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JP2014034699A - 膜製造方法 - Google Patents

膜製造方法 Download PDF

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Publication number
JP2014034699A
JP2014034699A JP2012176125A JP2012176125A JP2014034699A JP 2014034699 A JP2014034699 A JP 2014034699A JP 2012176125 A JP2012176125 A JP 2012176125A JP 2012176125 A JP2012176125 A JP 2012176125A JP 2014034699 A JP2014034699 A JP 2014034699A
Authority
JP
Japan
Prior art keywords
film
chamber
substrate
film forming
indium oxide
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2012176125A
Other languages
English (en)
Japanese (ja)
Inventor
Ryoji Chikugo
了治 筑後
Hiroyuki Makino
博之 牧野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Heavy Industries Ltd
Original Assignee
Sumitomo Heavy Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Heavy Industries Ltd filed Critical Sumitomo Heavy Industries Ltd
Priority to JP2012176125A priority Critical patent/JP2014034699A/ja
Priority to TW102117198A priority patent/TWI496919B/zh
Priority to CN201310200298.6A priority patent/CN103572208A/zh
Priority to KR1020130062239A priority patent/KR20140020182A/ko
Publication of JP2014034699A publication Critical patent/JP2014034699A/ja
Pending legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B13/00—Apparatus or processes specially adapted for manufacturing conductors or cables
    • H01B13/0026—Apparatus for manufacturing conducting or semi-conducting layers, e.g. deposition of metal
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B1/00—Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors
    • H01B1/02—Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors mainly consisting of metals or alloys
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B5/00—Non-insulated conductors or conductive bodies characterised by their form
    • H01B5/14—Non-insulated conductors or conductive bodies characterised by their form comprising conductive layers or films on insulating-supports

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Physical Vapour Deposition (AREA)
  • Manufacturing Of Electric Cables (AREA)
JP2012176125A 2012-08-08 2012-08-08 膜製造方法 Pending JP2014034699A (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2012176125A JP2014034699A (ja) 2012-08-08 2012-08-08 膜製造方法
TW102117198A TWI496919B (zh) 2012-08-08 2013-05-15 Film manufacturing method and film manufacturing apparatus
CN201310200298.6A CN103572208A (zh) 2012-08-08 2013-05-27 膜制造方法及膜制造装置
KR1020130062239A KR20140020182A (ko) 2012-08-08 2013-05-31 막제조방법 및 막제조장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2012176125A JP2014034699A (ja) 2012-08-08 2012-08-08 膜製造方法

Publications (1)

Publication Number Publication Date
JP2014034699A true JP2014034699A (ja) 2014-02-24

Family

ID=50044906

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2012176125A Pending JP2014034699A (ja) 2012-08-08 2012-08-08 膜製造方法

Country Status (4)

Country Link
JP (1) JP2014034699A (zh)
KR (1) KR20140020182A (zh)
CN (1) CN103572208A (zh)
TW (1) TWI496919B (zh)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2020037717A (ja) * 2018-09-03 2020-03-12 住友重機械工業株式会社 成膜装置、及び膜構造体の製造装置

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104313542B (zh) * 2014-10-24 2016-09-28 京东方科技集团股份有限公司 Ito层及ito图案的制作方法、显示基板及显示装置
JP6640759B2 (ja) * 2017-01-11 2020-02-05 株式会社アルバック 真空処理装置
TWI671430B (zh) * 2017-12-15 2019-09-11 日商住友重機械工業股份有限公司 成膜裝置

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4137254B2 (ja) * 1998-11-12 2008-08-20 帝人株式会社 透明導電積層体の製造方法
JP4705340B2 (ja) * 2004-06-14 2011-06-22 日本曹達株式会社 酸化インジウム膜の製造方法
JP2006152322A (ja) * 2004-11-25 2006-06-15 Central Glass Co Ltd Ｉｔｏ透明導電膜の成膜方法およびｉｔｏ導電膜付き基板
JP4882262B2 (ja) * 2005-03-31 2012-02-22 凸版印刷株式会社 透明導電膜積層体の製造方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2020037717A (ja) * 2018-09-03 2020-03-12 住友重機械工業株式会社 成膜装置、及び膜構造体の製造装置
JP7316770B2 (ja) 2018-09-03 2023-07-28 住友重機械工業株式会社 成膜装置、及び膜構造体の製造装置

Also Published As

Publication number Publication date
KR20140020182A (ko) 2014-02-18
TWI496919B (zh) 2015-08-21
CN103572208A (zh) 2014-02-12
TW201406978A (zh) 2014-02-16

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