JP2007128030A - Pellicle storing container - Google Patents

Abstract

A pellicle storage container capable of reducing wear powder is provided.
A pellicle storage container (1) for transporting a pellicle (5) comprising a pellicle film (6) and a support frame (7) that supports the pellicle film (6), a tray (3), a cover (2) serving as a lid, and the tray (3). And a cover member 4 that closes the gap between the tray 3 and the cover 2 on the outer side or the inner side of the cover 2, and a pellicle storage container 1 in which at least a contact portion of the closing member 4 that contacts the tray or the cover is made of urethane elastomer. It is said.
[Selection] Figure 6

Description

  The present invention relates to a pellicle storage container for transporting a pellicle composed of a pellicle film and a support frame that supports the pellicle film.

  If a foreign substance adheres to a photomask used in a lithography process that is a part of the semiconductor circuit pattern manufacturing process, the pattern of the foreign substance is transferred, and there is a risk that many of the semiconductor chips are defective. For this reason, a pellicle has heretofore been used for the purpose of dust-proofing a photomask.

  The pellicle is generally composed of a pellicle film having a thickness of about 10 microns made of a transparent polymer film such as nitrocellulose and a support frame having a thickness of about several millimeters for supporting the pellicle on one peripheral end surface. Has been. An adhesive material with a release sheet for fixing the support frame to the photomask is provided on the peripheral end surface of the support frame opposite to the pellicle film. The adhesive material is provided with a uniform thickness so that there is no gap between the photomask and the support frame when the pellicle is placed on the photomask.

  When fixing the support frame to the photomask, set the pellicle so that the pellicle film is placed above the photomask, peel off the release sheet, and fix the support frame to the photomask via an adhesive. Foreign matter is prevented from entering the photomask.

  In recent years, the pellicle has also been frequently used as a dustproof means for a photomask used in a lithography process in the manufacturing process of a liquid crystal display. Since the liquid crystal display has a larger area than the silicon wafer, the photomask is also enlarged. Along with this, the size of the pellicle membrane has been increased, and a large size pellicle membrane of 1000 mm × 1000 mm or more is often used.

Generally, in order to transport the pellicle from the manufacturer to the user, a resin pellicle storage container is used. The pellicle storage container mainly includes a tray on which the pellicle is placed and a lid that covers the tray. As a method for fixing the tray and the lid, for example, a method is known in which the outer peripheral portions of the tray and the lid are fixed by a fixing component (clip) that is sandwiched in a direction in which they are in close contact with each other (see Patent Document 1).
JP-A-7-142562 (paragraph number 0015, FIG. 1 etc.)

  Conventionally used clips are made of polypropylene or polyethylene, and have excellent characteristics in terms of holding force for sandwiching the tray and the lid and the strength of the clip itself. However, when using a clip made of polypropylene or polyethylene, there is a concern that abrasion powder may be generated due to friction between the tray and the lid each time the tray and the lid are separated and fitted each other. For this reason, there has been a demand for a pellicle storage container for reducing such wear powder.

  In view of the above problems, an object of the present invention is to provide a pellicle storage container that can reduce wear powder generated by friction between a tray, a lid, and a clip.

  In order to achieve the above object, the present invention provides a pellicle storage container for transporting a pellicle comprising a pellicle film and a support frame that supports the pellicle film, comprising a tray, a cover serving as a lid thereof, a tray, A closing member that closes the gap between the tray and the cover is provided outside or inside the cover, and at least a contact portion of the closing member that contacts the tray or the cover is a pellicle storage container made of urethane elastomer. For this reason, the abrasion powder produced | generated by the friction between a tray and a cover, and a closure member can be reduced.

  Another embodiment of the present invention is a pellicle storage container in which the closing member is disposed inside the tray and the cover, and is a urethane elastomer sealing member provided on at least one of the opposing surfaces of the tray and the cover. It is said. Thus, since the urethane elastomer sealing member is sandwiched in the gap between the tray and the cover, wear powder can be reduced, and the risk of foreign matter entering through the gap can be reduced.

  In another aspect of the present invention, a pellicle storage container further includes a clip that clamps and fixes the tray and the cover. For this reason, even when the closing member does not have a role of firmly holding the tray and the cover, the risk of foreign matters entering the space surrounded by the tray and the cover is reduced by using the clip. it can. On the other hand, when the closing member has a role of firmly holding the tray and the cover, it is possible to more reliably reduce the intrusion of foreign matter.

  Another invention of the present invention is a pellicle storage container in which a urethane elastomer is produced using a polyether polyol as a main polyol. For this reason, the possibility that a part or all of the closing member is hydrolyzed by moisture in the air can be reduced, and the pellicle storage container can be used over a long period of time.

  Another aspect of the present invention is a pellicle storage container for transporting a pellicle composed of a pellicle film and a support frame that supports the pellicle film, and includes a tray, a cover serving as a lid, a tray and a cover, The clip is a container for a pellicle made of urethane elastomer. For this reason, the abrasion powder produced | generated by the friction between a tray and a cover, and a clip can be reduced.

  In another aspect of the present invention, the clip according to each of the previous inventions is a pellicle storage container made of a urethane elastomer having a Shore hardness of A80 or higher. For this reason, the strength of the clip becomes higher and the clamping force can be maintained for a longer period. The hardness is adjusted by changing the ratio between the polyol and the chain extender.

  In another aspect of the present invention, the clip in each of the preceding inventions is a pellicle storage container made of a urethane elastomer manufactured using a polyether polyol as a main polyol. For this reason, it can be set as the clip which can maintain holding power for a long period of time. Elastomers produced mainly using polyether polyols are less susceptible to hydrolysis than elastomers produced mainly using polyesters. This is because the ester bond is easily hydrolyzed. Therefore, the possibility that the clip is hydrolyzed by moisture in the air can be reduced, and the pellicle storage container can be used over a long period of time.

A closing member (a member in a broad sense including a clip and a seal member) that closes a gap between a tray and a cover constituting the pellicle storage container according to the present invention is made of a urethane elastomer that is a rubber-like elastic body having a urethane bond. A urethane elastomer is an elastomer having a urethane bond (—NH—CO—O—) produced by reacting a polyol (usually polyether or polyester) with an isocyanate (RN—C═O). The chemical formula of a urethane elastomer is generally represented by — (O—R′—OCO—NH—R—NHCO) _n —. In this chemical formula, R ′ is usually a polyether or polyester.

  A urethane elastomer produced using a polyether such as polyether polyol as a polyol is referred to as a polyether urethane elastomer, and a urethane elastomer produced using a polyester such as a polyester polyol as a polyol is referred to as a polyester urethane elastomer. However, urethane polyols produced using hydroxy-terminated polybutadiene and partially / completely hydrogenated derivatives, polycaprolactone polyols, polycarbonate polyols, etc. as polyols other than polyethers and polyesters are also included in the container for pellicles according to the present invention. It can be used as a material for a closing member used in the above.

  The material of the tray and the cover constituting the container for pellicles according to the present invention is an acrylonitrile / butadiene / styrene resin (a copolymer composed of three types of acrylonitrile, butadiene and styrene, hereinafter referred to as “ABS”. In addition to “resin”, polyester resins such as polyethylene terephthalate resin, polyolefin resins such as polyethylene and polypropylene, polystyrene resins, and the like can be used, and it is particularly preferable to use ABS resin. However, the above-mentioned resin is only an example, and other resin materials may be adopted.

A urethane elastomer is a soft segment formed by polymerizing a polyol or chain extender terminated with an OH group and a diisocyanate having an NCO group, and formed by polymerization of the polyol and diisocyanate (OCN-R-NCO). (—O—O—CO—NH—R—NH—CO—) _n , formed by polymerization of chain extender (HO— (CH ₂ ) _n —OH) and diisocyanate (OCN—R—NCO) Hard segment (—O— (CH ₂ ) _n —O—CO—NH—R—NH—CO—) _n . In general, polymer chains have the property that similar structures are likely to gather, and therefore the two types of segments exist in an aggregated state.

  The pellicle storage container including the closing member is purely washed to prevent adhesion of dust, fine particles and the like to the pellicle. At this time, the more the ester bond is not contained in the material of the closing member, the more difficult it is to hydrolyze, and it withstands long-term use. In addition, the urethane elastomer manufactured mainly using polyether polyol is not limited to the above-mentioned polyether-based urethane elastomer, and if the polyether polyol is the main, the urethane elastomer manufactured including the polyester polyol is also included. Is interpreted in a broad sense. The pellicle storage container according to the present invention is preferably manufactured by vacuum forming. Here, “vacuum molding” is a method in which a resin in a softened state is placed in a mold and the space between the resin and the mold is evacuated to suck and mold the resin onto the mold. No matter how the resin is supplied to the mold. Therefore, a sheet-shaped resin may be disposed in the mold, or a molten resin may be discharged into the mold. Examples of vacuum forming include a straight method using a female die, a drape method using a male die, an air slip method in which a resin sheet is inflated into a hemisphere and a male die is molded therein, and a male die used in an air slip method Instead of this, the reverse draw method using a female mold, the auxiliary plug method in which the resin sheet clamped on the female mold is pushed down into the female mold with a plug, and the resin sheet is pre-tensioned and evacuated is included. Is not to be done. In addition to vacuum molding, it can also be manufactured by pressure molding in which gas pressure is applied in the mold direction from the resin side, or pressure vacuum molding combining both the pressure molding and vacuum molding. Moreover, you may employ | adopt shaping | molding methods other than vacuum forming, pressure forming, and pressure forming.

  According to the present invention, the pellicle storage container can reduce wear powder generated by friction between the tray and the lid and the closing member.

  Hereinafter, preferred embodiments of the pellicle storage container according to the present invention will be described in detail with reference to the drawings, but the present invention is not limited thereto.

(First embodiment)
FIG. 1 is an exploded perspective view of a pellicle storage container according to the first embodiment of the present invention. FIG. 2 is a perspective view showing a state where a clip is attached to the pellicle storage container shown in FIG.

  As shown in FIGS. 1 and 2, the pellicle storage container 1 includes a tray 3 and a cover 2 that is a lid thereof. The cover 2 and the tray 3 have a structure that can be joined so as to overlap each other on the outer periphery. When the pellicle is stored in the pellicle storage container 1 and transported, a clip 4 is attached to both the outer peripheral portions of the cover 2 and the tray 3 for sandwiching and fixing the outer peripheral portion. In the present embodiment, since the cover 2 and the tray 3 are both rectangular concave bodies, four clips 4 are prepared so that they can be attached to the four sides where the cover 2 and the tray 3 are in close contact. However, instead of attaching one clip 4 to each of the four sides, it is not necessary to attach a plurality of clips to each side, change the number of attachments for each side, or attach a clip to some sides. .

  The clip 4 has a concave shape in which a portion sandwiching both outer peripheral portions of the cover 2 and the tray 3 is recessed. The clip 4 is a urethane elastomer molded body produced by polymerizing a polyether polyol, a chain extender, and a diisocyanate. By using urethane elastomer as the material of the clip 4, even if the clip 4, the ABS resin tray 3 and the cover 2 are repeatedly attached and detached, abrasion powder or the like is hardly generated. Therefore, there is almost no risk of contamination of the wear powder into the pellicle storage container 1, and therefore the risk of contamination of the pellicle is reduced.

  It is theoretically possible to manufacture the cover 2 and the tray 3 with a urethane elastomer or a material having a lower hardness. However, the material for the pellicle storage container cannot be put into practical use unless it has a hardness higher than that of urethane elastomer. Therefore, the clip 4 is always a material having a lower hardness than the cover 2 and the tray 3. As a result, there is almost no risk of the cover 2 and the tray 3 being scraped by friction with the clip 4.

  Further, the urethane elastomer is difficult to be scraped even if friction occurs between the cover 2 and the tray 3 having higher hardness. Therefore, there is almost no risk of contamination of the wear powder of the clip 4 into the pellicle storage container 1, so that the risk of contamination of the pellicle is reduced.

  In order to investigate the wear resistance of the urethane elastomer, a wear test was conducted using a friction-reducing taper type H18 friction wheel of four kinds of materials of urethane elastomer, olefin elastomer, soft vinyl chloride and natural rubber. As a result, the wear loss of each of the materials was 30 to 60 mg, about 340 mg, about 485 mg and 280 mg, respectively. From this result, it was found that urethane elastomer is a material with extremely excellent wear resistance.

  The polyether polyol, which is the raw material of the clip 4 used in the pellicle storage container 1 according to the first embodiment, has a higher weight ratio than the chain extender that is the same raw material. The Shore hardness of the urethane elastomer can be changed by adjusting the weight ratio between the polyether polyol and the chain extender. The higher the weight ratio of the polyether polyol, the higher the ratio of soft segments in the urethane elastomer and the lower the Shore hardness.

  In the first embodiment, the Shore hardness of the clip 4 is about A90. However, the Shore hardness is not limited to A90. When the Shore hardness is set to A80 or more, the strength of the clip 4 becomes higher and the holding force can be maintained for a longer period.

  The cover 2 and the tray 3 are manufactured by a vacuum forming method using an ABS resin having a base plate thickness of about 3 mm as a raw material and using a vacuum forming die. However, a resin other than the ABS resin may be used. Furthermore, the thickness of the base plate is not limited to 3 mm, and a plate-like resin thinner than 3 mm or exceeding 3 mm may be molded. That is, the size of the pellicle storage container 1 is not particularly limited.

  3 is a cross-sectional view taken along line AA in a state where the clip 4 is attached to the pellicle storage container 1 shown in FIG.

  The cover 2 is a concave body having an opening on the side facing the tray 3. The cover 2 includes a planar cover top surface 20, a side surface 21 formed in a cylindrical shape so as to spread from the cover top surface 20 in the opening direction, and a horizontal surface 22 extending horizontally outward from the side surface 21. A side surface 23 formed in a cylindrical shape so as to spread from the horizontal surface 22 in the opening direction, a horizontal surface 24 extending horizontally outward from the side surface 23, and a vertical surface 25 extending substantially vertically upward from the horizontal surface 24. And a horizontal surface 26 extending horizontally outward from the vertical surface 25.

  On the other hand, the tray 3 is a concave body that forms a hill on the side facing the cover 2 and has an opening. The tray 3 includes a planar tray bottom surface 30 larger than the opening area of the side surface 21, a slope 31 inclined downward from the tray bottom surface 30 to the periphery of the tray 2, and a horizontal outward direction from the slope 31. , A vertical surface 33 extending substantially vertically upward from the horizontal surface 32, and a horizontal surface 34 extending horizontally outward from the vertical surface 33.

  The horizontal surface 22 and the tray bottom surface 30 of the cover 2 have overlapping portions that face each other in the vertical direction, and a pellicle support frame, which will be described later, is sandwiched between these portions. Further, the crank-shaped portion composed of the horizontal surface 24, the vertical surface 25 and the horizontal surface 26 of the cover 2 is substantially the same shape as the crank-shaped portion composed of the horizontal surface 32, the vertical surface 33 and the horizontal surface 34 of the tray 3, The lower surface of the crank-shaped portion on the cover 2 side can be in close contact with the upper surface of the crank-shaped portion on the tray 3 side. The horizontal surface 26 of the cover 2 and the horizontal surface 34 of the tray 3 are sandwiched and fixed by the above-described clip 4.

  4 is a cross-sectional view of the pellicle 5 stored in the pellicle storage container 1 shown in FIG. 3 taken along the line AA shown in FIG.

  The pellicle 5 has a configuration in which a pellicle film 6 made of a material such as nitrocellulose and having a thickness of 10 microns or less is stretched and attached to one end surface (upper surface in FIG. 4) of a square frame-shaped support frame 7. Yes. The height of the support frame 7 is about 5 mm. However, the material and thickness of the pellicle film 5 and the height of the support frame 7 are not limited to the above.

  As shown in the enlarged view of the portion indicated by X in FIG. 4, an adhesive material 8 is provided on the peripheral end surface (bottom surface) of the support frame 7 opposite to the pellicle film 6. A thin release sheet (not shown) is usually attached to the surface of the adhesive material 8. When the pellicle 5 is used, the release sheet is peeled off from the adhesive material 8 so as to be able to exert adhesive force, and then the support frame 7 is attached and fixed to a photomask.

  FIG. 5 is a diagram showing a state where the pellicle 5 shown in FIG. 4 is stored in the pellicle storage container 1 shown in FIG.

  The pellicle 5 is stored in the pellicle storage container 1 with the bottom surface of the support frame 7 placed on the tray bottom surface 30 and the top surface of the support frame 7 in contact with the horizontal surface 22 of the cover 2. As described above, since the transport frame 7 is transported with the height direction of the support frame 7 held between the cover 2 and the tray 3, the risk of the pellicle 5 moving in the pellicle storage container 1 is reduced.

  A clip having a form other than the above-described clip 4 can also be employed. For example, a clip that holds the vertical surface 25 of the cover 2 and the vertical surface 33 of the tray 3, a clip that holds the horizontal surface 24 of the cover 2 and the horizontal surface 32 of the tray 3, a horizontal surface 26 of the cover 2, and a horizontal surface 32 of the tray 3 A clip that holds the cover or a clip that holds the cover top surface 20 and the tray bottom surface 30 may be used.

  In addition to the four linear clips 4, one linear clip 4 and a clip in which the three linear clips 4 are integrated may be employed. Furthermore, in a state where the cover 2 and the tray 3 are joined, a clip that holds only four corners of each other may be employed. As described above, the number and shape of the clips are not limited as long as the clips are members fixed in the direction in which the cover 2 and the tray 3 are brought into close contact with each other.

  FIG. 6 is a view showing an example of the pellicle storage container 1 having a form different from the form shown in FIGS.

FIG. 6 is a cross-sectional view taken along line AA shown in FIG. In FIG. 6, the clip 4 is shown in white for easy viewing. FIG. 7 is an enlarged perspective view of the clip 4 used in the pellicle storage container 1 shown in FIG.

  Unlike the pellicle storage container 1 shown in FIGS. 1 to 5, the pellicle storage container 1 shown in FIG. 6 is in contact with the cover 2 and the tray 2 so as to cover the vertical surface 25 of the cover 2 to the horizontal plane 32 of the tray 3. 3 is provided. Further, as shown in FIG. 7, the clip 4 is different from the clip 4 shown in FIG. 2 and has a relatively short length that is sandwiched at a plurality of positions at predetermined intervals for each side of the cover 2 and the tray 3. is doing.

  The clip 4 shown in FIG. 7 includes a flat plate 41, a flat plate 42 slightly bent from the flat plate 41, and a flat plate 43 bent substantially at a right angle in the same direction as the direction in which the flat plate 42 is bent from the flat plate 42. The curved portion with the flat plate 42 has a convex portion 44 projecting inward thereof, and the front end of the flat plate 43 has a convex portion 45 projecting in a direction substantially parallel to the flat plate 42. Further, a flat plate 46 extending substantially perpendicular to the flat plate 41 is provided on the inner side of the flat plate 41 (the side where the convex portion 44 is provided). The flat plate 46 is provided with a flat plate 47 extending slightly inward from being parallel to the flat plate 41. The flat plate 47 has substantially the same length as the flat plate 41, and has a convex portion 48 at the tip thereof so as to face the convex portion 44.

  In order to sandwich the cover 2 and the tray 3 using the clip 4 having such a configuration, the space between the flat plate 47 and the flat plate 41 is expanded, and the flat plate 42 is expanded in a direction that is aligned with the flat plate 41. Cover the end with the tray 3. Thereafter, the clip 4 almost returns to its original shape by its restoring force. Since the clip 4 is made of a material richer in elasticity than the cover 2 and the tray 3, the clip 2 sandwiches the cover 2 and the tray 3 along the shape of the combined portion of the cover 2 and the tray 3.

  As described above, when the clip 4 that can hold the cover 2 and the tray 3 in a relatively large area is employed, the holding force of the pellicle storage container 1 can be increased. In addition, since the clip 4 has a length that partially holds each side of the pellicle storage container 1, the clip 4 can be reduced in size.

(Second Embodiment)
Next, a second embodiment of the pellicle storage container according to the present invention will be described.

  FIG. 8 shows a cross-sectional view of the pellicle storage container 1 according to the second embodiment, taken along the line AA shown in FIG. FIG. 9 is an enlarged perspective view of a composite clip 50 which is an example of a closing member used in the pellicle storage container 1 shown in FIG.

  The composite clip 50 shown in FIGS. 8 and 9 has the same shape as the clip 4 shown in FIGS. 6 and 7. However, the composite clip 50 and the clip 4 are different in the following points. The clip 4 is comprised only with the urethane elastomer. On the other hand, the composite clip 50 is composed of a metal or resin and a urethane elastomer. Specifically, the main body 51 that is a skeleton part of the composite clip 50 is made of metal or resin, and the contact portion 52 that is in contact with and pressed against the cover 2 and the tray 3 is made of urethane elastomer.

  In addition to the above-described form, the composite clip 50 may be formed by sticking a urethane elastomer sheet to the entire inner surface of the main body 51 and projecting only the contact portion between the sheet and the cover 2 and the tray 3. The main body 51 and the contact portion 52 may be joined by any method such as adhesion, welding, and fitting.

  The composite clip 50 employs a contact portion 52 made of urethane elastomer only at a contact portion that holds the cover 2 and the tray 3. Even in such a form, the generation of wear powder can be reduced as in the case of the pellicle storage container 1 according to the first embodiment. In addition, the clamping force of the composite clip 50 can be further increased by making the main body 51 made of metal or resin.

(Third embodiment)
Next, a third embodiment of the pellicle storage container according to the present invention will be described.

  FIG. 10 is a partially enlarged perspective view showing a state in which a cover sheet 60 as an example of a closing member is covered at the end of the cover 2 and the end of the tray 3 of the pellicle storage container 1 and fixed with a clip 61 from above. It is. FIG. 11 is a cross-sectional view of the portion shown in FIG. 10 when the pellicle storage container 1 according to the third embodiment is cut along a line similar to the AA line shown in FIG. In FIG. 11, the cover sheet 60 is shown in white for ease of viewing.

  The pellicle storage container 1 according to the third embodiment employs a structure in which the ends of the cover 2 and the tray 3 are covered with a cover sheet 60 made of urethane elastomer, and a clip 61 is attached from the outside. Thus, since the cover sheet 60 made of urethane elastomer is used in the portion that directly contacts the cover 2 and the tray 3, the effect of reducing the generation of wear powder can be obtained. In addition, when the clip 61 is made of metal or resin, the force for fixing the cover 2 and the tray 3 can be further increased.

(Fourth embodiment)
Next, a fourth embodiment of the pellicle storage container according to the present invention will be described.

  FIG. 12 shows a state in which a sealing member 70 as an example of a closing member is arranged on the contact surface between the cover 2 and the tray 3 of the pellicle storage container 1 and the ends of the cover 2 and the tray 3 are fixed by the clip 4. It is an expansion perspective view. The structure of the clip 4 is the same as that of the clip 4 shown in FIG. FIG. 13 is a cross-sectional view of the portion shown in FIG. 12 when the pellicle storage container 1 according to the fourth embodiment is cut along a line similar to the AA line shown in FIG. In FIG. 13, the seal member 70 is shown in white for ease of viewing.

  As shown in FIGS. 12 and 13, the pellicle storage container 1 according to the fourth embodiment has a sealing member 70 made of urethane elastomer interposed in the gap between the cover 2 and the tray 3. It has a structure in which the inner surface of the cover 2 and the inner surface of the tray 3 are overlapped so as to be sandwiched. By adopting such a structure, it is possible to prevent the wear powder from entering the inside of the pellicle storage container 1 regardless of whether the clip 4 is made of urethane elastomer or not. If the clip 4 is made of metal or resin, the force for fixing the cover 2 and the tray 3 can be further increased. Further, the contact area between the cover 2 and the sealing member 70 can be reduced by bonding the sealing member 70 to be fixed to the tray 3 and forming irregularities on the contact surface of the sealing member 70 with the cover 2. As a result, wear powder from the seal member 70 and the cover 2 can be reduced.

  Note that the sealing member 70 may be bonded to the cover 2 to form irregularities on the contact surface of the sealing member 70 with the tray 3. Further, the sealing member 70 may be sandwiched between the cover 2 and the tray 3 and fixed by the clip 4 without fixing the sealing member 70 to the cover 2 or the tray 3. Further, the seal member 70 may not be interposed between the horizontal surfaces of the cover 2 and the tray 3 but may be interposed at a portion rising upward from the horizontal surface. Furthermore, the form which forms an unevenness | corrugation in the surface of the sealing member 70 is not an essential form.

  The present invention can be used in industries that manufacture or use storage containers for transporting pellicles.

It is a disassembled perspective view of the storage container for pellicles concerning embodiment of this invention. It is a perspective view which shows the condition which mounts | wears with the clip for the storage container for pellicles shown in FIG. FIG. 3 is a cross-sectional view taken along line AA in a state where a clip is attached to the pellicle storage container shown in FIG. 2. FIG. 4 is a cross-sectional view of the pellicle stored in the pellicle storage container shown in FIG. 3 when cut along a line similar to the AA line shown in FIG. 2. FIG. 5 is a cross-sectional view showing a state where the pellicle shown in FIG. 4 is stored in the pellicle storage container shown in FIG. 3. It is a figure which shows an example of the storage container for pellicles which has a form different from the form shown in FIGS. 1-5, and is sectional drawing at the time of cut | disconnecting by the same line as the AA line shown in FIG. It is an expansion perspective view of the clip used for the storage container for pellicles shown in FIG. It is sectional drawing when the storage container for pellicles concerning the 2nd Embodiment of this invention is cut | disconnected by the same line as the AA shown in FIG. It is an expansion perspective view of the closure member (composite clip) used for the storage container for pellicles shown in FIG. The partial expansion perspective view which shows the condition which covers the closure member (cover sheet) on the edge part of the cover and tray edge part of the container for pellicles concerning the 3rd Embodiment of this invention, and fixes with a clip from it It is. FIG. 11 is a cross-sectional view of the portion shown in FIG. 10 when the pellicle storage container according to the third embodiment of the present invention is cut along a line similar to the AA line shown in FIG. 2. The partial expansion which shows the condition where the closure member (seal member) is arranged on the contact surface of the cover and tray of the pellicle storage container according to the fourth embodiment of the present invention, and the end of the cover and the tray is fixed with the clip It is a perspective view. FIG. 13 is a cross-sectional view of the portion shown in FIG. 12 when the pellicle storage container according to the fourth embodiment of the present invention is cut along a line similar to the AA line shown in FIG. 2.

Explanation of symbols

1 Pellicle storage container 2 Cover 3 Tray 4 Clip (an example of a closing member)
5 Pellicle 6 Pellicle film 7 Support frame 8 Adhesive material 20 Cover top surface 21 Side surface 22 Horizontal surface 23 Side surface 24 Horizontal surface 25 Vertical surface 26 Horizontal surface 30 Tray bottom surface 31 Slope 32 Horizontal surface 33 Vertical surface 34 Horizontal surface 50 Compound clip (an example of a blocking member)
52 contact portion 60 cover sheet (an example of a blocking member)
61 clip 70 sealing member (an example of a closing member)

Claims (7)

A pellicle storage container for transporting a pellicle comprising a pellicle membrane and a support frame that supports the pellicle membrane,
A tray and a cover to cover it,
A closing member that closes a gap between the tray and the cover on the outside or inside of the tray and the cover;
A pellicle storage container, wherein at least a contact portion in contact with the tray or the cover of the closing member is made of urethane elastomer.   The said closing member is a sealing member made of urethane elastomer, which is disposed on the inside of the tray and the cover, and is provided on at least one of the opposing surfaces of the tray and the cover. A storage container for a pellicle according to 1.   The pellicle storage container according to claim 1, further comprising a clip that clamps and fixes the tray and the cover.   The pellicle storage container according to any one of claims 1 to 3, wherein the urethane elastomer is manufactured using a polyether polyol as a main polyol. A pellicle storage container for transporting a pellicle comprising a pellicle membrane and a support frame that supports the pellicle membrane,
A tray and a cover to cover it,
A clip for holding and fixing the tray and the cover;
The pellicle storage container, wherein the clip is made of urethane elastomer.   6. The pellicle storage container according to claim 5, wherein the clip is made of a urethane elastomer having a Shore hardness of A80 or more.   The pellicle storage container according to claim 5 or 6, wherein the clip is made of a urethane elastomer manufactured using a polyether polyol as a main polyol.

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