JP2019108234A - Pickup device - Google Patents

Abstract

An end material is removed from a substrate without providing a drive device dedicated to the end material removal. A pickup device includes a belt conveyor device, a pusher bar, a suction conveyance device, and a floor plate. The belt conveyor device 3 conveys the substrate 101 on which the scribe line S is formed between the main body 106 and the end material 107. The pusher bar 11 is disposed above the belt conveyor device 3 and separates the scribe line S by descending and colliding with the substrate 101. The suction conveyance device 5 suctions and conveys the main body 106 of the substrate 101. The laying plate 21 is disposed in contact with or close to the lower surface of the upper transport unit 3a of the belt conveyor device 3 at a position corresponding to the end material 107 of the substrate 101, thereby securing a gap 21b below the upper transport unit 3a. I do. [Selection diagram] FIG.

Description

  The present invention relates to a pickup device, and more particularly to a pickup device for picking up a substrate from a belt conveyor.

  In general, in a liquid crystal panel manufacturing process, a large-area bonded glass substrate (mother substrate) on which a plurality of unit display panels (unit substrates) serving as manufacturing units are patterned is manufactured and then divided into unit display panels. Do. Specifically, using a pair of upper and lower cutter wheels, scribing is simultaneously performed on two surfaces of the mother substrate from the upper and lower direction, and then the two surfaces are simultaneously separated to divide each unit display panel. Extra portions are provided between the unit display panels, and these become scraps after division.

  As processing of the scrap, there is known a method of gripping the scrap with a chuck member and moving the chuck in a separating direction to drop the scrap into a scrap accumulation container provided below (for example, Patent Document) See 1).

WO 2002/057192

In recent years, substrates have been divided on a belt conveyor. However, when the break bar collides with the substrate to cut off the end material, the substrate may be bent together with the belt, which may lower the accuracy of the scribing line cutting.
However, conventionally, no technology has been proposed for solving such a problem.

  An object of the present invention is to accurately cut off a substrate end on a belt conveyor.

  Below, a plurality of modes are explained as a means to solve a subject. These aspects can be arbitrarily combined as needed.

The pickup device according to the first aspect of the present invention includes a belt conveyor device, a pusher bar, a suction conveyance device, and a floor plate.
The belt conveyor apparatus conveys a substrate having a scribe line formed between the main body and the end material.
The pusher bar is disposed above the belt conveyor apparatus and descends to break the scribe line by colliding with the substrate.
The suction and transfer apparatus sucks and transfers the main body of the substrate.
The bottom plate is disposed in contact with or in proximity to the lower surface of the upper conveying portion of the belt conveyor device at a position corresponding to the end material of the substrate, thereby securing a gap below the upper conveying portion.
In this apparatus, since the bottom plate secures a gap below the upper conveying portion of the belt conveyor device, when the pusher bar descends and collides with the substrate disposed on the belt conveyor device, a large stress is produced around the scribe line. As a result, the scribe line is broken accurately.
In addition, after cutting off the end material, the suction and transfer device can suck the main body and transfer it to another device. Thus, the scrap can be removed from the substrate without providing a driving device dedicated to scrap removal.
Unlike the present invention, if there is no base plate, even if the pusher bar is lowered to push down the end material, a sufficiently large bending stress is not generated around the scribe line, and therefore the scribe line can not be accurately separated. There is sex.

The base plate may have a straight end face parallel to the scribe line.
In this device, when the pusher bar depresses the end material, bending stress acts uniformly on the entire scribe line.

The suction conveyance device and the pusher bar may be integrally and operatively connected in the vertical direction, and the dividing operation of the scribe line by the pusher bar and the suction operation of the main body by the suction conveyance device may be performed simultaneously or continuously.
In this apparatus, processing efficiency is good because the division of the scribe line and the suction of the main body of the substrate are performed simultaneously or continuously.

The suction conveyance device may lift the main body from the belt conveyor device in a state where the pusher bar breaks the scribing line and then abuts on the end material.
In this device, the main body of the substrate is reliably separated from the end material.

  In the pickup device according to the present invention, it is possible to accurately cut off the end of the substrate on the belt conveyor.

FIG. 2 is a side view showing one state of the pickup device in the first embodiment. FIG. 2 is a block diagram showing a control configuration of a pickup device. The side view which shows one state of operation | movement of a pick-up apparatus. The side view which shows one state of operation | movement of a pick-up apparatus. The elements on larger scale of FIG. The side view which shows one state of operation | movement of a pick-up apparatus. The side view which shows one state of operation | movement of a pick-up apparatus. The side view which shows one state of operation | movement of a pick-up apparatus.

1. First Embodiment (1) Structure of Pickup Device The structure of the pickup device 1 will be described with reference to FIG. FIG. 1 is a side view showing one state of the pickup device in the first embodiment.
In FIG. 1, the direction orthogonal to the sheet is the first horizontal direction, and the arrow Y is the second horizontal direction orthogonal to the first horizontal direction.

The pickup device 1 is a device that performs a substrate cutting operation and a substrate suction and transfer operation.
The pickup device 1 has a belt conveyor device 3. The belt conveyor device 3 is a device for transporting the substrate 101. Specifically, the belt conveyor device 3 transports the substrate 101 in the second direction. The substrate 101 is a bonded glass made of two substrates, and the substrate 101 has a main body 106 and an end material 107. A scribe line S is formed between the main body 106 and the end material 107. The end material 107 has a portion that underlies the main body 106.
The pickup device 1 has a suction conveyance device 5 (an example of a suction conveyance device). The suction and transfer device 5 is a device for sucking and transferring the main body 106 of the substrate 101. The suction conveyance device 5 has a suction unit main body 7 and a plurality of suction disks 9 provided in the lower part thereof. The suction unit main body 7 is connected to a negative pressure generator 25 (FIG. 2) such as a vacuum pump (not shown).

The adsorption conveyance device 5 has a moving device 27 (FIG. 2). The moving device 27 can move the suction and transfer device 5 up and down to move sideways.
The pickup device 1 has a pusher bar 11. The pusher bar 11 is operatively connected integrally with the suction unit main body 7 in the vertical direction. The pusher bar 11 is disposed above the belt conveyor device 3 and descends and collides with the substrate 101 to break the scribe line. In FIG. 1, a pair of pusher bars 11 is shown. The pair of pusher bars 11 extend in the direction orthogonal to the drawing sheet.
The pickup device 1 has a lifting device 13. The lifting device 13 is a device for lifting the pusher bar 11 with respect to the suction unit main body 7.

The pickup device 1 has a base plate 21. Below the upper conveying portion 3 a of the belt conveyor device 3, it is disposed on the upper surface of the support member 22. The bottom plate 21 has an end face 21 a disposed in contact with or in proximity to the lower surface of the upper conveying portion 3 a of the belt conveyor device 3 at a position corresponding to the end material 107 of the substrate 101. Therefore, the gap 21b is secured below the upper conveyance unit 3a.
The end face 21 a has a linear shape parallel to the scribe line S of the substrate 101. That is, the end face 21a extends in the first horizontal direction. The end face 21 a is disposed at a position corresponding to the end member 107 in the second horizontal direction. More specifically, the second direction position of the end face 21a coincides with or approaches the upper portion of the scribe line S.
The pickup device 1 may have a moving mechanism for moving the base plate 21 between the position shown in FIG. 1 and another position.

(2) Control Configuration of Pickup Device The control configuration of the pickup device 1 will be described with reference to FIG. FIG. 2 is a block diagram showing a control configuration of the pickup device.
The pickup device 1 has a controller 50.
The controller 50 is a computer having a processor (for example, CPU), a storage device (for example, ROM, RAM, HDD, SSD, etc.), and various interfaces (for example, A / D converter, D / A converter, communication interface, etc.) It is a system. The controller 50 performs various control operations by executing the program stored in the storage unit (corresponding to a part or all of the storage area of the storage device).

The controller 50 may be configured by a single processor, but may be configured by a plurality of independent processors for each control.
Some or all of the functions of the components of the controller 50 may be implemented as a program that can be executed by a computer system that constitutes the controller 50. In addition, some of the functions of each element of the controller 50 may be configured by a custom IC.

In the controller 50, a belt conveyor device 3, a negative pressure generating device 25, a moving device 27, and an elevating device 13 are disposed.
Although not shown, sensors for detecting the size, shape and position of the substrate, sensors and switches for detecting the state of each device, and an information input device are connected to the controller 50.

(3) Pickup and Substrate Cutting Operation of Pickup Device The pickup and substrate cutting operation of the pickup device will be described with reference to FIGS. 3 to 8. 3 to 4 and 6 to 8 are side views showing one state of operation of the pickup device. FIG. 5 is a partial enlarged view of FIG.
The following control operation is realized by commands to various devices of the controller 50.

In FIG. 3, the suction unit main body 7 of the suction conveyance device 5 is lowered by the moving device 27, and the plurality of suction disks 9 abut on the main body 106 of the substrate 101. In this state, the pusher bar 11 is at a position spaced above the substrate 101.
Subsequently, the plurality of suction disks 9 suck the main body 106 of the substrate 101 by the negative pressure generator 25.

In FIG. 4, the lifting device 13 moves the pair of pusher bars 11 to the lower position with respect to the suction unit main body 7 and collides against the substrate 101 disposed on the upper conveying portion 3 a of the belt conveyor device 3. Specifically, as shown in FIG. 5, one pusher bar 11 abuts on the top surface of the end member 107 to bend the substrate 101 downward. In this case, since the gap 21b is secured below the upper side conveyance portion 3a of the belt conveyor device 3 by the bottom plate 21, the scribe line S is accurately separated. Unlike the present embodiment, if there is no base plate, a sufficiently large force does not act around the scribe line even if the pusher bar descends and presses down the end material, and thus the scribe line can not be accurately separated There is sex.
Furthermore, since the end face 21a is parallel to the scribe line S, when the pusher bar 11 depresses the end piece 107, bending stress acts uniformly on the entire scribe line S.

As shown in FIG. 6, next, the suction unit main body 7 moves upward, and the suction board 9 lifts the main body 106 of the substrate 101 from the upper side conveyance unit 3 a of the belt conveyor device 3. At this time, the pair of pusher bars 11 keep pressing the end piece 107 of the substrate 101 from above. Thus, the main body 106 is reliably separated from the end piece 107. In addition, the scraps 107 surely remain on the belt conveyor device 3.
As shown in FIG. 7, next, the suction unit main body 7 is further moved upward, and the suction disk 9 further raises the main body 106 of the substrate 101. At this time, the pair of pusher bars 11 ascend with the suction unit main body 7 and separate from the end material 107 upward.
As shown in FIG. 8, next, the pusher bar 11 is moved to the upper position with respect to the suction unit main body 7 by the lifting and lowering device 13.

As described above, after the cutting off of the end material 107, the suction conveyance device 5 can suction the main body 106 of the substrate 101 and convey it to another device. That is, the end material 107 can be removed from the substrate 101 without providing a driving device dedicated to removing the end material.
Furthermore, as described above, the dividing operation of the scribe line S by the pusher bar 11 and the suction operation of the main body 106 by the suction conveyance device 5 are performed simultaneously or successively. Therefore, the processing efficiency is good.

2. Other Embodiments Although one embodiment of the present invention has been described above, the present invention is not limited to the above embodiment, and various modifications can be made without departing from the scope of the invention. In particular, the embodiments and modifications described herein may be arbitrarily combined as needed.
(1) Modifications of Base Plate The planar shape, cross-sectional shape, thickness and the like of the base plate are not limited to those in the first embodiment.
(2) Modification of Pickup Device The number, shape and position of suction disks, and the number, shape and position of pusher bars are not limited to those of the first embodiment.

(3) Modification of Substrate A bonded brittle material substrate in which two brittle material substrates are bonded together is a liquid crystal panel in which a glass substrate is bonded, a flat display panel such as a plasma display panel, an organic EL display panel, and silicon The substrate includes a semiconductor substrate in which a substrate, a sapphire substrate or the like is bonded to a glass substrate.
The type of substrate is not particularly limited. The substrate includes a single plate glass, a semiconductor wafer, and a ceramic substrate.

(4) Modification of Scribe Line The shape of the scribe line is not limited. Although the scribe line is a straight line in the above embodiment, it may have a curve in part or all.

  The present invention can be widely applied to a pickup device for picking up a substrate from a belt conveyor.

1: Pickup device 3: Belt conveyer device 3 a: Upper side conveyance unit 5: Suction conveyance device 7: Suction unit body 9: Suction board 11: Pusher bar 13: Elevating device 21: Bottom plate 21 a: Straight end face 21 b: Clearance 25: Negative Pressure generating device 27: moving device 50: controller 101: substrate 106: main body 107: end material S: scribing line

Claims (4)

A belt conveyor apparatus for conveying a substrate having a scribe line formed between the main body and the end material;
A pusher bar disposed above the belt conveyor device and lowered to collide with the substrate to break the scribe line;
An adsorbing and conveying apparatus that adsorbs and conveys the main body of the substrate;
A floor plate which secures a gap below the upper transport section by being disposed in contact with or in proximity to the lower surface of the upper transport section of the belt conveyor device at a position corresponding to the end material of the substrate;
Pickup device with.   The pickup device according to claim 1, wherein the base plate has a straight end face parallel to the scribe line.   The adsorbing and conveying device and the pusher bar are integrally and operatively connected in the vertical direction, and the dividing operation of the scribe line by the pusher bar and the adsorbing operation of the main body by the adsorbing and conveying device are simultaneously or continuously The pickup device according to claim 1 or 2, which is performed.   The suction and transfer apparatus according to any one of claims 1 to 3, wherein the main body is lifted from the belt conveyor device in a state where the pusher bar cuts the scribing line and then contacts the end material. Pickup device.

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