JP2002208158A - Liquid crystal element and optical pickup using the same - Google Patents
Liquid crystal element and optical pickup using the sameInfo
- Publication number
- JP2002208158A JP2002208158A JP2001003194A JP2001003194A JP2002208158A JP 2002208158 A JP2002208158 A JP 2002208158A JP 2001003194 A JP2001003194 A JP 2001003194A JP 2001003194 A JP2001003194 A JP 2001003194A JP 2002208158 A JP2002208158 A JP 2002208158A
- Authority
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- Japan
- Prior art keywords
- liquid crystal
- thickness
- crystal element
- refractive index
- light
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Links
- 239000004973 liquid crystal related substance Substances 0.000 title claims abstract description 102
- 230000003287 optical effect Effects 0.000 title claims description 44
- 239000000758 substrate Substances 0.000 claims description 29
- 230000004075 alteration Effects 0.000 claims description 12
- 238000009413 insulation Methods 0.000 claims 1
- 239000010408 film Substances 0.000 abstract description 55
- 238000002834 transmittance Methods 0.000 abstract description 23
- 239000010409 thin film Substances 0.000 abstract description 22
- 239000000470 constituent Substances 0.000 abstract 1
- 239000011521 glass Substances 0.000 description 19
- 239000010410 layer Substances 0.000 description 15
- 238000010586 diagram Methods 0.000 description 9
- 230000005684 electric field Effects 0.000 description 7
- 238000004088 simulation Methods 0.000 description 4
- 239000011159 matrix material Substances 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 238000005457 optimization Methods 0.000 description 3
- 230000005540 biological transmission Effects 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 206010010071 Coma Diseases 0.000 description 1
- -1 ITO Substances 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000001579 optical reflectometry Methods 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
- 238000002310 reflectometry Methods 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 239000012780 transparent material Substances 0.000 description 1
Landscapes
- Optical Head (AREA)
- Liquid Crystal (AREA)
Abstract
Description
【0001】[0001]
【発明の属する技術分野】収差補正用の液晶素子とそれ
を備えた光ピックアップに関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a liquid crystal element for correcting aberration and an optical pickup provided with the same.
【0002】[0002]
【従来の技術】従来技術の理解を容易にするため、公知
である光学薄膜の光透過特性及び液晶素子の光学的な構
造、及び液晶素子を用いた光の位相変調について簡単に
解説する。まず最初にガラス基板などの透明な基板上に
透明な薄膜を一層あるいは多層に塗布した光学薄膜素子
を考える。このとき透明な材料で構成されるので光透過
率は波長に関係なく一定でおよそ100%となる。しか
し実際にはガラス基板を含むすべての薄膜の屈折率が同
一である場合を除き、光の干渉効果で光透過率は透明基
板と各薄膜の屈折率及び各薄膜の厚みと光の波長λによ
り決定される。すなわち波長により透過率が異なる。そ
のため特定の条件においては、特定の波長のみを透過す
る光学薄膜素子が実現可能で干渉フィルターとして良く
知られる。また透過率に関して薄膜の膜厚と波長にはス
ケーリングが存在する。すなわち波長がn分の1になっ
たとき薄膜の膜厚もn分の1にすれば透過率は同じであ
る。2. Description of the Related Art In order to facilitate understanding of the prior art, a brief description will be given of the light transmission characteristics of a known optical thin film, the optical structure of a liquid crystal element, and the phase modulation of light using the liquid crystal element. First, consider an optical thin film element in which a transparent thin film is applied in a single layer or in multiple layers on a transparent substrate such as a glass substrate. At this time, since it is made of a transparent material, the light transmittance is constant at about 100% regardless of the wavelength. However, in practice, unless the refractive index of all thin films including the glass substrate is the same, the light transmittance due to the light interference effect depends on the refractive index of the transparent substrate and each thin film, the thickness of each thin film, and the wavelength of light λ. It is determined. That is, the transmittance differs depending on the wavelength. Therefore, under specific conditions, an optical thin film element that transmits only a specific wavelength can be realized, and is well known as an interference filter. In addition, there is scaling in the thickness and wavelength of the thin film with respect to transmittance. That is, when the wavelength becomes 1 / n and the film thickness of the thin film is also made 1 / n, the transmittance is the same.
【0003】次に一般的な液晶素子の光学構造について
説明する。主構成要素としてガラス基板、ITO(透明
導電膜)、絶縁膜、配向膜、液晶層、配向膜、ITO、
ガラス基板の順に構成される。ガラス基板は屈折率が
1.5程度のガラスが使用される。また量産性や材料の
制約等によりITOは屈折率が1.7から2程度、膜厚
は100から3000nm程度、絶縁膜は屈折率が1.
7程度、膜厚が50から300nm程度、配向膜は屈折
率が1.63程度、膜厚が50から200nm程度が使
用され薄膜構造を持っている。続いて平行配向型あるい
は垂直配向型液晶素子を用いた光の位相変調原理につい
て解説する。図6(a)、(b)は平行配向型液晶素子
の動作を模式的に表したものである。図6(a)のよう
に透明導電膜が塗布されたガラス基板601の間に液晶
分子602が挟まれその膜厚はdである。両方のガラス
基板601とも配向軸方向はY軸方向のため、液晶分子
602はその長軸方向をY軸方向に揃え平行に並んでい
る。この液晶素子にY軸方向の直線偏光603が入射す
ると液晶分子602の長軸方向を見ながら進むためその
光路長はn1×dとなる。ここでn1は液晶分子602
の長軸方向の屈折率で、直線偏光603に対する実効屈
折率となる。Next, the optical structure of a general liquid crystal element will be described. The main components are glass substrate, ITO (transparent conductive film), insulating film, alignment film, liquid crystal layer, alignment film, ITO,
The glass substrates are arranged in this order. Glass having a refractive index of about 1.5 is used for the glass substrate. Further, ITO has a refractive index of about 1.7 to 2, a thickness of about 100 to 3000 nm, and an insulating film has a refractive index of about 1.about.2 nm due to restrictions on mass productivity and materials.
The alignment film has a thin film structure of about 7, a film thickness of about 50 to 300 nm, a refractive index of about 1.63, and a film thickness of about 50 to 200 nm. Next, the principle of phase modulation of light using a parallel alignment type or vertical alignment type liquid crystal element will be described. FIGS. 6A and 6B schematically illustrate the operation of the parallel alignment type liquid crystal element. As shown in FIG. 6A, liquid crystal molecules 602 are sandwiched between glass substrates 601 on which a transparent conductive film is applied, and the film thickness is d. Since the orientation axis direction of both glass substrates 601 is the Y-axis direction, the liquid crystal molecules 602 are aligned in parallel with their long-axis directions aligned with the Y-axis direction. When linearly polarized light 603 in the Y-axis direction is incident on this liquid crystal element, it travels while looking at the long axis direction of the liquid crystal molecules 602, so that the optical path length is n1 × d. Here, n1 is a liquid crystal molecule 602
Is the effective refractive index for the linearly polarized light 603.
【0004】次に図6(b)に示すようにZ軸方向に十
分高い電界を与えると液晶分子602はその長軸を電界
方向にそろえて並ぶ。この液晶素子にY軸方向の直線偏
光603が入射すると液晶分子602の短軸方向を見な
がら進むためその光路長はn2×dとなる。ここでn2
は液晶分子602の短軸方向の屈折率である。従って電
界を与える前後で光路長が(n1−n2)×dだけ変化
し、入射直線偏光603の位相が2π(n1−n2)×
d÷λ(λは入射光の波長)だけ変化して出射する。液
晶分子に与える電界を調節する事で中間状態も実現可能
である。従って、分割した透明電極や高抵抗電極により
生じる勾配電界等を用いて液晶分子を部分的に駆動すれ
ば、入射直線偏光603に対して位相分布を与える事が
可能である。また垂直配向された液晶素子においてもそ
の基本動作は同じであるが、電界を与えない時が図6
(b)の状態で電界を与えたときが図6(a)の状態と
なる。Next, as shown in FIG. 6B, when a sufficiently high electric field is applied in the Z-axis direction, the liquid crystal molecules 602 are aligned with their long axes in the direction of the electric field. When linearly polarized light 603 in the Y-axis direction enters this liquid crystal element, the light travels while looking at the short-axis direction of the liquid crystal molecules 602, so that the optical path length is n2 × d. Where n2
Is the refractive index of the liquid crystal molecules 602 in the minor axis direction. Therefore, before and after the electric field is applied, the optical path length changes by (n1-n2) × d, and the phase of the incident linearly polarized light 603 becomes 2π (n1-n2) ×
The light is emitted after changing by d ÷ λ (λ is the wavelength of the incident light). An intermediate state can be realized by adjusting the electric field applied to the liquid crystal molecules. Therefore, if liquid crystal molecules are partially driven by using a gradient electric field or the like generated by the divided transparent electrode or high-resistance electrode, it is possible to give a phase distribution to the incident linearly polarized light 603. The basic operation is the same in a vertically aligned liquid crystal element, but when no electric field is applied, FIG.
FIG. 6A shows the state when an electric field is applied in the state shown in FIG.
【0005】近年、DVDなどの高密度の光ディスクに
おいて、光学系の収差補正素子として液晶素子が注目さ
れている。これはレーザー光源と対物レンズを備えた光
ピックアップの光路中に液晶素子を挿入し、光ディスク
基板が傾むく事により発生するコマ収差や、多層ディス
ク基板を読むさいに発生する球面収差による光の位相乱
れ、すなわち光の波面の乱れを補正しようとするもので
ある。このとき発生する収差量に応じて、分割された透
明電極により液晶素子に屈折率分布を与えてレーザー光
の波面を補正する。[0005] In recent years, liquid crystal elements have been attracting attention as aberration correction elements for optical systems in high-density optical disks such as DVDs. This is due to the phase of light caused by coma caused by tilting the optical disc substrate when the liquid crystal element is inserted into the optical path of an optical pickup equipped with a laser light source and an objective lens, and spherical aberration generated when reading a multilayer disc substrate. It is intended to correct the disturbance, that is, the disturbance of the wavefront of light. In accordance with the amount of aberration generated at this time, the liquid crystal element is provided with a refractive index distribution by the divided transparent electrodes to correct the wavefront of the laser light.
【0006】[0006]
【発明が解決しようとする課題】しかるに光ピックアッ
プのようにレーザーパワーの限られたレーザ光学系用の
光学素子では光透過率は重要な要素である。特に最近注
目される波長450nm程度の青色レーザーを用いた光
ピックアップの場合、青色レーザーの発光効率は従来の
波長650nm程度の赤色レーザーに比べ低下する。ま
たレーザー光は特定の鋭い波長の光を発生するため、そ
の波長における光透過率が重要となる。他方で液晶素子
は薄膜構造を持ち更に駆動する事で液晶層の実効屈折率
が変化する。そのためレーザー光や単色光で使用する場
合、使用する波長に対して液晶素子の薄膜構造を最適化
して透過率が最大となるように、また液晶を駆動しても
光透過率の変動が最小となるようにするのが望ましい。
しかるに、従来の液晶素子は位相変調素子としてではな
く、偏光板と共に用いる事で白色光に対する光シャッタ
効果を利用した表示用途を主体に開発されてきた。その
ため、液晶素子の薄膜構造はレーザー光学系に対して最
適化設計されてこなかった。また一般のレーザー光学系
用に位相変調型である平行配向型液晶がしばしば使用さ
れてきたが、一般にレーザー光は非常に大きなパワーを
持つため光透過率を問題とする必要はなく液晶素子の薄
膜構造を最適化する必要はなかった。However, in an optical element for a laser optical system having a limited laser power, such as an optical pickup, the light transmittance is an important factor. In particular, in the case of an optical pickup using a blue laser with a wavelength of about 450 nm, which has recently attracted attention, the luminous efficiency of the blue laser is lower than that of a conventional red laser with a wavelength of about 650 nm. In addition, since laser light generates light having a specific sharp wavelength, light transmittance at that wavelength is important. On the other hand, the liquid crystal element has a thin film structure, and the effective refractive index of the liquid crystal layer changes by further driving. Therefore, when using laser light or monochromatic light, the thin film structure of the liquid crystal element is optimized for the wavelength to be used so that the transmittance is maximized. It is desirable to be.
However, conventional liquid crystal elements have been developed mainly for display applications using an optical shutter effect for white light by using not a phase modulation element but a polarizing plate. Therefore, the thin film structure of the liquid crystal element has not been designed and optimized for the laser optical system. Parallel alignment type liquid crystal, which is a phase modulation type, has been often used for general laser optical systems.However, laser light generally has very large power, so there is no need to consider light transmittance, and thin films of liquid crystal elements are not required. There was no need to optimize the structure.
【0007】[0007]
【課題を解決するための手段】図7に液晶素子において
ITOの厚みと屈折率を変化させた場合の、波長650
nmの単色光における光反射特性のシュミレーション結
果を示す。液晶素子としてはガラス基板、ITO、絶縁
膜、配向膜、液晶層、配向膜、ITO、ガラス基板の順
で構成される。ガラス基板の屈折率は1.49、絶縁膜
の屈折率は1.75、厚みは70nm、配向膜の屈折率
は1.63、厚みは70nm、液晶層の実効屈折率は
1.6、厚みは5000nmである。図7でY軸はIT
Oの膜厚、X軸はITOの屈折率、Z軸は光反射率を表
す。図7からITOの厚みが110nm付近に第1の反
射率の極小値があり、ITOの屈折率が変化しても安定
である。またITOの屈折率が1.6に近いほど反射率
が低下し、かつITO膜厚の変化に対する変動も小さく
なる。したがって本条件下においてはITOの膜厚が1
10nm、その屈折率が1.6で光透過率は最大かつ安
定となるが現実にはITO屈折率として選べる値は1.
7である。また図4よりITOの厚みが200nm付近
に第2の反射率の極小値がある事もわかる。FIG. 7 shows a wavelength 650 when the thickness and the refractive index of ITO are changed in a liquid crystal element.
The simulation result of the light reflection characteristic in monochromatic light of nm is shown. The liquid crystal element includes a glass substrate, ITO, an insulating film, an alignment film, a liquid crystal layer, an alignment film, ITO, and a glass substrate in this order. The refractive index of the glass substrate is 1.49, the refractive index of the insulating film is 1.75, the thickness is 70 nm, the refractive index of the alignment film is 1.63, the thickness is 70 nm, the effective refractive index of the liquid crystal layer is 1.6, and the thickness. Is 5000 nm. In FIG. 7, the Y axis is IT
The film thickness of O, the X axis represents the refractive index of ITO, and the Z axis represents the light reflectance. As shown in FIG. 7, the first reflectance has a minimum value near the thickness of 110 nm of ITO, and is stable even if the refractive index of ITO changes. Also, as the refractive index of ITO is closer to 1.6, the reflectance decreases and the variation with respect to the change of the ITO film thickness also decreases. Therefore, under these conditions, the film thickness of ITO is 1
When the refractive index is 10 nm and the refractive index is 1.6, the light transmittance becomes maximum and stable, but the value that can be selected as the ITO refractive index is actually 1.
7 FIG. 4 also shows that there is a minimum value of the second reflectivity when the thickness of the ITO is around 200 nm.
【0008】実際の液晶素子の使用においては、液晶素
子を動作させることでその実効屈折率が変化する。図8
は絶縁膜の膜厚と液晶層の実効屈折率を変化させた場合
の光反射特性のシュミレーション結果である。ITO膜
厚は110nm、屈折率は1.7であり他の条件は図7
の場合と同じである。Y軸が絶縁膜の膜厚、X軸が液晶
層の実効屈折率、Z軸は光反射率を表す。図8より絶縁
膜の膜厚が70nm付近に光反射率の鞍部点が存在し、
液晶層の実効屈折率が変化しても高い光透過率が安定的
に実現される。In actual use of a liquid crystal element, the effective refractive index changes by operating the liquid crystal element. FIG.
FIG. 4 shows a simulation result of light reflection characteristics when the thickness of the insulating film and the effective refractive index of the liquid crystal layer are changed. The ITO film thickness was 110 nm and the refractive index was 1.7.
Is the same as The Y axis represents the thickness of the insulating film, the X axis represents the effective refractive index of the liquid crystal layer, and the Z axis represents the light reflectance. As shown in FIG. 8, a saddle point of the light reflectance exists near the thickness of the insulating film of 70 nm.
Even if the effective refractive index of the liquid crystal layer changes, a high light transmittance is stably realized.
【0009】図9は液晶素子においてITOの膜厚と絶
縁膜の膜厚を変化させた場合の光反射特性のシュミレー
ション結果である。ITOの屈折率は1.7であり、他
の条件は図7の場合と同じである。Y軸がITOの膜
厚、X軸が絶縁膜の膜厚、Z軸は光反射率である。図9
より光反射率の鞍部点が存在し一次式Y=aX+bで表
され、aは−0.4、bは60+190nあるいはaは
−0.6、bは170+190n(nは整数)である事
がわかる。すなわちおよそこの一次式の関係を満たすI
TO膜厚と絶縁膜厚の組を選べば光透過率は最大とな
り、かつ膜厚の変動に対しても安定である。この条件式
は入射光の波長が650nmのときであるため波長が変
われば使用できない。従来技術の薄膜の光透過特性の説
明で述べたように、薄膜厚と波長にはスケーリングがあ
る事を考慮すれば先の一次式はY=aX+b×λ÷65
0(λはnm単位で記述された入射光の波長)となり使
用波長に対し一般化される。もちろん、そのさい配向膜
の膜厚もλ÷650倍する。FIG. 9 shows a simulation result of light reflection characteristics when the thickness of the ITO and the thickness of the insulating film are changed in the liquid crystal element. The refractive index of ITO is 1.7, and other conditions are the same as those in FIG. The Y axis is the thickness of the ITO, the X axis is the thickness of the insulating film, and the Z axis is the light reflectance. FIG.
There is a saddle point of light reflectivity, which is represented by the linear expression Y = aX + b, where a is -0.4, b is 60 + 190n or a is -0.6, and b is 170 + 190n (n is an integer). . That is, I approximately satisfies the relationship of this linear expression.
If a set of the TO film thickness and the insulating film thickness is selected, the light transmittance is maximized, and the film is stable even when the film thickness changes. This conditional expression is used when the wavelength of the incident light is 650 nm and cannot be used if the wavelength changes. As described in the description of the light transmission characteristics of the prior art thin film, considering the scaling of the thickness and wavelength of the thin film, the above-mentioned linear expression is Y = aX + b × λ ÷ 65.
It becomes 0 (λ is the wavelength of the incident light described in the unit of nm), and is generalized to the used wavelength. Needless to say, the thickness of the alignment film is also multiplied by λ ÷ 650.
【0010】先のシュミレーションにおいては公知の手
法(例えば辻内順平著、光学概論2、朝倉書店、49頁
から53頁)である薄膜マトリクス法から計算した。こ
れは簡単にいうなら薄膜の屈折率n、厚みd、使用波長
λから記述される2×2のマトリクスで薄膜の光学伝達
特性を記述し、薄膜が積層された場合は各薄膜マトリク
スの乗算で全体の薄膜マトリクスを計算する。その結果
から光反射率あるいは光透過率を計算する手法である。In the above simulation, calculation was performed by a thin-film matrix method which is a known method (for example, Junpei Tsujiuchi, Optical Opinion 2, Asakura Shoten, pp. 49-53). In short, the optical transfer characteristic of a thin film is described by a 2 × 2 matrix described from a refractive index n, a thickness d, and a used wavelength λ of the thin film. Calculate the entire thin film matrix. This is a method of calculating the light reflectance or light transmittance from the result.
【0011】[0011]
【発明の実施の形態】図1に本発明の実施形態の一例を
示す。本発明の液晶素子は以下の構成である。すなわ
ち、ITO102と配向膜104とが順次積層された一
対の透明基板であるガラス基板101が対面してなり、
当該配向膜104との間に液晶層105を備え、少なく
とも一方の透明基板上の配向膜104とITO102の
間には絶縁膜103が形成された構成であり、用途とし
ては単色光あるいはレーザー光の位相を変調するための
液晶素子を基本的構成としている。特に本発明では、液
晶層厚が3000nm以上8000nm以下で、液晶分
子の入射光に対する実効屈折率が1.4以上1.8以下
の範囲で変化し、入射光に対する屈折率は、前記透明基
板が1.5±0.2、ITOが1.7±0.1、絶縁膜
が1.75±0.1、配向膜が1.63±0.1で、か
つ、配向膜厚が70±30nmであることを特徴とする
液晶素子を提供するところに最大の特徴を持っている。
更に詳しくは、本実施の形態では以下の通りの条件にお
いて最適化を図っている。すなわち、ガラス基板101
は屈折率1.49、厚さ0.7mm、ITO102は屈
折率1.7、厚さYnm、絶縁膜103は屈折率1.7
5、厚さXnm、配向膜104は屈折率1.63、厚さ
70nm、液晶層105は実効屈折率が1.5から1.
7まで可変、厚さは5000nmである。ここでITO
102の膜厚Yと絶縁膜103の膜厚Xは次の関係式を
満たす。Y=aX+b×λ÷650。ここでaは−0.
4、bは60+190nあるいはaは−0.6、bは1
70+190n(nは整数)でλはnm単位で記述され
た入射光の波長である。さらに、上記記載の液晶素子を
用いた応用例としては、レーザ光源と、対物レンズと、
収差補正用の液晶素子とを備えた光ピックアップに用い
られ、前記液晶素子の個々の構成の固有の最適条件によ
り、透過率が最適化された液晶素子を提供可能とし、さ
らに、この液晶素子を用いた光ピックアップとしての機
能を満足することが可能となりうる。FIG. 1 shows an example of an embodiment of the present invention. The liquid crystal element of the present invention has the following configuration. That is, the glass substrate 101, which is a pair of transparent substrates in which the ITO 102 and the alignment film 104 are sequentially stacked, faces each other,
A liquid crystal layer 105 is provided between the liquid crystal layer 105 and the alignment film 104, and an insulating film 103 is formed between the alignment film 104 and the ITO 102 on at least one transparent substrate. The liquid crystal element for modulating the phase has a basic configuration. In particular, in the present invention, when the thickness of the liquid crystal layer is 3000 nm or more and 8000 nm or less, the effective refractive index of the liquid crystal molecules with respect to incident light changes in the range of 1.4 or more and 1.8 or less. 1.5 ± 0.2, ITO 1.7 ± 0.1, insulating film 1.75 ± 0.1, alignment film 1.63 ± 0.1, and alignment film thickness 70 ± 30 nm The greatest feature is in providing a liquid crystal element characterized by the following.
More specifically, in this embodiment, optimization is performed under the following conditions. That is, the glass substrate 101
Is a refractive index of 1.49, a thickness of 0.7 mm, ITO is a refractive index of 1.7, a thickness of Y nm, and an insulating film 103 is a refractive index of 1.7.
5, the thickness X nm, the refractive index of the alignment film 104 is 1.63, the thickness is 70 nm, and the effective refractive index of the liquid crystal layer 105 is 1.5 to 1.
Variable up to 7, the thickness is 5000 nm. Here ITO
The film thickness Y of the insulating film 103 and the film thickness X of the insulating film 103 satisfy the following relational expression. Y = aX + b × λ ÷ 650. Here, a is −0.
4, b is 60 + 190n or a is -0.6, b is 1
70 + 190n (n is an integer) and λ is the wavelength of the incident light described in nm. Further, as an application example using the above-described liquid crystal element, a laser light source, an objective lens,
Used in an optical pickup having a liquid crystal element for aberration correction, it is possible to provide a liquid crystal element whose transmittance is optimized by an optimal condition specific to each configuration of the liquid crystal element. It may be possible to satisfy the function as the used optical pickup.
【0012】(実施例)図2に本発明の実施例を示す。ガ
ラス基板201は屈折率1.49、厚さ0.7mm、I
TO202は屈折率1.7、厚さ120nm、絶縁膜2
03は屈折率1.75、厚さ70nm、配向膜204は
屈折率1.63、厚さ70nm、液晶層205は屈折率
が1.5から1.7まで可変、厚さは5000nmで入
射光の波長は650nmに対して透過率が最適化されて
いる。(Embodiment) FIG. 2 shows an embodiment of the present invention. The glass substrate 201 has a refractive index of 1.49, a thickness of 0.7 mm,
TO202 has a refractive index of 1.7, a thickness of 120 nm, and an insulating film 2
03 has a refractive index of 1.75 and a thickness of 70 nm, the alignment film 204 has a refractive index of 1.63 and a thickness of 70 nm, and the liquid crystal layer 205 has a refractive index variable from 1.5 to 1.7. Is optimized for 650 nm.
【0013】図3は図2の液晶素子において波長650
nmの光に対する光反射特性で、横軸が液晶の実効屈折
率、縦軸が光反射率である。図3より液晶の実効屈折率
が変化しても反射率の変動は最大で1%程度に押さえら
れているのがわかる。従って本液晶素子のガラス基板に
無反射コートを施せば理論上99%以上の透過率を得る
事ができる。FIG. 3 shows the liquid crystal device of FIG.
The horizontal axis represents the effective refractive index of the liquid crystal, and the vertical axis represents the light reflectance. FIG. 3 shows that even if the effective refractive index of the liquid crystal changes, the change in the reflectance is suppressed to about 1% at the maximum. Therefore, if a non-reflective coating is applied to the glass substrate of the present liquid crystal element, a transmittance of 99% or more can be theoretically obtained.
【0014】図4は本発明の他の実施例を示す。ガラス
基板401は屈折率1.49、厚さ0.7mm、ITO
402は屈折率1.7、厚さ74nm、絶縁膜403は
屈折率1.75、厚さ43nm、配向膜404は屈折率
1.63、厚さ43nm、液晶層405は屈折率が1.
5から1.7まで可変、厚さは5000nmで入射光の
波長は400nmに対して透過率が最適化されている。
すなわち図2の構造の液晶素子に前述したスケーリング
を施したものであり各膜の屈折率は変わらず、膜厚が6
50分の400倍となっている。ただしガラス基板は薄
膜でないためスケーリングは無意味である。また液晶層
厚は本来スケーリングが必要であるが、駆動時に屈折率
変動がある事と、使用する光学条件から膜厚が決まるた
めスケーリングの対象とはしていない。FIG. 4 shows another embodiment of the present invention. The glass substrate 401 has a refractive index of 1.49, a thickness of 0.7 mm, and ITO.
402 has a refractive index of 1.7 and a thickness of 74 nm, the insulating film 403 has a refractive index of 1.75 and a thickness of 43 nm, the alignment film 404 has a refractive index of 1.63 and a thickness of 43 nm, and the liquid crystal layer 405 has a refractive index of 1.
Variable from 5 to 1.7, the thickness is 5000 nm, and the transmittance is optimized for the wavelength of the incident light of 400 nm.
That is, the above-mentioned scaling is applied to the liquid crystal element having the structure shown in FIG.
It is 400 times 50/50. However, scaling is meaningless because the glass substrate is not a thin film. Although the liquid crystal layer thickness originally needs to be scaled, it is not subject to scaling because the refractive index fluctuates during driving and the film thickness is determined from the optical conditions used.
【0015】図5は本発明の他の実施例で、公知である
液晶収差補正機構を備えた光ディスクのピックアップ光
学系に適用したものである。波長650nmのレーザー
光源501から出射したレーザー光502がコリメート
レンズ503で平行光にされ、液晶素子504を透過し
て対物レンズ505により光ディスク506上に集光さ
れる。液晶素子504のITOは分割電極により構成さ
れ任意のパターンを表示可能である。光ディスクの基板
が傾いたり、厚みが変化したりして光波面収差が発生し
た場合は、収差補正信号507により液晶素子504を
駆動して逐次収差補正を行う。液晶素子504の光学構
造は図2の素子と同じため、収差補正信号507により
駆動しても光透過率の変動は1%以下で、液晶素子50
4のガラス基板に無反射コートを施した場合の理論光透
過率は99%以上である。FIG. 5 shows another embodiment of the present invention, which is applied to an optical pickup optical system provided with a known liquid crystal aberration correcting mechanism. Laser light 502 emitted from a laser light source 501 having a wavelength of 650 nm is converted into parallel light by a collimating lens 503, passes through a liquid crystal element 504, and is focused on an optical disk 506 by an objective lens 505. The ITO of the liquid crystal element 504 is constituted by divided electrodes and can display an arbitrary pattern. When the optical wavefront aberration occurs due to the inclination of the substrate of the optical disk or the change in thickness, the liquid crystal element 504 is driven by the aberration correction signal 507 to sequentially perform the aberration correction. Since the optical structure of the liquid crystal element 504 is the same as that of the liquid crystal element 50 shown in FIG.
The theoretical light transmittance when the anti-reflection coating is applied to the glass substrate of No. 4 is 99% or more.
【0016】図10は本発明によらない液晶光学素子の
光反射特性を表す図である。ITOの屈折率として1.
9を用いた。他の条件は本発明による液晶光学素子と同
じである。本発明に関わる図8と比べ、反射率が最大1
0%にも達し、また液晶駆動における反射率変動の少な
い鞍部点もはっきりとは見受けられない。FIG. 10 is a diagram showing light reflection characteristics of a liquid crystal optical element not according to the present invention. As the refractive index of ITO:
9 was used. Other conditions are the same as those of the liquid crystal optical element according to the present invention. Compared to FIG. 8 relating to the present invention, the reflectance is 1
The saddle point, which reaches 0% and has little change in reflectance during liquid crystal driving, is not clearly seen.
【0017】次に、図11は本発明によらない液晶光学
素子の光反射特性を表す図である。ITOの膜厚を17
0nmとした。他の条件は本発明による液晶光学素子と
同じである。本発明に関わる図3比べ、反射率が2%以
上と大きく変動しているのがわかる。従って、以上の説
明から、液晶素子を構成する個々の部品の最適化が重要
であることがわかる。FIG. 11 is a diagram showing the light reflection characteristics of a liquid crystal optical element not according to the present invention. When the thickness of ITO is 17
It was set to 0 nm. Other conditions are the same as those of the liquid crystal optical element according to the present invention. It can be seen from FIG. 3 relating to the present invention that the reflectance greatly fluctuates to 2% or more. Therefore, it is understood from the above description that the optimization of the individual components constituting the liquid crystal element is important.
【0018】[0018]
【発明の効果】今までの説明から明らかなように、本発
明による液晶素子を用いれば任意の単色光に対して、光
透過率を最適化可能である。すなわち、高い光透過率と
液晶を駆動したときでも光透過率の変動を低く押さえる
事ができる。また液晶素子の製作において膜厚が多少変
動しても透過率変化が少ない。本液晶素子は光ディスク
のピックアップやレーザープリンタ等の光学系の収差補
正素子や光波面制御素子として使用すれば、光学系の光
利用効率が高くなり機器の低電力化にも貢献する。As is clear from the above description, the use of the liquid crystal device according to the present invention makes it possible to optimize the light transmittance for arbitrary monochromatic light. That is, even when the liquid crystal is driven with a high light transmittance, the fluctuation of the light transmittance can be suppressed low. Also, in the production of the liquid crystal element, the change in transmittance is small even if the film thickness slightly changes. If this liquid crystal element is used as an aberration correction element or an optical wavefront control element in an optical system such as a pickup of an optical disk or a laser printer, the light use efficiency of the optical system is increased, which contributes to a reduction in power consumption of equipment.
【0019】また、本発明では液晶素子は特定の波長に
対して最適化したが、複数の波長に対して最適化する事
も可能である。その場合は、単色での最適化よりは性能
は低下する。In the present invention, the liquid crystal element is optimized for a specific wavelength. However, it can be optimized for a plurality of wavelengths. In that case, the performance is lower than the optimization with a single color.
【図1】本発明における実施形態を示した例である。FIG. 1 is an example showing an embodiment of the present invention.
【図2】本発明における実施例である。FIG. 2 is an embodiment of the present invention.
【図3】本発明による液晶素子の光反射特性を表す図で
ある。FIG. 3 is a diagram showing light reflection characteristics of a liquid crystal element according to the present invention.
【図4】本発明における他の実施例である。FIG. 4 is another embodiment of the present invention.
【図5】本発明における他の実施例である。FIG. 5 is another embodiment of the present invention.
【図6】平行配向型液晶素子の位相変調原理図である。FIG. 6 is a diagram illustrating the principle of phase modulation of a parallel alignment type liquid crystal element.
【図7】液晶素子の光反射特性を表す図である。FIG. 7 is a diagram illustrating light reflection characteristics of a liquid crystal element.
【図8】液晶素子の光反射特性を表す図である。FIG. 8 is a diagram illustrating light reflection characteristics of a liquid crystal element.
【図9】液晶素子の光反射特性を表す図である。FIG. 9 is a diagram illustrating light reflection characteristics of a liquid crystal element.
【図10】液晶素子の光反射特性を表す図である。FIG. 10 is a diagram illustrating light reflection characteristics of a liquid crystal element.
【図11】液晶素子の光反射特性を表す図である。FIG. 11 is a diagram illustrating light reflection characteristics of a liquid crystal element.
101 ガラス基板 102 ITO 103 絶縁膜 104 配向膜 105 液晶層 501 レーザー光源 502 レーザー光 503 コリメートレンズ 504 液晶素子 505 対物レンズ 506 光ディスク 507 収差補正信号 602 液晶分子 603 直線偏光 Reference Signs List 101 glass substrate 102 ITO 103 insulating film 104 alignment film 105 liquid crystal layer 501 laser light source 502 laser light 503 collimating lens 504 liquid crystal element 505 objective lens 506 optical disk 507 aberration correction signal 602 liquid crystal molecule 603 linear polarization
Claims (4)
の透明基板が対面してなり、当該配向膜との間に液晶層
を備え、少なくとも一方の透明基板上の配向膜とITO
の間には絶縁膜が形成された単色光あるいはレーザー光
の位相を変調するための液晶素子であって、前記液晶層
厚が3000nm以上8000nm以下で、液晶分子の
入射光に対する実効屈折率が1.4以上1.8以下の範
囲で変化し、入射光に対する屈折率は、前記透明基板が
1.5±0.2、ITOが1.7±0.1、絶縁膜が
1.75±0.1、配向膜が1.63±0.1で、か
つ、配向膜厚が70±30nmであることを特徴とする
液晶素子。A pair of transparent substrates in which ITO and an alignment film are sequentially laminated face each other, a liquid crystal layer is provided between the pair of transparent substrates, and an alignment film on at least one of the transparent substrates and the ITO.
A liquid crystal element for modulating the phase of monochromatic light or laser light on which an insulating film is formed. The liquid crystal layer has a thickness of 3000 nm or more and 8000 nm or less, and an effective refractive index of liquid crystal molecules with respect to incident light is 1 nm. The refractive index with respect to incident light is 1.5 ± 0.2 for the transparent substrate, 1.7 ± 0.1 for ITO, and 1.75 ± 0 for the insulating film. 1. A liquid crystal element characterized by having an alignment film of 1.63 ± 0.1 and an alignment film thickness of 70 ± 30 nm.
の膜厚Xnmとの関係は、およそY=aX+b×λ÷6
50(λはnm単位で記述された入射光の波長)を満た
し、aは−0.4、bは60+190nあるいはaは−
0.6、bは170+190n(nは整数)である事を
特徴とした請求項1に記載の液晶素子。2. The relationship between the thickness Ynm of the ITO and the thickness Xnm of the insulating film is approximately Y = aX + b × λ ÷ 6.
50 (λ is the wavelength of incident light described in nm), a is -0.4, b is 60 + 190n or a is-
2. The liquid crystal device according to claim 1, wherein 0.6 and b are 170 + 190n (n is an integer).
λ÷650nm、絶縁膜厚が(70±30)×λ÷65
0nmである事を特徴とした請求項1に記載の液晶素
子。3. The film thickness of the ITO is (120 ± 30) ×
λ ÷ 650 nm, insulation film thickness is (70 ± 30) × λ ÷ 65
2. The liquid crystal device according to claim 1, wherein the thickness is 0 nm.
アップにおいて、前記液晶素子が請求項1乃至請求項3
のいずれか1項に記載の液晶素子であることを特徴する
液晶素子を用いた光ピックアップ。4. An optical pickup having a liquid crystal element for aberration correction, wherein the liquid crystal element is a liquid crystal element.
An optical pickup using a liquid crystal element, which is the liquid crystal element according to any one of the above.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001003194A JP2002208158A (en) | 2001-01-11 | 2001-01-11 | Liquid crystal element and optical pickup using the same |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001003194A JP2002208158A (en) | 2001-01-11 | 2001-01-11 | Liquid crystal element and optical pickup using the same |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JP2002208158A true JP2002208158A (en) | 2002-07-26 |
Family
ID=18871578
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2001003194A Pending JP2002208158A (en) | 2001-01-11 | 2001-01-11 | Liquid crystal element and optical pickup using the same |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2002208158A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004286961A (en) * | 2003-03-20 | 2004-10-14 | Ricoh Co Ltd | Optical element, light deflecting element, and image display device |
| WO2005052674A1 (en) * | 2003-11-27 | 2005-06-09 | Asahi Glass Company, Limited | Optical element using liquid crystal having optical isotropy |
| JPWO2004086389A1 (en) * | 2003-03-27 | 2006-06-29 | 農工大ティー・エル・オー株式会社 | Wavefront aberration correction apparatus and optical pickup apparatus including the same |
| CN119002129A (en) * | 2024-10-22 | 2024-11-22 | 鞍山晶诚电子有限公司 | Supporting structure and forming method and application thereof |
-
2001
- 2001-01-11 JP JP2001003194A patent/JP2002208158A/en active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004286961A (en) * | 2003-03-20 | 2004-10-14 | Ricoh Co Ltd | Optical element, light deflecting element, and image display device |
| JPWO2004086389A1 (en) * | 2003-03-27 | 2006-06-29 | 農工大ティー・エル・オー株式会社 | Wavefront aberration correction apparatus and optical pickup apparatus including the same |
| US7236444B2 (en) | 2003-03-27 | 2007-06-26 | Tokyo University Of Agriculture And Technology Tlo Co., Ltd. | Wavefront aberration correcting device and optical pickup equipped with the same |
| WO2005052674A1 (en) * | 2003-11-27 | 2005-06-09 | Asahi Glass Company, Limited | Optical element using liquid crystal having optical isotropy |
| CN119002129A (en) * | 2024-10-22 | 2024-11-22 | 鞍山晶诚电子有限公司 | Supporting structure and forming method and application thereof |
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