JP2009031244A - Tilt sensor device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a tilt sensor device that can be easily miniaturized, and has high inclination detection accuracy and long-term reliability.
SOLUTION: A capacitive electrode 2 which is vertically opposed to each other with a space 1 in between and at least one of which is composed of a plurality of electrodes 2a, is accommodated in the space 1, and between the plurality of electrodes 2a according to the inclination of the space 1 It is the inclination sensor apparatus 9 which comprises the dielectric material block 3 which can move. The capacitance between the capacitive electrodes 2a and 2b that are vertically opposed to each other changes due to the interposition of the dielectric block 3 that moves in accordance with the inclination of the space 1, and the inclination of the space 1 can be easily and accurately adjusted by this change in capacitance. Can be detected. In addition, wear or deformation of the capacitor electrode 2 due to direct contact with the dielectric block 3 is prevented, and long-term reliability is high.
[Selection] Figure 1

Description

  The present invention relates to an inclination sensor device that detects the direction of inclination (inclination) of an electronic device such as a mobile phone or a PDA (personal digital assistant) or a vehicle.

  Conventionally, as a tilt sensor device for detecting tilt, a casing made of an electrical insulator such as a resin, a linear metal material, etc. are arranged so as to penetrate from the inside to the outside of the casing, A structure having a plurality of electrically conductive pins that are electrically independent from each other and a conductive sphere enclosed in a housing is often used. The casing is usually composed of an upper plate and a lower plate, and conductive pins are arranged in an inner peripheral portion in which conductive spheres are enclosed. The conductive pins are attached so as to penetrate the upper plate and the lower plate in the thickness direction. In addition, when the upper plate and the lower plate are joined, a sphere is inserted between the upper plate and the lower plate, so that the sphere is enclosed inside the casing formed of the upper plate and the lower plate.

  In such an inclination sensor device, a portion of the conductive pin exposed to the outside of the housing is electrically connected to the electric circuit of the external electric circuit board via solder or the like. An external electric circuit to which the conductive pin is connected is electrically connected to a detector such as an ammeter or a detector including a buzzer.

  Then, the sphere rolls and moves in the housing according to the inclination of the inclination sensor device, and the two adjacent conductive pins are electrically connected by the conductive sphere, and this electrical connection is detected. Thus, the direction in which the conductive sphere has moved, that is, the direction of inclination can be detected (see, for example, Patent Document 1).

  Capacitance in which a fluid (dielectric) such as silicon oil is enclosed in a container, and the direction of inclination of the container is detected by a change in capacitance between the upper electrode and the lower electrode facing each other across the container A type tilt sensor device is also used (see, for example, Patent Document 2).

By mounting this tilt sensor device as a component on an external electric circuit board constituting a device such as a vehicle tipping prevention device for working on rough terrain, such as a tractor, the tipping prevention device on which this tilt sensor device is mounted It is possible to detect the direction of inclination of the vehicle (that is, the vehicle or the like).
JP-A-11-162306 Japanese Patent Laid-Open No. 10-160458

  However, in the conventional inclination sensor device, the conductive pin is disposed so as to penetrate from the inside to the outside of the housing, and the conductive pin is electrically connected to the detection device or the like on the external electric circuit board. Therefore, there is a problem that so-called surface mounting and downsizing are difficult.

  In addition, since the sphere and the conductive pin are in direct contact with each other, the conductive pin may be worn or deformed, and the conductive pin and the sphere may not be in good contact with each other, and it is difficult to increase long-term reliability. there were.

  In the case of an inclination sensor device in which a fluid is sealed in a container, if the container is made small, the surface (liquid level) of the fluid due to the surface tension of the fluid or the wetting (climbing) on the wall of the container Since the influence of the fluctuation tends to increase, there is a possibility that the measurement accuracy of the capacitance is lowered and the detection accuracy of the tilt is lowered. Therefore, there is a problem that it is difficult to reduce the size.

  In addition, the liquid level of the fluid may fluctuate due to vibration applied to the container and the capacitance may fluctuate irregularly, which may reduce the accuracy of detecting the tilt.

  In particular, in recent years, such a tilt sensor device has come to be mounted on a small-sized electronic device such as a mobile phone or a PDA and is used in an unstable state such as a handheld device. The demand for high tilt sensor devices is increasing.

  The present invention has been completed in view of such conventional problems, and an object of the present invention is to provide a tilt sensor device that is easy to miniaturize and has high tilt detection accuracy and long-term reliability. There is.

  The tilt sensor device according to the present invention includes a capacitive electrode that is vertically opposed to each other with a space therebetween, and at least one of which is composed of a plurality of electrodes, and is accommodated in the space, and the plurality of electrodes according to the inclination of the space And a dielectric block movable between them.

  Moreover, the inclination sensor device of the present invention is characterized in that, in the above configuration, the space is formed in an insulating container, and the capacitive electrode is arranged with the space interposed therebetween.

  In the inclination sensor device of the present invention, in the above configuration, the relative permittivity of the dielectric block is larger than the relative permittivity of a portion of the insulating container located between the capacitive electrode and the space. It is characterized by.

  The tilt sensor device of the present invention is characterized in that, in the above configuration, the upper and lower capacitive electrodes are arranged in parallel, and the dielectric block has upper and lower surfaces parallel to the capacitive electrode. .

  In the above-described configuration, the tilt sensor device according to the present invention is characterized in that the lower surface of the space is curved so that a central portion is lowered.

  In the inclination sensor device according to the aspect of the invention, in the configuration described above, one of the capacitive electrodes is the plurality of electrodes, and the other is one electrode facing a region where the plurality of electrodes are formed. It is characterized by this.

  The tilt sensor device according to the present invention is characterized in that, in the above configuration, the space has a polygonal shape or a circular shape in plan view, and the capacitive electrode is disposed along an outer periphery of the space. is there.

  The tilt sensor device according to the present invention is characterized in that, in the above-described configuration, the plurality of capacitive electrodes have an interval between adjacent ones smaller than an external dimension when the dielectric block is viewed in plan. It is.

  The tilt sensor device according to the present invention is characterized in that, in the above configuration, the space has a columnar shape, and the dielectric block has a columnar shape.

  In addition, the tilt sensor device of the present invention is characterized in that, in the above configuration, the space is filled with a liquid having a relative dielectric constant different from that of the dielectric block.

  The tilt sensor device according to the present invention is characterized in that, in the above configuration, the density of the dielectric block is smaller than the density of the liquid, and the upper surface of the space is curved so that a central portion is higher. To do.

  In the inclination sensor device according to the present invention, in the configuration described above, the one electrode is grounded, and one end portion of each of the plurality of electrodes is provided between the one end portion and the other end portion. The terminal for measuring the impedance of is connected.

  According to the tilt sensor device of the present invention, a space electrode is provided between the capacitor electrode that is vertically opposed and at least one of which is composed of a plurality of electrodes. The dielectric block is movable in accordance with the inclination of the space, that is, toward the lower side in the direction in which the device equipped with the inclination sensor device is inclined. It moves by component force. The fact that the dielectric block has moved on the side to which the dielectric block has moved (below the slope) is due to the change in capacitance between the capacitive electrodes facing each other with a space in between. Can be detected. Therefore, by measuring the electrostatic capacitance between the upper and lower capacitive electrodes and detecting the change, the direction in which the dielectric block has moved, that is, the direction of the inclination can be easily detected with high accuracy. it can.

  In addition, since the direction of the inclination can be detected by a change in capacitance between the capacitive electrodes, the dielectric block does not need to be in direct contact with the capacitive electrode, and the capacitance that is likely to occur when both are in direct contact with each other. It is possible to effectively prevent electrode wear and deformation.

  In addition, since the capacitance between the capacitive electrodes is changed by the movement of the dielectric block, the liquid level of the fluid changes due to irregular vibrations as in the past, that is, the upper and lower sides constituting the capacitive electrode. It is possible to prevent the thickness of the dielectric interposed between the electrodes from fluctuating and erroneously detecting the change in capacitance and the direction of inclination.

  Further, it is not necessary to consider the surface tension of the dielectric block, and the capacitance generated between the capacitive electrodes facing each other can be effectively changed even with a small dielectric block interposed. Therefore, it is possible to provide a tilt sensor device that can be easily downsized.

  Therefore, according to the tilt sensor device of the present invention, it is possible to provide a tilt sensor device that is easy to downsize and has high tilt detection accuracy and long-term reliability.

  In addition, in the tilt sensor device of the present invention, when the space is formed in the insulating container and the capacitive electrode is disposed across the space, the dielectric block is sealed in the space in the insulating container, and the capacitive electrode is The following effects can be obtained by forming inside the insulating container positioned above and below the space.

  That is, the dielectric block can be surely stored in the space, and the capacitive electrode is arranged so that the space is disposed in the portion corresponding to the outer peripheral portion of the space inside the insulating container, for example. Thus, a dielectric block can be interposed between the capacitor electrodes according to the inclination of the space. Further, since a part of the insulating container is interposed between the dielectric block and the capacitive electrode, it is possible to effectively prevent wear or chipping caused by direct contact of the capacitive electrode with the dielectric block. In addition, it is possible to form a plurality of electrodes while ensuring good electrical insulation between adjacent objects in the insulating container. Therefore, in this case, reliability and productivity as the tilt sensor device can be improved.

  In addition, the tilt sensor device according to the present invention is configured so that when the relative permittivity of the dielectric block is larger than the relative permittivity of a portion of the insulating container located between the capacitive electrode and the space, a part of the insulating container In addition, it is easy to make the change between the capacitance electrodes facing each other with the space therebetween larger when the dielectric block is interposed. Therefore, for example, the inclination sensor device can be easily reduced in thickness by suppressing the height of the space and the dielectric block in the space and the inclination accuracy can be easily improved.

  In the tilt sensor device of the present invention, when the upper and lower capacitive electrodes are arranged in parallel and the dielectric block has upper and lower surfaces parallel to the capacitive electrode, for example, the dielectric block is spherical. In comparison with this, when a dielectric block is interposed between the upper and lower capacitive electrodes, the capacitance between the capacitive electrodes can be changed more effectively. Therefore, it is possible to provide an inclination sensor device that can more reliably detect the inclination of the space due to a change in capacitance.

  Further, in the tilt sensor device of the present invention, when the lower surface of the space is curved so that the central portion is lowered, the outer periphery of the space of the dielectric block is compared with the case where the lower surface of the space is flat. Is suppressed by the curvature of the bottom surface of the space. For this reason, the dielectric block moves to the outer periphery of the space due to a slight inclination of the tilt sensor device or an external force (a force different from the gravitational force acting due to the inclination of the space) due to an erroneously applied vibration or the like. This is suppressed. When the space is inclined at a predetermined angle to be detected, the dielectric block is moved to the outer periphery side of the space for the first time, and the capacitance is changed between the upper and lower capacitive electrodes arranged on the outer periphery of the space. The tilt is detected. That is, it is effective in suppressing the sensitivity of detection from becoming excessive.

  In this case, when the space is horizontal, the dielectric can move to the center along the curved lower surface. Therefore, for example, when a capacitance electrode corresponding to the central portion is arranged and the capacitance of the capacitance electrode in the central portion changes, the dielectric block is located in the central portion of the space (the space is not inclined and is It may be possible to detect that the space is horizontal, so that it can be detected more reliably. In addition, it is possible not to dispose the capacitive electrode only in the central portion so that it can be detected that the space is not tilted and is horizontal when the capacitance of any capacitive electrode is not changed.

  In the tilt sensor device according to the present invention, when the capacitive electrode is one of a plurality of electrodes and the other is one electrode facing the region where the plurality of electrodes are formed, This is effective in improving the productivity of the tilt sensor device with high accuracy. That is, when manufacturing a tilt sensor device with one electrode facing the other electrode, even if a slight positional shift occurs in the vertical direction, the opposing area of each capacitor electrode is set to a predetermined area (a plurality of areas). Of each electrode). For this reason, for example, it is not necessary to precisely align one electrode with the other electrode as in the case where the other electrode is also a plurality of electrodes, and it is effective in improving the productivity as a tilt sensor device. It is.

  Further, in the tilt sensor device of the present invention, when the space is a polygonal shape or a circular shape in a plan view, and the capacitor electrode is arranged along the outer periphery of the space, the entire circumference when the space is seen in a plan view. It is easy to detect the tilt. That is, since the capacitance electrode is disposed on the outer periphery of the space, the dielectric block moved to the outer periphery of the space due to the inclination of the space can be interposed between the upper and lower capacitance electrodes to change the capacitance. In addition, since this space is polygonal or circular in plan view, for example, it corresponds to side portions and corner portions of the polygonal space, or fan-shaped portions having the same central angle of the circular space. By disposing the capacitive electrodes (a plurality of electrodes), the inclination can be detected for each certain range over the entire circumference of the space when viewed in plan.

  Further, in the inclination sensor device of the present invention, the plurality of capacitive electrodes are moved in accordance with the inclination of the space when the distance between adjacent ones is smaller than the outer dimension when the dielectric block is viewed in plan. It is effectively prevented that the dielectric block accidentally enters between adjacent capacitive electrodes and no change in capacitance occurs in any capacitive electrode. Therefore, even if the space is inclined, the capacitance does not change in any of the capacitive electrodes, and it is effectively prevented from being erroneously detected that the capacitance is not inclined. It can be a sensor device.

  In addition, when the space is cylindrical and the dielectric block is cylindrical, the tilt sensor device according to the present invention directly contacts (collises) the inner surface of the member constituting the space and the dielectric block. None of the side surfaces have corners or protrusions that are highly likely to be chipped or cracked. Therefore, mechanical destruction of the dielectric block and the members constituting the space is suppressed, and the long-term reliability as the tilt sensor device can be improved.

  In addition, in the tilt sensor device of the present invention, when the interior of the space is filled with a liquid having a relative dielectric constant different from that of the dielectric block, the rapid movement of the dielectric block is suppressed by the liquid. Therefore, it is more effectively suppressed that the dielectric block collides with a member constituting the space, and mechanical destruction such as cracking or chipping occurs in the dielectric block or the member constituting the space. . In addition, since the relative permittivity of the liquid is different from the relative permittivity of the dielectric block, the static electricity generated between the capacitive electrodes is different depending on whether the dielectric block is interposed between the upper and lower capacitive electrodes or not. The electric capacity is different. Therefore, it is possible to detect the direction of the inclination by detecting at which capacitor electrode the dielectric block exists. Therefore, in this case, a more reliable tilt sensor device can be provided.

  Further, in the tilt sensor device of the present invention, when the density of the dielectric block is smaller than the density of the liquid and the upper surface of the space is curved so that the central portion is higher, when the space is not tilted, Due to the buoyancy acting on the dielectric block, the dielectric block can move to the center along the upper surface of the space. Therefore, it is possible to provide a tilt sensor device that is highly reliable and more reliably detects that the space is not tilted.

  Further, the tilt sensor device of the present invention is configured such that one of the capacitive electrodes is a plurality of electrodes and the other is one electrode facing a region where the plurality of electrodes are formed. When one electrode is grounded and a terminal for measuring impedance between the one end and the other end is connected to one end of each of the plurality of electrodes In each of the plurality of electrodes, the impedance between the end portions (between one end portion and the other end portion) can be detected, and the inclination of the space is detected by detecting a change in the impedance. be able to.

  That is, in this case, in each of the plurality of electrodes that are one electrode, the impedance between the end portions changes in accordance with the capacitance between the other electrode as the ground conductor and one electrode that is the other electrode. . When the capacitance changes due to the dielectric block interposed between the upper and lower capacitance electrodes, the impedance between the end portions of the electrodes changes in each of the one electrode according to the change in capacitance, By detecting this change in impedance, it is possible to detect where the dielectric block has moved in the space, and to detect the inclination of the space.

  The tilt sensor device of the present invention will be described with reference to the accompanying drawings.

  Fig.1 (a) is a top view (perspective view) which shows an example of embodiment of the inclination sensor apparatus of this invention, FIG.1 (b) is sectional drawing in the AA line. In FIG. 1, 1 is a space provided inside the insulating container 4, 2 (2 a, 2 b) is a capacitor electrode facing up and down with the space 1 in between, and 3 is a dielectric housed in the space 1. Blocks 4 (4a and 4b) are insulating containers, and 9 is a tilt sensor device.

  The tilt sensor device 9 is configured such that when the tilt sensor device 9 is tilted, the dielectric block 3 accommodated in the space 1 moves between the capacitive electrodes 2a and 2b in the space 1 according to the tilt of the space 1. The direction of the inclination is detected by utilizing the fact that the capacitance between the capacitive electrodes 2a and 2b that are vertically opposed to each other with the space 1 interposed therebetween changes when the dielectric block 3 is interposed therebetween. .

  In other words, according to the tilt sensor device 9, the dielectric block 3 moves toward the lower side in accordance with the tilt of the space 1, that is, toward the lower side in the direction in which the device on which the tilt sensor device 9 is mounted. Move by force). The fact that the dielectric block 3 has moved on the side to which the dielectric block 3 has moved (the lower side of the slope) is between the capacitive electrodes 2a and 2b that are vertically opposed to each other with the space 1 in between. It can be detected by a change in capacitance.

  Thereby, the electrostatic capacitance between the capacitive electrodes 2a and 2b facing vertically is measured, and the change due to the presence or absence of the dielectric block 3 moving between them is detected. That is, the direction of the inclination of the space 1 can be detected easily and with high accuracy.

  Further, the direction of the inclination is detected by detecting a change in capacitance between the plurality of electrodes by forming at least one of the vertically facing capacitor electrodes 2a and 2b with a plurality of electrodes. Therefore, it is not necessary for the dielectric block 3 to be in direct contact with the capacitive electrode 2 (2a, 2b), and it is possible to effectively prevent the wear or deformation of the capacitive electrode 2 that is likely to occur when both are in direct contact. Can do.

  Further, the tilt sensor device 9 of the present invention changes the electrostatic capacitance between the capacitive electrodes 2a and 2b by the movement of the dielectric block 3, and detects the tilt by the change, so that it is not as in the conventional tilt sensor device. The direction of the tilt is erroneously detected due to a change in the liquid level of the fluid due to regular vibration, etc., that is, the thickness of the dielectric interposed between the upper and lower capacitive electrodes is other than the tilt It is possible to prevent erroneous detection of the change in capacitance and the direction of inclination due to fluctuations due to the above factors.

  Further, the dielectric block 3 does not need to consider surface tension unlike the fluid dielectric, and the capacitance generated between the capacitive electrodes 2a and 2b facing each other even when the small dielectric block 3 is interposed. Since it can be changed effectively, the tilt sensor device 9 can be easily reduced in size.

  Therefore, according to the inclination sensor device 9 of the present invention, it is possible to provide the inclination sensor device 9 that is easy to downsize and has high inclination (inclination) detection accuracy and high long-term reliability.

  The space 1 accommodates the dielectric block 3, and a plurality of capacitive electrodes 2 (upper and lower capacitive electrodes 2 a, at least one of which is composed of a plurality of electrodes, at which one of the dielectric blocks 3 can move between them). A plurality of combinations consisting of 2b).

  The shape of the space 1 having such a condition is, for example, a polygonal columnar shape such as a quadrangular prism shape, a triangular prism shape, a hexagonal column shape, or a cylindrical shape, or in these shapes, the upper surface, the lower surface, and the side surface are curved or uneven in part. It is a shape that was provided.

  In the example of this embodiment, the rectangular parallelepiped insulating container 4 is formed in a hollow shape, and the space 1 is formed by the hollow portion (columnar shape).

  The capacitance electrode 2 generates a capacitance between the capacitance electrodes 2a and 2b that are vertically opposed to each other. As described above, the capacitance changes to detect the inclination direction of the space 1. belongs to.

  Since the capacitance electrode 2 detects a change in capacitance caused by the movement of the dielectric block 3 and thereby detects the direction of inclination, at least one of the capacitance electrodes 2 is composed of a plurality of electrodes (in this embodiment). In the example, the upper capacitive electrode 2a is composed of four electrodes). That is, since at least one is a plurality of electrodes (2a), for example, if the plurality of electrodes 2a are dispersed and arranged in the outer peripheral portion of the space 1, which capacitor electrode 2a and the other capacitor electrode opposite to the capacitor electrode 2a are arranged. By detecting whether the capacitance has changed with respect to 2b, it is easy to determine in which part of the space 1 the dielectric block 3 has moved, that is, to which capacitive electrode 2a the space 1 is inclined. Can be detected.

  In the example of this embodiment, in a plan view, the upper capacitive electrodes (a plurality of electrodes) 2a are arranged in each region (not shown) obtained by dividing the space 1 into a sector shape having a central angle of 90 degrees. It is arranged so as to cover almost the entire surface. Note that one lower capacitor electrode 2b is formed in a range that just overlaps the space 1 in plan view.

  The dielectric block 3 has a function of moving in the space 1 according to the inclination of the space 1 and increasing the capacitance between the upper and lower capacitive electrodes 2a and 2b located in the moved portion. is doing. In the space 1 in which the dielectric block 3 is housed, the capacitance between the upper and lower capacitive electrodes 2a and 2b is measured, and the change in the capacitance is detected, whereby the dielectric block 3 is moved. The direction, that is, the inclined direction of the space 1 can be detected.

  For this reason, the dielectric block 3 is formed in a shape and size that can move in the direction in which the space 1 is inclined, and is accommodated in the space 1. The movement of the dielectric block 3 in the space 1 is caused by sliding or rolling on the lower surface of the space 1 due to the force of gravity acting due to the inclination of the space 1.

  In order to facilitate such movement, the dielectric block 3 is formed in a polygonal column shape such as a triangular column shape or a quadrangular column shape (cuboid shape), a cylindrical shape, an elliptical column shape, a spherical shape, or the like. The dielectric block 3 may have these shapes and the upper and lower surfaces, the side surfaces, etc. are curved, or the concave and convex portions are partially formed.

  The dielectric block 3 is interposed between the upper and lower capacitive electrodes 2a and 2b, and has a material and dimensions that can change the capacitance generated between them to an extent that it can be easily detected. Is formed.

  Such a dielectric block 3 includes, for example, a ceramic material such as barium titanate, strontium titanate, magnesium titanate, or a mixed material thereof, or a resin material such as styrene resin, polypropylene resin, or polyphenylene sulfide resin. It is made of a material having a high relative dielectric constant such as These resin materials have a relative dielectric constant of about 3 (20 ° C.), and barium titanate has a relative dielectric constant of about 500 or more (20 ° C.). The dielectric block 3 is preferably made of a dielectric material such as barium titanate having a relative dielectric constant of about 500 or more or a mixed system thereof in order to greatly change the capacitance between the capacitive electrodes 2a and 2b.

  In addition, the thickness of the dielectric block 3 is preferably as thick as possible in the space 1 in order to greatly change the capacitance between the capacitive electrodes 2a and 2b opposed vertically. The outer dimensions of the dielectric block 3 when viewed in plan are preferably as large as the outer dimensions when viewed in plan for each of the plurality of capacitor electrodes 2a. More preferably, it is larger than the individual external dimensions of 2a. In this case, if the outer dimension of the dielectric block 3 in plan view is too large, the dielectric block 3 is interposed across the entire area of the adjacent capacitor electrodes 2a formed in plural, etc. The detection accuracy in the direction of tilt may be reduced.

  In the example of this embodiment, the dielectric block 3 is formed in a thin cylindrical shape slightly lower than the height of the space 1. In addition, the dielectric block 3 is formed with an outer dimension that can be accommodated in the central portion of each of the plurality of formed capacitive electrodes 2a when viewed in plan.

  If the dielectric block 3 is, for example, a cylindrical shape, a barium titanate powder is processed into a sheet shape together with an organic solvent and a binder to produce a plurality of ceramic green sheets and cut into a predetermined disc shape. It can produce by baking together after laminating together and making it cylindrical shape.

  Such an inclination sensor device 9 is used when the space 1 is formed in the insulating container 4 and the capacitive electrodes 2 (2a, 2b) are arranged with the space 1 in between, for example, as in the example of this embodiment. Has the following effects.

  That is, by enclosing the dielectric block 3 in the space 1 in the insulating container 4 and forming the capacitive electrodes 2a and 2b inside the insulating container 4 positioned above and below the space 1, the dielectric block 3 can be securely connected. Can be accommodated in the space 1. Then, for example, by disposing a capacitive electrode 2 a made up of a plurality of electrodes in a portion corresponding to the outer peripheral portion of the space 1 inside the insulating container 4, a dielectric is formed between the capacitive electrodes 2 a and 2 b according to the inclination of the space 1. The body block 3 can be easily interposed. In addition, since a part of the insulating container 4 is interposed between the dielectric block 3 and the capacitive electrode 2, it is possible to effectively prevent wear or chipping due to direct contact of the capacitive electrodes 2a and 2b with the dielectric block 3. Can be prevented. In addition, a plurality of capacitor electrodes 2a can be formed in the insulating container 4 while ensuring good electrical insulation between adjacent ones. Therefore, in this case, the reliability and productivity of the tilt sensor device 9 can be improved.

  The insulating container 4 has, for example, a quadrangular shape or a circular shape in plan view, and is formed with an external dimension that can provide at least the space 1 for accommodating the dielectric block 3 therein.

  The insulating container 4 includes an aluminum oxide sintered body (aluminum oxide ceramics), an aluminum nitride sintered body, a mullite sintered body, a silicon carbide sintered body, a silicon nitride sintered body, and a glass ceramic sintered body. Etc., a resin material such as an epoxy resin, a polyimide resin, and an acrylic resin, or an electrically insulating material such as a composite material of an inorganic material such as a ceramic material and a resin material.

  In the example of this embodiment, the insulating container 4 is formed by bonding a flat lid 4b to the upper surface of an insulating base 4a having a recess (no symbol) on the upper surface. A space 1 for accommodating the dielectric block 3 is constituted by the recess of the insulating base 4a and the lid 4b. The lid 4b may have a recess (not shown) that faces the recess 4a of the insulating base 4a.

  Further, the surface of the insulating container 4 which is the lower surface of the space 1 is subjected to polishing (for example, so-called mirror polishing) to increase the smoothness so that the dielectric block 3 can easily slide and move. You may keep it. In this case, if the insulating base 4a is a flat plate and the lid 4b has a recess (not shown) on the lower surface side, the upper surface of the insulating base 4a corresponding to the lower surface of the space 1 is polished. Can be done more easily. Therefore, it is effective in increasing the productivity of the tilt sensor device 9 that is easy to move by sliding of the dielectric block 3 and has high accuracy of tilt detection.

  If the insulating container 4 is made of, for example, an aluminum oxide sintered body, a raw material powder mainly composed of aluminum oxide powder and added with silicon oxide, calcium oxide or the like is formed into a sheet together with an organic solvent and a binder. Insulating base 4a and lid 4b are manufactured by processing into a plurality of ceramic green sheets, laminating and firing, and then insulating base 4a and lid 4b are brazed and resin adhesive. It can manufacture by joining via.

  In addition, if the insulating container 4 is made of a resin material such as an epoxy resin or a polyimide resin, the uncured material of these resin materials is shaped into a predetermined insulating base 4a or lid 4b using a mold. The insulating base 4a and the lid 4b can be manufactured by molding and curing, and these can be manufactured by bonding them with a resin adhesive.

  The capacitor electrode 2 is formed, for example, inside the insulating container 4 so as to sandwich the space 1 vertically. The capacitive electrode 2 is formed of a metal material such as tungsten, molybdenum, manganese, copper, silver, palladium, gold, or platinum. Such a metal material is applied to the insulating base 4a and the lid 4b of the insulating container 4 in the form of a metallized layer, a plating layer, a metal foil, a vapor deposition layer, or the like.

  The capacitor electrode 2 is formed by, for example, printing a tungsten metal paste on a ceramic green sheet serving as the insulating base 4a or the lid 4b, and laminating the ceramic green sheets so that the printed metal paste is located inside. Can be formed.

  In the example of this embodiment, a wiring conductor (no symbol) is formed in the insulating container 4 from each capacitive electrode 2 to the lower surface. By connecting the exposed portion of the wiring conductor to an external electric circuit and measuring the capacitance between the upper and lower capacitance electrodes 2a and 2b, a change in the capacitance is detected, and the inclination or inclination of the space 1 is detected. The inclination of the sensor device 9 can be detected.

  The external electric circuit in this case is formed on, for example, a circuit board incorporated in a digital camera or a camera-equipped mobile phone. Then, when the tilt sensor device 9 is connected as a component, the direction in which the image is captured is changed according to the direction of the camera (so-called vertical position or horizontal position), and the upward direction at the time of shooting is always stored. Images can be captured and stored so as to match the upward direction.

  Also, when viewing images with a digital camera, mobile phone, PDA (Personal Digital Assistant), etc., the upper side of the photo is always on the opposite side of the Earth's gravity, regardless of the orientation of the image display device, such as a digital camera or mobile phone. In other words, it is possible to display the image display device so that the user viewing the image display device can easily view the image such as a photograph.

  In addition, in the tilt sensor device 9 in which the space 1 is formed in the insulating container 4 and the capacitive electrode 2 is arranged in this way, the relative permittivity of the dielectric block 3 is higher than that of the capacitive electrode 2 in the insulating container 4. 1 is larger than the relative dielectric constant of the portion located between the capacitor 1 and the capacitance between the capacitive electrodes 2a and 2b facing each other with the space 1 therebetween, the dielectric It is easy to make the change larger when the block 3 is interposed. Therefore, for example, even when the inclination of the space 1 is small and only a part of the dielectric block 3 is interposed between the capacitive electrodes 2a and 2b, the electrostatic capacitance between the upper and lower capacitive electrodes 2a and 2b. Can be changed to such an extent that detection is possible, and the accuracy of inclination detection is improved.

  Also, for example, as shown in FIG. 2A, the height of the space 1 is kept as low as possible to further reduce the size (thinner) of the tilt sensor device 9, or as shown in FIG. As described above, when the capacitor electrode 2 (only the upper capacitor electrode 2a in this example) is formed on the outer surface of the insulating container 4 in order to facilitate external connection of the capacitor electrode 2, the space 1 The thickness of the insulating container 4 interposed between the capacitive electrode 2 and the space 1 is relatively thick with respect to the height of the above. In such a case, if the relative permittivity of the dielectric block 3 is made larger than the relative permittivity of the portion of the insulating container 4 located between the capacitive electrode 2 and the space 1, the dielectric block 3 The change (increase) in the electrostatic capacity due to the interposition can be made more effective. Therefore, this configuration is also effective in reducing the thickness of the tilt sensor device 9. 2A and 2B are cross-sectional views showing another example of the embodiment of the tilt sensor device of the present invention. In FIG. 2, the same parts as those in FIG.

  In the tilt sensor device 9, when the upper and lower capacitive electrodes 2a and 2b are arranged in parallel and the dielectric block 3 has upper and lower surfaces parallel to the capacitive electrodes 2a and 2b, for example, the dielectric block 3 When the dielectric block is interposed between the upper and lower capacitive electrodes 2a and 2b, the capacitance between the capacitive electrodes 2a and 2b can be changed more effectively than in the case where the electrode is spherical. it can. Therefore, the inclination sensor device 9 can more reliably detect the inclination of the space due to the change in capacitance.

  Further, as shown in FIG. 3, the tilt sensor device 9 has a dielectric material that is lower when the lower surface of the space 1 is curved so that the central portion is lower than when the lower surface of the space 1 is flat. The movement of the body block 3 to the outer periphery is suppressed. Therefore, the dielectric block 3 moves to the outer periphery of the space 1 by a slight inclination of the inclination sensor device 9 or an external force (a force different from the gravitational force acting due to the inclination of the space) due to an erroneously applied vibration or the like. This is suppressed. When the space 1 is inclined at a predetermined angle to be detected, the dielectric block 3 is moved to the outer peripheral side of the space 1 for the first time, and is interposed between the upper and lower capacitive electrodes 2a and 2b disposed on the outer peripheral portion of the space 1. The tilt is detected by changing the capacitance. That is, it is effective in suppressing the sensitivity of detection from becoming excessive. FIG. 3 is a cross-sectional view showing another example of the embodiment of the tilt sensor device 9 of the present invention. In FIG. 3, the same parts as those in FIG.

  Such a configuration is effective, for example, when employed in an automobile antitheft device. In other words, it does not react with the inclination of the vehicle body (tilt sensor device 9) when another car passes by the wind or nearby, but reacts by opening / closing the door or by the inclination of a person riding (detecting the inclination and transmitting a signal) Etc.), the angle can be set.

  In this case, when the space 1 is horizontal, the dielectric block 3 moves to the center along the curved lower surface. Therefore, for example, when a capacitance electrode (not shown) corresponding to the central portion is arranged and the capacitance of the capacitance electrode in the central portion changes, the dielectric block 3 is located in the central portion of the space (space 1 is horizontal), and the detection that the space 1 is horizontal may be made more reliable. In addition, it is possible not to place the capacitive electrode 2 in the center of the space 1 so that it can be detected that the space is horizontal when the capacitance of any capacitive electrode 2 is not changed.

  In this configuration, as shown in FIG. 4, the upper surface of the space 1 is curved so as to be substantially parallel to the curved lower surface, and the capacitive electrodes 2 a and 2 b are parallel to the upper and lower surfaces of the dielectric block 3. You may arrange so that. In this case, in addition to the effect of curving the lower surface of the space 1, the upper and lower capacitive electrodes 2a and 2b are arranged in parallel as described above, and the dielectric block 3 is parallel to the capacitive electrodes 2a and 2b. It is also possible to obtain the effect of having a simple upper and lower surface (more effectively changing the capacitance between the capacitive electrodes 2a and 2b). FIG. 4 is a cross-sectional view showing another example of the embodiment of the tilt sensor device 9 of the present invention. 4, parts similar to those in FIG. 1 are denoted by the same reference numerals.

  In addition, in the inclination sensor device 9, the capacitive electrode 2 is composed of one electrode 2b, one of which is a plurality of electrodes 2a and the other of which is opposed to a region (not indicated) where the plurality of electrodes 2a are formed. In some cases, there is an effect in improving the productivity of the tilt sensor device 9 with high tilt detection accuracy.

  That is, when manufacturing the tilt sensor device 9 with one electrode (upper capacitive electrode) 2a and the other electrode (lower capacitive electrode) 2b facing each other, for example, the positions of the insulating base 4a and the lid 4b Even if a slight positional shift occurs in the vertical direction as in the case of the shift, the area where the upper and lower capacitive electrodes 2a and 2b face each other can be set to a predetermined area (the area of one electrode 2a). . Therefore, for example, as in the case where the other electrode is also a plurality of electrodes (not shown), the positioning of one electrode (upper capacitive electrode) 2a and the other electrode (lower capacitive electrode) 2b is individually performed. This is effective in improving the productivity of the tilt sensor device 9.

  In addition, the inclination sensor device 9 has a shape when the space 1 is viewed in plan when the space 1 is polygonal or circular in plan view and the capacitor electrode 2 is disposed along the outer periphery of the space 1. It is easy to detect the inclination all around.

  That is, since the capacitive electrode 2 is disposed on the outer periphery of the space 1, the dielectric block 3 moved to the outer peripheral portion of the space 1 due to the inclination of the space 1 is interposed between the upper and lower capacitive electrodes 2a and 2b. Can be changed. In addition, since the space 1 is polygonal or circular in a plan view, for example, as shown in FIGS. 5A to 5C, side portions and corner portions of the polygonal space 1 or a circular space. By disposing the capacitive electrodes so as to correspond to the fan-shaped portions having the same central angle of 1, the inclination can be detected for each constant range R over the entire circumference of the space 1 when viewed in plan. 5A to 5C are plan views schematically showing other examples of the embodiment of the electronic device 9 of the present invention. 5, parts similar to those in FIG. 1 are denoted by the same reference numerals.

  FIG. 5A shows a case where the space 1 is square in plan view. The electrode 2 (one electrode 2a formed in plural) is formed in a quadrangular shape from each corner portion of the square-shaped space 1 toward the central portion. In this case, the inclination can be detected in the direction of each corner (so-called four directions of front, rear, left, and right). For example, it is not necessary to detect the direction of the inclination very finely, such as a tractor overturn prevention device. This is suitable for applications where it is desirable to reliably detect the inclination of.

  FIG. 5B shows a case where the space 1 is circular in plan view. In this example, the capacitor electrode 2 (2a) is formed in a fan shape in each region obtained by dividing the space 1 into eight fan shapes having a central angle of 45 degrees. In this case, it is possible to detect the inclination in the direction of each region (so-called front / rear / left / right and 8 directions therebetween), which is particularly suitable for an image display device of a mobile phone or a PDA, and also for the use of a tractor overturn prevention device. Is suitable.

  FIG. 5C shows a case where the space 1 has a regular octagonal shape in plan view. The electrode 2 (2a) is formed in an elliptical shape from each side portion of the regular octagonal space 1 toward the central portion. In this case as well, the inclination can be detected in the direction of each corner (so-called front / rear / left / right and 8 directions therebetween), which is suitable for use as an image display device such as a mobile phone or PDA, or a tractor overturn prevention device. .

  Further, in the example shown in FIG. 5C, the capacitor electrode 2 c is formed vertically at the center of the space 1 so as to face each other with the space 1 interposed therebetween. For example, when the space 1 is horizontal and the dielectric block 3 is located at the central portion of the space 1, it is possible to detect that the capacitance of the capacitive electrode 2c at the central portion is large and the space 1 is horizontal. it can. Such a configuration is particularly effective when, for example, the lower surface of the space 1 is curved such that the central portion is lowered as described above.

  In order to make the detection accuracy in each direction uniform, the polygonal shape is preferably a regular polygonal shape such as a square shape, a regular hexagonal shape, or a regular octagonal shape. Moreover, in order to facilitate the detection in the front-rear and left-right directions as described above, a polygonal shape of a quadrangle or more is preferable.

  For example, if it is necessary to detect the inclination only in two opposing directions, the space 1 has a width on the short side side that is approximately the same as that of the dielectric block 3 in plan view as shown in FIG. It may be rectangular. FIG. 6 is a perspective view schematically showing another example of the embodiment of the tilt sensor device 9 of the present invention. In FIG. 6, the same parts as those in FIG. In order to make it easy to see, the dielectric block 3 (cylindrical or quadrangular prism) is shown separately from the space 1.

  Such a tilt sensor device 9 is one of the most basic forms of the tilt sensor device 9 of the present invention, and is excellent in terms of productivity and cost.

  If two tilt sensor devices having such a structure are used in combination so as to be orthogonal to each other, tilt in four directions can be detected effectively.

  In the example shown in FIG. 6, a plurality of capacitive electrodes 2 are arranged from the outer peripheral part to the central part of the space 1. By arranging a plurality of capacitance electrodes 2, even when the moving distance of the dielectric block 3 is small, the direction of the inclination can be detected by changing the capacitance of the capacitance electrode 2 close to the center. In the example of this embodiment, the capacitor electrode 2 is shown as an example in which a plurality of capacitor electrodes 2 that are vertically opposed to each other are formed.

  In addition, the inclination sensor device 9 has a plurality of capacitor electrodes 2a that are adjacent to each other in an interval that is smaller than an external dimension when the dielectric block 3 is viewed in plan view. It is effectively prevented that the dielectric block 3 that has moved and the capacitance electrode 2 (2a) adjacent thereto accidentally enter and no capacitance change occurs in any capacitance electrode 2. Therefore, in spite of the inclination of the space 1, the capacitance does not change in any of the capacitance electrodes 2, and it is effectively prevented from being erroneously detected that the capacitance is not inclined. A high inclination sensor device 9 can be obtained.

  In addition, the tilt sensor device 9 of the present invention has a member (insulating container 4) that is in direct contact (collision) with the space 1 when the space is cylindrical and the dielectric block 3 is cylindrical. Neither the inner side surface of the insulating base 4a or the like) nor the side surface of the dielectric block 3 has corners or protrusions that are likely to be chipped or cracked. Therefore, mechanical destruction of the members constituting the dielectric block 3 and the space 1 is suppressed, and the long-term reliability as the tilt sensor device 9 can be improved.

  In addition, as shown in FIG. 7, the tilt sensor device 9 is configured so that when the space 1 is filled with a liquid 5 having a relative dielectric constant different from that of the dielectric block 3, Movement is suppressed by the liquid 5. Therefore, it is effectively suppressed that the dielectric block 3 collides with a member constituting the space 1 to cause mechanical destruction such as cracking or chipping in the dielectric block 3 or the member constituting the space 1. Is done. Further, since the relative permittivity of the liquid 5 and the relative permittivity of the dielectric block 3 are different, the dielectric block 3 is interposed between the upper and lower capacitive electrodes 2a and 2b and when it is not interposed. The capacitance generated between the capacitive electrodes 2a and 2b is different. Therefore, it is possible to detect the direction of inclination by detecting at which capacitor electrode 2 (2a, 2b) the dielectric block 3 is present. Therefore, in this case, the tilt sensor device 9 with higher reliability can be provided.

  As such a liquid 5, it is necessary to use a liquid that is in a liquid state in a temperature range where the inclination sensor device 9 is used. For example, when used at a temperature range of about 10 to 35 ° C., so-called room temperature, pure water (relative permittivity is about 80), oleic acid, stearic acid (relative permittivity is about 2 to 3). ) Oily compounds such as octane, isopentane, cyclopentane (having a relative dielectric constant of about 2 to 3), and other hydrocarbon compounds having a carbon number of 8 or more (those with a linear, side chain, or cyclic molecular structure). Can be used (respective dielectric constants are values at 20 ° C.).

  When the above-mentioned substance having a relative dielectric constant of about 80 or less is used as the liquid 5, for example, the dielectric block 3 is formed of a ceramic material having a relative dielectric constant of about 500 or more (20 ° C.) such as barium titanate. If this is done, the difference in relative dielectric constant between the liquid 5 and the dielectric block 3 can be made sufficiently large. Alternatively, pure water having a relatively high relative dielectric constant may be used as the liquid 5 and the dielectric block 3 may be formed of a relatively small material having a relative dielectric constant of about 10 or less. Examples of such a material having a relatively low dielectric constant include resin materials (relative dielectric constant of about 3) such as the above-mentioned styrene resin, polypropylene resin, polyphenylene sulfide resin, polyethylene resin, epoxy resin, and vinyl chloride resin. A resin material such as a relative dielectric constant of about 3 to 6 can be used.

  In order to fill the interior of the space 1 with the liquid 5, for example, the space 1 is formed in the insulating container 4 including the insulating base 4a and the lid 4b, and a through-hole (not shown) is formed in a part of the lid 4b. Etc.), the dielectric block 3 is enclosed in the space 1 of the insulating container 4, the liquid 5 is filled into the space 1 from the through hole provided in the lid 4b, and then the through hole is closed. This method can be used. The through hole is, for example, a small piece member (not shown) made of the same material as that of the lid body 4b in a portion surrounding the through hole in the surface of the lid body 4b via a brazing material, resin, glass or the like. It can be blocked by bonding. The through hole may be filled with a material such as resin or glass.

  Further, for example, as shown in FIG. 8, the inclination sensor device 9 has a case where the density of the dielectric block 3 is smaller than the density of the liquid 5 and the upper surface of the space 1 is curved so that the central portion is higher. In other words, when the space 1 is not inclined, the dielectric block 3 can be moved along the upper surface of the space 1 by buoyancy, for example, and moved to the center of the space 1. Therefore, it is possible to provide the tilt sensor device 9 that is more reliable and more reliably detects that the space 1 is not tilted. In this case, the dielectric block 3 moves by buoyancy toward the upper side when the space 1 is inclined.

In order to make the density of the dielectric block 3 smaller than the density of the liquid 5, for example, as described above, pure water (density is about 10 ³ kg / m ³ , that is, about 1 g / cm ³ ) is used as the liquid 5, The dielectric block 3 may be made of polyethylene resin (density is about 0.9 g / cm ³ ) or the like. In addition, methyl iodide or methylene iodide (each having a density of about 2 to 4 g / cm ³ and a relative dielectric constant of about 3) is used as the liquid 5, and the dielectric block 3 is made of the above-described polyethylene resin, polypropylene resin, or vinyl chloride. You may make it produce with resin materials (a density is about 0.9-1.5 g / cm < ³ >), such as resin (all are values in 20 degreeC).

  Further, since the dielectric block 3 receives resistance due to friction with the inner surface such as the upper surface of the space 1 with respect to movement due to buoyancy, the dielectric block 3 can also be used for ensuring sufficient buoyancy and smooth movement. As described above, the thickness is preferably as thick as possible in the space 1. That is, when such a liquid 5 is filled in the space 1, the dielectric block 3 has a cubic shape or a rectangular column shape close thereto, or a height that is the same as that of the space 1 and a cross-sectional diameter that is the same as the height. A columnar shape or the like is suitable. In order to reduce the size of the tilt sensor device 9, the dielectric block 3 is preferably smaller than a quadrangular prism (cubic) having a side length of about 1 cm.

Further, the buoyancy acting on the dielectric block 3 increases in proportion to the volume of the dielectric block 3, and the upward resultant force obtained by subtracting gravity from the buoyancy is proportional to the difference in density between the dielectric block 3 and the liquid 5. Become bigger. The difference in density between the liquid 5 and the dielectric block 3 is preferably about 0.5 g / cm ³ or less. When the difference in density exceeds 0.5 g / cm ³ , for example, the buoyancy acting on the dielectric block 3 formed so as to be as thick as possible in the space 1 increases as described above. Since the frictional force tends to increase when pressed against the upper surface of the metal, it becomes difficult to move smoothly according to the inclination, and wear and mechanical destruction occur in the members constituting the space 1 and the dielectric block 3 It may be easier.

For example, when pure water (density is about 1 g / cm ³ (20 ° C.)) is used as the liquid 5 and the dielectric block 3 is made of polyethylene resin (density is about 0.9 g / cm ³ (20 ° C.)). For example, the buoyancy per 1 cm ³ volume of the dielectric block 3 is about 0.01N. In this case, since the gravity acting on the dielectric block 3 is about 0.009 N, the resultant force is about 0.001 N (per 1 cm ³ ) upward.

  This resultant force is about 1/10 of gravity, and if this force is used, the dielectric block 3 is pressed against the upper surface of the space 1 to prevent the movement, or the dielectric block 3 has the space 1 ( It is possible to suppress the occurrence of mechanical destruction or wear due to collision or friction with the inner surface of the insulating container 4).

On the other hand, when the difference in density between the liquid 5 and the dielectric block 3 exceeds 0.5 g / cm ³ , the resultant force acting on the dielectric block 3 exceeds 1/2 of gravity and moves. Since the speed is also increased, there is a possibility that wear or mechanical destruction is likely to occur due to friction or collision with the space 1 (insulating container 4) accompanying repeated movement.

Combinations (liquid 5-dielectric block 3) in which the difference in density between the liquid 5 and the dielectric block 3 is 0.5 g / cm ³ or less include pure water-polypropylene resin, pure water-polyethylene resin, Combinations of ethyl iodide-vinyl chloride resin, ethyl iodide-styrol resin and the like can be mentioned.

  If the density difference between the liquid 5 and the dielectric block 3 becomes too small, the moving speed of the dielectric block 3 when the space 1 is tilted is slow, and it may be difficult to detect the tilt effectively. There is.

Therefore, the difference in density between the liquid 5 and the dielectric block 3 is about 0.1 g / cm ³ or more as in the case where the liquid 5 is water and the dielectric block 3 is made of polyethylene resin, as described above. Is preferred. In this case, the resultant force acting on the dielectric block 3 per 1 cm ³ (about 0.9 g) is about 0.001 N upward, and the obtained acceleration is about 0.001 / (0.9 × 10 ⁻³ ) = 0.9 m / s ² . Become. Actually, since the movement is along the upper surface of the curved space 1, the acceleration actually generated in the dielectric block 3 becomes a component corresponding to the curvature. If this degree of acceleration can be secured, the length is several centimeters. The dielectric block 3 can smoothly move in the space 1 according to the inclination of the space 1.

  In addition, the inclination sensor device 9 is configured such that one of the capacitive electrodes 2 is a plurality of electrodes 2a and the other is a single electrode 2b facing a region where the plurality of electrodes 2a are formed. For example, as shown in a plan view in FIG. 9, one electrode 2b facing the plurality of electrodes 2a is grounded, and one end B of each of the plurality of electrodes 2a is connected to the one end B. When the terminal T for measuring the impedance between the other end C is connected, the impedance between the ends B-C (between one end B and the other end C). By detecting this change, the inclination of the space 1 can be detected. FIG. 9 is a plan view showing another example of the embodiment of the tilt sensor device 9 of the present invention. In FIG. 9, the same parts as those in FIG.

  In other words, in this case, in each of the plurality of electrodes 2a which are one electrode of the capacitive electrode 2 (upper capacitive electrode 2a), the impedance between the end portions B-C is the other electrode (the lower conductor) It changes in accordance with the capacitance generated between the one electrode 2b which is the side capacitor electrode 2b). When the dielectric block 3 is interposed between the upper and lower capacitive electrodes 2a and 2b and the capacitance is changed, the distance between the ends B-C in each of the plurality of electrodes 2a is changed according to the change in the capacitance. By detecting this impedance change, it is possible to detect where the dielectric block 3 has moved in the space 1 and to detect the inclination of the space 1.

  In this case, the impedance between the end portions B-C is inversely proportional to the capacitance between the plurality of one electrodes 2a and the other one electrode 2b (ground conductor) between the end portions B-C. When the dielectric block 3 is interposed (capacitance is increased) between one electrode 2a and the other electrode 2b of the plurality, the impedance of the electrode 2a is lowered.

  Note that the measurement of the impedance of the electrode 2a having the terminal T connected to one end B gives a constant signal from the terminal T to the electrode 2a, and this signal is reflected by the other end C so that the one end This can be done by calculating based on the reflection coefficient when returned to B (terminal T). That is, in this case, since the signal returned to one end B has a reflection coefficient corresponding to the impedance between the ends B-C of the electrode 2a, the electrode 2a is detected by detecting the reflection coefficient of the signal. The impedance can be calculated and detected. The reflection coefficient (r) is the ratio of the voltage (E1) of the signal supplied from the terminal T to one end B of the electrode 2a and the voltage (E2) of the signal returned from the other end C ( r = E2 / E1), and the impedance is proportional to (1 + r) / (1-r).

  One end B to which the terminal T is connected in the plurality of electrodes 2a is, for example, as shown in FIG. 9, when each of the plurality of electrodes 2a has a fan shape, You only have to set it. In this case, the other end C is, for example, a position corresponding to a so-called fan or an end opposite to one end B of the arc-shaped outer peripheral portion.

  In addition, as shown in FIG. 10, for example, the plurality of electrodes 2a are formed in an elongated rectangular shape that radiates from the center of the circular space 1 in plan view, and either one of both end portions in the length direction thereof. May be one end B to which the terminal T is connected. In the example shown in FIG. 10, the end on the outer peripheral side of the space 1 is defined as one end B for the plurality of electrodes 2a. In this case, the interposition of the dielectric block 3 between the upper and lower capacitive electrodes 2a and 2b is likely to occur at a portion corresponding to the end B-C of the electrode 2a. The change in impedance between B and C becomes more prominent, and the inclination is detected more reliably. FIG. 10 is a plan view showing another example of the embodiment of the tilt sensor device 9 of the present invention. In FIG. 10, the same parts as those in FIG. FIG. 10 shows an example in which the outer shape of the insulating container 4 is circular in plan view.

  When the plurality of electrodes 2a are arranged in such an elongated rectangular shape and radially arranged along the radial direction of the circular space 1, the interval between the plurality of electrodes 2a is wide. The lid 4b) may be formed of a transparent member such as an acrylic resin so that the inside of the space 1 can be easily seen from the outside. If the inside of the space 1 is easily visible from the outside, it is easy to detect defects such as chipping of the dielectric block 3 and the insulating container 4 and to confirm whether the dielectric block 3 is moving normally according to the inclination. Can be done.

  Such a terminal T is a metal material similar to the capacitor electrode 2 applied to the insulating container 4 in the same manner as the capacitor electrode 2, or a metal material such as an iron-nickel alloy or iron-nickel-cobalt alloy. The linear member which consists of is formed by what joined to the electrode 2a via the brazing material etc.

  The terminal T is electrically connected to an electric circuit (not shown) for measuring a reflection coefficient of a signal through a wiring conductor (not shown) formed in the insulating container 4 and connected to the capacitor electrode 2, for example. Connected. The electric circuit for measuring the reflection coefficient of the signal may be a separate part (circuit formed on the ceramic wiring board) attached to the insulating container 4, and the insulating container 4 is connected to the capacitor electrode 2 by the same conductor. It may be deposited as a circuit pattern.

  Further, when performing this measurement, it is necessary to apply a reference potential to the measurement electric circuit. This reference potential can be given by, for example, the other grounded electrode (lower capacitive electrode) 2b (ground potential), and is electrically connected to the terminal T connected to one electrode (upper capacitive electrode) 2a. An independent terminal (not shown) may be electrically connected to the other electrode 2b.

  In such an inclination sensor device 9, for example, the dielectric block 3 is first placed in the recess of the insulating base 4 a manufactured as described above, and then the lid 4 b is insulated so as to close the recess. It can be manufactured by bonding to the upper surface of the substrate 4a.

  Further, the lid 4b and the insulating base 4a can be joined by, for example, joining via a joining material such as an organic resin adhesive, glass, brazing material or the like. In this case, a metal layer (not shown) may be formed in advance on the joint surface between the two, and the metal layers may be joined with a brazing material. The metal layer can be formed by using the same metal material as that of the capacitor electrode 2 and using the same method.

  Note that the present invention is not limited to the above-described embodiments, and various modifications can be made without departing from the scope of the present invention. For example, at least a part of the insulating container 4 may be formed of a light-transmitting material such as glass, acrylic resin, or methacrylic resin so that the position of the dielectric block 3 can be visually recognized from the outside. Good. In this case, it is possible to easily confirm whether or not the dielectric block 3 is moving normally according to the inclination of the space 1, and the inclination sensor device 9 is more accurate and easy to check. be able to.

(A) is a top view which shows an example of embodiment of the inclination sensor apparatus of this invention, (b) is sectional drawing in the AA line. (A) And (b) is sectional drawing which shows the other example of embodiment of the inclination sensor apparatus of this invention, respectively. It is sectional drawing which shows the other example of embodiment of the inclination sensor apparatus of this invention. It is sectional drawing which shows the other example of embodiment of the inclination sensor apparatus of this invention. (A)-(c) is a top view which shows typically the other example of embodiment of the inclination sensor apparatus of this invention, respectively. It is a perspective view which shows typically the other example of embodiment of the inclination sensor apparatus of this invention. It is sectional drawing which shows the other example of embodiment of the inclination sensor apparatus of this invention. It is sectional drawing which shows the other example of embodiment of the inclination sensor apparatus of this invention. It is a top view which shows the other example of embodiment of the inclination sensor apparatus of this invention. It is a top view which shows the other example of embodiment of the inclination sensor apparatus of this invention.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 ... Space 2 ... Capacitance electrode 2a ... Upper capacity electrode (one electrode, a plurality of electrodes)
2b .. Lower capacitive electrode (the other electrode, one electrode)
2c ··· Capacitance electrode 3 in the central portion ··· Dielectric block 4 ··· Insulating container 4a · · Insulating base 4b · · Lid 5 · · · Liquid 9 · · · inclination sensor device B · · · one end Part C ... Other end T ... Terminal

Claims (12)

Capacitance electrodes that are vertically opposed to each other with a space therebetween and at least one of which is composed of a plurality of electrodes, and a dielectric block that is accommodated in the space and can move between the plurality of electrodes according to the inclination of the space An inclination sensor device comprising: The tilt sensor device according to claim 1, wherein the space is formed in an insulating container, and the capacitive electrode is disposed across the space. The inclination sensor device according to claim 2, wherein a relative dielectric constant of the dielectric block is larger than a relative dielectric constant of a portion of the insulating container located between the capacitive electrode and the space. 2. The tilt sensor device according to claim 1, wherein the upper and lower capacitive electrodes are arranged in parallel, and the dielectric block has upper and lower surfaces parallel to the capacitive electrode. The tilt sensor device according to claim 1, wherein a lower surface of the space is curved so that a central portion is lowered. 2. The tilt sensor device according to claim 1, wherein one of the capacitive electrodes is the plurality of electrodes, and the other is one electrode facing a region where the plurality of electrodes are formed. The tilt sensor device according to claim 1, wherein the space has a polygonal shape or a circular shape in a plan view, and the capacitive electrode is disposed along an outer periphery of the space. 2. The tilt sensor device according to claim 1, wherein an interval between adjacent ones of the plurality of capacitive electrodes is smaller than an outer dimension when the dielectric block is viewed in plan. The inclination sensor device according to claim 1, wherein the space is cylindrical and the dielectric block is cylindrical. 2. The tilt sensor device according to claim 1, wherein the space is filled with a liquid having a dielectric constant different from that of the dielectric block. 11. The tilt sensor device according to claim 10, wherein the density of the dielectric block is smaller than the density of the liquid, and the upper surface of the space is curved so that the central portion is higher. The one electrode is grounded, and a terminal for measuring impedance between the one end and the other end is connected to one end of each of the plurality of electrodes. The tilt sensor device according to claim 6.

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