JP1639761S - Substrate retaining ring - Google Patents
Substrate retaining ringInfo
- Publication number
- JP1639761S JP1639761S JP2018026877F JP2018026877F JP1639761S JP 1639761 S JP1639761 S JP 1639761S JP 2018026877 F JP2018026877 F JP 2018026877F JP 2018026877 F JP2018026877 F JP 2018026877F JP 1639761 S JP1639761 S JP 1639761S
- Authority
- JP
- Japan
- Prior art keywords
- retaining ring
- substrate retaining
- substrate
- polishing
- wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Abstract
本物品は、ウエハ等の基板の面を研磨するために用いる基板研磨装置に用いられる基板保持リングである。This article is a substrate holding ring used in a substrate polishing apparatus for polishing the surface of a substrate such as a wafer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2018026877F JP1639761S (en) | 2018-12-10 | 2018-12-10 | Substrate retaining ring |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2018026877F JP1639761S (en) | 2018-12-10 | 2018-12-10 | Substrate retaining ring |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JP1639761S true JP1639761S (en) | 2019-08-26 |
Family
ID=82750134
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2018026877F Active JP1639761S (en) | 2018-12-10 | 2018-12-10 | Substrate retaining ring |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP1639761S (en) |
-
2018
- 2018-12-10 JP JP2018026877F patent/JP1639761S/en active Active
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