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GB1361771A - Apparatus for heating material by means of a electron beam in a vacuum - Google Patents

Apparatus for heating material by means of a electron beam in a vacuum

Info

Publication number
GB1361771A
GB1361771A GB589473A GB589473A GB1361771A GB 1361771 A GB1361771 A GB 1361771A GB 589473 A GB589473 A GB 589473A GB 589473 A GB589473 A GB 589473A GB 1361771 A GB1361771 A GB 1361771A
Authority
GB
United Kingdom
Prior art keywords
degrees
flux
poleshoe
cathode
electron beam
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB589473A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leybold Heraeus Verwaltung GmbH
Original Assignee
Leybold Heraeus Verwaltung GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DE19722206995 external-priority patent/DE2206995C3/en
Application filed by Leybold Heraeus Verwaltung GmbH filed Critical Leybold Heraeus Verwaltung GmbH
Publication of GB1361771A publication Critical patent/GB1361771A/en
Expired legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24Vacuum evaporation
    • C23C14/28Vacuum evaporation by wave energy or particle radiation
    • C23C14/30Vacuum evaporation by wave energy or particle radiation by electron bombardment
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/305Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating, or etching
    • H01J37/3053Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating, or etching for evaporating or etching

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Toxicology (AREA)
  • Materials Engineering (AREA)
  • Health & Medical Sciences (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)

Abstract

1361771 Electron beam furnaces LEYBOLDHERAEUS-VERWALTUNG GmbH 6 Feb 1973 [15 Feb 1972] 5894/73 Heading H1D In an electron beam vaporizer the beam is deflected on to the target 2 through an angle of 90 degrees or more by a principal poleshoe system 8, 9 which produces a flux which decreases, in the plane of the beam path, from the inner to the outer edge of the beam, and on auxiliary poleshoe system 19, 20-disposed on that side of the cathode 24 remote from the targetwhich produces a flux which decreases from the outer to the inner edge of the beam. As shown, the target is a crucible 1 rotatable to introduce any one of cups 2 to 5 into the beam path; the poleshoes 8 and 9 have conical surfaces 10 and 11 to avoid rising vapour, and inclined faces 12 and 13 defining a V section giving the required change of flux across the beam; and the poleshoes 19 and 20 are connected by legs 16 and 17 to the main shoes 8 and 9, and have inclined ends 21 and 22 to give the desired flux change. Reference is made to an arrangement having a beam deflection angle of 270 degrees; to auxiliary poleshoe surfaces that are concave or convex, rather than plane, and which exhibit a wedge angle of between 60 degrees and 120 degrees, and preferably between 80 degrees and 100 degrees; and to the circulation of coolant through the hollow walls of the crucible. A dismountable cathode assembly is described, Fig. 3, in which the cathode legs are secured to contact plates 43 and 44, respectively, themselves secured together with interposed insulators 46 and 48 by screw 47, the assembly being removable by undoing screw 50, accurate repositioning with respect to the Wehrelt focusing cylinder 26 being facilitated by skirt 51 and projection 52.
GB589473A 1972-02-15 1973-02-06 Apparatus for heating material by means of a electron beam in a vacuum Expired GB1361771A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19722206995 DE2206995C3 (en) 1972-02-15 Device for heating materials by means of bundled electron beams in a vacuum

Publications (1)

Publication Number Publication Date
GB1361771A true GB1361771A (en) 1974-07-30

Family

ID=5835968

Family Applications (1)

Application Number Title Priority Date Filing Date
GB589473A Expired GB1361771A (en) 1972-02-15 1973-02-06 Apparatus for heating material by means of a electron beam in a vacuum

Country Status (2)

Country Link
US (1) US3869675A (en)
GB (1) GB1361771A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4328763A (en) 1979-05-03 1982-05-11 Leybold-Heraeus Vaporizer for vacuum deposition installations

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3639683A1 (en) 1986-11-20 1988-05-26 Leybold Ag EVAPORATOR ARRANGEMENT WITH A RECTANGULAR EVAPORATOR AND MULTIPLE ELECTRON CANNON
US4791273A (en) * 1987-05-15 1988-12-13 Varian Associates, Inc. Vaporizer system for ion source
US6064686A (en) 1999-03-30 2000-05-16 Tfi Telemark Arc-free electron gun
CN100516284C (en) * 2006-01-21 2009-07-22 鸿富锦精密工业(深圳)有限公司 Equipment of coating by vaporization
CN101442848B (en) * 2007-11-23 2011-12-21 清华大学 Method for locally heating object
DE102018108726B4 (en) * 2018-04-12 2019-11-07 VON ARDENNE Asset GmbH & Co. KG Electron beam evaporator and method for evaporating a vaporized material by means of an electron beam

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3331978A (en) * 1962-05-28 1967-07-18 Varian Associates Electron beam x-ray generator with movable, fluid-cooled target
US3344357A (en) * 1964-07-13 1967-09-26 John P Blewett Storage ring
US3483417A (en) * 1967-07-26 1969-12-09 Air Reduction Electron beam deflecting means
US3446934A (en) * 1968-01-30 1969-05-27 Air Reduction Electron beam heating apparatus
US3710072A (en) * 1971-05-10 1973-01-09 Airco Inc Vapor source assembly

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4328763A (en) 1979-05-03 1982-05-11 Leybold-Heraeus Vaporizer for vacuum deposition installations

Also Published As

Publication number Publication date
DE2206995A1 (en) 1973-08-23
US3869675A (en) 1975-03-04
DE2206995B2 (en) 1976-03-25

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Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]
PCNP Patent ceased through non-payment of renewal fee