CN201117642Y - Storage device for storing semiconductor elements or masks - Google Patents

Abstract

The utility model relates to a storage device is used for depositing semiconductor component or mask, and this kind of storage device is formed by first lid, second lid and the combination of flange. The first cover body is provided with a top part and a plurality of side edges arranged around the top part; the second cover body is combined with the first cover body to form an inner space capable of accommodating the mask; the flange is arranged on the first cover body and used for allowing mechanical holding and placing; the utility model is characterized in that the flange and the first cover body are in an integrated form.

Description

Storage device for storing semiconductor components or masks

technical field

The utility model relates to a storage device for storing semiconductor elements or masks, in particular to a storage device for storing semiconductor elements or masks in which a flange and a first cover are integrally formed.

Background technique

The rapid development of modern semiconductor technology, in which optical lithography (Optical Lithography) plays an important role, as long as it is about the definition of patterns, it needs to rely on optical lithography. In the application of optical lithography technology to semiconductors, the designed circuit is made into a light-transmitting mask (photo mask) with a specific shape. Using the principle of exposure, the light source is projected onto the silicon wafer (silicon wafer) through a mask to expose and display a specific pattern. Since any dust particles (such as particles, dust or organic matter) attached to the mask will cause the quality of projection imaging to deteriorate, the mask used to generate graphics must be kept absolutely clean, and the projected silicon wafer or other semiconductor projection body must also be kept clean. It must be kept absolutely quiet, so in general wafer processing, a clean room (clean room) environment is provided to avoid particle contamination in the air. However, the current clean room cannot achieve an absolutely dust-free state.

Therefore, modern semiconductor manufacturing processes use anti-pollution storage devices for mask storage and transportation to keep masks clean; anti-pollution semiconductor component storage devices are also used for storage and transportation of semiconductor components to keep semiconductor components clean. clean. The storage device is used to store the mask in the semiconductor manufacturing process, so as to facilitate the handling and transmission of the mask between machines, and to isolate the mask from the atmosphere, so as to prevent the mask from being polluted by impurities and causing changes; while semiconductor components are stored The device is used to store semiconductor components in the semiconductor manufacturing process, to facilitate the handling and transmission of semiconductor components between machines, and to isolate the semiconductor components from contact with the atmosphere, so as to prevent the semiconductor components from being polluted by impurities and changing. Therefore, the mask or the semiconductor element must be placed in the storage device to achieve the effect of cleaning and avoiding pollution.

The traditional storage devices for storing semiconductor elements or masks have quite a lot of structures. Usually, two covers are required to be combined. In order to achieve the function of mechanical transportation, a flange or a flange must be set on the top of one of the covers. The flange seat is used for robot or manipulator to take and move. It needs to be equipped with a handle for manpower to pick and place. In addition, it needs to set up a plate for labeling (Label), and it needs to set up other devices to place on other components.

In this way, on this kind of storage device for storing semiconductor elements or masks, due to the addition of flanges, flange holders, handles, boards and other components, in addition to increasing the storage device for storing semiconductor elements or masks In addition to the weight of itself and the increased man-hours of the assembly, joint parts are used to connect these components. Even if the workmanship is precise, it is difficult to ensure that the parts are not loose. When the parts are loose, the joint components will be in danger of detachment. Falling off or loss of identification function, and more severe, flanges, flange holders or even handles falling off, causing danger during transportation of storage devices used to store semiconductor components or masks, and increasing the possibility of damage to masks or semiconductor components.

In view of this, the storage device provided by the utility model for storing semiconductor elements or masks provided with a filter is improved on the prior art.

Utility model content

Therefore, the main purpose of the present invention is to provide a storage device and a semiconductor device storage device in which the flange and the first cover are integrally formed, which is easy to assemble and can save working time.

Another object of the present utility model is to provide a storage device for storing semiconductor elements or masks in which the flange and the first cover are integrally formed. The joint does not require parts, which reduces the risk of damage to the object due to wear and tear of the parts. .

Another object of the present invention is to provide a storage device for storing semiconductor elements or masks in which the flange and the first cover are integrally formed. The joint does not require parts, which can reduce the working time of assembly.

Another object of the present utility model is to provide a storage device for storing semiconductor elements or masks in which the flange and the first cover are integrally formed. The joint does not require parts, which can reduce the overall storage device or the semiconductor element storage device. weight.

In order to solve the problems of the prior art, the utility model provides a storage device for storing semiconductor elements or masks, which is characterized in that it includes:

A first cover body has a top, and a plurality of sides are arranged around the top;

A second cover, combined with the first cover, forms an inner space capable of accommodating semiconductor elements or masks; and

At least one flange allowing a mechanical holding is provided on the first cover;

Wherein, the flange and the first cover are integrally formed.

Wherein the flange protrudes from the side of the first cover.

Wherein the flange protrudes from the top of the first cover.

Wherein the flange further includes a flange seat connected with the first cover.

Wherein the flange seat is vertically arranged on the top of the first cover.

Wherein the angle between the flange seat and the top of the first cover is larger or smaller than 90 degrees.

Wherein the flange seat is vertically arranged on the side of the first cover.

Wherein the angle between the flange seat and the side of the first cover is greater than or less than 90 degrees.

It also includes a handle disposed on the first cover.

Wherein the handle and the first cover are integrally formed.

It also includes a plate set on the first cover.

Wherein the board and the first cover are integrally formed.

It also includes a mark on the board.

It also includes a warning device arranged on the first cover.

It also includes a sensor disposed on the first cover.

It also includes an identification device arranged on the first cover.

Wherein the identification device is a radio frequency identification device.

The beneficial effects of the utility model are:

The storage device for storing semiconductor elements or masks of the utility model is formed integrally with the flange and the first cover, which is easy to assemble and can save working time.

The storage device for storing semiconductor elements or masks of the utility model does not need parts for bonding, which reduces the risk of object damage caused by parts wear and tear.

The storage device for storing semiconductor elements or masks of the utility model does not need parts for bonding, which can reduce the working time of assembly.

The storage device for storing semiconductor elements or masks of the utility model does not need parts for bonding, which can reduce the weight of the whole storage device or the semiconductor element storage device.

Description of drawings

In order for the examiner to easily understand the other features and advantages of the utility model and the effects achieved by it can be more apparent, the following detailed description is as follows in conjunction with the embodiments and accompanying drawings, in which:

FIG. 1 is a schematic diagram of a storage device for storing semiconductor elements or masks of the present invention.

2A and 2B are schematic diagrams of a storage device for storing semiconductor elements or masks of the present invention.

FIGS. 3A to 3K are schematic diagrams of positions of the flange, the flange seat, and the top of the first cover in the storage device for storing semiconductor elements or masks of the present invention.

FIGS. 4A to 4F are schematic diagrams of the position of the flange, the flange seat, and the side of the first cover in the storage device for storing semiconductor elements or masks of the present invention.

FIG. 5 is a schematic diagram of a handle added to the storage device of the present invention for storing semiconductor components or masks.

6A and 6B are schematic diagrams of additional boards of the storage device for storing semiconductor elements or masks of the present invention.

7A to 7C are schematic diagrams of adding alarms, sensors or identification devices to the storage device for storing semiconductor components or masks of the present invention.

Detailed ways

Since the utility model discloses a storage device with a filter for storing semiconductor elements or masks, the detailed manufacturing or processing process of some masks or semiconductors or storage devices used is based on the prior art To achieve, so in the following description, not a complete description. Moreover, the drawings in the following texts are not completely drawn according to the actual relevant dimensions, and their function is only to express the schematic diagrams related to the features of the present utility model.

Please refer to Fig. 1, which is a schematic diagram of a storage device for storing semiconductor elements or masks of the present utility model. The storage device for storing semiconductor elements or masks of the present utility model includes a first cover 1, a second cover The body 2 and the flange 3 are arranged. The first cover 1 has a top 11, and a plurality of sides 12 are arranged around the top 11; and the second cover 2 is used to be combined with the first cover 1 to form an inner space that can accommodate a cover. film or semiconductor element; flange 3 is located on the first cover body 1, can be one or more than one, when wanting to move the storage device for storing semiconductor element or mask of the present utility model, can directly put robot Or the manipulator is placed under the flange 3, and the flange 3 is lifted to lift the storage device for storing semiconductor elements or masks of the present utility model, so as to transport, move or place the storage device for storing semiconductor components of the present utility model. The work of the storage device for components or masks; and the utility model is characterized in that the flange 3 and the first cover 1 are integrally formed. Wherein, the flange 3 can protrude from the side 12 of the first cover 1 , as shown in FIG. 2A ; or protrude from the top 11 of the first cover 1 , as shown in FIG. 2B .

Then please refer to FIG. 3 again. In the storage device for storing semiconductor elements or masks of the present invention, the flange 3 can be further provided with a flange holder 31, which is connected with the first cover 1 to support the flange. 3. When the robot or manipulator holds the storage device for storing semiconductor elements or masks of the present utility model, it has better supporting force. There are many ways to set up the flange holder 31, as shown in Fig. 3A to Fig. 3K , the flange seat 31 can be vertically arranged on the top 11 of the first cover 1; or the angle between the flange seat 31 and the top 11 of the first cover is set to be not equal to 90 degrees, depending on the use Change the design as needed.

Also, please refer to FIG. 4 , which is another embodiment of the flange holder 31 in the storage device for storing semiconductor elements or masks of the present invention. The flange holder 31 must be arranged on the side of the first cover. The angle between the side 12, the flange seat 31 and the side 12 of the first cover can be 90 degrees or not equal to 90 degrees, and its implementation is shown in Figure 4A to Figure 4F, depending on the needs of use. be changed.

Next, please refer to Fig. 5, the storage device for storing semiconductor elements or masks of the present utility model must be provided with a handle 41 on the first cover 1 for manpower to extract and move the storage device for storing semiconductor elements of the present utility model Or the storage device for the mask, the setting of the handle 41 has to be erected separately or the handle 41 and the first cover 1 are set to be integrally formed.

Also, as shown in Figure 6, the storage device for storing semiconductor elements or masks of the present utility model must be provided with a plate 42 on the first cover 1, and the plate 42 can be additionally installed or combined with the first cover 1. The cover body is integrally formed, and the plate 42 can be used to set the mark 43 on it, so as to identify the information of the storage device itself or its contents for storing semiconductor elements or masks of the present invention.

As shown in Figures 7A to 7C, the storage device for storing semiconductor elements or masks of the present utility model must be provided with a warning device 44 when the storage device for storing semiconductor elements or masks of the present utility model is preset. When there is a certain threat, this warning device 44 will produce the effect of warning. Alternatively, a sensor 45 can be added, and the sensor 45 can directly sense relevant information. Alternatively, an identification device 46 can be added to achieve the identification function. The identification device 46 can be a radio frequency identification device (RFID).

The above description is only a preferred embodiment of the present utility model, and is not intended to limit the application for patent rights of the present utility model; simultaneously, the above description should be clear and implementable for those who are familiar with the technical field, so others do not depart from it. Equivalent changes or modifications accomplished under the spirit disclosed in the present invention shall be included in the scope of the claims of the present invention.

Claims (17)

1, a kind ofly in order to deposit semiconductor element or mask, it is characterized in that, include in order to deposit the storing unit of semiconductor element or mask:

One first lid has a top, and most sides be located at this top around;

One second lid, with this first lid combination, but the inner space of formation one holding semiconductor element or mask; And

At least onely allow that a machinery holds the bead of putting, be located at this first lid;

Wherein, this bead and this first lid are one-body molded.

2, as claimed in claim 1ly it is characterized in that in order to deposit the storing unit of semiconductor element or mask wherein this bead protrudes in the side of this first lid.

3, as claimed in claim 1ly it is characterized in that in order to deposit the storing unit of semiconductor element or mask wherein this bead protrudes in the top of this first lid.

4, as claimed in claim 1ly it is characterized in that in order to deposit the storing unit of semiconductor element or mask wherein this bead includes a bead bearing in addition, be connected with this first lid.

5, as claimed in claim 4ly it is characterized in that in order to deposit the storing unit of semiconductor element or mask wherein this bead bearing is vertically installed in the top of this first lid.

6, as claimed in claim 4ly it is characterized in that in order to deposit the storing unit of semiconductor element or mask wherein the angle at the top of this bead bearing and this first lid is greater than or less than 90 degree.

7, as claimed in claim 4ly it is characterized in that in order to deposit the storing unit of semiconductor element or mask wherein this bead bearing is vertically installed in the side of this first lid.

8, as claimed in claim 4ly it is characterized in that in order to deposit the storing unit of semiconductor element or mask wherein the angle of the side of this bead bearing and this first lid is greater than or less than 90 degree.

9, as claimed in claim 1ly it is characterized in that, wherein include the leader in addition and be located on this first lid in order to deposit the storing unit of semiconductor element or mask.

10, as claimed in claim 9ly it is characterized in that in order to deposit the storing unit of semiconductor element or mask wherein this handle and this first lid are formed in one.

11, as claimed in claim 1ly it is characterized in that, wherein include a plate in addition and be located on this first lid in order to deposit the storing unit of semiconductor element or mask.

12, as claimed in claim 11ly it is characterized in that in order to deposit the storing unit of semiconductor element or mask wherein this plate and this first lid are formed in one.

13, as claimed in claim 11ly it is characterized in that, wherein include a mark in addition and be located on this plate in order to deposit the storing unit of semiconductor element or mask.

14, as claimed in claim 1ly it is characterized in that, wherein include an attention device in addition and be located on this first lid in order to deposit the storing unit of semiconductor element or mask.

15, as claimed in claim 1ly it is characterized in that, wherein include an inductor in addition and be located on this first lid in order to deposit the storing unit of semiconductor element or mask.

16, as claimed in claim 1ly it is characterized in that, wherein include a device for identifying in addition and be located on this first lid in order to deposit the storing unit of semiconductor element or mask.

17, as claimed in claim 16ly it is characterized in that in order to deposit the storing unit of semiconductor element or mask wherein this device for identifying is a RFID devices.

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