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JP2006038121A - ゲート弁及び真空ゲート弁 - Google Patents

ゲート弁及び真空ゲート弁 Download PDF

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Publication number
JP2006038121A
JP2006038121A JP2004219658A JP2004219658A JP2006038121A JP 2006038121 A JP2006038121 A JP 2006038121A JP 2004219658 A JP2004219658 A JP 2004219658A JP 2004219658 A JP2004219658 A JP 2004219658A JP 2006038121 A JP2006038121 A JP 2006038121A
Authority
JP
Japan
Prior art keywords
valve
processing chamber
box
opening
vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2004219658A
Other languages
English (en)
Japanese (ja)
Inventor
Yasukazu Ugawa
泰和 鵜川
Masayuki Haga
雅幸 芳賀
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
ONO BEROO KOGYO KK
Original Assignee
ONO BEROO KOGYO KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ONO BEROO KOGYO KK filed Critical ONO BEROO KOGYO KK
Priority to JP2004219658A priority Critical patent/JP2006038121A/ja
Priority to TW094113438A priority patent/TWI287075B/zh
Priority to KR1020050042910A priority patent/KR100666894B1/ko
Publication of JP2006038121A publication Critical patent/JP2006038121A/ja
Pending legal-status Critical Current

Links

Images

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J3/00—Processes of utilising sub-atmospheric or super-atmospheric pressure to effect chemical or physical change of matter; Apparatus therefor
    • B01J3/02—Feed or outlet devices therefor
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K27/00—Construction of housing; Use of materials therefor
    • F16K27/04—Construction of housing; Use of materials therefor of sliding valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
    • F16K3/0254—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor being operated by particular means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
    • F16K3/16—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/30—Details
    • F16K3/314—Forms or constructions of slides; Attachment of the slide to the spindle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K51/00—Other details not peculiar to particular types of valves or cut-off apparatus
    • F16K51/02—Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Details Of Valves (AREA)
  • Sliding Valves (AREA)
JP2004219658A 2004-07-28 2004-07-28 ゲート弁及び真空ゲート弁 Pending JP2006038121A (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2004219658A JP2006038121A (ja) 2004-07-28 2004-07-28 ゲート弁及び真空ゲート弁
TW094113438A TWI287075B (en) 2004-07-28 2005-04-27 Gate valve and vacuum gate valve
KR1020050042910A KR100666894B1 (ko) 2004-07-28 2005-05-23 게이트밸브 및 진공 게이트밸브

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004219658A JP2006038121A (ja) 2004-07-28 2004-07-28 ゲート弁及び真空ゲート弁

Publications (1)

Publication Number Publication Date
JP2006038121A true JP2006038121A (ja) 2006-02-09

Family

ID=35903320

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004219658A Pending JP2006038121A (ja) 2004-07-28 2004-07-28 ゲート弁及び真空ゲート弁

Country Status (3)

Country Link
JP (1) JP2006038121A (zh)
KR (1) KR100666894B1 (zh)
TW (1) TWI287075B (zh)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102261516A (zh) * 2010-04-16 2011-11-30 亚威科股份有限公司 阀门、操作阀门的方法、以及真空处理设备
JP5011382B2 (ja) * 2007-05-08 2012-08-29 東京エレクトロン株式会社 バルブおよび該バルブを備えた処理装置
CN106907497A (zh) * 2017-05-09 2017-06-30 凯阀控股集团有限公司 一种陶瓷闸阀
CN107575641A (zh) * 2017-10-10 2018-01-12 深圳市大成精密设备有限公司 一种先导式真空阀门

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102008049353A1 (de) 2008-09-29 2010-04-08 Vat Holding Ag Vakuumventil
TWI385329B (zh) * 2008-11-21 2013-02-11 V Tex Corp Vacuum gate valve and its opening and closing method
KR101065127B1 (ko) * 2009-02-12 2011-09-16 지에스칼텍스 주식회사 분리탑 및 분리탑 구동 제어 방법
US8877001B2 (en) * 2009-05-07 2014-11-04 Applied Materials, Inc. Shuttered gate valve
KR101123299B1 (ko) * 2010-02-04 2012-03-20 (주)엘티엘 진공 차단장치 및 이를 포함하는 영상표시장치 제조설비
TWI448635B (zh) * 2010-04-14 2014-08-11 Wue Shyang Machinery Co Ltd 雙向控制閥
EP2913573A1 (de) * 2014-02-26 2015-09-02 VAT Holding AG Vakuumventil
KR102206551B1 (ko) * 2019-03-25 2021-01-25 주식회사 에이씨엔 기판 처리 장치

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5011382B2 (ja) * 2007-05-08 2012-08-29 東京エレクトロン株式会社 バルブおよび該バルブを備えた処理装置
CN102261516A (zh) * 2010-04-16 2011-11-30 亚威科股份有限公司 阀门、操作阀门的方法、以及真空处理设备
CN106907497A (zh) * 2017-05-09 2017-06-30 凯阀控股集团有限公司 一种陶瓷闸阀
CN107575641A (zh) * 2017-10-10 2018-01-12 深圳市大成精密设备有限公司 一种先导式真空阀门
CN107575641B (zh) * 2017-10-10 2023-12-29 深圳市大成精密设备股份有限公司 一种先导式真空阀门

Also Published As

Publication number Publication date
TW200604457A (en) 2006-02-01
KR20060046137A (ko) 2006-05-17
TWI287075B (en) 2007-09-21
KR100666894B1 (ko) 2007-01-10

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