JP2019025631A - Grinding equipment - Google Patents

Abstract

PROBLEM TO BE SOLVED: To secure grinding debris of a magnetic material in a settling tank and prevent it from flowing into a drainage pipe. SOLUTION: A holding table 5 for holding a plate-shaped work W containing a magnetic material, a grinding means 20 for grinding the plate-shaped work W with a grindstone 21, and a means for supplying grinding water to the plate-shaped work W and the grindstone 21. 15. Has a ring-shaped recess 30a surrounding the holding table 5, and the grinding water flowing down from the holding surface 5a of the holding table 5 contains grinding debris of a magnetic material and is collected in the recess 30a for grinding. A settling tank 30 for settling the debris, a grinding debris holder 40 for holding the grinding debris in the grinding debris collected in the settling tank 30, and a drainage unit for draining the clean water of the grinding debris collected in the settling tank 30. 4D, and the grinding tool holder 40 is composed of a sponge 41 and a magnet 42 embedded in the sponge 41. Is. [Selection diagram] FIG. 5

Description

  The present invention relates to a grinding apparatus for grinding a plate-like workpiece including a magnetic body.

  In the manufacturing process of various electronic devices, a step of grinding a plate-like workpiece such as a silicon substrate with a grinding device to a predetermined thickness is performed. In a grinding apparatus used for such grinding, the grinding waste of the silicon substrate is drained together with the grinding water. However, the grinding waste of the plate-like workpiece including a magnetic material such as a ferrite substrate has a larger specific gravity than that of the silicon, so that grinding is performed. It settles and accumulates in the settling tank of the device.

  In view of this, a grinding apparatus has been proposed in which the bottom of the settling tank is an inclined surface so that grinding scraps of a magnetic material are allowed to flow together with the grinding water drained from the settling tank (see, for example, Patent Document 1).

Japanese Patent Laying-Open No. 2015-080834

  However, in the invention described in Patent Document 1, it is possible to prevent the grinding waste from accumulating in the sedimentation tank, but the magnetic grinding waste drained together with the grinding water settles in the drain pipe, and the drain pipe May clog.

  Therefore, in the grinding device, there is a problem that the grinding scraps of the magnetic material are secured in the sedimentation tank and do not flow into the drain pipe.

  In order to solve the above problems, the present invention provides a holding table having a holding surface for holding a plate-like workpiece containing a magnetic body, a grinding means for grinding the plate-like workpiece held on the holding table with a grindstone, and the holding A grinding apparatus comprising a plate-like workpiece held on a table and a grinding water supply means for supplying grinding water to the grindstone, and having a ring-shaped recess surrounding the holding table. The grinding water flowing down from the holding surface stores a grinding drainage liquid containing magnetic grinding scraps in the recesses and precipitates the grinding scraps, and the grinding in the grinding drainage pooled in the sedimentation tanks A grinding waste holder for holding waste, and a drainage unit for draining the clean water of the grinding drainage stored in the settling tank, the grinding waste holder being embedded in the sponge. And the grinding waste of the grinding drainage is removed from the magnet. It attracted a grinding apparatus to secure in the sponge.

  In the grinding apparatus according to the present invention, since the magnetic grinding waste settled in the sedimentation tank is secured by being attracted to the grinding waste holder by a magnetic force, the magnetic grinding waste is secured in the sedimentation tank to the drain pipe. It can be prevented from flowing in. Further, by using a grinding dust holding tool in which a magnet is embedded in a sponge, the grinding dust of the magnetic material attracted to the magnet is clogged with the sponge. And since the grinding waste secured by the grinding waste holder can be taken out from the sedimentation tank and discarded together with the sponge filled with the grinding waste, the operation of discarding the grinding waste can be easily performed.

It is a perspective view which shows an example of a grinding device. It is a perspective view which shows an example of a grinding dust holder. It is sectional drawing which shows the principal part of a grinding device. It is sectional drawing which shows the state which has ground the plate-shaped workpiece | work with the grinding means. It is sectional drawing which shows the state which is carrying out the grinding dust holder from a sedimentation tank. It is sectional drawing which shows the state which has discarded the grinding | polishing waste holder carried out from the sedimentation tank in the trash box. It is a perspective view which shows the state which took out the magnet from the sponge of the grinding dust holder.

A grinding apparatus 1 shown in FIG. 1 includes an apparatus base 2 extending in the Y-axis direction and a column 3 standing on the rear side of the apparatus base 2 in the Y-axis direction. On the upper surface 2 a of the apparatus base 2, a movable cover 4 that is movable in the Y-axis direction along with the expansion and contraction of the bellows 6 is disposed. The movable cover 4 surrounds the holding table 5 in a rotatable manner.
The holding table 5 having a circular outer shape has a holding surface 5a for sucking and holding a plate-like workpiece W made of a porous member or the like and containing a magnetic material such as ferrite.

  A grinding means 20 for grinding the plate-like workpiece W is supported on the column 3 by the grinding feed means 10 so as to be movable in the Z-axis direction. The grinding feed means 10 includes a ball screw 11 extending in the Z-axis direction, a motor 12 connected to one end of the ball screw 11, a pair of guide rails 13 extending in parallel with the ball screw 11, and nuts provided therein are screwed onto the ball screw 11. And a lifting plate 14 whose side part is in sliding contact with the guide rail 13. The grinding feed means 10 moves the elevating plate 14 in the Z-axis direction along the pair of guide rails 13 by rotating the ball screw 11 with the motor 12. Then, the grinding means 20 moves up and down in the Z-axis direction together with the lifting plate 14.

  The grinding means 20 includes a ring-shaped grinding wheel 22 in which grindstones 21 are arranged in an annular shape, a wheel mount 23 to which the grinding wheel 22 is mounted, a rotating shaft 24 connected to the center of the wheel mount 23, and a rotating shaft 24. A motor 25 to be rotated and a holder 26 to which the main body of the motor 25 is fixed and the rotary shaft 24 is rotatably held are provided.

  A grinding water supply path 24a is formed inside the rotary shaft 24 so as to penetrate in the axial direction (Z-axis direction). The inlet (upper end) of the grinding water supply path 24 a is connected to the grinding water supply means 15. The outlet (lower end) of the grinding water supply passage 24 a is connected to the grinding water passage 23 a in the wheel mount 23. The outlet of the grinding water channel 23 a is open to the lower surface of the wheel mount 23. The grinding water G supplied from the grinding water supply means 15 is discharged from the lower surface of the wheel mount 23 through the grinding water supply passage 24a in the rotating shaft 24 and the grinding water passage 23b in the wheel mount 23, and It is supplied to the work surface (upper surface) Wa of the plate-like workpiece W held on the holding table 5.

  On the upper surface 4 a of the moving cover 4, a settling tank 30 having a ring-shaped recess 30 a surrounding the holding table 5 is provided. The settling tank 30 includes an outer peripheral wall 31, an inner peripheral wall 32, and a bottom plate 33. Grinding liquid containing magnetic grinding waste in the grinding water flowing down from the holding surface 5a of the holding table 5 is supplied to the recess 30a. The accumulated grinding waste is allowed to settle. The upper edge of the outer peripheral wall 31 is provided with a notch 31a having a predetermined shape at two locations facing each other on the horizontal plane.

  In the recess 30 a of the settling tank 30, a plurality (two in the illustrated example) of grinding waste holders 40 for holding grinding waste in the grinding drainage accumulated in the precipitation tank 30 are arranged.

  As shown in FIG. 2, the grinding dust holder 40 includes a sponge 41 and a magnet 42 embedded in the sponge 41. For example, the shape of the sponge 41 is a rectangular parallelepiped, and the shape of the magnet 42 is a disk shape. A cut 41a is formed in the sponge 41 from one side to the inside, and the magnet 42 is inserted into the cut 41a so that the magnet 42 is embedded in the center of the sponge 41.

  As shown in FIG. 3, a motor 27 is disposed near the lower side of the holding table 5, and the bottom surface of the holding table 5 is connected to the tip (upper end) of the shaft 28 of the motor 27. When the motor 27 is driven to rotate, the holding table 5 rotates at a predetermined rotation speed while sucking and holding the plate-like workpiece W on the holding surface 5a.

A rotating cover 46 is fixed to the outer periphery of the holding table 5. The rotary cover 46 includes a cylindrical portion 46a that is concentrically provided around the holding table 5, and an inclined portion 46b that extends obliquely downward from the upper end of the cylindrical portion 46a.
The movable cover 4 is formed with a circular opening 4c into which the holding table 5 enters in a central region thereof, and a cylindrical wall 4b surrounding the holding table 5 from the side rises from above the edge of the opening 4c. The cylindrical portion 46 a of the rotary cover 46 is in a state of entering from above between the cylindrical wall 4 b and the inner peripheral wall 32 of the sedimentation tank 30 installed on the upper surface 4 a of the moving cover 4. The outer peripheral edge (lower end) of the inclined portion 46 b of the rotation cover 46 extends into the recess 30 a of the settling tank 30. The notch 31a of the settling tank 30 and the upper surface 4a of the moving cover 4 constitute a drainage section 4D that drains the clean water of the grinding drainage stored in the settling tank 30.

  In the vicinity of one side of the holding table 5, an unloading means 50 for unloading the grinding dust holder 40 from the recess 30 a of the settling tank 30 is provided. In the vicinity of the unloading means 50, a trash box 60 for collecting the unloaded grinding waste holder 40 is provided, and an inlet 60a of the trash box 60 opens upward. The carry-out means 50 includes a gripping part 51 that grips the grinding dust holder 40 from both sides and a moving mechanism 52 that moves the gripping part 51. The moving mechanism 52 includes an elevating mechanism 53 that moves the grip portion 51 in the Z-axis direction, and a rotation mechanism 56 that rotates the grip portion 51 in the horizontal direction via the elevating mechanism 53.

  The elevating mechanism 53 includes a guide shaft 54 extending in the Z-axis direction and an elevating block 55 that moves in the Z-axis direction along the guide shaft 54 by a driving force generated by a motor or the like (not shown). A grip portion 51 is connected to the lifting block 55 via an arm member 57, and the grip portion 51 moves up and down together with the lifting block 55. The rotation mechanism 56 is connected to, for example, the upper end of the guide shaft 54, and when the rotation mechanism 56 rotates the guide shaft 54 about the axis in the Z-axis direction, the lifting block 55 and the grip portion 51 together. It rotates in the horizontal direction.

  When the elevating mechanism 53 is operated, the gripper 51 moves the gripped grinding dust holder 40 from the height position at which the grinding scrap holder 40 on the bottom plate 33 of the sedimentation tank 30 can be gripped. It is moved up and down in a range of height positions that can be conveyed beyond 31. In addition, by operating the rotation mechanism 56, the grip 51 is horizontally moved from above the settling tank 30 to above the trash can 60.

  In the grinding apparatus 1 configured as described above, as shown in FIG. 4, the plate-like workpiece W is rotated by rotating the holding table 5 holding the plate-like workpiece W by the motor 27, and the grinding feed means 10 The grinding means 20 with the grinding wheel 22 rotated is moved in the −Z direction, and the grindstone 21 of the grinding wheel 22 is brought into contact with the upper surface Wa of the plate workpiece W, whereby the entire upper surface Wa of the plate workpiece W is ground. Is done. Grinding is performed while supplying the grinding water G from the grinding water supply means 15 to the grindstone 21 and the upper surface Wa of the plate-like workpiece W.

  The grinding water G supplied to the upper surface Wa of the plate-like workpiece W becomes a grinding drainage liquid L containing magnetic grinding waste K generated by grinding, and the inclined portion of the rotary cover 46 from the holding surface 5a of the holding table 5. 46 b flows down and flows into the recess 30 a of the settling tank 30. Grinding waste K contained in the grinding waste liquid L that has flowed into the recess 30a of the settling tank 30 settles on the bottom of the recess 30a by its own weight. Of the ground drainage liquid L collected in the recess 30 a of the settling tank 30, only the clean water D that does not contain the grinding waste K flows out of the settling tank 30 beyond the notch 31 a of the outer peripheral wall 31. The clean water D flowing out of the settling tank 30 flows down onto the upper surface 4a of the moving cover 4, and then flows through a drain pipe (not shown) and is collected.

  As shown in FIG. 5, the grinding waste K precipitated in the settling tank 30 is attracted to the magnet 42 of the grinding waste holder 40 shown in FIG. And if grinding is implemented, the grinding | polishing waste holder 40 will be carried out from the sedimentation tank 30 regularly.

  At that time, as shown in FIG. 5, the unloading means 50 operates the lifting mechanism 53 from the standby position above the settling tank 30 to lower the grip 51 and holds the grinding dust installed in the settling tank 30. The tool 40 is held by the holding part 51. When the gripping part 51 grips the grinding dust holder 40, the carry-out means 50 operates the lifting mechanism 53 to raise the gripping part 51. Thereafter, as shown in FIG. 6, the carry-out means 50 operates the rotation mechanism 56 to move the gripping part 51 from above the settling tank 30 to above the trash box 60. The unloading means 50 releases the grinding dust holder 40 from being held by the gripper 51 above the garbage box 60 and drops the grinding dust holder 40 into the garbage box 60. The removal of the grinding dust holder 40 from the settling tank 30 is completed by the above steps. Thereafter, a new grinding waste holder 40 is installed in the settling tank 30.

  The grinding dust holder 40 carried out from the settling tank 30 is collected from the trash box 60 by the operator. And as shown in FIG. 7, the magnet 42 is taken out from the used sponge 41 which ensured the grinding | polishing waste K (not shown in FIG. 7). The used sponge 41 is discarded and the magnet 42 is embedded in the unused sponge 41 and reused.

  As described above, in the grinding apparatus 1 of the present embodiment, the magnetic grinding waste K that has settled in the settling tank 30 is secured by being attracted to the grinding waste holder 40 by a magnetic force. It is possible to secure K in the sedimentation tank 30 and prevent it from flowing into the drain pipe.

Moreover, since the grinding waste K secured by the grinding waste holder 40 can be taken out from the sedimentation tank 30 and discarded together with the sponge 41 filled with the grinding waste K, the grinding waste settled in the precipitation tank 30. The operation of discarding K can be easily performed.
Moreover, since the magnet 42 taken out from the used sponge 41 can be embedded in the unused sponge 41 and reused, it is economical.

  The embodiment of the present invention is not limited to the above-described embodiment, and various changes, substitutions, and modifications may be made without departing from the spirit of the technical idea of the present invention.

  For example, in the above embodiment, the shape of the sponge 41 of the grinding dust holder 40 is a rectangular parallelepiped, but may be a shape other than a rectangular parallelepiped such as a spherical shape or a cylindrical shape. The shape of the magnet 42 is not limited to a disk shape.

  In addition, the grinding apparatus 1 of the above embodiment includes the carry-out means 50 for carrying the grinding waste holder 40 out of the settling tank 30, but has a configuration without the carry-out means 50, and carries out the grinding waste holder 40. May be performed by an operator.

DESCRIPTION OF SYMBOLS 1 Grinding device 2: Equipment base 3: Column 4: Moving cover 4a: Upper surface of moving cover 4b: Cylindrical wall 4c: Opening 4D: Drainage part 5: Holding table 5a: Holding surface 10: Grinding feed means 11: Ball screw 12: Motor 13: Guide rail 14: Elevating plate 20: Grinding means 21: Grinding wheel 22: Grinding wheel 23: Wheel mount 24: Rotating shaft 25: Motor 26: Holder 15: Grinding water supply means 30: Settling tank 30a: Recessed part 31: Outer wall 31a: Notch 32: Inner peripheral wall 33: Bottom plate 40: Grinding waste holder 41: Sponge 42: Magnet 46: Rotating cover
50: Unloading means 51: Grasping part 52: Moving mechanism 53: Elevating mechanism 54: Guide shaft
55: Elevating block 56: Rotating mechanism 60: Garbage bin W: Plate work G: Grinding water K: Grinding waste L: Grinding drainage D: Clean water

Claims (1)

A holding table having a holding surface for holding a plate-like workpiece containing a magnetic body, a grinding means for grinding the plate-like workpiece held on the holding table with a grindstone, a plate-like workpiece held on the holding table, and the grindstone A grinding water supply means for supplying grinding water to
Precipitation that has a ring-shaped recess surrounding the holding table and accumulates in the recess grinding fluid draining the grinding water flowing down from the holding surface of the holding table and depositing the grinding waste. A tank, a grinding waste holder for holding the grinding waste in the grinding waste liquid collected in the settling tank, and a drainage unit for draining the ground water of the grinding waste liquid stored in the precipitation tank. ,
The grinding waste holder is constituted by a sponge and a magnet embedded in the sponge, and the grinding waste of the grinding drainage is attracted by the magnet and secured by the sponge.

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