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JP2012068032A - Ｔｃｐ試験装置 - Google Patents

Ｔｃｐ試験装置 Download PDF

Info

Publication number
JP2012068032A
JP2012068032A JP2010210578A JP2010210578A JP2012068032A JP 2012068032 A JP2012068032 A JP 2012068032A JP 2010210578 A JP2010210578 A JP 2010210578A JP 2010210578 A JP2010210578 A JP 2010210578A JP 2012068032 A JP2012068032 A JP 2012068032A
Authority
JP
Japan
Prior art keywords
tcp
probe
camera
probe pin
pad
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2010210578A
Other languages
English (en)
Japanese (ja)
Inventor
Eiji Otsuka
栄治 大塚
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tesec Corp
Original Assignee
Tesec Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=45913312&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=JP2012068032(A) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Tesec Corp filed Critical Tesec Corp
Priority to JP2010210578A priority Critical patent/JP2012068032A/ja
Priority to TW100117556A priority patent/TWI456212B/zh
Priority to CN201110140070.3A priority patent/CN102411122B/zh
Priority to KR1020110052512A priority patent/KR101238397B1/ko
Publication of JP2012068032A publication Critical patent/JP2012068032A/ja
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
    • G01R31/2887—Features relating to contacting the IC under test, e.g. probe heads; chucks involving moving the probe head or the IC under test; docking stations
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2855—Environmental, reliability or burn-in testing
    • G01R31/286—External aspects, e.g. related to chambers, contacting devices or handlers
    • G01R31/2865—Holding devices, e.g. chucks; Handlers or transport devices
    • G01R31/2867—Handlers or transport devices, e.g. loaders, carriers, trays
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N7/00—Television systems
    • H04N7/18—Closed-circuit television [CCTV] systems, i.e. systems in which the video signal is not broadcast
    • H04N7/181—Closed-circuit television [CCTV] systems, i.e. systems in which the video signal is not broadcast for receiving images from a plurality of remote sources

Landscapes

  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Environmental & Geological Engineering (AREA)
  • Multimedia (AREA)
  • Signal Processing (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Tests Of Electronic Circuits (AREA)
JP2010210578A 2010-09-21 2010-09-21 Ｔｃｐ試験装置 Pending JP2012068032A (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2010210578A JP2012068032A (ja) 2010-09-21 2010-09-21 Ｔｃｐ試験装置
TW100117556A TWI456212B (zh) 2010-09-21 2011-05-19 Ｔｃｐ測試裝置
CN201110140070.3A CN102411122B (zh) 2010-09-21 2011-05-27 Tcp测试装置
KR1020110052512A KR101238397B1 (ko) 2010-09-21 2011-05-31 티씨피 시험 장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2010210578A JP2012068032A (ja) 2010-09-21 2010-09-21 Ｔｃｐ試験装置

Publications (1)

Publication Number Publication Date
JP2012068032A true JP2012068032A (ja) 2012-04-05

Family

ID=45913312

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2010210578A Pending JP2012068032A (ja) 2010-09-21 2010-09-21 Ｔｃｐ試験装置

Country Status (4)

Country Link
JP (1) JP2012068032A (zh)
KR (1) KR101238397B1 (zh)
CN (1) CN102411122B (zh)
TW (1) TWI456212B (zh)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102013102777A1 (de) 2012-03-23 2014-09-25 Hitachi High-Tech Science Corporation Verfahren zum Herstellen eines Emitters

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103713205B (zh) * 2012-09-28 2016-10-26 名硕电脑(苏州)有限公司 电容触摸屏自动测试方法
KR101759470B1 (ko) * 2016-11-23 2017-07-19 주식회사 디이엔티 패널 점등 검사 장치
TWI881139B (zh) * 2020-06-30 2025-04-21 日商東京威力科創股份有限公司 檢查裝置及檢查方法
CN114088979B (zh) * 2021-12-20 2025-01-10 百及纳米科技(上海)有限公司 探针校准方法、表面测量方法以及探针控制设备

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2008126173A1 (ja) * 2007-03-13 2008-10-23 Advantest Corporation Ｔｃｐハンドリング装置
JP2010034482A (ja) * 2008-07-31 2010-02-12 Tokyo Electron Ltd 検査装置

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4036554B2 (ja) * 1999-01-13 2008-01-23 富士通株式会社 半導体装置およびその試験方法、および半導体集積回路
JP2002107438A (ja) * 2000-09-29 2002-04-10 Ando Electric Co Ltd 半導体試験装置のキャリブレーション装置
JP4480253B2 (ja) * 2000-10-27 2010-06-16 株式会社アドバンテスト 電子部品試験用押圧装置、電子部品試験装置およびその制御方法
JP2002181889A (ja) * 2000-12-13 2002-06-26 Ando Electric Co Ltd プローブカードとｔａｂの位置決め装置
NL1019775C2 (nl) * 2002-01-18 2003-07-21 Integrated Production And Test Inrichting voor het testen van elektronische schakelingen, alsmede een naaldenbed voor toepassing in een dergelijke inrichting.
CN100472220C (zh) * 2003-01-31 2009-03-25 日商·日本工程技术股份有限公司 Tcp处理装置以及在该装置中的位置不正补正方法
CN101263395A (zh) * 2005-09-15 2008-09-10 株式会社爱德万测试 Tcp处理装置
JP2006186395A (ja) * 2006-03-03 2006-07-13 Advantest Corp Ｔｃｐハンドリング装置およびｔｃｐハンドリング装置における打ち抜き穴不良検出方法
KR20090122306A (ko) * 2007-03-29 2009-11-26 가부시키가이샤 아드반테스트 Ｔｃｐ 핸들링 장치
JPWO2008120519A1 (ja) * 2007-03-29 2010-07-15 株式会社アドバンテスト Ｔｃｐハンドリング装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2008126173A1 (ja) * 2007-03-13 2008-10-23 Advantest Corporation Ｔｃｐハンドリング装置
JP2010034482A (ja) * 2008-07-31 2010-02-12 Tokyo Electron Ltd 検査装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102013102777A1 (de) 2012-03-23 2014-09-25 Hitachi High-Tech Science Corporation Verfahren zum Herstellen eines Emitters

Also Published As

Publication number Publication date
TWI456212B (zh) 2014-10-11
TW201213819A (en) 2012-04-01
CN102411122A (zh) 2012-04-11
KR101238397B1 (ko) 2013-02-28
CN102411122B (zh) 2015-07-22
KR20120030927A (ko) 2012-03-29

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