JP2002035696A - Vibration controlling device and driving method thereof - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a vibration controlling device and a driving method thereof which enables generating a relatively large displacement. SOLUTION: By arranging a piezoactuator 2 and first and second liquid lever mechanisms 4, 8 in series, output displacement of the piezoactuator 2 is applied to a driving plate 7 of the first liquid lever mechanism 4 and is enlarged and taken out via a coupler 5 and, further, the taken-out displacement is applied to a driving plate 11 of the second liquid lever mechanism 8 and is enlarged and taken out via an actuator 9. Thereby, the vibration control with a large output displacement can be performed.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an active vibration isolator for actively isolating precision equipment from environmental vibrations such as a floor, a microvibration vibrating apparatus for simulating a microvibration environment and measuring the sensitivity of microvibration of equipment. The present invention relates to a vibration control device having a solid actuator and a method of driving the vibration control device, which can be used for a vibration control device.

[0002]

2. Description of the Related Art In recent years, solid-state actuators such as piezoelectric (piezo) elements and magnetostrictive elements have been used in various fields such as vibration control such as vibration isolation and vibration isolation, and vibration oscillation. However, these solid actuators
In many cases, a predetermined purpose cannot be achieved because the displacement by itself is relatively small. Therefore, it has been proposed to use a vibration control device in which a displacement enlarging mechanism filled with liquid and a solid actuator are combined between a large-diameter piston and a small-diameter piston (for example, see Japanese Patent Application Laid-Open No. 7-301354). By using a vibration control device using one such displacement enlargement mechanism and one solid actuator, the displacement of the solid actuator is enlarged according to the area ratio between the large-diameter piston and the small-diameter piston, and output from the small-diameter piston side. Is possible.

[0003]

However, the vibration control device provided with the displacement enlarging mechanism and the solid actuator as described above has a problem that the displacement of the solid actuator itself is small and the area difference between the large-diameter piston and the small-diameter piston is too small. Large output displacements cannot be generated due to the difficulty of making them large. for that reason,
The above-described vibration control device cannot be used for applications requiring particularly large displacement, such as position control and attitude control.

Further, in the above-described vibration control device, when the controlled member is relatively soft (especially when the rigidity of the support system supporting the actuator and the controlled member is not sufficient), the displacement is controlled. In some cases, it is absorbed by the deformation of the member, and it is not possible to perform appropriate control on the control target member.

In view of such a problem, a main object of the present invention is to provide a vibration control device capable of generating a relatively large output displacement, and a driving method suitable for the vibration control device.

[0006]

According to a first aspect of the present invention, there is provided a vibration control apparatus, wherein a displacement inputted to a first movable portion is enlarged and outputted from a second movable portion. A plurality of displacement magnifying mechanisms arranged in series with each other, each having the first and second movable parts, and a first end located at an end of the plurality of displacement magnifying mechanisms arranged in series.
Are disposed on the opposite side of the remaining first and second movable parts with respect to the movable part of the first and second movable parts. And a solid actuator that can be displaced in a direction in which the movable portion is moved.

According to the first aspect, since the plurality of displacement magnifying mechanisms are arranged in series, the displacement is magnified to a predetermined multiple in each displacement magnifying mechanism, and a relatively small displacement caused by the solid actuator is obtained. Is input to the first movable portion of the first stage displacement enlarging mechanism, a very large displacement is output from the second movable portion of the last stage displacement enlarging mechanism. Therefore, it can be used for applications requiring particularly large displacement, such as position control and attitude control, and performs appropriate control on the control target member even when the control target member is relatively soft. As a result, the use of the vibration control device using the solid actuator can be greatly expanded.

The vibration control device according to a second aspect of the present invention is arranged between the second movable portion at the extreme end of the plurality of displacement magnifying mechanisms and the solid actuator in series with each other. An inner elastic member is further provided.

According to the second aspect, the natural frequency of the vibration control device is lower than that of the conventional vibration control device because of the inner elastic members arranged in series, and excellent passive vibration isolation performance in a high frequency range can be obtained. For example, the natural frequency of the vibration control device having no inner elastic member is 10 to 20H.
If it is about z, the natural frequency of the vibration control device in which the inner elastic member is added thereto can be reduced to about 1 to 10 Hz. In other words, the vibration control device according to the second aspect is suitable for a passive vibration isolation system that can produce a soft (ie, low natural frequency) support system regardless of the magnitude of the displacement (stroke) of the inner elastic member. Characteristics can be obtained.

According to the second aspect of the present invention, the inner elastic member is arranged in series between the second movable portion at the extreme end of the plurality of displacement magnifying mechanisms and the solid actuator in series with each other. It is possible to use an inner elastic member having a larger elastic coefficient and a smaller displacement (in other words, harder) as compared with the case where the elastic member is arranged in other places. Therefore, the volume of the inner elastic member can be reduced, and the size of the vibration control device can be reduced.

As the inner elastic member, any of known materials such as rubber and spring can be used. In particular,
It is preferable to use a spring with little change in characteristics due to drift or temperature change (for example, a spring unit in which a plurality of small coil springs are arranged in parallel, a unit in which this unit is molded with gel, or a disc spring).

Further, according to a third aspect of the present invention, in the vibration control device, the displacement enlarging mechanism is a liquid displacement enlarging mechanism having a liquid chamber in which a liquid is sealed, and the first movable portion is provided in the liquid chamber. It is in contact with a liquid, and the second movable part is in contact with the liquid in the liquid chamber with a smaller contact area than the first movable part.

According to a third aspect of the present invention, in the vibration control device, the liquid displacement enlarging mechanism has a liquid chamber in which liquid is sealed, a first movable portion, and a contact area with the liquid smaller than that of the first movable portion. It has a second movable portion, and a solid actuator is arranged on the first movable portion side (hereinafter, a mechanism having such a structure is referred to as a “liquid lever mechanism” in this specification). There is).

In the liquid lever mechanism, since the force is transmitted by the liquid, there is an advantage that the location and direction of the force can be changed with a high degree of freedom. If this is used, it is not possible to realize a vibration control device in which the solid actuator is arranged in a place where maintenance is easy, and the second movable section at the final stage is arranged near the member to be controlled. The effect is obtained.

[0015] Furthermore, the liquid lever mechanism is, when compared with a mechanical displacement enlarging mechanism using a lever, for example,
There is an advantage that it has almost no higher-order vibration modes due to the non-rigid internal degrees of freedom.

As the liquid inside the liquid chamber, it is preferable to use a nonvolatile and stable liquid such as silicon oil, but it is not limited to this. The liquid itself does not need to have a damping property against vibration. Rather, a liquid having a small viscosity and a good fluidity is superior in starting control.

According to a fourth aspect of the present invention, the vibration control apparatus further includes a mechanism for adjusting a pressure in the fluid chamber. For example, means for changing the position of the second movable portion by inserting a piston from the outside into the liquid chamber is simple. In a conventional vibration control device equipped with a solid actuator, it is necessary to strictly adjust the position of the solid actuator in order to effectively use even a small stroke of the solid actuator, and the adjustment is difficult, for example, using a jack. Was something. According to the present invention, it is possible to easily adjust the preload level given to the solid actuator by changing the pressure in the liquid chamber.

According to a fifth aspect of the present invention, the vibration control device is configured to be able to control a load applied to the solid actuator. The vibration control device according to claim 6 further includes an inner parallel elastic member arranged in parallel with the solid actuator.

According to the fifth and sixth aspects, the solid actuator can be operated optimally by controlling the load applied to the solid actuator. That is, if all of the supporting load is shared by the solid actuator, the solid actuator cannot be operated at the optimum point of its operation. Therefore, in order to use each solid actuator at its optimum point as in claim 5, it is preferable to adjust the load. In claim 6, in order to realize this, an inner parallel elastic member is provided in parallel with the solid actuator. Are located.

According to a seventh aspect of the present invention, the vibration control apparatus further includes a covering member for covering the solid actuator. Such a structure can be realized by molding the solid actuator with an elastic member or the like. In addition, by molding the solid actuator with the inner parallel elastic member, the solid actuator can be shielded from the influence of external humidity, and the life of the solid actuator can be extended.

In the vibration control device according to the present invention, a liquid chamber in which a liquid is sealed and a large number of small particles which are elastically variable in volume are dispersed, and is in contact with the liquid in the liquid chamber. A plurality of displacement enlarging mechanisms arranged in series, each having a first movable portion and a second movable portion in contact with the liquid in the liquid chamber with a smaller contact area than the first movable portion. And a plurality of displacement enlarging mechanisms arranged in series, which are arranged on the opposite side to the remaining first and second movable parts with respect to the first movable part located at the end of the plurality of displacement enlarging mechanisms. A solid actuator that can be displaced in a direction in which the first movable portions at the end portions of the plurality of displacement enlarging mechanisms are moved based on the received electric signals.

According to the eighth aspect, similarly to the first aspect, since the plurality of displacement magnifying mechanisms are arranged in series, the displacement is magnified to a predetermined multiple in each displacement magnifying mechanism, and the position control is performed. It can be used for applications that require particularly large displacements, such as robot and attitude control, and can perform appropriate control on the control target member even when the control target member is relatively soft. Thus, the use of the vibration control device using the solid actuator can be greatly expanded.

Further, as in the case of the third aspect, the displacement of the solid actuator can be expanded by the liquid lever mechanism, and excellent active vibration isolation performance can be obtained in a low frequency range, and the natural frequency is lower than that of the prior art. As a result, excellent passive vibration isolation performance can be obtained in a high frequency range. Further, since a large number of small particles that are elastically variable in volume are dispersed in the liquid chamber as having the same function as the inner elastic member of claim 2, it is not necessary to arrange another elastic member outside the liquid chamber. It is possible to obtain a vibration control device that is small and suitable for passive vibration isolation.

In the vibration control device according to the ninth aspect, a gas chamber in which a gas is sealed and whose volume is elastically variable,
A first movable part in contact with the gas in the gas chamber, and a second movable part in contact with the gas in the gas chamber with a smaller contact area than the first movable part. A plurality of displacement enlarging mechanisms arranged in series, and the first and second movable portions remaining with respect to the first movable portion at the extreme end of the plurality of displacement enlarging mechanisms arranged in series; Is disposed on the opposite side, and includes a solid actuator that can be displaced in a direction in which the first movable portions at the extreme ends of the plurality of displacement enlarging mechanisms are moved based on the supplied electric signal. .

According to the ninth aspect, similarly to the first aspect, since the plurality of displacement magnifying mechanisms are arranged in series, the displacement is magnified to a predetermined multiple in each displacement magnifying mechanism, and the position control is performed. It can be used for applications that require particularly large displacements, such as robot and attitude control, and can perform appropriate control on the control target member even when the control target member is relatively soft. Thus, the use of the vibration control device using the solid actuator can be greatly expanded.

Further, as in the case of the third aspect, the displacement of the solid actuator can be increased by the gas lever mechanism, so that excellent active vibration isolation performance can be obtained in a low frequency range and the natural frequency is lower than in the past. As a result, excellent passive vibration isolation performance can be obtained in a high frequency range. Further, since the gas in the gas chamber performs the same function as the inner elastic member of the second aspect, it is possible to obtain a small-sized vibration control device suitable for passive vibration isolation without having to arrange another elastic member outside the gas chamber. It becomes possible.

According to a tenth aspect of the present invention, the periphery of the first movable portion and the periphery of the second movable portion are each sealed by an elastic seal member. For the liquid lever mechanism and the gas lever mechanism, it is important to reliably seal the first and second movable portions of the liquid chamber or the gas chamber so that there is no leakage of liquid or gas.

[0028] The vibration control device according to the eleventh aspect of the present invention is the vibration control device according to the first aspect of the invention, wherein:
And a cushioning elastic member disposed on the side opposite to the remaining first and second movable parts with respect to the movable part. According to this, when a shearing force in a direction intersecting with the moving direction of the second movable portion at the end is applied from the outside, the cushioning elastic member becomes a cushioning member of the shearing force (in other words,
The second to function as a member for releasing the shear force)
Of the movable part can be prevented.

According to a twelfth aspect of the present invention, in the vibration control apparatus, the cushioning elastic member is arranged in series and in parallel with the second movable portion at the end. In the vibration control device according to the twelfth aspect, since the shock-absorbing elastic member is also arranged in parallel with the second movable portion at the extreme end, the force applied to the second movable portion at the extreme end. Can be adjusted, and the force applied to the solid actuator can be controlled. In other words, it is possible to reduce the load on the second movable portion at the end and to allow the second movable portion to share only the control force. Such a cushioning elastic member arranged in parallel has a second
Elastically deforms only in the direction of displacement of the movable part of the actuator to generate an elastic force. Further, as the vibration damping of the cushioning elastic members arranged in parallel decreases, the control efficiency increases.

According to a thirteenth aspect of the present invention, the cushioning elastic member has a portion in which at least one of a steel plate and a resin plate and an elastomer are alternately laminated. As in the vibration control device according to the thirteenth aspect, the elastic member in which at least one of a steel plate and a resin plate and an elastomer are alternately laminated (hereinafter, referred to as a “non-interacting elastic member”) has a high shear force. It functions well as a cushioning member.

According to a fourteenth aspect of the present invention, the plurality of solid actuators are arranged in parallel. Thereby, a large acting force can be generated.

A vibration control device according to a fifteenth aspect further includes a sensor for measuring a distance from the second movable portion to a control target member disposed on a side opposite to the first movable portion. It is a thing. Thereby, the position and orientation of the control target member (ie,
Posture) can be accurately controlled.

[0033] In the vibration control device according to a sixteenth aspect, the solid actuator includes a piezo element.
In a vibration control device according to a seventh aspect, the solid actuator includes a giant magnetostrictive element. In particular, a solid actuator including a giant magnetostrictive element is advantageous in that the displacement is large and hard to break.

Further, the above-mentioned vibration control device is provided in any one of claims 18 to
By driving as shown in FIG. 20, it is possible to appropriately operate as a device for generating and suppressing vibration of the member to be controlled. In addition, as in the driving method according to the twenty-first aspect, by interrupting energization to a damaged one of the plurality of solid actuators, power-saving driving can be realized. At this time, a fuse mechanism may be incorporated in the control circuit of the solid actuator, and the power to the damaged solid actuator may be cut off by cutting an appropriate fuse.

[0035]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Preferred embodiments of the present invention will be described below with reference to the drawings.

FIG. 1 is a sectional view of a vibration control device according to a first embodiment of the present invention. As shown in FIG. 1, the vibration control device 1 according to the present embodiment includes a piezo actuator 2 including a piezo (piezoelectric) element, and first and second liquid lever mechanisms 4 and 8 that are displacement enlargement mechanisms. The first liquid lever mechanism 4 is arranged in series in the cylinder case 13 so as to sandwich the first liquid lever mechanism 4.

The first liquid lever mechanism 4 is provided in one of the two chambers 16 and 17 provided in the cylinder case 13.
6 is housed together with the piezo actuator 2. The first liquid lever mechanism 4 includes a liquid chamber 6 in which liquid is sealed, and a driving plate 7 disposed in contact with the liquid in the liquid chamber 6 and between the liquid chamber 6 and the piezo actuator 2. And a connector 5 arranged in contact with the liquid in the liquid chamber 6 and on the opposite side of the liquid chamber 6 from the drive plate 7.
And Further, the contact area with the liquid in the liquid chamber 6 is smaller in the connector 5 than in the drive plate 7.
The end of the connector 5 opposite to the liquid chamber 6 protrudes into the other chamber 17 of the cylinder case 13 through a hole provided in a wall that partitions the cylinder case 13 into two chambers 16 and 17. The second liquid lever mechanism 8 is connected to the drive plate 11.

The second liquid lever mechanism 8 is housed in the room 17. The second liquid lever mechanism 8 includes a liquid chamber 10 in which liquid is sealed, and a driving plate 11 disposed between the liquid chamber 10 and the connector 5 so as to be in contact with the liquid in the liquid chamber 10. And an operator 9 arranged in contact with the liquid in the liquid chamber 10 and on the opposite side of the liquid chamber 10 from the drive plate 11. In addition, the contact area of the operator 9 with the liquid in the liquid chamber 10 is smaller than that of the driving plate 11. The end of the operator 9 opposite to the liquid chamber 10 is exposed to the outside through a hole provided in the cylinder case 13. Thus, the piezo actuator 2
Since all the members including the above are stored in the cylinder case 13, the vibration control device 1 of the present embodiment is small and can contribute to space saving.

The piezo actuator 2 vibrates minutely based on an electric signal supplied from a driver (not shown). The direction of the vibration is determined by the piezo actuator 2 and the first
And the second liquid lever mechanisms 4 and 8 are parallel to the direction in which they are arranged in series.

An elastic seal member 14a is provided between the side surfaces of the operator 9 and the connector 5 and the cylinder case 13 to fill the gap and prevent the liquid in the liquid chambers 6 and 10 from leaking. 14c are arranged respectively. Similar elastic seal members 14b and 14d are also arranged between the side surfaces of the drive plates 11 and 7 and the cylinder case 13, respectively. In the present embodiment, the contact area of the elastic seal members 14b and 14d on the periphery of the drive plates 11 and 7 with the liquid in the liquid chamber is less than 1% of the contact area of the drive plates 11 and 7 with the liquid in the liquid chamber. Has become. Therefore, the elastic seal members 14b, 14d are generated by the internal pressure of the liquid chambers 6, 10 when the operator 9, the connector 5, and the driving plates 11, 7 are displaced.
However, even if is deformed, the amount of change in the volume of the liquid chambers 6 and 10 is small, and the efficiency of transmitting the force to the operator 9 can be kept high. The elastic seal members 14a and 14c also have a role of protecting the operator 9 and the connector 5 when a shearing force is applied.

In a space 16 in the cylinder case 13, a space opposite to the liquid chamber 6 with respect to the drive plate 7 and in which the piezo actuator 2 is not disposed is filled with air. It can be adjusted by a device such as a valve or a compressor (not shown) (see FIG. 4). That is, this space is adjustable in air pressure and functions as an air spring arranged in parallel with the piezo actuator 2. Therefore, by adjusting the air pressure in the space, the load applied to the piezo actuator 2 can be controlled and the piezo actuator 2 can be operated optimally.

The operation of the thus configured vibration control device 1 of the present embodiment will be described. In the vibration control device 1, when vibration is generated by driving the piezo actuator 2, the vibration is given to the driving plate 7 of the first liquid lever mechanism 4. The driving plate 7 is a piezo actuator 2
However, since the contact area of the connector 5 with the liquid in the liquid chamber 6 is smaller than that of the drive plate 7, the displacement of the connector 5 is increased by the ratio between the two. Is done. That is, if the liquid contact area ratio between the connector 5 and the drive plate 7 is 1:10, the displacement amount ratio between the connector 5 and the drive plate 7 is 1
0: 1.

Further, the displacement of the connector 5 is directly applied to the drive plate 11 of the second liquid lever mechanism 8, and the drive plate 11 is displaced almost in the same manner as the connector 5. However, since the contact area of the operator 9 with the liquid in the liquid chamber 10 is smaller than that of the driving plate 11, the displacement of the operator 9 is increased by the ratio between the two. That is, if the liquid contact area ratio between the operator 9 and the driving plate 11 is 1:10, the operator 9 and the driving plate 11
Is 10: 1. Therefore, in this case, the first
The displacement of the driving plate 7 of the liquid lever mechanism 4 is output from the operator 9 of the second liquid lever mechanism 8 100 times.

As described above, according to the present embodiment, since the two liquid lever mechanisms 4 and 8 are arranged in series,
The displacement of the piezo actuator 2 can be greatly enlarged and taken out. Thus, the number of piezo elements stacked in the piezo actuator 2 can be reduced as compared with the conventional case, and the manufacturing cost can be reduced. Further, the vibration control device 1 according to the present embodiment can be used for applications requiring particularly large displacement such as position control and attitude control, and can be controlled even when the control target member is relatively soft. Appropriate control can be performed on the target member. The effects described here can be obtained in the same manner in the embodiment described later.

Further, the vibration control device 1 of this embodiment using a liquid lever mechanism as the displacement enlarging mechanism has a mechanical displacement enlarging mechanism using a lever as in an eighth embodiment which will be described later. Compared to the one used, it is also preferable in that it has a relatively simple structure and hardly has a higher-order vibration mode in non-rigid internal degrees of freedom.

Next, a second embodiment of the present invention will be described with reference to FIG. In this embodiment, the same reference numerals are used for members equivalent to those in the first embodiment, and the description is omitted. Vibration control device 2 of the present embodiment
1 is a piezo actuator 2 and a first liquid lever mechanism 4
The third embodiment is different from the first embodiment in that a vibration isolating rubber 23 is arranged in series between the first and second driving plates 7. Also,
At both ends of the anti-vibration rubber 23 in the serial arrangement direction, thin rigid plates 24a, 24 made of, for example, metal or resin are provided.
b are arranged respectively. In this way, the vibration isolating rubber 23
By disposing the rigid plates 24a and 24b on both sides of
The displacement of the locally arranged piezoelectric actuator 2 is efficiently applied to the liquid in the liquid chamber 6.

As described above, in the vibration control device 21 of the present embodiment, since the two liquid lever mechanisms 4 and 8, the piezo actuator 2 and the vibration isolating rubber 23 are arranged in series, the vibration isolating rubber 23 Of the vibration control device 21 is smaller than that of the conventional vibration control device compared to the conventional one. Therefore, excellent passive vibration isolation performance can be obtained in a high frequency range. Therefore, according to the vibration control device 21 of the present embodiment, while maintaining the advantage of the piezo actuator 2 that a high-speed response is possible with a small volume, an excellent active vibration isolation performance having a large displacement in a low frequency range is exhibited. A vibration control system which can be realized and can exhibit excellent passive vibration isolation performance in a high frequency range, which cannot be realized by a conventional vibration control device, is configured at a relatively low cost.

Further, in the vibration control device 21 of the present embodiment, since the vibration isolating rubber 23 is arranged between the first liquid lever mechanism 4 and the piezo actuator 2 in series with respect to both, the vibration isolating rubber 23 is provided. Compared to the case where the vibration rubber 23 is disposed on the side opposite to the driving plate 7 and the piezo actuator 2 with respect to the actuator 9, a vibration-proof rubber 23 having a large elastic coefficient and a small displacement can be used. It is. Accordingly, the vibration-proof rubber 23 having a relatively small volume can be used, and the vibration control device 21 can be further reduced in size.

Next, a third embodiment of the present invention will be described with reference to FIG. In this embodiment, the same reference numerals are used for members equivalent to those in the first embodiment, and the description is omitted. Vibration control device 3 of the present embodiment
1 is different from the first embodiment in that a laminated elastic body 33 is disposed at a distal end portion 9a opposite to the liquid chamber 10 with respect to the operator 9. The laminated elastic body 33 is a non-interference elastic member in which a steel plate (or a resin plate or both of them) and an elastomer such as a vibration-proof rubber are alternately laminated. Rigid plates 34a and 34b are arranged at both ends of the laminated elastic body 33 in the serial arrangement direction.

As described above, in the present embodiment, the operator 9
By providing the laminated elastic body 33 arranged in series with the piezo actuator 2 and the liquid lever mechanisms 4 and 8 at the distal end 9a opposite to the liquid chamber 10, the displacement direction of the actuator 9 (that is, When a shearing force in a direction intersecting with the direction of the serial arrangement is applied from the outside, the laminated elastic body 33
Functions as a shearing force buffering member so that a large shearing force is not applied to the actuator 9. Therefore, breakage of the operator 9 can be effectively prevented. Although a normal elastic body that is not laminated may be used instead of the laminated elastic body 33, the non-interacting elastic member laminated as in the present embodiment functions well as a cushioning member for shearing force. .

Next, a fourth embodiment of the present invention will be described with reference to FIG. In this embodiment, the same reference numerals are used for members equivalent to those in the first to third embodiments, and the description is omitted. In the vibration control device 41 of the present embodiment, instead of the piezoelectric actuator 2 used in the vibration control devices 1, 21, and 31 of the first to third embodiments, a giant magnetostriction including a giant magnetostrictive element is used. An actuator 42 is used. The giant magnetostrictive actuator 42 includes a giant magnetostrictive rod 43 and bias permanent magnets 44 disposed at both ends of the giant magnetostrictive rod 43 in the vibration displacement direction.
a, 44b and a drive coil 44 arranged on the side of the giant magnetostrictive rod 43,
5 are integrated by being molded. The drive coil 44 is connected to an external drive circuit 46, and is driven to generate a magnetic field around the giant magnetostrictive rod 43.

The material of the giant magnetostrictive rod 43 is preferably one in which, for example, a rare earth element and iron are present at a ratio of 1: 2, for example, TbFe ₂ , DyFe ₂ , SmFe ₂ , Ho
Fe ₂ , ErFe ₂ , and Tb _0.3 Dy _0.7 Fe ₂ can be used. The giant magnetostrictive actuator 42 having such a giant magnetostrictive rod 43 has excellent characteristics such as a large maximum magnetostriction, a fast response, and a large generated stress, as compared with a piezo actuator. It is very suitable for use in the vibration control device 41 as in the embodiment.

The gap in the chamber 16 provided in the cylinder case 13 is connected to an air pressure source 48 via an air regulator 47. As a result, as described above, it is possible to control the pressure in the gap in the room 16 to an arbitrary value and adjust the load applied to the giant magnetostrictive actuator 42 to an optimum value.

Further, in the vibration control device 41 of the present embodiment, similarly to the third embodiment, the laminated elastic body 33 and the rigid plate 34a,
34b are arranged in series, and between the rigid plate 34b and the cylinder case 13, the anti-vibration rubber 4
9 and a rigid plate 34c. In the present embodiment, the vibration isolating rubber 49 in parallel with the operator 9 has a role of sharing the force applied from the outside with the operator 9 and reducing the external force applied to the operator 9. Therefore, more accurate vibration control can be performed, and the control efficiency is enhanced as the vibration damping by the vibration isolation rubber 49 is reduced.

Next, a fifth embodiment of the present invention will be described with reference to FIG. In the present embodiment, the same members as those in the first to fourth embodiments are denoted by the same reference numerals, and description thereof is omitted. The vibration control device 51 according to the present embodiment includes a liquid chamber pressure control mechanism 32 for adjusting the pressure in the liquid chamber 10 of the second liquid lever mechanism 8 according to the first embodiment. This is different from the vibration control device 1. The liquid chamber pressure control mechanism 52 has a piston 54 that can penetrate into the liquid chamber 10 and an arbitrary depth of penetration of the piston 54 into the liquid chamber 10 according to, for example, forward and backward movement due to rotation of a screw. And a piston position adjusting section 53 for adjusting the depth. The periphery of the piston portion 54 is sealed by an elastic seal member 14e,
The liquid in the liquid chamber 10 does not leak to the outside.

In this embodiment, the piston position adjusting unit 5
The pressure in the liquid chamber 10 can be controlled by adjusting the penetration depth of the piston portion 54 into the liquid chamber 10 in 3. Therefore, adjustment of the preload level given to the piezo actuator 2 can be easily performed.

Further, the vibration control device 51 of the present embodiment
In the vibration control device 21 according to the second embodiment, the shape of the vibration isolating rubber is changed so that the vibration isolating rubber 55 is arranged in series and in parallel with the piezo actuator 2, and the rigid plates 56a and 56b are It is attached to both ends of the vibration isolating rubber 55. Thus, the optimal operation control of the piezo actuator 2 which is performed by adjusting the air spring in the first to fourth embodiments can be performed by the parallel arrangement of the vibration damping rubber 55. Therefore, there is an advantage that a valve or a compressor connected to the air spring as in the fourth embodiment is not required, and the apparatus configuration is simplified. Further, the piezo actuator 2 can be shielded from the outside air by the vibration isolating rubber 55,
There is also an advantage that the piezo actuator 2 can be shielded from the influence of external humidity, and the life of the piezo actuator 2 can be extended. Note that the serially arranged portion and the parallelly arranged portion of the vibration isolation rubber 55 are not necessarily required to be integrally formed, but may be provided separately.

Next, a sixth embodiment of the present invention will be described with reference to FIG. In this embodiment, the same reference numerals are used for members equivalent to those in the first to fifth embodiments, and the description thereof is omitted. The vibration control device 61 of this embodiment is different from the vibration control device 21 of the second embodiment in that three piezo actuators 2a, 2
b, 2c. The three piezo actuators 2a, 2b, 2c are driven synchronously according to a signal from a drive unit (not shown). As a result, the vibration control device 61 of the present embodiment can generate a large control force.

Next, a seventh embodiment of the present invention will be described with reference to FIG. In this embodiment, the same reference numerals are used for members equivalent to those in the first to sixth embodiments, and the description is omitted. In the present embodiment, a method of driving a vibration control device when performing vibration generation or vibration suppression control on a control target member coupled to the vibration control device will also be described. Note that the driving method of the vibration control device described in this embodiment can be similarly applied to the vibration control devices of the other embodiments.

In the vibration control device 71 of the present embodiment, the liquid chamber 10 constituting a part of the liquid lever mechanism 8 is provided with the first liquid chamber 10 a provided in the cylinder case 13 and the operator 9. Liquid chamber 10 provided in the lower plate 72
b and a pipe 10c connecting the two. The periphery of the operator 9 is sealed with an elastic seal member 14 a, and the acting force from the operator 9 is applied to the upper surface plate 73, which is a member to be controlled, via the laminated elastic body 33. A sensor 74 for measuring the distance between the lower plate 72 and the upper plate 73 is arranged, and a sensor 75 for measuring the vibration acceleration is arranged on the upper plate 73. Also, the cylinder case 13
Inside, the piezoelectric actuators 2a, 2b, 2c molded with the elastomer 76, the vibration isolating rubber 23, the first liquid lever mechanism 4, and the driving plate 1 of the second liquid lever mechanism 8
The first and first liquid chambers 10a are arranged and stored in series.

The detection signals obtained from the sensors 74 and 75 are supplied to a pre-signal processor 77. The controller 78
Based on the signal from the pre-signal processor 77, a control signal given to each of the piezo actuators 2a, 2b, 2c is obtained. Then, the piezo actuators 2a, 2b, and 2c are driven by the piezo element driver 79 according to the control signal.

As described above, in the vibration control device 71 of the present embodiment, the two liquid chambers 10a and 10b are connected to the pipe 10c.
By connecting the piezo actuators 2a, 2
b, 2c and the operator 9
It can be separated by an arbitrary distance according to the length of 0c. In the above-described first to sixth embodiments, the displacement direction of the driving plate 7 and the displacement direction of the operator 9 are always the same, but in the present embodiment, this is rotated by 90 °. That is, by employing the first and second liquid lever mechanisms 4 and 8, it is possible to select an arbitrary direction in which a force is applied. Therefore, the piezo actuator 2
a, 2b, 2c are arranged in a place where maintenance is easy, while the actuator 9 is connected to the piezo actuators 2a, 2b, 2c.
It is also possible to dispose the actuator 9 far from c and to orient the actuator 9 independently of the orientation of the piezo actuators 2a, 2b and 2c.

Next, a driving method of the vibration control device 71 of the present embodiment will be described. When a desired vibration is generated on the upper surface plate 73, first, the sensor 75 detects the upper surface plate 7 in the displacement direction (the vertical direction in this case) of the operator 9.
The vibration signal of No. 3 is measured. Then, feedback control is performed based on the vibration signal, and the controller 78 and the driver 79 generate a drive signal that causes the upper plate 73 to generate a predetermined vibration. Then, the piezo actuators 2a, 2b, 2c are driven by this drive signal. By performing such control, desired vibration can be caused in the upper surface plate 73 as the control target member. Further, the vibration control device 71 may be driven in the same manner when suppressing the vibration of the upper surface plate 73.

The control may be performed in consideration of the displacement signal from the sensor 74. That is, the upper plate 73
Is detected by a sensor 74, and a relative position error of the upper surface plate 73 from a target position is obtained by a controller 78. Then, the controller 78 controls electric signals supplied to the piezo actuators 2a, 2b, 2c so that the upper surface plate 73 follows the target position. By doing this,
The distance between the upper surface plate 73 and the lower surface plate 72 can be maintained at an appropriate distance.

Further, in the present embodiment, the current supply to the broken one of the piezo actuators 2a, 2b, 2c is cut off. As a result, useless power consumption can be prevented and power saving driving can be realized. For this purpose, each of the piezo actuators 2a, 2b, 2c is provided with a sensor (not shown) for detecting its breakage, and detection signals from these sensors are supplied to the controller 78.

Next, an eighth embodiment of the present invention will be described with reference to FIG. In the present embodiment, the same members as those in the first to seventh embodiments are denoted by the same reference numerals, and description thereof is omitted. In the vibration control device 81 according to the present embodiment, the first and second mechanical lever mechanisms 4 and 8 used in the first to seventh embodiments are replaced with first and second mechanical levers. Lever mechanism 82, 83
Are arranged in series with each other.

The first mechanical lever mechanism 82 accommodated in the room 16 is provided with a drive plate 84
And a lever 85 for enlarging the displacement of the drive plate 84, as will be described later, and a connector 86 arranged on the opposite side of the lever 85 from the drive plate 84. The end of the connector 86 opposite to the lever 85 protrudes toward the room 17 through a hole provided in the cylinder case 13. Lever 8
5 is rotatably connected to the cylinder case 13 at one end 85a and rotatably connected to the connector 86 at the other end 85b. The lever 85 is supported by the driving plate 84 by making contact with a support portion 84a provided on the driving plate 84 with a relatively small area.

The second mechanical lever mechanism 83 accommodated in the room 17 includes a driving plate 88 connected to a connector 86 of the first mechanical lever mechanism 82 and a driving plate 88 as described later. And an actuator 90 disposed on the opposite side of the drive plate 88 with respect to the lever 89. The end of the operator 90 opposite to the lever 89 projects outside through a hole provided in the cylinder case 13. The lever 89 is rotatably connected to the cylinder case 13 at one end 89a, and rotatably connected to the operator 9 at the other end 89b. The lever 89 is supported by the driving plate 88 by making contact with a support portion 88a provided on the driving plate 88 with a relatively small area.

In the thus configured vibration control device 81 of the present embodiment, when vibration is generated by driving the piezo actuator 2, the vibration is
To the drive plate 84 of the first mechanical lever mechanism 82. When the driving plate 84 is displaced up and down, the support portions 84a
The lever 85 to which the force is applied rotates around the end 85a, and the connector 86 is displaced up and down in the figure. At this time, (the magnitude of the displacement of the connector 86: the magnitude of the displacement of the driving plate 84) is (the distance between both ends 85a and 85b of the lever 85: the distance between the end 85a of the lever 85 and the support portion 84a). ), The displacement of the connector 86 is larger than the displacement of the drive plate 84. Similarly, the second mechanical lever mechanism 83
However, the displacement input from the driving plate 88 via the connector 86 is enlarged and output from the operator 90.

As described above, according to the present embodiment, the first
Further, since the second mechanical lever mechanisms 82 and 83 are provided, the displacement of the piezo actuator 2 can be greatly enlarged and taken out. Therefore, the number of stacked piezo elements in the piezo actuator 2 can be reduced as compared with the conventional case, and the manufacturing cost can be greatly reduced. Moreover, in the vibration control device 81 of the present embodiment, the first and second mechanical lever mechanisms 82, 8
3. Since the piezo actuator 2 and the anti-vibration rubber 23 are arranged in series, the natural frequency of the vibration control device 81 becomes smaller than that of the related art in which the anti-vibration rubber 23 is not arranged in series. ing. Therefore, excellent passive vibration isolation performance can be obtained in a high frequency range. Further, the vibration control device 81 can be made compact by reducing the size of the vibration isolation rubber 23.

Next, a ninth embodiment of the present invention will be described with reference to FIG. In the present embodiment, the same members as those in the first to eighth embodiments are denoted by the same reference numerals, and description thereof is omitted. In the vibration control device 91 according to the present embodiment, the drive plates 7a and 7b and the five piezo actuators 2a to 2e are disposed so as to face up and down with the liquid chamber 6 interposed therebetween in the room 16. The first liquid lever mechanism 92 includes the liquid chamber 6, driving plates 7a and 7b sandwiching the liquid chamber 6, and the connector 5 provided at the center of the driving plate 7a. Drive plate 7
a is driven by the piezo actuators 2d, 2e, and the driving plate 7b is driven by the piezo actuators 2a, 2b, 2e.
Driven by c.

Further, between the driving plate 7 a and the liquid chamber 6 and between the driving plate 7 b and the liquid chamber 6,
4a and 94b are arranged. Anti-vibration rubber 94a, 94
b has a role of sealing the liquid chamber 6 so that the liquid does not leak. Further, the anti-vibration rubber 94a, 9
4b, like the anti-vibration rubber 23 of the second embodiment, makes it possible to lower the natural frequency of the vibration control device 91 and exhibit excellent passive vibration blocking performance in a high frequency range. In addition, the rubber isolators 94a and 94b whose elastic coefficients are larger and harder than those in the case where they are disposed outside the actuator 5 (the side opposite to the liquid chamber 6 with respect to the driving plates 7a and 7b). It is possible to use a vibration-proof rubber 9
By reducing the volume of 4a and 95b, the vibration control device 91 can be made compact.

Further, in the present embodiment, there is almost no acting force applied from the first liquid lever mechanism 92 to the cylinder case 8 to escape to the outside, and the piezo actuators 2a to
The action force generated in 2e can be applied to the connector 5 at a high rate, and the piezo actuators 2a to 2e can be operated with high efficiency. Further, by using a large number of piezo actuators 2a to 2e to face each other as in the present embodiment, there is an advantage that a relatively large number of piezo actuators can be arranged in a narrow plane area and a large acting force can be obtained. is there.

Next, a tenth embodiment of the present invention will be described with reference to FIG. In this embodiment, the same reference numerals are used for members equivalent to those in the first to ninth embodiments, and the description is omitted. The vibration control device 101 according to the present embodiment is different from the vibration control rubber 94a, 94b in that an elastic seal member 14b is disposed and a large number of small particles that are elastically variable in volume as liquid in the liquid chambers 6, 10. Ninth in that a distributed
Of this embodiment. As the large number of small particles that are elastically variable in volume, for example, a resin or an elastomer powder in which gas is sealed may be used.

According to the present embodiment, since many small particles dispersed in the liquid chambers 6 and 10 function in the same manner as the elastic member, the liquid chambers 6 and 8 of the first and second liquid lever mechanisms 92 and 8 can be used. The same effects as in the ninth embodiment described above can be obtained without separately arranging an elastic member such as an anti-vibration rubber in addition to the tenth embodiment. Therefore, it is possible to make the vibration control device 101 more compact while maintaining the above-described effects.

Next, an eleventh embodiment of the present invention will be described with reference to FIG. In the present embodiment, the same members as those in the first to tenth embodiments are denoted by the same reference numerals, and description thereof is omitted. The vibration control device 111 according to the present embodiment includes the first and second liquid lever mechanisms 9.
First and second gas lever mechanisms 11 instead of 2 and 8
The second embodiment differs from the tenth embodiment in that 2, 113 are used. The first housed in room 16
The gas lever mechanism 112 has a very small height compared to the liquid chambers 6 and 10 used in the other embodiments described above, and a narrow width in which the distance between the upper and lower drive plates 7a and 7b is close. A gas chamber 115 is provided. Further, the second gas lever mechanism 113 accommodated in the room 17 has a gas chamber 116 having a similarly narrow width.

The gas sealed in the gas chambers 115 and 116 of the first and second gas lever mechanisms 112 and 113 thus configured functions as an elastic member. Further, it is possible to obtain the same effect as that of the tenth embodiment. In addition, the first and second
Since the gas lever mechanisms 112 and 113 are smaller than the liquid lever mechanisms used in the above-described embodiment, and there is no need to further arrange an elastic member outside thereof, it is possible to obtain a very compact vibration control device. Becomes possible.

Although the preferred embodiments of the present invention have been described above, the present invention is not limited to the above-described embodiments, and various design changes are possible as long as they are described in the appended claims. Things. For example, the displacement direction of the operator 9 and the displacement direction of the control target 73 need not be the same as in the seventh embodiment, and the displacement direction of the operator 9 can be controlled by using a known action direction conversion mechanism. The displacement direction of the object 73 may be, for example, 90 °. Further, the liquid chamber pressure control mechanism described in the fifth embodiment may be used in another embodiment such as the seventh embodiment. Further, the giant magnetostrictive actuator as described in the fourth embodiment is, for example, the seventh magnetostrictive actuator.
And may be used in other embodiments such as the tenth embodiment.

[0079]

As described above, according to the present invention,
Since the plurality of displacement magnifying mechanisms are arranged in series, the displacement is magnified by a predetermined multiple in each displacement magnifying mechanism, and the relatively small displacement caused by the solid actuator is reduced by the first displacement magnifying mechanism of the first stage. , A very large displacement is output from the second movable portion of the final stage displacement enlarging mechanism. Therefore, it can be used for applications requiring particularly large displacement, such as position control and attitude control, and performs appropriate control on the control target member even when the control target member is relatively soft. I can do it,
The use of the vibration control device using the solid actuator can be greatly expanded.

[Brief description of the drawings]

FIG. 1 is a sectional view of a vibration control device according to a first embodiment of the present invention.

FIG. 2 is a cross-sectional view of a vibration control device according to a second embodiment of the present invention.

FIG. 3 is a sectional view of a vibration control device according to a third embodiment of the present invention.

FIG. 4 is a cross-sectional view of a vibration control device according to a fourth embodiment of the present invention.

FIG. 5 is a sectional view of a vibration control device according to a fifth embodiment of the present invention.

FIG. 6 is a sectional view of a vibration control device according to a sixth embodiment of the present invention.

FIG. 7 is a sectional view of a vibration control device according to a seventh embodiment of the present invention.

FIG. 8 is a sectional view of a vibration control device according to an eighth embodiment of the present invention.

FIG. 9 is a sectional view of a vibration control device according to a ninth embodiment of the present invention.

FIG. 10 is a sectional view of a vibration control device according to a tenth embodiment of the present invention.

FIG. 11 is a sectional view of a vibration control device according to an eleventh embodiment of the present invention.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Vibration control device 2 Piezo actuator 4 First liquid lever mechanism 5 Connector 6 Liquid chamber 7 Drive plate 8 Second liquid lever mechanism 9 Actuator 10 Liquid chamber 11 Drive plate 13 Cylinder case 14a to 14d Elastic seal member 16, 17 rooms

──────────────────────────────────────────────────続 き Continued on the front page (51) Int.Cl. ⁷ Identification symbol FI Theme coat ゛ (Reference) F16F 15/04 F16F 15/04 A H02N 2/00 H02N 2/00 B

Claims (21)

[Claims] 1. A plurality of serially arranged plural units each having said first and second movable units such that a displacement inputted to a first movable unit is enlarged and outputted from a second movable unit. And the remaining first and second moving parts located at the extreme ends of the plurality of displacement enlarging mechanisms arranged in series.
A solid actuator that is disposed on the opposite side of the movable portion and that can be displaced in a direction in which the first movable portion at the extreme end of the plurality of displacement enlarging mechanisms is moved based on the supplied electric signal. A vibration control device comprising: 2. A method according to claim 1, wherein a plurality of the displacement enlarging mechanisms are provided between the first movable portion at the extreme end and the solid actuator.
The vibration control device according to claim 1, further comprising an inner elastic member arranged in series with respect to both. 3. The liquid displacement enlarging mechanism, wherein the displacement enlarging mechanism has a liquid chamber in which liquid is sealed, wherein the first movable portion is in contact with the liquid in the liquid chamber. 3. The vibration control device according to claim 1, wherein the second movable part is in contact with the liquid in the liquid chamber with a smaller contact area than the first movable part. 4. 4. The vibration control device according to claim 3, further comprising a mechanism for adjusting a pressure in the fluid chamber. 5. The vibration control device according to claim 1, wherein a load applied to the solid actuator is controlled. 6. The vibration control device according to claim 1, further comprising an inner parallel elastic member arranged in parallel with said solid actuator. 7. The solid actuator according to claim 1, further comprising a covering member for covering the solid actuator.
The vibration control device according to any one of the above. 8. A liquid chamber in which a large number of small particles having a liquid enclosed therein and elastically variable in volume are dispersed.
A first movable part in contact with the liquid in the liquid chamber, and a second movable part in contact with the liquid in the liquid chamber with a smaller contact area than the first movable part. A plurality of displacement magnifying mechanisms arranged in series; and the first and second movable portions at the extreme ends of the plurality of displacement magnifying mechanisms arranged in series.
A solid actuator that is disposed on the opposite side of the movable unit and that can be displaced in a direction in which the first movable unit at the extreme end of the plurality of displacement enlarging mechanisms is moved based on the supplied electric signal. A vibration control device comprising: 9. A gas chamber in which a gas is sealed and whose volume is elastically variable, a first movable portion that is in contact with the gas in the gas chamber, and smaller than the first movable portion. A plurality of displacement magnifying mechanisms arranged in series with each other, the end portions of the plurality of displacement magnifying mechanisms arranged in series, each having a second movable portion in contact with the gas in the gas chamber at a contact area; And the remaining first and second movable parts with respect to the first movable part
A solid actuator that is disposed on the opposite side of the movable unit and that can be displaced in a direction in which the first movable unit at the extreme end of the plurality of displacement enlarging mechanisms is moved based on the supplied electric signal. A vibration control device comprising: 10. The apparatus according to claim 1, wherein peripheral edges of said first movable section and said second movable section are respectively sealed by elastic sealing members.
A vibration control device according to the item. 11. The plurality of displacement enlarging mechanisms arranged in series are arranged on the opposite side of the second movable portion at the end from the remaining first and second movable portions. 2. The device according to claim 1, further comprising a cushioning elastic member.
The vibration control device according to any one of claims 10 to 10. 12. The apparatus according to claim 12, wherein the cushioning elastic member is arranged in series and in parallel with the second movable portion at the extreme end of the plurality of displacement magnifying mechanisms arranged in series. 12. The vibration control device according to 11. 13. The cushioning elastic member has a portion in which at least one of a steel plate and a resin plate and an elastomer are alternately laminated.
Or the vibration control device according to 12. 14. The vibration control device according to claim 1, wherein a plurality of said solid actuators are arranged in parallel. 15. A plurality of displacement enlarging mechanisms arranged in series, which are arranged on the opposite side of the second movable portion at the extreme end from the remaining first and second movable portions. The sensor according to any one of claims 1 to 14, further comprising a sensor for measuring a distance to the control target member.
A vibration control device according to the item. 16. The vibration control device according to claim 1, wherein the solid actuator includes a piezo element. 17. The vibration control device according to claim 1, wherein the solid actuator includes a giant magnetostrictive element. 18. The method for driving a vibration control device according to claim 1, wherein the second movable portion at the extreme end of a plurality of the displacement magnifying mechanisms arranged in series is provided. Measuring a vibration signal of the control target member based on the displacement, generating a drive signal that causes the control target member to generate a predetermined vibration based on the vibration signal, and driving the solid actuator with the drive signal. A method for driving a vibration control device, which is characterized by the following. 19. The driving method of the vibration control device according to claim 1, wherein the second movable portion at the extreme end of the plurality of displacement magnifying mechanisms arranged in series is provided. Measuring a vibration signal of the control target member based on the displacement; generating a drive signal that suppresses the vibration of the control target member based on the vibration signal; and driving the solid actuator with the drive signal. The driving method of the vibration control device described above. 20. A relative displacement of the control target member is detected to obtain a position error of the control target member from a target position, and supplied to the solid actuator so that the control target member follows the target position. 20. The driving method of the vibration control device according to claim 18, wherein an electric signal is controlled. 21. The driving method for a vibration control device according to claim 18, wherein current supply to a damaged one of the plurality of solid actuators is cut off.