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GB2602119B - A method of producing an electronic device precursor - Google Patents

A method of producing an electronic device precursor Download PDF

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Publication number
GB2602119B
GB2602119B GB2020131.5A GB202020131A GB2602119B GB 2602119 B GB2602119 B GB 2602119B GB 202020131 A GB202020131 A GB 202020131A GB 2602119 B GB2602119 B GB 2602119B
Authority
GB
United Kingdom
Prior art keywords
producing
electronic device
device precursor
precursor
electronic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
GB2020131.5A
Other versions
GB202020131D0 (en
GB2602119A (en
Inventor
Baines Rosie
Yi Lee Lok
Glass Hugh
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Paragraf Ltd
Original Assignee
Paragraf Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Paragraf Ltd filed Critical Paragraf Ltd
Priority to GB2020131.5A priority Critical patent/GB2602119B/en
Publication of GB202020131D0 publication Critical patent/GB202020131D0/en
Priority to GBGB2107674.0A priority patent/GB202107674D0/en
Priority to GB2109011.3A priority patent/GB2602174B/en
Priority to JP2023537063A priority patent/JP7693811B2/en
Priority to DE112021006520.3T priority patent/DE112021006520T5/en
Priority to EP21840905.0A priority patent/EP4264693A1/en
Priority to US18/258,174 priority patent/US20240130248A1/en
Priority to PCT/EP2021/086642 priority patent/WO2022129606A1/en
Priority to KR1020237024543A priority patent/KR20230118683A/en
Priority to PCT/EP2021/086593 priority patent/WO2022129570A1/en
Priority to US18/268,567 priority patent/US20240040937A1/en
Publication of GB2602119A publication Critical patent/GB2602119A/en
Application granted granted Critical
Publication of GB2602119B publication Critical patent/GB2602119B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00Arrangements or instruments for measuring magnetic variables
    • G01R33/02Measuring direction or magnitude of magnetic fields or magnetic flux
    • G01R33/06Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
    • G01R33/07Hall effect devices
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00Arrangements or instruments for measuring magnetic variables
    • G01R33/0052Manufacturing aspects; Manufacturing of single devices, i.e. of semiconductor magnetic sensor chips
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00Arrangements or instruments for measuring magnetic variables
    • G01R33/02Measuring direction or magnitude of magnetic fields or magnetic flux
    • G01R33/06Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
    • G01R33/07Hall effect devices
    • G01R33/072Constructional adaptation of the sensor to specific applications
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00Field-effect transistors [FET]
    • H10D30/01Manufacture or treatment
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00Field-effect transistors [FET]
    • H10D30/40FETs having zero-dimensional [0D], one-dimensional [1D] or two-dimensional [2D] charge carrier gas channels
    • H10D30/47FETs having zero-dimensional [0D], one-dimensional [1D] or two-dimensional [2D] charge carrier gas channels having 2D charge carrier gas channels, e.g. nanoribbon FETs or high electron mobility transistors [HEMT]
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D48/00Individual devices not covered by groups H10D1/00 - H10D44/00
    • H10D48/01Manufacture or treatment
    • H10D48/031Manufacture or treatment of three-or-more electrode devices
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D62/00Semiconductor bodies, or regions thereof, of devices having potential barriers
    • H10D62/80Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D62/00Semiconductor bodies, or regions thereof, of devices having potential barriers
    • H10D62/80Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials
    • H10D62/83Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials being Group IV materials, e.g. B-doped Si or undoped Ge
    • H10D62/8303Diamond
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D62/00Semiconductor bodies, or regions thereof, of devices having potential barriers
    • H10D62/80Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials
    • H10D62/881Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials being a two-dimensional material
    • H10D62/882Graphene
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D64/00Electrodes of devices having potential barriers
    • H10D64/20Electrodes characterised by their shapes, relative sizes or dispositions 
    • H10D64/27Electrodes not carrying the current to be rectified, amplified, oscillated or switched, e.g. gates
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D64/00Electrodes of devices having potential barriers
    • H10D64/60Electrodes characterised by their materials
    • H10D64/62Electrodes ohmically coupled to a semiconductor
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N52/00Hall-effect devices
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N52/00Hall-effect devices
    • H10N52/01Manufacture or treatment
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N52/00Hall-effect devices
    • H10N52/101Semiconductor Hall-effect devices
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N52/00Hall-effect devices
    • H10N52/80Constructional details

Landscapes

  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Carbon And Carbon Compounds (AREA)
  • Formation Of Insulating Films (AREA)
  • Thin Film Transistor (AREA)
GB2020131.5A 2020-12-18 2020-12-18 A method of producing an electronic device precursor Active GB2602119B (en)

Priority Applications (11)

Application Number Priority Date Filing Date Title
GB2020131.5A GB2602119B (en) 2020-12-18 2020-12-18 A method of producing an electronic device precursor
GBGB2107674.0A GB202107674D0 (en) 2020-12-18 2021-05-28 Hall sensor
GB2109011.3A GB2602174B (en) 2020-12-18 2021-06-23 Hall sensor
US18/258,174 US20240130248A1 (en) 2020-12-18 2021-12-17 Graphene hall sensor, fabrication and use thereof
DE112021006520.3T DE112021006520T5 (en) 2020-12-18 2021-12-17 GRAPHENE HALL SENSOR, PRODUCTION AND USE THEREOF
EP21840905.0A EP4264693A1 (en) 2020-12-18 2021-12-17 Method of producing a graphene electronic device precursor
JP2023537063A JP7693811B2 (en) 2020-12-18 2021-12-17 Method for producing precursors of electronic devices
PCT/EP2021/086642 WO2022129606A1 (en) 2020-12-18 2021-12-17 Method of producing a graphene electronic device precursor
KR1020237024543A KR20230118683A (en) 2020-12-18 2021-12-17 Methods for fabricating graphene electronic device precursors
PCT/EP2021/086593 WO2022129570A1 (en) 2020-12-18 2021-12-17 Graphene hall sensor, fabrication and use thereof
US18/268,567 US20240040937A1 (en) 2020-12-18 2021-12-17 Method of producing an electronic device precursor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB2020131.5A GB2602119B (en) 2020-12-18 2020-12-18 A method of producing an electronic device precursor

Publications (3)

Publication Number Publication Date
GB202020131D0 GB202020131D0 (en) 2021-02-03
GB2602119A GB2602119A (en) 2022-06-22
GB2602119B true GB2602119B (en) 2023-02-15

Family

ID=74221422

Family Applications (3)

Application Number Title Priority Date Filing Date
GB2020131.5A Active GB2602119B (en) 2020-12-18 2020-12-18 A method of producing an electronic device precursor
GBGB2107674.0A Ceased GB202107674D0 (en) 2020-12-18 2021-05-28 Hall sensor
GB2109011.3A Active GB2602174B (en) 2020-12-18 2021-06-23 Hall sensor

Family Applications After (2)

Application Number Title Priority Date Filing Date
GBGB2107674.0A Ceased GB202107674D0 (en) 2020-12-18 2021-05-28 Hall sensor
GB2109011.3A Active GB2602174B (en) 2020-12-18 2021-06-23 Hall sensor

Country Status (1)

Country Link
GB (3) GB2602119B (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2585842B (en) * 2019-07-16 2022-04-20 Paragraf Ltd A method of making graphene structures and devices
US12313709B2 (en) 2021-10-21 2025-05-27 Paragraf Limited Magnetoresistive sensor
GB202115100D0 (en) * 2021-10-21 2021-12-08 Paragraf Ltd Magnetoresistive sensor
WO2023237561A1 (en) 2022-06-08 2023-12-14 Paragraf Limited A thermally stable graphene-containing laminate
CN116236206B (en) * 2023-05-10 2023-08-11 苏州浪潮智能科技有限公司 A kind of neural microelectrode and preparation method thereof

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103985762A (en) * 2014-03-28 2014-08-13 中国电子科技集团公司第十三研究所 Ultra-low ohm contact resistance graphene transistor and preparation method thereof

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103985762A (en) * 2014-03-28 2014-08-13 中国电子科技集团公司第十三研究所 Ultra-low ohm contact resistance graphene transistor and preparation method thereof

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
Carbon 139, 2018, Ciuk et al, "Thermally activated double-carrier transport in epitaxial graphene on vanadium-compensated 6H-SiC as revealed by Hall effect measurements", pages 776-781. *
Journal of the Electron Devices Society, Volume 8, 2020, ASAD et al., "Dependence of High-Frequency Performance of Graphene Field-Effect Transistors", pages 457-464. *

Also Published As

Publication number Publication date
GB2602174A (en) 2022-06-22
GB202020131D0 (en) 2021-02-03
GB202109011D0 (en) 2021-08-04
GB202107674D0 (en) 2021-07-14
GB2602119A (en) 2022-06-22
GB2602174B (en) 2023-08-23

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