JP2016038204A - Internal shape examining sensor unit, and internal shape examining device - Google Patents

Abstract

Provided are an inner surface shape inspection sensor unit and an inner surface shape inspection device that reduce a measurement blind spot. A sensor unit 10 for inspecting an inner surface shape of a hole 71 formed in an inspection object 70, wherein a parallel ring laser beam generating unit 18 that emits a parallel ring laser beam and a parallel ring laser beam is reflected or reflected. The transmitting half mirror unit 14 and the parallel ring laser light from the half mirror unit are incident from one end and guided toward the other end, and the reflected light from the inner surface of the hole is taken in from the other end. A sensor unit including a light guide unit 15 that emits light and an imaging unit 16 that receives the reflected light that has been transmitted or reflected by the half mirror unit, and an inner surface shape inspection apparatus that includes the sensor unit are provided. [Selection] Figure 1

Description

  The present invention relates to an inner surface shape inspection sensor unit and an inner surface shape inspection device, which irradiates an inner surface of a hole formed in an inspection object with laser light, obtains image data thereof, and checks whether there is a defect on the inner surface from the image data. Is to judge.

  Conventionally, there is a technique for calculating a three-dimensional shape of an inner surface from image data obtained by irradiating an inner surface of a small-diameter tube with a ring laser beam and imaging an optical ring generated on the inner surface, and inspecting the inner surface for defects. It has been proposed (Patent Document 1).

  FIG. 5 is a schematic diagram of an imaging unit of the in-pipe shape measuring device disclosed in Patent Document 1. As shown in FIG. 5A, the imaging unit 500 of the conventional in-pipe shape measuring apparatus includes a cylindrical glass tube 501, a camera 502, and a laser beam 505 that are transparent to the laser beam 505 (ring laser beam 506). A laser light source 503 for irradiation and a conical mirror 504 are provided.

  The conical mirror 504 reflects the laser beam 505 emitted from the laser light source 503 in a direction perpendicular to the optical axis thereof to form a vertical ring laser beam 506. The vertical ring laser beam 506 exits from the side surface 501a of the cylindrical glass tube 501 and is irradiated on the inner surface of the hole. 5 has a structure in which the vertical ring laser beam 506 is emitted from the side surface 501a of the cylindrical glass tube 501.

  A region irradiated with the vertical ring laser beam 506 (also referred to as “optical ring”) is generated on the inner surface of the hole to be inspected, and the camera 502 images the region. At the time of inspection, the imaging unit 500 is inserted into the hole 507 to be inspected, and the camera 502 is moved while moving the vertical ring laser beam 506 along the depth direction (arrow P) while irradiating the inner surface of the hole 507. The light ring generated on the inner surface is imaged. And the calculating part (not shown) of the in-pipe shape measuring apparatus calculates | requires the three-dimensional shape of the said inner surface based on the image data which concern on the said optical ring.

JP 2010-223710 A

  In the technique disclosed in Patent Document 1, as shown in FIG. 5A, when ring laser light 506 is irradiated perpendicularly to the traveling direction P of the imaging unit 500, a hole 507 (bag hole) having a bottom surface is formed. When the inspection is performed, an area 510 that cannot be measured on the inner surface of the hole 507 is generated as shown in FIG.

  More specifically, the imaging unit 500 is provided with a conical mirror 504 for generating a vertical ring laser beam 506 emitted perpendicular to the traveling direction P. Due to the presence of the conical mirror 504, the top of the conical mirror 504 is separated from the end 501 b of the cylindrical glass tube 501. Therefore, even if the end 501b is brought into contact with the bottom surface 507a of the hole 507, the region 510 is not irradiated with the vertical ring laser beam 506, and there is a problem that the region becomes an unmeasurable region.

  Accordingly, an object of the present invention is to provide a sensor unit and an inner surface shape inspection device for inner surface shape inspection that reduce a non-measurable region 510 and a blind spot as in the conventional inspection of the inner surface shape of a hole.

  One embodiment of the present invention is a sensor unit for inspecting the inner surface shape of a hole formed in an inspection object, and includes a parallel ring laser beam generation unit that emits a parallel ring laser beam, and a parallel ring laser beam reflected ( (Or transmission) half mirror unit and parallel ring laser light from the half mirror unit is incident from one end and guided to the other end, and the reflected light from the inner surface of the hole is taken in from the other end and emitted to the half mirror unit There is provided a sensor unit including a light guide unit that performs an imaging unit that receives reflected light that is transmitted (or reflected) through a half mirror unit.

  Also, an embodiment of the present invention is obtained by the sensor unit, an articulated robot that inserts the sensor unit into a hole in a workpiece and moves the workpiece, a robot controller that controls the articulated robot, and an imaging unit. Provided is an inner surface shape inspection apparatus including a data operation unit that determines the presence or absence of defects in the inner surface shape of the hole based on the obtained image data.

  In the sensor unit according to an embodiment of the present invention, since there is no ring laser beam irradiated on the inner surface of the hole of the workpiece and the reflected light from the inner surface in front of the light guide, there is no measurement area and The blind spot can be reduced.

It is a schematic diagram of the inner surface shape inspection apparatus which concerns on one Embodiment. It is a mimetic diagram of a sensor unit concerning one embodiment. It is a mimetic diagram of a sensor unit concerning one embodiment. It is a conceptual diagram for demonstrating the image data which concerns on one Embodiment. It is a control flowchart of the inner surface shape inspection apparatus which concerns on one Embodiment. It is a schematic diagram of the inner surface shape inspection apparatus which concerns on a prior art. It is a schematic diagram of the inner surface shape inspection apparatus which concerns on a prior art.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings, but the present invention is not limited to the embodiments. In the drawings described below, components having the same function are denoted by the same reference numerals, and repeated description thereof may be omitted.

[Embodiment]
FIG. 1 is a schematic diagram of an inner surface shape inspection apparatus 1 according to an embodiment of the present invention, and FIGS. 2A and 2B are detailed schematic diagrams of a sensor unit 10.

  The inner surface shape inspection apparatus 1 includes an articulated robot 2, a sensor unit 10, a control device 30, and a robot controller 50. Although not shown, the control device 30 is connected to input means such as a keyboard for transmitting user instructions, display means for displaying output results, and the like.

  The articulated robot 2 moves the sensor unit 10 to a position designated by the robot controller 50 (referred to as “designated position”) in response to a control signal from the robot controller 50. Here, as shown in FIG. 1, the depth direction of the hole 71 (hole having an inner bottom surface: bag hole) of the workpiece 70 (inspection object) is defined as the Z axis, and the direction perpendicular to the depth direction is defined as the X axis. , And a coordinate having a direction perpendicular to the X axis and the Z axis as the Y axis. Then, the inner surface shape of the hole 71 can be represented by coordinate data (x, y, z).

  The sensor unit 10 includes a laser light source 11, a conical lens 12, a convex lens 13, a half mirror unit 14, an endoscope 15, a camera 16, and a correction sensor 17. The sensor unit 10 irradiates the inner surface of the hole 71 formed in the work 70 with the conical ring laser light RL, images the inner surface, generates image data thereof, and outputs the image data to the control device 30.

  The laser light source 11 is an LED laser or a spot laser, and emits laser light having a predetermined wavelength (for example, a visible region) to the top of the conical lens 12. The conical lens 12 has an apex angle of less than 90 degrees, converts the laser light from the laser light source 11 into a ring laser light RL, and directs it toward the convex lens 13. A conical mirror may be used instead of the conical lens 12. By sharply sharpening the apex of the conical lens 12, the luminance peak of the image data becomes clear and the accuracy of image analysis is improved.

  The optical axes LA of the laser light source 11, the conical lens 12, and the convex lens 13 coincide with each other, and the apex 12 a of the conical lens 12 is located on the optical axis LA and separated from the convex lens 13 by the focal length f of the convex lens 13 (that is, the convex lens). 13 focal positions). Therefore, the convex lens 13 converts the ring laser light RL from the conical lens 12 into a light beam parallel to the optical axis LA (referred to as “parallel ring laser light RL”) and makes it incident on the half mirror unit 14. Here, when the laser light source 11 and the conical lenses 12 and 13 are collectively referred to as a parallel ring laser light generation unit 18, the parallel ring laser light generation unit 18 emits the parallel ring laser light RL to the half mirror unit 14. Further, “parallel” is not limited to a state of being completely parallel to the optical axis LA, but includes a state of being substantially parallel.

  The half mirror unit 14 includes a half mirror 14a. In the arrangement of FIG. 2A, the half mirror 14a reflects the parallel ring laser light RL from the parallel ring laser light generation unit 18 toward the endoscope 15 and reflects the light toward the camera 16 reflected by the inner surface of the hole 71. Make it transparent. On the other hand, in the arrangement configuration of FIG. 2B, the half mirror 14 a transmits the parallel ring laser light RL from the parallel ring laser light generation unit 18 toward the endoscope 15 and reflects the reflected light from the inner surface of the hole 71 to the camera 16. Reflect towards

  The laser light source 11, the conical lens 12, the convex lens 13, and the half mirror unit 14 are fixed by a housing or a support member (not shown) that is transparent to the laser light so that their positions do not change. Further, the optical axes LA of the laser light source 11, the conical lens 12, and the convex lens 13 coincide with the central axis of the endoscope 15 when reflected by the half mirror 14a.

  The endoscope 15 (light guide unit) is an industrial endoscope (industrial rigid mirror), which receives parallel ring laser light from the half mirror unit 14 from one end and guides it toward the scope unit 15a at the other end. The ring laser beam is irradiated from the scope portion 15a to the inner surface of the hole 71. Further, the endoscope 15 takes in reflected light (scattered light) from the inner surface from the scope portion 15 a and emits it to the half mirror unit 14.

  The endoscope 15 includes a plurality of optical fibers or a relay lens including a plurality of lenses, and light captured from the scope unit 15a is captured by the camera 16 through the optical fibers (or relay lenses) and the half mirror 14a. Enter element 16a. In addition, when the endoscope 15 provided with a relay lens is used, a decrease in luminance of image data is reduced, and as a result, the camera 16 with high resolution (for example, 4 million pixels) can be used. The field of view of the endoscope 15 is wide enough to capture all the ring laser light RL irradiated on the inner surface of the hole 71.

  The camera 16 (imaging unit) is a CCD camera, a CMOS camera, or the like having a predetermined resolution. The reflected light from the inner surface of the hole 71 that is transmitted (or reflected) through the half mirror unit 14 is incident, and an image related to the inner surface is received. Data (luminance value of light received for each pixel of the image sensor 16a) is output as a digital signal. The camera 16 outputs image data relating to the inner surface shape of the hole 71 irradiated with the ring laser beam RL to the image memory 32 of the control device 30.

  The correction sensor 17 includes at least one of a 3-axis or 6-axis acceleration sensor and an angular velocity sensor used to improve the trajectory accuracy of the articulated robot 2, and a part of the sensor unit 10 (for example, the camera 16). Alternatively, it is fixed to the head portion of the articulated robot 2. The position of the sensor unit 10 after being moved by the multi-joint robot 2 may actually deviate from the position designated by the robot controller 50 (referred to as “designated position”). Therefore, the correction sensor 17 measures the distance and rotation amount actually moved by the sensor unit 10 and corrects the deviation between the position indicated by the robot controller 50 and the actual position of the multi-joint robot 102. Is output to the correction amount calculation unit 31 of the control device 30.

  Here, the arrangement relationship among the parallel ring laser beam generator 18, the half mirror unit 14, the endoscope 15, and the camera 16 will be described. As shown in FIG. 2A, the parallel ring laser light from the parallel ring laser light generation unit 18 is reflected by the half mirror 14a and enters the endoscope 15, and the reflected light from the inner surface of the hole 71 is transmitted through the half mirror 14a. 2B, the parallel ring laser beam from the parallel ring laser beam generator 18 passes through the half mirror 14a and passes through the endoscope 15 as shown in FIG. 2B. The arrangement configuration may be such that the reflected light from the inner surface of the hole 71 is reflected by the half mirror 14 a and is incident on the camera 16.

  The control device 30 is a computer including a CPU that executes various operations such as calculation, control, and determination based on a predetermined program, a memory for temporarily storing data, and a storage device that stores a predetermined program and the like. The control device 30 includes a correction amount calculation unit 31, a laser control unit 32, an image memory 33, and a data calculation unit 34 as functional units related to the inner surface inspection of the present embodiment.

  The correction amount calculation unit 31 calculates a correction amount for correcting a deviation between the actual position of the sensor unit 10 and the instruction intention based on a signal from the correction sensor 17, and the correction amount is calculated by the robot controller. Output to 50. In response to this, the robot controller 50 drives the articulated robot 2 to move the sensor unit 10 from the actual position to the designated position. The correction amount calculation unit 31 may correct the coordinate data (x, y, z) related to the inner surface of the hole 71 associated with the image data on the data.

  The laser control unit 32 controls the output (ON / OFF, intensity, etc.) of the laser light source 11. The image memory 33 stores the image data output from the camera 16, and the data calculation unit 34 performs predetermined processing described later on the image data to determine the presence or absence of a defect.

  Next, the outline of the inspection process of the inner surface of the sensor unit 10 inserted into the hole 71 of the workpiece 70 will be described with reference to FIG.

  The multi-joint robot 2 is inserted after moving the endoscope 15 of the sensor unit 10 to the hole 71 in accordance with a control signal from the control device 30, and moves in the depth direction Z at a constant speed V. Accordingly, the sensor unit 10 irradiates the inner surface of the hole 71 with the ring laser beam RL, images the inner surface at a predetermined time interval Δt, and generates image data. Thereafter, when the data calculation unit 34 of the control device 30 obtains a predetermined amount of image data, the data calculation unit 34 synthesizes them to generate three-dimensional image data, and divides it into a plurality of blocks. Then, the data calculation unit 34 compares the master data corresponding to each block, and if there is a part different from the master data and the size of the part exceeds a predetermined threshold, It is determined that the portion is different from the design shape due to scratches, deflection, or the like.

  Here, there is no member that blocks the ring laser beam RL to be irradiated and the reflected light from the inner surface of the hole 71 in front of the endoscope 15 (on the scope unit 15a side), and the ring laser beam RL is entirely reflected on the inner surface. The endoscope 15 can capture the reflected light from the inner surface without blind spots. Further, since the ring laser beam RL is directed obliquely forward of the endoscope 15 and there is no member to block it, the sensor unit 10 can approach and inspect near the inner bottom surface of the hole 71. Therefore, the unmeasurable area (dead angle) found in the prior art is greatly reduced.

  The image data output to the image memory 33 is stored in association with coordinate data (x, y, z) related to the inner surface of the hole 71. The z value of the coordinate data (x, y, z) is calculated from the moving speed V of the sensor unit 10 and the imaging time t by the camera (that is, z = V × t). At this time, the correction amount calculation unit 31 corrects the coordinate data (x, y, z) related to the inner surface of the hole 71, and the image data is stored in the image memory 33 in association with the corrected coordinate data. You may make it do.

  For example, as shown in FIG. 3, it is assumed that the sensor unit 10 generates image data 21 to 24 of the inner surface of the hole 71 at positions z1, z2, z3,. While moving at a constant speed V, the sensor unit 10 irradiates the inner surface of the hole 71 with ring laser light, images the inner surface at a predetermined time interval Δt, and outputs image data 21 to 24 to the image memory 33. . The data calculation unit 34 calculates coordinate data related to the inner surface shape of the hole 71 from the principle of triangulation.

For example, since the angle A of the ring laser beam RL irradiated to the inner surface of the hole 71 from the scope portion 15a at the distal end of the endoscope 15 and the distance A to the z position are constant and known, the z position is determined at time t1. Is z1 (= V × Δt), z2 (= V × Δt + z1) at time t2, and zn (= V × Δt + zn _-1 ) at time tn. Further, when the center of the endoscope 15 moves on the central axis of the hole 71, the coordinate data (x, y) relating to the inner surface of the hole 71 on the XY plane is known by design, and Coordinate data (x, y, z) related to the inner surface shape is obtained.

  The image data 21 to 24 (luminance values of each pixel) are associated with the coordinate data (x, y, z) and stored in the image memory 33. For example, the image data 21 is binarized, and pixels corresponding to the inner surface of the hole 71 have a luminance value I (for example, 1), and other pixels have a luminance value of 0. A pixel P1 having a luminance value I in the image data 21 is associated with coordinate data (x1, y1, z1) and stored as P1 (x1, y1, z1; I). Similarly, a certain pixel P2 having the luminance value I of the image data 22 is associated with the coordinate data (x2, y2, z2) and stored as P2 (x2, y2, z2; I). A certain pixel P1 having the luminance value I of the image data 23 is associated with the coordinate data (x1, y1, z3) and stored as P1 (x1, y1, z3; I), and the luminance value of the image data 24 is stored. A certain pixel Pn having 0 is stored as Pn (xn, yn, zn; 0) in association with coordinate data (xn, yn, zn).

  The data calculation unit 34 generates a three-dimensional image data 300 by combining a predetermined amount of image data (the entire inner surface of the hole 71), and divides the three-dimensional image data 300 into a plurality of blocks 301 to 303. Then, the data calculation unit 34 compares the blocks 301 to 303 with the corresponding blocks 311 to 313 of the known master data 310 that is the design value of the inner surface shape of the hole 71, and there are different parts from the master data 310. If it exists and the size of the part is greater than or equal to a predetermined threshold, the part is determined to be defective.

  The procedure for inspecting the hole 71 of the work 70 to be inspected using the inner surface shape inspection apparatus 1 configured as described above will be further described with reference to the flowchart of FIG.

  Here, the control of the processing is performed by the CPU of the control device 30 reading and executing a program for performing the processing shown in FIG. 4 stored in the storage device of the control device 30. The storage device of the control device 30 holds various pieces of information (the number of holes, the depth of the holes, the distance to the hole bottom, the interval between the holes, etc.) regarding the workpiece 70. Therefore, when the user inputs information specifying the workpiece 70 to be inspected via the input unit, the control device 30 can extract information regarding the workpiece 70 to be inspected. In addition, the robot controller 50 controls the multi-joint robot 2 so that the endoscope 15 is inserted into each hole of the workpiece at a constant speed for each type of workpiece and the endoscope 15 is moved to the bottom of the hole 71. . Further, when the robot controller 50 determines that the endoscope 15 has reached the bottom of the hole 71 by driving the articulated robot 2, the robot controller 50 transmits movement completion information to the control device 30.

  First, in step S1, a work 70 having a plurality of holes 71 formed on a substrate support is set. At this time, the control device 30 inputs an instruction on the type of the work 70 by the user, and inputs an instruction to start measurement.

  In step S <b> 2, the laser control unit 31 turns on the power of the laser light source 11 and emits laser light from the laser light source 11. The laser light is converted into parallel ring laser light RL by the conical lens 12 and the convex lens 13, and the parallel ring laser light is incident on the half mirror unit 14 and is emitted from the distal end (probe unit 15a) of the endoscope 15.

  In step S <b> 3, the control device 30 transmits information on the type of the work 70 to the robot controller 50, and the robot controller 50 receives the information to drive the articulated robot 2 and starts measuring the sensor unit 10 for the hole 71. To position. Hereinafter, when the sensor unit 10 is moved, it is assumed that the actual position is corrected by the correction amount calculation unit 31.

  In step S <b> 4, the robot controller 50 drives the articulated robot 2 to move the endoscope 15 of the sensor unit 10 in the hole 71 at a constant speed in the depth direction. At the same time, the control device 30 controls the camera 16, and the camera 16 captures an irradiation image of the ring laser light RL on the inner surface of the hole 71 at a predetermined time interval Δt, generates image data thereof, and generates an image memory 33. Output to. Each image data is stored in the image memory 33 in association with the coordinate data relating to the inner surface of the hole 71. The robot controller 50 recognizes the depth of the hole 71 (distance from the opening to the bottom) based on information from the control device 30, and keeps a constant speed until the tip of the endoscope 15 reaches the bottom of the hole 71. Continue moving in.

  In step S <b> 5, the control device 30 determines whether the endoscope 15 has reached a predetermined depth (movement amount) based on information from the robot controller 50. In other words, the control device 30 determines whether or not a predetermined amount of image data has been obtained. If not reached (No in S5), step S4 is continued. If it has reached (Yes in S5), in step S6, as in step S4, the endoscope 15 further moves toward the bottom surface in the hole 71 at a constant speed, and imaging is continued.

  In parallel with the processing in step S6, in order to inspect the image data that has already been obtained in a predetermined amount, the data calculation unit 34 synthesizes the predetermined amount of image data in step S7 to obtain the three-dimensional image data. In step S8, the three-dimensional image data is divided into a plurality of blocks. In step S9, the data calculation unit 34 compares each of the plurality of blocks with the corresponding block of master data.

  In step S10, if there is a different portion between each of the plurality of blocks and the corresponding master data block, and the size of the portion is equal to or greater than a predetermined threshold, The part is determined as a defect. At this time, if the number of portions determined to be defective in the hole 71 is equal to or greater than a predetermined value, the data calculation unit 34 determines that the hole 71 is a rejected product, and if the number is less than the threshold, the hole 71 You may make it judge that it is a pass product.

  In step S <b> 11, the control device 30 determines whether the endoscope 15 has reached the bottom of the hole 71 based on information from the robot controller 50. If the bottom has not yet been reached (No in S11), steps S4 to S11 are repeated. When the bottom is reached (Yes in S11), the laser control unit 32 turns off the power source of the laser light source 11 in Step S12. At this time, the robot controller 50 pulls out the endoscope 15 from the inspected hole 71.

  In step S <b> 13, the control device 30 determines whether all of the plurality of holes 71 of the workpiece 70 have been inspected. When all the holes 71 are not inspected (No in S13), steps S2 to S13 are repeated. When all the holes 71 have been inspected (Yes in S13), in step S14, the control device 30 performs a comprehensive determination on the work 70 (for example, determination of whether the work 70 is a defective product) and displays it. The determination result is output to a device (not shown) or the like.

  As described above, in the sensor unit 10 and the inner surface shape inspection apparatus 1 according to the present embodiment, there is no member that blocks the ring laser light RL and the reflected light in front of the endoscope 15. Therefore, the ring laser beam RL is irradiated on the entire inner surface over the periphery of the hole 71, and the endoscope 15 takes in the reflected light from the inner surface without a blind spot (dead spot 1 in FIG. 6A). be able to. In addition, since the ring laser beam RL is directed obliquely forward of the endoscope 15 and there is no member to block it, the endoscope 15 can be brought close to the inner bottom surface of the hole 71 for defect inspection. . Therefore, the non-measurable region 510 (FIG. 5) found in the prior art hardly occurs.

  Further, since the laser light source 11 is not arranged in front of the endoscope 15, it is not necessary to arrange a power supply line for the laser light source 11 in front of the endoscope 15, and a blind spot (FIG. 6A) ) Blind spot 2) does not occur.

  Further, since the laser light source 11 and the conical lens 12 are not disposed in front of the endoscope 15, a transparent cylindrical glass housing (FIG. 6) for holding them is not required in front of the endoscope 15. Furthermore, when the reflected light from the inner surface of the hole 71 is captured by the endoscope 15, light is not captured through such a glass housing, so that it is caused by the refractive index of the glass as shown in FIG. Non-uniform image distortion does not occur. As a result, the inner surface shape of the hole 71 can be measured with high accuracy, and the defect determination accuracy is improved. 6B, the reflected light 1 and reflected light 2 of the ring laser light irradiated on the inner surface of the hole of the work are directed to the endoscope through the cylindrical glass housing. Since the refractions are different from each other, they are incident on the endoscope at different angles θ1 and θ2. As a result, there is a problem that the calibration accuracy deteriorates.

  Furthermore, in this embodiment, since the part of the endoscope 15 in the sensor unit 10 is inserted into the hole 71, the size of the laser light source 11 and the conical lens 12 can be increased by using the endoscope 15 having a relatively small diameter. Without taking this into consideration, a defect inspection of the relatively small diameter hole 71 is also possible.

(Other embodiments)
In the above-described embodiment of the present invention, the conical lens 12 is used for explanation. However, the same applies when a conical mirror is used instead of the conical lens. Further, the diameter of the ring laser light RL can be adjusted by adjusting the apex angle and refractive index of the conical lens (or conical mirror) 12.

1: Inner shape inspection device, 2: Articulated robot, 10: Sensor unit, 30: Control device, 50: Robot controller, 11: Laser light source, 12: Conical lens (or conical mirror), 13: Convex lens, 14: Half Mirror unit, 15: endoscope (light guide unit), 16: camera (imaging unit), 17: correction sensor, 18: parallel ring laser beam generation unit, RL: ring laser beam, 34: data calculation unit

Claims (4)

A sensor unit for inspecting the inner shape of a hole formed in an inspection object,
A parallel ring laser beam generator that emits parallel ring laser beam;
A half mirror unit for reflecting the parallel ring laser beam;
A light guide unit that enters the parallel ring laser light from the half mirror unit from one end and guides it toward the other end, takes reflected light from the inner surface of the hole from the other end, and emits the reflected light to the half mirror unit When,
A sensor unit comprising: an imaging unit that receives the reflected light transmitted through the half mirror unit. A sensor unit for inspecting the inner shape of a hole formed in an inspection object,
A parallel ring laser beam generator that emits parallel ring laser beam;
A half mirror unit that transmits the parallel ring laser beam;
A light guide unit that enters the parallel ring laser light from the half mirror unit from one end and guides it toward the other end, takes reflected light from the inner surface of the hole from the other end, and emits the reflected light to the half mirror unit When,
A sensor unit comprising: an imaging unit that receives the reflected light reflected by the half mirror unit. The parallel ring laser beam generator is
A laser light source;
A conical lens or a conical mirror;
With a convex lens,
The optical axis of the laser light source, the optical axis of the conical lens or conical mirror, and the optical axis of the convex lens coincide with each other,
The apex of the conical lens or conical mirror is located on the optical axis and at the focal point of the convex lens;
The laser light emitted from the laser light source is converted into ring laser light by the conical lens or conical mirror, and the ring laser light is converted into the parallel ring laser light by the convex lens. The sensor unit described. The sensor unit according to any one of claims 1 to 3,
An articulated robot that inserts the sensor unit into the hole and moves in the hole;
A robot controller for controlling the articulated robot;
An inner surface shape inspection apparatus comprising: a data operation unit that determines the presence or absence of a defect in the inner surface shape of the hole based on image data obtained by the imaging unit.