JP2007198165A - Diaphragm pump - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a diaphragm pump enabling to fix a diaphragm and a partition member easily without causing variation of pump characteristic, with keeping sufficient sealing performance. <P>SOLUTION: A resin diaphragm 31, a metal diaphragm 32 and an actuator 30 which is a joined body of piezoelectric elements 33 are arranged on both sides of a partition plate 10, and a space between each actuator 30 and the partition plate 10 is divided as pump chambers 34 to construct a diaphragm pump of "two actuators: two pump chambers". A delivery side communication path 14b and a suction side communication path 14a communicating with each pump chamber 34 are formed on the partition plate 10, and a delivery flow path 15b and a suction flow path 15a extending from the communication paths 14a, 14b in a side surface direction are penetrated and formed. A sealing part 41 not interfering with each flow path 15a, 15b is formed around the pump chamber 34 by laser-welding the resin diaphragm 31 on the partition plate 10 to secure sealing performance and make joining condition constant. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to a diaphragm pump that draws fluid into a pump chamber and drives it by driving a diaphragm, and more particularly to a diaphragm pump suitable as a micro pump.

  In technical fields such as medical administration in the medical field, fuel supply for fuel cells, or ink supply for printing equipment, micropumps that pump a fixed amount of fluid or gas with high accuracy are used. There is a pump that exhibits a pump action by driving and vibrating a flexible thin film such as a diaphragm. As a pump of this type, a partition member is disposed between a pair of thin films, one between each thin film and the partition member is a suction side pump chamber, the other is a discharge side pump chamber, and both pump chambers communicate with each other. There exists a thing of the made structure (patent documents 1-3). In such a two-chamber structure pump, each thin film is driven in the opposite phase to alternately expand / contract the suction side pump chamber and the discharge side pump chamber, thereby sucking the fluid into the suction side pump chamber and the suction side. The fluid sucked into the pump chamber is repeatedly sent to the discharge side pump chamber and the fluid is discharged from the discharge side pump chamber to the outside of the pump.

  Further, as a two-chamber pump, a communication passage that allows the pump chambers to communicate with each other and a suction / discharge flow passage that communicates with the communication passage is formed, and each thin film is driven in the same phase to drive each pump chamber. A structure is also known that simultaneously expands / contracts and returns the fluid sucked into the pump chamber from the suction port via the suction / discharge channel and returns to the suction / discharge channel and is discharged from the discharge port (Patent Document 4). ).

Japanese Utility Model Publication No. 7-10480 JP 2003-320020 A Japanese Patent Laid-Open No. 2003-332085 Japanese Patent Laying-Open No. 2005-54658

  As a means for fixing a thin film such as a pair of diaphragms to the partition member in the two-chamber structure pump, for example, screwing with an O-ring of a sealing material sandwiched therebetween (Patent Document 1) or bonding with an adhesive ( A method such as Patent Document 4) is employed. However, the screwing means is complicated because it is necessary to tighten a plurality of screws one by one, so that the productivity is low and there is a disadvantage that it is not suitable for downsizing. Further, since it is difficult to keep the screw tightening state constant, the operation of the thin film is difficult to be uniform, and there is a relatively high possibility that the pump characteristics such as the flow rate vary among products. On the other hand, although the adhesive means is easy to fix and suitable for downsizing, there is concern that excessive adhesive will overflow and adhere to unnecessary parts, adversely affecting the operation of the thin film. Sexuality may not be sufficient.

  Therefore, according to the present invention, the diaphragm and the partition member can be easily fixed with sufficient sealing properties without causing variation in pump characteristics while achieving a reduction in size and a sufficient flow rate. It aims to provide a diaphragm pump.

  The present invention relates to a pair of diaphragms arranged in parallel at a predetermined interval, and a partition member arranged between the pair of diaphragms and partitioning the pump chamber into a pair of states between itself and each diaphragm. And a sealing portion provided around the pump chamber, in which a partition member and a pair of diaphragms are joined by laser welding, and provided in each diaphragm, and the volume of the pair of pump chambers is changed by driving these diaphragms. Drive means, a communication passage formed in the partition member and communicating with the pair of pump chambers, and a suction channel and a discharge channel formed in the partition member and connected to the communication channel. It is said.

  In the diaphragm pump of the present invention, the pair of diaphragms are synchronized with each other in the suction operation in which the pump chamber expands by bending away from the partition member and the discharge operation in which the pump chamber contracts by bending in the direction approaching the partition member. Driven to produce the same action. That is, the diaphragms are driven in the same phase, and during the suction operation, the fluid flows from the suction flow path through the communication path into the pump chambers that are enlarged and have a negative pressure. Next, when the pump chamber is reduced, the fluid in the pump chamber is discharged out of the pump through the discharge passage. By repeating the suction / discharge operation accompanying the driving of the pair of diaphragms as described above, the pump action is continuously generated, and the fluid is pumped.

  According to the present invention, the pair of diaphragms and the partition member are joined to each other by laser welding at the sealing portion around the pump chamber. For this reason, a diaphragm and a partition member can be joined easily and with a fixed joining state, and as a result, productivity is improved. In addition, since a certain bonding state can be obtained by laser welding, the operation of the diaphragm can be made uniform. As a result, it is difficult for variations to occur between products, and a high-quality and stable product can be obtained.

  In addition, since the two pump chambers are arranged on both sides of the partition member, and the communication passage that communicates these pump chambers is provided in the partition member and is in the pump, the size can be reduced. Further, since the sealing portion is arranged around the pump chamber, on the other hand, the suction flow channel and the discharge flow channel are formed so as to penetrate through the inside of the partition member. As a result, laser welding can be performed reliably and easily and the sealing performance between the partition member and the diaphragm is ensured.

  The arrangement of the two pump chambers on both sides of the partition member as described above also leads to an improvement in the flow rate. This is because the configuration in which the volume of the pump chamber is simply increased and the volume of the pump chamber is increased / decreased by one diaphragm does not increase the compression ratio. For example, if bubbles enter the pump chamber during liquid pumping, The pressure is consumed in the action of compressing the bubbles and does not act effectively on the liquid pumping. However, the compression ratio is ensured by dividing the pump chamber into two chambers as in the present invention, and even if bubbles enter the pump chamber, the pump pressure effectively acts to pump liquid. For these reasons, according to the diaphragm pump of the present invention, the flow rate is improved while being small.

  In the present invention, in order to facilitate the laser welding and obtain stable productivity, at least a portion corresponding to the sealing portion of the partition member is formed of a laser light absorbing material, while at least the sealing portion of the pair of diaphragms is formed. A form in which the corresponding portion is formed of a laser beam transmitting material is preferable. In this embodiment, the laser light is transmitted through the portion of the diaphragm made of the laser light transmitting material, the laser light absorbing material of the partition member is melted, and the molten material is welded to the diaphragm to join them together. As the laser light absorbing material and transmitting material, the former is a black resin, and the latter is a transparent resin.

  In the present invention, a suction-side check valve that allows only suction of fluid into the communication path is provided in the suction flow path, and a discharge-side check valve that allows only discharge of fluid from the communication path is provided in the discharge flow path. Is a preferable mode because a reverse flow does not occur in the flow of suction and discharge of the fluid, and an efficient pump action can be obtained.

  Although the number of communication passages formed in the partition member for communicating the pair of pump chambers may be one, the viewpoint of improving the efficiency of the pump action by setting the fluid flow direction in one direction on each of the suction side and the discharge side Therefore, it is preferable that the suction side communication path and the discharge side communication path be divided into two. Further, in this form, it is desirable that the suction side communication path and the discharge side communication path are arranged so as to be biased toward the opening side of the suction flow path and the discharge flow path in the partition member rather than the center of the partition member. The reason is that the lengths of the suction channel and the discharge channel are relatively short. This means that the dead space is reduced and the compression ratio is improved. This is because in the case of manufacturing by the injection molding used, the pin-shaped core for forming the suction flow path and the discharge flow path can be shortened, and therefore these cores are not easily damaged.

  In the present invention, the partition member is formed with a cover member in which a suction port communicating with the suction flow channel and a discharge port communicating with the discharge flow channel are formed, and the suction side check valve and the discharge side check valve are defined as the partition member. In the state of being sandwiched and held between the two, it includes a form of joining by laser welding. In this form, each check valve can be mounted at the same time as the cover member is laser welded to the partition member, and the labor for joining each check valve to the partition member and a bonding material such as an adhesive are not required. The improvement of the property is achieved. Moreover, the sealing performance between the partition member and the cover member is ensured. In this embodiment, at least the joining portion of the partition member with the cover member is formed of a laser light absorbing material, and at least the joining portion of the cover member with the partition member is formed of a laser light transmitting material, the partition member and the diaphragm are formed as described above. As in the case of forming these with these materials, laser welding is easy and stable productivity can be obtained.

  According to the present invention, the partition member is disposed between the pair of diaphragms, the pump chamber is partitioned into a pair of states between the partition member and each diaphragm, and each diaphragm and the partition member are joined by laser welding. While achieving miniaturization and ensuring a sufficient flow rate, the diaphragm and the partition member can be easily fixed without causing variations in pump characteristics and with sufficient sealing performance.

Hereinafter, an embodiment of the present invention will be described with reference to the drawings.
FIG. 1 shows a diaphragm pump (hereinafter abbreviated as a pump) 1 for liquid pumping according to an embodiment, wherein (a) is a partially sectional plan view, and (b) is a BB line arrow of (a). (C) is a CC line arrow view of (a). FIG. 2 is an exploded perspective view of the pump 1. As shown in these drawings, the pump 1 has a rectangular thin plate-like partition plate (partition member) 10 in which actuators 30 having the same configuration are attached to the front surface side and the back surface side, and the center of the thickness of the partition plate 10 is Is symmetrically configured with a center plane of symmetry.

  As shown in FIGS. 1A, 1B, and 2, the partition plate 10 has a rectangular plate-shaped main body portion 11 as a main portion, and a rectangular shape protruding in the front and back directions on one side of the main body portion 11. The connecting plate portion 12 is integrally formed. A pipe unit (cover member) 20 having a suction pipe 21A and a discharge pipe 21B is joined to the connection plate portion 12 by laser welding.

  Shallow circular recesses 13 are respectively formed on both surfaces of the main body 11 of the partition plate 10, and two holes 14 a and 14 b having a circular cross section penetrating the front and back surfaces are connected to the recesses 13. It is formed at a predetermined interval in the direction in which the plate portion 12 extends. The axial directions of the holes 14a and 14b are parallel to the thickness direction of the main body 11, and one is a suction side communication path 14a and the other is a discharge side communication path 14b.

  As shown in FIG. 1A, the center O of the recess 13 substantially coincides with the center of the main body 11, and each communication path 14 a, 14 b is biased toward the connecting plate 12 than the center of the main body 11. And at a position equidistant from the center. Inside the partition plate 10, a suction flow path 15a and a discharge flow path 15b penetrating from the outside of the connection plate portion 12 to the suction side communication path 14a and the discharge side communication path 14b are formed. These flow paths 15 a and 15 b extend in a direction orthogonal to the connection plate portion 12 and are formed at the center of the thickness of the partition plate 10.

  The pipe unit 20 has a suction pipe 21A and a discharge pipe 21B perpendicular to the outer surface on the outer surface side of a rectangular unit plate portion 20a having the same shape and the same dimensions as the connection plate portion 12, and spaced apart in the longitudinal direction. It is formed. As shown in FIG. 1 (a), the suction pipe 21A and the discharge pipe 21B have distal ends as a suction port 21a and a discharge port 21b. Inside the pipe unit 20, the unit plate portion 20a extends from the suction port 21a and the discharge port 21b. A suction flow path 22a and a discharge flow path 22b are formed through the inner surface (the bonding surface of the partition plate 10 to the connection plate portion 12). The suction flow path 22a and the discharge flow path 22b are connected to the suction flow path 15a and the discharge flow path 15b on the partition plate 10 side in a state where the unit plate portion 20a of the pipe unit 20 is joined to the connection plate portion 12. Each communicates.

  As shown in FIG. 1A, the suction passages 15a and 22a and the discharge passages 15b and 22b on the partition plate 10 side and the pipe unit 20 side are continuous, and one suction passage 16A and one discharge passage. 16B is configured. The suction passage 16A and the discharge passage 16B are opened and closed by a suction-side check valve 17A and a discharge-side check valve 17B provided between the partition plate 10 and the pipe unit 20.

  The suction-side check valve 17A allows only a flow of sucking liquid from the suction port 21a toward the suction-side communication path 14a, and prevents the liquid from being discharged in the suction flow path 16A. The discharge side check valve 17B allows only a flow of discharging the liquid from the discharge side communication path 14b toward the discharge port 21b, and prevents the liquid from being sucked in the discharge flow path 16B. Each check valve 17A, 17B is made of elastic thin-plate rubber or the like, and as shown in FIG. 1 (c), a fixed piece 17d is formed at one end of a movable bellows-shaped valve body 17c. The valve body 17c is bent with respect to the fixed piece 17d to be fixed and acts to open and close the flow path.

  As shown in FIG. 1A, a rectangular shallow recess is formed as a valve seat 24a around the opening 23a on the inner side (connection plate 12 side) of the suction flow path 22a on the pipe unit 20 side. ing. On the other hand, a rectangular recess 18 is formed around the opening 18a on the outer side (connection plate portion 12 side) of the suction passage 15a on the partition plate 10 side and on the surface facing the valve seat 24a. A suction side check valve 17A is fitted into the valve seat 24a. In the check valve 17A, the fixed piece 17d is sandwiched between the outer surface of the opposing connecting plate 12 and the valve seat 24a so that the valve body 17c can swing toward the rectangular recess 18 side. The attached cantilever state is maintained. Normally, the valve body 17c closes the opening 23a of the suction flow path 22a on the pipe unit 20 side.

  A rectangular shallow recess is formed as a valve seat 19b around the opening 18b on the outside of the discharge passage 15b on the partition plate 10 side. On the other hand, a rectangular recess 23 is formed around the opening 23b on the inner side of the discharge passage 22b on the pipe unit 20 side and on the surface facing the valve seat 19b. A discharge-side check valve 17B is fitted into the valve seat 19b. In the check valve 17B, the fixed piece 17d is sandwiched between the inner surface of the unit plate portion 20a of the opposing pipe unit 20 (joint surface with the connection plate portion 12) and the valve seat 19b in a compressed state. The cantilever mounting state in which the valve body 17c is swingable toward the rectangular recess 23 is maintained. Normally, the valve body 17c closes the opening 18b of the discharge channel 15b on the partition plate 10 side.

  According to the suction-side check valve 17A, when the fluid pressure of the liquid sucked from the suction port 21a is received, the valve body portion 17c bends toward the partition plate 10 and enters the rectangular recess 18a, thereby opening the opening 23a. The suction channel 16A is opened. At this time, the discharge-side check valve 17B is drawn into the partition plate 10 side by the suction pressure of the valve body 17c and is brought into close contact with the valve seat 19b, thereby closing the opening 18b on the partition plate 10 side, and the discharge flow path 16B. Is blocked.

  Further, according to the discharge side check valve 17B, when receiving the flow pressure of the liquid flowing from the discharge side communication path 14b through the discharge flow path 15b, the valve main body 17c is bent toward the pipe unit 20 side and inside the rectangular recess 23. In this way, the opening 18b is opened, and the discharge channel 16B is opened. At this time, in the suction side check valve 17A, the valve main body 17c is pressed against the partition plate 10 side by the discharge pressure and is brought into close contact with the valve seat 24a, thereby closing the opening 23a on the pipe unit 20 side, and the suction flow path 16A. Is blocked.

Next, the actuator 30 will be described.
As shown in FIGS. 1B and 2, the actuator 30 having the same configuration provided on the front side and the back side of the partition plate 10 has a piezoelectric element 33 attached to a rectangular resin diaphragm 31 made of a resin thin film. A rectangular metal diaphragm 32 made of a combined metal thin film is bonded together. Bonding of the metal diaphragm 32 to the resin diaphragm 31 and bonding of the piezoelectric element 33 to the metal diaphragm 32 are both performed by bonding with an adhesive. As shown in FIG. 2, the metal diaphragm 32 is formed with a plurality of arc-shaped slits 32a, so that the inside of the slits 32a is a movable portion 32b and the outside is a fixed portion 32c, and the surface of the movable portion 32b is piezoelectric. Element 33 is bonded.

  The resin diaphragm 31 of the actuator 30 is fitted on both surfaces of the partition plate 10 and around the recess 13, and the resin diaphragm 31 is joined to the partition plate 10 by laser welding. As the actuator 30 is joined to the partition plate 10 in this way, the recess 13 is closed by the actuator 30, and the recess 13 is partitioned as a pump chamber 34. When an AC signal (driving signal) such as a predetermined sine wave or rectangular wave is applied to the piezoelectric element 33, the actuator 30 bends and vibrates in a direction in which the diaphragms 31 and 32 move away from or approach the partition plate 10. 3 (a), the volume of the pump chamber 34 increases when it is deflected in the direction away from the partition plate 10, and conversely, the pump is pumped when it is bent in the direction approaching the partition plate 10 as shown in FIG. 3 (b). The volume of the chamber 34 is reduced.

  A portion where the resin diaphragm 31 of the actuator 30 is laser-welded to the partition plate 10 is, as shown in FIGS. 1A and 2, a sealing portion 41 formed in an annular shape with a predetermined width around the pump chamber 34. It is said that. The sealing portion 41 is continuously continuous over the entire circumference, and the partition plate in the sealing portion 41 prevents the liquid in the pump chamber 34 from leaking from between the partition plate 10 and the resin diaphragm 31 to the outside. 10 and the resin diaphragm 31 are laser-welded in a liquid-tight manner.

  Here, the material of each element constituting the pump 1 will be described. The partition plate 10, the resin diaphragm 31, and the pipe unit 20 are composed of COC (cycloolefin copolymer: cyclic olefin copolymer), PC (polycarbonate), Resins suitable for laser welding, such as PP (polypropylene), are preferably used. The metal diaphragm 32 is preferably made of phosphor bronze, stainless steel or the like.

The above is the configuration of the pump 1 of the embodiment, and the pump 1 is assembled as follows.
First, the resin diaphragms 31 are positioned and superimposed on the partition plate 10, and a laser beam such as a YAG laser or a semiconductor laser is irradiated from the resin diaphragm 31 side to a portion corresponding to the sealing portion 41, and the resin diaphragm is applied to the partition plate 10. 31 is laser welded. Subsequently, the metal diaphragm 32 to which the piezoelectric element 33 is previously bonded is bonded to the resin diaphragm 31 with an adhesive. Next, the check valves 17A and 17B are fitted into the valve seats 24a and 19b, and the pipe unit 20 is positioned and aligned with the connection plate portion 12 of the partition plate 10.

  First, a laser beam is irradiated from the pipe unit 20 side to portions corresponding to the periphery of the valve seats 24 a and 19 b, so that the unit plate portion 20 a of the pipe unit 20 is laser-welded to the connection plate portion 12 of the partition plate 10. As a result, the check valves 17A and 17B are held in a mounted state in which the fixed piece 17d is sandwiched between the pipe unit 20 and the partition plate. The periphery of the valve seats 19b and 24a and the rectangular recesses 18 and 23 is sealed so that there is no risk of liquid leaking from between the unit plate portion 20a of the pipe unit 20 and the connection plate portion 12 of the partition plate 10. Stopped. Next, the peripheral portion of the unit plate portion 20a of the pipe unit 20 is laser-welded to the connection plate portion 12 of the partition plate 10 in the same manner. The laser welded portion of the pipe unit 20 to the connecting plate portion 12 is formed in a rectangular shape slightly inside the edge of the connecting plate portion 12 as indicated by reference numeral 42 in FIGS. Moreover, the laser welding part for hold | maintaining and sealing each check valve 17A, 17B is shown by the code | symbol 43 of Fig.1 (a)-(c), and this is also made into the rectangular shape.

  In the pump 1 of the present embodiment, the suction operation in which the resin diaphragm 31 and the metal diaphragm 32 of each actuator 30 bend in the direction away from the partition plate 10 and the pump chamber 34 expands with respect to the piezoelectric element 33 of each actuator 30; The alternating current is applied so that the discharge operation in which the pump chamber 34 contracts by bending in the direction approaching the partition plate 10 is synchronized and the same operation occurs, that is, driven in the same phase. Driving in the same phase has an advantage that the driving circuit can be simply controlled even if there are two actuators 30. The liquid suction operation and the discharge operation are performed as follows.

[1] Liquid suction operation: FIG.
The resin diaphragm 31 and the metal diaphragm 32 of each actuator 30 bend in the direction away from the partition plate 10, the volume of each pump chamber 34 increases, the inside of these pump chambers 34 becomes negative pressure, and the suction side check valve 17A opens. The discharge side check valve 17B is closed. The liquid enters the suction side communication path 14a from the suction port 21a of the pipe unit 20 through the suction flow path 16A (the suction flow path 22a on the pipe unit 20 side and the suction flow path 15a on the partition plate 10 side). The air is branched from the communication passage 14 a and sucked into the pump chambers 34 on both sides of the partition plate 10.

[2] Liquid discharge operation: FIG.
The diaphragms 31 and 32 of each actuator 30 bend in the direction approaching the partition plate 10, the volume of each pump chamber 34 decreases, the pump chamber 34 becomes positive pressure, the suction side check valve 17A closes, and the discharge side The check valve 17B is opened. Then, the liquid accumulated in each pump chamber 34 flows into the discharge flow path 15b through the discharge side communication passage 14b and joins, and further passes through the open discharge side check valve 17B to be connected to the pipe unit 20 side. It flows through the discharge channel 17B and is discharged from the discharge port 21b.

  By repeating the above suction / discharge operations, the pump action is continuously generated, and the liquid is pumped. This suction / discharge operation occurs when the pump 1 is full of liquid, but during the self-suction that sucks the liquid from the initial state where the liquid is not full, the pump action causes the internal As the air is discharged, the liquid is gradually sucked.

  According to the pump 1 of the present embodiment, the pair of actuators 30 (strictly speaking, the resin diaphragm 31 constituting the actuator 30) and the partition plate 10 are laser-welded around the pump chamber 34 to form the sealing portion 41. Are joined together. For this reason, the actuator 30 and the partition plate 10 can be easily joined with a fixed joining state, and as a result, productivity is improved. In addition, since a certain joining state is obtained by laser welding, the operation of the actuator 30 can be made uniform, and as a result, it is difficult for variations to occur between products, and a high-quality and stable product can be obtained.

  In addition, two pump chambers 34 are arranged on both sides of the partition plate 10, and suction-side and discharge-side communication passages 14 a and 14 b communicating with the pump chambers 34 are formed in the partition plate 10 and are formed in the pump 1. Therefore, the size can be reduced. Further, the sealing portion 41 is disposed around the pump chamber 34. On the other hand, since the suction flow path 15a and the discharge flow path 15b are formed through the inside of the partition plate 10, the flow paths 15a, 15b does not interfere with the sealing portion 41, and as a result, the resin diaphragm 31 of the actuator 30 can be reliably and easily welded to the partition plate 10, and the sealing property between the partition plate 10 and the resin diaphragm 31 is improved. Secured. Furthermore, the compression ratio can be increased by these configurations. For this reason, even if bubbles enter the pump chamber 34, the pump pressure effectively works to pump the liquid. Is improved.

  In the partition plate 10, the suction side communication passage 14 a and the discharge side communication passage 14 b are biased toward the openings 18 a and 18 b of the suction passage 15 a and the discharge passage 15 b from the center of the main body 11 of the partition plate 10. Are arranged. For this reason, the lengths of the suction flow path 15a and the discharge flow path 15b are relatively short, which brings about the advantage that the dead space is reduced and the compression ratio is improved. In addition, when the partition plate 10 is manufactured by injection molding using a mold, the pin-shaped core for forming the suction channel 15a and the discharge channel 15b can be shortened. When the core is shortened, the core is less likely to be damaged. As a result, there is an advantage that the partition plate 10 can be easily manufactured and the yield is improved. As shown in FIG. 1 (a), when U-shaped shallow grooves 13c are formed on both surfaces of the partition plate 10 so as to protrude from the openings of the communication passages 14a and 14b toward the center, and to connect the openings. It is preferable because the flow resistance is lowered by the flow of the liquid through the groove 13c. Further, although the volume of the pump chamber 34 is reduced during discharge, there is an advantage that a liquid flow path is secured by the groove 13c.

  The suction side check valve 17A and the discharge side check valve 17B are mounted by laser welding the pipe unit 20 to the partition plate 10 around the check valves 17A and 17B. The labor for joining 17A and 17B to the partition plate 10 or the pipe unit 20 and a joining material such as an adhesive therefor are not required, and the productivity is improved. Moreover, the sealing performance between the partition plate 10 and the pipe unit 20 is ensured.

  Of the partition plate 10 and the resin diaphragm 31 and the pipe unit 20 that are joined to each other by laser welding, the partition plate 10 is formed of a laser light absorbing material, while the resin diaphragm 31 is joined to the partition plate 10 by laser welding. When the pipe unit 20 is formed of a laser beam transmitting material, the laser beam is transmitted through the laser beam transmitting material, the partition plate 10 made of the laser beam absorbing material is melted, and the molten material is welded to the laser beam transmitting material side. Can be joined. By selecting the material in this way, laser welding is facilitated and stable productivity can be obtained.

  The laser light absorbing material and the transmitting material are the above-mentioned COC resin or the like, and the laser beam can be absorbed and transmitted depending on the color such that the former is black and the latter is transparent. That is, in this embodiment, it is mentioned as one form that the partition plate 10 is formed with black resin, and the resin diaphragm 31 and the pipe unit 20 are formed with transparent resin. In addition, the whole may not be such a color, and the partition plate 10 corresponds to at least the sealing portion 41 to which the resin diaphragm 31 is laser-welded and the laser-welded portions 42 and 43 of the pipe unit 20. It is only necessary that the portion to be formed is made of black resin (laser beam absorbing member). Further, the resin diaphragm 31 is formed of a sealing portion 41, and the pipe unit 20 is formed of a transparent resin (laser beam transmitting member) corresponding to the laser welded portions 42 and 43 to the partition plate 10. It only has to be.

It is a diaphragm pump which concerns on one Embodiment of this invention, Comprising: (a) is a partial cross section top view, (b) is a BB arrow directional view of (a), (c) is C- of (a). FIG. It is a disassembled perspective view of the diaphragm pump of one Embodiment. It is sectional drawing of the diaphragm pump of one Embodiment at the time of (a) inhalation and (b) discharge.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 ... Diaphragm pump 10 ... Partition plate (partition member)
14a ... suction side communication path 14b ... discharge side communication path 16A ... suction flow path 16B ... discharge flow path 17A ... suction side check valve 17B ... discharge side check valve 18a ... opening of suction flow path 18b ... opening of discharge flow path 20. Pipe unit (cover member)
DESCRIPTION OF SYMBOLS 30 ... Actuator 31 ... Resin diaphragm 32 ... Metal diaphragm 33 ... Piezoelectric element (drive means)
34 ... Pump chamber 41 ... Sealing part 42, 43 ... Laser welding part

Claims (6)

A pair of diaphragms arranged in parallel at a predetermined interval;
A partition member disposed between the pair of diaphragms, and partitioning the pump chamber into a pair of states between itself and each diaphragm;
A sealing portion provided around the pump chamber, in which the partition member and the pair of diaphragms are joined by laser welding;
Drive means provided on each of the diaphragms, and driving the diaphragms to change the volume of the pair of pump chambers;
A communication passage formed in the partition member and communicating with the pair of pump chambers;
A diaphragm pump, comprising: a suction flow path and a discharge flow path formed inside the partition member and communicating with the communication path.   At least a portion of the partition member corresponding to the sealing portion is formed of a laser light absorbing material, and at least a portion of the pair of diaphragms corresponding to the sealing portion is formed of a laser light transmitting material. The diaphragm pump according to claim 1.   The suction flow path is provided with a suction-side check valve that allows only suction of fluid into the communication path, and the discharge flow path is provided with a discharge-side check valve that allows discharge of fluid only from the communication path. The diaphragm pump according to claim 1, wherein the diaphragm pump is provided.   The diaphragm pump according to any one of claims 1 to 3, wherein the communication path is divided into a suction side communication path and a discharge side communication path.   The suction side communication path and the discharge side communication path are arranged so as to be biased toward the opening side of the suction flow path and the discharge flow path in the partition member from the center of the partition member. Item 5. The diaphragm pump according to Item 4. A cover member in which a suction port communicating with the suction flow channel and a discharge port communicating with the discharge flow channel are respectively formed in the partition member partitions the suction side check valve and the discharge side check valve. In a state of being sandwiched and held between members, it is joined by laser welding,
Further, at least a joining portion of the partition member with the cover member is formed of a laser light absorbing material, and at least a joining portion of the cover member with the partition member is formed of a laser light transmitting material. The diaphragm pump in any one of Claims 1-5.

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