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RU2016121873A - Препятствующий оксидированию барьерный слой - Google Patents

Препятствующий оксидированию барьерный слой Download PDF

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Publication number
RU2016121873A
RU2016121873A RU2016121873A RU2016121873A RU2016121873A RU 2016121873 A RU2016121873 A RU 2016121873A RU 2016121873 A RU2016121873 A RU 2016121873A RU 2016121873 A RU2016121873 A RU 2016121873A RU 2016121873 A RU2016121873 A RU 2016121873A
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RU
Russia
Prior art keywords
barrier layer
oxidation
pvd
oxidation barrier
workpiece
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RU2016121873A
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English (en)
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RU2016121873A3 (ru
RU2701801C2 (ru
Inventor
Юрген РАММ
Флориан ЗАЙБЕРТ
Бено ВИДРИГ
Дорис ФОПП-ШПОРИ
Original Assignee
Эрликон Серфиз Солюшнз Аг, Пфеффикон
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Application filed by Эрликон Серфиз Солюшнз Аг, Пфеффикон filed Critical Эрликон Серфиз Солюшнз Аг, Пфеффикон
Publication of RU2016121873A publication Critical patent/RU2016121873A/ru
Publication of RU2016121873A3 publication Critical patent/RU2016121873A3/ru
Application granted granted Critical
Publication of RU2701801C2 publication Critical patent/RU2701801C2/ru

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    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24Vacuum evaporation
    • C23C14/32Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
    • C23C14/325Electric arc evaporation
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B15/00Layered products comprising a layer of metal
    • B32B15/04Layered products comprising a layer of metal comprising metal as the main or only constituent of a layer, which is next to another layer of the same or of a different material
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/08Oxides
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/08Oxides
    • C23C14/081Oxides of aluminium, magnesium or beryllium
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/08Oxides
    • C23C14/083Oxides of refractory metals or yttrium
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24Vacuum evaporation
    • C23C14/32Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/58After-treatment
    • C23C14/5826Treatment with charged particles
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/58After-treatment
    • C23C14/5846Reactive treatment
    • C23C14/5853Oxidation

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Other Surface Treatments For Metallic Materials (AREA)
  • Laminated Bodies (AREA)
  • Physical Vapour Deposition (AREA)

Claims (6)

1. Способ изготовления препятствующего оксидированию барьерного слоя на подложке детали, причем препятствующий оксидированию барьерный слой изготавливают физическим осаждением из газовой фазы (PVD), и оксид является таким, который родственен по материалу непокрытой поверхности заготовки.
2. Способ по п.1, отличающийся тем, что способ PVD представляет собой способ катодно-дугового испарения.
3. Способ изготовления препятствующего оксидированию барьерного слоя на подложке обрабатываемой детали, причем препятствующий оксидированию барьерный слой изготавливают физическим осаждением из газовой фазы (PVD), и препятствующий оксидированию барьерный слой включает Al-Cr-О-слой.
4. Способ по п.3, отличающийся тем, что способ PVD представляет собой способ катодно-дугового испарения, и препятствующий оксидированию барьерный слой включает брызги.
5. Способ по одному из предшествующих пунктов, отличающийся тем, что синтезированные оксидные слои подвергают дополнительному окислению в плазме или доокислению обычным путем.
6. Подложка детали с изготовленным по методу PVD препятствующим оксидированию барьерным слоем, отличающаяся тем, что препятствующий оксидированию барьерный слой представляет собой оксид, который является родственным по материалу непокрытой поверхности заготовки.
RU2016121873A 2013-11-03 2014-10-31 Препятствующий оксидированию барьерный слой RU2701801C2 (ru)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
EP13005182 2013-11-03
EP13005182.4 2013-11-03
PCT/EP2014/002924 WO2015062733A1 (de) 2013-11-03 2014-10-31 Oxidationsbarriereschicht

Publications (3)

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RU2016121873A true RU2016121873A (ru) 2017-12-07
RU2016121873A3 RU2016121873A3 (ru) 2018-06-27
RU2701801C2 RU2701801C2 (ru) 2019-10-01

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US (1) US10487391B2 (ru)
EP (1) EP3063309B1 (ru)
JP (1) JP2016537515A (ru)
KR (1) KR102252440B1 (ru)
CN (1) CN105917020B (ru)
CA (1) CA2929460C (ru)
ES (1) ES2932411T3 (ru)
MX (1) MX380712B (ru)
RU (1) RU2701801C2 (ru)
WO (1) WO2015062733A1 (ru)

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Also Published As

Publication number Publication date
CN105917020A (zh) 2016-08-31
US20160273093A1 (en) 2016-09-22
RU2016121873A3 (ru) 2018-06-27
ES2932411T3 (es) 2023-01-18
RU2701801C2 (ru) 2019-10-01
KR102252440B1 (ko) 2021-05-17
MX2016005564A (es) 2016-12-09
CA2929460A1 (en) 2015-05-07
CA2929460C (en) 2023-03-28
US10487391B2 (en) 2019-11-26
WO2015062733A1 (de) 2015-05-07
EP3063309A1 (de) 2016-09-07
JP2016537515A (ja) 2016-12-01
EP3063309B1 (de) 2022-10-12
KR20160083887A (ko) 2016-07-12
CN105917020B (zh) 2019-09-20
MX380712B (es) 2025-03-12

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