the object-receiving substrate 1 and the upper surface of the support plate 45 on which the substrate 1 is supported.

The supply air ejection body 72 is provided to be used with the floating air ejection body 71. The direction of the air flowing in the horizontal direction in the same manner is reversed, and the air ejection port 93 for the reverse direction in which the air is discharged upward is located above the air ejection port 93 in the opposite direction, and is In the downstream side of the substrate take-out direction, the air ejected upward from the opposite side by the air ejection port 93 is guided to flow in the horizontal direction along the upper surface of the supply air ejecting body 72 toward the side opposite to the storage container 2 side. The direction is constituted by the guide curved surface 94.

In other words, the air ejected from the air ejection port 93 in the opposite direction flows in the horizontal direction toward the downstream side in the substrate taking-out direction on the side opposite to the side of the storage container 2, and the air is supplied to the adjacent portion A of the container. The air ejection port 91 of the floating air ejection body 71 is also located downstream of the substrate taking-out direction.

As shown in Fig. 8 and Fig. 17, the floating air ejection body 71 is provided in plurality in a state of being spaced apart in the lateral width direction, and the supply air ejection body 72 is disposed in the lateral width direction in the floating air ejection body. In the 71st, a plurality of floating air ejecting bodies 71 and a plurality of supply air ejecting bodies 72 are arranged in a row in the lateral width direction in a state in which the floating air ejecting bodies 71 are located at both ends in the lateral width direction. By the arrow in Fig. 17, when the substrate 1 is transported, the air ejected from the supply air ejecting body 72 can be supplied to the air ejection port 91 of the floating air ejecting body 71 to the downstream of the substrate taking-out direction. side. With this, even if the air of the air ejection port 91 of the floating air ejection body 71 is ejected, a negative pressure is formed on the downstream side in the substrate taking-out direction, and the air of the air ejecting body 72 can be supplied to positively compress the portion. The substrate 1 is properly supported.

And the connection setting plate 96 has the same height as the upper surface of the air conditioning plate 55. The state of the height is extended to the upstream side of the substrate take-out direction in the upstream side end portion of the substrate take-out mechanism 73 in the substrate take-out direction, and the supply air ejection body 72 has the same upper surface as the upper surface of the connection setting plate 96. The height is supported by the connection setting plate 96 in a state in which the substrate take-out direction is connected, and the floating air ejection body 71 has a height lower than a few millimeters (for example, about 2 to 3 mm) above the connection plate 96. The connection plate 96 is supported in a state in which a gap through which the air ejected from the air ejection port 91 passes is formed on the downstream side in the substrate take-out direction.

That is, the floating air ejection body 71 is disposed such that its upper surface is located below the upper surface of the supply ejection body 72 by a few millimeters.

The air supply device 95 (see FIG. 19), which is an air supply device, supplies air to the floating air discharge body 71 and the supply air discharge body 72. The discharge body air supply device 95 is configured to supply the air. The supply of air is adjusted freely. In addition, the air is supplied from the discharge air supply device 95 to the floating air discharge body 71 and the supply air discharge body 72, and the floating air discharge body 71 and the supply air discharge body 72 are switched to the discharge state of the discharge air. By the supply of the air to the floating air ejecting body 71 and the supply air ejecting body 72 from the ejecting body air supply device 95, the floating air ejecting body 71 and the supply air ejecting body 72 are switched to stop the discharge of the air. Stop state.

Next, the control device H will be described.

As shown in FIGS. 18 and 19, the substrate relay unit 70 is provided with a substrate for detecting the presence or absence of the substrate 1 held by the sandwiching portion 82 and the substrate 1 pressed by the sandwiching portion 82. No detecting sensor 101, detecting storage container 2 Whether the container height detecting sensor 102 is located at a height at which the substrate 1 is taken out and stored, the detecting position detecting sensor 103 detecting whether the substrate 1 is located at the substrate taking-out position, and whether the detecting substrate 1 is at the relay position of the relay position The detection sensor 104 and the deceleration position detecting sensor 105 that decelerates the transport speed of the substrate 1 on which the support transport mechanism 88 is placed are provided, and the substrate entrance/exit portion 6 is provided with whether or not one portion of the detecting substrate 1 is exposed from the storage container 2 The external substrate exposes the detection sensor 106 and is configured to input the detection information of the detection sensors to the control device H.

And the control device H is configured to control the movement of the traveling frame 74, the substrate take-out mechanism 73, and the air supply device 95 for the ejection body of the substrate relay unit 70 according to the instructions of the detection sensor or the upper controller, and the like. The lifting mechanism 61 and the substrate transport conveyor 51 operate.

The control device H also functions as an air supply control unit that controls the operation of the discharge air supply device 95 to control the air supply from the floating air and the supply air. When the discharge amount of the air ejected from the ejecting body 72 is gradually increased toward the target supply amount, the support mechanism 45 for placing the support take-out object or the storage target substrate 1 is located corresponding to the floating air ejecting body 71. The height of the substrate take-out mechanism 73 (the height for taking out and the height for storage) is controlled by the substrate lifting mechanism 61.

In other words, the control device H is configured to control the operation of the discharge air supply device 95, and to switch the floating air ejection body 71 and the supply air ejection body 72 from the discharge stop state to the discharge state. The air supply device 95 supplies the floating air ejection body 71 and the supply air spray. The amount of air discharged from the floating body 72 is increased stepwise, and the amount of air ejected from the floating air ejecting body 71 and the supply air ejecting body 72 is gradually increased toward the target supply amount.

Further, the control device H is configured to control the operation of the elevating mechanism 61 so that when the substrate 1 is taken out or stored from the storage container 2, the support plate 45 on which the substrate 1 for supporting the removal or storage is placed is placed in contact with the floating air. The body 71 and the substrate take out the height of the loading mechanism 73, and the air ejected from the floating air ejecting body 71 is ejected to the lower surface of the substrate 1 taken out or housed and placed between the upper surface of the supporting plate 45 supporting the substrate 1, and The nip portion 82 sandwiches or presses the substrate 1 which is ejected and floated by the air for ejecting the air ejecting body 71.

The substrate presence/absence detecting sensor 101 is provided in a pair, and the presence or absence of the substrate 1 before the clamping action portion 83 is detected by the pair of clamping portions 82, respectively, and the control mechanism H is configured to exist when a pair of substrates exist or not When both of the detecting sensors 101 are in the detection state of detecting the presence of the substrate 1, it is determined that the substrate 1 is clamped or pressed, and one or both of the pair of substrate presence detecting sensors 101 are not detected. When the substrate 1 is not in the non-detected state, it is determined that the substrate 1 is not pinched and pressed, and when the substrate 1 is not pinched or pressed while being held or pressed by the pinching portion 82, the substrate transfer device is stopped. 8 action.

The container height detecting sensor 102 is configured to detect the presence or absence of a plurality of detecting plates 107 arranged side by side in the up and down direction corresponding to the plurality of supporting plates 45, respectively, and the control mechanism H is configured to be in the plural when the storage container 2 is located One of the support plates 45 corresponds to the height of the floating air ejection body 71 and the substrate take-out mechanism 73, and is determined to be stored when the container height detecting sensor 102 detects the detection state of any of the plurality of detecting plates. Container 2 is at When the container 2 is deviated from the corresponding height in the up-and-down direction, and the container height detecting sensor 102 is in the non-detecting state in which none of the plurality of detecting plates is detected, it is determined that the container 2 is not at the proper height. When the substrate 1 is taken out of the storage container 2, it is determined that the storage container 2 is not at the proper height, and the operation of the substrate transfer device 8 is stopped.

The take-out position detecting sensor 103 is provided at a position corresponding to the upstream side end portion of the substrate 1 in the take-out position and a position corresponding to the downstream side end portion, and the control mechanism H is configured such that when the substrate 1 is located In the take-out position, when the pair of take-out position detecting sensors 103 detect the detection state of the substrate 1, it is determined that the substrate 1 is at the take-out position, and when the substrate 1 is displaced from the take-out position, one of the pair of take-out position detecting sensors 103 or When both are in the non-detection state, it is determined that the substrate 1 is not located at the take-out position.

The relay position detecting sensor 104 is disposed at a position on the downstream side end of the substrate taking-out direction of the substrate 1 at the relay position and at a position further downstream than the position, and is disposed adjacent to the substrate taking-out direction. When the control mechanism H is configured such that the relay position detecting sensor 104 located on the upstream side of the substrate taking-out direction is the detecting state of the detecting substrate 1, the relay position detecting sensor 104 located on the downstream side is the non-detecting substrate 1 In the detection state, it is determined that the substrate 1 is located at the relay position, and when the substrate 1 is deviated from the relay position, and the pair of relay position detecting sensors 104 are both in the detection state or the non-detection state, it is determined that the substrate 1 is not located in the middle. Following the position.

The deceleration position detecting sensor 105 is disposed such that the pair of take-up and storage pairs are located in the front width before the substrate 1 positioned at the take-out position, and the control mechanism H is configured to control the driving force imparting mechanism 53 to actuate the support. Transport machine When the substrate 1 is transported from the relay position to the take-out position, the transport speed is accelerated to the transport high speed immediately after the start of the transport, and when the take-off deceleration position detecting sensor 105 detects the detection state of the substrate 1, the transport is performed. The speed is reduced to a lower speed than the conveyance of the high speed and the low speed, and the substrate 1 received from the substrate transport conveyor 51 is maintained when the substrate 1 received by the substrate transport conveyor 51 is transported to the take-out position by the placement support transport mechanism 88. When the storage deceleration position detecting sensor 105 detects the detection state of the substrate 1, the conveyance speed is decelerated to a lower speed than the conveyance speed of the received substrate.

The substrate exposure detecting sensor 106 is configured to detect the presence or absence of the substrate 1 before the storage container 2, and the control mechanism H is configured to determine that the substrate 1 is received from the substrate 1 when the substrate exposure detecting sensor 106 detects the detecting state of the substrate 1. When the container 2 is exposed and the substrate exposure detecting sensor 106 is in a non-detected state in which the substrate 1 is not detected, it is determined that the substrate 1 is not exposed from the storage container 2.

The operation of the substrate transfer device 8 by the control unit H will be described, and the substrate 1 is taken out from the storage container 2 located in the substrate entrance and exit portion 6 and transported to the substrate processing device outside the drawing.

First, the traveling frame 74 is moved, and the substrate relay unit 70 is placed adjacent to the storage container 2 located in the substrate entrance/exit portion 6. Then, the storage container 2 is moved up and down by the elevating mechanism 61, and the support plate 45 on which the support-receiving target substrate 1 is placed is placed in a state corresponding to the heights of the floating air ejection mechanism 71 and the substrate take-out mechanism 73. The discharge body air supply device 95 is actuated, and the floating air discharge body 71 and the supply air discharge body 72 are in a discharge state, and the conveyor air supply device 56 is actuated to provide the air supply type. The support mechanism 52 is in a state in which air is ejected upward from the wind deflector 55. At this time, the floating air ejecting body 71 and the supply air ejecting body 72 are disposed adjacent to the container adjacent to the downstream end portion of the support plate 45 of the take-out target substrate 1 in the substrate take-up direction. By this, the air ejected from the floating air ejecting body 71 can be properly supplied between the lower surface of the object to be taken out 1 and the support plate 45, and the object to be taken out 1 can be accurately floated from the support plate 45. In a state in which the extraction target substrate 1 is floated from the support plate 45 by the ejection of the air from the floating air ejection body 71, the movable body 87 is moved from the downstream side in the substrate take-out direction to the upstream side, and the grip release state is performed. The nip portion 82 is moved to a nip position at which the take-out target substrate 1 can hold the storage position (see FIGS. 9 and 10).

When the nip portion 82 is switched to the nip state, the detachment target substrate 1 is nipped by the nip portion 82, and the support conveyance roller 57 and the nip conveyance roller 58 are rotated, and the substrate 1 is taken out from the substrate upstream side. In the state of being conveyed to the downstream side, the moving body 87 is moved from the upstream side in the board taking-out direction to the downstream side, so that the nip portion 82 in the nip state is moved to the grip releasing position corresponding to the relay position (refer to the eleventh FIG. 12 and FIG. 12), and the substrate 1 is transported to the relay position. At this time, since the air is also supplied to the upper portion of the floating air ejecting body 71 and the supply air ejecting body 72, the floating air ejecting body 71 and the supply air ejecting body can be accurately supported by the air layer formed by the air. Substrate 1 at the top of 72. After the substrate 1 is transported to the relay position, the rotation of the support transport roller 57 and the nip transport roller 58 is stopped, and the operation of the ejector air supply device 95 is stopped, and the floating air is ejected. The body 71 is in a discharge stop state.

After the grip portion 82 is switched to the grip release state, the grip portion 82 in the grip release state is moved to the retracted position (see FIGS. 14 and 15), and the moving body 87 is taken out from the substrate. The upstream side is moved to the downstream side, and the support transport roller 57 and the nip transport roller 58 are rotated, and the substrate 1 is transported to the downstream side from the upstream side in the substrate take-out direction, and the substrate 1 is transported to the take-out position, and then stopped. The rotation of the support conveyance roller 57 and the conveyance conveyance roller 58 is performed.

After that, the traveling frame 74 is moved, and the substrate transfer unit 70 is placed adjacent to the substrate transfer conveyor 51, and the support transport roller 57 and the nip transport roller 58 are rotated to align the substrate. 1 is transported to the downstream side from the upstream side in the substrate take-out direction, and the substrate 1 is transferred to the substrate transfer conveyor 51, and the substrate transfer conveyor 51 transports the substrate 1 to the substrate processing apparatus.

Next, a case where the substrate 1 that has been carried out from the substrate processing apparatus is stored in the storage container 2 located in the substrate entrance and exit portion 6 will be described.

First, the traveling carriage 74 is moved so that the substrate relay unit 70 is positioned adjacent to the substrate conveyance conveyor 51, and the conveyor air supply device 56 is actuated, so that the air supply type support mechanism 52 is moved from the air conditioning plate 55 toward Air is sprayed from above. In this state, the support conveyance roller 57 and the conveyance conveyance roller 58 are rotated, and the substrate 1 is conveyed from the upstream side in the substrate storage direction to the downstream side, and the reception is carried out from the substrate processing apparatus, and conveyed by the substrate conveyance conveyor 51. The substrate 1 is transported to the take-out position. After that, the rotation of the support conveyance roller 57 and the conveyance conveyance roller 58 is stopped, the traveling frame 74 is moved, and the substrate relay unit 70 is placed adjacent to the storage container 2 located in the substrate entrance/exit portion 6.

The storage container 2 is moved up and down by the elevating mechanism 61, and the support plate 45 on which the storage target substrate 1 is placed is placed in response to the floating air ejecting machine. In a state where the structure 71 and the substrate take-out mechanism 73 are placed, the discharge air supply device 95 is actuated to bring the floating air discharge body 71 and the supply air discharge body 72 into a discharge state. In this state, the moving body 87 is moved from the upstream side to the downstream side in the substrate housing direction, and the nip portion 82 in the pressed state is moved to the pressing end position on the upstream side in the substrate housing direction (see FIG. 13). The holding amount of the substrate 1 is moved at the nip position, and the substrate 1 is transported to the storage position. After that, the rotation of the support conveyance roller 57 and the conveyance conveyance roller 58 is stopped, and the discharge air supply device 95 and the conveyor air supply device 56 are stopped, and the movable body 87 is stopped downstream from the substrate storage direction. When the side is moved to the upstream side, the nip portion 82 is moved to the retracted position when the substrate 1 is next stored, and when the substrate 1 is taken out, the nip portion 82 is moved to the nip releasing position. .

When the discharge air supply device 95 is stopped and the floating air discharge device is in the discharge stop state, the supply of air to the upper surface of the storage target substrate and the upper surface of the support plate on which the substrate is supported is stopped, as described above. The air that exists between the substrate and the support plate.

Hereinafter, another embodiment of the structure for detaching the lid member from the container body will be described in the first to third embodiments.

"First Other Embodiment" Rotating body support type

Hereinafter, the first other embodiment will be described with reference to the drawings.

As shown in FIG. 20, the substrate transfer apparatus is provided with a container transport mechanism 111 that transports the storage container 2, and a substrate relay unit 70 that transfers the substrate 1 to the storage container 2 that is transported by the container transport mechanism 111.

Further, the substrate relay unit 70 is configured to be moved from the container transport mechanism 111. The storage container 2 is taken out and the substrate 1 is taken out, and the substrate 1 is housed in the storage container 2, and the transfer of the substrate 1 is configured to take out the substrate 1 of the storage container 2 and store the substrate 1 of the storage container 2.

[storage container]

As shown in Fig. 20 and Fig. 21, the storage container 2 has a tubular body 41 in which a plurality of substrates 1 are housed in a tubular shape, and a cover member 42 attached to one end of the container body 41 is mounted. The fan filter unit 43 is provided at the other end of the container body 41.

As shown in Fig. 22, the container body 41 has a plurality of support plates 45 on which the support substrate 1 is placed in a state of being spaced apart from each other in the vertical direction, and the support substrate 1 is individually placed on the plurality of support plates 45. The rectangular substrate 1 is housed in a plurality of sheets in a horizontal posture at intervals in the vertical direction.

The lid member 42 is completely closed by a substrate take-out port 44 which is an opening for substrate transfer formed at one end of the cylindrical container body 41, and is closed at one end of the container body 41. In addition, the fan filter unit 43 is configured such that the substrate take-out port 44 formed at the other end portion of the cylindrical container body 41 is completely closed and closed, and is ventilated from the other end side of the container body 41 toward the one end side. It is provided at the other end of the container body 41. The cover member 42 and the fan filter unit 43 are configured to be detachable from the container body 41.

Incidentally, the cover member is formed to have a larger width in the upper and lower directions than the substrate take-out opening 44 of the container body, and is larger than the width in the lateral width direction.

Further, for convenience of explanation, the direction in which the container body 41 and the lid member 42 are arranged is referred to as an arrangement direction, and the direction intersecting the arrangement direction is referred to as a width direction.

Then, as shown in Fig. 23, the lid member 42 is provided with an engaging portion 114 that is engaged with the upper end portion of one end portion of the container body 41 from the upper side, and the engaging and supporting portion is engaged with the engaging portion 114. Part 115. That is, the cover member 42 is configured such that the cover member 42 is moved downward relative to the container body 41, so that the engaged portion 115 can be engaged with the engaging portion 114, and the cover member 42 can be attached to the container body 41. When the lid member 42 is moved upward with respect to the container body 41, the engaged portion 115 can be detached from the engaging portion 114, and the lid member 42 can be detached from the container body 41.

In this manner, the lid member 42 is configured to be detachable from the upper side of the container body 1 and free from the upper side.

The engaged portion 115 of the cover member 42 is supported by the front end portion of the tongue piece 117 in a state where the cover member 42 protrudes to the container body side at the upper end portion of the cover body 116 so as to protrude downward to support the cover member 42. In a state in which the container body 41 is provided, the state in which the container body 41 and the lid member 42 are located in the lateral width is provided in the lid member 42. Further, the end portion is formed in a spherical shape before being positioned at the lower end of the engaged portion 115.

The engaging portion 114 of the container body 41 is formed into a circular shape in a plan view shape, and is recessed to a lower shape. The cap member 42 is formed in the container body 41, and is formed to correspond to the cover member 42 respectively. The position of the pair of engaged portions 115.

The shape of the engaging portion 114 will be described. The bottom portion of the engaging portion 114 has a cylindrical shape having the same diameter in the up-and-down direction, and has a diameter slightly larger than the diameter of the front end portion, and the fitting portion is fitted. 115. Moreover, the entrance side portion of the engaging portion 114 forms the same diameter as the lower end portion and the bottom side portion, and the larger the upward side, the larger the diameter In the shape, the cymbal will be guided to the bottom side portion by the engaging portion 115.

Incidentally, as shown in Figs. 21 and 22, the tongue piece 117 is provided on one side portion and the other side portion in the lateral width direction of the cover main body 116, and the engaged portion 115 is respectively supported by the pair of engaging portions 115. Tab 117. Further, the engaging portion 114 of the container body 41 is formed above the substrate take-out port 44, and is formed above the substrate take-out port 44 to engage the engaged portion 115.

Therefore, as shown in Fig. 23, when the storage container 2 is formed with the engaging portion 114 and the engaged portion 115 as described above, when the lid member 42 is attached to the container body 41, the engaged portion 115 is easily engaged with the engaging portion 115. The engaging portion 114 and the cover member 42 are easily attached to the container body 41.

Further, in a state in which the lid member 42 is attached to the container body 41, the engaging portion 115 is fitted to the bottom side portion of the engaging portion 114, and the lid member 42 is attached to the container body 41. The cover member 42 is restricted from moving in the horizontal direction with respect to the container body 41.

Further, in a state in which the lid member 42 is attached to the container body 41, the front end portion of the engaged portion 115 is formed in a spherical shape, and the portion above the front end portion is located at the engaging portion 114 having a large width. The cover member 42 is configured to be rockable around the horizontal axis in the lateral width direction around the engaging portion 114 in a state of being attached to the container body 41.

As described above, by providing the engaged portion 115 to the lid member 42, the engaged portion 115 is disposed in the arrangement direction at a center of gravity of the lid member 42 and closer to the container body side. Therefore, the cover member 42 is attached to the container body side in a state of being attached to the container body 41 as shown in Fig. 23(a), and the cover member 42 is a container due to the weight of the itself. The body 41 is pressed and held, and the cover member 42 It is not easy to shake.

In a state in which the lid member 42 is attached to one end of the container body 41, an exhaust gap E1 is formed between the container body 41 and the lid member 42.

The spacer member 118 for forming the exhaust gap E1 is placed between the container body 41 and the cover member 42 in a state where the cover member 42 is attached to the container body 41, and the container body of the cover member 42 is disposed. The side has it.

In this manner, the cover member 42 has the spacer 118, and the cover member 42 is formed in the state of being attached to the container body 41, and forms a space for exhausting E1 with the container body 41, and is introduced to the fan filter unit 43. The air in the container main body 41 is discharged to the outside via the exhaust gap E1 formed between the container main body 41 and the lid member 42 as indicated by an arrow in FIG.

Further, the cover member 42 is in contact with the container body 41 only by the engaged portion 115 and the spacer 118, and the exhaust gap E1 is partially closed around the substrate take-out port 44 due to the presence of the spacer 118. , Yokohama formed throughout the week.

As shown in FIG. 22 and FIG. 23, the supported portion 119 is provided on the cover member 42 in a state in which both sides of the upper end portion of the cover main body 116 protrude from the cover main body 116 to the outer side in the lateral width direction.

The supported portion 119 is configured by arranging two rotating bodies 120 that are rotatable around the horizontal axis in the lateral width direction in the arrangement direction. The two rotating bodies 120 are disposed at the same height as the cover member 42, and the diameters are formed to be the same size.

The rotating body 120 on the cover member side in the arrangement direction of the two rotating bodies 120 is disposed above the center of gravity of the cover member 42 and is disposed on the cover body 116 in a state closer to the center of gravity than the cover member side in the arrangement direction. , located in the arrangement The rotating body 120 on the container body side in the direction is disposed above the center of gravity of the cover member 42 and is disposed on the lid body 116 in a state closer to the center of gravity than the container body side in the arrangement direction. Thereby, the center of gravity of the cover member 42 is located between the centers of the two rotating bodies 120 and is below, and the engaging recessed portion 124 is supported to support the cover member in the direction in which the cover member 42 is detached from the container body 41, as will be described later. The shaking of 42 prevents contact of the cover member 42 with the container body 41.

[Substrate Relay Unit]

As shown in Fig. 16 (a), the substrate relay unit 70 is configured to have a floating air ejection body 71 that ejects air to the lower surface of the transfer target substrate 1 and between the support plates 45 that support the substrate 1. In the state in which the air to be sprayed by the floating air ejecting body 71 is ejected from the support plate 45, the transfer substrate 17 is transferred to the storage container 2 while being placed above the floating air ejecting body 71. On the other hand, the container body 41 from which the lid member 42 has been detached is taken out through the substrate, and the substrate 1 is transferred.

Further, the floating air ejecting body 71 is configured to use an auxiliary air ejecting body that causes the ejected air to flow on the upper surface of the floating air ejecting body 71, and is placed on the upper surface of the floating air ejecting body 71 and the substrate is taken out. The air is ejected between the substrates transferred by the mechanism 73.

Further, as shown in Fig. 4, the substrate relay unit 70 is disposed in a positionally fixed state on the floor surface, and is disposed at the substrate take-out port 44 of the container body 41 with respect to the container 2 located at the substrate transfer position P4. One of the end sides.

[container transport mechanism]

As shown in Fig. 20, Fig. 24, and Fig. 25, the container conveying mechanism 111 has a shape adjacent to the upstream side of the substrate taking-out direction of the substrate relay unit 70. The elevating mechanism 61 provided in the state is constituted by a stacker crane 7 provided in a state adjacent to the upstream side in the substrate take-out direction of the elevating mechanism 61.

When the container transport mechanism 111 transports the storage container 2 to the substrate transfer position P4 (see FIG. 25), first, the storage container 2 is horizontally moved to the upper position P1 toward the downstream side in the substrate take-out direction by the stacker crane 7. (Refer to Fig. 24(a)), the storage container 2 is moved downward from the upper position P1 to the intermediate position P3 (see Fig. 24(c)), and the storage container 2 is removed and placed. Supported by the lifting mechanism 61. Thereafter, the storage container 2 is moved downward from the intermediate position P3 to the substrate transfer position P4 by the elevating mechanism 61 (see FIG. 25).

When the container transport mechanism 111 transports the storage container 2 from the substrate transfer position P4, first, the storage container 2 is moved upward from the substrate transfer position P4 from the substrate transfer position P4 to the intermediate position P3 by the elevating mechanism 61. After that, the storage container 2 on the elevating mechanism 61 is taken up by the stacker crane 7, and the storage container 2 is moved upward from the intermediate position 3 to the upper position P1, and then the storage container 2 is taken out from the upper position P1 toward the substrate. The upstream side moves horizontally.

In the period in which the storage container 2 is moved up and down between the upper position P1 and the intermediate position P3 in the vertical direction by the stacker 7, the storage container 2 passes the cover release position P2 (see the 24th (b). )))).

In other words, the elevating mechanism 61 corresponds to the placement of the support storage container 2, and the storage container 2 is moved upward from the intermediate position P3 below the substrate transfer position P4 and below the cover release position P2 to the substrate transfer. At the position P4, the stacking platform 7 is placed, and the stacker 7 is placed so that the storage container 2 is placed on the elevating mechanism 61, and the storage container 2 is further above the cover-receiving position P2. The transfer position device in which the square position P1 is lowered downward to the intermediate position P3 is lowered, and the container transport mechanism 111 constituted by the stacker 7 and the elevating mechanism 61 is configured to move the storage container 2 downward from the cover disengagement position P2 to the vertical position. The substrate is transferred at the transfer position P4.

As shown in Fig. 20, the elevating mechanism 61 has a pair of left and right support bases 63 on which the container main body 41 supporting the storage container 2 is placed and moved up and down, and the pair of left and right support bases are individually guided and supported to be lifted and lowered. The pillar 64 is formed.

As shown in Fig. 25, the elevating mechanism 61 is configured such that the support plate 45 on which the transfer target substrate 1 on which the support container 2 is placed is placed at a transfer height corresponding to the substrate relay unit 70, and at the substrate transfer position P4. The storage container 2 is supported to be lifted and lowered.

In other words, the elevating mechanism 61 is configured such that the storage container 2 is horizontally moved so that the substrate 1 accommodated at the lowest position of the container main body 41 is placed on the rising side substrate as the substrate transfer position P4 at a height that can be transferred by the substrate relay unit 70. The position P5 (see FIG. 25(d)) and the substrate 1 stored at the uppermost position of the container body 41 are located at the lower substrate transfer position as the substrate transfer position P4 at the height that can be transferred by the substrate relay unit 70. P6 (see FIG. 25(e)) is moved up and down, and the transfer target substrate 1 of the storage container 2 and the support plate 45 on which the support substrate 25 is placed are positioned at a transfer height corresponding to the substrate relay unit 70.

[fixed cover]

In the substrate transfer apparatus, the fixed cover 121 is disposed below the transfer target substrate 1 in a positionally fixed state, and is located closer to the substrate take-out port 44 of the storage container 2 of the substrate transfer device P4 in the substrate transfer direction. Closed The portion of the substrate take-out port 44 of the storage container 2 located at the substrate transfer position P4 is further below the transfer target substrate 1, and the fixed cover 121 is closed at the rising side substrate transfer position P5 and the lower side substrate transfer. A portion of the substrate take-out port 44 of the storage container 2 that moves up and down between the load positions P6 is lower than the transfer target substrate 1.

Further, the fixed cover 121 is provided so as to be overlapped with the floating air ejection body 71 of the substrate relay unit 70 in the vertical direction, and is disposed under the substrate relay unit 70 in a state close to the substrate relay unit 70, so as not to hinder the substrate. The floating of the substrate 1 by the transfer/floating air ejection body 71 of the substrate 1 by the loading mechanism 73 is taken out.

[Cover loading and unloading mechanism]

As shown in Fig. 24, the substrate transporting apparatus is provided with a lid attaching and detaching mechanism 122 as a lid detaching mechanism for detaching the lid member 42 from the container body 41 in a state where the storage container 2 is located at the lid detaching position P2. The mechanism 122 is configured such that the cover member 42 is attached to the container body 41 in a state where the storage container 2 is located at the cover detachment position P2 in addition to the detachment of the cover member 42 described above.

The cover attaching and detaching mechanism 122 is configured to receive the support body 123. The receiving support system receives the cover cover disengagement position P2 in the middle of the downward movement of the storage container 2 by the container transport mechanism 111 to the substrate transfer position P4, and receives the support cover member 42. The support portion 119 removes the cover member 42 from the container body 41.

That is, as shown in Figs. 24 and 26, the storage container 2 to which the cover member 42 is attached is moved downward by the stacker crane 7 in the vertical direction, and is moved from the upper position P1 to the intermediate position through the cover release position P2. At P3, at the cover disengagement position P2, the supported portion 119 of the cover member 42 is received by the receiving support 123 The cover member 42 is detached from the container body 41.

Further, the storage container 2 from which the lid member 42 has been detached is moved upward in the vertical direction by the stacker crane 7, and when the sill is moved from the intermediate position P3 to the upper position P1 through the lid detachment position P2, the lid member 42 is at the lid detachment position P2. The engaged portion 115 is engaged and supported by the engaging portion 114 of the container body 41, and the cover member 42 is attached to the container body 41.

As shown in Fig. 20, the receiving support 123 is disposed on both sides in the lateral width direction of the container 2 at the substrate transfer position P4, and the receiving support is located in the lateral width direction of the cover member 42. The supported portions 119 on the side are supported by the elevating mechanism 61 so as to be supported by the pair of guide struts 64, respectively.

As shown in Fig. 23, the receiving support body 123 is provided so as to protrude from the guide post 64 to the downstream side in the substrate take-out direction, and has a snap-in recess at the front end portion thereof to be engaged by the support portion 119 (two rotating bodies 120). 124 constitutes.

As shown in Fig. 23, the bottom surface of the supported portion 119 which receives the support insertion recess 124 forms an inclined surface which is located above the downstream side in the substrate take-out direction.

Therefore, since the bottom surface of the hooking recess 124 is formed as described above, the two rotating bodies 120 having the same diameter are disposed at the same height on the cover member 42, and the center of gravity of the cover member 42 is located between the centers of the two rotating bodies 120. In the lower part, and the cover member 42 is supported by the container body 41 in a state of being swayed around the horizontal axis, the storage container 2 is moved downward, and when the support body 123 is supported to support the two rotating bodies 120, the cover is first arranged. The rotating body 120 on the member side (the downstream side in the substrate take-out direction) first contacts the bottom of the recessed portion 124 The cover member 42 is moved away from the lower container body 41 with the engaging portion 115 as a fulcrum as the cover member 42 relatively moves upward relative to the container body 41.

Thereafter, the rotating body 120 on the container body side (the upstream side in the substrate take-out direction) of the array direction contacts the bottom surface of the hooking recess 124, and restricts the shaking of the cover member 42 such as the lower portion from the container body 41. Further, as the lid member 42 is further moved relative to the container body 41 with respect to the upper portion, the engaged portion 115 is separated from the engaging portion 14 of the container body 41, and the lid member 42 is detached from the container body 41. When the cover member 42 is detached from the container body 41, the support is supported by the bottom surface of the recessed portion 124 by the two rotating bodies 120, except for the restriction of the shaking of the cover member 42 such as the cover member 42 from the lower portion of the container body 41. Also, the rocking of the lid member 42 such as the lower portion of the lid member 42 close to the container body 41 is restricted, so that the shaking of the lid member 42 in the arrangement direction is suppressed, and the contact of the lid member 42 with the container body 41 can be prevented.

Further, the cover member 42 that is supported by the receiving support body 123 is configured to receive the supported portion 119 by the inclined surface of the engaging recess 124, and is inclined so as to be away from the container body 41 as it goes to the lower side, so that it is supported by the support member 119. When the container 123 is supported by the support cover member 42, when the storage container 2 is moved up and down between the cover release position P2 and the substrate transfer position P4, or when the storage container 2 is moved up and down at the substrate transfer position P4, the container body 41 is moved. It is less likely to rub against the cover member 42, and dust is less likely to be generated.

Incidentally, the engaging recess 124 corresponds to a restricting portion that restricts the setting of the cover member 42 to a side away from the side of the container body 41 by the weight of the cover member 42 when supported by the support body 123. Shake.

The both sides of the card-receiving recessed portion 124 in the substrate transfer direction are formed on the lower side, and the inclined surface of the inner side of the recessed portion in the substrate transfer direction is configured to be supported by the support portion 119 when it is engaged with the recessed portion 124. The portion 119 is apt to be snapped into the latching recess 124, and the support cover member 42 is easily received by the receiving support 123. Further, the inclination of the bottom surface of the hooking recess 124 is a gentle inclination of the side surface.

As shown in FIG. 25, the cover attaching and detaching mechanism 122 (supporting the support body 123) is configured to support the detached cover member 42 above the transfer target substrate 1 and to be adjacent to the substrate transfer device in the substrate transfer direction. The position of the substrate inlet and outlet port 44 of the storage container 2 of the P4, and the portion of the substrate take-out port 44 of the storage container 2 located at the substrate transfer position P4 that is separated from the transfer target substrate 1 by the cover member 42 that has been detached The cover member 42 that has been detached by the cover release member 122 closes the transfer target of the substrate take-out port 44 of the storage container 2 that moves up and down between the ascending-side substrate transfer position P5 and the descending-side substrate transfer position P6. The portion above the substrate 1 is also above.

In other words, the lid release position P2 is installed at the position where the lid member 42 of the storage container 2 located at the lid release position P2 and the floating air ejection body 71 of the substrate relay unit 70 are viewed in the vertical direction, and is mounted. The cover member 42 of the storage container 2 at the cover release position P2 is set to be above the substrate relay unit 70 at a position close to the substrate relay unit 70, so as not to hinder the transfer of the substrate 1 by the substrate take-out mechanism 73. Or the floating of the substrate 1 by the air ejection body 71 is floated.

Further, the cover member 42 attached to the storage container 2 at the cover release position P2 is above and below the floating air ejection body 71 with the substrate relay unit 70. Since the container conveyance mechanism 111 is moved downward from the lid release position P2 vertically downward, and the storage container 2 is positioned at the substrate transfer position P4, the lid member 42 can be detached from the container body 41, and The position of the container 2 at the substrate transfer position P4 is such that the interval between the container body 41 and the substrate relay unit 70 in the substrate transfer direction is smaller than the thickness of the cover member 42 in the substrate transfer direction (arrangement direction). The substrate relay unit 70 and the container body 41 of the storage container 2 are brought closer to each other in the substrate transfer direction. Thereby, the transfer of the container body 41 of the storage container 2 by the substrate relay unit 70 to the substrate can be easily performed.

When the container transport mechanism 111 transports the storage container 2 to the substrate transfer position P4 (a position equal to or higher than the rising side substrate transfer position P5 and the lower side substrate transfer position P5), the storage container is first made up by the stacker crane 7. (2) The horizontal direction of the downstream side of the substrate taking-out direction is shifted to the upper position P1 (see Fig. 24(a)), and the storage container 2 is moved downward from the upper position P1 to the intermediate position P3 (refer to Fig. 24(c)). In the cover disengagement position P2 during the downward movement (see FIG. 24(b)), the lid attachment/detachment mechanism 122 disengages the lid member 42 from the container body 41, and the storage container 2 that has removed the lid member 42 is detached. And the support is placed on the lifting mechanism 61. Thereafter, the storage container 2 from which the lid member 42 has been detached by the elevating mechanism 61 is moved downward from the intermediate position P3 to the substrate transfer position P4.

When the container transport mechanism 111 transports the storage container 2 from the substrate transfer position P4 (the position below the rising substrate transfer position P5 or the lower substrate transfer position P6), first, the cover member 42 is lifted by the elevating mechanism 61. The detached storage container 2 is moved upward from the substrate transfer position P4 to the intermediate position P3. After that, the stacking crane 7 is used to pick up the lift mechanism 61. In the container 2, the container 2 is moved upward from the intermediate position P3 to the upper position P1, and the lid is removed from the position P2 during the upward movement, and the lid member 42 is attached to the container body 41 by the lid attachment/detachment mechanism 122. The storage container 2 to which the lid member 42 is attached is horizontally moved from the upper position P1 toward the upstream side in the substrate take-out direction.

<<Second Other Embodiment>> Plate-shaped support type

Hereinafter, the second other embodiment will be described with reference to the drawings.

In addition, the second embodiment is configured in the same manner as the first embodiment except for the configuration of the support portion 119. Therefore, the same components as those of the first embodiment are denoted by the same reference numerals, and the description thereof will be omitted. A configuration different from that of the first other embodiment will be described.

As shown in Fig. 27, in the lid member 42, the supported portion 119 is provided in a state of being protruded from the lid body 116 to the outer side of the lateral width and the side of the container body on both sides of the lateral width of the upper end portion of the lid body 116.

The supported portion 119 is formed of a plate-like plate-like body 126, and a lower flat surface along the arrangement direction is formed on the lower surface thereof. Moreover, the engaged portion 115 is supported by the front end portion of the supported portion 119 on the container body side in a state of being protruded downward.

Further, the plate-shaped main body 126 is disposed above the center of gravity of the cover member 42 and is disposed in the arrangement direction from the container body side of the arrangement direction toward the center of gravity. Further, the shape of the engagement recessed portion 124 of the support body 123 is different from that of the first embodiment, and the point at which the bottom surface or the side surface forms an inclined surface is configured in the same manner as in the first embodiment.

Therefore, since the bottom surface of the hooking recess 124 forms an inclined surface as described above, the lower surface of the plate-like body 126 forms a horizontal flat surface along the arrangement direction, and the cover The member 42 is supported by the container body 41 in a state of being freely oscillatable around the horizontal axis. Therefore, when the support member 123 receives the support plate-like body 126, first, the cover member side in the direction in which the plate-like members 126 are arranged (the substrate take-out direction) A portion of the downstream side first contacts the bottom surface of the recessed portion 124, and as the cover member 42 relatively moves to the upper side of the container body 41, the cover member 42 is pivoted to the lower portion of the container body 41 with the engaging portion 115 as a fulcrum. Thereafter, a portion of the container body side (upstream side in the substrate take-out direction) in the direction in which the plate-like members 126 are arranged contacts the bottom surface of the recessed portion 124, and the above-described shaking of the cover member 42 is restricted. Then, as the cover member 42 is further moved upward relative to the container body 41, the engaged portion 115 is separated from the engaging portion 114 of the container body 41, and the cover member 42 is detached from the container body 41.

"3rd Other Embodiment" Cylinder Support Type

Hereinafter, the third embodiment will be described with reference to the drawings.

In addition, since the third embodiment is configured in the same manner as the first embodiment except for the configuration of the engaging portion 114, the supported portion 119, and the lid attaching and detaching mechanism 122, the same configuration as that of the first embodiment is described. The same reference numerals will be given, and the description will be omitted, and the configuration different from the first embodiment will be mainly described.

As shown in Fig. 28, the cover member 42 is provided with an engaging portion 114 that is engaged with an upper end portion of one end portion of the container body 41 from the obliquely upper side of the cover member side in the arrangement direction, and the engagement is supported by the engagement portion. The engaged portion 115 of the portion 114. That is, the cover member 42 is configured to move the cover member 42 obliquely downward with respect to the container body 41 in the direction in which the container body is arranged, so that the engaged portion 115 is engaged with the engaging portion 114, and the cover member 42 can be attached. Provided in the container body 41, by the cover member The cover 42 is moved obliquely upward with respect to the lid member 41 in the arrangement direction, and the engaged portion 115 is detached from the engaging portion 114, and the lid member 42 can be detached from the container body 41.

In this manner, the lid member 42 is configured to be detachable from the obliquely upper side of the lid member side in the arrangement direction from the obliquely upper side of the lid member side in the arrangement direction.

The engaging portion 114 of the container body 41 is formed into a circular shape in a plan view shape, and is recessed to a lower shape, and is formed at a position corresponding to the engaged portion 115 of the cover member 42 so as to be formed toward the upper side. The shape of the basin.

Therefore, as shown in Fig. 28(a), in a state in which the lid member 42 is attached to the container body 41, the engaging portion 115 is engaged with the engaging portion 114, and the lid member 42 is attached to the lid member 42. In the state of the container body 41, the cover member 42 is restricted from moving in the horizontal direction with respect to the container body 41.

Further, in a state in which the lid member 42 is attached to the container body 41, since the front end portion of the engaged portion 115 is formed in a spherical shape, the lid member 42 is attached to the container body 41, and the engaging portion 114 is used as the engaging portion 114. The center is rocking around the horizontal axis along the widthwise direction.

As shown in FIGS. 28 and 29, the cover member 42 is provided with a supported portion 128 that is recessed in the lateral width direction of each side of the cover main body 116 to the inner side in the lateral width direction.

The shape of the supported portion 128 will be described. The bottom portion of the supported portion 128 is formed in a cylindrical shape having the same diameter in the lateral width direction, and is formed to have a smaller diameter than the diameter of the front end portion of the spherical shape. The cylinder 129 will be described later. Further, the inlet side portion of the supported portion 128 forms the inner side and the bottom in the lateral width direction. The side portion has the same diameter, and the outer diameter of the outer side is smaller, and the front end portion 129a of the inserted cylinder 129 is guided to the bottom side portion.

Incidentally, the supported portions 128 are provided in the lateral direction of the cover main body 116 in the lateral direction, and are arranged in two in the vertical direction.

As shown in Fig. 29, the lid attaching and detaching mechanism 122 corresponds to the supported portion 128 of the lid member 42 of the container 2 located at the lid release position P2, and a pair of cylinders 129 (the pattern of one of the cylinders 129 is omitted) Two groups are arranged in the vertical direction. The pair of cylinders 129 are disposed in such a manner that the front end portions 129a of the respective rod portions oppose each other and move away from each other.

As shown in Fig. 29(b), the lid attaching and detaching mechanism 122 is configured to cause the pair of cylinders 129 to be actuated while the storage container 2 is in the lid release position P2, thereby bringing the front end portions 129a closer to each other. The cover member 42 is held by a pair of cylinders 129. As shown in Fig. 29(a), the pair of cylinders 129 are retracted, and the front end portions 129a are separated from each other, whereby the pair of cylinders 129 are released. The clamping of the cover member 42 is made.

That is, the front end portions 129a of the pair of cylinders 129 are equivalent to being movable away from each other in the lateral width direction at a position where the supporting cover members 42 are close to each other and the separated positions for releasing the support of the cover member 42 are separated from each other. One pair of supports.

Further, one of the two sets of the pair of cylinders 129 is arranged in the vertical direction and supported by the door type support frame 130, and the door type support frame 130 is provided so as to surround the horizontal position P1 and the substrate transfer position P4 to move up and down. Both sides of the lateral width direction and the upper side.

The arrangement position of the pair of cylinders 129 will be described, and a pair of cylinders 129 are provided. In the state in which the storage container 2 is located at the lid release position P2, the entrance side portion of the supported portion 128 is, in detail, the bottom side portion, in the arrangement direction, abutting on the obliquely upper side of the cover portion side in the arrangement direction. Resist part of the location.

Further, the inlet side portion of the support portion 128 is formed as described above, and as shown in Fig. 28, the front end portion 129a of the pair of cylinders 129 is moved closer to the state in which the storage container 2 is at the cover release position P2. The abutting portion of the cover member 42 abutting the front end portion 129a of the pair of cylinders 129 is a cover member for moving the cover member 42 to the arrangement direction due to the abutment of the front end portion 129a of the cylinder 129 The side is inclined upward, and the guide surface on the outer side of the container in the lateral width direction is formed at an obliquely upper side on the side of the cover member in the direction of the arrangement.

Therefore, as shown in Fig. 28, by the state in which the storage container 2 is located at the lid release position P2 (see Fig. 30(a)), the cylinder 129 is caused to move, and the front end portion 129a is moved to the close position. The front end portion 129a of the cylinder 129 is engaged with the supported portion 128, and the cover member 42 can be supported by the cylinder 129. Further, the cover member 42 is supported by the cylinder 129, and the front end portion 129a of the cylinder 129 and the abutted portion of the supported portion 128 act as a cam mechanism, and the cover member 42 is disposed in the arrangement direction with respect to the container body 41. The side member is moved obliquely upward, and the cover member 42 is detached from the container body 41.

Further, in a state where the storage container 2 is located at the lid release position P2, the cylinder 129 is retracted and the front end portion 129a is moved to the separated position, whereby the front end portion 129a of the cylinder 129 is supported from the supported portion 128. The detachment can release the support of the cover member 42 made by the cylinder 129. Further, by the cylinder 129 releasing the support of the cover member 42, the engaged portion 115 of the cover member 42 is guided along the inclination of the engaging portion 114 of the container body 41, and the cover member 42 is aligned with respect to the container body 41. The lid member 42 is attached to the container body 41 by moving obliquely downward from the container body side in the column direction.

Further, since the cover member 42 supported by the cylinder 129 is inclined obliquely upward with respect to the container body 41 in the arrangement direction of the cover member side, it is retracted to a position away from the container body 41, so that the cover member 42 is supported by the cylinder 129. When the storage container 2 is moved up and down between the lid release position P2 and the substrate transfer position P4 or when the storage container 2 is moved up and down at the substrate transfer position P4, the container body 41 and the lid member 42 are less likely to be rubbed, and dust is less likely to be generated.

When the container transporting mechanism 111 transports the storage container 2 to the substrate transfer position P4, first, the storage container 2 is horizontally moved to the cover removal position P2 by the stacking crane 7 toward the downstream side in the substrate take-out direction (see the 30th (a). After the drawing, the front end portion 129a of the pair of cylinders 129 is moved to the close position, and the lid member 42 is detached from the container body 41 stopped at the lid release position. After that, the storage container 2 from which the lid member 42 has been detached is moved downward from the lid release position P2 to the intermediate position P3 (see FIG. 30(b)), and the storage container 2 is detached and placed on the support container 2 Lifting mechanism 61. Thereafter, the storage container 2 is moved from the intermediate position P3 vertically downward to the substrate transfer position P4 by the elevating mechanism 61.

When the container transport mechanism 111 transports the storage container 2 from the substrate transfer position P4, first, the storage container 2 is moved upward from the substrate transfer position P4 from the substrate transfer position P4 to the intermediate position P3 by the elevating mechanism 61. Thereafter, the storage container on the elevating mechanism 61 is taken up by the stacker crane 7, and the storage container 2 is moved upward from the intermediate position P3 to the lid release position P2, and then the front end portions of the pair of cylinders 129 are moved to The cover member 42 is attached to the container body 41 at the separation position. Thereafter, the storage container 2 to which the cover member 42 is attached is removed from The cover release position P2 is horizontally moved toward the upstream side in the substrate take-out direction.

[Other Embodiments]

(1) In the above-described embodiment, the floating air ejection body 71 is configured to have the air ejection port 91 and the guide curved surface 92, and the auxiliary air ejection body is used in combination, and may be configured to have air ejected toward the upstream side in the substrate taking-out direction. The upstream air ejection port for ejecting air between the lower surface of the target substrate 1 and the upper surface of the support plate 45 on which the substrate 1 is supported is ejected, and the air is ejected upward, and the upper surface of the floating air ejecting body 71 and the substrate to be taken out are removed. The air is sprayed out above the air blown from the lower side of the first air jet, and the auxiliary air sprayed body is used in combination.

In addition, the floating air ejecting body 71 may be configured to have only the upstream air ejecting port, and the auxiliary air ejecting body may be used in combination, and the air may be ejected upward, and the upper surface of the floating air ejecting body 71 may be taken out. The auxiliary air ejection body that discharges the auxiliary air ejection port of the air between the lower surface of the substrate 1 is provided separately from the floating air ejection body 71.

(2) In the above embodiment, the supply air ejection body 72 has a reverse direction air ejection port 93 and a reverse direction guide curved surface 94, and is provided in the air ejection port of the floating air ejection body 71. Further, in the upstream of the substrate taking-out direction, the supply air ejecting body 72 may have the opposite-direction air guide opening 94, and may have only the opposite-direction air ejection port 93, and may be provided to be positioned for floating. The air ejection port 91 of the air ejecting body 71 is also located downstream of the substrate taking-out direction.

(3) In the above embodiment, the floating air ejection body 71 is provided such that the upper surface thereof is located below the upper surface of the supply air ejection body 72, and the floating air ejection body 71 may be provided on the upper surface thereof for supply and supply. Air spout The height of the upper surface of the body 72 may be set such that the upper surface thereof is located above the upper surface of the supply air ejection body 72.

(4) In the above-described embodiment, the air supply control unit (control device) H controls the operation of the air supply unit 95, and the discharge amount of the air ejected from the floating air ejecting body 71 is gradually supplied to the target supply amount. In addition, the operation of the air supply unit 95 can be controlled, and the amount of air discharged from the floating air ejecting body 71 can be quickly reached to the target supply amount.

(5) In the above-described embodiment, the placement support transport mechanism 88 is configured to be transported by the urging force imparting mechanism 53 in a state where the substrate 1 is supported in a non-contact state by the air supply type support mechanism 52, or may be configured to The air supply type support mechanism 52 is not provided, and is conveyed while the urging force imparting mechanism 53 is in contact with the support substrate 1.

(6) In the above embodiment, the elevating mechanism 61 that supports the storage container 2 to be lifted and lowered is provided, and the floating air ejecting body 71, the supply air ejecting body 72, and the substrate take-out and loading mechanism 73 may be provided to be lifted and lowered. Free lifting device. At this time, the lifting/lowering control unit (control device) H controls the operation of the lifting device, and the floating air ejection body 71, the supply air ejection body 72, and the substrate take-out loading mechanism 73 are located corresponding to the mounting support extraction target or The height of the support plate 45 of the target substrate 1 is accommodated.

(7) In the above-described embodiment, the take-out mechanism 73 is configured such that the take-out target substrate 1 can be taken out from the storage container 2 and the storage target substrate 1 can be stored in the storage container 2, or the take-out target substrate 1 can be configured only. In addition to the take-out mechanism 73, the storage container 2 has a storage mechanism for storing the storage target substrate 1 in the storage container 2.

(8) In the above embodiment, the container body 41 of the storage container 2 is configured such that the left and right sides and the upper and lower surfaces are sealed by the four-corner cylindrical shape forming the laterally open front and rear sides, and the left and right sides and the upper and lower sides cannot be closed. The air is discharged to the side, and the structure of the container body 41 of the storage container 2 is formed into a frame shape in which the front and rear faces, the upper and lower faces, and the left and right faces are respectively opened, and the right and left faces and the upper and lower faces are opened, and the left and right faces and the upper and lower faces are available. Exhaust air.

In the above embodiment, the storage container 2 has the cover member 42 and the fan filter unit 43, and either one or both of the cover member 42 and the fan filter unit 43 may not be provided.

(9) In the above embodiment, the projections 48 are formed by press working, and a paint such as ink may be ejected onto the upper surface of the support plate 45, and the projections 48 may be formed on the support plate 45 to form the projections 48. Further, the protrusions 48 may be formed by attaching the protrusion members of the individual members to the upper surface of the support substrate 47.

(10) In the above-described embodiment, the plurality of floating air ejecting bodies 71 and the plurality of supply air ejecting bodies 72 are alternately arranged in the lateral width direction in a state in which the floating air ejecting bodies 71 are located at both ends in the lateral width direction. In a row, the arrangement of the plurality of floating air ejection bodies 71 and the plurality of supply air ejection bodies 72 may be appropriately changed.

In other words, one or both of the floating air ejection body 71 and the supply air ejection body 72 may be arranged in a state of being continuous in two or three or more lateral width directions, or may be supplied. The air ejecting body 72 is arranged in a state of one end or both ends in the lateral width direction.

(11) In the above embodiment, the cover disengagement position P2 is set, and the stack is placed in a pile. When the storage container 2 moves up and down between the upper position P1 and the intermediate position P3 in the vertical direction, the storage container 2 passes the cover release position P2, and as shown in FIG. 31, the cover release position P2 can be set. When the storage container 2 moves up and down between the intermediate position P3 and the substrate transfer position P4 in the vertical direction by the elevating mechanism 61, the storage container 2 passes through the cover release position P2.

At this time, the elevating mechanism 61 corresponds to the support draping container 2, and the storage container 2 is moved downward from the upper position P1 above the cover disengagement position P2 to the support lowering stage of the substrate transfer position P4, and the stacker 7 is equivalent. The preliminary transport mechanism that transports the storage container 2 to the upper position P1 in order to mount the storage container 2 on the support lowering stage. Incidentally, the stacking crane 7 moves the storage container 2 in the horizontal direction to the downstream side in the substrate take-out direction, and horizontally moves the storage container 2 to the upper end position P0 above the upper position (refer to Fig. 31(a) After that, the storage container 2 is moved downward from the upper end position P0 to the upper position P1 (see FIG. 31(b)), and the storage container 2 is detached, and the storage container 2 is placed and supported by the elevating mechanism 61.

Incidentally, in the above-described embodiments, the stacking crane 7 may move the storage container 2 to the downstream position in the substrate take-out direction, and move down to the upper position P1.

(12) In the above embodiment, the stacker 7 is moved downwardly from the upper position P1 or the lid release position P2 to the intermediate position P3 from the upper position P1 or the lid release position P2, and the storage container 2 is vertically lowered from the intermediate position P3. The elevating mechanism 61 that has moved down to the substrate transfer position P4 constitutes the container transport mechanism 111, and the stacker 7 that can move the storage container 2 downward from the upper position P1 or the lid release position P2 to the substrate transfer position P4 can be moved. Structure The container transport mechanism 111 is formed.

(13) In the above embodiment, the cover detaching mechanism 122 is configured to be supported above the transfer target substrate 1 that has passed through the detached cover member 42, and is placed closer to the substrate transfer position P4 in the substrate transfer direction. The substrate of the container 2 is taken out of the inlet port 44, and the portion of the substrate take-out port 44 of the container 2 located at the substrate transfer position P4 is closed above the transfer target substrate 1 by the detachable cover member 42. The cover detaching mechanism 122 may be configured to be supported to be separated from the substrate take-out port 44 of the container 2 located at the substrate transfer position P4 or above the substrate transfer direction and the storage container 2 at the substrate transfer position P4. The position of the substrate take-out port 44 of the container 2 at the substrate transfer position P4 is not closed by the cover member 42 that has been detached.

Further, the fixing cover 121 that closes the portion of the substrate take-out port 44 of the storage container 2 located at the substrate transfer position P4 that is lower than the transfer target substrate 1 may be provided, or the fixed cover 121 may not be provided.

(14) In the above embodiment, the one end portion of the container body is configured to have an engaged portion recessed to the lower side, and the cover member is engaged with the upper end portion of the container body, and may be configured to be the container body. The lateral side portion has an engaged portion that protrudes to the laterally outer side, and the cover member is engaged with the lateral side portion of the container body.

(15) In the above embodiment, the substrate transfer unit 70 and the storage container 2 at the substrate transfer position P4 in the storage container 2 of the substrate transfer position P4 are moved up and down, and the transfer target substrate supporting the storage container 2 is supported. The support plate 45 of 1 is located at a height corresponding to the substrate relay unit 70, and can also lift and lower the substrate relay unit 70 in the storage container 2 of the substrate relay unit 70 and the substrate transfer position P4. The support plate 45 of the transfer target substrate 1 supporting the storage container 2 is moved to a height corresponding to the substrate relay unit.

(16) In the above-described embodiment, the shape of the substrate is a rectangular substrate such as a glass substrate used for a liquid crystal display or a plasma display, and may be a circular substrate such as a semiconductor wafer used for an IC wafer, and the like. The shape of the use or substrate.

(17) In the above-described embodiment, the two rotating bodies 120 constituting the supported portion 119 are formed to have the same size in diameter, and the rotational axes of the respective rotating bodies 120 are at the same height, and are arranged in the array direction. The heights of the lower ends of the two rotating bodies 120 are the same height, and the height of the lower end of the rotating body 120 on the side of the cover member may be lower than the height of the lower end of the rotating body 120 on the side of the container body.

In other words, the two rotating bodies 120 constituting the supported portion 119 can be formed to have the same size as shown in Fig. 32(a), and the rotating body 120 on the side of the cover member in the arrangement direction can be made larger. The state in which the heights of the rotating bodies 120 on the container body side in the direction of arrangement are low is arranged in the arrangement direction, and the rotating body on the side of the cover member in the arrangement direction may be arranged as shown in Fig. 32(b). 120 is formed in a state in which the large diameters of the rotating bodies on the container main body side in the arrangement direction are the same height and the rotation axes of the respective rotating bodies 120 are arranged in the arrangement direction.

In this configuration, when the storage container 2 is moved downward, and the support body 123 receives and supports the two rotating bodies 120, the rotating body 120 on the cover member side in the first direction first contacts the bottom surface of the engaging recess 124, and the cover member 42 is shaken. Thereafter, the rotating body 120 on the container body side in the direction of the arrangement contacts the bottom of the engaging recess 124 Face, and restrict the shaking of the cover member 42.

Incidentally, the shape of the bottom surface of the engaging recessed portion 124 may be such that the rotating body 120 on the cover member side in the arrangement direction contacts the rotating body 120 on the container main body side in the shape of the bottom surface of the recessed portion 124, and a horizontal surface or the like can be formed. The shape of the bottom surface of the recessed portion 124 is appropriately changed.

(18) In the above-described embodiments, the plurality of rotating bodies 120 are arranged in the arrangement direction in the arrangement direction, or the plate-shaped body 126 is provided on the cover member 42 in the arrangement direction. The support member 119 is provided on the cover member 42 in a state along the arrangement direction, and as shown in FIG. 33(a), the plurality of rotary bodies 120 may be arranged in the up-and-down direction in the cover member 42. As shown in Fig. 34(a), the plate-like member 126 is provided on the lid member 42 in the vertical direction, and the supported portion 119 is provided on the lid member 42 in the vertical direction.

When the support member 119 is placed on the cover member 42 in the up-and-down direction as described above, as shown in FIGS. 33(b) and 34(b), the entrance side portion of the recess 124 is engaged. The side surface on both sides of the substrate transfer direction is formed on the lower side, and the inclined surface on the inner side in the substrate transfer direction is formed, and the side surfaces of the bottom side portion of the substrate 124 in the substrate moving direction are formed from the inlet side. Part of the lower end is perpendicular to the vertical extension of the lead. When the lid member 42 is detached from the container body 41, the supported portion 119 is fitted to the bottom portion recessed vertically below the hooking recess 124, thereby restricting the inclination of the supported portion 119, thereby suppressing the inclination of the supported portion 119. The cover member 42 is rocked in the direction of arrangement.

Incidentally, although not shown in the drawings, the side surfaces of the bottom side portions of the substrate 124 in the transfer direction of the concave portion 124 are formed to be inclined from the lower end of the inlet side portion. When the cover member 42 is detached from the container body 41, the supported portion 119 is fitted to the bottom portion recessed obliquely below the locking recess 124 to receive the support cover of the support body 123. The member 42 is in an inclined posture away from the container body 41 toward the lower side.

(19) In the above-described embodiments, the support member 119 is supported by the engagement recess 124 in a state in which the cover member 42 in the arrangement direction is restricted from being shaken, or may be configured as one rotary body 120. The supported portion 119 or the like is configured so as not to restrict the state of the rocking of the cover member 42 along the arrangement direction, and the supporting portion 119 is received by the engaging recess 124.

Incidentally, in the above-described configuration, the rocking axis of the cover member 42 when the cover recessed portion 124 receives the supported support portion 119 is set to be larger than the cover when the cover member 42 is attached to the container body 41. The center of gravity of the member 42 is also close to the side of the cover member in the arrangement direction, whereby when the support portion 119 is supported by the snap-in recess 124, the cover member 42 can be inclined to the container body 41 as it goes to the lower side.

(20) In the above embodiment, the concave portion 50 is formed to extend from the central portion of the support predetermined region E to the outside of the support predetermined region, and the concave portion 50 may be formed to extend from the peripheral portion of the support predetermined region E to the support. The shape of the outside of the predetermined area does not form the recessed portion 50 in the center of the support predetermined area E.

(21) In the above-described embodiment, the concave portion 50 is formed in a shape extending linearly from the upstream end portion to the downstream end portion in the direction of the substrate storage container in the direction in which the predetermined region E is supported, and the concave portion 50 may be formed. The middle portion of the substrate housing direction supporting the predetermined area E is traversed to the upstream side end or from the middle The portion extending from the side to the downstream end portion may extend in a straight line shape, and the concave portion 50 may be formed in a curved shape.

(22) In the above embodiment, the support plate 45 is configured to have the recessed portion 50, and the cymbal is disposed in parallel between the floating air ejection bodies 71 in the lateral width direction, and the support plate 45 may have the concave portion 50. All or a part of the floating air ejection body 71 arranged in the lateral width direction is repeated in the substrate housing direction and is placed in position.

(23) In the above embodiment, the support substrate 47 and the plurality of protrusions 48 constitute the support plate 45, and the protrusions 48 are arranged side by side in the substrate accommodation direction and the lateral width direction, and the concave portion 50 is formed in the support plate 45. The support plate 45 may be formed by a support substrate on which the mounting surface 48a is formed, and the support substrate may be recessed to the lower side, and the recessed portion 50 may be formed in the support plate 45.

(24) In the above embodiment, the structure of the container main body 41 of the storage container 2 is formed into a rectangular tube shape in which the front and rear openings are in a horizontally inverted posture, and the left and right surfaces and the upper and lower surfaces are sealed, and the left and right sides and the upper side cannot be closed. The air is discharged from the lower side, and the structure of the container body 41 of the nano container 2 is formed into a frame shape in which the front and rear faces, the upper and lower faces, and the left and right faces are respectively opened, and the left and right faces, the upper and lower faces are opened, and the left and right faces and the upper and lower faces are available. The side discharges air.

In the above embodiment, the storage container 2 has the cover member 42 and the fan filter unit 43, and either one or both of the cover member 42 and the fan filter unit 43 may not be provided.

(25) In the above embodiment, the swinging guide member 89 that abuts against the guide gripping portion 82 constitutes the retracting operation mechanism, and the retracting operation mechanism 89 may be constructed. The moving body 87 that can move in the intersecting direction intersecting with the moving path is configured to move the moving body 87 in the intersecting direction, and the clamping portion 82 is retracted to the retracted position.

Further, in the above embodiment, the unwinding operation mechanism 89 is configured such that the nip portion 82 is retracted from the transport path of the substrate 1 to the retracted position of the lateral side, and the escaping operation mechanism 89 may be configured to be clipped. The holding portion 82 is retracted to a retracted position above or below the transport path of the substrate 1.

(26) In the above-described embodiment, the pinch transport mechanism 81 is configured to sandwich both end portions in the lateral width direction of the take-out target substrate 1, and the pinch transport mechanism 81 may be configured to sandwich the lateral width of the substrate 1 to be taken out. The central portion of the direction may be configured to sandwich both the central portion and both end portions in the lateral width direction of the substrate to be removed 1 .

In addition, the nip portion 82 is provided in a pair in the lateral width direction to constitute the nip conveying mechanism 81, and the nip portion 82 may be provided in one or three or more in the lateral width direction to constitute the nip conveying mechanism 81.

(27) In the above-described embodiment, the placement support transport mechanism 88 is configured to be supported to support both end portions in the lateral width direction of the take-out target substrate 1, and the placement support transport mechanism 88 may be configured to be mounted and supported. The central portion of the target substrate 1 in the lateral width direction may be configured to mount both the central portion and both end portions in the lateral width direction of the substrate to be taken out.

In addition, the support transport roller 57 and the nip transport roller 58 may be provided in a pair in the lateral width direction to constitute the placement support transport mechanism 88, and the support transport roller 57 and the nip transport roller 58 may be laterally disposed. One or three or more of the width directions are provided to constitute the mounting support transport mechanism 88.

(28) In the above-described embodiment, the placement support conveyance mechanism 88 has the nip conveyance roller 58, and the plurality of support conveyance rollers 57 can be appropriately attached to the take-up target substrate 1 at the relay position. In the case of potential energy, the placement support transport mechanism 88 may not have the transport roller 58 for clamping.

In other words, as shown in Fig. 35, only the support transport roller (the support transfer roller with the flange) 57 may be provided to constitute the placement support transport mechanism 88.

At this time, the placement support transport mechanism 88 is configured such that the downstream side portion of the substrate 1 is carried by a plurality of support transport rollers 57 located on the upstream side in the substrate take-up direction of a part of the plurality of support transport rollers 57. At the position where the support is placed, the transport system of the take-out target substrate 1 by the pinch transport mechanism 81 is transported so that a portion of the substrate 1 including the downstream end portion in the substrate take-out direction is located at the placement support transport mechanism 88. The upstream side portion of the substrate take-out direction is placed on the support by the plurality of support transfer rollers 57.

(29) In the above-described embodiment, the placement support transport mechanism 88 has a support transport roller 57 and a transport transport roller 58, and is configured as a roller type. The placement support transport mechanism 88 may have a lower surface of the substrate 2 that is in contact with the take-out target. The support conveyance belt and the belt for holding the target substrate 1 are sandwiched together with the support belt to form a belt type.

1‧‧‧Substrate

2‧‧‧ storage container

4‧‧‧ 收纳 department

5‧‧‧ article storage rack

6‧‧‧Substrate access department

7‧‧‧Head height crane

8‧‧‧Substrate transport device

13‧‧‧Clean space

14‧‧‧ plaid floor

15‧‧‧Air filter

16‧‧‧Intake chamber

17‧‧‧室

18‧‧‧ventilation fan

19‧‧‧Circular path

20‧‧‧External air intake flow path

21‧‧‧Prefilter

22‧‧‧Exhaust flow path

23‧‧‧Clean air circulation mechanism

24‧‧‧Substrate transfer area

25‧‧‧ next door

26‧‧‧Air fan filter unit

28‧‧‧ pillar

29‧‧‧Article Support

31‧‧‧Mobile frame

32‧‧‧ Lifting mast

33‧‧‧ lifting platform

34‧‧‧Article transfer device

35‧‧‧Rotating table

36‧‧‧Loading Department

37‧‧‧ linkage mechanism

41‧‧‧ container body

42‧‧‧Cover components

43‧‧‧Fan filter unit

44‧‧‧Substrate removal and entrance

45‧‧‧Support board

45a‧‧‧ front end

46‧‧‧Clocked frame

46a‧‧‧ link box

46b‧‧‧ card joint rod

46c‧‧‧Support rods

47‧‧‧Support substrate

48‧‧‧Protruding

48a‧‧‧Loading surface

49‧‧‧Restricted components

50‧‧‧ recessed

51‧‧‧Substrate conveyor

52‧‧‧Air supply support mechanism

53‧‧‧ Driving Forces and Institutions

54‧‧‧Blowers

55‧‧‧Wind board

56‧‧‧Air supply device for conveyor

57‧‧‧Support conveyor roller

58‧‧‧Clamping conveyor roller

59‧‧‧Transport motor

61‧‧‧ Lifting mechanism

62‧‧‧Moving motor

63‧‧‧Support table

64‧‧‧ Guide pillar

65‧‧‧ engaging members

66‧‧‧Becamped

70‧‧‧Substrate relay unit

71‧‧‧Floating air spout

72‧‧‧Supply air spout

73‧‧‧Substrate removal mechanism

74‧‧‧Travel frame

76‧‧‧Travel track

77‧‧‧Walking motor

78‧‧‧Walking wheels

81‧‧‧Clamping and transporting mechanism

82‧‧‧ gripping department

83‧‧‧Clamping action

84‧‧‧Support section

85‧‧‧Shake joint member

86‧‧‧Guide Roller

87‧‧‧Mobile

88‧‧‧Loading support transport mechanism

89‧‧‧Shake guide member

89a‧‧‧Guide ditch

91‧‧‧Air vent

92‧‧‧Guided surface

93‧‧‧Using air outlets in the opposite direction

94‧‧‧Use guide surface in the opposite direction

95‧‧‧Spray air supply device

96‧‧‧Connection setting board

101‧‧‧Substrate presence or absence detection sensor

102‧‧‧Container height detection sensor

103‧‧‧Receal position detection sensor

104‧‧‧Relay position detection sensor

105‧‧‧Deceleration position detection sensor

106‧‧‧Substrate exposure detection sensor

107‧‧‧Test board

111‧‧‧Container transport mechanism

114‧‧‧Clock Department

115‧‧‧Becamped

116‧‧‧ Cover body

117‧‧‧ tongue

118‧‧‧ spacers

119‧‧‧Supported Department

120‧‧‧Rotating body

121‧‧‧Fixed cover

122‧‧‧Cap loading and unloading mechanism

123‧‧‧Supporting support

124‧‧‧Snap into the recess

126‧‧‧ plate body

128‧‧‧Supported Department

129‧‧‧Cylinder

129a‧‧‧ front end

130‧‧‧Support frame

A‧‧‧ adjacent to the container

E‧‧‧Supported area

E1‧‧‧ gap

H‧‧‧Control device

P0‧‧‧Upper position

P1‧‧‧Upper position

P2‧‧‧ cover off position

P3‧‧‧ intermediate position

P4‧‧‧ substrate transfer position

P5‧‧‧Rising side substrate transfer position

P6‧‧‧Down side substrate transfer position

Figure 1 is a front view of a substrate processing apparatus.

Figure 2 is a side view of a substrate processing apparatus.

Figure 3 is a plan view of a substrate processing apparatus.

Fig. 4 is a side view of the substrate transfer device.

Fig. 5 is a perspective view of the storage container.

Figure 6 is a perspective view of the storage container.

Figures 7(a) to 7(b) show the support plate.

Figure 8 is a plan view of the substrate relay unit.

Fig. 9 is a side view showing the grip portion of the gripping position.

Figure 10 is a plan view showing the grip portion of the gripping position.

Fig. 11 is a side view showing the nip portion of the grip release position.

Fig. 12 is a plan view showing the nip portion of the grip release position.

Fig. 13 is a side view showing the nip portion at the end position of pressing.

Figure 14 is a side view showing the grip portion of the retracted position.

Figure 15 is a plan view showing the nip portion of the retracted position.

16(a) to 16(b) are side views showing the floating air ejection body and the supply air ejection body.

Fig. 17 is a perspective view showing the floating air ejection body and the supply air ejection body.

Figure 18 is a schematic diagram showing the detection sensor.

Figure 19 is a control block diagram.

Fig. 20 is a side view showing the substrate transfer apparatus of the first embodiment.

Fig. 21 is a perspective view showing the storage container of the first other embodiment.

Fig. 22 is a perspective view showing the cover member side of the storage container of the first embodiment.

23(a) to 23(b) are side views showing a state in which the cover member of the first other embodiment is supported.

Fig. 24(a) to Fig. 24(c) show the storage of the first other embodiment Side view of the lifting position of the container.

25(d) to 25(e) are side views showing the lifting position of the storage container according to the first embodiment.

Figs. 26(a) to 26(b) are perspective views showing a state in which the cover member of the first other embodiment is detached.

Figs. 27(a) to 27(b) are perspective views showing the state in which the cover member of the second embodiment is detached.

Figs. 28(a) to 28(b) are side views showing a state in which the cover member of the third embodiment is supported.

Figs. 29(a) to 29(b) are perspective views showing the state in which the cover member of the third embodiment is detached.

30(a) to 30(b) are side views showing the lifting position of the storage container according to the third embodiment.

31(a) to 31(c) are side views showing the lifting position of the storage container of the other embodiment (11).

32(a) to 32(b) are side views showing the supported portion of the other embodiment (17).

Figures 33(a) to 33(b) are side views showing a plurality of rotating bodies of the other embodiment (18).

Figs. 34(a) to 34(b) are views showing a plate-like body of another embodiment (18).

Fig. 35 is a side view showing the nip portion of the grip release position of the other embodiment (28).

1‧‧‧Substrate

45‧‧‧Support board

45a‧‧‧ front end

48‧‧‧Protruding

55‧‧‧Wind board

70‧‧‧Substrate relay unit

71‧‧‧Floating air spout

72‧‧‧Supply air spout

73‧‧‧Substrate removal mechanism

91‧‧‧Air vent

92‧‧‧Guided surface

93‧‧‧Using air outlets in the opposite direction

94‧‧‧Use guide surface in the opposite direction

96‧‧‧Connection setting board

Claims (22)

A substrate transporting apparatus is provided with a storage container that mounts a plurality of support plates supporting a rectangular substrate in parallel in a state of being vertically spaced apart; and a floating air ejection body is disposed on the plurality of support plates The container supporting the take-out target substrate taken out from the storage container is adjacent to the container adjacent to the downstream end of the substrate in the substrate take-out direction, and ejects air to the underside of the take-out substrate and supports the substrate. In the upper surface of the support plate, the take-out mechanism is configured such that the object to be taken out from the support plate is ejected by the air from the floating air ejecting body, and is passed over the floating air ejecting body. The substrate transporting device is provided with an auxiliary air ejecting body that ejects air between the upper surface of the floating air ejecting body and the lower surface of the take-out target substrate taken out by the take-out mechanism, and The auxiliary air ejection body has an air ejection port that ejects air upward. The substrate transfer apparatus according to claim 1, wherein the floating air ejection system is configured to have the air ejection port and the guide curved surface, and the guiding curved surface forms an upstream end portion of the substrate from the air ejection port. Extending to the shape of the upper side, the air ejected from the air ejection port upward is guided to be sprayed along the floating air The upper side of the body is placed in the horizontal direction toward the storage container side, and the auxiliary air ejection body is used in combination. The substrate transfer apparatus of the second aspect of the invention is provided with a supply air discharge body that supplies air to a position adjacent to the container and downstream of the air discharge port in the substrate take-out direction. The substrate transporting apparatus according to the third aspect of the invention, wherein the floating air ejecting body is provided in parallel in a state in which a lateral width direction intersecting with a substrate taking-out direction is arranged in parallel, and the supply air ejecting system is configured to have The air ejection port and the opposite direction guide curved surface are used in the opposite direction, and the reverse direction air ejection port is disposed between the floating air ejection body in the lateral width direction, and the air is ejected upward, and the reverse direction guide The guide surface is located on the upper side of the air ejection port in the opposite direction and on the downstream side in the substrate take-out direction, and the air ejected upward from the air ejection port in the opposite direction is guided to be ejected along the supply air. Above the body, the person flows in the horizontal direction toward the side opposite to the side of the storage container. The substrate transfer apparatus of claim 4, wherein the floating air ejection body is disposed such that an upper surface thereof is located below the upper surface of the supply air ejection body. The substrate transfer apparatus according to any one of the first to fifth aspects of the present invention, comprising: an air supply device that adjusts a supply amount of air supplied to the floating air ejection body; and an air supply control The mechanism controls the air supply device In the operation, the amount of the air ejected from the floating air ejecting body is gradually increased toward the target supply amount. The substrate transfer apparatus according to any one of claims 1 to 5, further comprising: a support transport mechanism that receives the substrate taken out by the take-out mechanism and supplies air to a lower surface of the received substrate; The substrate is conveyed in a state of being supported in a non-contact state. The substrate transporting apparatus according to any one of the first aspect of the present invention, wherein the take-out mechanism is configured to be in a state in which the storage target substrate accommodated in the storage container passes over the floating air ejection body, and The air is ejected from the floating air ejecting body and floated from the support plate in a state of being floated in the storage container. The substrate transfer apparatus according to any one of the first aspect of the invention, wherein the storage container has a cylindrical shape, and the substrate take-out opening is formed at one end portion in a state of being horizontally opened, and accommodates a plurality of substrates therein. The container body is configured to close the opening of the cover member in a state in which the container body is detachably attached to the container body, and a cover detaching mechanism for detaching the cover member from the storage container is provided. The substrate transfer apparatus according to claim 9, wherein the floating air ejection body, the take-out mechanism, and the auxiliary air ejection system are in a positionally fixed state, and the substrate transfer apparatus is provided to support the storage container to be liter And a lifting and lowering control mechanism for controlling the movement of the lifting mechanism in response to the height of the lifting of the floating air ejection body and the removal mechanism for supporting the support plate on which the substrate to be taken out is placed The cover detaching mechanism is configured to support the detached cover member above the take-out substrate, and to close the storage container with the cover member at a position where the substrate take-out direction is close to the opening of the storage container a portion of the opening above the extraction target substrate, the fixing cover is disposed at a position lower than the extraction target substrate in a positionally fixed state, and closes the position of the opening of the storage container in the substrate take-out direction The portion of the opening of the storage container that is lower than the substrate to be taken out of the substrate. The substrate transfer apparatus of the first aspect of the invention, wherein the take-out mechanism is configured to include a pinch transport mechanism that mounts a substrate taking-out direction of the substrate to be taken out, and a mounting support transport mechanism The nip portion of the downstream end portion is moved along the movement path in the direction in which the substrate is taken out, and the substrate to be taken out is transported from a storage position in which the entire extraction target substrate is located in the storage container to a part of the substrate to be taken out. In the relay position outside the storage container, the placement support transport mechanism mounts the take-out target substrate that has been transported to the relay position, and transports the take-out target substrate from the relay position to the take-out target substrate. All of the removal locations outside the storage container, The nip conveying mechanism includes a retracting operation mechanism that releases the nip portion that sandwiches the extraction target substrate while the extraction target substrate has been conveyed to the relay position. It is moved to the retracted position which is retracted from the conveyance path of the above-mentioned take-out substrate conveyed by the above-mentioned placement support conveyance mechanism. The substrate transfer apparatus of claim 11, wherein the nip portion is supported by a movable body that is freely movable along the movement path in a state of being oscillating around a longitudinal axis, and the detachment operation mechanism is configured by a rocking guide member. The rocking guiding member abuts against the clamping portion by moving the moving body along the moving path, and the clamping portion is rocked around the longitudinal axis to guide the lateral direction intersecting with the substrate taking-out direction. The side other than the width direction, thereby being retracted to the aforementioned retracted position. The substrate transfer apparatus according to claim 11 or 12, wherein the placement support transport mechanism has a plurality of support transport rollers that are placed in parallel with the substrate take-out direction and that are in contact with the lower surface of the substrate to be taken out, and the contact is located in the relay. The upper surface of the object to be taken out of the position is placed in cooperation with the support conveyance roller, and the conveyance roller for holding the substrate to be taken out is nipped. The substrate transfer apparatus according to claim 11 or 12, wherein the pinch transport mechanism is configured to sandwich both end portions of the take-out substrate in a lateral width direction intersecting the substrate take-out direction, and the lateral width is The pair of nip portions are provided in the direction, and the placement support transport mechanism is configured to mount both end portions in the lateral width direction of the substrate to be taken out. The substrate transporting apparatus according to any one of claims 1, 2, 3, 4, 5, 11, and 12, wherein: the lifting mechanism is configured to support the storage container to be lifted and lowered; and the lifting control In the mechanism, the support plate that supports the substrate to be taken out is placed at a height corresponding to the extraction air ejection body and the removal mechanism, and the actuator of the lifting mechanism is controlled. The substrate transfer apparatus according to claim 11 or 12, wherein the placement support transport mechanism is configured to transport the storage target substrate stored in the storage container from the take-out position to the relay position, and the nip transport mechanism The nip portion is configured to move from the upstream side to the downstream side in the substrate loading direction along the movement path, and the storage target substrate that has been transported to the relay position by the placement support transport mechanism is clamped as described above The front end portion is pressed from the relay position to the storage position in a state where the front end portion is pressed. The substrate transfer apparatus according to claim 1, wherein the floating air ejection body is switchable between a discharge state of the discharge air and a discharge stop state in which the discharge of the air is stopped, and is provided with the floating air ejection body. a storage mechanism that is stored in the storage container in a state in which the storage target substrate of the storage container is placed on the support plate on which the substrate is supported, and the support plate has a higher load than the support substrate. Mounting surface A recessed portion that is recessed to the lower side and that extends inside and outside the support predetermined region of the support substrate. The substrate transfer apparatus of claim 17, wherein the concave portion has a shape extending from a central portion of the support predetermined region to an outer portion of the support predetermined region. The substrate transfer apparatus according to claim 17 or 18, wherein the recessed portion has a shape that linearly extends from an upstream end portion to a downstream end portion of the substrate accommodation direction of the support predetermined region. The substrate transfer apparatus according to claim 17 or 18, wherein the floating air ejecting body is arranged side by side in a lateral width direction intersecting with the substrate taking-out direction, and the support plate has the concave portion. The crucible is located between the floating air ejection bodies arranged side by side in the lateral width direction. The substrate transfer apparatus according to claim 17 or 18, wherein the support plate has a support substrate having a flat upper surface, and a plurality of protrusions having the mounting surface and projecting from the upper surface of the support substrate to the upper portion. Further, the concave portion is formed by arranging the protruding portion in the substrate housing direction and the lateral width direction intersecting the support substrate in parallel. The substrate transfer apparatus according to claim 17 or 18, wherein: the elevating mechanism is configured to support the storage container to be lifted and lowered; and the elevating control mechanism is configured to mount the support target substrate The support plate is located corresponding to the aforementioned floating air ejection body and The storage height of the storage mechanism controls the actuator of the lifting mechanism.