JP2002106468A - Diaphragm pump - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a diaphragm pump whose mechanism is compact with high efficiency by simplified manufacturing and method. SOLUTION: A diaphragm 20 is laid on the top of a thin plate like cabinet 10 provided with two through-holes 11 and 12, and a pump chamber 25 is formed by the diaphragm 20 whose periphery is bonded to the cabinet 10 using bond 21. In the through-hole 11, a sheet of rectangular film 30 is so laid as to cover the opening 13 on the top of the plate cabinet 10 and a suction valve is formed by bonding with the plate like cabinet 10 by laser radiation at the location parallel with a short side of a sheet of rectangular film 30 by covering the opening 13. Also, in the through-hole 12, a rectangular film 30 is so laid as to cover the opening 14 at the bottom of the plate like cabinet 10, and a suction valve is formed by bonding with the plate like cabinet 10 at the location parallel with a short side of a sheet of rectangular film 30 by covering the opening 14, and a diaphragm pump A related to this invention is manufactured.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

The present invention relates to a diaphragm pump. More specifically, the present invention relates to a so-called piezoelectric pump utilizing the action of a diaphragm.

[0002]

2. Description of the Related Art FIG. 20 is an exploded perspective view showing an example of a conventional diaphragm pump X, and FIG. 21 is a schematic sectional structural view of the diaphragm pump X. The diaphragm pump X includes a housing 100 in which an exhaust passage 101 and an intake passage 102 are formed, and a diaphragm 110 for forming a pump chamber between the housing 100 and the housing 100. Case 1
Reference numeral 00 denotes an upper housing 130 and a lower housing 140, which are formed in a substantially square shape in plan view. Further, an exhaust passage 101 and an intake passage 10 are provided inside the housing 100.
2 are provided, and an exhaust passage 101 is provided on a side surface of the housing 100.
A connecting portion for connecting the intake path 102 to an external pipe (not shown) is extended.

In the lower housing 140, an exhaust path groove 141 forming the exhaust path 101 and an intake path groove 142 forming the intake path 102 are recessed. Exhaust passage groove 14
One end of 1 extends to a connecting portion forming protrusion 143 protruding from the side surface of the lower housing 140, and the other end includes
A substantially cylindrical concave portion 145 for forming an exhaust valve is formed. Also, one end of the groove 142 for the intake path is connected to the protrusion 1 for forming the connection portion, which protrudes from the side surface of the lower housing 140.
A substantially cylindrical concave portion 146 for forming an intake valve is formed at the other end.
Further, a cylindrical base 147 is formed at the center of the concave portion 146 for the intake valve.

[0004] The upper housing 130 has a shape that can be exactly overlapped with the lower housing 140.
Is provided with a projection 133 for forming a connection portion, facing the projection 143 of the lower housing 140. In addition, a concave portion 135 facing the concave portion 145 for the exhaust valve and a concave portion 136 facing the concave portion 146 for the intake valve are formed on the back surface side of the upper housing 130. A cylindrical pedestal 137 is formed substantially at the center of the exhaust valve recess 135. Further, a through-hole 131 is formed in the upper housing 130 so as to penetrate from the exhaust valve recess 135 to the upper surface of the upper housing 130. Further, a through hole 132 penetrating from the intake valve recess 136 to the upper surface of the upper housing 130 is also formed. Therefore, by overlapping the upper housing 130 and the lower housing 140, the housing 100
The exhaust path 101, the intake path 102, and the connection portion are formed. Note that the upper casing 130 and the lower casing 140 are joined so as not to leak by using an adhesive or the like.

[0005] A film 120 constituting an exhaust valve and an intake valve is sandwiched between the upper casing 130 and the lower casing 140. In the film 120,
The hole 1 for forming a valve is aligned with the positions of the concave portions 145 and 146 formed in the upper housing 130 and the lower housing 140.
21 have been established. The hole 121 is designed to be smaller than the two pedestals 137 and 147. The film 120 is adhered along the exhaust path groove 141 and the intake path groove 142 by, for example, laser welding.

As a result, the upper housing 130 and the lower housing 1
40, two exhaust valve recesses 135, 1
An exhaust valve is formed by the film 45, the pedestal 137 in the concave portion 135 formed in the upper housing 130, and the film 120. Further, the upper housing 130 and the lower housing 14
0, two intake valve recesses 136, 14
6, the pedestal 147 in the recess 146 formed in the lower housing 140, and the film 120 form an intake valve. Further, an exhaust path 101, an intake path 102, and a connection portion are configured in the housing 100.

In this manner, the housing 1 serving as the pump body
00 is formed. On the upper surface of the housing 100, a substantially circular thin film diaphragm 110 is joined to the upper surface of the upper housing 130 using an adhesive or the like. Thus, the diaphragm pump X is configured,
A pump chamber is formed between the upper surface of the housing 100 and the diaphragm 110.

In the diaphragm pump X having such a structure, the diaphragm 110 is bent up and down by vibrating the diaphragm 110 up and down, so that the function of the pump can be exhibited.

[0009]

However, in the diaphragm pump X having such a structure, since the casing 100 is composed of the upper casing 130 and the lower casing 140, the thickness of the casing 100 is reduced. And it was difficult to reduce the size of the diaphragm pump X itself. Also, due to the manufacturing process, the upper casing 130 and the lower casing 14
0, the film 120 is sandwiched between the upper and lower housings 130 and 140, so that the flatness and parallelism of the mating surfaces of the upper and lower housings 130 and 140 must be ensured. In addition, it is very difficult to position the three members. Was.

Furthermore, the presence of the upper casing 130 increases the distance from the intake valve to the pump chamber and the distance from the pump chamber to the exhaust valve, and causes a dead volume (diaphragm) with respect to the capacity of the pump chamber, which affects the pump discharge pressure. However, there is a problem that the capacitance which is not affected by the displacement of the H. 110 becomes large. On the other hand, it is conceivable to reduce the thickness of the upper casing 130 in consideration of such a viewpoint. However, when the thickness is reduced, distortion occurs during laser welding when the upper casing 130 and the lower casing 140 are joined. There was fear.

Also, as shown in FIG.
And the film 120 joined in the intake passage 102
A gap 103 is formed between the air passage and the lower surface of the upper housing 130, and an air leak is generated.
There is also a problem that it is difficult to form 2 accurately.

The present invention has been made in view of the above-mentioned problems of the prior art, and has a simple manufacturing and joining method.
An object of the present invention is to provide a diaphragm pump having a highly efficient and compact structure.

[0013]

A diaphragm pump according to the present invention has a plate-like housing provided with two through holes forming an intake passage and an exhaust passage, and a diaphragm disposed on the upper surface of the housing. And a pump chamber is formed by the above, wherein one of the through-holes is provided with an intake valve to form an intake path, and the other one of the through-holes is provided with an exhaust valve to form an exhaust path. It is characterized by having been done.

In this diaphragm pump, as an intake valve, for example, a film piece disposed on the upper surface of the housing so as to cover the opening of the through-hole constituting the intake passage, and the opening of the through-hole is formed. It can be configured to be joined to the housing at the sandwiching position.

At this time, the film piece may be sandwiched between the casing and a spacer having a vent hole formed in a region wider than a region corresponding to the opening of the through hole.

Further, in these diaphragm pumps, it is preferable that the through-hole constituting the intake path is provided such that the opening area on the pump chamber side is larger than the opening area on the opposite side of the pump chamber.

Further, as an intake valve, a film piece disposed on the bottom surface of an intake recess formed in the upper surface of the housing so as to cover the opening of the through hole constituting the intake passage is provided with the through hole. May be joined to the housing at a position sandwiching the opening.

Further, a film piece is disposed on the intake valve on the bottom surface of the intake concave portion formed on the lower surface of the housing so as to cover the opening of the through hole constituting the intake path. It is also possible to adopt a configuration in which the spacer is fitted into the recess and is sandwiched by a spacer having a vent hole opened in a region narrower than a region corresponding to the opening of the through hole. At this time, the film piece is bonded to the side of the pump chamber of the spacer at a position sandwiching the opening of the ventilation hole, or the opening area of the ventilation hole on the pump chamber side is larger than the opening area on the pump chamber opposite side. It is convenient to make large.

Alternatively, a film piece having an intake recess on the lower surface of the housing, and a vent hole provided on the bottom surface of the intake recess, is arranged.
A pedestal having a diameter larger than the diameter of the ventilation hole, an annular groove formed in a peripheral portion of the pedestal, a spacer including a ventilation hole connecting the groove and the outside, and a spacer for the intake recess. The film piece may be sandwiched between the bottom and the bottom surface to form an intake valve.

On the other hand, as the exhaust valve, a film piece is disposed on the lower surface of the housing so as to cover the opening of the through hole that constitutes the exhaust path, and is located at a position sandwiching the opening of the through hole. It can be configured by bonding to the housing.

[0021] At this time, the film piece can be sandwiched between the casing and the spacer having the vent hole formed in a region wider than the region corresponding to the opening of the through hole.

Further, in these diaphragm pumps, it is preferable that the opening area of the through-hole constituting the exhaust passage be smaller on the pump chamber side than on the opposite side of the pump chamber.

Also, the exhaust valve is joined to the housing at a position sandwiching the opening of the through-hole with a film piece disposed on the bottom surface of the exhaust recess formed in the lower surface of the housing. It can also be configured.

Further, an exhaust concave portion is provided on the lower surface of the housing, and a film piece provided with a vent hole is disposed on the bottom surface of the exhaust concave portion.
In the housing, a pedestal having a diameter larger than the diameter of the ventilation hole, an annular groove formed in a peripheral portion of the pedestal, and a ventilation hole connecting the groove and the pump chamber are formed. The exhaust piece may be formed by sandwiching the film piece between the annular spacer and the bottom surface of the exhaust recess.

In these diaphragm pumps,
It is preferable that a connection pipe be provided on the lower surface of the housing, and a tip of the connection pipe be fitted into the intake recess and / or the exhaust recess.

Alternatively, a thin plate portion having a connection groove formed on the lower surface of the housing is provided, and the connection groove and the housing are connected to the intake path and / or the exhaust path. It is desirable to provide a connection path.

[0027]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described below in detail with reference to the drawings. First, FIG. 1 is a schematic perspective view of a first diaphragm pump A according to one embodiment of the present invention, FIG. 2 is a schematic exploded perspective view of the diaphragm pump A, and FIG. 3 is a sectional structure of the diaphragm pump A. FIG. 4 is an enlarged explanatory view showing an intake valve of the diaphragm pump A, and FIGS. 5 and 6 are explanatory views showing the operation of the intake valve.

The diaphragm pump A is a plate-shaped casing 10
And a diaphragm 20, and a peripheral portion of the diaphragm 20 is joined to an upper surface of the housing 10 by an adhesive 21, laser joining, or the like. As a result, the housing 10
A pump chamber 25 is formed between the pump chamber 25 and the diaphragm 20.

The diaphragm 20 is made of a thin-film piezoelectric actuator, and its structure can be used without any limitation as long as it can expand and contract by applying a voltage, such as a piezoelectric element (piezo element), brass, or silver. .
The diaphragm 20 shown in each figure is a thin plate-shaped piezoelectric element 23.
A piezoelectric actuator having electrodes 22 formed on both surfaces is used. That is, when a voltage in a certain direction is applied to the diaphragm 20, the diaphragm 20 bends upward to increase the capacity of the pump chamber, and when a voltage in the opposite direction is applied, the diaphragm 20 moves downward. Bending reduces pump chamber capacity. Therefore, it is preferable that the diaphragm 20 is designed to have such a size that the diaphragm 20 does not come into contact with the housing 10 when the pump chamber capacity is the minimum, and is joined to the upper surface of the housing 10.

The casing 10 is provided with two through holes 11 and 12.
And an exhaust path 2 are formed. A rectangular film piece 30 is disposed on the upper surface of the housing 10 so as to cover the opening 13 of the through hole 11 on the pump chamber 25 side. The film piece 30 sandwiches the opening 13 on the pump chamber 25 side as shown in FIG. 4 and is, for example, at a position parallel to the short side of the film piece 30 (the position indicated by the broken line a in FIGS. 2 and 4). It is joined to the upper surface of the housing 10 by laser irradiation to form an intake valve. At this time, the film piece 30 is
It is preferable that the bonding is made as close as possible to 0, but it is not always necessary to make close contact, but rather, it is sufficiently lifted above the opening 13 and a sufficient gap is formed between the opening 13 and the film piece 30. It is preferable to attach them with a margin. As such a film piece 30, for example, a polyimide film or a polyvinyl chloride film,
A polyvinylidene chloride film, a polyethylene film or the like is used.

Further, the through-hole 11 forming the intake path 1
Is formed in a convex shape in cross section, and the opening area on the pump chamber 25 side is larger than the opening area on the opposite side.
As a result, the contact area between the film piece 30 and the opening 13 increases, and the response speed of the intake valve can be increased. Further, a so-called dead volume can be reduced as compared with the case where the through hole 11 is formed in a cylindrical shape, and the pump discharge pressure can be further increased. Therefore, the cross-sectional shape does not matter as long as the opening area in contact with the film piece 30 is increased.

On the other hand, a film piece 30 is also arranged on the lower surface of the housing 10 so as to cover the opening 14 of the through hole 12 on the side opposite to the pump chamber 25. The film piece 30 also
Similarly to the film piece 30 on the intake side, at a position sandwiching the opening 14 on the opposite side of the pump chamber 25 (the position indicated by the broken line B in FIGS. 2 and 5), at a position parallel to the short side of the film piece 30. It is joined to the upper surface of the housing 10 to form an exhaust valve.

Further, the through holes 12 forming the exhaust path 2
Also, the opening area on the opposite side of the pump chamber 25 is larger than the opening area on the pump chamber 25 side. As a result, the responsiveness of the exhaust valve is also improved.

In the diaphragm pump A configured as described above, the volume of the pump chamber is changed by driving the diaphragm 20, and the intake valve and the exhaust valve are opened and closed by this change. That is, when a voltage is applied to the diaphragm 20 and the pump chamber capacity is minimized, the film piece 30 of the intake valve closes the opening 13 of the through hole 11 as shown in FIG. It is closed. At this time, the film piece 30 of the exhaust valve is kept away from the opening 14 of the through hole 12, and the exhaust valve is opened.

When a reverse voltage is applied to the diaphragm 20 and the capacity of the pump chamber is maximized, the film piece 30 of the intake valve is moved from the opening 13 of the through hole 11 as shown in FIG. The fluid is allowed to flow away from the space between the opening 13 and the film piece 30 and the intake valve is opened. At this time, although not shown, the film piece 30 of the exhaust valve is connected to the opening 1 of the through hole 12.
4 is closed, and the exhaust valve is closed.

As described above, in the diaphragm pump A according to the present invention, the single casing 10 and the diaphragm 20
Therefore, the configuration can be made very simple. In particular, since the intake valve and the exhaust valve are configured in the single casing 10, the thickness can be reduced. In addition, as a result, the so-called dead volume from the intake valve to the pump chamber 25 can be reduced, so that the discharge pressure of the pump can be increased. Further, the two valves move the film piece 30 from above to the housing 1.
Since it is bonded to the upper surface, it can be manufactured extremely easily, and the film piece 30 can be opened and closed by a floating phenomenon. For this reason, it is sufficient that the film piece 30 does not easily come off the housing 10, and the joining accuracy may be relatively low. On the other hand, both valves can be reliably closed and reliability can be ensured.

FIG. 7 is an enlarged explanatory view of an intake valve of a second diaphragm pump B according to another embodiment of the present invention. In the intake valve, the film piece 30 constituting the intake valve is sandwiched between the spacer 40 and the housing 10. This spacer 40
Is formed in a substantially rectangular shape from a plastic material or the like to a size that can cover the film piece 30, and a substantially elliptical column-shaped vent hole 41 is opened in the center thereof. The ventilation hole 41 is opened such that the long axis side of the unbonded film piece 30 is exposed from the ventilation hole 41, and is discharged from the gap between the opening 13 of the through hole 11 and the film piece 30. The pumped fluid can be sent into the pump chamber 25 from the vent hole 41. The spacer 40 has two sides joined to the upper surface of the housing 10 together with the film piece 30 by, for example, laser irradiation at a position sandwiching the ventilation hole 41 (a position indicated by a broken line B in FIG. 7). Be composed.

By using the spacer 40 in this manner, the film piece 30 can be sandwiched to form an intake valve. Of course, it goes without saying that the exhaust valve can also be configured using such a spacer 40.

FIG. 8 is a schematic exploded perspective view of a third diaphragm pump C as still another embodiment of the present invention, and FIG. 9 is a sectional structural view of the diaphragm pump C. In the diaphragm pump C, the exhaust valve is
The only difference from the first diaphragm pump A is that the first diaphragm pump A is configured in an exhaust recess 16 formed on the lower surface of the housing 10.

The exhaust recess 16 is formed to have a size that can accommodate the film piece 30, and is formed to be at least wider than the width of the film piece 30 in the short axis direction. That is, a design is made so that a slight gap is formed between the raised long side of the film piece 30 and the side wall of the concave portion 16 so that the fluid can pass through between the two. Also,
In order to make the exhaust path 2 as short as possible,
0 is formed deeply close to the upper surface. Further, the through-hole 12 forming the exhaust path 2 is formed so that the opening area on the exhaust recess 16 side is increased as much as possible so as to increase the response of the exhaust valve. Therefore, the length of the through hole 12 is short, and the influence of the exhaust path 2 on the dead volume is very small. The diaphragm pump C shown in the figure is formed in a substantially cylindrical shape. The film piece 30 constituting the exhaust valve is joined to the bottom surface of the exhaust recess 16 by, for example, laser joining as shown in FIG. of course,
Using the spacer 40 as shown in FIG.
To form an exhaust valve.

As described above, the exhaust recess 1 is provided on the lower surface of the housing 10.
By forming the exhaust valve 6 and forming an exhaust valve in the concave portion 16, the volume of the exhaust path 2, that is, the dead volume can be reduced, and a small-diameter diaphragm pump C with higher pump efficiency can be manufactured.

FIG. 10 is a schematic exploded perspective view of a fourth diaphragm pump D according to still another embodiment of the present invention, and FIG. 11 is a sectional structural view of the diaphragm pump D.
The diaphragm pump D differs from the third diaphragm pump C shown in FIGS. 8 and 9 in that the intake valve is formed in an intake recess 15 formed on the upper surface of the housing 10. I'm just there.

The intake recess 15 is formed at least wider than the width of the film piece 30 in the short axis direction so that a sufficient gap is formed between the long side of the film piece 30 and the side wall of the recess 15. Designed. Further, it is formed at a depth substantially equal to the thickness of the film piece 30. As a result, the upper surface of the film piece 30 joined to the bottom surface of the intake concave portion 15 is located substantially the same as the upper surface of the housing 10, and the substantial capacity of the pump chamber 25 can be further secured. In addition, it is conceivable to perform bonding by using the spacer 40 shown in FIG. 7. However, in this case, the dead volume increases by the thickness of the spacer 40 and the capacity of the pump chamber 25 decreases. Can not be said.

FIG. 12 is a schematic exploded perspective view of a fifth diaphragm pump E according to still another embodiment of the present invention, and FIG. 13 is a sectional structural view of the diaphragm pump E. The diaphragm pump E has substantially the same structure as the third diaphragm pump C shown in FIGS. 8 and 9 in that the exhaust valve is formed in an exhaust recess 16 formed on the lower surface of the housing 10. However, the difference is that the intake valve is configured in an intake recess 17 formed on the lower surface of the housing 10.

The intake recess 17 is designed to have such a size that a slight gap is formed between the film piece 30 and the side wall of the recess 17. In addition, in order to make the intake path 1 as short as possible, the bottom surface of the intake concave portion 17 is formed deeply close to the upper surface of the housing 10. Further, the through-holes 11 constituting the intake passage 1 are provided to enhance the responsiveness of the intake valve.
The opening is formed such that the opening area on the upper surface side of the housing 10 is as large as possible. At this time, the through hole 11 is formed in a substantially cylindrical shape because the length of the through hole 11 is short because the casing 10 is thin and the influence of the intake path 1 on the dead volume is very small.

The film piece 30 constituting the intake valve is sandwiched between the spacer 50 and the bottom surface of the intake recess 17 as shown in FIGS. The spacer 50 is formed in such a size that it can be fitted into the intake recess 17 without any gap. A vent hole 51 having a convex cross section is formed in the center of the spacer 50. The ventilation holes 51 are also designed such that the opening area on the film piece 30 side is smaller on the side opposite to the film piece 30 in order to improve the responsiveness of the film piece 30. Is designed to be smaller than the through hole 11.

The film piece 30 is positioned at the position sandwiching the opening 52 of the ventilation hole 51 of the spacer 50.
Two or more arc-shaped laser joints are formed on the upper surface of each of them so as to be parallel to the periphery of the opening 52 of the ventilation hole 51. Thus, the intake valve is configured.

In this diaphragm pump E, since the intake valve can be installed from the side opposite to the diaphragm 20 and both the intake valve and the exhaust valve can be produced from the lower surface of the housing 10, the diaphragm pump E can be produced. It can be done easily. In addition, film piece 3
0 can be previously bonded to the spacer 50, so that the intake valve can be easily replaced.

FIG. 14 is a cross-sectional structural view of a sixth diaphragm pump F according to still another embodiment of the present invention, with a part cut away. In the diaphragm pump F, the intake valve is formed on the intake recess 1 formed on the lower surface of the housing 10.
7, and the exhaust valve is formed in an exhaust recess 16 formed on the lower surface of the housing 10.

The intake recess 17 is designed to have such a size that almost no gap is formed between the intake recess 17 and the side wall of the recess 17. In addition, in order to make the intake path 1 as short as possible, the bottom surface of the intake concave portion 17 is formed deeply close to the upper surface of the housing 10. The through-hole 11 that forms the intake path 1 is formed so that the opening area on the upper surface side of the housing 1 is as large as possible so as to increase the responsiveness of the intake valve. Therefore, the length of the through hole 11 is short, and the influence of the intake passage 1 on the dead volume is very small. Therefore, the through hole 11 is formed in a substantially cylindrical shape.

The intake valve does not have a structure in which the fluid flows through a gap formed around the film piece 30 when the film piece 30 floats as in the case of the conventional diaphragm pumps A to E, but is provided substantially at the center of the film piece 30. The vent hole 31 thus lifted up from the spacer 60 has a structure in which a fluid flows. That is,
The spacers 60 correspond to the ventilation holes 31 of the film piece 30 as shown in FIGS.
A pedestal 61 having a diameter larger than the diameter of the pedestal 61;
Is provided with an annular groove 62 having a diameter substantially the same as the diameter of the through hole 11 at the peripheral edge of the groove 6.
The lower surface of 2 has a ventilation hole 63 connected to the outside.

Also in the intake valve, the film piece 30 is sandwiched between the spacer 60 and the bottom surface of the intake recess 17. At this time, the periphery of the film piece 30 made larger than the spacer 60 is placed on the side surface of the spacer 60. By wrapping and pushing it into the intake recess 17, air leaks are reliably prevented.

As a result, when the capacity of the pump chamber is increased, the film piece 30 rises from the pedestal 61, the intake valve is opened, and the pedestal 61 and the film piece 3 are opened.
Fluid flows into the pump chamber 25 from the gap between the pump chamber 25 and the gap 0. When the capacity of the pump chamber is reduced, the film piece 30 is
And the intake valve is closed, preventing the fluid from flowing into the pump chamber 25.

On the other hand, although the exhaust valve has substantially the same structure, in the exhaust valve, the pedestal 18 is connected to the casing 10.
Formed. That is, corresponding to the ventilation holes 31 formed in the film piece 30, the ventilation holes 31
Pedestal 18 having a diameter larger than the diameter of pedestal 18
An annular groove 19 having a diameter smaller than the diameter of the exhaust recess 16 is provided at the peripheral edge of the groove 19, and a through hole 12 for connecting the groove 19 and the pump chamber 25 is formed on the upper surface of the groove 19. Have been.

Further, a cylindrical spacer 70 is provided on the lower surface of the film piece 30, and sandwiches the film piece 30. The outer diameter of the spacer 70 is equal to the exhaust recess 16.
And the inner diameter is set to be substantially the same as the diameter of the groove 19. Therefore, the periphery of the film piece 30 made larger than the spacer 70 is
The air leak is reliably prevented by wrapping it around the side surface and pushing it into the exhaust recess 16.

As a result, when the capacity of the pump chamber is increased, the film piece 30 is brought into close contact with the pedestal 18, the exhaust valve is closed, and the fluid is prevented from flowing out.
When the capacity of the pump chamber is reduced, the film piece 3
0 rises from the pedestal 18, the exhaust valve is opened, and the fluid flows out of the gap between the pedestal 18 and the film piece 30 through the ventilation hole 31 of the film piece 30.

With the intake valve and the exhaust valve having such a structure, both valves can be constituted by working from the lower surface of the housing 10, and the valves can be replaced by attaching and detaching the spacers 60 and 70. Can be easily performed.

FIG. 16 is a schematic exploded perspective view of a seventh diaphragm pump G according to still another embodiment of the present invention.
FIG. 17 is a sectional structural view of the diaphragm pump G. The diaphragm pump G has substantially the same configuration as the fourth diaphragm pump D shown in FIG. 10, but includes an exhaust pipe 80 on the exhaust path 2 side. It is provided on the lower surface of the body 10 in a downward direction of the housing 10. The housing 10 is formed with a mounting recess 81 for an exhaust pipe 80.
An exhaust recess 16 is formed therein. Exhaust pipe 8
The exhaust pipe 80 may be provided with a projection 82 at one end thereof to have a convex cross section, although the end face may be provided on the lower surface of the housing 10 with an adhesive or the like. And can be fitted into the mounting recess 81. Further, the seventh diaphragm pump G is shown with the film piece 30 mounted on the bottom surface of the exhaust recess 16 as shown in the figure, but is applicable regardless of the presence or absence of the exhaust recess 16. For example, in the diaphragm pump A shown in FIG. 1, a mounting recess 81 may be provided on the lower surface of the housing 10. Furthermore, it can be applied to the intake recess 17 as an intake pipe.
Although not shown, when the spacer 70 is used, for example, as in a sixth diaphragm pump F shown in FIG. 14, the exhaust pipe 80 and the spacer 70 may be used together, or the intake pipe may be used. Spacer 5 shown in FIG.
It can also be used as 0.

FIG. 18 is a schematic exploded perspective view of an eighth diaphragm pump H according to still another embodiment of the present invention.
FIG. 19 is a sectional structural view of the diaphragm pump H. In the diaphragm pump H, a connection path 3 for connecting to the outside is formed on the lower surface of the housing 10, and two thin plate portions 90 are provided on the lower surface of the housing 10. . On the upper surface of the plate portion 90, a groove portion 91 for forming the connection path 3 is formed.
The tip of the groove 91 is located at the opening of the intake path 1 opposite to the pump chamber 25, or the tip of the groove 91 is located at the opening of the exhaust recess 16. Also, the plate unit 90
Has its entire surface joined to the lower surface of the housing 10 so as not to leak fluid.

By forming the connection path 3 using such a thin plate portion 90, intake and exhaust from below the diaphragm pump G can be avoided. In addition, it is easy to connect an intake / exhaust pipe (not shown) from the side of the diaphragm pump G, which can further contribute to miniaturization of various devices using the diaphragm pump according to the present invention. Of course, even in a tire frame pump having another structure, such a plate portion 90 may be used.
Can be used to configure the connection path 3.

It goes without saying that the diaphragm pump of the present invention can be used not only for gas but also for other fluids such as liquids.

[0062]

According to the diaphragm pump of the present invention, a pump chamber is formed by a plate-like housing provided with two through holes forming an intake passage and an exhaust passage, and a diaphragm provided on the upper surface of the housing. Is formed, wherein one of the through holes is provided with an intake valve to form an intake path, and the other one of the through holes is provided with an exhaust valve to form an exhaust path. Because it is a feature,
With a very simple configuration, a small diaphragm pump can be provided. In particular, since it is constituted by a single housing, a thin diaphragm pump can be obtained. Further, since the distance between the pump chamber and the supply / exhaust valve is shortened, so-called dead volume is reduced, and the discharge pressure of the pump can be increased.

In this diaphragm pump, as an intake valve, for example, a film piece disposed on the upper surface of the housing so as to cover the opening of the through-hole forming the intake passage is formed by removing the opening of the through-hole. It can be configured to be joined to the housing at the sandwiching position. As described above, in the diaphragm pump of the present invention, the film piece may be sandwiched between the casing and the spacer having the vent hole formed in a region wider than the region corresponding to the opening of the through hole. . With such a structure, the intake valve can be easily configured.

In these diaphragm pumps, the through-holes constituting the intake path are provided so that the opening area on the pump chamber side is larger than the opening area on the opposite side of the pump chamber. The contact area with the road is increased, and the responsiveness of the intake valve can be improved.

Further, as an intake valve, a film piece arranged on the bottom surface of the intake recess formed in the upper surface of the housing so as to cover the opening of the through hole constituting the intake path is provided with the through hole. And the upper surface of the housing can be made flush with each other at a position sandwiching the opening of the opening, eliminating dead volumes and maximizing the capacity of the pump chamber. be able to.

Further, a film piece is placed on the intake valve so as to cover the opening of the through hole constituting the intake path on the bottom surface of the intake recess formed in the lower surface of the housing. It is also possible to adopt a configuration in which the spacer is fitted into the recess and is sandwiched by a spacer having a vent hole opened in a region narrower than a region corresponding to the opening of the through hole. By using such a spacer, the intake valve can be operated from the lower surface of the housing, so that the diaphragm pump can be easily manufactured and the intake valve can be easily replaced.

At this time, the film piece is joined to the side of the pump chamber of the spacer at a position sandwiching the opening of the ventilation hole, or the opening area of the ventilation hole on the pump chamber side is opposite to the opening on the pump chamber side. It is convenient to make it larger than the area. In this manner, if the film piece is bonded to the spacer, the production and replacement of the intake valve are further facilitated, and the responsiveness of the intake valve can be secured.

Alternatively, a film piece having an intake recess on the lower surface of the housing, and a vent hole provided on the bottom surface of the intake recess, is arranged.
A pedestal having a diameter larger than the diameter of the ventilation hole, an annular groove formed in a peripheral portion of the pedestal, a spacer including a ventilation hole connecting the groove and the outside, and a spacer for the intake recess. The film piece may be sandwiched between the bottom and the bottom surface to form an intake valve. With such a configuration, the intake valve can be configured without joining the film pieces.

On the other hand, as the exhaust valve, a film piece is disposed on the lower surface of the housing so as to cover the opening of the through hole constituting the exhaust path, and is located at a position sandwiching the opening of the through hole. It can be configured by bonding to the housing. With this configuration, the exhaust valve can be manufactured from the lower surface of the housing, so that the exhaust valve can be manufactured very easily.

At this time, the film piece is sandwiched between the casing and the spacer having the vent hole formed in a region wider than the region corresponding to the opening of the through hole, whereby the exhaust valve is further manufactured. Becomes easier.

In these diaphragm pumps, it is preferable that the opening area on the pump chamber side of the through hole forming the exhaust path is smaller than the opening area on the opposite side of the pump chamber. Thereby, the responsiveness of the exhaust valve is improved.

Further, if the exhaust valve is joined to the housing at a position sandwiching the opening of the through-hole, a film piece disposed on the bottom surface of the exhaust recess formed on the lower surface of the housing. By reducing the distance from the pump chamber to the exhaust valve, the so-called dead volume is reduced,
The discharge pressure of the pump can be further increased.

Further, an exhaust concave portion is provided on the lower surface of the housing, and a film piece provided with a vent hole is disposed on the bottom surface of the exhaust concave portion.
In the housing, a pedestal having a diameter larger than the diameter of the ventilation hole, an annular groove formed in a peripheral portion of the pedestal, and a ventilation hole connecting the groove and the pump chamber are formed. By sandwiching the film piece on the bottom surface of the annular spacer and the exhaust recess, and forming an exhaust valve,
Not only can the dead volume be reduced, but also the exhaust valve can be configured without joining the film pieces, and the exhaust valve can be easily replaced.

In these diaphragm pumps, a connection pipe is provided on the lower surface of the housing, and the end of the connection pipe is fitted into the intake recess and / or the exhaust recess to facilitate connection to the outside. Can be done.

Alternatively, a thin plate portion having a connection groove formed on the lower surface of the housing is provided, and the connection groove and the housing are connected to the intake path and / or the exhaust path. By providing the connection path, suction and exhaust from the lower surface of the diaphragm pump can be avoided, and the diaphragm pump can be easily connected to the outside while maintaining a low profile.

As described above, according to the present invention, it is possible to provide a small diaphragm pump having a high pump discharge force with a very simple structure.

[Brief description of the drawings]

FIG. 1 is a schematic perspective view of a diaphragm pump according to one embodiment of the present invention.

FIG. 2 is a schematic exploded perspective view of the diaphragm pump.

FIG. 3 is a sectional structural view of the diaphragm pump according to the first embodiment;

FIG. 4 is an enlarged explanatory view showing an intake valve in the diaphragm pump according to the first embodiment.

FIG. 5 is an explanatory view showing the operation of the intake valve of the diaphragm pump, showing a closed state of the valve.

FIG. 6 is an explanatory view showing an operation of an intake valve of the diaphragm pump in the same as above, and is a view showing a valve open state.

FIG. 7 is an enlarged explanatory view of an intake valve of a diaphragm pump according to another embodiment of the present invention.

FIG. 8 is a schematic exploded perspective view of a diaphragm pump according to still another embodiment of the present invention.

9 is a sectional structural view of the diaphragm pump shown in FIG.

FIG. 10 is a schematic exploded perspective view of a diaphragm pump according to still another embodiment of the present invention.

11 is a sectional structural view of the diaphragm pump shown in FIG.

FIG. 12 is a schematic exploded perspective view of a diaphragm pump according to still another embodiment of the present invention.

13 is a sectional structural view of the diaphragm pump shown in FIG.

FIG. 14 is a partially cutaway sectional structural view of a diaphragm pump according to still another embodiment of the present invention.

15A and 15B are views showing a spacer used for an intake valve of the diaphragm pump shown in FIG. 14, wherein FIG. 15A is a plan view and FIG. 15B is a sectional view taken along line XX.

FIG. 16 is a schematic exploded perspective view of a diaphragm pump according to still another embodiment of the present invention.

17 is a sectional structural view of the diaphragm pump shown in FIG.

FIG. 18 is a schematic exploded perspective view of a diaphragm pump according to still another embodiment of the present invention.

FIG. 19 is a sectional structural view of the diaphragm pump shown in FIG.

FIG. 20 is a schematic exploded perspective view of a conventional diaphragm pump.

FIG. 21 is a sectional structural view of the diaphragm pump of the above.

FIG. 22 is an explanatory diagram showing a problem in the diaphragm pump.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 Intake path 2 Exhaust path 3 Connection path 10 Case 11 Through hole which constitutes an intake path 12 Through hole which constitutes an exhaust path 13 Pump chamber side opening of through hole which constitutes an intake path 14 Through hole which constitutes an exhaust path The opening opposite to the pump chamber 15 The intake recess formed on the upper surface of the housing 16 The exhaust recess formed on the lower surface of the housing 17 The intake recess formed on the lower surface of the housing 18 Formed on the housing Pedestal 20 constituting the exhaust valve 20 diaphragm 22 electrode 30 film piece 40 spacer 50 spacer 51 vent hole 60 spacer 61 pedestal 70 constituting the exhaust valve formed in the spacer 70 spacer 80 connecting pipe 90 plate portion constituting the connection path

 ──────────────────────────────────────────────────続 き Continuing on the front page F term (reference) 3H075 AA01 AA18 BB04 BB16 CC08 CC09 CC10 CC18 CC22 CC25 CC30 CC32 CC33 CC34 CC35 CC36 CC37 DA05 DA06 DA08 DA09 DA11 DB02 EE14 3H077 AA11 CC02 CC07 DD06 EE01 EE34 EE35 EE36 EE37 EE12

Claims (16)

[Claims] 1. A diaphragm pump in which a pump chamber is formed by a plate-shaped casing provided with two through holes and a diaphragm disposed on an upper surface of the casing, wherein one of the through holes is provided. A suction valve, and an intake path is formed, and an exhaust valve is provided in one of the remaining through holes to form an exhaust path. 2. The intake valve according to claim 1, wherein a film piece disposed on an upper surface of the housing so as to cover an opening of the through hole constituting the intake path is located at a position sandwiching the opening of the through hole. The diaphragm pump according to claim 1, wherein the diaphragm pump is configured to be joined to the housing. 3. The film piece is sandwiched between the casing and a spacer having a vent hole formed in a region wider than a region corresponding to an opening of the through hole. Diaphragm pump. 4. The through-hole constituting the intake passage, wherein an opening area on the pump chamber side is larger than an opening area on an opposite side of the pump chamber. Diaphragm pump. 5. The intake valve includes a film piece disposed on a bottom surface of an intake recess formed on an upper surface of a housing so as to cover an opening of a through hole constituting the intake path.
2. The diaphragm pump according to claim 1, wherein the diaphragm pump is joined to the housing at a position sandwiching the opening of the through hole. 6. The intake valve includes a film piece disposed on a bottom surface of an intake concave portion formed on a lower surface of a housing so as to cover an opening of a through-hole forming the intake path. The diaphragm pump according to claim 1, wherein the diaphragm pump is fitted in a recess having a ventilation hole formed in a region narrower than a region corresponding to an opening of the through hole. 7. The diaphragm pump according to claim 6, wherein the film piece is joined to a side surface of the pump chamber of the spacer at a position sandwiching the opening of the ventilation hole. 8. The diaphragm pump according to claim 6, wherein an opening area of the vent hole on the pump chamber side is larger than an opening area of the pump chamber on the opposite side. 9. A suction recess is provided on a lower surface of the housing, a film piece having a ventilation hole provided on a bottom surface of the suction recess is disposed, and a film piece is provided corresponding to the ventilation hole.
A spacer having a pedestal having a diameter larger than the diameter of the ventilation hole, an annular groove formed in a peripheral portion of the pedestal, a ventilation hole connecting the groove to the outside, and the intake recess 2. The diaphragm pump according to claim 1, wherein the film piece is sandwiched between the diaphragm and the bottom surface of the diaphragm to constitute an intake valve. 10. The exhaust valve moves a film piece disposed on the lower surface of the housing so as to cover an opening of a through hole constituting the exhaust path at a position sandwiching the opening of the through hole. The diaphragm pump according to claim 1, wherein the diaphragm pump is configured to be joined to the housing. 11. The film piece is sandwiched between the casing and a spacer having a vent formed in a region wider than a region corresponding to the opening of the through hole. Diaphragm pump. 12. The diaphragm pump according to claim 10, wherein the through-hole forming the exhaust passage has an opening area on the pump chamber side smaller than an opening area on the pump chamber opposite side. . 13. The exhaust valve, comprising: a film piece disposed on a bottom surface of an exhaust recess formed on a lower surface of a housing;
13. The diaphragm pump according to claim 12, wherein the diaphragm pump is joined to the housing at a position sandwiching the opening of the through hole. 14. An exhaust concave portion is provided on a lower surface of the housing, and a film piece provided with a vent hole is disposed on a bottom surface of the exhaust concave portion. In the housing, a pedestal having a diameter larger than the diameter of the ventilation hole, an annular groove formed in a peripheral portion of the pedestal, and a ventilation hole connecting the groove and the pump chamber are formed. 11. The diaphragm pump according to claim 10, wherein said film piece is sandwiched between an annular spacer and a bottom surface of said exhaust concave portion to constitute said exhaust valve. 15. A connection pipe is provided on a lower surface of the housing, and a tip of the connection pipe is fitted into a suction recess and / or an exhaust recess.
The diaphragm pump according to any one of the above. 16. A thin plate portion having a connection groove formed on a lower surface of the housing, and connected to the intake path and / or the exhaust path by the connection groove and the housing. 2. A connection path is provided.
15. The diaphragm pump according to any one of items 14 to 14.