JP2010064887A - Substrate conveyance facility - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a substrate conveyance facility, capable of rapidly storing a substrate of a storage object in a storage container. <P>SOLUTION: The substrate conveyance facility includes: a storage container in which a plurality of support plates 45 which supports a rectangular substrate thereon is juxtaposed at vertical intervals; a floating air ejection body which ejects air to between the lower surface of the substrate of the storage object to be housed in the storage container 2 and the upper surface of the support plate 45 which supports this substrate thereon, the ejection body being switchable between an ejection state in which the air is ejected and an ejection stop state in which the ejection of air is stopped; and a storage means which stores the substrate of the storage object, which is floated by ejection of air by the floating air ejection body, in the storage container so as to be situated on the support plate 45 which supports the substrate thereon. The support plate 45 includes a recessed part 50 recessed down over a mount surface 48a on which the substrate is mounted and supported, the recessed part extending to the inside and outside of a support scheduled area E in which the substrate is to be mounted and supported. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to a storage container in which a plurality of support plates for mounting and supporting a rectangular substrate are arranged in parallel in a vertically spaced manner, a lower surface of a storage target substrate stored in the storage container, and the substrate A floating air jetting body that can be switched between a jetting state in which air is blown and the jetting of air is stopped and a jetting stop state in which the jetting of air is stopped. The present invention relates to a substrate transfer facility provided with storage means for storing the substrate to be stored, which has been levitated due to the ejection of air by the air ejector for use, in the storage container so as to be positioned on a support plate for mounting and supporting the substrate. .

Such a substrate transport facility is a storage container that can store a rectangular substrate such as a glass substrate used for a liquid crystal display or a plasma display on a support plate arranged in parallel in the vertical direction with a space therebetween. On the other hand, since the storage target substrate that is levitated by the ejection of air from the levitation air jetting body is stored by the storage means so as to be positioned on the support plate on which the substrate is placed and supported, The substrate can be stored in the storage container with little damage due to rubbing or the like.
In such a substrate transport facility, conventionally, the support plate has a flat upper surface, and the substrate to be stored is configured to be placed and supported directly on the flat upper surface of the support plate. After storing the substrate to be stored in the storage means and positioning the substrate to be stored on the support plate, the air jetting body for levitation is switched to the ejection stop state to stop the ejection of air and The substrate is placed and supported by a support plate (see, for example, Patent Document 1).

JP 2006-315850 A

  However, in the above-described conventional substrate transport equipment, since the upper surface of the support plate is formed flat, even if the floating air ejection body is switched to the ejection stop state, the substrate to be stored and the substrate are placed and supported. Air stays between the support plate and it takes time until the substrate to be stored can be placed and supported by the support plate. Therefore, in the conventional substrate transfer facility, the substrate to be stored cannot be quickly stored in the storage container.

  The present invention has been made in view of the above circumstances, and an object thereof is to provide a substrate transport facility that can quickly store a substrate to be stored in a storage container.

A substrate transport facility according to the present invention includes a storage container in which a plurality of support plates for mounting and supporting a rectangular substrate are arranged in parallel in a state of being spaced apart in the vertical direction, and a substrate to be stored that is stored in the storage container A floating air jet that can be switched between a jetting state in which air is blown and blown out between the lower surface of the substrate and the upper surface of the support plate on which the substrate is placed and supported, and an ejection stopped state in which the jetting of air is stopped And a storage means for storing in the storage container the substrate to be stored that has been levitated by the ejection of air from the levitation air ejector so as to be positioned on a support plate on which the substrate is placed and supported. The first characteristic configuration is
The support plate is provided with a recessed portion that is recessed downward from a mounting surface for mounting and supporting the substrate and extends inside and outside a planned support region for mounting and supporting the substrate.

That is, since the support plate is provided with a recessed portion that is recessed below the mounting surface for mounting and supporting the substrate and extends in and out of the planned support region for mounting and supporting the substrate, the substrate to be stored and this It is possible to positively exhaust the air between the support plate and the support plate to the outside through the recessed portion. Therefore, when the levitation air ejector is switched to the ejection stop state, the air between the substrate to be stored and the support plate on which it is placed and supported is quickly exhausted to the outside so that the substrate to be stored is It can be placed and supported on the placing surface.
Therefore, it has become possible to provide a substrate transport facility that can quickly store a substrate to be stored in a storage container.

  The 2nd characteristic structure of the board | substrate conveyance equipment concerning this invention is a point in which the said recessed part is formed in the shape extended in the 1st characteristic structure from the center part of the said support plan area | region to the exterior of the said plan support area | region. .

That is, since the recessed portion is formed in a shape extending from the central portion of the planned support region to the outside of the planned support region, the air below the central portion of the storage target substrate can be exhausted outward through the recessed portion. . Thus, the air below the central part of the substrate to be stored in which the air tends to stay can be positively exhausted outward, so that the air between the substrate to be stored and the support plate on which the substrate is placed and supported Can be efficiently exhausted outward. Therefore, the substrate to be stored can be quickly stored in the storage container.
Therefore, it has become possible to provide a substrate transport facility that can quickly store a substrate to be stored in a storage container.

  According to a third characteristic configuration of the substrate transport facility according to the present invention, in the first or second characteristic configuration, the recessed portion is a straight line extending from an upstream end to a downstream end in the substrate storage direction in the planned support region. It is in the point formed in the shape extended in a shape.

That is, since the recessed portion is formed in a shape extending linearly from the upstream end in the substrate storage direction to the downstream end in the planned support area, the downstream end from the upstream end in the substrate storage direction is formed. The air between the substrate to be stored over the entire portion and the support plate on which the substrate is placed and supported can be exhausted outward. Thereby, the air between the substrate to be stored and the support plate on which the substrate is placed and supported can be efficiently and more quickly exhausted outward. In addition, when air is ejected between the lower surface of the substrate to be stored and the upper surface of the support plate on which the substrate is placed and supported, the recess is used to move the upstream end portion to the downstream end portion in the substrate storing direction. By the flow, air can be accurately supplied over the entire area between the lower surface of the substrate to be stored and the upper surface of the support plate for mounting and supporting the substrate. It becomes easy to store the substrate stably.
Accordingly, it has become possible to provide an article transport facility that can quickly store a substrate to be stored in a storage container while easily storing the substrate by the storing means.

  According to a fourth feature configuration of the substrate transport facility according to the present invention, in any one of the first to third feature configurations, the floating air jetting body is spaced apart in a lateral direction intersecting the substrate accommodation direction. The support plate is provided with the recessed portion so as to be positioned between the floating air jetting bodies arranged in parallel in the horizontal width direction.

That is, since the support plate is configured to have a recessed portion so as to be positioned between the floating air ejectors arranged side by side in the width direction, the bottom surface of the substrate to be stored in the floating air ejector The flow of air blown between the upper surface of the support plate for mounting and supporting the substrate is not easily disturbed by the portion of the support plate forming the mounting portion, and is downstream from the upstream end in the substrate storage direction. Air can be properly flowed over the end. Therefore, it becomes easier to stably store the substrate by the storing means.
Accordingly, it has become possible to provide an article transport facility that can more stably and stably store the substrate by the storing means.

  According to a fifth characteristic configuration of the substrate transport facility according to the present invention, in any one of the first to fourth characteristic configurations, the support plate includes a support substrate having a flat upper surface and the mounting surface, and the support. And a plurality of protrusions protruding upward from the upper surface of the substrate, and the protrusions are arranged on the support substrate in parallel with the substrate storage direction and the lateral width direction intersecting with the substrate. It is in the point where the entrance is formed.

That is, the support plate is configured to include a support substrate having a flat upper surface and a plurality of protrusions that are provided with the mounting surface and protrude upward from the upper surface of the support substrate, and the protrusions are formed on the support substrate. Since the recessed portion is formed by arranging in parallel in the storage direction and the lateral width direction, the recessed portion can be formed so that the recessed portion along the substrate storage direction and the recessed portion along the width direction intersect each other. it can. Therefore, it is possible to form a recessed portion capable of exhausting air outwardly in both the substrate storage direction and the horizontal width direction, while having a simple configuration in which the support substrate includes a plurality of protrusions. The air between the lower surface of the substrate and the upper surface of the support plate on which the substrate is placed and supported can be quickly exhausted outward.
Therefore, it has become possible to provide a substrate transport facility that can quickly store the substrate to be stored in the storage container while easily forming the recessed portion in the support plate.

  A sixth characteristic configuration of the substrate transfer facility according to the present invention is any one of the first to fifth characteristic configurations, wherein the raising and lowering means for supporting the storage container so as to be raised and lowered, and placing and supporting the substrate to be stored. There is provided an elevating control means for controlling the operation of the elevating means so as to position the support plate at a storage height corresponding to the floating air ejector and the storage means.

That is, the storage container is moved up and down by the lifting and lowering means, and any one of the plurality of support plates is placed and supported on the support plate by being positioned at the storage height corresponding to the floating air jetting body and the storage unit. Thus, since the substrate to be stored can be stored, the substrate to be stored can be mounted and supported at random on the plurality of support plates.
In addition, since it is not necessary to move up and down the levitation air jetting body and the storage means, which are more complicated than the storage container, by raising and lowering the storage container with the lifting means, the support plate, the levitation air jetting body and the takeout means Can be easily aligned in the height direction.
Accordingly, the substrate to be stored can be placed and supported at random with respect to the plurality of support plates, and the alignment in the height direction between the support plate, the flying air ejector and the take-out means can be easily performed. It has come to be able to provide a substrate transport equipment that can.

Hereinafter, embodiments of the present invention will be described with reference to the drawings.
As shown in FIG. 1, the substrate processing equipment includes an article storage shelf 5 including a plurality of storage units 4 that store storage containers 2 that hold a plurality of rectangular substrates 1 in a state where they are arranged in the vertical direction at intervals. And a stacker crane 7 as a storage container transport device for transporting the storage container 2 between the storage section 4 and the substrate input / output section 6, and taking out the substrates 1 one by one from the storage container 2 located in the substrate input / output section 6. The apparatus includes a substrate transfer apparatus 8 that transfers a substrate 1 to the substrate container 1 at a time. Here, the substrate transfer device 8 corresponds to the substrate transfer facility according to the present invention.
In this substrate processing equipment, while storing the storage container 2 in the article storage shelf 5, the stored storage container 2 is transferred to the substrate input / output unit 6, and the substrate is transferred from the storage container 2 transferred to the substrate input / output unit 6 to the substrate. 1 is taken out in units of one sheet, transported to a substrate processing apparatus and subjected to a predetermined process, and the substrate 1 on which the predetermined process has been performed is stored in a unit of one sheet in a storage container 2 located in the substrate loading / unloading unit 6 I try to let them.

As shown in FIGS. 1 and 2, the article processing facility is provided with downflow type purified air ventilation means 23 for allowing purified air to flow from the ceiling to the floor in the clean space 13. In the clean space 13, a storage shelf 5, a stacker crane 7, and a substrate transfer device 8 are provided.
The purified air ventilation means 23 will be described below. As shown in FIG. 2, the purified air ventilation means 23 has a floor portion of the clean space 13 formed of a porous grating floor 14, and a ceiling portion of the clean space 13. An air filter 15 formed of a HEPA filter or the like, and an intake chamber 16 formed on the lower side of the grating floor 14 and a chamber chamber 17 formed on the upper side of the air filter 15 are connected to the ventilation fan 18 and the prefilter. The air in the clean space 13 is circulated while being cleaned by the pre-filter 21 and the air filter 15, and the purified air is ventilated from the ceiling to the floor. It is configured as follows. The circulation path 19 is connected to the outside air intake passage 20 upstream of the ventilation fan 18 and is connected to the exhaust passage 22 downstream of the ventilation fan 18, and is circulated by the purified air ventilation means 23. A part of the air in the clean space 13 is exchanged with outside air.

  In addition, as shown in FIG. 1, the substrate transfer area 24 for transferring the substrate 1 between the storage container 2 of the substrate loading / unloading unit 6 and the substrate processing apparatus by the substrate transfer device 8 has an end on the article storage shelf 5 side. Is provided, and a partition wall 25 is provided to cover the substrate transfer space so that the end on the substrate processing apparatus side communicates with the substrate processing apparatus, and a plurality of area fan filter units 26 are provided on the ceiling of the partition wall 25. It has been. Then, the purified air obtained by further purifying the purified air in the clean space 13 is ventilated from the ceiling side to the floor side by the plurality of area fan filter units 26, so that the substrate transfer space covered by the partition wall 25 is formed. It is a downflow space.

As shown in FIGS. 1 and 2, each of the article storage shelves 5 is configured such that a column set 28 composed of a pair of front and rear columns arranged in the front-rear direction of the shelf is erected side by side in the horizontal direction of the shelf. A plurality of article support portions 29 are arranged in a vertical direction across a pair of front and rear columns, and the storage portions 4 for storing the storage container 2 in a state where the storage container 2 is placed and supported by the article support portions 29 are arranged vertically and horizontally. A plurality are provided in a state where Incidentally, a pair of article storage shelves 5 are provided on the grating floor 14 so as to face each other.
A part of the plurality of storage units 4 provided on the article storage shelf 5 is a substrate loading / unloading unit 6. When the explanation is added, as shown in FIG. 3, a part of the storage units 4 among the plurality of storage units 4 at the lowest stage provided in the article storage shelf 5 is stored in the storage container 2 stored in the storage unit 4. On the other hand, the substrate transporting device 8 can take out the substrates 2 one by one or store them one by one through the back side of the article storage shelf 5.

  As shown in FIGS. 1 and 2, the stacker crane 7 includes a moving carriage 31 that travels and moves along a longitudinal direction of a moving space formed between a pair of storage shelves 5 provided in a state of facing each other. The elevator 33 is supported by a pair of elevator masts 32 erected on the movable carriage 31 and arranged in the direction of carriage, and the container is supported by the elevator 33 between the storage unit 4 and itself. 2 and a fork-type article transfer device 34 that can transfer the substrate 2. The substrate loading / unloading unit 6 is operated by the horizontal movement of the movable carriage 31, the elevation movement of the elevation platform 33, and the operation of the article transfer device 34. It is comprised so that the storage container 2 may be conveyed between the storage part 4 and other storage parts 4 as this.

  As shown in FIG. 3, the article transfer device 34 has a swivel base 35 that can swivel around a vertical axis, and a link that supports a placing portion 36 provided on the swivel base 35 so as to be movable in and out. The mechanism 37 is configured. The article transfer device 34 can be switched between a state in which the article transfer device 34 is retracted on the lifting platform 33 by extension and contraction of the link mechanism 37 and a state in which the article transfer device 34 is protruded to the storage unit 4 side. In addition, the direction of the article transfer device 34 can be changed by 180 degrees by turning the turntable 35.

As shown in FIG. 3 and the like, the substrate transfer apparatus 8 which is a substrate transfer facility according to the present invention transfers the substrates 1 one by one between the storage container 2 located in the substrate input / output unit 6 and the substrate transfer conveyor 51. It is configured as follows. The substrate transport device 8 includes a storage container 2 in which a plurality of support plates 45 for mounting and supporting the substrate 1 are arranged in parallel in a state of being spaced apart in the vertical direction, and a substrate transport conveyor for mounting and transporting the substrate 1. 51, a substrate relay unit 70 for taking out the substrates 1 from the storage container 2 one by one and delivering them to the substrate transport conveyor 51 and storing the substrates 1 received from the substrate transport conveyor 51 one by one in the storage container 2, and a substrate input / output unit Elevating means 61 for supporting the storage container 2 positioned at 6 so as to be movable up and down, and a control device H (see FIG. 19) for controlling the operation of the substrate transfer device 8 are provided.
Next, the substrate transfer device 8 will be described in detail. The downstream side in the substrate take-out direction (upstream side in the substrate storage direction) is the front side, and the upstream side in the substrate take-out direction (downstream side in the substrate storage direction) is the rear side. The direction along the substrate take-out direction (substrate storage direction) is referred to as the front-rear direction, and the direction intersecting this direction may be described as the lateral width direction.

[Storage container]
As shown in FIGS. 5 and 6, the storage container 2 has a container body 41 formed in a rectangular tube shape in a sideways posture with front and rear surfaces opened, and the front opening is closed at the front end of the container body 41. The lid member 42 provided in a state, the fan filter unit 43 provided in a state in which the opening of the rear surface is closed at the rear end portion of the container body 41, and the storage container 2 with a space in the vertical direction. A plurality of support plates 45 arranged side by side are provided.

  The container body 41 is formed in a rectangular cylinder shape in a sideways posture in which the front and rear surfaces are opened by forming a frame in a rectangular parallelepiped shape with a frame material and closing the openings on the left and right surfaces and the upper and lower surfaces with plate materials. Yes. The opening on the front surface of the container body 41 is used as a substrate loading / unloading port 44 so that the substrate 1 can be loaded into and unloaded from the container body 41 through the substrate loading / unloading port 44.

As shown in FIG. 5, the lid member 42 is formed by a frame material for lid formation so that an opening having the same shape as the substrate loading / unloading port 44 is formed, and the opening is closed by a transparent plate material. Has been.
The lid member 42 is provided with an engaged frame 46 that engages with the container body 41 from above. That is, the lid member 42 can attach the lid member 42 to the container body 41 by moving the lid member 42 downward relative to the container body 41 and engaging the engaged frame 46 with the container body 41. The lid member 42 can be detached from the container main body 41 by moving the lid member 42 upward with respect to the container main body 41.
The lid member 42 is formed in a shape in which a gap is formed between the lid body 42 and the container body 41 when the lid member 42 is attached to the container body 41, and is introduced into the storage container 2 by the fan filter unit 43. The air is discharged outside through a gap formed between the container body 41 and the lid member 42.

As shown in FIG. 6, the fan filter unit 43 is detachably attached to the rear end portion of the container main body 41 so as to ventilate from the opening on the rear surface of the container main body 41 toward the substrate loading / unloading port 44.
Although detailed description is omitted, the fan filter unit 43 includes a power receiving unit and a battery that stores electric power supplied to the power receiving unit. The fan filter unit 43 includes the storage container 2 and a storage unit. 4 is operated by the power supplied to the power receiving unit from the power supply unit provided in each of the storage units 4, and the power receiving unit when the storage container 2 is transported by the stacker crane 7. In the state where power is not supplied to the power receiving unit away from the power feeding unit, the power receiving unit is configured to operate with the power stored in the battery.

As shown in FIG. 7, each of the plurality of support plates 45 includes a support substrate 47 formed with a plurality of protrusions 48 protruding upward by pressing and a lateral width direction and a rear side of the substrate 1 placed and supported. And a regulating member 49 that regulates the movement of. The upper surface of the protrusion 48 is formed on a horizontal plane and serves as a mounting surface 48 a for mounting and supporting the substrate 1.
Further, as shown in FIG. 9 and the like, each of the plurality of support plates 45 is formed in an inclined plane in which the upper surface of the front end portion 45a is positioned downward toward the front side, and a portion other than the front end portion 45a and the projecting portion 48. Is formed in a horizontal plane, and a planned support area E for placing and supporting the substrate 1 is set from the front end portion 45a to the other portions.
Incidentally, the protrusion 48 is formed in a circular shape having a diameter of 10 mm and a thickness of 0.2 mm that is thinner than the thickness of the glass substrate 1.

Each of the plurality of support plates 45 is provided with a recessed portion 50 by arranging the protrusions 48 on the support substrate 47 in the front-rear direction and the lateral width direction.
In other words, a portion of the support plate 45 where the protrusion 48 is not formed is recessed below the placement surface 48a. By arranging the projections 48 side by side on the support substrate 47 as described above, the recesses 50 that are recessed below the placement surface 48a are formed in a lattice shape, and the recesses 50 thus formed are formed. Is formed in a shape extending from the central portion of the planned support region E to the outside of the planned support region E, and in a shape extending linearly from the front end portion to the rear end portion in the planned support region E. By supplying air between the upper surface of the support plate 45 and the lower surface of the substrate 1, the substrate 1 floats from the support plate 45, but the space between the upper surface of the support plate 45 and the lower surface of the substrate 1 is increased. When the supply of air is stopped, for example, as indicated by a dotted arrow in FIG. 7, the air existing between the support plate 45 and the substrate 1 moves along the recessed portion 50 in the planned support region E. It will flow to the outside. As a result, air existing between the support plate 45 and the substrate 1 can be quickly discharged, and the substrate 1 can be stably placed and supported by the protrusions 48.

  The restriction members 49 are arranged side by side in the front-rear direction at both left and right ends of the support substrate 47 so as to be located on both the left and right sides of the planned support area E, and are supported on the rear side of the planned support area E. The rear end portion of the substrate 47 is arranged in parallel in the width direction.

[Elevating means]
As shown in FIGS. 3 and 4, the elevating means 61 is provided in the substrate loading / unloading section 6, and is a pair of left and right sides that move up and down by the elevating motor 62 (see FIG. 19) to place and support the storage container 2. And a pair of left and right guide columns 64 that guide and support the pair of left and right support tables 63 so as to be movable up and down separately.
As shown in FIG. 4, in the substrate entrance / exit 6, the engagement member 65 that engages the engaged frame 46 of the lid member 42 in the storage container 2 is supported by the ceiling of the partition wall 25. The engaged frame 46 is engaged with the engaging member 65 as the stacker crane 7 is loaded into the substrate loading / unloading section 6 so that the storage container 2 is placed and supported by the lifting / lowering means 61 by the stacker crane 7. In addition, the lid member 42 is detached from the container main body 41 by being detached from the container main body 41, and the engaged portion frame 46 is moved to the container main body 41 as the storage container 2 is unloaded from the substrate loading / unloading portion 6 by the stacker crane 7. The lid member 42 is attached to the container main body 41 by being disengaged from the engaging member 65.
Therefore, by lifting and lowering the support base 63 on which the container main body 41 of the storage container 2 is placed and supported by the lifting means 61, the lid member 42 is supported by the engagement member 65 and the cover member 42 other than the cover member 42 of the storage container 2. This portion is moved up and down to change the opening amount of the substrate loading / unloading port 44.

[Board relay unit]
Next, the board relay unit 70 will be described.
As shown in FIG. 3, the substrate relay unit 70 is configured to be movable in the lateral direction by a traveling carriage 74 that travels in the lateral direction, and between the storage container 2 located in the substrate input / output unit 6. When the substrates 1 are taken out or stored one by one, the substrate relay unit 70 is arranged at a position adjacent to the storage container 2 positioned at the substrate loading / unloading portion 6 by traveling of the traveling carriage 74.
As shown in FIG. 8, the substrate relay unit 70 is a floating air ejector that ejects air between the lower surface of the substrate 1 to be taken out or stored and the upper surface of the support plate 45 on which the substrate 1 is placed and supported. 71, a supply air jet 72 for supplying air to the downstream side in the substrate take-out direction with respect to the floating air jet 71, and an object to be picked up that has floated from the support plate 45 by the jet of air from the floating air jet 71 The substrate 1 to be stored is taken out of the storage container 2 in a state in which the substrate 1 is passed over the levitation air ejector 71 and the supply air blast body 72 and is levitated by the ejection of air by the levitation air ejector 71. Substrate loading / unloading mechanism for storing the substrate 1 in the storage container 2 so as to pass above the floating air ejection body 71 and the supply air ejection body 72 so as to be positioned on the support plate 45 on which the substrate 1 is placed and supported. It is configured to include a 3 and.
Incidentally, the substrate loading / unloading mechanism 73 is used as both a take-out means for taking out the substrate 1 from the storage container 2 and a storage means for storing the substrate 1 in the storage container 2.

[Travel cart]
As shown in FIGS. 3 and 4, the traveling carriage 74 is provided corresponding to each of a pair of traveling rails 76 provided along the lateral width direction and is driven to rotate by a traveling motor 77. A wheel 78 is provided, and is configured to support the flying air jet 71, the supply air jet 72, and the substrate loading / unloading mechanism 73. The unit 70 is moved and moved in the lateral width direction so as to be movable between a position adjacent to the storage container 2 and a position adjacent to the substrate transport conveyor 51.

[Substrate in / out mechanism]
The substrate loading / unloading mechanism 73 includes a gripping transport unit 81 for gripping and transporting the substrate 1 and a mounting support transporting unit 88 for mounting and transporting the substrate 1.
When the holding and conveying unit 81 takes out the substrate 1 from the storage container 2, the holding unit 82 holding the downstream end of the substrate 1 to be taken out in the direction of taking out the substrate is moved along the movement path along the substrate taking-out direction. By moving from the upstream side to the downstream side in the take-out direction, a part of the substrate 1 to be taken out from the storage position (see FIGS. 9 and 10) where the whole substrate 1 to be taken out is located in the storage container 2 is stored in the storage container. 2 When the substrate 1 to be taken out is transported to the relay position located outside (see FIGS. 11 and 12), and when the substrate 1 is stored in the storage container 2, the holding portion 82 is moved along the movement path. The substrate 1 to be stored is moved from the upstream side to the downstream side in the carry-in direction, and is transported from the relay position to the storage position while being pressed by the tip portion of the gripping portion 82. .
When the substrate 1 is taken out from the storage container 2, the holding and conveying means 81 holds both ends in the horizontal width direction of the substrate 1 to be taken out, and when the substrate 1 is stored in the storage container 2, A pair of holding portions 82 are provided in the width direction so as to press both ends in the width direction. Thereby, while preventing the rotation of the substrate 1 around the vertical axis and transporting the substrate 1 in a stable posture, the position in contact with the substrate 1 is very small at the downstream end in the substrate take-out direction. Can be part.

  The holding part 82 includes a pair of holding action parts 83 that hold the substrate 1 in the vertical direction in cooperation, and a support part 84 that supports the pair of holding action parts 83. The pair of sandwiching action portions 83 are supported so as to be able to move toward and away from each other in a state of protruding to the lateral side of the support portion 84. The pair of clamping action portions 83 includes a clamping state (see FIG. 11) in which the pair of clamping action portions 83 are brought close to each other to clamp the substrate 1 and a clamping release state in which the pair of clamping action portions 83 are separated from each other ( 9) and a pressing state (see FIG. 13) in which the pair of holding action portions 83 are brought closer to each other and brought into contact with each other than the holding state (see FIG. 13).

The clamping unit 82 is supported by a moving body 87 that is linearly movable along a movement path along the substrate take-out direction. The movement of the moving body 87 along the movement path moves the holding unit 82 in the board take-out direction. It is configured freely. An upper portion of the moving body 87 is provided with a swinging connection member 85 that is swingably connected to the moving body 87 about the axis of the vertical axis, and an end of a portion of the swinging connection member 85 that extends in the substrate take-out direction. A clamping part 82 is fixedly supported on the upper part of the part. Thereby, the holding part 82 is supported by the moving body 87 so as to be swingable around the vertical axis.
Incidentally, the vertical axis on which the gripping portion 82 swings is located at a location deviating from the location where the support portion 84 is present in plan view, and is located at the location where the gripping action portion 83 is present.

Further, the holding and conveying means 81 is configured to remove the holding portion 82 that has been released from the holding of the take-out target substrate 1 while the take-out target substrate 1 is transferred to the relay position. A swing guide member 89 is provided as a retracting operation means for moving to a retracted position retracted from a transport path of the substrate 1 (a space occupied by the substrate 1 when transporting the substrate 1).
The swing guide member 89 is in contact with the holding portion 82 by movement along the moving path of the moving body 87, and the vertical axis so as to guide the holding portion 82 outward in the lateral width direction intersecting the substrate take-out direction. By swaying around the core, the holding portion 82 is retracted to the retracted position.

The swing guide member 89 includes a guide groove 89 a that guides the swing connecting member 85 and the guide roller 86. That is, the swing connecting member 85 is provided so as to contact the inner wall of the guide groove 89a in a state of passing through the plate body in which the guide groove 89a is formed, and the guide roller 86 is provided with the swing connecting member 85. A pair is provided at the end of the portion extending in the substrate take-out direction so as to contact the inner wall of the guide groove 89 on the lower side.
The guide groove 89a is formed such that the upstream portion in the substrate take-out direction is linear along the movement path of the moving body 87, and the downstream portion continuous with the upstream portion is outward in the lateral width direction. It is formed in a curved shape that bends.
That is, as shown in FIGS. 9 to 13, the moving body 87 is moved along the movement path so as to transfer the substrate 1 to be taken out from the storage position to the relay position or to transfer the substrate 1 to be stored from the relay position to the storage position. Since the guide roller 86 is linearly guided by the linearly formed portion of the guide groove 89a, the gripping portion 82 moves between the gripping action portion 83 and the support portion 84. It is held in a posture aligned in the direction along the route.
As shown in FIGS. 14 and 15, the guide roller 86 is guided by moving the moving body 87 to the downstream side in the substrate take-out direction after releasing the holding with respect to the substrate 1 to be taken out from the storage position. Since the curved portion of the groove 89 a is guided so as to move outward in the lateral width direction, the support portion 84 is positioned in the lateral width direction with respect to the gripping action portion 83. The posture is changed to be inclined with respect to the movement path so as to be located on the outer side. Further, by moving the moving body 87 to the upstream side in the substrate taking-out direction from this state, the guide roller 86 is curved so as to move inward in the lateral width direction at the curved portion in the guide groove 89a. Therefore, the holding portion 82 is changed to a posture in which the holding action portion 83 and the support portion 84 are aligned in the direction along the movement path.
As shown in FIGS. 10 and 12, when the holding portion 82 is aligned in the direction along the movement path, the pair of holding action portions 83 and the support portions 84 are within the lateral width of the transport path of the substrate 1 in a plan view. Therefore, it can be held or pressed against the substrate 1 from the downstream side in the substrate take-out direction. As shown in FIG. 15, in a posture inclined with respect to the movement path, a pair of holding action portions 83 in a plan view. Since the part and the support portion 84 are located laterally outward from the transport path of the substrate 1, the substrate 1 can be transported by the mounting support transport means 88 without being obstructed by the holding portion 82. .
Incidentally, the gripping part 82 is located at the retracted position (see FIGS. 14 and 15) in a posture inclined with respect to the movement path. At this time, the pair of gripping action portions 83 are present on the transport path of the substrate 1 in plan view, but the passage of the substrate 1 is allowed by setting the pair of gripping action portions 83 to the grip release state. be able to.

[Placement support transport means]
When taking out the substrate 1 from the storage container 2, the placement support conveyance unit 88 places and supports the substrate 1 to be taken out, which has been carried to the relay position by the holding conveyance unit 81, and removes the substrate 1 to be taken out. When the entire substrate 1 to be taken out is transferred from the relay position to the take-out position (see FIG. 14) located outside the storage container 2, and the substrate 1 is stored in the storage container 2, the storage received from the substrate transfer conveyor 51 The target board 1 is transported from the take-out position to the relay position.
Incidentally, the placement support transport means 88 places and supports the substrate 1 at the take-out position where the entire substrate 1 is positioned on the placement support transport means 88 and moves the substrate relay unit 70 to the take-out position. The substrate 1 to be taken out is transferred to the substrate transfer conveyor 51, and the substrate 1 to be stored received from the substrate transfer conveyor 51 is transferred to the take-out position.

The mounting support transport unit 88 will be described. The mounting support transport unit 88 supplies air toward the lower surface of the substrate 1 and supports the substrate in a non-contact state in a horizontal posture. Propulsive force imparting means 53 that imparts a propulsive force in the transport direction to the substrate 1 supported by the blow type support means 52 is provided.
The blower-type support means 52 is provided on the lower side of the transport path of the substrate 1 and blows air upward, and the porous wind regulation provided between the blower 54 and the transport path of the substrate 1. A plate 55 and a conveyor air supply device 56 (see FIG. 19) for supplying air to the blower 54 are provided. Further, the propulsion force applying means 53 is arranged in parallel in the substrate take-out direction and is in contact with the lower surface of the substrate 1, and the support conveying roller 57 is in contact with the upper surface of the substrate 1 located at the relay position. The supporting conveyance roller 57 and the holding conveyance roller 58 are configured to support and hold the both ends of the substrate 1 in the widthwise direction. A pair of rollers 58 are provided in the width direction.

As the plurality of support conveyance rollers 57, a support conveyance roller 57 with a ridge having a ridge that restricts movement of the substrate 1 in the lateral width direction and a support conveyance roller 57 without a ridge without a ridge are provided. The supporting transport roller 57 without wrinkles is in contact with the lower surface of the substrate 1 located at the relay position and holds the substrate 1 in cooperation with the holding transport roller 58. 88 (substrate loading / unloading mechanism 73) is disposed at the upstream end in the substrate unloading direction, and the support roller 57 with a hook is placed so as not to contact the lower surface of the substrate 1 located at the relay position. The support conveyance means 88 (substrate loading / unloading mechanism 73) is arranged in parallel on the downstream side in the substrate removal direction from the wrinkle-free support conveyance roller 57.
Incidentally, the holding conveyance roller 58 is disposed at the upstream end in the substrate take-out direction of the placement support conveyance means 88 (substrate loading / unloading mechanism 73), like the supporting conveyance roller 57 without wrinkles.
That is, the mounting support conveyance means 88 is supported at the downstream end in the substrate take-out direction of the substrate 1 by the support conveyance roller 57 without wrinkles in the plurality of support conveyance rollers, and with the holding conveyance roller 58. The substrate 1 to be taken out by the holding and conveying means 81 is held between the supporting transfer roller 57 and the holding transfer roller 58 so as to be held by the cooperation of The substrate 1 is transported so that the downstream end portion in the substrate take-out direction is positioned at the upstream end portion in the substrate take-out direction of the placement support transport means 88.
In short, the intermediate position is such that the downstream end of the substrate 1 in the substrate take-out direction is disposed at the upstream end in the substrate take-out direction of the placement support transfer means 88 and the support transfer roller 57 without wrinkles and the holding transfer Since it is a position that is held by cooperation with the roller 58 and is close to the storage position, the transfer distance of the substrate 1 by the holding transfer device 81 is shortened, so that the moving distance of the holding portion 82 can be shortened. .

  Further, the support conveyance roller 57 and the holding conveyance roller 58 are placed on the support and holding portion so that the support conveyance roller 57 and the holding conveyance roller 58 are on the outer side in the lateral width direction than the holding portion of the holding conveyance unit 81. A conveying roller 58 is provided. Thereby, the conveyance range of the board | substrate 1 by the clamping conveyance means 81 and the conveyance range of the board | substrate 1 by the mounting support conveyance means 88 are comprised so that it may overlap in a board | substrate taking-out direction. Therefore, the substrate 1 can be transported to the relay position where the substrate 1 can be transported by the placement support transport means 88 by the sandwiching transport means 81, and conversely, the transport by the sandwich transport means 81 by the placement support transport means 88. The substrate 1 can be transported to a possible relay position. As a result, the delivery between the nipping and conveying means 81 and the mounting support and conveying means 88 can be performed accurately. In addition, when the substrate 1 is transferred from the sandwiching and conveying means 81 to the placement support and transportation means 88, the substrate 1 is shifted from the state of being sandwiched by the sandwiching portion 82 to the state of being placed and supported. Since the substrate 1 can be conveyed while being held in cooperation with the holding conveyance roller 58, the substrate 1 can be transferred while accurately delivering the substrate 1 between the holding conveyance device 81 and the mounting support conveyance device 88. It can be transported properly.

The mounting support conveyance means 88 supports the central portion of the substrate 1 in the width direction in a non-contact state by the blower-type support means 52, and both ends of the substrate 1 in the width direction of the substrate 1 by the propulsion force applying means 53. The substrate 1 is transported along the transport direction by rotating and driving the support transport roller 57 and the grip transport roller 58 by the transport motor 59 while supporting and holding the contact.
By the way, the substrate transport conveyor 51 is similar to the mounting support transport means 88, and is provided with a blower support means including a blower, an air conditioning plate, and an air supply device, and a propulsive force applying means including a plurality of support transport rollers. And is configured. The substrate transport conveyor 51 is not provided with a gripping transport roller.

  As shown in FIG. 16, the levitation air jet 71 has an air jet 91 for jetting air upward and a shape extending upward from an upstream end of the air jet 91 in the substrate take-out direction. And a guide curved surface 92 for guiding the air jetted upward from the air jet outlet 91 so as to flow in the horizontal direction toward the storage container 2 along the upper surface of the flying air jet 71. Then, in the container adjacent portion A, air is blown out between the substrate 1 to be taken out taken out by the substrate taking-in / out mechanism 73 and the lower surface of the substrate 1 to be stored and the upper surface of the floating air blowing body 71. It is comprised so that the auxiliary | assistant air ejection body to be used may also be used.

  That is, as shown by the arrow in FIG. 16A, the air jetted upward from the air jet 91 of the flying air jet 71 flows along the induction curved surface 92 by the Coanda effect, and then Since it flows in the horizontal direction along the upper surface of the floating air ejection body 71 connected to the guide curved surface 92 and flows in the horizontal direction toward the storage container 2 located upstream in the substrate take-out direction, The ejected air is guided by the guiding curved surface 92 so that the air is ejected between the lower surface of the substrate 1 to be taken out and the upper surface of the flying air ejection body 71, and thereafter the substrate to be taken out. 1 flows in a horizontal direction toward the storage container 2 so that air is ejected between the lower surface of 1 and the upper surface of the support plate 45 on which the substrate 1 is placed and supported.

The supply air spouting body 72 is an ejecting body configured in the same manner as the levitation air ejecting body 71 so that the direction of the air flowing in the horizontal direction is reversed, and the air is directed upward. The reverse direction air jet 93 to be ejected and the reverse direction air jet 93 located above the reverse direction air jet 93 and downstream in the substrate take-out direction were ejected upward from the reverse direction air jet 93. A reverse-direction guiding curved surface 94 that guides air to flow in the horizontal direction toward the side opposite to the storage container 2 side along the upper surface of the supply air jetting body 72 is configured. The air ejected from the direction air jet 93 is the container 2 side so that the air is supplied to the downstream side in the substrate take-out direction from the air jet 91 of the flying air jet 71 in the container adjacent location A. Opposite direction of substrate removal It flows in the horizontal direction toward the downstream side.

As shown in FIGS. 8 and 17, a plurality of levitation air jets 71 are arranged side by side in a state of being spaced apart in the lateral width direction, and the supply air blast bodies 72 are formed of the levitation air jets 71 in the lateral width direction. The plurality of floating air jets 71 and the plurality of supply air jets 72 are alternately arranged in a row in the horizontal width direction with the floating air jets 71 positioned at both ends in the horizontal width direction. Are lined up. Thus, as shown by the arrows in FIG. 17, when the substrate 1 is transported, the air ejected by the supply air ejection body 72 is taken out from the air ejection port 91 of the levitation air ejection body 71. It can supply to the downstream side. Thereby, even if the downstream side in the substrate take-off direction becomes negative pressure due to the ejection of air from the air ejection port 91 of the levitation air ejection body 71, the portion is positively pressurized by the air from the supply air ejection body 72. Thus, the substrate 1 can be properly supported.
At the upstream end of the substrate take-out mechanism 73 in the substrate take-out direction, the continuous plate 96 is in a state in which the height of the upper surface is the same as the upper surface of the air conditioning plate 55 and extends upstream in the substrate take-out direction. The supply air spouting body 72 is supported by the connecting plate 96 in a state where the upper surface thereof is the same height as the upper surface of the connecting plate 96 and continues in the substrate take-out direction. The body 71 is such that the upper surface of the body 71 is located below the upper surface of the continuous plate 96 by several millimeters (for example, about 2 to 3 mm), and the air ejected from the air ejection port 91 passes downstream in the substrate take-out direction. It is supported by the connecting plate 96 in a state where a gap is formed.
In other words, the floating air ejection body 71 is provided such that its upper surface is located several millimeters below the upper surface of the supply air ejection body 72.

  Air is supplied to the floating air jet 71 and the supply air jet 72 from a jet air supply device 95 (see FIG. 19) as an air supply device, and the jet air supply device 95 supplies air. The supply amount is adjustable. Then, by supplying air from the air supply unit 95 for the levitation body to the air blast body 71 for levitation and the air blast body 72 for supply, the air blast body 71 for levitation and the air blast body 72 for supply eject the air. By switching to the state and stopping the supply of air from the ejector air supply device 95 to the levitating air ejector 71 and the supply air ejector 72, the levitating air ejector 71 and the supply air ejector 72 are stopped. Is switched to an ejection stop state in which the ejection of air is stopped.

Next, the control device H will be described.
As shown in FIGS. 18 and 19, the substrate relay unit 70 includes a substrate 1 that is held by the holding unit 82 and a substrate presence / absence detection sensor 101 that detects whether the substrate 1 is pressed by the holding unit 82. A container height detection sensor 102 for detecting whether or not the storage container 2 is positioned at an appropriate height for taking out and storing the substrate 1; and a takeout position for detecting whether or not the substrate 1 is located at the takeout position. A detection sensor 103, a relay position detection sensor 104 that detects whether or not the substrate 1 is located at the relay position, and a deceleration position detection sensor 105 that decelerates the transport speed of the substrate 1 by the mounting support transport means 88 are provided. The substrate inlet / outlet portion 6 is provided with a substrate protrusion detection sensor 106 for detecting whether or not a part of the substrate 1 protrudes from the storage container 2 to the outside. Detection information from the service is configured to be input to the control unit H.

  Then, the control device H operates the traveling carriage 74, the substrate loading / unloading mechanism 73 and the ejector air supply device 95 in the substrate relay unit 70, as well as ascending / descending, based on commands from these detection sensors and the host controller. The operation of the means 61 and the substrate transfer conveyor 51 is controlled.

The control device H controls the operation of the ejector air supply device 95 so that the amount of air ejected from the levitating air ejector 71 and the supply air ejector 72 increases stepwise toward the target supply amount. The air supply control means and the height of the support plate 45 for placing and supporting the substrate 1 to be taken out or stored (the height for taking out and It also has a function as an elevating control means for controlling the operation of the elevating means 61 so as to be positioned at the storage height).
That is, when the control device H switches the levitation air ejector 71 and the supply air ejector 72 from the ejection stop state to the ejection state, the levitation air ejector 71 and the supply air are supplied from the ejector air supply device 95. The amount of air supplied to the ejection body 72 is increased stepwise, and the amount of air ejected from the floating air ejection body 71 and the supply air ejection body 72 is increased stepwise toward the target supply amount. The operation of the ejector air supply device 95 is controlled.
Further, when the control device H takes out or stores the substrate 1 from the storage container 2, the control device H corresponds to the support plate 45 for placing and supporting the substrate 1 to be taken out or stored corresponding to the floating air ejector 71 and the substrate loading / unloading mechanism 73. And is ejected between the lower surface of the substrate 1 from which the air ejected from the levitation air ejector 71 is taken out or stored and the upper surface of the mounting plate 45 for mounting and supporting the substrate 1, The operation of the elevating means 61 is controlled so that the substrate 1 that has been levitated by the ejection of air by the levitating air ejector 71 can be held or pressed by the holding portion 82.

  A pair of substrate presence / absence sensors 101 are provided in each of the pair of holding portions 82 so as to detect the presence / absence of the substrate 1 immediately before the holding action portion 83, and the control means H includes both of the pair of substrate presence / absence sensors 101. It is determined that the substrate 1 is held or pressed when it is in the detection state for detecting the presence of the substrate 1, and the substrate is detected when one or both of the pair of substrate presence / absence sensors 101 are not detecting the substrate 1. If the substrate 1 is determined not to be held and pressed in a state where it is held or pressed by the holding portion 82, the operation of the substrate transfer device 8 is activated. Stop.

  The container height detection sensor 102 is provided so as to detect the presence or absence of a plurality of detection plates 107 arranged in parallel in the vertical direction corresponding to each of the plurality of support plates 45 in the storage container 2. The storage container 2 is located at a height corresponding to the floating air jet 71 and the substrate loading / unloading mechanism 73 and any one of the plurality of detection plates is detected by the container height detection sensor 102. If the storage container 2 is in an appropriate state, the container height detection sensor 102 shifts in a vertical direction from the corresponding height and the container height detection sensor 102 detects any of the plurality of detection plates. It is configured to determine that the storage container 2 is not at an appropriate height when it is in a non-detection state where it is not detected. When the substrate 1 is taken in and out of the storage container 2, the storage container 2 is at an appropriate height. If it is determined that there is not, the substrate transfer device 8 It stops the operation.

  A pair of take-out position detection sensors 103 is provided at a position corresponding to the upstream end in the substrate take-out direction of the substrate 1 located at the take-out position and a position corresponding to the downstream end. 1 is located at the take-out position and the pair of take-out position detection sensors 103 are in a detection state in which the substrate 1 is detected, it is determined that the substrate 1 is located at the take-out position. When one or both of the take-out position detection sensors 103 are in a non-detection state, it is determined that the substrate 1 is not located at the take-out position.

  A pair of relay position detection sensors 104 is provided in a state adjacent to the downstream end of the substrate 1 in the substrate removal direction at the relay position and a position further downstream from this position in the substrate removal direction. The control means H is in a detection state in which the relay position detection sensor 104 positioned upstream in the substrate take-out direction detects the substrate 1 and is in a non-detection state in which the relay position detection sensor 104 positioned downstream is not detecting the substrate 1. If it is determined that the board 1 is located at the relay position, the board 1 is shifted from the relay position, and if both the pair of relay position detection sensors 104 are in the detection state or the non-detection state, the board 1 is in the relay position. It is configured to determine that it is not located.

  The deceleration position detection sensor 105 is provided so that a pair of take-out and storage is located within the front-rear width of the substrate 1 located at the take-out position. When the substrate 1 is transferred from the relay position to the take-out position, the transfer speed is accelerated immediately after the start of the transfer so that the transfer high speed is reached, and when the take-off deceleration position detection sensor 105 enters the detection state for detecting the substrate 1, the transfer is performed. When the substrate 1 received from the substrate transport conveyor 51 is transported to the take-out position by the mounting support transport means 88, the speed is decreased from the substrate transport conveyor 51. When the conveyance speed of the substrate 1 to be received is maintained and the decelerating position detection sensor 105 for storage enters a detection state in which the substrate 1 is detected, the conveyance of the substrate having received the conveyance speed is performed. As to decelerate so that the low speed of the conveying lower speed than the speed, is configured to control the operation of the propulsion force applying means 53.

  The substrate protrusion detection sensor 106 is provided so as to detect the presence or absence of the substrate 1 immediately before the storage container 2, and the control means H is in a detection state where the substrate protrusion detection sensor 106 detects the substrate 1. Is determined to be protruding from the storage container 2, and if the substrate protrusion detection sensor 106 is in a non-detection state where the substrate 1 is not detected, it is determined that the substrate 1 does not protrude from the storage container 2. .

The operation of the substrate transfer device 8 by the control means H will be described in the case where the substrate 1 is taken out from the storage container 2 located in the substrate loading / unloading section 6 and transferred to a substrate processing apparatus not shown.
First, the traveling carriage 74 is caused to travel so that the substrate relay unit 70 is positioned adjacent to the storage container 2 positioned at the substrate loading / unloading portion 6. Next, the storage container 2 is moved up and down by the lifting / lowering means 61 so that the support plate 45 for placing and supporting the substrate 1 to be taken out has a height corresponding to the floating air jetting means 71 and the substrate loading / unloading mechanism 73. Then, the ejector air supply device 95 is actuated to bring the levitation air ejector 71 and the supply air ejector 72 into the ejected state, and the conveyor air supply device 56 is actuated to regulate the air blowing support means 52. Air is ejected upward from the plate 55. At this time, the floating air ejection body 71 and the supply air ejection body 72 are disposed at the container adjacent portion A adjacent to the downstream end in the substrate removal direction of the support plate 45 that supports the substrate 1 to be removed. It will be. As a result, the air ejected by the flying air ejection body 71 can be properly supplied between the lower surface of the substrate 1 to be taken out and the support plate 45, and the substrate 1 to be taken out can be accurately supported by the support plate 45. Can emerge from. In a state where the substrate 1 to be taken out is lifted from the support plate 45 by the ejection of air from the flying air jet 71, the holding portion 82 in the holding release state can hold the substrate 1 to be taken out in the storage position ( 9 and 10), the moving body 87 is moved from the downstream side to the upstream side in the substrate take-out direction.

  Then, the holding unit 82 is switched to the holding state to hold the substrate 1 to be taken out by the holding unit 82, and the supporting conveyance roller 57 and the holding conveyance roller 58 move the substrate 1 from the upstream side to the downstream side in the substrate extraction direction. The movable body 87 is moved downstream from the upstream side in the substrate take-out direction so that the holding portion 82 in the holding state is moved to the holding release position (see FIGS. 11 and 12) corresponding to the relay position in the state where it is rotated so as to be conveyed. The substrate 1 is moved to the relay position. At this time, since air is also supplied to the upper part of the floating air jet 71 and the supply air jet 72, the floating air jet 71 and the supply air jet are formed by the air layer formed by the air. The substrate 1 passing through the upper portion of 72 can be accurately supported. After that, while the substrate 1 is transported to the relay position, the rotation of the support transport roller 57 and the holding transport roller 58 is stopped, and the operation of the air supply device 95 for the ejector is stopped to raise the air ejecting body 71 for levitation. Is stopped.

Then, after the gripping portion 82 is switched to the gripping release state, the moving body 87 is moved from the upstream side to the downstream side in the substrate removal direction so as to move the gripping portion 82 in the gripping release state to the retracted position (see FIGS. 14 and 15). The support transport roller 57 and the gripping transport roller 58 are rotated so that the substrate 1 is transported from the upstream side to the downstream side in the substrate take-out direction, and the substrate 1 is transported to the take-out position. The rotation of the conveying roller 57 and the holding conveying roller 58 is stopped.
Thereafter, with the traveling carriage 74 traveling so that the substrate relay unit 70 is positioned adjacent to the substrate conveyance conveyor 51, the supporting conveyance roller 57 and the holding conveyance roller 58 are disposed upstream of the substrate removal direction. The substrate 1 is rotated so as to be conveyed from the side to the downstream side, the substrate 1 is transferred to the substrate conveyance conveyor 51, and the substrate 1 is conveyed to the substrate processing apparatus by the substrate conveyance conveyor 51.

Next, a case where the substrate 1 unloaded from the substrate processing apparatus is stored in the storage container 2 located in the substrate loading / unloading unit 6 will be described.
First, the traveling carriage 74 is caused to travel so that the substrate relay unit 70 is positioned adjacent to the substrate transporting conveyor 51, and the air supply device 56 for the conveyor is operated so that the blowing type support means 52 is moved upward from the air conditioning plate 55. The air is spouted out. In this state, the support conveyance roller 57 and the holding conveyance roller 58 rotate the substrate 1 so as to convey the substrate 1 from the upstream side to the downstream side in the substrate storage direction, and are carried out of the substrate processing apparatus by the substrate conveyance conveyor 51. The substrate 1 to be transported is received and transported to the take-out position. Thereafter, the rotations of the support conveyance roller 57 and the holding conveyance roller 58 are stopped, and the traveling carriage 74 is caused to travel so that the substrate relay unit 70 is positioned adjacent to the storage container 2 positioned at the substrate loading / unloading unit 6.

The storage container 2 is moved up and down by the lifting / lowering means 61 so that the support plate 45 for placing and supporting the substrate 1 to be stored has a height corresponding to the floating air jetting means 71 and the substrate loading / unloading mechanism 73. Then, the ejector air supply device 95 is operated to bring the floating air ejector 71 and the supply air ejector 72 into the ejected state. In such a state, the movable body 87 is moved in the substrate storage direction so that the holding portion 82 in the pressed state is moved to the pressing end position (see FIG. 13) upstream in the substrate storage direction by the holding amount of the substrate 1 from the holding position. The substrate 1 is transported from the upstream side to the downstream side to the storage position. Thereafter, the rotation of the supporting conveyance roller 57 and the holding conveyance roller 58 is stopped, and the ejector air supply device 95 and the conveyor air supply device 56 are stopped, and the substrate 1 is then stored. The moving body 87 is moved from the downstream side in the substrate storage direction so as to move the holding portion 82 to the retracted position, and to move the holding portion 82 to the holding release position if the substrate 1 is to be taken out next. Move upstream.
By stopping the ejector air supply device 95 in this manner, the floating air ejector is in the ejection stop state, and therefore, between the upper surface of the substrate to be stored and the upper surface of the support plate for mounting and supporting the substrate. As described above, the air existing between the substrate and the support plate is discharged.

[Another embodiment]
(1) In the above embodiment, the recessed portion 50 is formed in a shape extending from the central portion in the planned support region E to the outside of the planned support region. However, the recessed portion 50 is planned to be supported from the peripheral edge in the planned support region E. It may be formed in a shape extending to the outside of the region so that the recessed portion 50 is not formed at the center of the planned support region E.

(2) In the above embodiment, the recessed portion 50 is formed in a shape extending linearly from the upstream end in the substrate storage direction in the planned support region E to the downstream end, but the recessed portion 50 is It may be formed in a shape extending linearly from the intermediate portion in the substrate storage direction in the planned support region E to the upstream end portion or from the intermediate portion to the downstream end portion, and the recessed portion 50 is curved. It may be formed.

(3) In the above embodiment, the support plate 45 is configured to include the recessed portion 50 so as to be positioned between the floating air jets 71 arranged in parallel in the horizontal width direction. You may comprise the recessed part 50 so that it may be located in the board | substrate accommodation direction so that all or one part may overlap with the floating air ejection body 71 juxtaposed in the direction.

(4) In the above embodiment, the support plate 45 is constituted by the support substrate 47 and the plurality of protrusions 48, and the protrusions 48 are arranged in parallel in the substrate storage direction and the lateral width direction so as to be recessed in the support plate 45. 50 is formed, but the support plate 45 is composed of a support substrate on the upper surface of which the mounting surface 48a is formed, and a recess 50 is formed in the support substrate 45 by forming a groove recessed downward. May be formed.

(5) In the above embodiment, the lifting / lowering means 61 for supporting the storage container 2 so as to be movable up and down is provided. However, the flying air ejecting body 71, the supply air ejecting body 72 and the substrate loading / unloading mechanism 73 are supported so as to be movable up and down. A lifting device may be provided. In this case, the raising / lowering control means (control device) H removes the floating air ejection body 71, the supply air ejection body 72, and the substrate loading / unloading mechanism 73 from the support plate 45 for placing and supporting the substrate 1 to be taken out or stored. The operation of the lifting device is controlled so as to be positioned at a height corresponding to.

(6) In the above embodiment, the container main body 41 of the storage container 2 is configured to form a frame and to form openings on the left and right surfaces and the top and bottom surfaces of the container body 41 so that ventilation can be performed inside and outside. The container main body 41 may be formed in a cylindrical shape and closed on each of the left and right surfaces and the upper and lower surfaces thereof so that ventilation cannot be performed inside and outside.
In the above embodiment, the storage container 2 is provided with the lid member 42 and the fan filter unit 43, but one or both of the lid member 42 and the fan filter unit 43 may not be provided.

(7) In the above-described embodiment, the container body 41 of the storage container 2 is formed in a rectangular tube shape in a sideways posture with the front and rear surfaces open, and the left and right surfaces and the upper and lower surfaces are closed, thereby closing the left and right surfaces and Although it is configured such that air cannot be discharged from the upper and lower surfaces, the container body 41 of the storage container 2 is formed in a frame shape in which the front and rear surfaces, the upper and lower surfaces, and the left and right surfaces are opened, and the left and right surfaces and the upper and lower surfaces. It is good also as a structure which can discharge | emit air from right-and-left surface and an up-and-down surface side by opening.
In the above embodiment, the storage container 2 is provided with the lid member and the 42 fan filter unit 43, but one or both of the lid member 42 and the fan filter unit 43 may not be provided.

(8) In the above embodiment, the protrusions 48 are formed by press working. However, printing is performed on the upper surface of the support plate 45 by, for example, forming the protrusions 48 by spraying paint such as ink on the upper surface of the support plate 45. Thus, the protrusion 48 may be formed, or the protrusion 48 may be formed by sticking a separate protrusion member to the upper surface of the support substrate 47.

(9) In the above embodiment, the plurality of floating air jets 71 and the plurality of supply air jets 72 are alternately arranged in the horizontal width direction with the floating air jets 71 positioned at both ends in the horizontal width direction. Although arranged in a row, the arrangement of the plurality of floating air jets 71 and the plurality of supply air jets 72 may be appropriately changed.
That is, for example, one or both of the floating air jet 71 and the supply air jet 72 may be arranged in a state where two or three or more are continuous in the horizontal width direction, and are supplied to one or both ends in the horizontal width direction. You may arrange in the state in which the air ejection body 72 is located.

Front view of substrate processing equipment Side view of substrate processing equipment Plan view of substrate processing equipment Side view of substrate transfer device Perspective view of storage container Perspective view of storage container Diagram showing support plate Plan view of board relay unit Side view showing the gripping part in the gripping position A plan view showing the gripping portion at the gripping position Side view showing the gripping portion in the grip release position Plan view showing the gripping portion at the grip release position Side view showing the gripping portion at the pressing end position Side view showing gripping part in retracted position Plan view showing the holding portion in the retracted position Side view showing air jetting body for levitation and air jetting body for supply The perspective view which shows the air jet body for levitation | floating and the air jet body for supply Schematic showing the detection sensor Control block diagram

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Substrate 2 Storage container 45 Support plate 47 Support substrate 48 Projection part 48a Placement surface 50 Recessed part 61 Lifting means 71 Lifting air ejector 73 Storage means E Support expected area H Lifting control means

Claims (6)

A storage container in which a plurality of support plates for mounting and supporting a rectangular substrate are arranged in parallel in a state spaced apart in the vertical direction;
An ejection state in which air is ejected between the lower surface of the substrate to be stored in the storage container and the upper surface of the support plate on which the substrate is placed and supported, and an ejection stop in which the ejection of air is stopped A floating air jetting body that can be switched to a state;
Substrate transport provided with storage means for storing the substrate to be stored, which has been levitated by the ejection of air by the levitation air ejector, on the support plate for mounting and supporting the substrate. Equipment,
The board | substrate conveyance equipment provided with the recessed part which the said support plate dents below the mounting surface which mounts and supports the said board | substrate, and extends in and out of the plan support area | region which mounts and supports a board | substrate.   The substrate transfer facility according to claim 1, wherein the recessed portion is formed in a shape extending from a central portion of the planned support region to the outside of the planned support region.   3. The substrate transfer facility according to claim 1, wherein the recessed portion is formed in a shape extending linearly from an upstream end in the substrate storage direction in the planned support region to a downstream end. The floating air jets are juxtaposed in a state of being spaced apart in the width direction intersecting the substrate storage direction,
The substrate according to any one of claims 1 to 3, wherein the support plate is configured to include the recessed portion so as to be positioned between the floating air ejectors arranged in parallel in the lateral width direction. Transport equipment.   The support plate is configured to include a support substrate having a flat upper surface and a plurality of protrusions that include the placement surface and protrude upward from the upper surface of the support substrate, and support the protrusions. The board | substrate conveyance installation of any one of Claims 1-4 by which the said recessed part is formed by arranging in parallel the board | substrate accommodation direction and the horizontal width direction which cross | intersects this direction at the board | substrate for operation.   The lifting / lowering means for supporting the storage container so as to be movable up and down, and the support plate for mounting and supporting the substrate to be stored are positioned so as to be positioned at the storage height corresponding to the floating air jetting body and the storage means. The substrate transfer equipment according to claim 1, further comprising a lifting control means for controlling the operation of the means.

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