[go: up one dir, main page]

JP2020088031A - レーザ装置用の電源装置 - Google Patents

レーザ装置用の電源装置 Download PDF

Info

Publication number
JP2020088031A
JP2020088031A JP2018216527A JP2018216527A JP2020088031A JP 2020088031 A JP2020088031 A JP 2020088031A JP 2018216527 A JP2018216527 A JP 2018216527A JP 2018216527 A JP2018216527 A JP 2018216527A JP 2020088031 A JP2020088031 A JP 2020088031A
Authority
JP
Japan
Prior art keywords
power supply
abnormality
circuit
overvoltage
high frequency
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2018216527A
Other languages
English (en)
Japanese (ja)
Inventor
英正 山口
Hidemasa Yamaguchi
英正 山口
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Heavy Industries Ltd
Original Assignee
Sumitomo Heavy Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Heavy Industries Ltd filed Critical Sumitomo Heavy Industries Ltd
Priority to JP2018216527A priority Critical patent/JP2020088031A/ja
Priority to KR1020190127041A priority patent/KR20200058283A/ko
Priority to TW108137172A priority patent/TWI733215B/zh
Priority to CN201910987814.1A priority patent/CN111200354A/zh
Publication of JP2020088031A publication Critical patent/JP2020088031A/ja
Pending legal-status Critical Current

Links

Images

Classifications

    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02MAPPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
    • H02M1/00Details of apparatus for conversion
    • H02M1/32Means for protecting converters other than automatic disconnection
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/09Processes or apparatus for excitation, e.g. pumping
    • H01S3/097Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser
    • H01S3/09702Details of the driver electronics and electric discharge circuits
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/14Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/0014Monitoring arrangements not otherwise provided for
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02MAPPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
    • H02M5/00Conversion of AC power input into AC power output, e.g. for change of voltage, for change of frequency, for change of number of phases
    • H02M5/02Conversion of AC power input into AC power output, e.g. for change of voltage, for change of frequency, for change of number of phases without intermediate conversion into DC
    • H02M5/04Conversion of AC power input into AC power output, e.g. for change of voltage, for change of frequency, for change of number of phases without intermediate conversion into DC by static converters
    • H02M5/10Conversion of AC power input into AC power output, e.g. for change of voltage, for change of frequency, for change of number of phases without intermediate conversion into DC by static converters using transformers
    • H02M5/16Conversion of AC power input into AC power output, e.g. for change of voltage, for change of frequency, for change of number of phases without intermediate conversion into DC by static converters using transformers for conversion of frequency
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02MAPPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
    • H02M7/00Conversion of AC power input into DC power output; Conversion of DC power input into AC power output
    • H02M7/42Conversion of DC power input into AC power output without possibility of reversal
    • H02M7/44Conversion of DC power input into AC power output without possibility of reversal by static converters
    • H02M7/48Conversion of DC power input into AC power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode
    • H02M7/53Conversion of DC power input into AC power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal
    • H02M7/537Conversion of DC power input into AC power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal using semiconductor devices only, e.g. single switched pulse inverters
    • H02M7/5387Conversion of DC power input into AC power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal using semiconductor devices only, e.g. single switched pulse inverters in a bridge configuration
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02MAPPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
    • H02M1/00Details of apparatus for conversion
    • H02M1/0003Details of control, feedback or regulation circuits
    • H02M1/0038Circuits or arrangements for suppressing, e.g. by masking incorrect turn-on or turn-off signals, e.g. due to current spikes in current mode control

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Optics & Photonics (AREA)
  • Plasma & Fusion (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Lasers (AREA)
  • Mechanical Engineering (AREA)
  • Laser Beam Processing (AREA)
JP2018216527A 2018-11-19 2018-11-19 レーザ装置用の電源装置 Pending JP2020088031A (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2018216527A JP2020088031A (ja) 2018-11-19 2018-11-19 レーザ装置用の電源装置
KR1020190127041A KR20200058283A (ko) 2018-11-19 2019-10-14 레이저장치용 전원장치
TW108137172A TWI733215B (zh) 2018-11-19 2019-10-16 雷射裝置用的電源裝置
CN201910987814.1A CN111200354A (zh) 2018-11-19 2019-10-17 激光装置用的电源装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2018216527A JP2020088031A (ja) 2018-11-19 2018-11-19 レーザ装置用の電源装置

Publications (1)

Publication Number Publication Date
JP2020088031A true JP2020088031A (ja) 2020-06-04

Family

ID=70746051

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2018216527A Pending JP2020088031A (ja) 2018-11-19 2018-11-19 レーザ装置用の電源装置

Country Status (4)

Country Link
JP (1) JP2020088031A (zh)
KR (1) KR20200058283A (zh)
CN (1) CN111200354A (zh)
TW (1) TWI733215B (zh)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2023166674A (ja) * 2022-05-10 2023-11-22 住友重機械工業株式会社 電源装置、レーザ装置
JP7679042B1 (ja) 2023-11-24 2025-05-19 ユニークチップス合同会社 電気抵抗測定装置、ホール効果測定装置及び半導体特性測定装置

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01302882A (ja) * 1988-05-31 1989-12-06 Mitsubishi Electric Corp パルス放電レーザ用電源装置
JPH0739166A (ja) * 1993-07-26 1995-02-07 Toshiba Corp 高周波電源装置及びレーザ発振装置
JP2010251411A (ja) * 2009-04-13 2010-11-04 Mitsubishi Electric Corp ガスレーザ発振器
JP2011233659A (ja) * 2010-04-27 2011-11-17 Panasonic Corp レーザ発振装置およびレーザ加工機

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07162067A (ja) * 1993-12-02 1995-06-23 Mitsubishi Electric Corp レーザ装置及びレーザ放電管
JP3496369B2 (ja) * 1995-11-06 2004-02-09 三菱電機株式会社 レーザ用電源装置
TWI307988B (en) * 2005-06-22 2009-03-21 Chao Cheng Lu Laser power source apparatus
JP5920870B2 (ja) * 2011-11-02 2016-05-18 株式会社アマダミヤチ レーザ電源装置
JP5972603B2 (ja) * 2012-02-24 2016-08-17 東芝Itコントロールシステム株式会社 レーザ電源装置及びその制御方法
JP6184798B2 (ja) 2013-08-05 2017-08-23 住友重機械工業株式会社 ガスレーザ装置、パルスレーザビーム出力方法及びレーザ加工装置
CN105594307B (zh) * 2013-10-04 2018-09-28 东芝三菱电机产业系统株式会社 电源装置
JP2017069561A (ja) * 2015-09-29 2017-04-06 パナソニックIpマネジメント株式会社 ガスレーザ発振装置
KR20180039032A (ko) 2018-03-23 2018-04-17 주식회사 진흥테크 무인항공기 및 무인항공기 자동충전장치

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01302882A (ja) * 1988-05-31 1989-12-06 Mitsubishi Electric Corp パルス放電レーザ用電源装置
JPH0739166A (ja) * 1993-07-26 1995-02-07 Toshiba Corp 高周波電源装置及びレーザ発振装置
JP2010251411A (ja) * 2009-04-13 2010-11-04 Mitsubishi Electric Corp ガスレーザ発振器
JP2011233659A (ja) * 2010-04-27 2011-11-17 Panasonic Corp レーザ発振装置およびレーザ加工機

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2023166674A (ja) * 2022-05-10 2023-11-22 住友重機械工業株式会社 電源装置、レーザ装置
JP7679042B1 (ja) 2023-11-24 2025-05-19 ユニークチップス合同会社 電気抵抗測定装置、ホール効果測定装置及び半導体特性測定装置
JP2025085316A (ja) * 2023-11-24 2025-06-05 ユニークチップス合同会社 電気抵抗測定装置、ホール効果測定装置及び半導体特性測定装置

Also Published As

Publication number Publication date
CN111200354A (zh) 2020-05-26
TWI733215B (zh) 2021-07-11
TW202027390A (zh) 2020-07-16
KR20200058283A (ko) 2020-05-27

Similar Documents

Publication Publication Date Title
JP3197169B2 (ja) 放電灯の点灯回路
US20040004797A1 (en) Spark management method and device
JP5920870B2 (ja) レーザ電源装置
NL1026187C2 (nl) Inrichting voor het genereren van corona-ontladingen.
US9232627B2 (en) Radio-frequency oscillation circuit
JP2020088031A (ja) レーザ装置用の電源装置
US8207690B2 (en) High-pressure discharge lamp ballast with rapid lamp restart circuit
JP7742547B2 (ja) ゲート駆動回路、ゲート駆動装置、高周波電源装置およびシステム
JP2007018960A (ja) 放電灯点灯回路
JP4206914B2 (ja) 無電極放電灯点灯装置および無電極放電灯装置
KR102531290B1 (ko) 레이저장치 및 그 전원장치
KR20100130970A (ko) 적어도 하나의 방전 램프를 동작시키기 위한 전자 안정기 및 방법
JP2000307174A (ja) レーザ装置
JP4805205B2 (ja) 放電負荷用電源
JP6831270B2 (ja) 高周波電源用の電源制御装置および高周波電源の制御方法、ならびにレーザ加工システム用の光源
US7548402B2 (en) High voltage pulse generating circuit
JP6246300B1 (ja) 点火装置
JP4186788B2 (ja) 無電極放電灯点灯装置
US7394203B2 (en) Method and system for open lamp protection
US8120270B2 (en) Circuit arrangement and method for operating a discharge lamp with preheatable electrodes
JP2016110885A (ja) 放電ランプ点灯装置
JP2023172238A (ja) 光源装置
JP2011103269A (ja) マグネトロン駆動用電源
JP2005057823A (ja) パルス電源
JPH027484A (ja) 放電型エキシマレーザ装置

Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20210714

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20220729

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20220809

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20221011

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20230124

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20230327

A02 Decision of refusal

Free format text: JAPANESE INTERMEDIATE CODE: A02

Effective date: 20230704