1334399 Π) 九、發明說明 【發明所屬之技術領域】 本發明係關於一種適合使用於精密片狀（半）成品的 運輸之封閉式密封容器，亦即，精密片狀成品或諸如（玻 璃）基底在完成之前的半成品，包括光罩（包括標線片） 或作爲用於此種光罩的保護膜之薄膜、半導體晶圓相關成 品、包括液晶顯示器（LCD )之各種顯示器成品等，特別 係關於本文中所意指之至少一側爲至少5 00mm之大型精 密片狀（半）成品。 【先前技術】 如上述之精密片狀（半）成品在許多例子中通常是機 械性易脆的，且，形成在其上之精密部件或構件於許多例 子中係更加易脆的。並且，鑑於有關其使用的特性，此種 精密片狀（半）成品非常討厭塵埃，特別是0.3 μηι或更小 的附著塵埃，因此必須特別注意到其容器的封閉式密封性 。尤其，此種片狀（半）成品係頻繁地自日本空運出口至 海外，且，由於空運及大氣壓力的內部空間（特別地’貨 櫃空間）間的壓力差，微塵係易於導入容器內。再者’微 塵的附著應被避免以泡綿樹脂（例如，日本專利公開申請 案第（JP-A200 1 -3 1 1 65 )號）來形成容器主體，或者’將 泡綿樹脂緩衝材料配置於容器中作爲一般玻璃成品的經常 性運用之用途，因爲此種泡綿樹脂由於磨損而易於產生微 塵。再者，此種精密片狀（半）成品，特別是顯示器成品 -5- (2)1334399 或其光罩，爲了符 ，因爲大型及大面 品的一次曝光，諸 此需求，已發生一 片狀（半）成品其 kg，且，爲了支撐 的施加至精密片狀 度。然而，如果容 容器的重量增加至 總重量增加至5 0 使藉由人力的運輸 成品容納於此容器 防止其至少一面（ 一構件。 【發明內容】 因此，本發明 密封容器，其能夠 片狀（半）成品於 品。 依據我們完成 蓋構件的兩段式結 每一者爲設有適當 形成的成品。更特 合此需求不可避免地加大尺寸（面積） 積顯示器以及更進一步允許數個物鏡成 如有關光罩成品的顯示器成品。爲符合 些新問題。亦即，隨著尺寸加大，精密 本身作爲內容材料的重量增加至5-10 此重量同時消除由於容器的變形之應力 (半）成品，容器亦需要具有堅固的強 器係以依據習知方式的金屬材料組成， 40 kg或更商’且，其內容成品一起的 kg或更高，且由於外輪廓尺寸的增大而 變得非常困難。再者，精密片狀（半） 必須藉由支撐（半）成品片而實施，以 其上形成有精密構件）接觸容器中的另 的主要目的提供一種相對輕量的封閉式 安全地容納及支撐諸如光罩的大型精密 其中，而不會施加不當應力至（半）成 此目的的硏究，已發現使用具有主體及 構之封閉式密封容器係非常有效的’其 加強機構之熱塑性樹脂片的真空或氣壓 別地，依據本發明，提供一種大型精密 -6- (3) (3)1334399 片狀（半）成品之封閉式密封容器，包含：主體及蓋構件 ’該主體及蓋構件分別具有相互接合的周圍凸緣部以容納 精密片狀（半）成品於其中，其中主體及蓋構件的每一者 包含設有加強肋件之真空或氣壓形成的熱塑性樹脂片。 構成依據本發明的精密片狀（半）成品用之封閉式密 封容器的主體及蓋構件分別地係以均勻厚度設置之熱塑性 樹脂片的真空或氣壓形成成品，不像具有不均勻厚度且特 別易於具有局部厚部之注入模製成品，使得主體及蓋構件 的每一者不管其整個輕量可顯示均勻強度，且，不管其大 面積，與整體形成的加強肋件共同防止扭曲或撓曲。主體 及蓋構件分別地具有相互接合之周圍凸緣部，因此，改善 容器的封閉式密封性能。 【實施方式】 以下，在參考附圖的同時，將針對其較佳實施例更明 確地說明本發明。 (水平型結構） 圖1係用於水平型的大型精密片狀（半）成品之封閉 式密封容器的主體10的平面圖（亦即，精密片狀（半） 成品容納於大致平行於主體及蓋構件的周圍凸緣部間的接 合平面的位置之結構的型式）；圖2係沿著如於圖1的箭 頭的方向所視的A-A線所取之截面圖，而，圖3係顯示 主體]〇及蓋構件2 0的組合狀態的周圍的附近之部份截面 (4) (4)1334399 圖。 參考圖1及2，此實施例的主體10係水平型容器， 用於形成在具有大致水平矩形的形狀（更特別地，具有L (縱向）：ca.700mmxT (橫向）ca.800mm的尺寸）的合 成石英製基底上的液晶顯示器（LCD )之光罩（以下有時 稱爲"（半）成品片”），且，容器具有 ca.880mmx ca，93 0mmxca.50mm深度的平面輪廓尺寸。容器主體通常 係以具有ca.5mm的厚度之熱塑樹脂片的真空或氣壓形成 的成品製成，且在其底部設有4個ca. 5 8 Omm長的加強肋 件2，加強肋件2具有ca.30mm曲率半徑及ca.IOmm高度 的弧形截面且以十字桿的形式配置。 沿著形成主體1 0 (以下有時簡稱爲"主體1 ”）之真空 或氣壓形成片1的周圍部的4側，c a · 1 0 0 m m寬度的凸緣 部3係形成以圍繞用來容納精密片狀（半）成品之帶4。 凸緣部3係形成在比容納帶4的底部更高達ca.5〇inm的 位置。在接近容納帶4的外周的側，3件（半）成品片固 持構件5被形成》每一固持構件5包含具有朝向中央向下 ca.5度的錐形之片支撐部5a及具有些微小於（半）成品 片A的厚度的高度之片接合側壁部5 b (圖3 )。固持構 件5係在主體1的真空或氣壓形成之前配置作爲模中的插 入件，且係在真空或氣壓形成的時候整體卡住及固定地固 持於所形成的樹脂片。特別地，固定地固持固持構件5之 所形成的樹脂片的部份在距底部ca.3 0 -4 0mm的中間高度 形成擋板6，以支撐施加固持構件5之（半）成品片A的 -8 - (5) (5)1334399 重量。在此周圍凸緣部3上且沿著其整個周圍長度，凹槽 7係形成來容納彈性0形環以改善容器的封閉式密封性能 。再者’在周圍凸緣部3的角，凸出“及凹入8b係形成 用於與相對於主體10配置的蓋構件之位置校準，以藉由 與形成在室構件的對應位置之校準用凹入8b及凸出83的 裝配而致使位置校準。 在周圍凸緣部3的外緣大致向下的折翼3 a係形成以 顯示加強功能，且，在其部份（此實施例中每一側有2部 份），切口 3 b被形成。周圍凸緣部3係另設有數個定位 螺釘孔3 c。 與主體10組合使用的蓋構件20(圖3僅顯示其一部 份）具有大致與主體1 〇相對稱的結構，且係不同於主體 ，於此實施例中，僅在於〇形環凹槽7未被設置，且其 具有包括比主體的錐形部5 a更長的錐形部1 5 a之（半） 成品片固持構件1 5，然而，省略片接合側壁部。 圖3顯示包含主體10及蓋構件20之精密片狀（半） 成品用的容器的使用狀態。（半）成品片A係藉由被夾 於固持構件5及1 5間而固持在其邊緣，且，容器的封閉 式密封係以凸緣3及13在壓力下夾住Ο形環9而獲得。 施加在固持構件5及1 5之間及於夾住0形環9的凸緣3 及13間之壓緊力被提供，其係藉由配置夾鎖在凸緣部3 及13之間，由配置棘輪扣鎖在其周圍切口，或由使用定 位螺釘孔3c之螺釘定位。 附帶地，（半）成品片A的邊緣不需緊靠固持構件5 -9- (6) (6)1334399 的片接合側壁部5b如圖3所示，而可被固持同時距片接 合側壁部5 b保持一些間隙如圖4所示。特別地，因 配 置在主體的相對側之對置對固持構件5的片接合側壁部 5 b間之距離係設定爲多少比（半）成品片A的寬度更成 ，這係有用的狀態，亦即，有些如圖4所示的間隙（或游 隙）發生在相對側的至少一者上。再者，於此實施例中， 主體側上的固持構件5的片接合片接合側壁部的高度係設 爲些微低於（半）成品片A的厚度，且，蓋構件側上的 固持構件1 5的錐形部1 5 a的長度係設爲大於主體側上的 固持構件5的錐形部5 a的長度。結果，即使一些側向偏 差發生在固定固持構件1 5的時候，這係可能防止固持構 件1 5的下面的（左）水平部份接觸而損壞如圖4所示的 (半）成品片 A的上面。如果錐形部的不同長度係設在 較大’避免由固定位置偏離造成的麻煩的安全性增加，而 太大的差易於導致（半）成品片A的固持（束緊）的不 足。附帶地’這是當然可能配置具有片接合側壁部的固持 構件在蓋構件側上，且配置具有較長的錐形部之固持構件 在主體側上。 (材料） 補充各別部件的材料的說明。構成除了主體1 0的（ 半）成品片固持構件5之外的部份之真空或氣壓成品1可 包含任何熱塑性樹脂，而可較佳地包含抗靜電樹脂以除去 微塵對裝於其中的（半）成品片的靜電吸附。具有永久抗 -10 - (7) (7)1334399 靜電性的此種抗靜電樹脂的已知實例可包括具有（a ): 親水性聚合物：3-100wt.% (b)熱塑性樹脂〇-97wt·% ( 與（a )—起總共爲1 〇〇% )'及（〇多價金屬化合物： 0.0(M-0.5wt.% 的組成之一種（WO-A 03/033590)，此組 成適合使用於本發明。然而，於不需要極限位準的光學特 性（模糊的防止）的例子中，（c )多價金屬化合物的添 加係不要的。特別是較佳地使用（a )包含包括具有氧化 亞院基的橡膠中繼聚合物的接合共聚物之親水性聚合物及 陰離子表面活性劑（JP-A59-2462)，且另與其混合剛性 熱塑性樹脂’諸如聚丙烯睛樹脂、聚苯乙烯樹脂或聚甲基 丙烯酸甲酯樹脂’以提供剛度而不會隨時施加扭曲應力至 (半）成品片。附帶地’於上述實施例的特定實例，包含 l〇wt·%的上述親水性聚合物及90wt.%的聚丙烯睛樹脂（ 由BP Amoco製造的” BAREX210”）且顯示20Gpa的撓性 剛度之ca.5mni厚的抗靜電樹脂片被使用。 (半）成品片固持構件5亦可包含如上述的抗靜電樹 脂’而’甚至於此例子中，將固持構件5形成作爲整合部 份（亦即，具有實質地相等厚度）的真空或氣壓形成的成 品係不適當的，因爲這是難以藉由此種結構而支撐包括（ 半）成品片的重量之集中應力。 因此，於此種例子中，較佳地形成固持構件5作爲抗 靜電樹脂的分開件且設置固持構件作爲模中的插入件以實 現抗靜電樹脂片的真空或氣壓形成，因此致使已形成的樹 脂片整體地捕獲且堅固地固持固持構件5於其中。如果固 -11 - (8) (8)1334399 持構件係由使用取代插入形成的定位螺釘而與主體或蓋構 件固定地固持’所形成的封閉式密封易於變成不完全。再 者，如果固持構件係以黏著劑而固持，（半）成品片A 易於被黏著劑而弄髒。因此，形成如上述的插入件係較佳 的。因爲固持構件5的片接.合側壁部5 b及（半）成品片 A的邊緣間有某些間隙（游隙），固持構件5，特別是其 支撐部件5a，與（半）成品片A的邊緣的某些滑動可能 發生。因此，更佳地使用具有滑動能力或半潤滑特性之相 對軟的樹脂，其包括諸如聚四氟乙烯的含氟樹脂、諸如聚 乙烯之烯樹脂、或聚乙醛樹脂》而不是構成真空或氣壓形 成的成品1之樹脂。於特別實例中，以聚四氟乙烯製成且 具有大置L型截面之固持構件5被使用。 〇形環9 (圖3 )較佳地可包含彈性樹脂，諸如含氟 橡膠或矽膠，且特別佳地是此種付與抗靜電性的彈性樹脂 。◦形環未限制如圖所示的固體 〇形環（例如，具有 8mm直徑），而亦較佳地包含中空〇形環（例如，具有 8 m m外徑及4 - 6 m m內徑）以增加變形衝擊。 (修改） 以上所述，用於大型LCD光罩之水平型容器已被說 明作爲較佳實施例。然而’容器的上述實施例可以各種方 式而修改。以下說明此種修改的某些實例。 例如：每一側使用3個固持構件5 ’且，總共使用】2 個於以上實施例，而，數量當然可依需要而增加或減少。 -12- (9) (9)1334399 然而，每一側較佳地使用至少兩個固持構件，因此，總共 至少8個固持構件。再者，於以上實施例中，凸出8 a及 凹入8b各配置2個總共4個在接近主體的周圍凸緣部及 蓋構件的周圍凸緣部上的4個角之位置，用於主體及蓋構 件間的位置校準，而，這些校準機構亦可配置在4側上的 中間位置，且可依需要而增加或減小（假設至少兩個此種 校準構件係較佳地設在主體及蓋構件的每一者）。較佳地 ’主體及蓋構件係相等地設有等量的凸出8 a及凹入8 b， 以儘可能地分担共同結構給主體及蓋構件的真空或氣壓形 成的模，而，可能地在結構上，主體及蓋構件的一者設有 凸出8a’且，另一者設有凹入8b。0形環凹槽7的相似 修改係可能的。更特別地，如果〇形環凹槽7製作得較 淺且一對稱0形環凹槽亦設在蓋構件的周圍凸緣部，由 真空或氣壓形成形成的部份（亦即，無論形狀爲何且除了 形成中配置作爲插入件的固持構件之外）可在形狀上製成 完全對稱’以使甚至可能使用於主體及蓋構件的形式的共 同模。 周圍凸緣部3的向下折翼3a較佳地用於加強的目的 ’而不是必要的。這亦可能省略切口 3 b及定位螺釘孔3 c 〇 加強肋件2的截面形狀及凸出8a與凹入8b可以是矩 形以取代半圓或半球形。 (垂直型結搆） -13- (10) (10)1334399 用於本發明的精密片狀（半）成品之封閉式密封容器 亦可組成如垂直型容器（亦即，精密片狀（半）成品容納 大致垂直於主體及蓋構件的周圍凸緣部的接合面的位置之 結構類型）。作爲此種垂直型容器的實施例，用來生產各 種顯示器之玻璃結構的容器係參考圖5所說明（.顯示主體 及蓋構件的組合之立體圖）；圖6A及6B分別爲容器主 體的頂平面圖及側視圖’而’圖7 A - 7 C分別爲解說固持 (半）成品片於容器的方式之前視圖。 更特別地，如圖5所示，垂直容器包含具有ca.2200 mm的開口周圍及ca.350mm的高度之主體30、及具有 ca.l80mm的高度之蓋構件40，其分別構成爲ca.5mm厚 的抗靜電樹脂的真空或氣壓形成成品2 1及3 1 (包含 10wt·%的親水映聚合物及90wt.%的聚丙烯睛基樹脂）， 且分別地設有側壁加強肋件2 2及3 2。主體及蓋構件具有 相互接合的ca.30mm寬的周圍凸緣部23及33，且，主體 30的周圍凸緣部23設有0形環容納槽27。在主體內， —對在其中央設有用於插入及固持樹脂片的凹槽25a之固 持構件2 5係沿著導槽構件2 6而插入，以使其上端向上延 伸超過周圍凸緣部23。如圖6A所示，在主體的底部，加 強肋件22a被形成，且，各具有用來固持固持構件25的 下端的凹槽26aa之固持構件26a被配置。在使用容器的 時候，（半）成品片A.2係沿著固持構件2 5的片插入及 固持凹槽25a而插入的，其係依序沿著導槽構件26而插 入且與固持構件26a的凹槽26aa固持在其下端，且，（ -14 - (11) (11)1334399 半）成品片A2係固持在下端，其中（半）成品片的下端 固持構件25b設有配置在主體的底部之片固持凹槽25bb 。（半）成品片A2另以設有固持凹槽35b且配置在蓋構 件40的底部之固持構件35而固持在上端，因此容納於包 含主體30及蓋構件40的容器。在主體30及蓋構件40的 周圍凸緣部的接合之前，Ο形環（未顯示）係配置於容納 槽27，且，容器的封閉式密封係藉由配置在周圍凸緣部 23及33間的夾鎖或棘輪扣鎖致使且施加至周圍凸緣部之 接合壓力而確保。 真空或氣壓形成成品21及31、及固持構件25、25b ' 2 6a、35等的材料係相似於參考圖I至4說明的真空或 氣壓形成品1及固持構件5的材料。 (第四修改例） 以上說明已主要地針對適合一（半）成品片的容納之 容器的實施例。然而，本發明的封閉式密封容器亦可應用 至數個（半）成品片的容納。圖8係顯示用於容納數個精 密片狀（半）成品於蓋構件向上移開的狀態之此種封閉式 密封容器的實施例之簡要立體圖。參考圖8，垂直型容器 包含主體50及蓋構件60，其分別地係形成爲設有用於更 換容器內的氣體的噴嘴52及62的真空或氣壓形成樹脂成 品5 1及6 ]。主體5 0內側配置有用來容納及支承例如， 1 〇個（半）成品片之載體5 3。圖9 A係此種（半）成品 片載體53於自主體取出的狀態的放大圖，且，圖9B及 -15- (12) 1334399 9C分別地爲圖9A中的部份B及部份C的放大圖 別地6.(半）成品片載體53包含一對各設有用來 支撐例如，1 〇個垂直並列的（半）成品片的導槽 樹脂片531、用來移動載體的握柄533、及用於固 樹脂片5 3 1且確保間隔於其間的金屬框5 3 4。結果 ，1 〇個（半）成品片被允許沿著導槽5 32而插入 )且以導槽532的底部532c而支撐在其下端（圖 且，於因此負載狀態的載體53可移入及移出主體 個（半）成品片的下端及上端係以矽膠、含氟樹月旨 護，以緩和在運輸時施加至其上的衝擊。再者’ 5 〇的內側底部，凹槽可被形成以容納樹脂片5 3 1 ，因此容納載體5 3，同時防止載體的側向振動6 的話，蓋構件6 0亦可設有用於容納樹脂片5 3 1 531b之凹槽以改善載體的固定。分別設在主體50 件60用於更換容器內側的氣體之噴嘴52及62係 來更換用於諸如EL (電發光）相關片成品的（半 片之容器的內側大氣，（半）成品片應免受溼氣以 的附著。若需要的話，亦可附接此種噴嘴至如參考 4說明之水平型容器。 如上述，依據本發明，提供能夠女全地且以氣 容納、支撐及運輸諸如光覃之大型精密片狀（半） 不會致使不當應力至其上。 【圖式簡單說明】 。更特 容納及 5 3 2之 定支撐 ，例如 (圖9B 9C )， 50。數 等而保 在主體 的下端 若需要 的上端 及蓋構 適於用 )成品 及塵埃 圖1至 密方式 成品而 -16 - (13) (13)1334399 圖1係依據本發明之水平型容器的實施例之主體的平 面圖。 圖2係沿著圖1的A-A線所取之截面圖。 圖3係圖]所示的容器的固持構件的附近之部份截面 圖。 圖4係顯示間隙（或游隙）在固持構件與（半）成品 片的邊緣間之部份截面圖。 圖5係顯示依據本發明的一個實施例之垂直型容器的 主體與蓋構件的組合之立體圖。 圖6A及6B分別係圖5中所示的容器的主體的頂平 面圖及側視圖。 圖7A係解說用於固持（半）成品片於圖5的容器之 前視圖，而圖7 ·Β及7 C分別地係沿著圖7 A中的B - B線及 C - C線所取之截面圖。 圖8係顯示依據本發明用於容納數個（半）成品片之 垂直型容器的實施例的主體及蓋構件的組合之立體圖。 圖9A係顯示圖8的容器中之（半）成品片載體的取 出狀態之立體圖，而圖9B及9C分別地係圖9A中的部份 B及部份C的放大圖。 【主要元件之符號說明】 A :(半）成品片 A2 ：(半）成品片 LCD :液晶顯示器 -17- (14) (14)1334399 1 :真空或氣壓形成成品 2 :加強肋件 3 :凸緣部 3 a :折翼 3b :切口 3 c :定位螺釘孔 4 :帶 5 :(半）成品片固持構件 5 a :片支撐部 5 b :片接合側壁部 6 :擋板 7 :凹槽 8 a :凸出 8b :凹入 9 : 0形環 10 :主體 13 :凸緣 15 ：(半）成品片固持構件 1 5 a :錐形部 2 〇 :蓋構件 21及31 :真空或氣壓形成成品 2 2 a :加強肋件 2 2及3 2 :側壁加強肋件 2 3及3 3 :周圍凸緣部 -18 - (15) ‘ (15) ‘1334399 2 5 :固持構件 25a :凹槽 25b :片下端固持構件 25bb :片固持凹槽 2 6 :導槽構件 , 26a :固持構件 2 6 a a :凹槽 2 7 : 0形環容納槽 _ 3 0 :主體 3 5 :固持構件 3 5 b :固持構件 4 0 :蓋構件 50 :主體 5 1及6 1 :真空或氣壓形成樹脂成品 5 2及62 :噴嘴 53 :載體 1 60 :蓋構件 5 3 1 :樹脂片 532 :導槽 5 3 2c :底部 5 3 3 :握柄 5 3 4 :金屬框 -19 -1334399 Π) DESCRIPTION OF THE INVENTION [Technical Field] The present invention relates to a closed sealed container suitable for use in the transport of precision sheet (semi-) finished products, that is, a precision sheet-like product or a (glass) substrate Semi-finished products before completion, including reticle (including reticle) or film as protective film for such reticle, semiconductor wafer related products, various display products including liquid crystal display (LCD), etc. As used herein, at least one side is a large precision sheet (semi) finished product of at least 500 mm. [Prior Art] The precision sheet-like (semi-) finished product as described above is generally mechanically brittle in many cases, and the precision parts or members formed thereon are more brittle in many cases. Moreover, in view of the characteristics of its use, such precision sheet-like (semi-) finished products are very annoying to dust, especially dust of 0.3 μm or less, and therefore it is necessary to pay special attention to the hermetic sealing property of the container. In particular, such sheet-like (semi-) finished products are frequently air-exported from Japan to overseas, and the dust is easily introduced into the container due to the pressure difference between the air space and the internal space of the atmospheric pressure (especially the container space). Further, the attachment of the fine dust should be avoided by forming a container body with a foaming resin (for example, Japanese Patent Application Laid-Open No. (JP-A200 1 -3 1 1 65)), or 'disposing the foaming resin cushioning material on The use of the container as a regular glass product is often used because it is prone to dust generation due to wear. Moreover, such precision sheet-like (semi-) finished products, especially the finished display-5-(2)1334399 or its reticle, in order to meet the needs of one-size exposure of large and large-faced products, one piece has occurred. The shape is (semi) finished in kg and applied to the precision sheet for support. However, if the weight of the container is increased until the total weight is increased to 50, the transported product by manpower is accommodated in the container to prevent at least one side thereof (a member). Accordingly, the sealed container of the present invention can be sheet-like ( Half) Finished product. According to the two-stage knots that we complete the cover member, each is equipped with a properly formed finished product. It is inevitable to increase the size (area) product display and further allow several objective lenses. The finished product of the finished reticle is in line with some new problems. That is, as the size increases, the weight of the precision itself as a content material increases to 5-10% while eliminating the stress due to the deformation of the container (half) The finished product, the container also needs to have a strong strength system to be composed of a metal material according to a conventional method, 40 kg or more, and the finished product is kg or higher together, and becomes larger due to an increase in the outer contour size. Very difficult. In addition, the precision sheet (half) must be implemented by supporting the (semi) finished sheet with the precision member formed thereon in contact with the container. A further main object is to provide a relatively lightweight, closed, securely accommodating and supporting large precision such as a reticle without applying undue stress to (semi) for this purpose, and has been found to have a body and structure. The closed sealed container is very effective in the vacuum or pressure of the thermoplastic resin sheet of the reinforcing mechanism. According to the present invention, a large precision-6-(3) (3) 1334399 sheet-like (semi) finished product is provided. The sealed container comprises: a main body and a cover member. The main body and the cover member respectively have a peripheral flange portion joined to each other to accommodate a precision sheet-like (semi) finished product, wherein each of the main body and the cover member comprises a reinforcement A thermoplastic resin sheet formed by vacuum or gas pressure of the rib member. The main body and the cover member constituting the closed-sealed sealed container for a precision sheet-like (semi) finished product according to the present invention are respectively formed into a finished product by vacuum or air pressure of a thermoplastic resin sheet having a uniform thickness, unlike having a non-uniform thickness and being particularly easy. The injection molded article having a partial thick portion allows each of the main body and the cover member to exhibit uniform strength irrespective of its entire weight, and regardless of its large area, together with the integrally formed reinforcing rib member, prevents distortion or deflection. The body and the cover member respectively have peripheral flange portions joined to each other, thereby improving the hermetic sealing performance of the container. [Embodiment] Hereinafter, the present invention will be more clearly described with reference to the accompanying drawings. (Horizontal Structure) Fig. 1 is a plan view of a main body 10 of a closed-type sealed container for a horizontal large-sized precision sheet (semi-finished product) (that is, a precision sheet (semi) finished product is accommodated substantially parallel to the main body and the cover. FIG. 2 is a cross-sectional view taken along the line AA as viewed in the direction of the arrow of FIG. 1 , and FIG. 3 is a view showing the structure of the position of the joint plane between the flange portions of the member; FIG. Part of the cross section around the vicinity of the combined state of the lid member 20 (4) (4) 1334399. Referring to Figures 1 and 2, the main body 10 of this embodiment is a horizontal type container for forming a shape having a substantially horizontal rectangle (more specifically, having L (longitudinal): ca. 700 mm x T (lateral) ca. 800 mm) A reticle of a liquid crystal display (LCD) on a synthetic quartz substrate (hereinafter sometimes referred to as a "semi-finished sheet"), and the container has a planar outline size of ca. 880 mm x ca, 93 0 mm x ca. 50 mm depth. The container body is usually made of a vacuum or air pressure formed of a thermoplastic resin sheet having a thickness of ca. 5 mm, and has four ca. 5 8 Omm long reinforcing ribs 2 at the bottom thereof, and the reinforcing ribs 2 An arc-shaped cross section having a radius of curvature of ca. 30 mm and a height of ca. 10 mm and arranged in the form of a cross bar. The vacuum or air pressure forming the main body 10 (hereinafter sometimes abbreviated as "main body 1") forms the periphery of the sheet 1. On the 4 sides of the portion, a flange portion 3 having a width of ca · 100 mm is formed to surround the belt 4 for accommodating a fine sheet (semi) finished product. The flange portion 3 is formed at a position higher than the bottom of the accommodating tape 4 by ca. 5 〇 inm. On the side close to the outer circumference of the accommodating tape 4, three (semi) finished sheet holding members 5 are formed" each holding member 5 includes a sheet supporting portion 5a having a tapered shape toward the center downward ca. 5 degrees and having a slight The sheet of the height of the (half) thickness of the finished sheet A is joined to the side wall portion 5b (Fig. 3). The holding member 5 is disposed as an insert member in the mold before the vacuum or air pressure of the main body 1 is formed, and is integrally stuck and fixedly held to the formed resin sheet when vacuum or air pressure is formed. Specifically, the portion of the resin sheet formed by holding the holding member 5 fixedly forms a baffle 6 at an intermediate height from the bottom portion ca.30-400 mm to support the application of the (semi) finished sheet A of the holding member 5. -8 - (5) (5) 1334399 Weight. Here, the groove 7 is formed to accommodate the elastic O-ring on the peripheral flange portion 3 and along the entire circumference thereof to improve the closed sealing performance of the container. Further, 'at the corner of the peripheral flange portion 3, the protrusions" and the recesses 8b are formed to be aligned with the position of the cover member disposed with respect to the main body 10 for alignment with the corresponding position formed in the chamber member. The assembly of the recess 8b and the projection 83 causes the position to be aligned. The flaps 3a which are substantially downward at the outer edge of the peripheral flange portion 3 are formed to exhibit the reinforcing function, and, in part thereof (in this embodiment There are two parts on one side, and a slit 3b is formed. The peripheral flange portion 3 is additionally provided with a plurality of positioning screw holes 3c. The cover member 20 (only one part of which is shown in Fig. 3) used in combination with the main body 10 has a structure substantially symmetrical to the main body 1 ,, and different from the main body, in this embodiment, only the 〇 ring groove 7 is not provided, and has a cone including a longer tapered portion 5 a than the main body The (half) finished piece holding member 15 of the shape portion 15a, however, omitting the sheet joining side wall portion. Fig. 3 shows the state of use of the container for the precision sheet-like (semi) finished product including the main body 10 and the cover member 20. a half) the finished sheet A is held at its edge by being sandwiched between the holding members 5 and 15 and The closed seal of the container is obtained by clamping the beak ring 9 under pressure by the flanges 3 and 13. Applied between the holding members 5 and 15 and between the flanges 3 and 13 sandwiching the O-ring 9. A pressing force is provided which is locked between the flange portions 3 and 13 by the arrangement clip, is locked by the arrangement ratchet buckle around it, or is positioned by a screw using the positioning screw hole 3c. Incidentally, (half) The edge of the finished sheet A does not need to be in close proximity to the holding member 5-9-(6) (6) 1334399. The sheet joining side wall portion 5b is as shown in Fig. 3, and can be held while maintaining some gap from the sheet joining side wall portion 5b. 4, in particular, the distance between the sheet joining side wall portions 5b of the holding member 5 is set to be larger than the width of the (semi) finished sheet A due to the opposite sides disposed on the opposite sides of the main body. A useful state, that is, some gap (or play) as shown in Fig. 4 occurs on at least one of the opposite sides. Further, in this embodiment, the sheet engaging piece of the holding member 5 on the main body side The height of the joint side wall portion is set slightly lower than the thickness of the (semi) finished sheet A, and the holding member 15 on the cover member side The length of the tapered portion 15 5 is set to be larger than the length of the tapered portion 5 a of the holding member 5 on the main body side. As a result, even if some lateral deviation occurs at the fixed holding member 15 , this may prevent holding The lower (left) horizontal portion of member 15 contacts the upper surface of the (semi) finished sheet A as shown in Figure 4. If the different lengths of the tapered portion are set at a larger 'avoiding deviation from the fixed position Troublesome safety increases, and too large a difference is liable to cause a shortage of (half) holding (tightening) of the finished sheet A. Incidentally, it is of course possible to arrange a holding member having a sheet-joining side wall portion on the cover member side, And a holding member having a long tapered portion is disposed on the main body side. (Material) A description of the material of the respective components. The vacuum or pneumatic product 1 constituting a portion other than the (semi) finished sheet holding member 5 of the main body 10 may contain any thermoplastic resin, and may preferably contain an antistatic resin to remove the dust in the pair (half ) Electrostatic adsorption of the finished sheet. Known examples of such an antistatic resin having permanent anti-10 - (7) (7) 1334399 electrostatic properties may include (a): a hydrophilic polymer: 3-100 wt.% (b) a thermoplastic resin 〇-97 wt · % (total of 1 〇〇% with (a)) and (〇 Multivalent metal compound: 0.0 (one of the composition of M-0.5wt.% (WO-A 03/033590), this composition is suitable for use In the present invention, however, in the case of an optical characteristic (prevention of blurring) which does not require a limit level, (c) the addition of a polyvalent metal compound is not preferable. Particularly preferably, (a) includes including oxidation. A hydrophilic polymer and an anionic surfactant (JP-A59-2462) of a joint polymer of a rubber relay polymer of a sub-hospital base, and a rigid thermoplastic resin such as a polypropylene resin, a polystyrene resin or the like Polymethyl methacrylate resin 'to provide rigidity without applying twisting stress to the (semi) finished sheet at any time. Incidentally, in the specific example of the above embodiment, 1 〇 wt·% of the above hydrophilic polymer and 90 wt% .% of polypropylene resin (manufactured by BP Amoco, BAREX210) A ca. 5 mni thick antistatic resin sheet showing a flexural rigidity of 20 GPa is used. (Semi) The finished sheet holding member 5 may also contain an antistatic resin as described above' and even in this example, the holding member 5 is to be held. It is not appropriate to form a finished product formed by vacuum or air pressure as an integral part (i.e., having substantially equal thickness) because it is difficult to support the concentrated stress including the weight of the (semi) finished sheet by such a structure. Therefore, in such an example, the holding member 5 is preferably formed as a separate member of the antistatic resin and the holding member is provided as an insert in the mold to realize vacuum or gas pressure formation of the antistatic resin sheet, thereby causing the formed resin The sheet integrally captures and firmly holds the holding member 5 therein. If the solid 11 - (8) (8) 1334399 holding member is fixedly held by the main body or the cover member using a set screw formed by replacing the insert The closed seal tends to become incomplete. Further, if the holding member is held by the adhesive, the (semi) finished sheet A is easily soiled by the adhesive. The insert member is preferred. Because of the gap between the edge of the holding member 5 and the edge of the (semi) finished sheet A, the retaining member 5, particularly its supporting member 5a, some slippage with the edge of the (semi) finished sheet A may occur. Therefore, it is more preferable to use a relatively soft resin having a sliding ability or a semi-lubricating property including a fluorine-containing resin such as polytetrafluoroethylene, such as a polyethylene olefin resin, or a polyacetal resin, rather than a resin of the finished product 1 formed by vacuum or air pressure. In a specific example, a holding member 5 made of polytetrafluoroethylene and having a large L-shaped cross section is used. . The stirrup ring 9 (Fig. 3) preferably may comprise an elastic resin such as a fluorine-containing rubber or silicone rubber, and particularly preferably such an elastic resin which imparts antistatic properties. The ◦ ring does not limit the solid 〇 ring as shown (for example, having a diameter of 8 mm), but also preferably includes a hollow 〇 ring (for example, having an outer diameter of 8 mm and an inner diameter of 4 - 6 mm) to increase Deformation shock. (Modification) As described above, a horizontal type container for a large LCD mask has been described as a preferred embodiment. However, the above embodiments of the container can be modified in various ways. Some examples of such modifications are described below. For example, three holding members 5' are used on each side and a total of two are used in the above embodiments, and the number can of course be increased or decreased as needed. -12- (9) (9) 1334399 However, at least two holding members are preferably used on each side, and therefore, at least 8 holding members in total. Furthermore, in the above embodiment, the projections 8 a and the recesses 8 b are arranged in a total of four positions at four corners close to the peripheral flange portion of the main body and the peripheral flange portion of the cover member. Position calibration between the main body and the cover member, and these calibration mechanisms can also be disposed at intermediate positions on the 4 sides, and can be increased or decreased as needed (assuming at least two such calibration members are preferably provided in the main body And each of the cover members). Preferably, the main body and the cover member are equally provided with equal amounts of protrusions 8 a and recesses 8 b to share as much as possible the mold formed by the vacuum or air pressure of the main body and the cover member by the common structure, and possibly Structurally, one of the body and the cover member is provided with a projection 8a' and the other is provided with a recess 8b. A similar modification of the 0-ring groove 7 is possible. More specifically, if the beak ring groove 7 is made shallow and a symmetrical O-ring groove is also provided at the peripheral flange portion of the cover member, the portion formed by vacuum or air pressure (that is, regardless of the shape) And in addition to forming a retaining member configured as an insert in the formation, it can be made completely symmetrical in shape to make it possible to use a common mold in the form of a body and a cover member. The downward flap 3a of the peripheral flange portion 3 is preferably used for reinforcement purposes rather than being necessary. It is also possible to omit the slit 3b and the set screw hole 3c. The cross-sectional shape of the reinforcing rib 2 and the projection 8a and the recess 8b may be rectangular instead of semicircular or hemispherical. (Vertical Structure) -13- (10) (10) 1334399 The sealed sealed container of the precision sheet (semi) finished product used in the present invention may also be composed of a vertical type container (that is, a precision sheet (semi) finished product) A type of structure that accommodates a position of the joint surface that is substantially perpendicular to the body and the peripheral flange portion of the cover member). As an embodiment of such a vertical type container, a container for producing a glass structure of various displays is described with reference to Fig. 5 (a perspective view showing a combination of a main body and a cover member); Figs. 6A and 6B are top plan views of the container body, respectively. And the side view 'and' Fig. 7 A - 7 C are respectively a front view of the manner in which the (half) finished piece is placed in the container. More specifically, as shown in FIG. 5, the vertical container comprises a main body 30 having an opening around ca. 2200 mm and a height of ca. 350 mm, and a cover member 40 having a height of ca. 180 mm, which are respectively configured as ca. 5 mm. The vacuum or gas pressure of the thick antistatic resin forms the finished products 2 1 and 31 (including 10 wt. % of the hydrophilic polymer and 90 wt.% of the polypropylene base resin), and is respectively provided with the side wall reinforcing ribs 2 2 and 3 2. The main body and the cover member have ca. 30 mm wide peripheral flange portions 23 and 33 which are joined to each other, and the peripheral flange portion 23 of the main body 30 is provided with an O-ring receiving groove 27. In the main body, a holding member 25 having a recess 25a for inserting and holding a resin sheet at its center is inserted along the guide member 26 so that its upper end extends upward beyond the peripheral flange portion 23. As shown in Fig. 6A, at the bottom of the main body, reinforcing ribs 22a are formed, and holding members 26a each having a recess 26aa for holding the lower end of the holding member 25 are disposed. When the container is used, the (semi) finished sheet A.2 is inserted along the sheet insertion and holding groove 25a of the holding member 25, which is sequentially inserted along the guide member 26 and with the holding member 26a. The groove 26aa is held at the lower end thereof, and (-14 - (11) (11) 1334399 half) the finished piece A2 is held at the lower end, wherein the lower end holding member 25b of the (semi) finished piece is disposed at the bottom of the main body The piece holds the groove 25bb. The (semi) finished sheet A2 is held by the holding member 35 provided with the holding recess 35b and disposed at the bottom of the cover member 40, and is thus housed in the container including the main body 30 and the cover member 40. Before the engagement of the main flange 30 and the peripheral flange portion of the cover member 40, a Ο-shaped ring (not shown) is disposed in the accommodating groove 27, and the closed seal of the container is disposed between the peripheral flange portions 23 and 33. The clip or ratchet lock is ensured by the engagement pressure applied to the surrounding flange portion. The vacuum or gas pressure forms the finished products 21 and 31, and the holding members 25, 25b' 26a, 35 and the like are similar to the materials of the vacuum or pneumatic forming article 1 and the holding member 5 described with reference to Figs. (Fourth Modification) The above description has been mainly directed to an embodiment of a container suitable for a (semi) finished sheet. However, the hermetic sealed container of the present invention can also be applied to the accommodation of several (semi) finished sheets. Fig. 8 is a schematic perspective view showing an embodiment of such a hermetic sealed container for accommodating a plurality of fine sheet-like (semi-) finished products in a state in which the cover member is moved upward. Referring to Fig. 8, the vertical type container includes a main body 50 and a cover member 60 which are respectively formed as vacuum or air pressure forming resin products 5 1 and 6 for providing nozzles 52 and 62 for replacing the gas in the container. A carrier 53 for accommodating and supporting, for example, one (half) finished piece is disposed inside the main body 50. Figure 9A is an enlarged view of the state in which the (semi) finished sheet carrier 53 is taken out from the main body, and Figures 9B and -15-(12) 1334399 9C are respectively part B and part C of Figure 9A. Magnified view 6. The (semi) finished sheet carrier 53 comprises a pair of channel resin sheets 531 each provided to support, for example, 1 vertical (semi-) finished sheets, and a handle 533 for moving the carrier. And a metal frame 533 for securing the resin sheet 531 and ensuring a space therebetween. As a result, 1 (semi) finished piece is allowed to be inserted along the guide groove 5 32 and supported at the lower end thereof by the bottom 532c of the guide groove 532 (Fig., and the carrier 53 in the loaded state can be moved in and out of the main body). The lower and upper ends of the (semi) finished sheets are made of silicone rubber and fluorine-containing tree to relieve the impact applied to them during transportation. In addition, the inner bottom of the '5 〇 can be formed to accommodate the resin. The sheet 5 3 1 , thus accommodating the carrier 5 3 while preventing the lateral vibration 6 of the carrier, the cover member 60 may also be provided with a recess for accommodating the resin sheet 5 3 1 531b to improve the fixing of the carrier. 50 pieces 60 are used to replace the gas nozzles 52 and 62 on the inside of the container for replacement of the inner side of the container such as EL (electroluminescence) (the inner half of the half-piece container, the (semi) finished piece should be protected from moisture Attachment. If desired, such a nozzle can also be attached to a horizontal type container as described in reference 4. As described above, according to the present invention, a large precision piece capable of accommodating, supporting and transporting such a light, such as a diaphragm, can be provided. Shape (half) will not cause no The stress is above it. [Simple description of the diagram] More special accommodation and support of 5 3 2, for example (Fig. 9B 9C), 50. Number, etc., at the lower end of the main body, if necessary, the upper end and the cover structure are suitable for use. Finished product and dust Figure 1 to a dense finished product - 16 - (13) (13) 1334399 Figure 1 is a plan view of the main body of an embodiment of a horizontal type container according to the present invention. Figure 2 is taken along line AA of Figure 1. Figure 3 is a partial cross-sectional view of the vicinity of the holding member of the container shown in Figure 7. Figure 4 is a view showing the gap (or play) between the holding member and the edge of the (semi) finished sheet. Fig. 5 is a perspective view showing a combination of a main body and a cover member of a vertical type container according to an embodiment of the present invention. Figs. 6A and 6B are a top plan view and a side view, respectively, of the main body of the container shown in Fig. 5. Figure 7A is a front view of the container for holding the (semi) finished sheet in Figure 5, and Figures 7 and 7 C are taken along line B - B and line C - C in Figure 7 A, respectively. Figure 8 is a vertical view for accommodating several (semi) finished pieces in accordance with the present invention. Fig. 9A is a perspective view showing the taken-out state of the (semi) finished sheet carrier in the container of Fig. 8, and Figs. 9B and 9C are respectively the portions in Fig. 9A Enlarged view of B and part C. [Symbol description of main components] A : (semi) finished piece A2 : (semi) finished piece LCD : Liquid crystal display -17- (14) (14) 1334399 1 : Vacuum or air pressure formation Finished product 2: reinforcing rib 3: flange portion 3a: flap 3b: slit 3c: positioning screw hole 4: belt 5: (semi) finished sheet holding member 5a: sheet supporting portion 5b: sheet joining side portion 6: baffle 7: groove 8a: projection 8b: concave 9: 0-ring 10: main body 13: flange 15: (semi) finished piece holding member 1 5 a : tapered portion 2 〇: cover member 21 and 31: vacuum or air pressure to form the finished product 2 2 a : reinforcing rib members 2 2 and 3 2 : side wall reinforcing rib members 2 3 and 3 3 : surrounding flange portion -18 - (15) ' (15) '1334399 2 5 Holding member 25a: groove 25b: lower end holding member 25bb: sheet holding groove 2 6 : guide member, 26a: holding member 2 6 aa : groove 2 7 : 0 ring receiving groove _ 3 0 : main body 3 5: Retaining structure Member 3 5 b : holding member 40 : cover member 50 : main body 5 1 and 6 1 : vacuum or air pressure to form resin finished product 5 2 and 62 : nozzle 53 : carrier 1 60 : cover member 5 3 1 : resin sheet 532 : guide Slot 5 3 2c : bottom 5 3 3 : grip 5 3 4 : metal frame -19 -