KR200469200Y1 - Container for receiving pellicle - Google Patents

Abstract

The problem of the present invention is to secure the rigidity of the pellicle container, in particular, the rigidity and flatness of the mounting table even without using the reinforcing plate, and to prevent the pellicle film from being wrinkled when the pellicle is transported.
A pellicle container having a tray for loading a pellicle having a pellicle film on one edge of the pellicle frame, and a lid covered from an upper portion of the tray,
The tray has a tray center bottom surface, a substantially angled annular mounting table for raising pellicles by lifting from the tray center bottom surface to an upper side, and an outer edge portion extending in a horizontal direction from an outer circumferential edge of the loading table.
A pellicle container, characterized in that a buffer portion is provided between the tray center bottom surface and the mounting table, and between the mounting table and the outer edge portion.

Description

Pellicle storage container {CONTAINER FOR RECEIVING PELLICLE}

The present invention is designed to prevent foreign matter from adhering to a photomask or reticle used in a photolithography process when manufacturing a thin film transistor (TFT), a color filter (CF), or the like constituting an LSI or a liquid crystal display (LCD). A pellicle container for storing pellicles to be used. In particular, it is related with the pellicle container for large sized pellicle whose area of the full length pellicle film | membrane is 1000 cm <2> or more.

Although this invention is a technique regarding the storage container of a pellicle, a pellicle is demonstrated first.

Conventionally, in the photolithography process at the time of manufacturing a microcircuit pattern, such as a semiconductor device and a liquid crystal display, using the dustproof means called a pellicle, preventing adhesion of a foreign material to a photomask or a reticle is performed.

The pellicle is, for example, nitrocellulose having a thickness of 10 µm or less on the upper edge surface of the pellicle frame body (hereinafter referred to as `` pellicle frame '') having a thickness and a width of about several millimeters having a shape that matches the shape of a photomask or reticle. A pellicle film, which is a transparent polymer film such as a cellulose derivative or a fluorine-containing polymer, is adhered to the entire body, and an adhesive is applied to the lower edge of the pellicle frame to form a pressure-sensitive adhesive layer for the mask, with a predetermined adhesive strength to the pressure-sensitive adhesive layer for the mask. The protective film is adhere | attached.

This adhesive layer for masks is for fixing a pellicle to a photomask or a reticle, and a protective film is adhesiveness of the adhesive layer for masks, in order to maintain the adhesive force of an adhesive material until the adhesive layer for masks is provided for the use. It is to protect the cotton.

These pellicles are generally supplied from a manufacturer (hereinafter referred to as "manufacturer") to manufacture the pellicle to a manufacturer (hereinafter referred to as "user") to manufacture a photomask or reticle (hereinafter also referred to as "mask"). . After a user attaches a pellicle to a mask or the like, a mask or the like protected by the pellicle is supplied to a manufacturer that performs photolithography such as a semiconductor maker or a liquid crystal panel maker.

In transporting the pellicle from the manufacturer to the user, in order to prevent foreign matter from adhering to the pellicle or to prevent the pellicle from being damaged, the pellicle is stored in a pellicle storage container including a tray and a lid for loading the pellicle, and then again. It is common to store this pellicle container in a dustproof bag or the like and transport it.

By the way, the pellicle storage container requires the sealing property for not attaching dust to a pellicle. Further, the pellicle storage container is required to have a holding property that can be reliably maintained in a non-contact state with the pellicle film in order to prevent the lid from contacting the pellicle film and contaminating or breaking the pellicle film.

A pellicle container is usually manufactured by injection molding or vacuum molding resin such as ABS or acrylic. These molding methods can be used for smooth surfaces and less possibility of foreign matters sticking or dusting, less seam or intrusion of foreign matters for seamless molding, and complex shapes can be easily manufactured. This is because there are advantages such as low cost and excellent mass productivity.

As a large sized pellicle container with a side of more than 500 mm used mainly for pellicles for liquid crystals, vacuum molded synthetic resin sheets such as ABS and acrylic are generally used. This is because, in the injection molding in which resin is injected at high speed into the mold from one or several gates, the distance through which the resin flows is too long, which is quite difficult. On the other hand, in vacuum shaping | molding, since the resin sheet heated to the metal mold | die can be formed only by making it vacuum, a large sized pellicle container can be formed easily.

In the case of vacuum molding, however, thick ones cannot be molded and some reinforcement can be made by ribs, but since only sheets of the same plate thickness are basically bent, there is a problem that it is difficult to make high rigidity. For this reason, it is necessary for the pellicle container to suppress deformation of the lid and the pellicle mounting table by some method.

Accordingly, the present applicant provides a reinforcement plate on at least one of the tray and the lid, thereby suppressing deformation of the pellicle storage container, and locally causing weight to be applied to a part of the pressure-sensitive adhesive layer for the mask. The technique which prevents a tray and a lid from contacting a pellicle by the slack or the deflection was proposed (refer patent document 1).

In addition, the present applicant has proposed a technique of preventing the intrusion of foreign matter by suppressing deformation caused by the cover or the warp of the tray due to the high temperature during transportation of the pellicle container by providing a rib in at least one of the tray or the lid (patent See Document 2.

In addition, as a method of not using a reinforcing material, a pellicle container having a particularly high torsional rigidity is proposed by providing a plurality of ribs on the tray that do not intersect with other ribs across the diagonal of the tray outline (Patent Document 3). Reference).

Further, by providing a stepped portion on either the outside or the inside of the loading table for loading the pellicle frame of the tray, and loading the pellicle frame at a position lower than the stepped portion, the pellicle becomes difficult to move during transportation, and the adhesive on the bottom of the pellicle frame A pellicle container having a reduced risk of curling is proposed (see Patent Document 4).

Japanese Patent Application Laid-Open No. 2005-49765 Japanese Patent Application Laid-open No. 2000-173887 Japanese Patent Application Publication No. 2008-139417 Japanese Patent Application Publication No. 2007-47238

As mentioned above, a pellicle container is normally manufactured by injection molding or vacuum molding resin, such as ABS and acrylic.

For this reason, in the conventional case of increasing rigidity with a separate reinforcing plate, rigidity is sufficiently obtained, but since the weight increases, the larger the area of the pellicle film, the heavier the reinforcing plate is than the container body in order to secure sufficient rigidity. There was a problem. Further, not only the reinforcing plate itself but also a part for fastening the reinforcing plate to the container main body is required, and the number of steps for assembling and mounting the part to the container main body is also required, which greatly increases the cost compared to the case of the container main body alone.

In addition, in the conventional case of increasing rigidity by ribs without using a reinforcing plate, the problem of increase in weight as described above can be reduced. However, as in Patent Document 2, if the shape of the rib is X-shaped provided in the direction connecting the diagonals of the outer shape, the cross section exists in the ribs, so that the rigidity in the torsion direction is extremely reduced, and the tray is moved along one of the diagonals. There was a risk of twisting and bending the twin points close to each other.

Further, the arrangement of the ribs as in Patent Document 3 is effective for the rigidity of the inclined torsional direction of the tray, but when the tray is transported since the vicinity of the apex of the rib exists near the center of the side or there is no rib near the center of the side, When carrying the vicinity of the fitting portions on both short sides or both long sides with a human hand, or moving the vicinity of the center by a forklift, a stress is applied near the center of the edge and the rigidity in the direction of the fold perpendicular to the edge is applied. There was a problem that there was a tendency to be weak. In addition, when using an automatic take-out machine when attaching to a mask in a large sized pellicle, it is necessary to adsorb and grip the bottom of the tray, so the bottom of the tray tends to be relatively flat. On the other hand, when the ribs are arranged as in Patent Document 3, the larger the pellicle storage container is, the more ribs need to be attached. Therefore, there is a problem that it becomes difficult to adsorb and hold the bottom surface of the tray because the surface becomes relatively flat. .

In addition, since the pellicle storage container disclosed in Patent Document 4 has only a stepped portion either outside or inside the loading table, when external force is applied to the entire pellicle storage container, the flatness of the loading table of the pellicle is not maintained, and the pellicle is carried. The wrinkle of the pellicle film | membrane which generate | occur | produces at the time of the process was not fully prevented (it corresponds to the 1st comparative example mentioned later).

From this, for example, in the case of a pellicle storage container for storing a large pellicle having an area (hereinafter, simply referred to as an "area") of a full length of the pellicle film exceeding 5000 cm 2 and reaching 8000 cm 2 and more than 10000 cm 2, for example, Without using a sieve, only the pellicle container body had sufficient rigidity and flatness of the bottom surface, and it was not possible to prevent the occurrence of wrinkles in the pellicle film.

Therefore, the present inventors, in order to solve the above-mentioned problems, a tray center bottom surface, a substantially angular annular mounting table for loading pellicles by lifting from the tray center bottom surface to the upper side, and in a horizontal direction from the outer periphery of the mounting table. In the pellicle container having an outer edge portion extending, the pellicle container having a buffer portion between the tray center bottom face and the loading table and between the loading table and the outer edge portion can solve the above problems. It came to thinking of this invention.

That is, the pellicle container according to the present invention,

A pellicle storage container having a tray for loading a pellicle with a pellicle film on one edge of the pellicle frame, and a lid for covering the top of the tray, wherein the tray is raised from the bottom of the tray center and the bottom of the tray center to the upper side. A substantially angled annular mounting table for loading pellicles, and an outer edge portion extending in the horizontal direction from the outer periphery of the mounting table, between the tray center bottom surface and the mounting table, and between the mounting table and the outer edge portion, respectively. It has a buffer part, It is a pellicle container.

The buffer portion between the tray center bottom surface and the loading table is a step portion for dividing the step into two or more steps at different heights from the tray center bottom surface and the loading table, and the buffer section between the loading table and the outer edge portion. It is preferable that it is a step part which divides a step into two or more in height different from the said mounting base and the said outer edge part.

In addition, the buffer portion between the bottom of the tray center and the loading table, the buffer portion formed near the corner of the loading table rises in the direction of the loading table of the pellicle frame from the bottom surface of the tray and at the same time the diagonal of the tray outline. It is desirable to have a vertical plane across.

Moreover, it is preferable that the area of the said buffer part formed in the vicinity of the corner of the said loading stand among the said buffer parts between the said tray center bottom face and the said mounting base expands to the said tray center bottom face direction, and is relatively large.

Moreover, it is preferable that the 2nd step part of the height direction of the said pellicle frame is formed in the vicinity of the said mounting base of the said tray center bottom surface.

According to the pellicle container according to the present invention, the stiffness of the pellicle container, in particular, the rigidity and flatness of the mounting table can be secured even without using the reinforcing plate, so that wrinkles of the pellicle film can be prevented when the pellicle is transported.

BRIEF DESCRIPTION OF THE DRAWINGS It is a schematic sectional drawing which shows the whole structure of the pellicle storage container which concerns on 1st Embodiment.
It is a schematic front view which shows the tray of the pellicle container shown in FIG.
3 is a cross-sectional view taken along the line III-III shown in FIG. 2.
It is a schematic sectional drawing which shows the whole structure of the pellicle storage container which concerns on 2nd Embodiment.
It is a schematic front view which shows the tray of the pellicle container shown in FIG.
FIG. 6 is a cross-sectional view taken along the line VI-VI shown in FIG. 5. FIG.
FIG. 7: is a figure for demonstrating the dimension of the substantially triangular shape formed in the corner part A of the 1st horizontal surface part 15b.

[First Embodiment]

EMBODIMENT OF THE INVENTION Hereinafter, preferred embodiment of this invention is described with reference to drawings. BRIEF DESCRIPTION OF THE DRAWINGS It is a schematic sectional drawing which shows the whole structure of the pellicle storage container which concerns on 1st Embodiment. It is a schematic front view which shows the tray of the pellicle container shown in FIG. 3 is a cross-sectional view taken along the line III-III shown in FIG. 2. In addition, the same code | symbol is attached | subjected to the same or corresponding part among all drawings.

(Storage container)

As shown in FIG. 1, the pellicle container 1 includes a tray 2 on which the pellicle 4 is stacked, and a lid 3 covering the ceiling surface of the tray 2 to cover the ceiling surface of the tray 2. It is composed by. The tray 2 and the lid 3 are fixed by an adhesive tape or the like (not shown) or fixed by a fastener such as a clip or the like (not shown).

The pellicle 4 accommodated in the pellicle storage container 1 includes a substantially angled annular pellicle frame 4b and a top edge of the pellicle frame 4b, which are adapted to the shape of a photomask, a reticle, or the like (not shown). The pellicle film 4a which is electric-bonded to the surface, and the adhesive layer 4c for mask apply | coated to the lower edge surface of the pellicle frame 4b are provided. The pellicle film 4a is a transparent polymer film such as nitrocellulose, cellulose derivative or fluorine-containing polymer having a thickness of 10 μm or less. The pellicle frame 4b is a pellicle frame having a shape adapted to the shape of a photomask, a reticle, or the like (not shown) and having a thickness and a width of about several millimeters. The adhesive layer 4c for mask is a layer to which the adhesive material is apply | coated and the protective film is adhere | attached on the surface in order to maintain the adhesive force of an adhesive material. For this reason, the height direction of the pellicle frame 4b is the thickness direction of the pellicle frame 4b in which the pellicle film 4a is lifted, and shows the up-down direction in FIG.

The material of the tray 2 and the lid 3 is preferably an engineering plastic, a reinforced plastic, a metal, or the like. From the viewpoint of weight reduction and moldability, plastic materials are often selected, and acrylic resins, acrylonitrile resins, polycarbonate resins, polyethylene terephthalate resins, acrylonitrile butadiene styrene resins, and the like can be used. The material of the tray 2 and the lid 3 is, in addition to the above resins, polyester resins other than polyethylene terephthalate, olefin resins such as polyethylene and polypropylene, polystyrenes such as polystyrene, acrylonitrile and styrene resins. Resins and the like can also be used. In order to prevent adhesion of the foreign material by static electricity, said resin may be provided with antistatic property. Fiber reinforced plastics can also be used. In the case of selecting a metal, aluminum, an aluminum alloy, a magnesium alloy or the like is used in view of weight reduction.

The tray 2 and the lid 3 can be manufactured by assembling such as vacuum molding, injection molding, or bonding using the above materials. In particular, when employing the large tray 2 or the lid 3, it is preferable to manufacture by vacuum molding. As for the thickness of the tray 2 and the cover 3, 1 mm-10 mm are preferable.

The dimensions of the tray 2 and the lid 3 are set according to the size of the pellicle 4 to be stored, and have a slightly larger dimension than the pellicle 4 to be stored.

In addition, the lid 3 is preferably transparent or translucent to make it easy to see the inside, and the tray 2 is preferably black to make it easy to check the adhered foreign matter.

The tray 2 and the lid 3 are fitted at the periphery of each other, and the gap between the tray 2 and the lid 3 is preferably as narrow as possible in order to prevent foreign matter from entering from the outside. Do.

As shown in FIG. 2 and FIG. 3, the tray 2 includes a tray center bottom surface 5 having an opening on a side opposite to the lid 3, a mounting table 6 on which the pellicle 4 is loaded, The fitting part 7 with the cover 3 is provided.

(Buffer part of the loading stand)

The mounting base 6 is raised from the periphery of the tray center bottom face 5 to the ceiling surface side of the tray 2, and to the side on which the pellicle 4 is loaded. And the loading table 6 is provided with the buffer part which displaces in the height direction of the pellicle frame 4b, and the pellicle 4 is mounted in the highest horizontal part 13 in which the loading table 6 was raised. As the shock absorbing portion, if the structure can absorb the external force such that the external force applied to the entire storage case, such as a rib or a step portion dividing the step into two or more, does not directly fall on the mounting table, the effect of the present invention is exhibited. It is not limited.

On the outer edge side of the tray 2 in the loading table 6, the tray (from the lower end of the first vertical surface portion 14a and the first vertical surface portion 14a descending substantially vertically downward from the horizontal portion 13). A first horizontal plane portion 15a extending substantially horizontally toward the outer rim direction of 2) and a second vertical plane extending downward from the distal end of the first horizontal plane portion 15a in a substantially downward vertical direction to the fitting portion 7; The part 16a is formed.

Moreover, on the tray center bottom face 5 side in the mounting table 6, the tray is lowered from the lower portion of the first vertical surface portion 14b and the first vertical surface portion 14b that descends substantially downward from the horizontal portion 13. The first horizontal surface portion 15b extending substantially horizontally toward the center direction (the tray center bottom face 5 side) of (2) and from the distal end of the first horizontal surface portion 15b are further lowered in a substantially vertical direction to the center of the tray. A second vertical surface portion 16b is formed that extends to the bottom surface 5.

In this way, by the horizontal portion 13, the first vertical surface portion 14a, the first horizontal surface portion 15a, and the second vertical surface portion 16a, on the outer edge side of the tray 2 of the mounting table 6. And the buffer portion 8 in the height direction of the pellicle frame 4b is formed, and the horizontal portion 13, the first vertical surface portion 14b, the first horizontal surface portion 15b and the second vertical surface portion 16b are provided. The buffer part 9 of the height direction of the pellicle frame 4b is formed in the tray center bottom face 5 side of the mounting table 6.

The lengths of the first vertical surface portions 14a and 14b, the second vertical surface portions 16a and 16b and the first horizontal surface portions 15a and 15b vary depending on the size of the pellicle and may be the same or different, respectively. do.

And the area of the buffer part 8 formed in the corner part 6a vicinity of the loading stand 6 among the buffer parts 8 between the tray center bottom face 5 and the loading stand 6 is a tray center bottom face direction. It is preferable that it is relatively large by expanding to. The area of the buffer part 8 formed between the tray center bottom face 5 and the loading stand 6 and formed near the corner of the loading stand 6 extends in the tray center bottom face direction, thereby The torsion direction can be raised. Here, the 2nd vertical surface part 16b is made into the tray (so that four corner parts A of the 1st horizontal surface part 15b arrange | positioned near the corner part 6a of the mounting table 6 may become substantially triangular shape. 2) It is located at the position crossing the diagonal line of appearance. That is, the shock absorbing portion 9 has the corner portion A of the first horizontal surface portion 15b disposed near the corner portion 6a of the mounting table 6 in a substantially triangular shape, and has a second vertical surface portion ( 16b) is disposed at a position crossing the diagonal of the tray 2 outline. By forming the buffer part 9 in this way, rigidity with respect to the torsion of the tray 2 becomes high, and flatness of the mounting table 6 can also be maintained. In addition, when the second vertical surface portion 16b is disposed at a position orthogonal to the diagonal of the tray 2 outline, the second vertical surface portion 16b becomes more resistant to torsion of the tray 2, and furthermore, the mounting table ( It can be comprised in the range which exhibits the effect of maintaining the flatness of 6), and rigid perpendicularity is not necessarily required.

Here, with reference to FIG. 7, the dimension etc. of substantially triangular shape formed in the corner part A of the 1st horizontal surface part 15b are demonstrated.

As shown in FIG. 7, the length of the long side of the tray 2 external shape is made into X, and the length of the side parallel to the long side of the tray 2 external shape in the substantially triangular shape formed in the corner part A is x. Shall be. In this case, as for the ratio (x / X) of the length x of the triangular side parallel to the tray 2 outline long side with respect to the length X of the tray 2 outline long side, 0.5-50% is preferable, and 1-45% 3-40% are more preferable, 5-30% are further more preferable, 8-25% are more preferable, 10-20% are the most preferable. Thus, when ratio of length x of the triangular side parallel to tray 2 outer side long side with respect to length X of tray 2 outer side long side shall be in this range, rigidity becomes especially high and it is preferable. Therefore, in this embodiment, the ratio (x / X) of the length x of the triangular side parallel to the tray 2 outer side long with respect to the length X of the tray 2 outer side long side shall be 14%.

In addition, the length of the short side of the tray 2 external form is set to Y, and the length of the side parallel to the short side of the tray 2 external form in the substantially triangular shape formed in the corner part A is set to y. In this case, as for the ratio (y / Y) of the length y of the triangular side parallel to the tray 2 external short side with respect to the length Y of the tray 2 external short side, 0.5-50% is preferable, and is 1-45. % Is more preferable, 3-40% is more preferable, 10-40% is further more preferable, 15-35% is the most preferable. As described above, the ratio of the length y of the triangular sides parallel to the tray 2 outline short sides to the length Y of the tray 2 outline short sides is particularly preferable because of the high rigidity. Therefore, in this embodiment, the ratio (y / Y) of the length y of the triangular side parallel to the tray 2 outer side short side with respect to the length Y of the tray 2 outer side short side shall be 17.5%.

In addition, the angle formed by the diagonal of the outline of the tray 2 and the second vertical surface portion 16b is preferably 30 to 110 °, more preferably 70 to 100 °, and most preferably 90 °.

Moreover, it is preferable that the buffer part provided in the mounting base 6 is a step | step or more of one or more steps before and behind a mounting stand, and 1-3 steps are preferable because the mounting stand 6 itself is narrow. From the relationship of moldability and the like, it is preferable that the buffer portion formed on the mounting table 6 is at least one step formed in the vertical direction with respect to the mounting table 6, and because the mounting table 6 itself is narrow, It is preferable that a level | step difference is 1-3 steps. Moreover, it is preferable that the buffer part formed in the mounting base 6 from the relationship of moldability etc. is a step of 1 to 3 or more steps formed in the perpendicular direction with respect to the mounting base 6.

Moreover, since the buffer part formed in the mounting board 6 is formed in the both sides of the mounting board 6, a balance is good and rigidity is also high. And the flatness of the horizontal part 13 is also excellent. Since the horizontal portion 13 is a place where the pellicle frame 4b is loaded, when the flatness of the horizontal portion 13 is deteriorated, the adhesive material of the mask adhesive layer 4c follows the deterioration of the flatness of the horizontal portion 13. When deformed and attached to a mask, problems, such as an air path, may arise.

(Curvature radius)

And the horizontal portion 13 and the first vertical surface portion 14a, the first vertical surface portion 14a and the first horizontal surface portion 15a, the first horizontal surface portion 15a and the second vertical surface portion 16a, and the second vertical surface. With the portion 16a and the fitting portion 7, the horizontal portion 13 and the first vertical surface portion 14b, the first vertical surface portion 14b and the first horizontal surface portion 15b, and the first horizontal surface portion 15b It is preferable that the 2nd vertical surface part 16b, the 2nd vertical surface part 16b, and the tray center bottom face 5 have a connection structure which has a predetermined radius of curvature, respectively. If they are connected at right angles, the stress tends to be concentrated at the vertex, so that the concentrated stress acts on this connection portion. On the other hand, by making a radius of curvature slightly in this connection part, stress distribution can also be aimed at, and it also acts effectively also to the flow of resin and mold release at the time of shaping | molding. The radius of curvature is preferably 0.5 mm or more. Although the upper limit is based on the magnitude | size of the mounting stand 6, although it is set in the most suitable range, it is good in it being 300 mm or less, and even more preferably 200 mm or less and 100 mm or less. Especially, it is preferable that they are 2 mm-30 mm, More preferably, they are 2 mm-20 mm, More preferably, they are 2 mm-15 mm. In addition, the angle which these buffer parts make is not necessarily limited to 90 degrees, It is set suitably, You may make these angles obtuse angle from a viewpoint of manufacture of the tray 2, etc. As shown in FIG.

(Fitting part)

The fitting portion 7 includes an outer edge portion 7a that extends in the horizontal direction from the outer circumference of the mounting table 6, and an outermost edge portion 7b that extends upward from the peripheral end of the outer edge portion 7a. have. The fitting portion 7 has a shape corresponding to the lid 3, and the lid 3 is in close contact with the lid 3 when the lid 3 is covered by the tray 2. In addition, the fitting part 7 may be provided with the edge part (not shown) extended further outward from the peripheral edge part of the outermost edge part 7b.

If the height of the outermost edge part 7b is 0.7 times or more when the height of the mounting base 6 from the outer edge part 7a is 1, and also 1 time or more, the rigidity of a container can be further improved. 3 times or less are preferable as an upper limit from handling property and the handleability of a container. When the reinforcing material is not used, the fitting portion 7 may bend over time, resulting in poor flatness. However, the height of the outermost edge portion 7b and the height of the outermost edge portion 7b are provided in the above range. By doing so, this warpage can be further suppressed.

[Second Embodiment]

Next, with reference to FIG. 4 and FIG. 5, the pellicle container which concerns on 2nd Embodiment is demonstrated. It is a schematic sectional drawing which shows the whole structure of the pellicle storage container which concerns on 2nd Embodiment. It is a schematic front view which shows the tray of the pellicle container shown in FIG. FIG. 6 is a cross-sectional view taken along the line VI-VI shown in FIG. 5. FIG.

(Storage container)

The pellicle storage container 21 is basically the same as the pellicle storage container 1 according to the first embodiment, and only the shape of the tray is different from the pellicle storage container 1 according to the first embodiment. For this reason, below, only the part different from the pellicle container 1 which concerns on 1st Embodiment is demonstrated, and other description is abbreviate | omitted.

As shown in FIG. 4, the pellicle container 21 is comprised by the tray 22 in which the pellicle 4 is mounted, and the cover 3 which covers the ceiling surface of the tray 22. As shown in FIG. The tray 22 and the lid 3 are fixed by an adhesive tape or the like (not shown) or fixed by fasteners such as clips or the like (not shown).

As shown in FIG. 5 and FIG. 6, the tray 22 includes a tray center bottom surface 25 having an opening on a side opposite to the lid 3, a mounting table 26 on which the pellicle 4 is mounted, The fitting part 27 with the cover 3 is provided.

(The second step part of the tray center bottom)

In the tray center bottom face 25, a pair of 2nd step part 37 is formed in the height direction of the pellicle frame 4b so that the adsorption | suction of automatic extraction may not be influenced. The 2nd step part 37 is a substantially triangular-shaped recessed part arrange | positioned in the vicinity of the long side of the mounting table 26, The vertical surface part 37a which descends from the tray center bottom face 25 in the vertical direction downward, and a vertical surface The planar bottom part 37b connected to the lower edge of the part 37a is formed.

(Buffer part of the loading stand)

The mounting table 26 is raised from the periphery of the tray center bottom face 25 to the side on which the pellicle 4 is loaded. And the mounting table 26 has a buffer part in the height direction of the pellicle frame 4b, and the pellicle 4 is mounted in the highest horizontal part 33 in which the mounting table 26 was raised.

On the outer edge side of the tray 22 in the mounting table 26, the tray (from the lower end of the first vertical surface portion 34a and the first vertical surface portion 34a descending substantially vertically downward from the horizontal portion 33) A first horizontal surface portion 35a extending substantially horizontally toward the outer rim direction of 22), and a second vertical surface following the fitting portion 27 descending further downward in a substantially vertical direction from the tip of the first horizontal surface portion 35a. The part 36a is formed.

Moreover, on the tray center bottom face 5 side in the mounting table 26, the tray is lowered from the horizontal portion 33 to the lower portion of the first vertical surface portion 34b and the lower end of the first vertical surface portion 34b. The tray which descends further downward in the substantially vertical direction from the tip of the first horizontal surface portion 35b and the first horizontal surface portion 35b extending substantially horizontally toward the center direction (the tray center bottom face 5 side) of the 22. A second vertical surface portion 36b is formed that extends to the central bottom surface 5.

In this way, by the horizontal portion 33, the first vertical surface portion 34a, the first horizontal surface portion 35a, and the second vertical surface portion 36a, on the outer edge side of the tray 22 of the mounting table 26. And a cushioning portion 28 in the height direction of the pellicle frame 4b is formed, and the horizontal portion 33, the first vertical surface portion 34b, the first horizontal surface portion 35b and the second vertical surface portion 36b are provided. The buffer part 29 of the height direction of the pellicle frame 4b is formed in the tray center bottom face 5 side of the mounting table 26.

And the 2nd vertical surface part 36b is a tray 22 so that the four corner parts B of the 1st horizontal surface part 35b arrange | positioned near the corner part 26a of the mounting table 26 may become substantially triangular shape. ) It is located at the position crossing the diagonal of the outline.

Here, the ranges, such as the dimension of the substantially triangular shape formed in the corner part B of the 1st horizontal surface part 35b, are basically in the corner part A of the 1st horizontal surface part 15b demonstrated by 1st Embodiment. It is the same as the range of the dimension etc. of the substantially triangular shape formed (refer FIG. 7). Therefore, in 2nd Embodiment, the ratio (x / X) of the length x of the triangular side parallel to the tray 22 outer side long with respect to the length X of the tray 22 outer side long is made into 15%, and a tray ( 22) The ratio (y / Y) of the length y of the triangular side parallel to the tray 22 external short side to the length Y of the external short side is 33%.

In addition, only the 1st vertical surface part 34b is formed in the long side of the mounting table 26, and the 1st horizontal surface part 35b and the 2nd vertical surface part 36b are not formed.

That is, the buffer part 29 has the corner part B of the 1st horizontal surface part 35b arrange | positioned near the corner part 26a of the mounting table 26 in substantially triangular shape, and has the 2nd vertical surface part ( 36b) is disposed at a position crossing the diagonal of the tray 22 outline. And although the buffer part 29 is not provided in the long side of the loading stand 26, the 2nd step part 37 is provided in the vicinity of the loading stand 26 in the tray center bottom face 5 instead. It is. In addition, on the long side of the mounting table 26, the second stepped portion may be provided on only one side, or the second stepped portions may be provided on both sides.

(Curvature radius)

And the horizontal portion 33 and the first vertical surface portion 34a, the first vertical surface portion 34a and the first horizontal surface portion 35a, the first horizontal surface portion 35a and the second vertical surface portion 36a, and the second vertical surface. With the portion 36a and the fitting portion 27, the horizontal portion 33 and the first vertical surface portion 34b, the first vertical surface portion 34b and the first horizontal surface portion 35b, and the first horizontal surface portion 35b Not only the second vertical surface portion 36b, the second vertical surface portion 36b and the tray center bottom surface 25, but also the tray center bottom surface 25 and the vertical surface portion 37a, the vertical surface portion 37a and the bottom surface portion 37b. It is preferable to set it as the connection structure which has a predetermined radius of curvature, respectively. If they are connected at right angles, the stress tends to be concentrated at the vertex, so that the concentrated stress acts on this connection portion. On the other hand, by making a radius of curvature slightly in this connection part, stress distribution can also be aimed at, and it also acts effectively also to the flow of resin and mold release at the time of shaping | molding. The radius of curvature is preferably 0.5 mm or more. Although an upper limit is based also on the magnitude | size of the mounting stand 6, although it is set in the most suitable range, it is good in it being 300 mm or less, 200 mm or less, and further more preferably 100 mm or less. Especially, it is preferable that they are 2 mm-30 mm, More preferably, they are 2 mm-20 mm, More preferably, they are 2 mm-15 mm. In addition, the angle which these steps make is not necessarily limited to 90 degrees, It is set suitably, You may make these angles an obtuse angle from a viewpoint of manufacture of the tray 2, etc. As shown in FIG.

(Fitting part)

The fitting portion 27 includes an outer edge portion 27a extending in the horizontal direction from the outer circumference of the mounting table 26 and an outermost edge portion 27b extending upward from the peripheral end of the outer edge portion 27a. have. The fitting portion 27 has a shape corresponding to the lid 3, and when the lid 3 is placed on the tray 22, the fitting portion 27 can be in close contact with the lid 3. In addition, the fitting part 27 may be provided with the edge part (not shown) extended further outward from the peripheral edge part of the outermost edge part 27b.

As mentioned above, although preferred embodiment of this invention was described referring an accompanying drawing, this invention is not limited to this example. It is apparent to those skilled in the art that various modifications or modifications can be conceived within the scope of the idea described in the claims, and that they naturally belong to the technical scope of the present invention.

For example, in 1st Embodiment, although the 2nd vertical surface part 16b of the mounting table 6 was demonstrated as being linear shape (planar shape), it is not limited to the shape, For example, FIG. As shown by reference numeral 16b 'of 7, it may be a concave arc shape (curved shape), or as indicated by reference sign 16b "in FIG. 7, it may be a convex arc shape (curved shape). In this case, the tray 2 ) The angle formed by the diagonal of the outline and the second vertical surface portion 16b is the tangent of the second vertical surface portion 16b at the position where the diagonal of the outline of the tray 2 and the second vertical surface portion 16b cross each other, It is shown by the angle which the diagonal line of the outline of the tray 2 forms, and the same also applies to the 2nd vertical surface part 36b of 2nd Embodiment.

In addition, the mounting base 6 does not necessarily need to be a complete annular shape, For example, it may be formed only in the part parallel to the short side of the outer shape of the tray 2. In addition, this mounting table 6 is a c-shape centering on the part parallel to the short side or long side of the tray 2 external shape, and may be formed in the form facing each other.

Example

Specific examples and comparative examples are shown below, and their evaluation is explained in detail.

[First Embodiment]

The 1st Example employ | adopts the pellicle storage container which concerns on 2nd Embodiment, and the tray of this pellicle storage container is ABS resin so that outer diameter dimension may be width 1000mm x depth 1600mm, height 60mm, thickness 6mm. A vacuum molded article was used. A buffer section is provided between the tray center bottom surface and the loading table, and between the loading table and the outer edge portion, and the first horizontal surface portion near the corner of the loading table is formed in a triangular shape, and a triangular step is formed on the tray center bottom. Formed (see FIG. 4).

On the desk of the laboratory, the pellicle storage container of the first embodiment described above is installed, and the three corner portions of the pellicle storage container are fitted together with the desk to be fixed, and the remaining one corner portion is tensioned with a force of 2.5 kgf on the crane scale. The warpage (deformation amount) of the pellicle storage container was measured by a multiplier. The membrane wrinkles at that time were confirmed. Table 1 shows the measurement results.

[Second Embodiment]

The 2nd Example employ | adopts the pellicle storage container which concerns on 1st Embodiment, and the tray of this pellicle storage container is ABS resin so that outer diameter dimension may be width 950mm x depth 1400mm, height 85mm, thickness 5mm. A vacuum molded article was used. And a buffer part was provided between the tray center bottom face and a loading stand, and between a loading stand and an outer periphery, respectively (refer FIG. 2), but the same experiment as the 1st Example was performed. Table 1 shows the measurement results.

[First Comparative Example]

In the first comparative example, in the pellicle storage container of the first embodiment, a buffer unit is provided between only the center bottom of the tray and the mounting table disposed inside the mounting table without raising the mounting table. The same was done. Table 1 shows the measurement results.

Second Comparative Example

In the second comparative example, in the pellicle storage container of the first embodiment, a raised portion of the pellicle container was adopted, and was carried out in the same manner as in the first embodiment. Table 1 shows the measurement results.

Third Comparative Example

In the third comparative example, in the pellicle storage container of the second embodiment, the raised table had no buffer part and was carried out in the same manner as in the first embodiment. Table 1 shows the measurement results.

As shown in Table 1, membrane wrinkles were confirmed in all of the first to third comparative examples, but membrane wrinkles were not observed in both the first and second examples.

This invention can be used as a pellicle container.

1: pellicle container
2: tray
3: Cover
4: pellicle
4a: pellicle film
4b: pellicle frame
4c: adhesive layer for mask
5: tray center bottom
6:
6a: corner part
7: fitting part
7a: outer edge
7b: outermost edge
8: buffer
9: buffer
13: horizontal part
14a: first vertical surface portion
14b: first vertical surface portion
15a: first horizontal plane portion
15b: first horizontal surface portion
16a: second vertical surface portion
16b: second vertical surface portion
21: pellicle container
22 tray
25: bottom of tray center
26: loading table
26a: corner portion
26b: loading table
27: fitting
27a: outer edge
27b: outermost edge
28: buffer part
29: buffer part
33: horizontal portion
34a: first vertical surface portion
34b: first vertical surface portion
35a: first horizontal plane portion
35b: first horizontal surface portion
36a: second vertical surface portion
36b: second vertical surface portion
37: second step portion
37a: vertical plane
37b: bottom part
A: corner
B: corner

Claims (8)

A pellicle container having a tray for loading a pellicle having a pellicle film on one edge of the pellicle frame, and a lid covered from an upper portion of the tray,
The tray has a tray bottom bottom, an angular annular mounting table that lifts the pellicle from the tray center bottom surface to the upper side, and an outer edge portion that extends in the horizontal direction from the outer periphery of the loading table.
A buffer portion between each of the tray center bottom surface and the loading table and between the loading table and the outer edge portion,
The buffer portion between the tray center bottom surface and the loading table is a step portion divided into two or more steps at a height position different from the tray center bottom surface and the loading table,
The buffer section between the mounting table and the outer edge portion is a stepped portion divided into two or more steps at a height position different from that of the mounting table and the outer edge portion,
A pellicle container, characterized in that the buffer portion between the mounting table and the outer edge portion is not in close contact with the lid. delete The area of the said buffer part formed in the vicinity of the corner of the said loading stand among the said buffer parts between the said tray center bottom face and the said mounting stand is extended relatively to the said tray center bottom face direction, Comprising: It is relatively large. A pellicle container. The tray according to claim 1, wherein the buffer portion is formed between the bottom surface of the tray and the loading table, and the buffer portion formed near the corner of the loading table rises vertically from the bottom surface of the tray in the direction of the loading table of the pellicle frame. A pellicle container, characterized in that it has a vertical plane across the diagonal of. The pellicle container according to claim 1, wherein a second step portion in a height direction of the pellicle frame is formed near the mounting table on the bottom surface of the tray center. The tray according to claim 3, wherein the buffer portion is formed between the bottom surface of the tray and the loading table, and the buffer portion formed near the corner of the loading table rises vertically from the bottom surface of the tray in the direction of the loading table of the pellicle frame. A pellicle container, characterized in that it has a vertical plane across the diagonal of. The pellicle container according to claim 3, wherein a second step portion in the height direction of the pellicle frame is formed near the mounting table on the bottom surface of the tray center. The pellicle container according to claim 4, wherein a second step portion in a height direction of the pellicle frame is formed near the mounting table on the bottom surface of the tray center.

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