GB2044994B - Thin film transistors - Google Patents
Thin film transistorsInfo
- Publication number
- GB2044994B GB2044994B GB7910133A GB7910133A GB2044994B GB 2044994 B GB2044994 B GB 2044994B GB 7910133 A GB7910133 A GB 7910133A GB 7910133 A GB7910133 A GB 7910133A GB 2044994 B GB2044994 B GB 2044994B
- Authority
- GB
- United Kingdom
- Prior art keywords
- thin film
- film transistors
- transistors
- thin
- film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000010409 thin film Substances 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D30/00—Field-effect transistors [FET]
- H10D30/60—Insulated-gate field-effect transistors [IGFET]
- H10D30/67—Thin-film transistors [TFT]
- H10D30/6704—Thin-film transistors [TFT] having supplementary regions or layers in the thin films or in the insulated bulk substrates for controlling properties of the device
- H10D30/6713—Thin-film transistors [TFT] having supplementary regions or layers in the thin films or in the insulated bulk substrates for controlling properties of the device characterised by the properties of the source or drain regions, e.g. compositions or sectional shapes
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D30/00—Field-effect transistors [FET]
- H10D30/60—Insulated-gate field-effect transistors [IGFET]
- H10D30/67—Thin-film transistors [TFT]
- H10D30/6729—Thin-film transistors [TFT] characterised by the electrodes
- H10D30/673—Thin-film transistors [TFT] characterised by the electrodes characterised by the shapes, relative sizes or dispositions of the gate electrodes
- H10D30/6732—Bottom-gate only TFTs
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D30/00—Field-effect transistors [FET]
- H10D30/60—Insulated-gate field-effect transistors [IGFET]
- H10D30/67—Thin-film transistors [TFT]
- H10D30/6729—Thin-film transistors [TFT] characterised by the electrodes
- H10D30/6737—Thin-film transistors [TFT] characterised by the electrodes characterised by the electrode materials
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D30/00—Field-effect transistors [FET]
- H10D30/60—Insulated-gate field-effect transistors [IGFET]
- H10D30/67—Thin-film transistors [TFT]
- H10D30/674—Thin-film transistors [TFT] characterised by the active materials
- H10D30/6741—Group IV materials, e.g. germanium or silicon carbide
- H10D30/6743—Silicon
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D30/00—Field-effect transistors [FET]
- H10D30/60—Insulated-gate field-effect transistors [IGFET]
- H10D30/67—Thin-film transistors [TFT]
- H10D30/674—Thin-film transistors [TFT] characterised by the active materials
- H10D30/6741—Group IV materials, e.g. germanium or silicon carbide
- H10D30/6743—Silicon
- H10D30/6746—Amorphous silicon
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D30/00—Field-effect transistors [FET]
- H10D30/60—Insulated-gate field-effect transistors [IGFET]
- H10D30/67—Thin-film transistors [TFT]
- H10D30/674—Thin-film transistors [TFT] characterised by the active materials
- H10D30/675—Group III-V materials, Group II-VI materials, Group IV-VI materials, selenium or tellurium
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GB7910133A GB2044994B (en) | 1979-03-22 | 1979-03-22 | Thin film transistors |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GB7910133A GB2044994B (en) | 1979-03-22 | 1979-03-22 | Thin film transistors |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| GB2044994A GB2044994A (en) | 1980-10-22 |
| GB2044994B true GB2044994B (en) | 1983-06-15 |
Family
ID=10504059
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| GB7910133A Expired GB2044994B (en) | 1979-03-22 | 1979-03-22 | Thin film transistors |
Country Status (1)
| Country | Link |
|---|---|
| GB (1) | GB2044994B (en) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58170067A (en) * | 1982-03-31 | 1983-10-06 | Fujitsu Ltd | Thin film transistor and manufacture thereof |
| JPS59124162A (en) * | 1982-12-29 | 1984-07-18 | Sharp Corp | thin film transistor |
| JPH0693509B2 (en) * | 1983-08-26 | 1994-11-16 | シャープ株式会社 | Thin film transistor |
| US5686326A (en) * | 1985-08-05 | 1997-11-11 | Canon Kabushiki Kaisha | Method of making thin film transistor |
| KR930001901B1 (en) * | 1990-07-27 | 1993-03-19 | 삼성전자 주식회사 | Manufacturing Method of Thin Film Transistor |
| US6043113A (en) * | 1995-07-31 | 2000-03-28 | 1294339 Ontario, Inc. | Method of forming self-aligned thin film transistor |
| JP5363009B2 (en) | 2008-02-29 | 2013-12-11 | 株式会社ジャパンディスプレイ | Display device and manufacturing method thereof |
-
1979
- 1979-03-22 GB GB7910133A patent/GB2044994B/en not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| GB2044994A (en) | 1980-10-22 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PCNP | Patent ceased through non-payment of renewal fee |