200907356 九、發明說明： 【發明所屬之技術領域】 技術領域 本發明係有關於設有彈簧針之探針單元及利用其之基 5板修復裝置，更詳而言之，係有關於藉設有可支撐彈菁針 之透明塊體，可以目視判斷接觸與否，而經由探針單元， 提高連接判斷之可靠度，利用導電性板，連結彈菁針與導 電f生針，去除纜線，藉此，可提高製程效率性之設有彈簧 針之探針單元及利用其之基板修復裝置。 10 本發明係有關於一種平板顯示器之基板電路之修復裝 置’更詳而言之’其係有關於一種構造成可與基板電路修 復同時地進行電路之開放/短路檢測之平板顯示器之基板 電路之修復裝置。 【先前技術】 15背景技術 平板顯示器可分類為陰極射線管（Cath〇d Ray Tube : CRT)顯示器及液晶顯示器等（叫咖Crystai Dispiay: LCD)。當中，由於LCD具有耗費電力小輕量之優點，故 最近受到注目。 20 LCD由陣列基板、相對基板及液晶層等構成。當中， 於陣列基板形成排列成矩陣狀之複數像素電極、沿複數像 素電極之行配置之複數掃瞄線及沿像素電極之列配置之複 數信號線。在_基板之製造過程巾’有產生電性信號線 重疊等缺陷之虞。當於陣列基板產生缺陷時，無法形成正 5 200907356 確之影像。因而，需切斷重疊之信號線，以不致相互重疊， 將此過程稱為「修復」。 在此種修復過程中，於製作LCD面板後，為使用探針 單元，確認各信號線之信號傳達之問題點之有無，必須進 行電性特性檢查。此是因檢查LCD是否製造成符合特定基 準之故。 最近隨著半導體元件及LCD之信號傳達端子之高積體 化發展，為檢查LCD電性特性，而廣泛地使用設有探針之 探針單元。 第1圖係顯示習知探針單元1〇〇之結構者。如圖所示， 探針單元100由複數探針U()、具有複數溝，以插入各探針 130之半透明塊體丨1〇、測量可否對被檢查體14〇傳達信號之 測試益160。藉使塊體11〇相對於被檢查體14〇適當地移動， 探針130之一端接觸被檢查體14〇之信號傳達端子，探針13〇 之另一端經由纜線15〇，連接於測試器16〇，可確認被檢查 體H0之信號傳達不良與否。 然而’在此種習知之探針單元100中，在被檢查體140、 例如LCD與探針13〇之接觸過財，無法以視覺確認探針 30 ϋ此’不易明確掌握前述接觸狀態，有產生不良連結 之問題點。再者’即使掌握不良，仍無法進行對該不良是 、皮檢查體自身不良、探針不良或接觸不良（⑴⑷以明）之 明確確認。因此，由於作業貝需逐—確認該等而有不易 自動化之問題點。 為解決則述接觸不良’而附設可判斷接觸與否之探測 200907356 感測器時，仍不易明確提高其可靠度，有檢查之步驟階段 曰 力工時間（tact time )增加之問題點。 【發明内容】 發明揭示 5發明要解決之課題 供藉==為解!前述問題點而發明者’其目的在於提 設置支撐彈善顯不盗之電性信號特性進行檢查之探針單元 用導電/針之透明塊體，可以目視判斷接觸與否，利 〇可提連結彈簧針料電性㈣，去除祕，藉此， 板=;效率性之設有彈簧針之探針單湖用其之基 用以解決課題之機構 用以達成前述目的之本發明 檢查體電性接觸之 W早疋係包含有與被 15 20 支樓前述複數彈蕃 針、以透明素材料構成，以可 讀取之資料撐部'傳達經由前述複數彈菁針 述導電性接腳之導電性妾:及電性連結前述複數彈簧針與前 電性板以由導電性薄板構成為佳。 該探針單2板以由鍵銅（Becu)形成為佳。 有無接觸之照相機部確認前述彈簧針與被檢查體 移動之探針移動機構。⑴述探針早元於垂直水平方向 前述照相機宜更且右田，v 有無接觸之照相機 °忍則述彈簧針與被檢查體 機及使前述照相機於水平方向移動之照相 200907356 機移送機構。 5 10 15 20 本發明另一態樣之平板顯示器之基板修復裝置係檢查 基板之缺陷，進行修復者，其包含有修復單元及移動機構， 該修復單元係具有具放置需修復之對象之平台之修復台、 檢查形成於為前述需修復之對象之基板的缺陷區域之光學 部、投射雷射，以將前述基板之缺陷區域修復之雷射部及 檢測前述經修復之基板電路之開放與短路之檢查部；該移 動機構係使前述修復單元於前述X軸及γ軸移動者；前述檢 查部具有與被檢查體電性接觸之複數彈簧針、為可支撐前 述複數彈簧狀構造之透明素材找部、傳雜由前^ 數彈簧針讀取之㈣之導接岐紐連結前述複數彈 普針與前述導電性接腳之導電性板。。 ° 且八,便别述彈簧針與前述導電性 接腳電性連接之導電性板、用以確認前述彈簧針與被檢杳 體有無接觸之照相機部及可使前述探針單元於垂直水= 向移動之探針移動機構。 簧針與被檢查體有 方向移動之照相機 别述照相機宜具有用以確認前述彈 無接觸之照相機及使前述照相機於水平 移送機構。 發明之效果 之支範圍第1項之發明’相較於習知支_ 成支樓部^構造’以由透明素材構成之1個板才 ^以目視確認彈簧針之接觸與 高檢查作業之可靠声，同時，因、古藉此，可! 靠度同時，因通電，藉利用導電性板 200907356 可提高製造上之效率。 又’根據申〜專利範圍第2項之發明，可使探針單元設 備全體之規模薄型化。 根據申請專利範圍第3項之發明，可提高檢查作業之效 5 率性。 根據申請專利範圍第4項之發明，可提高檢查作業之效 率性。 根據申請專利範圍第5項之發明，由於可經由透明素材 之支樓。Ρ接觸與否及不良與否之確認可自動化，故可提 南正確性。 根據申π專利範圍第6項至第8項之發明，經由已改善 目視辨認性之本發明之探針單元，可實現有效率之檢查作 業故可進仃修復，提高檢查之可靠度，提高作業步驟之 效率性。 15 【實施方式】 用以實施發明之最佳形態 以下’參照所附之圖式，詳細說明本發明之結構及作 用。 2〇 #照第2圖，本發明之探針單元1以與被檢查體連接之 複數彈s針10、支樓彈簧針1〇，以透明素材之塊體構成之 支撐部20、配置於支撐部20下層之導電性板40、貫穿導電 性板40，接觸配置之導電性接腳30。此導電性接腳3〇形成 藉由導電性板4〇與彈簧針_性接觸之構造。 9 200907356 —般於探針與被 同時，可實現精 彈簧針]〇係於内部設有預定彈性體， Μ體接觸時’可以彈性保護被檢查體， 密之接觸。 •切獅魅分成该及下板，切探針之f知構造 不同，其係去除下板，僅以上板構成，同時，以透明材質 形成，㈣造成可目視與彈箐針1G之朗與否或作業狀 況。此時’支撐部20以透明材質之塊體形成為佳。 此種本發明之結構可直接目視確認使用習知不透明塊 體，支撐探針之-般構造產生之探針之精確度及可靠度降 1〇低之問題造成之不良，且可進行檢查，而具有提高檢查作 業之效率性之優點。再者，由於不需要使用習知不透明塊 體時，用以區別必要之接觸與否之感測器，故亦具有可謀 求製程上之加工時間縮短及製造費用減低之優點。 為使被檢查體10及接觸之彈簧針10電性通電，導電板 15 40以具有更精密之功能之板構成，以取代連結纜線之一般 構造。舉例言之，藉以鈹銅（BeCu)之合金材質之薄導電 性薄板形成板，可謀求全體構造之簡單化。特別是在使彈 簧針10與導電性接觸30電性接觸之構造中，構造成各彈簧 針10與導電性接腳30之末端以貫穿導電板4〇末端之形狀之 20接觸指構造連結，而可電性通電，藉此，於對被檢查體之 電性特性試驗時，可平順地進行通電。 具體言之，經過以下之過程，即，彈餐針1〇與被檢查 體、更細部為LCD之閘極/數據線接觸，探測電性信號之缺 陷與否，確認與此相關之資訊是否經由導電板4〇之接觸 200907356 指，沿著導電性接腳3〇傳達。 接著，參照第3圖，就裝設有本發明探針單元之平板_ 示器之基板修復裝置之結構及作用作說明。 如第3圖所示，本發明平板顯示器之基板修復裝置由以 修復台600、設置於修復台600上，以放置作為修復對象之 基板之平台700、檢查在基板電路產生之缺陷區域之光學部 300、檢查已修復之基板電路之開放/短路之檢查部1〇如構成 之修復單元、使此修復單元於X軸、γ軸移動之又軸移動機 構400及γ軸移動機構500構成。 10 修復台具有圖中未示，可去除在外部及内部產生之 之振動之除振機構，於修復台600上面沿χ軸方向裝設乂軸 移動機構400。X軸移動機構400由在修復台600之X軸方向 分隔配置，裝設之X軸支撐台41〇、設置於χ軸支撐台41〇上 面’使Υ軸支撐台510於X軸方向滑動之X軸軌道42〇構成。 15 另一方面，於X軸支撐台410上面設置配置於與Χ軸支 撐台410垂直之方向之Υ軸移動機構500。Υ軸移動機構5〇〇 由兩端與X軸轨道42〇連結，構造成可沿χ軸軌道42〇滑動之 Υ轴支擇台510、在γ軸支撐台510側面配置於γ軸方向之γ 轴軌道520、附設於Υ軸軌道520，沿Υ軸軌道520滑動，裝 2〇设則述修復單元之Υ軸軌道塊530構成。於以X軸移動機構 400及Υ轴移動機構5〇〇圍住之修復台6〇〇之内側面設置用以 支撑基板之平台7〇〇。 光學部300為用以檢查形成於平板顯示器之基板上之 缺陷區域者，由光源310 、透鏡320、感測器（圖中未示） 11 200907356 構成。當光從光源310照射至基板上時，照射之光反射至基 板，以基板反射之光通過透鏡32〇，傳達至感測器。感測器 利用以基板反射之光之光量之差，檢查有無不良。 當利用本發明之光學部3〇〇時，即使不直接接觸基板， 5仍可判別有無不良，故於基板產生損傷之問題少，藉去除 因檢查裝置之座標系統與修復裝置之座標系統之不一致產 生之錯誤，可明顯示減低不良率。 雷射部200係去除平板顯示器之基板上之缺陷者，由產 生雷射光束之雷射振盪器210、收集雷射光束之集光透鏡 10 220提供雷射光束之移動通路之雷射頭230構成。藉從雷 射振盪H21G產生之雷射光束切斷重疊之信號線等，可修復 基板之缺陷。 檢查4100a係用以檢查所修復之基板電路之開放/短 路者檢查部l〇〇a由探針、用以確認基板之接觸與否之照 15相機(圖中未不）、探針單元卜使探針單元1移動之探針 移動機構（圖中未示）構成。 如則述’褒設本發明探針單元之修復裝置形成具透明 材質之彈簧針支揮部’藉此，可改善目視辨認性，可以目 j確〜進行探針作業。為以更自動化之系統實現此作業， 且更裝。又可更精密地目視確認接觸與否之照相機部。此照 相機部以位於彈簧針之上側為佳。 在本發明中，照相機部為可調整位置，以具有可 使二相機移動之照相機移送機構為更佳。此照相機移送機 構且由、、、相機移送軌道、一側連結於照相機、另〆側連結 12 200907356 於照相機料猶，沿則目_魏道 塊構成。 <"、、相機連結 5 10 15 20 在本發明中，藉具有照相機移送機構 之移動誤差，經由此，彈簣針可正確地對 彈汽針 查體、換言之為被檢查體之端子或塾而與I接觸 =身之破損或闕纽與料村經由透料材支撐= 探針移動機構係發揮使探針單元垂直、水 用，宜由使探針單元上下移動之垂直移 元前後移動之水平移動機構構成。在此，垂直移 由滚珠螺桿驅動裝置構成，水平移動機構可由水平執道及 水平軌道塊構成。 卜卞机運及 以下，就利用本發明之修復裳置，將平板顯示器之基 板修復之方法作說明。 只τ裔（丞 首先，將基板放置於平台上時，驅動光學部，一面使 修復单兀移動，-面檢查基板是否有缺陷。裝設有修復單 元之Y軸軌道塊沿Y軸執道移動，包含Y軸執道之Y軸支撐 台沿X軸軌道移動，故可檢查基板所有地點。 從光學部之光源將光照射至基板上，從基板反射之光 通過透鏡部，傳達域測器。感測器利频基板反射之光 之光量之差，檢查缺陷與否。此時，若無缺陷時，便搬出 基板’而#魏_時，_動修復單元，錢進行修復 之雷射部位於缺陷區域上部後’投射雷射光束，切斷重疊 之6號線等，藉此，進行修復。 13 200907356 當修復過程=束時，檢查部之探針單元之彈菁針接觸 被檢查體mi電阻值’檢查基板電路之開放/短⑽ 否。此時’是否與基板接觸可經由透明素材支撐部，目視 確認，故以其他感㈣。彻照相機移動機構，根據要 觀測之位置，韵照相機之位置，利用探針移動機構，使 探針單元細微移動’藉此，可精率地 J精在地進仃對所需位置之檢 否〇 產業上之可利用性 10 15 支：：下，塊_之 之檢查基板之接嶋之判二=關於經由探針單元 去除纜 又，藉以導電性板使彈簧針與導電接觸連处， 線’具有可提高製程之效率性之效果。 、、。’ 方面，在本發明之說明書内，以數個較佳實r护 =本發明，只要為該業者，應明瞭在不 實= 種變形 〇利範圍揭示之本發明範•及思想下’可進二附之 及修ίΡ。 ％仃多 【圖式簡單說明】 =1圖係顯示習知技術之探針單S之截面圖。 第=系顯示本發明探針單元主要部份之截面圖 圖係顯示本發明基板修復裝置之立體圖。 1〇…彈簧針 【主要7L件符號說明】 1…探針單元 14 200907356 20…支撐部 400... X軸移動機構 30...導電性接腳 410... X軸支樓台 40...導電性板 420... X軸軌道 100a...檢查部 500· "Y軸移動機構 200...雷射部 510…Y軸支樓台 210...雷射振盪器 520…Y軸執道 220…集光透鏡 530...Y車由軌道塊 230...雷射頭 600…修復台 300...光學部 700...平台 310...光源 320·..透鏡 15200907356 IX. DESCRIPTION OF THE INVENTION: TECHNICAL FIELD The present invention relates to a probe unit provided with a pogo pin and a base 5 plate repairing device using the same, and more particularly, The transparent block of the bullet can be supported, and the contact can be visually judged, and the reliability of the connection judgment can be improved through the probe unit, and the conductive plate can be connected to the elastic needle and the conductive f-pin to remove the cable. Therefore, the probe unit provided with the pogo pin and the substrate repairing device using the same can improve the process efficiency. The present invention relates to a substrate circuit repairing device for a flat panel display. More specifically, it relates to a substrate circuit of a flat panel display configured to perform open/short detection of a circuit simultaneously with substrate circuit repair. Repair the device. [Prior Art] 15 Background Art Flat panel displays can be classified into cathode ray tube (CRT) displays and liquid crystal displays (Crystai Dispiay: LCD). Among them, LCD has recently attracted attention because it has the advantage of being small in power and light weight. 20 LCD is composed of an array substrate, a counter substrate, a liquid crystal layer, and the like. In the array substrate, a plurality of pixel electrodes arranged in a matrix, a plurality of scanning lines arranged along a row of the plurality of pixel electrodes, and a plurality of signal lines arranged along the row of the pixel electrodes are formed. In the manufacturing process of the substrate, there are defects such as overlapping of electrical signal lines. When a defect occurs in the array substrate, the image of the positive image cannot be formed. Therefore, it is necessary to cut off the overlapping signal lines so as not to overlap each other, and this process is called "repair". In the repair process, after the LCD panel is manufactured, in order to use the probe unit to confirm the signal transmission problem of each signal line, it is necessary to perform electrical property inspection. This is due to the inspection of whether the LCD is manufactured to meet specific criteria. Recently, with the development of high-intensity signal terminals of semiconductor elements and LCDs, probe units provided with probes have been widely used to check the electrical characteristics of LCDs. Fig. 1 shows the structure of a conventional probe unit. As shown in the figure, the probe unit 100 is composed of a plurality of probes U(), having a plurality of grooves for inserting the translucent blocks of each of the probes 130, and measuring whether the signal can be transmitted to the object 14 to be tested. . When the block body 11 is properly moved relative to the object to be inspected 14, the one end of the probe 130 contacts the signal transmission terminal of the object to be inspected, and the other end of the probe 13 is connected to the tester via the cable 15〇. 16〇, it can be confirmed whether the signal of the object H0 is poorly conveyed or not. However, in the conventional probe unit 100, the contact between the test object 140, for example, the LCD and the probe 13 is too large, and it is impossible to visually confirm the probe 30. The problem of bad links. Furthermore, even if the problem is poor, it is impossible to confirm the defect, the skin test itself is defective, the probe is poor, or the contact is poor ((1) (4) to the explicit confirmation). Therefore, because of the need to confirm the work, it is difficult to automate the problem. In order to solve the problem of contact failure, it is possible to detect the contact or not. In the case of the sensor, it is not easy to clearly improve the reliability of the sensor, and there is a problem in the step of the inspection step 曰 the increase in the tact time. SUMMARY OF THE INVENTION The present invention discloses a problem to be solved by the invention. / The transparent block of the needle can be visually judged whether the contact is made or not, and the magnetic needle can be connected to the spring needle material (4) to remove the secret, thereby, the board =; the efficiency of the probe with the spring needle is used for the single lake. The invention relates to a mechanism for solving the above-mentioned object, and the invention relates to the electrical contact of the test body, which comprises the above-mentioned plurality of pins and a transparent material, and is readable. The data support portion 'transmits the conductive 妾 of the conductive pin through the plurality of elastic crystals, and electrically connects the plurality of pogo pins and the front electric plate to be made of a conductive thin plate. The probe single 2 plate is preferably formed of a bond copper (Becu). The camera moving unit that confirms the movement of the pogo pin and the object to be inspected by the camera unit having no contact. (1) The probe is in the vertical horizontal direction. The camera is more suitable and right-handed. v The camera has no contact. The camera is used to test the spring needle and the body to be inspected and to move the camera in the horizontal direction. 200907356 Machine transfer mechanism. 5 10 15 20 The substrate repairing device of the flat panel display according to another aspect of the present invention is for repairing a defect of the substrate, and the repairing device includes a repairing unit and a moving mechanism, and the repairing unit has a platform for placing an object to be repaired. a repairing station, an optical portion formed in a defect region of the substrate to be repaired, a projection laser, a laser portion for repairing the defective region of the substrate, and an open and short circuit for detecting the repaired substrate circuit An inspection unit that moves the repair unit to the X-axis and the γ-axis; the inspection unit has a plurality of spring pins that are in electrical contact with the object to be inspected, and a transparent material-seeking portion that can support the plurality of spring-like structures The conductive board of the conductive pin is connected to the conductive pin of the above-mentioned plurality of pins and the conductive pin. . ° and 8, the conductive plate electrically connected to the conductive pin, the camera portion for confirming whether the spring pin is in contact with the object to be inspected, and the probe unit can be vertically watered. Move the mechanism to the moving probe. The reed needle and the camera in which the object to be inspected are moved in direction. The camera should preferably have a camera for confirming that the bomb is not in contact and a horizontal transfer mechanism for the camera. According to the invention of the first aspect, the invention of the first item is compared with the conventional branch _ into the branch structure, and the one plate made of the transparent material is visually confirmed to be reliable for the contact of the pogo pin and the high inspection work. Sound, at the same time, due to the ancient, can be! At the same time, due to power, by using the conductive plate 200907356 can improve the efficiency of manufacturing. Further, according to the invention of the second aspect of the patent application, the entire size of the probe unit device can be made thinner. According to the invention of the third application of the patent application, the efficiency of the inspection operation can be improved. According to the invention of claim 4, the efficiency of the inspection work can be improved. According to the invention of claim 5, it is possible to pass through a building of transparent material. The confirmation of contact or non-performing or not can be automated, so it can be correct. According to the invention of the sixth to eighth aspects of the patent application scope of the invention, the probe unit of the present invention which has improved the visibility can realize an efficient inspection operation, thereby enabling repair, improving the reliability of the inspection, and improving the operation. The efficiency of the steps. [Embodiment] Best Mode for Carrying Out the Invention Hereinafter, the structure and function of the present invention will be described in detail with reference to the accompanying drawings. 2〇# According to Fig. 2, the probe unit 1 of the present invention is provided with a plurality of elastic s needles 10 connected to the object to be inspected, a branch spring pin 1〇, and a support portion 20 composed of a block of transparent material. The conductive plate 40 of the lower portion of the portion 20 penetrates the conductive plate 40 and contacts the conductive pins 30 disposed. The conductive pin 3 is formed to be in sexual contact with the spring pin by the conductive plate 4''. 9 200907356 As for the probe and the quilt, the ejector pin can be realized with a predetermined elastic body. When the mortise is in contact, it can elastically protect the object to be inspected and close contact. • The lion charm is divided into the lower plate and the lower plate. The structure of the cutting probe is different. The lower plate is removed, and only the upper plate is formed. At the same time, it is formed by a transparent material. (4) The visual and bullet 1G is visually or not. Or job status. At this time, the support portion 20 is preferably formed of a block of a transparent material. The structure of the present invention can directly visually confirm the use of the conventional opaque block, and the accuracy and reliability of the probe generated by the general structure of the support probe is poor, and can be inspected, and the inspection can be performed. It has the advantage of improving the efficiency of inspection work. Furthermore, since it is not necessary to use a conventional opaque block, the sensor for distinguishing the necessary contact is also advantageous in that the processing time on the process is shortened and the manufacturing cost is reduced. In order to electrically energize the object to be inspected 10 and the contact spring pin 10, the conductive plate 15 40 is constructed of a plate having a more precise function, instead of the general structure of the connecting cable. For example, a thin conductive sheet made of an alloy of beryllium copper (BeCu) can be used to form a sheet, and the entire structure can be simplified. In particular, in the structure in which the pogo pin 10 is electrically in contact with the conductive contact 30, the end portions of the pogo pins 10 and the conductive pins 30 are connected by a contact finger structure of a shape penetrating the end of the conductive plate 4, and The electric current can be electrically supplied, whereby the electric current can be smoothly supplied when the electrical property test of the object to be inspected is performed. Specifically, after the process, that is, the pin 1 is in contact with the object to be inspected, and the thinner portion is the gate/data line of the LCD, and the defect of the electrical signal is detected, and whether the information related thereto is confirmed. The contact of the conductive plate 4〇200907356 means that it is conveyed along the conductive pin 3〇. Next, the structure and operation of the substrate repairing apparatus of the flat panel device in which the probe unit of the present invention is mounted will be described with reference to Fig. 3. As shown in FIG. 3, the substrate repairing apparatus of the flat panel display of the present invention comprises a repairing station 600, a platform 700 disposed on the repairing station 600 for placing a substrate as a repair target, and an optical portion for inspecting a defective area generated in the substrate circuit. 300. The inspection unit 1 for inspecting the open/short circuit of the repaired substrate circuit comprises, for example, a repair unit configured to move the shaft repair mechanism 400 and the γ-axis moving mechanism 500 for moving the repair unit on the X-axis and the γ-axis. The repairing table has a vibration-removing mechanism (not shown) that removes vibration generated externally and internally, and a shaft moving mechanism 400 is disposed on the upper surface of the repairing table 600 in the direction of the x-axis. The X-axis moving mechanism 400 is disposed to be disposed in the X-axis direction of the repairing table 600, and the X-axis supporting table 41 is mounted on the upper surface of the cymbal support table 41, and the X-axis sliding table 510 is slid in the X-axis direction. The shaft rail 42 is formed. On the other hand, on the X-axis support table 410, a spindle movement mechanism 500 disposed in a direction perpendicular to the spindle support 410 is provided. The x-axis moving mechanism 5 is coupled to the X-axis rail 42A at both ends, and is configured to be slidable on the y-axis rail 42 Υ, and γ in the γ-axis direction on the side of the γ-axis support 510. The shaft rail 520 is attached to the yoke rail 520 and slid along the yoke rail 520, and the yoke rail block 530 of the repairing unit is disposed. A platform 7A for supporting the substrate is disposed on the inner side surface of the repairing table 6A surrounded by the X-axis moving mechanism 400 and the x-axis moving mechanism 5''. The optical portion 300 is a defect region for inspecting a substrate formed on a flat panel display, and is composed of a light source 310, a lens 320, and a sensor (not shown) 11 200907356. When light is irradiated from the light source 310 onto the substrate, the irradiated light is reflected to the substrate, and the light reflected by the substrate passes through the lens 32 and is transmitted to the sensor. The sensor checks for the presence or absence of a defect by the difference in the amount of light reflected by the substrate. When the optical portion 3 of the present invention is used, even if the substrate is not directly contacted, it is possible to discriminate whether or not there is a defect, so that there is little problem of damage to the substrate, and the difference between the coordinate system of the inspection device and the coordinate system of the repair device is removed. The resulting error can clearly indicate a reduction in the rate of non-performing. The laser portion 200 removes defects on the substrate of the flat panel display, and the laser head 230 that generates the laser beam by the laser oscillator 210 that generates the laser beam and the collecting lens 10 220 that collects the laser beam constitutes a laser beam 230. . The defect of the substrate can be repaired by cutting off the overlapping signal lines and the like by the laser beam generated by the laser oscillation H21G. Check 4100a is used to check the open/short-circuit inspection unit l〇〇a of the repaired substrate circuit. The probe is used to confirm the contact of the substrate. 15 Camera (not shown), probe unit The probe moving mechanism (not shown) in which the probe unit 1 moves is constituted. As described above, the repairing device of the probe unit of the present invention is formed into a spring-loaded branch portion having a transparent material, whereby the visibility can be improved, and the probe operation can be performed. To do this in a more automated system, and to install it. Further, it is possible to visually confirm the camera portion that is in contact with it or not. It is preferable that the camera portion is located above the pogo pin. In the present invention, the camera portion is an adjustable position to have a camera transfer mechanism that allows the two cameras to move. The camera transfer mechanism is composed of a camera, a camera, a track, a side connected to the camera, and a side link 12 200907356, which is formed by the camera. <", camera connection 5 10 15 20 In the present invention, by the movement error of the camera transfer mechanism, the magazine needle can correctly check the pinhole, in other words, the terminal of the object to be inspected or接触 与 与 与 与 与 与 与 与 = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = The horizontal moving mechanism is constituted. Here, the vertical shift is constituted by a ball screw driving device, and the horizontal moving mechanism can be constituted by a horizontal road and a horizontal track block. The following is a description of the method of repairing the substrate of the flat panel display by using the repairing skirt of the present invention. Only the shoji (丞 first, when the substrate is placed on the platform, the optical unit is driven to move the repair unit, and the surface is inspected for defects. The Y-axis track block with the repair unit is moved along the Y-axis. The Y-axis support table including the Y-axis is moved along the X-axis track, so that all the substrates can be inspected. Light from the light source of the optical portion is irradiated onto the substrate, and the light reflected from the substrate passes through the lens portion to transmit the domain detector. The difference between the amount of light reflected by the sensor's spectrum substrate, and whether the defect is checked. At this time, if there is no defect, the substrate is removed. #魏_, _ dynamic repair unit, the laser is repaired. After the upper part of the defect area, the laser beam is projected, and the overlapped line 6 is cut off, thereby repairing. 13 200907356 When the repair process = beam, the probe of the probe unit of the inspection unit contacts the body of the test body. The value 'checks the opening/closing of the substrate circuit (10) No. At this time, whether or not the substrate is in contact with the substrate can be visually confirmed through the transparent material supporting portion, so that it is otherwise (4). The camera moving mechanism is based on the position to be observed. By using the probe moving mechanism, the probe unit is finely moved, thereby making it possible to finely check the required position of the product. Industrial availability 10 15 ::, block _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ In the specification of the present invention, the present invention is exemplified by a number of preferred embodiments. As long as it is for the industry, it should be understood that the invention may be invented under the scope of the invention.仃 仃 修 【 【 【 【 【 【 =1 =1 =1 =1 =1 =1 =1 =1 =1 =1 =1 =1 =1 =1 =1 =1 =1 =1 =1 =1 =1 =1 =1 =1 =1 =1 =1 =1 =1 =1 =1 =1 =1 =1 =1 =1 =1 =1 =1 =1 A perspective view of the substrate repairing device of the present invention. 1〇...spring pin [main 7L symbol description] 1...probe unit 14 200907356 20...support portion 400... X-axis moving mechanism 30...conductive pin 410.. X-axis support tower 40... Conductive plate 420... X-axis track 100a... Check section 500· "Y-axis moving mechanism 200...the laser part 510...Y-axis branch building 210...laser oscillator 520...Y-axis way 220...collector lens 530...Y car by track Block 230...laser head 600...repair station 300...optical portion 700...platform 310...light source 320·..lens 15