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HK1163345B - 形成具有壓電換能器的裝置的方法 - Google Patents

形成具有壓電換能器的裝置的方法 Download PDF

Info

Publication number
HK1163345B
HK1163345B HK12103670.7A HK12103670A HK1163345B HK 1163345 B HK1163345 B HK 1163345B HK 12103670 A HK12103670 A HK 12103670A HK 1163345 B HK1163345 B HK 1163345B
Authority
HK
Hong Kong
Prior art keywords
piezoelectric
piezoelectric material
layer
cuts
forming
Prior art date
Application number
HK12103670.7A
Other languages
German (de)
English (en)
French (fr)
Other versions
HK1163345A1 (zh
Inventor
Andreas Bibl
John A. Higginson
Christoph Menzel
Paul A. Hoisington
Original Assignee
Fujifilm Dimatix, Inc.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US10/967,012 external-priority patent/US7388319B2/en
Application filed by Fujifilm Dimatix, Inc. filed Critical Fujifilm Dimatix, Inc.
Publication of HK1163345A1 publication Critical patent/HK1163345A1/zh
Publication of HK1163345B publication Critical patent/HK1163345B/zh

Links

HK12103670.7A 2004-10-15 2008-02-06 形成具有壓電換能器的裝置的方法 HK1163345B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US967012 2004-10-15
US10/967,012 US7388319B2 (en) 2004-10-15 2004-10-15 Forming piezoelectric actuators

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
HK08101478.1A Addition HK1107873B (zh) 2004-10-15 2005-10-11 形成具有壓電式傳感器的裝置的方法

Related Child Applications (1)

Application Number Title Priority Date Filing Date
HK08101478.1A Division HK1107873B (zh) 2004-10-15 2005-10-11 形成具有壓電式傳感器的裝置的方法

Publications (2)

Publication Number Publication Date
HK1163345A1 HK1163345A1 (zh) 2012-09-07
HK1163345B true HK1163345B (zh) 2013-08-09

Family

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