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HK1199771B - 曝光装置和方法 - Google Patents

曝光装置和方法 Download PDF

Info

Publication number
HK1199771B
HK1199771B HK15100027.0A HK15100027A HK1199771B HK 1199771 B HK1199771 B HK 1199771B HK 15100027 A HK15100027 A HK 15100027A HK 1199771 B HK1199771 B HK 1199771B
Authority
HK
Hong Kong
Prior art keywords
substrate
circumferential wall
space
liquid
suction
Prior art date
Application number
HK15100027.0A
Other languages
German (de)
English (en)
French (fr)
Other versions
HK1199771A1 (zh
Inventor
Takeyuki Mizutani
Yuichi Shibazaki
Makoto Shibuta
Original Assignee
Nikon Corporation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nikon Corporation filed Critical Nikon Corporation
Publication of HK1199771A1 publication Critical patent/HK1199771A1/zh
Publication of HK1199771B publication Critical patent/HK1199771B/zh

Links

HK15100027.0A 2005-12-08 2015-01-02 曝光装置和方法 HK1199771B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2005354463 2005-12-08
JP2005354463 2005-12-08

Publications (2)

Publication Number Publication Date
HK1199771A1 HK1199771A1 (zh) 2015-07-17
HK1199771B true HK1199771B (zh) 2018-06-29

Family

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