200808622 八、發明說明： 【發明所屬之技術領域】 本發明係有關於一種光罩盒，特別是有關於一種金屬光罩盒的結構。 【先前技術】 在現代的先進晶圓代工廠（Foundry)或半導體製造廠（Fab )，在製造晶 圓的過程中，已經邁向90奈米以下的製程，因此，用來進行曝光製程的光罩則 φ是首當其衝的進行線寬的縮小。由於光罩的成本非常高，故為降低製造的成本， 都希望增加光罩的使用壽命。現在已有許多的技術#中在光罩盒中的固定件或 疋定位件上’希望利用這些固定件或是定位件的設置，能有效降低光罩在運輸 或儲存時所造成的傷害；此外，也有-些技術在光罩盒中加入消除靜電效應 (ESD)的裝置，以避免靜電對光罩產生損傷。 由於製程的進步，當半導體廠進入更高階的製程時，除了靜電效應外，半 導體廠中的電磁脈衝(EMI)也會對光罩產生危害，尤其在光罩處於儲存狀態時， • 更無法翻周遭環境的變化，因此在考慮防止靜電效應（ESD)以及電磁脈衝 (EMI)對光罩產生損害的前提下，本發明提供一種金屬光罩盒之結構，除可有 效地固疋光罩以及隔絕光罩與大氣的接觸的功能外，還可以利用金屬光罩盒來 防止靜電效應（ESD)以及電磁脈衝（EMI)對光罩產生損害。 【發明内容】 本發明主要目的在提供一種金屬光罩盒之結構，利用金屬光罩盒來防止靜 電效應（ESD)以及電磁脈衝（EMI)對光罩產生的損害。 本發明之另一主要目的在提供一種具有氣密效果之金屬光罩盒之結構，以 5 200808622 使置放於金屬光罩盒之中的光罩能與大氣隔絕，以避免因霧化而降低了光罩的 使用壽命。 本發明還有一主要目的，係在提供一種具有充氣功能的金屬光罩盒之結 構，除可降低光罩霧化的問題外，還可增加光罩儲存的時間。 本發明之再—主要目的，係在提供一種可侧振動的金屬鮮盒之結構， 藉由振動偵測裝置來監督金屬光罩盒之儲存狀態。 本發明接著再提H要目的，係在提供一種金屬光罩盒之_蓋體上配置 微波7G件識別器，可以快速識別金屬光罩盒之儲存伋置。 基於上述之目的，本發明首先提供一種金屬光罩盒，其係由一個金屬 上蓋體及-個金屬下蓋體組合而成，其中於金屬光罩盒之—側邊上配 置至少-活動接合機構用以連接金屬上蓋體及金屬下蓋體，且於活動 接合機構之-相對側面上配置至少―鎖扣件，用以扣合金屬上蓋體及 金屬下蓋體。 … 者提供一種金屬光罩盒…，·f 1 屬下盍體組合而成’其中於金屬光罩盒之 一側邊上配置至少一活秉 合機構用以連接金屬上蓋體及金屬下蓋體，且於活動接合機構之 對側面上配置至少—鎖扣件，用以扣合金屬上蓋體及金屬下蓋體 進步於金屬上蓋體及金屬下蓋體之間更配置一環狀氣密塾圈。 本發明進-步提供—種金屬光罩盒，其係由—個金屬上蓋體及一 屬下盍體組合而成，其中於金屬光罩盒之—側邊上配置至少一活 合機構用以連接金屬上蓋體及金屬下蓋體，且於活動接合機構之 對側面上配置至少_鎖扣件，用以扣合金屬上蓋體及金屬下蓋體 200808622 外，金屬光罩盒除了在金屬上蓋體及金屬下蓋體之間配置一環狀氣密 墊圈外，還進一步於金屬上蓋體或金屬下蓋體上配置有複數個氣閥元 件0 本發明更進一步提供一種金屬光罩盒，其係由一個金屬上蓋體及一個 金屬下蓋體組合而成，其中於金屬光罩盒之一側邊上配置至少一活動 接合機構用以連接金屬上蓋體及金屬下蓋體，且於活動接合機構之一 相對側面上配置至少一鎖扣件，用以扣合金屬上蓋體及金屬下蓋體； 此外，金屬光罩盒除了在金屬上蓋體及金屬下蓋體之間配置一環狀氣 密墊圈以及於金屬上蓋體或金屬下蓋體上配置有複數個氣閥元件之 外，更於金屬下蓋體上配置有一振動感應裝置。 本發明搂著再提供一種金屬光罩盒結構，包括一個金屬下蓋體，其二 側各設有一個固持裝置，且於固持裝置之一相鄰側設有一個限制裝 置，以形成-近似n型之結構’且固持裝置包括有限位片及抵持件； 一個金屬上蓋體，係由一個活動接合機構與金屬下蓋體結合；複數個 扣壓件，此扣壓件以複數個支撐點固接於金屬上蓋體内各角落；還有 一個導持定位件，其係以可拆卸之方式配置於金屬上蓋體内相對近似 π型結構開口之—側邊上〆個環狀氣密_，配置於金屬上蓋體及 金屬下蓋體之間；至少〆鎖扣件，配置於活動接合機構之—相對側面 上；複數個氣閥元件，配置於金屬上蓋體或金屬下蓋體之上；以及一 個振動感應裝置配置金屬下蓋體之上。 經由本發明所提供之設計，除了可使光罩平順容易導入光罩盒中以及有效 地固定光罩外，還進一步提供防止靜電效應（ESD) 以及電磁脈衝（ΕΜ1)的功 200808622 此可使仔光罩哥命得以提高’此外，本發明之具有充氣功能的金屬光罩盒， 還可提供-氣密的空間，以保護光罩及避免光罩霧化之功效。 【實施方式】 由於本發明係揭露-種金屬光罩盒之結構，其中所利用到的一些光罩或光 轉之詳細製造或處理過程，係利用現有技術來達成，故在下述說明中，並不 作πΑ域。而且下述内文中之圖式，亦並未依據實際之相關尺寸完整緣製，200808622 VIII. Description of the Invention: [Technical Field] The present invention relates to a photomask case, and more particularly to a structure of a metal photomask case. [Prior Art] In the modern advanced foundry or semiconductor manufacturing plant (Fab), in the process of manufacturing wafers, it has moved to a process below 90 nm, so the light used for the exposure process The cover φ is the first to narrow the line width. Since the cost of the reticle is very high, it is desirable to increase the life of the reticle in order to reduce the cost of manufacturing. Nowadays, there are many technologies in which the fixing member or the locating member in the reticle case is desired to use the fixing member or the positioning member to effectively reduce the damage caused by the hood during transportation or storage; There are also some techniques to add an anti-static effect (ESD) device to the reticle to prevent static damage to the reticle. Due to advances in the process, when semiconductor plants enter higher-order processes, in addition to electrostatic effects, electromagnetic pulses (EMI) in semiconductor factories can also cause damage to the reticle, especially when the reticle is in storage state. The environment is changed, so the present invention provides a metal photomask box structure, in addition to effectively preventing the electrostatic effect (ESD) and electromagnetic pulse (EMI) damage to the mask, in addition to effectively fixing the mask and isolating In addition to the function of the reticle to the atmosphere, a metal reticle can also be used to prevent electrostatic effects (ESD) and electromagnetic pulses (EMI) from damaging the reticle. SUMMARY OF THE INVENTION A primary object of the present invention is to provide a metal photomask box structure that utilizes a metal photomask box to prevent electrostatic (ESD) and electromagnetic pulse (EMI) damage to the mask. Another main object of the present invention is to provide a metal mask case having a gas-tight effect, and the mask placed in the metal mask case can be isolated from the atmosphere by 5 200808622 to avoid being reduced by atomization. The life of the reticle. Still another object of the present invention is to provide a structure of a metal photomask having an inflation function which, in addition to reducing the problem of fogging of the mask, can also increase the storage time of the mask. A further object of the present invention is to provide a structure for a metal-colored box that can vibrate sideways, and to supervise the storage state of the metal mask box by means of a vibration detecting device. The present invention further provides the objective of providing a microwave 7G member identifier on a cover body of a metal photomask case, which can quickly identify the storage device of the metal photomask case. Based on the above object, the present invention firstly provides a metal photomask case which is composed of a metal upper cover body and a metal lower cover body, wherein at least a movable engagement mechanism is disposed on a side of the metal photomask case. The metal upper cover body and the metal lower cover body are connected, and at least a locking member is disposed on the opposite side of the movable joint mechanism for engaging the metal upper cover body and the metal lower cover body. ... providing a metal reticle box, ..., f 1 is a combination of a lower body, wherein at least one living and closing mechanism is disposed on one side of the metal photomask case for connecting the metal upper cover body and the metal lower cover body And at least the locking member is disposed on the opposite side of the movable engaging mechanism for engaging the metal upper cover body and the metal lower cover body, and the annular upper airtight ring is further disposed between the metal upper cover body and the metal lower cover body. . The invention further provides a metal photomask box which is composed of a metal upper cover body and a subordinate lower body body, wherein at least one living mechanism is disposed on the side of the metal photomask case for The metal upper cover body and the metal lower cover body are connected, and at least the _locking member is disposed on the opposite side of the movable engaging mechanism for fastening the metal upper cover body and the metal lower cover body 200808622, and the metal photomask case is except for the metal upper cover body. And a plurality of gas valve elements are further disposed on the metal upper cover or the metal lower cover body, and the metal light cover case is further provided by the metal cover case. a metal upper cover body and a metal lower cover body are combined, wherein at least one movable engaging mechanism is disposed on one side of the metal photomask case for connecting the metal upper cover body and the metal lower cover body, and is one of the movable joint mechanisms Having at least one locking member on the opposite side for engaging the metal upper cover body and the metal lower cover body; further, the metal photomask case is provided with an annular airtight gasket disposed between the metal upper cover body and the metal lower cover body Further, a plurality of valve members are disposed on the metal upper cover or the metal lower cover, and a vibration sensing device is disposed on the metal lower cover. The present invention further provides a metal photomask box structure comprising a metal lower cover body, each of which is provided with a holding device on two sides, and a limiting device is disposed on one side of the holding device to form an approximately n The structure of the type 'and the holding device comprises a limiting piece and a resisting piece; a metal upper cover body is combined with the metal lower cover body by a movable engaging mechanism; a plurality of pressing parts are fixed by a plurality of supporting points The metal upper cover has corners; and a guiding and positioning member is detachably disposed in the metal upper cover body and relatively close to the π-type structural opening - a ring-shaped airtight _ on the side, disposed in the metal Between the upper cover and the metal lower cover; at least the mortise fastener is disposed on the opposite side of the movable engagement mechanism; the plurality of valve components are disposed on the metal upper cover or the metal lower cover; and a vibration induction The device is placed over the metal lower cover. According to the design provided by the present invention, in addition to making the reticle smooth and easy to be introduced into the reticle box and effectively fixing the reticle, the function of preventing electrostatic effect (ESD) and electromagnetic pulse (ΕΜ1) is further provided. The mask life can be improved. In addition, the metal photomask box with the inflatable function of the present invention can also provide an airtight space to protect the mask and prevent the atomization of the mask. [Embodiment] Since the present invention discloses a structure of a metal photomask box, some of the photomasks or optical rotations used in the detailed manufacturing or processing process are achieved by using the prior art, and therefore, in the following description, Do not make π Α domain. Moreover, the drawings in the following texts are not based on the actual relevant dimensions.
其作用僅在表軸本發卿财關之示意圖。 首先，請參考第一圖及第二圖 係本發明之一種金屬光罩盒之示意圖。本 發明之金屬光罩盒1〇 包括-個上金駿體彳彳、—個下金屬蓋體12、一個配置 於上金屬蓋體11與-個下金屬蓋體12之間的環狀氣密墊圈13以及—鎖扣裝置 因此孟屬光罩11〇可經由上金屬蓋體Μ、下金屬蓋體η及環狀氣密塾 圈13之蓋。在配合鎖扣裝置14之壓扣’使得金屬光罩盒内能保持氣密的 狀態，故金屬光罩盒10之内部與外部是隔絕的。故當—片光罩2〇置放入金屬 光罩盒10内時’即可達到將光罩2〇與外界大氣隔絕目的。 本發明之金屬光罩盒1〇可由一種金屬材質所構成，此金屬材質可以是鐵、 銅 '結、械鋼献前者之合金__成，而在本實關巾，以獨鋼材質 為較佳的辦。同時，在金屬光罩盒1Q之㈣部份，係經過表面處理，故可將 金屬光罩盒10本身所可能產生的雜f降至最低。另外，本實施例中的環狀氣密 墊圈13，可為-種由高分子樹脂（例如：環氧樹脂；Ep〇xy)所形成之具有彈 性的氣密墊圈。因此，可藉由鎖扣裝置14的扣合，來將此具有彈性的氣密整圈 壓合，以便能達到確實氣密的效果。t由於環狀氣密墊圈13具有―定之厚度， 因此’本發明實⑯例巾的鎖扣裝置14錢用_種具有活祕之鎖扣件來達到壓 200808622 扣金屬光罩盒10。 此外，為了加強金屬光罩盒1〇之抗電磁脈衝干擾（EM|)的能力，本實施 例中的環狀氣密墊圈13也可以是—種導電膠所形成之氣密。因此，當金屬 光罩盒10藉由導電膠所形成的氣密塾圈蓋合時，可使整個金屬光罩盒1〇形成 -個類似金屬遮蔽（Shielding)之外殼，故可有效的對置放於金屬光罩盒1〇 中的光罩20產生保翻制。同時，也可藉由此導電膠所形成的氣密細來達 成消除金屬光罩盒10上的靜電。 為了使金屬光罩盒能夠具有長時間的儲存能力時，需要將一些惰性氣體充 入金屬光罩盒之内’此外’為了保持金屬鮮盒内的潔淨度，也需要將已經存 在金屬光罩盒内的氣體抽離或排除，這些氣體包括大氣、金屬光罩盒本身所 釋出的氣體（outgassing)或是源自於殘留在光罩表面的微量化學溶 液所產生的揮發氣體等。因此需要在金屬光罩盒上配置至少一個充氣裝置 及至少一個排氣裝置，如此，方可使金屬光罩盒具有充氣之功能。 接著，请參加第二圖及第四圖所示，係本發明之具有充氣功能之金屬光罩 盒不意圖。在本實施例中的金屬光罩盒，除了具有前述金屬光罩盒1〇之結構外， 還更在金屬光罩盒1〇之下金屬蓋體12之一側邊上配置一充氣閥裝置15及一排 氣閥裝置16,而此充氣閥裝置15及排氣閥裝置16在金屬光罩盒的内部端上均 配置具有彈性之充氣閥檔板151及排氣閥檔板161。目此當一部氣體充填設備 (未顯不）將惰性氣體充入金屬光罩盒1〇時，氣體充填設備上的充氣嘴裝置及 排氣嘴裝置會經由金屬光罩盒1〇上的充氣閥裝置15及排氣閥裝置16將具有彈 性之充氣閥檔板151及排氣閥檔板頂開，故可順利的將氣體抽出並充入惰 性氣體，使得金屬光罩盒10内充滿著惰性氣體。當充氣完成後，氣體充填設備 200808622 的充氣嘴裝置及排氣嘴裝置脫離金屬光罩盒1〇，而具有彈性之充氣閥檔板151 及排氣閥檔板161就會立即恢復至原來的位置並將充氣閥裝置15及排氣閥裝置 16封閉’使得充滿在金屬光罩盒1〇中的惰性氣體不會泡露，故可使儲存於金 屬光罩盒10中的光罩20保持在與大氣隔離的狀態，故可使本發明之金屬光罩 盒10具長時間的儲存光罩功能。 接著，再明參考第五圖’係本發明之另—具有充氣功能之金屬光罩盒示意 鲁圖。在本實施例中的金屬光罩盒10在結構與上一實施例姻，僅僅只有將前述 金屬光罩盒10中的複數個充氣閥裝置15及複數個排氣閥裝置16更改配置於金 屬光罩益之-金屬蓋體上’此蓋體可以是金屬上蓋體1彳或是金屬下蓋體。如 第五圖所示，當複數個充氣閥裝置15及複數個排氣閥裝置16配置於一個金屬 蓋上時，也可使用前述之具有彈性之充氣_板151及排氣閥構板161來做為 金屬光罩盒10在充氣前及充氣後的氣密開I此外，在本發明中的充氣閥權板 151及排氣_板161並未_何種雜或結構，例如使用兩段式的彈性闕也 •可使用在本實施例中。如圖_，在複數個充_裝置15及轉個排氣闕裝置 16的排列上形成-較長邊”s，，及一較短邊，，χ”，其中較長邊”s，，的距離為16〇~18〇 毫求（mm) ’在-較佳的”s”距離為170mm，而較短邊”χ”的距離為條12〇 毫米（mm)，在-較佳的”s”距離為i10mm。此一較長邊”s”及一較短邊τ之距 離係與氣體充填設備上的充氣嘴裝置及排氣嘴裝置相對應。當複數個充氣間裝 置15及複數個排氣閥裝i 16配置在金屬上蓋體μ或是金屬下蓋體12之一侧 邊時’如第二圖所示，其複數個充氣闕裝置15及複數個排氣閥裝置16也可形 成-較長距離”S”及-較距離，’χ”，而此較長距離，’s”及一較距離”χ”與較長邊”s” 及一較短邊”x”相同。 200808622 =罩_在_備或_傳送，尤妓縣進的_麻中， 先罩谢放、運送爾，都是經由機械手臂⑽。t 故在運送樹叫料=執订 =而造爾⑽紐陶可___二 2，為了純料盒在錢送触中是科生過—些意相衝擊本發明在 主属光罩盒中的金屬上蓋體或是金屬下蓋趙上的適當位置上，均配置有一個振Its role is only in the schematic diagram of the watch shaft. First, please refer to the first figure and the second figure for a schematic view of a metal photomask case of the present invention. The metal photomask case 1 of the present invention comprises an upper metal body, a lower metal cover 12, and an annular airtight arrangement disposed between the upper metal cover 11 and the lower metal cover 12. The washer 13 and the latching device are thus covered by the upper metal cover Μ, the lower metal cover η and the annular airtight ferrule 13 . The inside of the metal photomask case 10 is isolated from the outside by the press-fitting 'with the locking device 14 so that the inside of the metal photomask case can be kept airtight. Therefore, when the sheet mask 2 is placed in the metal photomask case 10, the purpose of isolating the mask 2 from the outside atmosphere can be achieved. The metal reticle box 1 of the present invention may be composed of a metal material, which may be iron, copper 'knot, and alloy steel __ formed by the former, and in the actual hood, the single steel material is compared Good office. At the same time, in the part (4) of the metal photomask case 1Q, the surface treatment is performed, so that the impurities f which may be generated by the metal photomask case 10 itself can be minimized. Further, the annular hermetic gasket 13 in the present embodiment may be an elastic hermetic gasket formed of a polymer resin (e.g., epoxy resin; Ep〇xy). Therefore, the elastic airtight ring can be pressed by the fastening of the locking device 14, so that a truly airtight effect can be achieved. Since the annular hermetic gasket 13 has a constant thickness, the locking device 14 of the present invention has a living lock fastener to achieve the pressure of the 200808622 buckle metal photomask case 10. Further, in order to enhance the ability of the metal photomask case 1 to resist electromagnetic pulse interference (EM|), the annular hermetic gasket 13 in this embodiment may be airtight formed by a conductive paste. Therefore, when the metal reticle 10 is covered by the airtight ferrule formed by the conductive adhesive, the entire metal reticle can be formed into a Shielding-like outer casing, so that it can be effectively opposed The reticle 20 placed in the metal mask case 1 is secured. At the same time, the static electricity formed on the metal photomask case 10 can be eliminated by the airtightness formed by the conductive paste. In order to enable the metal reticle to have a long-term storage capacity, it is necessary to fill some of the inert gas into the metal reticle box. In addition, in order to maintain the cleanliness in the metal box, it is also necessary to have the metal mask box already present. The gas inside is evacuated or excluded. These gases include the atmosphere, the outgassing released by the metal mask itself, or the volatile gases generated by the trace chemical solution remaining on the surface of the mask. Therefore, it is necessary to dispose at least one inflator and at least one exhaust device on the metal mask case, so that the metal mask box can have the function of inflating. Next, please refer to the second and fourth figures, which are not intended to be a metal photomask of the present invention. In the metal photomask case of the present embodiment, in addition to the structure of the metal photomask case 1 , an inflation valve device 15 is disposed on one side of the metal cover body 12 under the metal photomask case 1 . And an exhaust valve device 16, and the inflation valve device 15 and the exhaust valve device 16 are provided with an elastic inflation valve baffle 151 and an exhaust valve baffle 161 on the inner end of the metal photomask case. When a gas filling device (not shown) is used to charge the inert gas into the metal mask case 1 , the aeration nozzle device and the nozzle device on the gas filling device are inflated via the metal mask case 1 . The valve device 15 and the exhaust valve device 16 open the flexible inflation valve baffle plate 151 and the exhaust valve baffle plate, so that the gas can be smoothly extracted and filled with an inert gas, so that the metal photomask case 10 is filled with inertia. gas. When the inflation is completed, the inflation nozzle device and the exhaust nozzle device of the gas filling device 200408622 are disengaged from the metal mask case 1〇, and the elastic inflation valve flap 151 and the exhaust valve flap 161 are immediately restored to the original position. The inflation valve device 15 and the exhaust valve device 16 are closed so that the inert gas filled in the metal mask case 1 is not exposed, so that the mask 20 stored in the metal mask case 10 can be kept in the same manner. The state of the atmosphere is isolated, so that the metal photomask case 10 of the present invention can have the function of storing the reticle for a long time. Next, referring to the fifth drawing, which is another embodiment of the present invention, a metal mask case having an inflation function is schematically illustrated. The metal photomask case 10 in this embodiment is identical in structure to the previous embodiment, and only the plurality of inflation valve devices 15 and the plurality of exhaust valve devices 16 in the metal photomask case 10 are modified and disposed in the metal light. The cover body can be a metal upper cover body 1 or a metal lower cover body. As shown in the fifth figure, when a plurality of inflation valve devices 15 and a plurality of exhaust valve devices 16 are disposed on a metal cover, the above-described elastic inflation plate 151 and exhaust valve plate 161 may also be used. As the airtight opening of the metal photomask case 10 before and after inflation, the inflation valve weight plate 151 and the exhaust gas plate 161 in the present invention are not mixed or structured, for example, using a two-stage type. The elastic 阙 can also be used in this embodiment. As shown in FIG. _, a longer side "s", and a shorter side, "χ", where the longer side "s", is formed on the arrangement of the plurality of charging devices 15 and the rotating exhaust device 16 The distance is 16〇~18〇m (mm) The 'in-better' s” distance is 170mm, and the shorter side “χ” is the distance of 12〇mm (mm), in the -better s The distance is i10mm. The distance between the longer side "s" and a shorter side τ corresponds to the aeration nozzle device and the vent device on the gas filling device. When a plurality of inflatable devices 15 and a plurality of rows When the gas valve assembly i 16 is disposed on the metal upper cover body μ or one side of the metal lower cover body 12, as shown in the second figure, a plurality of gas cylinder devices 15 and a plurality of gas discharge valve devices 16 may also be formed - Longer distances "S" and - more distances, 'χ', and this longer distance, 's' and a longer distance "χ" are the same as the longer side "s" and a shorter side "x". Cover _ in _ spare or _ transmission, Youyi County into the _ Mazhong, first cover thank you, transport, are through the robotic arm (10). t So in the transport tree called material = binding = and ger (10) New Pottery Can ___ two 2, for The pure material box is a science student in the money delivery - some intentional impact on the present invention in the main reticle box of the metal upper cover or the metal lower cover Zhao on the appropriate position, are equipped with a vibration
動感應"19來做為監控，特別是一種具有方向性的振動感應器，如第四圖及第 五圖所示。當繼在運送過程中發生過意外的衝擊時，配置於金屬光罩盒川 =振動感應益19會產生顏色上的變化，例如在發生衝擊前的振動感應器19 疋綠色’而當發生意外衝擊後’振動感應器19的顏色會變成紅色，因此當製程 機台或是操作人員糊或看到振動細19的顏色成為紅色時，就知=此金 屬移盒中的光罩可能受到損壞。特別是當使用的是一種具有方向性的振動 感應益時更可針對特定的方向進行監控。當然在本實施例中的振動感應器19 可以是具有可重複使用的機械式振動感應器，也可以是只能使用一^的化學式 振動感應器。 當金屬光罩盒儲存-段時間後，需要在被取出使用時，或是需要選擇已經 儲^的金屬光罩盒來組合成—新的製程時，就需要能力迅速的找到每一金屬光 罩皿的所在位置。為此，請參考第_圖及第三圖，本發明在金屬光罩盒中的金 屬上蓋體或是金屬下蓋_外部適當位置上，均配置有—個電子朗裝置17， 例如微波識別裝置⑽D)，當需要尋求某一金屬光罩盒時，自動化設備也即可 透過此電子識職置17來找到此金屬光罩盒。 此外，為了能將光罩有效的固定在金屬光罩盒中，本發明再提出另一實施 200808622 例，請參考第六圖，其係發明之—具有扣壓件之金屬光罩盒之示意圖。如第六 圖所示，在金屬光罩盒1〇的金屬上蓋體^或金屬下蓋體12的四個角落上二 置有複數個扣壓件18，此扣壓件的型狀如第六圖所示，包括—座體⑻，並在 座體181上設置單或複數個支撙，點185，可以使座體181固接於金屬光罩各扣 之金屬上蓋體11或金屬下蓋體12之各角落上；同時，還有_崎曲彈性元件 182與座體181相連接，其中彎曲彈性元件182之—端自座體⑻上整體延伸Dynamic induction "19 is used for monitoring, especially a directional vibration sensor, as shown in the fourth and fifth figures. When an unexpected impact occurs during transportation, the configuration is applied to the metal reticle box. The vibration sensor 19 produces a color change, such as the vibration sensor 19 疋 green before the impact occurs, and an accidental impact occurs. The color of the rear vibration sensor 19 will turn red, so when the process machine or the operator pastes or sees that the color of the vibration thin 19 becomes red, it is known that the photomask in the metal transfer case may be damaged. Especially when using a directional vibration sensing benefit, it can be monitored for specific directions. Of course, the vibration sensor 19 in this embodiment may be a mechanical vibration sensor having reusability, or a chemical vibration sensor which can only be used. When the metal reticle is stored for a period of time, it needs to be able to quickly find each metal reticle when it is taken out or when it is necessary to select a metal reticle that has been stored to be combined into a new process. The location of the dish. To this end, please refer to the first and third figures. In the metal cover case or the metal lower cover in the metal photomask case, an electronic device 17 is arranged at an appropriate external position, for example, a microwave identification device. (10) D) When a metal mask box needs to be sought, the automated equipment can also find the metal mask box through the electronic identification device 17. In addition, in order to effectively fix the reticle in the metal reticle, another embodiment of the invention is disclosed in 200808622. Please refer to the sixth figure, which is a schematic view of a metal reticle with a crimping member. As shown in the sixth figure, a plurality of crimping members 18 are disposed on the four corners of the metal upper cover body or the metal lower cover body 12 of the metal photomask case 1 , and the shape of the crimping member is as shown in the sixth figure. As shown, the body (8) is provided, and a single or a plurality of supports are disposed on the base 181, and the point 185 is used to fix the base 181 to the metal upper cover 11 or the metal lower cover 12 of each of the metal masks. At the same time, there is also a sinusoidal elastic element 182 connected to the seat body 181, wherein the end of the curved elastic element 182 extends integrally from the seat body (8)
而出，而f曲彈性元件182之另—個端部則呈彈性懸浮狀態於此單或複數個支 撑點185之間；此彎曲彈性元件182進—步具有—扣麗面183及—頂持面似 的設計，讀當金屬光罩盒1G之金屬上蓋體u、金屬下蓋體12及氣密塾圈13 蓋合一光罩時，藉崎曲彈性元件182之扣壓面183及頂持面184與光罩2〇 接觸並且扣合固定。此外，扣壓件18可為—高分子材料所形成，並且扣壓件.18 可使用拆卸之方式與金屬光罩盒之金屬上蓋體彳彳或金屬下蓋趙12結合。 以上所述僅為本發明之較佳實施例而已，並非用以限定本發明之申請專利 權利；同時以上的描述’對於熟知本技術領域之專門人士應可明瞭及實施，因 此其他未脫離本發明所揭示之精神頂絲料贱贱料，均應包含在下 述之申請專利範圍中。 【圖式簡單說明】 第一圖係一側視圖，顯示本發明之金屬光罩盒； 第二圖係一正視圖，顯示本發明之充氣式金屬光罩盒； 第三圖係一立體圖，顯示本發明之充氣式金屬光罩盒結構; 第四圖係-立體圖，顯示本發明之具有充氣閥及排氣閥之充氣式金屬光罩盒結 構； 12 200808622 第五圖係一立體圖，顯示本發明之另一具有充氣闊及排氣閥之充氣式金屬光罩 盒結構； 第六圖係一立體圖，顯示本發明之扣壓件結構； 【主要元件符號說明】And the other end of the f-curvature member 182 is in an elastic suspension state between the single or a plurality of support points 185; the curved elastic member 182 further has a buckle face 183 and a top hold In a similar design, when the metal upper cover u, the metal lower cover 12 and the airtight bead 13 of the metal photomask case 1G are covered with a photomask, the pressing surface 183 and the top holding surface of the kneading elastic member 182 are read. The 184 is in contact with the reticle 2 并且 and is fastened by fastening. In addition, the crimping member 18 can be formed of a polymer material, and the crimping member 18 can be combined with the metal upper cover or the metal lower cover Zhao 12 of the metal photomask case. The above description is only the preferred embodiment of the present invention, and is not intended to limit the patent application rights of the present invention. The above description is to be understood and implemented by those skilled in the art, and thus the other embodiments are not deviated from the present invention. The disclosed toppings are intended to be included in the scope of the following claims. BRIEF DESCRIPTION OF THE DRAWINGS The first drawing is a side view showing a metal photomask case of the present invention; the second drawing is a front view showing the inflatable metal photomask case of the present invention; the third figure is a perspective view showing The structure of the inflatable metal photomask box of the present invention; the fourth figure is a perspective view showing the structure of the inflatable metal photomask box with the inflation valve and the exhaust valve of the present invention; 12 200808622 The fifth figure is a perspective view showing the invention Another inflatable metal photomask box structure with an inflatable wide and exhaust valve; the sixth figure is a perspective view showing the buckle structure of the present invention; [Main component symbol description]
10 金屬光罩盒 11 上蓋體 12 下蓋體 13 環狀氣密墊圈 14 鎖扣裝置 15 充氣閥裝置 16 排氣閥裝置 17 微波識別裝置 18 扣壓件 181 座體 182 彎曲彈性元件 183 扣壓面 184 頂持面 185 支撐點 19 振動感應器 20 光罩 13 200808622 九、申請專利範圍： 1· 一種金屬光罩盒係由一金屬上蓋體及一金屬下蓋體組合而成，其中於該金屬 光罩盒之一側邊上配置至少一活動接合機構用以連接該金屬上蓋體及該金屬下 蓋體，且於該活動接合機構之一相對側面上配置至少一鎖扣件，用以扣合該金 屬上蓋體及該金屬下蓋體。 2.如申請專利範圍第！項所述之金屬光罩盒，其中該金屬光罩盒之材質為不銹 鋼系列或鋁合金、鎂合金。 3·如申請專利範圍第巧項所述之金屬光罩盒，其中該鎖扣件為金屬材質。 4· -種金屬光罩盒係由-金屬上蓋體及一金屬下蓋體組合而成，其中於該金屬 一罩现之邊上ge置至}—活動接合機構用以連接該金屬上蓋體及該金屬下 盖體，且於該活動接合機構之—相對側面上配置至少—鎖扣件，用以扣合該金 屬上蓋體及該金屬下蓋體，且進—步於該金屬上蓋體及該金屬下蓋體之間更配 置一環狀氣密墊圈。 5. 如申請專利細第4項所述之金屬光衫，其中該金屬光轉之材質為不錄 鋼系列或鋁合金、鎂合金。 6. 如申請專利範圍第4項所述之金屬光罩盒，其中該鎖扣件為金屬材質。 如申w專利細第4項所述之金屬光罩盒，其中該環狀氣輕圈之材質為一 種高分子樹脂。 如申》月專.圍第4項所述之金屬光罩盒，其中該環狀氣密塾圈之材質為一 導電膠。 9·-種可絲式金屬光罩盒係由—金屬上蓋體及_金屬下蓋體組合减，其中 於該金屬光罩盒之-側邊上配置至少—活動接合機構用以連接該金属上蓋體及 200808622 該金屬下蓋體，且於該活動接合機構之一相對側面上配置至少一鎖扣件，用以 扣合该金屬上蓋體及該金屬下盍體’此金屬光罩盒之特徵在於 該金屬上蓋體及該金屬下蓋體之間配置一環狀氣密墊圈且於該金屬上 蓋體或該金屬下蓋體上配置有複數個氣閥裝置。 10.如申請專利範圍第9項所述之金屬光罩盒，其中該金屬光罩盒之材質為不銹 鋼系列或鋁合金、鎂合金。 11·如申請專利範圍第9項所述之金屬光罩盒，其中該鎖扣件為金屬材質。 12.如申請專利範圍第9項所述之金屬光罩盒，其中該環狀氣密塾圈之材質為一 種高分子樹脂。 13.如申請專利範圍第9項所述之金屬光罩盒，其中贿狀氣密麵之材質為一 導電膠。 14.如申請專利範圍第9項所述之金屬光罩盒，其中該氡閥裝置包括至少一個充 氣閥裝置及至少一個排氣閥裝置。 鲁15.如申請專利範圍第14項所述之金屬光罩盒，其中該充氣閥裝置及排氣闕裝 置進一步包括有一具有彈性之充氣閥檔板及排氣闊檔板。 祀·如申請專利範圍第9項所述之金屬光罩盒，其中該氡閱褒置可形成一較長邊 且該較長邊之距離為170mm。 口.如申請專利範圍第9項所述之金屬光罩盒，其中該氣閱裝置可形成一較短邊 且該較短邊之距離為11〇mm。 瓜-種金屬光罩盒係由-金屬上蓋體及-金屬下蓋體組合而成，其中於該金屬 光罩盒之-側邊上配置至少-活動接合機制以連_金屬上蓋體及該金屬下 蓋體，且於該活動接合機構之-相對側面上配置至少—鎖扣件，用以扣合該金 200808622 屬上蓋體及該金屬下蓋體，再於該金屬上蓋體及該金屬下蓋體之間配置一環狀 氣密塾圈以及於該金屬上蓋體或該金屬下蓋體上配置有複數個具有氣闕裝置， 此金屬光罩盒之特徵在於 該金屬上蓋體金屬或該下蓋體上配置一振動感應裝置。 19. 如申請專利範圍第18項所述之金屬光罩盒，其中該金屬光罩盒之材質為不 錢鋼糸列或I呂合金、鎮合金。 20. 如申請專利範圍第18項所述之金屬光罩盒，其中該鎖扣件為金屬材質。 • 21.如f請專利細第彳8項所述之金屬光罩盒，其中該環狀氣密翻之材質為 一種高分子樹脂。 22.如申請專利範圍第18項所述之金屬光罩盒，其中該環狀氣密塾圈之材質為 一導電膠。 於如申請專利範圍第18項所述之金屬光罩盒，其中該振動感應裝置為一具有 方向性感應之振動感應裝置。 24.如申請專利範圍第23項所述之金屬光罩盒，其中該振動感應裝置為一種可 _重複使狀振域應裝置。 瓜如申請專利範圍第23項所述之金屬光罩盒，其中該振動感應裝置為一種化 學式之振動感應裝置。 26. 如申請專利範圍第18項所述之金屬光罩盒，其中該氣閱裝置可形成一較長 邊且該較長邊之距離為170mm。 27. 如申請專利制第18_述之金聽轉，其中該關裝置可形成一較短 邊且該較短邊之距離為11〇mm。 28· -種金屬光罩盒係由一金屬上蓋體及—金屬下蓋體組合而成，其巾於該金屬 200808622 光罩盒之一側邊上配置至少一活動接合機構用以連接該金屬上蓋體及該金屬下 蓋體，且於該活動接合機構之一相對側面上配置至少一鎖扣件，用以扣合該金 屬上蓋體及該金屬下魏，再於該金屬上蓋體及該金屬下蓋體之間配置一環狀 氣密墊圈以及於該金屬上蓋體或該金屬下蓋體上配置有複數個氣閥裝置，此金 屬光罩盒之特徵在於 該金屬上蓋體或金屬下蓋體之任一側邊上配置一微波識別元件（RF|D) β 29_如申請專利範圍第28項所述之金屬光罩盒，其中該金屬光罩盒之材質為不 ® 銹鋼系列或鋁合金、鎂合金。 30‘如申請專利範圍第28項所述之金屬光罩盒，其中該鎖扣件為金屬材質。 31.如申請專利範圍第28項所述之金屬光罩盒，其中該環狀氣密墊圈之材質為 一種高分子樹脂。 32·如申請專利範圍第28項所述之金屬光罩盒，射該環狀氣密塾圈之材質為 一導電膠。 33. 如申請專利範圍第28項所述之金屬光罩盒，其進一步包括於該金屬上蓋體 或金屬下蓋體上配置一振動感應裝置。 34. 如申請專利範圍第33項所述之金屬光罩盒，其中該振動感應裝置為一種可 重複使用之振動感應裝置。 35·如申靖專利範圍第33項所述之金屬光罩盒，其中該振動感應裝置為一種化 學式之振動感應裝置。 36. 如申請專利範圍第28項所述之金屬光罩盒，其中該氣閥裂置可形成一較長 邊且該較長邊之距離為17〇mm。 37. 如申請專利範圍第28項所述之金屬光罩盒，其中該氣閥裝置可形成一較短 17 200808622 邊且該較短邊之距離為11〇mm。 38· —種金屬光罩盒係由一金屬上蓋體及一金屬下蓋體組合而成，其中於該金屬 光罩盒之一側邊上配置至少一活動接合機構用以連接該金屬上蓋體及該金屬下 蓋體，且於該活動接合機構之一相對側面上配置至少一鎖扣件，用以扣合該金 屬上蓋體及該金屬下蓋體，再於該金屬上蓋體及該金屬下蓋體之間配置一環狀 氣密墊圈以及於該金屬上蓋體或該金屬下蓋體上配置有複數個氣闊裝置，此金 屬光罩盒之特徵在於 該金屬上蓋體及該金屬下蓋體内各角落配置有複數個扣壓件。 39·如申請專利範圍第38項所述之金屬光罩盒，其中該金屬光罩盒之材質為不 銹鋼系列或鋁合金、鎂合金。 40·如申請專利範圍第38項所述之金屬光罩盒，其中該鎖扣件為金屬材質。 41·如申請專利範圍第38項所述之金屬光罩盒，其中該扣壓件結構之特徵包括： 一座體，係以複數個支撐點固接於該光罩傳送盒上蓋體内各角落之位置； 一彎曲彈性元件，其一彎曲之端部結合於該座體上，另一彎曲之端部則呈 彈性懸浮狀態於該單或複數個支撐點之間，且進一步包括一頂持面及一扣壓面； 其中，當泫光罩傳送盒之蓋合一光罩時，該彎曲彈性元件之該頂持面及該 扣壓面與該光罩接觸並固定之。 42.如申請專利範圍帛38項所述之金屬光罩盒，其中該舰氣密塾圈之材質為 一種高分子樹脂。 43·如申請專利範圍第38項所述之金屬光罩盒，其中該環狀氣密墊圈之材質為 一導電膠。 44·如申明專利範圍第41項所述之金屬光罩盒，其中該彎曲彈性元件為一高分 200808622 子材料所形成。 45· —種金屬光罩盒係由一金屬上蓋體及一金屬下蓋體組合而成，其中於該金屬 光罩盒之一側邊上配置至少一活動接合機構用以連接該金屬上蓋體及該金屬下 蓋體’且於該活動接合機構之一相對側面上配置至少一鎖扣件，用以扣合該金 屬上蓋體及該金屬下蓋體，此金屬光罩盒之特徵在於. 該金屬上蓋體及該金屬下蓋體之間配置一環狀氣密墊圈且於該金屬上 蓋體或該金屬下蓋體之一側邊上配置有複數個氣閥裝置。 H 46·如申請專利範圍第45項所述之金屬光罩盒，其中該金屬光罩盒之材質為不 錄鋼糸列或銘合金、I美合金。 47. 如申請專利範圍第45項所述之金屬光罩盒，其中該鎖扣件為金屬材質。 48. 如申請專利範圍第45項所述之金屬光罩盒，其中該環狀氣密墊圈之材質為 一種高分子樹脂。 49. 如申請專利範圍第45項所述之金屬光罩盒，其中該環狀氣密墊圈之材質為 一導電膠。 -50·如申請專利範圍帛45項所述之金屬光罩盒，其中該氣闕裝置包括至少一個 充氣閥裂置及至少一個排氣閥裝置。 51·如申請專利範圍第50項所狀金屬光罩盒，其中該充氣閥裝置及該排氣閥 裝置進一步包括有一具有彈性之充氣閥檔板及排氣閥檔板。 52·如申請專利範圍第45項所述之金屬光罩盒，其中該氣閥裝置可形成一較長 邊且該較長邊之距離為170mm。 53·如申請專利範圍第45項所述之金屬光罩盒，其中該氣閥裝置可形成一較短 邊且該較短邊之距離為110mm。 19 200808622 54· —種金屬光罩盒結構，包括 -金屬下蓋體及-金屬上蓋體，係由—活動接合機構與該金屬下蓋體結合； 複數個扣壓件，配置於該金屬上蓋體及該金屬下蓋體内各角落； 一環狀氣密墊圈，配置於該金屬上蓋體及該金屬下蓋體之間； 至少一鎖扣件，配置於該活動接合機構之一相對側面上；以及 複數個氣閥裝置，配置於該金屬上蓋體或該金屬下蓋體之一側邊上。 55.如申請專利範圍第54項所述之金屬光罩盒，其中該金屬光罩盒之材質為不 銹鋼系列或紹合金、鎮合金。 56·如申請專利範圍第54項所述之金屬光罩盒，其中該鎖扣件為金屬材質。 57·如申请專利範圍第54項所述之金屬光罩盒，其中該環狀氣密塾圈之材質為 一種高分子樹脂。 58·如申凊專利範圍第54項所述之金屬光罩盒，其中該環狀氣密墊圈之材質為 一導電膠。 # 59·如申請專利範圍第54項所述之金屬光罩盒，其中該扣壓件結構之特徵包括： 、 一座體，係以複數個支樓點固接於該光罩傳送盒上蓋體内各角落之位置； 一彎曲彈性元件，其一彎曲之端部結合於該座體上，另一彎曲之端部則呈 彈性懸浮狀態於該單或複數個支撐點之間，且進一步包括一頂持面及一扣壓面； 其中，當該光罩傳送盒之蓋合一光罩時，該彎曲彈性元件之該頂持面及該 扣壓面與該光罩接觸並固定之。 60.如申請專利範圍第54項所述之金屬光罩盒，其中該扣壓件為一高分子材料 所形成。 61·如申請專利範圍第54述之金屬光罩盒，其中更進一步於該金屬上蓋體或金 200808622 屬下蓋體之任一側邊上配置一微波識別元件（RF丨D)。 62·如申請專利範圍第54項所述之金屬光罩盒，其中該氣閥裝置包括至少一個 充氣閥裝置及至少一個排氣閥裝置。 63·如申請專利範圍第62項所述之金屬光罩盒，其中該充氣閥裝置及該排氣閥 裝置進一步包括有一具有彈性之充氣閥檔板及排氣闊檔板。 64. 如申請專利範圍第54項所述之金屬光罩盒，其中該氣闊裝置可形成一較長 邊且該較長邊之距離為170mm。 65. 如申請專利範圍第54項所述之金屬光罩盒，其中該氣閥裝置可形成一較短 邊且该較短邊之距離為11 Qmm。 66· —種金屬光罩盒結構，包括： 一金屬下蓋體及一金屬上蓋體，係由一活動接合機構與該金屬下蓋體結合； 複數個扣壓件，配置於該金屬上蓋體與該金屬下蓋體内各角落； 一環狀氣密墊圈，配置於該金屬上蓋體及該金屬下蓋體之間； 至少一鎖扣件，配置於該活動接合機構之一相對側面上； ^ 複數個氣閥裝置，配置於該金屬上蓋體或該金屬下蓋體之一側邊上；以及 一振動感應裝置配置該與該金屬上蓋體或該金屬下蓋體之上。 67·如申請專利範圍第66項所述之金屬光罩盒，其中該振動感應裝置為一具有 方向性感應之振動感應裝置。 68. 如申請專利範圍第66項所述之金屬光罩盒，其中該振動感應裝置為一種可 重複使用之振動感應裝置。 69. 如申請專利範圍第66項所述之金屬光罩盒，其中該振動感應裝置為一種化 學式之振動感應裝置。 21 200808622 70.如申請專利範圍第66項所述之金屬，罩盒，其中更進〜歩於节金屬上蓋體 或金屬下蓋體之任一側邊上配置一微波識別元件（RFID)。 71.如申請專利範圍第66項所述之金屬光罩盒’其中該氣閥數置包括至，丨、個 充氣閥裝置及至少一個排氣閥裝置。 72·如申請專利範圍第71項所述之金屬光罩盒，其中該充氣閥裝置及該排氣閥 裝置進一步包括有一具有彈性之充氣閥檔板及排氣閥檔板。 73·如申請專利範圍第66項所述之金屬光罩盒，其中該氣閥裝置可形成一較長 着邊且該較長邊之距離為170mm。 74.如申請專利範則66項所述之金屬光罩盒，其中該氣閥裝成一較短 邊且該較短邊之距離為110mm。10 Metal mask box 11 Upper cover 12 Lower cover 13 Annular airtight gasket 14 Locking device 15 Inflator valve device 16 Exhaust valve device 17 Microwave identification device 18 Buckle 181 Seat 182 Curved elastic element 183 Buckle surface 184 Top Holding surface 185 Support point 19 Vibration sensor 20 Photomask 13 200808622 IX. Patent application scope: 1. A metal photomask box is composed of a metal upper cover body and a metal lower cover body, wherein the metal photomask case is formed. At least one movable engaging mechanism is disposed on one of the sides for connecting the metal upper cover body and the metal lower cover body, and at least one locking member is disposed on an opposite side of the movable engaging mechanism for engaging the metal upper cover The body and the metal lower cover. 2. If you apply for a patent scope! The metal photomask case according to the item, wherein the metal photomask case is made of a stainless steel series or an aluminum alloy or a magnesium alloy. 3. The metal photomask case according to the application of the patent application, wherein the locking member is made of metal. 4· - a metal reticle box is composed of a metal upper cover body and a metal lower cover body, wherein the metal cover is placed on the side of the cover _ to the movable joint mechanism for connecting the metal upper cover body and a metal lower cover body, and at least a locking member disposed on the opposite side of the movable engaging mechanism for engaging the metal upper cover body and the metal lower cover body, and stepping on the metal upper cover body and the An annular hermetic gasket is further disposed between the metal lower covers. 5. The metal light shirt of claim 4, wherein the material of the metal light is a non-recorded steel series or an aluminum alloy or a magnesium alloy. 6. The metal photomask of claim 4, wherein the fastener is made of metal. The metal photomask case according to the fourth aspect of the invention, wherein the material of the annular gas light ring is a polymer resin. The metal photomask case according to Item 4, wherein the material of the annular airtight ring is a conductive adhesive. 9·- a wire-type metal reticle box is reduced by a combination of a metal upper cover body and a _ metal lower cover body, wherein at least a movable engagement mechanism is disposed on a side of the metal photomask case for connecting the metal upper cover And a metal lower cover body, and at least one locking member is disposed on an opposite side of the movable engaging mechanism for engaging the metal upper cover body and the metal lower jaw body. The metal light cover box is characterized in that An annular airtight gasket is disposed between the metal upper cover and the metal lower cover, and a plurality of air valve devices are disposed on the metal upper cover or the metal lower cover. 10. The metal photomask case according to claim 9, wherein the metal photomask case is made of a stainless steel series or an aluminum alloy or a magnesium alloy. The metal photomask case according to claim 9, wherein the locking member is made of metal. 12. The metal photomask of claim 9, wherein the annular airtight loop is made of a polymer resin. 13. The metal photomask of claim 9, wherein the material of the brittle airtight surface is a conductive adhesive. 14. The metal photomask of claim 9, wherein the valve device comprises at least one inflating valve device and at least one exhaust valve device. The metal photomask cartridge of claim 14, wherein the inflation valve device and the exhaust gas exhaust device further comprise an inflatable inflation valve baffle and an exhaust wide baffle. The metal photomask of claim 9, wherein the reading device forms a longer side and the longer side has a distance of 170 mm. The metal photomask of claim 9, wherein the gas viewing device forms a shorter side and the shorter side has a distance of 11 mm. The melon-metal reticle box is composed of a metal upper cover body and a metal lower cover body, wherein at least a movable joint mechanism is arranged on the side of the metal reticle box to connect the _ metal upper cover body and the metal a lower cover body, and at least a locking member is disposed on the opposite side of the movable engaging mechanism for engaging the gold 200808622 as the upper cover body and the metal lower cover body, and then the metal upper cover body and the metal lower cover Between the body, an annular airtight ferrule is disposed, and the metal upper cover or the metal lower cover body is disposed with a plurality of air venting devices, and the metal reticle is characterized by the metal upper cover metal or the lower cover A vibration sensing device is disposed on the body. 19. The metal photomask according to claim 18, wherein the metal photomask is made of a non-ferrous steel or an I-alloy or a town alloy. 20. The metal photomask of claim 18, wherein the fastener is made of metal. • 21. The metal photomask case described in Patent Document No. 8, wherein the annular airtight material is a polymer resin. 22. The metal photomask of claim 18, wherein the annular airtight loop is made of a conductive adhesive. The metal photomask of claim 18, wherein the vibration sensing device is a vibration sensing device having directional sensing. 24. The metal photomask of claim 23, wherein the vibration sensing device is a repeatable response device. A metal photomask according to claim 23, wherein the vibration sensing device is a chemical vibration sensing device. 26. The metal photomask of claim 18, wherein the gas viewing device forms a longer side and the longer side has a distance of 170 mm. 27. The gold device of claim 18, wherein the closing device forms a shorter side and the shorter side has a distance of 11 mm. The metal mask case is composed of a metal upper cover body and a metal lower cover body, and the towel is disposed on one side of the metal 200808622 photomask case with at least one movable engaging mechanism for connecting the metal upper cover. And the metal lower cover body, and at least one locking member is disposed on an opposite side of the movable engaging mechanism for engaging the metal upper cover body and the metal lower core, and then the metal upper cover body and the metal An annular airtight gasket is disposed between the cover bodies, and a plurality of air valve devices are disposed on the metal upper cover body or the metal lower cover body, and the metal photomask case is characterized by the metal upper cover body or the metal lower cover body A microwave illuminating element (RF|D) is provided on either side of the metal photomask case according to claim 28, wherein the metal reticle box is made of stainless steel or aluminum alloy. ,magnesium alloy. 30. The metal photomask of claim 28, wherein the fastener is made of metal. The metal photomask case according to claim 28, wherein the annular airtight gasket is made of a polymer resin. 32. The metal photomask case according to claim 28, wherein the material of the annular airtight ring is a conductive adhesive. 33. The metal photomask of claim 28, further comprising a vibration sensing device disposed on the metal upper cover or the metal lower cover. 34. The metal photomask of claim 33, wherein the vibration sensing device is a reusable vibration sensing device. 35. The metal photomask of claim 33, wherein the vibration sensing device is a chemical vibration sensing device. The metal photomask of claim 28, wherein the gas valve is split to form a longer side and the longer side has a distance of 17 mm. 37. The metal photomask of claim 28, wherein the gas valve device forms a shorter 17 200808622 side and the shorter side has a distance of 11 mm. The metal photomask box is composed of a metal upper cover body and a metal lower cover body, wherein at least one movable engaging mechanism is disposed on one side of the metal photomask case for connecting the metal upper cover body and The metal lower cover body is provided with at least one locking member on the opposite side of the movable engaging mechanism for engaging the metal upper cover body and the metal lower cover body, and then the metal upper cover body and the metal lower cover An annular airtight gasket is disposed between the bodies, and a plurality of air wide devices are disposed on the metal upper cover body or the metal lower cover body, wherein the metal photomask case is characterized by the metal upper cover body and the metal lower cover body Each corner is provided with a plurality of crimping members. 39. The metal photomask of claim 38, wherein the metal photomask is made of stainless steel or aluminum alloy or magnesium alloy. 40. The metal photomask case of claim 38, wherein the locking member is made of metal. 41. The metal photomask of claim 38, wherein the structure of the buckle comprises: a body fixed by a plurality of support points at each corner of the cover of the reticle transfer box; a curved elastic member having a curved end portion coupled to the base body, and another curved end portion being elastically suspended between the single or plurality of support points, and further comprising a top holding surface and a The crimping surface; wherein, when the cover of the mask cover is combined with a mask, the receiving surface of the curved elastic member and the pressing surface are in contact with and fixed to the mask. 42. The metal photomask according to claim 38, wherein the material of the airtight ring is a polymer resin. 43. The metal photomask of claim 38, wherein the annular hermetic gasket is made of a conductive paste. The metal photomask of claim 41, wherein the curved elastic member is formed of a high score 200808622 sub-material. The metal photomask box is composed of a metal upper cover body and a metal lower cover body, wherein at least one movable engaging mechanism is disposed on one side of the metal photomask case for connecting the metal upper cover body and The metal lower cover body is disposed on at least one of the opposite sides of the movable engagement mechanism to engage the metal upper cover body and the metal lower cover body. The metal light cover case is characterized in that the metal An annular airtight gasket is disposed between the upper cover and the metal lower cover, and a plurality of air valve devices are disposed on one side of the metal upper cover or the metal lower cover. The metal photomask case of claim 45, wherein the metal photomask case is made of a non-recording steel or an alloy or an alloy. 47. The metal photomask of claim 45, wherein the fastener is made of metal. 48. The metal photomask according to claim 45, wherein the annular airtight gasket is made of a polymer resin. 49. The metal photomask of claim 45, wherein the annular hermetic gasket is made of a conductive paste. The metal photomask cartridge of claim 45, wherein the gas cartridge device comprises at least one inflation valve split and at least one exhaust valve device. 51. The metal photomask of claim 50, wherein the inflation valve device and the exhaust valve device further comprise a resilient inflation valve flap and an exhaust valve flap. 52. The metal photomask of claim 45, wherein the valve device is formed with a longer side and the longer side has a distance of 170 mm. 53. The metal photomask of claim 45, wherein the valve assembly forms a shorter side and the shorter side has a distance of 110 mm. 19 200808622 54 - a metal photomask box structure comprising: a metal lower cover body and a metal upper cover body, wherein the movable joint mechanism is coupled with the metal lower cover body; a plurality of buckle members are disposed on the metal upper cover body and An annular airtight gasket disposed between the metal upper cover and the metal lower cover; at least one locking member disposed on an opposite side of the movable engagement mechanism; A plurality of valve devices are disposed on one side of the metal upper cover or the metal lower cover. The metal photomask case according to claim 54, wherein the metal photomask case is made of a stainless steel series or a sinter alloy or a town alloy. The metal photomask case of claim 54, wherein the locking member is made of metal. The metal photomask case according to claim 54, wherein the material of the annular airtight ring is a polymer resin. 58. The metal photomask according to claim 54, wherein the annular airtight gasket is made of a conductive adhesive. #59. The metal photomask of claim 54, wherein the structure of the buckle comprises: a body, wherein the plurality of branch points are fixed to the cover of the reticle transfer box; a position of a corner; a curved elastic member having a curved end portion coupled to the seat body, and another bent end portion being elastically suspended between the single or plurality of support points, and further comprising a top holding The surface of the reticle and the embossing surface are in contact with and fixed to the reticle when the reticle is covered by the reticle. 60. The metal photomask of claim 54, wherein the crimping member is formed of a polymeric material. 61. The metal photomask according to claim 54, wherein a microwave identification element (RF丨D) is further disposed on either side of the metal upper cover or the lower cover of the gold 200808622. The metal photomask cartridge of claim 54, wherein the gas valve device comprises at least one inflation valve device and at least one exhaust valve device. 63. The metal photomask of claim 62, wherein the inflation valve device and the exhaust valve device further comprise a resilient inflation valve flap and an exhaust wide baffle. 64. The metal photomask of claim 54, wherein the air gap device forms a longer side and the longer side has a distance of 170 mm. 65. The metal photomask of claim 54, wherein the valve device forms a shorter side and the shorter side has a distance of 11 Qmm. 66. A metal photomask box structure comprising: a metal lower cover body and a metal upper cover body coupled to the metal lower cover body by a movable engagement mechanism; a plurality of buckle members disposed on the metal upper cover body and the a metal airtight gasket disposed between the metal upper cover and the metal lower cover; at least one locking member disposed on an opposite side of the movable engaging mechanism; And a gas valve device disposed on a side of the metal upper cover or the metal lower cover; and a vibration sensing device disposed on the metal upper cover or the metal lower cover. 67. The metal photomask of claim 66, wherein the vibration sensing device is a vibration sensing device having directional sensing. 68. The metal photomask of claim 66, wherein the vibration sensing device is a reusable vibration sensing device. 69. The metal photomask of claim 66, wherein the vibration sensing device is a chemical vibration sensing device. The invention relates to a metal, cover case, wherein a metal identification element (RFID) is disposed on either side of the metal upper cover or the metal lower cover. 71. The metal photomask cartridge of claim 66, wherein the valve number comprises, to, an inflation valve device and at least one exhaust valve device. The metal photomask cartridge of claim 71, wherein the inflation valve device and the exhaust valve device further comprise a resilient inflation valve flap and an exhaust valve flap. 73. The metal photomask of claim 66, wherein the valve assembly is formed with a longer edge and the longer side has a distance of 170 mm. 74. The metal photomask of claim 66, wherein the gas valve is mounted as a shorter side and the shorter side is 110 mm apart.
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