RU2016121873A - Препятствующий оксидированию барьерный слой - Google Patents
Препятствующий оксидированию барьерный слой Download PDFInfo
- Publication number
- RU2016121873A RU2016121873A RU2016121873A RU2016121873A RU2016121873A RU 2016121873 A RU2016121873 A RU 2016121873A RU 2016121873 A RU2016121873 A RU 2016121873A RU 2016121873 A RU2016121873 A RU 2016121873A RU 2016121873 A RU2016121873 A RU 2016121873A
- Authority
- RU
- Russia
- Prior art keywords
- barrier layer
- oxidation
- pvd
- oxidation barrier
- workpiece
- Prior art date
Links
- 230000004888 barrier function Effects 0.000 title claims 9
- 230000003647 oxidation Effects 0.000 title claims 4
- 238000007254 oxidation reaction Methods 0.000 title claims 4
- 231100001261 hazardous Toxicity 0.000 title 1
- 238000005240 physical vapour deposition Methods 0.000 claims 7
- 238000000034 method Methods 0.000 claims 6
- 230000003064 anti-oxidating effect Effects 0.000 claims 5
- 239000000758 substrate Substances 0.000 claims 3
- 238000001704 evaporation Methods 0.000 claims 2
- 238000004519 manufacturing process Methods 0.000 claims 2
- 239000000463 material Substances 0.000 claims 1
- 238000010405 reoxidation reaction Methods 0.000 claims 1
- 239000007921 spray Substances 0.000 claims 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
- C23C14/325—Electric arc evaporation
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B15/00—Layered products comprising a layer of metal
- B32B15/04—Layered products comprising a layer of metal comprising metal as the main or only constituent of a layer, which is next to another layer of the same or of a different material
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/08—Oxides
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/08—Oxides
- C23C14/081—Oxides of aluminium, magnesium or beryllium
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/08—Oxides
- C23C14/083—Oxides of refractory metals or yttrium
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/58—After-treatment
- C23C14/5826—Treatment with charged particles
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/58—After-treatment
- C23C14/5846—Reactive treatment
- C23C14/5853—Oxidation
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Other Surface Treatments For Metallic Materials (AREA)
- Laminated Bodies (AREA)
- Physical Vapour Deposition (AREA)
Claims (6)
1. Способ изготовления препятствующего оксидированию барьерного слоя на подложке детали, причем препятствующий оксидированию барьерный слой изготавливают физическим осаждением из газовой фазы (PVD), и оксид является таким, который родственен по материалу непокрытой поверхности заготовки.
2. Способ по п.1, отличающийся тем, что способ PVD представляет собой способ катодно-дугового испарения.
3. Способ изготовления препятствующего оксидированию барьерного слоя на подложке обрабатываемой детали, причем препятствующий оксидированию барьерный слой изготавливают физическим осаждением из газовой фазы (PVD), и препятствующий оксидированию барьерный слой включает Al-Cr-О-слой.
4. Способ по п.3, отличающийся тем, что способ PVD представляет собой способ катодно-дугового испарения, и препятствующий оксидированию барьерный слой включает брызги.
5. Способ по одному из предшествующих пунктов, отличающийся тем, что синтезированные оксидные слои подвергают дополнительному окислению в плазме или доокислению обычным путем.
6. Подложка детали с изготовленным по методу PVD препятствующим оксидированию барьерным слоем, отличающаяся тем, что препятствующий оксидированию барьерный слой представляет собой оксид, который является родственным по материалу непокрытой поверхности заготовки.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| EP13005182 | 2013-11-03 | ||
| EP13005182.4 | 2013-11-03 | ||
| PCT/EP2014/002924 WO2015062733A1 (de) | 2013-11-03 | 2014-10-31 | Oxidationsbarriereschicht |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| RU2016121873A true RU2016121873A (ru) | 2017-12-07 |
| RU2016121873A3 RU2016121873A3 (ru) | 2018-06-27 |
| RU2701801C2 RU2701801C2 (ru) | 2019-10-01 |
Family
ID=49578064
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| RU2016121873A RU2701801C2 (ru) | 2013-11-03 | 2014-10-31 | Препятствующий оксидированию барьерный слой |
Country Status (10)
| Country | Link |
|---|---|
| US (1) | US10487391B2 (ru) |
| EP (1) | EP3063309B1 (ru) |
| JP (1) | JP2016537515A (ru) |
| KR (1) | KR102252440B1 (ru) |
| CN (1) | CN105917020B (ru) |
| CA (1) | CA2929460C (ru) |
| ES (1) | ES2932411T3 (ru) |
| MX (1) | MX380712B (ru) |
| RU (1) | RU2701801C2 (ru) |
| WO (1) | WO2015062733A1 (ru) |
Families Citing this family (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR3052463B1 (fr) * | 2016-06-10 | 2020-05-08 | Safran | Procede de fabrication d'une piece en superalliage a base de nickel contenant de l'hafnium |
| WO2018193036A1 (en) * | 2017-04-21 | 2018-10-25 | Oerlikon Surface Solutions Ag, Pfäffikon | Superalloy sputtering target |
| US20200263290A1 (en) | 2017-09-15 | 2020-08-20 | Oerlikon Surface Solutions Ag, Pfäffikon | Al-Cr-O-BASED COATINGS WITH HIGHER THERMAL STABILITY AND PRODUCING METHOD THEREOF |
| KR102680966B1 (ko) * | 2017-12-22 | 2024-07-05 | 오를리콘 서피스 솔루션스 아크티엔게젤샤프트, 페피콘 | 가스 터빈의 터빈 블레이드용 내부식 및 내침식 코팅 |
| CA3095917A1 (en) * | 2018-04-05 | 2019-10-10 | Dmc Global Inc. | Multilayer transition joint for aluminum smelter and method of making |
| JP7608346B2 (ja) * | 2019-02-08 | 2025-01-06 | エリコン サーフェス ソリューションズ アーゲー、 プフェフィコン | ホウ化物を含む拡散バリア層を含むコーティングを施したコーティングされたツール |
| CN111500987B (zh) * | 2019-12-17 | 2022-06-10 | 西南技术物理研究所 | 一种基于金属铪沉积二氧化铪薄膜的方法 |
| EP3933066A1 (de) * | 2020-06-30 | 2022-01-05 | Oerlikon Surface Solutions AG, Pfäffikon | Schutzschicht gegen umwelteinflüsse (umweltbarriereschicht) für ti-al material |
| EP4176097A1 (de) * | 2020-07-01 | 2023-05-10 | Oerlikon Surface Solutions AG, Pfäffikon | SCHUTZSCHICHT GEGEN UMWELTEINFLÜSSE (UMWELTBARRIERESCHICHT) FÜR Ti-Al MATERIAL |
| CN117265479A (zh) * | 2023-08-28 | 2023-12-22 | 天津职业技术师范大学(中国职业培训指导教师进修中心) | 一种AlCrO扩散阻挡层及其在MCrAlYSi防护涂层中的应用 |
Family Cites Families (20)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6376861A (ja) * | 1986-09-19 | 1988-04-07 | Nippon Steel Corp | 燃焼器具用ステンレス鋼およびその製造法 |
| US5741596A (en) | 1989-02-21 | 1998-04-21 | Boeing North American, Inc. | Coating for oxidation protection of metal surfaces |
| FR2671798B1 (fr) | 1991-01-21 | 1994-03-25 | Propulsion Ste Europeenne | Procede pour la protection anti-oxydation d'un materiau qui, au moins en surface, est constitue d'une ceramique formee par un compose du silicium, et materiau tel qu'obtenu par le procede. |
| US5310607A (en) * | 1991-05-16 | 1994-05-10 | Balzers Aktiengesellschaft | Hard coating; a workpiece coated by such hard coating and a method of coating such workpiece by such hard coating |
| AT1669U1 (de) | 1996-11-22 | 1997-09-25 | Plansee Ag | Oxidationsschutzschicht für refraktärmetalle |
| WO1998026110A1 (de) * | 1996-12-10 | 1998-06-18 | Siemens Aktiengesellschaft | Erzeugnis, welches einem heissen gas aussetzbar ist, mit einer wärmedämmschicht sowie verfahren zur herstellung |
| RU2154124C2 (ru) * | 1997-01-06 | 2000-08-10 | Парфенов Михаил Дмитриевич | Способ нанесения цветного защитно-декоративного покрытия с рисунком |
| RU2120494C1 (ru) * | 1997-06-17 | 1998-10-20 | Международный Центр Электронно-Лучевых Технологий Института Электросварки им.Е.О.Патона НАН Украины | Способ получения на подложке защитных покрытий с градиентом химического состава и структуры по толщине с внешним керамическим слоем, его вариант |
| FR2814473B1 (fr) * | 2000-09-25 | 2003-06-27 | Snecma Moteurs | Procede de realisation d'un revetement de protection formant barriere thermique avec sous-couche de liaison sur un substrat en superalliage et piece obtenue |
| US7323247B2 (en) | 2003-11-21 | 2008-01-29 | Honeywell International, Inc. | Oxidation barrier coatings for silicon based ceramics |
| JP2007196364A (ja) * | 2005-12-28 | 2007-08-09 | Sumitomo Electric Ind Ltd | 表面被覆切削工具およびその製造方法 |
| CA2665044C (en) * | 2006-10-10 | 2016-08-23 | Oerlikon Trading Ag, Truebbach | Layer system with at least one mixed crystal layer of a polyoxide |
| US7939181B2 (en) * | 2006-10-11 | 2011-05-10 | Oerlikon Trading Ag, Trubbach | Layer system with at least one mixed crystal layer of a multi-oxide |
| US9605338B2 (en) * | 2006-10-11 | 2017-03-28 | Oerlikon Surface Solutions Ag, Pfaffikon | Method for depositing electrically insulating layers |
| US8652589B2 (en) * | 2008-01-25 | 2014-02-18 | Oerlikon Trading Ag, Truebbach | Permeation barrier layer |
| JP5445847B2 (ja) * | 2010-01-28 | 2014-03-19 | 三菱マテリアル株式会社 | 高速重切削加工で硬質被覆層がすぐれた耐チッピング性、耐摩耗性を発揮する表面被覆切削工具 |
| EP2369031B1 (de) | 2010-03-18 | 2016-05-04 | Oerlikon Trading AG, Trübbach | Beschichtung auf nial2o4 basis in spinellstruktur |
| DE102010028558A1 (de) * | 2010-05-04 | 2011-11-10 | Walter Ag | PVD-Hybridverfahren zum Abscheiden von Mischkristallschichten |
| WO2013159870A1 (en) * | 2012-04-22 | 2013-10-31 | Oerlikon Trading Ag, Trübbach | Arc-deposited al-cr-o coatings having enhanced coating properties |
| EP2954091B1 (en) * | 2013-01-18 | 2022-08-10 | Oerlikon Surface Solutions AG, Pfäffikon | Coating method for producing (al,cr)2o3-based coatings with enhanced properties |
-
2014
- 2014-10-31 WO PCT/EP2014/002924 patent/WO2015062733A1/de not_active Ceased
- 2014-10-31 RU RU2016121873A patent/RU2701801C2/ru active
- 2014-10-31 CA CA2929460A patent/CA2929460C/en active Active
- 2014-10-31 US US15/034,069 patent/US10487391B2/en active Active
- 2014-10-31 KR KR1020167014263A patent/KR102252440B1/ko active Active
- 2014-10-31 ES ES14795954T patent/ES2932411T3/es active Active
- 2014-10-31 EP EP14795954.8A patent/EP3063309B1/de active Active
- 2014-10-31 CN CN201480072105.6A patent/CN105917020B/zh active Active
- 2014-10-31 JP JP2016550952A patent/JP2016537515A/ja active Pending
- 2014-10-31 MX MX2016005564A patent/MX380712B/es unknown
Also Published As
| Publication number | Publication date |
|---|---|
| CN105917020A (zh) | 2016-08-31 |
| US20160273093A1 (en) | 2016-09-22 |
| RU2016121873A3 (ru) | 2018-06-27 |
| ES2932411T3 (es) | 2023-01-18 |
| RU2701801C2 (ru) | 2019-10-01 |
| KR102252440B1 (ko) | 2021-05-17 |
| MX2016005564A (es) | 2016-12-09 |
| CA2929460A1 (en) | 2015-05-07 |
| CA2929460C (en) | 2023-03-28 |
| US10487391B2 (en) | 2019-11-26 |
| WO2015062733A1 (de) | 2015-05-07 |
| EP3063309A1 (de) | 2016-09-07 |
| JP2016537515A (ja) | 2016-12-01 |
| EP3063309B1 (de) | 2022-10-12 |
| KR20160083887A (ko) | 2016-07-12 |
| CN105917020B (zh) | 2019-09-20 |
| MX380712B (es) | 2025-03-12 |
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