GB1361771A - Apparatus for heating material by means of a electron beam in a vacuum - Google Patents
Apparatus for heating material by means of a electron beam in a vacuumInfo
- Publication number
- GB1361771A GB1361771A GB589473A GB589473A GB1361771A GB 1361771 A GB1361771 A GB 1361771A GB 589473 A GB589473 A GB 589473A GB 589473 A GB589473 A GB 589473A GB 1361771 A GB1361771 A GB 1361771A
- Authority
- GB
- United Kingdom
- Prior art keywords
- degrees
- flux
- poleshoe
- cathode
- electron beam
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/28—Vacuum evaporation by wave energy or particle radiation
- C23C14/30—Vacuum evaporation by wave energy or particle radiation by electron bombardment
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/305—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating, or etching
- H01J37/3053—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating, or etching for evaporating or etching
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Toxicology (AREA)
- Materials Engineering (AREA)
- Health & Medical Sciences (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Analytical Chemistry (AREA)
- Electron Sources, Ion Sources (AREA)
Abstract
1361771 Electron beam furnaces LEYBOLDHERAEUS-VERWALTUNG GmbH 6 Feb 1973 [15 Feb 1972] 5894/73 Heading H1D In an electron beam vaporizer the beam is deflected on to the target 2 through an angle of 90 degrees or more by a principal poleshoe system 8, 9 which produces a flux which decreases, in the plane of the beam path, from the inner to the outer edge of the beam, and on auxiliary poleshoe system 19, 20-disposed on that side of the cathode 24 remote from the targetwhich produces a flux which decreases from the outer to the inner edge of the beam. As shown, the target is a crucible 1 rotatable to introduce any one of cups 2 to 5 into the beam path; the poleshoes 8 and 9 have conical surfaces 10 and 11 to avoid rising vapour, and inclined faces 12 and 13 defining a V section giving the required change of flux across the beam; and the poleshoes 19 and 20 are connected by legs 16 and 17 to the main shoes 8 and 9, and have inclined ends 21 and 22 to give the desired flux change. Reference is made to an arrangement having a beam deflection angle of 270 degrees; to auxiliary poleshoe surfaces that are concave or convex, rather than plane, and which exhibit a wedge angle of between 60 degrees and 120 degrees, and preferably between 80 degrees and 100 degrees; and to the circulation of coolant through the hollow walls of the crucible. A dismountable cathode assembly is described, Fig. 3, in which the cathode legs are secured to contact plates 43 and 44, respectively, themselves secured together with interposed insulators 46 and 48 by screw 47, the assembly being removable by undoing screw 50, accurate repositioning with respect to the Wehrelt focusing cylinder 26 being facilitated by skirt 51 and projection 52.
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE19722206995 DE2206995C3 (en) | 1972-02-15 | Device for heating materials by means of bundled electron beams in a vacuum |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| GB1361771A true GB1361771A (en) | 1974-07-30 |
Family
ID=5835968
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| GB589473A Expired GB1361771A (en) | 1972-02-15 | 1973-02-06 | Apparatus for heating material by means of a electron beam in a vacuum |
Country Status (2)
| Country | Link |
|---|---|
| US (1) | US3869675A (en) |
| GB (1) | GB1361771A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4328763A (en) | 1979-05-03 | 1982-05-11 | Leybold-Heraeus | Vaporizer for vacuum deposition installations |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3639683A1 (en) | 1986-11-20 | 1988-05-26 | Leybold Ag | EVAPORATOR ARRANGEMENT WITH A RECTANGULAR EVAPORATOR AND MULTIPLE ELECTRON CANNON |
| US4791273A (en) * | 1987-05-15 | 1988-12-13 | Varian Associates, Inc. | Vaporizer system for ion source |
| US6064686A (en) | 1999-03-30 | 2000-05-16 | Tfi Telemark | Arc-free electron gun |
| CN100516284C (en) * | 2006-01-21 | 2009-07-22 | 鸿富锦精密工业(深圳)有限公司 | Equipment of coating by vaporization |
| CN101442848B (en) * | 2007-11-23 | 2011-12-21 | 清华大学 | Method for locally heating object |
| DE102018108726B4 (en) * | 2018-04-12 | 2019-11-07 | VON ARDENNE Asset GmbH & Co. KG | Electron beam evaporator and method for evaporating a vaporized material by means of an electron beam |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3331978A (en) * | 1962-05-28 | 1967-07-18 | Varian Associates | Electron beam x-ray generator with movable, fluid-cooled target |
| US3344357A (en) * | 1964-07-13 | 1967-09-26 | John P Blewett | Storage ring |
| US3483417A (en) * | 1967-07-26 | 1969-12-09 | Air Reduction | Electron beam deflecting means |
| US3446934A (en) * | 1968-01-30 | 1969-05-27 | Air Reduction | Electron beam heating apparatus |
| US3710072A (en) * | 1971-05-10 | 1973-01-09 | Airco Inc | Vapor source assembly |
-
1973
- 1973-02-06 GB GB589473A patent/GB1361771A/en not_active Expired
- 1973-02-07 US US330177A patent/US3869675A/en not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4328763A (en) | 1979-05-03 | 1982-05-11 | Leybold-Heraeus | Vaporizer for vacuum deposition installations |
Also Published As
| Publication number | Publication date |
|---|---|
| DE2206995A1 (en) | 1973-08-23 |
| US3869675A (en) | 1975-03-04 |
| DE2206995B2 (en) | 1976-03-25 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PS | Patent sealed [section 19, patents act 1949] | ||
| PCNP | Patent ceased through non-payment of renewal fee |