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JP2010091358A - Socket for inspection - Google Patents

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JP2010091358A
JP2010091358A JP2008260422A JP2008260422A JP2010091358A JP 2010091358 A JP2010091358 A JP 2010091358A JP 2008260422 A JP2008260422 A JP 2008260422A JP 2008260422 A JP2008260422 A JP 2008260422A JP 2010091358 A JP2010091358 A JP 2010091358A
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Japan
Prior art keywords
conductive member
socket
hole
compression spring
inspection
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JP2008260422A
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Japanese (ja)
Inventor
Shinichi Nakamura
伸一 中村
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Unitechno Inc
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Unitechno Inc
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Priority to JP2008260422A priority Critical patent/JP2010091358A/en
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a socket for inspection facilitates processing sand enables reduction in the time required for the processing and cost. <P>SOLUTION: The inspection socket includes: a socket body 10 having a through-hole 11 formed therein; a first conductive member 3, disposed on an opening 11a side and brought into contact with a connection terminal of an inspection object; a second conductive member 4, disposed on an opening 11b side and brought into contact with a connection terminal of an inspection device; a third conductive member 5 housed in the through-hole 11, slidably holding the first conductive member 3 which is connected to one end thereof, and slidably-holding the second conductive member 4 connected to the other end thereof; a flange part 5a, formed at a predetermined position in the axial direction of the third conductive member 5 and having a diameter that increases outward, in a radial direction of the third conductive member 5; a hollow first compression spring 6, formed in contact with the first conductive member 3 and the flange part 5a and surrounding the third conductive member 5, in between the first conductive member and the flange part 5a; and a hollow second compression spring 7 formed in contact with the second conductive member 4 and the flange part and surrounding the third conductive member 5 in between the second conductive member and the flange part. <P>COPYRIGHT: (C)2010,JPO&amp;INPIT

Description

本発明は、検査用ソケットに関し、特にICパッケージや集積回路素子等を検査する検査用ソケットに関するものである。   The present invention relates to an inspection socket, and more particularly to an inspection socket for inspecting an IC package, an integrated circuit element, and the like.

ICパッケージ、あるいは、集積回路素子等を検査するものとして、テストされるICパッケージや集積回路素子等の接続端子と検査装置であるテスト回路基板の接続端子との間に複数のコンタクトプローブを備えた検査用ソケットが知られており、この検査用ソケットに備えられたコンタクトプローブには、両端のコンタクト部の間に圧縮部材を設けて所要の接触圧付与と接触位置のばらつきの吸収を可能にする両端変位(摺動)型のものがある。   A plurality of contact probes are provided between a connection terminal of an IC package or an integrated circuit element to be tested and a connection terminal of a test circuit board which is an inspection device as an IC package or an integrated circuit element inspection. An inspection socket is known, and a contact probe provided in the inspection socket is provided with a compression member between the contact portions at both ends to allow application of a required contact pressure and absorption of variations in contact position. There are two types of displacement (sliding) type.

従来のこの種の両端変位型コンタクトプローブを備えた検査用ソケットとしては、貫通孔が複数形成された胴体部と、各貫通孔の一端の開口部側に配置され、被検査対象物の端子に接触する電気的接触部としての複数の第1プランジャと、各貫通孔の他端の開口部側に配置された電気的接触部としての複数の第2プランジャと、第1プランジャと第2プランジャとに対し、互いに離間させる方向に付勢可能な1個の圧縮ばねと、この圧縮ばね内に収納された第3のプランジャと、を備え、第3のプランジャの中間部(大径部)を圧縮ばねの中間部によって保持するようにしたものが知られている(例えば、特許文献1の第1図参照)。   Conventional inspection sockets equipped with this type of both-end-displacement contact probe are arranged on the body portion having a plurality of through-holes and on the opening side of one end of each through-hole, and are used as terminals of the object to be inspected. A plurality of first plungers as electrical contact portions to be in contact; a plurality of second plungers as electrical contact portions arranged on the opening side of the other end of each through hole; a first plunger and a second plunger; In contrast, one compression spring that can be urged in a direction to be separated from each other, and a third plunger housed in the compression spring, and compresses an intermediate portion (large diameter portion) of the third plunger. What is held by an intermediate part of a spring is known (for example, refer to FIG. 1 of Patent Document 1).

この場合、圧縮ばねは螺旋形状を有するため、第3のプランジャの中間部を螺旋状に切削加工し、圧縮ばねの中間部によって第3のプランジャの中間部を保持している。
特開2006−84212号公報
In this case, since the compression spring has a spiral shape, the intermediate portion of the third plunger is cut into a spiral shape, and the intermediate portion of the third plunger is held by the intermediate portion of the compression spring.
JP 2006-84212 A

しかしながら、このような従来の検査用ソケットにおいては、第3のプランジャの中間部を螺旋状に切削加工することが容易でないという問題があった。   However, in such a conventional inspection socket, there is a problem that it is not easy to cut the intermediate portion of the third plunger in a spiral shape.

本発明は、従来の問題を解決するためになされたもので、加工の容易な検査用ソケットを提供することを目的とする。   The present invention has been made to solve the conventional problems, and an object of the present invention is to provide an inspection socket that can be easily processed.

(1)本発明の検査用ソケットは、少なくとも1つ以上の貫通孔が形成されたソケット本体と、前記貫通孔の一端の開口部側に配置され、被検査対象物の接続端子に接触するための電気的接触部を構成する第1導電部材と、前記貫通孔の他端の開口部側に配置され、検査装置の接続端子に接触するための電気的接触部を構成する第2導電部材と、前記ソケット本体の貫通孔に収納され、一端に前記第1導電部材が摺動自在に保持結合されるとともに、他端に前記第2導電部材が摺動自在に保持結合される第3導電部材と、前記第3導電部材の軸方向の所定箇所に形成され、前記導電部材の半径方向外方に拡径される拡径部と、前記第1導電部材と前記拡径部とに接して双方の間で前記第3導電部材を取り囲むようにして設けられ、前記第1導電部材および前記拡径部が軸方向の所定間隔より接近するときに前記間隔を拡大する方向に双方を付勢する中空の第1弾性部材と、前記第2導電部材と前記拡径部とに接して双方の間で前記第3導電部材を取り囲むようにして設けられ、前記第2導電部材および前記拡径部が軸方向の所定間隔より接近するときに前記間隔を拡大する方向に双方を付勢する中空の第2弾性部材と、を備えた構成を有している。   (1) The inspection socket according to the present invention is disposed on the socket side where at least one or more through-holes are formed, and on the opening side of one end of the through-hole, and contacts the connection terminal of the object to be inspected. A first conductive member that constitutes the electrical contact portion, and a second conductive member that is disposed on the opening side of the other end of the through-hole and constitutes an electrical contact portion for contacting the connection terminal of the inspection device; A third conductive member housed in the through hole of the socket body, wherein the first conductive member is slidably held and coupled at one end, and the second conductive member is slidably held and coupled at the other end And an enlarged diameter portion formed at a predetermined location in the axial direction of the third conductive member and expanded radially outward of the conductive member, and both in contact with the first conductive member and the enlarged diameter portion. Between the first conductive member and the third conductive member. When the member and the enlarged diameter portion come closer than a predetermined interval in the axial direction, the hollow first elastic member that urges both in the direction of enlarging the interval, the second conductive member, and the enlarged diameter portion are in contact with each other. The third conductive member is provided so as to surround the third conductive member, and when the second conductive member and the enlarged-diameter portion are closer than a predetermined interval in the axial direction, both are biased in the direction of expanding the interval. And a hollow second elastic member.

この構成により、第1弾性部材および第2弾性部材は拡径部に接しているために、拡径部に第1弾性部材および第2弾性部材を固定するための溝加工が不要となる。したがって、検査用ソケットの加工が容易になり、加工に係る時間およびコストを低減することが可能となる。   With this configuration, since the first elastic member and the second elastic member are in contact with the enlarged diameter portion, the groove processing for fixing the first elastic member and the second elastic member to the enlarged diameter portion is not necessary. Therefore, the processing of the inspection socket is facilitated, and the time and cost for processing can be reduced.

また、拡径部に第1弾性部材および第2弾性部材を固定しないので、ソケット本体の貫通孔に第1導電部材、第2導電部材、第3導電部材、第1弾性部材、第2弾性部材の各部材を落し込むことにより、検査用ソケットを容易に組立てることができる。また、部品交換に際しては各部材を個々に交換することができる。よって、交換費用を削減することができるとともに、廃棄部品が少なくなることから環境対策としての効果も期待される。   Further, since the first elastic member and the second elastic member are not fixed to the enlarged diameter portion, the first conductive member, the second conductive member, the third conductive member, the first elastic member, and the second elastic member are inserted into the through hole of the socket body. By dropping each member, the inspection socket can be easily assembled. In addition, when replacing parts, each member can be replaced individually. Therefore, the replacement cost can be reduced, and since the number of discarded parts is reduced, an effect as an environmental measure is expected.

(2)本発明の検査用ソケットは、(1)において、前記第1弾性部材と前記第2弾性部材の仕様が異なる構成を有している。   (2) The inspection socket according to the present invention has a configuration in (1) in which the specifications of the first elastic member and the second elastic member are different.

この構成により、第1弾性部材と第2弾性部材の仕様(例えば、材質、線径、巻数)をそれぞれ選択し、弾性部材全体のばね定数を精度よく設定することができる。また、被検査対象物に応じてばね荷重を変更することで、ソケット装置の汎用性を高めることができる。   With this configuration, specifications (for example, material, wire diameter, number of turns) of the first elastic member and the second elastic member can be selected, and the spring constant of the entire elastic member can be set with high accuracy. Moreover, the versatility of a socket apparatus can be improved by changing a spring load according to a to-be-inspected object.

(3)本発明の検査用ソケットは、(1)または(2)において、前記ソケット本体が、前記貫通孔が形成された本体部と、前記本体部と別体に設けられ、前記貫通孔の内周面積よりも小さい開口面積の開口部を有するソケットカバーと、を備え、前記開口部と前記貫通孔の間の前記ソケットカバー部分によって係合部が形成される構成を有している。   (3) The inspection socket according to the present invention is the inspection socket according to (1) or (2), wherein the socket body is provided separately from the body portion in which the through hole is formed, and the body portion. A socket cover having an opening with an opening area smaller than the inner peripheral area, and an engaging portion is formed by the socket cover portion between the opening and the through hole.

この構成により、ソケットカバーを本体部から取り外した状態で検査用ソケットの組立作業および部品の交換作業を行うことができる。したがって、組立および交換作業の作業性を向上させることができる。   With this configuration, it is possible to perform the assembly operation of the inspection socket and the replacement operation of the parts with the socket cover removed from the main body. Therefore, the workability of assembly and replacement work can be improved.

以上説明したように、本発明は、加工が容易な検査用ソケットを提供することができる。   As described above, the present invention can provide an inspection socket that can be easily processed.

以下、本発明の実施の形態について、図面を用いて説明する。   Hereinafter, embodiments of the present invention will be described with reference to the drawings.

(第1の実施の形態)
図1〜図6は、本発明に係る検査用ソケットの第1の実施の形態を示す図である。
(First embodiment)
1 to 6 are views showing a first embodiment of an inspection socket according to the present invention.

まず、構成を説明する。図1において、検査用ソケット1は、両端変位型コンタクトプローブ(以下、単にプローブともいう)2とソケット本体10とを備えている。   First, the configuration will be described. In FIG. 1, an inspection socket 1 includes a double-ended displacement contact probe (hereinafter also simply referred to as a probe) 2 and a socket body 10.

プローブ2は、その軸方向両端側にそれぞれ電気的接触部を構成する第1導電部材3および第2導電部材4を有し、ソケット本体10の貫通孔11に収納されている。なお、図示していないが、ソケット本体10には互いに平行に所定ピッチ(図1中、左右方向で一定の間隔)で貫通孔が形成されており、この貫通孔内にもプローブ2が収納されている。   The probe 2 has a first conductive member 3 and a second conductive member 4 that respectively constitute an electrical contact portion at both ends in the axial direction, and is housed in the through hole 11 of the socket body 10. Although not shown, through holes are formed in the socket body 10 at a predetermined pitch (a constant interval in the left-right direction in FIG. 1) in parallel with each other, and the probe 2 is accommodated in the through holes. ing.

第1導電部材3は、貫通孔11の上方(一端)の開口部11a側に配置されており、被検査対象物21の接続端子21a(図4参照)に接触するようになっている。   The first conductive member 3 is disposed on the opening 11a side (one end) above the through-hole 11 and comes into contact with the connection terminal 21a (see FIG. 4) of the object 21 to be inspected.

また、第2導電部材4は、貫通孔11の下方(他端)の開口部11b側に配置されており、検査装置であるプリント配線板22の接続端子22a(図4参照)に接触するようになっている。   The second conductive member 4 is disposed on the opening 11b side below (the other end of) the through-hole 11 and is in contact with the connection terminal 22a (see FIG. 4) of the printed wiring board 22 that is an inspection device. It has become.

ソケット本体10の貫通孔11には第3導電部材5が収納されており、第3導電部材5は、上端(一端)に第1導電部材3が摺動自在に保持結合されるとともに、下端(他端)に第2導電部材4が摺動自在に保持結合されている。   The third conductive member 5 is accommodated in the through hole 11 of the socket body 10, and the third conductive member 5 is slidably held and coupled to the upper end (one end) and the lower end ( The second conductive member 4 is slidably held and coupled to the other end.

また、第3導電部材5の軸方向中央部には拡径部としてのフランジ部5aが形成されており、このフランジ部5aは、第3導電部材5の半径方向外方に拡径されている。   Further, a flange portion 5 a as a diameter-expanded portion is formed at the axially central portion of the third conductive member 5, and the flange portion 5 a is expanded in the radial direction outward of the third conductive member 5. .

また、第3導電部材5のフランジ部5aの上方側は第1端部5bを構成しており、第1導電部材3とフランジ部5aの間には第1端部5bを取り囲むように中空の第1弾性部材である第1圧縮ばね6が設けられている。   The upper side of the flange portion 5a of the third conductive member 5 constitutes a first end portion 5b, and the first conductive member 3 and the flange portion 5a are hollow so as to surround the first end portion 5b. A first compression spring 6 that is a first elastic member is provided.

また、第3導電部材5のフランジ部5aの下方側は第2端部5cを構成しており、第2導電部材4とフランジ部5aの間には第2端部5cを取り囲むように中空の第2弾性部材である第2圧縮ばね7が設けられている。   The lower side of the flange portion 5a of the third conductive member 5 constitutes a second end portion 5c, and the second conductive member 4 and the flange portion 5a are hollow so as to surround the second end portion 5c. A second compression spring 7 that is a second elastic member is provided.

第1圧縮ばね6は、第1導電部材3およびフランジ部5aが軸方向の所定間隔より接近するとき、その間隔を拡大する方向(図中、上下方向)に第1導電部材3およびフランジ部5aを付勢している。第2圧縮ばね7は、第2導電部材4およびフランジ部5aが軸方向の所定間隔より接近するとき、その間隔を拡大する方向(図中、上下方向)に第2導電部材4およびフランジ部5aを付勢している。   When the first conductive member 3 and the flange portion 5a are closer than a predetermined interval in the axial direction, the first compression spring 6 has the first conductive member 3 and the flange portion 5a in a direction in which the interval is increased (vertical direction in the figure). Is energized. When the second conductive member 4 and the flange portion 5a are closer than a predetermined interval in the axial direction, the second compression spring 7 is arranged in the direction in which the interval is increased (vertical direction in the figure), and the second conductive member 4 and the flange portion 5a. Is energized.

すなわち、第1圧縮ばね6および第2圧縮ばね7は、第1導電部材3および第2導電部材4が軸方向の所定間隔より接近するとき、その間隔を拡大する方向(図中、上下方向)に双方の導電部材3、4を付勢している。双方の圧縮ばね6、7の付勢により、第1導電部材3の外端部であるコンタクト部3aは、ソケット本体10の開口部11aから外方に突出している。同じく、第2導電部材4の外端部であるコンタクト部4aは、ソケット本体10の開口部11bから外方に突出している。また、コンタクト部4aは、三角形状の凹凸部が連続する冠形状に形成されている。   That is, when the first conductive member 3 and the second conductive member 4 approach the predetermined interval in the axial direction, the first compression spring 6 and the second compression spring 7 increase the interval (the vertical direction in the figure). Both of the conductive members 3 and 4 are energized. Due to the biasing force of both compression springs 6 and 7, the contact portion 3 a that is the outer end portion of the first conductive member 3 protrudes outward from the opening portion 11 a of the socket body 10. Similarly, the contact portion 4 a that is the outer end portion of the second conductive member 4 protrudes outward from the opening portion 11 b of the socket body 10. Moreover, the contact part 4a is formed in the crown shape with which a triangular uneven | corrugated | grooved part continues.

また、第1導電部材3および第2導電部材4の各々は、コンタクト部3a、4aより大径に形成されるとともにコンタクト部3a、4aの基端側で第1圧縮ばね6の上端面および第2圧縮ばね7の下端面に当接するフランジ部3f、4fと、これらフランジ部3f、4fからフランジ部5a側に突出するとともに第1圧縮ばね6の上端および第2圧縮ばね7の下端に挿入された挿入部3e、4eと、これら挿入部3e、4eの径方向内方で軸方向に延在する有底の、または貫通した孔部3c、4cと、を有している。   Each of the first conductive member 3 and the second conductive member 4 is formed to have a diameter larger than that of the contact portions 3a and 4a, and at the base end side of the contact portions 3a and 4a, the upper end surface of the first compression spring 6 and the second conductive member 4 are formed. 2 Flange portions 3f and 4f that contact the lower end surface of the compression spring 7, and project from the flange portions 3f and 4f toward the flange portion 5a and are inserted into the upper end of the first compression spring 6 and the lower end of the second compression spring 7. The insertion portions 3e and 4e and the bottomed or penetrating holes 3c and 4c extending inward in the radial direction of the insertion portions 3e and 4e.

第1導電部材3および第2導電部材4のコンタクト部3a、4aは、それぞれ、フランジ部3f、4fから軸方向一方側に突出する導通部となっており、ソケット本体10の開口部11a、11bにより軸方向に変位(摺動)可能に保持されている。   The contact portions 3 a and 4 a of the first conductive member 3 and the second conductive member 4 are conductive portions that protrude from the flange portions 3 f and 4 f to one side in the axial direction, respectively, and the openings 11 a and 11 b of the socket body 10. Thus, it is held so that it can be displaced (slidable) in the axial direction.

また、開口部11a、11bの開口面積は、貫通孔11の内周面積よりも小さく形成されることにより、開口部11a、11bと貫通孔11の間に係合部としての環状係合部11d、11eが形成されており、第1導電部材3のフランジ部3fおよび第2導電部材4のフランジ部4fが環状係合部11d、11eに係合することにより、第1導電部材3および第2導電部材4がソケット本体10から抜け出ないようになっている。   Further, the opening areas of the openings 11 a and 11 b are formed smaller than the inner peripheral area of the through hole 11, so that an annular engaging part 11 d as an engaging part is formed between the openings 11 a and 11 b and the through hole 11. 11e, and the flange portion 3f of the first conductive member 3 and the flange portion 4f of the second conductive member 4 are engaged with the annular engagement portions 11d and 11e, so that the first conductive member 3 and the second conductive member 3 The conductive member 4 is prevented from coming out of the socket body 10.

なお、図1に第1ソケット本体13および第2ソケット本体14の分割面をP1、P2で示す。   In addition, the division surface of the 1st socket main body 13 and the 2nd socket main body 14 is shown by P1, P2 in FIG.

図2に示すように、ソケット本体10は、分割面P1、P2を境に分割された第1ソケット本体13および第2ソケット本体14を備えている。   As shown in FIG. 2, the socket main body 10 includes a first socket main body 13 and a second socket main body 14 that are divided at the dividing surfaces P1 and P2.

また、第1ソケット本体13には、貫通孔11の一方側を構成する第1貫通孔11fが形成されており、第2ソケット本体14には、貫通孔11の他方側を構成する第2貫通孔11gが形成されている。   Further, the first socket body 13 is formed with a first through hole 11 f that constitutes one side of the through hole 11, and the second socket body 14 has a second penetration that constitutes the other side of the through hole 11. A hole 11g is formed.

また、図3に示すように、フランジ部5aは、円状に形成されており、貫通孔11の内周面との間で所定の隙間を介して、貫通孔11に挿通されている。なお、図3は、図2(b)のA−A方向矢視図である。   Further, as shown in FIG. 3, the flange portion 5 a is formed in a circular shape, and is inserted into the through hole 11 through a predetermined gap with the inner peripheral surface of the through hole 11. In addition, FIG. 3 is an AA direction arrow line view of FIG.2 (b).

図4に示すように、被検査対象物21の接続端子21aと高頻度に接触・離脱する第1導電部材3は、導電率および耐摩耗性が高い硬質の金属材料、例えばチタン(Ti)系金属および炭素鋼(SK)からなり、プリント配線板22の接続端子22aに接触する第2導電部材4は、第1導電部材3ほどの硬度は要求されないので、例えば、燐青銅、黄銅、ベリリウム銅等の銅系金属からなる。これら第1導電部材3および第2導電部材4は、それぞれ快削性のある材料を用いることでその旋削加工等を容易化することができる。   As shown in FIG. 4, the first conductive member 3 that frequently contacts and separates from the connection terminal 21 a of the object 21 to be inspected is a hard metal material having high conductivity and high wear resistance, for example, titanium (Ti) system. The second conductive member 4 made of metal and carbon steel (SK) and contacting the connection terminal 22a of the printed wiring board 22 is not required to be as hard as the first conductive member 3. For example, phosphor bronze, brass, beryllium copper It consists of copper-type metals such as. The first conductive member 3 and the second conductive member 4 can be easily turned by using a material having free-cutting properties.

第1圧縮ばね6および第2圧縮ばね7は、任意の断面形状と材料(例えば、ばね用のピアノ線、ステンレス線、あるいは、プラスチック)で形成することができ、第1導電部材3および第2導電部材4に比べ導電性が要求されない部材となっている。   The first compression spring 6 and the second compression spring 7 can be formed of any cross-sectional shape and material (for example, piano wire for spring, stainless steel wire, or plastic). Compared to the conductive member 4, the member is not required to have conductivity.

また、第1圧縮ばね6および第2圧縮ばね7は、第1導電部材3および第2導電部材4が軸方向の所定間隔より接近するとき、その間隔を拡大する方向(図中、上下方向)に双方を付勢する中空の弾性部材となっている。ここにいう弾性部材とは、金属のみならず、ゴムのような粘弾性体やプラスチックからなるもの、あるいはこれらの複合品で形成することができる。   Further, when the first conductive member 3 and the second conductive member 4 approach the predetermined interval in the axial direction, the first compression spring 6 and the second compression spring 7 increase the interval (the vertical direction in the figure). It is a hollow elastic member that urges both. Here, the elastic member can be formed of not only a metal but also a viscoelastic material such as rubber, a plastic, or a composite product thereof.

第1導電部材3および第2導電部材4を導通させるのは、第1圧縮ばね6および第2圧縮ばね7内に収納された第3導電部材5である。この第3導電部材5は、第1導電部材3より導電率の高い材料、あるいは両導電部材3、4より導電率の高い材料からなり、例えば、無酸素銅やベリリウム銅等の銅系金属で形成されている。   The first conductive member 3 and the second conductive member 4 are electrically connected by the third conductive member 5 housed in the first compression spring 6 and the second compression spring 7. The third conductive member 5 is made of a material having a higher conductivity than the first conductive member 3 or a material having a higher conductivity than the two conductive members 3 and 4, and is made of, for example, a copper-based metal such as oxygen-free copper or beryllium copper. Is formed.

この第3導電部材5の第1端部5bの上端は、第1導電部材3の孔部3cに摺動可能に挿入されているとともに、第3導電部材5の第2端部5cは、第2導電部材4の孔部4cに摺動可能に挿入されている。   The upper end of the first end 5b of the third conductive member 5 is slidably inserted into the hole 3c of the first conductive member 3, and the second end 5c of the third conductive member 5 is 2 is slidably inserted into the hole 4 c of the conductive member 4.

なお、本実施の形態では、第3導電部材5のフランジ部5aは、第1端部5bおよび第2端部5cと同一の材料でこれらと一体に形成されているが、フランジ部5aを第1端部5bおよび第2端部5cと別の材料で形成することも可能である。   In the present embodiment, the flange portion 5a of the third conductive member 5 is integrally formed with the same material as the first end portion 5b and the second end portion 5c. It is also possible to form the first end portion 5b and the second end portion 5c from a different material.

第1圧縮ばね6および第2圧縮ばね7は、それぞれ第1導電部材3および第2導電部材4の挿入部3e、4eと内径が同一または大きくなるように形成されている。この構成によれば、第1圧縮ばね6の上端および第2圧縮ばね7の下端に第1導電部材3および第2導電部材4の挿入部3e、4eがそれぞれ挿入されたとき、第1圧縮ばね6の上端および第2圧縮ばね7の下端がフランジ部3f、4fに当接することになる。よって、ソケット本体10を組立てる際、第1導電部材3、第2導電部材4、第3導電部材5、第1圧縮ばね6、第2圧縮ばね7の各部材を個々に装着することができる。   The first compression spring 6 and the second compression spring 7 are formed to have the same or larger inner diameters as the insertion portions 3e and 4e of the first conductive member 3 and the second conductive member 4, respectively. According to this configuration, when the insertion portions 3e and 4e of the first conductive member 3 and the second conductive member 4 are inserted into the upper end of the first compression spring 6 and the lower end of the second compression spring 7, respectively, the first compression spring 6 and the lower end of the second compression spring 7 come into contact with the flange portions 3f and 4f. Therefore, when assembling the socket body 10, the first conductive member 3, the second conductive member 4, the third conductive member 5, the first compression spring 6, and the second compression spring 7 can be individually mounted.

なお、本実施の形態に限らず、第1圧縮ばね6の上端および第2圧縮ばね7の下端を、それぞれ第1導電部材3および第2導電部材4の挿入部3e、4eよりも内径が小さくなるよう形成してもよい。この構成によれば、第1圧縮ばね6の上端および第2圧縮ばね7の下端に第1導電部材3および第2導電部材4の挿入部3e、4eがそれぞれ挿入されたとき、これら挿入部3e、4eが第1圧縮ばね6の上端および第2圧縮ばね7の下端から所定の径方向圧力で締め付けられ、保持されることになる。   In addition, not only in this embodiment, the inner diameter of the upper end of the first compression spring 6 and the lower end of the second compression spring 7 is smaller than the insertion portions 3e and 4e of the first conductive member 3 and the second conductive member 4, respectively. You may form so that it may become. According to this configuration, when the insertion portions 3e and 4e of the first conductive member 3 and the second conductive member 4 are inserted into the upper end of the first compression spring 6 and the lower end of the second compression spring 7, respectively, these insertion portions 3e. 4e is clamped and held at a predetermined radial pressure from the upper end of the first compression spring 6 and the lower end of the second compression spring 7.

また、本実施の形態では、第1圧縮ばね6と第2圧縮ばね7は、仕様が異なるものが用いられている。   In the present embodiment, the first compression spring 6 and the second compression spring 7 have different specifications.

これは、被検査対象物21の変更に対応して、被検査対象物21の接続端子21aとプリント配線板22の接続端子22aに接触するときの導電部材全体(第1導電部材3と第2導電部材4)の接触圧を調整するためである。   This corresponds to the change of the inspection object 21, and the entire conductive member (the first conductive member 3 and the second conductive member 3) when contacting the connection terminal 21a of the inspection object 21 and the connection terminal 22a of the printed wiring board 22. This is for adjusting the contact pressure of the conductive member 4).

本実施の形態では、第1圧縮ばね6と第2圧縮ばね7の仕様を、第1導電部材3および第2導電部材4が被検査対象物21の接続端子21aとプリント配線板22の接続端子22aにそれぞれ接触するときに最適な接触圧となるように設定している。   In the present embodiment, the specifications of the first compression spring 6 and the second compression spring 7 are set such that the first conductive member 3 and the second conductive member 4 are the connection terminals 21a of the test object 21 and the connection terminals of the printed wiring board 22. The contact pressure is set so as to be optimum when contacting each of 22a.

第1圧縮ばね6および第2圧縮ばね7を別仕様にすることで、第1導電部材3および第2導電部材4が被検査対象物21の接続端子21aとプリント配線板22の接続端子22aにそれぞれ接触するときに最適な接触圧に設定することができる。   By making the first compression spring 6 and the second compression spring 7 into different specifications, the first conductive member 3 and the second conductive member 4 are connected to the connection terminal 21a of the inspection object 21 and the connection terminal 22a of the printed wiring board 22, respectively. It is possible to set an optimum contact pressure when contacting each other.

次に、図2を用いて本実施の形態の検査用ソケット1の組立て方法について説明する。   Next, a method for assembling the inspection socket 1 of the present embodiment will be described with reference to FIG.

まず、図2(a)に示すように、分割された状態の第2ソケット本体14の第2貫通孔11gに、第2導電部材4を挿入し、次いで第2圧縮ばね7を挿入する。この場合、第2導電部材4の挿入部4eが第2圧縮ばね7の下端に挿入された状態となる。   First, as shown in FIG. 2A, the second conductive member 4 is inserted into the second through hole 11g of the second socket body 14 in the divided state, and then the second compression spring 7 is inserted. In this case, the insertion portion 4 e of the second conductive member 4 is in a state of being inserted into the lower end of the second compression spring 7.

次いで、第2圧縮ばね7に第3導電部材5の第2端部5cを挿通した後、第2端部5cを第2貫通孔11gに挿通し、第2端部5cの下端を第2導電部材4の孔部4cに挿通する。   Next, after the second end 5c of the third conductive member 5 is inserted through the second compression spring 7, the second end 5c is inserted through the second through hole 11g, and the lower end of the second end 5c is connected to the second conductive portion. The hole 4c of the member 4 is inserted.

次いで、図2(b)に示すように、第1導電部材3の挿入部3eに上端が挿入された状態の第1圧縮ばね6を第3導電部材5の第1端部5bに挿通する。次いで、コンタクト部3aを第1ソケット本体13の第1貫通孔11fに挿通し、第1ソケット本体13を第2ソケット本体14に取付けることにより、プローブ2をソケット本体10に組み付ける。これが図1の状態となる。   Next, as shown in FIG. 2B, the first compression spring 6 with the upper end inserted in the insertion portion 3 e of the first conductive member 3 is inserted into the first end portion 5 b of the third conductive member 5. Next, the probe 2 is assembled to the socket body 10 by inserting the contact portion 3 a into the first through hole 11 f of the first socket body 13 and attaching the first socket body 13 to the second socket body 14. This is the state of FIG.

次に、動作について説明する。   Next, the operation will be described.

前述のように構成された本実施の形態の検査用ソケット1では、図4に示すように、テストを行うICパッケージや集積回路を造りこんだウェハー等の被検査対象物21の接続端子21aに第1導電部材3のコンタクト部3aが接触するとともに、検査機器や診断機器を構成するプリント配線板22の接続端子22aに第2導電部材4のコンタクト部4aが接触する。なお、コンタクト部4aは、冠形状に形成されているため、プリント配線板22の接続端子22aに安定して接触することになる。   In the inspection socket 1 of the present embodiment configured as described above, as shown in FIG. 4, the connection terminal 21 a of the inspection object 21 such as an IC package to be tested or an integrated circuit is formed. The contact part 3a of the first conductive member 3 comes into contact, and the contact part 4a of the second conductive member 4 comes into contact with the connection terminal 22a of the printed wiring board 22 constituting the inspection device or the diagnostic device. In addition, since the contact part 4a is formed in the crown shape, the contact part 4a stably comes into contact with the connection terminal 22a of the printed wiring board 22.

また、仕様の異なる第1圧縮ばね6および第2圧縮ばね7により、両コンタクト部3a、4aによる第1導電部材3および第2導電部材4の変位S1、S2が許容されるとともに、第1圧縮ばね6および第2圧縮ばね7が圧縮してばね荷重を発生することにより、第1導電部材3および第2導電部材4への電気的接続をなすための所要の接触圧が付与される。   Further, the first compression spring 6 and the second compression spring 7 having different specifications allow displacements S1 and S2 of the first conductive member 3 and the second conductive member 4 by the contact portions 3a and 4a, and the first compression. When the spring 6 and the second compression spring 7 are compressed to generate a spring load, a required contact pressure for electrical connection to the first conductive member 3 and the second conductive member 4 is applied.

このように本実施の形態では、第3導電部材5を1個の圧縮ばねで保持せず、中空の第1圧縮ばね6と第2圧縮ばね7とで挟持するようにしたので、第3導電部材5のフランジ部5aの側周面5sに対する溝加工が不要となる。よって、第3導電部材5の加工が容易になり、加工に係る時間およびコストを低減することができる。なお、前記溝は、1個の圧縮ばねによってフランジ部5aを締め付けるための螺旋状の嵌合溝である。   As described above, in the present embodiment, the third conductive member 5 is not held by one compression spring, but is held between the hollow first compression spring 6 and the second compression spring 7. Groove processing on the side peripheral surface 5s of the flange portion 5a of the member 5 is not necessary. Therefore, the process of the 3rd electrically-conductive member 5 becomes easy, and the time and cost concerning a process can be reduced. In addition, the said groove | channel is a helical fitting groove for clamp | tightening the flange part 5a with one compression spring.

また、第1圧縮ばね6および第2圧縮ばね7を第3導電部材5に固定していないので、第1圧縮ばね6、第2圧縮ばね7、第3導電部材5を個々に装着することができる。よって、検査用ソケット1の組立作業が容易になる。   Further, since the first compression spring 6 and the second compression spring 7 are not fixed to the third conductive member 5, the first compression spring 6, the second compression spring 7, and the third conductive member 5 can be mounted individually. it can. Therefore, the assembly operation of the inspection socket 1 is facilitated.

さらに、各部材を交換する場合には、交換対象のみを容易に交換することができる。例えば、被検査対象物21と接触することによって汚れ、あるいは摩耗して電気的接触機能が劣化した導電部材のみを交換することができる。この結果、検査用ソケット1の交換費用を大幅に低減することができる。また、第1導電部材3、第2導電部材4、第3導電部材5を個々に交換することができるので、廃棄部品を少なくすることができ、環境対策を図ることができる。   Furthermore, when each member is replaced, only the replacement object can be easily replaced. For example, it is possible to replace only a conductive member that has been soiled or worn due to contact with the object 21 to be inspected and whose electrical contact function has deteriorated. As a result, the replacement cost of the inspection socket 1 can be greatly reduced. Moreover, since the 1st conductive member 3, the 2nd conductive member 4, and the 3rd conductive member 5 can be replaced | exchanged separately, a waste part can be decreased and an environmental measure can be aimed at.

また、本実施の形態では、第3導電部材5の軸方向中央部に形成されたフランジ部5aを境にして、第1導電部材3とフランジ部5aとの間で第1端部5bを取り囲むようにして第1圧縮ばね6を設けるとともに、第2導電部材4とフランジ部5aとの間で第2端部5cを取り囲むようにして第2圧縮ばね7を設けたので、第1圧縮ばね6と第2圧縮ばね7の仕様を異ならせて、被検査対象物21およびプリント配線板22に対する荷重を調整することができる。   Further, in the present embodiment, the first end portion 5b is surrounded between the first conductive member 3 and the flange portion 5a with the flange portion 5a formed in the axially central portion of the third conductive member 5 as a boundary. Thus, the first compression spring 6 is provided, and the second compression spring 7 is provided so as to surround the second end portion 5c between the second conductive member 4 and the flange portion 5a. The load on the inspection object 21 and the printed wiring board 22 can be adjusted by changing the specifications of the second compression spring 7 and the second compression spring 7.

すなわち、被検査対象物21に応じて第1圧縮ばね6と第2圧縮ばね7の仕様(例えば、材質、線径、巻数)をそれぞれ適宜選択することにより、弾性部材としての圧縮ばね全体のばね定数を細かに設定することができる。   That is, by appropriately selecting the specifications (for example, material, wire diameter, number of turns) of the first compression spring 6 and the second compression spring 7 according to the object 21 to be inspected, the spring of the entire compression spring as an elastic member Constants can be set finely.

また、図5に示すように、コンタクト部4iを円錐形状に形成してもよい。このようにしてもコンタクト部4iの加工を容易に行うことができるとともに、コンタクト部4iの先端をプリント配線板22の接続端子22aに確実に接触させることができる。   Further, as shown in FIG. 5, the contact portion 4i may be formed in a conical shape. Even if it does in this way, while being able to process the contact part 4i easily, the front-end | tip of the contact part 4i can be made to contact the connection terminal 22a of the printed wiring board 22 reliably.

また、図6に示すように、コンタクト部4jを曲面形状に形成してもよい。このようにしてもコンタクト部4jの加工を容易に行うことができるとともに、コンタクト部4jの先端をプリント配線板22の接続端子22aに確実に接触させることができる。   Further, as shown in FIG. 6, the contact portion 4j may be formed in a curved surface shape. Even if it does in this way, while being able to process the contact part 4j easily, the front-end | tip of the contact part 4j can be made to contact the connection terminal 22a of the printed wiring board 22 reliably.

(第2の実施の形態)
図7は、本発明に係る検査用ソケットの第2の実施の形態を示す図であり、第1の実施の形態と同一の構成には同一の符号を付して説明を省略する。
(Second Embodiment)
FIG. 7 is a diagram showing a second embodiment of the inspection socket according to the present invention. The same components as those in the first embodiment are denoted by the same reference numerals, and the description thereof is omitted.

図7において、第1ソケット本体13は、第1貫通孔11fが形成された本体部32と、本体部32と別体に設けられ、第1貫通孔11fの内周面積よりも小さい開口面積の開口部(貫通孔11の一端)31aを有するソケットカバー31と、を備えており、ソケットカバー31は、図示しないボルトによって本体部32に締結されるようになっている。   In FIG. 7, the first socket main body 13 is provided separately from the main body portion 32 in which the first through hole 11f is formed, and the main body portion 32, and has an opening area smaller than the inner peripheral area of the first through hole 11f. A socket cover 31 having an opening (one end of the through hole 11) 31a. The socket cover 31 is fastened to the main body 32 by a bolt (not shown).

また、ソケットカバー31の開口部31aと第1貫通孔11fの間のソケットカバー31部分によって係合部としての環状係合部31dが構成されており、この環状係合部31dに第1導電部材3のフランジ部3fが係合することにより、第1導電部材3が第1ソケット本体13から抜け出ないようになっている。   Further, an annular engaging portion 31d as an engaging portion is constituted by the socket cover 31 portion between the opening 31a of the socket cover 31 and the first through hole 11f, and the first conductive member is formed in the annular engaging portion 31d. As a result, the first conductive member 3 is prevented from coming out of the first socket body 13.

このように、本実施の形態では、第1導電部材3が配置される第1ソケット本体13を、第1貫通孔11fが形成された本体部32と、第1貫通孔11fの内周面積よりも小さい開口面積を有する開口部31aを有するソケットカバー31とから構成したので、1つの第1ソケット本体13に第1貫通孔11fと開口部31aを2つの工程で形成するのを不要にできる。   Thus, in this Embodiment, the 1st socket main body 13 by which the 1st electrically-conductive member 3 is arrange | positioned is compared with the main-body part 32 in which the 1st through-hole 11f was formed, and the internal peripheral area of the 1st through-hole 11f. Since the socket cover 31 has the opening 31a having a small opening area, it is unnecessary to form the first through hole 11f and the opening 31a in one first socket body 13 in two steps.

なお、1つの第1ソケット本体13に第1貫通孔11fと開口部31aを開口するには、まず、切削加工によって開口部31aを開口した後、開口部31aを下側に位置するようにして第1ソケット本体13の分割面P1側から第1貫通孔11fを開口する2つの工程が必要になる。   In order to open the first through hole 11f and the opening 31a in one first socket body 13, first, the opening 31a is opened by cutting, and then the opening 31a is positioned on the lower side. Two processes for opening the first through hole 11f from the dividing surface P1 side of the first socket body 13 are required.

本実施の形態では、第1貫通孔11fが形成された本体部32と、開口部31aが形成されたソケットカバー31とをボルトによって一体化するようにしたので、開口部31aおよび第1貫通孔11fの形成を容易に行うことができ、第1ソケット本体13の製造を容易に行うことができる。   In the present embodiment, the main body portion 32 in which the first through hole 11f is formed and the socket cover 31 in which the opening portion 31a is formed are integrated by a bolt, so the opening portion 31a and the first through hole are integrated. 11f can be easily formed, and the first socket body 13 can be easily manufactured.

また、第1圧縮ばね6、第1導電部材3、第3導電部材5、第2圧縮ばね7、第2導電部材4のいずれかを交換する際には、ソケットカバー31および本体部32からボルトを取り外した後、ソケットカバー31を本体部32から取り外した状態で交換作業を行うことができるため、交換作業の作業性を向上させることができる。   Further, when replacing any of the first compression spring 6, the first conductive member 3, the third conductive member 5, the second compression spring 7, and the second conductive member 4, the bolts from the socket cover 31 and the main body portion 32 are used. Since the replacement work can be performed in a state in which the socket cover 31 is removed from the main body 32 after the detachment, the workability of the replacement work can be improved.

なお、本実施の形態に限らず、ソケットカバー31を第2導電部材4側(図中、下側)に設けても同様の効果が期待される。   In addition, the same effect is expected even if the socket cover 31 is provided on the second conductive member 4 side (lower side in the figure), not limited to the present embodiment.

(第3の実施の形態)
図8は、本発明に係る検査用ソケットの第3の実施の形態を示す図であり、第1の実施の形態と同一の構成には同一の符号を付して説明を省略する。
(Third embodiment)
FIG. 8 is a diagram showing a third embodiment of the inspection socket according to the present invention. The same components as those of the first embodiment are denoted by the same reference numerals, and the description thereof is omitted.

図8において、ソケット本体10は、貫通孔11が形成された本体部32と、本体部32と別体に設けられ、貫通孔11の内周面積よりも小さい開口面積の開口部(貫通孔11の一端)31aを有するソケットカバー31とを備えており、ソケットカバー31は、図示しないボルトによって本体部32に締結されるようになっている。   In FIG. 8, the socket body 10 is provided with a body portion 32 in which the through-hole 11 is formed, and an opening portion (through-hole 11 having a smaller opening area than the inner peripheral area of the through-hole 11). A socket cover 31 having a first end 31a. The socket cover 31 is fastened to the main body 32 by a bolt (not shown).

また、ソケットカバー31の開口部31aと貫通孔11の間のソケットカバー31部分によって係合部としての環状係合部31dが構成されており、この環状係合部31dに第1導電部材3のフランジ部3fが係合することにより、第1導電部材3がソケット本体10から抜け出ないようになっている。   Further, an annular engagement portion 31d as an engagement portion is configured by the socket cover 31 portion between the opening 31a of the socket cover 31 and the through hole 11, and the first conductive member 3 is formed in the annular engagement portion 31d. The first conductive member 3 is prevented from coming out of the socket body 10 by the engagement of the flange portion 3f.

このように、本実施の形態では、第1導電部材3、第2導電部材4および第3導電部材5が配置されるソケット本体10を、貫通孔11が形成された本体部32と、貫通孔11の内周面積よりも小さい開口面積を有する開口部31aを有するソケットカバー31とから構成したので、貫通孔11および開口部11bが形成された本体部32と、開口部31aが形成されたソケットカバー31と、をボルトによって一体化することができる。よって、開口部31aの形成を容易に行うことができ、ソケット本体10の製造を容易に行うことができる。   As described above, in the present embodiment, the socket body 10 in which the first conductive member 3, the second conductive member 4, and the third conductive member 5 are disposed is connected to the main body portion 32 in which the through hole 11 is formed, and the through hole. 11 has a socket cover 31 having an opening 31a having an opening area smaller than the inner peripheral area of the main body 32, a main body 32 having the through hole 11 and the opening 11b, and a socket having the opening 31a formed therein. The cover 31 can be integrated with a bolt. Therefore, the opening 31a can be easily formed, and the socket body 10 can be easily manufactured.

この場合、1つのソケット本体10に貫通孔11と開口部11bを開口するには、まず、切削加工によって本体部32に開口部11bを開口した後、開口部11bを下側に位置するようにして本体部32の上面側から貫通孔11を開口する。こうして貫通孔11および開口部11bが形成された本体部32と、別工程で開口部31aが形成されたソケットカバー31と、をボルトによって一体化する。   In this case, in order to open the through hole 11 and the opening 11b in one socket body 10, first, the opening 11b is opened in the main body 32 by cutting, and then the opening 11b is positioned on the lower side. The through hole 11 is opened from the upper surface side of the main body portion 32. In this way, the main body part 32 in which the through hole 11 and the opening part 11b are formed and the socket cover 31 in which the opening part 31a is formed in a separate process are integrated by a bolt.

また、本実施の形態では、本体部32が分割されていないために、第1、第2の実施の形態に比べて本体部32の組立作業が容易になる。なお、第1、第2の実施の形態では、第1ソケット本体13と第2ソケット本体14の分割面P1、P2の位置合せが必要である。   Further, in the present embodiment, since the main body portion 32 is not divided, the assembling work of the main body portion 32 is facilitated as compared with the first and second embodiments. In the first and second embodiments, it is necessary to align the dividing surfaces P1 and P2 of the first socket body 13 and the second socket body 14.

さらに、本実施の形態では、第1圧縮ばね6および第2圧縮ばね7を第3導電部材5に固定していないので、第2導電部材4、第2圧縮ばね7、第3導電部材5、第1圧縮ばね6、第1導電部材3の各部材をソケット本体10の貫通孔11に落とし込んで組立てることができる。よって、検査用ソケット1の組立作業が容易になる。   Further, in the present embodiment, since the first compression spring 6 and the second compression spring 7 are not fixed to the third conductive member 5, the second conductive member 4, the second compression spring 7, the third conductive member 5, Each member of the first compression spring 6 and the first conductive member 3 can be assembled by dropping into the through hole 11 of the socket body 10. Therefore, the assembly operation of the inspection socket 1 is facilitated.

また、本実施の形態では、第1圧縮ばね6、第1導電部材3、第3導電部材5、第2圧縮ばね7、第2導電部材4のいずれかを交換する際には、ソケットカバー31および本体部32からボルトを取り外した後、ソケットカバー31を本体部32から取り外した状態で交換作業を行うことができるため、交換作業の作業性を向上させることができる。   In the present embodiment, when any one of the first compression spring 6, the first conductive member 3, the third conductive member 5, the second compression spring 7, and the second conductive member 4 is replaced, the socket cover 31 is used. In addition, since the replacement work can be performed in a state where the socket cover 31 is removed from the main body part 32 after the bolts are removed from the main body part 32, the workability of the replacement work can be improved.

以上のように、本発明に係る検査用ソケットは、加工が容易であるとともに、異なる被検査対象物に対応可能にして汎用性を高くすることができるという効果を有し、ICパッケージや集積回路素子等を検査する検査用ソケット等として有用である。   As described above, the inspection socket according to the present invention has an effect that it can be easily processed and can be applied to different objects to be inspected to increase versatility. It is useful as an inspection socket for inspecting elements and the like.

本発明に係る検査用ソケットの第1の実施の形態を示す図であり、検査用ソケットの正面断面図である。It is a figure which shows 1st Embodiment of the socket for a test | inspection which concerns on this invention, and is front sectional drawing of a socket for a test | inspection. 本発明に係る検査用ソケットの第1の実施の形態を示す図であり、検査用ソケットの組立て方法の手順を説明する図である。It is a figure which shows 1st Embodiment of the socket for a test | inspection which concerns on this invention, and is a figure explaining the procedure of the assembly method of the socket for a test | inspection. 図2(b)のA−A方向矢視図である。It is an AA direction arrow line view of FIG.2 (b). 本発明に係る検査用ソケットの第1の実施の形態を示す図であり、テスト時動作状態を示す検査用ソケットの正面断面図である。It is a figure which shows 1st Embodiment of the socket for a test | inspection which concerns on this invention, and is front sectional drawing of the socket for a test | inspection which shows the operation state at the time of a test. 本発明に係る検査用ソケットの第1の実施の形態を示す図であり、他の構成の第2導電部材を備えた検査用ソケットの正面断面図である。It is a figure which shows 1st Embodiment of the socket for a test | inspection which concerns on this invention, and is front sectional drawing of the socket for a test | inspection provided with the 2nd electroconductive member of another structure. 本発明に係る検査用ソケットの第1の実施の形態を示す図であり、他の構成の第2導電部材を備えた検査用ソケットの正面断面図である。It is a figure which shows 1st Embodiment of the socket for a test | inspection which concerns on this invention, and is front sectional drawing of the socket for a test | inspection provided with the 2nd electroconductive member of another structure. 本発明に係る検査用ソケットの第2の実施の形態を示す図であり、検査用ソケットの正面断面図である。It is a figure which shows 2nd Embodiment of the socket for an inspection which concerns on this invention, and is front sectional drawing of the socket for an inspection. 本発明に係る検査用ソケットの第3の実施の形態を示す図であり、検査用ソケットの正面断面図である。It is a figure which shows 3rd Embodiment of the socket for an inspection which concerns on this invention, and is front sectional drawing of the socket for inspection.

符号の説明Explanation of symbols

1 検査用ソケット
2 両端変位型コンタクトプローブ
3 第1導電部材
3f、4f フランジ部
4 第2導電部材
5 第3導電部材
5a フランジ部(拡径部)
5b 第1端部
5c 第2端部
6 第1圧縮ばね(第1弾性部材)
7 第2圧縮ばね(第2弾性部材)
10 ソケット本体
11 貫通孔
11a、11b、31a 開口部
11d、11e、31d 環状係合部(係合部)
11f 第1貫通孔(貫通孔の一方側)
11g 第2貫通孔(貫通孔の他方側)
13 第1ソケット本体
14 第2ソケット本体
21 被検査対象物
21a 接続端子
22 プリント配線板(検査装置)
22a 接続端子
31 ソケットカバー
32 本体部
DESCRIPTION OF SYMBOLS 1 Inspection socket 2 Both-ends displacement type contact probe 3 1st electroconductive member 3f, 4f Flange part 4 2nd electroconductive member 5 3rd electroconductive member 5a Flange part (expansion part)
5b 1st end part 5c 2nd end part 6 1st compression spring (1st elastic member)
7 Second compression spring (second elastic member)
DESCRIPTION OF SYMBOLS 10 Socket main body 11 Through-hole 11a, 11b, 31a Opening part 11d, 11e, 31d Annular engagement part (engagement part)
11f 1st through-hole (one side of a through-hole)
11g Second through hole (the other side of the through hole)
13 First socket body 14 Second socket body 21 Object to be inspected 21a Connection terminal 22 Printed wiring board (inspection device)
22a Connection terminal 31 Socket cover 32 Body

Claims (3)

少なくとも1つ以上の貫通孔が形成されたソケット本体と、
前記貫通孔の一端の開口部側に配置され、被検査対象物の接続端子に接触するための電気的接触部を構成する第1導電部材と、
前記貫通孔の他端の開口部側に配置され、検査装置の接続端子に接触するための電気的接触部を構成する第2導電部材と、
前記ソケット本体の貫通孔に収納され、一端に前記第1導電部材が摺動自在に保持結合されるとともに、他端に前記第2導電部材が摺動自在に保持結合される第3導電部材と、
前記第3導電部材の軸方向の所定箇所に形成され、前記導電部材の半径方向外方に拡径される拡径部と、
前記第1導電部材と前記拡径部とに接して双方の間で前記第3導電部材を取り囲むようにして設けられ、前記第1導電部材および前記拡径部が軸方向の所定間隔より接近するときに前記間隔を拡大する方向に双方を付勢する中空の第1弾性部材と、
前記第2導電部材と前記拡径部とに接して双方の間で前記第3導電部材を取り囲むようにして設けられ、前記第2導電部材および前記拡径部が軸方向の所定間隔より接近するときに前記間隔を拡大する方向に双方を付勢する中空の第2弾性部材と、
を備えたことを特徴とする検査用ソケット。
A socket body in which at least one or more through holes are formed;
A first conductive member that is disposed on the opening side of one end of the through hole and that constitutes an electrical contact portion for contacting a connection terminal of an object to be inspected;
A second conductive member disposed on the opening side of the other end of the through hole and constituting an electrical contact portion for contacting a connection terminal of the inspection device;
A third conductive member housed in a through hole of the socket body, the first conductive member being slidably held and coupled to one end, and the second conductive member slidably held and coupled to the other end; ,
A diameter-expanded portion formed at a predetermined position in the axial direction of the third conductive member and expanded radially outward of the conductive member;
The first conductive member and the enlarged diameter portion are provided so as to be in contact with and surround the third conductive member therebetween, and the first conductive member and the enlarged diameter portion are closer than a predetermined interval in the axial direction. A hollow first elastic member that biases both in a direction that sometimes enlarges the spacing;
The second conductive member and the enlarged diameter portion are provided so as to be in contact with and surround the third conductive member therebetween, and the second conductive member and the enlarged diameter portion are closer than a predetermined interval in the axial direction. A hollow second elastic member that urges both in a direction that sometimes enlarges the spacing;
An inspection socket characterized by comprising:
前記第1弾性部材と前記第2弾性部材の仕様が異なることを特徴とする請求項1に記載の検査用ソケット。   The inspection socket according to claim 1, wherein specifications of the first elastic member and the second elastic member are different. 前記ソケット本体が、前記貫通孔が形成された本体部と、前記本体部と別体に設けられ、前記貫通孔の内周面積よりも小さい開口面積の開口部を有するソケットカバーと、を備え、
前記開口部と前記貫通孔の間の前記ソケットカバー部分によって係合部が形成されることを特徴とする請求項1または請求項2に記載の検査用ソケット。
The socket body includes a main body portion in which the through hole is formed, and a socket cover provided separately from the main body portion and having an opening portion having an opening area smaller than an inner peripheral area of the through hole,
The inspection socket according to claim 1, wherein an engaging portion is formed by the socket cover portion between the opening and the through hole.
JP2008260422A 2008-10-07 2008-10-07 Socket for inspection Pending JP2010091358A (en)

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Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013152200A (en) * 2012-01-26 2013-08-08 Nidec-Read Corp Probe and connection jig
WO2017126877A1 (en) * 2016-01-19 2017-07-27 임경숙 Electric characteristic inspection pin and inspection unit having same
WO2017188595A1 (en) * 2016-04-27 2017-11-02 주식회사 아이에스시 Bipartite probing device
KR101911005B1 (en) 2018-01-11 2018-10-24 오므론 가부시키가이샤 Probe pin, inspection jig, inspection unit and inspection apparatus
CN113030522A (en) * 2016-06-17 2021-06-25 欧姆龙株式会社 Socket with improved structure
WO2025164494A1 (en) * 2024-01-30 2025-08-07 株式会社日本マイクロニクス Probe and electrical connection device
WO2025216168A1 (en) * 2024-04-10 2025-10-16 株式会社日本マイクロニクス Probe

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Publication number Priority date Publication date Assignee Title
JP2003007412A (en) * 2001-06-20 2003-01-10 Enplas Corp Socket for electric component
JP2006084212A (en) * 2004-09-14 2006-03-30 Unitechno Inc Both end displacement contact probe
JP2006098254A (en) * 2004-09-30 2006-04-13 Yokowo Co Ltd probe

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003007412A (en) * 2001-06-20 2003-01-10 Enplas Corp Socket for electric component
JP2006084212A (en) * 2004-09-14 2006-03-30 Unitechno Inc Both end displacement contact probe
JP2006098254A (en) * 2004-09-30 2006-04-13 Yokowo Co Ltd probe

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013152200A (en) * 2012-01-26 2013-08-08 Nidec-Read Corp Probe and connection jig
WO2017126877A1 (en) * 2016-01-19 2017-07-27 임경숙 Electric characteristic inspection pin and inspection unit having same
WO2017188595A1 (en) * 2016-04-27 2017-11-02 주식회사 아이에스시 Bipartite probing device
KR101841107B1 (en) * 2016-04-27 2018-03-22 주식회사 아이에스시 Bifurcated probe apparatus
TWI641838B (en) * 2016-04-27 2018-11-21 Isc股份有限公司 Bifurcated probe apparatus
CN113030522A (en) * 2016-06-17 2021-06-25 欧姆龙株式会社 Socket with improved structure
KR101911005B1 (en) 2018-01-11 2018-10-24 오므론 가부시키가이샤 Probe pin, inspection jig, inspection unit and inspection apparatus
WO2025164494A1 (en) * 2024-01-30 2025-08-07 株式会社日本マイクロニクス Probe and electrical connection device
WO2025216168A1 (en) * 2024-04-10 2025-10-16 株式会社日本マイクロニクス Probe

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