JP2004361705A - Method for housing large pellicle - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To make it possible to place and mount a large pellicle stably a flat large pellicle mounting part by providing the flat large pellicle mounting part at a predetermined position in the periphery of the tray of the case for housing the large pellicle. <P>SOLUTION: In the case B to house the large pellicle A, a flat mounting part 9capable of placing the large pellicle A is provided at the predetermined position in the periphery of the tray 6, and a recessed part 10, whose height is lower by ≥2 mm than that of the mounting part 9, is provided in the inside face of the mounting part 9. Thus, the large pellicle A can be housed in the case B. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to a large pellicle having an area of 1000 cm ² or more used for preventing foreign matter from adhering to a photomask or a reticle used in a lithography process when manufacturing an LSI or the like, by using a tray and a lid. The present invention relates to a method for storing a large pellicle that can be safely stored in a case.
[0002]
[Prior art]
2. Description of the Related Art Conventionally, in the production of semiconductor circuit patterns and the like, as described in Patent Document 1 described below, it is generally possible to prevent dust from adhering to a photomask or a reticle using dustproof means called a pellicle. Is being done. The pellicle is a transparent polymer film (hereinafter, referred to as nitrocellulose or cellulose derivative having a thickness of about 10 μm or less) on the upper edge of a frame having a thickness conforming to the shape of a photomask or a reticle having a thickness of about several millimeters. Pellicle film) is stretched and adhered, an adhesive is applied to the lower edge surface of the frame, and a protective film is adhered on the adhesive with a predetermined adhesive force.
[0003]
The adhesive is for fixing the pellicle to a photomask or a reticle, and the protective film is used for maintaining the adhesive strength of the adhesive until the adhesive is used. This protects the adhesive surface of. When transporting the pellicle from the manufacturer to the user, the pellicle is stored in a case consisting of a tray and a lid in order to prevent foreign substances from adhering to the pellicle film or the like or to prevent the pellicle from being damaged. In general, they are stored in a dustproof bag or the like and transported.
[0004]
As in the present invention, a case composed of a tray and a lid for accommodating a large pellicle having an area of 1000 cm ² or more is usually formed by a vacuum forming method, and the large pellicle is placed on the tray and then closed. It was stored in the case by being covered. In the manufacture of the above-mentioned case, the space between the lid and the frame of the large pellicle housed in the case is designed and manufactured systematically so as to be within a range of more than 0 mm and 1 mm or less. The pellicle was suppressed to prevent the large pellicle from moving and rubbing in the case due to vibration during transportation or the like to generate dust.
[0005]
The large case tray for storing large pellicles has the same height as the pellicle mounting part on the periphery where the large pellicle is mounted, and forms a tray with a large area and a flat surface. Was.
[0006]
However, a large case for storing a pellicle having an area of 1000 cm ² or more has the following problems. That is, it is difficult to manufacture a case composed of a large tray for storing a large pellicle and a lid while maintaining molding accuracy, and there is a problem that a tray having a large flat surface is warped. there were.
[0007]
Also, when carrying a large pellicle, the pellicle is sometimes transported while being stored in a large case and leaning against a cart. When the pellicle is transported in such a state, the entire large case vibrates due to vibrations when the bogie travels on the grating, and the inner surface of the mounting portion of the tray of the large case is bent and stored. There is a problem that the pellicle film comes into contact with the pellicle film of a large pellicle, adversely affects the pellicle film, and significantly reduces the quality of the pellicle.
[0008]
In order to solve the above-mentioned problems, the present applicant has developed Patent Documents 2 and 3 described below, and has obtained a design right by filing a design application. The technology according to Patent Literatures 2 and 3 is to form a large-diameter concave portion inside the case and provide a bottom portion of the concave portion in order to impart strength to a flat surface of a case for storing a large pellicle. And a rib having a predetermined shape is provided upright.
[0009]
[Patent Document 1]
Japanese Patent Publication No. 54-28718 [Patent Document 2]
Publication of Design Registration No. 1056971 [Patent Document 3]
Publication of Design Registration No. 1056972
[Problems to be solved by the invention]
However, in the above-mentioned Patent Documents 2 and 3, the mounting portion for mounting the pellicle is not clearly formed around the tray, and therefore, it is difficult to mount the pellicle in a stable state. Met. In addition, the upper edge surface of the rib protrudingly provided at the bottom of the concave portion has the same height as the high position of the outer peripheral edge of the tray. Therefore, even when a tray having such a structure is used, when the large pellicle and the large case vibrate greatly when a large pellicle is transported, the tray comes into contact with the pellicle film and adversely affects the pellicle film. Had a problem.
[0011]
The method for storing a large pellicle according to the present invention is a completely new technology developed in view of the above-mentioned conventional problems, and particularly, a flat pellicle capable of stably mounting the large pellicle at a predetermined position in the peripheral portion of the tray. A mounting portion is provided, and a concave portion lower than the mounting portion is formed on the entire inner surface of the mounting portion, so that the pellicle film of the large tray accommodated in the large case is transferred to the inner surface of the tray mounting portion during transportation. It is intended to provide a technique of a method for storing a large pellicle so as to prevent contact with a large pellicle.
[0012]
[Means for Solving the Problems]
The method for accommodating a large pellicle according to the present invention is an invention in which many of the problems described above have been fundamentally improved, and the gist of the first invention is that a frame and a top surface of the frame are bonded to each other. A large pellicle consisting of a pellicle film, an adhesive applied to the lower edge surface of the frame, and a protective film adhered to the lower surface of the adhesive to protect the adhesive comprises a tray and a lid. In the method of storing in a case, a flat large pellicle mounting portion is provided at a predetermined position in the peripheral portion of the tray, and an inner surface of the large pellicle mounting portion is formed in a concave portion lower than the large pellicle mounting portion. This is a method for storing a large pellicle, characterized in that the pellicle is formed in a pellicle.
[0013]
In the first aspect of the present invention, since the flat large pellicle mounting portion is provided at a predetermined position around the tray of the case for storing the large pellicle, the large pellicle is stably mounted on this mounting portion. Can be mounted.
[0014]
In addition, since the inner surface of this large pellicle mounting part is formed in a concave part lower than the large pellicle mounting part, when the large pellicle stored in the large case is transported while leaning on the cart as described above, Even if the inner surface of the mounting portion of the tray of the large case is greatly curved, even if the inner surface of the tray is warped, the inner surface of the tray contacts the pellicle film of the large pellicle stored therein. Can be prevented.
[0015]
The gist of the second invention of the method for storing a large pellicle according to the present invention is characterized in that the step between the large pellicle mounting portion of the tray and the concave portion lower than the large pellicle mounting portion is set to 2 mm or more. This is a method for storing a large pellicle according to the first invention.
[0016]
In the second aspect of the present invention, the step between the large pellicle mounting portion of the tray and the concave portion lower than the large pellicle mounting portion is set to 2 mm or more, so that even if the tray is greatly bent due to vibration during transportation, In addition, even if the tray is warped and further curved due to vibration, the curvature of the tray can be suppressed to a maximum of 2 mm, so that the inner surface of the tray mounting part contacts the pellicle film of the large pellicle. Can be prevented.
[0017]
The gist of the third invention of the method for storing a large pellicle according to the present invention is that a rib is erected and protruded from the bottom surface of the concave portion of the tray, and the height between the upper edge surface of the rib and the mounting portion of the tray with the large pellicle is mounted. A method for storing a large pellicle according to the first invention or the second invention, wherein the difference is set to 2 mm or more.
[0018]
In the third aspect of the present invention, since the ribs are provided upright on the bottom surface of the concave portion, the strength of the concave portion and the entire large case having the concave portion can be reinforced, and the concave portion becomes large. Curving can be prevented. Further, the height difference between the upper edge surface of the rib provided in the concave portion and the mounting portion of the large pellicle is set to 2 mm or more, so that even when the tray vibrates and bends, the upper edge of the rib becomes a large pellicle. Can be prevented from contacting the pellicle film.
[0019]
BEST MODE FOR CARRYING OUT THE INVENTION
One embodiment of the method for storing a large pellicle according to the present invention will be described in detail with reference to the drawings. FIG. 1 is a longitudinal sectional view showing an example of a method for storing a large pellicle according to the present invention, and FIG. FIG. 3 is an explanatory view showing a shape of a tray used for a method for storing a large pellicle, and FIG. 3 is an explanatory view showing a shape of a tray used for a method for storing a large pellicle according to another embodiment of the present invention.
[0020]
In FIGS. 1 and 2A, A is a large pellicle. As described in detail above, the pellicle is a large pellicle having a pellicle area of 1000 cm ² or more, a frame 1, a pellicle film 3 bonded to an upper edge surface of the frame 1 via an adhesive 2, It is composed of an adhesive material 4 applied to the lower edge surface and a protective film 5 adhered to the lower surface of the adhesive material 4 to protect the adhesive material 4.
[0021]
In the above-described embodiment, the adhesive 1 is applied to the lower edge surface of the frame 1 to form the adhesive. However, when a layered adhesive in which the adhesive 4 and the protective film 5 are formed in a layer in advance is used. May simply be formed by laminating a layered pressure-sensitive adhesive on the lower edge surface of the frame 1 and sticking the same (however, in this specification, including such a case, it is collectively referred to simply as "coating"). ). Next, the large pellicle A configured as described above is stored in a case B including the tray 6 and the lid 7. A tape seal 8 is attached to a corner between the tray 6 and the lid 7, and the lid 7 is fixed by the tape seal 8 so as not to come off the tray 6.
[0022]
In the present invention, as shown in FIGS. 1 and 2A, the large pellicle A can be placed at a predetermined position around the tray 6 of the case B in which the large pellicle A can be stored. A mounting section 9 is provided. A concave portion 10 lower than the mounting portion 9 is formed on the entire inner surface of the mounting portion 9 on both sides.
[0023]
The step between the mounting portion 9 and the concave portion 10, that is, the depth D of the bottom surface 11 of the concave portion 10 is about 2 mm to 10 mm. The shape of the above-described concave portion 10 may be such that a concave portion 10a having a small diameter is provided at a central portion between the mounting portions 9 on both sides, for example, like a concave portion 10a shown in FIG. As shown in ()), it is also possible to provide a V-shaped concave portion 10b.
[0024]
Further, as shown in FIGS. 3A and 3B, the strength of the tray 6 is reinforced at the bottom surface 11 of the concave portion 10 provided between the mounting portions 9, and the tray 6 is prevented from being warped. Therefore, the ribs 12 having a predetermined shape can be provided upright. The height difference d between the upper edge surface of the rib 12 thus provided and the mounting portion 9 is maintained at 2 mm or more.
[0025]
In the method for storing a large pellicle according to the present invention, since the concave portions 10, 10a, and 10b are provided on the inner surface of the mounting portion 9 of the tray 6, the large pellicle A stored in the large case B can be used. When the tray 6 of the case B is conveyed while being leaned on the trolley or the inner surface of the mounting portion 9 of the tray 6 is greatly bent due to vibration, the large pellicle A accommodated by the inner surface is stored. There is no need to worry about contact with the pellicle film 3.
[0026]
As described above, even when the ribs 12 stand upright on the bottom surface 11 of the concave portion 10, the height difference d between the upper edge surface of the ribs 12 and the mounting portion 9 is kept at 2 mm or more. Even if the rib 12 is greatly bent due to vibration or the like, there is no fear that the rib 12 comes into contact with the pellicle film 3 of the large pellicle A.
[0027]
The inventors of the present invention store the large pellicle A in the large storage case B and run it on the grating or on the uneven floor surface many times with the Transport test was performed, but the step (depth) D between the mounting portion 9 of the tray 6 and the bottom surface 11 of the concave portions 10, 10a, 10b or the upper edge surface of the rib 12 standing on the concave portion 10 and mounting. When the height difference d from the portion 9 was 2 mm or more, it was confirmed that the bottom surface 11 or the ribs 12 of the concave portions 10, 10a, and 10b did not contact the pellicle film 3 of the large pellicle A.
[0028]
【The invention's effect】
In the method for storing a large pellicle according to the present invention, a flat large pellicle mounting portion is provided at a predetermined position around the tray of the case for storing the large pellicle, so that the large pellicle is stably mounted on this mounting portion. It has the effect of being able to be placed and mounted on the device.
[0029]
In addition, since the inner surface of this large pellicle mounting part is formed in a concave part lower than the large pellicle mounting part, when the large pellicle stored in the large case is transported while leaning on the cart as described above, Even if the inner surface of the mounting portion of the tray of the large case is greatly curved, even if the inner surface of the tray is warped, the inner surface of the tray comes into contact with the pellicle film of the stored large tray. It also has the effect of preventing this.
[0030]
Further, in the present invention, if the step between the large pellicle mounting portion of the tray and the concave portion lower than the large pellicle mounting portion is 2 mm or more, even if the tray is greatly curved by vibration during transportation, Alternatively, even if the tray is warped and further curved by vibration, the curvature of the tray can be suppressed to a maximum of 2 mm or less, so the inner surface of the mounting portion of the tray has a pellicle film of a large tray. It also has the effect of preventing the contact with the substrate.
[0031]
Further, according to the present invention, when the rib is provided to stand upright on the bottom surface of the concave portion, the strength of the concave portion and the entire large case having the concave portion can be reinforced, and the concave portion is provided. Has the effect of preventing large curvatures. Further, when the height difference between the upper edge surface of the rib provided in the concave portion and the mounting portion of the large pellicle is set to 2 mm or more, even when the tray is greatly vibrated and curved, the upper edge of the rib is This has the effect of preventing contact with the pellicle film of the large tray.
[Brief description of the drawings]
FIG. 1 is an explanatory longitudinal sectional view showing an example of a method for storing a large pellicle according to the present invention.
FIG. 2 is an explanatory view showing the shape of a tray used in the method for storing a large pellicle according to the present invention.
FIG. 3 is an explanatory view showing a shape of a tray used in a method for storing a large pellicle according to another example of the present invention.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 ... Frame 2 ... Adhesive 3 ... Pellicle film 4 ... Adhesive material 5 ... Protective film 5a ... Pressing allowance 6 ... Tray 7 ... Lid 8 ... Tape seal 9 ... Mounting part 10 ... Concave part 10a ... Concave part 10b ... Concave part 11 Bottom surface 12 Rib A Large pellicle B Case D Depth (step)
d ... height difference

Claims (3)

A frame, a pellicle film adhered to an upper edge surface of the frame, an adhesive applied to a lower edge of the frame, and an adhesive adhered to a lower surface of the adhesive to protect the adhesive. In the method of storing a large pellicle made of a protective film in a case composed of a tray and a lid, a flat large pellicle mounting portion is provided at a predetermined position around the tray, and a mounting portion of the large pellicle is mounted. A method for storing a large pellicle, wherein an inner side surface is formed in a concave portion lower than a mounting portion of the large pellicle. 2. The method for storing a large pellicle according to claim 1, wherein a step between the large pellicle mounting portion of the tray and the concave portion lower than the large pellicle mounting portion is 2 mm or more. A rib is provided upright on the bottom surface of the concave portion of the tray, and a height difference between an upper edge surface of the rib and a mounting portion of a large pellicle of the tray is set to 2 mm or more. Item 2. A method for storing a large pellicle according to item 2.

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