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GB2131605B - Thin film transistor - Google Patents

Thin film transistor

Info

Publication number
GB2131605B
GB2131605B GB08326775A GB8326775A GB2131605B GB 2131605 B GB2131605 B GB 2131605B GB 08326775 A GB08326775 A GB 08326775A GB 8326775 A GB8326775 A GB 8326775A GB 2131605 B GB2131605 B GB 2131605B
Authority
GB
United Kingdom
Prior art keywords
thin film
film transistor
transistor
thin
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB08326775A
Other versions
GB8326775D0 (en
GB2131605A (en
Inventor
Scott H Holmberg
Richard A Flasck
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Energy Conversion Devices Inc
Original Assignee
Energy Conversion Devices Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Energy Conversion Devices Inc filed Critical Energy Conversion Devices Inc
Publication of GB8326775D0 publication Critical patent/GB8326775D0/en
Publication of GB2131605A publication Critical patent/GB2131605A/en
Application granted granted Critical
Publication of GB2131605B publication Critical patent/GB2131605B/en
Expired legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00Field-effect transistors [FET]
    • H10D30/60Insulated-gate field-effect transistors [IGFET]
    • H10D30/67Thin-film transistors [TFT]
    • H10D30/6728Vertical TFTs
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10BELECTRONIC MEMORY DEVICES
    • H10B63/00Resistance change memory devices, e.g. resistive RAM [ReRAM] devices
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D48/00Individual devices not covered by groups H10D1/00 - H10D44/00
    • H10D48/30Devices controlled by electric currents or voltages
    • H10D48/32Devices controlled by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
    • H10D48/366Multistable devices; Devices having two or more distinct operating states
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D48/00Individual devices not covered by groups H10D1/00 - H10D44/00
    • H10D48/30Devices controlled by electric currents or voltages
    • H10D48/38Devices controlled only by variation of the electric current supplied, or only the electric potential applied, to one or more of the electrodes carrying the current to be rectified, amplified, oscillated or switched
    • H10D48/381Multistable devices; Devices having two or more distinct operating states
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D62/00Semiconductor bodies, or regions thereof, of devices having potential barriers
    • H10D62/40Crystalline structures
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D62/00Semiconductor bodies, or regions thereof, of devices having potential barriers
    • H10D62/80Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials
    • H10D62/83Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials being Group IV materials, e.g. B-doped Si or undoped Ge
    • H10D62/834Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials being Group IV materials, e.g. B-doped Si or undoped Ge further characterised by the dopants
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D8/00Diodes
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D88/00Three-dimensional [3D] integrated devices
    • H10W20/491
GB08326775A 1979-12-13 1983-10-06 Thin film transistor Expired GB2131605B (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10301179A 1979-12-13 1979-12-13
US20827880A 1980-11-19 1980-11-19

Publications (3)

Publication Number Publication Date
GB8326775D0 GB8326775D0 (en) 1983-11-09
GB2131605A GB2131605A (en) 1984-06-20
GB2131605B true GB2131605B (en) 1985-02-13

Family

ID=26799985

Family Applications (2)

Application Number Title Priority Date Filing Date
GB8039608A Expired GB2067353B (en) 1979-12-13 1980-12-10 Thin film transistor
GB08326775A Expired GB2131605B (en) 1979-12-13 1983-10-06 Thin film transistor

Family Applications Before (1)

Application Number Title Priority Date Filing Date
GB8039608A Expired GB2067353B (en) 1979-12-13 1980-12-10 Thin film transistor

Country Status (14)

Country Link
KR (2) KR840001605B1 (en)
AU (2) AU538008B2 (en)
BE (1) BE886630A (en)
CA (3) CA1153480A (en)
DE (2) DE3051063C2 (en)
FR (1) FR2474763B1 (en)
GB (2) GB2067353B (en)
IE (1) IE51076B1 (en)
IL (1) IL61679A (en)
IT (1) IT1193999B (en)
MX (1) MX151189A (en)
NL (2) NL8006770A (en)
SE (1) SE8008738L (en)
SG (1) SG72684G (en)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5698864A (en) * 1982-04-13 1997-12-16 Seiko Epson Corporation Method of manufacturing a liquid crystal device having field effect transistors
FR2527385B1 (en) * 1982-04-13 1987-05-22 Suwa Seikosha Kk THIN FILM TRANSISTOR AND LIQUID CRYSTAL DISPLAY PANEL USING THIS TYPE OF TRANSISTOR
US6294796B1 (en) 1982-04-13 2001-09-25 Seiko Epson Corporation Thin film transistors and active matrices including same
US5736751A (en) * 1982-04-13 1998-04-07 Seiko Epson Corporation Field effect transistor having thick source and drain regions
US5677547A (en) * 1982-04-30 1997-10-14 Seiko Epson Corporation Thin film transistor and display device including same
US5365079A (en) * 1982-04-30 1994-11-15 Seiko Epson Corporation Thin film transistor and display device including same
US5650637A (en) * 1982-04-30 1997-07-22 Seiko Epson Corporation Active matrix assembly
US4633284A (en) * 1983-11-08 1986-12-30 Energy Conversion Devices, Inc. Thin film transistor having an annealed gate oxide and method of making same
US4543320A (en) * 1983-11-08 1985-09-24 Energy Conversion Devices, Inc. Method of making a high performance, small area thin film transistor
US4547789A (en) * 1983-11-08 1985-10-15 Energy Conversion Devices, Inc. High current thin film transistor
US4620208A (en) * 1983-11-08 1986-10-28 Energy Conversion Devices, Inc. High performance, small area thin film transistor
US4752814A (en) * 1984-03-12 1988-06-21 Xerox Corporation High voltage thin film transistor
US4769338A (en) * 1984-05-14 1988-09-06 Energy Conversion Devices, Inc. Thin film field effect transistor and method of making same
US4670763A (en) * 1984-05-14 1987-06-02 Energy Conversion Devices, Inc. Thin film field effect transistor
US4668968A (en) * 1984-05-14 1987-05-26 Energy Conversion Devices, Inc. Integrated circuit compatible thin film field effect transistor and method of making same
US4673957A (en) * 1984-05-14 1987-06-16 Energy Conversion Devices, Inc. Integrated circuit compatible thin film field effect transistor and method of making same
KR100741798B1 (en) * 2004-12-30 2007-07-25 엘지전자 주식회사 Dryer integrated washing machine
CN112420821B (en) * 2020-10-29 2021-11-19 北京元芯碳基集成电路研究院 Y-shaped gate structure based on carbon-based material and preparation method thereof

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3384792A (en) * 1965-06-01 1968-05-21 Electro Optical Systems Inc Stacked electrode field effect triode
US4115799A (en) * 1977-01-26 1978-09-19 Westinghouse Electric Corp. Thin film copper transition between aluminum and indium copper films
US4217374A (en) * 1978-03-08 1980-08-12 Energy Conversion Devices, Inc. Amorphous semiconductors equivalent to crystalline semiconductors
DE2820331C3 (en) * 1978-05-10 1982-03-18 Lüder, Ernst, Prof. Dr.-Ing., 7000 Stuttgart Thin film field effect transistor and process for its manufacture
GB2052853A (en) * 1979-06-29 1981-01-28 Ibm Vertical fet on an insulating substrate

Also Published As

Publication number Publication date
CA1163377A (en) 1984-03-06
SG72684G (en) 1985-03-29
KR830004680A (en) 1983-07-16
MX151189A (en) 1984-10-09
GB8326775D0 (en) 1983-11-09
GB2131605A (en) 1984-06-20
GB2067353B (en) 1984-07-04
CA1188008A (en) 1985-05-28
IL61679A0 (en) 1981-01-30
IE802615L (en) 1981-06-13
CA1153480A (en) 1983-09-06
AU6531380A (en) 1981-06-18
DE3046358A1 (en) 1981-09-17
SE8008738L (en) 1981-06-14
DE3051063C2 (en) 1991-04-11
IL61679A (en) 1984-11-30
DE3046358C2 (en) 1987-02-26
FR2474763A1 (en) 1981-07-31
AU554058B2 (en) 1986-08-07
GB2067353A (en) 1981-07-22
BE886630A (en) 1981-04-01
FR2474763B1 (en) 1987-03-20
KR840001605B1 (en) 1984-10-11
IT1193999B (en) 1988-08-31
NL8006770A (en) 1981-07-16
AU2845184A (en) 1984-09-13
NL8401928A (en) 1984-10-01
KR850000902B1 (en) 1985-06-26
IT8026642A0 (en) 1980-12-12
AU538008B2 (en) 1984-07-26
KR850001478A (en) 1985-02-18
IE51076B1 (en) 1986-10-01

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Legal Events

Date Code Title Description
PCNP Patent ceased through non-payment of renewal fee

Effective date: 19921210