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JP1737181S - Shower head for semiconductor processing equipment - Google Patents

Shower head for semiconductor processing equipment

Info

Publication number
JP1737181S
JP1737181S JP2022006567F JP2022006567F JP1737181S JP 1737181 S JP1737181 S JP 1737181S JP 2022006567 F JP2022006567 F JP 2022006567F JP 2022006567 F JP2022006567 F JP 2022006567F JP 1737181 S JP1737181 S JP 1737181S
Authority
JP
Japan
Prior art keywords
semiconductor processing
processing equipment
shower head
article
showerhead
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2022006567F
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Application granted granted Critical
Publication of JP1737181S publication Critical patent/JP1737181S/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Abstract

本願に係る物品（以下、「本物品」という。）は、例えば、半導体の製造に用いられる半導体処理装置において処理ガスを放出するためのシャワーヘッドである。An article according to the present application (hereinafter referred to as "the article") is, for example, a showerhead for discharging a processing gas in a semiconductor processing apparatus used for manufacturing semiconductors.

JP2022006567F 2021-09-30 2022-03-29 Shower head for semiconductor processing equipment Active JP1737181S (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US29/789,575 USD1038900S1 (en) 2021-09-30 2021-09-30 Showerhead for semiconductor processing

Publications (1)

Publication Number Publication Date
JP1737181S true JP1737181S (en) 2023-02-17

Family

ID=85198457

Family Applications (2)

Application Number Title Priority Date Filing Date
JP2022006566F Active JP1737180S (en) 2021-09-30 2022-03-29 Shower head for semiconductor processing equipment
JP2022006567F Active JP1737181S (en) 2021-09-30 2022-03-29 Shower head for semiconductor processing equipment

Family Applications Before (1)

Application Number Title Priority Date Filing Date
JP2022006566F Active JP1737180S (en) 2021-09-30 2022-03-29 Shower head for semiconductor processing equipment

Country Status (3)

Country Link
US (1) USD1038900S1 (en)
JP (2) JP1737180S (en)
TW (3) TWD238136S (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD1071886S1 (en) * 2022-01-20 2025-04-22 Applied Materials, Inc. Substrate support for a substrate processing chamber
USD1105018S1 (en) * 2024-02-12 2025-12-09 Lam Research Corporation Shower head
USD1101709S1 (en) * 2024-04-12 2025-11-11 Applied Materials, Inc. Process chamber shower head

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USD286319S (en) 1983-07-11 1986-10-21 Mathis Cleo D Guard for a water suction pipe
KR100400044B1 (en) * 2001-07-16 2003-09-29 삼성전자주식회사 Shower head of wafer treatment apparatus having gap controller
US6854580B2 (en) 2003-02-06 2005-02-15 Borgwarner, Inc. Torsional damper having variable bypass clutch with centrifugal release mechanism
USD535673S1 (en) 2004-01-16 2007-01-23 Thermal Dynamics Corporation Gas distributor for a plasma arc torch
JP2005340251A (en) 2004-05-24 2005-12-08 Shin Etsu Chem Co Ltd Shower plate for plasma processing apparatus and plasma processing apparatus
USD524600S1 (en) 2004-08-26 2006-07-11 Maytag Corporation Convection cover for cooking appliance
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USD724701S1 (en) * 2014-02-04 2015-03-17 ASM IP Holding, B.V. Shower plate
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USD732145S1 (en) * 2014-02-04 2015-06-16 Asm Ip Holding B.V. Shower plate
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USD800782S1 (en) 2015-11-09 2017-10-24 Eaton Corporation Drive plate
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US12180589B2 (en) * 2020-06-24 2024-12-31 Tokyo Electron Limited Showerhead for process tool
USD948658S1 (en) * 2020-08-03 2022-04-12 Lam Research Corporation High density hole pattern dual plenum hole showerhead assembly

Also Published As

Publication number Publication date
TWD238136S (en) 2025-05-11
JP1737180S (en) 2023-02-17
TWD229458S (en) 2024-01-11
TWD229457S (en) 2024-01-11
USD1038900S1 (en) 2024-08-13

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