JP2002005724A - Three-dimensional semiconductor element, ink tank in which the element is arranged, ink jet recording apparatus including the tank, and communication system using the three-dimensional semiconductor element - Google Patents

Abstract

(57) [Problem] To provide a three-dimensional semiconductor element or the like capable of detecting detailed information in an ink tank of each color in real time and bidirectionally exchanging information with an external inkjet recording device. SOLUTION: An ink jet recording apparatus 600 is equipped with a liquid ejection head (not shown) for ejecting ink droplets for print recording, and ink tanks 500 of each color for holding liquid supplied to the liquid ejection head. Carriage 607 is provided. As the ink tank 500 for each color, four types of tanks (B, C, M, and Y) are mounted. The three-dimensional semiconductor element 11 having a communication function having different response conditions is arranged in the ink tank of each color, and can communicate with the communication circuit 150 of the ink jet recording apparatus 600 provided outside the ink tank 500. The three-dimensional semiconductor element 11 is configured to be able to communicate by resonance due to electromagnetic induction of the resonance circuit 102.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a semiconductor device having a function of detecting surrounding environment information and transmitting and displaying the information to the outside.

The present invention also relates to an apparatus for detecting information (for example, the remaining amount of ink) in each color ink tank and displaying and transmitting the information to the outside, an ink tank provided with the apparatus, and a detachably mounted ink tank. The present invention relates to an inkjet recording apparatus such as a facsimile, a printer, and a copying machine.

[0003]

2. Description of the Related Art Conventionally, an image is printed on a sheet of paper in a dot pattern by moving a carriage equipped with a recording head in a printing direction while ejecting ink from a plurality of ejection nozzles provided on the recording head. In an ink jet recording apparatus, an ink tank containing recording ink is provided, and the ink in the ink tank is supplied to a recording head via an ink supply path. In view of the above, various types of ink remaining amount detecting devices that detect the remaining amount of ink in the ink tank are put to practical use, and various proposals have been made.

For example, according to JP-A-6-143607, two (one pair) electrodes 702 are provided on the inner surface on the bottom side of an ink tank 701 filled with non-conductive ink as shown in FIG. A floating body 703 provided with an electrode 704 at a position facing the electrode 702 is provided in the ink in the ink tank 701. Two electrodes 702
Are connected to a detection unit (not shown) for detecting the conduction state of both electrodes, and when the conduction state of both electrodes is detected, an ink remaining amount error indicating that there is no ink in the ink tank 701 is issued, Inkjet recording head 70
5 is disclosed to stop the operation.

According to Japanese Patent Registration No. 2947245,
As shown in FIG. 18, the lower portion is formed in a funnel shape toward the bottom surface, and two conductors 801 and 802 are provided on the bottom surface.
An ink cartridge 805 for an ink jet printer having a configuration in which an ink cartridge 4 is installed is disclosed. In such a configuration, as the ink 803 is consumed and decreases, the liquid level of the ink 803 decreases. Accordingly, the ink 80
The position of the metal ball 804 floating on the surface of No. 3 goes down. When the liquid level of the ink 803 drops to the position of the bottom surface of the ink cartridge housing, the metal sphere 804 comes into contact with the two conductors 801 and 802. Then, the conductors 801 and 80
2 conducts, during which time a current flows. If the flow is detected, the ink end state can be detected. When the ink end state is detected, information indicating the ink end state is notified to the user.

[0006]

A configuration for detecting the remaining amount of ink in an ink tank, as typified by the above-mentioned prior art publication, is known. In such a configuration, a detection electrode is provided in the ink tank. Need to be placed. Further, since the remaining amount of the ink is detected based on the conduction state between the electrodes, there is a restriction on the ink to be used, for example, metal ions are not used in the ink component.

Further, in the above configuration, only the remaining amount of ink can be detected, and other information in the tank cannot be known to the outside. For example, pressure information in the ink tank, changes in physical properties of the ink, and the like are important parameters for operating the ink jet head with a stable ejection amount at all times. There is a demand for a tank that can notify an external inkjet recording apparatus in real time and can transmit a change in physical properties of the ink to the outside.

[0008] Further, an ink tank which can unilaterally exchange not only information detected in the ink tank to the outside but also internal information in response to an external inquiry is desired. It is rare.

In developing the above-described ink tank, the present inventors focused on a ball semiconductor manufactured by Ball Semiconductor, which forms a semiconductor integrated circuit on a spherical surface of a silicon ball having a diameter of 1 mm. Since this ball semiconductor is spherical, it was expected that if it was housed in an ink tank, it would be possible to detect ambient environment information and exchange bidirectional information with the outside very efficiently compared to a planar type. . However,
After investigating those with such functions, USP5
The development of an element having the above functions is required only by the technology for connecting the balls and semiconductors with each other by electric wiring as in 879943. There is also a problem that must be cleared in order for this element to be effectively applicable to an ink tank. One of the issues is to supply electric power for starting the elements housed in the tank. If the ink tank has a power supply for starting the element, the tank becomes large, or even if a power supply is provided outside the tank, a connecting means between the power supply and the element is required, which increases the manufacturing cost of the tank and increases the tank cartridge. Therefore, the device must be started up from outside without contact.

[0010] A further problem is that the ink tank can float in the ink level of the ink tank or in the ink that has sunk a certain distance from the liquid level. For example, in order to monitor the change in the amount of negative pressure due to ink consumption in the ink tank over time, it is desirable that the element is located at the ink liquid level, but since the element is made of silicon having a higher specific gravity than water, It is difficult to let.

In particular, when applied to a color printer,
For each tank of each color, what can acquire and transmit information in the tank in response to an external inquiry is required.

An object of the present invention is to provide a three-dimensional semiconductor device capable of detecting detailed information in each color ink tank in real time and exchanging information bidirectionally with an external ink jet recording apparatus. The present invention provides an ink tank and an ink jet recording apparatus provided with the ink tank.

[0013]

A three-dimensional semiconductor device according to the present invention for achieving the above object receives a signal of an electromagnetic wave from the outside in a non-contact manner and converts the electromagnetic wave into electric power by electromagnetic induction. Conversion means, information obtaining means for obtaining external environmental information, information storage means for storing information for comparison with information obtained by the information obtaining means, and a signal of electromagnetic waves received by the reception and energy conversion means. Determining means for comparing the information obtained by the information obtaining means with the information stored in the information storing means corresponding to the information when the predetermined response condition is satisfied, and determining the necessity of information transmission; Information transmission means for displaying or transmitting the information obtained by the information obtaining means to the outside when it is determined that information transmission is necessary, the information obtaining means,
The information storage means, the determination means, and the information transmission means are operated by the electric power converted by the reception / energy conversion means.

As the response condition, an electromagnetic induction frequency or a communication protocol can be applied.

The information transmitting means converts the electric power converted by the receiving and energy converting means into a magnetic field, light, shape, color, radio wave, or sound, which is energy for displaying or transmitting information to the outside. It is possible to do.

As the receiving / energy converting means, one having a conductor coil for generating electric power by electromagnetic induction with an external resonance circuit and an oscillation circuit can be applied.

In this case, the conductor coil is formed so as to be wound around the outer surface of the three-dimensional semiconductor element.

Further, it is preferable to have a cavity for floating at a predetermined position in the liquid surface or in the liquid. In this case, it is preferable that the center of gravity of the three-dimensional semiconductor element floating in the liquid is located below the center of the element and does not rotate in the floating liquid and swings stably. More preferably, the metacenter of the device is always above the center of gravity of the three-dimensional semiconductor device.

Further, the present invention is characterized by an ink tank provided with at least one three-dimensional semiconductor element as described above.

In this case, it is preferable that the response condition of the three-dimensional semiconductor element differs depending on the ink in the tank.
12. The ink tank according to claim 11, wherein the response condition of the three-dimensional semiconductor element differs depending on the color of ink in the tank, the color material concentration, or the object.

Further, the present invention is characterized by an ink jet recording apparatus equipped with a plurality of ink tanks as described above.

In this case, it is preferable that the ink jet recording apparatus has communication means for transmitting and receiving electromagnetic waves to and from the three-dimensional semiconductor element in each ink tank. Further, the communication means has a resonance circuit for transmitting an electromagnetic wave, but is applicable.

Further, the present invention is a communication system using a three-dimensional semiconductor element, wherein a plurality of liquid containers each having the three-dimensional semiconductor element disposed therein, and each of the three-dimensional semiconductor elements are formed. An oscillation circuit having a conductor coil,
An information obtaining unit for obtaining information in the container, a receiving unit for receiving a signal from outside, and an information transmitting unit for transmitting information to the outside when a predetermined response condition is satisfied; and an information transmitting unit installed outside the plurality of liquid containers. An external resonance circuit for generating electric power by electromagnetic induction between the oscillation circuit of the three-dimensional semiconductor element and an external resonance circuit for performing two-way communication with the receiving means and the information transmission means of the three-dimensional semiconductor element A communication system comprising communication means is characterized.

In this case, the response conditions vary the electromagnetic induction frequency or communication protocol according to each container.

Further, it is preferable that the center of gravity of the three-dimensional semiconductor element floating in the liquid is located below the center of the element and does not rotate in the floating liquid and stably swings. Preferably, the metacenter of the semiconductor device is always above the center of gravity of the solid semiconductor device.

The term “metacenter” in the present specification means
It shows the intersection of the action line of weight when balanced and the action line of buoyancy when tilted.

The term "three-dimensional shape" of the "three-dimensional type semiconductor element" in the present specification includes all various three-dimensional shapes such as a triangular prism, a sphere, a hemisphere, a quadratic prism, a spheroid, and a uniaxial rotator.

When used in an ink jet recording apparatus, means for supplying an electromagnetic signal to the element may be provided at the recovery position, return position, carriage, head, or the like. In addition, if an apparatus having a means for supplying an electromagnetic wave signal is used, the state of the inside of the ink tank can be known even without an ink jet recording apparatus. For example, when used in a factory or a store, it is used for inspection and the like. (quality assurance).

(Operation) In the three-dimensional semiconductor device as described above, when a signal of an electromagnetic wave is given from outside the device in a non-contact manner,
The receiving / energy converting means converts the electromagnetic wave into electric power, and the converted electric power activates the information obtaining means, the determining means, the information storing means, and the information transmitting means. When the electromagnetic wave signal received by the reception / energy conversion unit satisfies a predetermined response condition, the determination unit causes the information obtaining unit to obtain environmental information around the element, and stores the obtained information and the information storage corresponding thereto. Compare the information stored in the means and determine the necessity of information transmission. Then, when it is determined that the information needs to be transmitted, the determining unit transmits the obtained information to the outside by the information transmitting unit.

As described above, only when the external electromagnetic wave signal satisfies a predetermined response condition, the communication function of acquiring the surrounding environment information and transmitting it to the outside is built into the three-dimensional semiconductor element. Ambient environment information for each element can be obtained independently. Further, since information can be obtained and transmitted three-dimensionally, there is less restriction on the direction of information transmission as compared with the case where a flat semiconductor element is used. Therefore, it is possible to efficiently obtain the surrounding environment information and transmit it to the outside.

By arranging at least one such three-dimensional semiconductor element in an ink tank, information on the ink contained in the ink tank, pressure in the tank, and the like can be transferred in real time to an external device such as an ink jet recording apparatus. Can be transmitted. This is advantageous, for example, in controlling the amount of negative pressure in the tank that changes momentarily with the consumption of ink to stabilize inkjet discharge.

In particular, when the above-mentioned three-dimensional semiconductor element is arranged in each of a plurality of ink tanks, information corresponding to the received signal is obtained and stored only when the received electromagnetic wave signal satisfies a predetermined response condition. Since the result of the comparison with the information can be transmitted to the outside together with the obtained information, if the response condition is changed for each tank, the information for each ink tank can be obtained independently. So, without mistakes,
For example, an ink tank that has run out of ink can be replaced.

Further, since the power for operating the three-dimensional semiconductor element is supplied in a non-contact manner, a power supply for starting the element is provided in the ink tank, and a power supply wiring is connected to the element. It can be used in places where direct wiring with the outside is difficult.

For example, by forming a conductor coil of an oscillation circuit around an outer surface of a three-dimensional semiconductor element, power is generated in the conductor coil by electromagnetic induction between the semiconductor coil and an external resonance circuit. Can be supplied with power in a contactless manner.

In this case, since a coil is wound around the outer surface of the element, the magnitude of the inductance of the coil changes according to, for example, the remaining amount of ink, the ink concentration, and the ink pH in the ink tank. Therefore, since the oscillation circuit changes the oscillation frequency in accordance with the change in the inductance, it is also possible to detect the remaining amount of the ink in the ink tank and the like based on the change in the changed oscillation frequency.

The three-dimensional semiconductor element has a cavity for floating in a liquid and the center of gravity of the element is formed below the center of the element. The print head and ink tank mounted on the device operate serially, and even if the ink in the ink tank swings up, down, left, and right, the information and information about the ink are stably suspended in the ink in the ink tank. , The pressure in the tank and the like can be accurately detected. In addition, the coil of the oscillation circuit formed on the element is held at a stable position with respect to the coil of the external resonance circuit, and stable two-way communication is always possible.

[0037]

Embodiments of the present invention will be described below with reference to the drawings. In particular, an embodiment in which three-dimensional semiconductor elements are arranged in ink tanks of each color will be described in detail. It should be noted that this element is not housed only in the ink tank, and the same effect can be obtained by arranging it in another object.

(First Embodiment) FIG. 1 shows a first embodiment of the present invention.
1 is a schematic configuration diagram illustrating an inkjet recording apparatus according to an embodiment. In the ink jet recording apparatus 600 of the embodiment shown in this figure, a liquid discharge head (not shown) for discharging ink droplets for print recording, and ink tanks 500 of each color for holding liquid supplied to the liquid discharge head are provided. A carriage 607 to be mounted is provided. As the ink tanks 500 of the respective colors, four types of tanks of black B, cyan C, magenta M, and yellow Y are mounted.

The ink tank of each color is provided with a three-dimensional semiconductor element 11 having a communication function having different response conditions, and can communicate with the communication circuit 150 of the ink jet recording apparatus 600 provided outside the ink tank 500. ing.

The communication circuit 150 can communicate with the communication means of the three-dimensional semiconductor element 11 provided in the ink tank 500 by the resonance circuit 102 including the frequency modulator 152 and the induction coil 151. Three-dimensional semiconductor element 11
Is configured to be able to communicate by resonance of the resonance circuit 102 due to electromagnetic induction. In order to provide such a communication function, an induction coil L is wound around the surface of the three-dimensional semiconductor element 11 as shown in FIG. Further, in order to change the response condition of the element for each color, particularly in this example, the number of turns and the length of the coil L on the three-dimensional semiconductor element are changed for each color, and the three-dimensional semiconductor element 11 for each color is changed. Each has a different resonance frequency. The communication circuit 150 can modulate the electromagnetic induction frequency by the frequency modulator 152, thereby tuning to the resonance frequency of the three-dimensional semiconductor element corresponding to the color to be communicated, and enabling independent communication for each color. . For example, when a signal tuned to the resonance frequency corresponding to cyan by the communication circuit 150 is sent, only the elements in the cyan tank respond to the signal.

Further, since the three-dimensional semiconductor element 11 has the induction coil L, if an oscillation circuit is formed using this coil, the electromagnetic induction by the resonance circuit 102 of the communication circuit 150 as described above is converted into electric power. I can do it. Therefore, power can be supplied in a non-contact manner to start a circuit built in the element.

In the ink jet recording apparatus as described above, in order to exchange information with, for example, a cyan tank, a signal having a frequency equal to the resonance frequency corresponding to the cyan color is transmitted from the communication circuit 150 toward the tank. , Power is generated by electromagnetic induction in the coil of the element in the cyan tank, and the circuit in the element can be activated. Therefore, if means for obtaining environmental information around the element and means for transmitting the environmental information to the outside are provided in the circuit in the element, the information in the tank in cyan can be detected and notified to the outside.

FIG. 3 is a block diagram showing the internal structure of the three-dimensional semiconductor element 11 arranged for each color and the exchange with the outside.

The three-dimensional semiconductor element 11 includes a recording device 600.
Receiving and energy converting means (oscillation circuit having a coil) 14 for receiving a signal of the electromagnetic wave 12 transmitted from the communication circuit 150 therein and converting the electromagnetic wave 12 into electric power 13
And an information acquisition unit 15, a determination unit 16, an information storage unit 17, and an information transmission unit 18 which are activated by the power obtained by the communication and energy conversion unit 14. Communication means 14,
The information obtaining means 15 and the information transmitting means 18 are desirably formed on or near the surface of the three-dimensional semiconductor element 11.

The judging means 16 receives the electromagnetic wave 1 received by the receiving / energy converting means (oscillation circuit having a coil) 14.
2 resonates, the signal of the electromagnetic wave 12 is accepted, and if it does not resonate, it is not accepted. When the signal of the electromagnetic wave 12 is received, the information
The information (for example, remaining amount of ink, ink color material concentration, pH, temperature, etc.) in the ink tank, which is the ambient environment information of 1, is obtained, and the obtained tank internal information and the information stored in the information storage unit 17 are obtained. To determine whether it is necessary to transmit the obtained tank internal information to the outside. The information storage unit 17 stores various conditions to be compared with the obtained tank internal information and the tank internal information obtained from the information obtaining unit 15. Here, the judgment by the judging means 16 based on the condition preset in the information storage means 17 is based on the condition that the tank needs to be replaced because the remaining amount of ink has become less than 2 milliliters or the ph of the ink has changed greatly. Is determined.

The information transmitting means 18 converts the electric power into energy for transmitting the information in the tank to the outside according to the command of the determining means 16 and displays the information inside the ink to the outside.
introduce. The energy for this transmission is magnetic, light,
It is possible to use shapes, colors, radio waves, sounds, etc. For example, if it is determined that the ink level is less than 2 milliliters, a sound is emitted to inform the outside that the tank needs to be replaced. . In addition, the transmission destination is not limited to the communication circuit 150 of the ink jet recording apparatus, and particularly in the case of light, shape, color, sound, and the like, the transmission may be performed to human vision or hearing. Further, the transmission method may be changed according to the information, such as by sound when it is determined that the remaining amount of ink is 2 milliliters or less, and by light when the ph of the ink is largely changed.

According to the present embodiment, since the three-dimensional semiconductor elements having the communication function of responding at different frequencies to the ink tanks of the respective colors are arranged, it is possible to individually exchange information with the tanks of the desired color. it can.

The three-dimensional semiconductor element for each color converts an electromagnetic wave from a communication circuit provided on the main body of the recording apparatus into electric power for activating a judging means, information obtaining means, information transmitting means and the like in the element. There is no need to perform direct electrical wiring with the outside, and the element can be used at any location in the target object, such as in ink where it is difficult to perform direct electrical wiring with the outside. By arranging the elements in the ink, the state of the ink can be accurately grasped in real time. Further, since there is no need to arrange a means (power supply in this example) for accumulating an electromotive force for operating the element, the element can be reduced in size, and the element can be used even in a narrow place.

(Second Embodiment) Next, another embodiment will be described. Although the basic configuration of the three-dimensional semiconductor element is the same as that of the embodiment shown in FIG. 3, the response condition in communication is different. Therefore, in the description, the same reference numerals are used for the same components as those in the first embodiment. In the case of this embodiment, the frequency tuned for communication is the same for all the elements in the ink tank of each color, unlike the first embodiment (determined by the number of turns and the length of the coil L on the element, etc.). The resonance frequency is the same for each color element), but a different digital ID identification function is provided for each element arranged in the tank of each color, and the tank of the color desired to be communicated is assigned a digital I / O.
D to determine whether to permit or disable communication.

FIG. 4 shows a communication circuit 150 on the recording apparatus main body side.
FIG. 4 is an explanatory diagram of a concept of exchanging a digital ID between the device and a three-dimensional semiconductor element 11 by electromagnetic induction. Referring to this figure, first, the digital ID is set to D3h (h is D1 is 1).
This is a suffix indicating hexadecimal notation. ) (FIG. 10A), the communication circuit 150 converts this into the binary number “11”.
010011 "((b) in the figure) and a corresponding electromagnetic induction waveform ((c) in the figure). Digital value 1
Is a sine wave of one cycle, and 0 is an output 0. When this is transmitted by electromagnetic induction by the communication circuit 150 (FIG. 10D), the three-dimensional semiconductor element 11 in the ink tank is tuned, and a similar waveform is obtained by the coil L on the element 11 (FIG. )).
The element 11 is converted into a digital binary sequence by a comparator circuit or the like ((f) in the figure), and the digital ID D
3h can be obtained ((g) in the figure).

FIG. 4 shows an operation flow of obtaining information in the tank of a specific color using such exchange of digital IDs. Referring to this figure, first, the response condition ID (in this case, the digital ID
When D3h is selected, the communication circuit 150 converts this into a binary array using a shift register or the like (not shown), converts it into an electromagnetic induction waveform corresponding to this array, and transmits it. For conversion, for example, a sine wave having the same cycle as the binary
This is performed by multiplying by a gate. Three-dimensional semiconductor element 11
Is a coil and obtains the same waveform as the transmitted electromagnetic induction waveform. This is converted into a binary number by a converter provided in the judging means 16 in the three-dimensional semiconductor element 11 to obtain a hexadecimal number.

Then, the judging means 16 compares the obtained hexadecimal ID with the hexadecimal identification ID stored in the information storage means 17 in advance. If the comparisons match, the information following the ID is accepted, otherwise the information is not accepted.

When the information is received as described above, as shown in FIG. 3, the judging means 16 sends the information (for example, ink Concentration, remaining amount, physical properties, etc.), and compares the obtained tank internal information with the information stored in the information storage means 17 to determine whether it is necessary to transmit the obtained tank internal information to the outside. to decide. The information transmitting means 18 supplies electric power according to a command of the determining means 16,
The information in the tank is converted into energy for transmission to the outside, and the information inside the ink is displayed and transmitted to the outside.

According to the present embodiment, since the three-dimensional semiconductor element having the communication function of responding with the communication protocol using the different ID identification is arranged in each color ink tank, the same as in the first embodiment. Since information can be individually exchanged with a tank of a desired color, and power supply for activating a circuit in the element can be performed in a non-contact manner, it can be used even in ink where wiring is difficult.

Further, in this embodiment, since the ink tank of each color is identified by the digital ID, it is possible to handle a much larger number of types of tanks than in the configuration of the first embodiment.

[0056]

Next, a preferred embodiment in which the three-dimensional semiconductor device of the present invention is arranged in an ink tank will be described in more detail.

First, information obtaining means applicable to the three-dimensional semiconductor device of the present invention will be described as an example. As described in the above embodiment, when a three-dimensional semiconductor element is arranged in an ink tank, information acquisition means built into spherical silicon includes (1) a SiO ₂ film or a SiN film as an ion-sensitive film. Sensor to detect the pH of the ink,
(2) a pressure sensor that has a diaphragm structure and detects a pressure change in the tank, and (3) a photodiode that converts light into heat energy and has a pyroelectric effect.
Examples include a sensor that detects the current position and detects the remaining amount of ink, and (4) a sensor that detects the presence or absence of ink based on the amount of water in the tank using the conductive effect of the material.

Next, specific examples of the receiving and energy converting means applicable to the three-dimensional semiconductor device of the present invention will be described. FIG.
FIG. 3 is a diagram for explaining the principle of power generation of the receiving and energy converting means which is a component of the three-dimensional semiconductor device of the present invention.

In FIG. 6, the conductor coil L of the oscillation circuit 102 is placed adjacent to the coil La of the external resonance circuit 101, and the current I is applied to the coil La through the external resonance circuit 101.
When a flows, a current Ia generates a magnetic flux B that passes through the coil L of the oscillation circuit 102. Here, when the current Ia is changed, the magnetic flux B passing through the coil L changes, so that an induced electromotive force V is generated in the coil L. Therefore, the oscillating circuit 102 as a receiving / energy converting means is formed in the spherical silicon, the external resonance circuit 101 is provided in the communication circuit 150 of the ink jet recording apparatus outside the element, and the conductor coil L of the oscillating circuit 102 on the element side and the External resonance circuit 101
Is arranged adjacent to the coil La, power for operating the element can be generated by induced electromotive force due to electromagnetic induction from the outside.

The magnetic flux B penetrating the coil L having the number of turns N of the oscillation circuit 102 built in the spherical silicon as the receiving and energy converting means is supplied to the coil L of the external resonance circuit 101.
a is proportional to the product of the number of turns Na of a and the current Ia.

[0061]

B = k * Na * Ia The electromotive force V generated in the coil L is

[0062]

V = −N {dB / dt} = − kNaN {dIa / dt} = − M {dIa / dt} Here, the magnetic flux B is represented by μa, the magnetic permeability of the magnetic core of the coil, and H as the magnetic field. ,

[0063]

Equation 3] B = μaH (z) = { μ a N a I a r a 2/2 (r a 2 + z 2) becomes ^3/2. Here, z indicates the distance between the coil of the external resonance circuit and the coil formed in the spherical silicon.

The mutual inductance of the equation: M is

[0065]

Equation 4] becomes M = {μN / μaIa} ∫ s B · dS = {μμ a r a 2 N a NS / 2μ o (r a 2 + z 2) 3/2}. Here, μ _o is the magnetic permeability of vacuum.

Then, the impedance: Z of the oscillation circuit built in the spherical silicon is

[0067]

[Mathematical formula-see original document] Z ([omega]) = R + j {[omega] L- (1 / [omega] C)}, and the impedance Za of the external resonance circuit is

[0068]

[Formula 6] Za (ω) = Ra + jωLa− {ω ² M ² / Z (ω)} Here, J represents magnetization. Then, the impedance: Zo when this external resonance circuit resonates (when the current value: Ia is maximized) is:

[0069]

[Equation 7] Zo (ωo) = Ra + jLaωo- (ω o 2 M 2 / R) , and the phase delay of the resonant circuit: φ is,

[0070]

Equation 8] tan [phi = a _{^{{jLaωo- (ω o 2 M 2}} / R)} / R.

Then, the resonance frequency of this external resonance circuit:
fo is

[0072]

[Formula 9] fo = 1 / 2π (LC) ^1/2

From the above relationship, when the impedance of the oscillation circuit 102 formed in the spherical silicon is changed according to the change of the ink in the ink tank, the frequency of the external resonance circuit 101 is changed to change the frequency of the external resonance circuit. The above-mentioned change of the ink appears in the amplitude and phase difference of the impedance 101. Furthermore, this phase difference and amplitude
The remaining ink amount (that is, change in z) is also included.

For example, by changing the resonance frequency of the external resonance circuit 101, the output (impedance) from the oscillation circuit 102 formed in spherical silicon changes according to the change in the surrounding environment. The presence or absence of ink and the remaining amount of ink can be detected by detecting the ink property.

Therefore, the oscillating circuit formed in the spherical silicon is not only an energy generating means for generating electric power, but also a means for detecting a change in ink in the tank in relation to the oscillating circuit and the external resonance circuit. It can also be used as a unit.

Next, a method of manufacturing a three-dimensional semiconductor device according to the present invention will be described. FIG. 7 is a process chart for explaining an example of the method for manufacturing a three-dimensional semiconductor device of the present invention, and shows each process in a cross section passing through the center of the spherical silicon. Further, here, a manufacturing method in which the center of gravity of the spherical silicon is formed lower than the center, the upper part inside the spherical body is made hollow, and the hollow part is kept in an airtight state is taken as an example.

[0077] Figure 7 to the spherical silicon shown in (a), the thermally oxidized SiO ₂ as shown in FIG. 7 (b) on its entire surface
After forming the film 202, as shown in FIG.
_In order to form an opening 203 in a part of the _two films, patterning is performed using a photolithography process.

Then, as shown in FIG.
Anisotropic etching using a KOH solution through step 03 removes only the upper silicon portion to form a cavity 204. Thereafter, as shown in FIG.
Using the D method, a SiN film 205 is formed on the inner and outer surfaces of the three-dimensional device.
To form

Further, as shown in FIG.
Using a VD method, a Cu film 206 is formed on the entire surface of the three-dimensional device.
To form Then, as shown in FIG. 7G, the Cu film 206 is patterned by using a well-known photolithography process to form a conductor coil L having a number of turns N, which is a part of the oscillation circuit. Thereafter, the three-dimensional semiconductor element on which the conductor coil L is formed is taken out of the vacuum device into the atmosphere, and the upper opening 203 is closed with a sealing member 207 such as a resin or a plug.
The cavity 204 inside the spherical body is closed. By manufacturing in this way, the three-dimensional semiconductor element itself made of silicon can have buoyancy.

The drive circuit elements other than the coil L formed in such a floating type three-dimensional semiconductor element are NM
An OS circuit is used. FIG. 8 is a schematic cross-sectional view of the N-MOS circuit cut in a longitudinal direction.

Referring to FIG. 8, a P conductive Si substrate 401 is formed.
In addition, a P-Mos 450 is formed in the N-type well region 402 and an N-Mos 451 is formed in the P-type well region 403 by introducing and diffusing impurities such as ion plantation using a general Mos process. PM
The os 450 and the N-Mos 451 are formed through a gate insulating film 408 having a thickness of several hundred angstroms and have a thickness of 4000 to 5000 angstroms by poly-Si deposited by a CVD method. Region 4 into which impurity of the type is introduced
05, the drain region 406, etc.
os450 and N-Mos451 constitute a C-Mos logic.

N-Mos transistor 30 for element driving
No. 1 is obtained by the steps of impurity introduction and diffusion.
It comprises a drain region 411, a source region 412, a gate wiring 413, and the like on the mold well substrate 402.

Here, N-Mo is used as an element driving driver.
When the s-transistor 301 is used, the distance L between the drain and the gate constituting one transistor is about 10 at minimum.
μm. One of the breakdowns of the 10 μm is the width of the source and drain contacts 417, and the width of the contact 417 is 2 × 2 μm. 2, 2 μm.
Other than that, 4 μm of 2 × 2 μm for the distance between the contact 417 and the gate 413 and 4 μm for the width of the gate 413
And the total is 10 μm.

Between each element, 5000 angstroms or more and 1
An oxide film isolation region 453 is formed by field oxidation having a thickness of 0000 angstroms or less, and the elements are isolated. This field oxide film functions as the first heat storage layer 414.

After each element is formed, an interlayer insulating film 416 is formed.
Has a thickness of about 7,000 angstroms and has a PS
After being deposited with a G, BPSG film or the like and subjected to a flattening process or the like by heat treatment, wiring is performed by an Al electrode 417 serving as a first wiring layer via a contact hole. Thereafter, an interlayer insulating film 418 such as a SiO ₂ film was deposited by plasma CVD to a thickness of 10,000 to 15,000 angstroms, and a through hole was further formed.

The connection with the oscillation circuit as the receiving / energy converting means and the sensor section as the information obtaining means of the present invention is made through the through holes.

In any state of the ink tank provided with the floating type three-dimensional semiconductor element of this embodiment, the oscillation circuit formed in the spherical silicon by the above-described method and the oscillation circuit shown in FIG. A stable magnetic flux (magnetic field) needs to work between the external resonance circuit. However, when floating in a liquid such as ink, the liquid surface may vibrate due to external vibration. Even in such a case, in order to maintain a stable state in the liquid, in this example, the center of gravity of the floating type three-dimensional semiconductor element is determined.

As shown in FIG. 9, when the three-dimensional semiconductor element 210 of this example is floated in a liquid, FIG.
(1) Buoyancy F = weight W of the object (2) Action line of buoyancy and action line of weight (line passing through the center of gravity G)
It is necessary that the relationship that the two match.

Then, as shown in FIG. 9B, when the liquid vibrates due to an external force and the three-dimensional semiconductor element 210 is slightly tilted from the balanced state, the center of the buoyancy moves and the buoyancy and the weight are reduced. Become a couple.

Here, the action line of the weight in the balanced state (the dashed line in FIG. 9 (b)) and the action line of the buoyancy when inclined (the solid line in FIG. 9 (b)) The intersection is called a metacenter, and the distance h between the metacenter and the center of gravity is called the height of the metacenter.

As in this example, since the metacenter of the three-dimensional semiconductor element 210 is located at a position higher than the center of gravity, the couple (restoring force) acts in a direction to return to the original balanced position. This restoring force: T

[0092]

T = Whsinθ = Fhsinθ = ρgVhsinθ (> 0) Here, V is the volume of the liquid removed by the three-dimensional semiconductor element 210, and ρg is the specific weight of the three-dimensional semiconductor element 210.

In order to make this restoring force positive,
It is a necessary and sufficient condition that h> 0.

Then, from FIG. 9B,

[0095]

[Equation 11] Becomes Here, I is the moment of inertia about the O axis. Therefore,

[0096]

(Equation 12) The three-dimensional semiconductor element 210 stably floats in the ink, supplies the dielectric electromotive force from the external resonance circuit, and performs the bidirectional communication with the communication means outside the element. Become.

As a two-way communication method with the external communication means at this time, a wireless LAN system using a microwave band frequency or a wireless access system using a quasi-millimeter wave / millimeter wave band frequency can be applied.

Here, the outline of transmission and reception by the wireless LAN system will be described. Hereinafter, data transmission from the three-dimensional semiconductor element to the recording device will be described. Conversely, when data is transmitted from the recording device to the three-dimensional semiconductor element, a data ID is allocated to each side, and identification is thereby performed.

The three-dimensional semiconductor device on the transmission side has a line monitoring unit, a data handling unit, an acknowledgment check unit, and an error processing unit. The recording unit on the reception side has a data handling unit, an acknowledgment unit, An error processing unit, a display unit, and the like are provided.

FIG. 10 shows a flowchart for the three-dimensional semiconductor device on the transmitting side. In the case of transmitting data, after performing initial setting according to a determined transmission protocol, an address on the receiving side is set, and data is transmitted. If a signal collision occurs during transmission, or if no acknowledgment is returned from the designated receiving-side device, retransmission is performed. During operation, the status of the line and the presence / absence of an acknowledgment are displayed on a display unit provided in a recording device or the like on the receiving side to prompt the user to make an appropriate determination.

FIG. 11 shows a flowchart in the recording apparatus on the receiving side. This receiver always monitors the line,
After confirming its own address, data is fetched from the line and stored in a buffer in the main memory. If the block mark of every 16 bytes cannot be confirmed during reception, or if the checksums do not match in the error detection processing after the end of reception, the reception is stopped as a reception error, and the line is monitored again. Wait for the header to arrive. If the reception was successful without error, the received content is displayed on the display unit.

The three-dimensional semiconductor device of the embodiment described above supplies ink contained in a detachably mounted ink tank to an ink jet recording head, and prints on recording paper with ink droplets ejected from the recording head. It is preferable for an ink jet printer that detects ink information and tank information relating to the ink jet printer to be transmitted, transmits the information to the ink jet printer, controls the printer in an optimal manner, or controls to maintain the state of the tank in an optimum state. Applied.

FIGS. 12 to 15 show examples of the structure of an ink tank to which the three-dimensional semiconductor element of the present invention can be applied. In an ink tank 501 shown in FIG. 12, a flexible ink bag 502 containing ink is arranged in a housing 503, a bag opening 502a is closed by a rubber stopper 504 fixed to the housing 503, and an ink outlet 502 is provided. By inserting the hollow needle 505 into the rubber stopper 504 to communicate with the inside of the bag, ink is supplied to an inkjet head (not shown). The three-dimensional semiconductor element 506 of the present invention can be arranged in the ink bag 502 of such an ink tank 501.

The ink tank 511 shown in FIG.
In the figure, an ink jet head 515 for ejecting ink toward the recording paper S and performing recording is attached to an ink supply port 514 of a housing 512 containing the ink 513.
The three-dimensional semiconductor element 516 of the present invention can be arranged in the ink 513 in such a tank 511.

The ink tank 521 shown in FIG.
Comprises a first chamber in which ink 522 is housed in a completely sealed state;
It has a second chamber in the atmosphere communication state for accommodating the negative pressure generating member 523, and a communication path 524 for communicating the first and second chambers at the bottom of the tank. When ink is consumed from the ink supply port 525 on the second chamber side, the air 522 in the first chamber is led out to the second chamber instead of the air entering the first chamber from the second chamber side. The three-dimensional semiconductor element 526 of the present invention may be arranged in the first chamber of the tank 521 having such a configuration to exchange information regarding ink.

The ink tank 531 shown in FIG.
Is an ink-jet head 5 that houses a porous member 532 holding ink and uses the stored ink for recording.
33 is attached. Tank 5 having such a configuration
Also in 31, the three-dimensional semiconductor element 534 of the present invention may be arranged on the ink tank side to exchange information about ink.

Next, FIG. 16 is a schematic diagram showing an example of the configuration of an ink jet recording apparatus equipped with an ink tank having the three-dimensional semiconductor element of the present invention. A head cartridge 601 mounted on the ink jet recording apparatus 600 shown in FIG. 16 includes a liquid discharge head that discharges ink for print recording, and FIGS. 12 to 15 that hold liquid supplied to the liquid discharge head. And a plurality of color ink tanks having the above-described structure. In addition, a communication circuit (reference numeral 150 in FIG. 1) for communicating with a three-dimensional semiconductor element disposed in each color ink tank by electromagnetic waves is installed in the printing apparatus 600. A resonance circuit (supply unit for energy to be an electromotive force) 101 included in the communication circuit is provided in the carriage 7, and can transmit an electromagnetic wave signal to the three-dimensional semiconductor element of each color. When the head cartridge 100 is mounted on the carriage 7, the conductor coil L of the oscillation circuit 32 of the element in the tank and the coil La of the external resonance circuit 31 on the carriage side are designed to be adjacent to each other.

As shown in FIG. 16, the head cartridge 601 engages with the spiral groove 606 of the lead screw 605 rotating via the driving force transmission gears 603 and 604 in conjunction with the forward and reverse rotation of the drive motor 602. Is mounted on a carriage 607. The head cartridge 601 is moved by the power of the drive motor 602 to the carriage 6.
07 is reciprocated along the guide 608 in the directions of arrows a and b. The inkjet recording apparatus 600 includes a recording medium transport unit (not shown) that transports a printing paper P as a recording medium that receives a liquid such as ink discharged from the head cartridge 601. The paper pressing plate 610 of the print paper P conveyed on the platen 609 by the recording medium conveying means presses the print paper P against the platen 609 in the moving direction of the carriage 607.

In the vicinity of one end of the lead screw 605, photocouplers 611 and 612 are provided. The photocouplers 611 and 612 are
07, the photocouplers 611 and 6
This is a home position detecting means for confirming the presence in the area No. 12 and switching the rotation direction of the drive motor 602. In the vicinity of one end of the platen 609, a support member 613 that supports a cap member 614 that covers the front surface of the head cartridge 601 having the discharge port is provided. In addition, an ink suction unit 615 that sucks ink that has been idly discharged from the head cartridge 601 and accumulated inside the cap member 614 is provided. The ink suction unit 615 performs suction recovery of the head cartridge 601 through the opening of the cap member 614.

The ink jet recording apparatus 600 is provided with a main body support 619. The moving member 618 is attached to the main body support 619 in the front-rear direction,
It is supported so as to be movable in a direction perpendicular to the direction of movement 07. The cleaning blade 617 is attached to the moving member 618. Cleaning blade 6
Reference numeral 17 is not limited to this form, and may be another form of a known cleaning blade. Further, the ink suction means 6
15 is provided with a lever 620 for starting suction in the suction recovery operation by the lever 15. The lever 620 moves with the movement of the cam 621 engaging with the carriage 607, and the driving force from the driving motor 602 switches the clutch. The movement is controlled by a known transmission means such as the like. An ink jet recording control unit for giving a signal to a heating element provided in the head cartridge 601 and controlling the driving of each mechanism described above is provided on the recording apparatus main body side.
It is not shown in FIG.

In the ink jet recording apparatus 600 having the above-described configuration, the head cartridge 601 reciprocates over the entire width of the print paper P with respect to the print paper P transported on the platen 609 by the recording medium transport means. When a drive signal is supplied from a drive signal supply unit (not shown) to the head cartridge 601 during this movement, ink (recording liquid) is ejected from the liquid ejection head unit to the recording medium in accordance with the signal, and recording is performed. Done.

[0112]

According to the three-dimensional semiconductor device of the present invention, only when the external electromagnetic wave signal satisfies a predetermined response condition, the three-dimensional semiconductor device is provided with the communication function of acquiring the surrounding environment information and transmitting it to the outside. Therefore, ambient environment information for each element can be obtained independently. Further, since information can be obtained and transmitted three-dimensionally, there is less restriction on the direction of information transmission as compared with the case where a flat semiconductor element is used. Therefore, it is possible to efficiently obtain the surrounding environment information and transmit it to the outside.

Further, by arranging at least one such three-dimensional semiconductor element in the ink tank, information on the ink contained in the ink tank, the pressure in the tank, and the like can be transferred in real time to an external device such as an ink jet recording apparatus. Can be transmitted. This is advantageous, for example, in controlling the amount of negative pressure in the tank that changes momentarily with the consumption of ink to stabilize inkjet discharge.

In particular, when the above-mentioned three-dimensional semiconductor elements are arranged in a plurality of ink tanks, information corresponding to the received signal is obtained and stored only when the received electromagnetic wave signal satisfies a predetermined response condition. Since the result of the comparison with the information can be transmitted to the outside together with the obtained information, if the response condition is changed for each tank, the information for each ink tank can be obtained independently. So, without mistakes,
For example, an ink tank that has run out of ink can be replaced.

Further, since the power for operating the three-dimensional semiconductor element is supplied in a non-contact manner, a power supply for starting the element is provided in the ink tank, and a power supply wiring is connected to the element. It can be used in places where direct wiring with the outside is difficult. In addition, since it functions in a non-contact close position, it is possible to handle a plurality of colors at one position. It can also be transmitted during printing.

For example, by forming a conductor coil of an oscillation circuit around an outer surface of a three-dimensional semiconductor device, power is generated in the conductor coil by electromagnetic induction between the resonance coil and an external resonance circuit. Can be supplied with power in a contactless manner.

In this case, since a coil is wound around the outer surface of the element, the magnitude of the inductance of the coil changes according to, for example, the remaining amount of ink, the ink concentration, and the ink pH in the ink tank. Therefore, since the oscillation circuit changes the oscillation frequency in accordance with the change in the inductance, it is also possible to detect the remaining amount of the ink in the ink tank and the like based on the change in the changed oscillation frequency.

The three-dimensional semiconductor element has a cavity for floating in a liquid, and the center of gravity of the element is formed below the center of the element. The print head and ink tank mounted on the device operate serially, and even if the ink in the ink tank swings up, down, left, and right, the information and information about the ink are stably suspended in the ink in the ink tank. , The pressure in the tank and the like can be accurately detected. In addition, the coil of the oscillation circuit formed on the element is held at a stable position with respect to the coil of the external resonance circuit, and stable two-way communication is always possible.

[Brief description of the drawings]

FIG. 1 is a schematic configuration diagram illustrating an inkjet recording apparatus according to a first embodiment of the present invention.

FIG. 2 is a view showing a conductor coil wound around a surface to constitute a receiving / energy converting means of the three-dimensional semiconductor device of the present invention.

FIG. 3 is a block diagram showing an internal configuration of the three-dimensional semiconductor device of the present invention and an exchange with the outside.

FIG. 4 is an explanatory diagram of a concept of exchanging digital IDs by electromagnetic induction between an apparatus body and a three-dimensional semiconductor element in a tank in an ink jet recording apparatus according to a second embodiment of the present invention.

FIG. 5 is a diagram showing an operation flow of acquiring information in a tank of a specific color using the exchange of digital IDs shown in FIG. 4;

FIG. 6 is a diagram for explaining the principle of power generation of energy generating means which is a component of the three-dimensional semiconductor device of the present invention.

FIG. 7 is a process chart illustrating an example of a method for manufacturing a three-dimensional semiconductor device of the present invention.

FIG. 8 shows an N-MO used in the three-dimensional semiconductor device of the present invention.
FIG. 3 is a schematic cross-sectional view cut along an S circuit.

FIG. 9 is a diagram for explaining conditions for maintaining a stable state in the liquid of the three-dimensional semiconductor element manufactured by the method shown in FIG. 7;

FIG. 10 is a diagram showing a flowchart for a transmitting-side three-dimensional semiconductor element when bidirectional communication is performed between the three-dimensional semiconductor element and the recording device according to the embodiment of the present invention.

FIG. 11 is a diagram showing a flowchart in the recording device on the receiving side when bidirectional communication is performed between the three-dimensional semiconductor element and the recording device according to the embodiment of the present invention.

FIG. 12 is a diagram showing a configuration example of an ink tank to which the three-dimensional semiconductor element of the present invention can be applied.

FIG. 13 is a diagram showing a configuration example of an ink tank to which the three-dimensional semiconductor element of the present invention can be applied.

FIG. 14 is a diagram showing a configuration example of an ink tank to which the three-dimensional semiconductor element of the present invention can be applied.

FIG. 15 is a diagram showing a configuration example of an ink tank to which the three-dimensional semiconductor element of the present invention can be applied.

FIG. 16 is a schematic diagram showing a configuration example of an ink jet recording apparatus equipped with an ink tank provided with a three-dimensional semiconductor element of the present invention.

FIG. 17 is a diagram showing an ink remaining amount detecting device described in JP-A-6-143607.

FIG. 18 is a diagram illustrating an ink remaining amount detection device described in Japanese Patent No. 2947245.

[Explanation of symbols]

11, 210 Three-dimensional semiconductor element 12 Electromagnetic wave 13 Power 14 Reception and energy conversion means 15 Information acquisition means 16 Judgment means 17 Information storage means 18 Information transmission means 101 External resonance circuit 102 Oscillation circuit 150 Communication circuit 151 Induction coil 152 Frequency modulator 201 Spherical silicon 202 SiO ₂ film 203 Opening 204 Cavity 205 SiN film 206 Cu film 207 Sealing member

Continued on the front page (72) Inventor Yoshiyuki Imanaka 3-30-2 Shimomaruko, Ota-ku, Tokyo Inside Canon Inc. (72) Inventor Mochizuki Noga 3-30-2 Shimomaruko, Ota-ku, Tokyo Canon Inc. (72) Inventor Takaaki Yamaguchi 3-30-2 Shimomaruko, Ota-ku, Tokyo Inside Canon Inc. (72) Inventor Ichiro Saito 3-30-2 Shimomaruko, Ota-ku, Tokyo Inside Canon Inc. (72) Inventor Ryoji Inoue 3-30-2 Shimomaruko, Ota-ku, Tokyo F-term in Canon Inc. (reference) 2C056 EA29 EB20 EB29 EB30 EB51 EB59 EC26 FA10 HA51 KC11 KC13 KC14 KD06 2F014 AB02 AB03 EB02

Claims (23)

[Claims] A receiving / energy converting means for receiving a signal of an electromagnetic wave from outside in a non-contact manner and converting the electromagnetic wave into electric power by electromagnetic induction; an information obtaining means for obtaining external environmental information; Information accumulating means for accumulating information for comparison with information obtained by the information acquisition means, and information obtained by the information obtaining means when the signal of the electromagnetic wave received by the reception and energy conversion means satisfies a predetermined response condition, and Comparing the information stored in the information storage means to determine the necessity of information transmission; and determining the information obtained by the information obtaining means when the determination means determines that information transmission is necessary. Information transmitting means for displaying or transmitting to the outside, the information obtaining means, the information storage means, the determination means,
And a three-dimensional semiconductor device in which the information transmitting means operates with the electric power converted by the receiving and energy converting means. 2. The three-dimensional semiconductor device according to claim 1, wherein the response condition is an electromagnetic induction frequency. 3. The three-dimensional semiconductor device according to claim 1, wherein the response condition is a communication protocol. 4. The information transmission means converts the electric power converted by the reception and energy conversion means into a magnetic field, light, shape, color, radio wave, or sound, which is energy for displaying or transmitting information to the outside. 3. The three-dimensional semiconductor device according to claim 1, wherein the three-dimensional semiconductor device is converted into a three-dimensional semiconductor device. 5. The three-dimensional semiconductor device according to claim 1, wherein said receiving and energy converting means includes a conductor coil for generating electric power by electromagnetic induction with an external resonance circuit, and an oscillation circuit. 6. The three-dimensional semiconductor device according to claim 5, wherein the conductor coil is formed so as to be wound around an outer surface of the three-dimensional semiconductor device. 7. The three-dimensional semiconductor device according to claim 1, further comprising a cavity for floating at a predetermined position in the liquid surface or in the liquid. 8. The semiconductor device according to claim 7, wherein the center of gravity of the three-dimensional semiconductor element floating in the liquid is located below the center of the element, and does not rotate in the floating liquid and stably swings. Three-dimensional semiconductor device. 9. The three-dimensional semiconductor device according to claim 8, wherein the metacenter of the three-dimensional semiconductor device is always above the center of gravity of the three-dimensional semiconductor device. 10. An ink tank provided with at least one three-dimensional semiconductor element according to claim 1. 11. The ink tank according to claim 10, wherein a response condition of the three-dimensional semiconductor element varies depending on ink in the tank. 12. The ink tank according to claim 11, wherein a response condition of the three-dimensional semiconductor element differs depending on a color of ink in the tank. 13. The ink tank according to claim 11, wherein a response condition of the three-dimensional semiconductor element varies depending on a color material concentration of ink in the tank. 14. The ink tank according to claim 11, wherein a response condition of the three-dimensional semiconductor element differs depending on physical properties of ink in the tank. 15. An ink jet recording apparatus comprising a plurality of the ink tanks according to claim 11. 16. The ink jet recording apparatus according to claim 15, further comprising communication means for transmitting and receiving electromagnetic waves to and from the three-dimensional semiconductor element in each ink tank. 17. The ink jet recording apparatus according to claim 16, wherein said communication means has a resonance circuit for transmitting an electromagnetic wave. 18. A communication system using a three-dimensional semiconductor element, comprising: a plurality of liquid containers each having the three-dimensional semiconductor element disposed therein; and a conductor coil formed on each of the three-dimensional semiconductor elements. An oscillation circuit having information, an information obtaining means for obtaining information in the container, a receiving means for receiving a signal from the outside, and an information transmitting means for transmitting information to the outside when a predetermined response condition is satisfied, and the plurality of liquids An external resonance circuit installed outside the container for generating electric power by electromagnetic induction between the oscillation circuit of the three-dimensional semiconductor element and the receiving means and the information transmission means of the three-dimensional semiconductor element; A communication system comprising: external communication means for performing bidirectional communication. 19. The communication system according to claim 18, wherein the response condition differs for each container. 20. The communication system according to claim 19, wherein said response condition is an electromagnetic induction frequency. 21. The communication system according to claim 19, wherein said response condition is a communication protocol. 22. The three-dimensional semiconductor element floating in the liquid has a center of gravity located below the center of the element, and does not rotate in the floating liquid and swings stably.
22. The communication system according to any one of claims to 21. 23. The metacenter of a three-dimensional semiconductor device is always above the center of gravity of the three-dimensional semiconductor device.
3. The communication system according to 2.