• > V 201004711 六、發明說明： C 明戶斤廣技冬奸領域3 發明領域 本發明係有關於一種將塗布液塗布於基板之塗布裝置。 t 先前 3 發明背景 以往於製造液晶顯示面板時，係使用將液晶密封用糊 狀物塗布於玻璃基板之糊狀物塗布裝置。該糊狀物塗布裝 © 置藉於平台載置玻璃基板，並從噴嘴吐出填充於注射器之 糊狀物，將該糊狀物塗布於玻璃基板。塗布糊狀物時，需 適當地將糊狀物塗布於玻璃基板。糊狀物一般具有隨著時 間經過黏性也逐漸升高的特性(觸變性）。因此，即使為噴嘴 的如端與玻璃基板間要保有一定距離等，具有相同塗布條 件之糊狀物塗布裝置，塗布於玻璃基板之糊狀物分量也會 產生差異。 於是，如專利文獻1所揭示之糊狀物塗布裝置，藉由光 ® 學式距離計測量到塗布於基板之糊狀物的距離，來測量該 糊狀物的截面形狀，並可確認該截面形狀是否適當以及糊 狀物的分量適當與否。 先行技術文獻 專利文獻 [專利文獻〗]特開平7-275770號公報 【明内穷 發明概要 3 201004711 發明欲解決之課題 由：二述的糊狀物塗布裝置中，在塗布糊狀物時藉 題也^]千台或項部之移動的情況τ，會產生以下問 據用以ΓΓΓ ’他控制會進行所謂的反制，其係依 頭部移動之健馬達的旋轉量，檢測出該 虜2 σ位置，並進—步依據該位置控制伺服馬達的 驅動，籍此使平台或頭部之對位。 態 在該飼服控制下，平台或頭部在預定位置之停止狀 而航學式距離計能夠測量距離，當使平台或頭部停 止在預疋位置時’會產生舰馬達不斷交互正 之所謂的磁針擺動現象，而有在平台或頭部發生微幅= 的情形。由於糊狀物的截面非常微小，即使是如此微 振動’也會妨礙光學式距料正確地測量距離。 本發明有餘上述情事，係提供_種可適#地 布於基板之塗布液的載面積或截面形狀之測量的塗布裝 置。 用以欲解決課題之手段 本發明係有關於一種將塗布液塗布於基板之塗布裝 置，具有：平台，係載置前述基板者；頭部，係具有可3 前述基板吐出前述塗布液之喷嘴者；測量設備係可測 從則述喷嘴吐出並塗布於前述基板的塗布液之截面積戈截 面形狀者；驅動機構，係藉由伺服控制使前述平台及前述 頭部之至少一者移動者；及控制機構，係當以前述測 備測量前述塗布液之截面積或截面形狀時’使以前述驅= 201004711 機構進行之伺服㈣停止者。 根據此構造，於測量塗布於基板 戴面形狀的時間點，藉使用以使平台或頭部=積或 =止’使平台或頭部停留在預定位置的= =用以對位之伺服控制而產生的微幅振動，並可適當地 測量塗布液的截面積或截面形狀。 w• > V 201004711 VI. Description of the invention: C. The invention relates to a coating device for applying a coating liquid to a substrate. BACKGROUND OF THE INVENTION Conventionally, in the production of a liquid crystal display panel, a paste coating device for applying a liquid crystal sealing paste to a glass substrate has been used. The paste coating device is placed on a glass substrate, and a paste filled in the syringe is discharged from the nozzle, and the paste is applied to the glass substrate. When the paste is applied, it is necessary to apply the paste to the glass substrate as appropriate. The paste generally has a characteristic that the viscosity is gradually increased over time (thixotropy). Therefore, even if there is a certain distance between the end of the nozzle and the glass substrate, the paste coating device having the same coating condition causes a difference in the paste component applied to the glass substrate. Then, as in the paste coating device disclosed in Patent Document 1, the cross-sectional shape of the paste is measured by measuring the distance of the paste applied to the substrate by a light meter distance meter, and the cross section can be confirmed. Whether the shape is appropriate and whether the component of the paste is appropriate or not. [Patent Document] [Patent Document] Japanese Laid-Open Patent Publication No. Hei 7-275770 [Introduction to the Invention of the Insufficient Invention 3 201004711] The problem to be solved by the invention is as follows: in the paste coating device described above, when applying a paste Also ^] the case of the movement of thousands or items, τ, will produce the following question for ΓΓΓ 'his control will carry out the so-called counter-measure, which is based on the amount of rotation of the motor that moves the head, detects the 虏 2 The σ position, and the step further controls the driving of the servo motor according to the position, thereby aligning the platform or the head. Under the control of the feeding suit, the platform or the head stops at a predetermined position and the aeronautical distance meter can measure the distance. When the platform or the head is stopped at the pre-turn position, the so-called constant interaction of the ship motor will occur. The magnetic needle swings, and there is a slight amplitude = on the platform or head. Since the cross section of the paste is very small, even such a slight vibration will prevent the optical distance from correctly measuring the distance. The present invention has been made in view of the above circumstances, and provides a coating apparatus for measuring the area or cross-sectional shape of a coating liquid which is applied to a substrate. Means for Solving the Problem The present invention relates to a coating apparatus for applying a coating liquid to a substrate, comprising: a platform on which the substrate is placed; and a head having a nozzle capable of discharging the coating liquid on the substrate The measuring device is capable of measuring a sectional shape of a cross-sectional area of the coating liquid discharged from the nozzle and applied to the substrate; and the driving mechanism is configured to move at least one of the platform and the head by servo control; and The control mechanism is to stop the servo (four) that is driven by the above-mentioned drive = 201004711 when the cross-sectional area or cross-sectional shape of the coating liquid is measured by the aforementioned test. According to this configuration, at the time point of measuring the shape of the coated surface of the substrate, the use of the platform or the head = product or the stop = the platform or the head to stay at the predetermined position = = for the servo control of the alignment The generated micro-vibration can be appropriately measured and the cross-sectional area or cross-sectional shape of the coating liquid can be appropriately measured. w
=明之塗布裝置，其前述驅動機構係具有词服馬 達，並精由供給之電力使前述舰馬達驅動以進行飼服於 制者’前述控制設備，於以前述測量設備測量前述塗布^ 的截面積或截面形狀時，停止對前述伺服馬達的電力供給。 根據此構造，停止對伺服馬達的電力供給，即可停止 伺服控制。 又，本發明之塗布裝置，具有安裝於前述平台及前述 頭部之至少一者的驅動軸，且前述伺服馬達可使前述驅動 軸旋轉。 又，本發明之塗布裝置，其前述控制設備控制前述驅 動機構’以使前述平台及前述頭部之中，因振動在前述塗 布液之截面積或截面形狀的測量上產生誤差時，停止對預 先設定一者的伺服控制。 根據此構造，只需停止對平台及頭部之中，因振動在 畫布液之截面積或截面形狀的測量上產生誤差者之伺服控 制，即可將該伺服控制的停止抑制在必要之最小限度内。 發明效果 根據本發明，當測量塗布於基板之塗布液的截面積或 5 201004711 截面形狀時，在將平台或頭部停留在指定位置的情況下， 不會有伴隨用以對位的伺服控制而產生的微幅振動，並可 適當地測量塗布液的截面積或截面形狀。因此，可適當地 判斷塗布液的塗布狀態，並可提昇塗布液的塗布品質信賴 性。 圖式簡單說明 第1圖係使用本發明實施形態之塗布裝置的糊狀物塗 布系統的平面圖。 第2(a)、2(b)圖係顯示塗布單元的外觀立體圖及用以說 明塗布單元内各部移動方向之座標空間圖。 第3圖係顯示塗布喷嘴部之構造的圖。 第4圖係顯示以截面積感應器測量到塗布於玻璃基板 之糊狀物間距離之一例的立體圖。 第5圖係顯示以截面積感應器測量到塗布於玻璃基板 之糊狀物間距離之一例的側面圖。 第6圖係顯示截面積感應器測量到塗布於玻璃基板之 糊狀物間距離之一例的側面放大圖。 第7圖係顯示有關塗布單元之伺服控制之部分構造的 圖。 第8圖係顯示以塗布單元測量糊狀物截面積時動作的 流程圖。 【實施方式3 用以實施發明之最佳形態 以下使用圖式說明本發明之實施形態。第1圖係使用本 201004711 ' 發明實施形態之塗布裝置的塗布系統的平面圖。如第1圖所 示’在製造液晶顯示面板時’糊狀物塗布系統10係將作為 塗布液的液晶密封用糊狀物呈環狀地塗布於玻璃基板50 者。糊狀物塗布系統10係由構成本發明實施形態之塗布裝 置的塗布單元20-1、20-2、20-3及20-4、基板交接機構30及 運送機器人40所構成。 作為糊狀物塗布對象之玻璃基板50配置在基板交接機 構30的上游端32。運送機器人40可於基板交接機構30的延 ® 伸方向（第1圖所示之方向A)移動，也可於第1圖所示之方向 B旋轉。該運送機器人4〇運送配置於基板交接機構3〇之上游 端32的玻璃基板5〇，並隨時將其配置在塗布構件2〇_1、 20-2、20-3及 20-4。 塗布單元20-1、20-2、20-3及20-4，將糊狀物塗布於玻 璃基板50的表面。由於塗布糊狀物，與以運送機器人4〇運 送玻璃基板50等相比更花費時間，因此藉由並列地操作塗 布構件20-1、20-2、20-3及20-4’可縮短時間並提昇生產性。 糊狀物塗布於玻璃基板50後，運送機器人40從塗布單 元20-1、20-2、20-3及20_4將塗布過糊狀物之玻璃基板50隨 時取出運送’並配置在基板交接機構30的下游端34。經由 這一連串動作’將糊狀物塗布於玻璃基板50的表面。 第2(a)圖係塗布單元2〇1、2〇_2、2〇_3及2〇 4(以下，將 該等塗布單元2〇-1、20-2、20-3及20-4—律通稱為「塗布構 件20」）的外觀立體圖。又，第2(b)圖係用以說明塗布單元 20内各部移動方向之座標空間圖。 7 201004711 如第2(a)圖所示，塗布單元20係由框體111、塗布喷嘴 部112-1及112-2、雷射感應器113-1及113-2、攝影機114-1 及114-2、柱體115、基板平台116、ΧΥ0移動裝置118、戴 面積感應器120-1及120-2所構成。 框體111安裝有柱體115。塗布喷嘴部in-ι、雷射感應 器113-1、攝影機114-1及截面積感應器120-1 —體成形地構 成頭部110-1 ’對著柱體115安裝成可於如第2(b)圖所示之X 方向及z方向移動。同樣地，塗布喷嘴部112_2、雷射感應 器113-2、攝影機114-2及截面積感應器12〇_2—體成形地構 成頭部110-2，對著柱體115安裝成可於如第2(b)圖所示之X 方向及z方向移動。如此，藉由設置複數個頭部11〇_丨及 110-2，於將玻璃基板5〇分成複數個子基板，並針對各個子 基板塗布糊狀物時，同時地使頭部丨丨心丨及丨⑺。(以下，將 頭部110-1及110-2—律通稱為「頭部11〇」）操作，可縮短時 間並提昇生產性。 基板平台116可於如第2〇5)圖所示之χ方向及γ方向移 動，其下面安裝於ΧΥ6»移動裝置118的上面，而可於0方 向微幅旋轉，其下面安裝於。該基板平台116上面形成有未 圖不之吸附孔。如第i圖所示，經由運送機器人4〇運送之玻 璃基板5G，係真空吸附於基板平台116之上面。 χυθ移動裝置118，其上面與基板平台ιΐ6之下面連 接。又’ χυθ移動裝置118可於如第2(b)圖所示之又方向及 Y方向移動’且其下面安裝於框體ηι上面而可於Θ方向微 幅旋轉。 201004711 於塗布糊狀物前，攝影機114-1及114-2拍攝各個玻璃基 板50的表面，並檢測形成於該表面用以定位的記號(校準記 號）。藉由攝影機114-1及114-2檢測出校準記號後，根據校 準記號的相對位置特別設定糊狀物在玻璃基板5〇表面應塗 布之位置。之後，頭部丨⑺-丨及丨⑺^藉由各自的伺服控制， 按照玻璃基板50的子基板排列節距，各自獨立地於如第2(b) 圖所示之X方向適當地移動。有關頭部110移動時伺服控制 的詳細情況將在稍後說明。 糊狀物應塗布之位置被特別設定後，塗布噴嘴部112-1 及112-2，從喷嘴的前端朝配置於其正下方之玻璃基板5〇表 面吐出糊狀物。 第3圖係顯示塗布喷嘴部112_丨之構造的圖。如第3圖所 示，塗布噴嘴部112-1係由注射器140及喷嘴142所構成。 又，塗布喷嘴部112-2亦為同一構造。注射器14〇係填充糊 狀物之容器。填充於注射器140内之糊狀物，當該注射器内 的氣壓增加時，即朝喷嘴142推出。喷嘴142係可自由裝卸 於注射器140之下端，前端的吐出口 143配置成與基板平台 116上的玻璃基板50對向。該喷嘴142將從注射器14〇推出之 糊狀物從前端的吐出口143朝玻璃基板5〇吐出。又，塗布噴 嘴部m-i於如第2(b)圖所示之2方向上下移動。同樣地塗 布喷嘴部112-2亦於如第2(b)圖所示之2方向上下移動。 塗布糊狀物時，XY0移動裝置118藉由飼服控制不僅 可於如第2(b)圖所示之X方向及γ方向適#地移動，亦能於 0方向適當地微幅旋轉。藉此，移動安裝於χγθ移動裝置 9 201004711 118上面之基板平台116，進一步使吸附於基板平台116之玻 璃基板50配合應塗布之糊狀物的塗布形狀移動。有關基板 平台116移動時伺服控制的詳細情況將在稍後說明。 雷射感應器113-1係測量到玻璃基板5〇間之距離者，從 其測量值可檢測出噴嘴142的吐出口 143與玻璃基板50表面 間的距離。同樣地，雷射感應器113_2係測量到玻璃基板50 間距離者，從其測量值可檢測出喷嘴丨42的吐出口 143與玻 璃基板50表面間的距離。若檢測值不在預先設定的預定範 圍内，則糊狀物的截面積為非期望之截面積的可能性將會 增高。因此藉由塗布噴嘴部112-1及112-2於如第2(b)圖之Z 方向移動，將喷嘴142之前端與玻璃基板5〇間的距離控制在 預定範圍内。 截面積感應器120-1係構成測量設備的一部分，並測量 到塗布於玻璃基板50之糊狀物間的距離者，從該測量值可 測量檢測出糊狀物的截面積。同樣地，截面積感應器12〇_2 係構成測量設備的一部分，並測量到塗布於玻璃基板5〇之 糊狀物間的距離者，從該測量值可測量檢測出糊狀物的截 面積。 第4圖係顯示以截面積感應器120-1測量到塗布於玻璃 基板50之糊狀物間距離之一例的立體圖。第5圖係側面圖， 第6圖係側面放大圖。如該等第4圖至第6圖所示，戴面積感 應器120-1在塗布於玻璃基板50之糊狀物6〇位於其正下方 時’從光出入口 121照射雷射光。此時，如第6圖所示，截 面積感應器120-1不僅從光出入口 121朝糊狀物60表面多處 201004711 • 照射雷射光’亦向該糊狀物60周圍的玻璃基板5〇之上面照 射雷射光。 並且’截面積感應器120-1透過光出入口 121射出雷射 光至玻璃基板50上的糊狀物60,再透過光出入口 121檢測出 糊狀物60的反射光，並將該檢測值朝系統控制器220輸出。 該截面積感應器120-1可使用Keyence公司製的LT-9000系列 或LJ-G系列。截面積感應器120-2亦相同。以該等截面積感 應器120-1及120-2與系統控制器220構成測量設備。 ® 接下來說明當頭部11〇與基板平台116移動時伺服控制 的詳細情況。第7圖係顯示有關塗布單元2〇之伺服控制之部 ' 分構造的圖。以下雖僅說明含有頭部110-1之構造，但含有 頭部110-2之構造亦為相同情況。 如第7圖所示，塗布單元20具有構成驅動機構之伺服馬 達202、編碼器203、驅動軸204、伺服馬達206、編碼器207、 驅動軸208、伺服馬達210、編碼器211、驅動轴212、伺服 0 驅動器222及對應控制設備與測量設備之系統控制器220。 伺服驅動器222備有伺服控制部222a與伺服電源電路部 222b。位置指令信號從系統控制器22〇傳送至伺服控制部 222a。而接收位置指令信號之伺服控制部222a，根據上述 位置指令信號，提供用以實現從伺服電源電路部222b傳向 各伺服馬達202、206及210指令之電力。 塗布單元20藉操作者投入未圖示的主電源，供給從外 部電源向各部（系統控制器220、伺服驅動器222等）之電力。 當電力供給至伺服驅動器222時，伺服控制部222a即開始各 11 201004711 伺服馬達202、206及210的伺服控制。具體來說，若系統控 制器220沒有發出位置指令信號，伺服控制部222a根據來自 各編碼器203、207及211的輸出信號，控制各伺服馬達202、 206及210維持在目前位置。若系統控制器220發出位置指令 信號時，伺服控制部222a控制各伺服馬達202、206及210驅 動，用以一邊讀取來自各編碼器203、207、211的輸出信號， 一邊隨指令位置移動。進行該伺服控制時，伺服控制部 222a，對伺服電源電路部222b輸出預定電力的供給指令。 又，當系統控制器220停止伺服控制時，即停止從伺服電源 碜 電路部222b朝伺服馬達202、206及210的電力供給。舉例來 說’在外部電源與伺服電源電路部222b間設置未圖示之阻 ' 絕開關，由系統控制器220控制該阻絕開關，以阻絕從外部 電路朝伺服電源電路部222b的電力供給，或者，在伺服控 制部222a編入可阻絕該伺服控制部222a與伺服控制店路部 222b間之通信的阻絕電路，根據來自系統控制器22〇的指 令’伺服控制部222a控制該阻絕電路，即可阻絕從伺服電 源電路部222b朝各伺服馬達2〇2、206及210的電力供給。 參 祠服馬達202及驅動轴2〇4，係使基板平台116於如第 2(b)圖所示之γ方向移動者。根據來自伺服驅動器222的指 令驅動伺服馬達202，即可旋轉安裝於該伺服馬達202之驅 動轴204 °並且，與驅動軸204連接的基板平台116可於如第 2(b)圖所示之γ方向滑動。 伺服馬達206及驅動軸208，係使基板平台116於如第 2(b)圖所不之X方向移動者。根據從伺服驅動器222發出的 12 201004711 指令驅動伺服馬達206，即可旋轉安裝於該伺服馬達206之 驅動軸208。並且，與驅動軸208連接的基板平台116可於如 第2(b)圖所示之X方向滑動。 伺服馬達210及驅動軸212，係使含有塗布喷嘴部112-1 及截面積感應器120-1之頭部11〇_1於如第2(b)圖所示之X方 向移動者。根據來自伺服驅動器222的指令驅動伺服馬達 210，即可旋轉安裝於該伺服馬達210之驅動軸212。並且， 安裝於驅動軸212的頭部1KM可於如第2(b)圖所示之X方向滑 ® 動。 編碼器203檢測出伺服馬達202的旋轉量，朝伺服驅動 ·' 器222輸出。同樣地，編碼器207檢測出伺服馬達206的旋轉 量’並朝伺服驅動器222輸出，編碼器211檢測出伺服馬達 210的旋轉量’並朝伺服驅動器222輸出。 伺服驅動裝置222根據來自編碼器203的輸出值與來自 編碼器207的輸出值’計算出基板平台116的X方向位置及γ 方向位置。並且，伺服驅動器222根據已計算出的各自位 ® 置，控制伺服馬達202及206以調整基板平台116之位置。舉 例來說’到目前為止伺服馬達202呈正旋轉驅動，當基板平 台116要通過系統控制器220的指令位置時，可控制飼服馬 達202呈逆旋轉驅動。 同樣地’伺服驅動器222輸入來自編碼器21丨的輸出 值’依據該輸出值，計算出頭部110-1内塗布喷嘴部112-1 的喷嘴142之吐出口 143的位置、或截面積感應器uoq之光 出入口 121之位置。此外，伺服驅動器222根據已計算出的 13 201004711 4置控制伺服馬達210以調整吐出口 143或光出入口 1^的 位置。 藉由該反饋控制之伺服控制，調整基板平台116、塗布 喷嘴部112-1的嘴嘴142的吐出口 143及截面積感應器咖 之光出入口 121的位置。 接下來一邊參照流程圖一邊說明以塗布單元2〇測量糊 狀物60截面積時的動作。第8圖係顯示以塗布單元2〇測量糊 狀物60截面積時動作的流程圖。再者，以下雖針對具有截 面積感應器120]之頭部11(M說明，但具有截面積感應器 120-2之頭部110_2亦為相同情況。 根據操作者投入未圖示的主電源，開始供給從外部電 源向伺服驅動器222的電力。伺服驅動器222開始供給來自 外部的電力，即開始伺服控制（sl〇1)。 根據系統控制器220的指令’藉由攝影機U4_i拍攝玻 璃基板50表面檢測出校準記號，則根據來自該校準記號的 相對位置特別設定在玻璃基板50表面應塗布糊狀物之位 置。於是，頭部110-丨經伺服控制，移動至糊狀物6〇在位於 嘴嘴142之吐出口 143正下方的玻璃基板5〇上應塗布之位 置’吐出糊狀物60，再藉於基板平台116的X方向及γ方向 移動’將糊狀物60依預定形狀塗布於玻璃基板5〇(sl〇2)。 之後’系統控制器220，判斷是否為測量塗布於玻璃基 板50之糊狀物60截面積的時間點（S103)。舉例來說，每當糊 狀物60塗布於預定片數的玻璃基板5〇時，系統控制器220會 判斷為測量糊狀物60的時間點。 201004711 若非測量糊狀物60截面積的時間點，則會如S102繼續 塗布糊狀物60。 另一方面，若為測量糊狀物60載面積的時間點時，系 統控制器220，為使頭部120-1或基板平台116移動，而對伺 服驅動裝置222輸出位置指令信號，使截面積感應器12〇_1 的光出入口 121正下方’成為塗布於玻璃基板50之糊狀物60 戴面積的測量點。接受位置指令信號之伺服驅動器222，為 實行指令，進行使伺服馬達202、206及210正旋轉或逆旋轉 的控制。 通常，1片玻璃基板50，存在有複數個塗布於該玻璃基 板50之糊狀物60截面積的測量點。因此，系統控制器220， 對伺服驅動裝置222輸出位置指令信號，使截面積感應器 UO-l的光出入口 121正下方，成為塗布於玻璃基板5〇之糊 狀物60截面積的測量點中未測量的任一測量點。 伺服驅動器222按照該指令，進行對伺服馬達202、206 及210供給預定電力，使伺服馬達202、206及210進行正旋 轉或逆旋轉。因此，藉由伺服控制，伺服馬達202及206進 行正旋轉或逆旋轉，不僅移動基板平台116，且伺服馬達210 進行正旋轉或逆旋轉，移動頭部11(M，使截面積感應器 12〇-1的光出入口 121正下方，成為塗布於玻璃基板5〇之糊 狀物60截面積的測量點（si〇4)。 接著，系統控制器220控制上述阻絕開關或阻絕電路， 停止朝伺服馬達2〇2、206及210的電力供給。藉此，停止伺 服控制（S105)。又，繼續朝編碼器203、207及211供給電力。 15 201004711 之後，截面積感應器120-1，從光出入口 121朝糊狀物 60表面複數處及該糊狀物60周圍的玻璃基板50上面照射雷 射光，在光出入口 121接受經反射的雷射光。截面積感應器 120-1，向系統控制器220輸出此時的距離測量值。 系統控制器220，根據該等距離算出值，測量塗布於玻 璃基板5〇之糊狀物60的截面積(S106)。此處，參照第6圖， 系統控制器220,判斷出比起周圍距離算出值較小部分者為 糊狀物60的部分，而比起周圍距離算出值較小部分的水平 方向長度，得出糊狀物60的寬度。又，系統控制器220，從 參 比起周圍距離算出值較小部分的最小距離算出值與周圍的 距離算出值間的差，得出糊狀物60的高度。接者，系統控 制器220 ’根據糊狀物6〇的寬度與高度，可計算出該糊狀物 60的截面積。 結束在本次測量點對糊狀物60的截面積測量後，系統 控制器220，控制上述阻絕開關或阻絕電路，再次運作伺服 控制（S107)。又，伺服控制停止中，仍為持續朝編碼器2〇3、 207及211供給電力之狀態，故編碼器203、207及211的輸出 參 值會輸入至伺服驅動器的伺服控制部222&，而不會使基板 平台116或頭部uoq的位置不明。 而後’系統控制器220，判斷塗布於玻璃基板5〇之糊狀 物60的截面積測量點中’是否存在有未測量的測量點 (S108)。若存在有未測量的測量點時，如si〇4，進行使頭 部110-1及基板平台m移動之動作，之後反覆進行議至 S107的動作，使載面積感應器12G-1的光出人πι2ι正下 16 201004711 方，成為該未測量的測量點。 另一方面，若未存在有未測量的測量點，則恢復到將 糊狀物60塗布於玻璃基板50的狀態（sl〇2)，並重複之後的動 作。又，系統控制器220，可按照上述sl〇6中糊狀物6〇的截 面積算出結果進行控制。例如，系統控制器22〇，一個一個 判斷經複數個測量點各自計算出之糊狀物6〇的截面積是否 在容許值内，若有一個測量點係超出容許值外，則進行視 為異常現象而中斷之後糊狀物6〇於玻璃基板5〇之塗布或 將在截面積發生的異常資訊告知操作者的控制。又，系統 控制器220,將經複數個測量點各自計算出之糊狀物6〇的截 面積平均，藉由比較該平均值與基準值，亦可進行增減提 - 彳共至注射器丨蝴之氣體壓力的㈣。在這種情況下糊狀 物60的截面積之平均值較基準值大時，降低供給至注射器 ⑽内的氣體壓力，藉此減少來自噴嘴⑷之糊狀物_吐 出量。又，糊狀物6〇的截面積之平均值較基準值小時，提 φ 冑供給至注射器140内的氣體壓力，藉此增加來自喷嘴142 之糊狀物60的吐出量。 如此本實施形態之塗布單元20，在測量塗布於玻璃 ^板5〇之糊狀物60的截面積時，停止對使基板平台116或頭 /110移動之伺服馬達2G2、2G6及21⑽伺服控制也就是 說/亭止對伺服馬達2〇2、及21〇的電力供給，藉此，使 u等基板平台116或頭部11〇停留在預定位置之情況下防 伴隨用以使對位的飼服控制而在飼服馬達202、206及210 產生的微中w振動。因此，由截面積感應器測量之從光 17 201004711 出入口 121到糊狀物60表面間的距離、或從光出入口⑵到 糊狀物60周邊的玻璃基板5〇上面間的距離，不會因振動產 生變化’可適當地進行糊狀物6〇截面積的測量。藉此，可 適當地判斷塗布於玻璃基板50之糊狀物6〇的塗布^態因 而可提昇塗布品質的信賴性，進而可期待所製造之液晶顯 示面板品質的穩定化。 另外上述實施形態中，係針對經伺服控制移動頭部 110與基板平台m兩者之塗布單元20說明，但經伺服控制 移動其中一者之塗布單元亦同樣適用於本發明。 囑 又，上述實施形態中，在測量糊狀物6〇的截面積時， 停止用以使頭部110與基板平台116兩者移動的伺服控制， 但若頭部11G及基板平台116只有—者因振動在糊狀物⑼截 面積的測量上產生誤差情況的話，亦可預先設定在測量糊 狀物60的截面積時停止使該一者移動之伺服控制，且記存 在s己憶體等的§己憶部，並於測量糊狀物6〇之截面積時停止使 預先設定之一者移動之伺服控制。 又，上述實施形態之系統控制器220，不僅在測量糊狀 參 物60截面積時，在測量糊狀物之截面形狀時也同樣停止伺 服控制而進行測量，藉此，可適當地進行糊狀物6〇之戴面 形狀的測量。另外，此時，參照第6圖，系統控制器22〇， 判斷出比起周圍距離算出值較小部分者為糊狀物6〇的部 分，而比起周圍距離算出值較小部分的水平方向長度得 出糊狀物60的寬度。又，系統控制器220從比起周圍距離算 出值較小部份的最小距離算出值與周圍的距離算出值間的 18 201004711 差，得出糊狀物60的高度。接者，系統控制器220，根據糊 狀物60的寬度與高度，可測量出該糊狀物6〇的載面形狀。 此外，該方法不限於僅測量以預定圖案塗布於生產用玻璃 基板50之糊狀物60的截面積，亦可測量塗布於檢查用基板 之圖案的截面積。又，雖以液晶密封用糊狀物做為塗布液 舉例說明，但不限於此，亦可使用如導電性糊狀物或液晶 等其他塗布液。又，雖以藉由壓力氣體的供給使塗布液從 嘴嘴吐出之空氣式頭部舉例說明，但不限於此，亦可使用 如噴墨式或螺旋式等機械式頭部。又，雖以做為測量截面 積或截面形狀之測量設備的載面積感應器12〇-1及12〇-2為 例，但不限於此，亦可使用其他感應器，如用以檢測出從 噴嘴142的吐出口 143到玻璃基板50表面間距離之雷射感應 器113-1及113-2。也就是說’移動雷射感應器用以使其在沿 Y轴方向線狀塗布之糊狀物上呈X軸方向橫切。接著，移動 中持續地在備有系統控制器220等演算機能的裝置（演算裝 置)讀取雷射感應器的輸出值，例如，從該輸出值的變化求 得糊狀物的寬度及高度，將幅度與寬度的乘算值乘以係 數’以計算出糊狀物的截面積。又，為使雷射感應器113-1 及H3-2藉由伺服馬達21〇的驅動呈X轴方向移動，在測量截 面積時’只要停止使基板平台116移動之伺服馬達2〇3及206 的伺服控制即可。 產業之可利用性 本發明之塗布裝置，作為有用的塗布裝置，可適當地 進行塗布於基板之塗布液的截面積或截面形狀的測量者。 19 201004711 【圖式簡單說明3 第1圖係使用本發明實施形態之塗布裝置的糊狀物塗 布系統的平面圖。 第2(a)、2(b)圖係顯示塗布單元的外觀立體圖及用以說 明塗布單元内各部移動方向之座標空間圖。 第3圖係顯示塗布喷嘴部之構造的圖。 第4圖係顯示以截面積感應器測量到塗布於玻璃基板 之糊狀物間距離之一例的立體圖。a coating device of the present invention, wherein the driving mechanism has a vocal motor, and the supplied motor is driven by the supplied electric power to feed the manufacturer's control device, and the cross-sectional area of the coating is measured by the measuring device. In the case of the cross-sectional shape, the supply of electric power to the aforementioned servo motor is stopped. According to this configuration, the power supply to the servo motor is stopped, and the servo control can be stopped. Further, the coating apparatus of the present invention has a drive shaft attached to at least one of the platform and the head, and the servo motor can rotate the drive shaft. Further, in the coating apparatus of the present invention, the control device controls the drive mechanism to stop the advancement of the cross-sectional area or the cross-sectional shape of the coating liquid due to vibration in the stage and the head portion. Set one of the servo controls. According to this configuration, it is only necessary to stop the servo control of the error in the measurement of the cross-sectional area or the cross-sectional shape of the canvas liquid in the platform and the head, thereby suppressing the stop of the servo control to the minimum necessary. Inside. Advantageous Effects of Invention According to the present invention, when measuring the cross-sectional area of the coating liquid applied to the substrate or the cross-sectional shape of 5 201004711, in the case where the platform or the head is stopped at the designated position, there is no accompanying servo control for alignment. The generated micro-vibration can be appropriately measured and the cross-sectional area or cross-sectional shape of the coating liquid can be appropriately measured. Therefore, the coating state of the coating liquid can be appropriately judged, and the coating quality reliability of the coating liquid can be improved. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a plan view showing a paste coating system using a coating apparatus according to an embodiment of the present invention. Figs. 2(a) and 2(b) are perspective views showing the appearance of the coating unit and a coordinate space for explaining the moving direction of each portion in the coating unit. Fig. 3 is a view showing the structure of a coating nozzle portion. Fig. 4 is a perspective view showing an example of measuring the distance between the pastes applied to the glass substrate by the cross-sectional area sensor. Fig. 5 is a side view showing an example in which the distance between the pastes applied to the glass substrate is measured by the cross-sectional area sensor. Fig. 6 is a side enlarged view showing an example in which the cross-sectional area sensor measures the distance between the pastes applied to the glass substrate. Fig. 7 is a view showing a part of the configuration of the servo control of the coating unit. Fig. 8 is a flow chart showing the action of measuring the cross-sectional area of the paste by the coating unit. [Embodiment 3] Best Mode for Carrying Out the Invention Hereinafter, embodiments of the present invention will be described using the drawings. Fig. 1 is a plan view showing a coating system using the coating apparatus of the embodiment of the invention 201004711. When the liquid crystal display panel is manufactured as shown in Fig. 1, the paste application system 10 applies a liquid crystal sealing paste as a coating liquid to the glass substrate 50 in a ring shape. The paste application system 10 is composed of coating units 20-1, 20-2, 20-3, and 20-4 constituting the coating apparatus according to the embodiment of the present invention, a substrate delivery mechanism 30, and a transfer robot 40. The glass substrate 50 to be coated with the paste is disposed on the upstream end 32 of the substrate transfer mechanism 30. The transport robot 40 can be moved in the extending direction of the substrate transfer mechanism 30 (direction A shown in Fig. 1), or can be rotated in the direction B shown in Fig. 1. The transport robot 4 transports the glass substrate 5 disposed at the upstream end 32 of the substrate transfer mechanism 3, and arranges them at the coating members 2〇_1, 20-2, 20-3, and 20-4 at any time. The coating units 20-1, 20-2, 20-3, and 20-4 apply a paste to the surface of the glass substrate 50. Since it takes more time to apply the paste than the conveyance robot 4 to transport the glass substrate 50 or the like, the time can be shortened by operating the coating members 20-1, 20-2, 20-3, and 20-4' in parallel. And improve productivity. After the paste is applied to the glass substrate 50, the transport robot 40 takes out the paste-coated glass substrate 50 from the coating units 20-1, 20-2, 20-3, and 20_4 at any time and arranges it in the substrate transfer mechanism 30. The downstream end 34. The paste is applied to the surface of the glass substrate 50 via this series of operations. The second (a) is a coating unit 2〇1, 2〇_2, 2〇_3, and 2〇4 (hereinafter, these coating units 2〇-1, 20-2, 20-3, and 20-4) An external perspective view of the term "application member 20". Further, the second (b) is a coordinate space diagram for explaining the moving direction of each portion in the coating unit 20. 7 201004711 As shown in Fig. 2(a), the coating unit 20 is composed of a frame 111, coating nozzle portions 112-1 and 112-2, laser sensors 113-1 and 113-2, and cameras 114-1 and 114. - 2, the column 115, the substrate platform 116, the 移动0 moving device 118, and the wearing area sensors 120-1 and 120-2. The frame 111 is mounted with a cylinder 115. The coating nozzle portion in- ι, the laser sensor 113-1, the camera 114-1, and the cross-sectional area sensor 120-1 are integrally formed to form the head portion 110-1' so as to be mounted on the column 115 as in the second (b) Move in the X and z directions as shown in the figure. Similarly, the coating nozzle portion 112_2, the laser sensor 113-2, the camera 114-2, and the cross-sectional area sensor 12〇_2 are integrally formed to form the head portion 110-2, and are mounted to the column 115 so as to be Move in the X direction and the z direction as shown in Fig. 2(b). In this manner, by providing a plurality of heads 11〇_丨 and 110-2, the glass substrate 5 is divided into a plurality of sub-substrates, and when the paste is applied to each of the sub-substrates, the head is simultaneously removed.丨 (7). (Here, the heads 110-1 and 110-2 are referred to as "head 11"), which can shorten the time and improve productivity. The substrate stage 116 is movable in the x-direction and the gamma direction as shown in Fig. 2(5), and is mounted on the lower surface of the 装置6»moving device 118, and is slightly rotatable in the 0 direction, and is mounted below. An unapplied adsorption hole is formed on the substrate platform 116. As shown in Fig. i, the glass substrate 5G transported by the transport robot 4 is vacuum-adsorbed on the upper surface of the substrate stage 116. The χυ θ moving device 118 is connected to the underside of the substrate platform ΐ6. Further, the χυθ moving device 118 can be moved in the direction of the direction and the Y direction as shown in Fig. 2(b) and the lower surface thereof is mounted on the frame ηι to be slightly rotatable in the Θ direction. 201004711 Before coating the paste, the cameras 114-1 and 114-2 take the surface of each of the glass substrates 50 and detect the marks (calibration marks) formed on the surface for positioning. After the calibration marks are detected by the cameras 114-1 and 114-2, the position at which the paste is applied to the surface of the glass substrate 5 is set in accordance with the relative position of the calibration marks. Thereafter, the heads 丨(7)-丨 and 丨(7) are appropriately moved in the X direction as shown in the second (b) diagram in accordance with the sub-substrate arrangement pitch of the glass substrate 50 by the respective servo control. Details of the servo control when the head 110 moves will be described later. After the position at which the paste is applied is specifically set, the nozzle portions 112-1 and 112-2 are applied, and the paste is discharged from the front end of the nozzle toward the surface of the glass substrate 5 disposed immediately below the nozzle. Fig. 3 is a view showing the structure of the coating nozzle portion 112_丨. As shown in Fig. 3, the coating nozzle portion 112-1 is composed of a syringe 140 and a nozzle 142. Moreover, the coating nozzle part 112-2 has the same structure. The syringe 14 is a container for filling the paste. The paste filled in the syringe 140 is pushed out toward the nozzle 142 as the gas pressure in the syringe increases. The nozzle 142 is detachably attachable to the lower end of the syringe 140, and the discharge port 143 at the front end is disposed to face the glass substrate 50 on the substrate stage 116. The nozzle 142 discharges the paste which is pushed out from the syringe 14 to the glass substrate 5 from the discharge port 143 at the tip end. Further, the coating nozzle portion m-i moves up and down in the two directions as shown in Fig. 2(b). Similarly, the coating nozzle portion 112-2 also moves up and down in the two directions as shown in Fig. 2(b). When the paste is applied, the XY0 moving device 118 can be appropriately moved not only in the X direction and the γ direction as shown in Fig. 2(b) but also in the 0 direction by the feeding control. Thereby, the substrate stage 116 mounted on the upper surface of the χγθ moving device 9 201004711 118 is moved, and the glass substrate 50 adsorbed on the substrate stage 116 is further moved in accordance with the coating shape of the paste to be applied. Details of the servo control when the substrate platform 116 is moved will be described later. The laser sensor 113-1 measures the distance between the glass substrates 5, and the distance between the discharge port 143 of the nozzle 142 and the surface of the glass substrate 50 can be detected from the measured value. Similarly, the laser sensor 113_2 measures the distance between the glass substrates 50, and the distance between the discharge port 143 of the nozzle port 42 and the surface of the glass substrate 50 can be detected from the measured value. If the detected value is not within the predetermined range, the probability that the cross-sectional area of the paste is an undesired cross-sectional area will increase. Therefore, by applying the nozzle portions 112-1 and 112-2 to move in the Z direction as shown in Fig. 2(b), the distance between the front end of the nozzle 142 and the glass substrate 5 is controlled within a predetermined range. The cross-sectional area sensor 120-1 constitutes a part of the measuring apparatus, and measures the distance between the pastes applied to the glass substrate 50, from which the cross-sectional area of the paste can be measured. Similarly, the cross-sectional area sensor 12〇_2 constitutes a part of the measuring device, and measures the distance between the pastes applied to the glass substrate 5, from which the cross-sectional area of the paste can be measured and measured. . Fig. 4 is a perspective view showing an example in which the distance between the pastes applied to the glass substrate 50 is measured by the cross-sectional area sensor 120-1. Fig. 5 is a side view, and Fig. 6 is a side enlarged view. As shown in the fourth to sixth figures, the wearing area sensor 120-1 irradiates the laser light from the light entrance/exit 121 when the paste 6 涂布 applied to the glass substrate 50 is located directly below it. At this time, as shown in FIG. 6, the cross-sectional area sensor 120-1 not only has a plurality of 201004711 from the light entrance/exit 121 toward the surface of the paste 60. • the laser light is irradiated to the glass substrate 5 around the paste 60. The laser light is illuminated above. And the cross-sectional area sensor 120-1 transmits the laser light to the paste 60 on the glass substrate 50 through the light entrance and exit 121, and then detects the reflected light of the paste 60 through the light entrance/exit 121, and controls the detection value toward the system. The device 220 outputs. The cross-sectional area sensor 120-1 can use the LT-9000 series or the LJ-G series manufactured by Keyence Corporation. The cross-sectional area sensor 120-2 is also the same. The measuring devices are constructed by the cross-sectional area sensors 120-1 and 120-2 and the system controller 220. ® Next, the details of the servo control when the head 11 〇 and the substrate stage 116 are moved will be described. Fig. 7 is a view showing a portion of the servo control portion of the coating unit 2'. Hereinafter, only the structure including the head portion 110-1 will be described, but the configuration including the head portion 110-2 is also the same. As shown in FIG. 7, the coating unit 20 has a servo motor 202, an encoder 203, a drive shaft 204, a servo motor 206, an encoder 207, a drive shaft 208, a servo motor 210, an encoder 211, and a drive shaft 212 that constitute a drive mechanism. The servo 0 driver 222 and the system controller 220 corresponding to the control device and the measuring device. The servo driver 222 is provided with a servo control unit 222a and a servo power supply circuit unit 222b. The position command signal is transmitted from the system controller 22 to the servo control unit 222a. The servo control unit 222a that receives the position command signal supplies power for transmitting commands from the servo power supply circuit unit 222b to the servo motors 202, 206, and 210 based on the position command signal. The application unit 20 supplies power from the external power source to each unit (the system controller 220, the servo driver 222, etc.) by the operator inputting a main power source (not shown). When power is supplied to the servo driver 222, the servo control unit 222a starts servo control of each of the 11 201004711 servo motors 202, 206, and 210. Specifically, if the system controller 220 does not issue a position command signal, the servo control unit 222a controls the servo motors 202, 206, and 210 to maintain the current position based on the output signals from the encoders 203, 207, and 211. When the system controller 220 issues a position command signal, the servo control unit 222a controls the servo motors 202, 206, and 210 to drive the output signals from the encoders 203, 207, and 211 while moving along with the command position. When the servo control is performed, the servo control unit 222a outputs a supply command of the predetermined power to the servo power supply circuit unit 222b. Further, when the system controller 220 stops the servo control, the supply of electric power from the servo power supply 电路 circuit portion 222b to the servo motors 202, 206, and 210 is stopped. For example, 'a resistor (not shown) is provided between the external power supply and the servo power supply circuit unit 222b, and the blocking switch is controlled by the system controller 220 to block the power supply from the external circuit to the servo power supply circuit unit 222b, or The servo control unit 222a incorporates a blocking circuit that blocks communication between the servo control unit 222a and the servo control shop path unit 222b, and controls the blocking circuit based on the command from the system controller 22A. The servo control unit 222a blocks the blocking circuit. Power is supplied from the servo power supply circuit unit 222b to the servo motors 2, 2, 206, and 210. The motor 202 and the drive shaft 2〇4 are used to move the substrate stage 116 in the γ direction as shown in Fig. 2(b). The servo motor 202 is driven according to an instruction from the servo driver 222, that is, the drive shaft 204 of the servo motor 202 is rotatably mounted, and the substrate platform 116 connected to the drive shaft 204 can be γ as shown in FIG. 2(b). Slide in the direction. The servo motor 206 and the drive shaft 208 move the substrate stage 116 in the X direction as shown in Fig. 2(b). The servo motor 206 is driven in accordance with a command of 12 201004711 issued from the servo driver 222, and the drive shaft 208 of the servo motor 206 is rotatably mounted. Further, the substrate stage 116 connected to the drive shaft 208 is slidable in the X direction as shown in Fig. 2(b). The servo motor 210 and the drive shaft 212 move the head 11〇_1 including the coating nozzle unit 112-1 and the cross-sectional area sensor 120-1 in the X direction as shown in Fig. 2(b). The servo motor 210 is driven in accordance with an instruction from the servo driver 222 to be rotatably mounted to the drive shaft 212 of the servo motor 210. Further, the head portion 1KM attached to the drive shaft 212 can be slidably moved in the X direction as shown in Fig. 2(b). The encoder 203 detects the amount of rotation of the servo motor 202 and outputs it to the servo drive 222. Similarly, the encoder 207 detects the amount of rotation of the servo motor 206 and outputs it to the servo driver 222, and the encoder 211 detects the amount of rotation of the servo motor 210 and outputs it to the servo driver 222. The servo drive unit 222 calculates the X-direction position and the γ-direction position of the substrate stage 116 based on the output value from the encoder 203 and the output value ' from the encoder 207'. Further, the servo driver 222 controls the servo motors 202 and 206 to adjust the position of the substrate stage 116 based on the calculated respective positions. For example, the servo motor 202 has been driven in a positive rotation so far, and when the substrate platform 116 is to pass the command position of the system controller 220, the feeding motor 202 can be controlled to be driven in a reverse rotation. Similarly, the 'servo driver 222 inputs the output value from the encoder 21', based on the output value, calculates the position of the discharge port 143 of the nozzle 142 of the nozzle portion 112-1 in the head portion 110-1, or the cross-sectional area sensor uoq The position of the light entrance and exit 121. Further, the servo driver 222 controls the servo motor 210 to adjust the position of the discharge port 143 or the light inlet/outlet 1^ based on the calculated 13 201004711. By the servo control of the feedback control, the position of the substrate platform 116, the discharge port 143 of the nozzle 142 of the coating nozzle portion 112-1, and the light entrance/exit 121 of the cross-sectional area sensor are adjusted. Next, the operation when the cross-sectional area of the paste 60 is measured by the coating unit 2A will be described with reference to a flowchart. Fig. 8 is a flow chart showing the operation when the coating unit 2 is used to measure the cross-sectional area of the paste 60. In addition, although the head 11 having the cross-sectional area sensor 120] is described below, the same is true for the head 110_2 having the cross-sectional area sensor 120-2. According to the operator's input of a main power source (not shown), The supply of power from the external power source to the servo driver 222 is started. The servo driver 222 starts supplying power from the outside, that is, starts servo control (s1〇). According to the instruction of the system controller 220, the surface detection of the glass substrate 50 is taken by the camera U4_i. When the calibration mark is issued, the position of the paste should be applied to the surface of the glass substrate 50 according to the relative position from the calibration mark. Then, the head 110- is servo-controlled and moved to the paste 6 at the mouth. The position on the glass substrate 5 directly below the discharge port 143 is 'discharged the paste 60, and is moved by the X direction and the γ direction of the substrate stage 116'. The paste 60 is applied to the glass substrate in a predetermined shape. 5〇(s1〇2) Then, the system controller 220 determines whether it is time to measure the cross-sectional area of the paste 60 applied to the glass substrate 50 (S103). For example, whenever a paste is present When 60 is applied to a predetermined number of glass substrates 5, the system controller 220 determines the time point at which the paste 60 is measured. 201004711 If the time point of the cross-sectional area of the paste 60 is not measured, the paste is continued as in S102. On the other hand, when measuring the time point of the loading area of the paste 60, the system controller 220 outputs a position command signal to the servo driving device 222 to move the head 120-1 or the substrate platform 116. The light-input port 121 of the cross-sectional area sensor 12〇_1 is directly below the measurement point of the area where the paste 60 is applied to the glass substrate 50. The servo driver 222 that receives the position command signal executes the command to perform the servo motor. 202, 206, and 210 control of positive or reverse rotation. Generally, one glass substrate 50 has a plurality of measurement points of the cross-sectional area of the paste 60 applied to the glass substrate 50. Therefore, the system controller 220, The servo drive unit 222 outputs a position command signal so that the light-input port 121 of the cross-sectional area sensor UO-1 is directly below, and is not measured in the measurement point of the cross-sectional area of the paste 60 applied to the glass substrate 5〇. According to the command, the servo driver 222 supplies predetermined power to the servo motors 202, 206, and 210, and causes the servo motors 202, 206, and 210 to rotate forward or reverse. Therefore, the servo motor 202 and the servo motor 202 are controlled by servo control. 206 performs positive rotation or reverse rotation, and not only moves the substrate platform 116, but also the servo motor 210 performs positive or reverse rotation, and moves the head portion 11 (M, so that the light entrance and exit 121 of the cross-sectional area sensor 12〇-1 is directly below the coating. The measurement point (si〇4) of the cross-sectional area of the paste 60 of the glass substrate 5〇. Next, the system controller 220 controls the above-described blocking switch or blocking circuit to stop the supply of electric power to the servo motors 2, 2, 206, and 210. Thereby, the servo control is stopped (S105). Further, power is continuously supplied to the encoders 203, 207, and 211. 15 201004711, the cross-sectional area sensor 120-1 irradiates the laser light from the light entrance 121 to the surface of the paste 60 and the glass substrate 50 around the paste 60, and receives the reflected laser light at the light entrance 121. . The cross-sectional area sensor 120-1 outputs the distance measurement value at this time to the system controller 220. The system controller 220 measures the cross-sectional area of the paste 60 applied to the glass substrate 5 based on the distance calculation value (S106). Here, referring to Fig. 6, the system controller 220 determines that the portion smaller than the calculated distance of the surrounding distance is the portion of the paste 60, and the length in the horizontal direction is smaller than the calculated portion of the surrounding distance. The width of the paste 60. Further, the system controller 220 obtains the difference between the minimum distance calculated value of the smaller portion of the surrounding distance calculation value and the surrounding distance calculated value, and the height of the paste 60 is obtained. The system controller 220' calculates the cross-sectional area of the paste 60 based on the width and height of the paste 6'. After the measurement of the cross-sectional area of the paste 60 is completed at the current measurement point, the system controller 220 controls the above-described blocking switch or the blocking circuit to operate the servo control again (S107). Further, while the servo control is stopped, the power is continuously supplied to the encoders 2, 3, 207, and 211. Therefore, the output parameters of the encoders 203, 207, and 211 are input to the servo control unit 222 & The position of the substrate platform 116 or the head uoq is not made unclear. Then, the system controller 220 determines whether or not there is an unmeasured measurement point in the cross-sectional area measurement point of the paste 60 applied to the glass substrate 5 (S108). If there is an unmeasured measurement point, such as si〇4, the operation of moving the head 110-1 and the substrate platform m is performed, and then the operation proceeds to S107, and the light of the area sensor 12G-1 is emitted. The person πι2ι 正下16 201004711 square, becomes the unmeasured measurement point. On the other hand, if there is no unmeasured measurement point, the state in which the paste 60 is applied to the glass substrate 50 (s1〇2) is restored, and the subsequent operation is repeated. Further, the system controller 220 can perform control in accordance with the calculation result of the cross-sectional area of the paste 6 in the above sl6. For example, the system controller 22 determines whether the cross-sectional area of the paste 6 计算 calculated by each of the plurality of measurement points is within the allowable value one by one, and if one of the measurement points exceeds the allowable value, it is regarded as abnormal. After the phenomenon is interrupted, the paste 6 is applied to the glass substrate 5 or the abnormality information occurring in the cross-sectional area is notified to the operator's control. Moreover, the system controller 220 averages the cross-sectional area of the paste 6〇 calculated by each of the plurality of measurement points, and by comparing the average value with the reference value, the increase and decrease can also be performed. (4) of the gas pressure. In this case, when the average value of the cross-sectional area of the paste 60 is larger than the reference value, the pressure of the gas supplied into the syringe (10) is lowered, thereby reducing the amount of paste_discharged from the nozzle (4). Further, the average value of the cross-sectional area of the paste 6 较 is smaller than the reference value, and the pressure of the gas supplied to the syringe 140 is increased by φ, thereby increasing the discharge amount of the paste 60 from the nozzle 142. In the coating unit 20 of the present embodiment, when the cross-sectional area of the paste 60 applied to the glass sheet 5 is measured, the servo motors 2G2, 2G6, and 21 (10) for moving the substrate stage 116 or the head/110 are stopped. That is to say, the kiosk stops the supply of electric power to the servo motors 2〇2 and 21〇, thereby preventing the feeding platform for the alignment when the substrate platform 116 or the head 11 such as u is stopped at a predetermined position. The vibrations in the micro-w generated by the feeding motors 202, 206, and 210 are controlled. Therefore, the distance from the entrance 121 of the light 17 201004711 to the surface of the paste 60 measured by the cross-sectional area sensor, or the distance from the light entrance (2) to the top of the glass substrate 5 of the periphery of the paste 60 is not caused by vibration. The change is made 'the measurement of the cross-sectional area of the paste 6 can be appropriately performed. As a result, it is possible to appropriately determine the application state of the paste 6 涂布 applied to the glass substrate 50, thereby improving the reliability of the coating quality, and further stabilizing the quality of the manufactured liquid crystal display panel. Further, in the above embodiment, the coating unit 20 which is both the servo-controlled moving head unit 110 and the substrate stage m is described, but the coating unit which is moved by servo control is also applicable to the present invention. Further, in the above embodiment, when the cross-sectional area of the paste 6 is measured, the servo control for moving both the head 110 and the substrate stage 116 is stopped, but if the head 11G and the substrate platform 116 are only When the vibration causes an error in the measurement of the cross-sectional area of the paste (9), the servo control for stopping the movement of the one of the cross-sectional areas of the paste 60 may be set in advance, and the suffix or the like may be recorded. § Recalling the part, and stopping the servo control that moves one of the presets when measuring the cross-sectional area of the paste 6〇. Further, the system controller 220 of the above-described embodiment not only measures the cross-sectional shape of the paste-like parameter 60 but also measures the servo control when the cross-sectional shape of the paste is measured, thereby making it possible to appropriately perform the paste. Measurement of the shape of the face of the object. Further, at this time, referring to Fig. 6, the system controller 22 determines that the portion smaller than the calculated distance of the surrounding distance is the portion of the paste 6 ,, and the horizontal direction is smaller than the calculated value of the surrounding distance. The length gives the width of the paste 60. Further, the system controller 220 obtains the difference between the minimum distance calculated value smaller than the surrounding distance calculated value and the surrounding distance calculated value by 18 201004711, and the height of the paste 60 is obtained. The system controller 220 can measure the shape of the surface of the paste 6 根据 according to the width and height of the paste 60. Further, the method is not limited to measuring only the cross-sectional area of the paste 60 applied to the production glass substrate 50 in a predetermined pattern, and the cross-sectional area of the pattern applied to the inspection substrate may be measured. Further, although the liquid crystal sealing paste is exemplified as the coating liquid, it is not limited thereto, and other coating liquid such as a conductive paste or a liquid crystal may be used. Further, the air type head which discharges the coating liquid from the nozzle by the supply of the pressurized gas is exemplified, but the invention is not limited thereto, and a mechanical head such as an ink jet type or a screw type may be used. Further, although the load-bearing area sensors 12〇-1 and 12〇-2 of the measuring device for measuring the cross-sectional area or the cross-sectional shape are taken as an example, the present invention is not limited thereto, and other sensors may be used, for example, to detect The laser sensors 113-1 and 113-2 of the discharge port 143 of the nozzle 142 are spaced from the surface of the glass substrate 50. That is to say, the moving laser sensor is used to make it cross-cut in the X-axis direction on the paste coated linearly in the Y-axis direction. Then, during the movement, the device (calculation device) having the calculation function such as the system controller 220 is continuously read the output value of the laser sensor, for example, the width and height of the paste are obtained from the change in the output value. Multiply the multiplication of the amplitude and width by the coefficient ' to calculate the cross-sectional area of the paste. Further, in order to move the laser sensors 113-1 and H3-2 in the X-axis direction by the drive of the servo motor 21A, the servo motors 2〇3 and 206 for stopping the substrate stage 116 are stopped when measuring the cross-sectional area. The servo control can be. Industrial Applicability The coating apparatus of the present invention can suitably measure the cross-sectional area or cross-sectional shape of the coating liquid applied to the substrate as a useful coating apparatus. 19 201004711 [Brief Description of the Drawings] Fig. 1 is a plan view showing a paste coating system using a coating apparatus according to an embodiment of the present invention. Figs. 2(a) and 2(b) are perspective views showing the appearance of the coating unit and a coordinate space for explaining the moving direction of each portion in the coating unit. Fig. 3 is a view showing the structure of a coating nozzle portion. Fig. 4 is a perspective view showing an example of measuring the distance between the pastes applied to the glass substrate by the cross-sectional area sensor.
第5圖係顯示以截面積感應器測量到塗布於玻璃基板 之糊狀物間距離之一例的側面圖。 第6圖係顯示截面積感應器測量到塗布於玻璃基板之 糊狀物間距離之一例的側面擴大圖。 第7圖係顯示有關塗布單元之伺服控制之部分構造的 圖。 第8圖係顯示以塗布單元測量糊狀物截面積時動作的 流程圖。Fig. 5 is a side view showing an example in which the distance between the pastes applied to the glass substrate is measured by the cross-sectional area sensor. Fig. 6 is a side enlarged view showing an example in which the cross-sectional area sensor measures the distance between the pastes applied to the glass substrate. Fig. 7 is a view showing a part of the configuration of the servo control of the coating unit. Fig. 8 is a flow chart showing the action of measuring the cross-sectional area of the paste by the coating unit.
【主要元件符號說明】 10...糊狀物塗布系統 40...運送機器人 20,20-1,20-2,20-3,204···塗布單元 50.··玻璃基板 (塗布裝置） 30…基板交接機構 32…上游端 34...下游端 60.. .糊狀物 110-1,110-2...頭部 111.. .框體 U2-l，112-2…塗布喷嘴部 20 201004711 113-l，113-2...雷射感應器 143...吐出口 114-1,114-2···攝影機 202,206,210…伺服馬達 115…柱體 203,207,211…編碼器 116…基板平台 204,208,212..·驅動軸 113-1,113-2...雷射感應器 220…系統控制器 118...XY0移動裝置 222…伺服驅動器 120-1,120-2...截面積感應器 222a·..伺控制部 Π1...光出入口 222b...伺服電源電路部 140...注射器 Α,Β...方向 142…喷嘴[Description of main component symbols] 10... Paste coating system 40...Transport robot 20, 20-1, 20-2, 20-3, 204···Coating unit 50.··Glass substrate (coating device) 30 ...substrate transfer mechanism 32...upstream end 34...downstream end 60.. paste 110-1,110-2...head 111..frame U2-l,112-2...coating nozzle part 20 201004711 113-l, 113-2...Laser sensor 143...Discharge outlet 114-1,114-2···Camera 202,206,210...Servo motor 115...Cylinder 203,207,211...Encoder 116...Substrate platform 204,208,212..·Driver Axis 113-1, 113-2...laser sensor 220...system controller 118...XY0 mobile device 222...servo driver 120-1,120-2...cross-sectional area sensor 222a·..serving control unitΠ1. .. light inlet and outlet 222b...servo power supply circuit unit 140...injector Α,Β...direction 142...nozzle
21twenty one