JP2005300545A - Electrical signal connection device, and probe assembly and prober device using it - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To collectively and simultaneously perform a probing test to a plurality of semiconductor chips on a semiconductor wafer. <P>SOLUTION: The prober device for electrical connection by interposing a vertical probe between a semiconductor chip to be inspected formed on a semiconductor wafer and an inspection apparatus for contacting has a plurality of sets of X-directional units 5 and Y-directional units 6 in which a plurality of ribbon-like resin films 1, 2 having a plurality of vertical probers 3, 4 are arranged side by side. The plurality of X-directional units 5 and Y-directional units 6 are arranged in a lattice on the support substrate for positioning and fixing, and the vertical probes 3, 4 arranged at each intersection position of the X-directional units 5 and the Y-directional units 6 are brought into a batch contact with all pads in the semiconductor chip to be inspected formed on the semiconductor wafer for performing a probing test. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to an electrical signal connection apparatus that can be used for circuit inspection of a plurality of semiconductor chips formed on a semiconductor wafer or circuit inspection of liquid crystal or other electronic devices in a manufacturing process of an electronic device such as an LSI, and the like. The present invention relates to a probe assembly used in the above. The present invention is used, for example, in a so-called probing test in which a vertical probe is brought into contact with a circuit terminal (pad) arranged on a semiconductor chip in a wafer state and the electrical continuity of the semiconductor chip is collectively measured.

  With the advancement of semiconductor technology, the integration degree of electronic devices has been improved, and the area occupied by circuit wiring has also increased in each semiconductor chip formed on a semiconductor wafer. For this reason, the number of circuit terminals (pads) on each semiconductor chip has also increased, and along with this, the pad array has been miniaturized by reducing the pad area and the pad pitch. At the same time, the chip size package system in which a semiconductor chip is mounted on a circuit board or the like as a bare chip without being housed in a package is becoming mainstream. For this purpose, a characteristic check in a wafer state before dividing into semiconductor chips is performed. A pass / fail judgment is absolutely necessary.

  In particular, the problem with the miniaturization (narrow pitch) of the pad arrangement is that it is necessary to obtain electrical continuity by contacting the pads of the semiconductor chip during the electrical characteristic test and circuit inspection of the electronic device. This means that the structure of the probe must be adapted to the miniaturization of the pad array, and various measuring means are used in order to cope with the progress of the miniaturization of the pad array.

  For example, there is a means for interposing a probe assembly in which a plurality of needle-like probes having an elastically deforming portion elastically deforming with respect to an external force are arranged between a pad of a semiconductor chip to be inspected and an inspection apparatus. A printed wiring board called a probe card is used as means for electrically connecting the probe assembly and the test circuit of the semiconductor chip.

  In general, in a probe card, when a needle-like probe having a cantilever structure of a cantilever is adopted, the tip portion of the probe that contacts the pad of the semiconductor chip has a narrow pitch, but the root of the probe card connected to the probe card Since the probe is disposed radially extending from the tip portion, the pitch of the portion can be roughened, and the probe can be fixed to the circuit terminal of the probe card by connection means such as soldering. However, this cantilever structure has a problem that the tip is displaced in the horizontal direction when coming into contact with the pad, and the pad is scratched, or the measurement yield is lowered due to the pad being detached from the pad. However, there is a problem that it is difficult to control a constant contact pressure due to variations in the mounting accuracy of each probe.

  In a vertical probe that replaces this cantilever structure, that is, a vertical probe whose probe is fixed vertically to the circuit terminal of the probe card, the pad pitch on the semiconductor chip is equal to the circuit terminal pitch on the probe card. It is necessary to consist of. However, on the probe card, which is a printed wiring board, there is a limit in manufacturing technology to make the circuit pattern finer, so it is difficult to satisfy the requirements according to the pad pitch for the area occupied by the circuit terminals and the wiring width. Furthermore, since there is a limit to the pitch interval at which soldering is possible, it has been impossible to vertically fix the vertical probe to the probe card in accordance with the pad pitch of the semiconductor chip as miniaturization progresses.

  Thus, on the probe card, the proportion of the planar area occupied by the circuit wiring width in addition to the circuit terminal area is large, which hinders the narrowing of the pitch of the circuit terminals. Therefore, the number of vertical probes is maintained by using a multilayer printed wiring board for the probe card, arranging the circuit terminals in a grid pattern or in a two-row zigzag pattern, and electrically connecting the wiring between the layers via through holes. The means to do is also taken. However, since the space occupied by the through-holes becomes large, the presence of the through-holes is a cause of hindering the narrowing of the circuit terminal arrangement. As described above, when trying to fix the vertical probe to the probe card, in addition to difficulty in narrowing the pitch of the circuit terminals, the soldering work requires high technology and a large number of man-hours, which is expensive. It was. In order to solve these problems, the present inventors have proposed a vertical probe assembly, and have already proposed a prober device as an electric signal connecting device using the vertical probe assembly ( (See Patent Document 1 and Patent Document 2).

  FIG. 56 is a perspective view showing a vertical probe assembly as a conventional example proposed by the present inventors. As shown in the perspective view of FIG. 56, the vertical probe assembly 200 already proposed (see, for example, Patent Document 1) is arranged between two parallel upper and lower rectangular insulating substrates (or insulating films) 201 and 202. In this structure, a plurality of vertical probes 205 are implanted. The two upper and lower insulating substrates 201 and 202 are held by a step provided in the middle of the vertical probe 205 and kept at a constant interval. The pitch arrangement of the vertical probes 205 is arranged on the semiconductor chip to be measured. It matches with the pad pitch arrangement. Each vertical probe 205 slightly protrudes from the insulating substrates 201 and 202 at both upper and lower ends to form an electrical contact terminal 203, and a curved portion 204 is provided in the middle so that the external force applied to the probe in the vertical direction is elastic. At the same time, the deformation of the bending portion 204 becomes a spring restoring force, and this spring restoring force becomes a contact pressure between the tip of the spring force probe and the pad, thereby enabling electrical conduction. The curved portions 204 are provided so as to be shifted in the vertical direction for each column so that the vertical probes 205 that are orthogonally arranged do not contact each other. Each vertical probe 205 has a square cross section and is inserted into a square hole opened at a position opposite to the upper and lower insulating substrates 201 and 202, and has a detent structure that moves up and down but does not rotate. .

  A prober apparatus having such a vertical probe assembly (see, for example, Patent Document 2) is configured as shown in a perspective view of FIG. That is, a semiconductor wafer on which a large number of semiconductor chips to be inspected (not shown) are formed is set on the wafer stage with the chip pads facing downward above the vertical probe assembly 200. On the other hand, a connection structure 206 that contacts the vertical probe of the probe assembly 200 is provided below the vertical probe assembly 200. This connection structure 206 is connected to the probe card 208 via a flexible flat cable 207. The wiring on the connection structure 206 side of the flexible flat cable 207 is wired at the same narrow pitch as that of the chip pad, and the end of the wiring can be collectively contacted with the vertical probe of the vertical probe assembly 200 as a wiring terminal. Further, the wiring on the probe card 208 side of the flexible flat cable 207 is widened so that the wiring pitch interval can be soldered to the circuit wiring terminal on the probe card 208.

  Further, the wafer stage (not shown) and the vertical probe assembly 200 can move in the XYZ-θ direction. Further, the vertical probe assembly 200 does not need to be moved until the wafer inspection is completed after the vertical probe is positioned and brought into contact with the flexible flat cable wiring terminal provided in the connection structure 206. Here, the connection structure 206 fulfills a socket function for connecting to the vertical probe by fixing the wiring terminal surface of the flexible flat cable 207 horizontally upward. The details of the connection structure have already been proposed, and the description thereof is omitted here.

In this state, the wafer stage is moved, one of the semiconductor chips is aligned with the vertical probe assembly, and a plurality of chip pads and the upper contact terminals of the vertical probe assembly are brought into contact with each other. As a result, it is possible to electrically connect the semiconductor chip and the probe card with a narrow pitch, and the function as a prober device has been greatly improved, thereby greatly contributing to the high integration of semiconductor devices.
JP 2002-296297 A Japanese Patent Laid-Open No. 2003-075503

  As described above, the prober apparatus using the vertical probe assembly already proposed by the present inventors is an apparatus capable of measuring even a semiconductor chip with a narrowed pad pitch, for example, 45 μm pitch. . Moreover, since automatic assembly is possible without using soldering when assembling the probes, low-cost mass production is possible, and since all the probes can be brought into contact with the chip pads vertically, they are evenly distributed to all probes. There are significant advantages such as control of contact pressure.

However, this prober apparatus is also an apparatus that sequentially inspects a plurality of semiconductor chips formed on a semiconductor wafer one by one, and it is necessary to move the wafer stage one chip at a time. On the other hand, semiconductor wafers have become larger in diameter (for example, 300 mm in diameter), and the number of semiconductor chips formed on the semiconductor wafer has increased from tens to hundreds, and the density has been increased. Therefore, the time required for the inspection of one semiconductor wafer becomes considerable, and a multi-array vertical probe assembly (in which inspection can be performed simultaneously on all the semiconductor chips on the wafer without moving the wafer stage ( Hereinafter, there is an increasing demand for a prober apparatus equipped with a multi-array vertical probe assembly). However, for example, for a wafer on which 200 chips having 100 pads are formed, for a multi-array vertical probe assembly,
100 × 200 = 20000
Thus, it is difficult to efficiently draw such a number of signal wires from the multi-array vertical probe assembly and connect them to an external inspection apparatus.

  On the other hand, if the multi-array vertical probe assembly is to be used for a burn-in test, it is placed in a high-temperature atmosphere of about 120 ° C., so that thermal expansion that was not a problem when inspecting one chip at a time by the individual array probe assembly As a result, there is a problem that a pitch shift occurs between the pad pitch formed on the silicon wafer and the pitch of the vertical probe planted on an insulating substrate such as a resin film. In particular, as the distance from the periphery of the wafer increases, the pitch deviations of the vertical probes accumulate and become larger, and probing becomes impossible.

In recent years, higher speeds and mass batch processing have been required. For example, there is a need for a probe assembly that can contact all pads on a 12-inch wafer (a wafer with a diameter of 300 mm) at the same time and can handle high frequencies. The following points are important for this speeding up.
(1) To reduce the electric capacity. To do so, reduce the area of the probe facing the entire surface.
(2) To shorten the distance between the test circuit and the pad on the wafer as much as possible.
(3) To reduce noise due to magnetic interference generated from the probe and wiring.
(4) The distance between the opposing contact and wiring is large.

  Also, a large number of wires are required to be connected from the probe assembly to the test circuit. Further, as the pitch is narrowed and the contact and the pad are opposed to each other so as to cover a large area, high arrangement accuracy of the contact is also required.

  For example, the number of contacts of a wafer in which 200 chips are arranged with 600 chips is as large as 120,000 in the pair with the increase in the number of wirings and the reduction in pitch. It is considered that a solution can be obtained by further developing and applying the method based on Japanese Patent Application Laid-Open No. 2003-075503 to this printed wiring board. On the other hand, the pitch drawn by the flat cable is as narrow as 30 μm, but how to deal with the wiring of the test circuit when the contact is narrowed is a problem. If a contact force of 5 g is applied to 120,000 contacts, a force of approximately 600 kg is applied to the entire probe assembly, but problems such as deformation of mechanical parts are likely to occur.

  The present invention has been made to satisfy these requirements, and in examining the characteristics of a circuit such as a semiconductor chip that is increasingly densified as electronic devices are highly integrated, a plurality of chips are used. Provided are an electrical signal connecting device and a probe assembly used therefor, in which a vertical probe assembly has a multi-array structure and solves a thermal expansion problem and a signal wiring problem so that a probing test or a burn-in test can be performed simultaneously. For the purpose.

  The present invention has, as an electrical signal connection device, a vertical probe that performs electrical connection by contacting an electrical connection terminal provided on an electrical functional element to be inspected, and a resin film that supports the vertical probe, The vertical probe is provided on the surface of the resin film so as to be elastically deformable in a direction along the film surface. One end of the vertical probe is brought into contact with a terminal of the electric functional element to be inspected, and An end is brought into contact with a terminal of the electric function inspection device, and signals are transmitted and received between the electric function element to be inspected and the electric function inspection device.

  The present invention also provides an electrical signal tester having a plurality of vertical probes that are brought into contact with a plurality of electrical connection terminals provided on an electrical functional element to be inspected as electrical signal connection devices. A plurality of X-direction units and a plurality of Y-direction units extending in a direction crossing the X-direction units, each having a plurality of ribbon-shaped resin films having a vertical probe, and the plurality of sets of X-direction units and Y The direction unit is arranged and fixed in a grid pattern on the support substrate, and the vertical probe arranged at each crossing position of the X direction unit and the Y direction unit is brought into contact with all terminals of the electric functional element to be inspected. Thus, signals are transmitted and received between the electrical function element to be inspected and the electrical function testing device.

  The present invention also provides a plurality of vertical type probes in a prober apparatus in which a vertical probe is brought into contact with a semiconductor chip to be inspected formed on a semiconductor wafer, and electrical connection is made with the inspection apparatus via the vertical probe. A plurality of X-direction units and Y-direction units each having a plurality of ribbon-like resin films having probes are arranged side by side, and the plurality of sets of X-direction units and Y-direction units are arranged in a grid pattern on a support substrate. Then, the probe is positioned and fixed, and the probing test is performed by bringing the vertical probe arranged at each crossing position of the X direction unit and the Y direction unit into contact with all the pads of the semiconductor chip to be inspected formed on the semiconductor wafer. It is what I did.

  In the present invention, the intersection positions of the plurality of sets of X direction units and Y direction units in which the vertical probes are arranged correspond one-to-one with all of the semiconductor chips to be inspected formed on the semiconductor wafer. In addition, the arrangement of the vertical probes arranged at the crossing positions of the X direction unit and the Y direction unit coincides with the pad arrangement of each semiconductor chip to be inspected. Furthermore, there are many fixing and positioning means for the X direction unit and the Y direction unit depending on the required specifications of the X direction unit and the Y direction unit. A plurality of columns arranged in a matrix on a support substrate are arranged as means for positioning the X direction unit and the Y direction unit in the X, Y, and Z directions.

  In the present invention, a plurality of elastically deformable probe parts and a plurality of electrical conduction means and a plurality of wiring parts having elastic terminals are combined into a film having a plurality of punched holes and cutout holes that are non-electrically conductive materials. It is electrically and physically bonded on the surface of the resin-like resin, and while maintaining the functions of the film-like resin, the probe part, and the wiring part, it is desired to promote the mechanical function and mechanical function of the probe part by synergistic action. A set of vertical probe assemblies characterized in that they are arranged at a position of 1 is a unit in manufacturing. The ribbon-like resin film is composed of an X-direction ribbon-like film and a Y-direction ribbon-like film, and a vertical probe having a curved portion provided on a copper foil laminated resin film and a wiring pattern connected thereto are formed by etching. The ribbon-like resin film is arranged so that the directions of the curved portions of adjacent vertical probes are opposite to each other. Conventionally, the probe and the wiring are processed separately, but in the present invention, in order to obtain an integrated structure, the processing is integrated and the number of assembling steps is reduced. In addition, since the structure is integrated, the probe and the wiring are defined as wiring from the point where the pattern is supported by the square members 8a and 8b and no contact pressure is applied to the pattern.

  In the present invention, the X-direction ribbon-like film is provided so that one end of the vertical probe protrudes from the upper side in the longitudinal direction, the other end hangs down through the curved portion, and reaches the end of the ribbon-like film along the lower side. On the other hand, the wiring is formed to extend, and on the other hand, the first opening opened to be surrounded by the curved portion in the resin film portion and the Y-direction ribbon-shaped film opened at equal intervals along the longitudinal direction A second opening is provided for passing through. The Y-direction ribbon-like film is provided so that one end of the vertical probe protrudes from the upper side in the longitudinal direction, and the other end hangs down through the curved portion and extends to the ribbon-like film end along the lower side. A wiring is formed, and the protruding length of the vertical probe is longer than the protruding length of the X-direction ribbon film, while the resin film portion has an opening that is surrounded by a curved portion. Yes. The structure in which the Y-direction ribbon-like film is passed through the second opening from the right-angle direction is disposed in the lower stage in an arrangement method in which the X-direction unit 105 and the Y-direction unit 106 are simply overlapped. For example, the tip of the X-direction unit becomes long and it becomes difficult to obtain a good vertical probe shape. In the opening 1, the vicinity of the curved portion is designed so that the force due to the contact pressure of the slit probe through which the joint member receiving the contact pressure passes and the vertical probe does not receive a complicated vector force from the resin film and acts as a direct contact force on the curved portion. The cut-out slit holes are combined. The opening in the resin film is not limited to the opening 1 and the opening 2, but the number, shape, arrangement position and the like are appropriately arranged as a means for obtaining the good characteristics of the present invention and enabling a simple production. The

  In the present invention, the X- and Y-direction ribbon-like films may be vertically aligned at the time of inspection by elastic deformation of a resin film narrow portion formed by an opening opened so as to be surrounded by the curved portion and the upper side of the resin film. A vertical probe tip that protrudes from the X- and Y-direction ribbon films when the X-direction unit and the Y-direction unit are arranged in a lattice shape, and absorbs axial displacement of the probe. Further, when the X-direction unit and the Y-direction unit are arranged in a lattice shape, the Y-direction unit is arranged so as to penetrate the X-direction unit.

  In the present invention, the wiring formed on the ribbon film in the X and Y directions is folded upward at the end of the ribbon film, and the leading end protrudes from the upper side of the ribbon film and has a connection pin for external connection. In addition, a plurality of X and Y direction ribbon films constituting the X and Y direction units are arranged in parallel so that the protruding positions of the connection pins are sequentially shifted when forming the unit. Has been. A plurality of connection pins having the same functions of the X and Y direction units are gathered together and connected to an external inspection apparatus.

  Further, in the present invention, the electrical wiring connector is a ribbon-like film having a copper wiring pattern formed on both sides, and the ribbon-like film is coated with an insulating thin film on both sides including the copper wiring pattern. The copper wiring pattern formed on both surfaces of the film is a plurality of common copper wirings formed in parallel along the longitudinal direction on the front surface side, and a plurality of copper wiring patterns formed in a direction orthogonal to the common copper wiring on the back surface side. Copper wiring formed on the front and back surfaces of the ribbon-like film is formed by copper wiring, and arbitrary wiring is electrically connected through a through hole at an orthogonal position, and copper wiring orthogonal to the longitudinal direction is The distal end portion is slightly protruded from the side of the ribbon-like film so as to serve as a connection terminal with the vertical probe in the individual array probe assembly. Further, the copper wiring perpendicular to the longitudinal direction slightly protrudes from both the upper side and the lower side of the ribbon-like film, and the connection terminals that contact the vertical probe in the individual probe assembly are formed on the upper and lower sides. It has a structure.

  Further, in the present invention, when the ribbon-like film is mounted, the copper wiring side surface having the connection terminal is arranged facing the side surface of the pedestal, and the copper having the connection terminal formed on the ribbon-like film. The wiring has a structure in which a plurality of the wires are divided into one group and the plurality of groups are branched from the common copper wiring at an equal pitch. Each group of copper wiring having a structure that can be inserted into a socket connected to an external inspection device, and further having a connection terminal formed on the ribbon-like film, is arranged in a multi-array on a semiconductor wafer. It is arranged corresponding to the chip. Further, two ribbon-like films are overlapped and arranged so that each connection terminal is in two rows and staggered so that it can be adapted to a staggered arrangement of chip pads.

  Further, the prober apparatus of the present invention performs a probing inspection by bringing a vertical probe into contact with the pads of a plurality of semiconductor chips formed on a semiconductor wafer at the same time, and subsequently performs a burn-in inspection as it is. In the burn-in inspection, the thermal expansion of the ribbon-like film is suppressed via the lattice-like positioning member positioned by the support column, and the vertical probe of the individual probe assembly and the connection terminal of the ribbon-like film are By adopting a structure that prevents misalignment and suppresses the extension of the entire multi-array probe assembly, it is possible to measure semiconductor chips formed on the periphery of the semiconductor wafer during burn-in inspection.

  According to the present invention, when inspecting the characteristics of a semiconductor chip that is increasingly densified as electronic devices are highly integrated, a plurality of semiconductor chips formed on one semiconductor wafer are collectively measured. The probing test and burn-in test can be performed at the same time. That is, a plurality of sets of X-direction units and Y-direction units each having a plurality of ribbon-shaped resin films having a plurality of vertical probes arranged side by side are provided, and the plurality of sets of X-direction units and Y-direction units are provided on the support substrate. The vertical probe assembly has a multi-array structure.

  As a result, misalignment due to thermal expansion of the entire multi-array structure can be suppressed, and the vertical probes arranged at the crossing positions of the X-direction unit and the Y-direction unit are arranged on the semiconductor chip to be inspected formed on the semiconductor wafer. Probing tests can be easily performed by bringing all the pads into contact with each other without displacement. Further, it can be used for a burn-in test in which an electrical stress is applied to a circuit at a high temperature to perform an accelerated test of a semiconductor chip. In addition, the use of the ribbon-like resin film simplifies wiring and connecting terminal structures to external devices, thereby providing a prober device that solves thermal expansion problems and signal wiring problems. It was.

  Prior to the description of the embodiment of the present invention, a description will be given of a current system in which a wafer inspection, which is one of electrical function inspections, is performed in connection with a probe card.

  FIG. 58 is a block diagram showing a current system configuration (that is, an example of a conventional example) of an electrical function testing device in the field of the present invention. In FIG. 58, 70 is a dedicated tester. Generally, the dedicated tester 70 currently used in the system is large and expensive. The dedicated tester 70 generates an electrical signal necessary for the inspection of the chip 72 and inputs it to the chip 72 via the probe card 71. A dedicated tester test is executed based on the signal from the chip 72 corresponding to the input signal. The number of signal lines from the dedicated tester 70 to the probe card 71 is around 1100 even when the number of wires input to the chip 72 is around 200, and a plurality of pads can be inspected with around 1100 wires. ing. However, when the number of chips 72 becomes very large, for example, when 300 chips are supported, the number of wirings is 60,000, and signals are distributed to a large number of chips from the wiring around 1100 of the dedicated tester 70. Becomes difficult. Even if wiring is possible, it is not effective to handle a large number of wirings for high-speed inspection. Therefore, the current system shown in FIG. 58 can be applied to the case where the probe corresponds to a limited number of chips simultaneously.

  FIG. 55 is a block diagram showing a system configuration corresponding to multiple wirings and speeding up as a system of the electrical function inspection apparatus according to the present invention. In FIG. 55, reference numeral 73 denotes a general-purpose computer such as a personal computer. 74 is a probe card with a circuit. It is indicated by a broken line. The probe card with circuit 74 includes an interface 75 and a test circuit 76. A plurality of test circuits 76 are provided and activated in response to tests having different purposes. The plurality of test circuits 76 are not limited to the same function. 72 is a chip. Inspection information for each individual wafer is sent from the general-purpose computer to the interface 75. The interface 75 transmits the test contents to the test circuit 76. The test circuit 76 has inspection information corresponding to the chip, and sends a necessary signal to the chip at the time of inspection. The test result information from the chip 72 is received and evaluated, and the information is sent to the general-purpose computer 73 via the interface 75. Further, the test circuit 76 has a one-to-one relationship with the chip, and the wiring from the test circuit 76 having approximately the same number of pads as the chip 72 can be connected to the pads on the chip 72.

(Embodiment 1)
Next, a first embodiment of the prober apparatus of the present invention will be described in detail with reference to the drawings. The first embodiment is an effective system when the current system shown in FIG. 58 is applied. Since the wiring is integrated with the probe, the expensive multi-layer substrate of the conventional probe card is not required. .

  FIG. 1 is a perspective view showing Embodiment 1 of a multi-array vertical probe assembly according to the present invention. The basic configuration of the multi-array vertical probe assembly according to the first embodiment is that the X-direction ribbon film 1 formed by patterning a plurality of vertical probes 3 by etching is etched in a direction perpendicular to the surface. A plurality of X direction units 5 arranged in parallel to each other, and similarly to the X direction unit 5, the Y direction ribbon film 2 formed by patterning a plurality of vertical probes 4 in the longitudinal direction by etching, Is configured by combining a plurality of Y-direction units 6 arranged in a vertical direction in a lattice pattern.

  Each of the X-direction ribbon-like film 1 and the Y-direction ribbon-like film 2 is composed of a ribbon-like or strip-like insulating film in which conductive foils such as copper are laminated. In the first embodiment, the X-direction ribbon film 1 and the Y-direction ribbon film 2 basically have the same structure.

  X-direction ribbon-shaped film 1 The vertical probe 3 has a curved portion 31 formed in a U-shape in the longitudinal direction in the plane of the X-direction ribbon-shaped film 1 and outward in a substantially right-angle direction at the opening end of the curved portion 31. The upper support leg 32 and the lower support part 33 that extend, and the contact 34 provided at the tip of the upper support leg 32 are provided.

  The vertical probe 4 of the Y-direction ribbon-like film 2 includes a curved portion 35 formed in a U-shape in the longitudinal direction within the plane of the Y-direction ribbon-like film 2, and a substantially perpendicular direction at the opening end of the curved portion 35. The upper support leg 36 and the lower support part 37 extend outward, and the contact point 38 is provided at the tip of the upper support leg 36.

  The X-direction unit 5 and the Y-direction unit 6 are arranged in a vertical relationship such that the X-direction unit 5 is on the top and the Y-direction unit 6 is on the bottom, and are arranged so as to intersect each other when viewed from above. Has been. In such an arrangement, since the contact 34 of the X direction unit 5 and the contact 38 of the Y direction unit 6 are at the same height, the length of the upper support leg 36 of the vertical probe 3 is the upper side of the vertical probe 4. It is set longer than the length of the support leg 32. The difference in length between the upper support leg 36 and the upper support leg 32 is equal to the step size between the X direction unit 5 and the Y direction unit 6.

  In this basic configuration, an area 100 (rectangular area surrounded by a one-dot chain line in FIG. 1) where the X direction unit 5 and the Y direction unit 6 intersect represents a section occupied by one semiconductor chip. A plurality of semiconductor chips can be continuously arranged in the X direction and the Y direction when viewed from the area 100 as a center. The pieces can be arranged in succession. The arrangement of the contacts 34 and 38 of the vertical probes 3 and 4 in the area 100 corresponds to a chip pad which is a terminal on one semiconductor chip. An embodiment of the prober apparatus of the present invention will be described below based on this basic configuration. The copper foil constituting the ribbon-like films 1 and 2 is made of a highly conductive material such as gold foil, silver foil, beryllium copper, or amorphous metal. A synthetic resin such as vinyl chloride resin is used.

  In the first embodiment, wirings (or signal lines) 39 and 40 for taking out signals inputted from the contacts 34 and 38 extend from the lower support portions 33 and 37 of the vertical probes 3 and 4. Yes. These wirings are also formed by etching in the same manner as the vertical probes 3 and 4. On the surface of the ribbon-like films 1 and 2, the wirings 39 and 40 once extend downward from the lower support portions 33 and 37 of the vertical probes 3 and 4, near the lower edge of each ribbon-like film 1 and 2. It bends in a substantially right-angle direction (towards the longitudinal direction of each ribbon-like film 1, 2), extends along each ribbon-like film 1, 2, and goes to the output terminal. By adopting such a configuration, the wiring for output of the plurality of vertical probes 3 and 4 can be arranged together near the lower edge of each ribbon-like film 1 and 2 and can be extended to the output terminal. Therefore, the configuration of the multi-array vertical probe assembly can be simplified.

  Next, the structure of the X direction ribbon film 1 and the Y direction ribbon film 2 will be described with reference to the front view of FIG. FIG. 5 is originally used for explaining the Y-direction ribbon-like film 2 in Embodiment 2 (described later) of the present invention. Since it is almost the same as the configuration of the Y-direction ribbon-like film 2 except for some differences, it is used for the same explanation.

  In the X direction ribbon film 1, an opening 10 is provided at a portion where the pair of vertical probes 3 face each other. As shown in FIG. 5, the opening 10 is a substantially T-shaped opening opened at the boundary between adjacent units a (for example, a-1 and a-2), and faces the vertical probe 3. The inner portion of the bending portion 31 is opened so as to be cut out. For this reason, the force in the arrow S1 direction applied to the contact 34 of the vertical probe 3 causes the curved portion of the vertical probe 3 without receiving a force in a complicated direction from the resin film by providing the opening 10. It acts on the whole 31 and elastically deforms the vertical probe 3. That is, when viewed from the other side, the X-direction ribbon-like film 1 has a belt-like basic shape as a whole. It does not deform with respect to the applied external force (whether in the longitudinal direction or the width direction of the band).

  However, in the first embodiment, the vertical probe 3 is provided on the surface of the X-direction ribbon-like film 1 and the opening 10 is provided by hollowing out the inner portion of the curved portion 31 of the vertical probe 3. The X-direction ribbon-like film 1 can be deformed in the surface direction (the width direction of the surface) at the curved portion 31 of the vertical probe 3. Note that the X-direction ribbon-like film 1 is basically not deformed in the surface direction at portions other than the curved portion 31 of the vertical probe 3. In addition, the film material of the X direction ribbon-like film 1 is continuously connected to the upper side of the opening 10. The same can be said about the structure of the Y-direction ribbon-like film 2. With the above configuration, the probe assembly is configured to perform a signal detection operation in the prober device.

(Embodiment 2)
FIG. 2 is a partial perspective view for explaining the structure of the prober apparatus according to the second embodiment of the present invention. In the second embodiment of the present invention, the contact point of the contact pressure and the support that receives the contact pressure are present at the end position of the bending portion regardless of the number of multi-arrays and the number of wires, and the probe has good spring characteristics. It can be obtained. In addition, the wiring part exists behind the support part and is not easily affected by the elastic characteristics of the probe, so that a sufficient space for electric wiring can be secured and a wiring pattern shape with sufficient consideration for electric characteristics can be obtained. Have Further, the prober apparatus using the multi-array vertical probe assembly of the second embodiment does not have a configuration in which individual probe assemblies are arranged in a matrix form as in the prior art, but a copper foil is laminated as shown in FIG. On the ribbon-like insulating film, a plurality of vertical probes 3 having curved portions are formed by etching, and the ribbon-like film thus formed is used as an X-direction ribbon-like film 1. Similarly, a plurality of vertical probes 4 are formed on the ribbon-like film, and this patterned ribbon-like film is defined as a Y-direction ribbon-like film 2. The X and Y direction ribbon-like films 1 and 2 have a plurality of probes and wirings on one plane, and the positional relationship to be arranged on the same plane is ensured by forming each pattern. Further, the arrangement of the contact points of the vertical probes 3 and 4 is arranged so that the directions of the curved portions of adjacent vertical probes are opposite to each other so as to correspond to the chip pad on one chip. By arranging in the reverse direction, the vertical probes 3 and 4 corresponding to the present chip correspond to the projected surface corresponding to one chip of the wafer.

  A plurality of X direction ribbon films 1 are arranged side by side to form an X direction unit 5, and a plurality of Y direction ribbon films 2 are arranged side by side to form a Y direction unit 6, and the X direction unit 5 and the Y direction unit are arranged. 6 is configured in a lattice form to constitute a multi-array vertical probe assembly, and this assembly is fixed onto a plurality of support columns 8 planted on a support substrate (not shown). Is configured.

  In the prior art, one individual probe assembly corresponds to one chip on the wafer. However, in the present invention, the vertical probes 3 and 4 are arranged at each crossing position when the X and Y direction units are combined. Corresponds to a pad pitch of one chip. When the X and Y direction units 5 and 6 are combined, the thickness of the resin film is adjusted in advance or adjusted via a spacer so that the pitch of the vertical probes 3 and 4 matches the pad pitch of the semiconductor chip. Or accurate positioning is performed by the convex projection indexes 8c and 8d on the outer periphery of the square members 8a and 8b. A method of positioning a plurality of indexes 8c and 8d according to the present invention will be described separately.

  Next, each component of the multi-array vertical probe assembly will be described in detail. FIG. 3 is a perspective view of the X-direction ribbon film 1 on which the vertical probe 3 is patterned. FIG. 4 is a partially enlarged front view of the X-direction ribbon film 1. First, a belt-like film made of polyimide resin or other non-conductive film laminated with a conductive material such as a beryllium copper foil is prepared, and an X-direction ribbon-like film 1 is formed by patterning the vertical probe 3 by etching. . The vertical probe 3 includes a curved portion 31 that is U-shaped in the longitudinal direction in the plane of the X-direction ribbon-like film 1 and an upper support leg 32 that extends outward in a substantially perpendicular direction at the opening end portion of the curved portion 31. And a lower support reject 33 and a contact 34 provided at the tip of the upper support leg 32. In the X direction ribbon film 1, two vertical probes 3 arranged with the curved portions 31 facing each other in the back direction are regarded as one unit a, and a plurality of units a are arranged in the longitudinal direction of the X direction ribbon film 1 as a. Patterning is performed as -1, a-2, a-3, and so on. The number of units a is determined according to the number of chips formed on the wafer. At this time, the tip of the upper support leg 32 of the vertical probe 3 (the portion where the contact 34 is provided) protrudes from the edge of the upper long side of the X-direction ribbon film 1 by a length L1. Remove the long side. Since the contact 34 of the vertical probe 3 serves as a probe that comes into contact with the chip pad of the semiconductor chip during probe inspection, the tip is formed in an edge shape.

  Further, the X direction ribbon film 1 is provided with a plurality of first openings 9. The first opening 9 is a rectangular hole provided below the vertical probe 3 corresponding to each unit a, and is a hole through which the Y-direction unit 6 passes as shown in FIG. The X-direction ribbon film 1 is provided with a plurality of second openings 10. As shown in FIG. 4 (an enlarged front view of part A in FIG. 3), the opening 10 is substantially T-shaped and opened at the boundary between adjacent units a (for example, a-1 and a-2). And is opened in such a manner that the inner part of the curved portion 31 facing the vertical probe 3 is cut out. For this reason, the force in the arrow S1 direction applied to the contact 34 of the vertical probe 3 causes the curved portion of the vertical probe 3 without receiving a force in a complicated direction from the resin film by providing the opening 10. It acts on the whole 31 and elastically deforms the vertical probe 3. That is, when viewed from the other side, the X-direction ribbon-like film 1 has a belt-like basic shape as a whole. It does not deform with respect to the applied external force (whether in the longitudinal direction or the width direction of the band). However, in the present invention, the vertical probe 3 is provided on the surface of the X-direction ribbon film 1 and the opening 10 is provided by hollowing out the inner portion of the curved portion 31 of the vertical probe 3. The X-direction ribbon-like film 1 can be deformed in the surface direction (the width direction of the surface) at the curved portion 31 of the mold probe 3. Note that the X-direction ribbon-like film does not deform in the surface direction at portions other than the curved portion 31 of the vertical probe 3. The vertical probe 3 is deformed (indicated by a dotted line) by the contact pressure (arrow S... 1) applied to the contact 34 portion during inspection, and a restoring force is generated by this deformation, and the restoring force is applied to the chip pad on the wafer. It acts as a contact force that enables electrical conduction with the contact 34 of the vertical probe 3. In addition, the X-direction ribbon-like film 1 itself is arranged linearly in the longitudinal direction on the surface rather than contributing to the promotion of mechanical characteristics such as causing the contact pressure of the vertical probe 3. It has a function as means for accurately maintaining the positional relationship of the vertical probe 3. Further, it plays an important role as means for determining the position of the vertical probe 3 in the surface direction of the film when the X-direction unit 5 is configured by arranging a plurality of X-direction ribbon-like films 1. It also has a function as an insulating means between adjacent probes or adjacent wirings.

  Further, as shown in FIG. 4, a wiring pattern 39 is formed on the X direction ribbon film 1 simultaneously with the formation of the vertical probe 3. Two wiring patterns 39 from each unit a, more specifically, one from each of the two vertical probes 3 included in one unit, pass through the height range of the opening 9 from the vertical probe 3. The X direction ribbon film 1 is bent in a right angle at the lower end of the X direction ribbon film 1 and oriented in the horizontal direction. It extends in the longitudinal direction. Moreover, the square hole 10a near the center of the opening 10 is a hole through which a positioning square is passed when the X-direction ribbon-like film 1 is juxtaposed as will be described later.

  Next, the Y-direction ribbon film 2 will be described with reference to the front view of FIG. The Y-direction ribbon-like film 2 has a different structure from the above-described X-direction ribbon-like film 1. That is, when the X-direction ribbon-like film 1 and the Y-direction ribbon-like film 2 are crossed and assembled in a lattice shape, the height positions of the contacts provided at the tips of the vertical probes 3 and 4 are aligned. It is. First, the width of the ribbon-shaped film 2 is narrower than that of the ribbon-shaped film 1 because no rectangular opening is required. Further, after assembly, the bending portion 35 is lowered by a certain distance so that the bending portion 35 of the vertical probe 4 of the Y-direction ribbon-like film 2 does not interfere with the bending portion 31 of the vertical probe 3 of the X-direction ribbon-like film 1. Forming. Therefore, the long side part of the ribbon-like film 2 is removed so that the contact point 38 protrudes from the upper long side of the Y-direction ribbon-like film 2 by a length L2 (> L1).

  Further, like the X-direction ribbon film 1, two wiring patterns 43 are formed along the lower long side of the ribbon film 2, two from each unit a, simultaneously with the formation of the vertical probe 4. The Y-direction ribbon film 2 is formed by forming a plurality of the units a. The cross-shaped opening 10 formed between the adjacent units a is formed in the same shape as the ribbon-shaped film 1 and has an effect of absorbing the deflection of the vertical probe 4. In any case, the width dimension h of the ribbon-shaped film 2 including the tip 42 of the vertical probe 4 needs to be smaller than the hole dimension H of the opening 9 of the ribbon-shaped film 1. In addition, the square hole 10 a is opened near the center of the opening 10 as in the X direction ribbon film 1.

  Next, a structure in which the above-described X and Y direction units 5 and 6 are assembled on a support substrate to form a multi-array vertical probe assembly will be described. FIG. 6 is an exploded perspective view illustrating an assembled state of the Y-direction unit 6 in which a plurality of Y-direction ribbon films 2 are arranged side by side. In order to prevent the Y-direction ribbon-like film 2 from being separated (that is, aligned) when a plurality of Y-direction ribbon-like films 2 are arranged side by side, From a right angle direction, a square member 8b having a U-shaped cross section shown in FIG. Further, the vertical probe 4 is formed with a projection 44 in advance, and is slidable with the square member 8b, and is fitted by the tip of the projection 44 abutting against the side surface of the square member 8b. The direction ribbon-like film 2 is aligned in the longitudinal direction. A plurality of protrusions 47 are provided on the side surface of the square member 8b at a predetermined interval. These protrusions 47 are for determining the arrangement interval of the plurality of Y-direction ribbon films 2 constituting the Y-direction unit 6. The pitch of the contacts 38 in the X direction is determined by arranging several (or even one) Y-direction ribbon-like film 2 between the protrusion 47 and the next protrusion 47 at equal intervals. be able to. Further, at a position below the protrusion 47 on the side surface of the square member 8b, there is provided a shelf 49 that extends outward from the protruding surface of the protrusion 47 and extends in the longitudinal direction of the square member 8b. The shelf 49 engages with the protrusion 44 formed on the vertical probe 4 of the Y-direction ribbon-like film 2 when the square member 8b is inserted into the opening 10a of the Y-direction ribbon-like film 2, and is It plays a role of supporting the mold probe 4 from below.

  Similarly, in order to prevent the ribbon-like film 1 from falling apart (that is, to align) with respect to the X-direction unit 5, as shown in FIG. A square member 8a having a U-shaped cross section is inserted through the square hole 10a of the opening 10 and held therein. Further, as shown in FIG. 4, the vertical probe 3 is formed with a projection 42 in advance, and is slidable with the square member 8a. In combination, the longitudinal direction of each X direction ribbon-like film 1 is positioned. In this way, the X and Y direction units 5 and 6 are each formed as an elongated block. The support members 8a and 8b are made of a non-conductive material or a material whose surface is subjected to an insulation treatment. A plurality of protrusions 46 are provided on the side surface of the square member 8a at a predetermined interval. These protrusions 46 are for determining the arrangement interval of the plurality of X-direction ribbon films 1 constituting the X-direction unit 5. And the pitch of the contact 34 in the Y direction is determined by arranging several (or even one) X-direction ribbon film 1 at regular intervals between the protrusion 46 and the next protrusion 46. be able to. In addition, a shelf 48 that extends outward from the protruding surface of the protrusion 46 and extends in the longitudinal direction of the square member 8a is provided at a position below the protrusion 46 on the side surface of the square member 8a. The shelf 48 engages with the protrusion 42 formed on the vertical probe 3 of the X-direction ribbon-like film 1 when the square member 8a is inserted through the opening 10a of the X-direction ribbon-like film 1, and the vertical portion 8 It plays a role of supporting the mold probe 3 from below.

  Next, the structure of the multi-array vertical probe assembly for assembling the X and Y direction units on the support substrate will be described. FIG. 8 is a partial perspective view showing a mounting base 13 (actually, only a frame part in the middle of manufacture) is shown as a support base for the multi-array vertical probe assembly. As shown in this figure, the mounting base 13 on which the X and Y direction units 5 and 6 are placed is a support substrate (not shown. This is a substrate laid under the support column 8) and the support substrate. It is composed of a plurality of upright columns 8 that stand upright. One support column 8 is erected at each of the four corners of the intersection area 100 between the X-direction unit 5 and the Y-direction unit 6. And the Y-direction unit 6 are also arranged so as to be supported. 9 and 10, the support column 8 is made of a member having a rectangular section with a predetermined dimensional angle, and its upper end portion is directed downward from the upper end surface as shown in detail in FIG. The first groove 51 and the second groove 52 are formed by cutting and orthogonal to each other. The first groove 51 is a groove cut relatively shallowly, and the second groove 52 is a groove cut deeper than the first groove 51. As for the 1st groove | channel 51, the support | pillar 8 is standingly arranged at predetermined intervals so that itself may extend in a Y direction. Then, the square member 8a is fitted in the first groove 51 (see FIGS. 8 and 9). In addition, the pillars 8 are erected at a predetermined interval so that the second groove 52 itself extends in the X direction. And the square member 8b is installed in the 2nd groove | channel 52 (refer FIG.8 and FIG.9). The support substrate and support column 8 are made of a non-conductive material or a surface-insulated material, like the above-described square members 8a and 8b. In particular, the support substrate is made of silicon so that it can be used for burn-in tests. Alternatively, it is preferable to use a material having a thermal expansion coefficient close to that of silicon.

  A plurality of support columns 8 are erected in a matrix on the support substrate so that the pitch in the X direction is p1 and the pitch in the Y direction is p2.

  Up to this point, the structure of each block constituting the multi-array vertical probe assembly has been described. Next, the procedure for assembling these blocks will be described.

  First, an example of the dimensions of each component is shown so as to be a guide for the size of the entire multi-array vertical probe assembly. The ribbon-like films 1 and 2 as described above are formed by, for example, laminating beryllium copper having a thickness of 20 to 30 μm on a polyimide film having a thickness of about 12 μm, and forming vertical probes 3 and 4 and wirings 39 and 43 on the film. Patterned. Now, assuming that 10 mm square semiconductor chips are arranged in the XY direction on the wafer to be inspected, the widths of the X and Y direction units 5 and 6 in which the ribbon-like films 1 and 2 are juxtaposed are as follows. It can be seen that each can be up to about 9 mm. Further, the X-direction ribbon-like film 1 corresponding to a 10 mm pitch has a longitudinal direction for passing wiring in the longitudinal direction of the X-direction ribbon-like film 1 when the support column 8 is a 0.6 mm square (shown in FIG. 10). If the width (interval between wirings) is 0.2 mm, the width of the opening 9 can be up to 9 mm. If the thickness of the X-direction ribbon-like film 1 is 40 μm, 225 Y-direction ribbons can be juxtaposed within 9 mm and passed through the opening 9 for calculation. However, the number of pads is actually determined according to the number of pads in one row on one chip.

  In addition, the mounting table 13 shown in FIG. 8 has a support substrate that is substantially the same size as the wafer to be measured, and is provided with four support columns 8 according to the number of chips so as to form one chip region. As an example, the pitch is p1 = p2 = 10 mm, and the height of the support 8 is high enough that the lower side of the X-direction ribbon film 1 does not contact the support substrate when the X and Y direction units 5 and 6 are mounted. Say it.

  First, a plurality of sets of X direction units 5 assembled by sequentially inserting square members 8a into a plurality of square holes 10a of the X direction ribbon film 1 in advance are arranged in parallel at the same pitch. The part is fitted in the first groove 51 of the two support columns 8 standing upright in the Y direction, and is mounted between the two support columns 8. Next, the Y-direction ribbon film 2 is inserted through the opening 9 of each film 1 of the X-direction unit 5 at right angles from the Y direction. The Y-direction ribbon film 2 may be inserted one by one, or the number corresponding to one unit may be inserted all at once. When the insertion of the ribbon-shaped film 2 is finished, the rectangular member 8b is sequentially inserted into the rectangular holes 10a of the ribbon-shaped film 2. The square member 8 b is fitted between the two struts 8 by fitting both ends into the second grooves 52 of the two struts 8 erected with an interval in the X direction. In the support column 8, since the second groove 52 is cut deeper than the first groove 51, the installation height of the square member 8b is set to a position lower than the installation height of the square member 8a. . Thereby, a level | step difference is made between the X direction unit 5 and the Y direction unit 6 (refer FIG.8 and FIG.9). In this way, a block in which the X and Y direction units 5 and 6 are combined in a lattice shape is completed.

  Here, a method for accurately positioning the tip of the probe at the target position even when the laminated Y-direction ribbon film 2 varies in the lamination thickness direction will be described with reference to FIGS. 6 and 7. When assembling the Y-direction unit 6 in FIG. 6, the Y-direction ribbon film 2 is installed through the opening 9 of the X-direction ribbon film 1, and the square member 8 b is inserted into the opening 10 a of the Y-direction ribbon film 2. To do. When the square member 8b has a projection 47 and the width of the opening 10a is small, the projection 47 acts as a stopper for the insertion operation between the Y-direction ribbon film 2 and the square member 8b. The stop position is reached. The positions of the protrusions 47 correspond to the positions where the probe contacts 38 are to be positioned, and the presence of a plurality of protrusions 47 on the square member 8b results in an accumulation resulting from the thickness variation of the Y-direction ribbon film 2. By correcting the position shift (position shift in the juxtaposed direction) within the pitch range of the protrusion 47, a large position shift can be prevented, and the tip of the probe and the pad on the wafer can be correctly opposed.

  In addition to the above-described misalignment prevention, since the shelf 49 extending in the longitudinal direction of the square member 8b is provided, when the square member 8b is inserted through the opening 10a of the Y-direction ribbon film 2, Y It engages with a protrusion 44 formed on the vertical probe 4 of the directional ribbon film 2 and plays a role of supporting the vertical probe 4 from below. Further, the front ends of the protrusions 44 are brought into contact with the side surfaces of the square member 8b so that the Y-direction ribbon film 2 is aligned in the longitudinal direction. The action of the tip of the projection 44 abutting against the side surface of the square member 8b is not only the alignment in the longitudinal direction, but also the displacement of the vertical probe 4 due to the thermal expansion of the Y-direction ribbon film 2 during the burn-in test. It also has the effect of preventing.

  The same applies to the X-direction ribbon film 1 and the X-direction unit 5 constituted thereby.

  Next, a block in which the X and Y direction units 5 and 6 are combined in a lattice shape is placed on a support substrate. Thus, the X and Y direction units and the support substrate are fixed, and a multi-array vertical probe assembly is completed. In addition, since the vertical positioning of the X and Y direction units 5 and 6 is performed by the first groove 51 and the second groove 52 formed in the support column 8, the tip portions 32 and 42 of the vertical probes 3 and 4 are arranged. The tip height can be aligned.

  According to the second embodiment, since the X and Y direction units are fixed in a grid pattern on the support column, even if the ribbon film is stretched due to a temperature difference or the like, it is absorbed in the unit corresponding to one chip. As a result, the overall elongation can be suppressed without affecting adjacent units. As a result, the pitch deviation between the chip pad and the vertical probe is eliminated, and the characteristic measurement using the multi-array vertical probe assembly becomes possible.

  FIG. 11 is a diagram showing a wiring structure at the film ends of the wirings 39 and 43 formed on the X- and Y-direction ribbon-like film 2. In the wiring structure shown in FIG. 11, the terminals 61a, 61b, 61c, 61d, 61e, 61f on the printed circuit board 61 and the terminals of the Y-direction ribbon-like film 2 can be arranged at a very small interval. On the other hand, since the terminal spacing on the printed circuit board 61 is large, the Y-direction ribbon-shaped film 2 corresponds to the terminals 61a, 61b, 61c, 61d, 61e, 61f of the printed circuit board 61 on a one-to-one basis. This is to avoid having to make many kinds. In this case, the spring deformed terminal that does not require electrical conduction is subjected to insulation treatment. Further, the wiring structure of the present invention provides means for conducting contact between the terminals on the printed circuit board 61 and the terminals of the Y-direction ribbon film 2 without soldering. The wiring 43a has a plurality of terminals 43b (three in the example of FIG. 11) capable of spring deformation, and the wiring 43c also has a plurality of terminals 43d capable of spring deformation. Even if the distance between the terminals 61a, 61b, 61c, 61d, 61e, and 61f on the printed circuit board 61 is rough, a plurality of terminals 43b to 43d of the Y direction ribbon film 2 arranged at a fine pitch are elastic. Electrical conduction is provided by the terminals. Moreover, since it is an elastic terminal, the elastic terminal and the terminal on the printed circuit board are brought into contact with each other with a substantially uniform contact pressure by pressing (not shown) the Y-direction ribbon film from above.

(Embodiment 3)
Next, a third embodiment of the present invention will be described in detail with reference to the drawings. FIG. 12 is a front view showing an example of a ribbon-like film according to Embodiment 3 of the present invention. Embodiment 3 of the present invention takes into consideration that the configuration of the X direction ribbon film or the Y direction ribbon film is greatly simplified. That is, in the third embodiment, the first connecting member 67a that cuts the film material of the ribbon-like film 65 to the limit and connects the vertical probe pair 66 constituted by a pair of opposing vertical probes 66a and 66b. And a second connecting member 67b that holds another vertical probe 66c located behind one vertical probe (for example, 66a) and a wiring 68 that extends downward from the vertical probes 66a, 66b, and 66c. The The wiring 68 is bent at a predetermined position below the vertical probes 66a, 66b, 66c to form an opening 69, and has the same overall configuration as the X-direction ribbon film 1 in the second embodiment. Yes.

  By adopting such a configuration, a prober device having a simpler configuration can be realized.

  As described above, according to the present invention, since the X and Y direction units are arranged and positioned in a lattice shape and fixed as a whole, even if elongation occurs in the ribbon-like film due to a temperature difference or the like, the entire elongation is achieved. Can be suppressed. As a result, the pitch deviation between the chip pad and the vertical probe is eliminated, and the characteristic measurement using the multi-array vertical probe assembly becomes possible.

(Embodiment 4)
Next, a fourth embodiment of the present invention will be described in detail with reference to the drawings. FIG. 13 is a perspective view of a device under test according to the fourth embodiment of the present invention, and FIG. 14 is a side view of the probe according to the fourth embodiment. 13 and 14, the prober device is a case where the element of the probe 101 is composed of one electrical conducting portion 102 and one film portion 103. By arranging the elements of the probe 101 in various directions, it is possible to deal with one or a plurality of lines of pads for one chip as in a memory relationship. In other words, by arranging a plurality of probes 101 at a suitable pitch laterally toward the paper surface, and further arranging a plurality of layers in the depth direction toward the paper surface, it is possible to cope with the arrangement of pads of a plurality of lines. The probe referred to here is a contact that provides a contact force with an electrical deformation accompanied by elastic deformation, and is not limited to a probe that is generally used only for a prober for LSI circuit inspection. Similarly, a prober device indicates a device for making electrical contact. same as below.

  In FIG. 13, reference numeral 600 indicates a wafer. Reference numeral 601 denotes a chip arranged in the wafer, and reference numeral 602 denotes a pad arranged in the chip. The contact 1 described below is particularly effective when applied to an inspection in the case where there are pads 602 arranged in a line in one chip 601. The probe 101 of the present invention is effective when not only inspection of a semiconductor wafer but also inspection of a liquid crystal or the like requires similar arrangement inspection.

  FIG. 14 shows an arrangement relationship of components related to the electrical conduction unit 102 and the film unit 103. The electrically conductive portion 102 is made of a conductive material, and includes an input portion 501, a deforming portion 502, a fixing portion 503, and an output deforming portion 504 that are in contact with the electrode pads of the chip under test. Although the contour of the deforming portion 502 includes an arc, a large amount of deformation can be obtained by the presence of the arc portion away from the input portion 501 and the fixed portion 503. When the round bar 104 whose surface is insulated is inserted into the arc portion of the fixing portion 504 and the pad 602 contacts the input portion 501, the fixing portion 503 is fixed. Therefore, the deforming portion 502 is deformed and restored. The force becomes a contact force between the pad 602 and the input unit 501.

The electrical conduction unit 102 according to the present invention is characterized by the fixing unit 502 and the output deformation unit 504. A round bar 104 is inserted into the fixing portion 503, and the fixed plate 105 supports the inserted round bar 104. A wiring assembly 106 is affixed to the fixed plate 105, and one end of a line extending perpendicularly to the wiring terminal 106 contacts the output portion 505 to be electrically connected. The output deforming portion 504 also includes an arc, and deforms when it comes into contact with the wiring terminal, and a contact force is generated by the restoring force of the output deforming portion.

  A stable electrical connection can be achieved by contacting the wiring terminal 106 and the output portion 505 in a state where the output deforming portion 504 is deformed by an appropriate amount. In the fourth embodiment of the present invention, the output deformation portion 504 has a structure including an arc. However, the shape of the means for generating elastic deformation is not limited to the arc portion.

  The auxiliary pattern 107 is intended to facilitate the press-fitting insertion of the round bar 104 and enhance the fixing effect of the fixing portion 503 since a symmetrical force acts.

  An electrically conductive portion 102 and an auxiliary pattern 107 are attached to the surface of the film portion 103. Each hole 510 is formed inside the deformation portion 502 so as not to hinder the deformation operation of the deformation portion 502 in the electrically conductive portion 102. Since the hole 510 is formed in the film portion 103, wrinkles and the like generated in the film portion 103 are reduced when the deformation portion 502 is deformed. In addition, a hole 108 having a diameter approximately equal to the diameter of the round bar 104 is formed at the insertion position of the round bar 104 in the fixing portion 503.

  In the course of LSI circuit inspection, the pad 602 moves downward toward the paper surface and moves until an appropriate contact force acts between the pad 602 and the input unit 501. At the same time, the input unit 501 also moves downward. At this time, the deforming portion 502 is deformed. When the contact force is applied and the restoring force of the deforming portion 502 is acting, a force that pushes down the round bar 104 from the fixed portion 503 acts on the upper part of the round bar 104. Since the lower end of the round bar 104 is in contact with the fixed plate 105, the vertical length of the fixed plate 105 is such that the deflection is negligible even when subjected to contact force, and the round bar 104 does not bend. . Further, when a contact force is applied, a force vector acting in the right direction due to the contact force is present on the fixed portion 503, but no particular problem occurs because the electrical conduction portion 102 is attached to the film portion 103.

  Therefore, as described above, the pad 602 and the input unit 501 come into contact with each other with a contact force in a state in which the fixing unit 503 is fixed, so that the pad 602 and the wiring terminal 106 can have good electrical continuity.

(Embodiment 5)
Next, a fifth embodiment of the present invention will be described in detail with reference to the drawings. FIG. 15 is a perspective view of a device under test according to the fifth embodiment of the present invention, and FIG. 16 is a side view of the probe according to the fifth embodiment. In the fifth embodiment, the element of the basic vertical probe 101 is composed of two electrical conducting portions 102 and one film portion 103. By arranging the elements of the probe 101 in various directions, it is possible to deal with a chip 601 in which pads 702 are arranged in a rectangular shape, such as two adjacent rows, two opposite rows, an ASIC, or a logic board.

  FIG. 16 shows a structure when two probe parts are arranged facing each other. The left probe portion is arranged in a state where the auxiliary pattern 107 described in the fourth embodiment is replaced, and the two input portions 501 and 501 are opposed to the left and right pads 602 of two adjacent chips. .

  By arranging the elements of the probe 101 in various directions, it is possible to correspond to one or a plurality of lines of pads for one chip as in a memory relationship. That is, by arranging a plurality of probes 101 stacked at an appropriate pitch laterally toward the paper surface and further arranging a plurality of layers in the depth direction toward the paper surface, it is possible to cope with the arrangement of pads of a plurality of lines. Further, by arranging substantially the same arrangement orthogonally to face the remaining two sides of the rectangular array of pads, the chip 601 arranged in a rectangular shape is opposed to the pad 602 such as the ASIC or the lodge. It can respond to.

  Wiring terminals 106 are provided on both sides of the fixing plate 105 to enable electrical connection between the two probes 101.

  Functions of the input unit 501, the deforming unit 502, the fixing unit 503, the output deforming unit 504, and the output unit 505 of the electrical conduction unit 102 in the fifth embodiment are substantially the same as those in the fourth embodiment.

  Accordingly, the two wiring terminals 106 existing between the arrangement of the fifth embodiment and the fixing plate 105 correspond to the adjacent chips 601 and are an effective arrangement for enabling electrical conduction of the rectangular arrangement type pad arrangement. .

(Embodiment 6)
Next, a sixth embodiment of the present invention will be described in detail with reference to the drawings. 17 is a front view of the probe 603 according to the sixth embodiment, FIG. 18 is a side view of the probe 603, FIG. 19 is a front view of the ground line pattern 604, and FIG. 20 is a front view of the film 605. The sixth embodiment is for coping with high speed. As in the fourth embodiment, the corresponding chip is arranged in a chip arrangement having one or a plurality of lines of pads for one chip like a memory by arranging the elements of the probe 603 in various directions. Yes. Further, the wiring terminal and the fixing plate in the sixth embodiment can be applied on the basis of the principle and function substantially the same as those of the wiring terminal 106 and the fixing plate 105 described in the fourth embodiment. The description in is omitted.

  In general, if a material shape having a rectangular cross section with a large second moment of inertia is used to try to secure a contact force, the width of the material (dimension in the vertical direction of the paper surface) increases. This is because when the contacts are stacked in a number of thickness directions (perpendicular to the paper surface), the electric capacity increases and the speed increases. On the other hand, the contact requires an appropriate contact force. In this embodiment, the contact force is obtained while reducing the material width of the electrical conduction portion, and the ground line pattern 604 related to the force is involved, and the electrical conduction portion 606 corresponds to the electrical conduction. Is the method. Note that the film 605 is interposed between the electrically conductive portion 606 and the ground line pattern 604, and the two members electrically conductive portion 606 and the ground line pattern 604 are mechanically coupled to each other at the portion K where the force shown in FIG. Insulating state is enabled.

  In FIG. 17, the electric conduction part 606 is drawn by a solid line. In this electrical conduction unit 606, 607 is an input unit, 608 is a deforming unit, 609 is a fixed unit, 610 is an output deforming unit, and 611 is an output unit. The main function of the electrical conduction unit 606 is substantially the same as that of the electrical conduction unit 102 described in the fourth embodiment, and the function is also substantially the same. However, the line width of each part and the distance from the round bar 104 are small. Further, it is mechanically coupled to the ground line pattern 604 through the film 605 in the middle of the input unit 607. That is, the surface of the ground line pattern 604 is mechanically coupled to the film 605, and the electrical conduction unit 606 is mechanically coupled between the input unit 607 and the vicinity of the fixing unit 609.

  When the input unit 607 is pushed down by moving below a pad (not shown), the hatched portion K shown in FIG. 19 has the same movement of the electrical conduction unit 606 and the film 605. The force acting as the contact force is approximately the sum of the restoring forces generated by the deformations of the deformed portion 621 of the ground line pattern 604 and the deformed portion 608 of the electrical conducting portion 606. However, in the present embodiment, as described above, since the deformed portion 608 of the electrical conducting portion 606 having a small second moment of section can be handled with a small stress, the contact force is the deformed portion 621 of the ground line pattern 604. However, even if it is outside the deformed portion 608 of the electrically conductive portion 606, the influence of the material width related to the moment of inertia of the cross section is large, so that it is substantially caused by the restoring force of the ground line pattern 604. This makes it possible to reduce the size of the electrical conduction unit 606 and at the same time to obtain a large vertical movement of the input unit 607 and an optimum contact force.

  Since it is possible to widen and narrow only the portion of the input portion 607 that contacts the tip of the pad by a partial etching technique or a partial plating technique, the technical goal is to appropriately use according to the required use. Is achievable.

  FIG. 18 is a right side view of FIG. One surface of the ground line pattern 604 is attached to the film 605. As described above, the contact force applied to the input unit 607 is transmitted as indicated by an arrow F in FIG. 18, and the contact force is supported by the round bar 104. That is, the contact force applied to the input part 607 of the electrical conduction part 606 is transmitted from the electrical conduction part 606 to the film 605 and the ground line pattern 604 (arrow F2 in FIG. 18), and the deformation part 608 of the electrical conduction part 606 and The deformed portion of the ground line pattern 604 is supported by elastic deformation with the film 605. Regarding electrical signal conduction, the electrical signal input to the input unit 607 of the electrical conduction unit 606 is transmitted through the electrical conduction unit 606 (arrow F2 in FIG. 18).

  In FIG. 19, the round bar 104 is press-fitted to the arc portion 623 of the fixing portion 622 of the ground line pattern 604. The protrusions 622 and the left protrusions 624 of the deformation part 621 are connected to each other when they are arranged on the left and right at a plurality of determined pitches. Therefore, the ground line pattern 604 can be connected to the ground at an appropriate place without being connected to the ground of the wiring. For example, if a terminal similar to the deformable portion 609 is disposed only at a location where ground connection is required, ground connection is possible. In FIG. 19, since it is the range which can be estimated easily, it abbreviate | omits.

  FIG. 20 shows the film 605. The film 605 has substantially the same function as that of the fourth embodiment, and is mechanically coupled to the electrical conduction portion 606 and the ground line pattern 604, respectively. The film 605 is provided with a hole 613 corresponding to the hole 510 of Embodiment 4 and a hole 614 through which the round bar 104 passes.

  FIG. 21 shows the insulating film 612 attached to the electrical conduction portion 606. Each of the insulating films 612 needs to be in an insulating state when the probes 603 are arranged in the thickness direction. By sticking the insulating film 612 so as to surround the electrical conductive portion 606 except for the vicinity where the input portion 607 is in contact with the pad and the vicinity where the output portion 611 is in contact with the wiring terminal 106, each electrical conductive portion 606 is attached. Becomes an electrically independent structure. Note that the insulating film 612 is provided with a hole 616 through which the hole 615 and the round bar 104 pass, corresponding to the hole 613 of the film 605.

(Embodiment 7)
FIG. 22 is a front view of the electrical conducting portion 606 in the probe 603 showing the seventh embodiment. FIG. 23 is a side view of the electrical conduction portion 606 in the probe 603. In the seventh embodiment, in order to increase the speed of the probe 603, the opposing distance between the electric conducting portions is increased to reduce the electric capacity. In addition, in FIG. 22, only the electrical conduction parts 606-1 and 6061-2 adjacent to the contactor 300 stacked in the thickness direction are depicted as a front view, and shown in a state where no contact force is applied. Yes.

  Assuming that the input parts of the electric conduction part 606-1 and the electric conduction part 606-2 are 607-1 and 607-2, the vertical length L1 of the input part 607-1 and the vertical part of the input part 607-2. When the length L2 in the direction is different and the deformable portion 608-1 and the deformable portion 608-2 have substantially the same shape, the opposing overlap as seen from the front view is reduced. And the area facing the electrical conduction 606-2 is also reduced. As a result, according to the seventh embodiment, it is possible to assemble a contact with low electric capacity and high speed. The method of the seventh embodiment can be applied to the fourth embodiment, the fifth embodiment, and the sixth embodiment.

(Embodiment 8)
FIG. 24 is a front view of a probe 603 showing Embodiment 8 of the present invention. FIG. 25 is a front view of the ground line pattern 604. The eighth embodiment shown in FIGS. 24 and 25 is a case where two electrical conducting portions 606-1 and two electrical conducting portions 606-2 are arranged symmetrically. By disposing these elements in various directions, it is possible to deal with a chip 601 in which two adjacent rows, two opposite rows, and pads 602 such as ASICs and lodges as shown in FIG. 15 are arranged in a rectangular shape.

  FIG. 24 is an explanatory diagram in the case where two electrically conductive portions 606 are arranged symmetrically and have a common ground line pattern 604, a common film 605, and an insulating film 612. The two input portions face the left and right pads 602 of the two adjacent chips.

  By arranging them in the horizontal direction at an appropriate pitch and further stacking them in the depth direction toward the paper surface, it becomes possible to cope with a plurality of chips having two opposing rows of rectangular pad patterns. Furthermore, since it faces the two sides of the rectangular array left by arranging substantially the same array orthogonally, it corresponds to the chip 601 arrayed in a rectangular shape facing the pad 602, such as the above-mentioned ASIC or logistic. it can.

  Wiring terminals 106 are provided on both sides of the fixed plate 105 to enable electrical conduction between the two probes 102 and 102.

  Functions of the input unit 607, the deforming unit 608, the fixing unit 609, the output deforming unit 610, and the output unit 611 of the electrical conducting unit 606 in the eighth embodiment are substantially the same as those in the fourth embodiment. FIG. 26 shows an output deforming portion 604a of the ground line pattern 604 when the ground line pattern 604 is connected to the ground line of the wiring. Note that the film and the insulating film in the present embodiment are equivalent to the shape on the right side and the left side in FIGS.

  Accordingly, the two wiring terminals 106 existing between the arrangement of the eighth embodiment and the fixing plate 105 correspond to the adjacent chip 601 shown in the fifth embodiment, and high-speed electrical conduction of the rectangular arrangement pad arrangement is possible. This is an effective array.

  From the above description, according to the eighth embodiment having the ground line pattern, the film, and the insulating film, it is possible to conduct electrical continuity with the contact that has been speeded up on the rectangular array of pads.

(Embodiment 9)
A ninth embodiment of the present invention will be described with reference to FIGS. FIG. 27 is a perspective view showing a probe portion of the probe assembly according to the ninth embodiment of the present invention. FIG. 28 is a schematic configuration diagram of the probe portion shown in FIG. 27 as viewed from the side, and is a diagram that clarifies the electrical signal conduction path. FIG. 29 is a front view of a probe showing Embodiment 9 of the present invention. FIG. 30 is a front view of the ground line pattern. FIG. 31 is a front view of a film showing Embodiment 9 of the present invention.

  The electrical connection method in the ninth embodiment employs a method different from the electrical connection method in the sixth embodiment or the eighth embodiment. That is, in Embodiment 6 or the like, the distal end portion (607 in FIG. 18) of the electrical conduction portion 606 is in contact with the pad to receive a contact force (F) and perform electrical connection (FIG. 18). reference). On the other hand, in the ninth embodiment, there is a method in which the electrical conduction portion is not in contact with the pad, and the contact force is received and the electrical connection is performed when the ground line pattern 604-1 is in contact with the pad. Adopted. In the method of the ninth embodiment, when the pattern thickness of the electrically conductive portion 102-1 is extremely thin as several μm and the elastic force is reduced, the contact force is received from the ground line pattern in connection with the pad. Is better because it does not deform or break.

  As shown in FIG. 27, the probe 603-1 according to the ninth embodiment includes an electrical conduction section 102-1, a film 605-1, and a ground line pattern 604-1. The ground line pattern 604-1 is made of a conductive material such as metal, and has a contact portion 621-1, a tip portion 621-2, and a notch 621-3. Of course, the electrically conductive portion 102-1 is also made of a conductive material such as metal and has a reinforcing pattern 102-3 and a tip portion 102-2. The leading end portion 102-2 of the electric conductive portion 102-1 is metal-bonded to the leading end portion 621-2 of the ground line pattern 604-1. The reinforcing pattern 102-3 increases the connection area and serves as a reinforcing means such as metal bonding.

  The electrically conductive portion 102-1, the film 605-1, and the contact portion 621-1 of the ground line pattern 604-1 are firmly joined by vapor deposition means or plating means. When the pad and the tip end portion 621-2 of the ground line pattern 604-1 are connected to generate a contact force, the contact force is input as indicated by an arrow A in FIG. 28, and thereafter, the arrows A1, A2, and A2 are input. It is transmitted as indicated by A3. That is, the input contact force (arrow A) is transmitted from the front end 621-2 of the ground line pattern 604-1 to the front end 102-2 of the electrical conduction unit 102-1 (arrow A1), and then the electrical conductive unit. 102-1 is transmitted to the film 605-1 (arrow A2), and further transmitted from the film 605-1 to the ground line pattern 604-1 (arrow A3). Thereby, the deformation | transformation part (code | symbol 621-4 in FIG. 30) of the ground line pattern 604-1 elastically deforms. The transmission destination of the contact force indicated by the arrow A3 is a base end portion that exceeds the notch 621-3 when viewed from the front end portion 621-2 of the ground line pattern 604-1. For this reason, while the contact force is transmitted as described above, the electrical signal is blocked by the notch 621-3 and the film 605-1 (made of an insulating material), and the ground line pattern 604-1. Never go through.

  Next, electrical signal conduction in the ninth embodiment will be described. As shown in FIG. 28, the electrical signal is input as indicated by arrow A, and thereafter transmitted as indicated by arrows A1 and A4. That is, the input electric signal (arrow A) is transmitted from the tip end 621-2 of the ground line pattern 604-1 to the tip end 102-2 of the electric conduction portion 102-1 (arrow A1), and the electric conductive portion 102 is directly used. -1 is sent to the output deformation section (reference numeral 102-4 in FIG. 29). As already described above, since the ground line pattern 604-1 has the notch 621-3, an electric signal is not transmitted to the deformed portion of the ground line pattern 604-1.

    According to the present embodiment, an electrical signal from the pad is input from the ground line pattern and transmitted to the electrical conduction unit 102-1, thereby enabling electrical inspection.

(Embodiment 10)
FIG. 32 is an explanatory diagram of interference avoidance in the probe 603 shown as the tenth embodiment. When the probe is arranged in a rectangular pad array such as ASIC or logic, the probe crosses (or is orthogonal) in the present invention. In this case, the interference is avoided under the condition that A, B, C, and D of the two electrical conducting portions 606 are the same in FIG. Accordingly, since the distance from the fixed plate 105 to the upper surface of the round bar 104 is equal, the same attachment method is possible. In addition, the electrical characteristics of the electrically conductive portion are almost the same.

  Next, the electrical wiring structure of the multi-array probe assembly according to the present invention configured as described above will be described with reference to FIGS.

  FIG. 33 is a perspective view showing a part of the electrical wiring structure. This electrical wiring structure has an important function for transmitting and receiving electrical signals by connecting between a semiconductor chip, which is an object to be measured, and a prober device main body.

  As shown in FIG. 33, this electrical wiring structure is composed of ribbon-like films 707 and 708 in which a wiring pattern such as beryllium copper is formed on both surfaces of an insulating film such as polyimide resin, and the ribbon-like films 707 and 708. Are each combined in the XY direction. The ribbon-shaped film 707 has notches 771 and the ribbon-shaped film 708 has notches 781 at a plurality of pitches P. Further, the widths of the notches 771 and 781 are equal to the interval between the base and the base. These incisions allow the ribbon-like films 707 and 78 to be combined in a lattice pattern in the XY direction, and the ribbon-like films 707 and 708 are arranged in the gap between the pedestal and the pedestal so that the individual probe assemblies are interposed. It enables electrical connection. Two ribbon-like films 707 and 708 are disposed in the gap between the pedestal and the pedestal in both the X and Y directions. The structure of the ribbon-like film having this wiring pattern will be specifically described with reference to FIGS.

  FIG. 34 is a diagram showing the configuration of the X-direction ribbon film, and FIG. 35 is a diagram showing the configuration of the Y-direction ribbon film. In each figure, (a) is a side view and (b) is a front view. As shown in FIG. 33, the ribbon-shaped film 707 is provided with a plurality of cuts 771 in the short direction of the film in accordance with the arrangement pitch P of the support columns. Is provided with a notch 781 from the opposite direction. The depth of cut is up to approximately the center of the film width, and the width of cut is equal to the gap between the base and the base. The lengths of the films 707 and 708 are long enough to cover the maximum arrangement length of the chips formed on the wafer in the X or Y direction. The X-direction ribbon film 707 and the Y-direction ribbon film 708 have slightly different wiring pattern structures.

First, in the X-direction ribbon-like film 707 shown in FIG. 34 (a), a plurality of copper wirings 772 on the upper half (h / 2) side having no cuts 771 on the surface side are arranged in a narrow pitch (in parallel with the vertical direction). For example, 45 μm). This narrow pitch interval coincides with the vertical probe pitch of the individual array probe assembly. On the other hand, a plurality of common copper wirings 773 orthogonal to the copper wirings 772 are formed on the back side of the film 707 on the upper half (h / 2) side without the cuts 771 in parallel with the film longitudinal direction. The common copper wiring 773 is electrically connected to the front and back through a through-hole 774 formed in the film 707. Similar to the copper wiring 772, the common copper wiring 773 is manufactured by an etching method or a plating method using a photolithography technique. Further, since the copper wiring 772 and the common copper wiring 773 are separately provided on both the front and back surfaces of the film, the through-hole 774 for connection may be provided only at the intersection position necessary for connection, and at other intersections. There is no need for shielding. As described above, the wiring pattern made of the copper wiring 772 and the common copper wiring 773 formed on the X-direction ribbon film 707 has the common copper wiring 773 as a common line and the notches 771 and 771 adjacent to the copper wiring 772 from this line. The interval P is set as one section, and each section is branched.

  On the other hand, as shown in FIGS. 35A and 35B, the ribbon-like film 708 in the Y direction has a length that reaches the lower half (h / 2) of the film surface side with the width h, Although the common copper wiring 783 is formed in the lower half (h / 2) on the back surface side and the respective wirings are connected to each other through the through-hole 784, it is the same as the X-direction ribbon film 707. Since the position of the notch 781 is directed upward, the common copper wiring 783 is disposed in the lower half of the film without the notch, and the length of the copper wiring 782 is correspondingly increased. The ribbon-like film formed in this way covers the entire film including the copper wiring and the common copper wiring with a thin insulating film to protect the surface in order to prevent the copper wiring from peeling or short-circuiting. However, in the case where the above-described pedestal and the XY direction positioning member described later (FIGS. 37 and 38) are resin, it is not necessary to provide an insulating coating.

  Also, the copper wirings 772 and 782 have their tips slightly projecting from the upper side of the film in the longitudinal direction (indicated by the dimension a in FIGS. 34 and 35). Contact terminals 775 and 785 are formed for contacting the vertical probe tip when assembling the array probe assembly. Further, as shown in the perspective view of FIG. 41, the common copper wirings 773 and 783 have a structure in which the end portions of the ribbon-like films 707 and 708 can be inserted into the socket 715. Can be connected.

  43 to 45 are views showing application examples of the Y-direction ribbon film 708 shown in FIG. 35, FIG. 43 is a perspective view, FIG. 44 is a front view, and FIG. 45 is a sectional view. The difference from FIG. 35 is that the vertical copper wiring 782 extends beyond the intersection with the horizontal common copper wiring 783 to the lower side of the ribbon-like film, slightly protrudes from the lower side, and is also connected to the lower side. 785c is provided. By doing so, the connection terminals are formed on the upper and lower sides of the ribbon-like film, so that they can be used even if they are turned upside down. Similarly, the application range of the ribbon-like film can be expanded by providing connection terminals on the lower side of the X-direction ribbon-like film.

FIG. 42 is a diagram for explaining an example of the connection between the ribbon-shaped film wiring and the wafer. That is, two input signal lines 863 and 864 and an output signal line 865 are provided as common copper wiring. Since these signal lines connect, for example, a plurality of chips 862 arranged in the X direction on the wafer 861, inspection can be performed for each column at the same time. The type and number of these signal lines may be arbitrarily set, and the ribbon-like film can be easily replaced as necessary.

  The ribbon film in the X and Y directions formed in this way is attached to the multi-array mount. In this case, necessary parts will be described with reference to FIGS. 30, 31, and 32. FIG. FIG. 36 is a plan view showing a part of the multi-array mount base. That is, the X-direction positioning member 709 and the Y-direction positioning member 710 are installed in a lattice pattern between the spaces c between the pedestals 703 arranged at the pitch P in the XY direction. The X-direction positioning member 709 and the Y-direction positioning member 710 are positioned and fixed in the X-Y-Z directions by passing through holes 706 (diameter d) that are opened at respective intersections when combined. . The thickness f of the X-direction positioning member 709 and the Y-direction positioning member 710 is f> d so as to pass the support column 706, and a width g is set on both sides of which the ribbon-shaped film 707 or 708 can be inserted. It is determined so that f = c-2g. Further, the width g is determined so that the thickness dimension including the copper wirings 772, 773 or 782, 783 formed on both surfaces of the ribbon-like films 707 and 708 can be inserted.

  FIG. 37 is a perspective view showing the structure of the X direction positioning member 709 and the Y direction positioning member 710. The X-direction positioning member 709 and the Y-direction positioning member are long plate-like members having a thickness h and a width f made of resin or metal material. A plurality of cuts 792 having a width c and a depth h / 2 are formed on the lower side with a pitch P, and a hole 791 through which a column 706 having a diameter d passes is formed at the center position of each cut 792. On the other hand, the Y-direction positioning member 710 is a member that is attached by being combined with the X-direction positioning member 709 at a right angle. Similarly, the notches 802 and holes 801 are provided at a pitch P. It is provided on the opposite side (upper side). Note that the cuts 792 and 802 formed in the positioning members 709 and 710 and the cuts 771 and 781 formed in the ribbon-like films 707 and 708 are all the same.

  FIG. 38 is a perspective view showing a state at an intersection position where the X direction positioning member 709 and the Y direction positioning member 710 are combined. Both the X-direction positioning member 709 and the Y-direction positioning member 710 are positioned in the XY direction by passing the holes 791 and 801 through the support column 706, and at the same time, the lower end portion is in contact with the stepped portion 761 of the support column 706 and positioned in the Z direction. Is made. A ribbon-like film is attached to the gap g formed at this time. In addition to the positioning function, the positioning members 709 and 710 also function as a reinforcing member that constitutes the multi-array probe assembly together with the support 706.

  FIG. 33 is a plan view showing a state in which the X-direction positioning member 709, the Y-direction positioning member 710, and the ribbon-like films 707 and 708 are attached to the multi-array mounting base. By attaching these parts, ribbon-like films 707 and 708 having contact terminals 775 and 785 for contacting the vertical probe of the individual probe assembly are positioned and attached to the four side surfaces of the base 703. Since the electrical signal can be taken out through the copper wirings 772 and 782 of the ribbon-like films 707 and 708, the function as a multi-array probe assembly can be sufficiently exhibited.

  Next, the procedure for attaching the positioning members 709 and 710 and the ribbon-like films 707 and 708 as shown in FIG. 39 will be described with reference to the process diagrams of FIGS. 40 (a), (b), (c), and (d). explain. This procedure is an example, and other procedures may be performed. First, as shown in FIG. 39A, the hole 801 is passed through the support column 706 with the notch 802 of the Y-direction positioning member 710 facing upward, and the Y-direction positioning member 710 is installed between the bases 703 and 703. At this time, the Y-direction positioning member 710 is positioned in the Y direction by the support column 706, and at the same time, the lower side portion is in contact with the stepped portion 761 of the support column 706 and positioned in the Z direction. At this time, a gap g is formed between the Y-direction positioning member 710 and the base 3 on both sides.

Next, as shown in FIG. 39 (b), the Y-direction ribbon-like film 708 is placed horizontally in the gap g on both sides and fitted vertically one by one. At the time of insertion, the notch 781 is directed upward and the vertical copper wiring 782 is inserted toward the side surface of the base 703. At this time, since the notch 781 has the same dimension as the notch 802 of the positioning member 710, the ribbon-like film 708 is positioned in the Y direction by matching the notch positions. Alternatively, the ribbon-like film 708 may be preliminarily aligned with the positioning member 710 and overlapped, and may be fitted together when the positioning member 10 is attached. Simultaneously with the fitting, the lower side portion of the ribbon-like film 708 is also brought into contact with the stepped portion 761 of the support column 706 and positioned in the Z direction, whereby the upper end surface position of the film 708 coincides with the upper surface position of the base 703. In addition, the probe tip of the probe assembly 701 attached to the base 703 and the contact terminal 785 of the vertical copper wiring 782 of the ribbon-like film 708 are aligned with each other.

  After the attachment of the positioning member 710 in the Y direction and the ribbon-like film 708 is completed in this way, this time, as shown in FIG. The X-direction positioning member 709 is installed between the pedestals 703 and 703. At this time, the X-direction positioning member 709 is positioned in the X direction by the support column 706, and at the same time, the lower side portion is in contact with the stepped portion 761 of the support column 706 and positioned in the Z direction. As a result, the positioning members 710 and 709 are attached between the pedestal 703 and the pedestal 703 by combining the notches 802 and 792 into a lattice shape. At this time, a gap g is formed between the X-direction positioning member 709 and the base 703 on both sides.

Next, as shown in FIG. 39 (d), the X-direction ribbon-like film 707 is placed horizontally in the gap g on both sides and vertically fitted one by one. At the time of insertion, the X direction ribbon film 707 is inserted with the notch 771 facing downward and the vertical copper wiring 772 facing the side surface of the base 703. At this time, the ribbon-like film 707 is attached in a lattice shape in combination with the notches 802 of the positioning member 710 to which the notches 771 are already attached and the notches 781 of the ribbon-like film 708, and is positioned in the X direction. At the same time, the lower side of the film is also brought into contact with the stepped portion 761 of the support column 706 and positioned in the Z direction, so that the upper end surface position of the film 7 coincides with the upper surface position of the base 703. Further, the vertical probe tip of the probe assembly 701 attached to the base 703 and the contact terminal 775 of the vertical copper wiring 772 of the ribbon-like film 707 are aligned with each other.

  As described above, the electrical wiring structure of the multi-array probe assembly according to the present invention can be easily and accurately assembled by combining the ribbon-like films having the common wiring lines in a lattice shape. In addition, since a plurality of copper wiring connection terminals are abutted and fixed at a correct position on each side of the pedestal at a time, there is no need to adjust the height and parallelism of the connection terminals later.

(Embodiment 11)
Next, an eleventh embodiment of the present invention will be described in detail with reference to the drawings. The eleventh embodiment is a system according to the present invention already described in FIG. FIG. 46 is a perspective view of the eleventh embodiment. For example, high-speed inspection is performed by measuring the contact of a batch probe with pads arranged on memory-related lines.

In FIG. 46, reference numeral 602 denotes a pad, and there are two adjacent rows, and two rows are arranged at regular intervals as shown in the figure. In the eleventh embodiment, an arrangement in which two rows are close to each other is taken as an example. However, if any one of the above-described opposed probes 603 is not arranged, a line arrangement with equal intervals is formed.

709-1 is an X direction positioning member, and 710-1 is a Y direction positioning member. Although the shape and function of the X-direction positioning member 709 and the Y-direction positioning member 710 have been described in the ninth embodiment, the X-direction positioning member 709-1 and the Y-direction positioning member 710-1 in the present embodiment are also substantially the same shape. And function. 709-1 is an X direction positioning member, and 710-1 is a Y direction positioning member. A plurality of probes 603-1 are arranged in the Y direction and stacked in the thickness direction (X direction). Actually, as described above, the ground line pattern 604-1 and the electrical copper passage portion 606-3 are formed and disposed on the film 605-1 which is a film-like insulating film by processing means such as etching and plating based on the lithography technique. ing. Reference numeral 110 denotes a one-axis test circuit.

  FIG. 47 is a further enlarged view of the main part of FIG. Two sets of the uniaxial test circuit 110 are firmly attached to the side surface of the X-direction positioning member 709-1. FIG. 48 is a front view of the uniaxial test circuit 110. The uniaxial test circuit includes a flexible film 111, an electronic device 112, connection wiring 113, and input / output lines 114.

The flexible film 111 is made of the same material as that of the ribbon-like film 707 in the eighth embodiment, and the connection wiring 113 plays a role of electrical connection with a probe substantially similar to the copper wiring 772. The electronic device 112 receives inspection information from the general-purpose computer 73 described in FIG. 55 from the interface 75 and sends it to the connection line 113. Since the electronic device 112 can secure a necessary space in the vertical direction on the paper surface, it can be arranged so that one inspection circuit can exist for one chip. In FIG. 48, the connection wiring 113 is shown as being connected from two electronic devices 112 to the pad 602 on the chip, but actually, one of the many electronic devices 112 is substantially connected to one chip through the connection wiring 113. Connected to pad 602.

49 is a view seen from the direction of arrow X in FIG. 50 is a view as seen from the direction of arrow Y in FIG. 47 and 49, the fixing pin 109 is press-fitted into the hole 791-1 formed in the X-direction positioning member 709-1. A round bar 109 is held and fixed. In this embodiment, the round bar 109 is arranged from one linear direction (in this case, only from the X direction). In the embodiment described later, the arrangement is from the X and Y directions.

  In FIG. 50, the connection wiring 113 slightly protrudes from the flexible film 111 and is electrically connected to the output deformation portion 610-1. The notch 115 is for avoiding interference with the X-direction positioning member 709-1.

  As described above, according to the eleventh embodiment, simultaneous batches other than serial inspection in which inspection signals are exchanged directly to the pads of all the chips arranged on the wafer from the inspection circuit in correspondence with the chip-to-inspection circuit 1. Can build a high-speed wafer inspection system.

(Embodiment 12)
Next, Embodiment 12 of the present invention will be described in detail with reference to the drawings. The twelfth embodiment corresponds to the multi-wiring and high-speed processing that is the system of the present invention already described in FIG. FIG. 51 is a perspective view of the twelfth embodiment. For example, the probe contacts the pads arranged in a rectangular shape such as logic-related ACIC at a time to perform high-speed inspection.

  In FIG. 51, 601 is a chip, 602 is a pad, and a large number of chips 601 are arranged on the wafer in a grid pattern. 709-1 is an X direction positioning member, and 710-1 is a Y direction positioning member. Although the shape and function of the X-direction positioning member 709 and the Y-direction positioning member 710 have been described in the ninth embodiment, the X-direction positioning member 709-1 and the Y-direction positioning member 710-1 in the present twelfth embodiment are substantially the same. Has shape and function. 709-1 is an X direction positioning member, and 710-1 is a Y direction positioning member. A plurality of probes 603-1 are arranged in the Y direction and stacked in the thickness direction (X direction). Actually, as described above, the ground line pattern 604-1 and the electrical copper passage portion 606-3 are formed and disposed on a processing means such as etching and plating based on the lithography technique on the film 605-1 which is a film-like insulating film. Yes.

  Reference numeral 110 denotes a one-axis test circuit. The probe 603-2 is arranged in the Y direction and the X direction as shown in the figure in the same manner as the probe 603-1 so as to be orthogonal to the probe 603-1. The method in which the probe 603-1 and the probe 603-2 do not interfere with each other is manufactured according to the method described in FIGS. 22 and 23.

  Two sets of the uniaxial test circuit 110 are firmly attached to both side surfaces of the X-direction positioning member 709-1. Similarly, the two-axis test circuit 116 is firmly attached to both sides of the two sets on the Y-direction positioning member 710-1. In order to prevent the one-axis test circuit 110 and the two-axis test circuit from interfering with each other, the notch 120 is provided in the two-axis test circuit 116, and the one-axis test circuit 110 is assembled through the notch. FIG. 52 is a front view of the two-axis test circuit 116. As shown in FIG. 52, the two-axis test circuit includes two flexible films 117, an electronic device 112, two connection wirings 118, two input / output lines 119, and a notch 120.

The two flexible film 117 is made of the same material as that of the ribbon-like film 707 in the eighth embodiment, and the two-connection wiring 118 plays a role of electrical connection with the probe similar to the copper wiring 772 and the connection wiring 113. The electronic device 112 receives inspection information from the general-purpose computer 73 described in FIG. Since the electronic device 112 can secure a necessary space in the vertical direction on the paper surface, it can be arranged so that one inspection circuit can exist for one chip. In FIG. 48, the connection wiring 113 is shown to be connected to the pad 602 on the chip from the two electronic devices 112, but actually, one chip from one of the many electronic devices 112 substantially through the two connection wiring 118. Connected to the upper pad 602.

The main difference between the 1-axis test circuit 110 and the 2-axis test circuit is that the 2-notch 120 is larger than the notch 115 in order to avoid interference with the electronic device 112. Further, since the notch is increased, the width through which the two-connection wiring 118 passes is reduced. In the embodiment of the present invention, as shown in FIG. 52, the narrowed portion is wired on the front and back of the two flexible films, and the total of the wiring on the front and back surfaces is the same as the total of the wiring output from the electronic device 112. It corresponds.

53 is a view seen from the direction of arrow X in FIG. 54 is a view as seen from the direction of arrow Y in FIG. 51, 53, and 54, the fixing pin 109 is press-fitted into the hole 791-1 formed in the X-direction positioning member 709-1. A round bar 109 is held and fixed at one end of the part. In the case of the present embodiment, the round bar 109 is arranged from two linear directions (in this case, only from the X direction and the Y direction). The two connection wiring 118 slightly protrudes from the two flexible film 117 and is electrically connected to the output deformation portion 610-1.

As described above, according to the present embodiment, inspection signals can be exchanged directly from the inspection circuit to the pads arranged on all the rectangles of all the chips arranged on the wafer in a 1: 1 correspondence between the chip and the inspection circuit. It is possible to construct a high-speed wafer inspection system at the same time that is not serial inspection.

  According to the present invention, a fine vertical probe and a wiring pattern can be easily processed by etching a resin film in which commonly used copper foils are laminated, and the resin film is formed into a ribbon shape. A multi-array vertical probe assembly can be easily constructed by arranging a plurality of the above-mentioned ones in a single unit and combining these units in a grid in the XY direction. This makes it possible to perform probing measurement for multi-chips formed on a large-diameter semiconductor wafer in a lump, and can be expected to make a significant contribution in the semiconductor field that is becoming increasingly finer as IC chips become more highly integrated. .

  It is a perspective view which shows the structure of the multi-array vertical probe assembly which concerns on Embodiment 1 of this invention.   It is a fragmentary perspective view which shows the internal structure of Embodiment 1 same as the above.   It is a perspective view which shows the X direction ribbon-like film of Embodiment 2 same as the above.   It is the A section enlarged front view of FIG.   It is a front view which shows the Y direction ribbon-like film of Embodiment 2 same as the above.   It is a perspective view which shows the assembly state of the Y direction unit in Embodiment 2 same as the above.   It is a perspective view of the square member in Embodiment 2 same as the above.   It is a fragmentary perspective view which shows the structure of the mounting base in Embodiment 2 same as the above.   It is a fragmentary perspective view which shows the structure of the mounting base in Embodiment 2 same as the above.   It is a perspective view of the support | pillar in Embodiment 2 same as the above.   It is a perspective view which shows the wiring structure of the X-, Y-direction ribbon-like film in Embodiment 1 and 2 same as the above.   It is a front view which shows the structure of the ribbon-shaped film which concerns on Embodiment 3 of this invention.   It is a perspective view of the to-be-tested body which concerns on Embodiment 4 of this invention.   It is a side view of the probe in Embodiment 4 same as the above.   It is a perspective view of the to-be-tested body which concerns on Embodiment 5 of this invention.   It is a side view of the probe in Embodiment 5 same as the above.   It is a front view of the probe which concerns on Embodiment 6 of this invention.   FIG. 18 is a schematic view of Mita from the side of the probe portion shown in FIG. 17 and clarifies a contact force transmission path and an electrical signal conduction path.   It is a front view of the ground line pattern in Embodiment 6 same as the above.   It is a front view of the film in Embodiment 6 same as the above.   It is a front view of the insulating film in Embodiment 6 same as the above.   It is a front view of the electrical continuity part in the probe concerning Embodiment 7 of the present invention.   It is a side view of the electrical conduction part of the probe in Embodiment 7 same as the above.   It is a front view of the probe which concerns on Embodiment 8 of this invention.   It is a front view of the ground line pattern in Embodiment 8 same as the above.   It is a front view which shows the output deformation | transformation part of the ground line pattern in Embodiment 8 same as the above.   It is a perspective view which shows the part of the probe of the probe assembly in Embodiment 9 of this invention.   It is the schematic block diagram which looked at the probe part shown by FIG. 27 from the side surface, and is a figure which clarifies the transmission path | route of a contact force, and the conduction path | route of an electrical signal.   It is a front view of the probe which shows Embodiment 9 of this invention.   It is a front view of the ground line pattern of Embodiment 9 of this invention.   It is a front view of the film in Embodiment 9 of this invention.   It is explanatory drawing of the interference avoidance of the probe which concerns on Embodiment 10 of this invention.   It is a perspective view of the electrical wiring connection body in the multi-array probe assembly of this invention.   It is the side view (a) and front view (b) of the X direction ribbon-like film in the multi-array probe assembly of this invention.   It is the side view (a) and front view (b) of the Y direction ribbon-like film in the said Embodiment 10. FIG.   It is a top view which shows the assembly state of the XY direction positioning member in the said Embodiment 10. FIG.   It is a perspective view which shows the structure of the XY direction positioning member in the said Embodiment 10. FIG.   It is a perspective view which shows the crossing state of the XY direction positioning member in the said Embodiment 10. FIG.   It is a top view which shows the assembly state of the XY direction positioning member in the said Embodiment 10, and an XY direction ribbon-like film.   It is process drawing (a), (b), (c), (d) which shows the assembly procedure of the XY direction positioning member and XY direction ribbon-like film in the said Embodiment 10.   It is a perspective view which shows the socket structure of the ribbon-shaped film in the said Embodiment 10. FIG.   It is a figure explaining the electrical wiring connection to the semiconductor wafer in the said Embodiment 10. FIG.   It is a perspective view which shows the application example of the ribbon-shaped film in the said Embodiment 10. FIG.   FIG. 44 is a front view showing an application example of the same ribbon-like film as shown in FIG. 43 in a case where chips are arranged at equal intervals in two rows of lines.   It is sectional drawing which shows the application example of the same ribbon-like film as shown in FIG.   It is a perspective view of Embodiment 11 of the present invention.   It is the perspective view which expanded further the principal part of FIG.   In the said Embodiment 11, it is the figure represented so that a connection wiring might be connected to the pad on a chip | tip from two electronic devices.   It is the figure seen from the arrow X direction of FIG.   It is the figure seen from the arrow Y direction of FIG.   It is a perspective view of Embodiment 12 of this invention.   It is a front view of the biaxial test circuit in the twelfth embodiment.   It is the figure seen from the arrow X direction of FIG.   It is the figure seen from the arrow Y direction of FIG.   It is a block diagram which shows the system configuration | structure corresponding to many wiring and high-speed as a system of the electrical function test | inspection apparatus based on this invention.   It is a perspective view of a conventional vertical probe assembly.   It is a perspective view of the conventional prober apparatus.   It is a block diagram which shows the system configuration | structure of the conventional electrical function test | inspection apparatus.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 X direction ribbon-shaped film 2 Y direction ribbon-shaped film 3, 4 Vertical probe 5 X direction unit 6 Y direction unit 7 Support substrate 8 Support | pillar 8a, 8b Square member 9, 10 Opening part 10a Square hole 31, 35 Curved part 34, 38 Contact 33, 43, 133, 143 Wiring 46, 47 Projection

Claims (60)

  A vertical probe that makes electrical connection by contacting an electrical connection terminal provided on the electrical functional element to be inspected, and a resin film that supports the vertical probe, and the vertical probe is on the surface of the resin film. The vertical probe is provided so as to be elastically deformable in a direction along the film surface, and one end of the vertical probe is brought into contact with a terminal of the electric functional element to be inspected, and the other end of the vertical probe is brought into contact with a terminal of the electric functional inspection device An electrical signal connecting device characterized in that a signal is transmitted and received between the electrical functional element to be inspected and the electrical functional testing device.   A ribbon-shaped resin film having a plurality of vertical probes in an electrical function testing apparatus having a plurality of vertical probes to be brought into contact with a plurality of terminals for electrical connection provided on an electrical functional element to be tested. A plurality of X-direction units and a plurality of Y-direction units extending in a direction intersecting the X-direction units are provided, and the plurality of sets of X-direction units and Y-direction units are arranged in a grid pattern on the support substrate. The vertical probe placed at each crossing position of the X-direction unit and the Y-direction unit is brought into contact with all the terminals of the electric functional element to be inspected at a time, and the electric functional element to be inspected and the electric functional inspection An electrical signal connection device, wherein a signal is transmitted to and received from the device.   In a prober apparatus in which a vertical probe is brought into contact with a semiconductor chip to be inspected formed on a semiconductor wafer and electrically connected to the inspection apparatus via the vertical probe, a ribbon shape having a plurality of vertical probes A plurality of sets of X direction units and Y direction units each having a plurality of resin films arranged side by side are arranged, and the plurality of sets of X direction units and Y direction units are arranged in a grid pattern on a support substrate and fixed. A prober for performing a probing test by bringing the vertical probe arranged at each crossing position of the X direction unit and the Y direction unit into contact with all the pads of the semiconductor chip to be inspected formed on the semiconductor wafer. apparatus.   The crossing positions of the plurality of sets of X-direction units and Y-direction units where the vertical probes are arranged correspond to each of the semiconductor chips to be inspected formed on the semiconductor wafer on a one-to-one basis. 4. The prober device according to claim 3, wherein the direction ribbon-like resin film occupies different spaces in the vertical direction at the crossing position and does not interfere.   The arrangement of the vertical probe arranged at each crossing position of the X-direction unit and the Y-direction unit is connected to the wiring at the end of the bending portion that is elastically deformed, and is supported by fixing means such as a square member at the end. 4. The prober device according to claim 3, wherein the pad arrangement and the tip of each semiconductor chip to be inspected coincide with each other.   The X-direction unit and the Y-direction unit are arranged on a plurality of support columns for positioning in the X and Y directions that are planted in a matrix on a support substrate and are connected to fixing means such as a square member. 4. The prober device according to claim 3, wherein   The ribbon-shaped resin film is composed of an X-direction ribbon-shaped film and a Y-direction ribbon-shaped film, and a vertical probe having a curved portion provided on each copper foil laminated resin film and a wiring pattern connected thereto are formed by etching. 4. The prober device according to claim 3, wherein the prober device is provided. 4. The prober device according to claim 3, wherein the ribbon-like resin film is arranged so that the directions of the curved portions of adjacent vertical probes are opposite to each other.   The X-direction ribbon-like film is provided so that one end of the vertical probe protrudes from the upper side in the longitudinal direction, and the other end hangs down through the curved portion and extends to the ribbon-like film end along the lower side. On the other hand, a second opening is formed in the resin film portion so as to be surrounded by the curved portion, and a second opening is formed at equal intervals along the longitudinal direction to pass the Y-direction ribbon-like film from the right angle direction. 4. The prober device according to claim 3, further comprising: an opening.   The Y-direction ribbon-like film is provided so that one end of the vertical probe protrudes from the upper side in the longitudinal direction, and the other end hangs down through the curved portion and extends to the ribbon-like film end along the lower side. The length of the protruding vertical probe is longer than the protruding length of the X-direction ribbon film, and the resin film portion has an opening opened so as to be surrounded by a curved portion. The prober device according to claim 3.   The X- and Y-direction ribbon-shaped film is a spring in the axial direction of the vertical probe at the time of inspection by elastic deformation of the resin film narrow portion formed by the opening opened so as to be surrounded by the curved portion and the upper side of the resin film 10. The prober device according to claim 9, wherein the prober device has a restoring force.   4. The vertical probe tips protruding from the X- and Y-direction ribbon films have the same height when the X-direction unit and the Y-direction unit are arranged in a lattice pattern. Prober equipment.   The X-direction unit and the Y-direction unit are arranged at right angles without interfering with a phase difference in the Z-axis direction, and the bending portion in the X-direction unit and the bending portion in the Y-direction unit are positioned in the Z-axis direction. The square members that are disposed without interfering with each other and that support the respective curved portions are orthogonal to each other with a phase difference in the Z-axis direction, and the respective square members are adjacent to each other. 4. The prober device according to claim 3, wherein the prober device is equidistant from the semiconductor chip to be inspected.   The Y direction unit is passed from the right angle through the second opening of the X direction unit, and the bending portion in the X direction unit and the bending portion in the Y direction unit have a phase difference in the Z axis direction and do not interfere with each other. The square members as means for supporting the respective curved portions are orthogonal to each other with a phase difference in the Z-axis direction, and the respective square members are equidistant from the adjacent semiconductor chips to be inspected. The prober apparatus according to claim 11, characterized in that:   In order to accurately position the thickness direction of the X direction ribbon film and the Y direction ribbon film, the thickness direction surface of the convex protrusions arranged on the surface of the square member and the X direction ribbon film or the Y direction 4. The prober device according to claim 3, wherein a position where the ribbon-shaped film comes into contact becomes a movable limit position of the film.   8. The prober device according to claim 7, further comprising a plurality of contact terminals that enable elastic deformation for each wiring.   A plurality of probe portions having an elastically deforming portion, an electric conduction means, and a plurality of wirings having a plurality of elastic terminals are electrically and physically coupled on a film-like resin surface having a plurality of holes and cutout holes which are non-electrically conductive materials. The probe is arranged at a desired position while maintaining the functions of the film-like resin, the probe part, and the wiring part, while promoting the mechanical function and mechanical function of the probe part by a synergistic action. Assembly.   A plurality of probe portions each having an elastically deformable portion; and a film having a plurality of punched holes and cutout holes that are electrically and physically coupled to the probe portion and a resin surface, and the probe portion includes a connection pad that is a terminal to be measured; Supports the contact force of the probe, has a hole provided in the probe into which the round bar-like conductive material is press-fitted, and an elastically deforming portion substantially below the hole, and the wiring terminal contacts and is electrically connected A probe assembly comprising an elastic deformation portion.   19. The probe assembly according to claim 18, wherein the probe assemblies are arranged in a connected state in one direction.   19. The probe assembly according to claim 18, wherein a plurality of probe assemblies are arranged in the thickness direction.   19. The probe assembly according to claim 18, comprising: a probe assembly disposed substantially in the same direction as the probe assembly disposed in the X direction. It consists of a probe part having an elastic deformation part and a film having a hole and a notch hole electrically and physically coupled to the probe part and the resin surface, and the probe part is a contact between a connection pad which is a terminal to be measured and the probe A hole provided in the probe for supporting the force and the rod-shaped conductive material is press-fitted, and an elastic deformation part which has an elastic deformation part substantially below the hole, and the wiring terminal contacts and is electrically connected A probe part having
A ground part having an elastic deformation part having a curved part or the like larger than the probe on the opposite side across the film, and the probe in which a round bar-shaped conductive material is press-fitted while supporting a contact force on the ground part A hole having the same phase as that of the hole provided in the hole, and an elastically deforming portion is provided below the hole if necessary, and a force is applied from the elastically deforming portion of the ground portion through the bonding force between the probe and the film. A probe assembly characterized in that the probe assembly is electrically connected at a portion other than the elastically deformable portion. It consists of a probe part having an elastic deformation part and a film having a hole and a notch hole electrically and physically coupled to the probe part and the resin surface, and the probe part is a contact between a connection pad which is a terminal to be measured and the probe A hole provided in the probe for supporting the force and the rod-shaped conductive material is press-fitted, and an elastic deformation part which has an elastic deformation part substantially below the hole, and the wiring terminal contacts and is electrically connected And
A ground part having an elastic deformation part having a curved part or the like larger than the probe on the opposite side across the film, and the probe in which a round bar-shaped conductive material is press-fitted while supporting a contact force on the ground part A hole having the same phase as that of the hole provided in the hole, and an elastically deforming portion is provided below the hole if necessary, and a force is applied from the elastically deforming portion of the ground portion through the bonding force between the probe and the film. The material of the part that is electrically connected to the part other than the elastically deformed part and contacts the contacted part of the probe part is the same material as the ground part. A probe assembly formed by being electrically and physically separated by etching or the like.   The probe assembly according to claim 22, wherein the probe assembly is connected in one direction.   The probe assembly according to claim 22, wherein a plurality of the probes are arranged in the thickness direction.   26. The probe assembly according to claim 25, comprising: a probe assembly arranged in the X direction and a probe assembly arranged substantially in the same direction as the probe assembly arranged in the X direction.   24. The probe assembly according to claim 23, wherein a plurality of probe assemblies are arranged in the thickness direction, and the deformed portions of the probes adjacent in the thickness direction have different positions in the vertical direction and have a function of reducing electric capacity.   28. The probe assembly according to claim 27, comprising a probe assembly substantially identical in configuration to the probe assembly arranged in the X direction and arranged in the Y direction.   In the wiring that is in electrical contact with the probe terminal perpendicular to the end face of the wiring terminal formed at one end of the flexible flat cable having the wiring bonded to the surface of the non-conductive flexible film, a power supply is provided on one side of the non-conductive flexible film. A wiring assembly comprising: a common line including a line, a ground line, a signal line, and a chip selection line; and a chip drive line provided in the chip and arranged perpendicular to the common wiring.   30. The wiring assembly according to claim 29, comprising a fixing plate having a non-conductive surface and a wiring assembly firmly bonded to one surface of one side of the fixing plate.   30. A wiring assembly comprising: a wiring assembly according to claim 29; a wiring assembly having substantially the same configuration as the wiring assembly and having a half pitch different from each other in a staggered arrangement; and a chip driving line layout assembly. Laminated body.   30. The wiring assembly according to claim 29, wherein a plurality of the wiring assemblies are arranged in the thickness direction of the film.   30. The wiring assembly according to claim 29, wherein the wiring assembly faces the both side surfaces of the non-conductive fixing plate and is firmly bonded to the fixing plate.   The wiring assembly according to claim 30, wherein a plurality of the wiring assemblies are arranged in the thickness direction of the film. A multi-array mount,
A first pedestal arranged in the X direction and a second pedestal arranged in the Y direction on the multi-array mount,
Between the first and second pedestals, a bar-shaped member extending in the X direction and a lattice-shaped positioning member combining bar members extending in the Y direction are arranged,
19. The probe assembly according to claim 18, wherein the electrical wiring connector is positioned according to the positioning member.   The lattice-shaped positioning member has a hole through which the support column passes at the intersection of the X direction and the Y direction, and the positioning member is fixed to the hole through the support column. 36. The probe assembly of claim 35.   36. The probe assembly according to claim 35, wherein the bar-like members extending in the X direction and the Y direction are each provided with cuts at equal pitch intervals, and the cuts are fitted into a lattice shape.   The lattice-shaped positioning member is positioned in the X-Y direction by passing through a column, and the positioning member lower side portion is in contact with the column step portion to perform positioning in the Z direction. 36. The probe assembly according to 35.   36. The probe assembly according to claim 35, wherein a gap is formed between the lattice-shaped positioning member and the pedestal so that an electric wiring connector as a ribbon-like film can be inserted. 36. The electrical wiring connector is positioned in the XY direction by a lattice-shaped positioning member, and positioned in the Z direction with the lower side of the film abutting against a support stepped portion. Probe assembly. 41. The X- and Y-direction ribbon-like films as the electrical wiring connector are each provided with cuts at equal pitch intervals, and the cuts are fitted to form a grid. Probe assembly. The probe assembly according to claim 36, wherein the lattice-shaped positioning member and the electric wiring connector are detachable with respect to the support column. 36. The probe assembly according to claim 35, wherein the electrical wiring connector is a ribbon-like film having copper wiring patterns formed on both sides. 44. The probe assembly according to claim 43, wherein both sides of the ribbon-like film including a copper wiring pattern are covered with an insulating thin film. The copper wiring pattern formed on both surfaces of the ribbon-like film is a plurality of common copper wirings formed in parallel along the longitudinal direction on the front side, and the back side is formed in a direction orthogonal to the common copper wiring. 44. The probe assembly of claim 43, wherein the probe assembly is a plurality of copper wirings. 46. The probe assembly according to claim 45, wherein the copper wirings formed on the front and back surfaces of the ribbon-like film are electrically connected to each other through through holes at orthogonal positions. The copper wiring orthogonal to the longitudinal direction is slightly connected to the vertical probe in the individual probe assembly by protruding slightly from the upper side of the ribbon-like film with the tip thereof facing upward. 44. The probe assembly according to 43. The copper wiring perpendicular to the longitudinal direction slightly protrudes from both the upper and lower sides of the ribbon-like film, and the connection terminals that contact the vertical probe in the individual probe assembly are formed on both upper and lower sides. 44. A probe assembly as claimed in claim 43. 40. The probe assembly according to claim 39, wherein when the ribbon-like film is mounted, the copper wiring side surface having connection terminals is arranged facing the side surface of the pedestal. 50. The probe set according to claim 49, wherein the two ribbon-like films are superposed and arranged so that each connection terminal is arranged in two rows and staggered so as to be applicable to a staggered arrangement of chip pads. Solid. 44. The probe assembly according to claim 43, wherein the copper wirings having connection terminals formed on the ribbon-like film are divided into a plurality of groups as a group, and a plurality of groups branch from the common copper wiring at an equal pitch. . 44. The probe assembly according to claim 43, wherein a wiring terminal of a common copper wiring is provided at an end portion in the longitudinal direction of the ribbon-like film so that it can be inserted into a socket connected to an external inspection device. 52. The probe assembly according to claim 51, wherein each group of copper wiring having connection terminals formed on the ribbon-like film corresponds to each semiconductor chip multi-arrayed on a semiconductor wafer. .   37. A probing inspection is performed by simultaneously bringing a vertical probe into contact with pads of a plurality of semiconductor chips formed on a semiconductor wafer at a time, and then a burn-in inspection is performed as it is. The probe assembly as described.   55. The probe set according to claim 54, wherein during the burn-in inspection, thermal expansion of the insulating substrate supporting the vertical probe of the individual probe assembly is suppressed by a support column to prevent the vertical probe from being displaced. Solid.   An electric circuit inspection apparatus comprising: a film; an electronic component that is integrally attached to the film and performs circuit inspection processing; and a wiring terminal that is connected to the electronic component and slightly protrudes outward from the edge of the film.   A wafer inspection apparatus comprising a film, an electronic component that is integrally attached to the film and performs circuit inspection processing, and a wiring terminal that is connected to the electronic component and slightly protrudes outward from the edge of the film. A first electric circuit inspection comprising a film, an electronic component attached to the film to perform circuit inspection processing, and a wiring terminal connected to the electronic component and slightly protruding outward from the edge of the film Equipment,
A second electric circuit inspection device having substantially the same configuration as the first electric circuit inspection device and extending in a direction intersecting with the first electric circuit inspection device;
One of the first electric circuit inspection device and the second electric circuit inspection device is provided with a notch at an intersecting portion so that the film of the other electric circuit inspection device is inserted. .   59. The electric circuit inspection device according to claim 58, wherein a surface with less deflection while supporting the contact force is attached to an insulated plate-like substrate.   7. A prober apparatus according to claim 6, wherein a material approximate to the thermal expansion coefficient of the wafer is used for the support substrate for fixing the X and Y direction positioning columns supporting the vertical probe of the individual probe assembly. .

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