JP2002039261A - Vibration control structure - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide vibration control structure being excellent in active vibration cut-off performance at a high frequency area where a natural frequency is low and besides capable of performing control of vibration with multidimensional multidegree of freedom as excellent active vibration cutoff performance at a low frequency area is maintained. SOLUTION: Vibration control is effected on an upper surface plate 5, being a member to be controlled, in a horizontal direction by a vibration control device 3 having a working probe 15, and vibration control in a vertical direction is effected by working probes 35a and 35b. In the vibration control devices 2 and 3, vibration control rubbers 13 and 33 are situated in series between piezoactuators 12a, 12b; 32a, 32b, 32c and drive plates 17 and 37.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an active vibration isolator for actively isolating precision equipment from environmental vibrations such as a floor, and a solid actuator for simulating a microvibration environment and measuring a microvibration sensitivity of the equipment. The present invention relates to a vibration control structure comprising:

[0002]

2. Description of the Related Art In recent years, solid-state actuators such as piezoelectric (piezo) elements and magnetostrictive elements have been used in various fields such as vibration control such as vibration isolation and vibration isolation, and vibration oscillation. However, these solid actuators
In many cases, a predetermined purpose cannot be achieved because the displacement by itself is relatively small. Therefore, it has been proposed to use a vibration control device in which a displacement enlarging mechanism filled with liquid and a solid actuator are combined between a large-diameter piston and a small-diameter piston (for example, see Japanese Patent Application Laid-Open No. 7-301354). By using a vibration control device using one such displacement enlargement mechanism and one solid actuator, the displacement of the solid actuator is enlarged according to the area ratio between the large-diameter piston and the small-diameter piston, and output from the small-diameter piston side. Is possible.

[0003]

However, the above-mentioned publication does not clearly describe means for performing vibration control with multidimensional and multiple degrees of freedom. In addition, the vibration control device including the displacement enlarging mechanism and the solid actuator as described above has a low vibration isolation performance (active vibration isolation performance) in a low frequency range when the solid actuator is driven to perform active control. Although excellent, its natural frequency is relatively high, and it is not satisfactory in terms of passive vibration cutoff characteristics in a high frequency range.

Accordingly, an object of the present invention is to maintain excellent active vibration isolation performance in a low frequency range, have a low natural frequency, and excel in passive vibration isolation performance in a high frequency range. An object of the present invention is to provide a vibration control structure capable of performing a degree of vibration control.

[0005]

To achieve the above object, a vibration control structure according to a first aspect of the present invention has a first and a second movable portion, and the displacement inputted to the first movable portion is controlled by the first movable portion. A displacement enlarging mechanism that is enlarged and output from the second movable part, and is disposed on a side opposite to the second movable part with respect to the first movable part; A plurality of vibrations each including a solid actuator that can be displaced in a direction in which the first movable portion of the displacement magnifying mechanism is moved based on the above, and an elastic member arranged in series with the displacement magnifying mechanism and the solid actuator. The control device is used in combination with one or a plurality of members such that the action directions due to the displacement of the second movable portion cross each other.

According to the first aspect, a plurality of vibration control devices in which a displacement enlarging mechanism, a solid actuator, and an elastic member are respectively arranged in series are combined with one or a plurality of members so that the action directions cross each other. Therefore, vibration control with multi-dimensional and multi-degree of freedom is possible.

According to the first aspect, the natural frequency of the vibration control device is lower than that of the conventional vibration control device due to the elastic members arranged in series, and excellent passive vibration isolation performance in a high frequency range can be obtained. For example, assuming that the natural frequency of a vibration control device having no elastic member arranged in series is about 10 to 20 Hz, the natural frequency of the vibration control device in which an elastic member is added in series to this is 1 to 10 H
z can be reduced. In other words, the vibration control device according to the first aspect is suitable for a passive vibration isolation system that can produce a soft (ie, small natural frequency) support system regardless of the magnitude of the displacement (stroke) of the elastic member. Properties can be obtained. in this way,
According to the first aspect, excellent active vibration isolation performance is obtained in a low frequency range, and natural vibration frequency is reduced as compared with the conventional one, so that excellent passive vibration isolation performance is obtained in a high frequency range. In the present invention, "series"
It means that the interaction of the forces takes place serially, not that they are mechanically aligned.

In a vibration control structure according to a second aspect of the present invention, the displacement enlarging mechanism is a liquid displacement enlarging mechanism having a liquid chamber in which a liquid is sealed, wherein the first movable portion is located inside the liquid chamber. The second movable portion is in contact with the liquid, and is in contact with the liquid in the liquid chamber with a smaller contact area than the first movable portion.

According to a second aspect of the present invention, in the vibration control device, the liquid displacement enlarging mechanism has a liquid chamber in which the liquid is sealed, a first movable portion, and a contact area with the liquid larger than that of the first movable portion. It has a small second movable part, and a solid actuator is arranged on the first movable part side (hereinafter, a mechanism having such a structure is referred to as
"Liquid lever mechanism").

[0010] In the liquid lever mechanism, since the force is transmitted by the liquid, there is an advantage that the place and direction of the force can be changed with a high degree of freedom. By using this, it is possible to construct a vibration control device in which the solid actuator is arranged in a place where maintenance is easy and the second movable part is arranged near the control target member. Can be

[0011] Furthermore, the liquid lever mechanism is, when compared with a mechanical displacement enlarging mechanism using a lever, for example,
There is an advantage that it has almost no higher-order vibration modes due to the non-rigid internal degrees of freedom.

As the liquid in the liquid chamber, it is preferable to use a nonvolatile and stable liquid such as silicon oil, but it is not limited to this. The liquid itself does not need to have a damping property against vibration. Rather, a liquid having a small viscosity and a good fluidity is superior in starting control.

Further, in the vibration control structure according to the third aspect, the elastic member is arranged between the second movable portion and the solid actuator in series with respect to both.

According to the third aspect of the present invention, since the elastic member is disposed in series between the second movable portion at the end of the plurality of displacement magnifying mechanisms and the solid actuator, the elastic member is arranged in series with the solid movable member. It is possible to use an elastic member having a large elastic coefficient and a small displacement (in other words, a hard member) as compared with a case where the elastic member is arranged in a place other than the above. Therefore, the volume of the elastic member can be reduced, and the size of the vibration control device can be reduced.

As the elastic member, any of known materials such as rubber and spring can be used. Specifically, those with little characteristic change due to drift or temperature change (for example,
It is preferable to use a spring unit in which a plurality of small coil springs are arranged in parallel, a unit in which this unit is molded with gel, or a disc spring.

According to a fourth aspect of the present invention, there is provided a vibration control structure, in which a liquid is enclosed and a plurality of small particles which are elastically variable in volume are dispersed, and are in contact with the liquid in the liquid chamber. A displacement expansion mechanism having a first movable portion, a second movable portion in contact with the liquid in the liquid chamber with a smaller contact area than the first movable portion, and And a solid actuator that is disposed on the opposite side to the second movable portion and that can be displaced in a direction of moving the first movable portion of the displacement enlarging mechanism based on a supplied electric signal. And a plurality of vibration control devices are used in combination with one or more members such that action directions due to the displacement of the second movable portion cross each other.

According to the fourth aspect, similarly to the first aspect, since a plurality of vibration control devices are used in combination with one or a plurality of members so that the directions of action intersect each other, a multidimensional vibration control device is used. Vibration control with multiple degrees of freedom becomes possible. In addition, the displacement of the solid actuator can be increased by the liquid lever mechanism, and the small particles in the liquid chamber function as elastic members. As a result, excellent passive vibration isolation performance can be obtained in a high frequency range. Further, since a large number of small particles that are elastically variable in volume are dispersed in the liquid chamber as having the same function as the elastic member of claim 1, it is not necessary to arrange another elastic member outside the liquid chamber. It is possible to obtain a vibration control device that is small and suitable for passive vibration isolation.

Further, in the vibration control structure according to the fifth aspect, a gas chamber in which gas is sealed and whose volume is elastically variable,
A displacement enlarging mechanism having a first movable part in contact with the gas in the gas chamber, and a second movable part in contact with the gas in the gas chamber with a smaller contact area than the first movable part. And a direction in which the first movable portion is arranged on the opposite side to the second movable portion with respect to the first movable portion, and moves the first movable portion of the displacement magnifying mechanism based on a supplied electric signal. A plurality of vibration control devices each including a displaceable solid actuator are used in combination with one or more members such that the action directions due to the displacement of the second movable portion intersect each other. Things.

According to the fifth aspect, similar to the first aspect, since a plurality of vibration control devices are used in combination with one or more members so that the directions of action cross each other, a multi-dimensional device is used. Vibration control with multiple degrees of freedom becomes possible. In addition, the displacement of the solid actuator can be increased by the gas lever mechanism, and the gas chamber functions as an elastic member, which provides excellent active vibration isolation performance in the low frequency range and has a natural frequency higher than before. As a result, excellent passive vibration isolation performance can be obtained in a high frequency range. Further, since the gas in the gas chamber performs the same function as the elastic member of claim 1, it is possible to obtain a compact vibration control device suitable for passive vibration isolation without having to arrange another elastic member outside the gas chamber. Becomes possible.

According to a sixth aspect of the present invention, the vibration control structure further includes a sensor for measuring a distance to the member. According to the sixth aspect, since the distance to each member can be measured by the sensor, the position and orientation (ie, posture) of the member can be accurately controlled by controlling the solid actuator based on the measurement signal. Will be able to do it.

[0021]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Preferred embodiments of the present invention will be described below with reference to the drawings.

FIG. 1 is a sectional view of the vibration control structure according to the first embodiment of the present invention. As shown in FIG. 1, a vibration control structure 1 of the present embodiment controls a vibration of a top plate 5 which is a member to be controlled by a lower assembly 4 in which two vibration control devices 2 and 3 are incorporated. is there.
The two vibration control devices 2 and 3 include an operator 35a described later,
35b; 15 are arranged so that the displacement directions (in the present embodiment, the displacement direction of the operator and the operation direction are the same) are vertical and horizontal, respectively. Therefore, the vibration of the upper surface plate 5 is independently controlled in two directions of the horizontal direction and the vertical direction. Here, the lower assembly 4
Means an aggregate of the lower plate 6, the cylinder case 7, and the cylinder case 8. Vibration control device 2
Are formed inside and near the lower plate 6 and the cylinder case 7. The vibration control device 3 is formed inside and near the cylinder case 8 arranged on the cylinder case 7. Recess 5 provided on lower surface side
a.

The top plate 5 has sensors 10 for measuring its vertical and horizontal vibration accelerations, respectively.
a and 10b are arranged on the extension lines of the displacement directions of the respective actuators of the vibration control devices 2 and 3. A sensor 11a for measuring a vertical separation distance from a bottom surface of the upper plate 5 is disposed on a side surface of the cylinder case 7, and a sensor 11a is disposed on a bottom surface of the upper plate 5 in a horizontal direction with the side surface of the cylinder case 7. A sensor 11b for measuring the separation distance is provided. Detection signals from the sensors 10a and 11a are provided to a controller (both not shown) via a pre-signal processor, and are used to control the piezo actuators 12a and 12b of the vibration control device 2. Similarly, the sensors 10b, 1
1b is supplied to the controller via a pre-signal processor, and the piezo actuator 32 of the vibration controller 3
a, 32b, 32c. Thus, in the present embodiment, the sensors 10a, 10b, 1
Since the vibration control devices 2 and 3 are controlled based on the detection signals from 1a and 11b, the vibration control of the upper surface plate 5 can be accurately performed.

Next, the structure of the vibration control device 3 will be described. In the vibration control device 3, two parallel-arranged piezo actuators 12 including piezo (piezoelectric) elements are provided.
a, 12b, an anti-vibration rubber 13 which is an elastic member, and a liquid lever mechanism 14 which is a displacement enlarging mechanism.
Are arranged in series. The liquid lever mechanism 14 includes a liquid chamber 16 in which the liquid is sealed, a driving plate 17 disposed in contact with the liquid in the liquid chamber 16 and between the liquid chamber 16 and the vibration-proof rubber 13, An actuator 15 is provided so as to be in contact with the liquid in the liquid chamber 16 and on the opposite side of the liquid chamber 16 from the drive plate 17. Liquid chamber 16
The liquid inside is sealed by an elastic seal member 20 provided along the operator 15 on the operator 15 side,
The drive plate 17 is sealed by a vibration-proof rubber 13.

Piezo actuators 12 arranged in parallel
The periphery of each of a and 12b is covered with an elastomer 18 and molded. Therefore, the piezo actuator 12
Since the piezo actuators 12a, 12b, and 2c can be shielded from external air, the piezo actuators 12a, 12b, and 2c are not affected by external humidity.
The effect that the life of a and 12b can be extended can be obtained. Note that another elastic member such as a gel may be used instead of the elastomer 18. In FIG. 1, two piezo actuators 12a are formed by an elastomer 18,
Although it is drawn as if the gap of 12b is filled,
The elastomer 18 may be separated into a portion covering the piezo actuator 12a and a portion covering the piezo actuator 12b.

Anti-vibration rubber 13 and piezo actuator 12
A rigid plate 19 is disposed between the rigid plate 19a and 12b.
Thus, the vibration-proof rubber 3 and the piezo actuator 12a,
By disposing the rigid plate 19 between the piezo actuators 12a and 12b, the displacement of the locally arranged piezo actuators 12a and 12b is efficiently and uniformly applied to the liquid in the liquid chamber 16.

The contact area with the liquid in the liquid chamber 16 is smaller for the operator 15 than for the drive plate 17. The end of the operator 15 opposite to the liquid chamber 16 is exposed to the outside through a hole provided in the cylinder case 18. Thus, the piezo actuators 12a, 12b,
Since the vibration isolating rubber 13 and the liquid lever mechanism 14 are housed in the cylinder case 8, the vibration control device 3 is small and can contribute to space saving.

The piezo actuators 12a and 12b
Under the control of the controller described above, a minute vibration is caused based on an electric signal supplied from a driver (not shown). The direction of the vibration is the direction in which the piezo actuators 12a and 12b, the vibration isolating rubber 13, and the liquid lever mechanism 14 are arranged in series (that is, the horizontal direction).

A laminated elastic body 22 is arranged in series between the operator 15 and one side surface of the recess 5a of the upper plate 5. The laminated elastic body 22 is a non-interfering elastic member in which a steel plate (or a resin plate or both of them) and an elastomer such as a vibration-proof rubber are alternately laminated. Rigid plates 23a and 23b are arranged at both ends of the laminated elastic body 22 in the series arrangement direction. Also, between the rigid plate 23b and the cylinder case 8, the vibration isolating rubber 2
5 and a rigid plate 23c.

A laminated elastic body 26 is provided between the cylinder case 8 and the other opposite side surface of the recess 5a of the upper plate 5.
Are arranged in series. Like the laminated elastic body 22, the laminated elastic body 26 is a non-interacting elastic member in which a steel plate (or a resin plate or both of them) and an elastomer such as a vibration-proof rubber are alternately laminated. Rigid plates 27a and 27b are arranged at both ends of the laminated elastic body 26 in the series arrangement direction.

The length from the rigid plate 23a to the rigid plate 27b is slightly longer than the distance between the opposing side surfaces of the concave portion 5a, and therefore, when the vibration control device 3 is inserted into the concave portion 5a. , An appropriate preload is applied to the vibration control device 3.

As described above, in the present embodiment, the operator 1
5 on the opposite side of the liquid chamber 16,
2a, 12b and the laminated elastic body 22 arranged in series with the liquid lever mechanism 14, the operator 1
When a shearing force in a direction intersecting with the displacement direction of 5 (that is, the direction of serial arrangement) is applied from the outside, the laminated elastic body 22 functions as a cushioning member for the shearing force so that a large shearing force is not applied to the actuator 15. Thus, the breakage of the actuator 15 is effectively prevented. In particular, in the case of the present embodiment, the vibration control device 2 generates a vertical vibration, which is loaded on the actuator 15, so that the role of the laminated elastic body 22 is very important. . Further, in the present embodiment, the cylinder case 8 is arranged in series with the two laminated elastic bodies 22 and 26 so as to be sandwiched between the two elastic bodies 22 and 26.
5 can be more effectively prevented. The laminated elastic bodies 22 and 26 may be ordinary elastic bodies that are not laminated, but the non-interacting elastic member laminated as in the present embodiment functions well as a cushioning member for shearing force. Preferred for.

In this embodiment, the operator 15
The anti-vibration rubbers 25 arranged in parallel with each other have a role of sharing the force applied from the outside with the operator 15 and reducing the external force applied to the operator 15. Therefore, more accurate vibration control can be performed, and the control efficiency increases as the vibration damping by the vibration isolation rubber 25 decreases.

The operation of the vibration control device 3 configured as described above will be described. In the vibration control device 3, when vibration is generated by driving the piezo actuators 12a and 12b, the vibration is
7 given. The driving plate 17 is a piezo actuator 1
Although the displacement is almost the same as the displacement amount of 2a, 12b, the displacement of the operator 15 is enlarged by the ratio of the two because the contact area of the operator 15 with the liquid is smaller than that of the drive plate 17. . That is, if the liquid contact area ratio between the operator 15 and the drive plate 17 is 1:10, the displacement ratio between the operator 15 and the drive plate 17 is 10: 1. As described above, according to the present embodiment, since the liquid lever mechanism 14 is provided, the displacement of the piezo actuators 12a and 12b can be greatly expanded and taken out. Therefore, the number of stacked piezo elements in the piezo actuators 12a and 12b can be reduced as compared with the conventional case, and the manufacturing cost can be greatly reduced.

Further, the vibration control device 3 using the liquid lever mechanism as the displacement enlarging mechanism has a relatively simple structure and is non-comparable to those using a mechanical displacement enlarging mechanism using a lever or the like. This is also preferable in that it hardly has a higher-order vibration mode in the rigid internal degree of freedom.

Next, the structure of the vibration control device 2 will be described. Also in the vibration control device 2, the piezo actuator, the vibration isolating rubber, and the liquid lever mechanism are arranged in series similarly to the vibration control device 3 described above. However, in the vibration control device 3, unlike the vibration control device 2, two operators are provided in the liquid lever mechanism, and the operation direction is reversed by 180 ° with respect to the arrangement direction of the piezo actuators. Specifically, in the vibration control device 2, three piezo actuators 32a, 32b, and 32c arranged in parallel including a piezo element, an anti-vibration rubber 33 as an elastic member, and a liquid lever mechanism 34 as a displacement magnifying mechanism are provided. And are arranged in series. Among these, the piezo actuators 32a, 32b, 32c are housed in the cylinder case 7, but the vibration isolating rubber 33 and the liquid lever mechanism 34
Is accommodated in a lower plate 6 connected below the cylinder case 7 so as to be disposed substantially at the center, except for the distal ends of the actuators 35a and 35b.

The liquid lever mechanism 34 includes a liquid chamber 36 in which a liquid is sealed, and a driving plate disposed between the liquid chamber 36 and the vibration-proof rubber 33 so as to be in contact with the liquid in the liquid chamber 36. 37, and two actuators 35a, 35b arranged in contact with the liquid in the liquid chamber 36 and on the opposite side of the liquid chamber 36 from the drive plate 37. Operator 3
5a and 35b are arranged upward at both ends of the liquid chamber 36 so as to protrude from above the liquid chamber 36 in the vertical direction, respectively. The liquid in the liquid chamber 36 is filled with the operator 35a, 35
The drive plate 3 is sealed on the b side by an elastic seal member 40 provided along each of the operators 35a and 35b.
On the 7 side, it is sealed by a vibration-proof rubber 33.

Piezo actuators 32 arranged in parallel
A, 32b, and 32c are covered and molded with an elastomer 38, similarly to the piezo actuators 12a and 12b of the vibration control device 3. The piezo actuators 32a, 32b, 32c vibrate minutely in the vertical direction based on an electric signal supplied from a driver (not shown) under the control of the controller described above. Also, anti-vibration rubber 3
A rigid plate 39 is disposed between the piezoelectric actuator 3 and the piezo actuators 32a, 32b, and 32c, and the displacement of the locally disposed piezo actuators 32a, 32b, and 32c can be efficiently performed with respect to the liquid in the liquid chamber 36. I try to give it evenly.

The contact area with the liquid in the liquid chamber 36 is smaller for the actuators 35 a and 35 b than for the drive plate 37. The ends of the actuators 35a and 35b opposite to the liquid chamber 36 project from the lower plate 6 and face the direction of the bottom surface of the upper plate 5. Like the vibration control device 3, the vibration control device 2 also has the piezo actuators 32a, 32b,
32c, the anti-vibration rubber 33 and the liquid lever mechanism 34 are housed in the cylinder case 7 and the lower plate 6,
It is small and can contribute to space saving.

A laminated elastic body 42 is arranged in series between the actuators 35 a and 35 b and the bottom surface of the upper plate 5. The laminated elastic body 42 is a non-interference elastic member in which a steel plate (or a resin plate or both of them) and an elastomer such as a vibration-proof rubber are alternately laminated. Rigid plates 43a and 43b are arranged at both ends of the laminated elastic body 42 in the series arrangement direction. Further, between the rigid plate 43b and the lower surface plate 6, an anti-vibration rubber 45 and a rigid plate 43c are arranged in parallel with the actuators 35a and 35b.

The laminated elastic body 42 and the vibration isolating rubber 45 disposed between the upper plate 5 and the lower plate 6 are slightly contracted by the weight of the upper plate 5, and the vibration control device is used due to its elastic return force. 2 has an appropriate preload.

The operation of the vibration control device 2 configured as described above will be described. In the vibration control device 2, when vibration is generated by driving the piezo actuators 32 a, 32 b, 32 c, the vibration is given to the drive plate 37 via the vibration-proof rubber 33. The driving plate 37 is displaced by substantially the same amount as the displacement of the piezo actuators 32a, 32b, 32c, but since the contact area of the actuators 35a, 35b with the liquid is smaller than that of the driving plate 37, the ratio of the two is reduced. Only the displacement of the actuators 35a and 35b is enlarged. As described above, since the liquid lever mechanism 34 is provided, the displacement of the piezo actuators 32a, 32b, and 32c can be greatly expanded and taken out.

In the vibration control structure 1 of the present embodiment configured as described above, the vibration control device 2 applies a vertical force to the upper surface plate 5, and the vibration control device 3 applies the force to the upper surface plate 5. A horizontal force is applied to it. That is, the two vibration control devices 2 and 3 are used in combination with the upper surface plate 5 such that the displacement directions of the actuators 35a, 35b; 15 are orthogonal to each other. Therefore, it is possible to control the vibration of the upper surface plate 5 with two dimensions and two degrees of freedom.

Further, in the vibration control structure 1 of the present embodiment, the vibration control devices 2, 3, and the laminated elastic bodies 22, 26, 42 and the vibration isolation rubbers 13, 33 arranged in series in each And 3, the respective natural frequencies are lower than in the prior art, and excellent passive vibration isolation performance in a high frequency range can be obtained. Therefore, according to the vibration control structure 1 of the present embodiment, while maintaining the advantage of the piezo actuators 12a and 12b that a high-speed response is possible with a small volume, an excellent active vibration isolation performance with a large displacement in a low frequency range is obtained. A vibration control system that can be demonstrated and can exhibit excellent passive vibration isolation performance in a high frequency range, which cannot be realized by a conventional vibration control device, is configured at a relatively low cost.

The same effect can be expected when only one of the laminated elastic members 22 and 26 and the vibration isolating rubber 13 is present in the vibration control device 3. Laminated elastic body 42 and anti-vibration rubber 3
The same effect can be expected when only one of the three exists. Further, the vibration control devices 2, 3
In this case, the same effect can be expected even when an elastic member such as a laminated elastic body or a vibration-proof rubber is disposed in the liquid chambers 16 and 36.

Further, in the present embodiment, the vibration isolating rubber 13,
33 is disposed between the drive plates 17 and 37 and the piezo actuator in series with each other.
It is possible to use anti-vibration rubbers 13 and 33 having a large elastic coefficient and a small displacement as compared with the case where 3 and 33 are arranged in other places. Therefore, the volume of the vibration isolation rubbers 13 and 33 can be reduced, and the vibration control devices 2 and 3 can be reduced in size, and the vibration control structure 1 can be reduced in size.

In this embodiment, since the vibration control device 2 employs the liquid lever mechanism 34 in which the force is transmitted by the liquid, the location and direction of the applied force are determined by the piezo actuators 32a, 32b, 32c. Can be changed with a high degree of freedom regardless of the arrangement direction. In the present embodiment, taking advantage of this advantage, the piezo actuators 32a, 32b are provided in the space provided between the upper surface plate 5 and the lower surface plate 6.
32b and 32c are arranged to make the vibration control structure 1 low in bulk.

Next, a second embodiment of the present invention will be described with reference to FIG. In this embodiment, the same reference numerals are used for members equivalent to those in the first embodiment, and the description is omitted.

As shown in FIG. 2, the vibration control device 51 according to the present embodiment is configured such that a single control target member 53 having a rectangular cross section disposed in a rectangular frame 52 is provided with the first control member 53 shown in FIG. 1
The two vibration control devices 54 and 55 similar to the vibration control device 3 of the embodiment are combined and mounted horizontally so that the displacement directions of the actuators are orthogonal to each other, and further, the control target member 53 and the frame 52 And the laminated elastic bodies 56 and 57 are arranged in regions facing the two vibration control devices 54 and 55 with the control target member 53 interposed therebetween. The laminated elastic bodies 56 and 57 are oriented such that the laminating direction coincides with the displacement direction of the operator of the vibration control devices 54 and 55.

The vibration control devices 54 and 55 include a piezo actuator 12 including a piezo (piezoelectric) element, an anti-vibration rubber 13 as an elastic member, and a liquid lever mechanism 14 as a displacement enlarging mechanism in a cylinder case 8. They are arranged in series. The liquid lever mechanism 14 includes a liquid chamber 16 in which the liquid is sealed, a driving plate 17 disposed in contact with the liquid in the liquid chamber 16 and between the liquid chamber 16 and the vibration-proof rubber 13, An actuator 15 is provided so as to be in contact with the liquid in the liquid chamber 16 and on the opposite side of the liquid chamber 16 from the drive plate 17. Further, the contact area with the liquid in the liquid chamber 16 is smaller for the operator 15 than for the drive plate 17. The end of the operator 15 opposite to the liquid chamber 16 is exposed to the outside through a hole provided in the cylinder case 8.

The direction of the minute vibration of the piezo actuator 12 is parallel to the direction in which the piezo actuator 12, the vibration isolating rubber 13 and the liquid lever mechanism 14 are arranged in series. Further, thin rigid plates 19a and 19b are disposed at both ends of the vibration isolating rubber 13 in the direction of the serial arrangement. As described above, the rigid plates 19 are provided on both sides of the vibration isolating rubber 13.
By arranging a and 19b, the displacement of the locally arranged piezo actuator 12 is efficiently given to the liquid in the liquid chamber 16.

Elastic seal members 20a and 20b are provided between the side surfaces of the actuator 15 and the drive plate 17 and the cylinder case 8 to fill the gap and prevent the liquid in the liquid chamber 16 from leaking. Each is arranged.

The space opposite to the liquid chamber 16 with respect to the driving plate 17 and in which the piezo actuator 12, the vibration isolating rubber 13 and the rigid plates 19a and 19b are not disposed is filled with air. Can be adjusted by a device such as a valve or a compressor (not shown). That is, this space is adjustable in air pressure and functions as an air spring arranged in parallel with the piezo actuator 12. Therefore, by adjusting the air pressure in the space,
By controlling the load applied to the piezo actuator 12, the piezo actuator 12 can be operated optimally.

The control target member 53 and the vibration control device 5
As in the first embodiment, a laminated elastic body 22 in series with the liquid lever mechanism 14 and an anti-vibration rubber 25 in parallel with the operator 15 are arranged between the actuator 4 and 55. Rigid plates 23a, 23b, and 23c are provided at these ends, respectively.

As described above, in the present embodiment, since the control force is applied from the two actuators 15 displaced in two directions intersecting one control target member 53, the control force is applied in two degrees of freedom in the horizontal plane. Vibration control is possible. Further, by further adding and combining a vibration control device that is displaced in the intersecting direction, it is possible to obtain a multi-dimensional multi-degree of freedom (for example, three-dimensional
(Degree of freedom).

When the vibration control mechanism 51 arranged as shown in FIG. 2 is driven, the control loop of the piezo actuator is formed in an independent loop for each displacement direction of the actuator 15, that is, for each of the two vibration control devices 54 and 55. And these two
Based on the vibration signals of the two independent control loops, a control signal is generated in a common coordinate system by coordinate conversion in one controller, and further, the control signal in the common coordinate system is converted into a local coordinate system of each operator 15. It is preferable to perform the control of adding to the individual operation signals from the viewpoint of performing accurate control.

Further, in the vibration control structure 51 of the present embodiment, similarly to the above-described first embodiment, the laminated elastic body 22 and the vibration isolating rubber 13 which are arranged in series in each of the vibration control devices 54 and 55 are arranged. As a result, the natural frequencies of the vibration control devices 54 and 55 are lower than in the prior art, and excellent passive vibration isolation performance in a high frequency range can be obtained. Therefore, according to the vibration control structure 51 of the present embodiment, the piezo actuator 1 can respond at high speed with a small volume.
The conventional vibration that can exhibit excellent active vibration isolation performance with large displacement in the low frequency range while retaining the benefits of 2 and can also exhibit excellent passive vibration isolation performance in the high frequency range A vibration control system that cannot be realized by the control device is configured at a relatively low cost. The same effect can be expected when only one of the laminated elastic body 22 and the vibration-proof rubber 13 is present in the vibration control devices 54 and 55. In the vibration control devices 54 and 55, the same effect can be expected when an elastic member such as a laminated elastic body or a vibration-proof rubber is disposed in the liquid chamber 16.

In this embodiment, since the vibration isolating rubber 13 is arranged between the driving plate 17 and the piezo actuator 12 in series with each other, the vibration isolating rubber 13 is arranged at other places. It is possible to use the vibration isolating rubber 13 having a large elastic coefficient and a small displacement as compared with the case where it is performed.
Therefore, the volume of the vibration isolation rubber 13 can be reduced, and the size of the vibration control devices 54 and 55 and the size of the vibration control mechanism 51 can be reduced.

Next, another embodiment of a vibration control device which can be used in place of the vibration control devices 2, 3, 54, 55 used in the above-described first and second embodiments is shown in FIG. It will be described with reference to FIG.

FIG. 3 is a cross-sectional view of one vibration control device that can be used in place of the vibration control devices 2, 3, 54, and 55 used in the first and second embodiments described above. The vibration control device 61 includes five piezo actuators 12a, 12
b, 12c, 12d, and 12e and the liquid lever mechanism 64 are arranged in series. The liquid lever mechanism 64 includes a liquid chamber 66 in which a large number of small particles that are elastically variable in volume are dispersed in the liquid therein, and the liquid chamber 66 is brought into contact with the liquid in the liquid chamber 66 and the piezo actuators 12a, 12
b, 12c, 12d, and 12e, and an actuator 65 arranged such that one end thereof contacts the liquid in the liquid chamber 66 and the other end projects from the cylinder case 62. And As the large number of small particles that are elastically variable in volume, for example, a resin or an elastomer powder in which gas is sealed may be used.

The actuator 65, the drive plate 67a and the piezo actuators 12d and 12e are connected to the drive plate 67b and the piezo actuators 12a and 12a with the liquid chamber 66 interposed therebetween.
b, 12c. The driving plate 67a is driven by the piezo actuators 12d and 12e,
7b is driven by piezo actuators 12a, 12b, 12c.

An elastic seal member 68a is arranged between the side surface of the actuator 65 and the cylinder case 62 so as to fill the gap and prevent the liquid in the liquid chamber 66 from leaking. Further, similar elastic seal members 68b are disposed between the side surfaces of the drive plates 67a and 67b and the cylinder case 62, respectively.

According to the present embodiment, since a large number of small particles dispersed in the liquid chamber 66 function similarly to the elastic member,
As with the vibration control device according to the above-described embodiment, the vibration isolating rubber 1
Even if an elastic member such as the elastic member 3 or the laminated elastic body 26 is not disposed outside the liquid chamber, the same effect as in the above-described embodiment can be obtained. Therefore, it is possible to make the vibration control structure more compact while maintaining the above-mentioned effects.

In this embodiment, since the driving plates are disposed above and below the liquid chamber 66, the cylinder case 62
And the acting force generated by the piezo actuators 12a to 12e can be applied to the actuator 65 at a higher rate than the vibration control device used in the above-described embodiment. , The piezoelectric actuators 12a to 12e can be operated with high efficiency. Also, by using a large number of piezo actuators 12a to 12e facing each other as in the present embodiment, there is an advantage that a relatively large number of piezo actuators can be arranged in a narrow plane area to obtain a large acting force. is there.

Next, another embodiment of a vibration control device which can be used in place of the vibration control devices 2, 3, 54, 55 used in the first and second embodiments described above will be described with reference to FIG. This will be described with reference to FIG. In addition, about the member equivalent to the vibration control apparatus of FIG. 3, the same code | symbol is used and the description is abbreviate | omitted.

FIG. 4 is a cross-sectional view of one vibration control device that can be used in place of the vibration control devices 2, 3, 54, and 55 used in the above-described first and second embodiments. The vibration control device 71 shown in FIG.
4 is different from that shown in FIG. 3 in that a gas lever mechanism 74 is used instead of 4. Gas lever mechanism 7
4 is provided with a gas chamber 76 whose height is much smaller than that of the liquid chamber 66 and whose distance between the upper and lower drive plates 67a and 67b is short.

Since the gas sealed in the gas chamber 76 of the gas lever mechanism 74 thus configured functions as an elastic member, the present embodiment can provide the same effect as that of FIG. It is possible. Further, since the gas lever mechanism 74 is smaller than the liquid lever mechanism used in the above-described embodiment and does not need to further arrange an elastic member outside thereof, it is possible to obtain a very compact vibration control device. It becomes possible.

The preferred embodiment of the present invention has been described above. However, the present invention is not limited to the above-described embodiment, and various design changes can be made within the scope of the claims. It is. For example, in the above embodiment, two vibration control devices are used in combination for one control target member, but three or more vibration control devices are used in combination for one control target member. In this case, a higher-dimensional high-degree-of-freedom control may be performed.

Also, the displacement direction of the operator and the displacement direction of the control object need not be the same as in the above-described embodiment, and the displacement direction of the operator can be controlled by using a known action direction conversion mechanism. For example, 90 ° may be formed with the displacement direction of the object. As the solid actuator, a known actuator such as a giant magnetostrictive actuator may be used instead of the piezo actuator.

[0070]

As described above, according to the present invention,
Since a plurality of vibration control devices in which a displacement enlarging mechanism, a solid actuator, and an elastic member are respectively arranged in series are used in combination with one or a plurality of members so that the action directions intersect each other, many Vibration control with multiple degrees of freedom is possible. In addition, the natural frequency of the vibration control device is lower than that of the conventional vibration control device due to the elastic members arranged in series, and excellent passive vibration isolation performance in a high frequency range can be obtained.

[Brief description of the drawings]

FIG. 1 is a sectional view of a vibration control device according to a first embodiment of the present invention.

FIG. 2 is a cross-sectional view of a vibration control device according to a second embodiment of the present invention.

FIG. 3 is a cross-sectional view of one vibration control device that can be used in place of the vibration control device used in the first and second embodiments.

FIG. 4 is a sectional view of another vibration control device that can be used in place of the vibration control device used in the first and second embodiments.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 Vibration control structure 2, 3 Vibration control device 4 Lower assembly 5 Top plate 6 Lower plate 7, 8 Cylinder case 10a, 10b, 11a, 11b Sensor 12a, 12b, 32a, 32b, 32c Piezo actuator 13, 33 Vibration-proof rubber 14 , 34 Liquid lever mechanism 15, 35a, 35b Actuator 16, 36 Liquid chamber 17, 37 Drive plate 18 Elastomer 19 Rigid plate 20, 40 Elastic seal member 22, 26, 42 Laminated elastic body 23a, 23b Rigid plate 18, 38 Elastomer

Claims (6)

[Claims] A displacement enlargement mechanism having first and second movable parts, wherein a displacement inputted to the first movable part is enlarged and outputted from the second movable part; It is arranged on the opposite side of the first movable part from the second movable part, and is displaceable in a direction for moving the first movable part of the displacement enlarging mechanism based on the supplied electric signal. A plurality of vibration control devices each including a solid actuator, and an elastic member disposed in series with the displacement magnifying mechanism and the solid actuator, such that action directions due to displacement of the second movable portion intersect with each other. A vibration control structure characterized by being used in combination with one or more members. 2. The liquid displacement enlarging mechanism, wherein the displacement enlarging mechanism has a liquid chamber in which a liquid is sealed, wherein the first movable portion is in contact with the liquid in the liquid chamber, and 2. The vibration control structure according to claim 1, wherein the second movable part is in contact with the liquid in the liquid chamber with a smaller contact area than the first movable part. 3. 3. The vibration control structure according to claim 1, wherein the elastic member is arranged between the second movable part and the solid actuator in series with respect to both. . 4. A liquid chamber in which a large number of small particles having a liquid enclosed therein and elastically variable in volume are dispersed.
A displacement enlarging mechanism having a first movable part in contact with the liquid in the liquid chamber, and a second movable part in contact with the liquid in the liquid chamber with a smaller contact area than the first movable part. And a direction in which the first movable portion is arranged on the opposite side to the second movable portion with respect to the first movable portion, and moves the first movable portion of the displacement magnifying mechanism based on a supplied electric signal. And a plurality of vibration control devices each including a solid actuator that can be displaced to one or more members so that the action directions due to the displacement of the second movable portion intersect each other. A vibration control structure. 5. A gas chamber in which a gas is sealed and whose volume is elastically variable, a first movable portion in contact with the gas in the gas chamber, and smaller than the first movable portion. A displacement enlarging mechanism having a second movable portion that is in contact with the gas in the gas chamber at a contact area, and is disposed on the opposite side of the first movable portion from the second movable portion, A plurality of vibration control devices each including a solid actuator that can be displaced in a direction in which the first movable portion of the displacement enlarging mechanism is moved based on the supplied electric signal; A vibration control structure characterized by being used in combination with one or a plurality of members such that action directions cross each other. 6. The apparatus according to claim 1, further comprising a sensor for measuring a distance to said member.
The vibration control structure according to any one of the above.