JP2018032670A - Chip component, mounting structure of chip component, and manufacturing method of chip resistor - Google Patents
Chip component, mounting structure of chip component, and manufacturing method of chip resistor Download PDFInfo
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Abstract
【課題】本発明は、ヒートショックによるクラックを防止しつつも、端面電極の形成により表電極の端部に突部が形成されないチップ部品を提供する。【解決手段】本発明のチップ部品(1)は、直方体形状の絶縁基板(2)と、絶縁基板の表面に所定間隔を存して対向配置された一対の表電極(3)と、絶縁基板の裏面に所定間隔を存して対向配置された一対の裏電極(4)と、表電極と裏電極を橋絡する一対の端面電極(7)と、を備えている。端面電極は、表電極と接続するように絶縁基板の端面に形成された第1端面電極(8)と、第1端面電極と裏電極に接続するように絶縁基板の裏面から端面にかけて断面L字状に形成された導電性樹脂からなる第2端面電極(9)と、を有している。【選択図】図1PROBLEM TO BE SOLVED: To provide a chip component in which a protrusion is not formed at an end portion of a front electrode due to the formation of an end face electrode while preventing cracks due to heat shock. SOLUTION: The chip component (1) of the present invention has a rectangular body-shaped insulating substrate (2), a pair of front electrodes (3) arranged opposite to each other at a predetermined interval on the surface of the insulating substrate, and an insulating substrate. A pair of back electrodes (4) arranged so as to face each other at predetermined intervals on the back surface thereof, and a pair of end face electrodes (7) that bridge the front electrode and the back electrode are provided. The end face electrodes have a first end face electrode (8) formed on the end face of the insulating substrate so as to be connected to the front electrode, and an L-shaped cross section from the back surface to the end face of the insulating substrate so as to be connected to the first end face electrode and the back electrode. It has a second end face electrode (9) made of a conductive resin formed in a shape. [Selection diagram] Fig. 1
Description
本発明は、回路基板に実装されて使用されるチップ部品、チップ部品の実装構造、チップ抵抗器の製造方法に関するものである。 The present invention relates to a chip component used by being mounted on a circuit board, a mounting structure for the chip component, and a method for manufacturing a chip resistor.
チップ部品の一例であるチップ抵抗器は、直方体形状の絶縁基板と、絶縁基板の表面に所定間隔を存して対向配置された一対の表電極と、絶縁基板の裏面に所定間隔を存して対向配置された一対の裏電極と、一対の表電極に接続される抵抗体と、絶縁基板の端面に設けられて対応する表電極と裏電極を橋絡する端面電極とによって主として構成されている。 A chip resistor, which is an example of a chip component, has a rectangular parallelepiped insulating substrate, a pair of front electrodes disposed opposite to each other with a predetermined interval on the surface of the insulating substrate, and a predetermined interval on the back surface of the insulating substrate. It is mainly composed of a pair of back electrodes arranged opposite to each other, a resistor connected to the pair of front electrodes, and an end face electrode provided on the end face of the insulating substrate and bridging the corresponding front electrode and the back electrode. .
一般的に、このようなチップ抵抗器を製造する場合、格子状に延びる第1分割ラインと第2分割ラインが設定された大判基板に対して多数個分の表電極や裏電極および抵抗体を一括して形成した後、この大判基板を第1分割ラインに沿って1次分割して短冊状基板を形成し、短冊状基板の端面に端面電極を形成する。しかる後に、短冊状基板を第2分割ラインに沿って2次分割することにより、多数個のチップ抵抗器が一括して得られる。このように形成されたチップ抵抗器は、図示せぬ回路基板上に実装された状態で使用され、端面電極をランドに半田付けすることによって回路基板上に実装される(例えば、特許文献1)。 In general, when manufacturing such a chip resistor, a large number of front electrodes, back electrodes, and resistors are formed on a large substrate having a first divided line and a second divided line extending in a lattice shape. After forming in a lump, this large-sized substrate is primarily divided along a first dividing line to form a strip-shaped substrate, and an end face electrode is formed on the end surface of the strip-shaped substrate. After that, a large number of chip resistors can be obtained in a lump by dividing the strip-shaped substrate into a secondary division along the second division line. The chip resistor formed in this way is used in a state of being mounted on a circuit board (not shown), and is mounted on the circuit board by soldering the end face electrode to the land (for example, Patent Document 1). .
ところで、端面電極の形成方法には、短冊状基板の端面にNi−Cr等の導電性材料をスパッタにより薄膜形成する方法や、銀ペースト等の導電性樹脂を塗布して厚膜形成する方法が知られている。一般に、導電性樹脂を塗布して端面電極を形成する場合には、予め転写テーブルの平坦な上面に導電性樹脂ペーストを膜状に塗布しておき、この導電性樹脂ペーストに対して短冊状基板の端面を接触させる。このとき、短冊状基板の端面に接触した導電性樹脂が短冊状基板の端面から表面と裏面の双方に回り込むため、端面電極は短冊状基板の端面から表面と裏面に延びてコ字状に形成される。 By the way, as a method of forming the end face electrode, there are a method of forming a thin film by sputtering a conductive material such as Ni-Cr on the end face of the strip-shaped substrate, and a method of forming a thick film by applying a conductive resin such as silver paste. Are known. In general, when an end surface electrode is formed by applying a conductive resin, a conductive resin paste is applied in advance to the flat upper surface of a transfer table in a film shape, and a strip-shaped substrate is applied to the conductive resin paste. Touch the end face of. At this time, since the conductive resin in contact with the end surface of the strip-shaped substrate wraps around both the front surface and the back surface from the end surface of the strip-shaped substrate, the end surface electrode extends from the end surface of the strip-shaped substrate to the front and back surfaces, and is formed in a U shape Is done.
特許文献1に記載のチップ抵抗器では、導電性樹脂からなる端面電極が裏電極の全体を覆うように形成されているため、回路基板上に実装されたチップ抵抗器に対して熱環境の変化が繰り返される熱衝撃(所謂、ヒートショック)により、半田の接合部が損傷してクラックを生じることを防止することができる。しかし、導電性樹脂の塗布の際に短冊状基板の表面に回り込んだ導電性樹脂が表電極の端部で上方に突出して、表電極の端部に形成された突部によりチップ部品の上面側全体が吸盤状(凹状)となる。そうすると、吸盤状に形成されたチップ部品の上面側を吸着パッドで吸着させて回路基板にチップ部品を搭載するとき、チップ部品が吸着パッドから離れない不具合(所謂持ち帰り現象)を生じる虞がある。 In the chip resistor described in Patent Document 1, since the end electrode made of conductive resin is formed so as to cover the entire back electrode, the thermal environment changes with respect to the chip resistor mounted on the circuit board. It is possible to prevent the solder joint from being damaged and cracking due to repeated thermal shock (so-called heat shock). However, the conductive resin that wraps around the surface of the strip-shaped substrate during application of the conductive resin protrudes upward at the end of the front electrode, and the upper surface of the chip component is formed by the protrusion formed at the end of the front electrode. The entire side is sucker-like (concave). Then, when the upper surface side of the chip component formed in the suction cup shape is sucked by the suction pad and the chip component is mounted on the circuit board, there is a possibility that the chip component does not separate from the suction pad (so-called take-away phenomenon).
本発明は、このような従来技術の実情に鑑みてなされたもので、第1の目的は、ヒートショックによるクラックを防止しつつも、端面電極の形成により表電極の端部に突部が形成されないチップ部品を提供することにあり、第2の目的は、このようなチップ部品の実装構造を提供することにある。また、本発明の第3の目的は、ヒートショックによるクラックを防止しつつも、端面電極の形成により表電極の端部に突部が形成されないチップ抵抗器の製造方法を提供することにある。 The present invention has been made in view of the actual situation of the prior art, and a first object is to form a protrusion at the end of the front electrode by forming the end face electrode while preventing cracks due to heat shock. A second object is to provide a mounting structure for such a chip component. A third object of the present invention is to provide a method of manufacturing a chip resistor in which no protrusion is formed at the end of the front electrode by forming the end face electrode while preventing cracks due to heat shock.
上記の第1の目的を達成するための第1発明は、直方体形状の絶縁基板と、前記絶縁基板の表面に所定間隔を存して対向配置された一対の表電極と、前記絶縁基板の裏面に所定間隔を存して対向配置された一対の裏電極と、前記表電極と前記裏電極を橋絡する一対の端面電極と、を備えたチップ部品において、前記端面電極は、前記表電極と接続するように前記絶縁基板の端面に形成された第1端面電極と、前記第1端面電極と前記裏電極に接続するように前記絶縁基板の裏面から端面にかけて断面L字状に形成された導電性樹脂からなる第2端面電極と、を有していることを特徴とする。 According to a first aspect of the present invention for achieving the first object, a rectangular parallelepiped insulating substrate, a pair of front electrodes disposed opposite to each other at a predetermined interval on the surface of the insulating substrate, and a back surface of the insulating substrate In a chip component comprising a pair of back electrodes opposed to each other at a predetermined interval, and a pair of end surface electrodes bridging the front electrode and the back electrode, the end surface electrode includes the front electrode and A first end face electrode formed on the end face of the insulating substrate so as to be connected, and a conductor formed in an L-shaped cross section from the back face to the end face of the insulating substrate so as to be connected to the first end face electrode and the back electrode. And a second end face electrode made of a conductive resin.
第1発明では、導電性樹脂からなる第2端面電極が第1端面電極と裏電極に接続するように絶縁基板の裏面から端面にかけて断面L字状に形成されているため、端面電極の形成により表電極の端部に突部が形成されないチップ部品を提供することが可能になると共に、ヒートショックによるクラックを防止することが可能になる。 In the first invention, the second end face electrode made of conductive resin is formed in an L-shaped cross section from the back surface to the end face of the insulating substrate so as to connect to the first end face electrode and the back electrode. It is possible to provide a chip component in which no protrusion is formed at the end of the surface electrode, and it is possible to prevent cracks due to heat shock.
上記の第1の目的を達成するための第2発明は、直方体形状の絶縁基板と、前記絶縁基板の表面に所定間隔を存して対向配置された一対の表電極と、前記絶縁基板の裏面に所定間隔を存して対向配置された一対の裏電極と、前記絶縁基板の端面に前記表電極と前記裏電極を橋絡する一対の端面電極と、を備えたチップ部品において、前記表電極は、前記絶縁基板の表面に形成された表面側電極部と、この表面側電極部から前記絶縁基板の端面側に連続して延びる端面側電極部と、を有しており、前記端面電極は、前記端面側電極部と前記裏電極に接続するように前記絶縁基板の裏面から端面にかけて断面L字状に形成された導電性樹脂からなることを特徴とする。 A second invention for achieving the first object described above includes a rectangular parallelepiped insulating substrate, a pair of front electrodes opposed to the surface of the insulating substrate at a predetermined interval, and a back surface of the insulating substrate. A chip component comprising: a pair of back electrodes disposed opposite to each other with a predetermined interval; and a pair of end surface electrodes bridging the front electrode and the back electrode on an end surface of the insulating substrate. Has a surface side electrode portion formed on the surface of the insulating substrate, and an end surface side electrode portion continuously extending from the surface side electrode portion to the end surface side of the insulating substrate. The conductive substrate is made of a conductive resin having an L-shaped cross section from the back surface to the end surface of the insulating substrate so as to be connected to the end surface side electrode portion and the back electrode.
第2発明によると、導電性樹脂からなる端面電極は、絶縁基板の裏面から端面にかけて断面L字状に形成されることにより、表電極の端面側電極部と裏電極に接続し表電極の表面側電極部に到達しない構造になっているため、端面電極の形成により表電極の端部に突部が形成されないチップ部品を提供することができると共に、ヒートショックによるクラックを防止することが可能になる。 According to the second invention, the end surface electrode made of conductive resin is formed in a cross-sectional L shape from the back surface to the end surface of the insulating substrate, so that it is connected to the end surface side electrode portion and the back electrode of the front electrode and the surface of the front electrode Since it has a structure that does not reach the side electrode part, it is possible to provide a chip component in which no protrusion is formed at the end of the front electrode by forming the end face electrode, and it is possible to prevent cracking due to heat shock Become.
上記の第2の目的を達成するための発明は、上記第1発明と第2発明に係るチップ部品が回路基板に設けられたランド上に前記裏電極を対向させた状態で搭載されていることを特徴とする。 In the invention for achieving the second object described above, the chip parts according to the first invention and the second invention are mounted on the lands provided on the circuit board with the back electrode facing each other. It is characterized by.
このようにすると、絶縁基板の裏面から端面にかけて断面L字状に形成された導電性樹脂からなる端面電極によって、裏電極および端面電極とランドとの間に形成された半田の接合部が損傷してクラックを生じることを防止することができる。 In this case, the solder electrode formed between the back electrode and the end surface electrode and the land is damaged by the end surface electrode made of the conductive resin formed in an L-shaped cross section from the back surface to the end surface of the insulating substrate. It is possible to prevent cracks from occurring.
上記の第3の目的を達成するための発明は、格子状に延びる第1分割ラインと第2分割ラインが設定された大判基板の表面に複数対の表電極を形成する表電極形成工程と、前記大判基板の裏面に前記複数対の表電極に対応する位置に複数対の裏電極を形成する裏電極形成工程と、前記大判基板の表面に対をなす前記表電極に接続される抵抗体を形成する抵抗体形成工程と、前記大判基板を前記第1分割ラインに沿って分割して短冊状基板を形成する第1分割工程と、前記短冊状基板の両端面に対応する前記表電極と前記裏電極を橋絡する端面電極を形成する端面電極形成工程と、前記短冊状基板を前記第2分割ラインに沿って分割して個々のチップ素子を形成する第2分割工程と、を含み、前記端面電極形成工程は、前記表電極と接続するように前記短冊状基板の端面に第1端面電極を薄膜形成する第1端面電極形成工程と、前記短冊状基板の裏面から端面にかけて断面L字状に導電性樹脂からなる第2端面電極を厚膜形成する第2端面電極形成工程とを含んでおり、前記第2端面電極が前記裏電極と前記第1端面電極にそれぞれ接続されることを特徴とする。 The invention for achieving the above third object is a surface electrode forming step of forming a plurality of pairs of surface electrodes on the surface of a large-sized substrate in which a first divided line and a second divided line extending in a lattice shape are set, A back electrode forming step of forming a plurality of pairs of back electrodes at positions corresponding to the plurality of pairs of front electrodes on the back surface of the large substrate; and a resistor connected to the front electrodes paired with the surface of the large substrate. Forming a resistor, dividing the large substrate along the first dividing line to form a strip-shaped substrate, and forming the strip-shaped substrate with the surface electrodes corresponding to both end faces of the strip-shaped substrate; An end face electrode forming step of forming an end face electrode that bridges the back electrode, and a second dividing step of dividing the strip substrate along the second dividing line to form individual chip elements, In the end face electrode forming process, the surface electrode is connected. A first end face electrode forming step of forming a first end face electrode in a thin film on the end face of the strip substrate, and a second end face electrode made of a conductive resin in a L-shaped cross section from the back surface to the end face of the strip substrate. A second end face electrode forming step, wherein the second end face electrode is connected to the back electrode and the first end face electrode, respectively.
本発明では、第1端面電極形成工程で短冊状基板の端面に表電極と接続する第1端面電極が薄膜形成されるため、表電極の端部に突部が形成されないチップ抵抗器を提供するができると共に、第2端面電極形成工程で短冊状基板の裏面から端面にかけて断面L字状の第2端面電極が導電性樹脂により厚膜形成されるため、ヒートショックによるクラックを防止することができる。 In the present invention, since the first end face electrode connected to the front electrode is formed on the end face of the strip substrate in the first end face electrode forming step, a chip resistor is provided in which no protrusion is formed at the end of the front electrode. In addition, since the second end surface electrode having an L-shaped cross section is formed with a conductive resin from the back surface to the end surface of the strip-shaped substrate in the second end surface electrode forming step, cracks due to heat shock can be prevented. .
上記構成において、前記第2端面電極形成工程は、導電性樹脂ペーストの塗布された転写テーブルの表面に対して前記短冊状基板の端面と裏面の双方が傾斜するように前記短冊状基板を前記転写テーブルの上方に対向させ、この状態で前記短冊状基板および前記転写テーブルの何れか一方を相対的に移動させて前記短冊状基板の端面と裏面の交差する角部を前記導電性樹脂ペーストに接触させることにより、前記導電性樹脂ペーストを前記角部から前記短冊状基板の端面と裏面に回り込ませた後、前記角部を前記導電性樹脂ペーストから離反させるように構成すると、導電性樹脂ペーストが表電極の表面に回り込んで突部が形成されることを確実に防止することができる。 In the above configuration, the second end face electrode forming step transfers the strip-shaped substrate so that both the end surface and the back surface of the strip-shaped substrate are inclined with respect to the surface of the transfer table to which the conductive resin paste is applied. In this state, either one of the strip-shaped substrate and the transfer table is relatively moved so that the corner portion where the end surface and the back surface of the strip-shaped substrate intersect is in contact with the conductive resin paste. By making the conductive resin paste wrap around the end surface and the back surface of the strip-shaped substrate from the corner portion, the corner portion is separated from the conductive resin paste. It is possible to reliably prevent the protrusion from forming around the surface of the surface electrode.
なお、上記構成において、前記第1端面電極形成工程で前記短冊状基板の端面にNi−Crをスパッタして前記第1端面電極を薄膜形成した後に、前記第2端面電極形成工程で前記第1端面電極を部分的に覆うように前記導電性樹脂を塗布して前記第2端面電極を厚膜形成するものであり、前記端面電極形成工程は、前記第2端面電極形成工程の前に前記第1端面電極の表面全体に第1端面電極保護膜を薄膜形成する第1端面電極保護膜形成工程と、前記第2端面電極形成工程の後に前記第2端面電極から露出する前記第1端面電極保護膜を除去する除去工程と、を含んでいることを特徴とするものであっても良い。この構成によると、第1端面電極の表面全体に第1端面電極保護膜を薄膜形成した後に、断面L字状の第2端面電極を厚膜形成するため、第2端面電極の厚膜形成の際に行われる熱処理により第1端面電極の酸化を防止することができる。そして、第2端面電極形成工程の後に第2端面電極から露出する第1端面電極保護膜を除去するため、酸化していない第1端面電極に対して電解メッキを行うことにより第1端面電極の表面を外部電極で覆うことができる。 In the above configuration, after forming the first end face electrode in a thin film by sputtering Ni—Cr on the end face of the strip-shaped substrate in the first end face electrode forming step, the first end face electrode forming step is performed by the first end face electrode forming step. The conductive resin is applied so as to partially cover the end face electrode to form the second end face electrode in a thick film, and the end face electrode forming step is performed before the second end face electrode forming step. A first end face electrode protective film forming step of forming a first end face electrode protective film on the entire surface of the one end face electrode; and the first end face electrode protection exposed from the second end face electrode after the second end face electrode forming step. And a removing step of removing the film. According to this configuration, after forming the first end face electrode protective film as a thin film on the entire surface of the first end face electrode, the second end face electrode having an L-shaped cross section is formed as a thick film. Oxidation of the first end face electrode can be prevented by the heat treatment performed at the time. Then, in order to remove the first end face electrode protective film exposed from the second end face electrode after the second end face electrode forming step, the first end face electrode of the first end face electrode is subjected to electrolytic plating on the unoxidized first end face electrode. The surface can be covered with external electrodes.
本発明によれば、ヒートショックによるクラックを防止しつつも、端面電極の形成により表電極の端部に突部が形成されないチップ部品を提供することが可能になり、このようなチップ部品の実装構造を提供することが可能になる。また、ヒートショックによるクラックを防止しつつも、端面電極の形成により表電極の端部に突部が形成されないチップ抵抗器の製造方法を提供することが可能になる。 According to the present invention, it is possible to provide a chip component in which no protrusion is formed at the end portion of the surface electrode by forming the end face electrode while preventing cracks due to heat shock. It becomes possible to provide a structure. In addition, it is possible to provide a method for manufacturing a chip resistor in which no protrusion is formed at the end of the front electrode by forming the end face electrode while preventing cracks due to heat shock.
以下、本発明の第1の実施形態について図面を参照しながら説明する。図1に示すように、本発明の第1実施形態例に係るチップ抵抗器1は、直方体形状の絶縁基板2と、絶縁基板2の表面に所定間隔を存して対向配置された一対の表電極3と、絶縁基板2の裏面に所定間隔を存して対向配置された一対の裏電極4と、絶縁基板2の表面に一対の表電極3に接続するように形成された抵抗体5と、抵抗体5を覆う保護層6と、絶縁基板2の端面に設けられて対応する表電極3と裏電極4を橋絡する一対の端面電極7と、表電極3、裏電極4および端面電極7の各表面を覆う一対の外部電極11とによって主として構成されている。なお、図示省略されているが、保護層6はアンダーコート層とオーバーコート層の2層構造からなり、抵抗体5とアンダーコート層とに図示せぬ抵抗値調整用のトリミング溝が形成されている。 Hereinafter, a first embodiment of the present invention will be described with reference to the drawings. As shown in FIG. 1, a chip resistor 1 according to a first embodiment of the present invention includes a rectangular parallelepiped insulating substrate 2 and a pair of front and back surfaces arranged on the surface of the insulating substrate 2 at a predetermined interval. An electrode 3, a pair of back electrodes 4 opposed to each other on the back surface of the insulating substrate 2 at a predetermined interval, and a resistor 5 formed on the surface of the insulating substrate 2 so as to be connected to the pair of front electrodes 3 A protective layer 6 covering the resistor 5, a pair of end surface electrodes 7 provided on the end surface of the insulating substrate 2 to bridge the corresponding front electrode 3 and back electrode 4, and the front electrode 3, the back electrode 4 and the end surface electrode 7 and a pair of external electrodes 11 covering the respective surfaces of FIG. Although not shown, the protective layer 6 has a two-layer structure of an undercoat layer and an overcoat layer, and a trimming groove for adjusting a resistance value (not shown) is formed in the resistor 5 and the undercoat layer. Yes.
絶縁基板2は、後述する大判基板を格子状の第1分割ラインと第2分割ラインに沿って分割して多数個取りされたものであり、大判基板の主成分はアルミナを主成分とするセラミックス基板である。表電極3と裏電極4の主成分は銀であり、これら電極3,4は導電材料ペーストを大判基板にスクリーン印刷して乾燥・焼成させたものである。抵抗体5は酸化ルテニウム等の抵抗体ペーストを一対の表電極3に重なるように大判基板にスクリーン印刷して乾燥・焼成させたものである。保護層6のアンダーコート層はガラスペーストをスクリーン印刷して乾燥・焼成させたものであり、トリミング溝の形成時にレーザの熱から抵抗体5を保護するものである。保護層6のオーバーコート層はエポキシ系等の樹脂ペーストをスクリーン印刷して乾燥・焼成させたものであり、トリミング溝の形成後にアンダーコート層上に形成されて抵抗体5を外部環境から保護するものである。 The insulating substrate 2 is obtained by dividing a large substrate, which will be described later, along a first divided line and a second divided line in the form of a lattice, and a large number of large substrates are ceramics whose main component is alumina. It is a substrate. The main component of the front electrode 3 and the back electrode 4 is silver, and these electrodes 3 and 4 are obtained by screen-printing a conductive material paste on a large substrate, drying and firing. The resistor 5 is obtained by screen-printing a resistor paste such as ruthenium oxide on a large substrate so as to overlap the pair of front electrodes 3, drying and firing. The undercoat layer of the protective layer 6 is a glass paste screen-printed, dried and fired, and protects the resistor 5 from the heat of the laser when the trimming groove is formed. The overcoat layer of the protective layer 6 is obtained by screen-printing an epoxy-based resin paste, drying and baking, and is formed on the undercoat layer after the formation of the trimming groove to protect the resistor 5 from the external environment. Is.
端面電極7は、表電極3と裏電極4に接続するように絶縁基板2の端面に薄膜形成された第1端面電極8と、第1端面電極8の表面下部に薄膜形成された第1端面電極保護膜10と、第1端面電極8と裏電極4に接続するように絶縁基板2の裏面から端面にかけて断面L字状に厚膜形成された第2端面電極9と、を有している。 The end face electrode 7 includes a first end face electrode 8 formed as a thin film on the end face of the insulating substrate 2 so as to be connected to the front electrode 3 and the back electrode 4, and a first end face formed as a thin film under the surface of the first end face electrode 8. The electrode protective film 10 and the second end face electrode 9 having a thick L-shaped cross section from the back surface to the end face of the insulating substrate 2 so as to be connected to the first end face electrode 8 and the back electrode 4 are provided. .
第1端面電極8は、スパッタリングによるNi−Cr薄膜からなり、絶縁基板2の端面全体に形成されている。第1端面電極保護膜10は、スパッタリングによるCu薄膜からなり、第1端面電極8の表面下部を覆うように形成されている。第2端面電極9は、樹脂に銀を含有させた導電性樹脂ペーストを塗布して加熱硬化させたものであり、裏電極4の一部と第1端面電極保護膜10を覆うように形成されている。詳しくは後述するが、第1端面電極保護膜10は第2端面電極9の加熱硬化により第1端面電極8が酸化することを防止するためのものであり、この第1端面電極保護膜10は第2端面電極9の加熱硬化前(厚膜形成前)に第1端面電極8の表面全体に薄膜形成され、第2端面電極9の加熱硬化後(厚膜形成後)に第2端面電極9から露出する第1端面電極保護膜10が硫酸などにより除去される。 The first end face electrode 8 is made of a Ni—Cr thin film formed by sputtering, and is formed on the entire end face of the insulating substrate 2. The first end face electrode protective film 10 is made of a Cu thin film formed by sputtering, and is formed so as to cover the lower surface of the first end face electrode 8. The second end face electrode 9 is obtained by applying a conductive resin paste containing resin to silver and heat-curing, and is formed so as to cover a part of the back electrode 4 and the first end face electrode protective film 10. ing. As will be described in detail later, the first end face electrode protective film 10 is for preventing the first end face electrode 8 from being oxidized by the heat curing of the second end face electrode 9, and the first end face electrode protective film 10 is A thin film is formed on the entire surface of the first end face electrode 8 before the second end face electrode 9 is heat-cured (before the thick film is formed), and the second end face electrode 9 is formed after the second end face electrode 9 is heat-cured (after the thick film is formed). The first end face electrode protective film 10 exposed from is removed with sulfuric acid or the like.
外部電極11は、端面電極7等の表面にNi,Sn等を電解メッキして形成されたものであり、チップ抵抗器1を回路基板に表面実装する場合、この外部電極11が回路基板のランドと半田接合されるようになっている。 The external electrode 11 is formed by electrolytically plating Ni, Sn or the like on the surface of the end face electrode 7 or the like. When the chip resistor 1 is surface-mounted on the circuit board, the external electrode 11 is formed on the circuit board land. And soldered together.
次に、上述のごとく構成されたチップ抵抗器1の製造方法について、図2〜図6を用いて説明する。なお、図2(a)〜(e)は大判基板と短冊状基板を示す平面図であり、図3(a)〜(e)は図2のA−A線に沿う断面図である。また、図4(a)〜(d)は短冊状基板に施す第1端面電極および第2端面電極の形成工程を示す断面図であって、図5は第2端面電極の形成工程に用いられる保持具と転写テーブルの斜視図であり、図6は第2端面電極の形成工程を示した図である。 Next, a manufacturing method of the chip resistor 1 configured as described above will be described with reference to FIGS. 2A to 2E are plan views showing a large-sized substrate and a strip-shaped substrate, and FIGS. 3A to 3E are cross-sectional views taken along line AA in FIG. FIGS. 4A to 4D are cross-sectional views showing a process of forming the first end face electrode and the second end face electrode applied to the strip-shaped substrate, and FIG. 5 is used for the process of forming the second end face electrode. FIG. 6 is a perspective view of a holder and a transfer table, and FIG. 6 is a diagram illustrating a process of forming a second end face electrode.
まず、図2(a),図3(a)に示すように、絶縁基板2が多数個取りされる大判基板20を準備する。この大判基板20には予め格子状に延びる第1分割ライン21と第2分割ライン22が設定されており、両分割ライン21,22によって区切られたマス目の1つ1つが1個分のチップ形成領域となる。 First, as shown in FIGS. 2 (a) and 3 (a), a large substrate 20 on which a large number of insulating substrates 2 are taken is prepared. The large substrate 20 is provided with a first dividing line 21 and a second dividing line 22 that extend in a lattice shape in advance, and each of the squares divided by both the dividing lines 21 and 22 corresponds to one chip. It becomes a formation area.
次に、図2(b),図3(b)に示すように、大判基板20の表面に設定された第1分割ライン21に重なるように、大判基板20の表面にAg−Pdペーストをスクリーン印刷して乾燥させることによって未焼成の表電極3を複数形成する。表電極の形成と同様に、大判基板20の裏面にAgペーストをスクリーン印刷して乾燥させることによって、表電極群の形成位置と対応する位置に未焼成の裏電極4を複数形成する。しかる後に、表電極3と裏電極4を850℃程度の高温で焼成する。これにより、大判基板20の表面と裏面にそれぞれ焼成された表電極3と裏電極4が形成される。なお、表電極と裏電極の形成順序を逆にすることも可能であり、大判基板20の裏面に複数の裏電極を形成した後に、大判基板20の表面に複数の表電極を形成する製造方法であっても良い。 Next, as shown in FIGS. 2 (b) and 3 (b), Ag-Pd paste is screened on the surface of the large substrate 20 so as to overlap the first dividing line 21 set on the surface of the large substrate 20. A plurality of unfired front electrodes 3 are formed by printing and drying. Similar to the formation of the front electrode, Ag paste is screen-printed on the back surface of the large-sized substrate 20 and dried to form a plurality of unfired back electrodes 4 at positions corresponding to the formation positions of the front electrode group. Thereafter, the front electrode 3 and the back electrode 4 are fired at a high temperature of about 850 ° C. Thereby, the surface electrode 3 and the back electrode 4 which were baked on the surface and the back surface of the large-sized substrate 20, respectively, are formed. In addition, it is also possible to reverse the formation order of the front electrode and the back electrode, and after forming a plurality of back electrodes on the back surface of the large-sized substrate 20, a method for forming a plurality of front electrodes on the surface of the large-sized substrate 20 It may be.
次に、図2(c),図3(c)に示すように、大判基板20の表面に酸化ルテニウム等の抵抗体ペーストをスクリーン印刷して乾燥させることにより、各チップ領域に未焼成の抵抗体5を形成した後に、抵抗体5を850℃程度の高温で焼成する。これにより、大判基板20の表面に対をなす表電極3に接続される抵抗体5が形成される。 Next, as shown in FIG. 2C and FIG. 3C, a resistor paste such as ruthenium oxide is screen-printed on the surface of the large-sized substrate 20 and dried. After the body 5 is formed, the resistor 5 is fired at a high temperature of about 850 ° C. Thereby, the resistor 5 connected to the surface electrode 3 which makes a pair on the surface of the large format substrate 20 is formed.
次に、図2(d),図3(d)に示すように、抵抗体5を覆う領域にガラスペーストをスクリーン印刷した後、このガラスペーストを600℃程度の高温で焼成することにより、抵抗体5を覆う保護層6のアンダーコート層を形成する。 Next, as shown in FIGS. 2D and 3D, after the glass paste is screen-printed on the region covering the resistor 5, the glass paste is fired at a high temperature of about 600 ° C. An undercoat layer of the protective layer 6 covering the body 5 is formed.
次に、図示は省略するが、抵抗体5および保護層6のアンダーコート層にレーザ光を照射して目標抵抗値となるようにトリミング溝を形成し、次工程で、アンダーコート層やトリミング溝を覆うようにエポキシ系等の樹脂ペーストをスクリーン印刷した後、この樹脂ペーストを200℃程度の低温で加熱硬化させることにより、保護層6のオーバーコート層を形成する。 Next, although illustration is omitted, the undercoat layer of the resistor 5 and the protective layer 6 is irradiated with laser light to form a trimming groove so as to have a target resistance value. In the next step, the undercoat layer and the trimming groove are formed. After an epoxy resin paste is screen-printed so as to cover the resin paste, the overcoat layer of the protective layer 6 is formed by heat curing the resin paste at a low temperature of about 200 ° C.
ここまでの工程は多数個取り用の大判基板20に対する一括処理であるが、次の工程では、大判基板20を第1分割ライン21に沿って短冊状に分割するという1次ブレーク加工を行う。これにより、図2(e),図3(e)に示すように、複数個分のチップ領域が設けられた短冊状基板23を得る。 The process up to this point is a batch process for the large-sized substrate 20 for taking a large number of pieces. In the next step, a primary break process is performed in which the large-sized substrate 20 is divided into strips along the first dividing line 21. As a result, as shown in FIGS. 2E and 3E, a strip-shaped substrate 23 provided with a plurality of chip regions is obtained.
続いて、短冊状基板に施される端面電極の形成工程を図4〜図6を用いて説明する。まず、図4(a)に示すように、短冊状基板23の端面(分割面)にNi−Crをスパッタリングすることにより、表電極3と裏電極4を橋絡する第1端面電極8を薄膜形成する(第1端面電極形成工程)。 Then, the formation process of the end surface electrode given to a strip-shaped board | substrate is demonstrated using FIGS. First, as shown in FIG. 4A, the first end face electrode 8 bridging the front electrode 3 and the back electrode 4 is thinned by sputtering Ni—Cr on the end face (divided face) of the strip-shaped substrate 23. Form (first end face electrode forming step).
次に、図4(b)に示すように、第1端面電極8の表面全体にCuをスパッタリングすることにより第1端面電極保護膜10を薄膜形成する(保護膜形成工程)。本実施形態例では、保護膜形成工程は第2端面電極9を形成する第2端面電極形成工程の前に行われ、この保護膜形成工程で薄膜形成された第1端面電極保護膜10の一部は第2端面電極形成工程の後に除去される。 Next, as shown in FIG. 4B, the first end face electrode protective film 10 is formed into a thin film by sputtering Cu on the entire surface of the first end face electrode 8 (protective film forming step). In the present embodiment, the protective film forming step is performed before the second end surface electrode forming step for forming the second end surface electrode 9, and one of the first end surface electrode protective films 10 formed into a thin film in this protective film forming step. The portion is removed after the second end face electrode forming step.
次に、図4(c)に示すように、短冊状基板23の裏面から端面にかけて断面L字状に第2端面電極9を厚膜形成する(第2端面電極形成工程)。この第2端面電極形成工程について図5および図6を参照しながら説明する。 Next, as shown in FIG.4 (c), the 2nd end surface electrode 9 is formed into a thick film from the back surface to the end surface of the strip-shaped board | substrate 23 in cross-sectional L shape (2nd end surface electrode formation process). The second end face electrode forming step will be described with reference to FIGS.
本実施形態例に係る第2端面電極形成工程では、図5に示すような保持具30と転写テーブル40を使用して短冊状基板23に第2端面電極9を形成するようになっている。転写テーブル40の上面には第2端面電極9の材料である導電性樹脂ペースト41が膜状に塗布されている。 In the second end face electrode forming step according to this embodiment, the second end face electrode 9 is formed on the strip-shaped substrate 23 using the holder 30 and the transfer table 40 as shown in FIG. On the upper surface of the transfer table 40, a conductive resin paste 41, which is a material of the second end face electrode 9, is applied in a film shape.
保持具30は互いに平行に対向する板状部分を有し、これら板状部分の間に転写テーブル40が上下方向(図5の矢印Z1−Z2方向)へ移動可能に配置されている。保持具30には上端を開放した複数の溝部30aが図5の矢印X1−X2方向に沿って一定間隔おきに設けられている。溝部30aは転写テーブル40の表面に対し傾斜しており、溝部30aの溝幅Wは短冊状基板23の板厚tに比べて幅広に設定されている。これら相対向する溝部30a内に短冊状基板23の表面がX1方向に臨むように短冊状基板23の長手方向両端部が挿入・保持される。 The holder 30 has plate-like portions facing each other in parallel, and the transfer table 40 is disposed between these plate-like portions so as to be movable in the vertical direction (the direction of arrows Z1-Z2 in FIG. 5). The holder 30 is provided with a plurality of groove portions 30a whose upper ends are opened at regular intervals along the direction of arrows X1-X2 in FIG. The groove portion 30 a is inclined with respect to the surface of the transfer table 40, and the groove width W of the groove portion 30 a is set wider than the plate thickness t of the strip-shaped substrate 23. Both ends in the longitudinal direction of the strip-shaped substrate 23 are inserted and held so that the surface of the strip-shaped substrate 23 faces the X1 direction in the opposed groove portions 30a.
なお、図5には1本の短冊状基板23を溝部30aに挿入した状態が示されているが、実際は、複数本の短冊状基板23の長手方向両端部をそれぞれ溝部30aに挿入することにより、保持具30に複数本の短冊状基板23が一定間隔おきに保持されるようになっている。 FIG. 5 shows a state in which one strip-shaped substrate 23 is inserted into the groove 30a, but in actuality, by inserting both longitudinal ends of the plurality of strip-shaped substrates 23 into the groove 30a, respectively. A plurality of strip-shaped substrates 23 are held by the holder 30 at regular intervals.
図6(a)に示すように、溝部30a内に短冊状基板23の長手方向両端部が保持されると、短冊状基板23の端面が溝部30aの底面に保持されると共に、短冊状基板23の裏面が溝部30aの図示右側面で保持される。これにより、短冊状基板23の端面と裏面の双方が転写テーブル40の表面に対して傾斜した状態となる。このとき、転写テーブル40が図5の矢印Z2方向の下降位置で停止しており、短冊状基板23の端面と裏面の交差する角部23aは転写テーブル40上の導電性樹脂ペースト41から矢印Z1方向に離反している。 As shown in FIG. 6A, when both ends in the longitudinal direction of the strip-shaped substrate 23 are held in the groove portion 30a, the end surface of the strip-shaped substrate 23 is held on the bottom surface of the groove portion 30a and the strip-shaped substrate 23. Is held by the right side of the groove 30a in the figure. As a result, both the end surface and the back surface of the strip-shaped substrate 23 are inclined with respect to the surface of the transfer table 40. At this time, the transfer table 40 is stopped at the lowered position in the direction of the arrow Z2 in FIG. 5, and the corner 23a where the end surface and the back surface of the strip substrate 23 intersect each other is from the conductive resin paste 41 on the transfer table 40 to the arrow Z1. It is separated in the direction.
短冊状基板23の角部23aが導電性樹脂ペースト41から離反している状態で転写テーブル40をZ1方向へ駆動して上昇位置まで移動させると、図6(b)に示すように、角部23aが導電性樹脂ペースト41に接触する。このとき、導電性樹脂ペースト41が角部23aから短冊状基板23の端面と裏面に回り込む。しかる後に、転写テーブル40を下降位置に戻すことにより、角部23aを導電性樹脂ペースト41から離反させる。そして、短冊状基板23を保持具30の溝部30aから抜き取って上下反転し、短冊状基板23の反対側の角部23aにも同様の手順で導電性樹脂ペースト41を接触させる。そして、図示省略するが、短冊状基板23の裏面から端面にかけて断面L字状に塗布された導電性樹脂ペースト41を乾燥させた後に200℃程度で加熱硬化する。これにより、短冊状基板23に断面L字状の第2端面電極9が厚膜形成される。このときの加熱により、第1端面電極保護膜10の表面が酸化する。 When the transfer table 40 is driven in the Z1 direction and moved to the raised position while the corner 23a of the strip-shaped substrate 23 is separated from the conductive resin paste 41, as shown in FIG. 23 a contacts the conductive resin paste 41. At this time, the conductive resin paste 41 wraps around the end surface and the back surface of the strip-shaped substrate 23 from the corner portion 23a. Thereafter, the corner 23a is separated from the conductive resin paste 41 by returning the transfer table 40 to the lowered position. Then, the strip-shaped substrate 23 is extracted from the groove 30 a of the holder 30 and turned upside down, and the conductive resin paste 41 is brought into contact with the corner 23 a on the opposite side of the strip-shaped substrate 23 in the same procedure. And although illustration is abbreviate | omitted, after drying the conductive resin paste 41 apply | coated to the cross-section L-shape from the back surface to the end surface of the strip-shaped board | substrate 23, it heat-hardens at about 200 degreeC. As a result, the second end face electrode 9 having an L-shaped cross section is formed in a thick film on the strip-shaped substrate 23. The surface of the first end face electrode protective film 10 is oxidized by the heating at this time.
図4に説明を戻し、第2端面電極形成工程の後に第2端面電極9から露出する第1端面電極保護膜10を濃度が5%程度の硫酸で酸処理すると(酸化膜除去工程)、図4(d)に示すように、第1端面電極8と第2端面電極9の間に第1端面電極保護膜10が介在した状態となる。なお、図4(d)は、第2端面電極9から露出する第1端面電極保護膜10が全て除去された状態を示しているが、後述の外部電極形成工程において、第1端面電極8の表面に対して行われる電解メッキにより外部電極11を形成可能であることを前提に、第2端面電極9の加熱硬化時に形成された第1端面電極保護膜10の酸化膜が除去されていればよく、酸化膜除去工程で第2端面電極9から露出する第1端面電極保護膜10が全て除去されなくとも良い。 Returning to FIG. 4, when the first end face electrode protective film 10 exposed from the second end face electrode 9 is acid-treated with sulfuric acid having a concentration of about 5% after the second end face electrode forming step (oxide film removing step). As shown in FIG. 4D, the first end face electrode protective film 10 is interposed between the first end face electrode 8 and the second end face electrode 9. 4D shows a state in which all of the first end face electrode protective film 10 exposed from the second end face electrode 9 has been removed. In the external electrode forming step described later, On the premise that the external electrode 11 can be formed by electrolytic plating performed on the surface, if the oxide film of the first end face electrode protective film 10 formed during the heat curing of the second end face electrode 9 is removed The first end face electrode protective film 10 exposed from the second end face electrode 9 may not be completely removed in the oxide film removing process.
そして、表電極3と裏電極4および端面電極7にNi,Sn等を電解メッキして一対の外部電極11を形成した後、短冊状基板23を第2分割ライン22に沿って分割するという2次ブレーク加工を行うことにより、図1に示すチップ抵抗器1が完成する。 Then, the front electrode 3, the back electrode 4, and the end face electrode 7 are electrolytically plated with Ni, Sn, etc. to form a pair of external electrodes 11, and then the strip-shaped substrate 23 is divided along the second dividing line 22. By performing next break machining, the chip resistor 1 shown in FIG. 1 is completed.
上述のごとく製造されたチップ抵抗器1は、図7に示すように、チップ抵抗器1の上面を図示せぬ吸着パッドで吸着させて回路基板50に設けられたランド51上に搭載されて半田付けで表面実装される。具体的には、ランド51上に半田ペーストを形成した後、裏電極4をランド51に対向させた状態でチップ抵抗器1を半田ペースト上に搭載する。そして、チップ抵抗器1が搭載された回路基板50をリフロー炉に搬入して半田ペーストを溶融・固化させることにより、裏電極4とランド51との間に半田52が形成されると共に、端面電極7とランド51との間にフィレット状の半田52が形成される。 As shown in FIG. 7, the chip resistor 1 manufactured as described above is mounted on a land 51 provided on the circuit board 50 by adsorbing the upper surface of the chip resistor 1 with a suction pad (not shown) and soldering. Surface mounted by attaching. Specifically, after the solder paste is formed on the land 51, the chip resistor 1 is mounted on the solder paste with the back electrode 4 facing the land 51. Then, the circuit board 50 on which the chip resistor 1 is mounted is carried into a reflow furnace, and the solder paste is melted and solidified, whereby the solder 52 is formed between the back electrode 4 and the land 51, and the end face electrode A fillet-like solder 52 is formed between 7 and the land 51.
以上のように、本実施形態例では、第1端面電極8が表電極3と接続するように絶縁基板2の端面に薄膜形成されているため、端面電極の形成により表電極の端部に突部が形成されないチップ抵抗器を提供するができる。これにより、チップ抵抗器の上面側を吸着パッドで吸着させて回路基板にチップ抵抗器を搭載するとき、チップ抵抗器が吸着パッドから離れない不具合を解消することができる。 As described above, in the present embodiment example, since the first end face electrode 8 is formed as a thin film on the end face of the insulating substrate 2 so as to be connected to the front electrode 3, the end face electrode is formed to protrude from the end of the front electrode. A chip resistor in which no part is formed can be provided. Thereby, when the chip resistor is mounted on the circuit board by adsorbing the upper surface side of the chip resistor with the suction pad, the problem that the chip resistor is not separated from the suction pad can be solved.
また、本実施形態例では、第2端面電極9が第1端面電極8と裏電極4に接続するように絶縁基板2の裏面から端面にかけて断面L字状に導電性樹脂により厚膜形成されているため、回路基板上に実装されたチップ抵抗器に対するヒートショックにより、半田の接合部が損傷してクラックが生じることを防止することができる。 In this embodiment, the second end face electrode 9 is formed of a conductive resin in a L-shaped cross section from the back surface to the end face of the insulating substrate 2 so as to be connected to the first end face electrode 8 and the back electrode 4. Therefore, it is possible to prevent the solder joint from being damaged and cracking due to the heat shock to the chip resistor mounted on the circuit board.
そして、本実施形態例に係る端面電極形成工程は、表電極3と接続するように短冊状基板23の端面に第1端面電極8を薄膜形成する第1端面電極形成工程と、短冊状基板23の裏面から端面にかけて断面L字状に導電性樹脂からなる第2端面電極9を厚膜形成する第2端面電極形成工程とを含んでおり、第2端面電極9が裏電極4と第1端面電極8にそれぞれ接続されるため、端面電極の形成により表電極の端部に突部が形成されないチップ抵抗器の製造方法を提供することができると共に、ヒートショックによるクラックの発生を防止することができる。 The end face electrode forming step according to the present embodiment includes a first end face electrode forming step in which the first end face electrode 8 is formed as a thin film on the end face of the strip substrate 23 so as to be connected to the surface electrode 3, and the strip substrate 23. A second end face electrode forming step of forming a second end face electrode 9 made of a conductive resin in a L-shaped cross section from the back face to the end face. The second end face electrode 9 includes the back electrode 4 and the first end face. Since it is connected to the electrode 8 respectively, it is possible to provide a chip resistor manufacturing method in which no protrusion is formed at the end of the front electrode by forming the end face electrode, and to prevent the occurrence of cracks due to heat shock. it can.
さらに、第2端面電極形成工程は、導電性樹脂ペースト41の塗布された転写テーブル40の表面に対して短冊状基板23の端面と裏面の双方が傾斜するように短冊状基板23を転写テーブル40の上方に対向させ、この状態で転写テーブル40を移動させて短冊状基板23の端面と裏面の交差する角部23aを導電性樹脂ペースト41に接触させることにより、導電性樹脂ペースト41を角部23aから短冊状基板23の端面と裏面に回り込ませた後、角部23aを導電性樹脂ペースト41から離反させるため、導電性樹脂が表電極3の表面に回り込んで表電極3の端部に突部が形成されることを確実に防止することができる。 Further, in the second end face electrode forming process, the strip-shaped substrate 23 is transferred to the transfer table 40 so that both the end surface and the back surface of the strip-shaped substrate 23 are inclined with respect to the surface of the transfer table 40 to which the conductive resin paste 41 is applied. In this state, the transfer table 40 is moved so that the corner 23a where the end surface and the back surface of the strip-shaped substrate 23 intersect with the conductive resin paste 41 is brought into contact with the conductive resin paste 41. 23a, the conductive resin wraps around the surface of the front electrode 3 to reach the end of the front electrode 3 in order to separate the corner 23a from the conductive resin paste 41. It is possible to reliably prevent the protrusions from being formed.
次に、本発明の第2実施形態例に係るチップ抵抗器について図8を用いて説明する。第2実施形態例に係るチップ抵抗器61は、第1実施形態例に係るチップ抵抗器1と比較すると、図8に示すように、端面電極67は、表電極63と接続するように絶縁基板62の端面に薄膜形成された第1端面電極68と、第1端面電極68と裏電極64に接続するように絶縁基板62の裏面から端面にかけて断面L字状に厚膜形成された導電性樹脂からなる第2端面電極69と、を有しており、第2端面電極69が裏電極64と第1端面電極68にそれぞれ接続されている点で共通しているが、第1端面電極68が第2端面電極69の表面に薄膜形成されている点と、第1端面電極68に第1端面電極保護膜が形成されていない点で相違する。 Next, a chip resistor according to a second embodiment of the present invention will be described with reference to FIG. Compared with the chip resistor 1 according to the first embodiment, the chip resistor 61 according to the second embodiment is an insulating substrate so that the end surface electrode 67 is connected to the surface electrode 63 as shown in FIG. A first end face electrode 68 formed in a thin film on the end face of 62, and a conductive resin formed in a thick L-shaped section from the back face to the end face of the insulating substrate 62 so as to be connected to the first end face electrode 68 and the back electrode 64 The second end face electrode 69 is common, and the second end face electrode 69 is connected to the back electrode 64 and the first end face electrode 68, respectively. The difference is that a thin film is formed on the surface of the second end face electrode 69 and that the first end face electrode protective film is not formed on the first end face electrode 68.
具体的には、端面電極形成工程において、まず、保持具30と転写テーブル40を使用して短冊状基板の角部に導電性樹脂ペーストを接触させて加熱硬化することにより、短冊状基板の端面の一部および裏電極64の一部に第2端面電極69を断面L字状に厚膜形成した後に、第2端面電極69の側面を覆うように短冊状基板の端面全体にNi−Crをスパッタして第1端面電極68を薄膜形成する。このようにすると、第2端面電極69の加熱硬化の際に第1端面電極68が形成されていないため、第1端面電極68が酸化することはない。このため、第2実施形態例では、第1実施形態例のように第1端面電極保護膜10を形成する必要がなく、その結果、第1実施形態例に比べて少ない工程で端面電極を形成することができる。なお、第2実施形態例に係るチップ抵抗器61が第1実施形態例に係るチップ抵抗器の奏する効果、すなわち、ヒートショックによるクラックを防止しつつも、端面電極の形成により表電極の端部に突部が形成されないという効果を奏することは言うまでもない。 Specifically, in the end face electrode forming step, first, the conductive resin paste is brought into contact with the corners of the strip-shaped substrate by using the holder 30 and the transfer table 40 and is cured by heating, whereby the end surface of the strip-shaped substrate is obtained. After forming the second end face electrode 69 thickly in a L-shaped cross section on a part of the back electrode 64 and a part of the back electrode 64, Ni—Cr is applied to the entire end face of the strip-shaped substrate so as to cover the side face of the second end face electrode 69. A first end face electrode 68 is formed into a thin film by sputtering. In this case, since the first end face electrode 68 is not formed when the second end face electrode 69 is heat-cured, the first end face electrode 68 is not oxidized. For this reason, in the second embodiment, it is not necessary to form the first end face electrode protective film 10 as in the first embodiment, and as a result, the end face electrodes are formed with fewer steps than in the first embodiment. can do. Note that the chip resistor 61 according to the second embodiment example has the effect of the chip resistor according to the first embodiment example, that is, the end portion of the surface electrode is formed by forming the end face electrode while preventing cracks due to heat shock. Needless to say, there is an effect that no protrusion is formed.
続いて、本発明の第3実施形態例に係るチップ抵抗器について図9を用いて説明する。第3実施形態例に係るチップ抵抗器81は、第1および第2実施形態例に係るチップ抵抗器と比較すると、図9に示すように、絶縁基板82の表面と端面との境界にテーパ状の特定面82aが形成され、表電極83は、絶縁基板82の表面に形成された表面側電極部83aと、この表面側電極部83aから絶縁基板82の端面側に連続して延びて特定面82aを覆うように形成された端面側電極部83bと、を有しており、導電性樹脂により形成された端面電極87は、端面側電極部83bと裏電極84に接続するように絶縁基板82の裏面から端面にかけて断面L字状に厚膜形成されている点で相違する。 Next, a chip resistor according to a third embodiment of the present invention will be described with reference to FIG. As shown in FIG. 9, the chip resistor 81 according to the third embodiment is tapered at the boundary between the surface and the end surface of the insulating substrate 82, as compared with the chip resistor according to the first and second embodiments. The surface electrode 83 is formed on the surface of the insulating substrate 82. The surface electrode 83a is formed on the surface of the insulating substrate 82, and the surface electrode 83a continuously extends from the surface electrode portion 83a to the end surface of the insulating substrate 82. An end surface side electrode portion 83b formed so as to cover 82a, and the end surface electrode 87 formed of a conductive resin is connected to the end surface side electrode portion 83b and the back electrode 84 so as to be connected to the insulating substrate 82. Is different in that a thick film is formed in an L-shaped cross section from the back surface to the end surface.
具体的には、大判基板の表面にあらかじめ第1分割ラインとして楔状の1次分割溝が設けられており、この1次分割溝に重なるように複数対の表電極を形成すると、表電極が大判基板の表面から1次分割溝の内部に流れ込む。そして、大判基板を1次分割溝に沿って短冊状基板に分割すると、1次分割溝が2分されて短冊状基板の端面上部にテーパ状の特定面82aが形成される。その結果、1次分割溝内に流れ込んだ表電極が2分されて、短冊状基板の表面を覆う表面側電極部83aと、表面側電極部83aから短冊状基板の端面側に連続して延びる端面側電極部83bとからなる表電極83が形成される。しかる後に、第1および第2実施形態例と同様に、短冊状基板の端面と裏面の交差する角部に導電性樹脂ペーストを接触させることにより、端面側電極部83bに接続して表面側電極部83aに到達していない断面L字状の端面電極87を形成する。そして、短冊状基板を第2分割ラインに沿って分割することにより、表面側電極部83aが絶縁基板82の表面を覆い、端面側電極部83bが特定面82aを覆う構成となる。このようにすると、第1および第2実施形態例のように、短冊状基板の端面にNi−Crをスパッタして第1端面電極を薄膜形成する必要がない。よって、第3実施形態例に係るチップ抵抗器は、ヒートショックによるクラックを防止しつつも、端面電極の形成により表電極の端部に突部が形成されないという効果を奏すると共に、端面電極形成工程を簡素化することができるという効果をも奏し得る。 Specifically, a wedge-shaped primary dividing groove is provided in advance as a first dividing line on the surface of the large substrate, and when a plurality of pairs of surface electrodes are formed so as to overlap the primary dividing groove, the surface electrodes are formed in a large format. It flows into the primary dividing groove from the surface of the substrate. Then, when the large substrate is divided into strip-shaped substrates along the primary dividing grooves, the primary dividing grooves are divided into two, and a tapered specific surface 82a is formed on the upper end surface of the strip-shaped substrate. As a result, the surface electrode that has flowed into the primary dividing groove is divided into two, and the surface-side electrode portion 83a that covers the surface of the strip-shaped substrate, and continuously extends from the surface-side electrode portion 83a to the end surface side of the strip-shaped substrate. A front electrode 83 including the end face side electrode portion 83b is formed. Thereafter, as in the first and second embodiments, the conductive resin paste is brought into contact with the corner portion where the end surface and the back surface of the strip-shaped substrate intersect, thereby connecting to the end surface side electrode portion 83b and the surface side electrode. An end face electrode 87 having an L-shaped cross section that does not reach the portion 83a is formed. Then, by dividing the strip-shaped substrate along the second dividing line, the surface side electrode portion 83a covers the surface of the insulating substrate 82, and the end surface side electrode portion 83b covers the specific surface 82a. In this case, unlike the first and second embodiments, it is not necessary to form a first end face electrode thin film by sputtering Ni—Cr on the end face of the strip-like substrate. Therefore, the chip resistor according to the third embodiment has an effect that no protrusion is formed at the end of the surface electrode by forming the end face electrode while preventing cracks due to heat shock, and the end face electrode forming step The effect that can be simplified can also be produced.
なお、第1〜第3実施形態例では、導電性樹脂ペーストの塗布された転写テーブルが上下方向(図5の矢印Z1−Z2方向)へ移動することにより、短冊状基板の角部を導電性樹脂ペーストに接触させる構成になっているが、この構成に限られず、短冊状基板を保持する保持具が上下方向(図5の矢印Z1−Z2方向)へ移動することにより、短冊状基板の角部を導電性樹脂ペーストに接触させる構成であっても良い。 In the first to third embodiments, the transfer table coated with the conductive resin paste moves in the vertical direction (arrow Z1-Z2 direction in FIG. 5), so that the corners of the strip-shaped substrate are made conductive. Although it is configured to come into contact with the resin paste, the present invention is not limited to this configuration, and the corners of the strip-shaped substrate can be obtained by moving the holder that holds the strip-shaped substrate in the vertical direction (the direction of arrows Z1-Z2 in FIG. 5). The part may be in contact with the conductive resin paste.
なお、第1〜第3実施形態例では、チップ抵抗器に対して本発明を適応させているが、これに限られず、一対の表電極に接続する抵抗体の代わりに合金等のヒューズエレメントが用いられているヒューズ抵抗器に対しても本発明を適応させることが可能である。 In the first to third embodiments, the present invention is applied to the chip resistor. However, the present invention is not limited to this, and a fuse element such as an alloy is used instead of the resistor connected to the pair of front electrodes. It is possible to adapt the invention to the fuse resistors used.
1,61,81 チップ抵抗器
2,62,82 絶縁基板
3,63,83 表電極
4,64,84 裏電極
5,65,85 抵抗体
6,66,86 保護層
7,67,87 端面電極
8,68 第1端面電極
9,69 第2端面電極
10 第1端面電極保護膜
11,70,90 外部電極
20 大判基板
21 第1分割ライン
22 第2分割ライン
23 短冊状基板
30 保持具
40 転写テーブル
83a 表面側電極部
83b 端面側電極部
1, 61, 81 Chip resistor 2, 62, 82 Insulating substrate 3, 63, 83 Front electrode 4, 64, 84 Back electrode 5, 65, 85 Resistor 6, 66, 86 Protective layer 7, 67, 87 End face electrode 8, 68 First end face electrode 9, 69 Second end face electrode 10 First end face electrode protective film 11, 70, 90 External electrode 20 Large-sized substrate 21 First divided line 22 Second divided line 23 Strip-shaped substrate 30 Holder 40 Transfer Table 83a Surface side electrode part 83b End face side electrode part
Claims (5)
前記端面電極は、前記表電極と接続するように前記絶縁基板の端面に形成された第1端面電極と、前記第1端面電極と前記裏電極に接続するように前記絶縁基板の裏面から端面にかけて断面L字状に形成された導電性樹脂からなる第2端面電極と、を有していることを特徴とするチップ部品。 A rectangular parallelepiped insulating substrate, a pair of front electrodes arranged opposite to each other on the surface of the insulating substrate with a predetermined interval, and a pair of back electrodes arranged opposite to each other on the back surface of the insulating substrate with a predetermined interval In a chip component comprising a pair of end face electrodes that bridge the front electrode and the back electrode,
The end face electrode extends from the back surface to the end face of the insulating substrate so as to connect to the first end face electrode formed on the end face of the insulating substrate so as to be connected to the front electrode, and to the first end face electrode and the back electrode. And a second end face electrode made of a conductive resin having an L-shaped cross section.
前記表電極は、前記絶縁基板の表面に形成された表面側電極部と、この表面側電極部から前記絶縁基板の端面側に連続して延びる端面側電極部と、を有しており、
前記端面電極は、前記端面側電極部と前記裏電極に接続するように前記絶縁基板の裏面から端面にかけて断面L字状に形成された導電性樹脂からなることを特徴とするチップ部品。 A rectangular parallelepiped insulating substrate, a pair of front electrodes arranged opposite to each other on the surface of the insulating substrate with a predetermined interval, and a pair of back electrodes arranged opposite to each other on the back surface of the insulating substrate with a predetermined interval In a chip component comprising a pair of end surface electrodes that bridge the front electrode and the back electrode on the end surface of the insulating substrate,
The front electrode has a surface side electrode part formed on the surface of the insulating substrate, and an end surface side electrode part continuously extending from the surface side electrode part to the end surface side of the insulating substrate,
The chip part according to claim 1, wherein the end face electrode is made of a conductive resin having an L-shaped cross section from the back surface to the end face of the insulating substrate so as to be connected to the end face side electrode portion and the back electrode.
前記大判基板の裏面に前記複数対の表電極に対応する位置に複数対の裏電極を形成する裏電極形成工程と、
前記大判基板の表面に対をなす前記表電極に接続される抵抗体を形成する抵抗体形成工程と、
前記大判基板を前記第1分割ラインに沿って分割して短冊状基板を形成する第1分割工程と、
前記短冊状基板の両端面に対応する前記表電極と前記裏電極を橋絡する端面電極を形成する端面電極形成工程と、
前記短冊状基板を前記第2分割ラインに沿って分割して個々のチップ素子を形成する第2分割工程と、を含み、
前記端面電極形成工程は、前記表電極と接続するように前記短冊状基板の端面に第1端面電極を薄膜形成する第1端面電極形成工程と、前記短冊状基板の裏面から端面にかけて断面L字状に導電性樹脂からなる第2端面電極を厚膜形成する第2端面電極形成工程とを含んでおり、前記第2端面電極が前記裏電極と前記第1端面電極にそれぞれ接続されることを特徴とするチップ抵抗器の製造方法。 A surface electrode forming step of forming a plurality of pairs of surface electrodes on the surface of the large substrate on which the first division line and the second division line extending in a lattice shape are set;
A back electrode forming step of forming a plurality of pairs of back electrodes at positions corresponding to the plurality of pairs of front electrodes on the back surface of the large format substrate;
Forming a resistor connected to the surface electrode paired with the surface of the large substrate; and
A first dividing step of dividing the large substrate along the first dividing line to form a strip-shaped substrate;
An end face electrode forming step of forming an end face electrode that bridges the front electrode and the back electrode corresponding to both end faces of the strip substrate;
Dividing the strip-shaped substrate along the second dividing line to form individual chip elements, and
The end face electrode forming step includes a first end face electrode forming step of forming a first end face electrode in a thin film on the end face of the strip-like substrate so as to be connected to the front electrode, and an L-shaped cross section from the back side to the end face of the strip-like substrate. A second end face electrode forming step of forming a second end face electrode made of a conductive resin in a thick film, wherein the second end face electrode is connected to the back electrode and the first end face electrode, respectively. A manufacturing method of a chip resistor characterized by the above.
前記第2端面電極形成工程は、導電性樹脂ペーストの塗布された転写テーブルの表面に対して前記短冊状基板の端面と裏面の双方が傾斜するように前記短冊状基板を前記転写テーブルの上方に対向させ、この状態で前記短冊状基板および前記転写テーブルの何れか一方を相対的に移動させて前記短冊状基板の端面と裏面の交差する角部を前記導電性樹脂ペーストに接触させることにより、前記導電性樹脂ペーストを前記角部から前記短冊状基板の端面と裏面に回り込ませた後、前記角部を前記導電性樹脂ペーストから離反させるようにしたことを特徴とするチップ抵抗器の製造方法。 In the description of claim 4,
In the second end surface electrode forming step, the strip substrate is placed above the transfer table so that both the end surface and the back surface of the strip substrate are inclined with respect to the surface of the transfer table to which the conductive resin paste is applied. In this state, by moving either one of the strip-shaped substrate and the transfer table relative to each other and bringing the corner portion where the end surface and the back surface of the strip-shaped substrate intersect with the conductive resin paste, A method of manufacturing a chip resistor, characterized in that the conductive resin paste is made to wrap around the end surface and the back surface of the strip-shaped substrate from the corner portion, and then the corner portion is separated from the conductive resin paste. .
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