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TW200622526A - System and method for real-time quality detection - Google Patents

System and method for real-time quality detection

Info

Publication number
TW200622526A
TW200622526A TW093141358A TW93141358A TW200622526A TW 200622526 A TW200622526 A TW 200622526A TW 093141358 A TW093141358 A TW 093141358A TW 93141358 A TW93141358 A TW 93141358A TW 200622526 A TW200622526 A TW 200622526A
Authority
TW
Taiwan
Prior art keywords
real
offset
time
quality detection
weighted value
Prior art date
Application number
TW093141358A
Other languages
Chinese (zh)
Other versions
TWI273361B (en
Inventor
Ming-Wei Lee
Fu-Kuan Hsiao
Original Assignee
Ind Tech Res Inst
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ind Tech Res Inst filed Critical Ind Tech Res Inst
Priority to TW93141358A priority Critical patent/TWI273361B/en
Publication of TW200622526A publication Critical patent/TW200622526A/en
Application granted granted Critical
Publication of TWI273361B publication Critical patent/TWI273361B/en

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  • Testing And Monitoring For Control Systems (AREA)
  • Feedback Control In General (AREA)

Abstract

A process control system capable of real-time-quality-state detection. The system comprises a model analysis unit, a detection unit, and a control unit. The model analysis unit defines model parameters according to historical data of a process. The detection unit determines whether larger offset occurs according to real-time process data and the model parameters. If so, the control unit obtains and compares an offset value with an offset threshold, obtaining a corresponding weighted value according to comparison results, and implements corresponding operations according to the weighted value.
TW93141358A 2004-12-30 2004-12-30 System and method for real-time quality detection TWI273361B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW93141358A TWI273361B (en) 2004-12-30 2004-12-30 System and method for real-time quality detection

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW93141358A TWI273361B (en) 2004-12-30 2004-12-30 System and method for real-time quality detection

Publications (2)

Publication Number Publication Date
TW200622526A true TW200622526A (en) 2006-07-01
TWI273361B TWI273361B (en) 2007-02-11

Family

ID=38621487

Family Applications (1)

Application Number Title Priority Date Filing Date
TW93141358A TWI273361B (en) 2004-12-30 2004-12-30 System and method for real-time quality detection

Country Status (1)

Country Link
TW (1) TWI273361B (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI625615B (en) * 2016-11-29 2018-06-01 財團法人工業技術研究院 Prediction model building method and associated predicting method and computer software product

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8224475B2 (en) * 2009-03-13 2012-07-17 Taiwan Semiconductor Manufacturing Company, Ltd. Method and apparatus for advanced process control
TWI801921B (en) * 2021-07-05 2023-05-11 力晶積成電子製造股份有限公司 Yield correlation-driven in-line tool matching management method

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI625615B (en) * 2016-11-29 2018-06-01 財團法人工業技術研究院 Prediction model building method and associated predicting method and computer software product
US10579026B2 (en) 2016-11-29 2020-03-03 Industrial Technology Research Institute Building a workpiece quality prediction model

Also Published As

Publication number Publication date
TWI273361B (en) 2007-02-11

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MM4A Annulment or lapse of patent due to non-payment of fees