JP2008268115A - Tilt sensor device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a tilt sensor device that can be easily miniaturized and has high inclination (tilt) detection accuracy and high long-term reliability.
A plurality of strip-like electrodes 2a and 2b are arranged side by side in parallel with a space 1 therebetween, and a capacitor electrode 2 is vertically opposed to each other in a lattice shape in a top view. And a dielectric block 3 that can be moved between the plurality of strip-like electrodes 2a and 2b in accordance with the inclination of the space 1. Due to the interposition of the dielectric block 3 that moves according to the inclination of the space 1, the electrostatic capacitance in the opposing portion (capacitance electrode 2) of the electrodes 2 a and 2 b arranged in a lattice shape in a top view changes sequentially. The inclination and acceleration of the space 1 can be easily detected with high accuracy by changing the capacity. In addition, wear or deformation of the capacitor electrode 2 due to direct contact with the dielectric block 3 is prevented, and long-term reliability is high.
[Selection] Figure 1

Description

  The present invention relates to an inclination sensor device that detects the direction of inclination (inclination) of an electronic device such as a mobile phone or a PDA (personal digital assistant) or a vehicle.

  Conventionally, as a tilt sensor device for detecting tilt, a casing made of an electrical insulator such as a resin, a linear metal material, etc. are arranged so as to penetrate from the inside to the outside of the casing, A structure having a plurality of electrically conductive pins that are electrically independent from each other and a conductive sphere enclosed in a housing is often used. The casing is usually composed of an upper plate and a lower plate, and conductive pins are arranged in an inner peripheral portion in which conductive spheres are enclosed. The conductive pins are attached so as to penetrate the upper plate and the lower plate in the thickness direction. In addition, when the upper plate and the lower plate are joined, a sphere is inserted between the upper plate and the lower plate, so that the sphere is enclosed inside the casing formed of the upper plate and the lower plate.

  In such an inclination sensor device, a portion of the conductive pin exposed to the outside of the housing is electrically connected to the electric circuit of the external electric circuit board via solder or the like. An external electric circuit to which the conductive pin is connected is electrically connected to a detector such as an ammeter or a detector including a buzzer.

  Then, the sphere rolls and moves in the housing according to the inclination of the inclination sensor device, and the two adjacent conductive pins are electrically connected by the conductive sphere, and this electrical connection is detected. Thus, the direction in which the conductive sphere has moved, that is, the direction of inclination can be detected (see, for example, Patent Document 1).

  Capacitance in which a fluid (dielectric) such as silicon oil is enclosed in a container, and the direction of inclination of the container is detected by a change in capacitance between the upper electrode and the lower electrode facing each other across the container A type tilt sensor device is also used (see, for example, Patent Document 2).

By mounting this tilt sensor device as a component on an external electric circuit board constituting a device such as a vehicle tipping prevention device for working on rough terrain, such as a tractor, the tipping prevention device on which this tilt sensor device is mounted It is possible to detect the direction of inclination of the vehicle (that is, the vehicle or the like).
JP-A-11-162306 Japanese Patent Laid-Open No. 10-160458

  However, in the conventional inclination sensor device, the conductive pin is disposed so as to penetrate from the inside to the outside of the housing, and the conductive pin is electrically connected to the detection device or the like on the external electric circuit board. Therefore, there is a problem that so-called surface mounting and downsizing are difficult.

  In addition, since the sphere and the conductive pin are in direct contact with each other, the conductive pin may be worn or deformed, and the conductive pin and the sphere may not be in good contact with each other, and it is difficult to increase long-term reliability. there were.

  In the case of an inclination sensor device in which a fluid is sealed in a container, if the container is made small, the surface (liquid level) of the fluid due to the surface tension of the fluid or the wetting (climbing) on the wall of the container Since the influence of the fluctuation tends to increase, there is a possibility that the measurement accuracy of the capacitance is lowered and the detection accuracy of the tilt is lowered. Therefore, there is a problem that it is difficult to reduce the size.

  In addition, the liquid level of the fluid may fluctuate due to vibration applied to the container and the capacitance may fluctuate irregularly, which may reduce the accuracy of detecting the tilt.

  In particular, in recent years, such a tilt sensor device has come to be mounted on a small-sized electronic device such as a mobile phone or a PDA and is used in an unstable state such as a handheld device. The demand for high tilt sensor devices is increasing.

  The present invention has been completed in view of such conventional problems, and an object of the present invention is to provide a tilt sensor device that is easy to miniaturize and has high tilt detection accuracy and long-term reliability. There is.

  The inclination sensor device according to the present invention includes a capacitive electrode in which a plurality of strip-like electrodes are arranged side by side in parallel with a space therebetween, and are vertically opposed to each other in a lattice shape when viewed from above. And a dielectric block which is housed inside and is movable between the plurality of strip-shaped electrodes in accordance with the inclination of the space.

  Moreover, the inclination sensor device of the present invention is characterized in that, in the above configuration, the space is formed in an insulating container, and the capacitive electrode is arranged with the space interposed therebetween.

  In the inclination sensor device of the present invention, in the above configuration, the relative permittivity of the dielectric block is larger than the relative permittivity of a portion of the insulating container located between the capacitive electrode and the space. It is characterized by.

  The tilt sensor device of the present invention is characterized in that, in the above configuration, the upper and lower capacitive electrodes are arranged in parallel, and the dielectric block has upper and lower surfaces parallel to the capacitive electrode. .

  In the above-described configuration, the tilt sensor device according to the present invention is characterized in that the lower surface of the space is curved so that a central portion is lowered.

  Moreover, the inclination sensor device of the present invention is characterized in that, in the above-described configuration, the interval between the band-like electrodes is smaller than the outer dimension when the dielectric block is viewed in plan.

  The tilt sensor device according to the present invention is characterized in that, in the above configuration, the space has a columnar shape, and the dielectric block has a columnar shape.

  According to the tilt sensor device of the present invention, a plurality of strip-like electrodes are arranged side by side in parallel with a space between them, and capacitive electrodes are vertically opposed to each other in a lattice shape when viewed from above. And a dielectric block that can move between a plurality of strip-shaped electrodes according to the inclination of the space, so that an apparatus equipped with this inclination sensor device according to the inclination of the space is provided. The dielectric block moves by gravity (gravitational force) toward the lower side in the inclined direction. Along with the movement of the dielectric block, the electrostatic capacitance between the capacitive electrodes formed by the upper and lower strip electrodes facing each other sequentially at each portion (lattice point when viewed from above) where the upper and lower strip electrodes are opposed. The change can be detected by measuring the capacitance with the band-shaped electrode as a unit. Therefore, by measuring the capacitance between the strip-shaped electrodes facing vertically, and detecting which strip-shaped electrode the change is occurring, the direction in which the dielectric block is moving, that is, The direction of the tilt can be easily detected with high accuracy. In this case, the time required from the change in capacitance at a certain strip electrode (capacitance electrode portion where the strip electrodes face each other vertically) to the change in capacitance at the strip electrode adjacent thereto, that is, dielectric By detecting the time required for the body block to move between adjacent strip electrodes, the moving speed and acceleration of the dielectric block can be calculated and detected.

  In addition, since the direction of the inclination can be detected by a change in capacitance between the capacitive electrodes, the dielectric block does not need to be in direct contact with the capacitive electrode, and the capacitance that is likely to occur when both are in direct contact with each other. It is possible to effectively prevent electrode wear and deformation.

  Further, since the capacitance between the capacitive electrodes is changed by the movement of the dielectric block, the liquid level of the fluid changes due to irregular vibrations as in the prior art, that is, the capacitive electrode is configured. It is possible to prevent the thickness of the dielectric interposed between the upper and lower electrodes from fluctuating and erroneously detecting the change in capacitance and the direction of inclination.

  Further, it is not necessary to consider the surface tension of the dielectric block, and the capacitance generated between the capacitive electrodes can be effectively changed even with a small dielectric block interposed. Therefore, it is possible to provide a tilt sensor device that can be easily downsized.

  Therefore, according to the tilt sensor device of the present invention, it is possible to provide a tilt sensor device that is easy to downsize, has high tilt detection accuracy and long-term reliability, and can detect acceleration.

  In addition, in the tilt sensor device of the present invention, when the space is formed in the insulating container and the capacitive electrode is disposed across the space, the dielectric block is sealed in the space in the insulating container, and the capacitive electrode is The following effects can be obtained by forming inside the insulating container positioned above and below the space.

  In other words, the dielectric block can be reliably stored in the space, and the strip electrodes are arranged in a lattice pattern so that the capacitor electrodes are disposed over the entire space in a top view, for example. Thus, a dielectric block can be interposed between the capacitive electrodes according to the inclination of the space. Further, since a part of the insulating container is interposed between the dielectric block and the capacitive electrode, it is possible to effectively prevent wear or chipping caused by direct contact of the capacitive electrode with the dielectric block. In addition, it is possible to form a capacitive electrode while ensuring good electrical insulation between adjacent objects in the insulating container. Therefore, in this case, reliability and productivity as the tilt sensor device can be improved.

  In addition, the tilt sensor device according to the present invention is configured so that when the relative permittivity of the dielectric block is larger than the relative permittivity of a portion of the insulating container located between the capacitive electrode and the space, a part of the insulating container In addition, it is easy to make the change between the capacitance electrodes facing each other with the space therebetween larger when the dielectric block is interposed. Therefore, for example, the inclination sensor device can be easily reduced in thickness by suppressing the height of the space and the dielectric block in the space and the inclination accuracy can be easily improved.

  In the tilt sensor device of the present invention, when the upper and lower capacitive electrodes are arranged in parallel and the dielectric block has upper and lower surfaces parallel to the capacitive electrode, for example, the dielectric block is spherical. In comparison with this, when a dielectric block is interposed between the upper and lower capacitive electrodes, the capacitance between the capacitive electrodes can be changed more effectively. Therefore, it is possible to provide an inclination sensor device that can more reliably detect the inclination of the space due to a change in capacitance.

  Further, in the tilt sensor device of the present invention, when the lower surface of the space is curved so that the central portion is lowered, the outer periphery of the space of the dielectric block is compared with the case where the lower surface of the space is flat. Is suppressed by the curvature of the bottom surface of the space. For this reason, the dielectric block moves to the outer periphery of the space due to a slight inclination of the tilt sensor device or an external force (a force different from the gravitational force acting due to the inclination of the space) due to an erroneously applied vibration or the like. This is suppressed. Then, when the space is inclined at a predetermined angle to be detected, the dielectric block is moved in the direction of inclination for the first time in the space, and is interposed between the capacitive electrodes 2 to change the electrostatic capacitance, thereby detecting the inclination. The That is, it is effective in suppressing the sensitivity of detection from becoming excessive.

  In this case, when the space is horizontal, the dielectric can move to the center along the curved lower surface. Therefore, for example, when the capacitance of the capacitive electrode changes in the central portion of the space, it can be detected that the dielectric block is located in the central portion of the space (the space is not inclined and is horizontal) The detection that the space is horizontal can be made more reliable.

  Further, in the tilt sensor device of the present invention, when the distance between the strip-like electrodes is smaller than the outer dimension when the dielectric block is viewed in plan, the dielectric block moved according to the inclination of the space is adjacent to the dielectric block. It is possible to effectively prevent a change in capacitance from occurring between the strip-shaped electrodes accidentally entering and the portion where any strip-shaped electrodes face each other. Therefore, even if the space is tilted, the capacitance does not change in any of the capacitive electrodes, and it is effectively prevented from being erroneously detected that it is not tilted, and the tilt sensor has higher detection accuracy. It can be a device.

  In addition, when the space is cylindrical and the dielectric block is cylindrical, the tilt sensor device according to the present invention directly contacts (collises) the inner surface of the member constituting the space and the dielectric block. None of the side surfaces have corners or protrusions that are highly likely to be chipped or cracked. Therefore, mechanical destruction of the dielectric block and the members constituting the space is suppressed, and the long-term reliability as the tilt sensor device can be improved.

  The tilt sensor device of the present invention will be described with reference to the accompanying drawings.

  FIG. 1A is a top view (perspective view) showing an example of an embodiment of the tilt sensor device of the present invention, and FIG. 1B is a cross-sectional view taken along the line AA. In FIG. 1, reference numeral 1 denotes a space provided in the inside of the insulating container 4, 2 a and 2 b each indicate a strip-like electrode arranged in parallel with a space 1 therebetween, and 3 is accommodated in the space 1. Dielectric blocks 4 and 4 (4a, 4b) are insulating containers, and 9 is a tilt sensor device. The band-shaped electrodes (hereinafter also simply referred to as electrodes) 2a and 2b are opposed to each other in a lattice shape when viewed from above, and the capacitive electrode 2 is configured.

  The tilt sensor device 9 is configured such that when the tilt sensor device 9 is tilted, the dielectric block 3 accommodated in the space 1 moves between the electrodes 2 a and 2 b in the space 1 according to the tilt of the space 1. By utilizing the fact that the electrostatic capacitance between the capacitive electrodes 2 composed of electrodes 2a and 2b that are vertically opposed to each other with a 1 in between is changed when the dielectric block 3 is interposed therebetween, Detect the direction of tilt.

  In other words, according to the tilt sensor device 9, the dielectric block 3 moves to gravity (gravity of gravity) according to the tilt of the space 1, that is, toward the lower side in the direction in which the device on which the tilt sensor device 9 is mounted. It moves by component force. Along with the movement of the dielectric block 3, the capacitance of the capacitive electrode 2 formed by the upper and lower strip electrodes 2a and 2b facing each other is a portion where the upper and lower electrodes 2a and 2b are opposed (lattice points when viewed from above). ), And the change can be detected by measuring the capacitance in units of the strip electrodes 2a and 2b. Therefore, the dielectric block moves by measuring the electrostatic capacitance between the strip-like electrodes 2a and 2b opposed vertically and detecting which strip-like electrode 2a and 2b the change occurs between. Direction, that is, the direction of inclination can be easily detected with high accuracy. In this case, the capacitance of the strip-shaped electrodes 2a and 2b adjacent to the change in capacitance of the strip-shaped electrodes 2a and 2b (the portion of the capacitive electrode 2 where the strip-shaped electrodes 2a and 2b face each other up and down). , That is, the time required for the dielectric block 3 to move between the adjacent electrodes 2a and 2b is calculated and detected by calculating the moving speed and acceleration of the dielectric block 3. You can also.

  Note that the capacitance between the capacitive electrodes 2 formed by vertically opposing the strip-like electrodes 2a and 2b can be measured in units of the electrodes 2a and 2b as described above. In this case, wiring conductors (not shown) connected to each of the plurality of electrodes 2a and 2b are provided, and the upper and lower wiring conductors are connected to an external electric circuit for measurement, so that the upper and lower electrodes are opposed to each other. The capacitance between 2a and 2b (capacitance electrode 2) can be measured.

  For example, as shown in FIG. 2 (a), when the dielectric block 3 is interposed in a portion where the upper electrode 2a1 and the lower electrode 2b1 face each other in the arrangement of the electrodes 2a and 2b. The capacitance between 2a1 and electrode 2b1 increases. After that, as shown in FIG. 2B, when the dielectric block 3 moves in the direction of the adjacent electrode 2b2 (the dielectric block 3 is interposed between the electrodes 2a1 and 2b2), the electrode 2a1 It can be seen that the capacitance between the electrode 2b2 and the dielectric block 3 has moved in this direction, and that the space 1 is inclined in this direction. The same applies when the dielectric block 3 moves between the electrode 2a2 and the electrode 2b2, or when it moves between the electrode 2a2 and the electrode 2b1. 2A and 2B are top views (perspective views) schematically showing an enlarged main part of the situation when the tilt sensor device 9 shown in FIG. 1 operates. In FIG. 2, the same parts as those in FIG.

  In addition, since the direction of the inclination can be detected by detecting a change in capacitance between the capacitive electrodes 2 that are vertically opposed to each other, the dielectric block 3 has the capacitive electrode 2 (band-like electrodes 2a and 2b). It is not necessary to directly contact the capacitor electrode 2, and it is possible to effectively prevent the capacitor electrode 2 from being worn or deformed easily when both are in direct contact.

  Further, the tilt sensor device 9 of the present invention changes the electrostatic capacitance between the capacitive electrodes 2 by the movement of the dielectric block 3 and detects the tilt by the change, so that it is irregular as in the conventional tilt sensor device. If the liquid level of the fluid changes due to vibration or the like, the direction of the tilt is erroneously detected, that is, the thickness of the dielectric interposed between the capacitive electrodes 2 varies due to a factor other than the tilt. Thus, it is possible to prevent erroneous detection of capacitance change and tilt direction.

  In addition, the dielectric block 3 does not need to consider surface tension unlike the fluid dielectric, and the capacitance generated between the capacitive electrodes 2 can be effectively changed even by the small dielectric block 3 interposed. Therefore, the tilt sensor device 9 can be easily downsized.

  Therefore, according to the inclination sensor device 9 of the present invention, there is provided the inclination sensor device 9 that can be easily downsized, has high inclination detection accuracy and long-term reliability, and can detect acceleration. be able to.

  By detecting the acceleration of the dielectric block 3, a force acting on the dielectric block 3 (a force obtained by subtracting a drag force such as a frictional force from a gravitational force caused by the inclination) can be calculated in advance. The angle of inclination of the space 1 can be calculated by measuring the frictional force acting on the dielectric block 3.

  The space 1 accommodates the dielectric block 3 and can be moved between the dielectric blocks 3. The space 1 is arranged side by side and in parallel and is vertically opposed to each other in a lattice shape in a top view. It has a shape and a dimension that can be arranged between the strip-shaped electrodes 2a and 2b.

  The shape of the space 1 having such a condition is, for example, a polygonal columnar shape such as a quadrangular prism shape, a triangular prism shape, a hexagonal column shape, or a cylindrical shape, or in these shapes, the upper surface, the lower surface, and the side surface are curved or uneven in part. It is a shape that was provided.

  In the example of this embodiment, the rectangular parallelepiped insulating container 4 is formed in a hollow shape, and the space 1 is formed by the hollow portion (columnar shape).

  The capacitive electrode 2 is configured such that the strip-like electrodes 2a and 2b are vertically opposed to each other in a lattice shape when viewed from above, and generates a capacitance between them. As described above, the capacitance changes. Thus, the direction of the inclination of the space 1 is detected.

  Since the capacitance electrode 2 detects a change in capacitance caused by the movement of the dielectric block 3 in the space, and thereby detects the direction of inclination and acceleration, a plurality of the capacitance electrodes 2 arranged side by side. The strip-shaped electrodes 2a and 2b are configured to face each other vertically in a lattice shape when viewed from above. That is, by forming the capacitive electrode 2 with the strip-like electrodes 2a and 2b facing each other in a lattice pattern, the capacitance generating portion (capacitive electrode 2) is regularly arranged in the space 1 Become. Then, by detecting which band-shaped electrodes 2a and 2b are opposed to each other, the capacitance of the dielectric block 3 is moved to which part of the space 1, that is, in which capacity the space 1 is. Whether it is inclined in the direction of the electrode 2 can be easily detected. In addition, the time required from the change in capacitance at a certain capacitance electrode 2 to the change in capacitance at the adjacent capacitance electrode 2, that is, when the dielectric block 3 moves between the adjacent capacitance electrodes 2. By measuring the time required, the moving speed and acceleration of the dielectric block 3 can also be detected.

  In the example of this embodiment, the space 1 has a circular shape when viewed from above, and a plurality of strip-like electrodes 2a and 2b are arranged horizontally and in parallel at regular intervals above and below the space 1, respectively. The upper and lower belt-like electrodes 2a and 2b are arranged so as to be orthogonal to each other when viewed from above, and face each other in a lattice shape.

  In the example of this embodiment, the strip-like electrodes 2a and 2b are arranged at a constant interval. For example, the outer peripheral portion of the space 1 has a distance (movement distance of the dielectric block 3) that is greater than the central portion. You may make it wide and maintain the precision of the measurement of the moving speed or acceleration about the movement of the dielectric block 3 which tends to increase in speed toward the outer peripheral part. As described above, if the distance between the electrode 2a (2b) and the electrode 2a (2b) is increased, the time required for the movement of the dielectric block 3 between them becomes too short, and the relative measurement error increases. Can be prevented.

  In addition, the electrodes 2a and 2b, as shown in FIG. 3, according to the shape of the space 1 and the like, intersect with the elliptical space 1 obliquely in a top view obliquely in a lattice shape as shown in FIG. (Slant lattice). FIG. 3 is a top view (perspective view) schematically showing a modification of the inclination sensor device 9 shown in FIG. In FIG. 3, the same parts as those in FIG.

  However, if the arrangement of the electrodes 2a and 2b is irregular, the dielectric block 3 moves in which part of the space 1 the electrodes 2a and 2b whose capacitances have changed are located or at what speed. The positions and adjacent intervals of the electrodes 2a and 2b, which are the reference for detecting and calculating whether or not, vary, making it difficult to clearly detect the inclination and acceleration. Therefore, it is necessary that a plurality of the strip-like electrodes 2a and 2b are arranged side by side and in parallel.

  The dielectric block 3 has a function of moving according to the inclination of the space 1 and increasing the capacitance between the electrodes 2a and 2b located in the moved portion. In the space 1 in which the dielectric block 3 is accommodated, the capacitance between the electrodes 2a and 2b is measured, and by detecting the change in the capacitance, the direction in which the dielectric block 3 is moving, That is, the direction in which the space 1 is inclined can be detected.

  For this reason, the dielectric block 3 is formed in a shape and size that can move in the direction in which the space 1 is inclined, and is accommodated in the space 1. The movement of the dielectric block 3 in the space 1 is caused by sliding or rolling on the lower surface of the space 1 due to the force of gravity acting due to the inclination of the space 1.

  In order to facilitate such movement, the dielectric block 3 is formed in a polygonal column shape such as a triangular column shape or a quadrangular column shape (cuboid shape), a cylindrical shape, an elliptical column shape, a spherical shape, or the like. The dielectric block 3 may have these shapes and the upper and lower surfaces, the side surfaces, etc. are curved, or the concave and convex portions are partially formed.

  Further, the dielectric block 3 is interposed between the capacitive electrodes 2 in which the strip-shaped electrodes 2a and 2b face each other up and down, and the capacitance generated therebetween can be changed to an extent that can be easily detected. It is made of materials and dimensions that can be used.

  Such a dielectric block 3 is made of, for example, a ceramic material such as barium titanate, strontium titanate, magnesium titanate or a mixed material thereof, or a resin material such as styrene resin, polypropylene resin, or polyphenylene sulfide resin. It is made of a material having a high relative dielectric constant such as These resin materials have a relative dielectric constant of about 3 (20 ° C.), and barium titanate has a relative dielectric constant of about 500 or more (20 ° C.). The dielectric block 3 is preferably made of a dielectric material such as barium titanate having a relative dielectric constant of about 500 or more or a mixed system thereof in order to greatly change the capacitance between the electrodes 2a and 2b.

  Further, the thickness of the dielectric block 3 is preferably as thick as possible in the space 1 in order to greatly change the capacitance between the capacitive electrodes 2 facing vertically. Moreover, it is preferable that the outer dimension when the dielectric block 3 is viewed in plan is as large as the outer dimension when the electrodes 2a and 2b are vertically opposed to each other (individual capacitor electrodes 2). In this case, if the outer dimension when the dielectric block 3 is viewed in plan is too large, the dielectric block 3 is interposed across the entire area of the adjacent capacitor electrodes 2 formed, etc. The detection accuracy in the direction of tilt may be reduced.

  In the example of this embodiment, the dielectric block 3 is formed in a thin cylindrical shape slightly lower than the height of the space 1. The dielectric block 3 is formed with a slightly larger outer dimension than the portion where the strip-like electrodes 2a and 2b face vertically when viewed in plan.

  If the dielectric block 3 is, for example, a cylindrical shape, a barium titanate powder is processed into a sheet shape together with an organic solvent and a binder to produce a plurality of ceramic green sheets and cut into a predetermined disc shape. It can produce by baking together after laminating together and making it cylindrical shape.

  In such an inclination sensor device 9, for example, as in the example of this embodiment, the space 1 is formed in the insulating container 4, and the capacitive electrodes 2 (band-like electrodes 2 a and 2 b) are arranged with the space 1 in between. If there are, there are the following effects.

  That is, by enclosing the dielectric block 3 in the space 1 in the insulating container 4 and forming a plurality of strip-like electrodes 2 a and 2 b side by side and in parallel inside the insulating container 4 positioned above and below the space 1. The dielectric block 3 can be reliably stored in the space 1. For example, the strip-like electrodes 2a and 2b are arranged in a lattice shape so that the capacitive electrode 2 is arranged in the entire area corresponding to the space 1 in the insulating container 4, so that the inclination of the space 1 is increased. The dielectric block 3 can be more reliably interposed between the capacitive electrodes 2 including the electrodes 2a and 2b. In addition, since a part of the insulating container 4 is interposed between the dielectric block 3 and the capacitive electrode 2, it is possible to effectively prevent wear or chipping due to direct contact of the capacitive electrode 2 with the dielectric block 3. be able to. In addition, a plurality of electrodes 2a and 2b can be formed in the insulating container 4 while ensuring good electrical insulation between adjacent ones. Therefore, in this case, the reliability and productivity of the tilt sensor device 9 can be improved.

  The outer shape of the insulating container 4 is, for example, a quadrangular shape or a circular shape when viewed from above, and is formed with an outer dimension that allows at least the space 1 for accommodating the dielectric block 3 to be provided therein. . Further, as shown in FIG. 3, for example, the insulating container 4 may have a quadrangular shape whose outer shape is chamfered in a circular arc shape when viewed from above.

  The insulating container 4 includes an aluminum oxide sintered body (aluminum oxide ceramics), an aluminum nitride sintered body, a mullite sintered body, a silicon carbide sintered body, a silicon nitride sintered body, and a glass ceramic sintered body. Etc., a resin material such as an epoxy resin, a polyimide resin, and an acrylic resin, or an electrically insulating material such as a composite material of an inorganic material such as a ceramic material and a resin material.

  In the example of this embodiment, the insulating container 4 is formed by bonding a flat lid 4b to the upper surface of an insulating base 4a having a recess (no symbol) on the upper surface. A space 1 for accommodating the dielectric block 3 is constituted by the recess of the insulating base 4a and the lid 4b. The lid 4b may have a recess (not shown) that faces the recess of the insulating base 4a.

  For example, as shown in FIG. 4, the insulating base 4 a of the insulating container 4 has a strip-like electrode 2 b formed below the insulating layer 43 having a cylindrical penetrating portion (not indicated) corresponding to the space 1. The insulating layer 42 and the lowermost insulating layer 41 are sequentially laminated. The lid 4b is formed, for example, by laminating an uppermost insulating layer 45 on the insulating layer 44 on which the band-like electrode 2a is formed. FIG. 4 is an exploded perspective view showing the inclination sensor device shown in FIG. 4, parts similar to those in FIG. 1 are denoted by the same reference numerals. In FIG. 4, wiring conductors (described later) are omitted for easy understanding of the drawing.

  Further, the surface of the insulating container 4 which is the lower surface of the space 1 is subjected to polishing (for example, so-called mirror polishing) to increase the smoothness so that the dielectric block 3 can easily slide and move. You may keep it. In this case, if the insulating base 4a is a flat plate and the lid 4b has a recess (not shown) on the lower surface side, the upper surface of the insulating base 4a corresponding to the lower surface of the space 1 is polished. Can be done more easily. Therefore, it is effective in increasing the productivity of the tilt sensor device 9 that is easy to move by sliding of the dielectric block 3 and has high accuracy of tilt detection.

  If the insulating container 4 is made of, for example, an aluminum oxide sintered body, a raw material powder mainly composed of aluminum oxide powder and added with silicon oxide, calcium oxide or the like is formed into a sheet together with an organic solvent and a binder. Insulating base 4a and lid 4b are produced by forming a plurality of ceramic green sheets by cutting into a shape and dimensions corresponding to insulating layers 41 to 45, and stacking and firing. After that, the insulating base 4a and the lid 4b can be manufactured by bonding with a brazing material or a resin adhesive. The insulating layers 41 to 45 may be formed by laminating a plurality of ceramic green sheets according to the respective thicknesses and the convenience of securing the space for forming the electrodes 2a and 2b.

  In addition, if the insulating container 4 is made of a resin material such as an epoxy resin or a polyimide resin, the uncured material of these resin materials is shaped into a predetermined insulating base 4a or lid 4b using a mold. The insulating base 4a and the lid 4b can be manufactured by molding and curing, and these can be manufactured by bonding them with a resin adhesive.

  When the insulating container 4 is made of a resin material, an uncured thermosetting or light (ultraviolet) curable resin is molded into the shape of the insulating layers 41 to 45 using a mold and then cured. Then, the insulating container 4 may be manufactured by bonding the cured products molded into the shapes of the insulating layers 41 to 45 with a resin adhesive.

  The capacitor electrode 2 is formed, for example, inside the insulating container 4 so as to sandwich the space 1 vertically. The capacitive electrode 2 (band-shaped electrodes 2a and 2b constituting the capacitive electrode 2) is formed of a metal material such as tungsten, molybdenum, manganese, copper, silver, palladium, gold, or platinum. Such a metal material is applied to the insulating base 4a and the lid 4b of the insulating container 4 in the form of a metallized layer, a plating layer, a metal foil, a vapor deposition layer, or the like.

  For example, the capacitor electrode 2 is formed by printing a tungsten metal paste on a ceramic green sheet (for example, the insulating layers 42 and 44) to be the insulating base 4a and the lid 4b. It can be formed by laminating ceramic green sheets so as to be positioned.

  Further, if the insulating container 4 is made of a resin material and the electrodes 2a and 2b are made of copper, it corresponds to the insulating layers 42 and 44 by means such as adhesion of metal foil, electroless plating, etching, or the like. It can be formed by depositing a copper thin film in a predetermined pattern on the surface of the cured product.

  In the example of this embodiment, wiring conductors (not indicated) are formed on the insulating base 4a and the lid 4b from the respective electrodes 2a and 2b to the outer surface such as the lower surface of the insulating base 4a and the upper surface of the lid 4b. Has been. In this example, the wiring conductor includes a through conductor (no symbol) formed from each of the electrodes 2a and 2b to the lower surface of the insulating base 4a and the upper surface of the lid 4b, and a surface conductor (reference symbol) connected to the exposed end surface of the through conductor. None).

  By connecting the exposed portion (surface conductor) of this wiring conductor to an external electric circuit and measuring the capacitance between the upper and lower electrodes 2a and 2b, a change in the capacitance is detected, and the inclination of the space 1 That is, the inclination of the inclination sensor device 9 can be detected.

  The external electric circuit in this case is formed on, for example, a circuit board incorporated in a digital camera or a camera-equipped mobile phone. Then, when the tilt sensor device 9 is connected as a component, the direction in which the image is captured is changed according to the direction of the camera (so-called vertical position or horizontal position), and the upward direction at the time of shooting is always stored. Images can be captured and stored so as to match the upward direction.

  Also, when viewing images with a digital camera, mobile phone, PDA (Personal Digital Assistant), etc., the upper side of the photo is always on the opposite side of the Earth's gravity, regardless of the orientation of the image display device, such as a digital camera or mobile phone. In other words, it is possible to display the image display device so that the user viewing the image display device can easily view the image such as a photograph.

  In addition, in the tilt sensor device 9 in which the space 1 is formed in the insulating container 4 and the capacitive electrode 2 is arranged in this way, the relative permittivity of the dielectric block 3 is higher than that of the capacitive electrode 2 in the insulating container 4. When the relative dielectric constant of the portion located between the dielectric electrode 3 and the capacitor electrode 2 facing each other with a part of the insulating container 4 and the space 1 interposed therebetween is larger than the dielectric block 3. It is easy to make the change when the intervening is greater. Therefore, for example, even when the inclination of the space 1 is small and only a part of the dielectric block 3 is interposed between the capacitive electrodes 2, the capacitance between the upper and lower capacitive electrodes 2 can be detected. Therefore, the inclination detection accuracy is improved.

  For example, as shown in FIG. 5A, the height of the space 1 is kept as low as possible to further reduce the size (thinner) of the tilt sensor device 9, or as shown in FIG. As described above, when the capacitor electrode 2 (only the upper electrode 2a in this example) is formed on the outer surface of the insulating container 4 in order to facilitate the external connection of the capacitor electrode 2, the space 1 The thickness of the insulating container 4 interposed between the capacitive electrode 2 and the space 1 is relatively thick with respect to the height. In such a case, if the relative permittivity of the dielectric block 3 is made larger than the relative permittivity of the portion of the insulating container 4 located between the capacitive electrode 2 and the space 1, the dielectric block 3 The change (increase) in the electrostatic capacity due to the interposition can be made more effective. Therefore, this configuration is also effective in reducing the thickness of the tilt sensor device 9. 5A and 5B are cross-sectional views showing another example of the embodiment of the tilt sensor device of the present invention. 5, parts similar to those in FIG. 1 are denoted by the same reference numerals.

  Further, in this inclination sensor device 9, when the upper and lower capacitive electrodes 2 are arranged in parallel and the dielectric block 3 has upper and lower surfaces parallel to the capacitive electrode 2, that is, the upper band-shaped electrode 2a and the lower electrode 2a In the case where the dielectric block 3 having the upper surface parallel to the electrode 2a and the lower surface parallel to the electrode 2b is accommodated in the space 1 with the strip-shaped electrode 2b in the vertical direction, for example, the dielectric block 3 When the dielectric block is interposed between the electrodes 2a and 2b, the capacitance between the electrodes 2a and 2b can be changed more effectively than in the case where is a spherical shape. Therefore, the inclination sensor device 9 can more reliably detect the inclination of the space 1 due to the change in capacitance.

  In addition, as shown in FIG. 6, the tilt sensor device 9 has a dielectric material that has a lower surface when the lower surface of the space 1 is curved so that the central portion is lower than when the lower surface of the space 1 is flat. The movement of the body block 3 to the outer periphery is suppressed. Therefore, the dielectric block 3 moves to the outer periphery of the space 1 by a slight inclination of the inclination sensor device 9 or an external force (a force different from the gravitational force acting due to the inclination of the space) due to an erroneously applied vibration or the like. This is suppressed. Then, when the space 1 is inclined at a predetermined angle to be detected, the dielectric block 3 is moved to the outer periphery side of the space 1 for the first time, and between the capacitor electrodes 2 arranged regularly with the space 1 in between. The inclination is detected by sequentially changing the capacitance. That is, it is effective in suppressing the sensitivity of detection from becoming excessive. FIG. 6 is a cross-sectional view showing another example of the embodiment of the tilt sensor device 9 of the present invention. In FIG. 6, the same parts as those in FIG.

  Such a configuration is effective, for example, when employed in an automobile antitheft device. In other words, it does not react with the inclination of the vehicle body (tilt sensor device 9) when another car passes by the wind or nearby, but reacts by opening / closing the door or by the inclination of a person riding (detecting the inclination and transmitting a signal) Etc.), the angle can be set.

  In this case, when the space 1 is horizontal, the dielectric block 3 moves to the center along the curved lower surface. Therefore, when the capacitance of the capacitive electrode 2 changes in the central portion of the space 1, it can be detected that the dielectric block 3 is located in the central portion of the space (the space 1 is horizontal) The detection that the space 1 is horizontal can be made more reliable.

  In this configuration, as shown in FIG. 7, the upper surface of the space 1 is curved so as to be substantially parallel to the curved lower surface, and the electrodes 2 a and 2 b are parallel to the upper and lower surfaces of the dielectric block 3 as much as possible. You may arrange so that. In this case, in addition to the effect of curving the lower surface of the space 1, the upper and lower capacitive electrodes 2 are arranged in parallel as described above, and the dielectric block 3 has upper and lower surfaces parallel to the capacitive electrode 2. It is also possible to obtain the effect of having (change the capacitance between the capacitance electrodes 2 more effectively). FIG. 7 is a cross-sectional view showing another example of the embodiment of the tilt sensor device 9 of the present invention. In FIG. 7, the same parts as those in FIG.

  Further, in the configuration in which the lower surface of the space 1 is curved as described above, when the acceleration is to be detected as described above, the lower surface of the space 1 is inclined with respect to the inclination of the entire space 1 because the lower surface is curved. Therefore, it is necessary to correct the amount and calculate the acceleration.

  In addition, the inclination sensor device 9 moves in accordance with the inclination of the space 1 when the interval between the plurality of strip-like electrodes 2a and 2b is smaller than the outer dimension when the dielectric block 3 is viewed in plan view. It is effectively prevented that the dielectric block 3 accidentally enters between the adjacent strip-shaped electrodes 2a and 2b and no change in capacitance occurs in any of the capacitive electrodes 2. Therefore, in spite of the inclination of the space 1, the capacitance does not change in any of the capacitive electrodes 2, and it is effectively prevented from being erroneously detected that the capacitance is not inclined. A high inclination sensor device 9 can be obtained.

  In addition, the tilt sensor device 9 of the present invention has a member (insulating container 4) that is in direct contact (collision) with the space 1 when the space is cylindrical and the dielectric block 3 is cylindrical. Neither the inner side surface of the insulating base 4a or the like) nor the side surface of the dielectric block 3 has corners or protrusions that are likely to be chipped or cracked. Therefore, mechanical destruction of the members constituting the dielectric block 3 and the space 1 is suppressed, and the long-term reliability as the tilt sensor device 9 can be improved.

  In such an inclination sensor device 9, for example, the dielectric block 3 is first placed in the recess of the insulating base 4 a manufactured as described above, and then the lid 4 b is insulated so as to close the recess. It can be manufactured by bonding to the upper surface of the substrate 4a.

  Further, the lid 4b and the insulating base 4a can be joined by, for example, joining via a joining material such as an organic resin adhesive, glass, brazing material, or the like. In this case, a metal layer (not shown) may be formed in advance on the joint surface between the two, and the metal layers may be joined with a brazing material. The metal layer can be formed by the same method using the same metal material as the capacitor electrode 2.

  Note that the present invention is not limited to the above-described embodiments, and various modifications can be made without departing from the scope of the present invention. For example, at least a part of the insulating container 4 may be formed of a light-transmitting material such as glass, acrylic resin, or methacrylic resin so that the position of the dielectric block 3 can be visually recognized from the outside. Good. In this case, it is possible to easily confirm whether or not the dielectric block 3 is moving normally in accordance with the inclination of the space 1, and the inclination sensor device 9 is more accurate and easy to check. be able to.

(A) is a top view which shows an example of embodiment of the inclination sensor apparatus of this invention, (b) is sectional drawing in the AA line. (A) And (b) is a principal part enlarged top view which shows typically the condition when the inclination sensor apparatus shown in FIG. 1 act | operates. It is a top view which shows the modification of the inclination sensor apparatus shown in FIG. It is a perspective view which decomposes | disassembles and shows the inclination sensor apparatus shown in FIG. (A) And (b) is sectional drawing which shows the other example of embodiment of the inclination sensor apparatus of this invention, respectively. It is sectional drawing which shows the other example of embodiment of the inclination sensor apparatus of this invention. It is sectional drawing which shows the other example of embodiment of the inclination sensor apparatus of this invention.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 ... Space 2 ... Capacitance electrode 2a ... Strip electrode 2b ... Strip electrode 3 ... Dielectric block 4 ... Insulation container 4a ... Insulation substrate 4b ..Cover body
41 ～ 45 ・ ・ Insulating layer 9 ・ ・ ・ ・ Tilt sensor device

Claims (7)

A plurality of strip-like electrodes are arranged side by side in parallel with a space therebetween, and capacitive electrodes that are vertically opposed to each other in a lattice shape when viewed from above, and are accommodated inside the space, A tilt sensor device comprising: a dielectric block movable between the plurality of strip-shaped electrodes in accordance with tilt. The tilt sensor device according to claim 1, wherein the space is formed in an insulating container, and the capacitive electrode is disposed across the space. The inclination sensor device according to claim 2, wherein a relative dielectric constant of the dielectric block is larger than a relative dielectric constant of a portion of the insulating container located between the capacitive electrode and the space. 2. The tilt sensor device according to claim 1, wherein the upper and lower capacitive electrodes are arranged in parallel, and the dielectric block has upper and lower surfaces parallel to the capacitive electrode. The tilt sensor device according to claim 1, wherein a lower surface of the space is curved so that a central portion is lowered. The inclination sensor device according to claim 1, wherein an interval between the band-like electrodes is smaller than an outer dimension when the dielectric block is viewed in plan. The inclination sensor device according to claim 1, wherein the space is cylindrical and the dielectric block is cylindrical.

Images