[go: up one dir, main page]

JP1733778S - ceramic heater - Google Patents

ceramic heater

Info

Publication number
JP1733778S
JP1733778S JP2021026490F JP2021026490F JP1733778S JP 1733778 S JP1733778 S JP 1733778S JP 2021026490 F JP2021026490 F JP 2021026490F JP 2021026490 F JP2021026490 F JP 2021026490F JP 1733778 S JP1733778 S JP 1733778S
Authority
JP
Japan
Prior art keywords
view
sectional
plate
ceramic heater
cross
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2021026490F
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2021026490F priority Critical patent/JP1733778S/en
Priority to TW111302616F priority patent/TWD236822S/en
Priority to US29/864,502 priority patent/USD1077769S1/en
Application granted granted Critical
Publication of JP1733778S publication Critical patent/JP1733778S/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Abstract

本物品は、半導体ウエハ等を支持して加熱するのに用いられるセラミックス製ヒーターである。本物品は、「使用状態を説明する参考断面図」に示すように、半導体ウエハ等が載置されるプレートとプレートを支持するシャフトとが、補助部材を介して接合されたものである。プレートは、載置プレートと裏面プレートとが接合されたものである。なお、「使用状態を説明する参考断面図」に表れるセラミックス製ヒーターの断面図は、内部機構を省略した正面図中央縦断面図に相当する。This article is a ceramic heater used to support and heat a semiconductor wafer or the like. As shown in the "reference cross-sectional view for explaining the state of use", this article is formed by joining a plate on which a semiconductor wafer or the like is placed and a shaft for supporting the plate through an auxiliary member. The plate is formed by joining a mounting plate and a back plate. Note that the cross-sectional view of the ceramic heater appearing in the "reference cross-sectional view for explaining the state of use" corresponds to the central vertical cross-sectional view of the front view with the internal mechanism omitted.

JP2021026490F 2021-12-02 2021-12-02 ceramic heater Active JP1733778S (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2021026490F JP1733778S (en) 2021-12-02 2021-12-02 ceramic heater
TW111302616F TWD236822S (en) 2021-12-02 2022-05-31 Ceramic heater parts
US29/864,502 USD1077769S1 (en) 2021-12-02 2022-06-01 Ceramic heater

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2021026490F JP1733778S (en) 2021-12-02 2021-12-02 ceramic heater

Publications (1)

Publication Number Publication Date
JP1733778S true JP1733778S (en) 2023-01-06

Family

ID=84601535

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2021026490F Active JP1733778S (en) 2021-12-02 2021-12-02 ceramic heater

Country Status (3)

Country Link
US (1) USD1077769S1 (en)
JP (1) JP1733778S (en)
TW (1) TWD236822S (en)

Family Cites Families (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD376935S (en) * 1996-03-11 1996-12-31 BBA Holdings, Inc. Occasional table
JP3810216B2 (en) 1998-07-01 2006-08-16 京セラ株式会社 Sample heating apparatus, processing apparatus, and sample processing method using the same
US6617553B2 (en) * 1999-05-19 2003-09-09 Applied Materials, Inc. Multi-zone resistive heater
JP4098112B2 (en) 2003-02-14 2008-06-11 日本発条株式会社 Heater unit
JP4629574B2 (en) * 2005-12-27 2011-02-09 日本発條株式会社 Substrate support device and manufacturing method thereof
KR100804169B1 (en) * 2005-12-31 2008-02-18 주식회사 아이피에스 Susceptor for Thin Film Deposition Chamber
JP2007258115A (en) * 2006-03-24 2007-10-04 Ngk Insulators Ltd Heating device
USD645889S1 (en) * 2008-02-29 2011-09-27 Ngk Insulators, Ltd. Shaft portion of an apparatus for holding and heating semiconductor wafers or the like
US8932690B2 (en) * 2011-11-30 2015-01-13 Component Re-Engineering Company, Inc. Plate and shaft device
US9984866B2 (en) * 2012-06-12 2018-05-29 Component Re-Engineering Company, Inc. Multiple zone heater
TWI665328B (en) * 2014-07-02 2019-07-11 Applied Materials, Inc. Multi-zone pedestal for plasma processing
USD785160S1 (en) * 2015-02-20 2017-04-25 Medela Holding Ag Membrane for a breastshield of a breast pump
JP1575661S (en) 2015-11-24 2017-05-08
USD884855S1 (en) 2019-10-30 2020-05-19 Applied Materials, Inc. Heater pedestal
USD1012998S1 (en) * 2020-09-18 2024-01-30 Ksm Component Co., Ltd. Ceramic heater
USD1012997S1 (en) * 2020-09-18 2024-01-30 Ksm Component Co., Ltd. Ceramic heater
USD1013750S1 (en) * 2020-09-18 2024-02-06 Ksm Component Co., Ltd. Ceramic heater
JP1706951S (en) * 2020-10-26 2022-02-07 Sprinkler head
JP1712715S (en) * 2020-12-08 2022-04-15 heater

Also Published As

Publication number Publication date
TWD236822S (en) 2025-03-11
USD1077769S1 (en) 2025-06-03

Similar Documents

Publication Publication Date Title
TWD200220S (en) Susceptor for semiconductor substrate supporting apparatus
TWD206653S (en) Holding plate of ceiling heater for substrate processing device
TW200721363A (en) Wafer holder, heater unit having the wafer holder, and wafer prober having the heater unit
TWD197827S (en) Elastic film for semiconductor wafer polishing
TWD200675S (en) Retaining pad for plate-like members
JP1712715S (en) heater
TWD213399S (en) Susceptor shaft
TWD227208S (en) Injector
JP1733778S (en) ceramic heater
JP1733880S (en) ceramic heater
JP1725824S (en) ceramic heater
JP1725893S (en) ceramic heater
JP1755440S (en) ceramic heater
JP1766648S (en) cup holder
JP1750166S (en) Display device support
JP1750168S (en) Display device support
JP1743599S (en) lectern
JP1786272S (en) Hot plate
JP1755851S (en) Support for game controller
JP1750165S (en) Display device support
JP1750167S (en) Display device support
JP1773327S (en) Susceptor
JP1773328S (en) Susceptor
JP1773329S (en) Susceptor
JP1743011S (en) polishing pad