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TW200607721A - Thin plate supporting container - Google Patents

Thin plate supporting container

Info

Publication number
TW200607721A
TW200607721A TW094122528A TW94122528A TW200607721A TW 200607721 A TW200607721 A TW 200607721A TW 094122528 A TW094122528 A TW 094122528A TW 94122528 A TW94122528 A TW 94122528A TW 200607721 A TW200607721 A TW 200607721A
Authority
TW
Taiwan
Prior art keywords
main body
container main
protection film
lid unit
thin plate
Prior art date
Application number
TW094122528A
Other languages
English (en)
Inventor
Tadahiro Obayashi
Original Assignee
Miraial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Miraial Co Ltd filed Critical Miraial Co Ltd
Publication of TW200607721A publication Critical patent/TW200607721A/zh

Links

Classifications

    • H10P72/50
    • H10P72/1916

Landscapes

  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Packaging Frangible Articles (AREA)
  • Closures For Containers (AREA)
TW094122528A 2004-08-26 2005-07-04 Thin plate supporting container TW200607721A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004247161A JP2006062704A (ja) 2004-08-26 2004-08-26 薄板支持容器

Publications (1)

Publication Number Publication Date
TW200607721A true TW200607721A (en) 2006-03-01

Family

ID=35519786

Family Applications (1)

Application Number Title Priority Date Filing Date
TW094122528A TW200607721A (en) 2004-08-26 2005-07-04 Thin plate supporting container

Country Status (6)

Country Link
US (1) US20060042997A1 (zh)
EP (1) EP1638134A3 (zh)
JP (1) JP2006062704A (zh)
KR (1) KR20060048939A (zh)
CN (1) CN1740062A (zh)
TW (1) TW200607721A (zh)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI291437B (en) * 2005-10-28 2007-12-21 Innolux Display Corp Packing box for a glass substrate and a package structure of a glass substrate using the same
US20080006559A1 (en) * 2006-07-07 2008-01-10 Entegris, Inc. Substrate carrier and handle
JP4812660B2 (ja) * 2007-03-09 2011-11-09 信越ポリマー株式会社 基板等の取扱装置及び基板等の取扱方法

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2702464C2 (de) * 1977-01-21 1981-10-15 Wacker-Chemitronic Gesellschaft für Elektronik-Grundstoffe mbH, 8263 Burghausen Verpackung von Halbleiterscheiben
US4793488A (en) * 1987-07-07 1988-12-27 Empak, Inc. Package for semiconductor wafers
EP0343762A3 (en) * 1988-05-24 1991-05-08 Empak Inc. Substrate package
JPH06293364A (ja) * 1993-04-01 1994-10-21 Dainippon Printing Co Ltd 無塵容器
US5709065A (en) * 1996-07-31 1998-01-20 Empak, Inc. Desiccant substrate package
JP3476052B2 (ja) * 1997-09-01 2003-12-10 信越ポリマー株式会社 輸送容器
AU3695599A (en) * 1998-05-06 1999-11-23 Alcan International Limited Aluminum container system for magnetic disks
US5992638A (en) * 1998-11-11 1999-11-30 Empak, Inc. Advanced wafer shipper
WO2001008210A1 (en) * 1999-07-28 2001-02-01 Shin-Etsu Handotai Co., Ltd. Wafer storing method and storing container therefor and wafer transferring method for transferring wafer to the storing container
CN1298595C (zh) * 2001-11-14 2007-02-07 诚实公司 晶片封闭件密封结构、密封部件以及晶片密封件
JP4223715B2 (ja) * 2001-12-04 2009-02-12 ミライアル株式会社 薄板用収納・保管容器

Also Published As

Publication number Publication date
EP1638134A3 (en) 2007-11-14
EP1638134A2 (en) 2006-03-22
JP2006062704A (ja) 2006-03-09
US20060042997A1 (en) 2006-03-02
KR20060048939A (ko) 2006-05-18
CN1740062A (zh) 2006-03-01

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