[go: up one dir, main page]

GB2044994B - Thin film transistors - Google Patents

Thin film transistors

Info

Publication number
GB2044994B
GB2044994B GB7910133A GB7910133A GB2044994B GB 2044994 B GB2044994 B GB 2044994B GB 7910133 A GB7910133 A GB 7910133A GB 7910133 A GB7910133 A GB 7910133A GB 2044994 B GB2044994 B GB 2044994B
Authority
GB
United Kingdom
Prior art keywords
thin film
film transistors
transistors
thin
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB7910133A
Other versions
GB2044994A (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Philips Electronics UK Ltd
Original Assignee
Philips Electronic and Associated Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Electronic and Associated Industries Ltd filed Critical Philips Electronic and Associated Industries Ltd
Priority to GB7910133A priority Critical patent/GB2044994B/en
Publication of GB2044994A publication Critical patent/GB2044994A/en
Application granted granted Critical
Publication of GB2044994B publication Critical patent/GB2044994B/en
Expired legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00Field-effect transistors [FET]
    • H10D30/60Insulated-gate field-effect transistors [IGFET]
    • H10D30/67Thin-film transistors [TFT]
    • H10D30/6704Thin-film transistors [TFT] having supplementary regions or layers in the thin films or in the insulated bulk substrates for controlling properties of the device
    • H10D30/6713Thin-film transistors [TFT] having supplementary regions or layers in the thin films or in the insulated bulk substrates for controlling properties of the device characterised by the properties of the source or drain regions, e.g. compositions or sectional shapes
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00Field-effect transistors [FET]
    • H10D30/60Insulated-gate field-effect transistors [IGFET]
    • H10D30/67Thin-film transistors [TFT]
    • H10D30/6729Thin-film transistors [TFT] characterised by the electrodes
    • H10D30/673Thin-film transistors [TFT] characterised by the electrodes characterised by the shapes, relative sizes or dispositions of the gate electrodes
    • H10D30/6732Bottom-gate only TFTs
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00Field-effect transistors [FET]
    • H10D30/60Insulated-gate field-effect transistors [IGFET]
    • H10D30/67Thin-film transistors [TFT]
    • H10D30/6729Thin-film transistors [TFT] characterised by the electrodes
    • H10D30/6737Thin-film transistors [TFT] characterised by the electrodes characterised by the electrode materials
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00Field-effect transistors [FET]
    • H10D30/60Insulated-gate field-effect transistors [IGFET]
    • H10D30/67Thin-film transistors [TFT]
    • H10D30/674Thin-film transistors [TFT] characterised by the active materials
    • H10D30/6741Group IV materials, e.g. germanium or silicon carbide
    • H10D30/6743Silicon
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00Field-effect transistors [FET]
    • H10D30/60Insulated-gate field-effect transistors [IGFET]
    • H10D30/67Thin-film transistors [TFT]
    • H10D30/674Thin-film transistors [TFT] characterised by the active materials
    • H10D30/6741Group IV materials, e.g. germanium or silicon carbide
    • H10D30/6743Silicon
    • H10D30/6746Amorphous silicon
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00Field-effect transistors [FET]
    • H10D30/60Insulated-gate field-effect transistors [IGFET]
    • H10D30/67Thin-film transistors [TFT]
    • H10D30/674Thin-film transistors [TFT] characterised by the active materials
    • H10D30/675Group III-V materials, Group II-VI materials, Group IV-VI materials, selenium or tellurium
GB7910133A 1979-03-22 1979-03-22 Thin film transistors Expired GB2044994B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
GB7910133A GB2044994B (en) 1979-03-22 1979-03-22 Thin film transistors

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB7910133A GB2044994B (en) 1979-03-22 1979-03-22 Thin film transistors

Publications (2)

Publication Number Publication Date
GB2044994A GB2044994A (en) 1980-10-22
GB2044994B true GB2044994B (en) 1983-06-15

Family

ID=10504059

Family Applications (1)

Application Number Title Priority Date Filing Date
GB7910133A Expired GB2044994B (en) 1979-03-22 1979-03-22 Thin film transistors

Country Status (1)

Country Link
GB (1) GB2044994B (en)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58170067A (en) * 1982-03-31 1983-10-06 Fujitsu Ltd Thin film transistor and manufacture thereof
JPS59124162A (en) * 1982-12-29 1984-07-18 Sharp Corp thin film transistor
JPH0693509B2 (en) * 1983-08-26 1994-11-16 シャープ株式会社 Thin film transistor
US5686326A (en) * 1985-08-05 1997-11-11 Canon Kabushiki Kaisha Method of making thin film transistor
KR930001901B1 (en) * 1990-07-27 1993-03-19 삼성전자 주식회사 Manufacturing Method of Thin Film Transistor
US6043113A (en) * 1995-07-31 2000-03-28 1294339 Ontario, Inc. Method of forming self-aligned thin film transistor
JP5363009B2 (en) 2008-02-29 2013-12-11 株式会社ジャパンディスプレイ Display device and manufacturing method thereof

Also Published As

Publication number Publication date
GB2044994A (en) 1980-10-22

Similar Documents

Publication Publication Date Title
GB2077994B (en) Thin film transistors
ZA807762B (en) Thin film transistor
GB2056770B (en) Thin film transistors
GB2084795B (en) Thin film transistor
GB8421403D0 (en) Thin film transistor
GB2067353B (en) Thin film transistor
JPS5451782A (en) Thin film transistor
GB8334314D0 (en) Thin film transistor
GB2065368B (en) Thin film transistors
JPS566233A (en) Film cassette
GB8311219D0 (en) Thin film transistor
GB2044994B (en) Thin film transistors
JPS5624163A (en) Film complex
GB2050327B (en) Thick film circuits
JPS566227A (en) Film cassette
JPS5615626A (en) Agricutural film
JPS5674241A (en) Sensitizeddsheet for xxray film
JPS5665492A (en) Thin film el element
GB2111302B (en) Thin film transistor
GB2087650B (en) Thin film transistor
IL71109A (en) Thin film,field effect transistor
JPS55103953A (en) Surfaceeprotected film
IE850895L (en) Thin film transistor
SG49085G (en) Thin film transistor
JPS562166A (en) Peelable film

Legal Events

Date Code Title Description
PCNP Patent ceased through non-payment of renewal fee