JP2002001990A - Three-dimensional semiconductor element, ink tank, ink jet recording apparatus provided with the ink tank, and pressure adjustment method - Google Patents

Abstract

(57) [Summary] [PROBLEMS] To adjust the pressure in a container without contacting the outside of the container. SOLUTION: The three-dimensional semiconductor element 11 is attached to an ink tank whose inside is maintained at a negative pressure, and has an energy conversion means 14, a pressure detection means 15, and a pressure adjustment means 18. The energy conversion unit 14 converts an external electromotive force into electric power 13 and activates the pressure detection unit 15 and the pressure adjustment unit 18. The pressure detecting means 15
Detects the pressure in the ink tank. Pressure adjusting means 18
Is to introduce outside air into the ink tank based on the pressure detected by the pressure detecting means 15 to prevent the negative pressure of the ink tank from rising due to ink consumption.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a semiconductor device having a valve function for adjusting the pressure in a container. In particular, the present invention detects a pressure in an ink tank, and according to the detection result, maintains a pressure in the ink tank at a predetermined pressure, a semiconductor element, an ink tank including the element, and a detachable ink tank. The present invention relates to an inkjet recording apparatus such as a facsimile, a printer, and a copying machine to be mounted.

[0002]

2. Description of the Related Art Conventionally, while ejecting ink from a plurality of ejection nozzles provided on a recording head, a carriage on which the recording head is mounted is relatively scanned with respect to a sheet.
In an ink jet recording apparatus that forms an image on a sheet in a dot pattern, an ink tank containing recording ink is provided, and the ink in the ink tank is supplied to a recording head via an ink supply path.

A recording head has a large number of nozzles (ejection ports) for discharging ink, and ink supplied to the recording head from an ink tank is held in the nozzles by a balance between capillary action and surface tension. . Therefore, if the internal pressure of the ink tank is higher than the atmospheric pressure, the ink leaks from the nozzles, and the internal pressure of the ink tank needs to be in a negative pressure state. On the other hand, if the ink tank is a closed container, the negative pressure in the ink tank rises with the consumption of the ink in the ink tank. If the negative pressure is too high, the ink in the nozzles is drawn into the ink tank, and when the recording head is driven to eject ink from the nozzles, a problem occurs in that the ink is not ejected.

Therefore, a conventional ink tank accommodates an ink absorbing member such as a porous body or a fibrous body in the whole or a part of the inside thereof, and can communicate a chamber containing the ink absorbing member with the atmosphere. In this state, the ink absorbing member absorbs and holds the ink, so that the inside of the ink tank is in a negative pressure state.

[0005]

However, in the above-mentioned conventional ink tank, since the ink is absorbed and held by the ink absorbing member, the ink storage efficiency is reduced. Further, even if the inside of the ink tank is communicated with the atmosphere, the negative pressure increases as the amount of ink held in the ink absorbing member decreases, and depending on the relationship with the pressure outside the ink tank, the recording pressure may increase. There is a possibility that the ink will not be ejected from the head. Therefore, if a function of adjusting the pressure in the ink tank can be added to the ink tank, an ink absorbing member is not required, and the ink storage efficiency is improved. Therefore, such an ink tank is desired. Further, in order to adjust the pressure in the ink tank, it is necessary to know the pressure in the ink tank in some way, directly or indirectly.

In developing the above-described ink tank, the present inventors focused on a ball semiconductor manufactured by Ball Semiconductor, which forms a semiconductor integrated circuit on a spherical surface of a silicon ball having a diameter of 1 mm. However, an investigation of a device having such a function reveals a technology for connecting the ball semiconductors with each other by electric wiring (US Pat. No. 5,587,587).
No. 7943), and it is necessary to develop an element itself having the above-mentioned pressure adjusting function and pressure detecting function. Further, in order to effectively apply this element to the ink tank, there is also a problem of supplying power for starting the element. If the ink tank has a power supply for starting the element, the tank becomes large, or even if a power supply is provided outside the tank, a connecting means between the power supply and the element is required, which increases the manufacturing cost of the tank and increases the tank cartridge. Therefore, the device must be started up from outside without contact.

[0007] An object of the present invention is to provide a three-dimensional semiconductor device capable of adjusting the pressure in a container without contacting the outside of the container.

Another object of the present invention is to provide, in addition to the above objects, a three-dimensional semiconductor device capable of detecting the pressure in a container and adjusting the pressure in the container based on the detected pressure.

A further object of the present invention is to provide an ink tank that satisfactorily supplies ink to a recording head by adjusting a negative pressure in an ink storage section, and an ink jet recording apparatus provided with the ink tank. .

[0010]

A three-dimensional semiconductor device according to the present invention for achieving the above object is a three-dimensional semiconductor device which is disposed in a container whose inside is maintained at a negative pressure. Pressure adjusting means for adjusting the negative pressure inside the container in accordance with the negative pressure of the container, and energy for converting the energy given from the outside into energy of a type different from the energy for operating the pressure adjusting means. Conversion means.

The three-dimensional semiconductor device of the present invention is provided in a container whose inside is maintained at a negative pressure, and the negative pressure inside the container is adjusted by pressure adjusting means. Energy for operating the pressure adjusting means is provided by converting energy from the outside into different kinds of energy by the energy converting means.

As described above, since the function of adjusting the negative pressure in the container is built into the three-dimensional semiconductor element, the part of the three-dimensional semiconductor element is exposed to the outside of the container, and the other part is exposed to the outside. A portion can be exposed inside the container and attached to the container. In this case, the pressure adjusting means includes a passage communicating between the inside and the outside of the container and a valve mechanism for opening and closing the passage, so that outside air is introduced into the container by opening and closing the passage by the valve mechanism. Thus, the negative pressure in the container can be adjusted.

The information on the negative pressure in the container may be given from the outside of the three-dimensional semiconductor element, or the three-dimensional semiconductor element itself may have pressure detecting means for detecting the negative pressure inside the container. . When the three-dimensional semiconductor element has a pressure detecting means, the pressure detecting means has a diaphragm formed of a polysilicon film, and detects a negative pressure in the container by using a resistance value change due to a mutation of the diaphragm. A pressure sensor can be used.

The three-dimensional semiconductor device of the present invention is preferably applied to an ink tank for storing ink to be supplied to a recording head in the field of ink jet recording.
The inside of the ink tank is in a negative pressure state in order to discharge the ink from the recording head satisfactorily. However, the negative pressure in the ink tank fluctuates with the ejection of ink from the recording head. Therefore, it is very important to appropriately maintain the negative pressure in the ink tank in order to perform high-quality printing.

Therefore, an ink tank of the present invention is an ink tank for storing ink to be supplied to a discharge head for discharging ink, and has the three-dimensional semiconductor element of the present invention.

Further, the ink tank of the present invention is an ink tank which stores ink to be supplied to a discharge head for discharging ink, and has an interior maintained at a negative pressure. The apparatus includes pressure adjusting means for adjusting the negative pressure, and energy converting means for converting energy supplied from the outside into energy of a type different from the energy for operating the pressure adjusting means.

As described above, by adding the function of the three-dimensional semiconductor element of the present invention having the pressure adjusting means to the ink tank, it is possible to appropriately maintain the negative pressure in the ink tank, and it is possible to appropriately maintain the negative pressure in the ink tank. Therefore, it is not necessary to hold the ink in the ink absorbing member in order to generate the negative pressure, and the ink storage efficiency is improved. Further, since it is not necessary to form an ink absorbing member for generating a negative pressure and a dedicated container or a dedicated chamber, a low-cost ink tank is achieved.

Further, according to the present invention, a pressure adjusting means disposed in a container whose inside is maintained at a negative pressure, for adjusting the negative pressure inside the container according to the negative pressure inside the container, Pressure detection for detecting the pressure in the container using a three-dimensional semiconductor element having energy conversion means for converting the energy provided from the pressure adjustment means into energy of a different type from the energy for operating the pressure adjustment means. A pressure regulating method is provided, wherein the pressure detected by the means is compared with the pressure in the container to keep the pressure in the container constant.

An ink jet recording apparatus according to the present invention includes a discharge head for discharging ink, and an ink tank according to the present invention for storing ink to be supplied to the discharge head.

In the present specification, the “three-dimensional shape” of the “three-dimensional semiconductor device” includes all three-dimensional shapes such as a triangular prism, a sphere, a hemisphere, a quadratic prism, a spheroid, and a uniaxial rotator.

[0021]

Embodiments of the present invention will be described below with reference to the drawings.

(First Embodiment) FIG. 1 is a schematic sectional view of an ink tank according to a first embodiment of the present invention, and FIG. 2 is a sectional view showing the internal structure of the three-dimensional semiconductor device shown in FIG. FIG. 2 is a block diagram showing exchange with the outside.

As shown in FIG. 1, an ink tank 1 of this embodiment includes an ink storage chamber 2 for storing ink, an ink supply port 3 for supplying ink in the ink storage chamber 2 to a recording head 4, and Having. The recording head 4 is detachably or fixedly connected to the ink tank 1 and is connected to the ink supply port 3, and discharges ink supplied from the ink tank 1 from a plurality of discharge ports (not shown) based on a recording signal. Thus, recording is performed on the recording medium. In the recording head 4,
The ink supplied from the ink tank 1 is held in the ejection port by a balance between capillary action and surface tension. In order to prevent the ink from leaking from the recording head 4 except during the recording operation, the ink storage chamber 2 is provided. Inside is kept at negative pressure.

In the ink tank 1, a three-dimensional semiconductor element (hereinafter simply referred to as “element”) 11 is partially exposed to the outside of the ink tank 1, and another part is disposed in the ink storage chamber 2. It is fixed in a state where it is exposed inside. Although the mounting position of the element 11 is not particularly limited, at least a position where the portion exposed in the ink storage chamber 2 does not come into contact with the ink in the use state of the ink tank 1, preferably, is mounted on the upper wall of the ink tank 1. Can be

The ink tank 1 is a container whose inside is substantially sealed. In order to prevent the ink from leaking from the ejection openings of the recording head 4 except during recording, a certain amount of ink in the ink chamber 2 is fixed. It is kept at negative pressure. However, since the ink tank 1 is a container whose inside is substantially sealed, the ink tank 1
, The negative pressure increases, that is, the negative pressure increases. If the negative pressure of the ink tank 1 becomes too high, it becomes difficult to discharge the ink even if the recording head 4 tries to discharge the ink, and eventually, the ink may not be discharged. Therefore, the element 11 of the present embodiment detects the pressure in the ink tank 1, communicates the inside and the outside of the ink tank 1 based on the detection result, and suppresses a rise in the negative pressure in the ink tank 1. Having.

The functional configuration of the element 11 will be described with reference to FIG.

As shown in FIG. 2, the element 11 includes an energy conversion means 14 for converting an electromotive force 12 supplied from the outside A of the ink tank 1 to the element 11 in a non-contact manner into an electric power 13, and an energy conversion means. Power 1 converted in 14
3, the pressure detecting means 15, the judging means 16,
An information storage unit 17 and a pressure adjusting unit 18 are provided. Electromagnetic induction, heat, light, radiation, or the like can be applied to the electromotive force supplied to operate the element 11. It is desirable that at least the energy conversion means 14 is formed on or near the surface of the element 11.

The pressure detecting means 15 detects the pressure in the ink tank, which is information on the surrounding environment of the element 11, and determines
Output to 6. Examples of the pressure detection unit 15 include a pressure sensor that has a diaphragm on the surface of the element 11 and detects pressure from displacement of the diaphragm based on pressure fluctuation. The judging unit 16 compares the tank internal pressure information detected by the pressure detecting unit 15 with the information stored in the information storage unit 17 and determines whether the detected tank internal pressure information needs to be transmitted to the pressure adjusting unit 18. Judge. The information accumulating unit 17 accumulates the condition of the internal pressure, which is the upper limit of the negative pressure necessary for discharging ink from the recording head 4 attached to the ink tank 1, and the tank internal pressure information itself detected by the pressure detecting unit 15.

The pressure adjusting means 18 is driven by the electric power supplied from the energy converting means 14 based on a command from the judging means 16, and adjusts the pressure in the ink tank 1. As the pressure adjusting means 18, for example, a valve mechanism for communicating the inside and the outside of the ink tank 1 can be used. In this case, the adjustment of the internal pressure in the ink tank 1 is as follows.
The result detected by the pressure detection means 15 and the information storage means 1
The internal pressure of the ink tank 1 can be set to an appropriate internal pressure by taking the difference from the value of the internal pressure of the ink tank stored in 7 and controlling the opening time of the valve mechanism according to the magnitude.

FIG. 3 is a flow chart for explaining the operation of the device shown in FIG. Referring to FIGS. 1 to 3, when an electromotive force 12 is applied from the outside A of the ink tank 1 toward the element 11, the energy conversion means 14 converts the electromotive force 12 into electric power 13, and the power 13 The detection unit 15, the determination unit 16, the information storage unit 17, and the pressure adjustment unit 18 are activated.

The activated pressure detecting means 15 detects the internal pressure of the ink tank 1 (step S11 in FIG. 3). Next, the determination means 16 reads the stored information from the information storage means 17 (step S12 in FIG. 3), compares the read conditions with the detected tank internal pressure information, and determines whether the internal pressure of the ink tank 1 needs to be adjusted. (Step S in FIG. 3)
13). The initial pressure of the ink tank 1 is set by a dedicated inspection device at the time of shipment from the factory after filling the ink (step S16 in FIG. 3).
Are written as initial information (step S17 in FIG. 3) (portion shown as an appropriate range in FIG. 19).

In step S13, the detected internal pressure of the ink tank 1 is within the range of the internal pressure of the ink tank 1 stored in the information storage means 17, and the determination means 16
If it is determined that the internal pressure of the ink tank 1 does not need to be adjusted, the pressure adjusting means 18 is not driven, and the current internal pressure information of the ink tank 1 is stored in the information storing means 17 (step in FIG. 3). S14). FIG. 19 shows an example of the stored internal pressure information. As a result, it is possible to grasp the temporal change of the negative pressure due to the consumption of the ink in the ink tank 1 and the temporal change of the negative pressure during the serial scanning of the print head. The information can be transmitted to the control circuit of the print head to optimize the recovery operation of the print head and the setting of the driving conditions.

In step S13, the detected negative pressure of the ink tank 1 is lower than the upper limit of the internal pressure of the ink tank 1 stored in the information storage means 17, and the determining means 16 determines the internal pressure of the ink tank 1 If it is determined that the adjustment is necessary, the pressure is converted by the energy conversion unit 15 and the pressure adjustment unit 18 is driven by the electric power 13. If the pressure adjustment unit 18 is a valve mechanism, for example, Is adjusted (step 15 in FIG. 3).

When used in an ink jet recording apparatus, a preferable position for providing a means for supplying an electromotive force as external energy to the element 11 is, for example, a recording head,
A carriage, a recovery position of the recording head, a carriage return position, and the like are given. In addition, if an apparatus having a means for supplying an electromotive force is used,
It is possible to know the state of the inside of the ink tank even without an ink jet recording apparatus, for example, it is also possible to adjust the internal pressure of the ink tank at a factory or a store without actually mounting the ink tank on the ink jet recording apparatus. .

As described above, by providing the element 11 in the ink tank 1, the internal pressure of the ink tank 1 can be detected and adjusted to a predetermined internal pressure only by applying the electromotive force 12 to the element 11. As a result, regardless of the remaining amount of ink in the ink tank 1, the recording head 4
It is possible to maintain a favorable negative pressure state suitable for discharging ink from the recording head 1, and to supply the recording head 1 with ink stably. Further, since it is not necessary to absorb and hold the ink in the ink absorbing member as in the related art in order to keep the inside of the ink tank 1 in a negative pressure state, the ink storage efficiency can be improved.

Further, according to the present embodiment, since the element 11 has the energy conversion means 15, there is no need to perform direct electrical wiring with the outside, and direct electrical wiring with the outside is performed. The element 11 can be used even in a place where it is difficult. Furthermore, since the element 11 has the energy conversion means 15, it is not necessary to provide a means (power supply in this example) for accumulating an electromotive force for operating the element 11. Therefore, the size of the element 11 can be reduced, and the element 11 can be used at any position in the object. That is, the ink tank 1
The element 11 can be provided at the most appropriate place.
In the present embodiment, the electromotive force is supplied to the element 11 in a non-contact manner with the element 11, but a mode in which the electromotive force is supplied in temporary contact with the outside and then non-contact with the outside may be employed.

(Second Embodiment) FIG. 4 is a block diagram showing the internal structure of a three-dimensional semiconductor device according to a second embodiment of the present invention and the exchange with the outside. A three-dimensional semiconductor element (hereinafter, simply referred to as an “element”) 21 in the form shown in this figure is fixed to an ink tank (not shown) similarly to the element 11 shown in FIG. Energy conversion means 24 for converting electromotive force 22 supplied to element 21 in a non-contact manner into electric power 23
And a pressure detection unit 25, a determination unit 26, an information storage unit 27, a pressure adjustment unit 28, and a reception unit 29, which are activated by the power converted by the energy conversion unit 24. This embodiment is different from the first embodiment in that the first embodiment has a receiving function, that is, the first embodiment has a receiving unit 29.
In other respects, the third embodiment is the same as the first embodiment. Electromotive force 22 supplied to operate element 21
, Electromagnetic induction, heat, light, radiation and the like can be applied. It is desirable that at least the energy conversion means 24 and the reception means 29 are formed on or near the surface of the element 21.

The pressure detecting means 25 detects the pressure in the ink tank, which is the surrounding environment information of the element 21, and determines
Output to 6. The receiving unit 29 receives an input signal 30 from the external A, which is a supply source of the electromotive force 22, or an external B different from the external A. The judging means 26 makes the pressure detecting means 25 detect the ink tank internal pressure in response to the input signal from the receiving means 29, and compares the detected ink tank internal pressure information with the information stored in the information storing means 27. Then, it is determined whether or not the detected ink tank internal pressure information satisfies a condition for discharging ink from a recording head (not shown) attached to the ink tank.
The information storage unit 27 stores the conditions and the ink information itself obtained from the pressure detection unit 25. The pressure adjusting unit 28 is driven by the electric power provided by the energy converting unit 24 based on a command from the determining unit 26, and adjusts the internal pressure of the ink tank. As the pressure detecting means 25 and the pressure adjusting means 28, those similar to those in the first embodiment can be used.

FIG. 5 is a flowchart for explaining the operation of the device shown in FIG. Referring to FIGS. 4 and 5, when an electromotive force 22 is applied from the outside A toward the element 21, the energy conversion unit 24 converts the electromotive force 22 into an electric power 23.
And the power is used to activate the pressure detecting means 25, the determining means 26, the information storing means 27, the pressure adjusting means 28 and the receiving means 29.

In this state, the element 2 from the external A or the external B
1 is received by the receiving means 29 (step S21 in FIG. 5). This input signal 30
This is a signal for asking the element 21 of the internal pressure of the ink tank. The input signal 30 may be provided to the element 21 together with the electromotive force 22.

When the input signal 30 is received, the judgment means 2
6 makes the pressure detecting means 25 detect the internal pressure of the ink tank (step S22 in FIG. 5), reads out the stored information from the information storing means 27 (step S23 in FIG. 5), and the detected internal pressure satisfies the above-mentioned condition. Is determined (see FIG. 5).
Step S24). The initial pressure of the ink tank is set by a dedicated inspection device at the time of factory shipment after ink filling (step S26 in FIG. 5), and the information is stored in the ROM of the element 21 in the initial information (FIG. 5). 5 (step S27) (written as an appropriate range in FIG. 20).

If it is determined in step S24 that the detected internal pressure does not satisfy the condition, the pressure adjusting means 28 is driven to adjust the internal pressure of the ink tank (step S25 in FIG. 5). On the other hand, when the detected internal pressure satisfies the condition, the current internal pressure increase of the ink tank is stored in the information storage unit 27 (step S2 in FIG. 5).
8). FIG. 20 shows an example of the stored internal pressure information. As a result, it is possible to grasp the temporal change of the negative pressure due to the consumption of the ink in the ink tank and the temporal change of the negative pressure during the serial scanning of the print head. The information can be transmitted to the control circuit of the print head to optimize the recovery operation of the print head and the setting of the driving conditions.

According to the present embodiment, since it has a function of receiving signals from the outside, in addition to the effects of the first embodiment, it is possible to respond to questions by various kinds of signals from the outside. It is possible to exchange information between the element and the outside.

In this embodiment, the case where the pressure detecting means 25 and the pressure adjusting means 28 are provided in one element 21 has been described. However, these pressure detecting means and the pressure adjusting means are provided in separate elements, and one of them is provided. The element detects the internal pressure of the ink tank and determines whether or not the internal pressure of the ink tank needs to be adjusted.
The pressure may be transmitted to the other element provided with the pressure adjusting means, and the pressure may be adjusted by the other element.

(Other Embodiments) Hereinafter, other embodiments applicable to the above-described embodiments will be described.

<Energy Conversion Means> A specific example of the energy conversion means will be described with reference to an example in which electric power is generated using electromagnetic induction.

FIG. 6 is a diagram for explaining an example in which the energy conversion means, which is a component of the three-dimensional semiconductor device of the present invention, generates electric power using electromagnetic induction.

[0048] In FIG. 6, an external resonator circuit 101 having a coil La, and an oscillation circuit 102 having a coil L, the coil L _a, is adjacent L is installed. In this state, when a current flows I _a in the coil L _a via the external resonance circuit 101, the magnetic flux B that penetrates the coil L of oscillation circuit 102 by the current I _a generated. Here, when the current _Ia is changed, the magnetic flux B passing through the coil L changes, so that an induced electromotive force V is generated in the coil L. Therefore, the oscillation circuit 102 is formed as an energy conversion means in the three-dimensional semiconductor device of the present invention, and the external resonance circuit 101 is connected to, for example, an inkjet recording apparatus outside the device, and the oscillation circuit 102 of the
By coil L and elements outside of the coil L _a of the resonant circuit 101 is disposed to be adjacent, in the induced electromotive force by electromagnetic induction from the outside, it is possible to generate electric power for operating the device.

The magnetic flux B that penetrates the coil L of oscillation circuit 102 to elaborate made as energy conversion means in the device is proportional to the product of number of turns N _a and current I _a of the coil L _a of the external resonant circuit 101, the proportionality constant Where k is

[0050]

(Equation 1) It is represented by

When the number of turns of the coil L is N,
The electromotive force V generated in the coil L is

[0052]

(Equation 2) Becomes

Here, the permeability of the magnetic core of the coil L is μ _a ,
When a magnetic field H, the distance between the coil L to elaborate make the coil L _a and the element of external resonance circuit 102 is z, the magnetic flux B is

[0054]

(Equation 3) Becomes

Further, the mutual inductance M of the equation (2)
Is

[0056]

(Equation 4) Becomes Here, μ _o is the magnetic permeability of a vacuum.

Then, the transmitting circuit 102 built in the element
The impedance Z of

[0058]

(Equation 5) And the impedance Z of the external resonance circuit 101
_a is

[0059]

(Equation 6) Becomes Here, J represents magnetization.

The external resonance circuit 101 has resonance (current value:
The impedance Z ₀ when I _a becomes maximum) is

[0061]

(Equation 7) And the phase delay φ of the resonance circuit 102 is

[0062]

(Equation 8) Becomes

The resonance frequency f _o of the external resonance circuit 101 is

[0064]

(Equation 9) Is required.

From the above relationship, when the impedance Z of the oscillation circuit 102 built in the element changes according to the change of the ink in the ink tank, the external resonance circuit 101
The frequency changes, the amplitude and phase difference of the impedance Z _a of the external resonant circuit 101, the change of the ink come appear. Further, the phase difference and the amplitude include the remaining amount of ink (that is, a change in Z).

For example, by changing the resonance frequency fo of the external resonance circuit 101, the oscillation circuit 1
Since the output from Z02 (impedance Z) changes according to a change in the surrounding environment, the presence or absence of ink and the remaining amount of ink can be detected by detecting this frequency dependency.

Therefore, the oscillation circuit 10 built in the element
Reference numeral 2 can be used not only as an energy conversion unit for generating electric power but also as a unit for detecting a change in ink in the ink tank based on the relationship between the oscillation circuit 102 and the external resonance circuit 101.

In the example shown in FIG. 6, electromagnetic induction by a coil is used for external energy for supplying electric power for activating the element, but light and darkness of light may be used instead.
When converting light and darkness of light into an electric signal, using a material whose resistance value changes by irradiation of light (for example, a photoconductor),
Electric power can be generated by the photoconductive effect. As the photoconductor, for example, CdS, InSb or Hg _0.8 Cd
_0.2 binary alloy / ternary alloys such as Te or, GaAs, S
i, Va-Si or the like is used. Further, when heat is used as an electromotive force, power can be generated from the radiant energy of a substance by a quantum effect.

<Pressure Adjusting Means> An example of a specific structure of the pressure adjusting means will be described together with its manufacturing process.

FIG. 7 shows an example of the structure of the pressure adjusting means provided in the three-dimensional semiconductor device of the present invention.
FIG. 8 is a diagram for explaining a case of forming on spherical silicon used for a semiconductor, and FIG. 8 is a diagram for explaining a manufacturing process of the pressure adjusting means shown in FIG. 7. 7 and 8 show a cross section passing through the center of the spherical silicon.

As shown in FIG. 7, base electrodes 201 are respectively provided at two positions of spherical silicon 200 facing each other.
Are formed. Further, a SiN film 206 is formed surrounding the spherical silicon 200. SiN film 20
Reference numeral 6 denotes movable portions 210 and 211 in which the region facing each base electrode 201 is cantilevered at a distance from the surface of the spherical silicon 200. Each movable part 210, 21
1 is provided with a bulb electrode 205 facing the base electrode 201, respectively. Also, the SiN film 2106
Is formed in such a manner that a region extending from one base electrode 201 to the other base electrode 201 is spaced apart from the spherical silicon 200, and this portion is
The passage 212 allows gas to flow between the 10 side and the other movable section 211 side.

Next, a method of manufacturing the pressure adjusting means shown in FIG. 7 will be described with reference to FIG.

First, the spherical silicon 20 shown in FIG.
1 on the entire surface, as shown in FIG.
An SG (phospho silicate glass) film 202 is formed.
Before the PSG film 202 is formed, base electrodes 201 are respectively formed on the spherical silicon 201 at two locations symmetrical with respect to the center thereof. Thereafter, as shown in FIG. 8C, the PSG film 202 is formed by using a photolithography process to form an opening 203 for exposing at least the base electrode 201 in the PSG film 202 and a passage to be described later. 202 is patterned.

Then, as shown in FIG. 8D, the metal CV is covered with the base electrode 201 and the PSG film 202.
A Cu film 204 is formed by the D method, and the Cu film 204 is formed.
Is removed except for the part on the base electrode 201 and the surrounding area. Thereafter, as shown in FIG.
The bulb electrode 20 is placed on a portion of the
5 is formed, and the PSG film 202, the Cu film 204, and the valve electrode 2 are formed all around the spherical silicon 200.
05, an SiN film 206 is formed by using the PECVD method.

Further, as shown in FIG. 8F, the SiN film 206 is patterned into a shape of a movable portion. FIG. 9 shows a schematic plan view of the element at this stage. SiN film 206
By patterning the SiN film 2 as shown in FIG.
06 on the Cu film 204, the radial slit 20
6a is formed. Then, the Cu film 204 and the PSG
The film 202 is appropriately dissolved and removed with a solvent. This allows
As shown in FIG. 8 (g), movable parts 210 and 211 which are supported at a distance from the spherical silicon 200 and function as valves are provided at two places, an upper part and a lower part, respectively, and the upper movable part 210 and the spherical silicon 200 are provided. Thus, a three-dimensional semiconductor element having a structure in which the space between the two and the space between the lower movable part 211 and the spherical silicon 200 are connected to each other by the passage 212 is obtained.

When attaching the three-dimensional semiconductor element to the ink tank, one movable part 210 is located outside the ink tank and the other movable part 211 is located inside the ink tank.

Next, a method of adjusting the pressure in the ink tank to which the three-dimensional semiconductor element having the above-described pressure adjusting means is attached will be described with reference to FIGS. 7, 10 and 11.

FIG. 10 is an equivalent circuit diagram of an electrical configuration related to the pressure adjusting means shown in FIG. As is apparent from this figure, a capacitor C is formed between the valve electrode and the base electrode facing each other. Also, FIG.
8 is a timing chart illustrating an example of signals applied to a valve electrode and a base electrode by the pressure adjusting unit illustrated in FIG. 7.

First, the base electrode 201 and the valve electrode 205 are set to the GND level. And
A high-level signal is applied to the base electrode 201, and a high-level signal is further applied to the valve electrode 205. As a result, electrostatic attraction acts between the bulb electrode 205 and the base electrode 201, and the bulb electrode 205 is attracted to the base electrode 201. As a result, the movable parts 210 and 211
Is displaced to the spherical silicon 200 side and the spherical silicon 200
, And both ends of the passage 212 are closed. That is, the outside and the inside of the ink tank are in a non-communication state.

With this state as an initial state, ink in the ink tank is consumed. Then, if necessary, the internal pressure of the ink tank is detected by a pressure detecting means (not shown). The negative pressure in the ink tank rises with the consumption of the ink in the ink tank, and when the detected internal pressure becomes higher than a predetermined negative pressure, a low level signal is applied to the valve electrode 205. Thereby, the movable parts 210 and 211 are separated from the spherical silicon 200, and the passage 212 is opened. As a result, air enters from the outside of the ink tank to the inside through the passage 212, and the negative pressure in the ink tank decreases. When the negative pressure in the ink tank reaches a predetermined value, a high-level signal is applied to the valve electrode 205 again to
Displace 10, 211 to close passageway 212.

Whether the negative pressure in the ink tank has reached a predetermined value is determined by controlling the time for opening the passage 212 in accordance with the difference between the result of detection by the pressure detecting means and the optimum negative pressure value. Alternatively, the opening of the passage 212 for a predetermined time may be repeated a plurality of times, or the pressure in the ink tank may be detected in real time by the pressure detecting means, and the detection may be performed based on the result.

In the example shown in FIG. 7, the structure having the movable parts 210 and 211 on both the outside and the inside of the ink tank is shown. However, if the outside and the inside of the ink tank can be shut off, one of them can be used. It may be provided only in the case.

<Pressure Detecting Means> An example of a specific structure of the pressure detecting means will be described.

FIG. 12 shows an example of the structure of the pressure detecting means provided in the three-dimensional semiconductor device of the present invention formed in a portion surrounded by a broken line of the device shown in FIG. 7, that is, in a passage constituting the pressure adjusting means. FIG. 13 and FIG. 14 are diagrams illustrating the manufacturing process of the pressure detecting means shown in FIG. 12 to 14, the same parts as those in FIG. 7 are denoted by the same reference numerals as in FIG. In the example shown in FIG. 12, since the pressure detecting means is provided in the passage 212, the side corresponding to the inside of the ink tank is detected so that the pressure inside the ink tank can be detected with the valve closed. Has no movable parts.

The pressure detecting means shown in FIG. 12 is a semiconductor strain gauge utilizing the piezoresistive effect in the polysilicon film, and is formed in the passage 212 of the pressure adjusting means. The polysilicon resistance layer 221 is formed on the surface of the spherical silicon 200 as a diaphragm partially raised via the cavity 225. Wirings 222 made of, for example, Cu or W are provided at both ends of the raised region of the polysilicon resistance layer 221. Then, the polysilicon resistance layer 221 and the wiring 222 are covered with a protective film 223 made of SiN, thereby constituting a pressure detecting means.

Next, a method of manufacturing the pressure detecting means shown in FIG. 12 will be described with reference to FIGS.
In the following description, it is assumed that the pressure detecting means is formed in a process after the state shown in FIG.

As shown in FIG. 13A, a PSG film 202 is formed on the surface of the spherical silicon 200. As shown in FIG. 13B, the PSG film 202 is patterned into the shape of the cavity 225 (see FIG. 12) by a photolithography process. Next, FIG.
As shown in FIG. 5, a polysilicon resistance layer 221 is formed by a plasma CVD method so as to cover the patterned PSG film 202 and the spherical silicon 200, and is patterned into a predetermined shape to be a diaphragm. Then, FIG.
As shown in (d), on the polysilicon resistance layer 221,
A metal film such as Cu or W is formed by a metal CVD method, and is patterned to form wirings 222 at positions corresponding to both ends of the diaphragm.

The wiring 222 is formed on the polysilicon resistance layer 221.
Is formed, as shown in FIG. 14E, an SiN film is formed by plasma CVD to cover them, and a protective film 223 is formed. Further, as shown in FIG. 14F, PSG is formed on the protective film 223 by a plasma CVD method.
A film 224 is formed, and a SiN film 206 is formed thereon as shown in FIG. The state shown in FIG. 14G corresponds to the state shown in FIG.

Thereafter, the movable parts 210, shown in FIG.
The SiN film 206 is patterned in order to form 211 (FIG. 8F), and finally, the PSG films 202 and 224 are removed, thereby forming the passage 21 as shown in FIG.
2, a pressure detecting means is formed.

Next, the principle of pressure detection by the pressure detecting means shown in FIG. 12 will be described with reference to FIG. 12 and FIG. 15 which is a circuit diagram of a circuit for monitoring the output from the polysilicon resistance layer shown in FIG. I do.

Referring to FIG. 15, polysilicon resistance layer 22
Assuming that the normal resistance value of 1 is r, a current of i = VDD / {R ₀ + R × r (R + r)} (10) flows through the ammeter 230. Further, polysilicon has a characteristic that the resistance value increases substantially in proportion to the displacement. Therefore, the change in the pressure in the passage 212 causes the polysilicon resistance layer 22
1 is displaced, the resistance value r of the polysilicon resistance layer 221 is changed.
Changes, and as a result, the current i measured by the ammeter 230
Also change. That is, the amount of displacement of the polysilicon resistance layer 221 is known from the change in the current i, and the
2, the pressure inside the ink tank can be detected.

More specifically, assuming that the length of the polysilicon resistance layer 221 is L and the cross-sectional area is S, the resistivity R is used, and the total resistance value R is represented by R = ρL / S (11) You. Here, when the polysilicon resistance layer 221 changes with a change in pressure, its length becomes L + ΔL and the resistance value increases. On the other hand, the cross-sectional area becomes small as S-ΔS, and ρ also changes to ρ ′. The relationship between the increase ΔR in resistance and the increase ΔL in length is:

[0093]

(Equation 10) In addition,

[0094]

[Equation 11] Becomes Here, kg represents a coefficient of change in resistance value with respect to strain.

Then, the pressure fluctuation can be obtained by detecting the change ΔR in the resistance value using a bridge circuit or the like.

Polysilicon has the characteristic that the strain resistance changes with temperature. Therefore, the polysilicon resistance layer 22
In the pressure sensing means having a value of 1, the polysilicon resistance layer 22
It is desirable to further include a temperature sensor for monitoring the temperature of the first. That is, by supplying the voltage VDD to the polysilicon resistance layer 221 via the temperature sensor, the resistance change of the polysilicon resistance layer 221 due to the change of the environmental temperature is compensated, and the internal pressure of the ink tank is more accurately detected. be able to.

<Driving Circuit> As described above, the three-dimensional semiconductor device of the present invention is provided with pressure adjusting means, pressure detecting means, and the like. Therefore, a circuit for driving them is built in the three-dimensional semiconductor element. An N-MOS circuit element can be used as the drive circuit element. FIG.
FIG. 1 shows a schematic cross-sectional view of the three-dimensional semiconductor device of the present invention cut along the N-MOS circuit device.

Referring to FIG. 16, a P conductive Si substrate 40 is formed.
1, a P-Mos 450 is formed in the N-type well region 402 and an N-Mos 451 is formed in the P-type well region 403 by impurity introduction and diffusion such as ion plantation using a general Mos process. P-
Mos 450 and N-Mos 451 are each formed of a poly-deposited by a CVD method to a thickness of 4000 to 5000 mm through a gate insulating film 408 having a thickness of several hundreds of mm.
A gate wiring 415 made of Si, and a source region 405 and a drain region 4 into which N-type or P-type impurities are introduced.
06, etc., of which P-Mos450 and N-Mo
C-Mos logic is configured by s451.

N-mos transistor 30 for driving the element
No. 1 is obtained by the steps of impurity introduction and diffusion.
It comprises a drain region 411, a source region 412, a gate wiring 413, and the like on the mold well substrate 402.

Here, N-Mo is used as an element driving driver.
When the s-transistor 301 is used, the distance L between the drain and the gate constituting one transistor is about 10 at minimum.
μm. One of the breakdowns of the 10 μm is the width of the source and drain contacts 417, and the width of the contact 417 is 2 × 2 μm. 2, 2 μm.
Other than that, 4 μm of 2 × 2 μm for the distance between the contact 417 and the gate 413 and 4 μm for the width of the gate 413
And the total is 10 μm.

[0110] Between each element, 5000Å or more
酸化 Oxide film isolation region 4 by field oxidation of thickness less than
53 are formed and the elements are separated. This field oxide film functions as the first heat storage layer 414.

After each element is formed, an interlayer insulating film 416 is formed.
Has a thickness of about 7000mm and is made of PSG and BPS by CVD method.
After being deposited with a G film or the like and subjected to a flattening process or the like by heat treatment, wiring is performed by an Al electrode 417 serving as a first wiring layer via a contact hole. afterwards,
Interlayer insulating film 41 such as a SiO ₂ film by a plasma CVD method
8 was deposited to a thickness of 10,000 to 15,000, and a through hole was formed. The connection with the oscillation circuit and the like shown in FIG. 6 is made through this through hole.

This N-Mos circuit is formed before forming the pressure adjusting means and the pressure detecting means.

<Ink Jet Recording Apparatus> FIG. 17 is a schematic perspective view of an ink jet recording apparatus equipped with an ink tank provided with the three-dimensional semiconductor element of the present invention. FIG.
A head cartridge 601 mounted on an ink jet recording apparatus 600 shown in FIG. 1 includes a liquid ejection head for ejecting ink for print recording, and an ink as shown in FIG. 1 for holding liquid supplied to the liquid ejection head. And a tank. An external energy supply means 622 for supplying an electromotive force as external energy to a three-dimensional semiconductor element (not shown) disposed in the ink tank;
A unit (not shown) for bidirectionally communicating information with the three-dimensional semiconductor element is provided in the recording device 600.

As shown in FIG. 17, the head cartridge 601 engages with the spiral groove 606 of the lead screw 605 rotating via the driving force transmission gears 603 and 604 in conjunction with the forward / reverse rotation of the drive motor 602. Is mounted on a carriage 607. The head cartridge 601 is moved by the power of the drive motor 602 to the carriage 6.
07 is reciprocated along the guide 608 in the directions of arrows a and b. The inkjet recording apparatus 600 includes a recording medium transport unit (not shown) that transports a printing paper P as a recording medium that receives a liquid such as ink discharged from the head cartridge 601. The paper pressing plate 610 of the print paper P conveyed on the platen 609 by the recording medium conveying means presses the print paper P against the platen 609 in the moving direction of the carriage 607.

Near the one end of the lead screw 605, photocouplers 611 and 612 are provided. The photocouplers 611 and 612 are
07, the photocouplers 611 and 6
This is a home position detecting means for confirming the presence in the area No. 12 and switching the rotation direction of the drive motor 602. In the vicinity of one end of the platen 609, a support member 613 that supports a cap member 614 that covers the front surface of the head cartridge 601 having the discharge port is provided. In addition, an ink suction unit 615 that sucks ink that has been idly discharged from the head cartridge 601 and accumulated inside the cap member 614 is provided. The ink suction unit 615 performs suction recovery of the head cartridge 601 through the opening of the cap member 614.

The ink jet recording apparatus 600 is provided with a main body support 619. The moving member 618 is attached to the main body support 619 in the front-rear direction,
It is supported so as to be movable in a direction perpendicular to the direction of movement 07. The cleaning blade 617 is attached to the moving member 618. Cleaning blade 6
Reference numeral 17 is not limited to this form, and may be another form of a known cleaning blade. Further, the ink suction means 6
15 is provided with a lever 620 for starting suction in the suction recovery operation by the lever 15. The lever 620 moves with the movement of the cam 621 engaging with the carriage 607, and the driving force from the driving motor 602 switches the clutch. The movement is controlled by a known transmission means such as the like. An ink jet recording control unit for giving a signal to a heating element provided in the head cartridge 601 and controlling the driving of each mechanism described above is provided on the recording apparatus main body side.
It is not shown in FIG.

In the ink jet recording apparatus 600 having the above-described configuration, the head cartridge 601 reciprocates over the entire width of the print paper P with respect to the print paper P conveyed on the platen 609 by the recording medium conveyance means. When a drive signal is supplied from a drive signal supply unit (not shown) to the head cartridge 601 during this movement, ink (recording liquid) is ejected from the liquid ejection head unit to the recording medium in accordance with the signal, and recording is performed. Done.

<Ink Tank> FIG. 1 shows an example in which ink is directly stored in a portion constituting an outer wall of the ink tank. However, the present invention is also applicable to an ink tank as shown in FIG. .

The ink tank shown in FIG. 18 has an outer wall 52 constituting a housing of the tank, and a flexible ink storage bag 53 housed inside the outer wall 52. The ink is stored in the ink storage bag. 53. Thereby, the confidentiality of the ink is improved, and the ink plays a role of preventing a material which is easily decomposed by ultraviolet light from the outside or a chemical reaction using the ultraviolet light as a catalyst. In such an ink tank, the three-dimensional semiconductor element 51 of the present invention is disposed on the outer wall, and the three-dimensional semiconductor element 51 is connected to the outer wall 52 by a negative pressure that changes with consumption of ink from the ink supply port. The internal pressure with the ink storage bag 53 can be kept constant.

As described above, the present invention has been described by taking as an example the case where the pressure in the ink tank used in the ink jet recording apparatus is adjusted. The present invention is not limited to this, and can be applied to any case of adjusting the pressure in a closed container, but most preferably, it is detachably mounted as described in each of the above embodiments. Ink is supplied to an ink jet recording head to supply the ink contained in the ink tank, and prints on recording paper with ink droplets ejected from the recording head. is there.

In the above description, the pressure adjusting means is:
The case of driving based on the pressure in the ink tank detected by the pressure detecting means has been described as an example.However, when a three-dimensional semiconductor element is used in the ink tank, the amount of ink consumed in the ink tank is Can be roughly estimated from the driving frequency of the recording head. Further, if the ink amount in the ink tank in the initial state (unused state) is constant, there is a correlation between the ink consumption and the pressure in the ink tank. Therefore, if the relationship between the driving frequency of the recording head and the pressure in the ink tank is determined in advance by measurement or the like, the pressure adjusting unit is driven based on the driving frequency of the recording head, without having the pressure detecting unit, The pressure in the ink tank can be maintained appropriately.

[0113]

As described above, according to the present invention, the function of converting external energy into different kinds of energy and adjusting the negative pressure in the container by the converted energy is provided in the three-dimensional semiconductor element. By making it, the negative pressure in the container can be adjusted without contact with the outside. In particular, by applying the three-dimensional semiconductor element of the present invention to the ink tank, the negative pressure in the ink tank can be appropriately maintained so that the ink can be properly discharged from the discharge head, and the ink can be stored therein. Efficiency can be improved.

[Brief description of the drawings]

FIG. 1 is a schematic sectional view of an ink tank according to a first embodiment of the present invention.

FIG. 2 is a block diagram showing an internal configuration of the three-dimensional semiconductor device shown in FIG. 1 and an exchange with the outside.

FIG. 3 is a flowchart illustrating an operation of the three-dimensional semiconductor device illustrated in FIG. 2;

FIG. 4 is a block diagram showing an internal configuration of a three-dimensional semiconductor device according to a second embodiment of the present invention and an exchange with the outside.

5 is a flowchart for explaining the operation of the three-dimensional semiconductor device shown in FIG.

FIG. 6 is a diagram for explaining an example of generating electric power using electromagnetic induction of an energy conversion unit which is a component of the three-dimensional semiconductor device of the present invention.

FIG. 7 is a diagram illustrating an example of a structure of a pressure adjusting unit provided in the three-dimensional semiconductor device of the present invention.

FIG. 8 is a view for explaining a manufacturing process of the pressure adjusting means shown in FIG. 7;

FIG. 9 is a plan view of the three-dimensional semiconductor element in the state shown in FIG. 8 (f).

FIG. 10 is an equivalent circuit diagram of an electrical configuration related to the pressure adjusting unit shown in FIG.

11 is a timing chart illustrating an example of signals applied to a valve electrode and a base electrode of the pressure adjusting unit illustrated in FIG. 7;

FIG. 12 is a view for explaining an example of the structure of a pressure detecting means provided in the three-dimensional semiconductor element of the present invention.

FIG. 13 is a view for explaining a manufacturing process of the pressure detecting means shown in FIG.

FIG. 14 is a view for explaining a manufacturing step of the pressure detecting means shown in FIG. 12, and shows a step after the step shown in FIG.

FIG. 15 is a circuit diagram of a circuit for monitoring an output from the polysilicon resistance layer shown in FIG.

FIG. 16 is a schematic cross-sectional view of the three-dimensional semiconductor device of the present invention cut along the N-MOS circuit device.

FIG. 17 is a schematic perspective view of an ink jet recording apparatus equipped with an ink tank provided with the three-dimensional semiconductor element of the present invention.

FIG. 18 is a schematic sectional view of another example of an ink tank to which the present invention is applied.

FIG. 19 is a diagram illustrating, as a graph, an example of internal pressure information written in a three-dimensional semiconductor element in the first embodiment of the present invention.

FIG. 20 is a graph showing an example of internal pressure information written in a three-dimensional semiconductor element in the second embodiment of the present invention.

[Explanation of symbols]

 REFERENCE SIGNS LIST 1 ink tank 2 ink storage chamber 3 ink supply port 4 recording head 11, 21, 51 three-dimensional semiconductor element 12, 22 electromotive force 13, 23 power 14, 24 energy conversion means 15, 25 pressure detection means 16, 26 determination means 17 , 27 Information storage means 18, 28 Pressure adjustment means 29 Receiving means 30 Input signal 52 Outer wall 53 Ink storage bag 101 External resonance circuit 102 Oscillation circuit 200 Spherical silicon 201 Base electrode 202 PSG film 203 Opening 204 Cu film 205 Valve electrode 206 SiN film 206a Slit 210, 211 Movable part 221 Polysilicon resistance layer 222 Wiring 223 Protective film 225 Hollow part 212 Passage

 ──────────────────────────────────────────────────続 き Continuing on the front page (72) Inventor Ichiro Saito 3-30-2 Shimomaruko, Ota-ku, Tokyo Inside Canon Inc. (72) Inventor Mochizuki 3-30-2 Shimomaruko, Ota-ku, Tokyo Inside Non-corporation (72) Inventor Takaaki Yamaguchi 3-30-2 Shimomaruko, Ota-ku, Tokyo Canon Inc. (72) Inventor Hiroyuki Ishinaga 3-30-2 Shimomaruko, Ota-ku, Tokyo Canon Inc. (72) Inventor Ryoji Inoue 3-30-2 Shimomaruko, Ota-ku, Tokyo F-term in Canon Inc. (reference) 2C056 EA26 EB20 EB29 EB34 EB59 EC19 EC32 KB05 KB08 KB11 KB40 KC16 KC27 KC30 2F055 BB10 CC02 DD04 DD11EE13 FF28 GG11 4M112 AA01 BA01 CA02 DA04 EA04 GA01

Claims (30)

[Claims] 1. A three-dimensional semiconductor device disposed in a container whose inside is maintained at a negative pressure, wherein said pressure adjusting means adjusts a negative pressure inside said container according to a negative pressure inside said container. A three-dimensional semiconductor device comprising: energy conversion means for converting externally applied energy into energy of a type different from the energy for operating the pressure adjustment means. 2. The apparatus is mounted in a state where a part thereof is exposed to the outside of the container and another part is exposed to the inside of the container. The three-dimensional semiconductor device according to claim 1, further comprising a passage that communicates with the valve, and a valve mechanism that opens and closes the passage. 3. The three-dimensional semiconductor device according to claim 2, wherein the valve mechanism has a movable part that is displaced by electrostatic attraction. 4. The adjustment of the negative pressure is performed by opening the passage by the operation of the valve mechanism and introducing outside air into the container when the negative pressure in the container increases. The three-dimensional semiconductor device according to claim 2. 5. The apparatus according to claim 1, further comprising: a pressure detecting unit that operates by the energy converted by the energy converting unit and detects a negative pressure inside the container. The three-dimensional semiconductor device according to claim 1, wherein negative pressure inside the container is adjusted by adjusting the pressure. 6. A pressure sensor having a diaphragm formed of a polysilicon film and detecting a negative pressure in the container using a change in resistance value due to a displacement of the diaphragm. Item 3. A three-dimensional semiconductor device according to item 5. 7. An information storage means for storing negative pressure condition information permitted by the container, and a detection result of the pressure detection means and information stored in the information storage means are compared. Determining means for determining the necessity of adjusting the negative pressure, wherein the pressure adjusting means adjusts the negative pressure when the determining means determines that the negative pressure needs to be adjusted; The storage means and the determination means operate with the energy converted by the energy conversion means,
The three-dimensional semiconductor device according to claim 5. 8. An information storage means for storing negative pressure condition information permitted by the container; a receiving means for receiving a signal from the outside; and a negative signal to the pressure detecting means according to a signal received by the receiving means. Determining means for detecting the pressure, comparing the detection result of the pressure detecting means with the information stored in the information storing means, and determining whether the detection result satisfies the negative pressure condition information. The pressure adjustment unit adjusts the negative pressure when the determination result determines that the detection result does not satisfy the negative pressure condition information, and includes the information storage unit, the reception unit, and the determination unit. The three-dimensional semiconductor device according to claim 5, wherein the means operates by the energy converted by the energy conversion means. 9. The energy conversion unit according to claim 1, wherein the energy conversion unit includes an oscillation circuit that generates electric power by induced electromotive force generated by electromagnetic induction between the energy conversion unit and an externally disposed resonance circuit. Three-dimensional semiconductor device. 10. An ink tank for storing ink to be supplied to a discharge head that discharges ink, the ink tank having a three-dimensional semiconductor element according to claim 1. Description: 11. An ink tank containing ink to be supplied to a discharge head that discharges ink and having an inside maintained at a negative pressure, wherein the pressure adjusts the internal negative pressure according to the internal negative pressure. An ink tank comprising: an adjusting unit; and an energy converting unit configured to convert externally applied energy into energy of a type different from the energy for operating the pressure adjusting unit. 12. The ink tank according to claim 11, wherein said pressure adjusting means has a passage communicating between the inside and the outside, and a valve mechanism for opening and closing the passage. 13. The ink tank according to claim 12, wherein the valve mechanism has a movable portion that is displaced by electrostatic attraction. 14. The negative pressure is adjusted by opening the passage by the operation of the valve mechanism and introducing outside air into the inside when the internal negative pressure becomes high. Or the ink tank according to 13. 15. The apparatus according to claim 11, further comprising: a pressure detection unit that operates by the energy converted by the energy conversion unit and detects the internal negative pressure, wherein the pressure adjustment unit is configured to perform the operation based on a detection result of the pressure detection unit. The ink tank according to any one of claims 11 to 14, wherein the internal negative pressure is adjusted. 16. The pressure detecting device according to claim 15, wherein said pressure detecting means has a diaphragm made of a polysilicon film, and detects the internal negative pressure by utilizing a resistance value change caused by displacement of said diaphragm. Ink tank. 17. An information storage means for storing negative pressure condition information permitted by an ink tank, and a detection result of the pressure detection means is compared with information stored in the information storage means, and the internal negative pressure is stored. Determining means for determining the necessity of the adjustment, wherein the pressure adjusting means adjusts the negative pressure when the determining means determines that the negative pressure needs to be adjusted; And the determining means operates by the energy converted by the energy converting means,
An ink tank according to claim 15. 18. An information storage means for storing negative pressure condition information permitted by an ink tank; a receiving means for receiving a signal from outside; and a pressure detecting means for receiving a negative signal from said pressure detecting means according to a signal received by said receiving means. Determining means for detecting the pressure, comparing the detection result of the pressure detecting means with the information stored in the information storing means, and determining whether the detection result satisfies the negative pressure condition information. The pressure adjustment unit adjusts the negative pressure when the determination result determines that the detection result does not satisfy the negative pressure condition information, and includes the information storage unit, the reception unit, and the determination unit. 17. The ink tank according to claim 15, wherein the means is operated by the energy converted by the energy converting means. 19. The energy conversion unit according to claim 11, further comprising an oscillation circuit for generating electric power by induced electromotive force generated by electromagnetic induction between the energy conversion unit and an externally disposed resonance circuit.
9. The ink tank according to any one of 8. 20. An ejection head for ejecting ink, and containing ink to be supplied to the ejection head.
20. An ink jet recording apparatus comprising the ink tank according to any one of claims 19 to 19. 21. A container arranged inside a container maintained at a negative pressure,
Pressure adjusting means for adjusting the negative pressure inside the container according to the negative pressure inside the container, and energy given from the outside, for operating the pressure adjusting means, energy of a different kind from the energy Using a three-dimensional semiconductor element having an energy converting means for converting the pressure into pressure, and keeping the pressure in the container constant by comparing the pressure detected by the pressure detecting means for detecting the pressure in the container with the pressure in the container. , Pressure adjustment method. 22. The three-dimensional semiconductor device is attached to the container in a state where a part of the semiconductor device is exposed to the outside of the container and another part is exposed to the inside of the container. The pressure adjusting method according to claim 11, wherein the adjusting unit has a passage communicating between the inside and the outside of the container, and a valve mechanism that opens and closes the passage. 23. The pressure adjusting method according to claim 2, wherein the valve mechanism has a movable portion that is displaced by electrostatic attraction. 24. The adjustment of the negative pressure is performed by opening the passage by the operation of the valve mechanism and introducing outside air into the container when the negative pressure in the container increases. The pressure adjustment method according to claim 22. 25. The three-dimensional semiconductor device has the pressure detecting means operated by the energy converted by the energy converting means, and the pressure adjusting means is configured to control the container based on a detection result by the pressure detecting means. The pressure adjustment method according to any one of claims 21 to 24, wherein the negative pressure inside the is adjusted. 26. The pressure detecting means according to claim 25, wherein the pressure detecting means has a diaphragm made of a polysilicon film, and detects a negative pressure in the container using a change in resistance value due to displacement of the diaphragm. Pressure adjustment method. 27. An information storage unit for storing negative pressure condition information permitted by the container, and comparing a detection result of the pressure detection unit with information stored in the information storage unit, Determining means for determining the necessity of adjusting the negative pressure, wherein the pressure adjusting means adjusts the negative pressure when the determining means determines that the negative pressure needs to be adjusted; The storage means and the determination means operate with the energy converted by the energy conversion means,
The pressure adjustment method according to claim 25 or 26. 28. An information storage unit for storing negative pressure condition information permitted by the container, a receiving unit for receiving an external signal, and the pressure detecting unit receiving the negative signal according to a signal received by the receiving unit. Determining means for detecting the pressure, comparing the detection result of the pressure detecting means with the information stored in the information storing means, and determining whether the detection result satisfies the negative pressure condition information. The pressure adjustment unit adjusts the negative pressure when the determination result determines that the detection result does not satisfy the negative pressure condition information, and includes the information storage unit, the reception unit, and the determination unit. 27. A method as claimed in claim 25 or claim 26, wherein the means operates with the energy converted by the energy converting means. 29. The energy conversion unit according to claim 21, further comprising an oscillation circuit for generating electric power by induced electromotive force generated by electromagnetic induction between the energy conversion unit and an externally disposed resonance circuit.
9. The pressure adjustment method according to any one of the above items 8. 30. An ink tank for storing ink to be supplied to a discharge head that discharges ink, wherein the pressure of the ink is adjusted using the pressure adjustment method according to claim 21. tank.