JP2018122398A - Grinding equipment - Google Patents

Abstract

PROBLEM TO BE SOLVED: To remove a grinding debris in the vicinity of a chuck table before the grinding debris flows into a drainage pipe. A grinding device includes a holding means for holding a plate-shaped work W containing a magnetic material, a grinding means 13 for grinding the plate-shaped work W held by the holding means with a grinding wheel 136, and a plate held by the holding means. A chuck table 21 having a holding surface 22a for sucking and holding the plate-shaped work W and a ring-shaped holding means surrounding the chuck table 21 are provided with a grinding water supply means 15 for supplying the grinding water 1 to the shaped work W. The recess 260 is formed, and the grinding waste 3 containing the grinding water 1 and the grinding waste 2 is received by the recess 260, and the grinding waste 2 is settled on the bottom of the grinding waste 3 stored in the recess 260 to deposit the grinding waste 2. Since the ring-shaped settling tank 26 having the drainage portion 261 for draining the clean water 4 of 3 is provided, the grinding dust 2 is prevented from flowing into the low surface 16a of the water case 16, and the grinding dust 2 is clogged in the drain pipe. Can be prevented. [Selection diagram] Fig. 3

Description

  The present invention relates to a grinding apparatus for grinding a plate-like workpiece including a magnetic body.

  When manufacturing a magnetic head etc., the plate-shaped workpiece | work containing a magnetic body is ground using the grinding apparatus, for example. The grinding apparatus includes a plurality of holding tables for sucking and holding a plate-like workpiece, a grinding means for grinding the plate-like workpiece, a turntable on which a plurality of holding tables are arranged and rotatable, and a process used during grinding. And a water case disposed below the holding table for discharging the drained liquid to the outside of the grinding apparatus. The bottom surface of the water case is inclined so that the processing waste liquid flows to the end side of the grinding device, and a drain port is formed at a lower portion of the bottom surface (see, for example, Patent Document 1 below) ).

JP, 2015-80834, A

  However, since the magnetic material is heavier than, for example, silicon, grinding scraps included in the processing waste liquid are likely to settle. Therefore, if grinding scraps that flow into the bottom surface of the water case are not drained from the drainage outlet together with the processing waste liquid, they remain on the bottom surface of the watercase, or remain in the drainage pipe connected to the drainage port. It becomes a hindrance to drainage of drainage and causes clogging. Further, during grinding of the plate workpiece, the chuck table is always rotated, and the chuck table is moved to a conveyance position for conveying the plate workpiece relative to the chuck table and a grinding position for grinding the plate workpiece held by the chuck table. Since it is moved by the moving means (turn table or Y-axis slider) to move, if grinding waste remains on the bottom surface of the water case, it becomes a load of rotation of the chuck table or the load of movement of the chuck table by the moving means. There is a problem of becoming. Furthermore, when the grinding waste remaining on the bottom surface of the water case dries, it becomes solid and it becomes difficult to remove the grinding waste.

  The present invention has been made in view of the above circumstances, and an object of the present invention is to enable removal of grinding waste in the vicinity of the chuck table before the grinding waste flows into the drain pipe.

  The present invention includes a holding means for holding a plate-like workpiece including a magnetic body, a grinding means for grinding the plate-like workpiece held by the holding means with a grinding wheel, and grinding water to the plate-like workpiece held by the holding means. A grinding apparatus comprising a grinding water supply means for supplying, wherein the holding means includes a chuck table having a holding surface for sucking and holding a plate-like workpiece, and a ring-shaped recess surrounding the chuck table. A drainage unit for receiving grinding drainage liquid containing water and grinding debris at the recess and precipitating the grinding scraps on the bottom of the grinding drainage accumulated in the recess to drain the grinding drainage water. A ring-shaped sedimentation tank.

  Further, the present invention provides a wall for allowing the grinding drainage flowing in the radial direction of the chuck table to flow into the concave portion from the ground surface of the plate-like workpiece held by the chuck table standing from the outer periphery of the sedimentation tank. It is desirable to provide a section.

  Furthermore, the present invention includes a removing means for removing the grinding waste of the magnetic material from the settling tank, the removing means entering the recess of the settling tank and magnetizing the grinding waste, and the magnet It is desirable to include moving means for entering and exiting the recess, and removing means for removing grinding debris magnetically attached to the magnet from the magnet.

  A grinding apparatus according to the present invention includes holding means for holding a plate-like workpiece including a magnetic body, and the holding means has a chuck table having a holding surface for sucking and holding the plate-like workpiece, and a ring shape surrounding the chuck table. It has a drainage part that receives a grinding drainage liquid containing grinding water and grinding debris formed in a concave part and deposits the grinding scraps on the bottom of the grinding drainage liquid stored in the concave part and drains the grinding drainage water. Since the ring-shaped sedimentation tank is provided, during grinding of the plate-shaped workpiece, the grinding waste can always remain in the concave portion of the sedimentation tank, and only the drainage of the grinding drainage liquid can be drained from the drainage section. Thereby, for example, grinding waste can be prevented from flowing into the water case, and grinding waste can be prevented from clogging the drainage pipe. In addition, since grinding waste does not remain in the water case, the load of the chuck table rotating operation and the load of the chuck table horizontal movement operation are eliminated. Furthermore, since the state in which the grinding waste liquid is accumulated to some extent is maintained in the concave portion of the settling tank, it is possible to prevent the grinding scraps from drying and solidifying, and the grinding scrap removal operation is facilitated.

  Further, the grinding apparatus according to the present invention is configured such that the grinding drainage that is erected from the outer periphery of the settling tank and splashes in the radial direction of the chuck table from the surface to be ground of the plate-like workpiece held by the chuck table is formed in the recess. Since the wall is made to flow in, the grinding drainage can be reliably received by the wall and allowed to flow into the recess, leaving grinding waste in the recess and draining only the drainage of the grinding drainage from the drainage section. it can. Thereby, for example, grinding waste can be reliably prevented from flowing into the water case, and grinding waste can be prevented from clogging the drainage pipe.

  Furthermore, the grinding apparatus according to the present invention includes a removing unit that removes the magnetic grinding debris from the settling tank, and the removing unit includes a magnet that enters the recess of the settling tank and magnetizes the debris, and a magnet. Since it has moving means to enter and exit the recess and removal means for removing grinding debris magnetically attached to the magnet from the magnet, it effectively magnetically removes magnetic debris from the recess of the sedimentation tank and removes it. can do.

It is a perspective view which shows the structure of the 1st example of a grinding device. It is sectional drawing which shows the structure of a chuck table, a sedimentation tank, and a removal means. It is sectional drawing which shows the grinding state of the plate-shaped workpiece | work hold | maintained at the chuck table. It is sectional drawing which shows the state which magnetically adheres the grinding waste settled in the recessed part of a sedimentation tank to a magnet. It is sectional drawing which shows the state which discards the grinding waste magnetized by the magnet to a collection box. It is a perspective view which shows the structure of the 2nd example of a grinding device. It is sectional drawing which shows the 2nd example of the grinding state of the plate-shaped workpiece | work hold | maintained at the chuck table. FIG. 8 is a partial enlarged cross-sectional view illustrating a modification of the wall portion illustrated in FIG. 7 and illustrating an example in which the upper end portion of the concave portion is configured as a drainage portion. It is sectional drawing which shows the modification of the chuck table of a 2nd example. It is the modification of the wall part shown in FIG. 9, Comprising: It is the elements on larger scale which show the example which comprised the upper end part of the recessed part as a drainage part. It is a perspective view which shows the structure of the 3rd example of a grinding device.

1 First Example of Grinding Device A grinding device 10 shown in FIG. 1 has a device base 11 extending in the Y-axis direction and a column 12 erected on the rear side of the device base 11 in the Y-axis direction. . On the upper surface of the apparatus base 11, there is provided holding means 20 for holding a plate-like workpiece which is a workpiece including a magnetic body. In front of the column 12 in the Y-axis direction, a grinding means 13 for grinding a plate-like workpiece held by the holding means 20 and a grinding feed direction (Z-axis direction) in which the grinding means 13 approaches and separates from the holding means 20. A grinding feed means 14 for raising and lowering the grinding means 13 and a grinding water supply means 15 for supplying grinding water to a plate-like workpiece connected to the grinding means 13 and held by the holding means 20 are provided.

  The grinding means 13 includes a spindle 130 having an axis in the Z-axis direction, a spindle housing 131 that surrounds the outer periphery of the spindle 130, a motor 132 attached to one end of the spindle 130, and a holder 133 that holds the spindle housing 131. The grinding wheel 135 is detachably mounted on the wheel mount 134 fixed to the tip of the spindle 130, and the grinding wheel 136 is fixed to the lower part of the grinding wheel 135 in an annular shape. The grinding means 13 can rotate the grinding wheel 135 at a predetermined rotational speed by being driven by the motor 132.

  The grinding feed means 14 includes a ball screw 140 extending in the Z-axis direction, a motor 141 connected to one end of the ball screw 140, a pair of guide rails 142 extending in parallel to the ball screw 140, and nuts provided therein. An elevating plate 143 that is screwed into the ball screw 140 and whose side portion is in sliding contact with the guide rail 142 is provided. A holder 133 is fixed to the elevating plate 143. When the motor 141 rotates the ball screw 140, the grinding means 13 can be lifted and lowered in the Z-axis direction along with the lift plate 143 along the pair of guide rails 142.

  The holding means 20 is formed with a chuck table 21 having a holding surface 22a for sucking and holding a plate-like workpiece, and a ring-shaped recess 260 surrounding the chuck table 21, and the grinding water supply means 15 supplies the plate-like workpiece to the plate-like workpiece. Grinding wastewater containing grinding water and grinding waste generated when the grinding wheel 136 grinds the plate-like workpiece is received by the recess 260, and the grinding waste is settled on the bottom of the grinding waste collected in the recess 260 for grinding. And a sedimentation tank 26 having a drainage part 261 for draining clean water of the drained liquid.

  As shown in FIG. 2, the chuck table 21 has a disk-shaped porous plate 22, and the porous plate 22 is connected to a suction source (not shown). The porous plate 22 is made of a porous member such as porous ceramics, and its upper surface serves as a holding surface 22a. The chuck table 21 is mounted on the chuck base 23. A rotating means 24 for rotating the chuck table 21 mounted on the chuck base 23 is connected to the lower end of the chuck base 23. Further, a guide 25 inclined downward is attached around the chuck table 21.

  Around the chuck base 23, a water case 16 into which grinding waste liquid flows is disposed. The water case 16 has a bottom surface 16a for receiving grinding drainage. At one end of the bottom surface 16a on the chuck base 23 side, a rising portion 16b standing upright from the bottom surface 16a is formed. Further, the other end of the bottom surface 16a is connected to a drain pipe (not shown) for discharging grinding waste liquid to the outside of the apparatus. Although omitted in the illustrated example, a Y-axis slider for processing and feeding the holding means 20 shown in FIG. 1 in the horizontal direction (Y-axis direction) is disposed below the chuck base 23. 16 and bellows 17 are arranged so as to cover the entire Y-axis slider. The holding means 20 can be moved in the Y-axis direction by moving the water case 16 in the Y-axis direction with the expansion and contraction of the bellows 17 by the Y-axis slider.

  As shown in FIG. 2, the sedimentation tank 26 is disposed on the bottom surface 16 a of the water case 16 so as to cover the periphery of the chuck table 21 with the opening of the recess 260 facing upward. The inner side wall 26 a of the settling tank 26 is positioned inside the guide 25 (on the chuck table 21 side), and the tip of the guide 25 is positioned in the recess 260. As a result, the grinding drainage splashed around the chuck table 21 during grinding flows along the inclined surface of the guide 25 toward the recess 260.

  In addition, an open drainage portion 261 is formed at a part of the upper end of the outer side wall 26b of the settling tank 26. When the grinding drainage is received by the concave portion 260 and accumulated, grinding scraps made of a magnetic substance are deposited on the bottom of the grinding drainage, and the water drained from the drainage unit 261 is fed to the water case 16. It can be drained towards. The grinding water drainage means the grinding drainage liquid in the supernatant near the water surface where there is no grinding dust out of the grinding drainage accumulated in the recess 260. In addition, the side wall 26b in the illustrated example has a height lower than that of the side wall 26a, so that the grinding waste liquid accumulated in the recess 260 can easily flow to the outside of the settling tank 26.

  As shown in FIG. 2, the grinding apparatus 10 includes a removing unit 30 that removes magnetic grinding debris from the settling tank 26, and a collection box 18 for collecting the grinding debris by the removing unit 30. The removing means 30 includes a magnet 31 that enters the recess 260 of the settling tank 26 and magnetizes the grinding scraps, a moving means 32 that moves the magnet 31 into and out of the recess 260, and grinding scraps magnetized on the magnet 31. And removing means for removing the magnet from the magnet 31. The magnet 31 is configured by, for example, an electromagnet in which a coil is wound around an iron core. The magnet 31 is configured in a columnar shape or a prismatic shape, for example. The magnet 31 only needs to have a width that can enter at least the recess 260, and the size, shape, material, and the like are not particularly limited. The removing means is constituted by, for example, a power source 35 that generates or loses magnetic force with respect to the magnet 31. When the power source 35 energizes the coil, a magnetic force can be generated in the magnet 31 so that grinding scraps can be magnetically attached to the magnet 31. Further, by cutting off the power supply from the power source 35 to the coil, the grinding scraps that are magnetically attached to the magnet 31 by losing the magnetic force from the magnet 31 can be removed.

  The moving means 32 includes a shaft member 33 extending in the vertical direction, and a moving unit 34 for rotating the magnet 31 in the horizontal direction around the shaft member 33 and moving the magnet 31 in the vertical direction along the shaft member 33. I have. When the moving part 34 is rotated by a motor (not shown), the magnet 31 can be moved to the upper side of the settling tank 26 and the upper side of the collection box 18. Further, in a state where the magnet 31 is positioned on the upper side of the settling tank 26, the moving unit 34 moves vertically in the vertical direction, thereby causing the magnet 31 to enter or leave the recessed portion 260. can do.

  Next, an operation example of the grinding apparatus 10 will be described. A plate-like workpiece W shown in FIG. 2 is an example of a circular plate-like workpiece, and includes a magnetic material such as ferrite, for example. The upper surface of the plate-like workpiece W is a surface to be ground Wa that is ground by the grinding wheel 136. First, the plate-like workpiece W is placed on the holding surface 22a of the chuck table 21, and the plate-like workpiece W is sucked and held by the holding surface 22a to which the suction force of a suction source (not shown) is applied. The water case 16 shown in FIG. 1 moves in the Y-axis direction with the expansion and contraction of the bellows 17, thereby moving the holding means 20 below the grinding means 13.

  Next, as shown in FIG. 3, the chuck table 21 is rotated by, for example, the arrow A direction by the rotating unit 24, and the spindle 130 is rotated and the grinding wheel 135 is rotated by, for example, the arrow A direction. The grinding means 13 is lowered in a direction approaching the chuck table 21. Then, grinding is performed until a predetermined thickness is reached while pressing the surface Wa to be ground of the plate-like workpiece W with the grinding wheel 136 that descends while rotating.

  During grinding of the plate-like workpiece W, a valve (not shown) is opened, and the grinding water 1 is supplied from the grinding water supply means 15 toward the surface to be ground Wa of the plate-like workpiece W through the inside of the grinding means 13. The grinding water 1 enters the contact surface between the rotating grinding wheel 136 and the plate-like workpiece W, so that the cooling effect of the grinding water 1 causes clogging of the grinding wheel 136 generated by frictional heat and the grinding of the grinding wheel 136. It is possible to prevent the grains from falling off. As the grinding water 1, for example, pure water can be used.

  Here, as the plate-like workpiece W is cut by the grinding wheel 136 shown in FIG. When the grinding waste 2 is mixed into the grinding water 1 supplied to the surface Wa to be ground of the plate-like workpiece W, the grinding waste liquid 3 containing the grinding water 1 and the grinding waste 2 is formed, and the grinding grinding stone 136 is rotated. Rotate and scatter in the radial direction of the chuck table 21. At this time, the grinding drainage 3 that has fallen onto the guide 25 flows into the recess 260 of the settling tank 26 along the inclined surface of the guide 25. When the grinding drainage liquid 3 accumulates in the recess 260, the grinding waste 2 precipitates on the bottom of the grinding drainage liquid 3. Further, when the grinding drainage 3 accumulates in the recess 260 and becomes full, the clean water 4 of the grinding drainage 3 is drained from the drain 261 and is received by the bottom surface 16 a of the water case 16. That is, since only the clean water 4 is drained from the drainage part 261 while leaving the grinding scraps 2 in the recesses 260, the grinding scraps 2 can be prevented from flowing into the bottom surface 16a of the water case 16. And the clean water 4 which flowed into the bottom face 16a of the water case 16 is drained from the drain pipe (not shown) to the outside of the apparatus.

  When the grinding of the plate-like workpiece W is completed, as shown in FIG. 4, the grinding waste 2 precipitated in the concave portion 260 of the settling tank 26 is removed using the removing means 30. Specifically, the moving means 32 moves the magnet 31 to the upper side of the settling tank 26, and the moving portion 34 descends along the shaft member 33 to cause the magnet 31 to enter the recess 260. At this time, a magnetic force is generated in the magnet 31 by the power source 35 energizing the coil. Then, the grinding dust 2 is magnetically attached to the magnet 31 that has entered the recess 260.

  Next, as shown in FIG. 5, the moving unit 34 moves up along the shaft member 33 to cause the magnet 31 to retreat from the recess 260, and the moving unit 34 pivots around the shaft member 33 in the direction of arrow B, for example. Then, the magnet 31 is moved from the upper side of the settling tank 26 to the upper side of the collection box 18. Subsequently, the magnetic force is lost from the magnet 31 by cutting off the power supply from the power source 35 to the coil. As a result, the grinding waste 2 is separated from the magnet 31 and the grinding waste 2 is discarded in the collection box 18. Then, the above-described removal operation is repeatedly performed to remove all the grinding waste 2 precipitated in the concave portion 260 of the settling tank 26. As described above, according to the removing means 30, it is possible to efficiently magnetically deposit the magnetic scrap 2 from the concave portion 260 of the settling tank 26 and remove it.

  Thus, the grinding apparatus 10 according to the present invention includes the holding unit 20 that holds the plate-like workpiece W including the magnetic body, and the holding unit 20 has the holding surface 22a that holds the plate-like workpiece W by suction. 21 and a ring-shaped recess 260 surrounding the chuck table 21, and the bottom of the grinding drainage 3 collected in the recess 260 by receiving the grinding drainage 3 containing the grinding water 1 and the grinding waste 2. And the ring-shaped sedimentation tank 26 having the drainage part 261 for draining the clean water 4 of the grinding drainage liquid 3 during the grinding of the plate-like workpiece W, the recess 260 of the sedimentation tank 26 is always provided. In addition, it is possible to leave the grinding waste 2 and only the clean water 4 of the grinding drainage 3 to be drained from the drainage portion 261. Thereby, it can prevent that the grinding waste 2 flows into the bottom face 16a of the water case 16, and can prevent the grinding waste 2 from being clogged in the drain pipe. Further, since the grinding waste 2 does not remain on the bottom surface 16a of the water case 16, the load of the rotation operation of the chuck table 21 by the rotating means 24 and the load of the horizontal movement operation of the chuck table 21 by the Y-axis slider are eliminated. Furthermore, since the state where the drainage liquid 3 is accumulated to some extent is maintained in the concave portion 260 of the settling tank 26, the grinding waste 2 can be prevented from drying and solidifying, and the grinding waste 2 can be removed. It becomes easy.

2 Second Example of Grinding Device A grinding device 10A shown in FIG. 6 includes a chuck table 21A for holding a plate-like workpiece including a magnetic body and a sedimentation tank 26A in which a recess 260 surrounding the periphery of the chuck table 21A is formed. The holding means 20A and a wall portion 27 for allowing grinding waste liquid scattered in the radial direction of the chuck table 21A to flow into the concave portion 260 from the surface to be ground of the plate-like workpiece held by the chuck table 21A standing from the outer periphery of the settling tank 26A. And. In the grinding apparatus 10A, the same components as those of the grinding apparatus 10 are denoted by common reference numerals.

  As shown in FIG. 7, the wall portion 27 is fixed to the outer side wall 26b of the settling tank 26A. The upper end portion of the wall portion 27 is bent toward the radially outer side of the chuck table 21A. Thereby, when grinding the plate-shaped workpiece | work hold | maintained at the chuck table 21, it can prevent that the grinding stone 136 contacts the wall part 27. FIG. In the wall portion 27, a drainage portion 270 is formed near the upper end of the side wall 26 b to drain the clean water of the grinding drainage accumulated in the recess 260. The wall 27 shown in the present embodiment is a separate member from the sedimentation tank 26A, but is not limited to this, and the wall 27 and the sedimentation tank 26A may be integrated.

  Next, an operation example of the grinding apparatus 10A will be described. The grinding operation for the plate-like workpiece W shown in FIG. 7 is the same as in the first example. That is, when the plate-like workpiece W is sucked and held by the holding surface 22a of the chuck table 21A, the water case 16 shown in FIG. 1 moves in the Y-axis direction along with the expansion and contraction of the bellows 17, whereby the holding means 20A is ground. Move it down. Next, as shown in FIG. 7, the chuck table 21A is rotated in the direction of arrow A, for example, and the grinding means 13 is moved closer to the chuck table 21A by the grinding feed means 14 while the grinding wheel 135 is rotated in the direction of arrow A, for example. Then, the plate-like workpiece W is pressed by the grinding wheel 136 until the predetermined thickness is reached. During grinding of the plate workpiece W, a valve (not shown) is opened, and the grinding water 1 is supplied from the grinding water supply means 15 to the surface Wa of the plate workpiece W through the grinding means 13.

  In the second example, since the wall portion 27 is disposed so as to surround the periphery of the rotating grinding wheel 136, the grinding drainage 3 that has been scattered around the grinding wheel 136 and did not fall on the guide 25 is the wall portion 27. It is received by. Therefore, the grinding drainage 3 flows into the recess 260 along the wall 27. When the grinding drainage liquid 3 accumulates in the recess 260, the grinding waste 2 precipitates on the bottom of the grinding drainage liquid 3 as in the first example. Further, when the grinding drainage liquid 3 accumulates in the recess 260 and becomes full, the clean water 4 of the grinding drainage 3 is drained from the drainage part 270 and received by the bottom surface 16 a of the water case 16. That is, as in the first example, since only the clean water 4 is drained from the drainage portion 270 while the grinding dust 2 remains in the recess 260, the grinding dust 2 is prevented from flowing into the bottom surface 16a of the water case 16. be able to. Thereafter, similarly to the first example, the magnet 31 constituting the removing means 30 is caused to enter the concave portion 260 of the precipitation tank 26A, and the precipitated grinding dust 2 is magnetized and removed.

  As described above, the grinding apparatus 10A according to the present invention is provided with a grinding discharge that scatters in the radial direction of the chuck table 21A from the ground surface Wa of the plate-like workpiece W that is erected from the outer periphery of the settling tank 26A and held by the chuck table 21A. Since the wall 27 that allows the liquid 3 to flow into the recess 260 is provided, the grinding drainage 3 can be reliably received by the wall 27 and flow into the recess 260, leaving the grinding waste 2 in the recess 260 and grinding drainage. 3, only the clean water 4 can be drained from the drainage part 270. Thereby, it is possible to reliably prevent the grinding waste 2 from flowing into the water case 16 and prevent the grinding waste 2 from clogging the drainage pipe. Further, like the chuck table 21A ′ shown in FIG. 8, the upper end 262 of the recess 260 formed by placing the lower end 271 of the wall 27A in the recess 260 with a gap on the side wall 26b side is drained. It is good also as a part. Even in this case, the grinding waste 2 can remain in the concave portion 260 and only the clean water 4 of the grinding drainage 3 can be drained from the upper end portion 262.

  A chuck table 21B shown in FIG. 9 is a modification of the chuck table 21A. The chuck table 21B is a frame mount on which the frame F is placed on the outer peripheral side of the chuck table 21B in order to hold the plate-like workpiece W supported by the ring-shaped frame F opened at the center via the tape T. The mounting table 28 and a clamp part 29 that clamps the frame F mounted on the frame mounting table 28 are provided. When grinding the plate-like workpiece W held on the chuck table 21B configured as described above, the grinding wheel 136 contacts the frame F because the frame F is positioned below the holding surface 22a of the chuck table 21B. Can be prevented. Further, like the chuck table 21B ′ shown in FIG. 10, the upper end 262 of the recess 260 formed by placing the lower end 271 of the wall 27A in the recess 260 with a gap on the side wall 26b is drained. It is good also as a part. Also in this case, as in the second example, the grinding waste 2 can remain in the concave portion 260 and only the clean water 4 of the grinding drainage 3 can be drained from the upper end portion 262.

3 Third Example of Grinding Device A grinding device 10B shown in FIG. 11 is provided with a removing means 40 for removing grinding waste of magnetic material from the sedimentation tank 26 on the upper surface of the device base 11 on the front side in the Y-axis direction. The grinding apparatus 10B has the same configuration as that of the grinding apparatus 10 except that the removing unit 40 is provided, and the same components as those of the grinding apparatus 10 are denoted by the same reference numerals.

  The removing means 40 includes a shaft member 41 extending in the Z-axis direction and capable of moving up and down, an arm 42 having one end connected to the shaft member 41, and a circular plate-like plate attached to the other end of the arm 42. 43, a ring-shaped magnet 44 fixed to the lower portion of the plate 43, and the shaft 42 connected to the shaft member 41 and pivoting the arm 42 in the horizontal direction and the shaft 42 together with the shaft member 41 raising and lowering the arm 42 in the Z-axis direction. The moving means 45 and the removing means for removing the grinding dust magnetically attached to the magnet 44 from the magnet 44 are provided.

  The magnet 44 is configured by, for example, an electromagnet in which a coil is wound around an iron core. Since the magnet 44 is formed in a ring shape, it can enter the entire circumference of the ring-shaped recess 260. The removing means is constituted by, for example, a power supply 46 that generates or loses magnetic force with respect to the magnet 44. And when the power supply 46 supplies with electricity to a coil, magnetic force can be generated in the magnet 44 and grinding scraps can be magnetically attached to the magnet 44. In addition, by cutting off the power supply from the power source 46 to the coil, the grinding scraps lost to the magnet 44 and magnetically attached to the magnet 44 can be removed.

  The moving means 45 includes at least a motor 450. By driving the motor 450 and pivoting the arm 42 together with the shaft member 41 in the horizontal direction, the magnet 44 can be moved to the upper side of the settling tank 26, for example, and the arm 42 together with the shaft member 41 is moved in the Z-axis direction. By moving up and down, the magnet 44 can be moved into and out of the recess 260. Also in the grinding device 10B configured as described above, the grinding waste 2 is prevented from flowing into the bottom surface 16a of the water case 16 and the grinding waste 2 is prevented from being clogged in the drain pipe as in the grinding device 10 described above. Can do. Moreover, in the removal means 40, since the ring-shaped magnet 44 can be made to approach over the perimeter of the recessed part 260 of the sedimentation tank 26, the magnetic grinding waste 2 can be efficiently magnetized and removed.

  In the removing means 30 and 40 shown in the present embodiment, the case where the grinding work 2 of the plate-like workpiece W is grinded to enter the concave portion 260 of the sedimentation tank 26 and the grinding waste 2 is magnetically attached to the magnets 31 and 44 and removed is described. However, before the plate-like workpiece W is ground, a magnet (for example, a permanent magnet) may be placed in the recess 260 in advance. The removal means in this case is constituted at least by a gripping part that grips the magnet and a moving part that moves the magnet gripped by the gripping part into and out of the recess 260 of the sedimentation tank 26, for example. If a magnet is put in the recess 260 before grinding the plate-like workpiece W, the grinding water 1 and the grinding waste 2 flow into the recess 260 during the grinding process, and the grinding waste 2 is magnetically attached to the magnet. After the workpiece W is ground, the magnet is taken out from the recess 260, and for example, the operator may remove the grinding waste 2 from the magnet. Further, when the magnet with the grinding dust 2 magnetically attached is taken out from the recess 260, another magnet may be put in the recess 260.

  In the said embodiment, although the grinding | polishing waste 2 was removed from the recessed part 260 of the sedimentation tank 26 using the magnets 31 and 44, after the grinding process of the plate-shaped workpiece W, for example, from the recessed part 260 of the sedimentation tank 26 using a wet cleaner. The grinding drainage 3 containing the grinding waste 2 may be removed by suction.

1: Grinding water 2: Grinding waste 3: Grinding drainage liquid 4: Clean water
10, 10A, 10B: Grinding device 11: Device base 12: Column 13: Grinding means 130: Spindle 131: Spindle housing 132: Motor 133: Holder 134: Mount 135: Grinding wheel 136: Grinding wheel 14: Grinding feed means 140: Ball screw 141: Motor 142: Guide rail 143: Elevating plate 15: Grinding water supply means 16: Water case 17: Bellows 18: Collection box 20, 20A: Holding means 21, 21A, 21B: Chuck table 22: Holding portion 22a: Holding Surface 23: Chuck base 24: Rotating means 25: Guide 26, 26A: Precipitation tank 260: Recess 261: Drainage part 262: Upper end part 27, 27A: Wall part 270: Drainage part 271: Lower end part 28: Frame mounting table 29: Clamp part 30: Removal means 31: Magnet 3 2: Moving means 33: Shaft member 34: Moving part 35: Power supply (removing means)
40: removal means 41: shaft member 42: arm 43: plate 44: magnet 45: movement means 450: motor 46: power supply (removal means)

Claims (3)

Holding means for holding a plate-like workpiece containing a magnetic body, grinding means for grinding the plate-like workpiece held by the holding means with a grinding wheel, and grinding water for supplying grinding water to the plate-like workpiece held by the holding means A grinding device comprising a supply means,
The holding means includes a chuck table having a holding surface for sucking and holding a plate-like workpiece;
A ring-shaped concave portion surrounding the chuck table is formed, and the grinding waste liquid containing the grinding water and grinding waste is received by the concave portion, and the grinding waste is settled on the bottom of the grinding waste fluid accumulated in the concave portion. And a ring-shaped sedimentation tank having a drainage section for draining the ground water of the grinding drainage.   2. A wall portion that stands from the outer periphery of the settling tank and has a wall portion that allows the grinding drainage fluid scattered in the radial direction of the chuck table to flow into the concave portion from a surface to be ground of a plate-like workpiece held by the chuck table. The grinding apparatus as described. A removal means for removing the grinding waste of the magnetic material from the settling tank,
The removing means includes a magnet that enters the recess of the settling tank and magnetizes the grinding scraps;
Moving means for moving the magnet into and out of the recess;
The grinding apparatus according to claim 1, further comprising a removing unit that removes grinding scraps magnetically attached to the magnet from the magnet.

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