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GB1061469A - Improvements relating to electron beam furnaces - Google Patents

Improvements relating to electron beam furnaces

Info

Publication number
GB1061469A
GB1061469A GB28213/64A GB2821364A GB1061469A GB 1061469 A GB1061469 A GB 1061469A GB 28213/64 A GB28213/64 A GB 28213/64A GB 2821364 A GB2821364 A GB 2821364A GB 1061469 A GB1061469 A GB 1061469A
Authority
GB
United Kingdom
Prior art keywords
electron beam
elongated
electron
july
crucible
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB28213/64A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
United States Steel Corp
Original Assignee
United States Steel Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by United States Steel Corp filed Critical United States Steel Corp
Publication of GB1061469A publication Critical patent/GB1061469A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/304—Controlling tubes by information coming from the objects or from the beam, e.g. correction signals
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K15/00—Electron-beam welding or cutting
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/28—Vacuum evaporation by wave energy or particle radiation
    • C23C14/30—Vacuum evaporation by wave energy or particle radiation by electron bombardment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/305—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating, or etching
    • H01J37/3053—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating, or etching for evaporating or etching

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Analytical Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Plasma & Fusion (AREA)
  • Physics & Mathematics (AREA)
  • Toxicology (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

1,061,469. Electron beam apparatus. UNITED STATES STEEL CORPORATION. July 8, 1964 [July 19, 1963], No. 28213/64. Heading HID. [Also in Division G3] In an electron beam bombardment apparatus for heating a charge of metal 11, e.g. aluminium for coating purposes, contained in an elongated crucible 10 in which the electron beam 13a produced by elongated electron gun 12 follows an arcuate path under the influence of a transverse magnetic field, the beam is prevented from wandering by providing two elongated sensing electrodes 20, 21, or, alternatively, two auxiliary electron beams in the same position as the electrodes 20, 21. The signals from the sensing electrodes, or from the targets of the auxiliary electron beams are used tocontrol either the magnetic field, via a magnetic amplifier, or the accelerating voltage of the main beam. In a modification a plurality of guns and sensing electrode systems, arranged in line, are provided alongside the crucible.
GB28213/64A 1963-07-19 1964-07-08 Improvements relating to electron beam furnaces Expired GB1061469A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US296320A US3244855A (en) 1963-07-19 1963-07-19 System for correcting the shift of an electron-gun beam from the desired region of impingement

Publications (1)

Publication Number Publication Date
GB1061469A true GB1061469A (en) 1967-03-15

Family

ID=23141528

Family Applications (1)

Application Number Title Priority Date Filing Date
GB28213/64A Expired GB1061469A (en) 1963-07-19 1964-07-08 Improvements relating to electron beam furnaces

Country Status (6)

Country Link
US (1) US3244855A (en)
BE (1) BE650653A (en)
DE (1) DE1295311B (en)
FR (1) FR1409439A (en)
GB (1) GB1061469A (en)
NL (1) NL6408137A (en)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3397672A (en) * 1965-11-10 1968-08-20 United States Steel Corp Control system for vapor-deposition coating apparatus
US3617684A (en) * 1970-02-24 1971-11-02 Datapax Computer Systems Corp Electronic trimming of microelectronic resistors
BE784250A (en) * 1972-05-31 1972-09-18 Cockerill HEATING DEVICE FOR A LARGE LENGTH AND LOW THICKNESS METAL PRODUCT.
FR2244014B1 (en) * 1973-09-17 1976-10-08 Bosch Gmbh Robert
NL183553C (en) * 1978-05-12 1988-11-16 Philips Nv Apparatus for directing electrically charged particles to a meeting point.
US4551844A (en) * 1983-04-05 1985-11-05 Jersey Nuclear-Avco Isotopes, Inc. Demodulation of vapor density
DE3639683A1 (en) * 1986-11-20 1988-05-26 Leybold Ag EVAPORATOR ARRANGEMENT WITH A RECTANGULAR EVAPORATOR AND MULTIPLE ELECTRON CANNON
FR2634061B1 (en) * 1988-07-06 1991-04-05 Commissariat Energie Atomique ELECTRONIC BOMBARDING EVAPORATOR PROVIDED WITH MEANS FOR RECOVERING BACK-BROADCAST ELECTRONS
EP2088612A1 (en) * 2007-12-21 2009-08-12 Applied Materials, Inc. Method of heating or cleaning a web or foil

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2640948A (en) * 1950-09-21 1953-06-02 High Voltage Engineering Corp Apparatus for utilizing a beam of high energy electrons in sterilization and in therapy
CH311812A (en) * 1951-11-05 1955-12-15 Zeiss Carl Fa Evaporation device.
US3046936A (en) * 1958-06-04 1962-07-31 Nat Res Corp Improvement in vacuum coating apparatus comprising an ion trap for the electron gun thereof
FR1251425A (en) * 1959-12-10 1961-01-20 Improvements made to the self-regulating means of injection pumps for engines, in particular those liable to vary the injection advance
US3112391A (en) * 1961-10-27 1963-11-26 Welding Research Inc Zeroing system for electron gun
US3146335A (en) * 1962-03-29 1964-08-25 United Aircraft Corp Focusing device for electron beams
US3152238A (en) * 1962-05-11 1964-10-06 United Aircraft Corp Electron beam centering apparatus

Also Published As

Publication number Publication date
BE650653A (en) 1965-01-18
NL6408137A (en) 1965-01-20
US3244855A (en) 1966-04-05
FR1409439A (en) 1965-08-27
DE1295311B (en) 1969-05-14

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