RU2008140134A - Интерферометрическая оптическая система отображения с широкодиапазонными характеристиками - Google Patents
Интерферометрическая оптическая система отображения с широкодиапазонными характеристиками Download PDFInfo
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- RU2008140134A RU2008140134A RU2008140134/28A RU2008140134A RU2008140134A RU 2008140134 A RU2008140134 A RU 2008140134A RU 2008140134/28 A RU2008140134/28 A RU 2008140134/28A RU 2008140134 A RU2008140134 A RU 2008140134A RU 2008140134 A RU2008140134 A RU 2008140134A
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- 230000003287 optical effect Effects 0.000 title claims abstract 21
- 239000000126 substance Substances 0.000 claims abstract 26
- 238000000034 method Methods 0.000 claims abstract 22
- 239000000758 substrate Substances 0.000 claims abstract 14
- 230000002745 absorbent Effects 0.000 claims abstract 11
- 239000002250 absorbent Substances 0.000 claims abstract 11
- 238000010521 absorption reaction Methods 0.000 claims abstract 10
- 239000011159 matrix material Substances 0.000 claims abstract 8
- 239000000463 material Substances 0.000 claims abstract 4
- 230000015572 biosynthetic process Effects 0.000 claims abstract 2
- 239000004020 conductor Substances 0.000 claims abstract 2
- 238000004519 manufacturing process Methods 0.000 claims abstract 2
- 229910052732 germanium Inorganic materials 0.000 claims 6
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 claims 6
- 239000000956 alloy Substances 0.000 claims 5
- 229910045601 alloy Inorganic materials 0.000 claims 5
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims 4
- 229910052782 aluminium Inorganic materials 0.000 claims 4
- 230000007423 decrease Effects 0.000 claims 3
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/001—Optical devices or arrangements for the control of light using movable or deformable optical elements based on interference in an adjustable optical cavity
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
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Abstract
1. Способ изготовления дисплея на основе микроэлектромеханических систем для использования с широкодиапазонным белым светом, согласно которому ! берут прозрачную подложку и ! формируют на ней матрицу интерферометрических модуляторов, при этом ! по меньшей мере на часть прозрачной подложки осаждают поглощающее вещество, причем коэффициент поглощения (k) указанного поглощающего вещества ниже порогового значения для длин световых волн в рабочем оптическом диапазоне интерферометрического модулятора, и ! формируют на указанном поглощающем веществе отражающий слой. ! 2. Способ по п.1, при котором указанное пороговое значение составляет примерно 2,5. ! 3. Способ по п.1, согласно которому ! между поглощающим веществом и отражающим слоем дополнительно формируют временный слой и ! удаляют по меньшей мере часть временного слоя, посредством чего формируют зазор между поглощающим веществом и отражающим слоем. ! 4. Способ по п.1, согласно которому между подложкой и отражающим слоем дополнительно формируют прозрачный проводящий материал. ! 5. Способ по п.1, согласно которому между подложкой и отражающим слоем дополнительно осаждают диэлектрический слой. ! 6. Способ по п.5, согласно которому указанное поглощающее вещество включают в состав указанного диэлектрического слоя. ! 7. Способ по п.1, согласно которому дополнительно в состав прозрачной подложки включают поглощающее вещество. !8. Способ по п.1, согласно которому дополнительно формируют слой преломляющего материала, прилегающий к поглощающему веществу. ! 9. Способ по п.1, при котором по мере увеличения длины световой волны в рабочем оптическом диапазоне интерферометрическ
Claims (48)
1. Способ изготовления дисплея на основе микроэлектромеханических систем для использования с широкодиапазонным белым светом, согласно которому
берут прозрачную подложку и
формируют на ней матрицу интерферометрических модуляторов, при этом
по меньшей мере на часть прозрачной подложки осаждают поглощающее вещество, причем коэффициент поглощения (k) указанного поглощающего вещества ниже порогового значения для длин световых волн в рабочем оптическом диапазоне интерферометрического модулятора, и
формируют на указанном поглощающем веществе отражающий слой.
2. Способ по п.1, при котором указанное пороговое значение составляет примерно 2,5.
3. Способ по п.1, согласно которому
между поглощающим веществом и отражающим слоем дополнительно формируют временный слой и
удаляют по меньшей мере часть временного слоя, посредством чего формируют зазор между поглощающим веществом и отражающим слоем.
4. Способ по п.1, согласно которому между подложкой и отражающим слоем дополнительно формируют прозрачный проводящий материал.
5. Способ по п.1, согласно которому между подложкой и отражающим слоем дополнительно осаждают диэлектрический слой.
6. Способ по п.5, согласно которому указанное поглощающее вещество включают в состав указанного диэлектрического слоя.
7. Способ по п.1, согласно которому дополнительно в состав прозрачной подложки включают поглощающее вещество.
8. Способ по п.1, согласно которому дополнительно формируют слой преломляющего материала, прилегающий к поглощающему веществу.
9. Способ по п.1, при котором по мере увеличения длины световой волны в рабочем оптическом диапазоне интерферометрического модулятора указанный коэффициент поглощения (k) уменьшается или остается практическим неизменным.
10. Способ по п.1, при котором показатель преломления (n) указанного поглощающего вещества возрастает по мере увеличения длины световой волны в рабочем оптическом диапазоне интерферометрического модулятора.
11. Способ по п.10, при котором отношение показателя преломления (n) указанного вещества к коэффициенту поглощения (k) указанного вещества составляет примерно от 2,5 до 6.
12. Способ по п.1, согласно которому указанное поглощающее вещество содержит германий или германийсодержащий сплав.
13. Способ по п.1, при котором указанный рабочий оптический диапазон составляет примерно от 400 до 700 нм.
14. Дисплей на основе микроэлектромеханических систем, изготовленный способом по любому из пп.1-13.
15. Интерферометрический модуляционный дисплей, содержащий
средства пропускания света и
средства обеспечения интерференции при отражении света, пропущенного через указанные средства пропускания света, причем указанные средства обеспечения интерференции при отражении света содержат поглощающее вещество, расположенное на части средств пропускания света, и отражающий слой, расположенный на поглощающем веществе, при этом коэффициент поглощения (k) поглощающего вещества ниже порогового значения для длин световых волн в рабочем оптическом диапазоне средств обеспечения интерференции при отражении света, а средства обеспечения интерференции при отражении света выполнены с возможностью отражения широкодиапазонного белого света в рабочем оптическом диапазоне.
16. Дисплей по п.15, в котором между поглощающим веществом и отражающим слоем имеется зазор.
17. Дисплей по п.15, отличающийся тем, что отражающий слой выполнен подвижным.
18. Дисплей по п.15, дополнительно содержащий временный слой между поглощающим веществом и отражающим слоем, причем временный слой содержит материал, испаряемый при нагреве, или поликарбонат, деполимеризуемый при нагреве.
19. Дисплей по п.15, отличающийся тем, что указанное пороговое значение составляет примерно 2,5.
20. Дисплей по п.15, отличающийся тем, что для отображения белого цвета средства обеспечения интерференции при отражении света выполнены с возможностью отражения света при значении коэффициента отражения, превышающем его пороговое значение в рабочем оптическом диапазоне.
21. Дисплей по п.15, отличающийся тем, что значение коэффициента отражения широкодиапазонного белого света составляет примерно от 30 до 70% в рабочем оптическом диапазоне.
22. Дисплей по п.15, отличающийся тем, что указанное поглощающее вещество включено в указанные средства пропускания света.
23. Дисплей по п.15, отличающийся тем, что указанные средства пропускания света содержат прозрачную подложку.
24. Дисплей по п.15, отличающийся тем, что по мере увеличения длины световой волны в рабочем оптическом диапазоне интерферометрического модулятора указанный коэффициент поглощения (k) уменьшается или остается практически неизменным.
25. Дисплей по п.15, отличающийся тем, что показатель преломления (n) указанного поглощающего вещества возрастает по мере увеличения длины световой волны в рабочем оптическом диапазоне интерферометрического модулятора.
26. Дисплей по п.25, отличающийся тем, что отношение показателя преломления (n) к коэффициенту поглощения (k) указанного поглощающего вещества составляет примерно от 2,5 до 6.
27. Дисплей по п.15, отличающийся тем, что указанное поглощающее вещество содержит германий или германийсодержащий сплав.
28. Дисплей по п.15, отличающийся тем, что отражающий слой содержит алюминий или алюминийсодержащий сплав.
29. Оптическое устройство, содержащее
подложку, на рабочую поверхность которой поступает падающий свет и
на которой сформирована матрица интерферометрических модуляторов, причем указанная матрица интерферометрических модуляторов содержит
отражающий слой, размещенный на указанной подложке, и
поглощающее вещество между отражающим слоем и подложкой, при этом коэффициент поглощения (k) поглащающего вещества ниже порогового значения для длин световых волн в рабочем оптическом диапазоне интерферометрического модулятора, причем
матрица интерферометрических модуляторов выполнена с возможностью отражения широкодиапазонного белого света в рабочем оптическом диапазоне.
30. Устройство по п.29, в котором между поглощающим веществом и отражающим слоем имеется зазор.
31. Устройство по п.29, отличающееся тем, что указанный отражающий слой выполнен подвижным.
32. Устройство по п.29, отличающееся тем, что указанное пороговое значение составляет примерно 2,5.
33. Устройство по п.29, отличающееся тем, что для отображения белого цвета матрица интерферометрических модуляторов выполнена с возможностью отражения света при значении коэффициента отражения, превышающем его пороговое значение в рабочем оптическом диапазоне.
34. Устройство по п.29, отличающееся тем, что значение коэффициента отражения широкодиапазонного белого света составляет примерно от 30 до 70% в рабочем оптическом диапазоне.
35. Устройство по п.29, отличающееся тем, что указанное поглощающее вещество включено в состав прозрачной подложки.
36. Устройство по п.29, отличающееся тем, что по мере увеличения длины световой волны в рабочем оптическом диапазоне интерферометрического модулятора указанный коэффициент поглощения (k) уменьшается или остается практически неизменным.
37. Устройство п.29, отличающееся тем, что показатель преломления (n) указанного преломляющего вещества возрастает по мере увеличения длины световой волны в рабочем оптическом диапазоне интерферометрического модулятора.
38. Устройство по п.37, отличающееся тем, что отношение показателя преломления (n) к коэффициенту поглощения (k) указанного поглощающего вещества составляет примерно от 2,5 до 6.
39. Устройство по п.29, отличающееся тем, что указанное поглощающее вещество содержит германий или германийсодержащий сплав.
40. Устройство по п.29, отличающееся тем, что указанный отражающий слой содержит алюминий или алюминийсодержащий сплав.
41. Устройство по п.29, отличающееся тем, что указанный рабочий оптический диапазон составляет примерно от 400 до 700 нм.
42. Устройство по п.29, отличающееся тем, что указанное устройство на основе микроэлектромеханических систем содержит сотовый телефон.
43. Устройство по п.29, дополнительно содержащее
процессор, выполненный с возможностью обработки видеоданных и электрически взаимодействующий с матрицей, и
запоминающее устройство, электрически взаимодействующее с процессором.
44. Устройство по п.43, дополнительно содержащее схему формирования, выполненную с возможностью подачи по меньшей мере одного сигнала на матрицу.
45. Устройство по п.44, дополнительно содержащее контроллер, выполненный с возможностью передачи по меньшей мере части видеоданных на схему формирования.
46. Устройство по п.43, дополнительно содержащее модуль видеоисточника, выполненный с возможностью передачи видеоданных на процессор.
47. Устройство по п.46, отличающееся тем, что модуль видеоисточника содержит по меньшей мере один из следующих компонентов: приемник, приемопередатчик и передатчик.
48. Устройство по п.43, дополнительно содержащее устройство ввода, выполненное с возможностью приема входных данных и передачи их на процессор.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US11/401,023 US7643203B2 (en) | 2006-04-10 | 2006-04-10 | Interferometric optical display system with broadband characteristics |
| US11/401,023 | 2006-04-10 |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| RU2012101843/28A Division RU2012101843A (ru) | 2006-04-10 | 2012-01-19 | Интерферометрическая оптическая дисплейная система с широкодиапазонными характеристиками |
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| Publication Number | Publication Date |
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| RU2008140134A true RU2008140134A (ru) | 2010-05-20 |
| RU2452987C2 RU2452987C2 (ru) | 2012-06-10 |
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| Application Number | Title | Priority Date | Filing Date |
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| RU2008140134/28A RU2452987C2 (ru) | 2006-04-10 | 2007-04-02 | Интерферометрическая оптическая дисплейная система с широкодиапазонными характеристиками |
| RU2012101843/28A RU2012101843A (ru) | 2006-04-10 | 2012-01-19 | Интерферометрическая оптическая дисплейная система с широкодиапазонными характеристиками |
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| RU2012101843/28A RU2012101843A (ru) | 2006-04-10 | 2012-01-19 | Интерферометрическая оптическая дисплейная система с широкодиапазонными характеристиками |
Country Status (10)
| Country | Link |
|---|---|
| US (3) | US7643203B2 (ru) |
| EP (1) | EP2005237A1 (ru) |
| JP (2) | JP4723670B2 (ru) |
| KR (1) | KR101344484B1 (ru) |
| CN (2) | CN102759794A (ru) |
| BR (1) | BRPI0710270A2 (ru) |
| CA (1) | CA2647634A1 (ru) |
| RU (2) | RU2452987C2 (ru) |
| TW (1) | TWI443372B (ru) |
| WO (1) | WO2007120464A1 (ru) |
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-
2006
- 2006-04-10 US US11/401,023 patent/US7643203B2/en not_active Expired - Fee Related
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2007
- 2007-04-02 JP JP2009505386A patent/JP4723670B2/ja not_active Expired - Fee Related
- 2007-04-02 CN CN2012102420681A patent/CN102759794A/zh active Pending
- 2007-04-02 CA CA002647634A patent/CA2647634A1/en not_active Abandoned
- 2007-04-02 BR BRPI0710270-4A patent/BRPI0710270A2/pt not_active IP Right Cessation
- 2007-04-02 RU RU2008140134/28A patent/RU2452987C2/ru not_active IP Right Cessation
- 2007-04-02 WO PCT/US2007/008089 patent/WO2007120464A1/en not_active Ceased
- 2007-04-02 CN CN2007800128681A patent/CN101443691B/zh not_active Expired - Fee Related
- 2007-04-02 EP EP07754589A patent/EP2005237A1/en not_active Withdrawn
- 2007-04-10 TW TW096112556A patent/TWI443372B/zh not_active IP Right Cessation
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2008
- 2008-11-05 KR KR1020087027146A patent/KR101344484B1/ko not_active Expired - Fee Related
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2009
- 2009-12-09 US US12/634,576 patent/US8077379B2/en not_active Expired - Fee Related
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2011
- 2011-04-06 JP JP2011084387A patent/JP5215431B2/ja not_active Expired - Fee Related
- 2011-12-08 US US13/314,448 patent/US20120075313A1/en not_active Abandoned
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- 2012-01-19 RU RU2012101843/28A patent/RU2012101843A/ru not_active Application Discontinuation
Also Published As
| Publication number | Publication date |
|---|---|
| WO2007120464A8 (en) | 2007-12-27 |
| US20070236774A1 (en) | 2007-10-11 |
| RU2452987C2 (ru) | 2012-06-10 |
| EP2005237A1 (en) | 2008-12-24 |
| WO2007120464A1 (en) | 2007-10-25 |
| US8077379B2 (en) | 2011-12-13 |
| CN102759794A (zh) | 2012-10-31 |
| TW200827768A (en) | 2008-07-01 |
| JP4723670B2 (ja) | 2011-07-13 |
| KR20090033171A (ko) | 2009-04-01 |
| JP2011180604A (ja) | 2011-09-15 |
| US20100128339A1 (en) | 2010-05-27 |
| CN101443691B (zh) | 2012-09-05 |
| BRPI0710270A2 (pt) | 2011-08-09 |
| JP5215431B2 (ja) | 2013-06-19 |
| TWI443372B (zh) | 2014-07-01 |
| CA2647634A1 (en) | 2007-10-25 |
| US20120075313A1 (en) | 2012-03-29 |
| JP2009533712A (ja) | 2009-09-17 |
| US7643203B2 (en) | 2010-01-05 |
| KR101344484B1 (ko) | 2013-12-23 |
| CN101443691A (zh) | 2009-05-27 |
| RU2012101843A (ru) | 2013-07-27 |
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