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TW200603376A - ESD-protection structures for semiconductor components - Google Patents

ESD-protection structures for semiconductor components

Info

Publication number
TW200603376A
TW200603376A TW094116191A TW94116191A TW200603376A TW 200603376 A TW200603376 A TW 200603376A TW 094116191 A TW094116191 A TW 094116191A TW 94116191 A TW94116191 A TW 94116191A TW 200603376 A TW200603376 A TW 200603376A
Authority
TW
Taiwan
Prior art keywords
zone
semiconductor
esd
charge carrier
carrier type
Prior art date
Application number
TW094116191A
Other languages
English (en)
Other versions
TWI303871B (zh
Inventor
Michael Runde
Gernot Langguth
Klaus Roeschlau
Karlheinz Mueller
Original Assignee
Infineon Technologies Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Infineon Technologies Ag filed Critical Infineon Technologies Ag
Publication of TW200603376A publication Critical patent/TW200603376A/zh
Application granted granted Critical
Publication of TWI303871B publication Critical patent/TWI303871B/zh

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D89/00—Aspects of integrated devices not covered by groups H10D84/00 - H10D88/00
    • H10D89/60—Integrated devices comprising arrangements for electrical or thermal protection, e.g. protection circuits against electrostatic discharge [ESD]
    • H10D89/601—Integrated devices comprising arrangements for electrical or thermal protection, e.g. protection circuits against electrostatic discharge [ESD] for devices having insulated gate electrodes, e.g. for IGFETs or IGBTs
    • H10D89/611—Integrated devices comprising arrangements for electrical or thermal protection, e.g. protection circuits against electrostatic discharge [ESD] for devices having insulated gate electrodes, e.g. for IGFETs or IGBTs using diodes as protective elements
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D8/00—Diodes

Landscapes

  • Semiconductor Integrated Circuits (AREA)
  • Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
TW094116191A 2004-05-25 2005-05-18 ESD-protection structures for semiconductor components TW200603376A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102004026100A DE102004026100B4 (de) 2004-05-25 2004-05-25 ESD-Schutzstrukturen für Halbleiterbauelemente

Publications (2)

Publication Number Publication Date
TW200603376A true TW200603376A (en) 2006-01-16
TWI303871B TWI303871B (zh) 2008-12-01

Family

ID=35124380

Family Applications (1)

Application Number Title Priority Date Filing Date
TW094116191A TW200603376A (en) 2004-05-25 2005-05-18 ESD-protection structures for semiconductor components

Country Status (6)

Country Link
US (1) US7943928B2 (zh)
JP (1) JP4854663B2 (zh)
CN (1) CN1998090B (zh)
DE (1) DE102004026100B4 (zh)
TW (1) TW200603376A (zh)
WO (1) WO2005117133A2 (zh)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2008099317A1 (en) * 2007-02-12 2008-08-21 Nxp B.V. Esd-protection device, a semiconductor device and an integrated system in a package comprising such a device
US7700977B2 (en) * 2007-06-21 2010-04-20 Intersil Americas Inc. Integrated circuit with a subsurface diode
US7585705B2 (en) * 2007-11-29 2009-09-08 Alpha & Omega Semiconductor, Inc. Method for preventing gate oxide damage of a trench MOSFET during wafer processing while adding an ESD protection module atop
US8080851B2 (en) 2008-08-29 2011-12-20 International Business Machines Corporation Deep trench electrostatic discharge (ESD) protect diode for silicon-on-insulator (SOI) devices
CN116259623A (zh) * 2021-12-09 2023-06-13 世界先进积体电路股份有限公司 静电放电防护结构

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01191472A (ja) * 1988-01-26 1989-08-01 Fujitsu Ltd 静電破壊防止用素子
JPH06204407A (ja) * 1992-12-28 1994-07-22 Nippon Steel Corp ダイオード素子
JPH0758286A (ja) * 1993-08-10 1995-03-03 Nissan Motor Co Ltd 半導体装置の保護回路
US5477078A (en) * 1994-02-18 1995-12-19 Analog Devices, Incorporated Integrated circuit (IC) with a two-terminal diode device to protect metal-oxide-metal capacitors from ESD damage
JP3287269B2 (ja) * 1997-06-02 2002-06-04 富士電機株式会社 ダイオードとその製造方法
DE19740195C2 (de) * 1997-09-12 1999-12-02 Siemens Ag Halbleiterbauelement mit Metall-Halbleiterübergang mit niedrigem Sperrstrom
EP0905781A3 (de) * 1997-09-30 2000-11-02 Siemens Aktiengesellschaft ESD-Schutzdiode
US6448865B1 (en) * 1999-02-25 2002-09-10 Formfactor, Inc. Integrated circuit interconnect system
JP4016595B2 (ja) * 2000-12-12 2007-12-05 サンケン電気株式会社 半導体装置及びその製造方法
US6657256B2 (en) * 2001-05-22 2003-12-02 General Semiconductor, Inc. Trench DMOS transistor having a zener diode for protection from electro-static discharge
US6710418B1 (en) * 2002-10-11 2004-03-23 Fairchild Semiconductor Corporation Schottky rectifier with insulation-filled trenches and method of forming the same
US6989572B2 (en) * 2003-07-09 2006-01-24 Semiconductor Components Industries, L.L.C. Symmetrical high frequency SCR structure
TWI361490B (en) * 2003-09-05 2012-04-01 Renesas Electronics Corp A semiconductor device and a method of manufacturing the same
US7098509B2 (en) * 2004-01-02 2006-08-29 Semiconductor Components Industries, L.L.C. High energy ESD structure and method

Also Published As

Publication number Publication date
WO2005117133A3 (de) 2006-04-20
JP4854663B2 (ja) 2012-01-18
TWI303871B (zh) 2008-12-01
US20080035924A1 (en) 2008-02-14
DE102004026100A1 (de) 2006-01-26
US7943928B2 (en) 2011-05-17
DE102004026100B4 (de) 2007-10-25
JP2007538390A (ja) 2007-12-27
CN1998090A (zh) 2007-07-11
CN1998090B (zh) 2010-09-08
WO2005117133A2 (de) 2005-12-08

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees