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TW200801057A - Process for producing polishing pad - Google Patents

Process for producing polishing pad

Info

Publication number
TW200801057A
TW200801057A TW096113792A TW96113792A TW200801057A TW 200801057 A TW200801057 A TW 200801057A TW 096113792 A TW096113792 A TW 096113792A TW 96113792 A TW96113792 A TW 96113792A TW 200801057 A TW200801057 A TW 200801057A
Authority
TW
Taiwan
Prior art keywords
polishing
urethane composition
pads
bubbles
dispersed
Prior art date
Application number
TW096113792A
Other languages
English (en)
Inventor
Takeshi Fukuda
Tsuguo Watanabe
Junji Hirose
Kenji Nakamura
Masato Doura
Original Assignee
Toyo Tire & Amp Rubber Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2006115881A external-priority patent/JP2007283712A/ja
Priority claimed from JP2006115878A external-priority patent/JP4730605B2/ja
Priority claimed from JP2006115872A external-priority patent/JP4817432B2/ja
Priority claimed from JP2007088355A external-priority patent/JP2007307699A/ja
Application filed by Toyo Tire & Amp Rubber Co Ltd filed Critical Toyo Tire & Amp Rubber Co Ltd
Publication of TW200801057A publication Critical patent/TW200801057A/zh

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C43/00—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
    • B29C43/22—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of indefinite length
    • B29C43/28—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of indefinite length incorporating preformed parts or layers, e.g. compression moulding around inserts or for coating articles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B21/00—Machines or devices using grinding or polishing belts; Accessories therefor
    • B24B21/04—Machines or devices using grinding or polishing belts; Accessories therefor for grinding plane surfaces
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/11—Lapping tools
    • B24B37/20—Lapping pads for working plane surfaces
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D18/00—Manufacture of grinding tools or other grinding devices, e.g. wheels, not otherwise provided for
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C43/00—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
    • B29C43/22—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of indefinite length
    • B29C43/30—Making multilayered or multicoloured articles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29K—INDEXING SCHEME ASSOCIATED WITH SUBCLASSES B29B, B29C OR B29D, RELATING TO MOULDING MATERIALS OR TO MATERIALS FOR MOULDS, REINFORCEMENTS, FILLERS OR PREFORMED PARTS, e.g. INSERTS
    • B29K2075/00—Use of PU, i.e. polyureas or polyurethanes or derivatives thereof, as moulding material

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Manufacture Of Porous Articles, And Recovery And Treatment Of Waste Products (AREA)
  • Manufacture Of Macromolecular Shaped Articles (AREA)
TW096113792A 2006-04-19 2007-04-19 Process for producing polishing pad TW200801057A (en)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
JP2006115881A JP2007283712A (ja) 2006-04-19 2006-04-19 溝付き長尺研磨パッドの製造方法
JP2006115878A JP4730605B2 (ja) 2006-04-19 2006-04-19 長尺研磨パッドの製造方法
JP2006115864 2006-04-19
JP2006115872A JP4817432B2 (ja) 2006-04-19 2006-04-19 長尺研磨パッドの製造方法
JP2007088355A JP2007307699A (ja) 2006-04-19 2007-03-29 研磨パッドの製造方法

Publications (1)

Publication Number Publication Date
TW200801057A true TW200801057A (en) 2008-01-01

Family

ID=38625069

Family Applications (1)

Application Number Title Priority Date Filing Date
TW096113792A TW200801057A (en) 2006-04-19 2007-04-19 Process for producing polishing pad

Country Status (2)

Country Link
TW (1) TW200801057A (zh)
WO (1) WO2007123168A1 (zh)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112428165A (zh) * 2020-10-22 2021-03-02 德阳展源新材料科技有限公司 一种阻尼布抛光垫的制备方法

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SG162794A1 (en) 2005-07-15 2010-07-29 Toyo Tire & Rubber Co Layered sheets and processes for producing the same
JP4884726B2 (ja) 2005-08-30 2012-02-29 東洋ゴム工業株式会社 積層研磨パッドの製造方法
KR101181885B1 (ko) 2006-09-08 2012-09-11 도요 고무 고교 가부시키가이샤 연마 패드
JP2008105213A (ja) * 2006-10-24 2008-05-08 Inoac Corp 紫外線硬化発泡シートの製造方法
WO2008087797A1 (ja) 2007-01-15 2008-07-24 Toyo Tire & Rubber Co., Ltd. 研磨パッド及びその製造方法
JP5145972B2 (ja) * 2008-01-24 2013-02-20 株式会社ブリヂストン 発泡樹脂シートの製造方法
JP4593643B2 (ja) 2008-03-12 2010-12-08 東洋ゴム工業株式会社 研磨パッド

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1985005314A1 (fr) * 1984-05-16 1985-12-05 Washi Kosan Co., Ltd. Procede et installation de production en continu de plaques de plastique
JP3549219B2 (ja) * 1993-03-15 2004-08-04 セーレン株式会社 フォーム複合体の製造法
JPH11138564A (ja) * 1997-11-05 1999-05-25 Sekisui Chem Co Ltd 発泡体及び床暖房用床材の製造方法
US20040209066A1 (en) * 2003-04-17 2004-10-21 Swisher Robert G. Polishing pad with window for planarization
JP4606733B2 (ja) * 2003-12-22 2011-01-05 東洋ゴム工業株式会社 研磨パッドおよび半導体ウエハの研磨方法
KR101107044B1 (ko) * 2004-12-10 2012-01-25 도요 고무 고교 가부시키가이샤 연마 패드 및 연마 패드의 제조 방법
JP4884726B2 (ja) * 2005-08-30 2012-02-29 東洋ゴム工業株式会社 積層研磨パッドの製造方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112428165A (zh) * 2020-10-22 2021-03-02 德阳展源新材料科技有限公司 一种阻尼布抛光垫的制备方法

Also Published As

Publication number Publication date
WO2007123168A1 (ja) 2007-11-01

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